# Patent

## Title
Isolation regions and their formation

## Abstract

A dielectric liner is formed in first and second trenches respectively in first and second portions of a substrate. A layer of material is formed overlying the dielectric liner so as to substantially concurrently substantially fill the first trench and partially fill the second trench. The layer of material is removed substantially concurrently from the first and second trenches to expose substantially all of the dielectric liner within the second trench and to form a plug of the material in the one or more first trenches. A second layer of dielectric material is formed substantially concurrently on the plug in the first trench and on the exposed portion of the dielectric liner in the second trench. The second layer of dielectric material substantially fills a portion of the first trench above the plug and the second trench.

## Background
TECHNICAL FIELD OF THE INVENTION
The present invention relates generally to isolation in integrated circuit devices and in particular the present invention relates to isolation regions and their formation.
BACKGROUND OF THE INVENTION
Integrated circuit devices are typically formed on semiconductor substrates using semiconductor fabrication methods. Isolation trenches are often formed in a substrate and filled with a dielectric, e.g., shallow trench isolation (STI), to provide voltage isolation between components of an integrated circuit device. The isolation trenches are often filled using a physical deposition process, e.g., with high-density plasma (HDP) oxides. However, in the quest for smaller integrated circuit devices, spacing requirements between components often require the isolation trenches to have relatively narrow widths, resulting in large aspect (or trench-depth-to-trench-width) ratios. The large aspect ratios often cause voids to form within the dielectric while filling these trenches using physical sputtering processes.
Memory device fabrication is an example where problems exist with filling large-aspect-ratio isolation trenches. In general, memory devices contain an array of memory cells for storing data, and row and column decoder circuits coupled to the array of memory cells for accessing the array of memory cells in response to an external address. During fabrication, the isolation trenches are formed between successive columns of memory cells of the array and are filled with dielectrics to electrically isolate the columns from each other. As memory devices continue to become smaller in size, the spacing between the columns is reduced and thus exacerbates the problems of void formation.
For the reasons stated above, and for other reasons stated below which will become apparent to those skilled in the art upon reading and understanding the present specification, there is a need in the art for alternative trench filling processes.
SUMMARY
The above-mentioned problems with trench filling and other problems are addressed by the present invention and will be understood by reading and studying the following specification.
For one embodiment, the invention provides a method of forming isolation regions in a substrate. The method includes forming a dielectric liner in one or more first trenches formed in a first portion of the substrate and in one or more second trenches formed in a second portion of the substrate, forming a layer of material that is selectively removable over the dielectric liner overlying the dielectric liner so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches, substantially concurrently removing the layer of material that is selectively removable over the dielectric liner from the one or more first trenches and the one or more second trenches so as to expose substantially all of the dielectric liner within the one or more second trenches and to form a plug of the material that is selectively removable over the dielectric liner overlying a portion of the dielectric liner within the one or more first trenches, and substantially concurrently forming a second layer of dielectric material on the plug in the one or more first trenches and on the exposed portion of the dielectric liner in the one or more second trenches, wherein the second layer of dielectric material substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches.
For another embodiment, the invention provides an integrated circuit device that has a trench that extends into a substrate. A first dielectric layer lines the trench and has a portion extending above an upper surface of the substrate. A plug is formed on the first dielectric layer in a lower portion of the trench. An upper surface of the plug is located below the upper surface of the substrate. A second dielectric layer is formed on the upper surface of the plug and the first dielectric layer in an upper portion of the trench. An upper surface of the second dielectric layer is substantially flush with an upper surface of the portion of the first dielectric layer that extends above the upper surface of the substrate.
Further embodiments of the invention include methods and apparatus of varying scope.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a block diagram illustration of an integrated circuit device, according to an embodiment of the invention.
FIG. 2 is a schematic of a NAND memory array in accordance with another embodiment of the invention.
FIG. 3 is a schematic of a NOR memory array in accordance with another embodiment of the invention.
FIG. 4 is an illustration of an exemplary memory module, according to another embodiment of the invention.
FIG. 5 is a top view of a portion of the memory device after several processing steps have occurred, according to an embodiment of the invention.
FIGS. 6A-6K are cross-sectional views of a portion of a row of a memory array during various stages of fabrication, according to another embodiment of the invention.



DETAILED DESCRIPTION
In the following detailed description of the invention, reference is made to the accompanying drawings that form a part hereof, and in which is shown, by way of illustration, specific embodiments in which the invention may be practiced. In the drawings, like numerals describe substantially similar components throughout the several views. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural, logical, and electrical changes may be made without departing from the scope of the present invention. The term wafer or substrate used in the following description includes any base semiconductor structure. Both are to be understood as including silicon-on-sapphire (SOS) technology, silicon-on-insulator (SOI) technology, thin film transistor (TFT) technology, doped and undoped semiconductors, epitaxial layers of a silicon supported by a base semiconductor structure, as well as other semiconductor structures well known to one skilled in the art. Furthermore, when reference is made to a wafer or substrate in the following description, previous process steps may have been utilized to form regions/junctions in the base semiconductor structure, and terms wafer or substrate include the underlying layers containing such regions/junctions. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims and equivalents thereof.
FIG. 1 is a block diagram illustration of an integrated circuit device, such as a processor, a memory device 102, etc., according to an embodiment of the invention. The memory device 102 may be fabricated as semiconductor device on a semiconductor substrate. Examples of memory devices include NAND, NOR, or NROM flash memory devices, dynamic random access memory devices (DRAMs), static random access memory devices (SRAMs), or the like.
For one embodiment, memory device 102 includes an array of flash memory cells 104 and a region 105 peripheral to memory array 104 that includes an address decoder 106, row access circuitry 108, column access circuitry 110, control circuitry 112, Input/Output (I/O) circuitry 114, and an address buffer 116. The row access circuitry 108 and column access circuitry 110 may include high-voltage circuitry, such as high-voltage pumps. The device of FIG. 1 includes isolation regions formed in accordance with an embodiment of the invention, e.g., between region 105 and memory 104 as well as within memory array 104. It will be appreciated by those skilled in the art that various integrated circuit devices include passive elements, such as capacitors, and active elements, such as transistors, and that for some embodiments such active and passive elements are formed in the periphery.
Memory device 102 may be coupled an external microprocessor 120, or memory controller, for memory accessing as part of an electronic system. The memory device 102 receives control signals from the processor 120 over a control link 122. The memory cells are used to store data that are accessed via a data (DQ) link 124. Address signals are received via an address link 126 that are decoded at address decoder 106 to access the memory array 104. Address buffer circuit 1 16 latches the address signals. The memory cells are accessed in response to the control signals and the address signals. It will be appreciated by those skilled in the art that additional circuitry and control signals can be provided, and that the memory device of FIG. 1 has been simplified to help focus on the invention.
The memory array 104 includes memory cells arranged in row and column fashion. For one embodiment, each of the memory cells includes a floating-gate field-effect transistor capable of holding a charge. The cells may be grouped into blocks. Each of the cells within a block can be electrically programmed on an individual basis by charging the floating gate. The charge can be removed from the floating gate by a block erase operation.
FIG. 2 is a schematic of a NAND memory array 200 as a portion of memory array 104 of FIG. 1 in accordance with another embodiment of the invention. As shown in FIG. 2, the memory array 200 includes word lines 2021 to 202N and intersecting local bit lines 2041 to 204M. For ease of addressing in the digital environment, the number of word lines 202 and the number of bit lines 204 are each some power of two, e.g., 256 word lines 202 by 4,096 bit lines 204. The local bit lines 204 are coupled to global bit lines (not shown) in a many-to-one relationship.
Memory array 200 includes NAND strings 2061 to 206M. Each NAND string includes floating-gate transistors 2081 to 208N, each located at an intersection of a word line 202 and a local bit line 204. The floating-gate transistors 208 represent non-volatile memory cells for storage of data. The floating-gate transistors 208 of each NAND string 206 are connected in series, source to drain, between a source select gate 210, e.g., a field-effect transistor (FET), and a drain select gate 212, e.g., an FET. Each source select gate 210 is located at an intersection of a local bit line 204 and a source select line 214, while each drain select gate 212 is located at an intersection of a local bit line 204 and a drain select line 215.
A source of each source select gate 210 is connected to a common source line 216. The drain of each source select gate 210 is connected to the source of the first floating-gate transistor 208 of the corresponding NAND string 206. For example, the drain of source select gate 2101 is connected to the source of floating-gate transistor 2081 of the corresponding NAND string 2061. A control gate 220 of each source select gate 210 is connected to source select line 214.
The drain of each drain select gate 212 is connected to a local bit line 204 for the corresponding NAND string at a drain contact 228. For example, the drain of drain select gate 2121 is connected to the local bit line 2041 for the corresponding NAND string 2061 at drain contact 2281. The source of each drain select gate 212 is connected to the drain of the last floating-gate transistor 208 of the corresponding NAND string 206. For example, the source of drain select gate 2121 is connected to the drain of floating-gate transistor 208N of the corresponding NAND string 2061.
Typical construction of floating-gate transistors 208 includes a source 230 and a drain 232, a floating gate 234, and a control gate 236, as shown in FIG. 2. Floating-gate transistors 208 have their control gates 236 coupled to a word line 202. A column of the floating-gate transistors 208 are those NAND strings 206 coupled to a given local bit line 204. A row of the floating-gate transistors 208 are those transistors commonly coupled to a given word line 202. Memory array 200 includes isolation regions formed in accordance with embodiments of the invention, e.g., between columns of memory array 200.
FIG. 3 is a schematic of a NOR memory array 300 as a portion of memory array 104 of FIG. 1 in accordance with another embodiment of the invention. Memory array 300 includes word lines 3021 to 302p and intersecting local bit lines 3041 to 304Q. For ease of addressing in the digital environment, the number of word lines 302 and the number of bit lines 304 are each some power of two, e.g., 256 word lines 302 by 4,096 bit lines 304. The local bit lines 304 are coupled to global bit lines (not shown) in a many-to-one relationship.
Floating-gate transistors 308 are located at each intersection of a word line 302 and a local bit line 304. The floating-gate transistors 308 represent non-volatile memory cells for storage of data. Typical construction of such floating-gate transistors 308 includes a source 310 and a drain 312, a floating gate 314, and a control gate 316.
Floating-gate transistors 308 having their control gates 316 coupled to a word line 302 typically share a common source depicted as array source 318. As shown in FIG. 3, floating-gate transistors 308 coupled to two adjacent word lines 302 may share the same array source 318. Floating-gate transistors 308 have their drains 312 coupled to a local bit line 304. A column of the floating-gate transistors 308 includes those transistors commonly coupled to a given local bit line 304. A row of the floating-gate transistors 308 includes those transistors commonly coupled to a given word line 302. Memory array 300 includes isolation regions formed in accordance with embodiments of the invention, e.g., between columns of memory array 300.
To reduce problems associated with high resistance levels in the array source 318, the array source 318 is regularly coupled to a metal or other highly conductive line to provide a low-resistance path to ground. The array ground 320 serves as this low-resistance path.
FIG. 4 is an illustration of an exemplary memory module 400. Memory module 400 is illustrated as a memory card, although the concepts discussed with reference to memory module 400 are applicable to other types of removable or portable memory, e.g., USB flash drives, and are intended to be within the scope of “memory module” as used herein. In addition, although one example form factor is depicted in FIG. 4, these concepts are applicable to other form factors as well.
In some embodiments, memory module 400 will include a housing 405 (as depicted) to enclose one or more memory devices 410, though such a housing is not essential to all devices or device applications. At least one memory device 410 may be a NAND, NOR, or NROM flash memory device, dynamic random access memory device (DRAM), static random access memory device (SRAM), or the like having a memory array formed in accordance with the methods of the invention. At least one memory device 410 includes isolation regions formed in accordance with the invention. Where present, the housing 405 includes one or more contacts 415 for communication with a host device. Examples of host devices include digital cameras, digital recording and playback devices, PDAs, personal computers, memory card readers, interface hubs and the like. For some embodiments, the contacts 415 are in the form of a standardized interface. For example, with a USB flash drive, the contacts 415 might be in the form of a USB Type-A male connector. For some embodiments, the contacts 415 are in the form of a semi-proprietary interface, such as might be found on CompactFlashTM memory cards licensed by SanDisk Corporation, Memory StickTM memory cards licensed by Sony Corporation, SD Secure DigitalTM memory cards licensed by Toshiba Corporation and the like. In general, however, contacts 415 provide an interface for passing control, address and/or data signals between the memory module 400 and a host having compatible receptors for the contacts 415.
The memory module 400 may optionally include additional circuitry 420 which may be one or more integrated circuits and/or discrete components. For some embodiments, the additional circuitry 420 may include a memory controller for controlling access across multiple memory devices 410 and/or for providing a translation layer between an external host and a memory device 410. For example, there may not be a one-to-one correspondence between the number of contacts 415 and a number of I/O connections to the one or more memory devices 410. Thus, a memory controller could selectively couple an I/O connection (not shown in FIG. 4) of a memory device 410 to receive the appropriate signal at the appropriate I/O connection at the appropriate time or to provide the appropriate signal at the appropriate contact 415 at the appropriate time. Similarly, the communication protocol between a host and the memory module 400 may be different than what is required for access of a memory device 410. A memory controller could then translate the command sequences received from a host into the appropriate command sequences to achieve the desired access to the memory device 410. Such translation may further include changes in signal voltage levels in addition to command sequences.
The additional circuitry 420 may further include functionality unrelated to control of a memory device 410 such as logic functions as might be performed by an ASIC (application specific integrated circuit). Also, the additional circuitry 420 may include circuitry to restrict read or write access to the memory module 400, such as password protection, biometrics or the like. The additional circuitry 420 may include circuitry to indicate a status of the memory module 400. For example, the additional circuitry 420 may include functionality to determine whether power is being supplied to the memory module 400 and whether the memory module 400 is currently being accessed, and to display an indication of its status, such as a solid light while powered and a flashing light while being accessed. The additional circuitry 420 may further include passive devices, such as decoupling capacitors to help regulate power requirements within the memory module 400.
FIG. 5 is a top view of a portion of the memory device after several processing steps have occurred, according to an embodiment of the invention. FIG. 6A is a cross-sectional view of a row of the memory device taken along line 6A-6A of FIG. 5. FIGS. 6A-6K are cross sectional views during various stages of fabrication, according to another embodiment of the invention. For one embodiment, the memory device corresponds to memory device 102 of FIG. 1 or a memory device 410 of FIG. 4. The structure of FIGS. 5 and 6A includes an array portion where an array of memory cells, such as of memory array 104 of memory device 102 of FIG. 1, memory array 200 of FIG. 2, memory array of FIG. 3, or a memory array of a memory device 410 of FIG. 4, will be formed. The structure of FIGS. 5 and 6A further includes a periphery, such as the region 105 of memory device 102, where various integrated circuit elements, including passive elements, such as capacitors, and active elements, such as transistors, e.g., of row access circuitry 108 and column access circuitry 110 of memory 102 of FIG. 1, will be formed. For one embodiment, the active elements include field-effect transistors.
Formation of the type of structure depicted in FIGS. 5 and 6A is well known and will not be detailed herein. In general, however, the array and the periphery are formed concurrently on a semiconductor substrate 600, such as a silicon-containing substrate, e.g., a monocrystalline silicon substrate, a P-type monocrystalline silicon substrate, etc. A sacrificial layer 604, such as a sacrificial dielectric layer, e.g., a sacrificial oxide layer, is formed on substrate 600. For one embodiment, layer 604 is thermally grown on substrate 600. A hard mask (or cap) layer 608, such as a layer of silicon nitride, is formed overlying sacrificial layer 604.
Trenches 610 are formed in the array portion and trenches 612 are formed in the periphery by patterning cap layer 608 and removing portions of layer 604 and of substrate 600 exposed by patterned cap layer 608. Trenches 610 and 612 respectively define active regions 614 in the array portion and active regions 616 in the periphery. Trenches 610 and 612 will be filled with dielectric materials, as described below, to form isolation regions, such as shallow trench isolation (STI) regions. Optionally, for one embodiment, trenches 610 and 612 may be tapered near their bottoms, as shown in FIG. 6A, to improve filling thereof with the dielectric materials.
An optional dielectric layer 622 may be formed on portions of the substrate 600 exposed by the trenches 610 and 612 so as to line the portion of trenches 610 and 612 formed in substrate 600, as shown in FIG. 6B. For another embodiment, dielectric layer 622 is an oxide liner layer, such as a thermal oxide, e.g., a deposited high-temperature thermal oxide or a thermally grown oxide. In FIG. 6C, a dielectric layer 624, such as a conformal oxide, e.g., silicon dioxide (SiO2), TEOS (tetraethylorthosilicate), etc., is formed overlying cap layer 608, layer 604, and dielectric layer 622.
In FIG. 6D, a layer 626 of material that is selectively removable over the material of dielectric layer 624 is formed, e.g., using chemical vapor deposition, etc., overlying dielectric layer 624 so as to substantially fill the trenches in the array region. A material that is selectively removable over the material of dielectric layer 624 may be defined as a material that has a higher removal rate, such as a wet or dry etch rate, over the material of dielectric layer 624. For one embodiment, a ratio of the removal rate of the material of layer 626 to the removal rate of the material of dielectric layer 624 is about 300:1. Suitable materials for layer 626 may include dielectric materials, such as nitrides or oxides, e.g., alumina oxide (Al2O3), or semiconductor materials, such as amorphous polysilicon. For some embodiments, a portion of dielectric layer 624 may be optionally removed, e.g., using a light etch, as a clean-up step prior to forming layer 626. Note that since the trenches in the periphery have a larger volume than the trenches in the array portion, the material of layer 626 lines the trenches in the periphery, while filling the trenches in the array portion. Also note that layer 626 is formed substantially concurrently in the periphery and array portion. For embodiments where layer 626 is a layer of semiconductor material, the semiconductor may be oxidized so to convert it to dielectric form. For one embodiment, the amorphous polysilicon is deposited at temperature lower than about 520° C.
In FIG. 6E, layer 626 is removed from the array portion and the periphery substantially concurrently, e.g., by etching. Since the trenches in the array portion have a higher aspect ratio (depth to width) than the trenches in the periphery, layer 626 is removed at a higher rate from the periphery trenches than from the array trenches by the substantially concurrent removal process. Therefore, when the layer 626 is substantially removed from the periphery trenches, a portion of layer 626 remains in the array trenches, forming a plug 628 of the material of layer 626 at the lower portion of the array trenches.
Plug 628 may act to plug a seam 630 that may form in dielectric layers 622 and 624 during their formation in the array trenches because of their rather large aspect ratio. Note that seam 630 may typically form at or near the lowermost portion of dielectric layers 622 and 624 and extend to substrate 600. Plug 628 acts to prevent seam 630 from being opened up by subsequent processing steps, such as subsequent etching. Opening up of seams 630 can lead to the formation of voids in dielectric layers 622 and 624, and thus subsequently formed isolation regions. Therefore, plugs 628 act to prevent the formation of these voids.
In FIG. 6F, a dielectric layer 632 is formed overlying the structure of FIG. 6E. For one embodiment, dielectric layer 632 is a high-density plasma dielectric, such as a high-density plasma oxide, e.g., silicon dioxide, deposited using a high-density plasma (HDP) process. For one embodiment, an optional layer of dielectric material, such as an oxide, may be formed on dielectric layer 624 and plug 628 prior to forming dielectric layer 632. For another embodiment, dielectric layer 624 is partially or completely removed, e.g., using a wet etch, such as a wet oxide etch, before forming dielectric layer 632. This acts to decrease the aspect (or trench-depth-to-trench-width) ratios of the trenches, thereby assisting the formation of dielectric layer 632 within in the trenches, e.g., by reducing the likelihood of void formation.
In FIG. 6G, a portion of dielectric layer 632 is removed, e.g., by chemical mechanical planarization (CMP), stopping on dielectric layer 608 so that the remaining portion of dielectric layer 632 forms a dielectric plug 634 having an upper surface substantially flush with dielectric layer 608. Note that dielectric plugs 634 overlie plug 628 and dielectric layers 624 and 622 in the array portion to form isolation regions 636 in the array portion. Moreover, dielectric plugs 634 overlie dielectric layers 624 and 622 in the periphery to form isolation regions 638 in the periphery.
Note that for embodiments where plugs 628 of isolation regions 636 are of an untreated semiconductor material, such as amorpous polysilicon, the plugs 628 have little or no impact the electrical isolation properties of isolation regions 636. This is because plugs 628 are at a relatively large distance from the active regions 614.
In FIG. 6H, cap layer 608 and layer 604 are removed, such as by etching, e.g., using a wet or dry etch, to expose portion of substrate 600. A dielectric layer 639 e.g., an oxide layer, such as a thermally grown oxide layer, is formed overlying the exposed portions of substrate 600 in the array portion and in the periphery. A conductive layer 640, e.g., a layer of doped polysilicon, is formed overlying dielectric layer 639 in the array portion and in the periphery and overlying isolation regions 636 in the array portion and isolation regions 638 in the periphery. In FIG. 61, a portion of conductive layer 640 is removed, e.g., by CMP, stopping on plugs 634 so that an upper surface of remaining portions of conductive layer 640 are substantially flush with upper surfaces of isolation regions 636 and 638.
In FIG. 6J, a portion of isolation regions 636 and 638 is removed, such as by etching in an etch-back process, so that upper surfaces of isolation regions 636 and 638 are recessed below an upper surface of conductive layer 640. Note that dielectric layer 639 forms a tunnel dielectric layer and conductive layer 640 forms a floating gate layer of gate stacks 641 of future memory devices in the array portion. Dielectric layer 639 forms a gate dielectric layer and conductive layer 640 forms at least a portion of a control gate layer, for one embodiment, of gate stacks 643 of future active devices, such as field-effect transistors, in the periphery.
In FIG. 6K, a dielectric layer 642 is formed on conductive layer 640 of gate stacks 641 and 643 and the exposed upper surfaces of isolation regions 636 and 638, and a conductive layer 644 is formed overlying dielectric layer 642. For one embodiment, dielectric layer 642 forms an interlayer dielectric layer of the future memory cells. For another embodiment, dielectric layer 642 may be one or more layers of dielectric material. For example, dielectric layer 642 could be of a multi-layer dielectric material commonly referred to as ONO (oxide-nitride-oxide). Other dielectric materials may be substituted for the ONO, such as tantalum oxide, barium strontium titanate, silicon nitride, and other materials providing dielectric properties.
For one embodiment, conductive layer 644 forms a control gate layer (or word line) of memory cells 650, e.g., floating-gate memory cells (or floating-gate transistors), in the array portion and may form a portion of a control gate layer of field-effect transistors 660 in the periphery. Conductive layer 644 is generally one or more layers of conductive material. For one embodiment, conductive layer 644 contains a conductively-doped polysilicon. For a further embodiment, conductive layer 644 includes a metal-containing layer overlying a polysilicon layer, e.g., a refractory metal silicide layer formed on a conductively-doped polysilicon layer. The metals of chromium (Cr), cobalt (Co), hafnium (Hf), molybdenum (Mo), niobium (Nb), tantalum (Ta), titanium (Ti), tungsten (W), vanadium (V) and zirconium (Zr) are generally recognized as refractory metals. For another embodiment, conductive layer 644 contains multiple metal-containing layers, e.g., a titanium nitride (TiN) barrier layer on dielectric layer 642, a titanium (Ti) adhesion layer on the barrier layer, and a tungsten (W) layer on the adhesion layer. An insulative cap layer (not shown) is often formed overlying conductive layer 644 to protect and isolate conductive layer 644 from further processing.
For some embodiments, the conductive layer 644 and the conductive layer 640 of field-effect transistors 660 may be strapped (or shorted) together so that the shorted together conductive layers 644 and 640 form control gates of the field-effect transistors 660. For another embodiment, the conductive layers 644 and 640 are not shorted together, and conductive layer 640 forms the control gate of the field-effect transistors 660. Note that field-effect transistors 660, for one embodiment, form a portion of the logic of row access circuitry 108 and/or column access circuitry 110 of the memory device 102 of FIG. 1 for accessing rows and columns of the memory array 104.
It is noted that FIGS. 6A-6K depict a portion of a row of memory cells, such as a row 202 of FIG. 2 or a row 302 of FIG. 3, running parallel to a face plane of the drawings. Columns of memory cells, separated by the isolation regions 636, run perpendicular to the drawings, with source and drain regions formed at opposing ends, one above the face plane of the figures and one below the face plane of the figures. Isolation regions 636 act to electrically isolate memory cells of adjacent columns from each other. An isolation region 638 adjacent the array portion acts to electrically isolate the periphery devices, e.g., field-effect transistors 660, from the memory array. Another isolation region 638 disposed between adjacent periphery devices, e.g., field-effect transistors 660, acts to electrically isolate these devices from each other. It is noted that FIGS. 6A-6K can depict either a NOR-type memory device or a NAND-type memory device, with the differences occurring in the column direction in manners that are well understood in the art of memory fabrication.
CONCLUSION
Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that any arrangement that is calculated to achieve the same purpose may be substituted for the specific embodiments shown. Many adaptations of the invention will be apparent to those of ordinary skill in the art. Accordingly, this application is intended to cover any adaptations or variations of the invention. It is manifestly intended that this invention be limited only by the following claims and equivalents thereof.

## Claims

1. A method of forming isolation regions in a substrate, comprising:
forming a dielectric liner in one or more first trenches formed in a first portion of the substrate and in one or more second trenches formed in a second portion of the substrate;
forming a layer of material that is selectively removable over the dielectric liner overlying the dielectric liner so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the dielectric liner from the one or more first trenches and the one or more second trenches so as to expose the dielectric liner at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the dielectric liner overlying a portion of the dielectric liner within the one or more first trenches; and
substantially concurrently forming a layer of dielectric material on the plug in the one or more first trenches and on the exposed dielectric liner at the bottom of the one or more second trenches, wherein the second layer of dielectric material substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches.

2. The method of claim 1, wherein the one or more second trenches have a larger volume than the one or more first trenches.

3. The method of claim 1, wherein the dielectric liner comprises two layers of dielectric material.

4. The method of claim 1, wherein the dielectric liner comprises TEOS.

5. The method of claim 1, wherein forming a second layer of dielectric material comprises a high-density plasma process.

6. The method of claim 1, wherein the second layer of dielectric material is a high-density plasma oxide.

7. The method of claim 1, wherein the plug acts to plug a seam in the dielectric liner.

8. The method of claim 1, wherein the layer of material that is selectively removable over the dielectric liner is a layer of dielectric or semiconductor material.

9. The method of claim 1, wherein the layer of material that is selectively removable over the dielectric liner is selectively removable over TEOS.

10. The method of claim 1, wherein the layer of material that is selectively removable over the dielectric liner is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

11. The method of claim 1, wherein forming a layer of material that is selectively removable over the dielectric liner comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

12. The method of claim 1 further comprises removing at least a portion of the dielectric liner before forming the second layer of dielectric material.

13. The method of claim 3, wherein a first one of the two layers of dielectric material of the dielectric liner adjoins the substrate and is selected from the group consisting of an oxide, a thermally grown oxide and a deposited high-temperature thermal oxide.

14. The method of claim 13, wherein a second one of the two layers of dielectric material of the dielectric liner overlies the first one of the two layers of dielectric material of the dielectric liner and is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

15. A method of forming isolation regions in a substrate, comprising:
lining one or more first trenches formed in a first portion of the substrate and one or more second trenches formed in a second portion of the substrate with a first dielectric layer;
forming a second dielectric layer overlying the first dielectric layer;
forming a layer of material that is selectively removable over the second dielectric layer overlying the second dielectric layer so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the second dielectric layer from the one or more first trenches and the one or more second trenches so as to expose the second dielectric layer at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the second dielectric layer overlying a portion of the second dielectric layer within the one or more first trenches; and
substantially concurrently forming a third dielectric layer on the plug in the one or more first trenches and on the exposed second dielectric layer at the bottom of the one or more second trenches, wherein the third dielectric layer substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches.

16. The method of claim 15, wherein the first dielectric layer adjoins the substrate.

17. The method of claim 15, wherein the first dielectric layer is selected from the group consisting of an oxide, a thermally grown oxide, and a deposited high-temperature thermal oxide.

18. The method of claim 15, wherein the second dielectric layer is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

19. The method of claim 15, wherein forming a third dielectric layer comprises a high-density plasma process.

20. The method of claim 15, wherein the third dielectric layer is a high-density plasma oxide.

21. The method of claim 15, wherein the plug acts to plug a seam in the first and second dielectric layers.

22. The method of claim 15, wherein the layer of material that is selectively removable over the second dielectric layer is of a dielectric or a semiconductor material.

23. The method of claim 15, wherein the layer of material that is selectively removable over the second dielectric layer is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

24. The method of claim 15, wherein forming a layer of material that is selectively removable over the second dielectric layer comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

25. A method of forming isolation regions in a semiconductor substrate of a memory device, comprising:
forming one or more first trenches through a first dielectric layer overlying the semiconductor substrate and a cap layer overlying the first dielectric layer and into a first portion of the semiconductor substrate;
forming one or more second trenches through the first dielectric layer and the cap layer and into a second portion of the semiconductor substrate, wherein the one or more second trenches have a larger volume than the one or more first trenches;
forming a dielectric liner in the one or more first trenches and in the one or more second trenches;
forming a layer of material that is selectively removable over the dielectric liner overlying the dielectric liner so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the dielectric liner from the one or more first trenches and the one or more second trenches so as to expose the dielectric liner at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the dielectric liner overlying a portion of the dielectric liner within the one or more first trenches; and
substantially concurrently forming a second layer of dielectric material on the plug in the one or more first trenches and on the exposed dielectric liner at the bottom of the one or more second trenches, wherein the second layer of dielectric material substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches.

26. The method of claim 25, wherein the dielectric liner comprises two layers of dielectric material.

27. The method of claim 25, wherein the dielectric liner comprises TEOS.

28. The method of claim 25, wherein forming a second layer of dielectric material comprises a high-density plasma process.

29. The method of claim 25, wherein the second layer of dielectric material is a high-density plasma oxide.

30. The method of claim 25, wherein the plug acts to plug a seam in the dielectric liner.

31. The method of claim 25, wherein the layer of material that is selectively removable over the dielectric liner is a dielectric or semiconductor material.

32. The method of claim 25, wherein the layer of material that is selectively removable over the dielectric liner is selectively removable over TEOS.

33. The method of claim 25, wherein the layer of material that is selectively removable over the dielectric liner is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

34. The method of claim 25, wherein forming a layer of material that is selectively removable over the dielectric liner comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

35. The method of claim 25, wherein the cap layer is of nitride.

36. The method of claim 25, wherein the first dielectric layer is a sacrificial oxide layer.

37. The method of claim 25, wherein forming a second layer of dielectric material comprises forming the second layer of dielectric material substantially flush with the cap layer.

38. The method of claim 26, wherein a first one of the two layers of dielectric material of the dielectric liner adjoins the substrate and is selected from the group consisting of an oxide, a thermally grown oxide and a deposited high-temperature thermal oxide.

39. The method of claim 27, wherein a second one of the two layers of dielectric material of the dielectric liner overlies the first one of the two layers of dielectric material of the dielectric liner and is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

40. The method of claim 37, wherein forming the second layer of dielectric material substantially flush with the cap layer comprises chemical mechanical planarization.

41. A method of forming isolation regions in a semiconductor substrate of a memory device, comprising:
forming one or more first trenches through a first dielectric layer overlying the semiconductor substrate and a cap layer overlying the first dielectric layer and into a first portion of the semiconductor substrate;
forming one or more second trenches through the first dielectric layer and the cap layer and into a second portion of the semiconductor substrate, wherein the one or more second trenches have a larger volume than the one or more first trenches;
lining the one or more first trenches and the one or more second trenches with a second dielectric layer;
forming a third dielectric layer overlying the second dielectric layer;
forming a layer of material that is selectively removable over the third dielectric layer overlying the third dielectric layer so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the third dielectric layer from the one or more first trenches and the one or more second trenches so as to expose the third dielectric layer at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the third dielectric layer overlying a portion of the third dielectric layer within the one or more first trenches; and
substantially concurrently forming a fourth dielectric layer on the plug in the one or more first trenches and on the exposed third dielectric layer at the bottom of the one or more second trenches, wherein the fourth dielectric layer substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches.

42. The method of claim 41, wherein the second dielectric layer adjoins the substrate.

43. The method of claim 41, wherein the second dielectric layer is selected from the group consisting of an oxide, a thermally grown oxide, and a deposited high-temperature thermal oxide.

44. The method of claim 41, wherein the third dielectric layer is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

45. The method of claim 41, wherein forming a fourth dielectric layer comprises a high-density plasma process.

46. The method of claim 41, wherein the fourth dielectric layer is a high-density plasma oxide.

47. The method of claim 41, wherein the plug acts to plug a seam in the second and third dielectric layers.

48. The method of claim 41, wherein the layer of material that is selectively removable over the third dielectric layer is of a dielectric material or a semiconductor material.

49. The method of claim 41, wherein the layer of material that is selectively removable over the third dielectric layer is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

50. The method of claim 41, wherein forming a layer of material that is selectively removable over the third dielectric layer comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

51. The method of claim 41, wherein the cap layer is of nitride.

52. The method of claim 41, wherein the first dielectric layer is a sacrificial oxide layer.

53. The method of claim 41, wherein forming a second layer of dielectric material comprises forming the second layer of dielectric material substantially flush with the cap layer.

54. The method of claim 53, wherein forming the second layer of dielectric material substantially flush with the cap layer comprises chemical mechanical planarization.

55. A method of forming a memory device, comprising:
forming a first dielectric layer overlying first and second portions of a semiconductor substrate;
forming a cap layer overlying the first dielectric layer;
forming one or more first isolation regions in the first portion of a semiconductor substrate and one or more second isolation regions in the second portion of a semiconductor substrate substantially concurrently, wherein forming the one or more first isolation regions and the one or more second isolation regions, comprises:
forming one or more first trenches through the first dielectric layer and the cap layer and into the first portion of the semiconductor substrate, wherein the one or more first trenches correspond to the one or more first isolation regions;
forming one or more second trenches through the first dielectric layer and the cap layer and into a second portion of the semiconductor substrate, wherein the one or more second trenches have a larger volume than the one or more first trenches and wherein the one or more second trenches correspond to the one or more second isolation regions;
forming a dielectric liner in the one or more first trenches and in the one or more second trenches;
forming a layer of material that is selectively removable over the dielectric liner overlying the dielectric liner so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the dielectric liner from the one or more first trenches and the one or more second trenches so as to expose the dielectric liner at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the dielectric liner overlying a portion of the dielectric liner within the one or more first trenches; and
substantially concurrently forming a second layer of dielectric material on the plug in the one or more first trenches and on the exposed dielectric liner at the bottom of the one or more second trenches, wherein the second layer of dielectric material substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches;

removing the cap layer and first dielectric layer to expose portions of the first and second portions of the semiconductor substrate;
forming a third dielectric layer overlying the exposed portions of the first and second portions of the semiconductor substrate;
forming a first conductive layer overlying the third dielectric layer;
forming a fourth dielectric layer overlying the first conductive layer, the one or more first isolation regions, and the one or more second isolation regions; and
forming a second conductive layer overlying the fourth dielectric layer.

56. The method of claim 55, wherein the dielectric liner comprises two layers of dielectric material.

57. The method of claim 55, wherein the dielectric liner comprises TEOS.

58. The method of claim 55, wherein forming a second layer of dielectric material comprises a high-density plasma process.

59. The method of claim 55, wherein the second layer of dielectric material is a high-density plasma oxide.

60. The method of claim 55, wherein the plug acts to plug a seam in the dielectric liner.

61. The method of claim 55, wherein the layer of material that is selectively removable over the dielectric liner is of a dielectric or semiconductor material.

62. The method of claim 55, wherein the layer of material that is selectively removable over the dielectric liner is selectively removable over TEOS.

63. The method of claim 55, wherein the layer of material that is selectively removable over the dielectric liner is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

64. The method of claim 55, wherein forming a layer of material that is selectively removable over the dielectric liner comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

65. The method of claim 55, wherein the cap layer is of nitride.

66. The method of claim 55, wherein the third dielectric layer forms a tunnel dielectric layer of memory cells on the first portion of the semiconductor substrate and a gate dielectric layer of active devices on the second portion of the semiconductor substrate.

67. The method of claim 55, wherein the first conductive layer forms a floating gate layer of memory cells on the first portion of the semiconductor substrate and at least a portion of a control gate layer of active devices on the second portion of the semiconductor substrate.

68. The method of claim 55, wherein the second conductive layer forms a control gate layer of memory cells on the first portion of the semiconductor substrate and at least a portion of a control gate layer of active devices on the second portion of the semiconductor substrate.

69. The method of claim 55 further comprises recessing the one or more first isolation regions and the one or more second isolation regions below an upper surface of the first conductive layer before forming the fourth dielectric layer.

70. The method of claim 55, wherein the second conductive layer is selected from the group consisting of refractory metals, refractory metal silicides, and a layer having a metal-containing barrier layer, a metal-containing adhesion layer, and a metal layer.

71. The method of claim 55, wherein the second dielectric layer is selected from the group consisting of one or more layers of dielectric material, tantalum oxide, barium strontium titanate, silicon nitride, and oxide-nitride-oxide.

72. The method of claim 55, wherein the first conductive layer is of polysilicon.

73. The method of claim 56, wherein a first one of the two layers of dielectric material of the dielectric liner adjoins the substrate and is selected from the group consisting of an oxide, a thermally grown oxide and a deposited high-temperature thermal oxide.

74. The method of claim 73, wherein a second one of the two layers of dielectric material of the dielectric liner overlies the first one of the two layers of dielectric material of the dielectric liner and is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

75. A method of forming a memory device, comprising:
forming a first dielectric layer overlying first and second portions of a semiconductor substrate;
forming a cap layer overlying the first dielectric layer;
forming one or more first isolation regions in the first portion of the semiconductor substrate and one or more second isolation regions in the second portion of the semiconductor substrate substantially concurrently, wherein forming the one or more first isolation regions and the one or more second isolation regions, comprises:
lining the one or more first trenches and the one or more second trenches with a second dielectric layer;
forming a third dielectric layer overlying the second dielectric layer;
forming a layer of material that is selectively removable over the third dielectric layer overlying the third dielectric layer so as to substantially concurrently substantially fill a remaining portion of the one or more first trenches and partially fill a remaining portion of the one or more second trenches;
in a single process step, substantially concurrently removing the layer of material that is selectively removable over the third dielectric layer from the one or more first trenches and the one or more second trenches so as to expose the third dielectric layer at a bottom of the one or more second trenches and to form a plug of the material that is selectively removable over the third dielectric layer overlying a portion of the third dielectric layer within the one or more first trenches; and
substantially concurrently forming a fourth dielectric layer on the plug in the one or more first trenches and on the exposed third dielectric layer at the bottom of the one or more second trenches, wherein the fourth dielectric layer substantially fills a portion of the one or more first trenches above the plug and the one or more second trenches;

removing the first dielectric layer and the cap layer to expose portions of the first and second portions of the semiconductor substrate;
forming a fifth dielectric layer overlying the exposed portions of the first and second portions of the semiconductor substrate;
forming a first conductive layer overlying the fifth dielectric layer;
recessing upper surfaces of the one or more first isolation trenches and the one or more second isolation trenches below an upper surface of the first conductive layer;
forming a sixth dielectric layer overlying the first conductive layer, the recessed one or more first isolation regions, and the recessed one or more second isolation regions; and
forming a second conductive layer overlying the sixth dielectric layer.

76. The method of claim 75, wherein the second dielectric layer is selected from the group consisting of an oxide, a thermally grown oxide, and a deposited high-temperature thermal oxide.

77. The method of claim 75, wherein the third dielectric layer is selected from the group consisting of an oxide, silicon dioxide, and TEOS.

78. The method of claim 75, wherein forming a fourth dielectric layer comprises a high-density plasma process.

79. The method of claim 75, wherein the fourth dielectric layer is a high-density plasma oxide.

80. The method of claim 75, wherein the plug acts to plug a seam in the second and third dielectric layers.

81. The method of claim 75, wherein the layer of material that is selectively removable over the third dielectric layer is of a dielectric material or a semiconductor material.

82. The method of claim 75, wherein the layer of material that is selectively removable over the third dielectric layer is selected from the group consisting of nitride, oxide, polysilicon, and oxidized polysilicon.

83. The method of claim 75, wherein forming a layer of material that is selectively removable over the third dielectric layer comprises depositing amorphous polysilicon at a temperature lower than about 520° C.

84. The method of claim 75, wherein the cap layer is of nitride.

85. The method of claim 75, wherein the fifth dielectric layer forms a tunnel dielectric layer of memory cells on the first portion of the semiconductor substrate and a gate dielectric layer of active devices on the second portion of the semiconductor substrate.

86. The method of claim 75, wherein the first conductive layer forms a floating gate layer of memory cells on the first portion of the semiconductor substrate and at least a portion of a control gate layer of active devices on the second portion of the semiconductor substrate.

87. The method of claim 75, wherein the second conductive layer is selected from the group consisting of refractory metals, refractory metal silicides, and a layer having a metal-containing barrier layer, a metal-containing adhesion layer, and a metal layer.

88. The method of claim 75, wherein the sixth dielectric layer is selected from the group consisting of one or more layers of dielectric material, tantalum oxide, barium strontium titanate, silicon nitride, and oxide-nitride-oxide.

89. The method of claim 75, wherein the first and second conductive layers are of polysilicon.

90. The method of claim 75, wherein forming a fourth layer of dielectric material comprises forming the fourth layer of dielectric material substantially flush with the cap layer.

91. The method of claim 75, wherein forming the first conductive layer comprises blanket depositing the first conductive layer overlying the fifth dielectric layer, the one or more first isolation regions, and the one or more second isolation regions.

92. The method of claim 86, wherein the second conductive layer forms a control gate layer of the memory cells and another portion of the control gate layer of the active devices.

93. The method of claim 90, wherein forming the fourth layer of dielectric material substantially flush with the cap layer comprises chemical mechanical planarization.