|            |
|------------|
|            |  |  |
| (Mark One) |   |   |
| [X]        |   | ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 |
|       |   | For the fiscal year ended: September 30, 2014 |
|       |   | OR |
| [  ]       |   | TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 |
|       |   | For the transition period from ________________ to ________________ |

|                                                        |
|--------------------------------------------------------|
|                                                        |
| AMTECH SYSTEMS, INC.                                   |
| (Exact name of registrant as specified in its charter) |

|                                                               |
|---------------------------------------------------------------|
|                                                               |  |
| Arizona                                                       | 86-0411215 |
| (State or other jurisdiction ofincorporation or organization) | (I.R.S. EmployerIdentification No.) |
|                                                          |
| 131 South Clark Drive, Tempe, Arizona                         | 85281 |
| (Address of principal executive offices)                      | (Zip Code) |

|                                                             |
|-------------------------------------------------------------|
|                                                             |  |
| Registrant’s telephone number, including area code:   | 480-967-5146 |
|                                                        |   |
| Securities registered pursuant to Section 12(b) of the Act: |
| None                                                        |
|                                                        |
| Securities registered pursuant to Section 12(g) of the Act: |
| Title of Each Class                                         | Name of Each Exchange on Which Registered |
| Common Stock, $0.01 Par Value                               | The NASDAQ Stock Market LLC |

----

----

|                                                                                                         |
|---------------------------------------------------------------------------------------------------------|
|                                                                                                         |  |
| PART III                                                                                                | Page |
| ITEM 10. Directors, executive officers and governance                                                   | 4 |
| ITEM 11. Executive compensation                                                                         | 6 |
| ITEM 12. Security ownership of certain beneficial owners and management and related stockholder matters | 21 |
| ITEM 13. Certain relationships and related transactions, and director independence                      | 23 |
| ITEM 14. Principal accounting fees and services                                                         | 23 |
|                                                                                                    |   |
| PART IV                                                                                                 |   |
| ITEM 15. Exhibits and financial statement schedules                                                     | 24 |
| Signatures                                                                                              | 25 |
| Exhibit Index                                                                                           | 25 |

----

|                      |
|----------------------|
|                      |  |  |
| Name                 | Age | Position with the Company |
| Jong S. Whang        | 69 | Executive Chairman and Director |
| Fokko Pentinga       | 59 | President, Chief Executive Officer and Director |
| Bradley C. Anderson  | 53 | Executive Vice President – Finance, Chief Financial Officer, Treasurer and Secretary |
| Michael Garnreiter   | 62 | Director |
| Alfred W. Giese      | 76 | Director |
| Egbert J. G. Goudena | 64 | Director |
| Robert F. King       | 81 | Director |

----

----

|         |                                                                                 |
|---------|---------------------------------------------------------------------------------|
| • | Jong S. Whang        Executive Chairman |

|         |                                                                                                     |
|---------|-----------------------------------------------------------------------------------------------------|
| • | Fokko Pentinga        President and Chief Executive Officer |

|         |                                                                                                                         |
|---------|-------------------------------------------------------------------------------------------------------------------------|
| • | Bradley C. Anderson        Executive Vice President and Chief Financial Officer |

----

|         |                                                                                                                      |
|---------|----------------------------------------------------------------------------------------------------------------------|
| • | align the interests of our executives and shareholders by rewarding executives when shareholder value increases; and |

|         |                                                                                                                                                                            |
|---------|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | motivate our executives to manage our business to meet our short-term and long-term corporate goals and business objectives, and reward them for meeting these objectives. |

----

|         |                                                                                                                                                             |
|---------|-------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | our understanding of the amount of compensation generally paid by similarly situated companies to their executives with similar roles and responsibilities. |

----

----

|        |
|--------|
|        |  |
|   | RESPECTFULLY SUBMITTED, Robert F. King, ChairmanMichael GarnreiterAlfred W. GieseEgbert J.G. Goudena |

----

|                             |
|-----------------------------|
|                             |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
| Name and Principal Position | Year |   | Salary ($) |   | Bonus ($) |   | Stock Awards ($) (1) |   | Option Awards ($) (1) (7) |   | Non-Equity Incentive Plan Compensation ($) |   | All Other Compensation ($) | Total ($) |
| Jong S. Whang               | 2014 |   | 224,000 |  |   | — |  |   | — |  |   | 219,000 |  |   | — |  |   | 14,633 |  | (2 | ) | 457,633 |  |
| Executive Chairman          | 2013 |   | 299,692 |  |   | — |  |   | — |  |   | 91,200 |  |   | — |  |   | 28,751 |  | (3 | ) | 419,643 |  |
| and Director                | 2012 |   | 383,077 |  |   | — |  |   | 146,297 |  |   | 181,480 |  |   | — |  |   | 36,159 |  | (4 | ) | 747,013 |  |
| Fokko Pentinga              | 2014 |   | 258,137 |  |   | — |  |   | — |  |   | 219,000 |  |   | — |  |   | 72,456 |  | (6 | ) | 549,593 |  |
| Chief Executive             | 2013 |   | 300,692 |  |   | — |  |   | — |  |   | 91,200 |  |   | — |  |   | 61,301 |  | (6 | ) | 453,193 |  |
| Officer and Director        | 2012 |   | 340,613 |  |   | — |  |   | 119,700 |  |   | 420,699 |  |   | — |  |   | 80,240 |  | (6 | ) | 961,252 |  |
| Bradley C. Anderson         | 2014 |   | 180,194 |  |   | — |  |   | — |  |   | 155,078 |  |   | — |  |   | 6,618 |  | (5 | ) | 341,890 |  |
| Chief Financial             | 2013 |   | 215,719 |  |   | — |  |   | — |  |   | 72,960 |  |   | — |  |   | 14,435 |  | (5 | ) | 303,114 |  |
| Officer                     | 2012 |   | 257,291 |  |   | — |  |   | 66,497 |  |   | 82,492 |  |   | — |  |   | 18,050 |  | (5 | ) | 424,330 |  |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        |
|-----|------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Amounts represent the aggregate grant date fair value calculated in accordance with FASB ASC Topic 718. For a description of the assumptions made by the Company when calculating such grant date fair value, refer to Note 1 to the Company’s consolidated financial statements as set forth in the Company’s Form 10-K filed November 20, 2014. The number of stock awards and option awards is based upon performance in the prior fiscal year. The 2012 option awards for Mr. Pentinga include a grant of 55,000 options in recognition of his appointment to the position of Chief Executive Officer. |

|     |                                                                                                                                                                                        |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (2) | Amount represents $10,808 of life insurance premiums paid by the Company for which Mr. Whang’s spouse is the beneficiary and Company match under the 401(k) plan of $3,825. |

|     |                                                                                                                                                                                                                  |
|-----|------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (3) | Amount represents car allowance of $14,192, $10,809 of life insurance premiums paid by the Company for which Mr. Whang’s spouse is the beneficiary and Company match under the 401(k) plan of $3,750. |

|     |                                                                                                                                                                                                                  |
|-----|------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (4) | Amount represents car allowance of $18,000, $10,809 of life insurance premiums paid by the Company for which Mr. Whang’s spouse is the beneficiary and Company match under the 401(k) plan of $7,350. |

|     |                                                                                                                                                                                                                                                                                                                          |
|-----|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (5) | Represents Company match under the 2012, 2013 and 2014 401(k) plan of $7,350, $3,750, and $3,818 respectively, and car allowance for 2012, 2013 and 2014 of $10,000, $7,885, and $0, respectively.  Fiscal 2012, 2013 and 2014 amounts also include $700, $2,800, and $2,800 of travel incentive payments, respectively. |

|     |                                                                                                                                                                                                                                                              |
|-----|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (6) | Represents Company contribution under the 2012, 2013 and 2014 Netherlands pension plan of $39,679, $27,824, and $29,865, respectively, and other (primarily car allowance) of $40,561, $33,477 and $42,591 in fiscal year 2012, 2013 and 2014, respectively. |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                            |
|-----|------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (7) | In June 2013, the executive officers voluntarily cancelled certain outstanding stock options. Mr Whang voluntarily cancelled 30,000 options with an exercise price of $14.79 and 26,667 options with an exercise price of $17.12.  Mr. Pentinga voluntarily cancelled 3,125 options with an exercise price of $14.79 and 23,333 options with an exercise price of $17.12.  Mr. Anderson voluntarily cancelled 15,000 options with an exercise price of $14.79 and 11,667 options with an exercise price of $17.12. Also in June 2013, the Board of Directors, based upon the recommendation of the Compensation and Stock Option Committee, accelerated the vesting of  certain outstanding option awards. |

----

|         |                                                                                                                                                                                                                                         |
|---------|-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | 50% of options with an exercise price of $2.95 vested effective June 30, 2013, and the remainder of such options will continue to vest according to the original vesting schedule (25% on each anniversary date of the original grant). |

|         |                                                                                               |
|---------|-----------------------------------------------------------------------------------------------|
| • | All options with exercise prices of $6.15 and $7.98 per share vested effective June 30, 2013. |

|         |                                                                                                                                                    |
|---------|----------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Mr. Whang received accelerated vesting of 25,000, 5,000 and 27,500 options with exercise prices of $2.95, $6.15 and $7.98 per share, respectively. |

|         |                                                                                                                                                       |
|---------|-------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Mr. Pentinga received accelerated vesting of 25,000, 2,500 and 63,750 options with exercise prices of $2.95, $6.15 and $7.98 per share, respectively. |

|         |                                                                                                                                                       |
|---------|-------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Mr. Anderson received accelerated vesting of 20,000, 2,500 and 12,500 options with exercise prices of $2.95, $6.15 and $7.98 per share, respectively. |

|                     |
|---------------------|
|                     |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
|                |   |   |   |   | Estimated Future Payouts Under Non-Equity Incentive Plan Awards (4) |   |   |   |   |   |   |   |   |
| Name                | Grant Date (1) |   | Date Grant Approved by Board (1) |   | Threshold ($) |   | Target($) |   | Maximum ($) |   | All Other Stock Awards: Number of Shares of Stock or Units (#) (1) |   | All Other Option Awards: Number of Securities Underlying Options (#) (1) |   | Exercise or Base Price of Options Awards ($/Sh) (2) |   | Grant Date Fair Value of Stock and Option Awards ($) (3) |
| Jong S. Whang       | 12/11/2013 |   | 12/11/2013 |   | $64,000 |   | $320,000 |   | $480,000 |   | — |  |   | 50,000 |  |   | $7.01 |   | $219,000 |
| Fokko Pentinga      | 12/11/2013 |   | 12/11/2013 |   | $55,500 |   | $277,500 |   | $416,250 |   | — |  |   | 50,000 |  |   | $7.01 |   | $219,000 |
| Bradley C. Anderson | 12/11/2013 |   | 12/11/2013 |   | $29,150 |   | $145,750 |   | $218,625 |   | — |  |   | 35,406 |  |   | $7.01 |   | $155,078 |

|     |                                                                                                                                                       |
|-----|-------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | The stock and option awards listed above vest in four (4) installments in equal amounts on each of the first four anniversaries of the date of grant. |

|     |                                                                                                                              |
|-----|------------------------------------------------------------------------------------------------------------------------------|
| (2) | The exercise price is equal to the closing price of the Company's Common Stock on the previous trading day before the grant. |

|     |                                                                                                                                                                                                                                                          |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (3) | See Stock-Based Compensation under Note 1 to the consolidated financial statements included in our Annual Report on Form 10-K for the year ended September 30, 2014 filed November 20, 2014 for the assumptions used to value equity based compensation. |

|     |                                                                                                                                                                                                                                |
|-----|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (4) | Estimated amounts are based on the annual base salaries of $400,000, $370,000 and $265,000 for Messrs. Whang, Pentinga and Anderson, respectively.  These base salaries reflect salary restoration effective December 1, 2014. |

----

|                     |
|---------------------|
|                     |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
|                | Option Awards |   | Stock Awards |
| Name                | Number of Securities Underlying Unexercised Options (#) Exercisable |   | Number of Securities Underlying Unexercised Options (#) Unexercisable |   | Options Exercise Price ($) |   | Option Expiration Date |   | Number of Shares or Units of Stock that have Not Vested (#) |   | Market Value of Shares or Units of Stock that have Not Vested ($) |
| Jong S. Whang       | 30,000 |  |   | — |  |   | $6.90 |   | 12/8/2016 |   |   |   |   |
|                | 20,000 |  |   | — |  |   | $6.15 |   | 11/20/2019 |   |   |   |   |
|                | 10,000 |  |   | — |  |   | $10.64 |   | 8/6/2020 |   |   |   |   |
|                | 36,667 |  |   | — |  |   | $7.98 |   | 12/15/2021 |   |   |   |   |
|                | — |  |   | 18,750 |  | (1) | $2.95 |   | 12/11/2022 |   |   |   |   |
|                | — |  |   | 50,000 |  | (2) | $7.01 |   | 12/12/2023 |   |   |   |   |
|                |   |   |   |   |   |   |   |   | 12,499 |  | (3) | $133,739 |
| Fokko Pentinga      | 18,750 |  |   | — |  |   | $3.80 |   | 12/9/2018 |   |   |   |   |
|                | 10,000 |  |   | — |  |   | $6.15 |   | 11/20/2019 |   |   |   |   |
|                | 6,667 |  |   | — |  |   | $10.64 |   | 8/6/2020 |   |   |   |   |
|                | 85,000 |  |   | — |  |   | $7.98 |   | 12/15/2021 |   |   |   |   |
|                | 10,000 |  |   | 18,750 |  | (1) | $2.95 |   | 12/11/2022 |   |   |   |   |
|                | — |  |   | 50,000 |  | (2) | $7.01 |   | 12/12/2023 |   |   |   |   |
|                |   |   |   |   |   |   |   |   | 10,416 |  | (4) | $111,451 |
| Bradley C. Anderson | 10,000 |  |   | — |  |   | $8.51 |   | 4/24/2016 |   |   |   |   |
|                | 5,000 |  |   | — |  |   | $6.90 |   | 12/8/2016 |   |   |   |   |
|                | 7,500 |  |   | — |  |   | $6.15 |   | 11/20/2019 |   |   |   |   |
|                | 5,000 |  |   | — |  |   | $10.64 |   | 8/6/2020 |   |   |   |   |
|                | 16,667 |  |   | — |  |   | $7.98 |   | 12/15/2021 |   |   |   |   |
|                | 2 |  |   | 15,000 |  | (1) | $2.95 |   | 12/11/2022 |   |   |   |   |
|                | — |  |   | 35,406 |  | (2) | $7.01 |   | 12/12/2023 |   |   |   |   |
|                |   |   |   |   |   |   |   |   | 5,624 |  | (5) | $60,177 |

|     |                                                                                                                                       |
|-----|---------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Unvested option awards will vest in equal installments on the first through fourth anniversaries of the December 11, 2012 grant date. |

|     |                                                                                                                                       |
|-----|---------------------------------------------------------------------------------------------------------------------------------------|
| (2) | Unvested option awards will vest in equal installments on the first through fourth anniversaries of the December 12, 2013 grant date. |

|     |                                                                                                                                                                |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (3) | Mr. Whang's restricted stock awards are subject to the following vesting schedule - 3,333 in November 2014; 4,583 in December 2014 and 4,583 in December 2015. |

|     |                                                                                                                                                                   |
|-----|-------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (4) | Mr. Pentinga's restricted stock awards are subject to the following vesting schedule - 2,916 in November 2014; 3,750 in December 2014 and 3,750 in December 2015. |

|     |                                                                                                                                                                   |
|-----|-------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (5) | Mr. Anderson's restricted stock awards are subject to the following vesting schedule - 1,458 in November 2014; 2,083 in December 2014 and 2,083 in December 2015. |

----

|                     |
|---------------------|
|                     |  |  |  |  |  |  |  |  |  |  |  |  |
|                |   | Option Awards |   | Stock Awards |
| Name                |   | Number of Shares Acquired on Exercise (#) |   | Value Realized on Exercise ($)(1) |   | Number of Shares Acquired on Vesting (#) |   | Value Realized on Vesting ($)(2) |
| Jong S. Whang       |   | 91,250 |  |   | 667,566 |  |   | 11,666 |  |   | 93,778 |  |
| Fokko Pentinga      |   | 21,250 |  |   | 192,313 |  |   | 8,750 |  |   | 70,392 |  |
| Bradley C. Anderson |   | 54,998 |  |   | 316,795 |  |   | 5,416 |  |   | 43,534 |  |

|     |                                                                                                                                                                                                                                  |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) |  The value realized equals the difference between the option exercise price and the fair market value of Amtech common stock on the date of exercise, multiplied by the number of shares for which the option was exercised. |

|     |                                                                                                                                             |
|-----|---------------------------------------------------------------------------------------------------------------------------------------------|
| (2) | The value realized equals the fair market value of Amtech common stock on the vesting date, multiplied by the number of shares that vested. |

----

----

----

----

|         |                                                                                                                            |
|---------|----------------------------------------------------------------------------------------------------------------------------|
| • | As discussed elsewhere in this Form 10-K/A, our executive officer compensation includes a balanced mix of cash and equity. |

|         |                                                                         |
|---------|-------------------------------------------------------------------------|
| • | Base salaries do not encourage risk taking as they are fixed in amount. |

|         |                                                                                                                                                                                                                                     |
|---------|-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Performance-based cash bonus awards under the non-equity incentive plan focus on achievement of short-term or annual goals. Although this may seem to encourage the taking of short-term risks at the expense of long-term results, |

----

|         |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                    |
|---------|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Discretionary cash bonuses are awarded at the discretion of the Compensation and Stock Option Committee, which allows the Compensation and Stock Option Committee to evaluate whether the executives are engaging in activities that create risks prior to awarding any such cash bonuses. This discretion mitigates the likelihood that executives will engage in activities that create risk, and allows the Compensation and Stock Option Committee the ability to refrain from rewarding any such risk-taking. |

|         |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                |
|---------|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| • | Compensation provided to the executive officers in the form of long-term equity awards is important to help further align executives’ interests with those of the Company’s shareholders. The Compensation and Stock Option Committee believes that these awards do not encourage unnecessary or excessive risk taking because the ultimate value of the awards is tied to the Company’s stock price over the long-term. In addition, the awards are subject to long-term vesting schedules to help ensure that executives have significant value tied to long-term stock price performance. |

----

|                     |
|---------------------|
|                     |  |  |  |  |  |  |  |  |  |  |  |
| Name                | Fees Earned or Paid in Cash ($) |   | Option Awards ($) (1) |   | All other Comp. ($) |   | Total ($) |
|                |   |   |   |   |   |   |   |
| Jong S. Whang (2)   | — |  |   | — |  |   | — |  |   | — |  |
| Fokko Pentinga (2)  | — |  |   | — |  |   | — |  |   | — |  |
| Michael Garnreiter  | 39,300 |  |   | 26,280 |  |   | — |  |   | 65,580 |  |
| Alfred W. Giese     | 32,400 |  |   | 26,280 |  |   | — |  |   | 58,680 |  |
| Egbert J.G. Goudena | 17,400 |  |   | 26,280 |  |   | — |  |   | 43,680 |  |
| Robert F. King      | 34,200 |  |   | 26,280 |  |   | — |  |   | 60,480 |  |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                           |
|-----|---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Amounts represent the aggregate grant date fair value computed in accordance with FASB ASC Topic 718. For a description of the assumptions made by the Company when calculating such grant date fair value, refer to Note 1 to the Company’s consolidated financial statements as set forth in the Company’s Annual Report on Form 10-K for the fiscal year ended September 30, 2014 filed November 20, 2014. |

|     |                                                                                                                   |
|-----|-------------------------------------------------------------------------------------------------------------------|
| (2) | Directors who are full-time employees of our Company receive no additional compensation for serving as directors. |

----

|                                                          |
|----------------------------------------------------------|
|                                                          |  |  |  |  |  |  |  |  |  |
|                                                     | Number of securities to beissued upon exercise ofoutstanding options,warrants and rights(a) |   | Weighted-averageexercise price ofoutstanding options,warrants and rights (b) |   | Number of securitiesremaining available forfuture issuance underequity compensation plans(excluding securitiesreflected in column (a))(c) |
| Plan Category                                            |   |  |   |   |  |   |   |  |
| Equity compensationplans approved bysecurity holders (1) | 1,063,324 |  |   | $ | 7.37 |  |   | 1,042,492 |  |
| Equity compensationplans not approved bysecurity holders | — |  |   |   |  |   | — |  |
| Total                                                    | 1,063,324 |  |   |   |  |   | 1,042,492 |  |

|     |                                                                                                                                                                                       |
|-----|---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Represents the 1998 Employee Stock Option Plan, the 2007 Employee Stock Incentive Plan and the Non-Employee Director Stock Option Plan and any respective amendments to each thereto. |

|                                       |
|---------------------------------------|
|                                       |  |  |  |  |  |  |  |
| Name and Address (1) (2)              |   | No. of Shares of Common Stock Beneficially Held (3) |   | Percent of Common Stock Ownership (3) |
| Officers and Directors:               |   |   |   |   |
| Jong S. Whang                         |   | 218,113 |  | (4 | ) | 2.2 | % |
| Fokko Pentinga                        |   | 172,114 |  | (5 | ) | 1.7 | % |
| Bradley C. Anderson                   |   | 95,994 |  | (6 | ) | 1.0 | % |
| Michael Garnreiter                    |   | 34,000 |  | (7 | ) | * |  |
| Alfred W. Giese                       |   | 17,970 |  | (8 | ) | * |  |
| Egbert J. G. Goudena                  |   | 31,000 |  | (9 | ) | * |  |
| Robert F. King                        |   | 41,000 |  | (10 | ) | * |  |
| Director and Officer Total (7 people) |   | 610,191 |  | (11 | ) | 6.2 | % |

----

|     |                                                                                                                            |
|-----|----------------------------------------------------------------------------------------------------------------------------|
| (1) | The address for each person listed in this table is c/o Amtech Systems, Inc., 131 South Clark Drive, Tempe, Arizona 85281. |

|     |                                                                                                                                                                                                                                                                                                          |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (2) | Mr. Whang is our Executive Chairman and Chairman of the Board of Directors. Mr. Pentinga is our President and CEO and is a director. Mr. Anderson is our Executive Vice President-Chief Financial Officer, Treasurer and Secretary. Messrs. Garnreiter, Giese, Goudena and King are directors of Amtech. |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                    |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (3) | Based on 9,856,375 shares of common stock outstanding as of December 1, 2014. The share amounts and percentages shown include shares of common stock actually owned as of December 1, 2014, and shares of common stock with respect to which the person had the right to acquire beneficial ownership within 60 days of such date pursuant to options or warrants. All shares of common stock that the identified person had the right to acquire within 60 days of December 1, 2014, upon the exercise of options or warrants, are deemed to be outstanding when computing the percentage of the securities owned by such person, but are not deemed to be outstanding when computing the percentage of the securities owned by any other person. |

|     |                                                                                                           |
|-----|-----------------------------------------------------------------------------------------------------------|
| (4) | Includes 115,417 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|     |                                                                                                           |
|-----|-----------------------------------------------------------------------------------------------------------|
| (5) | Includes 149,167 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|     |                                                                                                          |
|-----|----------------------------------------------------------------------------------------------------------|
| (6) | Includes 58,021 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|     |                                                                                                          |
|-----|----------------------------------------------------------------------------------------------------------|
| (7) | Includes 34,000 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|     |                                                                                                          |
|-----|----------------------------------------------------------------------------------------------------------|
| (8) | Includes 16,450 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|     |                                                                                                         |
|-----|---------------------------------------------------------------------------------------------------------|
| (9) | Includes 24,000 shares issuable upon exercise of options exercisable within 60 days of December 1 2014. |

|      |                                                                                                          |
|------|----------------------------------------------------------------------------------------------------------|
| (10) | Includes 33,000 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|      |                                                                                                           |
|------|-----------------------------------------------------------------------------------------------------------|
| (11) | Includes 430,055 shares issuable upon exercise of options exercisable within 60 days of December 1, 2014. |

|                                                                     |
|---------------------------------------------------------------------|
|                                                                     |  |  |  |  |  |  |
| Name and Address                                                    |   | No. of Shares of Common Stock Beneficially Held (1) |   | Percent of Common Stock Ownership (1) |
| 5% Shareholders                                                     |   |   |   |   |
| Leslie J. Schreyer, as Trustee FBO the issue of Jonathan D. Sackler |   | 891,750 |  | (2) | 9.0 | % |
| Royce & Associates LLC                                          |   | 886,913 |  | (3) | 9.0 | % |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                    |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Based on 9,856,375 shares of common stock outstanding as of December 1, 2014. The share amounts and percentages shown include shares of common stock actually owned as of December 1, 2014, and shares of common stock with respect to which the person had the right to acquire beneficial ownership within 60 days of such date pursuant to options or warrants. All shares of common stock that the identified person had the right to acquire within 60 days of December 1, 2014, upon the exercise of options or warrants, are deemed to be outstanding when computing the percentage of the securities owned by such person, but are not deemed to be outstanding when computing the percentage of the securities owned by any other person. |

|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       |
|-----|-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (2) | Information based on a Form 4 filed with the SEC on December 1, 2014 and on Schedule 13G/A filed with the SEC on January 3, 2014.  Leslie J. Schreyer is Trustee under a Trust Agreement dated December 23, 1989 FBO the issue of Jonathan D. Sackler. Represents shares held in the Trust, for which Leslie J. Schreyer serves as sole Trustee and has sole voting power and sole dispositive power over such shares. Leslie J. Schreyer has no pecuniary interest in the shares held by the Trust.  The address for Leslie J. Schreyer is c/o Chadboume & Park LLP 1301 Avenue of Americas, New York, NY 10019. |

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|     |                                                                                                                                                                                                                                                                |
|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (3) | Information based on Schedule 13F-HR filed with the SEC on November 12, 2014.  Royce & Associates has sole voting power and sole dispositive power over such shares.  The address for Royce & Associates, LLC is 745 Fifth Avenue, New York, NY 10151. |

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|                                          |
|------------------------------------------|
|                                          |  |  |  |  |  |  |  |
|                                     | Year Ended |   | Year Ended |
|                                     | Sept. 30, 2014 |   | Sept. 30, 2013 |
| Audit Fees (1)                           | $ | 311,000 |  |   | $ | 239,840 |  |
| Audit-Related Fees                       | — |  |   | — |  |
| Tax Fees                                 | — |  |   | — |  |
| All Other Fees                           | — |  |   | — |  |
|      Total Fees | $ | 311,000 |  |   | $ | 239,840 |  |

|     |                                                                                                                                                                                                                                                                                                  |
|-----|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
| (1) | Annual audit and  review of financial statements included in the Company’s reports on Forms 10-Q and Form 10-K, including an audit of the Company’s internal control over financial reporting, and services normally provided by the auditors in connection with regulatory filings. |

|            |
|------------|
|            |  |
| EXHIBITNO. | DESCRIPTION |
| 31.3       | Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended. Filed herewith. |
| 31.4       | Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended. Filed herewith. |

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|                                                                                                                                                                                |
|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|
|                                                                                                                                                                                |  |  |  |  |
| SIGNATURE                                                                                                                                                                      |   | TITLE |   | DATE |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Executive Chairman and |   | December 9, 2014 |
| Jong S. Whang                                                                                                                                                                  |   | Chairman of the Board |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Chief Executive Officer |   | December 9, 2014 |
| Fokko Pentinga                                                                                                                                                                 |   | and President |   |   |
|                                                                                                                                                                           |   | (Principal Executive Officer) |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *By: /s/ Bradley C. Anderson                                                                                                                                                   |   | Executive Vice President – Finance and Chief Financial Officer |   | December 9, 2014 |
| Bradley C. Anderson, Attorney-In-Fact**                                                                                                                                        |   | (Principal Financial and Accounting Officer) |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Director |   | December 9, 2014 |
| Michael Garnreiter                                                                                                                                                             |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Director |   | December 9, 2014 |
| Alfred W. Giese                                                                                                                                                                |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Director |   | December 9, 2014 |
| Egbert J.G. Goudena                                                                                                                                                            |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
| *                                                                                                                                                                              |   | Director |   | December 9, 2014 |
| Robert F. King                                                                                                                                                                 |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
|                                                                                                                                                                           |
|                                                                                                                                                                           |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
| **By authority of the power of attorney filed as Exhibit 24.1 to our Annual Report on Form 10-K for the year ended September 30, 2014 filed with the SEC on November 20, 2014. |
|                                                                                                                                                                           |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |
|                                                                                                                                                                           |   |   |   |   |

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|            |
|------------|
|            |  |
| EXHIBITNO. | DESCRIPTION |
| 31.3       | Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended. Filed herewith. |
| 31.4       | Certification Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended. Filed herewith. |