# Patent

## Title
Method of making semiconductor devices

## Abstract

This is a divisional of co-pending application Ser. No. 07/647,454 filed on Jan. 29, 1991, now U.S. Pat. No. 5,122,853.

## Background
The present invention relates to a method of making an electronic component, especially a permeable base transistor (PBT), consisting of a composite of layers and having at least one controllable space-charge zone.

For use in superconductors and high speed data networks for information processing and transmission, integrated circuits have been developed in the form of high speed microwave components. Of special significance in these systems arc integrated circuits on GaAs chips, components based upon the GaAs/AlGaAs system, and like systems which have been employed to provide MESFET's and HEMT's, namely, field effect transistors in which the current transport is effected parallel to the surface of the chip.

An important speed-determining parameter, namely, the transit time beneath the gate, is given in such cases by the dimension of the lithographically generated lateral structuring of the gate (>0.2 micrometer).

As early as 1979, a permeable base transistor had been proposed generally in the form of a field effect transistor but having the current flow direction perpendicular to the chip surface so that the transit time under the gate, i.e. the gate length as a result of vertical structuring, was given by the thickness of the epitaxially deposited base layer.

By modern epitaxial methods, such as molecular beam epitaxy (MBE), metal-organic gas phase epitaxy or metal organic chemical vapor deposition (MOCVD) or metal-organic molecular beam epitaxy (MOMBE, CBE, GFMBE), metallic structured bases could be produced with layer thicknesses of the order of several atom layers.

In earlier systems, the metal base was structured with lateral fingers, between which current channels remained open and in which, at the metal-semiconductor junction, a Schottky barrier was formed to provide a depletion zone whose spatial extent could be varied by the bias voltage on the metal base. With a typical space-charge zone extent of about 1000 angstroms in the voltage free state, by appropriate choice of the bias voltage or potential one could provide an opening width of the base of 2000 to 5000 angstroms as controlled by the base bias or potential.

In the past the material from which this type of transistor was fabricated was silicon from which the base was grown in the form of metallic epitaxially grown nickel or cobalt silicides (NiSi.sub.2, CoSi.sub.2).

When GaAs is used as the basic material of the transistor, polycrystalline deposited metal structures were grown over the GaAs epitaxially from the side.

Furthermore, from time to time quasimetallic epitaxially grown ErAs layer structures were discussed as base materials. Breakthrough results have not been attained heretofore at least with a GaAs system.

It is, therefore, the principal object of the present invention to provide an electronic component of the aforedescribed type whose manufacture does not require an heteroepitaxial deposition of metallic components like silicides, ErAs or the like and which will permit a defect free overgrowing of the base.

Another object of the invention is to provide an improved permeable base transistor with more effective control of the space-charge zones or zone thereof.

Still another object of the invention is to provide a method of making an improved electronic component, especially an improved permeable base transistor.

These objects and others which will become apparent hereinafter are attained, in accordance with the invention with an electronic component, especially a permeable base transistor, having a multiplicity of layers forming a composite and at least one space-charge zone. According to the invention, the space-charge zone is formed as a pn-junction between a p-conducting layer and an n-conducting layer.

More particularly, an optical component according to the invention comprises a plurality of layers forming a homoepitaxial composite, having at least one voltage-controllable space-charge zone and having at least an emitter, a base and a collector, the space-charge zone being formed as a pn-junction between an n-conducting layer and a p-conducting layer.

The permeable base transistor, more particularly, can have a space-charge zone whose extent is controllable by a base bias voltage and can comprise:

a first GaAs-based n-conducting layer epitaxially grown on a GaAs(100) wafer and having a n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ;

a GaAs-based p.sup.+ -conducting layer epitaxially grown on the n-conducting layer and having a multi-finger configuration to define a base of the transistor with space-charge regions formed by pn-junctions around fingers of the p.sup.+ -conducting layer collectively forming a space-charge zone of an extent controllable by a bias voltage on the base, the p.sup.+ -conducting layer having a p.sup.+ -doping of carbon of substantially 10.sup.20 to 10.sup.21 cm.sup.-3 ;

a second GaAs-based n-conducting layer epitaxially grown on the p.sup.+ -conducting layer and upon the first n-conducting layer and having a n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ; and

respective terminals connected to the wafer to form a collector of the transistor, to the second n-conducting layer to form an emitter of the transistor, and to the base.

When the component is a GaAs integrated component, the p-conducting layer can be composed of carbon-doped GaAs while the n-conducting layer is also composed of GaAs, doped preferably with Si, SiH.sub.4, Si.sub.2 H.sub.6, S, H.sub.2 S.

By contrast with the above described prior art permeable base transistor, whose space-charge zone has a controllable extent dependent upon the metal-semiconductor contact forming the Schottky barrier, with the system of the invention, which can be referred to as a p and n permeable base transistor, the space-charge zone is formed by a p and n junction which, depending upon the n-doping of the GaAs base material (10.sup.17 to 10.sup.18 cm.sup.-3) can extend about 500 to 1000 angstroms into the layer, i.e. into the current carrying region. On the other side, i.e. in the quasimetallic p.sup.+ -base, the extent of the space-charge region corresponding to the high doping level is less than 50 angstroms.

Because of the strong p.sup.+ -doping, the base possesses quasimetallic conductivity properties space charge capacities in the region of the base p and n junction are comparable with those in the corresponding Schottky barrier prior art permeable base transistor (limited extent of the p.sup.+ space-charge zone).

With respect to the method aspect of this invention, the method comprises forming a permeable base transistor with at least one space-charge zone formed by a p-conducting layer bonded to an n-conducting layer to provide the pn-junction. The process of the present invention is distinguished by its simplicity since the permeable base transistor of the invention need only be composed of one material, namely GaAs with appropriate doping distinguishing the layers.

In general terms, therefore, in a method of making an electronic component comprising a plurality of layers forming a homoepitaxial composite having at least one voltage-controllable space-charge zone and having at least an emitter, a base and a collector, the improvement of the invention comprises the step of forming the space-charge zone as a pn-junction between an n-conducting layer and a p=conducting layer.

A more specific method of the invention comprises the steps of:

(a) depositing a first GaAs-based n-conducting layer epitaxially on a GaAs(100) wafer with an n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ;

(b) then depositing a GaAs-based p.sup.+ -conducting layer epitaxially on said n-conducting layer with a multi-finger configuration to define a base of said transistor with space-charge regions formed by pn-junctions around fingers of said p.sup.+ -conducting layer collectively forming a space-charge zone of an extent controllable by a bias voltage on said base, said p.sup.+ -conducting layer being formed with a p.sup.+ -doping of carbon of substantially 10.sup.20 to 10.sup.21 cm.sup.-3 ;

(c) thereafter depositing a second GaAs-based n-conducting layer epitaxially on said p.sup.+ -conducting layer and upon said first n-conducting layer with an a n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ; and

(d) applying respective terminals connected to said wafer to form a collector of said transistor, to said second n-conducting layer to form an emitter of said transistor, and to said base.

In the formation of GaAs integrated component of the invention, the p-conducting layer is composed of GaAs in which the p-(hole)-doping is effected by the incorporation of carbon in the GaAs base.

The p-doping with inclusion of carbon can be effected by the MOMBE deposition of GaAs by means of trimethylgallium (TMG) with a p-doping of from approximately 10.sup.20 to 10.sup.21 cm.sup.-3. By selection of the growth parameters, it is possible to generate a quasimetallic p-conducting layer of GaAs whose thickness is controlled to the MOMBE process to be of atomic dimensions (several angstroms).

As the base material for producing the n-conducting layer, GaAs is also selected, the n-doping of the GaAs being effected with elemental silicon or elemental sulfur as doping agents or the corresponding hydrides such as SiH.sub.4, Si.sub.2 H.sub.6, and H.sub.2 S. Trimethylgallium (TEG) can be used as a source material in the epitaxial growth of a pure GaAs and can be employed concurrently with these doping agents for the n-doping process.

The present process, utilizing GaAs as a basic material, yields a permeable base transistor whose permeable base is not constituted by a metallic component but, by contrast, has a high p-conducting (hole) character. The high p.sup.+ -conduction (p.apprxeq.10.sup.21 cm.sup.-3) is generated by carbon acceptors.

The above and other objects, features and advantages of my invention will become more readily apparent from the following description, reference being made to the accompanying highly diagrammatic drawing in which:

FIG. 1 is a cross sectional perspective view diagrammatically illustrating a prior art permeabIe base transistor;

FIG. 2 is a diagram illustrating a first step in the process of the invention;

FIG. 3 is a diagram illustrating a second step in the process;

FIG. 4 is a cross sectional view showing a third step in the process of making the permeable base transistor according to the invention;

FIG. 4a is a plan view of a mask utilized in this third step;

FIG. 5 is a cross sectional view illustrating a fourth step in the process; and

FIG. 6 is an illustration in cross section of the permeable base transistor after further steps in the process.

Turning first to FIG. 1, it can be seen that a permeable base transistor in accordance with prior art principles generally had a metallic base B formed with a lateral finger-like structure such that the fingers F define current channels SK between them from the emitter E through the base material GM to the collector C at the metal/semiconductor transitions, Schottky barriers were formed which constituted the depletion zones mentioned previously.

FIGS. 2 to 6 illustrate the principles of the present invention and especially the fabrication of a permeable base transistor in which, instead of the Schottky barriers of the metal/semiconductor junctions, p.sup.+ n-junctions form the space-charge zones of variable extent depending upon the base bias potential.

In FIG. 2, a GaAs(100) wafer 10 is formed, as the starting material for growing the permeable base transistor, with an upper layer Il of n-doped GaAs to a thickness in excess of 1000 angstroms by means of metal organic molecular beam epitaxy deposition (MOMBE) using TEG. This forms the collector region which can have an n-doping of about n=5.times.10.sup.17 cm.sup.-3. Metallorganic chemical vapor deposition (MOCVD) can also be used for this purpose.

In the next step, another GaAs layer 12 is epitaxially grown or deposited on the layer 11 (see FIG. 3). In this case, the MOMBE process is used to deposit GaAs to a thickness which can be between 1000 and 10000 angstroms or substantially less if desired, the MOMBE process being carried out with TMG. With a sufficiently high III/V ratio, this process gives rise to an extremely high p.sup.+ -doping which may be greater than 10.sup.20 cm.sup.3. This process can also be carried out by MOCVD with the use of hydrocarbons to similar high p-dopings. The reference to the III/V ratio is of course a reference to the atomic ratio of the gallium (representative of a Group III element of the Periodic Table to arsenic, representative of a Group V element of the Periodic Table).

The next step requires an interruption in the GaAs grown and an external lithographic structuring of the p.sup.+ -layer 12 by means of a mask as shown at 20 in FIG. 4a and which has fingers 21 and a terminal region 22, thereby producing fingers 13 and a land (i.e. an immodified region) 14 in the layer 12 to constitute the base of the transister (FIG. 4).

As can be seen from FIG. 5, the n-conducting layer 11 is then overgrown onto the p.sup.+ -layer 12 to produce another layer 15 of the n-doped GaAs, using TEG and a doping compound corresponding to the doping compound used in the first step, for example elemental elemental silicon to a doped level of approximately 5.times.10.sup.17 cm.sup.-3. The same MOMBE deposition technique used in the first step is repeated here.

Subsequently an n.sup.+ -layer 16 is epitaxially grown on the n-conducting layer 15 and can have an n-doping greater than or equal to 10.sup.19 cm.sup.-3. An emitter contact zone 17 can then be formed on this layer 16 while a collector contact zone 18 is applied to the n.sup.+ -layer 10. The n.sup.+ and n-layers 16 and 15 are etched away to expose the land 14 and a base terminal or contact 19 is applied thereto (see FIG. 6).

## Claims

1. In a method of making an electronic component comprising a plurality of layers forming a homoepitaxial structure, having at least one voltage-controllable space-charge zone and having at least an emitter, a base and a collector, the improvement which comprises the e step of forming said space-charge zone as a pn-junction between an n-conducting layer and fingers of a p-conducting layer by differently doping the same homoepitaxial material forming all of said layers.

2. The improvement defined in claim 1 wherein said p-conducting layer is epitaxially grown from GaAs as a base material.

3. The improvement defined in claim 2 wherein the GaAs of said p-conducting material is doped with carbon.

4. The improvement defined in claim 1 wherein said n-conducting layer is epitaxially grown from GaAs as a base material.

5. The improvement defined in claim 4 wherein said base material is doped with a substance selected from the group which consists of Si, SiH.sub.4, Si.sub.2 H.sub.6, S, H.sub.2 S and mixtures thereof.

6. A method of making a permeable base transistor having a space-charge zone whose extent is controllable by a base bias voltage, said method comprising the steps of: GaAs(100) wafer with an n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ; said n-conducting layer with a multi-finger configuration to define a base of said transistor with space-charge regions formed by pn-junctions around fingers of said p.sup.+ -conducting layer collectively forming a space-charge zone of an extent controllable by a bias voltage on said base, said p.sup.+ -conducting layer being formed with a p.sup.+ -doping of carbon of substantially 10.sup.20 to 10.sup.21 cm.sup.-3 ; epitaxially on said p.sup.+ -conducting layer and upon said first n-conducting layer with an a n-doping of substantially 10.sup.17 to 10.sup.18 cm.sup.-3 ; and collector of said transistor, to said second n-conducting layer to form an emitter of said transistor, and to said base.

7. The method defined in claim 6 wherein said n-conducting layers are doped with a substance selected from the group which consists of Si, SiH.sub.4, Si.sub.2 H.sub.6, S, H.sub.2 S and mixtures thereof.

8. The method defined in claim 6 wherein said p.sup.+ -conducting layer is deposited by metal-organic beam epitaxial deposition of GaAs with trimethylgallium.

9. The method defined in claim 6 wherein said n-conducting layer is deposited by metal-organic beam epitaxial deposition of GaAs with triethylgallium together with a substance selected from the group which consists of Si, SiH.sub.4, Si.sub.2 H.sub.6, S, H.sub.2 S and mixtures thereof.

10. The method defined in claim 6 wherein said p.sup.+ -conducting layer is deposited to a thickness of up to 10 angstroms.