# Patent

## Title
Photoresist composition

## Abstract

The present invention provides a photoresist composition comprising a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and a compound represented by the formula (I):




wherein Z1 represents a C7-C20 alkylene group, a C3-C20 divalent saturated cyclic group or a divalent group formed by combining at least one C1-C6 alkylene group with at least one C3-C20 divalent saturated cyclic group.

## Background
This nonprovisional application claims priority under 35 U.S.C. §119(a) on Patent Application No. 2009-220388 filed in JAPAN on Sep. 25, 2009, and on Patent Application No. 2010-012866 filed in JAPAN on Jan. 25, 2010, the entire contents of which are hereby incorporated by reference.
FIELD OF THE INVENTION
The present invention relates to a photoresist composition.
BACKGROUND OF THE INVENTION
A photoresist composition used for semiconductor microfabrication employing a lithography process contains an acid generator comprising a compound generating an acid by irradiation.
US 2006/0194982 A1 discloses a photoresist composition comprising a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and 2,6-diisopropylaniline.
U.S. Pat. No. 5,916,728 A discloses a photoresist composition comprising a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and N-2(hydroxyethyl)morpholine.
SUMMARY OF THE INVENTION
The present invention is to provide a photoresist composition.
The present invention relates to the followings:

    <1> A photoresist composition comprising a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and a compound represented by the formula (I):






wherein Z1 represents a C7-C20 alkylene group, a C3-C20 divalent saturated cyclic group or a divalent group formed by combining at least one C1-C6 alkylene group with at least one C3-C20 divalent saturated cyclic group;

    <2> The photoresist composition according to <1>, wherein Z1 is a C7-C20 alkylene group or a C3-C20 divalent saturated cyclic group;
    <3> The photoresist composition according to <1>, wherein Z1 is a C7-C12 alkylene group or a C6-C20 divalent saturated cyclic group,
    <4> The photoresist composition according to <1>, wherein Z1 is an octane-1,8-diyl group, a dodecane-1,12-diyl group or a cyclohexane-1,2-diyl group;
    <5> The photoresist composition according to <1>, <2>, <3> or <4>, wherein the acid generator is a salt represented by the formula (B1):






wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, Lb1 represents a single bond or a C1-C17 divalent saturated hydrocarbon group in which one or more methylene groups can be replaced by —O— or —CO—,

    Y represents a C1-C18 aliphatic hydrocarbon group which can have one or more substituents, or a C3-C18 saturated cyclic hydrocarbon group which can have one or more substituents, and one or more methylene groups in the aliphatic hydrocarbon group and the saturated cyclic hydrocarbon group can be replaced by —CO— or —SO2—, and Z+ represents an organic cation;
    <6> The photoresist composition according to <5>, wherein Lb1 is *—CO—O-Lb2- in which * represents a binding position to −C(Q1) (Q2)- and Lb2 represents a single bond or —CH2—;
    <7> The photoresist composition according to <5> or <6>, wherein Z+is a triarylsulfonium cation;
    <8> A process for producing a photoresist pattern comprising the following steps (1) to (5):


(1) a step of applying the photoresist composition according to any one of <1> to <7> on a substrate,
(2) a step of forming a photoresist film by conducting drying,
(3) a step of exposing the photoresist film to radiation,
(4) a step of baking the exposed photoresist film, and
(5) a step of developing the baked photoresist film with an alkaline developer, thereby forming a photoresist pattern.


DESCRIPTION OF PREFERRED EMBODIMENTS
The photoresist composition of the present invention comprises a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and a compound represented by the formula (I):




wherein Z1 represents a C7-C20 alkylene group, a C3-C20 divalent saturated cyclic group or a divalent group formed by combining at least one C1-C6 alkylene group with at least one C3-C20 divalent saturated cyclic group (hereinafter, simply referred to as Compound (I)).

Compound (I) acts as a quencher in the photoresist composition of the present invention. Performance deterioration caused by inactivation of acid which occurs due to post exposure delay can be diminished by adding Compound (I) as a quencher.
Examples of the C7-C20 alkylene group include a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, a 2,5-dimethylhexane-1,6-diyl group, a 2,5-diethylhexane-1,6-diyl group, a 2,5-dimethylnonane-1,9-diyl group, a tridecane-1,12-diyl group, a methylidene group, an ethylidene group, a propylidene group and an isopropylidene group, and a C7-C20 linear alkylene group is preferable, and a C7-C12 alkylene group is more preferable.
Examples of the C3-C20 divalent saturated cyclic group include a C3-C20 cycloalkanediyl group and the following groups, and a C6-C20 divalent saturated cyclic group is preferable and the C3-C20 cycloalkanediyl group is more preferable.




Examples of the C3-C20 cycloalkanediyl group include a cyclobutane-1,2-diyl group, a cyclopentane-1,2-diyl group, a cyclohexane-1,2-diyl group, a cyclohexane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cycloheptane-1,2-diyl group and a cyclooctane-1,2-diyl group.
Examples of the divalent group formed by combining at least one C1-C6 alkylene group with at least one C3-C20 divalent saturated cyclic group include a divalent group formed by combining a C1-C6 alkylene group with a C3-C20 divalent saturated cyclic group, a divalent group formed by combining two C1-C6 alkylene groups with a C3-C20 divalent saturated cyclic group, and a divalent group formed by combining a C1-C6 alkylene group with two C3-C20 divalent saturated cyclic groups, and the divalent group formed by combining a C1-C6 alkylene group with a C3-C20 divalent saturated cyclic group, and the divalent group formed by combining two C1-C6 alkylene groups with a C3-C20 divalent saturated cyclic group are preferable. Specific examples of the divalent group include the followings.




Z1 is preferably a C7-C20 alkylene group or a C3-C20 divalent saturated cyclic group, and Z1 is more preferably a C7-C12 alkylene group or a C6-C20 divalent saturated cyclic group, and Z1 is especially preferably a C7-C12 alkylene group or a C6-C20 cycloalkanediyl group.
Examples of Compound (I) include the followings.










The photoresist composition of the present invention can contain two or more kinds of Compound (I). The content of Compound (I) is usually 0.01 to 5% by weight, preferably 0.05 to 4% by weight and more preferably 0.05 to 3% by weight based on amount of solid component. In this specification, “solid component” means components other than solvent in the photoresist composition.
The resin is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid. The resin has a structural unit derived from a compound having an acid-labile group, and can be produced by polymerizing one or more compounds having an acid-labile group.
In this specification, “an acid-labile group” means a group capable of being eliminated by the action of an acid.
Examples of the acid-labile group include a group represented by the formula (I):




wherein Ra1, Ra2 and Ra1 independently each represent a C1-C8 aliphatic hydrocarbon group or a C3-C20 saturated cyclic hydrocarbon group, or Ra1 and Ra2 are bonded each other to form a C3-C20 ring together with a carbon atom to which Ra1 and Ra2 are bonded.

Examples of the C1-C8 aliphatic hydrocarbon group include a C1-C8 alkyl group. Specific examples of the C1-C8 alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group and an octyl group. The C3-C20 saturated cyclic hydrocarbon group may be monocyclic or polycyclic, and examples thereof include a monocyclic alicyclic hydrocarbon group such as a C3-C20 cycloalkyl group (e.g. a cyclopentyl group, a cyclohexyl group, a methylcyclohexyl group, a dimethylcyclohexyl group, a cycloheptyl group and a cyclooctyl group) and a polycyclic alicyclic hydrocarbon group such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, a methylnorbornyl group, and the followings:




The saturated cyclic hydrocarbon group preferably has 3 to 12 carbon atoms.
Examples of the ring formed by bonding Ra1 and Ra2 each other include the following groups and the ring preferably has 3 to 20 carbon atoms, and the more preferably has 3 to 12 carbon atoms.




wherein Ra3 is the same as defined above.

The group represented by the formula (I) wherein Ra1, Ra2 and Ra3 independently each represent a C1-C8 alkyl group such as a tert-butyl group, the group represented by the formula (I) wherein Ra1 and Ra2 are bonded each other to form an adamantyl ring and Ra3 is a C1-C8 alkyl group such as a 2-alkyl-2-adamantyl group, and the group represented by the formula (I) wherein Ra1 and Ra2 are C1-C8 alkyl groups and Ra3 is an adamantyl group such as a 1-(1-adamantyl)-1-alkylalkoxycarbonyl group are preferable.
The compound having an acid-labile group is preferably an acrylate monomer having an acid-labile group in its side chain or a methacryalte monomer having an acid-labile group in its side chain.
Preferable examples of the compound Having an acid-labile group include monomers represented by the formulae (a1-1) and (a1-2):




wherein Ra4 and Ra5 each independently represents a hydrogen atom or a methyl group, Ra6 and Ra7 each independently represents a C1-C8 aliphatic hydrocarbon group or a C3-C10 saturated cyclic hydrocarbon group, La1 and La2 each independently represents *—O— or *—O—(CH2)k1—CO—O— in which * represents a binding position to —CO—, and k1 represents an integer of 1 to 7, m1 represents an integer of 0 to 14 and n1 represents an integer of 0 to 10.

The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms, and the saturated cyclic hydrocarbon group preferably has 3 to 8 carbon atoms and more preferably 3 to 6 carbon atoms.
Examples of the aliphatic hydrocarbon group include a C1-C8 alkyl group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a tert-butyl group, a 2,2-dimethylethyl group, a 1-methylpropyl group, a 2,2-dimethylpropyl group, a 1-ethylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-propylbutyl group, a pentyl group, a 1-methylpentyl group, a hexyl group, a 1,4-dimethylhexyl group, a heptyl group, a 1-methylheptyl group and an octyl group. Examples of the saturated cyclic hydrocarbon group include a cyclohexyl group, a methylcyclohexyl group, a dimethylcyclohexyl group, a cycloheptyl group, a methylcycloheptyl group, a norbornyl group and a methylnorbornyl group.
La1 is preferably *—O— or *—O—(CH2)f1—CO—O— in which * represents a binding position to —CO—, and f1 represents an integer of 1 to 4, and is more preferably *—O— or *—O—CH2—CO—O—, and is especially preferably *—O—. La2 is preferably *—O— or *—O—(CH2)f1—CO—O— in which * represents a binding position to —CO—, and f1 is the same as defined above, and is more preferably *—O— or *—O—CH2—CO—O—, and is especially preferably *—O—.
In the formula (a1-1), m1 is preferably an integer of 0 to 3, and is more preferably 0 or 1. In the formula (a1-2), n1 is preferably an integer of 0 to 3, and is more preferably 0 or 1.
Particularly when the photoresist composition contains a resin derived from a monomer having a bulky structure such as a saturated cyclic hydrocarbon group, the photoresist composition having excellent resolution tends to be obtained.
Examples of the monomer represented by the formula (a1-1) include the followings.

















































Among them, preferred are 2-methyl-2-adamantyl acrylate, 2-methyl-2-adamantyl methacrylate, 2-ethyl-2-adamantyl acrylate, 2-ethyl-2-adamantyl methacrylate, 2-isopropyl-2-adamantyl acrylate and 2-isopropyl-2-adamantyl methacrylate, and more preferred are 2-methyl-2-adamantyl methacrylate, 2-ethyl-2-adamantyl methacrylate, and 2-isopropyl-2-adamantyl methacrylate.
Examples of the monomer represented by the formula (a1-2) include the followings.




Among them, preferred are 1-ethyl-1-cyclohexyl acrylate and 1-ethyl-1-cyclohexyl methacrylate, and more preferred is 1-ethyl-1-cyclohexyl methacrylate.
The content of the structural unit derived from a compound having an acid-labile group in the resin is usually 10 to 95% by mole, preferably 15 to 90% by mole and more preferably 20 to 85% by mole based on 100% by mole of all the structural units of the resin.
Other examples of the compound having an acid-labile group include a monomer represented by the formula (a1-3):




wherein Ra9 represents a hydrogen atom, a C1-C3 aliphatic hydrocarbon group which can have one or more substituents, a carboxyl group, a cyano group or a —COORa13 group in which Ra13 represents a C1-C8 aliphatic hydrocarbon group or a C3-C8 saturated cyclic hydrocarbon group, and the C1-C8 aliphatic hydrocarbon group and the C3-C8 saturated cyclic hydrocarbon group can have one or more hydroxyl groups, and one or more —CH2— in the C1-C8 aliphatic hydrocarbon group and the C3-C8 saturated cyclic hydrocarbon group can be replaced by —O— or —CO—, Ra10, Ra11 and Ra12 each independently represent a C1-C12 aliphatic hydrocarbon group or a C3-C12 saturated cyclic hydrocarbon group, and Ra10, Ra11 and Ra12 can be bonded each other to form a ring together with the carbon atom to which Ra10 and Ra11 are bonded, and the C1-C12 aliphatic hydrocarbon group and the C3-C12 saturated cyclic hydrocarbon group can have one or more hydroxyl groups, and one or more —CH2— in the C1-C12 aliphatic hydrocarbon group and the C3-C12 saturated cyclic hydrocarbon group can be replaced by —O— or —CO—.

Examples of the substituent include a hydroxyl group. Examples of the C1-C3 aliphatic hydrocarbon group which can have one or more substituents include a methyl group, an ethyl group, a propyl group, a hydroxymethyl group and a 2-hydroxyethyl group. Examples of Ra13 include a methyl group, an ethyl group, a propyl group, a 2-oxo-oxolan-3-yl group and a 2-oxo-oxolan-4-yl group. Examples of Ra10, Ra11 and Ra12 include a methyl group, an ethyl group, a cyclohexyl group, a methylcyclohexyl group, a hydroxycyclohexyl group, an oxocyclohexyl group and an adamantyl group, and examples of the ring formed by bonding Ra10 and Ra11 each other together with the carbon atom to which Ra10 and Ra11 are bonded include a cyclohexane ring and an adamantane ring.
Examples of the monomer represented by the formula (a1-3) include tert-butyl 5-norbornene-2-carboxylate, 1-cyclohexyl-1-methylethyl 5-norbornene-2-carboxylate, 1-methylcyclohexyl 5-norbornene-2-carboxylate, 2-methyl-2-adamantyl 5-norbornene-2-carboxylate, 2-ethyl-2-adamantyl 5-norbornene-2-carboxylate, 1-(4-methylcyclohexyl)-1-methylethyl 5-norbornene-2-carboxylate, 1-(4-hydroxycyclohexyl)-1-methylethyl 5-norbornene-2-carboxylate, 1-methyl-1-(4-oxocyclohexyl)ethyl 5-norbornene-2-carboxylate and 1-(1-adamantyl)-1-methylethyl 5-norbornene-2-carboxylate.
When the resin has a structural unit derived from the monomer represented by the formula (a1-3), the photoresist composition having excellent resolution and higher dry-etching resistance tends to be obtained.
When the resin contains the structural unit derived form the monomer represented by the formula (a1-3), the content of the structural unit derived from the monomer represented by the formula (a1-3) is usually 10 to 95% by mole and preferably 15 to 90% by mole and more preferably 20 to 85% by mole based on total molar of all the structural units of the resin.
Other examples of the compound having an acid-labile group include a monomer represented by the formula (a1-4):




wherein R10 represents a hydrogen atom, a halogen atom, a C1-C6 alkyl group or a C1-C6 halogenated alkyl group, R11 is independently in each occurrence a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C4 acyl group, a C2-C4 acyloxy group, an acryloyl group or a methacryloyl group, 1a represents an integer of 0 to 4, R12 and R13 each independently represent a hydrogen atom or a C1-C12 hydrocarbon group, Xa2 represents a single bond or a C1-C17 divalent saturated hydrocarbon group in which one or more —CH2— can be replaced by —O—, —CO—, —S—, —SO2— or —N(Rc)— wherein Rc represents a hydrogen atom or a C1-C6 alkyl group, and Ya3 represents a C1-C12 aliphatic hydrocarbon group, a C3-C18 saturated cyclic hydrocarbon group or a C6-C18 aromatic hydrocarbon group, and the C1-C12 aliphatic hydrocarbon group, the C2-C18 saturated cyclic hydrocarbon group and the C6-C18 aromatic hydrocarbon group can have one or more substituents.

Examples of the halogen atom include a fluorine atom.
Examples of the C1-C6 alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, a pentyl group and a hexyl group, and a C1-C4 alkyl group is preferable and a C1-C2 alkyl group is more preferable and a methyl group is especially preferable.
Examples of the C1-C6 halogenated alkyl group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a heptafluoroisopropyl group, a nonafluorobutyl group, a nonafluoro-sec-butyl group, a nonafluoro-tert-butyl group, a perfluoropentyl group and a perfluorohexyl group.
Examples of the C1-C6 alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, an isobutoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group and a hexyloxy group, and a C1-C4 alkoxy group is preferable and a C1-C2 alkoxy group is more preferable and a methoxy group is especially preferable.
Examples of the C2-C4 acyl group include an acetyl group, a propionyl group and a butyryl group, and examples of the C2-C4 acyloxy group include an acetyloxy group, a propionyloxy group and a butyryloxy group.
Examples of the C1-C12 hydrocarbon group include a C1-C12 aliphatic hydrocarbon group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a decyl group, an undecyl group and a dodecyl group, and a C3-C12 saturated cyclic hydrocarbon group such as a cyclohexyl group, an adamantyl group, a 2-alkyl-2-adamantyl group, a 1-(1-adamantyl)-1-alkyl group and an isobornyl group.
Examples of the C1-C17 divalent saturated hydrocarbon group include a C1-C17 alkanediyl group such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, a undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group and a heptadecane-1,17-diyl group.
Examples of the C1-C12 aliphatic hydrocarbon group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a decyl group, an undecyl group and a dodecyl group. Examples of the C3-C18 saturated cyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclononyl group, a cyclodecyl group, a norbornyl group, a 1-adamantyl group, a 2-adamantyl group, an isobornyl group and the following groups:




Examples of the C6-C18 aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group and a p-adamantylphenyl group.
Examples of the monomer represented by the formula (a1-4) include the followings.




























When the resin contains the structural unit derived form the monomer represented by the formula (a1-4), the content of the structural unit derived from the monomer represented by the formula (a1-4) is usually 10 to 95% by mole and preferably 15 to 90% by mole and more preferably 20 to 85% by mole based on total molar of all the structural units of the resin.
The resin can have two or more kinds of structural units derived from the compounds having an acid-labile group.
The resin preferably contains the structural unit derived from the compound having an acid-labile group and a structural unit derived from the compound having no acid-labile group. The resin can have two or more kinds of structural units derived from the compounds having no acid-labile group. When the resin contains the structural unit derived from the compound having an acid-labile group and the structural unit derived from the compound having no acid-labile group, the content of the structural unit derived from the compound having an acid-labile group is usually 10 to 80% by mole and preferably 20 to 60% by mole based on total molar of all the structural units of the resin. The content of the structural unit derived from a monomer having an adamantyl group, especially the monomer represented by the formula (a1-1) in the structural unit derived from the compound having no acid-labile group is preferably 15% by mole or more from the viewpoint of dry-etching resistance of the photoresist composition.
The compound having no acid-labile group preferably contains one or more hydroxyl groups or a lactone ring. When the resin contains the structural unit derived from the compound having no acid-labile group and having one or more hydroxyl groups or a lactone ring, a photoresist composition having good resolution and adhesiveness of photoresist to a substrate tends to be obtained.
Examples of the compound having no acid-labile group and having one or more hydroxyl groups include a monomer represented by the formula (a2-0):




wherein R8 represents a hydrogen atom, a halogen atom, a C1-C6 alkyl group or a C1-C6 halogenated alkyl group, R9 is independently in each occurrence a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C4 acyl group, a C2-C4 acyloxy group, an acryloyl group or a methacryloyl group, ma represents an integer of 0 to 4, and

a monomer represented by the formula (a2-1):





wherein Ra14 represents a hydrogen atom or a methyl group, Ra15 and Ra16 each independently represent a hydrogen atom, a methyl group or a hydroxyl group, La3 represents *—O— or *—O—(CH2)k2—CO—O— in which * represents a binding position to —CO—, and k2 represents an integer of 1 to 7, and of represents an integer of 0 to 10.

When KrF excimer laser (wavelength: 248 nm) lithography system, or a high energy laser such as electron beam and extreme ultraviolet is used as an exposure system, the resin containing the structural unit derived from the monomer represented by the formula (a2-0) is preferable, and when ArF excimer laser (wavelength: 193 nm) is used as an exposure system, the resin containing the structural unit derived from the monomer represented by the formula (a2-1) is preferable.
In the formula (a2-0), examples of the halogen atom include a fluorine atom, examples of the C1-C6 alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, a pentyl group and a hexyl group, and a C1-C4 alkyl group is preferable and a C1-C2 alkyl group is more preferable and a methyl group is especially preferable. Examples of the C1-C6 halogenated alkyl group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a heptafluoroisopropyl group, a nonafluorobutyl group, a nonafluoro-sec-butyl group, a nonafluoro-tert-butyl group, a perfluoropentyl group and a perfluorohexyl group. Examples of the C1-C6 alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, an isobutoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group and a hexyloxy group, and a C1-C4 alkoxy group is preferable and a C1-C2 alkoxy group is more preferable and a methoxy group is especially preferable. Examples of the C2-C4 acyl group include an acetyl group, a propionyl group and a butyryl group, and examples of the C2-C4 acyloxy group include an acetyloxy group, a propionyloxy group and a butyryloxy group. In the formula (a2-0), ma is preferably 0, 1 or 2, and is more preferably 0 or 1, and especially preferably 0.
The resin containing the structural unit derived from the monomer represented by the formula (a2-0) and the structural unit derived from the compound having an acid generator can be produced, for example, by polymerizing the compound having an acid generator and a monomer obtained by protecting a hydroxyl group of the monomer represented by the formula (a2-0) with an acetyl group followed by conducting deacetylation of the obtained polymer with a base.
Examples of the monomer represented by the formula (a2-0) include the followings.










Among them, preferred are 4-hydroxystyrene and 4-hydroxy-α-methylstyrene.
When the resin contains the structural unit derived from the monomer represented by the formula (a2-0), the content of the structural unit derived from the monomer represented by the formula (a2-0) is usually 5 to 90% by mole and preferably 10 to 85% by mole and more preferably 15 to 80% by mole based on total molar of all the structural units of the resin.
In the formula (a2-1), Ra14 is preferably a methyl group, Ra15 is preferably a hydrogen atom, Ra16 is preferably a hydrogen atom or a hydroxyl group, La3 is preferably *—O— or *—O—(CH2)f2—CO—O— in which * represents a binding position to —CO—, and f2 represents an integer of 1 to 4, and is more preferably *—O—, and of is preferably 0, 1, 2 or 3 and is more preferably 0 or 1.
Examples of the monomer represented by the formula (a2-1) include the followings, and 3-hydroxy-1-adamantyl acrylate, 3-hydroxy-1-adamantyl methacrylate, 3,5-dihydroxy-1-adamantyl acrylate, 3,5-dihydroxy-1-adamantyl methacrylate, 1-(3,5-dihydroxy-1-adamantyloxycarbonyl) methyl acrylate and 1-(3,5-dihydroxy-1-adamantyloxycarbonyl) methyl methacrylate are preferable, and 3-hydroxy-1-adamantyl methacrylate and 3,5-dihydroxy-1-adamantyl methacrylate are more preferable.



















When the resin contains the structural unit derived from the monomer represented by the formula (a2-1), the content of the structural unit derived from the monomer represented by the formula (a2-1) is usually 3 to 40% by mole and preferably 5 to 35% by mole and more preferably 5 to 30% by mole based on total molar of all the structural units of the resin.
Examples of the lactone ring of the compound having no acid-labile group and having a lactone ring include a monocyclic lactone ring such as β-propiolactone ring, γ-butyrolactone ring and γ-valerolactone ring, and a condensed ring formed from a monocyclic lactone ring and the other ring. Among them, preferred are γ-butyrolactone ring and a condensed lactone ring formed from γ-butyrolactone ring and the other ring.
Preferable examples of the monomer having no acid-labile group and a lactone ring include the monomers represented by the formulae (a3-1), (a3-2) and (a3-3):




wherein La4, La5 and La6 each independently represent *—O— or *—O—(CH2)k3—CO—O— in which * represents a binding position to —CO— and k3 represents an integer of 1 to 7, Ra18, Ra19 and Ra20 each independently represent a hydrogen atom or a methyl group, Ra21 represents a C1-C4 aliphatic hydrocarbon group, Ra22 and Ra23 are independently in each occurrence a carboxyl group, a cyano group or a C1-C4 aliphatic hydrocarbon group, and p1 represents an integer of 0 to 5, q1 and r1 independently each represent an integer of 0 to 3.

It is preferred that La4, La5 and La6 each independently represent *—O— or *—O—(CH2)d1—CO—O— in which * represents a binding position to —CO— and d1 represents an integer of 1 to 4, and it is more preferred that La4, La5 and La6 are *—O—. Ra18, Ra19 and Ra20 are preferably methyl groups. Ra21 is preferably a methyl group. It is preferred that Ra22 and Ra23 are independently in each occurrence a carboxyl group, a cyano group or a methyl group. It is preferred that p1 is an integer of 0 to 2, and it is more preferred that p1 is 0 or 1. It is preferred that q1 and r1 independently each represent an integer of 0 to 2, and it is more preferred that q1 and r1 independently each represent 0 or 1.
Examples of the monomer represented by the formula (a3-1) include the followings.










Examples of the monomer represented by the formula (a3-2) include the followings.






















Examples of the monomer represented by the formula (a3-3) include the followings.










Among them, preferred are 5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yl acrylate, 5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yl methacrylate, tetrahydro-2-oxo-3-furyl acrylate, tetrahydro-2-oxo-3-furyl methacrylate, 2-(5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yloxy)-2-oxoethyl acrylate and 2-(5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yloxy)-2-oxoethyl methacrylate, and more preferred are 5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yl methacrylate, tetrahydro-2-oxo-3-furyl methacrylate and 2-(5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yloxy)-2-oxoethyl methacrylate.
When the resin contains the structural unit derived from the monomer having no acid-labile group and having a lactone ring, the content thereof is usually 5 to 50% by mole and preferably 10 to 45% by mole and more preferably 15 to 40% by mole based on total molar of all the structural units of the resin.
The resin can contain a structural unit derived from a monomer having an acid labile group containing a lactone ring. Examples of the monomer having an acid labile group containing a lactone ring include the followings.







Examples of the other monomer having no acid-labile group include the monomers represented by the formulae (a4-1), (a4-2) and (a4-3):




wherein Ra25 and Ra26 each independently represents a hydrogen atom, a C1-C3 aliphatic hydrocarbon group which can have one or more substituents, a carboxyl group, a cyano group or a —COORa27 group in which Ra27 represents a C1-C36 aliphatic hydrocarbon group or a C3-C36 saturated cyclic hydrocarbon group, and one or more —CH2— in the C1-C36 aliphatic hydrocarbon group and the C3-C36 saturated cyclic hydrocarbon group can be replaced by —O— or —CO—, with the proviso that the carbon atom bonded to —O— of —CO— of Ra27 is not a tertiary carbon atom, or Ra25 and Ra26 are bonded together to form a carboxylic anhydride residue represented by —C(═O)OC(═O)—.

Examples of the substituent of the C1-C3 aliphatic hydrocarbon group include a hydroxyl group. Examples of the C1-C3 aliphatic hydrocarbon group which can have one or more substituents include a C1-C3 alkyl group such as a methyl group, an ethyl group and a propyl group, and a C1-C3 hydroxyalkyl group such a hydroxymethyl group and a 2-hydroxyethyl group. The C1-C36 aliphatic hydrocarbon group represented by Ra27 is preferably a C1-C8 aliphatic hydrocarbon group and is more preferably a C1-C6 aliphatic hydrocarbon group. The C3-C36 saturated cyclic hydrocarbon group represented by Ra27 is preferably a C4-C36 saturated cyclic hydrocarbon group, and is more preferably C4-C12 saturated cyclic hydrocarbon group. Examples of Ra27 include a methyl group, an ethyl group, a propyl group, a 2-oxo-oxolan-3-yl group and a 2-oxo-oxolan-4-yl group.
Examples of the monomer represented by the formula (a4-3) include 2-norbornene, 2-hydroxy-5-norbornene, 5-norbornene-2-carboxylic acid, methyl 5-norbornene-2-carboxylate, 2-hydroxyethyl 5-norbornene-2-carboxylate, 5-norbornene-2-methanol and 5-norbornene-2,3-dicarboxylic anhydride.
When the resin contains a structural unit derived from a monomer represented by the formula (a4-1), (a4-2) or (a4-3), the content thereof is usually 2 to 40% by mole and preferably 3 to 30% by mole and more preferably 5 to 20% by mole based on total molar of all the structural units of the resin.
Preferable resin is a resin containing the structural units derived from the monomer having an acid-labile group, and the structural units derived from the monomer having one or more hydroxyl groups and/or the monomer having a lactone ring. The monomer having an acid-labile group is preferably the monomer represented by the formula (a1-1) or the monomer represented by the formula (a1-2), and is more preferably the monomer represented by the formula (a1-1).
The monomer having one or more hydroxyl groups is preferably the monomer represented by the formula (a2-1), and the monomer having a lactone ring is preferably the monomer represented by the formula (a3-1) or (a3-2).
The resin can be produced according to known polymerization methods such as radical polymerization.
The resin usually has 2,500 or more of the weight-average molecular weight, and preferably 3,000 or more of the weight-average molecular weight. The resin usually has 50,000 or less of the weight-average molecular weight, and preferably has 30,000 or less of the weight-average molecular weight. The weight-average molecular weight can be measured with gel permeation chromatography.
The first photoresist composition of the present invention usually includes 80% by weight or more of the solid component.
The photoresist composition of the present invention contains an acid generator, and preferably a photoacid generator.
The acid generator is a substance which is decomposed to generate an acid by applying a radiation such as a light, an electron beam or the like on the substance itself or on a photoresist composition containing the substance. The acid generated from the acid generator acts on the resin resulting in cleavage of the acid-labile group existing in the resin.
Examples of the acid generator include a nonionic acid generator, an ionic acid generator and the combination thereof. An ionic acid generator is preferable. Examples of the nonionic acid generator include an organo-halogen compound, a sulfone compound such as a disulfone, a ketosulfone and a sulfonyldiazomethane, a sulfonate compound such as a 2-nitrobenzylsulfonate, an aromatic sulfonate, an oxime sulfonate, an N-sulfonyloxyimide, a sulfonyloxyketone and DNQ 4-sulfonate. Examples of the ionic acid generator include an acid generator having an inorganic anion such as BF4−, PF6−, AsF6− and SbF6−, and an acid generator having an organic anion such as a sulfonic acid anion and a bissulfonylimido anion, and an acid generator having a sulfonic acid anion is preferable.
Preferable examples of the acid generator include a salt represented by the formula (B1):




wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, Lb1 represents a single bond or a C1-C17 divalent saturated hydrocarbon group in which one or more methylene groups can be replaced by —O— or —CO—,

Y represents a C1-C18 aliphatic hydrocarbon group which can have one or more substituents, or a C3-C18 saturated cyclic hydrocarbon group which can have one or more substituents, and one or more methylene groups in the aliphatic hydrocarbon group and the saturated cyclic hydrocarbon group can be replaced by —O—, —CO— or —SO2—, and Z+ represents an organic cation.

Examples of the C1-C6 perfluoroalkyl group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a nonafluorobutyl group, an undecafluoropentyl group and a tridecafluorohexyl group, and a trifluoromethyl group is preferable. Q1 and Q2 each independently preferably represent a fluorine atom or a trifluoromethyl group, and Q1 and Q2 are more preferably fluorine atoms.
Examples of the C1-C17 divalent saturated hydrocarbon group include a C1-C17 linear alkylene group such as a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, a undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group and a heptadecane-1,17-diyl group, a C1-C17 branched alkylene group such as a 1-methyl-1,3-propylene group, a 2-methyl-1,3-propylene group, a 2-methyl-1,2-propylene group, a 1-methyl-1,4-butylene group, and a 2-methyl-1,4-butylene group,

    a divalent saturated monocyclic hydrocarbon group such as a cycloalkylene group such as a 1,3-cyclobutylene group, a 1,3-cyclopentylene group, a 1,4-cyclohexylene group, and a 1,5-cyclooctylene group, and
    a divalent saturated polycyclic hydrocarbon group such as a 1,4-norbornylene group, a 2,5-norbornylene group, a 1,5-adamantylene group and a 2,6-adamantylene group.


Examples of the C1-C17 saturated hydrocarbon group in which one or more methylene groups are replaced by —O— or —CO— include *—CO—O-Lb2-, *—CO—O-Lb4-CO—O-Lb3-, *-Lb5-O—CO—, *-Lb7-O-Lb6, *—CO—O-Lb8-O—, and CO—O-Lb10-O-Lb9-CO—O—, wherein Lb2 represents a single bond or a C1-C15 alkanediyl group, Lb3 represents a single bond or a C1-C12 alkanediyl group, Lb4 represents a single bond or a C1-C13 alkanediyl group, with proviso that total carbon number of Lb3 and Lb4 is 1 to 13, Lb5 represents a C1-C15 alkanediyl group, represents a C1-C15 alkanediyl group, Lb7 represents a C1-C15 alkanediyl group, with proviso that total carbon number of Lb6 and Lb7 is 1 to 16, Lb8 represents a C1-C14 alkanediyl group, Lb9 represents a C1-C11 alkanediyl group, Lb10 represents a C1-C11 alkanediyl group, with proviso that total carbon number of Lb9 and Lb10 is 1 to 12, and * represents a binding position to —C(Q1)(Q2)-. Among them, preferred are *—CO—O-Lb2-, *—CO—O-Lb4-CO—O-Lb3-, *-Lb5-O—CO— and *-Lb7-O-Lb6-, and more preferred are *—CO—O-Lb2- and *—CO—O-Lb4-CO—O-Lb3-, and much more preferred is *—CO—O-Lb2-, and especially preferred is *—CO—O-Lb2- in which Lb2 is a single bond or —CH2—.
Examples of *—CO—O-Lb2- include *—CO—O— and *—CO—O—CH2—. Examples of *—CO—O-Lb4-CO—O-Lb3- include *—CO—O—CH2—CO—O—, *—CO—O—(CH2)2—CO—O—, *—CO—O—(CH2)3—CO—O—, *—CO—O—(CH2)4—CO—O—, *—CO—O—(CH2)6—CO—O—, *—CO—O—(CH2)8—CO—O—, *—CO—O—CH2—CH(CH3)—CO—O— and *—CO—O—CH2—C(CH3)2—CO—O—. Examples of *-Lb5-O—CO— include *—CH2—O—CO—, *—(CH2)2—O—CO—, *—(CH2)3—O—CO—, *—(CH2)4—O—CO—, *—(CH2)6—O—CO— and *—(CH2)8—O—CO—. Examples of include *—CH2—O—CH2—. Examples of *—CO—O-Lb8-O— include *—CO—O—CH2—O—, *—CO—O—(CH2)2—O—, *—CO—O—(CH2)3—O—, *—CO—O—(CH2)4—O— and *—CO—O—(CH2)6—O—. Examples of *—CO—O-Lb10-O-Lb9-CO—O— include the followings.




The saturated hydrocarbon group can have one or more substituents, and examples of the substituent include a halogen atom, a hydroxyl group, a carboxyl group, a C6-C18 aromatic hydrocarbon group, a C7-C21 aralkyl group such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group and a naphthylethyl group, a C2-C4 acyl group and a glycidyloxy group.
Examples of the substituent in Y include a halogen atom, a hydroxyl group, an oxo group, a glycidyloxy group, a C2-C4 acyl group, a C1-C12 alkoxy group, a C2-C7 alkoxycarbonyl group, a C1-C12 aliphatic hydrocarbon group, a C1-C12 hydroxy-containing aliphatic hydrocarbon group, a C3-C16 saturated cyclic hydrocarbon group, a C6-C18 aromatic hydrocarbon group, a C7-C21 aralkyl group and —(CH2)j2—O—CO— in which Rb1 represents a C1-C16 aliphatic hydrocarbon group, a C3-C16 saturated cyclic hydrocarbon group or a C6-C18 aromatic hydrocarbon group and j2 represents an integer of 0 to 4. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the acyl group include an acetyl group and a propionyl group, and examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group and a butoxy group. Examples of the alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, an isopropoxycarbonyl group and a butoxycarbonyl group. Examples of the aliphatic hydrocarbon group include the same as described above. Examples of the hydroxyl-containing aliphatic hydrocarbon group include a hydroxymethyl group. Examples of the C3-C16 saturated cyclic hydrocarbon group include the same as described above, and examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group and a p-adamantylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group and a naphthylethyl group.
Examples of the C1-C18 aliphatic hydrocarbon group represented by Y include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a neopentyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 1,2-dimethylpropyl group, a 1-ethylpropyl group, a hexyl group, a 1-methylpentyl group, a heptyl group, an octyl group, a 2-ethylhexyl group, a nonyl group, a decyl group, an undecyl group and a dodecyl group, and a C1-C6 alkyl group is preferable. Examples of the C3-C18 saturated cyclic hydrocarbon group represented by Y include the groups represented by the formulae (Y1) to (Y26):










Among them, preferred are the groups represented by the formulae (Y1) to (Y19), and more preferred are the groups represented by the formulae (Y11), (Y14), (Y15) and (Y19). The groups represented by the formulae (Y11) and (Y14) are especially preferable.
Examples of Y having one or more substituents include the followings:




Y is preferably an adamantyl group which can have one or more substituents, and is more preferably an adamantyl group or an oxoadamantyl group.
Among the sulfonic acid anions of the acid generator represented by the formula (B1), preferred is a sulfonic acid anion having *—CO—O-Lb2-, and more preferred are anions represented by the formulae (b1-1-1) to (b1-1-9).




wherein Q1, Q2 and Lb2 are the same as defined above, and Rb2 and Rb3 each independently represent a C1-C4 aliphatic hydrocarbon group, preferably a methyl group.

Specific examples of the sulfonic acid anion include the followings.


































































































































Among them, the following sulfonic anions are preferable.




Examples of the cation part represented by Z+ include an onium cation such as a sulfonium cation, an iodonium cation, an ammonium cation, a benzothiazolium cation and a phosphonium cation, and a sulfonium cation and an iodonium cation are preferable, and an arylsulfonium cation is more preferable.
Preferable examples of the cation part represented by Z+ include the cations represented by the formulae (b2-1) to (b2-4):




wherein Rb4, Rb5 and Rb6 each independently represent a C1-C30 aliphatic hydrocarbon group which can have one or more substituents selected from the group consisting of a hydroxyl group, a C1-C12 alkoxy group and a C6-C18 aromatic hydrocarbon group, a C3-C36 saturated cyclic hydrocarbon group which can have one or more substituents selected from the group consisting of a halogen atom, a C2-C4 acyl group and a glycidyloxy group, or a C6-C18 aromatic hydrocarbon group which can have one or more substituents selected from the group consisting of a halogen atom, a hydroxyl group, a C1-C18 aliphatic hydrocarbon group, a C3-C36 saturated cyclic hydrocarbon group or a C1-C12 alkoxy group,

    Rb7 and Rb8 are independently in each occurrence a hydroxyl group, a C1-C12 aliphatic hydrocarbon group or a C1-C12 alkoxy group, m2 and n2 independently represents an integer of 0 to 5, Rb9 and Rb10 each independently represent a C1-C36 aliphatic hydrocarbon group or a C3-C36 saturated cyclic hydrocarbon group, or Rb9 and Rb10 are bonded to form a C2-C11 divalent acyclic hydrocarbon group which forms a ring together with the adjacent S+, and one or more —CH2— in the divalent acyclic hydrocarbon group may be replaced by —CO—, —O— or —S—,
    and
    Rb11 represents a hydrogen atom, a C1-C36 aliphatic hydrocarbon group, a C3-C36 saturated cyclic hydrocarbon group or a C6-C18 aromatic hydrocarbon group, Rb12 represents a C1-C12 aliphatic hydrocarbon group, a C3-C18 saturated cyclic hydrocarbon group or a C6-C18 aromatic hydrocarbon group and the aromatic hydrocarbon group can have one or more substituents selected from the group consisting of a C1-C12 aliphatic hydrocarbon group, a C1-C12 alkoxy group, a C3-C18 saturated cyclic hydrocarbon group and an C2-C13 acyloxy group, or Rb11 and Rb12 are bonded each other to form a C1-C10 divalent acyclic hydrocarbon group which forms a 2-oxocycloalkyl group together with the adjacent —CHCO—, and one or more —CH2— in the divalent acyclic hydrocarbon group may be replaced by —CO—, —O— or —S—, and
    Rb13, Rb14, Rb15, Rb16, Rb17 and Rb10 each independently represent a hydroxyl group, a C1-C12 aliphatic hydrocarbon group or a C1-C12 alkoxy group, Lb11 represents —S— or —O— and o2, p2, s2 and t2 each independently represents an integer of 0 to 5, q2 and r2 each independently represents an integer of 0 to 4, and u2 represents 0 or 1.


The aliphatic hydrocarbon group represented by Rb9 to Rb11 has preferably 1 to 12 carbon atoms. The saturated cyclic hydrocarbon group represented by Rb9 to Rb11 has preferably 3 to 18 carbon atoms and more preferably 4 to 12 carbon atoms.
Examples of the aliphatic hydrocarbon group and the aromatic hydrocarbon group include the same as described above. Preferable examples of the aliphatic hydrocarbon group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group and a 2-ethylhexyl group. Preferable examples of the saturated cyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclodecyl group, a 2-alkyl-a-adamantyl group, a 1-(1-adamantyl)-1-alkyl group and an isobornyl group. Preferable examples of the aromatic group include a phenyl group, a 4-methylphenyl group, a 4-ethylphenyl group, a 4-tert-butylphenyl group, a 4-cyclohexylphenyl group, a 4-methoxyphenyl group, a biphenyl group and a naphthyl group. Examples of the aliphatic hydrocarbon group having an aromatic hydrocarbon group include a benzyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group and a dodecyloxy group.
Examples of the C3-C12 divalent acyclic hydrocarbon group formed by bonding Rb9 and Rb10 include a trimethylene group, a tetramethylene group and a pentamethylene group. Examples of the ring group formed together with the adjacent S+ and the divalent acyclic hydrocarbon group include a thiolan-1-ium ring (tetrahydrothiphenium ring), a thian-1-ium ring and a 1,4-oxathian-4-ium ring. AC3-C7 divalent acyclichydrocarbon group is preferable.
Examples of the C1-C10 divalent acyclic hydrocarbon group formed by bonding Rb11 and Rb12 include a methylene group, an ethylene group, a trimethylene group, a tetramethylene group and a pentamethylene group and examples of the ring group include the followings.




Among the above-mentioned cations, preferred is the cation represented by the formula (b2-1), and more preferred is the cation represented by the formula (b2-1-1), and especially preferred is a triphenylsulfonium cation.




wherein Rb19, Rb20 and Rb21 are independently in each occurrence a hydroxyl group, a C1-C36 aliphatic hydrocarbon group, a C3-C36 saturated cyclic hydrocarbon group or a C1-C12 alkoxy group, and one or more hydrogen atoms in the aliphatic hydrocarbon group can be replaced by a hydroxyl group, a C1-C12 alkoxy group or a C6-C18 aromatic hydrocarbon group, one or more hydrogen atoms of the saturated cyclic hydrocarbon group can be replaced by a halogen atom, a C2-C4 acyl group or a glycidyloxy group, and v2, w2 and x2 independently each represent an integer of 0 to 5. The aliphatic hydrocarbon group preferably has 1 to 12 carbon atoms, and the saturated cyclic hydrocarbon group preferably has 4 to 36 carbon atoms, and it is preferred that v2, w2 and x2 independently each represent 0 or 1. It is preferred that Rb19, R20 and Rb21 are independently halogen atom (preferably a chlorine atom), a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group.

Examples of the cation represented by the formula (b2-1) include the followings.










Examples of the cation represented by the formula (b2-2) include the followings.




Examples of the cation represented by the formula (b2-3) include the followings.










Examples of the cation represented by the formula (b2-4) include the followings.






















Examples of the salt represented by the formula (B1) include a salt wherein the anion part is any one of the above-mentioned anion part and the cation part is any one of the above-mentioned cation part. Preferable examples of the salt include a combination of any one of anions represented by the formulae (b1-1-1) to (b1-1-9) and the cation represented by the formulae (b2-1-1), and a combination of any one of anions represented by the formulae (b1-1-3) to (b1-1-5) and the cation represented by the formulae (b2-3).
The salt represented by the formulae (B1-1) to (B1-17) are preferable, and the salt represented by the formulae (B1-1), (B1-2), (B1-6), (B1-11), (B1-12), (B1-13) and (B1-14) are more preferable.













Two or more kinds of the acid generator can be used in combination.
The content of the acid generator is preferably 1 part by weight or more and more preferably 3 parts by weight or more per 100 parts by weight of the resin. The content of the acid generator is preferably 50 parts by weight or less and more preferably 45 parts by weight or less per 100 parts by weight of the resin.
The photoresist composition of the present invention can contain a basic compound other than Compound (I) as a quencher. The basic compound is preferably a basic nitrogen-containing organic compound, and examples thereof include an amine compound such as an aliphatic amine and an aromatic amine and an ammonium salt. Examples of the aliphatic amine include a primary amine, a secondary amine and a tertiary amine. Examples of the aromatic amine include an aromatic amine in which aromatic ring has one or more amino groups such as aniline and a heteroaromatic amine such as pyridine. Preferable examples thereof include an aromatic amine represented by the formula (C2):




wherein Arc1 represents an aromatic hydrocarbon group, and Rc5 and Rc6 each independently represent a hydrogen atom, an aliphatic hydrocarbon group, a saturated cyclic hydrocarbon group or an aromatic hydrocarbon group, and the aliphatic hydrocarbon group, the saturated cyclic hydrocarbon group and the aromatic hydrocarbon group can have one or more substituents selected from the group consisting of a hydroxyl group, an amino group, an amino group having one or two C1-C4 alkyl groups and a C1-C6 alkoxy group.

The aliphatic hydrocarbon group is preferably an alkyl group and the saturated cyclic hydrocarbon group is preferably a cycloalkyl group. The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms. The saturated cyclic hydrocarbon group preferably has 5 to 10 carbon atoms. The aromatic hydrocarbon group preferably has 6 to 10 carbon atoms.
As the aromatic amine represented by the formula (C2), an amine represented by the formula (C2-1):




wherein Rc5 and Rc6 are the same as defined above, and Rc7 is independently in each occurrence an aliphatic hydrocarbon group, an alkoxy group, a saturated cyclic hydrocarbon group or an aromatic hydrocarbon group, and the aliphatic hydrocarbon group, the alkoxy group, the saturated cyclic hydrocarbon group and the aromatic hydrocarbon group can have one or more substituents selected from the group consisting of a hydroxyl group, an amino group, an amino group having one or two C1-C4 alkyl groups and a C1-C6 alkoxy group, and m3 represents an integer of 0 to 3, is preferable. The aliphatic hydrocarbon group is preferably an alkyl group and the saturated cyclic hydrocarbon group is preferably a cycloalkyl group. The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms. The saturated cyclic hydrocarbon group preferably has 5 to 10 carbon atoms. The aromatic hydrocarbon group preferably has 6 to 10 carbon atoms. The alkoxy group preferably has 1 to 6 carbon atoms.

Examples of the aromatic amine represented by the formula (C2) include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, and diphenylamine, and among them, preferred is diisopropylaniline and more preferred is 2,6-diisopropylaniline .
Other examples of the basic compound include amines represented by the formulae (C3) to (C11):




wherein Rc8, Rc20, R21, and Rc23 to Rc28 independently represent an aliphatic hydrocarbon group, an alkoxy group, a saturated cyclic hydrocarbon group or an aromatic hydrocarbon group, and the aliphatic hydrocarbon group, the alkoxy group, the saturated cyclic hydrocarbon group and the aromatic hydrocarbon group can have one or more substituents selected from the group consisting of a hydroxyl group, an amino group, an amino group having one or two C1-C4 alkyl groups and a C1-C6 alkoxy group,

    Rc9, Rc10, Rc11 to Rc14, Rc16 to Rc19, and Rc22 independently represents a hydrogen atom, an aliphatic hydrocarbon group, a saturated cyclic hydrocarbon group or an aromatic hydrocarbon group, and the aliphatic hydrocarbon group, the saturated cyclic hydrocarbon group and the aromatic hydrocarbon group can have one or more substituents selected from the group consisting of a hydroxyl group, an amino group, an amino group having one or two C1-C4 alkyl groups and a C1-C6 alkoxy group,
    Rc15 is independently in each occurrence an aliphatic hydrocarbon group, a saturated cyclic hydrocarbon group or an alkanoyl group, Lc1 and Lc2 each independently represents a divalent aliphatic hydrocarbon group, —CO—, —C(═NH)—, —C(═NRc3)—, —S—, —S—S— or a combination thereof and Rc3 represents a C1-C4 alkyl group,
    O3 to u3 each independently represents an integer of 0 to 3 and n3 represents an integer of 0 to 8.


The aliphatic hydrocarbon group has preferably 1 to 6 carbon atoms, and the saturated cyclic hydrocarbon group has preferably 3 to 6 carbon atoms, and the alkanoyl group has preferably 2 to 6 carbon atoms, and the divalent aliphatic hydrocarbon group has preferably 1 to 6 carbon atoms. The divalent aliphatic hydrocarbon group is preferably an alkylene group.
Examples of the amine represented by the formula (C3) include hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethydipentylamine, ethyldihexylamine, ethydiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4′-diamino-1,2-diphenylethane, 4,4′-diamino-3,3′-dimethyldiphenylmethane and 4,4′-diamino-3,3′-diethyldiphenylmethane.
Examples of the amine represented by the formula (C4) include piperazine. Examples of the amine represented by the formula (C5) include morpholine. Examples of the amine represented by the formula (C6) include piperidine and hindered amine compounds having a piperidine skeleton as disclosed in JP 11-52575 A. Examples of the amine represented by the formula (C7) include 2,2′-methylenebisaniline. Examples of the amine represented by the formula (C8) include imidazole and 4-methylimidazole. Examples of the amine represented by the formula (C9) include pyridine and 4-methylpyridine. Examples of the amine represented by the formula (C10) include di-2-pyridyl ketone, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane, 1,3-di(4-pyridyl)propane, 1,2-bis(2-pyridyl)ethene, 1,2-bis(4-pyridyl)ethene, 1,2-di(4-pyridyloxy)ethane, 4,4′-dipyridyl sulfide, 4,4′-dipyridyl disulfide, 2,2′-dipyridylamine and 2,2′-dipicolylamine. Examples of the amine represented by the formula (C11) include bipyridine.
When the basic compound other than Compound (I) is used, the amount of the basic compound other than Compound (I) is usually 200 parts by weight per 100 parts by weight of Compound (I), and preferably 150 parts by weight per 100 parts by weight of Compound (I) and more preferably 100 parts by weight per 100 parts by weight of Compound (I).
The photoresist composition of the present invention usually contains one or more solvents. Examples of the solvent include a glycol ether ester such as ethyl cellosolve acetate, methyl cellosolve acetate and propylene glycol monomethyl ether acetate; a glycol ether such as propylene glycol monomethyl ether; an acyclic ester such as ethyl lactate, butyl acetate, amyl acetate and ethyl pyruvate; a ketone such as acetone, methyl isobutyl ketone, 2-heptanone and cyclohexanone; and a cyclic ester such as γ-butyrolactone.
The amount of the solvent is usually 90% by weight or more, preferably 92% by weight or more preferably 94% by weight or more based on total amount of the photoresist composition of the present invention. The amount of the solvent is usually 99.9% by weight or less and preferably 99% by weight or less based on total amount of the photoresist composition of the present invention.
The photoresist composition of the present invention can contain, if necessary, a small amount of various additives such as a sensitizer, a dissolution inhibitor, other polymers, a surfactant, a stabilizer and a dye as long as the effect of the present invention is not prevented.
The photoresist composition of the present invention is useful for a chemically amplified photoresist composition.
A photoresist pattern can be produced by the following steps (1) to (5):

    
    
        (1) a step of applying the photoresist composition of the present invention on a substrate,
    
    


(2) a step of forming a photoresist film by conducting drying,
(3) a step of exposing the photoresist film to radiation,
(4) a step of baking the exposed photoresist film, and
(5) a step of developing the baked photoresist film with an alkaline developer, thereby forming a photoresist pattern.
The applying of the photoresist composition on a substrate is usually conducted using a conventional apparatus such as spin coater. The photoresist composition is preferably filtrated with filter having 0.2 μm of a pore size before applying. Examples of the substrate include a silicon wafer or a quartz wafer on which a sensor, a circuit, a transistor or the like is formed.
The formation of the photoresist film is usually conducted using a heating apparatus such as hot plate or a decompressor, and the heating temperature is usually 50 to 200° C., and the operation pressure is usually 1 to 1.0*105 Pa.
The photoresist film obtained is exposed to radiation using an exposure system. The exposure is usually conducted through a mask having a pattern corresponding to the desired photoresist pattern. Examples of the exposure source include a light source radiating laser light in a UV-region such as a KrF excimer laser (wavelength: 248 nm), an ArF excimer laser (wavelength: 193 nm) and a F2 laser (wavelength: 157 nm), and a light source radiating harmonic laser light in a far UV region or a vacuum UV region by wavelength conversion of laser light from a solid laser light source (such as YAG or semiconductor laser).
The temperature of baking of the exposed photoresist film is usually 50 to 200° C., and preferably 70 to 150° C.
The development of the baked photoresist film is usually carried out using a development apparatus. The alkaline developer used may be any one of various alkaline aqueous solution used in the art. Generally, an aqueous solution of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammoniumhydroxide (commonly known as “choline”) is often used. After development, the photoresist pattern formed is preferably washed with ultrapure water, and the remained water on the photoresist pattern and the substrate is preferably removed.
The photoresist composition of the present invention provides a photoresist pattern showing good Mask Error Enhancement Factor (MEEF), and therefore, the photoresist composition of the present invention is suitable for ArF excimer laser lithography, KrF excimer laser lithography, ArF immersion lithography, EUV (extreme ultraviolet) lithography, EUV immersion lithography and EB (electron beam) lithography.
EXAMPLES
The present invention will be described more specifically by Examples, which are not construed to limit the scope of the present invention.
The “%” and “part(s)” used to represent the content of any component and the amount of any material used in the following examples and comparative examples are on a weight basis unless otherwise specifically noted. The weight-average molecular weight of any material used in the following examples is a value found by gel permeation chromatography [HLC-8120GPC Type, Column (Three Columns with guard column): TSKgel Multipore HXL-M, manufactured by TOSOH CORPORATION, Solvent: tetrahydrofuran, Flow rate: 1.0 mL/min., Detector: RI detector, Column temperature: 40° C., Injection volume: 100 μL] using standard polystyrene, manufactured by TOSOH CORPORATION, as a standard reference material. Structures of compounds were determined by NMR (EX-270 Type, manufactured by JEOL LTD.).
Monomers used in the following Resin Synthetic Examples are following Monomer A, Monomer B, Monomer C, Monomer D, Monomer E, Monomer F and Monomer G.







Resin Synthesis Example 1
Into a flask equipped with a stirrer, a condenser and a thermometer, 24.47 parts of Monomer A, 43.00 parts of Monomer B, 4.91 parts of Monomer C and 63.64 parts of Monomer D (molar ratio: Monomer A/Monomer B/Monomer C/Monomer D=18/25/3/54) were charged under an atmosphere of nitrogen, and 1,4-dioxane of which amount was 1.5 times part based on total parts of all monomers was added thereto to prepare a solution. To the solution, azobisisobutyronitrile as an initiator in a ratio of 0.8 mol % based on all monomer molar amount and azobis(2,4-dimethylvaleronitrile) as an initiator in a ratio of 2.4 mol % based on all monomer molar amount were added, and the obtained mixture was heated at 66° C. for about 5 hours. The reaction mixture obtained was poured into a large amount of methanol to cause precipitation. The precipitate was isolated and washed with methanol to obtain a resin having a weight-average molecular weight of about 1.1×104 and a dispersion degree of 1.69. This resin had the structural units represented by the followings. This resin is called as Resin A1.




Resin Synthesis Example 2
A solution prepared by dissolving 10.54 parts of 2-methyl-2-adamantyl methacrylate, 14.60 parts of p-acetoxystyrene and 3.55 parts of 3-hydroxy-1-adamantyl methacrylate in 47.09 parts of 1,4-dioxane was heated up to 87° C. To a solution, 2.96 parts of azobisisobutyronitrile was added, and the resultant mixture was stirred for 6 hours at 87° C. The obtained reaction mixture was cooled, and then, was poured into a mixture of 285.67 parts of methanol and 122.43 parts of ion-exchanged water. The precipitate was collected by filtration. The obtained precipitate and 2.93 parts of 4-dimethylaminopyridine were mixed with methanol of which amount was the same as that of the obtained precipitate, and the resultant mixture was refluxed for 15 hours. The obtained mixture was cooled and then, was neutralized with 2.16 parts of glacial acetic acid. The obtained mixture was poured into excess amount of water to cause precipitation. The precipitate was collected by filtration and dissolved in acetone. The obtained solution was poured into excess amount of water to cause precipitation, and the precipitate was collected by filtration. This operation was repeated three times to obtain 28.15 parts of a resin having a weight-average molecular weight of about 3.7×103. This resin had the structural units represented by the followings. This resin is called as Resin A2.




Resin Synthesis Example 3
Into a flask equipped with a stirrer, a condenser and a thermometer, 42.00 parts of Monomer E, 3.14 parts of Monomer A, 3.03 parts of Monomer C, 4.44 parts of Monomer F and 31.85 parts of Monomer G (molar ratio: Monomer E/Monomer A/Monomer C/Monomer F/Monomer G=50/5/4/5.5/35.5) were charged under an atmosphere of nitrogen, and 1,4-dioxane of which amount was 1.2 times part based on total parts of all monomers was added thereto to prepare a solution. To the solution, azobisisobutyronitrile as an initiator in a ratio of 3.0 mol % based on all monomer molar amount and azobis(2,4-dimethylvaleronitrile) as an initiator in a ratio of 9.0 mol % based on all monomer molar amount were added, and the obtained mixture was heated at 75° C. for about 5 hours. The reaction mixture obtained was poured into a large amount of a mixture of methanol and water to cause precipitation. The precipitate was isolated and washed with methanol to obtain a resin having a weight-average molecular weight of about 3.6×103 and a dispersion degree of 1.54, in a yield of 71%. This resin had the structural units represented by the followings. This resin is called as Resin A3.




Resin Synthesis Example 4
Into a flask equipped with a stirrer, a condenser and a thermometer, 40.00 parts of Monomer E, 2.99 parts of Monomer A, 3.08 parts of Monomer F, 28.20 parts of Monomer G and 4.15 parts of Monomer D (molar ratio: Monomer E/Monomer A/Monomer F/Monomer G/Monomer D=50/5/4/33/8) were charged under an atmosphere, and 1,4-dioxane of which amount was 1.2 times part based on total parts of all monomers was added thereto to prepare a solution. To the solution, azobisisobutyronitrile as an initiator in a ratio of 3.0 mol % based on all monomer molar amount and azobis(2,4-dimethylvaleronitrile) as an initiator in a ratio of 9.0 mol % based on all monomer molar amount were added, and the obtained mixture was heated at 75° C. for about 5 hours. The reaction mixture obtained was poured into a large amount of a mixture of methanol and water to cause precipitation. The precipitate was isolated and washed with methanol to obtain a resin having a weight-average molecular weight of about 3.5×103 and a dispersion degree of 1.57, in a yield of 73%. This resin had the structural units represented by the followings. This resin is called as Resin A4.




Synthesis Example 1




A mixture of 50 parts of a compound represented by the formula (C1-1-a) and 10 parts of a compound represented by the formula (C1-1-b) was stirred at 80° C. for 6 hours. The obtained mixture was cooled down to room temperature, and 40 parts of ion-exchanged water was added thereto. The resultant mixture was extracted with 120 parts of ethyl acetate. The obtained organic layer was washed five times with 40 parts of ion-exchanged water, and then, was dried over magnesium sulfate. After removing magnesium sulfate by filtration, the obtained filtrate was concentrated to obtain 9 parts of a compound represented by the formula (C1-1) in the form of a yellow liquid. This compound is called as Compound C1. 1H-NMR (CDCl3, Internal standard: tetramethylsilane): δ (ppm) 1.32-1.58 (m, 12H), 2.31 (t, 2H, J=7.4 Hz), 2.43 (t, 4H, J=4.6 Hz), 3.63 (t, 2H, J=6.6 Hz), 3.72 (t, 4H, J=4.6 Hz)
Synthesis Example 2




A mixture of 47 parts of a compound represented by the formula (C1-2-a), 50 parts of a compound represented by the formula (C1-2-b) and 28 parts of ion-exchanged water was stirred at 97° C. for 2 hours. The obtained mixture was cooled down to room temperature, and 448 parts of saturated aqueous sodium hydroxide solution was added thereto. The resultant mixture was extracted with 186 parts of methyl tert-butyl ether. The obtained organic layer was dried over magnesium sulfate. After removing magnesium sulfate by filtration, the obtained filtrate was concentrated. The obtained residue was distilled under reduced pressure to obtain 63 parts of a compound represented by the formula (C1-2) in the form of a colorless liquid. This compound is called as Compound C2.
1H-NMR (CDCl3, Internal standard: tetramethylsilane): δ (ppm) 1.14-1.28 (m, 4H), 1.71-1.84 (m, 3H), 2.09-2.22 (m, 2H), 2.39-2.46 (m, 2H), 2.69-2.76 (m, 2H), 3.33-3.42 (m, 1H), 3.64-3.78 (m, 4H), 3.91 (s, 1H)
Synthesis Example 3




A mixture of 120 parts of a compound represented by the formula (C1-3-a) and 24 parts of a compound represented by the formula (C1-3-b) was stirred at 40° C. for 4 hours. The obtained mixture was cooled down to room temperature, and 96 parts of ion-exchanged water was added thereto. The resultant mixture was extracted with 288 parts of ethyl acetate. The obtained organic layer was washed five times with 96 parts of ion-exchanged water, and then, was dried over magnesium sulfate. After removing magnesium sulfate by filtration, the obtained filtrate was concentrated to obtain 22 parts of a compound represented by the formula (C1-3) in the form of a milky solid. This compound is called as Compound C3. 1H-NMR (CDCl3, Internal standard: tetramethylsilane): δ (ppm) 1.27-1.59 (m, 20H), 2.31 (t, 2H, J=7.4 Hz), 2.43 (t, 4H, J=4.8 Hz), 3.63 (t, 2H, J=6.6 Hz), 3.72 (t, 4H, J=4.6 Hz)
Examples 1 to 4 and Reference Examples 1 to 2
<Resin >


    Resin A1

<Acid Generator>

    B1:






<Quencher>

    C1: Compound C1
    C2: Compound C2
    C3: Compound C3
    X1: 2,6-diisopropylaniline
    X2: N-(2-hydroxyethyl)morpholine

<Solvent>




















E1:
propylene glycol monomethyl ether acetate
190 parts




propylene glycol monomethyl ether
 20 parts




2-heptanone
 35 parts




γ-butyrolactone
 3 parts



E2:
propylene glycol monomethyl ether acetate
400 parts




propylene glycol monomethyl ether
150 parts




γ-butyrolactone
 5 parts










The following components were mixed and dissolved to prepare photoresist compositions.
Resin (kind and amount are described in Table 1)
Acid generator (kind and amount are described in Table 1)
Quencher (kind and amount are described in Table 1)
Solvent E1












TABLE 1







Acid






Resin
generator
Quencher



(kind/amount
(kind/amount
(kind/amount
PB
PEB


Ex. No.
(part))
(part))
(part))
(° C.)
(° C.)







Ex. 1
A1/10
B1/1.38
C1/0.157
100
95


Ex. 2
A1/10
B1/1.38
C2/0.183
100
95


Ex. 3
A1/10
B1/1.50
C1/0.231
100
95


Ex. 4
A1/10
B1/1.38
C3/0.259
100
95


Ref. Ex. 1
A1/10
B1/1.38
X1/0.150
100
95


Ref. Ex. 2
A1/10
B1/1.38
X2/0.125
100
95









Silicon wafers were each coated with “ARC-29SR”, which is an organic anti-reflective coating composition available from Nissan Chemical Industries, Ltd., and then baked under the conditions: 205° C., 60 seconds, to form a 930 Å-thick organic anti-reflective coating. Each of the photoresist compositions prepared as above was spin-coated over the anti-reflective coating so that the thickness of the resulting film became 0.11 μm after drying. The silicon wafers thus coated with the respective photoresist compositions were each prebaked on a direct hotplate at a temperature shown in column of “PB” of Table 1 for 60 seconds. Using an ArF excimer stepper (“XT:1900Gi” manufactured by ASML, NA=1.35, Quadrupole on axis, σ out=0.70, σ in=0.50, X—Y polarization), each wafer thus formed with the respective photoresist film was subjected to line and space pattern exposure, with the exposure quantity being varied stepwise.
After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column of “PEB” of Table 1 for 60 seconds and then to paddle development for 60 seconds with an aqueous solution of 2.38 wt % tetramethylammonium hydroxide.
Each of line and space patterns developed on the organic anti-reflective coating substrate after the development was observed with a scanning electron microscope, the results of which are shown in Table 2.
Effective Sensitivity (ES): It was expressed as the amount of exposure that the line pattern and the space pattern of 42 nm become 1:1 after exposure and development.
Line Width Roughness (LWR): The line widths of the line and space pattern at the exposure amount of ES were measured and the values of 3a thereof were calculated based on the results of the measurement and shown in Table 2. The value of 3σ is one of index showing a variability of the line width, and the smaller the value of 3σ is, the better LWR is.











TABLE 2







Ex. No.
ES (mJ/cm2)
LWR (nm)









Ex. 1
32.0
3.09



Ex. 2
44.0
3.17



Ex. 3
40.0
3.17



Ex. 4
40.6
2.89



Ref. Ex. 1
38.0
3.59



Ref. Ex. 2
43.0
3.45










The heights of the line pattern of the line and space pattern obtained in Example 4 and Reference Examples 1 and 2 were measured. The closer to 0.11 μm (110 nm), which was the thickness of the film formed by spin-coating the photoresist composition over the anti-reflective coating and drying, the height of the line pattern of the line and space pattern is, the better the line and space pattern is. The height of the line pattern of the line and space pattern obtained in Example 4 was 86.4 nm, the height of the line pattern of the line and space pattern obtained in Reference Example 1 was 76.7 nm, and the height of the line pattern of the line and space pattern obtained in Reference Example 2 was 45.0 nm.
Examples 5 and 6
<Resin >


    Resin A3, A4

<Acid Generator>

    B1:






<Quencher>

    C3: Compound C3

<Solvent>




















E3:
propylene glycol monomethyl ether acetate
250 parts 




propylene glycol monomethyl ether
20 parts




2-heptanone
10 parts




γ-butyrolactone
 3 parts










The following components were mixed and dissolved to prepare photoresist compositions.
Resin (kind and amount are described in Table 3)
Acid generator (kind and amount are described in Table 3)
Quencher (kind and amount are described in Table 3)
Solvent E3












TABLE 3







Acid






Resin
generator
Quencher



(kind/amount
(kind/amount
(kind/amount
PB
PEB


Ex. No.
(part))
(part))
(part))
(° C.)
(° C.)







Ex. 5
A3/10
B1/0.95
C3/0.025
90
80


Ex. 6
A4/10
B1/0.95
C3/0.025
90
80









Silicon wafers were coated with “ARC-29SR”, which is an organic anti-reflective coating composition available from Nissan Chemical Industries, Ltd., and then baked under the conditions: 205° C., 60 seconds, to form a 930 Å-thick organic anti-reflective coating. The photoresist composition prepared as above was spin-coated over the anti-reflective coating so that the thickness of the resulting film became 0.10 μm after drying. Each silicon wafer thus coated with the photoresist composition was prebaked on a direct hotplate at a temperature shown in column of “PB” of Table 3 for 60 seconds. Using an ArF excimer stepper (“XT:1900Gi” manufactured by ASML, NA=1.30, 3⁄4 Annular, X-Y polarization), each wafer thus formed with the photoresist film was subjected to contact hole pattern exposure using five photomasks having pitch of 110 nm and hole diameter of 62 to 66 nm with 1 nm increments in between.
After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column of “PEB” of Table 3 for 60 seconds and then to paddle development for 60 seconds with an aqueous solution of 2.38 wt % tetramethylammonium hydroxide.
Each of hole patterns developed on the organic anti-reflective coating substrate after the development was observed with a scanning electron microscope, the results of which are shown in Table 4.
Effective Sensitivity (ES): It was expressed as the amount of exposure that hole diameter of the hole pattern became 60 nm and pitch of the hole pattern became 110 nm after exposure and development.
Focus margin (DOF): The photoresist patterns were obtained at the exposure amount of ES, with the focal point distance being varied stepwise. Each of patterns developed on the organic anti-reflective coating substrate after the development were observed and the focal point distances when the patterns of which line width was within 60 nm±5% (about 57.0 to 63.0 nm) were obtained were measured and the difference between the max value of the focal point distance and the minimum value of the focal point distance was calculated. The bigger the difference is, the better DOF is.
Mask Error Enhancement Factor (MEEF): Hole diameters of each hole patterns exposed at the exposure amount of ES using masks having pitch of 110 nm and hole diameter of 62 to 66 nm with 1 nm increments in between and developed were measured. MEEF was expressed as the variation of the hole diameter of the obtained hole pattern per the hole diameter of the used photomask. The smaller the variation is, the better MEEF is.












TABLE 4







Ex. No.
ES (mJ/cm2)
DOF (μm)
MEEF









Ex. 5
40
0.27
2.09



Ex. 6
30
0.27
2.14










Example 7 and Comparative Examples 3
Resin


    Resin A2

<Acid Generator>

    B2:






<Quencher>

    C3: Compound C3
    X1: 2,6-diisopropylaniline

<Solvent>




















E2:
propylene glycol monomethyl ether acetate
400 parts




propylene glycol monomethyl ether
150 parts




γ-butyrolactone
 5 parts










The following components were mixed and dissolved to prepare photoresist compositions.
Resin (kind and amount are described in Table 5)
Acid generator (kind and amount are described in Table 5)
Quencher (kind and amount are described in Table 5)
Solvent E2












TABLE 5







Acid






Resin
generator
Quencher



(kind/amount
(kind/amount
(kind/amount
PB
PEB


Ex. No.
(part))
(part))
(part))
(° C.)
(° C.)







Ex. 7
A2/10
B2/4.0
C3/0.125
110
110


Comp. Ex. 3
A2/10
B2/4.0
X1/0.140
110
110









Silicon wafers were each contacted with hexamethyldisilazane at 90° C. for 60 seconds on a direct hot plate and each of the photoresist compositions prepared as above was spin-coated over the silicon wafer to give a film thickness after drying of 0.04 μm. After application of each of the photoresist compositions, the silicon wafers thus coated with the respective resist compositions were each prebaked on a direct hotplate at a temperature shown in column “PB” in Table 5 for 60 seconds. Using a writing electron beam lithography system (“HL-800D” manufactured by Hitachi, Ltd., 50 KeV), each wafer on which the respective resist film had been thus formed was exposed to a line and space pattern, while changing stepwise the exposure quantity.
After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column “PEB” in Table 5 for 60 seconds and then to paddle development with an aqueous solution of 2.38% by weight tetramethylammonium hydroxide for 60 seconds.
Each of a photoresist pattern developed on the silicon substrate after the development was observed with a scanning electron microscope, and the results of which are shown in Table 6.
Resolution: The amount of exposure that each photoresist pattern became 1:1 line and space pattern was as effective sensitivity. When line and space pattern having 50 nm or less of the line width was developed at effective sensitivity, resolution is good and its evaluation is marked by “◯”, and when line and space pattern having more than 50 nm of the line width was not developed at effective sensitivity, resolution is bad and its evaluation is marked by “X”.
Line Edge Roughness (LER): The photoresist pattern wherein the line width of the line and space pattern was 0.10 μm and the line pattern and the space pattern become 1:1 was observed with a scanning electron microscope, and the difference between the height of the highest point and height of the lowest point of the scabrous wall surface of the photoresist pattern was calculated with SuMMIT software available from EUV Technology. When the difference is 6 nm or less, LER is good and its evaluation is marked by “◯”, and when the difference is more than 6 nm, LER is bad and its evaluation is marked by “X”. The smaller the difference is, the better the pattern profile is.











TABLE 6







Ex. No.
Resolution
LER









Ex. 7
◯
◯



Com. Ex. 3
X
X










Example 8
Resin


    Resin A2

<Acid Generator>

    B2:






<Quencher>

    C3: Compound C3

<Solvent>




















E2:
propylene glycol monomethyl ether acetate
400 parts




propylene glycol monomethyl ether
150 parts




γ-butyrolactone
 5 parts










The following components were mixed and dissolved to prepare photoresist compositions.
Resin (kind and amount are described in Table 7)
Acid generator (kind and amount are described in Table 7)
Quencher (kind and amount are described in Table 7)
Solvent E2












TABLE 7







Acid






Resin
generator
Quencher



(kind/amount
(kind/amount
(kind/amount
PB
PEB


Ex. No.
(part))
(part))
(part))
(° C.)
(° C.)







Ex. 8
A2/10
B2/4.0
C3/0.125
110
110









Silicon wafer was contacted with hexamethyldisilazane at 90° C. for 60 seconds on a direct hot plate and the photoresist composition prepared as above was spin-coated over the silicon wafer to give a film thickness after drying of 0.04 μm. After application of the photoresist composition, the silicon wafer thus coated with the photoresist composition was prebaked on a direct hotplate at a temperature shown in column “PB” in Table 7 for 60 seconds. Using an EUV (extreme ultraviolet) exposure system, each wafer on which the respective resist film had been thus formed was exposed to a line and space pattern, while changing stepwise the exposure quantity.
After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column “PEB” in Table 7 for 60 seconds and then to paddle development with an aqueous solution of 2.38% by weight tetramethylammonium hydroxide for 60 seconds.
The pattern developed on the silicon substrate after the development was observed with a scanning electron microscope, and the results of which are shown in Table 8.
Resolution: The amount of exposure that the photoresist pattern became 1:1 line and space pattern was as effective sensitivity. The line width of the line and space pattern developed at effective sensitivity was measured, and its value is shown in Table 8.










TABLE 8







Ex. No.
Resolution (nm)









Ex. 8
26










The present photoresist composition provides a good resist pattern having good resolution and good pattern profile such as Line edge roughness, Line width roughness, Focus margin and Mask error enhancement factor, and is especially suitable for ArF excimer laser lithography, EB lithography and EUV lithography.

## Claims

1. A photoresist composition comprising a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, an acid generator and a compound represented by the formula (I):




wherein Z1 represents a C7-C20 alkylene group, a C3-C20 divalent saturated cyclic group or a divalent group formed by combining at least one C1-C6 alkylene group with at least one C3-C20 divalent saturated cyclic group.

2. The photoresist composition according to claim 1, wherein Z1 is a C7-C20 alkylene group or a C3-C20 divalent saturated cyclic group.

3. The photoresist composition according to claim 1, wherein Z1 is a C7-C12 alkylene group or a C6-C20 divalent saturated cyclic group.

4. The photoresist composition according to claim 1, wherein Z1 is an octane-1,8-diyl group, a dodecane-1,12-diyl group or a cyclohexane-1,2-diyl group.

5. The photoresist composition according to claim 1, 2, 3 or 4, wherein the acid generator is a salt represented by the formula (B1):




wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, Lb1 represents a single bond or a C1-C17 divalent saturated hydrocarbon group in which one or more methylene groups can be replaced by —O— or —CO—,
Y represents a C1-C18 aliphatic hydrocarbon group which can have one or more substituents, or a C3-C18 saturated cyclic hydrocarbon group which can have one or more substituents, and one or more methylene groups in the aliphatic hydrocarbon group and the saturated cyclic hydrocarbon group can be replaced by —O—, —CO— or —SO2—, and Z+ represents an organic cation.

6. The photoresist composition according to claim 5, wherein Lb1 is *-CO—O-Lb2- in which * represents a binding position to —C(Q1)(Q2)- and Lb2 represents a single bond or —CH2—.

7. The photoresist composition according to claim 5, wherein Z+ is a triarylsulfonium cation.

8. A process for producing a photoresist pattern comprising the following steps (1) to (5):
(1) a step of applying the photoresist composition according to claim 1 on a substrate,
(2) a step of forming a photoresist film by conducting drying,
(3) a step of exposing the photoresist film to radiation,
(4) a step of baking the exposed photoresist film, and
(5) a step of developing the baked photoresist film with an alkaline developer, thereby forming a photoresist pattern.