UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                   FORM 10-K/A
                                 AMENDMENT NO. 1


(Mark One)

[X]  ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the fiscal year ended: September 30, 2000

                                       OR

[ ]  TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________

Commission File Number: 0-11412
                        -------

                              AMTECH SYSTEMS, INC.
             ------------------------------------------------------
             (Exact name of registrant as specified in its charter)

           Arizona                                               86-0411215
-------------------------------                              -------------------
(State or other jurisdiction of                               (I.R.S. Employer
incorporation or organization)                               Identification No.)

 131 South Clark Drive, Tempe, Arizona                               85281
----------------------------------------                          ----------
(Address of principal executive offices)                          (Zip Code)

Registrant's telephone number, including area code: 480-967-5146

The undersigned Registrant hereby amends its Form 10-K for the fiscal year ended
September 30, 2000, as follows:

     Part  III,  Items 9 - 12 are  hereby  amended  by  including  the  required
material rather than incorporating it by reference.

     Part IV, ITEM 13 (EXHIBITS,  FINANCIAL STATEMENT SCHEDULES,  AND REPORTS ON
FORM  8-K)  is  hereby  amended  by  re-filing  Exhibit  No.  23  to  correct  a
typographical error in that Exhibit.
<PAGE>
                                    PART III


ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

     The  following  table sets forth  information  regarding  the  officers and
directors   (who  are  also  director   nominees)  of  the  Company,   including
biographical data for at least the last five years.

     NAME                 AGE   POSITION WITH THE COMPANY

     Jong S. Whang        55    President, Chief Executive Officer and Director
     Robert T. Hass       50    Vice President-Finance, Chief Financial Officer,
                                Treasurer, Secretary and Director
     Donald F. Johnston   73    Director
     Alvin Katz           71    Director
     Bruce R. Thaw        48    Director

     JONG S. WHANG has been President, Chief Executive Officer and a Director of
the  Company  since  its  inception  and was one of its  founders.  Mr.  Whang's
responsibilities  as  President  include  the  sales  effort  for the  Company's
semiconductor  equipment  business and  development of new products and business
opportunities in that industry.  He has twenty-seven  years of experience in the
semiconductor   industry,   including   time  spent  in  both   processing   and
manufacturing of equipment components and systems.  From 1973 until 1979, he was
employed by Siltronics,  Inc.,  initially as a technician  working with chemical
vapor deposition (CVD) and later as manager of the quartz fabrication plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

     ROBERT T. HASS has been Vice  President-Finance,  Chief Financial  Officer,
Treasurer and  Secretary of the Company since June 3, 1992.  Mr. Hass has served
as a Director of the Company since February 29, 1996.  From 1991 until May 1992,
he operated a financial  consulting  practice  under the name of Hass  Financial
Consulting Services,  a sole proprietorship.  From 1985 to 1991, Mr. Hass served
as Director of Accounting  Services and then  Controller for  Lifeshares  Group,
Inc.,  a holding  company that owned and operated  real estate  development  and
insurance  subsidiaries,  and from 1988 to 1991 served as  Controller  and Chief
Accounting  Officer of some of  Lifeshares  Group's  subsidiaries.  From 1984 to
1985, he served as Vice President-Finance and Treasurer of The Victorio Company,
a  privately  owned  holding  company  which  owned  and  operated  agriculture,
chemical,  commercial real estate brokerage,  marketing research and commodities
futures  brokerage  businesses.  From 1977 to 1984,  he was  employed in various
capacities  including Vice President,  Chief Financial  Officer and Treasurer by
Altamil Corporation,  then a public company, which manufactures truck equipment,
wire-bound  containers,  and precision aluminum forgings.  From 1972 to 1977, he
was employed as an auditor with Ernst & Ernst, now known as Ernst & Young. He is
a Certified Public Accountant.

     DONALD F.  JOHNSTON has been a  non-employee  Director of the Company since
April 9, 1994, and from March 1983 to December 1992. From 1985 to March 1993, he
served as  President  and Chief  Executive  Officer of JAI,  Inc.,  a management
consulting firm. From 1985 to March 1993, when he retired, he acted as marketing
and  management  consultant  to  companies  in the  electronics  industry.  From
November 1983 until October 1985, he was President of Process  Control,  Inc. of
Tempe,  Arizona. He has held senior management  positions with Montgomery Ward &
Co. and the  Hotpoint  Division of the  General  Electric  Company.  He has also
served as a Vice-President of B.F. Goodrich,  Vice-President of Marketing of the
Philco Ford Division of the Ford Motor Company and Executive  Vice-President  of
CTV. Mr. Johnston also served as President and Chief Executive  Officer of Mirco
Electronics, Amstar Electronics and Hera Investment Co.

                                       1
<PAGE>
     ALVIN  KATZ has been a Director  of the  Company  since May 1, 1995.  Since
1981,  he has been an adjunct  professor of business  management  at the Florida
Atlantic University in Boca Raton, Florida. From 1991 until the company was sold
in September 1992, he was Chief Executive Officer of Odessa Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976,  Mr.  Katz was  employed  by  United  Parcel  Service  holding  various
managerial  positions,  including  District  Manager  and  Corporate  Manager of
Operations Planning,  Research and Development. He is also a Director of Blimpie
International, a fast food franchiser, and Nastech Pharmaceutical Company, Inc.,
a public  company  engaged in  research,  development  and  marketing of nasally
delivered pharmaceuticals.

     BRUCE R. THAW has been a Director  of the  Company  since May 1, 1995.  Mr.
Thaw is currently  the  President and Chief  Executive  Officer of  Bulbtronics,
Inc.,  a national  distributor  of technical  and  specialty  light  sources and
related products.  Mr. Thaw is a practicing attorney and was admitted to the bar
of the State of New York in 1978 and the  California  State  Bar in 1983.  He is
also a director  of SafeNet,  Inc.,  a publicly  traded  company  that  designs,
manufactures and markets  computer  network  security systems and products,  and
Nastech  Pharmaceutical  Company, Inc, a publicly traded company engaged in drug
delivery technology. Mr. Thaw does not render legal services to the Company.

SECTION 16(a) BENEFICIAL OWNERSHIP REPORTING COMPLIANCE

     Section 16(a) of the Securities Exchange Act of 1934, as amended,  requires
the Company's directors and executive officers,  as well as persons beneficially
owning more than 10% of the Company's  outstanding Common Stock, to file certain
reports of ownership  with the Securities  and Exchange  Commission  (the "SEC")
within  specified time periods.  Such officers,  directors and  shareholders are
also  required by SEC rules to furnish  the  Company  with copies of all Section
16(a) forms they file.

     Based  solely  on its  review of such  forms  received  by it,  or  written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October  1,  1999 and  September  30,  2000 all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied with.

ITEM 11. EXECUTIVE COMPENSATION

     The following table sets forth  information  regarding annual and long-term
compensation for services  rendered to the Company during the fiscal years ended
September 30, 2000, 1999 and 1998 by the Company's  Chief Executive  Officer and
the other most highly compensated  executive officer of the Company who received
annual compensation  exceeding $100,000 during such periods  (collectively,  the
"Named Executive Officers").

                           SUMMARY COMPENSATION TABLE
<TABLE>
<CAPTION>
                                              ANNUAL COMPENSATION                  LONG-TERM
                                   --------------------------------------------   COMPENSATION
        NAME AND          FISCAL                                 OTHER ANNUAL      RESTRICTED        ALL OTHER
   PRINCIPAL POSITION      YEAR    SALARY (1)     BONUS (2)    COMPENSATION (3)   STOCK AWARDS    COMPENSATION(4)
   ------------------     ------   -----------    ---------    ---------------    ------------    --------------
<S>                       <C>      <C>            <C>          <C>                <C>             <C>
Jong S. Whang              2000     $175,817      $122,266           --                --              $1,242
President and Chief        1999      130,200        12,292           --                --                  --
Executive Officer          1998      167,147            --           --                --               3,037

Robert T.  Hass            2000       99,750         9,500           --                --                 615
Vice President-            1999       85,500            --           --                --                  --
Finance                    1998       96,105         7,245           --                --               2,123
</TABLE>

----------
(1)  For  fiscal  1999,  Mr.  Whang  voluntarily  reduced  his  salary by 20% to
     $130,200.  Effective  October 4, 1999, Mr. Whang's base salary was restored
     to that specified in his employment  agreement.  Effective October 4, 1998,
     Mr.  Hass'  annual  salary was reduced to $85,500.  For fiscal  2000,  this
     column includes an accrued retrospective salary increase of $14,250.

                                       2
<PAGE>
(2)  On  February  24,  1989,  the  Board of  Directors  approved  an  incentive
     compensation  plan for Mr. Whang,  which  provides for an annual cash bonus
     equal  to 2% of  the  annual  profits  of  the  Company  before  taxes  and
     extraordinary  items;  plus 2% of the amount by which the  revenues  of the
     Company'  s  semiconductor  equipment  business  in each year  exceed  such
     revenues  for the  previous  year.  It is a condition to the payment of any
     bonus that Mr. Whang has been continually  employed by the Company and that
     the  Company  has  realized a profit  after the  payment  of the bonus.  On
     February 28, 1997,  Mr. Whang entered into an employment  contract with the
     Company,  which contract  incorporated Mr. Whang's  incentive  compensation
     plan and added  additional  bonus  eligibility  criteria.  See  "Employment
     Contracts with Executive  Officers,"  below.  The amount  reflected in this
     column in fiscal  2000 for Mr.  Whang  includes  a  discretionary  bonus of
     $32,550, in addition to the $89,716 earned in accordance with the incentive
     compensation plan described above.

(3)  Other  compensation to Messrs.  Whang and Hass,  consisting of the use of a
     Company car, vacation pay and other perquisites,  did not exceed $50,000 or
     10% of base compensation during any fiscal year covered by this table.

(4)  Amounts for Mr. Whang and Mr. Hass represent Company matching contributions
     in the Amtech 401(k) Plan.

OPTION GRANTS

     There were no grants of stock options  during fiscal year 2000 to the Named
Executive Officers.

OPTION EXERCISES

     The following table contains information  regarding stock options exercised
during the 2000 fiscal year by the Named Executive Officers.

                 AGGREGATED OPTION EXERCISES IN LAST FISCAL YEAR
                        AND FISCAL YEAR END OPTION VALUES

<TABLE>
<CAPTION>
                                                Number of                  Value of unexercised
                                          Unexercised options at               in-the-money
                   Shares                    fiscal year-end            options at fiscal year-end
                acquired on    Value     ----------------------------    ----------------------------
Name             exercise    Realized    Exercisable    Unexercisable    Exercisable    Unexercisable
----             --------    --------    -----------    -------------    -----------    -------------
<S>               <C>        <C>              <C>           <C>           <C>             <C>
J.S. Whang        62,275     $404,725         250           42,517        $ 3,375         $589,504
Robert T. Hass       -0-          -0-       1,750            4,500         24,280           62,433
</TABLE>

----------
(1)  Based on the closing price of the  Company's  Common Stock on September 30,
     2000 of $15.00 per share, as reported by the NASDAQ Stock Market.

EMPLOYMENT AGREEMENTS

     On February 28, 1997, the Company  entered into a five (5) year  employment
agreement with its President,  Jong S. Whang.  Under the terms of the agreement,
Mr. Whang is entitled to an annual  salary of $170,900 on October 1, 1998,  with
annual  increases of at least 5% to be  determined  by the Board of Directors at
the end of each year of the  agreement.  Effective  October 4, 1998,  Mr.  Whang
voluntarily initiated a 20% reduction in his salary to $130,200. In addition, he
is entitled to receive annual  incentive cash  compensation  of up to 50% of his
base salary, to be calculated as follows:  (i) a bonus equal to 2% of the annual
earnings of the Company before taxes and  extraordinary  items, and (ii) a bonus
equal to 2% of the amount by which the  revenues  of the  Company in each fiscal
year exceeds such  revenues for the previous  fiscal year.  It is a condition to
the  payment  of any cash  bonus that Mr.  Whang  shall  have been  continuously
employed  by the  Company  and that the total of all cash and stock  bonuses  is
limited to 10% of the  Company's  pre-tax  earnings  for that year.  Profits are
determined without taking into account the first $3,200,000 expended or invested

                                       3
<PAGE>
by the Company in the  development of the proposed  photo-assisted  CVD product,
which has been  suspended.  In  addition,  Mr. Whang was granted  103,792  stock
options  pursuant to the  agreement.  These options were granted on February 28,
1997  and  vest at the rate of 20% per full  year of  service  over a  five-year
period. To the extent not already  exercisable,  the options become  immediately
exercisable  upon:  (i) the  dissolution  or  liquidation  of the  Company  or a
reorganization,  merger or consolidation in which all or substantially all prior
shareholders do not continue to own more than 60% of the then outstanding shares
of Common Stock and voting securities, (ii) the sale of all or substantially all
of the assets of the Company,  or (iii) the occurrence of a change in control of
the  Company  as  defined  in  the   agreement.   The  agreement  also  contains
confidentiality  and non-compete  provisions.  If Mr. Whang is terminated  other
than for "cause," he is entitled to receive salary,  incentive  compensation and
vacation  accrued  through the date of termination  plus the greater of his then
annual salary or the balance of his  compensation  to the end of the term of the
employment  agreement  computed using the latest  applicable salary rate without
consideration  of any salary  reductions  as  severance  pay.  Mr. Whang is also
entitled to participate in any benefit plans generally available to employees of
the Company.

COMPENSATION OF DIRECTORS

     Directors who are full-time  employees of the Company receive no additional
compensation for serving as directors.  Non-employee  directors  receive fees of
$700  per  Board  meeting  attended  and $250 per  committee  meeting  attended.
Commencing in fiscal year 2001,  non-employee  directors  also receive an annual
fee of $6,000.  In addition,  under the Company's  Non-Employee  Directors Stock
Option  Plan,  each  outside  director  receives  an annual  grant of options to
purchase 3,000 shares of Common Stock.  The exercise price of the options is the
fair  market  value of Common  Stock on the date of grant and each  option has a
term of ten years and becomes exercisable in three equal installments commencing
on the  first  anniversary  of the  date of  grant  and  continuing  for the two
successive anniversaries  thereafter.  In the event of disability (as defined in
the plan) or death of an outside director,  all options remain exercisable for a
period of twelve months  following the date such person ceased to be a director,
but only to the extent  such  option was  exercisable  on the date the  director
ceased to be a director.

ITEM 11. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

     The  following  table  sets  forth  certain   information   concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 21, 2001, by
(i) each director of the Company,  (ii) each  executive  officer of the Company,
including the Named  Executive  Officers,  and (iii) all executive  officers and
directors of the Company as a group, and (iv) all other persons who beneficially
own five percent (5%) or more of the Company's  outstanding Common Stock. To the
Company's  knowledge,  there  is  only  one  person  known  to the  Company  who
beneficially owns five percent (5%) or more of the Company's  outstanding Common
Stock.  This  information was determined in accordance with Rule 13d-3 under the
Securities  Exchange Act of 1934, as amended,  and is based upon the information
furnished  by the persons  listed  below.  Except as otherwise  indicated,  each
shareholder  listed  possesses sole voting and investment  power with respect to
the shares indicated as being beneficially owned.

                                            NUMBER OF SHARES        PERCENT OF
      NAME AND ADDRESS (1)(2)             BENEFICIALLY HELD (3)    OWNERSHIP (3)
      -----------------------             ---------------------    -------------

      Jong S. Whang                             106,214(4)              4.0%
      Robert T. Hass                              3,500(5)                *
      Donald F. Johnston                          2,625(6)                *
      Alvin Katz                                 83,000(7)              3.2%
      Bruce R. Thaw                              13,000(7)                *
      Directors and Executive
        Officers of the Company
        as a group (5 persons)                  208,339(8)              7.9%
      Robert Sussman                            202,500(9)              7.7%

----------
* Less than 1%.

                                       4
<PAGE>
(1)  The address for directors and  executive  officers  listed in this table is
     c/o Amtech Systems,  Inc., 131 South Clark Drive, Tempe, Arizona 85281. Mr.
     Sussman's address is 520 Madison Avenue, 41st floor, New York, NY 10022

(2)  Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is the
     Vice President-Finance, Chief Financial Officer, Treasurer, Secretary and a
     director. Messrs. Johnston, Katz and Thaw are presently directors.

(3)  The share amounts and percentages  shown include the shares of Common Stock
     actually  owned as of January 21, 2001, and the shares of Common Stock with
     respect to which the person had the right to acquire  beneficial  ownership
     within 60 days of such date pursuant to options or warrants.  All shares of
     Common Stock that the identified  person had the right to acquire within 60
     days of January 21,  2001,  upon the  exercise  of options or warrants  are
     deemed to be  outstanding  when  computing the percentage of the securities
     owned by such person,  but are not deemed to be outstanding  when computing
     the percentage of the securities owned by any other person. The amounts and
     percentages are based upon 2,621,621 shares of Common Stock  outstanding as
     of January 21, 2001.

(4)  Includes (i) 9,488 shares held  jointly  with Mr.  Whang's  spouse and (ii)
     21,759 shares issuable upon the exercise of presently  exercisable options;
     20,759  shares  issuable  at an  exercise  price of $1.126 per  share;  the
     balance of 1,000 shares issuable at an exercise price of $1.50 per share.

(5)  Includes  3,000 shares  issuable  upon  exercise of  presently  exercisable
     options with an exercise price of $1.126 per share.

(6)  Includes  2,000 shares  issuable  upon  exercise of  presently  exercisable
     options;  1,000 shares issuable at an exercise price of $1.50 per share and
     the  balance of 1000 shares  issuable  at an  exercise  price of $6.813 per
     share.

(7)  Includes  13,000 shares  issuable  upon  exercise of presently  exercisable
     options;  10,000 shares  issuable at an exercise price of $1.126 per share;
     2,000  shares  issuable  at an  exercise  price of $1.50  per share and the
     balance of 1,000 shares issuable at an exercise price of $6.813 per share.

(8)  Includes  52,759 shares  issuable  upon  exercise of presently  exercisable
     options;  43,759 shares  issuable at an exercise price of $1.126 per share;
     6,000  shares  issuable  at an  exercise  price of $1.50  per share and the
     balance of 3,000 shares issuable at an exercise price of $6.813 per share.

(9)  Includes 2,500 shares jointly owned with Mr. Sussman's spouse.

ITEM 12. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

     The  Company  did not have any  transactions  during  fiscal  2000 with any
director,  director  nominee,  executive  officer,  security holder known to the
Company to own of record or  beneficially  more than 5% of the Company's  Common
Stock, or any member of the immediate family of any of the foregoing persons, in
which the amount involved exceeded $60,000.

                                       5
<PAGE>
                                   SIGNATURES

     Pursuant  to the  requirements  of  Section  13 or 15(d) of the  Securities
Exchange Act of 1934, the Registrant has duly caused this report to be signed on
its behalf by the undersigned, thereunto duly authorized.

                                        AMTECH SYSTEMS, INC.

January 30, 2001                        By: /s/ Jong S. Whang
                                            -----------------------------
                                            Jong S. Whang, President


     Pursuant to the  requirements of the Securities  Exchange Act of 1934, this
Amendment No. 1 to Form 10-K has been signed below by the  following  persons on
behalf of the registrant and in the capacities and on the dates indicated:

         SIGNATURE                       TITLE                       DATE
         ---------                       -----                       ----

/s/ Jong S. Whang           Chairman of the Board, President    January 30, 2001
------------------------    (Chief Executive Officer)
Jong S. Whang


/s/ Robert T. Hass          Vice President-Finance              January 30, 2001
------------------------    (Chief Financial & Accounting
Robert T. Hass              Officer)


/s/        *                Director                            January 30, 2001
------------------------
Donald F. Johnston


/s/        *                Director                            January 30, 2001
------------------------
Alvin Katz


/s/        *                Director                            January 30, 2001
------------------------
Bruce R. Thaw



* By: /s/ Robert T. Hass
      -------------------------
          Robert T. Hass

                                       6