# Patent

## Title
Inkjet printhead having nozzle arrangements with actuator pivot anchors

## Abstract

Provided is an inkjet printhead having a plurality of nozzle arrangements for ejecting ink onto a printing medium. Each nozzle arrangement includes a substrate defining an ink chamber having an ink inlet and a plurality of ink ejection ports, the chamber and ink supply channel being in fluid communication via the ink inlet. Each arrangement also includes a pivot anchor arranged on the substrate, and an actuator fast with the pivot anchor and arranged to cause selective ejection of ink from any one of the ejection ports while simultaneously causing an inflow of ink from the ink supply channel into the chamber via the ink inlet.

## Background
CROSS REFERENCES TO RELATED APPLICATIONS
The present application is a continuation of U.S. application Ser. No. 11/144,799 filed on Jun. 6, 2005, now issued U.S. Pat. No. 7,416,282, which is a continuation of U.S. application Ser. No. 10/882,772 filed on Jul. 2, 2004, now issued as U.S. Pat. No. 6,938,990, which is a continuation of U.S. application Ser. No. 10/302,604 filed on Nov. 23, 2002, now issued as U.S. Pat. No. 6,787,051, which is a continuation of U.S. application Ser. No. 09/112,801 filed on Jul. 10, 1998, now issued as U.S. Pat. No. 6,491,833, the entire contents of which are herein incorporated by reference.
The following Australian provisional patent applications are hereby incorporated by cross-reference. For the purposes of location and identification, US patent applications identified by their US patent application serial numbers (USSN) are listed alongside the Australian applications from which the US patent applications claim the right of priority. from which the US patents/patent applications claim the right of priority.














CROSS-




REFERENCED
US PATENT/PATENT



AUSTRALIAN
APPLICATION (CLAIMING



PROVISIONAL
RIGHT OF PRIORITY FROM



PATENT
AUSTRALIAN PROVISIONAL



APPLICATION NO.
APPLICATION)









PO7991
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STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable.
FIELD OF THE INVENTION
The present invention relates to the field of inkjet printing and, in particular, discloses a method of manufacturing a micro-electromechanical fluid ejecting device.
BACKGROUND OF THE INVENTION
Many ink jet printing mechanisms are known. Unfortunately, in mass production techniques, the production of ink jet heads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp 33-37 (1985)). The separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.
Additionally, side shooting ink jet technologies (U.S. Pat. No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.
Additionally, more esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp 33-37 (1985)), electro-discharge machining, laser ablation (U.S. Pat. No. 5,208,604), micro-punching, etc.
The utilization of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.
It would therefore be desirable if an efficient system for the mass production of ink jet print heads could be developed.
SUMMARY OF THE INVENTION
In accordance with a first aspect of the present invention, there is provided a method of manufacturing a Dual Chamber Single Vertical Actuator Ink Jet Printer print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Preferably, multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer.
The print heads can be formed utilizing standard vlsi/ulsi processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate.



BRIEF DESCRIPTION OF THE DRAWINGS
Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:
FIG. 1 shows a schematic side view of an ink jet nozzle of the invention in a quiescent state;
FIG. 2 shows a schematic side view of the nozzle in an initial part of an ink ejection stage;
FIG. 3 shows a schematic side view of the nozzle in a further part of an ink ejection stage;
FIG. 4 shows a schematic side view of the nozzle in a final part of an ink ejection stage;
FIG. 5 shows a schematic side view of the nozzle again in its quiescent state;
FIG. 6 illustrates a side perspective view, of a single nozzle arrangement of the preferred embodiment.
FIG. 7 illustrates a perspective view, partly in section of a single nozzle arrangement of the preferred embodiment;
FIG. 8 shows a schematic side view of an initial stage in the manufacture of an ink jet nozzle of the invention with the deposition of a CMOS layer;
FIG. 9 shows a step of an initial etch to form a nozzle chamber;
FIG. 10 shows a step of depositing a first sacrificial layer;
FIG. 11 shows a step of etching the first sacrificial layer;
FIG. 12 shows a step of depositing a glass layer;
FIG. 13 shows a step of etching the glass layer;
FIG. 14 shows a step of depositing an actuator material layer;
FIG. 15 shows a step of planarizing the actuating material layers;
FIG. 16 shows a step of depositing a heater material layer;
FIG. 17 shows a step of depositing a further glass layer;
FIG. 18 shows a step of depositing a further heater material layer;
FIG. 19 shows a step of planarizing the further heater material layer;
FIG. 20 shows a step of depositing yet another glass layer;
FIG. 21 shows a step of etching said another glass layer;
FIG. 22 shows a step of etching the other glass layers;
FIG. 23 shows a step of depositing a further sacrificial layer;
FIG. 24 shows a step of forming a nozzle chamber;
FIG. 25 shows a step of forming nozzle openings;
FIG. 26 shows a step of back etching the substrate; and
FIG. 27 shows a final step of etching the sacrificial layers;
FIG. 28 illustrates a part of an array view of a portion of a printhead as constructed in accordance with the principles of the present invention;
FIG. 29 provides a legend of the materials indicated in FIGS. 30 to 42; and
FIG. 30 shows a sectional side view of an initial manufacturing step of an ink jet printhead nozzle showing a silicon wafer with a buried epitaxial layer and an electrical circuitry layer;
FIG. 31 shows a step of etching the oxide layer;
FIG. 32 shows a step of etching an exposed part of the silicon layer;
FIG. 33 shows a step of depositing a second sacrificial layer;
FIG. 34 shows a step of etching the first sacrificial layer;
FIG. 35 shows a step of etching the second sacrificial layer;
FIG. 36 shows the step of depositing a heater material layer;
FIG. 37 shows a step of depositing a further heater material layer;
FIG. 38 shows a step of etching a glass layer;
FIG. 39 shows a step of depositing a further glass layer;
FIG. 40 shows a step of etching the further glass layer;
FIG. 41 shows a step of further etching the further glass layer;
FIG. 42 shows a step of back etching through the silicon layer;
FIG. 43 shows a step of etching the sacrificial layers; and
FIG. 44 shows a step of filling the completed ink jet nozzle with ink.—



DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS
In the preferred embodiment, there is provided an inkjet printhead having an array of nozzles wherein the nozzles are grouped in pairs and each pair is provided with a single actuator which is actuated so as to move a paddle type mechanism to force the ejection of ink out of one or other of the nozzle pairs. The paired nozzles eject ink from a single nozzle chamber which is re-supplied by means of an ink supply channel. Further, the actuator of the preferred embodiment has unique characteristics so as to simplify the actuation process.
Turning initially to FIGS. 1 to 5, there will now be explained the principles of operation of the preferred embodiment. In the preferred embodiment, a single nozzle chamber 1 is utilized to supply ink to two ink ejection nozzles 2, 3. Ink is re-supplied to the nozzle chamber 1 via means of an ink supply channel 5. In its quiescent position, two ink menisci 6, 7 are formed around the ink ejection holes 2, 3. The arrangement of FIG. 1 being substantially axially symmetric around a central paddle 9 which is attached to an actuator mechanism.
When it is desired to eject ink out of one of the nozzles, say nozzle 3, the paddle 9 is actuated so that it begins to move as indicated in FIG. 2. The movement of paddle 9 in the direction 10 results in a general compression of the ink on the right hand side of the paddle 9. The compression of the ink results in the meniscus 7 growing as the ink is forced out of the nozzles 3. Further, the meniscus 6 undergoes an inversion as the ink is sucked back on the left hand side of the actuator 10 with additional ink 12 being sucked in from ink supply channel 5. The paddle actuator 9 eventually comes to rest and begins to return as illustrated in FIG. 3. The ink 13 within meniscus 7 has substantial forward momentum and continues away from the nozzle chamber whilst the paddle 9 causes ink to be sucked back into the nozzle chamber. Further, the surface tension on the meniscus 6 results in further in flow of the ink via the ink supply channel 5. The resolution of the forces at work in the resultant flows results in a general necking and subsequent breaking of the meniscus 7 as illustrated in FIG. 4 wherein a drop 14 is formed which continues onto the media or the like. The paddle 9 continues to return to its quiescent position.
Next, as illustrated in FIG. 5, the paddle 9 returns to its quiescent position and the nozzle chamber refills by means of surface tension effects acting on meniscuses 6, 7 with the arrangement of returning to that showing in FIG. 1. When required, the actuator 9 can be activated to eject ink out of the nozzle 2 in a symmetrical manner to that described with reference to FIGS. 1-5. Hence, a single actuator 9 is activated to provide for ejection out of multiple nozzles. The dual nozzle arrangement has a number of advantages including in that movement of actuator 9 does not result in a significant vacuum forming on the back surface of the actuator 9 as a result of its rapid movement. Rather, meniscus 6 acts to ease the vacuum and further acts as a “pump” for the pumping of ink into the nozzle chamber. Further, the nozzle chamber is provided with a lip 15 (FIG. 2) which assists in equalizing the increase in pressure around the ink ejection holes 3 which allows for the meniscus 7 to grow in an actually symmetric manner thereby allowing for straight break off of the drop 14.
Turning now to FIGS. 6 and 7, there is illustrated a suitable nozzle arrangement with FIG. 6 showing a single side perspective view and FIG. 7 showing a view, partly in section illustrating the nozzle chamber. The actuator 20 includes a pivot arm attached at the post 21. The pivot arm includes an internal core portion 22 which can be constructed from glass. On each side 23, 24 of the internal portion 22 is two separately control heater arms which can be constructed from an alloy of copper and nickel (45% copper and 55% nickel). The utilization of the glass core is advantageous in that it has a low coefficient thermal expansion and coefficient of thermal conductivity. Hence, any energy utilized in the heaters 23, 24 is substantially maintained in the heater structure and utilized to expand the heater structure and opposed to an expansion of the glass core 22. Structure or material chosen to form part of the heater structure preferably has a high “bend efficiency”. One form of definition of bend efficiency can be the Young's modulus times the coefficient of thermal expansion divided by the density and by the specific heat capacity.
The copper nickel alloy in addition to being conductive has a high coefficient of thermal expansion, a low specific heat and density in addition to a high Young's modulus. It is therefore a highly suitable material for construction of the heater element although other materials would also be suitable.
Each of the heater elements can comprise a conductive out and return trace with the traces being insulated from one and other along the length of the trace and conductively joined together at the far end of the trace. The current supply for the heater can come from a lower electrical layer via the pivot anchor 21. At one end of the actuator 20, there is provided a bifurcated portion 30 which has attached at one end thereof to leaf portions 31, 32.
To operate the actuator, one of the arms 23, 24 e.g. 23 is heated in air by passing current through it. The heating of the arm results in a general expansion of the arm. The expansion of the arm results in a general bending of the arm 20. The bending of the arm 20 further results in leaf portion 32 pulling on the paddle portion 9. The paddle 9 is pivoted around a fulcrum point by means of attachment to leaf portions 38, 39 which are generally thin to allow for minor flexing. The pivoting of the arm 9 causes ejection of ink from the nozzle hole 40. The heater is deactivated resulting in a return of the actuator 20 to its quiescent position and its corresponding return of the paddle 9 also to is quiescent position. Subsequently, to eject ink out of the other nozzle hole 41, the heater 24 can be activated with the paddle operating in a substantially symmetric manner.
It can therefore be seen that the actuator can be utilized to move the paddle 9 on demand so as to eject drops out of the ink ejection hole e.g. 40 with the ink refilling via an ink supply channel 44 located under the paddle 9.
The nozzle arrangement of the preferred embodiment can be formed on a silicon wafer utilizing standard semi-conductor fabrication processing steps and micro-electromechanical systems (MEMS) construction techniques.
For a general introduction to a micro-electro mechanical system (MEMS) reference is made to standard proceedings in this field including the proceeding of the SPIE (International Society for Optical Engineering) including volumes 2642 and 2882 which contain the proceedings of recent advances and conferences in this field.
Preferably, a large wafer of printheads is constructed at any one time with each printhead providing a predetermined pagewidth capabilities and a single printhead can in turn comprise multiple colors so as to provide for full color output as would be readily apparent to those skilled in the art.
Turning now to FIG. 8—FIG. 27 there will now be explained one form of fabrication of the preferred embodiment. The preferred embodiment can start as illustrated in FIG. 8 with a CMOS processed silicon wafer 50 which can include a standard CMOS layer 51 including of the relevant electrical circuitry etc. The processing steps can then be as follows:

    1. As illustrated in FIG. 9, a deep etch of the nozzle chamber 98 is performed to a depth of 25 micron;
    2. As illustrated in FIG. 10, a 27 micron layer of sacrificial material 52 such as aluminum is deposited;
    3. As illustrated in FIG. 11, the sacrificial material is etched to a depth of 26 micron using a glass stop so as to form cavities using a paddle and nozzle mask.
    4. As illustrated in FIG. 12, a 2 micron layer of low stress glass 53 is deposited.
    5. As illustrated in FIG. 13, the glass is etched to the aluminum layer utilizing a first heater via mask.
    6. As illustrated in FIG. 14, a 2-micron layer of 60% copper and 40% nickel is deposited 55 and planarized (FIG. 15) using chemical mechanical planarization (CMP).
    7. As illustrated in FIG. 16, a 0.1 micron layer of silicon nitride is deposited 56 and etched using a heater insulation mask.
    8. As illustrated in FIG. 17, a 2-micron layer of low stress glass 57 is deposited and etched using a second heater mask.
    9. As illustrated in FIG. 18, a 2-micron layer of 60% copper and 40% nickel 58 is deposited and planarized (FIG. 19) using chemical mechanical planarization.
    10. As illustrated in FIG. 20, a 1-micron layer of low stress glass 60 is deposited and etched (FIG. 21) using a nozzle wall mask.
    11. As illustrated in FIG. 22, the glass is etched down to the sacrificial layer using an actuator paddle wall mask.
    12. As illustrated in FIG. 23, a 5-micron layer of sacrificial material 62 is deposited and planarized using CMP.
    13. As illustrated in FIG. 24, a 3-micron layer of low stress glass 63 is deposited and etched using a nozzle rim mask.
    14. As illustrated in FIG. 25, the glass is etched down to the sacrificial layer using nozzle mask.
    15. As illustrated in FIG. 26, the wafer can be etched from the back using a deep silicon trench etcher such as the Silicon Technology Systems deep trench etcher.
    16. Finally, as illustrated in FIG. 27, the sacrificial layers are etched away releasing the ink jet structure.


Subsequently, the print head can be washed, mounted on an ink chamber, relevant electrical interconnections TAB bonded and the print head tested.
Turning now to FIG. 28, there is illustrated a portion 80 of a full color printhead which is divided into three series of nozzles 71, 72 and 73. Each series can supply a separate color via means of a corresponding ink supply channel. Each series is further subdivided into two sub rows e.g. 76, 77 with the relevant nozzles of each sub row being fired simultaneously with one sub row being fired a predetermined time after a second sub row such that a line of ink drops is formed on a page.
As illustrated in FIG. 28 the actuators are formed in a curved relationship with respect to the main nozzle access so as to provide for a more compact packing of the nozzles. Further, the block portion (21 of FIG. 6) is formed in the wall of an adjacent series with the block portion of the row 73 being formed in a separate guide rail 80 provided as an abutment surface for the TAB strip when it is abutted against the guide rail 80 so as to provide for an accurate registration of the tab strip with respect to the bond pads 81, 82 which are provided along the length of the printhead so as to provide for low impedance driving of the actuators.
The principles of the preferred embodiment can obviously be readily extended to other structures. For example, a fulcrum arrangement could be constructed which includes two arms which are pivoted around a thinned wall by means of their attachment to a cross bar. Each arm could be attached to the central cross bar by means of similarly leafed portions to that shown in FIG. 6 and FIG. 7. The distance between a first arm and the thinned wall can be L units whereas the distance between the second arm and wall can be NL units. Hence, when a translational movement is applied to the second arm for a distance of N×X units the first arm undergoes a corresponding movement of X units. The leafed portions allow for flexible movement of the arms whilst providing for full pulling strength when required.
It would be evident to those skilled in the art that the present invention can further be utilized in either mechanical arrangement requiring the application forces to induce movement in a structure.
One form of detailed manufacturing process which can be used to fabricate monolithic ink jet print heads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:

    1. Using a double sided polished wafer 50, complete drive transistors, data distribution, and timing circuits using a 0.5 micron, one poly, 2 metal CMOS process 51. Relevant features of the wafer at this step are shown in FIG. 30. For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 29 is a key to representations of various materials in these manufacturing diagrams, and those of other cross-referenced ink jet configurations.
    2. Etch oxide down to silicon or aluminum using Mask 1. This mask defines the ink inlet, the heater contact vias, and the edges of the print head chips. This step is shown in FIG. 31.
    3. Etch exposed silicon 51 to a depth of 20 microns. This step is shown in FIG. 32.
    4. Deposit a 1-micron conformal layer of a first sacrificial material 91.
    5. Deposit 20 microns of a second sacrificial material 92, and planarize down to the first sacrificial layer using CMP. This step is shown in FIG. 33.
    6. Etch the first sacrificial layer using Mask 2, defining the nozzle chamber wall 93, the paddle 9, and the actuator anchor point 21. This step is shown in FIG. 34.
    7. Etch the second sacrificial layer down to the first sacrificial layer using Mask 3. This mask defines the paddle 9. This step is shown in FIG. 35.
    8. Deposit a 1-micron conformal layer of PECVD glass 53.
    9. Etch the glass using Mask 4, which defines the lower layer of the actuator loop.
    10. Deposit 1 micron of heater material 55, for example titanium nitride (TiN) or titanium diboride (TiB2). Planarize using CMP. This step is shown in FIG. 36.
    11. Deposit 0.1 micron of silicon nitride 56.
    12. Deposit 1 micron of PECVD glass 57.
    13. Etch the glass using Mask 5, which defines the upper layer of the actuator loop.
    14. Etch the silicon nitride using Mask 6, which defines the vias connecting the upper layer of the actuator loop to the lower layer of the actuator loop.
    15. Deposit 1 micron of the same heater material 58 previously deposited. Planarize using CMP. This step is shown in FIG. 37.
    16. Deposit 1 micron of PECVD glass 60.
    17. Etch the glass down to the sacrificial layer using Mask 6. This mask defines the actuator and the nozzle chamber wall, with the exception of the nozzle chamber actuator slot. This step is shown in FIG. 38.
    18. Wafer probe. All electrical connections are complete at this point, bond pads are accessible, and the chips are not yet separated.
    19. Deposit 4 microns of sacrificial material 62 and planarize down to glass using CMP.
    20. Deposit 3 microns of PECVD glass 63. This step is shown in FIG. 39.
    21. Etch to a depth of (approx.) 1 micron using Mask 7. This mask defines the nozzle rim 95. This step is shown in FIG. 40.
    22. Etch down to the sacrificial layer using Mask 8. This mask defines the roof of the nozzle chamber, and the nozzle 40, 41 itself. This step is shown in FIG. 41.
    23. Back-etch completely through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 9. This mask defines the ink inlets 65 which are etched through the wafer. The wafer is also diced by this etch. This step is shown in FIG. 42.
    24. Etch both types of sacrificial material. The nozzle chambers are cleared, the actuators freed, and the chips are separated by this etch. This step is shown in FIG. 43.
    25. Mount the print heads in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink 96 to the ink inlets at the back of the wafer.
    26. Connect the print heads to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.
    27. Hydrophobize the front surface of the print heads.
    28. Fill the completed print heads with ink and test them. A filled nozzle is shown in FIG. 44.


The presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with in-built pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic “minilabs”, video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. The present embodiments are, therefore, to be considered in all respects to be illustrative and not restrictive.
Ink Jet Technologies
The embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.
The most significant problem with thermal ink jet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal ink jet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
The most significant problem with piezoelectric ink jet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewidth print heads with 19,200 nozzles.
Ideally, the ink jet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications. To meet the requirements of digital photography, new ink jet technologies have been created. The target features include:
low power (less than 10 Watts)
High-resolution capability (1,600 dpi or more)
photographic quality output
low manufacturing cost
small size (pagewidth times minimum cross section)
high speed (<2 seconds per page).
All of these features can be met or exceeded by the ink jet systems described below with differing levels of difficulty. Forty-five different ink jet technologies have been developed by the Assignee to give a wide range of choices for high volume manufacture. These technologies form part of separate applications assigned to the present Assignee as set out in the table above under the heading Cross References to Related Applications.
The ink jet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
For ease of manufacture using standard process equipment, the print head is designed to be a monolithic 0.5-micron CMOS chip with MEMS post processing. For color photographic applications, the print head is 100 mm long, with a width which depends upon the ink jet type. The smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm. The print heads each contain 19,200 nozzles plus data and control circuitry.
Ink is supplied to the back of the print head by injection molded plastic ink channels. The molding requires 50-micron features, which can be created using a lithographically micro machined insert in a standard injection-molding tool. Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer. The print head is connected to the camera circuitry by tape automated bonding.
Tables of Drop-On-Demand Ink Jets
Eleven important characteristics of the fundamental operation of individual ink jet nozzles have been identified. These characteristics are largely orthogonal, and so can be elucidated as an eleven dimensional matrix. Most of the eleven axes of this matrix include entries developed by the present assignee.
The following tables form the axes of an eleven dimensional table of ink jet types.
Actuator mechanism (18 types)
Basic operation mode (7 types)
Auxiliary mechanism (8 types)
Actuator amplification or modification method (17 types)
Actuator motion (19 types)
Nozzle refill method (4 types)
Method of restricting back-flow through inlet (10 types)
Nozzle clearing method (9 types)
Nozzle plate construction (9 types)
Drop ejection direction (5 types)
Ink type (7 types)
The complete eleven dimensional table represented by these axes contains 36.9 billion possible configurations of ink jet nozzle. While not all of the possible combinations result in a viable ink jet technology, many million configurations are viable. It is clearly impractical to elucidate all of the possible configurations. Instead, certain ink jet types have been investigated in detail. These are designated IJ01 to IJ45 which matches the docket numbers in the table under the heading CROSS REFERENCES TO RELATED APPLICATIONS.
Other ink jet configurations can readily be derived from these forty-five examples by substituting alternative configurations along one or more of the 11 axes. Most of the IJ01 to IJ45 examples can be made into ink jet print heads with characteristics superior to any currently available ink jet technology.
Where there are prior art examples known to the inventor, one or more of these examples are listed in the examples column of the tables below. The IJ01 to IJ45 series are also listed in the examples column. In some cases, a printer may be listed more than once in a table, where it shares characteristics with more than one entry.
Suitable applications for the ink jet technologies include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
The information associated with the aforementioned 11 dimensional matrix is set out in the following tables.










ACTUATOR MECHANISM (APPLIED ONLY TO SELECTED INK DROPS)












Description
Advantages
Disadvantages
Examples















Thermal
An electrothermal
Large force
High power
Canon Bubblejet


bubble
heater heats the ink to
generated
Ink carrier limited
1979 Endo et al GB



above boiling point,
Simple
to water
patent 2,007,162



transferring significant
construction
Low efficiency
Xerox heater-in-



heat to the aqueous
No moving parts
High
pit 1990 Hawkins et



ink. A bubble
Fast operation
temperatures
al U.S. Pat. No. 4,899,181



nucleates and quickly
Small chip area
required
Hewlett-Packard



forms, expelling the
required for actuator
High mechanical
TIJ 1982 Vaught et



ink.

stress
al U.S. Pat. No. 4,490,728



The efficiency of the

Unusual materials



process is low, with

required



typically less than

Large drive



0.05% of the electrical

transistors



energy being

Cavitation causes



transformed into

actuator failure



kinetic energy of the

Kogation reduces



drop.

bubble formation





Large print heads





are difficult to





fabricate


Piezoelectric
A piezoelectric crystal
Low power
Very large area
Kyser et al U.S. Pat. No.



such as lead
consumption
required for actuator
3,946,398



lanthanum zirconate
Many ink types
Difficult to
Zoltan U.S. Pat. No.



(PZT) is electrically
can be used
integrate with
3,683,212



activated, and either
Fast operation
electronics
1973 Stemme



expands, shears, or
High efficiency
High voltage
U.S. Pat. No. 3,747,120



bends to apply

drive transistors
Epson Stylus



pressure to the ink,

required
Tektronix



ejecting drops.

Full pagewidth
IJ04





print heads





impractical due to





actuator size





Requires





electrical poling in





high field strengths





during manufacture


Electro-
An electric field is
Low power
Low maximum
Seiko Epson,


strictive
used to activate
consumption
strain (approx.
Usui et all JP



electrostriction in
Many ink types
0.01%)
253401/96



relaxor materials such
can be used
Large area
IJ04



as lead lanthanum
Low thermal
required for actuator



zirconate titanate
expansion
due to low strain



(PLZT) or lead
Electric field
Response speed is



magnesium niobate
strength required
marginal (~10 μs)



(PMN).
(approx. 3.5 V/μm)
High voltage




can be generated
drive transistors




without difficulty
required




Does not require
Full pagewidth




electrical poling
print heads





impractical due to





actuator size


Ferroelectric
An electric field is
Low power
Difficult to
IJ04



used to induce a phase
consumption
integrate with



transition between the
Many ink types
electronics



antiferroelectric (AFE)
can be used
Unusual materials



and ferroelectric (FE)
Fast operation
such as PLZSnT are



phase. Perovskite
(<1 μs)
required



materials such as tin
Relatively high
Actuators require



modified lead
longitudinal strain
a large area



lanthanum zirconate
High efficiency



titanate (PLZSnT)
Electric field



exhibit large strains of
strength of around 3 V/μm



up to 1% associated
can be readily



with the AFE to FE
provided



phase transition.


Electrostatic
Conductive plates are
Low power
Difficult to
IJ02, IJ04


plates
separated by a
consumption
operate electrostatic



compressible or fluid
Many ink types
devices in an



dielectric (usually air).
can be used
aqueous



Upon application of a
Fast operation
environment



voltage, the plates

The electrostatic



attract each other and

actuator will



displace ink, causing

normally need to be



drop ejection. The

separated from the



conductive plates may

ink



be in a comb or

Very large area



honeycomb structure,

required to achieve



or stacked to increase

high forces



the surface area and

High voltage



therefore the force.

drive transistors





may be required





Full pagewidth





print heads are not





competitive due to





actuator size


Electrostatic
A strong electric field
Low current
High voltage
1989 Saito et al,


pull
is applied to the ink,
consumption
required
U.S. Pat. No. 4,799,068


on ink
whereupon
Low temperature
May be damaged
1989 Miura et al,



electrostatic attraction

by sparks due to air
U.S. Pat. No. 4,810,954



accelerates the ink

breakdown
Tone-jet



towards the print

Required field



medium.

strength increases as





the drop size





decreases





High voltage





drive transistors





required





Electrostatic field





attracts dust


Permanent
An electromagnet
Low power
Complex
IJ07, IJ10


magnet
directly attracts a
consumption
fabrication


electro-
permanent magnet,
Many ink types
Permanent


magnetic
displacing ink and
can be used
magnetic material



causing drop ejection.
Fast operation
such as Neodymium



Rare earth magnets
High efficiency
Iron Boron (NdFeB)



with a field strength
Easy extension
required.



around 1 Tesla can be
from single nozzles
High local



used. Examples are:
to pagewidth print
currents required



Samarium Cobalt
heads
Copper



(SaCo) and magnetic

metalization should



materials in the

be used for long



neodymium iron boron

electromigration



family (NdFeB,

lifetime and low



NdDyFeBNb,

resistivity



NdDyFeB, etc)

Pigmented inks





are usually





infeasible





Operating





temperature limited





to the Curie





temperature (around





540 K)


Soft
A solenoid induced a
Low power
Complex
IJ01, IJ05, IJ08,


magnetic
magnetic field in a soft
consumption
fabrication
IJ10, IJ12, IJ14,


core
magnetic core or yoke
Many ink types
Materials not
IJ15, IJ17


electro-
fabricated from a
can be used
usually present in a


magnetic
ferrous material such
Fast operation
CMOS fab such as



as electroplated iron
High efficiency
NiFe, CoNiFe, or



alloys such as CoNiFe
Easy extension
CoFe are required



[1], CoFe, or NiFe
from single nozzles
High local



alloys. Typically, the
to pagewidth print
currents required



soft magnetic material
heads
Copper



is in two parts, which

metallisation should



are normally held

be used for long



apart by a spring.

electromigration



When the solenoid is

lifetime and low



actuated, the two parts

resistivity



attract, displacing the

Electroplating is



ink.

required





High saturation





flux density is





required (2.0-2.1 T





is achievable with





CoNiFe [1])


Lorenz
The Lorenz force
Low power
Force acts as a
IJ06, IJ11, IJ13,


force
acting on a current
consumption
twisting motion
IJ16



carrying wire in a
Many ink types
Typically, only a



magnetic field is
can be used
quarter of the



utilized.
Fast operation
solenoid length



This allows the
High efficiency
provides force in a



magnetic field to be
Easy extension
useful direction



supplied externally to
from single nozzles
High local



the print head, for
to pagewidth print
currents required



example with rare
heads
Copper



earth permanent

metallisation should



magnets.

be used for long



Only the current

electromigration



carrying wire need be

lifetime and low



fabricated on the print-

resistivity



head, simplifying

Pigmented inks



materials

are usually



requirements.

infeasible


Magneto-
The actuator uses the
Many ink types
Force acts as a
Fischenbeck, U.S. Pat. No.


striction
giant magnetostrictive
can be used
twisting motion
4,032,929



effect of materials
Fast operation
Unusual materials
IJ25



such as Terfenol-D (an
Easy extension
such as Terfenol-D



alloy of terbium,
from single nozzles
are required



dysprosium and iron
to pagewidth print
High local



developed at the Naval
heads
currents required



Ordnance Laboratory,
High force is
Copper



hence Ter-Fe-NOL).
available
metallisation should



For best efficiency, the

be used for long



actuator should be pre-

electro migration



stressed to approx. 8 MPa.

lifetime and low





resistivity





Pre-stressing may





be required


Surface
Ink under positive
Low power
Requires
Silverbrook, EP


tension
pressure is held in a
consumption
supplementary force
0771 658 A2 and


reduction
nozzle by surface
Simple
to effect drop
related patent



tension. The surface
construction
separation
applications



tension of the ink is
No unusual
Requires special



reduced below the
materials required in
ink surfactants



bubble threshold,
fabrication
Speed may be



causing the ink to
High efficiency
limited by surfactant



egress from the
Easy extension
properties



nozzle.
from single nozzles




to pagewidth print




heads


Viscosity
The ink viscosity is
Simple
Requires
Silverbrook, EP


reduction
locally reduced to
construction
supplementary force
0771 658 A2 and



select which drops are
No unusual
to effect drop
related patent



to be ejected. A
materials required in
separation
applications



viscosity reduction can
fabrication
Requires special



be achieved
Easy extension
ink viscosity



electrothermally with
from single nozzles
properties



most inks, but special
to pagewidth print
High speed is



inks can be engineered
heads
difficult to achieve



for a 100:1 viscosity

Requires



reduction.

oscillating ink





pressure





A high





temperature





difference (typically





80 degrees) is





required


Acoustic
An acoustic wave is
Can operate
Complex drive
1993 Hadimioglu



generated and
without a nozzle
circuitry
et al, EUP 550,192



focussed upon the
plate
Complex
1993 Elrod et al,



drop ejection region.

fabrication
EUP 572,220





Low efficiency





Poor control of





drop position





Poor control of





drop volume


Thermo-
An actuator which
Low power
Efficient aqueous
IJ03, IJ09, IJ17,


elastic
relies upon differential
consumption
operation requires a
IJ18, IJ19, IJ20,


bend
thermal expansion
Many ink types
thermal insulator on
IJ21, IJ22, IJ23,


actuator
upon Joule heating is
can be used
the hot side
IJ24, IJ27, IJ28,



used.
Simple planar
Corrosion
IJ29, IJ30, IJ31,




fabrication
prevention can be
IJ32, IJ33, IJ34,




Small chip area
difficult
IJ35, IJ36, IJ37,




required for each
Pigmented inks
IJ38, IJ39, IJ40,




actuator
may be infeasible,
IJ41




Fast operation
as pigment particles




High efficiency
may jam the bend




CMOS
actuator




compatible voltages




and currents




Standard MEMS




processes can be




used




Easy extension




from single nozzles




to pagewidth print




heads


High CTE
A material with a very
High force can be
Requires special
IJ09, IJ17, IJ18,


thermo-
high coefficient of
generated
material (e.g. PTFE)
IJ20, IJ21, IJ22,


elastic
thermal expansion
Three methods of
Requires a PTFE
IJ23, IJ24, IJ27,


actuator
(CTE) such as
PTFE deposition are
deposition process,
IJ28, IJ29, IJ30,



polytetrafluoroethylene
under development:
which is not yet
IJ31, IJ42, IJ43,



(PTFE) is used. As
chemical vapor
standard in ULSI
IJ44



high CTE materials
deposition (CVD),
fabs



are usually non-
spin coating, and
PTFE deposition



conductive, a heater
evaporation
cannot be followed



fabricated from a
PTFE is a
with high



conductive material is
candidate for low
temperature (above



incorporated. A 50 μm
dielectric constant
350° C.) processing



long PTFE bend
insulation in ULSI
Pigmented inks



actuator with
Very low power
may be infeasible,



polysilicon heater and
consumption
as pigment particles



15 mW power input
Many ink types
may jam the bend



can provide 180 μN
can be used
actuator



force and 10 μm
Simple planar



deflection. Actuator
fabrication



motions include:
Small chip area



Bend
required for each



Push
actuator



Buckle
Fast operation



Rotate
High efficiency




CMOS




compatible voltages




and currents




Easy extension




from single nozzles




to pagewidth print




heads


Conductive
A polymer with a high
High force can be
Requires special
IJ24


polymer
coefficient of thermal
generated
materials


thermo-
expansion (such as
Very low power
development (High


elastic
PTFE) is doped with
consumption
CTE conductive


actuator
conducting substances
Many ink types
polymer)



to increase its
can be used
Requires a PTFE



conductivity to about
Simple planar
deposition process,



3 orders of magnitude
fabrication
which is not yet



below that of copper.
Small chip area
standard in ULSI



The conducting
required for each
fabs



polymer expands
actuator
PTFE deposition



when resistively
Fast operation
cannot be followed



heated.
High efficiency
with high



Examples of
CMOS
temperature (above



conducting dopants
compatible voltages
350° C.) processing



include:
and currents
Evaporation and



Carbon nanotubes
Easy extension
CVD deposition



Metal fibers
from single nozzles
techniques cannot



Conductive polymers
to pagewidth print
be used



such as doped
heads
Pigmented inks



polythiophene

may be infeasible,



Carbon granules

as pigment particles





may jam the bend





actuator


Shape
A shape memory alloy
High force is
Fatigue limits
IJ26


memory
such as TiNi (also
available (stresses
maximum number


alloy
known as Nitinol -
of hundreds of
of cycles



Nickel Titanium alloy
MPa)
Low strain (1%)



developed at the Naval
Large strain is
is required to extend



Ordnance Laboratory)
available (more than
fatigue resistance



is thermally switched
3%)
Cycle rate limited



between its weak
High corrosion
by heat removal



martensitic state and
resistance
Requires unusual



its high stiffness
Simple
materials (TiNi)



austenic state. The
construction
The latent heat of



shape of the actuator
Easy extension
transformation must



in its martensitic state
from single nozzles
be provided



is deformed relative to
to pagewidth print
High current



the austenitic shape.
heads
operation



The shape change
Low voltage
Requires pre-



causes ejection of a
operation
stressing to distort



drop.

the martensitic state


Linear
Linear magnetic
Linear Magnetic
Requires unusual
IJ12


Magnetic
actuators include the
actuators can be
semiconductor


Actuator
Linear Induction
constructed with
materials such as



Actuator (LIA), Linear
high thrust, long
soft magnetic alloys



Permanent Magnet
travel, and high
(e.g. CoNiFe)



Synchronous Actuator
efficiency using
Some varieties



(LPMSA), Linear
planar
also require



Reluctance
semiconductor
permanent magnetic



Synchronous Actuator
fabrication
materials such as



(LRSA), Linear
techniques
Neodymium iron



Switched Reluctance
Long actuator
boron (NdFeB)



Actuator (LSRA), and
travel is available
Requires complex



the Linear Stepper
Medium force is
multi-phase drive



Actuator (LSA).
available
circuitry




Low voltage
High current




operation
operation



















BASIC OPERATION MODE












Description
Advantages
Disadvantages
Examples















Actuator
This is the simplest
Simple operation
Drop repetition
Thermal ink jet


directly
mode of operation: the
No external fields
rate is usually
Piezoelectric ink


pushes ink
actuator directly
required
limited to around 10 kHz.
jet



supplies sufficient
Satellite drops can
However, this
IJ01, IJ02, IJ03,



kinetic energy to expel
be avoided if drop
is not fundamental
IJ04, IJ05, IJ06,



the drop. The drop
velocity is less than
to the method, but is
IJ07, IJ09, IJ11,



must have a sufficient
4 m/s
related to the refill
IJ12, IJ14, IJ16,



velocity to overcome
Can be efficient,
method normally
IJ20, IJ22, IJ23,



the surface tension.
depending upon the
used
IJ24, IJ25, IJ26,




actuator used
All of the drop
IJ27, IJ28, IJ29,





kinetic energy must
IJ30, IJ31, IJ32,





be provided by the
IJ33, IJ34, IJ35,





actuator
IJ36, IJ37, IJ38,





Satellite drops
IJ39, IJ40, IJ41,





usually form if drop
IJ42, IJ43, IJ44





velocity is greater





than 4.5 m/s


Proximity
The drops to be
Very simple print
Requires close
Silverbrook, EP



printed are selected by
head fabrication can
proximity between
0771 658 A2 and



some manner (e.g.
be used
the print head and
related patent



thermally induced
The drop
the print media or
applications



surface tension
selection means
transfer roller



reduction of
does not need to
May require two



pressurized ink).
provide the energy
print heads printing



Selected drops are
required to separate
alternate rows of the



separated from the ink
the drop from the
image



in the nozzle by
nozzle
Monolithic color



contact with the print

print heads are



medium or a transfer

difficult



roller.


Electrostatic
The drops to be
Very simple print
Requires very
Silverbrook, EP


pull
printed are selected by
head fabrication can
high electrostatic
0771 658 A2 and


on ink
some manner (e.g.
be used
field
related patent



thermally induced
The drop
Electrostatic field
applications



surface tension
selection means
for small nozzle
Tone-Jet



reduction of
does not need to
sizes is above air



pressurized ink).
provide the energy
breakdown



Selected drops are
required to separate
Electrostatic field



separated from the ink
the drop from the
may attract dust



in the nozzle by a
nozzle



strong electric field.


Magnetic
The drops to be
Very simple print
Requires
Silverbrook, EP


pull on ink
printed are selected by
head fabrication can
magnetic ink
0771 658 A2 and



some manner (e.g.
be used
Ink colors other
related patent



thermally induced
The drop
than black are
applications



surface tension
selection means
difficult



reduction of
does not need to
Requires very



pressurized ink).
provide the energy
high magnetic fields



Selected drops are
required to separate



separated from the ink
the drop from the



in the nozzle by a
nozzle



strong magnetic field



acting on the magnetic



ink.


Shutter
The actuator moves a
High speed (>50 kHz)
Moving parts are
IJ13, IJ17, IJ21



shutter to block ink
operation can
required



flow to the nozzle.
be achieved due to
Requires ink



The ink pressure is
reduced refill time
pressure modulator



pulsed at a multiple of
Drop timing can
Friction and wear



the drop ejection
be very accurate
must be considered



frequency.
The actuator
Stiction is




energy can be very
possible




low


Shuttered
The actuator moves a
Actuators with
Moving parts are
IJ08, IJ15, IJ18,


grill
shutter to block ink
small travel can be
required
IJ19



flow through a grill to
used
Requires ink



the nozzle. The shutter
Actuators with
pressure modulator



movement need only
small force can be
Friction and wear



be equal to the width
used
must be considered



of the grill holes.
High speed (>50 kHz)
Stiction is




operation can
possible




be achieved


Pulsed
A pulsed magnetic
Extremely low
Requires an
IJ10


magnetic
field attracts an ‘ink
energy operation is
external pulsed


pull on ink
pusher’ at the drop
possible
magnetic field


pusher
ejection frequency. An
No heat
Requires special



actuator controls a
dissipation
materials for both



catch, which prevents
problems
the actuator and the



the ink pusher from

ink pusher



moving when a drop is

Complex



not to be ejected.

construction



















AUXILIARY MECHANISM (APPLIED TO ALL NOZZLES)












Description
Advantages
Disadvantages
Examples















None
The actuator directly
Simplicity of
Drop ejection
Most ink jets,



fires the ink drop, and
construction
energy must be
including



there is no external
Simplicity of
supplied by
piezoelectric and



field or other
operation
individual nozzle
thermal bubble.



mechanism required.
Small physical
actuator
IJ01, IJ02, IJ03,




size

IJ04, IJ05, IJ07,






IJ09, IJ11, IJ12,






IJ14, IJ20, IJ22,






IJ23, IJ24, IJ25,






IJ26, IJ27, IJ28,






IJ29, IJ30, IJ31,






IJ32, IJ33, IJ34,






IJ35, IJ36, IJ37,






IJ38, IJ39, IJ40,






IJ41, IJ42, IJ43,






IJ44


Oscillating
The ink pressure
Oscillating ink
Requires external
Silverbrook, EP


ink
oscillates, providing
pressure can
ink pressure
0771 658 A2 and


pressure
much of the drop
provide a refill
oscillator
related patent


(including
ejection energy. The
pulse, allowing
Ink pressure
applications


acoustic
actuator selects which
higher operating
phase and amplitude
IJ08, IJ13, IJ15,


stimulation)
drops are to be fired
speed
must be carefully
IJ17, IJ18, IJ19,



by selectively
The actuators may
controlled
IJ21



blocking or enabling
operate with much
Acoustic



nozzles. The ink
lower energy
reflections in the ink



pressure oscillation
Acoustic lenses
chamber must be



may be achieved by
can be used to focus
designed for



vibrating the print
the sound on the



head, or preferably by
nozzles



an actuator in the ink



supply.


Media
The print head is
Low power
Precision
Silverbrook, EP


proximity
placed in close
High accuracy
assembly required
0771 658 A2 and



proximity to the print
Simple print head
Paper fibers may
related patent



medium. Selected
construction
cause problems
applications



drops protrude from

Cannot print on



the print head further

rough substrates



than unselected drops,



and contact the print



medium. The drop



soaks into the medium



fast enough to cause



drop separation.


Transfer
Drops are printed to a
High accuracy
Bulky
Silverbrook, EP


roller
transfer roller instead
Wide range of
Expensive
0771 658 A2 and



of straight to the print
print substrates can
Complex
related patent



medium. A transfer
be used
construction
applications



roller can also be used
Ink can be dried

Tektronix hot



for proximity drop
on the transfer roller

melt piezoelectric



separation.


ink jet






Any of the IJ






series


Electrostatic
An electric field is
Low power
Field strength
Silverbrook, EP



used to accelerate
Simple print head
required for
0771 658 A2 and



selected drops towards
construction
separation of small
related patent



the print medium.

drops is near or
applications





above air
Tone-Jet





breakdown


Direct
A magnetic field is
Low power
Requires
Silverbrook, EP


magnetic
used to accelerate
Simple print head
magnetic ink
0771 658 A2 and


field
selected drops of
construction
Requires strong
related patent



magnetic ink towards

magnetic field
applications



the print medium.


Cross
The print head is
Does not require
Requires external
IJ06, IJ16


magnetic
placed in a constant
magnetic materials
magnet


field
magnetic field. The
to be integrated in
Current densities



Lorenz force in a
the print head
may be high,



current carrying wire
manufacturing
resulting in



is used to move the
process
electromigration



actuator.

problems


Pulsed
A pulsed magnetic
Very low power
Complex print
IJ10


magnetic
field is used to
operation is possible
head construction


field
cyclically attract a
Small print head
Magnetic



paddle, which pushes
size
materials required in



on the ink. A small

print head



actuator moves a



catch, which



selectively prevents



the paddle from



moving.



















ACTUATOR AMPLIFICATION OR MODIFICATION METHOD












Description
Advantages
Disadvantages
Examples















None
No actuator
Operational
Many actuator
Thermal Bubble



mechanical
simplicity
mechanisms have
Ink jet



amplification is used.

insufficient travel,
IJ01, IJ02, IJ06,



The actuator directly

or insufficient force,
IJ07, IJ16, IJ25,



drives the drop

to efficiently drive
IJ26



ejection process.

the drop ejection





process


Differential
An actuator material
Provides greater
High stresses are
Piezoelectric


expansion
expands more on one
travel in a reduced
involved
IJ03, IJ09, IJ17,


bend
side than on the other.
print head area
Care must be
IJ18, IJ19, IJ20,


actuator
The expansion may be

taken that the
IJ21, IJ22, IJ23,



thermal, piezoelectric,

materials do not
IJ24, IJ27, IJ29,



magnetostrictive, or

delaminate
IJ30, IJ31, IJ32,



other mechanism. The

Residual bend
IJ33, IJ34, IJ35,



bend actuator converts

resulting from high
IJ36, IJ37, IJ38,



a high force low travel

temperature or high
IJ39, IJ42, IJ43,



actuator mechanism to

stress during
IJ44



high travel, lower

formation



force mechanism.


Transient
A trilayer bend
Very good
High stresses are
IJ40, IJ41


bend
actuator where the two
temperature stability
involved


actuator
outside layers are
High speed, as a
Care must be



identical. This cancels
new drop can be
taken that the



bend due to ambient
fired before heat
materials do not



temperature and
dissipates
delaminate



residual stress. The
Cancels residual



actuator only responds
stress of formation



to transient heating of



one side or the other.


Reverse
The actuator loads a
Better coupling to
Fabrication
IJ05, IJ11


spring
spring. When the
the ink
complexity



actuator is turned off,

High stress in the



the spring releases.

spring



This can reverse the



force/distance curve of



the actuator to make it



compatible with the



force/time



requirements of the



drop ejection.


Actuator
A series of thin
Increased travel
Increased
Some


stack
actuators are stacked.
Reduced drive
fabrication
piezoelectric ink jets



This can be
voltage
complexity
IJ04



appropriate where

Increased



actuators require high

possibility of short



electric field strength,

circuits due to



such as electrostatic

pinholes



and piezoelectric



actuators.


Multiple
Multiple smaller
Increases the
Actuator forces
IJ12, IJ13, IJ18,


actuators
actuators are used
force available from
may not add
IJ20, IJ22, IJ28,



simultaneously to
an actuator
linearly, reducing
IJ42, IJ43



move the ink. Each
Multiple actuators
efficiency



actuator need provide
can be positioned to



only a portion of the
control ink flow



force required.
accurately


Linear
A linear spring is used
Matches low
Requires print
IJ15


Spring
to transform a motion
travel actuator with
head area for the



with small travel and
higher travel
spring



high force into a
requirements



longer travel, lower
Non-contact



force motion.
method of motion




transformation


Coiled
A bend actuator is
Increases travel
Generally
IJ17, IJ21, IJ34,


actuator
coiled to provide
Reduces chip area
restricted to planar
IJ35



greater travel in a
Planar
implementations



reduced chip area.
implementations are
due to extreme




relatively easy to
fabrication




fabricate.
difficulty in other





orientations.


Flexure
A bend actuator has a
Simple means of
Care must be
IJ10, IJ19, IJ33


bend
small region near the
increasing travel of
taken not to exceed


actuator
fixture point, which
a bend actuator
the elastic limit in



flexes much more

the flexure area



readily than the

Stress distribution



remainder of the

is very uneven



actuator. The actuator

Difficult to



flexing is effectively

accurately model



converted from an

with finite element



even coiling to an

analysis



angular bend, resulting



in greater travel of the



actuator tip.


Catch
The actuator controls a
Very low actuator
Complex
IJ10



small catch. The catch
energy
construction



either enables or
Very small
Requires external



disables movement of
actuator size
force



an ink pusher that is

Unsuitable for



controlled in a bulk

pigmented inks



manner.


Gears
Gears can be used to
Low force, low
Moving parts are
IJ13



increase travel at the
travel actuators can
required



expense of duration.
be used
Several actuator



Circular gears, rack
Can be fabricated
cycles are required



and pinion, ratchets,
using standard
More complex



and other gearing
surface MEMS
drive electronics



methods can be used.
processes
Complex





construction





Friction, friction,





and wear are





possible


Buckle
A buckle plate can be
Very fast
Must stay within
S. Hirata et al,


plate
used to change a slow
movement
elastic limits of the
“An Ink-jet Head



actuator into a fast
achievable
materials for long
Using Diaphragm



motion. It can also

device life
Microactuator”,



convert a high force,

High stresses
Proc. IEEE MEMS,



low travel actuator

involved
February 1996, pp 418-423.



into a high travel,

Generally high
IJ18, IJ27



medium force motion.

power requirement


Tapered
A tapered magnetic
Linearizes the
Complex
IJ14


magnetic
pole can increase
magnetic
construction


pole
travel at the expense
force/distance curve



of force.


Lever
A lever and fulcrum is
Matches low
High stress
IJ32, IJ36, IJ37



used to transform a
travel actuator with
around the fulcrum



motion with small
higher travel



travel and high force
requirements



into a motion with
Fulcrum area has



longer travel and
no linear movement,



lower force. The lever
and can be used for



can also reverse the
a fluid seal



direction of travel.


Rotary
The actuator is
High mechanical
Complex
IJ28


impeller
connected to a rotary
advantage
construction



impeller. A small
The ratio of force
Unsuitable for



angular deflection of
to travel of the
pigmented inks



the actuator results in
actuator can be



a rotation of the
matched to the



impeller vanes, which
nozzle requirements



push the ink against
by varying the



stationary vanes and
number of impeller



out of the nozzle.
vanes


Acoustic
A refractive or
No moving parts
Large area
1993 Hadimioglu


lens
diffractive (e.g. zone

required
et al, EUP 550,192



plate) acoustic lens is

Only relevant for
1993 Elrod et al,



used to concentrate

acoustic ink jets
EUP 572,220



sound waves.


Sharp
A sharp point is used
Simple
Difficult to
Tone-jet


conductive
to concentrate an
construction
fabricate using


point
electrostatic field.

standard VLSI





processes for a





surface ejecting ink-





jet





Only relevant for





electrostatic ink jets



















ACTUATOR MOTION












Description
Advantages
Disadvantages
Examples















Volume
The volume of the
Simple
High energy is
Hewlett-Packard


expansion
actuator changes,
construction in the
typically required to
Thermal Ink jet



pushing the ink in all
case of thermal ink
achieve volume
Canon Bubblejet



directions.
jet
expansion. This





leads to thermal





stress, cavitation,





and kogation in





thermal ink jet





implementations


Linear,
The actuator moves in
Efficient coupling
High fabrication
IJ01, IJ02, IJ04,


normal to
a direction normal to
to ink drops ejected
complexity may be
IJ07, IJ11, IJ14


chip
the print head surface.
normal to the
required to achieve


surface
The nozzle is typically
surface
perpendicular



in the line of

motion



movement.


Parallel to
The actuator moves
Suitable for
Fabrication
IJ12, IJ13, IJ15,


chip
parallel to the print
planar fabrication
complexity
IJ33,, IJ34, IJ35,


surface
head surface. Drop

Friction
IJ36



ejection may still be

Stiction



normal to the surface.


Membrane
An actuator with a
The effective area
Fabrication
1982 Howkins


push
high force but small
of the actuator
complexity
U.S. Pat. No. 4,459,601



area is used to push a
becomes the
Actuator size



stiff membrane that is
membrane area
Difficulty of



in contact with the ink.

integration in a





VLSI process


Rotary
The actuator causes
Rotary levers may
Device
IJ05, IJ08, IJ13,



the rotation of some
be used to increase
complexity
IJ28



element, such a grill or
travel
May have friction



impeller
Small chip area
at a pivot point




requirements


Bend
The actuator bends
A very small
Requires the
1970 Kyser et al



when energized. This
change in
actuator to be made
U.S. Pat. No. 3,946,398



may be due to
dimensions can be
from at least two
1973 Stemme



differential thermal
converted to a large
distinct layers, or to
U.S. Pat. No. 3,747,120



expansion,
motion.
have a thermal
IJ03, IJ09, IJ10,



piezoelectric

difference across the
IJ19, IJ23, IJ24,



expansion,

actuator
IJ25, IJ29, IJ30,



magnetostriction, or


IJ31, IJ33, IJ34,



other form of relative


IJ35



dimensional change.


Swivel
The actuator swivels
Allows operation
Inefficient
IJ06



around a central pivot.
where the net linear
coupling to the ink



This motion is suitable
force on the paddle
motion



where there are
is zero



opposite forces
Small chip area



applied to opposite
requirements



sides of the paddle,



e.g. Lorenz force.


Straighten
The actuator is
Can be used with
Requires careful
IJ26, IJ32



normally bent, and
shape memory
balance of stresses



straightens when
alloys where the
to ensure that the



energized.
austenic phase is
quiescent bend is




planar
accurate


Double
The actuator bends in
One actuator can
Difficult to make
IJ36, IJ37, IJ38


bend
one direction when
be used to power
the drops ejected by



one element is
two nozzles.
both bend directions



energized, and bends
Reduced chip
identical.



the other way when
size.
A small efficiency



another element is
Not sensitive to
loss compared to



energized.
ambient temperature
equivalent single





bend actuators.


Shear
Energizing the
Can increase the
Not readily
1985 Fishbeck



actuator causes a shear
effective travel of
applicable to other
U.S. Pat. No. 4,584,590



motion in the actuator
piezoelectric
actuator



material.
actuators
mechanisms


Radial
The actuator squeezes
Relatively easy to
High force
1970 Zoltan U.S. Pat. No.


constriction
an ink reservoir,
fabricate single
required
3,683,212



forcing ink from a
nozzles from glass
Inefficient



constricted nozzle.
tubing as
Difficult to




macroscopic
integrate with VLSI




structures
processes


Coil/
A coiled actuator
Easy to fabricate
Difficult to
IJ17, IJ21, IJ34,


uncoil
uncoils or coils more
as a planar VLSI
fabricate for non-
IJ35



tightly. The motion of
process
planar devices



the free end of the
Small area
Poor out-of-plane



actuator ejects the ink.
required, therefore
stiffness




low cost


Bow
The actuator bows (or
Can increase the
Maximum travel
IJ16, IJ18, IJ27



buckles) in the middle
speed of travel
is constrained



when energized.
Mechanically
High force




rigid
required


Push-Pull
Two actuators control
The structure is
Not readily
IJ18



a shutter. One actuator
pinned at both ends,
suitable for ink jets



pulls the shutter, and
so has a high out-of-
which directly push



the other pushes it.
plane rigidity
the ink


Curl
A set of actuators curl
Good fluid flow
Design
IJ20, IJ42


inwards
inwards to reduce the
to the region behind
complexity



volume of ink that
the actuator



they enclose.
increases efficiency


Curl
A set of actuators curl
Relatively simple
Relatively large
IJ43


outwards
outwards, pressurizing
construction
chip area



ink in a chamber



surrounding the



actuators, and



expelling ink from a



nozzle in the chamber.


Iris
Multiple vanes enclose
High efficiency
High fabrication
IJ22



a volume of ink. These
Small chip area
complexity



simultaneously rotate,

Not suitable for



reducing the volume

pigmented inks



between the vanes.


Acoustic
The actuator vibrates
The actuator can
Large area
1993 Hadimioglu


vibration
at a high frequency.
be physically distant
required for
et al, EUP 550,192




from the ink
efficient operation
1993 Elrod et al,





at useful frequencies
EUP 572,220





Acoustic coupling





and crosstalk





Complex drive





circuitry





Poor control of





drop volume and





position


None
In various ink jet
No moving parts
Various other
Silverbrook, EP



designs the actuator

tradeoffs are
0771 658 A2 and



does not move.

required to
related patent





eliminate moving
applications





parts
Tone-jet



















NOZZLE REFILL METHOD












Description
Advantages
Disadvantages
Examples















Surface
This is the normal way
Fabrication
Low speed
Thermal ink jet


tension
that ink jets are
simplicity
Surface tension
Piezoelectric ink



refilled. After the
Operational
force relatively
jet



actuator is energized,
simplicity
small compared to
IJ01-IJ07, IJ10-IJ14,



it typically returns

actuator force
IJ16, IJ20,



rapidly to its normal

Long refill time
IJ22-IJ45



position. This rapid

usually dominates



return sucks in air

the total repetition



through the nozzle

rate



opening. The ink



surface tension at the



nozzle then exerts a



small force restoring



the meniscus to a



minimum area. This



force refills the nozzle.


Shuttered
Ink to the nozzle
High speed
Requires common
IJ08, IJ13, IJ15,


oscillating
chamber is provided at
Low actuator
ink pressure
IJ17, IJ18, IJ19,


ink
a pressure that
energy, as the
oscillator
IJ21


pressure
oscillates at twice the
actuator need only
May not be



drop ejection
open or close the
suitable for



frequency. When a
shutter, instead of
pigmented inks



drop is to be ejected,
ejecting the ink drop



the shutter is opened



for 3 half cycles: drop



ejection, actuator



return, and refill. The



shutter is then closed



to prevent the nozzle



chamber emptying



during the next



negative pressure



cycle.


Refill
After the main
High speed, as the
Requires two
IJ09


actuator
actuator has ejected a
nozzle is actively
independent



drop a second (refill)
refilled
actuators per nozzle



actuator is energized.



The refill actuator



pushes ink into the



nozzle chamber. The



refill actuator returns



slowly, to prevent its



return from emptying



the chamber again.


Positive
The ink is held a slight
High refill rate,
Surface spill must
Silverbrook, EP


ink
positive pressure.
therefore a high
be prevented
0771 658 A2 and


pressure
After the ink drop is
drop repetition rate
Highly
related patent



ejected, the nozzle
is possible
hydrophobic print
applications



chamber fills quickly

head surfaces are
Alternative for:,



as surface tension and

required
IJ01-IJ07, IJ10-IJ14,



ink pressure both


IJ16, IJ20,



operate to refill the


IJ22-IJ45



nozzle.



















METHOD OF RESTRICTING BACK-FLOW THROUGH INLET












Description
Advantages
Disadvantages
Examples















Long inlet
The ink inlet channel
Design simplicity
Restricts refill
Thermal ink jet


channel
to the nozzle chamber
Operational
rate
Piezoelectric ink



is made long and
simplicity
May result in a
jet



relatively narrow,
Reduces crosstalk
relatively large chip
IJ42, IJ43



relying on viscous

area



drag to reduce inlet

Only partially



back-flow.

effective


Positive
The ink is under a
Drop selection
Requires a
Silverbrook, EP


ink
positive pressure, so
and separation
method (such as a
0771 658 A2 and


pressure
that in the quiescent
forces can be
nozzle rim or
related patent



state some of the ink
reduced
effective
applications



drop already protrudes
Fast refill time
hydrophobizing, or
Possible operation



from the nozzle.

both) to prevent
of the following:



This reduces the

flooding of the
IJ01-IJ07, IJ09-IJ12,



pressure in the nozzle

ejection surface of
IJ14, IJ16,



chamber which is

the print head.
IJ20, IJ22,, IJ23-IJ34,



required to eject a


IJ36-IJ41,



certain volume of ink.


IJ44



The reduction in



chamber pressure



results in a reduction



in ink pushed out



through the inlet.


Baffle
One or more baffles
The refill rate is
Design
HP Thermal Ink



are placed in the inlet
not as restricted as
complexity
Jet



ink flow. When the
the long inlet
May increase
Tektronix



actuator is energized,
method.
fabrication
piezoelectric ink jet



the rapid ink
Reduces crosstalk
complexity (e.g.



movement creates

Tektronix hot melt



eddies which restrict

Piezoelectric print



the flow through the

heads).



inlet. The slower refill



process is unrestricted,



and does not result in



eddies.


Flexible
In this method recently
Significantly
Not applicable to
Canon


flap
disclosed by Canon,
reduces back-flow
most ink jet


restricts
the expanding actuator
for edge-shooter
configurations


inlet
(bubble) pushes on a
thermal ink jet
Increased



flexible flap that
devices
fabrication



restricts the inlet.

complexity





Inelastic





deformation of





polymer flap results





in creep over





extended use


Inlet filter
A filter is located
Additional
Restricts refill
IJ04, IJ12, IJ24,



between the ink inlet
advantage of ink
rate
IJ27, IJ29, IJ30



and the nozzle
filtration
May result in



chamber. The filter
Ink filter may be
complex



has a multitude of
fabricated with no
construction



small holes or slots,
additional process



restricting ink flow.
steps



The filter also removes



particles which may



block the nozzle.


Small inlet
The ink inlet channel
Design simplicity
Restricts refill
IJ02, IJ37, IJ44


compared
to the nozzle chamber

rate


to nozzle
has a substantially

May result in a



smaller cross section

relatively large chip



than that of the nozzle,

area



resulting in easier ink

Only partially



egress out of the

effective



nozzle than out of the



inlet.


Inlet
A secondary actuator
Increases speed of
Requires separate
IJ09


shutter
controls the position
the ink-jet print
refill actuator and



of a shutter, closing
head operation
drive circuit



off the ink inlet when



the main actuator is



energized.


The inlet is
The method avoids the
Back-flow
Requires careful
IJ01, IJ03, IJ05,


located
problem of inlet back-
problem is
design to minimize
IJ06, IJ07, IJ10,


behind the
flow by arranging the
eliminated
the negative
IJ11, IJ14, IJ16,


ink-
ink-pushing surface of

pressure behind the
IJ22, IJ23, IJ25,


pushing
the actuator between

paddle
IJ28, IJ31, IJ32,


surface
the inlet and the


IJ33, IJ34, IJ35,



nozzle.


IJ36, IJ39, IJ40,






IJ41


Part of the
The actuator and a
Significant
Small increase in
IJ07, IJ20, IJ26,


actuator
wall of the ink
reductions in back-
fabrication
IJ38


moves to
chamber are arranged
flow can be
complexity


shut off
so that the motion of
achieved


the inlet
the actuator closes off
Compact designs



the inlet.
possible


Nozzle
In some configurations
Ink back-flow
None related to
Silverbrook, EP


actuator
of ink jet, there is no
problem is
ink back-flow on
0771 658 A2 and


does not
expansion or
eliminated
actuation
related patent


result in
movement of an


applications


ink back-
actuator which may


Valve-jet


flow
cause ink back-flow


Tone-jet



through the inlet.



















NOZZLE CLEARING METHOD












Description
Advantages
Disadvantages
Examples















Normal
All of the nozzles are
No added
May not be
Most ink jet


nozzle
fired periodically,
complexity on the
sufficient to
systems


firing
before the ink has a
print head
displace dried ink
IJ01, IJ02, IJ03,



chance to dry. When


IJ04, IJ05, IJ06,



not in use the nozzles


IJ07, IJ09, IJ10,



are sealed (capped)


IJ11, IJ12, IJ14,



against air.


IJ16, IJ20, IJ22,



The nozzle firing is


IJ23, IJ24, IJ25,



usually performed


IJ26, IJ27, IJ28,



during a special


IJ29, IJ30, IJ31,



clearing cycle, after


IJ32, IJ33, IJ34,



first moving the print


IJ36, IJ37, IJ38,



head to a cleaning


IJ39, IJ40,, IJ41,



station.


IJ42, IJ43, IJ44,,






IJ45


Extra
In systems which heat
Can be highly
Requires higher
Silverbrook, EP


power to
the ink, but do not boil
effective if the
drive voltage for
0771 658 A2 and


ink heater
it under normal
heater is adjacent to
clearing
related patent



situations, nozzle
the nozzle
May require
applications



clearing can be

larger drive



achieved by over-

transistors



powering the heater



and boiling ink at the



nozzle.


Rapid
The actuator is fired in
Does not require
Effectiveness
May be used


succession
rapid succession. In
extra drive circuits
depends
with: IJ01, IJ02,


of
some configurations,
on the print head
substantially upon
IJ03, IJ04, IJ05,


actuator
this may cause heat
Can be readily
the configuration of
IJ06, IJ07, IJ09,


pulses
build-up at the nozzle
controlled and
the ink jet nozzle
IJ10, IJ11, IJ14,



which boils the ink,
initiated by digital

IJ16, IJ20, IJ22,



clearing the nozzle. In
logic

IJ23, IJ24, IJ25,



other situations, it may


IJ27, IJ28, IJ29,



cause sufficient


IJ30, IJ31, IJ32,



vibrations to dislodge


IJ33, IJ34, IJ36,



clogged nozzles.


IJ37, IJ38, IJ39,






IJ40, IJ41, IJ42,






IJ43, IJ44, IJ45


Extra
Where an actuator is
A simple solution
Not suitable
May be used


power to
not normally driven to
where applicable
where there is a
with: IJ03, IJ09,


ink
the limit of its motion,

hard limit to
IJ16, IJ20, IJ23,


pushing
nozzle clearing may be

actuator movement
IJ24, IJ25, IJ27,


actuator
assisted by providing


IJ29, IJ30, IJ31,



an enhanced drive


IJ32, IJ39, IJ40,



signal to the actuator.


IJ41, IJ42, IJ43,






IJ44, IJ45


Acoustic
An ultrasonic wave is
A high nozzle
High
IJ08, IJ13, IJ15,


resonance
applied to the ink
clearing capability
implementation cost
IJ17, IJ18, IJ19,



chamber. This wave is
can be achieved
if system does not
IJ21



of an appropriate
May be
already include an



amplitude and
implemented at very
acoustic actuator



frequency to cause
low cost in systems



sufficient force at the
which already



nozzle to clear
include acoustic



blockages. This is
actuators



easiest to achieve if



the ultrasonic wave is



at a resonant



frequency of the ink



cavity.


Nozzle
A microfabricated
Can clear severely
Accurate
Silverbrook, EP


clearing
plate is pushed against
clogged nozzles
mechanical
0771 658 A2 and


plate
the nozzles. The plate

alignment is
related patent



has a post for every

required
applications



nozzle. A post moves

Moving parts are



through each nozzle,

required



displacing dried ink.

There is risk of





damage to the





nozzles





Accurate





fabrication is





required


Ink
The pressure of the ink
May be effective
Requires pressure
May be used with


pressure
is temporarily
where other
pump or other
all IJ series ink jets


pulse
increased so that ink
methods cannot be
pressure actuator



streams from all of the
used
Expensive



nozzles. This may be

Wasteful of ink



used in conjunction



with actuator



energizing.


Print head
A flexible ‘blade’ is
Effective for
Difficult to use if
Many ink jet


wiper
wiped across the print
planar print head
print head surface is
systems



head surface. The
surfaces
non-planar or very



blade is usually
Low cost
fragile



fabricated from a

Requires



flexible polymer, e.g.

mechanical parts



rubber or synthetic

Blade can wear



elastomer.

out in high volume





print systems


Separate
A separate heater is
Can be effective
Fabrication
Can be used with


ink boiling
provided at the nozzle
where other nozzle
complexity
many IJ series ink


heater
although the normal
clearing methods

jets



drop ejection
cannot be used



mechanism does not
Can be



require it. The heaters
implemented at no



do not require
additional cost in



individual drive
some ink jet



circuits, as many
configurations



nozzles can be cleared



simultaneously, and no



imaging is required.



















NOZZLE PLATE CONSTRUCTION












Description
Advantages
Disadvantages
Examples















Electroformed
A nozzle plate is
Fabrication
High
Hewlett Packard


nickel
separately fabricated
simplicity
temperatures and
Thermal Ink jet



from electroformed

pressures are



nickel, and bonded to

required to bond



the print head chip.

nozzle plate





Minimum





thickness





constraints





Differential





thermal expansion


Laser
Individual nozzle
No masks
Each hole must be
Canon Bubblejet


ablated or
holes are ablated by an
required
individually formed
1988 Sercel et al.,


drilled
intense UV laser in a
Can be quite fast
Special
SPIE, Vol. 998


polymer
nozzle plate, which is
Some control
equipment required
Excimer Beam



typically a polymer
over nozzle profile
Slow where there
Applications, pp.



such as polyimide or
is possible
are many thousands
76-83



polysulphone
Equipment
of nozzles per print
1993 Watanabe et




required is relatively
head
al., U.S. Pat. No. 5,208,604




low cost
May produce thin





burrs at exit holes


Silicon
A separate nozzle
High accuracy is
Two part
K. Bean, IEEE


micromachined
plate is
attainable
construction
Transactions on



micromachined from

High cost
Electron Devices,



single crystal silicon,

Requires
Vol. ED-25, No. 10,



and bonded to the

precision alignment
1978, pp 1185-1195



print head wafer.

Nozzles may be
Xerox 1990





clogged by adhesive
Hawkins et al., U.S. Pat. No.






4,899,181


Glass
Fine glass capillaries
No expensive
Very small nozzle
1970 Zoltan U.S. Pat. No.


capillaries
are drawn from glass
equipment required
sizes are difficult to
3,683,212



tubing. This method
Simple to make
form



has been used for
single nozzles
Not suited for



making individual

mass production



nozzles, but is difficult



to use for bulk



manufacturing of print



heads with thousands



of nozzles.


Monolithic,
The nozzle plate is
High accuracy
Requires
Silverbrook, EP


surface
deposited as a layer
(<1 μm)
sacrificial layer
0771 658 A2 and


micromachined
using standard VLSI
Monolithic
under the nozzle
related patent


using VLSI
deposition techniques.
Low cost
plate to form the
applications


lithographic
Nozzles are etched in
Existing
nozzle chamber
IJ01, IJ02, IJ04,


processes
the nozzle plate using
processes can be
Surface may be
IJ11, IJ12, IJ17,



VLSI lithography and
used
fragile to the touch
IJ18, IJ20, IJ22,



etching.


IJ24, IJ27, IJ28,






IJ29, IJ30, IJ31,






IJ32, IJ33, IJ34,






IJ36, IJ37, IJ38,






IJ39, IJ40, IJ41,






IJ42, IJ43, IJ44


Monolithic,
The nozzle plate is a
High accuracy
Requires long
IJ03, IJ05, IJ06,


etched
buried etch stop in the
(<1 μm)
etch times
IJ07, IJ08, IJ09,


through
wafer. Nozzle
Monolithic
Requires a
IJ10, IJ13, IJ14,


substrate
chambers are etched in
Low cost
support wafer
IJ15, IJ16, IJ19,



the front of the wafer,
No differential

IJ21, IJ23, IJ25,



and the wafer is
expansion

IJ26



thinned from the back



side. Nozzles are then



etched in the etch stop



layer.


No nozzle
Various methods have
No nozzles to
Difficult to
Ricoh 1995


plate
been tried to eliminate
become clogged
control drop
Sekiya et al U.S. Pat. No.



the nozzles entirely, to

position accurately
5,412,413



prevent nozzle

Crosstalk
1993 Hadimioglu



clogging. These

problems
et al EUP 550,192



include thermal bubble


1993 Elrod et al



mechanisms and


EUP 572,220



acoustic lens



mechanisms


Trough
Each drop ejector has
Reduced
Drop firing
IJ35



a trough through
manufacturing
direction is sensitive



which a paddle moves.
complexity
to wicking.



There is no nozzle
Monolithic



plate.


Nozzle slit
The elimination of
No nozzles to
Difficult to
1989 Saito et al


instead of
nozzle holes and
become clogged
control drop
U.S. Pat. No. 4,799,068


individual
replacement by a slit

position accurately


nozzles
encompassing many

Crosstalk



actuator positions

problems



reduces nozzle



clogging, but increases



crosstalk due to ink



surface waves



















DROP EJECTION DIRECTION












Description
Advantages
Disadvantages
Examples















Edge
Ink flow is along the
Simple
Nozzles limited to
Canon Bubblejet


(‘edge
surface of the chip,
construction
edge
1979 Endo et al GB


shooter’)
and ink drops are
No silicon etching
High resolution is
patent 2,007,162



ejected from the chip
required
difficult
Xerox heater-in-



edge.
Good heat sinking
Fast color
pit 1990 Hawkins et




via substrate
printing requires
al U.S. Pat. No. 4,899,181




Mechanically
one print head per
Tone-jet




strong
color




Ease of chip




handing


Surface
Ink flow is along the
No bulk silicon
Maximum ink
Hewlett-Packard


(‘roof
surface of the chip,
etching required
flow is severely
TIJ 1982 Vaught et


shooter’)
and ink drops are
Silicon can make
restricted
al U.S. Pat. No. 4,490,728



ejected from the chip
an effective heat

IJ02, IJ11, IJ12,



surface, normal to the
sink

IJ20, IJ22



plane of the chip.
Mechanical




strength


Through
Ink flow is through the
High ink flow
Requires bulk
Silverbrook, EP


chip,
chip, and ink drops are
Suitable for
silicon etching
0771 658 A2 and


forward
ejected from the front
pagewidth print

related patent


(‘up
surface of the chip.
heads

applications


shooter’)

High nozzle

IJ04, IJ17, IJ18,




packing density

IJ24, IJ27-IJ45




therefore low




manufacturing cost


Through
Ink flow is through the
High ink flow
Requires wafer
IJ01, IJ03, IJ05,


chip,
chip, and ink drops are
Suitable for
thinning
IJ06, IJ07, IJ08,


reverse
ejected from the rear
pagewidth print
Requires special
IJ09, IJ10, IJ13,


(‘down
surface of the chip.
heads
handling during
IJ14, IJ15, IJ16,


shooter’)

High nozzle
manufacture
IJ19, IJ21, IJ23,




packing density

IJ25, IJ26




therefore low




manufacturing cost


Through
Ink flow is through the
Suitable for
Pagewidth print
Epson Stylus


actuator
actuator, which is not
piezoelectric print
heads require
Tektronix hot



fabricated as part of
heads
several thousand
melt piezoelectric



the same substrate as

connections to drive
ink jets



the drive transistors.

circuits





Cannot be





manufactured in





standard CMOS





fabs





Complex





assembly required



















INK TYPE












Description
Advantages
Disadvantages
Examples















Aqueous,
Water based ink which
Environmentally
Slow drying
Most existing ink


dye
typically contains:
friendly
Corrosive
jets



water, dye, surfactant,
No odor
Bleeds on paper
All IJ series ink



humectant, and

May
jets



biocide.

strikethrough
Silverbrook, EP



Modern ink dyes have

Cockles paper
0771 658 A2 and



high water-fastness,


related patent



light fastness


applications


Aqueous,
Water based ink which
Environmentally
Slow drying
IJ02, IJ04, IJ21,


pigment
typically contains:
friendly
Corrosive
IJ26, IJ27, IJ30



water, pigment,
No odor
Pigment may clog
Silverbrook, EP



surfactant, humectant,
Reduced bleed
nozzles
0771 658 A2 and



and biocide.
Reduced wicking
Pigment may clog
related patent



Pigments have an
Reduced
actuator
applications



advantage in reduced
strikethrough
mechanisms
Piezoelectric ink-



bleed, wicking and

Cockles paper
jets



strikethrough.


Thermal ink jets






(with significant






restrictions)


Methyl
MEK is a highly
Very fast drying
Odorous
All IJ series ink


Ethyl
volatile solvent used
Prints on various
Flammable
jets


Ketone
for industrial printing
substrates such as


(MEK)
on difficult surfaces
metals and plastics



such as aluminum



cans.


Alcohol
Alcohol based inks
Fast drying
Slight odor
All IJ series ink


(ethanol,
can be used where the
Operates at sub-
Flammable
jets


2-butanol,
printer must operate at
freezing


and
temperatures below
temperatures


others)
the freezing point of
Reduced paper



water. An example of
cockle



this is in-camera
Low cost



consumer



photographic printing.


Phase
The ink is solid at
No drying time-
High viscosity
Tektronix hot


change
room temperature, and
ink instantly freezes
Printed ink
melt piezoelectric


(hot melt)
is melted in the print
on the print medium
typically has a
ink jets



head before jetting.
Almost any print
‘waxy’ feel
1989 Nowak U.S. Pat. No.



Hot melt inks are
medium can be used
Printed pages may
4,820,346



usually wax based,
No paper cockle
‘block’
All IJ series ink



with a melting point
occurs
Ink temperature
jets



around 80° C. After
No wicking
may be above the



jetting the ink freezes
occurs
curie point of



almost instantly upon
No bleed occurs
permanent magnets



contacting the print
No strikethrough
Ink heaters



medium or a transfer
occurs
consume power



roller.

Long warm-up





time


Oil
Oil based inks are
High solubility
High viscosity:
All IJ series ink



extensively used in
medium for some
this is a significant
jets



offset printing. They
dyes
limitation for use in



have advantages in
Does not cockle
ink jets, which



improved
paper
usually require a



characteristics on
Does not wick
low viscosity. Some



paper (especially no
through paper
short chain and



wicking or cockle).

multi-branched oils



Oil soluble dies and

have a sufficiently



pigments are required.

low viscosity.





Slow drying


Microemulsion
A microemulsion is a
Stops ink bleed
Viscosity higher
All IJ series ink



stable, self forming
High dye
than water
jets



emulsion of oil, water,
solubility
Cost is slightly



and surfactant. The
Water, oil, and
higher than water



characteristic drop size
amphiphilic soluble
based ink



is less than 100 nm,
dies can be used
High surfactant



and is determined by
Can stabilize
concentration



the preferred curvature
pigment
required (around



of the surfactant.
suspensions
5%)

## Claims

1. An inkjet printhead having a plurality of nozzle arrangements for ejecting ink onto a printing medium, each nozzle arrangement comprising:
a substrate defining an ink chamber having an ink inlet and a plurality of ink ejection ports, the chamber being in fluid communication with an ink supply channel in the printhead via the ink inlet;
a pivot anchor arranged on the substrate; and
a moveable actuator fast with the pivot anchor and arranged to cause selective ejection of ink from any one of the ejection ports while simultaneously causing an inflow of ink from the ink supply channel into the chamber via the ink inlet.

2. The inkjet printhead of claim 1, wherein each movable actuator incorporates a thermal bend actuator arranged within the associated chamber, the thermal bend actuator being configured to undergo movement due to thermal expansion.

3. The inkjet printhead of claim 2, wherein each thermal bend actuator has a beam supporting a paddle, the beam and paddle being arranged so that movement of the paddle from a quiescent position towards one of the ejection ports causes the ejection of ink through that ejection port.

4. The inkjet printhead of claim 3, wherein the beam has a plurality of parallel co-extensive resistor elements arranged so that differential electrical actuation of the resistor elements creates differential thermal expansion of the beam which causes the movement of the paddle from the quiescent position.

5. The inkjet printhead of claim 4, wherein the beam further has a core extending centrally of the resistor elements, the core being formed of material that substantially thermally insulates each of the resistor elements from one another.

6. The inkjet printhead of claim 5, wherein the material of the core is glass and a material of each of the resistor elements is a copper nickel based alloy.

7. The inkjet printhead of claim 5, wherein the chamber has two ink ejection ports and the thermal bend actuator has two resistor elements on opposite sides of the core such that the paddle can be moved selectively in opposite directions from the quiescent position.