Exhibit 24.1

POWER OF ATTORNEY

KNOW ALL MEN BY THESE PRESENTS, THAT
EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS JONG S. WHANG
AND BRADLEY C. ANDERSON, AND EACH OF THEM, HIS TRUE AND LAWFUL ATTORNEYS-IN-FACT
AND AGENTS, WITH FULL POWER OF SUBSTITUTION AND RESUBSTITUTION, FOR HIM AND IN
HIS NAME, PLACE AND STEAD, IN ANY AND ALL CAPACITIES, TO SIGN AMTECH SYSTEMS,
INC.S ANNUAL REPORT ON FORM 10-K FOR THE FISCAL YEAR ENDED SEPTEMBER 30, 2009,
AND ANY AND ALL AMENDMENTS TO SUCH ANNUAL REPORT ON FORM 10-K, AND TO FILE THE
SAME, WITH ALL EXHIBITS THERETO, AND OTHER DOCUMENTS IN CONNECTION THEREWITH
WITH THE SECURITIES AND EXCHANGE COMMISSION, GRANTING UNTO SAID
ATTORNEYS-IN-FACT AND AGENTS, AND EACH OF THEM, FULL POWER AND AUTHORITY TO DO
AND PERFORM EACH AND EVERY ACT AND THING REQUISITE AND NECESSARY TO BE DONE IN
AND ABOUT THE PREMISES, AS FULLY AND TO ALL INTENTS AND PURPOSES AS HE MIGHT OR
COULD DO IN PERSON HEREBY RATIFYING AND CONFIRMING ALL THAT SAID
ATTORNEYS-IN-FACT AND AGENTS, OR HIS SUBSTITUTE OR SUBSTITUTES, MAY LAWFULLY DO
OR CAUSE TO BE DONE BY VIRTUE HEREOF.

|SIGNATURE               |  | TITLE                                    |  | DATE             
|----------------------- |  | ---------------------------------------- |  | -----------------
|                        |  |                                          |  |                  
|/s/ Jong S. Whang       |  | Chairman of the Board,
      President   |  | November 20, 2009
|Jong S. Whang           |  | and Chief Executive
      Officer        |  |                  
|                        |  | (Principal Executive
      Officer)      |  |                  
|                        |  |                                          |  |                  
|/s/ Bradley C. Anderson |  | Vice President  Finance
      and Chief |  | November 20, 2009
|Bradley C. Anderson     |  | Financial
Officer                        |  |                  
|                        |  | (Principal Financial
      Officer)      |  |                  
|                        |  |                                          |  |                  
|/s/ Robert T. Hass      |  | Chief Accounting
      Officer           |  | November 20, 2009
|Robert T. Hass          |  | (Principal Accounting
      Officer)     |  |                  
|                        |  |                                          |  |                  
|/s/ Michael Garnreiter  |  | Director                                 |  | November 20, 2009
|Michael Garnreiter      |  |                                          |  |                  
|                        |  |                                          |  |                  
|                       
|/s/ Robert F. King      |  | Director                                 |  | November 20, 2009
|Robert F. King          |  |                                          |  |                  
|                        |  |                                          |  |                  
|                       
|/s/ Brian L. Hoekstra   |  | Director                                 |  | November 20, 2009
|Brian L. Hoekstra       |  |                                          |  |                  
|                        |  |                                          |  |                  
|                       
|/s/ Alfred W. Giese     |  | Director                                 |  | November 20, 2009
|Alfred W. Giese         |  |                                          |  |                  
|                        |  |                                          |  |                  
|                       
|/s/ Dr. Jeong Mo Hwang  |  | Director                                 |  | November 20, 2009
|Dr. Jeong Mo Hwang      |  |                                          |  |                  

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