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UNITED STATES
SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549
   FORM 10-K/A Amendment No. 1
 x
    
    ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934For the fiscal year ended: September 30, 2004ORo
    
    TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934For the transition period from to
 Commission File Number: 0-11412 AMTECH SYSTEMS, INC. 
  Arizona
    
    86-0411215(State or other jurisdiction of
incorporation or organization)
    
    (I.R.S. Employer
Identification No.)131 South Clark Drive, Tempe, Arizona
    
    85281131 South Clark Drive, Tempe, Arizona
    
    (Zip Code)
 Registrants telephone number, including area code: 480-967-5146 Securities registered pursuant to Section 12(b) of the Act: None Securities registered pursuant to Section 12(g) of the Act: Common Stock, $.01 Par Value   Indicate by check mark whether the registrant (1) has filed all reports required to be filed
by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or
for such shorter period that the registrant was required to file such reports), and (2) has been
subject to such filing requirements for the past 90 days. x Yes o No Indicate by check mark if disclosure of delinquent filers pursuant to Item 405 of Regulation S-K is
not contained herein, and will not be contained, to the best of registrants knowledge in
definitive proxy or information statements incorporated by reference in Part III of this Form 10-K
or any amendment to this Form 10-K. x Indicate by check mark whether the registrant is an accelerated filer (as defined in Exchange Act
Rule 12(b)(2). o Yes x No




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EXPLANATORY NOTE This is Amendment No. 1 to the Registrants annual report on Form 10-K for the year ended
September 30, 2004, which was originally filed with the Securities and Exchange Commission on
January 13, 2004. This amendment is being filed to include responses to the items required by Part
III, which originally were expected to be incorporated by reference to the Registrants definitive
Proxy Statement to be delivered to its shareholders in connection with its 2005 Annual Meeting of
Shareholders. This amendment is also being filed to update the exhibit index in Item 15 of Part
IV. INDEX AMTECH SYSTEMS, INC. AMENDMENT NO. 1 TO FORM 10-K
FOR THE FISCAL YEAR ENDED SEPTEMBER 30, 2004 PagePART IIIItem 10
    
    Directors and Executive Officers of the Registrant
    

    2Item 11.
    
    Executive Compensation
    

    4Item 12.
    
    Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters
    

    6Item 13.
    
    Certain Relationships and Related Transactions
    

    8Item 14.
    
    Principal Accountant Fees and Services
    

    8PART IVItem 15.
    
    Exhibits and Financial Statement Schedules
    

    9Signatures
    

    10Exhibit 31.1Exhibit 31.2Exhibit 32.1Exhibit 32.2
  
 PART III 
 ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT (1) The following table sets forth information regarding the officers and directors of the
Company. The subsequent paragraphs contain biographical data for each director. Name
    
    Age
    
    Position with the CompanyJong S. Whang
    
    
    59
    
    
    President, Chief Executive Officer and DirectorRobert T. Hass
    
    
    54
    
    
    Vice President  Finance, Chief Financial Officer,
Treasurer, Secretary and DirectorAlvin L.Katz
    
    
    75
    
    
    DirectorRobert F. King
    
    
    71
    
    
    DirectorBruce R. Thaw
    
    
    52
    
    
    Director
 Jong S. Whanghas been President, Chief Executive Officer and a Director of the Company since
its inception, and was one of its founders. Mr. Whangs responsibilities as President include the
sales effort for the Companys semiconductor equipment business, and the development of new
products and business opportunities in that industry. He has 30 years of experience in the
semiconductor industry, including time spent in both processing and manufacturing of equipment
components and systems. From 1973 until 1979, he was employed by Siltronics, Inc., initially as a
technician working with chemical vapor deposition, and later as manager of the quartz fabrication
plant with responsibility of providing technical marketing support. From 1979 until 1981, he was
employed by U.S. Quartz, Inc. as manufacturing manager. In 1981, he left U.S. Quartz to form the
Company. 2




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Robert T. Hasshas been Vice President  Finance, Chief Financial Officer, Treasurer and
Secretary of the Company since June, 1992, and a Director of the Company since February, 1996.
From 1991 until May, 1992, he operated a financial consulting practice. From 1985 to 1991, Mr.
Hass was Director of Accounting Services and then Controller for Lifeshares Group, Inc., and from
1988 to 1991 was Controller and Chief Accounting Officer of some of Lifeshares subsidiaries. From
1984 to 1985, he was Vice President  Finance and Treasurer of The Victorio Company. From 1977 to
1984, he served in various capacities including Vice President, Chief Financial Officer and
Treasurer of Altamil Corporation, then a public diversified manufacturing company. From 1972 to
1977, he was an auditor with Ernst & Ernst, now known as Ernst & Young. He is a Certified Public
Accountant. Alvin L. Katzhas been a Director of the Company since May, 1995. From 1981 to 1997, he was
an adjunct professor of business management at the Florida Atlantic University in Boca Raton,
Florida. From 1991 until the company was sold in September, 1992, he was Chief Executive Officer
of Odessa Engineering Corp., a pollution monitoring equipment manufacturer. From 1957 to 1976, Mr.
Katz held various managerial positions with United Parcel Service, including District Manager and
Corporate Manager of Operations Planning, Research and Development. From 1994 to 2003, Mr. Katz
was a Director of Nastech Pharmaceutical Company, Inc., a company engaged in the research,
development and marketing of nasally delivered pharmaceuticals. From 1994 to 2002, he was also a
Director of Blimpie International, a fast food franchiser. From 1999 to 2000, he was also
President of BMAC, a biomedical automation company. Robert F. Kinghas been a Director of the Company since May, 2003. Since 1989, Mr. King has
been President of King Associates, which provides consulting services to equipment companies
serving the semiconductor and flat panel display industries. He currently serves on the advisory
board of a privately-held company, which provides equipment to the flat panel display industry.
From 1968 to 1988, Mr. King was employed at Varian Associates, where he served in various marketing
positions, including Vice President of Marketing for the Semiconductor Equipment Division. Mr.
King also served on the Board of Directors of Varians joint venture semiconductor equipment
companies located in Korea and Japan. Bruce R. Thawhas been a Director of the Company since May, 1995. Mr. Thaw is currently the
President and Chief Executive Officer of Bulbtronics, Inc., a national distributor of technical and
specialty light sources and related products. Mr. Thaw is a practicing attorney and was admitted
to the bar of the State of New York in 1978 and the California State Bar in 1983. Mr. Thaw is also
a director of SafeNet, Inc., a publicly traded company that designs, manufactures and markets
computer network security systems and products, and Nastech Pharmaceutical Company, Inc., a
publicly traded company engaged in drug delivery technology. Mr. Thaw does not render legal
services to the Company. Audit Committee and Audit Committee Financial Expert The Company has a separately-designated standing audit committee established in accordance
with section 3(a)(58)(A) of the Securities Exchange Act of 1934, as amended. The Companys Audit
Committee is comprised as follows: Bruce R. Thaw, Alvin L. Katz and Robert F. King. The Board of Directors annually reviews the independence of the Companys Audit Committee
members in view of the NASDs listing standards and the Securities and Exchange Commissions
(SEC) definitions of independence for audit committee members. The Board has determined
that each of the three members of the Audit Committee meets those definitions and standards.
Additionally, each member of the Audit Committee is financially literate, and one of the Audit
Committee members, Alvin L. Katz, has financial management expertise as required by Nasdaqs rules
and meets the SECs definition of an audit committee financial expert. Section 16(a) Beneficial Ownership Reporting Compliance Section 16(a) of the Securities Exchange Act of 1934, as amended, requires the Companys
directors and executive officers, as well as persons beneficially owning more than 10% of our
outstanding Common Stock, to file certain reports of ownership with the SEC within specified time
periods. Such officers, directors and shareholders are also required by SEC rules to furnish the
Company with copies of all Section 16(a) forms they file. 3




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Based solely on our review of such forms received by us during the fiscal year ended September
30, 2004, or written representations from certain reporting persons, we believe that between
October 1, 2003 and September 30, 2004, all Section 16(a) filing requirements applicable to its
officers, directors and 10% shareholders were complied with. Code of Ethics The Board of Directors has adopted a Code of Ethics for all employees of the Company, as
recommended by the Audit Committee. A copy of this Code of Ethics may be viewed on our website
(www.amtechsystems.com), or obtained at no charge by written request to the Companys Corporate
Secretary. 
 ITEM 11. EXECUTIVE COMPENSATION The following table sets forth information regarding annual and long-term compensation for
services rendered to the Company during the fiscal years ended September 30, 2004, 2003 and 2002 by
the Companys Chief Executive Officer and the other most highly compensated executive officer of
the Company who received annual compensation exceeding $100,000 during such periods (collectively,
the Named Executive Officers). SUMMARY COMPENSATION TABLE Long-TermAnnual Compensation (1)
    
    
    CompensationName and
    
    Fiscal
    
    
    
    
    
    
    
    
    
    
    Other Annual
    
    
    Restricted
    
    
    All OtherPrincipal Position
    
    Year
    
    
    Salary (2)
    
    
    Bonus (3)(4)
    
    
    Compensation
    
    
    Stock Awards
    
    
    CompensationJong S. Whang
    
    
    2004
    
    
    $
    150,722
    
    
    $
    
    
    
    
    
    
    
    
    
    
    
    
    President and Chief
    
    
    2003
    
    
    
    150,722
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    Executive Officer
    
    
    2002
    
    
    
    150,722
    
    
    
    3,585
    
    
    
    
    
    
    
    
    
    
    
    Robert T. Hass
    
    
    2004
    
    
    $
    102,000
    
    
    $
    57,461
    
    
    
    
    
    
    
    
    
    
    
    Vice President 
    
    
    2003
    
    
    
    102,000
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    
    Finance
    
    
    2002
    
    
    
    102,000
    
    
    
    18,000
    
    
    
    
    
    
    
    
    
    
    
    
   (1)
    
    Neither Messrs. Whang nor Hass received personal benefit perquisites in excess of the
lesser of $50,000 or 10% of their aggregate salary and bonus.(2)
    
    Effective March 15, 2001, Mr. Whang entered into a five-year employment agreement with the
Company. The agreement specifies an annual base salary of $188,402. Effective April 1, 2001,
Mr. Whang voluntarily reduced his annual salary by 20% to $150,722 and Mr. Hass voluntarily
reduced his annual salary by 15% to $102,000.(3)
    
    See Employment And Change In Control Arrangements for a description of how Mr. Whangs
incentive compensation is determined.(4)
    
    The discretionary cash bonus granted to Mr. Hass in 2004 was in consideration of work
performed in connection with the acquisition of Bruce Technologies, Inc. Option Grants in Last Fiscal Year There were no stock option grants during the 2004 fiscal year to any of the Named Executive
Officers. Aggregated Option Exercises and Fiscal Year-End Option Values The following table sets forth information (on an aggregated basis) concerning exercises of
stock options during the 2004 fiscal year by each of the Named Executive Officers, and the year-end
value of unexercised options. 4




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Number of Securities Underlying}
    
    
    Value of Unexercised
In-The-Shares
    
    
    
    
    
    
    Unexercised Options at
    
    
    Money Options at FiscalAcquired On
    
    
    Value
    
    
    Fiscal Year-End (#)
    
    
    Year-End($) (1)Name
    
    Exercise (#)
    
    
    Realized ($)
    
    
    Exercisable
    
    
    Unexercisable
    
    
    Exercisable
    
    
    UnexercisableJong S. Whang
    
    
    
    
    
    
    
    
    
    
    132,767
    
    
    
    60,000
    
    
    $
    134,462
    
    
    
    Robert T. Hass
    
    
    
    
    
    
    
    
    
    
    23,250
    
    
    
    13,000
    
    
    $
    19,719
    
    
    
    
   (1)
    
    Options are in-the-money at the fiscal year-end if the fair market value (based on the
closing price of the Companys Common Stock on the Nasdaq Stock Market on September 30, 2004
of $4.28 per share, less the exercise price) of the underlying securities exceeds the exercise
or base price of the option on such date. EMPLOYMENT AND CHANGE IN CONTROL ARRANGEMENTS On March 15, 2001, the Company entered into a five-year employment agreement with its
President, Jong S. Whang. Under the terms of the agreement, Mr. Whang is entitled to an annual
base salary of $188,402, and annual base salary increases of at least 5% to be determined by our
Board of Directors. Mr. Whang is also entitled to receive annual incentive cash compensation of up
to the lesser of 50% of his base salary or 10% of the Companys earnings before taxes and
extraordinary items (after deducting the sum of such bonuses), based on the follow criteria: (i) a
bonus equal to 2% of the annual earnings of the Company before taxes and extraordinary items and
(ii) a bonus equal to 2% of the amount by which the revenues of the Company for the applicable
fiscal year exceeds such revenues for the previous fiscal year. In addition, Mr. Whang was granted
an option to purchase 150,000 shares of Common Stock pursuant to the terms of his employment
agreement. These options were granted on March 15, 2001, and vest at the rate of 20% per full year
of service over a five-year period. To the extent not already exercisable, the options become
immediately exercisable upon: (i) the dissolution or liquidation of the Company, or a
reorganization, merger or consolidation in which all, or substantially all, prior shareholders do
not continue to own more than 60% of the then outstanding shares of Common Stock and voting
securities, (ii) the sale of all, or substantially all, of the assets of the Company or (iii) the
occurrence of a change in control of the Company, as discussed in the agreement. The agreement
also contains confidentiality and non-compete provisions with which Mr. Whang must comply. Mr.
Whang is also entitled to participate in any benefit plans generally available to employees of the
Company. Finally, the Company is required to purchase a $250,000 life insurance policy on the life
of Mr. Whang, with his spouse as the beneficiary of such policy. To-date, Mr. Whang has waived the
Companys compliance with the latter requirement. Under the terms of Mr. Whangs employment agreement, if he is terminated other than for
cause, or he terminates his employment for good reason (as such terms are defined in his
employment agreement), he is entitled to receive, as severance pay, salary, incentive compensation
and vacation accrued through the date of termination plus the following: (i) an amount equal to
two years of Mr. Whangs base salary in effect on the termination date; (ii) a pro-rated portion of
the amount of incentive compensation Mr. Whang would earn for the fiscal year in which the
termination occurs if the results of operations of the Company for the period from the beginning of
such fiscal year to the termination date were annualized; (iii) full vesting of all stock options
issued under the employment agreement; and (iv) vesting of a pro-rated portion of the number of
stock options that would have vested for the fiscal year in which the termination occurs. Mr. Whangs employment agreement also provides for benefits should his employment with the
Company be terminated following a change in control. If Mr. Whangs employment with the Company is
terminated within one year following the occurrence of a change of control, either by the Company
for any reason other than for cause, or by Mr. Whang for good reason, the Company would be required
to pay him a lump sum payment equal to three years of his annual base salary in effect on the
termination date and the maximum amount of incentive compensation that he could earn for the fiscal
year in which the termination date occurs. In addition, all unvested stock options held by him
would vest immediately. 5




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The Company has also entered into a severance agreement with Robert T. Hass, its Vice
President  Finance, which provides for severance benefits similar to those described above for Mr.
Whang, with the exception that Mr. Hass is entitled to a lump sum severance payment equal to one
years base salary should his employment be terminated within one year following a change in
control. Directors Compensation Directors who are full-time employees of the Company receive no additional compensation for
serving as directors. Non-Employee Directors receive an annual retainer of $6,000 and fees of $700
per Board meeting attended and $250 per committee meeting attended. In addition, under the
Companys Non-Employee Directors Stock Option Plan, each outside director receives an annual grant
of options to purchase 5,000 shares of Common Stock. The exercise price of the options is set at
the fair market value of Common Stock on the date of grant. Each option has a term of ten years
and is exercisable in three equal installments commencing on the first anniversary of the date of
grant and continuing for the two successive anniversaries thereafter. In the event of disability
(as defined in the plan) or death of an outside director, all options remain exercisable for a
period of twelve months following the date such person ceased to be a director, but only to the
extent such options were exercisable on the date the director ceased to be a director. Compensation Committee Interlocks and Insider Participation The Compensation and Option Committee is presently comprised of Mr. Katz and Mr. Thaw, who are
not, and never have been, officers or employees of the Company. 
 ITEM 12. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT AND RELATED
STOCKHOLDER MATTERS Equity Compensation Plans The following table sets forth certain information, as of September 30, 2004, concerning
outstanding options and rights to purchase Common Stock granted to participants in all of the
Companys equity compensation plans and the number of shares of Common Stock remaining available
for issuance under such equity compensation plans. EQUITY COMPENSATION PLAN INFORMATION Number of securities remainingNumber of securities to be
    
    
    
    
    
    
    available for future issuanceissued upon exercise of
    
    
    Weighted-average exercise
    
    
    under equity compensationoutstanding options,
    
    
    price of outstanding options,
    
    
    plans (excluding securitieswarrants and rights
    
    
    warrants and rights
    
    
    reflected in column (a))Plan Category
    
    (a)
    
    
    (b)
    
    
    (c)Equity compensation plans
approved by security
holders (1)
    
    
    429,017
    
    
    $
    4.51
    
    
    
    187,500Equity compensation plans
not approved by security
holders (2)
    
    
    31,000
    
    
    $
    11.68
    
    
    
    Total
    
    
    460,017
    
    
    
    
    
    
    
    187,500
   (1)
    
    Represents the 1995 and 1998 Employee Stock Option Plans and the Non-employee Director
Stock Option Plan.(2)
    
    Represents (i) 15,000 shares of common stock issuable upon exercise of options granted to
non-employee directors under stock purchase agreements prior to the 1996 establishment of the
Non-employee Director Stock Option Plan, with an exercise price of $4.47 and (ii) 21,000
shares of common stock issuable upon exercise of options granted to advisors in the connection
with private placement in September 2000, having an exercise price of $15.12. The options
under both plans are fully vested. 6




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Security Ownership Of Certain Beneficial Owners The following table sets forth certain information concerning the beneficial ownership of our
Common Stock as of January 28, 2005, by (i) each director and executive officer of the Company,
including the Named Executive Officers, (ii) all executive officers and directors of the Company as
a group, and (iii) each person known by the Company to be the beneficial owner of more than 5% of
our Common Stock. This information was determined in accordance with Rule 13d-3 under the
Securities Exchange Act of 1934, as amended, and is based upon the information furnished by the
persons listed below. Except as otherwise indicated, each shareholder listed possesses sole voting
and investment power with respect to the shares indicated as being beneficially owned. Number of Shares
    
    
    Percent ofName and Address (1) (2)
    
    Beneficially Held (3)
    

    
    Ownership (3)Jong S. Whang
    
    
    247,222(4)
    
    
    
    8.6%Robert T. Hass
    
    
    28,375(5)
    
    
    
    1.0%Alvin L. Katz
    
    
    96,000(6)
    
    
    
    3.5%Robert F. King
    
    
    3,667(7)
    
    
    
    *Bruce R. Thaw
    
    
    32,000(6)
    
    
    
    1.2%Directors and Executive Officers of
the Company as a group (5 persons)
    
    
    345,931(8)
    
    
    
    15.1%5% Shareholders:Robert
Sussman
520 Madison Avenue
41st
Floor
New York, NY 10022
    
    
    202,500(9)
    
    
    
    7.5%
   *
    
    Less than 1%.(1)
    
    Except as otherwise noted, the address for each person listed in this table is c/o Amtech
Systems, Inc., 131 South Clark Drive, Tempe, Arizona 85281.(2)
    
    Mr. Whang is the Companys President, CEO and a director. Mr. Hass is the Vice President 
Finance, Chief Financial Officer, Treasurer, Secretary and a director. Messrs. Katz, King and
Thaw are directors of the Company.(3)
    
    The share amounts and percentages shown include shares of Common Stock actually owned as of
January 28, 2005, and shares of Common Stock with respect to which the person had the right to
acquire beneficial ownership within 60 days of such date pursuant to options or warrants. All
shares of Common Stock that the identified person had the right to acquire within 60 days of
January 28, 2005, upon the exercise of options or warrants, are deemed to be outstanding when
computing the percentage of the securities owned by such person, but are not deemed to be
outstanding when computing the percentage of the securities owned by any other person.(4)
    
    Includes (i) 351 shares held jointly with Mr. Whangs spouse and (ii) 162,767 shares issuable
upon exercise of options exercisable within 60 days of January 28, 2005.(5)
    
    Includes 28,250 shares issuable upon exercise of options exercisable within 60 days of
January 28, 2005.(6)
    
    Includes 32,000 shares issuable upon exercise of options exercisable within 60 days of
January 28, 2005.(7)
    
    Includes 3,667 shares issuable upon exercise of options exercisable within 60 days of January
28, 2005.(8)
    
    Includes 258,684 shares issuable upon exercise of options exercisable within 60 days of
January 28, 2005.(9)
    
    Includes 2,500 shares jointly owned with Mr. Sussmans spouse. 7




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ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS The Company had no transactions during 2004 with any director, director nominee, executive
officer, security holder known to the Company to own of record or beneficially more than 5% of the
Common Stock, or any member of the immediate family of any of the foregoing persons, in which the
amount involved exceeded $50,000. 
 ITEM 14. PRINCIPAL ACCOUNTING FEES AND SERVICES The following table sets forth the fees billed to us by our independent auditors during the
years ended September 30, 2004 and 2003 for: (i) services rendered for the audit of our annual
financial statements and the review of our quarterly financial statements, (ii) services by our
auditor that are reasonably related to the performance of the audit or review of our financial
statements and that are not reported as Audit Fees, (iii) services rendered in connection with tax
compliance, tax advice and tax planning, and (iv) all other fees for services rendered. Year Ended
    
    
    Year EndedSept. 30, 2004
    
    
    Sept. 30, 2003Audit Fees
    
    $
    275,000
    
    
    $
    123,000Audit-Related Fees (1)
    
    
    5,773
    
    
    
    Tax Fees
    
    
    
    
    
    
    All Other Fees
    
    
    
    
    
    
    Total Fees
    
    $
    280,773
    
    
    $
    123,000
   (1)
    Accounting and reporting advisory services related to acquisition activities. PRE-APPROVAL POLICY In May 2003, the Audit Committee adopted a Pre-Approval Policy (the Policy) governing the
approval of all audit and non-audit services performed by the independent auditor in order to
ensure that the performance of such services does not impair the auditors independence. According to the Policy, the Audit Committee will annually review and pre-approve the types of
services, and will set a limit on the fees for such services, that may be provided by the
independent auditor during the following year. The Policy specifically describes the annual audit
services and fees, other services that are audit-related, the preparation of tax returns and tax
related compliance services and all other services that have the general pre-approval of the Audit
Committee. The term of any general pre-approval is twelve (12) months from the date of
pre-approval, unless the Audit Committee specifically provides for a different period. Any service to be provided by the independent auditor that has not received general
pre-approval under the Policy is required to be submitted to the Audit Committee for approval prior
to the commencement of a substantial portion of the engagement. Any proposed service exceeding
pre-approved cost levels is also required to be submitted to the Audit Committee for specific
approval. The Audit Committee will revise the list of general pre-approved services from time to time
based on subsequent determinations. The Audit Committee does not delegate its responsibilities to
pre-approve services performed by the independent auditor to management. All the services provided by the Companys independent auditors during the fiscal year ended
September 30, 2004 were pre-approved by the Audit Committee. 8




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PART IV 
 ITEM 15. EXHIBITS, FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K EXHIBITNO.
    
    DESCRIPTION31.1
    
    Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the
Securities Exchange Act of 1934, as Amended. Filed herewith.31.2
    
    Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the
Securities Exchange Act of 1934, as Amended. Filed herewith.32.1
    
    Certification Pursuant to 18 U.S.C. Section 1350, as Adopted
Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002. Filed
herewith.32.2
    
    Certification Pursuant to 18 U.S.C. Section 1350, as Adopted
Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002. Filed
herewith.
 9




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SIGNATURES Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange Act of 1934,
the registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto
duly authorized. AMTECH SYSTEMS, INC.January 28, 2005
    
    
    
    
    
    By: /s/   Jong S. WhangJong S. Whang, President
and Chief Executive Officer
 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, that each person whose signature appears below constitutes and
appoints JONG S. WHANG and ROBERT T. HASS, and each of them, his true and lawful attorneys-in-fact
and agents, with full power of substitution and resubstitution, for him and in his name, place and
stead, in any and all capacities, to sign any and all amendments to this Annual Report on Form
10-K, and to file the same, with all exhibits thereto, and other documents in connection therewith
with the Securities and Exchange Commission, granting unto said attorneys-in-fact and agents, and
each of them, full power and authority to do and perform each and every act and thing requisite and
necessary to be done in and about the premises, as fully and to all intents and purposes as he
might or could do in person hereby ratifying and confirming all that said attorneys-in-fact and
agents, or his substitute or substitutes, may lawfully do or cause to be done by virtue hereof. Pursuant to the requirements of the Securities Exchange Act of 1934, this report on Form 10-K has
been signed below by the following persons on behalf of the registrant and in the capacities and on

the dates indicated: SIGNATURE
    
    
    
    TITLE
    
    
    
    DATE/s/ Jong S. Whang
    
    
    
    Chairman of the Board,
President and ChiefExecutive OfficerJong S. Whang
    
    
    
    (Principal Executive Officer)
    
    
    
    January 28, 2005/s/ Robert T. Hass
    
    
    
    Vice President  Finance,
Chief Financial Officer and
Director(Principal Financial & Accounting Officer)Robert T. Hass
    
    
    
    
    
    
    
    January 28, 2005*Director
    
    
    
    January 28, 2005Alvin L. Katz*Director
    
    
    
    January 28, 2005Robert F. King*Director
    
    
    
    January 28, 2005Bruce R. Thaw
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    By Robert T. Hass, attorney-in-fact 10