# Patent

## Title
Image sensor and method for manufacturing the same

## Abstract

Provided is an image sensor and method for manufacturing the same. In the image sensor, a first substrate has a lower metal line and a circuitry thereon. A crystalline semiconductor layer contacts the lower metal line and is bonded to the first substrate. A photodiode is provided in the crystalline semiconductor layer and electrically connected with the lower metal line. A light shielding layer is formed in regions of the photodiode.

## Background
CROSS-REFERENCE TO RELATED APPLICATION
The present application claims the benefit under 35 U.S.C. §119 of Korean Patent Application No. 10-2007-0090863, filed Sep. 7, 2007, which is hereby incorporated by reference in its entirety.
BACKGROUND
In general, an image sensor is a semiconductor device that converts an optical image to an electric signal. Image sensors are generally classified as a charge coupled device (CCD) image sensor or a complementary metal oxide silicon (CMOS) image sensor (CIS).
In a related art image sensor, a photodiode is formed in a substrate with transistor circuitry using ion implantation. As the size of a photodiode reduces more and more for the purpose of increasing the number of pixels without an increase in chip size, the area of a light receiving portion reduces, so that an image quality reduces.
Also, since a stack height does not reduce as much as the reduction in the area of the light receiving portion, the number of photons incident to the light receiving portion also reduces due to diffraction of light, called airy disk.
In a horizontal type CMOS image sensor according to the related art, a photodiode and a transistor are horizontally formed adjacent to each other on a substrate. Therefore, an additional region for the photodiode is required, which may decrease a fill factor region and limit the possibility of resolution.
Also, the horizontal type CMOS image sensor according to the related art may cause a crosstalk problem between pixels.
Moreover, in the horizontal type CMOS image sensor according to the related art, it is very difficult to achieve the optimized process of concurrently forming the photodiode and the transistor.
As an alternative to overcome this limitation, an attempt of forming a photodiode using amorphous silicon (Si), or forming a readout circuitry on a Si substrate and forming a photodiode on the readout circuitry using a method such as wafer-to-wafer bonding has been made (referred to as a “three-dimensional (3D) image sensor”). The photodiode is connected with the readout circuitry through a metal line.
BRIEF SUMMARY
Embodiments of the present invention provide an image sensor and a method for manufacturing the same that can provide a vertical integration of a transistor circuitry and a photodiode.
Embodiments also provide an image sensor and a method for manufacturing the same that can employ a vertical type photodiode capable of inhibiting crosstalk between photodiode pixels.
Embodiments also provide an image sensor and a method for manufacturing the same that can improve resolution and sensitivity.
Embodiments also provide an image sensor and a method for manufacturing the same that can employ a vertical type photodiode having reduced defects in the vertical type photodiode.
In one embodiment, an image sensor can comprise: a first substrate having a lower metal line and a circuitry thereon; a crystalline semiconductor layer contacting the lower metal line and bonded to the first substrate; a photodiode provided in the crystalline semiconductor layer and electrically connected with the lower metal line; and a light shielding layer in the photodiode in regions between pixels.
In an embodiment, a method for manufacturing an image sensor can comprise: preparing a first substrate having a lower metal line and a circuitry thereon; preparing a second substrate having a photodiode thereon, forming a light shielding layer in the photodiode of the second substrate; bonding the first substrate to the second substrate such that the photodiode in which the light shielding layer is formed electrically contacts the lower metal line, and removing a portion of the bonded second substrate to leave the photodiode on the first substrate.
In another embodiment, a method for manufacturing an image sensor comprises: preparing a first substrate having a lower metal line and a circuitry thereon; preparing a second substrate having a photodiode thereon; bonding the first substrate to the second substrate such that the photodiode contacts the lower metal line; removing a portion of the bonded second substrate to expose the photodiode; and forming a light shielding layer in the exposed photodiode.
The details of one or more embodiments are set forth in the accompanying drawings and the description below. Other features will be apparent from the description and drawings, and from the claims.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross-sectional view of an image sensor according to a first embodiment.
FIGS. 2 to 9 are cross-sectional views illustrating a method for manufacturing an image sensor according to the first embodiment.
FIG. 10 is a cross-sectional view of an image sensor according to another embodiment of the first embodiment.
FIG. 11 is a cross-sectional view of an image sensor according to a second embodiment.
FIGS. 12 to 17 are cross-sectional views illustrating a method for manufacturing an image sensor according to the second embodiment.
FIG. 18 is a cross-sectional view of an image sensor according to another embodiment of the second embodiment.



DETAILED DESCRIPTION
Embodiments of an image sensor and a method for manufacturing the same will be described in detail with reference to the accompanying drawings.
In the description of embodiments, it will be understood that when a layer (or film) is referred to as being ‘on’ another layer or substrate, it can be directly on another layer or substrate, or intervening layers may also be present. Further, it will be understood that when a layer is referred to as being ‘under’ another layer, it can be directly under another layer, or one or more intervening layers may also be present. In addition, it will also be understood that when a layer is referred to as being ‘between’ two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.
FIG. 1 is a cross-sectional view of an image sensor according to a first embodiment.
An image sensor according to the first embodiment can include: a first substrate 100 having a lower metal line 110 and circuitry (not shown) thereon; a crystalline semiconductor layer 210a (see FIG. 3) contacting the lower metal line 110 and bonded to the first substrate 100; a photodiode 210 provided in the crystalline semiconductor layer 210a and electrically connected with the lower metal line 110; and a light shielding layer 222 in the photodiode 210 arranged at boundaries between unit pixels.
The image sensor according to an embodiment can reduce defects in a photodiode by employing a vertical type photodiode in which the photodiode is positioned on the circuitry, and forming the photodiode in the crystalline semiconductor layer.
Also, the image sensor according to an embodiment can inhibit crosstalk between pixels due to an incident light by employing a vertical type photodiode and forming the light shielding layer 222 between pixels.
In an embodiment, the light shielding layer 222 can be a metallic light shielding layer. However, embodiments are not limited thereto. For example, the light shielding layer 222 can be made of any suitable material that reflects incident light and inhibits the incident light from passing through.
Also, an embodiment can secure an electrical insulation of the light shielding layer 222 by interposing an insulating layer 221 between the photodiode 210 and the light shielding layer 222.
Also, while FIG. 1 shows that an upper width of the light shielding layer 222 is narrower than a lower width of the light shielding layer 222, embodiments are not limited thereto.
The crystalline semiconductor layer can be a single crystalline semiconductor layer, but embodiments are not limited thereto. For example, the crystalline semiconductor layer can be a polycrystalline semiconductor layer.
Although the circuitry of the first substrate 100 is not shown, in the case of a CIS, the circuitry is not limited to a 4 Tr CIS having four transistors, but may be applied to a 1 Tr CIS, 3 Tr CIS, 5 Tr CIS, 1.5 Tr CIS (transistor-shared CIS), or the like.
Also, the lower metal line 110 formed on the first substrate 100 can include a lower metal (not shown) and a lower plug (not shown). An uppermost portion of the lower metal line 110 may function as a lower electrode of the photodiode.
The photodiode 210 can include a first conductive type conduction layer 214 in the crystalline semiconductor layer 210a, and a second conductive type conduction layer 216 on the first conductive type conduction layer 214 in the crystalline semiconductor layer.
For example, the photodiode 210 can include a lightly doped N-type conduction layer 214 formed in the crystalline semiconductor layer 210a, and a heavily doped P-type conduction layer 216 formed in the crystalline semiconductor layer, but embodiments are not limited thereto. For example, the first conductive type is not limited to N-type, and may be P-type.
Also, in another embodiment as shown in FIG. 10, the photodiode 210 can further include a heavily doped first conductive type conduction layer 212 beneath the first conductive type conduction layer 214 in the crystalline semiconductor layer. The heavily doped first conductive type conduction layer 212 may be formed for an ohmic contact to the first substrate 100.
For example, the photodiode 210 can further include a heavily doped N-type conduction layer 212 formed in the crystalline semiconductor layer.
In a further embodiment, a top metal 240 can be formed on the photodiode 210 and/or a color filter (not shown) can be formed on the photodiode 210.
A method for manufacturing an image sensor according to the first embodiment will now be described with reference to FIGS. 2 to 9.
As shown in FIG. 2, a first substrate 100 having a lower metal line 110 and a circuitry (not shown) can be prepared. Although the circuitry of the first substrate 100 is riot shown, in the case of CIS, the circuitry is not limited only to a 4 Tr CIS having four transistors as described.
Also, the lower metal line 110 can include a lower metal (not shown) and a lower plug (not shown).
As shown in FIG. 3, a crystalline semiconductor layer 210a can be formed on a second substrate 200. By forming a photodiode in the crystalline semiconductor layer 210a, it is possible to reduce defects in the photodiode.
In an embodiment, the second substrate 200 can include an insulating layer interposed between the second substrate 200 and the crystalline semiconductor layer 210a. In one embodiment, the crystalline semiconductor layer 210a can be epitaxially grown on the second substrate 200.
Alternatively, it is also possible to use an upper portion of the second substrate 200 itself as a crystalline semiconductor layer in which a photodiode is formed.
Next, as shown in FIG. 4, ions can be implanted into the crystalline semiconductor layer 210a to form a photodiode 210.
For example, a second conductive type conduction layer 216 can be formed at a lower portion of the crystalline semiconductor layer 210a. For example, a heavily doped P-type conduction layer 216 can be formed by performing a blanket ion implantation into the second substrate 200 (including the crystalline structure layer 210a) into a lower portion of the crystalline semiconductor layer 210a without a mask. For example, the second conductive type conduction layer 216 can be formed having a junction depth less than or equal to approximately 0.5 μm. The second conductive type conduction layer 216 can be formed in the crystalline semiconductor layer 210a near a surface of the second substrate 200.
Thereafter, a first conductive type conduction layer 214 can be formed on the second conductive type conduction layer 216. For example, a lightly doped N-type conduction layer 214 can be formed on the second conductive conduction layer 216 by performing a blanket ion implantation into an entire surface of the second substrate 200 without a mask. For example, the lightly doped first conductive type conduction layer 214 can be formed having a junction depth ranged from approximately 1.0 μm to 2.0 μm.
In a further embodiment as shown in FIG. 10 a heavily doped first conductive type conduction layer 212 can be formed on the first conductive type conduction layer 214. For example, a heavily doped N-type conduction layer 212 can be formed on the first conductive type conduction layer 214 by performing a blanket ion implantation into an entire surface of the second substrate 200 without a mask. For example, the heavily doped first conductive type conduction layer 212 can be formed having a junction depth ranging from approximately 0.05 μm to 0.2 μm.
Next, as shown in FIG. 5, a trench T can be formed in the crystalline semiconductor layer 210a in which the photodiode 210 is formed.
Then, an insulating layer 221 can be formed in the trench T at a bottom and sidewalls of the trench. In one embodiment, an oxide layer can be deposited on the trench T, but embodiments are not limited thereto. In an embodiment, an insulating layer can be formed on the crystalline semiconductor layer 210a, including in the trench T, and etched back to remain only in the trench T.
Next, as shown in FIG. 6, a metallic light shielding layer 222 can be formed on the insulating layer 221 of the trench T to form the light shielding layer 222.
For example, the light shielding layer 222 can be formed by depositing an opaque metallic light shielding layer 222 on the insulating layer 221 of the trench T and planarizing the deposited opaque metallic light shielding layer 222.
The planarizing can be a chemical mechanical polishing (CMP) or etchback process.
Next, referring to FIG. 7, the second substrate 200 can be bonded to the first substrate 100 such that the photodiode 210 of the second substrate 200 having the light shielding layer 222 contacts the lower metal line 110 of the first substrate 100.
For example, in one embodiment, the first substrate 100 and the second substrate 200 can be bonded by contacting the first substrate 100 and the second substrate 200, and then performing a plasma activation. However, embodiments are not limited thereto.
At this time, the bonding may be performed more easily when the insulating layer 221 of the second substrate 200 and the interlayer insulating layer of the first substrate 100 are made of the same material.
Also, when the first substrate 100 and the second substrate 200 are bonded to each other, the light shielding layer 222 and the lower metal line 110 are aligned such that the light shielding layer 222 does not contact the lower metal line 110.
Next, as shown in FIG. 8, a portion of the bonded second substrate 200 is removed to expose and leave the photodiode 210 on the first substrate 100.
For example, in the case where the second substrate 200 includes an insulating layer interposed between the second substrate 200 and the crystalline semiconductor layer, the lower portion of the second substrate 200 can be removed by back grinding, and the insulating layer exposed after the removal of the lower portion of the second substrate 200 can be removed by an etch to leave only the photodiode 210 on the first substrate 100.
Alternatively, in the case where part of the second substrate 200 itself is used as a crystalline semiconductor layer in which a photodiode is formed, hydrogen ions (H+) can be implanted, before bonding the first substrate 100 to the second substrate 200, into the lower portion of the crystalline semiconductor layer in which a photodiode is being formed, and the second substrate 200 can then be thermally annealed after being bonded to the first substrate 100 to transform the hydrogen ions (H+) into hydrogen gas (H2), thereby leaving only the photodiode and removing the second substrate.
Next, as shown in FIG. 9, a top metal 230 can be formed on the photodiode 210 and then a passivation (not shown) can be performed. Also, a color filter (not shown) can be further formed on the photodiode 210, and a microlens can be further formed on the color filter.
Also, in a further embodiment, a transparent conduction layer (not shown) can be formed between the photodiode 210 and the top metal 240 such that the top metal does not cover each pixel. In such embodiments, the transparent conduction layer performs the function of the top metal. The transparent conduction layer can be formed on the insulating layer 221 and does not electrically contact the light shielding layer 222. In one embodiment, the transparent conduction layer can be formed of indium-tin-oxide (ITO), but embodiments are not limited thereto. In certain embodiments, the transparent conduction layer can be formed to overlap at least two pixel regions. However, in other embodiments, the transparent conduction layer can be omitted.
The image sensor and the method for manufacturing the image sensor according to embodiments can reduce defects in a photodiode by employing a vertical type photodiode in which the photodiode is positioned on the circuitry, and forming the photodiode in a crystalline semiconductor layer.
Also, according to embodiments, crosstalk between pixels can be inhibited by employing a vertical type photodiode and forming a light shielding layer between the pixels.
FIG. 11 is a cross-sectional view of an image sensor according to a second embodiment, and FIGS. 12 to 17 are cross-sectional views illustrating a method for manufacturing an image sensor according to the second embodiment.
The second embodiment can employ the technical characteristics of the first embodiment.
For example, the image sensor according to the second embodiment can include: a first substrate 100 having a lower metal line 110 and a circuitry (not shown); a crystalline semiconductor layer 210a (see FIG. 3) contacting the lower metal line 110 and bonded to the first substrate 100; a photodiode 210 provided in the crystalline semiconductor layer 210a and electrically connected with the lower metal line 110; and a light shielding layer 224 in the photodiode 210 arranged at boundaries between pixels.
The subject image sensor can reduce defects in a photodiode by employing a vertical type photodiode in which the photodiode is positioned on the circuitry, and forming the photodiode in the crystalline semiconductor layer.
Also, the subject image sensor can inhibit crosstalk between pixels by employing a vertical type photodiode and forming the light shielding layer 224 between the pixels.
Meanwhile, unlike in the first embodiment, in the second embodiment, the light shielding layer 224 is formed in the photodiode 210 after the first substrate 100 and the second substrate 200 are bonded. Accordingly, the light shielding layer 224 in the second embodiment may be shaped such that its upper portion is wider than its lower portion. However, embodiments are not limited thereto.
In a specific embodiment as shown in FIG. 12, the first substrate 100 having a lower metal line 110 and a circuitry (not shown) can be prepared. The lower metal line 110 can include a lower metal (not shown) and a lower plug (not shown).
In addition, as shown in FIG. 13, a crystalline semiconductor layer 210a (see FIG. 3) can be formed on the second substrate 200. The photodiode 210 can be formed in the crystalline semiconductor layer 210a. 
In one embodiment, the second substrate 200 can include an insulating layer interposed between the second substrate 200 and the crystalline semiconductor layer 210a. 
In another embodiment, it is also possible to use an upper portion of the second substrate 200 itself as a crystalline semiconductor layer in which the photodiode can be formed.
The photodiode 210 can be formed by implanting ions into the crystalline semiconductor layer 210a. 
For example, a second conductive type conduction layer 216 can be formed at a lower portion of the crystalline semiconductor layer 210a. Thereafter, a first conductive type conduction layer 214 can be formed on the second conductive type conduction layer 216.
In a further embodiment as shown in FIG. 18 a heavily doped first conductive type conduction layer 212 can be formed on the first conductive type conduction layer 214.
Next, as shown in FIG. 14, the second substrate 200 can be bonded to the first substrate 100 such that the photodiode 210 of the second substrate 200 contacts the lower metal line 110 of the first substrate 100.
For example, the first substrate 100 and the second substrate 200 can be bonded by contacting the first substrate 100 and the second substrate 200 and then performing a plasma activation. However, embodiments are not limited thereto.
Next, as shown in FIG. 15, a portion of the bonded second substrate 200 is removed to expose and leave the photodiode 210 on the first substrate 100.
For example, in the case where the second substrate 200 includes an insulating layer interposed between the second substrate 200 and the crystalline semiconductor layer, the portion of the second substrate 200 can be removed by back grinding, and the insulating layer exposed after the removal of the portion of the second substrate 200 can be removed by an etch to leave only the photodiode 210 on the first substrate 100.
Alternatively, in the case where part of the second substrate 200 itself is used as a crystalline semiconductor layer in which a photodiode is formed, hydrogen ions (H+) can be implanted, before bonding the first substrate 100 to the second substrate 200, into the lower portion of the crystalline semiconductor layer in which a photodiode is formed, and the second substrate 200 can then be thermally annealed after being bonded to the first substrate 100 to transform the hydrogen ions (H+) into hydrogen gas (H2), thereby leaving only the photodiode and removing the second substrate.
Next, as shown in FIG. 16, a light shielding layer 224 that can inhibit crosstalk between pixels can be formed in the photodiode 210 remaining on the first substrate 100 after removing the portion of the second substrate 200.
For example, the light shielding layer 224 can be formed by forming a trench in the photodiode 210, forming an insulating layer 223 in the trench and forming a metallic light shielding layer in the trench on the insulating layer 223.
In another embodiment, the light shielding layer 224 can be formed by forming a trench in the photodiode 210, depositing an oxide layer 223 in the trench and forming an opaque metal layer in the trench on the oxide layer 223.
Next, as shown in FIG. 17, a top metal 240 can be formed on the photodiode 210, and then a passivation may be performed. Also, a color filter (not shown) can be further formed on the photodiode 210, and a microlens can be further formed on the color filter.
Any reference in this specification to “one embodiment,” “an embodiment,” “example embodiment,” etc., means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with any embodiment, it is submitted that it is within the purview of one skilled in the art to effect such feature, structure, or characteristic in connection with other ones of the embodiments.
Although embodiments have been described with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this disclosure. More particularly, various variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the disclosure, the drawings and the appended claims. In addition to variations and modifications in the component parts and/or arrangements, alternative uses will also be apparent to those skilled in the art.

## Claims

1. A method for manufacturing an image sensor, comprising:
preparing a first substrate having a lower metal line and circuitry thereon;
preparing a second substrate having a photodiode thereon;
forming a light shielding layer in the photodiode of the second substrate;
bonding the first substrate to the second substrate such that the photodiode in which the light shielding layer is formed electrically contacts the lower metal line; and
removing a portion of the bonded second substrate to leave the photodiode on the first substrate;
wherein the forming of the light shielding layer in the photodiode of the second substrate comprises:
forming a trench in the photodiode corresponding to a region between pixels;
forming an insulating layer in the trench; and
forming a metal in the trench on the insulating layer to fill the trench.

2. The method of claim 1, wherein the preparing of the second substrate comprises:
forming a crystalline semiconductor layer on the second substrate; and
forming a photodiode in the crystalline semiconductor layer.

3. The method of claim 2, wherein the forming of the photodiode in the crystalline semiconductor layer comprises:
forming a second conductive type conduction layer in the crystalline semiconductor layer; and
forming a first conductive type conduction layer in the crystalline semiconductor layer on the second conductive type conduction layer.

4. The method of claim 3, wherein the forming of the photodiode in the crystalline semiconductor layer further comprises:
after the forming of the first conductive type conduction layer, forming a heavily doped first conductive type conduction layer in the crystalline semiconductor layer on the first conductive type conduction layer.

5. The method of claim 1, after the removing of the portion of the bonded second substrate, further comprising forming a transparent conduction layer on the photodiode.

6. A method for manufacturing an image sensor, comprising:
preparing a first substrate having a lower metal line and a circuitry thereon;
preparing a second substrate having a photodiode thereon;
bonding the first substrate to the second substrate such that the photodiode contacts the lower metal line;
removing a portion of the bonded second substrate to expose the photodiode on the first substrate; and
forming a light shielding layer in portions of the exposed photodiode;
wherein the forming of the light shielding layer in the portions of the exposed photodiode comprises:
forming a trench in the photodiode corresponding to a region between pixels;
forming an insulating layer in the trench; and
forming a metal in the trench on the insulating layer to fill the trench.

7. A method for manufacturing an image sensor, comprising:
preparing a first substrate having a lower metal line and a circuitry thereon;
preparing a second substrate having a photodiode thereon;
bonding the first substrate to the second substrate such that the photodiode contacts the lower metal line;
removing a portion of the bonded second substrate to expose the photodiode on the first substrate; and
forming a light shielding layer in ions of the exposed photodiode;
wherein the preparing of the second substrate comprises:
forming a crystalline semiconductor layer on the second substrate; and
forming a photodiode in the crystalline semiconductor layer.

8. The method of claim 7, wherein the forming of the photodiode in the crystalline semiconductor layer comprises:
forming a second conductive type conduction layer in the crystalline semiconductor layer; and
forming a first conductive type conduction layer in the crystalline semiconductor layer on the second conductive type conduction layer.

9. The method of claim 8, wherein the forming of the photodiode in the crystalline semiconductor layer further comprises:
after the forming of the first conductive type conduction layer, forming a heavily doped first conductive type conduction layer in the crystalline semiconductor layer on the first conductive type conduction layer.