# Patent

## Title
Semiconductor device and method for manufacturing the semiconductor device

## Abstract

An object is to suppress deterioration of element characteristics even when an oxide semiconductor is formed after a gate insulating layer, a source electrode layer, and a drain electrode layer are formed. A gate electrode layer is formed over a substrate. A gate insulating layer is formed over the gate electrode layer. A source electrode layer and a drain electrode layer are formed over the gate insulating layer. Surface treatment is performed on surfaces of the gate insulating layer, the source electrode layer, and the drain electrode layer which are formed over the substrate. After the surface treatment is performed, an oxide semiconductor layer is formed over the gate insulating layer, the source electrode layer, and the drain electrode layer.

## Background
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor device using an oxide semiconductor and a method for manufacturing the semiconductor device.
2. Description of the Related Art
In recent years, a technique in which a thin film transistor (also referred to as a TFT) is formed using an oxide semiconductor and is applied to an electronic device and the like has attracted attention. For example, a technique in which a switching element and the like of an image display device are formed using zinc oxide, an In—Ga—Zn—O-based oxide semiconductor, or the like as an oxide semiconductor layer is disclosed in Reference 1 and Reference 2.
In addition, as a structure of a transistor using an oxide semiconductor layer, various structures are proposed. For example, a bottom-gate bottom-contact structure, in which an oxide semiconductor layer is formed over a source electrode layer and a drain electrode layer which are provided over a gate insulating layer, is disclosed in Reference 2 and Reference 3.
REFERENCES


    Reference 1: Japanese Published Patent Application No. 2007-123861
    Reference 2: Japanese Published Patent Application No. 2007-96055
    Reference 3: Japanese Published Patent Application No. 2007-305658


In the case where a source electrode layer and a drain electrode layer are formed over a gate insulating layer and then an oxide semiconductor layer is formed over the gate insulating layer, the source electrode layer, and the drain electrode layer, the oxide semiconductor layer is formed after the source electrode layer and the drain electrode layer are formed. In this case, before the oxide semiconductor layer is formed, element characteristics might deteriorate due to impurities attached to the surfaces of the gate insulating layer, the source electrode layer, and the drain electrode layer. In addition, if a film including impurities is formed on the surfaces of the gate insulating layer, the source electrode layer, and the drain electrode layer before the oxide semiconductor layer is formed, the element characteristics might deteriorate.
For example, in the case where a source electrode layer and a drain electrode layer are formed by a photolithography method, a resist or a resist stripping solution is in contact with a gate insulating layer, the source electrode layer, and the drain electrode layer; therefore, impurities might be attached to surfaces or a film including impurities might be formed on the surfaces in some cases. In addition, even when a source electrode layer and a drain electrode layer are selectively formed over a gate insulating layer by a droplet discharge method such as ink jet printing, an additive such as a solvent or a dispersant included in ink might be in contact with the surfaces of the gate insulating layer, the source electrode layer, and the drain electrode layer and a film including impurities might be formed in some cases.
Further, in the case where metal is used as a source electrode layer and a drain electrode layer, after the source electrode layer and the drain electrode layer are formed and before an oxide semiconductor layer is formed, the surfaces of the source electrode layer and the drain electrode layer might be oxidized, so that contact resistances between the source electrode layer and the oxide semiconductor layer and between the drain electrode layer and the oxide semiconductor layer might be increased and the element characteristics might deteriorate.
In the case where an oxide semiconductor layer is formed over a source electrode layer and a drain electrode layer which are provided over a gate insulating layer, if the source electrode layer and the drain electrode layer each have a large thickness and unevenness, disconnection of the oxide semiconductor layer formed over the gate insulating layer, the source electrode layer, and the drain electrode layer might occur and the element characteristics might deteriorate in some cases.
In view of the foregoing problems, an object is to suppress deterioration of element characteristics even when an oxide semiconductor is formed after a gate insulating layer, a source electrode layer, and a drain electrode layer are formed.
SUMMARY OF THE INVENTION
When an oxide semiconductor layer is formed over a gate insulating layer, a source electrode layer, and a drain electrode layer, surface treatment such as plasma treatment is performed on the gate insulating layer, the source electrode layer, and the drain electrode layer before the oxide semiconductor layer is formed. By the surface treatment performed before the formation of the oxide semiconductor layer, entry of impurities between the gate insulating layer and the oxide semiconductor layer can be suppressed. In addition, contact resistances between the source electrode layer and the oxide semiconductor layer and between the drain electrode layer and the oxide semiconductor layer can be reduced and element characteristics can be improved.
One embodiment of the present invention includes the following steps: a gate electrode layer is formed over a substrate; a gate insulating layer is formed over the gate electrode layer; a source electrode layer and a drain electrode layer are formed over the gate insulating layer; plasma treatment is performed on surfaces of the gate insulating layer, the source electrode layer, and the drain electrode layer which are formed over the substrate in a chamber into which an inert gas is introduced; and an oxide semiconductor layer is formed over the gate insulating layer, the source electrode layer, and the drain electrode layer after the plasma treatment is performed. The plasma treatment is performed in such a manner that the substrate is provided on one electrode of a pair of electrodes provided in the chamber and a high frequency voltage is applied to the one electrode so that a bias voltage is applied to the substrate.
In addition, one embodiment of the present invention includes the following steps: a gate electrode layer is formed over a substrate; a gate insulating layer is formed over the gate electrode layer; a conductive layer is formed over the gate insulating layer; a first oxide semiconductor layer is formed over the conductive layer; a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked are formed by etching the conductive layer and the first oxide semiconductor layer; plasma treatment is performed on surfaces of the gate insulating layer, the first stack, and the second stack which are formed over the substrate in a chamber into which an inert gas is introduced; and a second oxide semiconductor layer is formed over the gate insulating layer, the first stack, and the second stack after the plasma treatment is performed. The plasma treatment is performed in such a manner that the substrate is provided on one electrode of a pair of electrodes provided in the chamber and a high frequency voltage is applied to the one electrode so that a bias voltage is applied to the substrate.
In addition, one embodiment of the present invention includes the following steps: a gate electrode layer is formed over a substrate; a gate insulating layer is formed over the gate electrode layer; a conductive layer is formed over the gate insulating layer; first plasma treatment is performed on a surface of the conductive layer; a first oxide semiconductor layer is formed over the conductive layer after the first plasma treatment is performed; a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked are formed by etching the conductive layer and the first oxide semiconductor layer; second plasma treatment is performed on surfaces of the gate insulating layer, the first stack, and the second stack; and a second oxide semiconductor layer is formed over the gate insulating layer, the first stack, and the second stack after the second plasma treatment is performed. The first plasma treatment and the second plasma treatment are performed in such a manner that the substrate is provided on one electrode of a pair of electrodes provided in a chamber and a high frequency voltage is applied to the one electrode and an inert gas is introduced into the chamber so that a bias voltage is applied to the substrate.
In addition, according to one embodiment of the present invention, a semiconductor device includes a gate electrode layer provided over a substrate; a gate insulating layer provided over the gate electrode layer; a source electrode layer and a drain electrode layer provided over the gate insulating layer; and an oxide semiconductor layer provided over the gate insulating layer located between the source electrode layer and the drain electrode layer and provided over the source electrode layer and the drain electrode layer. The thickness of the gate insulating layer located between the source electrode layer and the drain electrode layer is smaller than the thickness of the gate insulating layer located below the source electrode layer and the drain electrode layer. End portions of the source electrode layer and the drain electrode layer have tapered shapes, and upper end portions of the source electrode layer and the drain electrode layer have curved surface shapes.
Note that as an example of the oxide semiconductor which can be used in this specification, there is an oxide semiconductor represented by InMO3 (ZnO)m (m>0, m is not an integer). Here, M denotes one or more metal elements selected from gallium (Ga), iron (Fe), nickel (Ni), manganese (Mn), and cobalt (Co). For example, the case where Ga is selected as M includes the case where the aforementioned metal element other than Ga is selected such as a combination of Ga and Ni, or a combination of Ga and Fe as well as the case where only Ga is used. In the above oxide semiconductor, there is an oxide semiconductor which includes a transition metal element such as Fe, Ni, or the like, or oxide of the transition metal as an impurity element, in addition to the metal element included as M. In this specification, of the above oxide semiconductors, an oxide semiconductor at least including gallium as M is referred to as an In—Ga—Zn—O-based oxide semiconductor, and a thin film using the material is referred to as an In—Ga—Zn—O-based non-single-crystal film.
Note that a semiconductor device in this specification refers to all devices which can function by utilizing semiconductor characteristics, and electro-optical devices, semiconductor circuits, and electronic devices are all included in the category of the semiconductor device. In addition, in this specification, a display device includes a light-emitting device and a liquid crystal display device. The light-emitting device includes a light-emitting element, and the liquid crystal display device includes a liquid crystal element. The light-emitting element refers to an element, luminance of which is controlled by a current or a voltage. Specifically, the light-emitting element refers to an inorganic EL (electroluminescence) element, an organic EL element, and the like.
By the surface treatment such as plasma treatment performed before an oxide semiconductor layer is formed over a gate insulating layer, a source electrode layer, and a drain electrode layer, deterioration of element characteristics due to entry of impurities or an oxide film formed on the surfaces of the source electrode layer and the drain electrode layer can be suppressed.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A to 1E are views illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating an example of an apparatus used for plasma treatment according to an embodiment of the present invention.
FIGS. 3A to 3E are views illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIGS. 4A to 4E are views illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIGS. 5A to 5D are views illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIGS. 6A to 6D are views illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 7 is a view illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 8 is a view illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 9 is a view illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 10 is a view illustrating an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
FIG. 11 is a view illustrating an example of a method for manufacturing a semiconductor device according to Embodiment 3.
FIGS. 12A1, 12A2, and 12B are views each illustrating an example of a semiconductor device according to an embodiment of the present invention.
FIG. 13 is a view illustrating an example of a semiconductor device according to an embodiment of the present invention.
FIG. 14 is a view illustrating an example of a semiconductor device according to an embodiment of the present invention.
FIG. 15 is a diagram illustrating an example of a pixel equivalent circuit of a semiconductor device according to an embodiment of the present invention.
FIGS. 16A to 16C are views each illustrating an example of a semiconductor device according to an embodiment of the present invention.
FIGS. 17A and 17B are views illustrating an example of a semiconductor device according to an embodiment of the present invention.
FIGS. 18A and 18B are drawings each illustrating an example of a usage pattern of electronic paper.
FIG. 19 is an external view illustrating an example of an e-book reader.
FIG. 20A is an external view illustrating an example of a television device and
FIG. 20B is an external view illustrating an example of a digital photo frame.
FIGS. 21A and 21B are external views each illustrating an example of a game machine.
FIGS. 22A and 22B are external views each illustrating an example of a cellular phone.
FIGS. 23A to 23E are views illustrating a method for manufacturing an element according to Example 1.
FIG. 24 is a graph showing characteristics of transistors according to Example 1.
FIG. 25 is a diagram illustrating a transistor structure according to Example 1.



DETAILED DESCRIPTION OF THE INVENTION
Embodiments and Example will be described with reference to the drawings. It is easily understood by those skilled in the art that the present invention can be carried out in many different modes, and modes and details disclosed herein can be modified in various ways without departing from the spirit and scope of the present invention. Therefore, the present invention is not construed as being limited to the description of the Embodiments and Example. Further, structures according to different embodiments can be carried out with appropriate combination. In structures of the present invention described below, the same reference numeral is given to the same parts or parts having similar functions, and repeated description thereof is omitted.
Embodiment 1
In this embodiment, an example of a method for manufacturing a semiconductor device which is one mode of the present invention will be described with reference to drawings.
First, a gate electrode layer 202 is formed over a substrate 200, and then a gate insulating layer 204 is formed over the gate electrode layer 202 (see FIG. 1A).
As the substrate 200, a substrate having an insulating surface may be used, and for example, a glass substrate can be used. Further, a non-alkali glass substrate is preferable as the glass substrate. As a material of the non-alkali glass substrate, a glass material such as aluminosilicate glass, aluminoborosilicate glass, or barium borosilicate glass is used, for example. In addition, as the substrate 200, an insulating substrate formed using an insulator such as a ceramic substrate, a quartz substrate, or a sapphire substrate; a semiconductor substrate which is formed using a semiconductor material such as silicon and whose surface is covered with an insulating material; or a conductive substrate which is formed using a conductor such as metal or stainless steel and whose surface is covered with an insulating material can be used. In addition, a plastic substrate can be used as long as it can withstand heat treatment in a manufacturing process.
After a conductive layer is formed over an entire surface of the substrate 200, the conductive layer is etched by a photolithography method, whereby the gate electrode layer 202 can be formed. The gate electrode layer 202 includes an electrode and a wiring which are formed by the conductive layer such as a gate wiring.
When the gate electrode layer is formed, the end portion of the gate electrode layer 202 is preferably etched into a tapered shape in order to improve coverage of the gate insulating layer 204 to be formed later and to prevent disconnection. For example, it is preferable that a taper angle θ1 be greater than or equal to 20° and less than 90°, more preferably, greater than or equal to 30° and less than or equal to 80°. Note that “the taper angle θ1” refers to an inclination angle at the inside of a layer having a tapered shape (here, the gate electrode layer 202), which is formed by the side surface of the layer and the bottom surface thereof when the layer is observed from a cross-sectional direction (plane which is perpendicular to the surface of the substrate 200). That is, the taper angle θ1 corresponds to an angle of the lower end portion of the gate electrode layer 202 which is in contact with the substrate 200 when observed from the cross-sectional direction.
The gate electrode layer 202 is preferably formed using a conductive material such as aluminum (Al), copper (Cu), molybdenum (Mo), tungsten (W), or titanium (Ti). Note that when aluminum is used by itself for the wiring or the electrode, there are problems in that aluminum has low heat resistance and that aluminum is easily eroded, for example. Therefore, it is preferable to use aluminum in combination with a heat-resistant conductive material.
As the heat-resistant conductive material, an element selected from titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), and scandium (Sc); an alloy containing the above element as its component; an alloy containing a combination of the above elements; or nitride containing the above element as its component may be used. A film formed using any of these heat-resistant conductive materials and an aluminum (or copper) film may be stacked, so that the wiring and the electrode may be formed.
Note that the gate electrode layer 202 can be selectively formed over the substrate 200 by a droplet discharge method, a screen printing method, or the like.
The gate insulating layer 204 can be formed using a silicon oxide film, a silicon oxynitride film, a silicon nitride film, a silicon nitride oxide film, an aluminum oxide film, a tantalum oxide film, or the like. In addition, any of these films may be stacked. The total thickness of these films can be greater than or equal to 50 nm and less than or equal to 250 nm by a sputtering method or the like. For example, as the gate insulating layer 204, a silicon oxide film can be formed to a thickness of 100 nm by a sputtering method.
In this specification, silicon oxynitride means a substance which contains more oxygen than nitrogen and, in the case where measurements are performed by Rutherford backscattering spectrometry (RBS) and hydrogen forward scattering spectrometry (HFS), preferably contains oxygen, nitrogen, silicon, and hydrogen at concentrations ranging from 50 at. % to 70 at. %, 0.5 at. % to 15 at. %, 25 at. % to 35 at. %, and 0.1 at. % to 10 at. %, respectively. Further, silicon nitride oxide contains more nitrogen than oxygen, and in the case where measurements are conducted using RBS and HFS, silicon nitride oxide preferably contains oxygen, nitrogen, silicon, and hydrogen at concentrations ranging from 5 at. % to 30 at. %, 20 at. % to 55 at. %, 25 at. % to 35 at. %, and 10 at. % to 30 at. %, respectively. Note that percentages of nitrogen, oxygen, silicon, and hydrogen fall within the ranges given above, where the total number of atoms contained in the silicon oxynitride or the silicon nitride oxide is defined as 100 at. %.
Next, a source electrode layer 206a and a drain electrode layer 206b are formed over the gate insulating layer 204 (see FIG. 1B).
After a conductive layer is formed over the gate insulating layer 204, the conductive layer is etched by a photolithography method, whereby the source electrode layer 206a and the drain electrode layer 206b can be formed. Here, the case where the source electrode layer 206a and the drain electrode layer 206b partly overlap with the gate electrode layer 202 with the gate insulating layer 204 interposed therebetween is described as an example.
The source electrode layer 206a and the drain electrode layer 206b can be formed by a sputtering method, a vacuum evaporation method, or the like using metal including an element selected from aluminum (Al), copper (Cu), titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), and scandium (Sc); an alloy including the above element as a component; or a material including nitride or the like in which the above element is a component.
For example, the source electrode layer 206a and the drain electrode layer 206b can be formed to have a single-layer structure of a molybdenum film or a titanium film. The source electrode layer 206a and the drain electrode layer 206b may be formed to have a stacked structure, for example, a stacked structure of an aluminum film and a titanium film. A three-layer structure in which a titanium film, an aluminum film, and a titanium film are sequentially stacked may be used. A three-layer structure in which a molybdenum film, an aluminum film, and a molybdenum film are sequentially stacked may be used. As the aluminum films used for these stacked structures, an aluminum film including neodymium (Al—Nd) may be used. The source electrode layer 206a and the drain electrode layer 206b may have a single-layer structure of an aluminum film including silicon.
Note that the source electrode layer 206a and the drain electrode layer 206b can be selectively formed over the substrate 200 by a droplet discharge method, a screen printing method, or the like.
The source electrode layer 206a formed in FIG. 1B functions as a source of a transistor, and the drain electrode layer 206b functions as a drain of the transistor. Note that depending on a driving method of the transistor, the source electrode layer 206a functions as a drain, and the drain electrode layer 206b functions as a source.
Next, surface treatment is performed on the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b. As the surface treatment, plasma treatment or the like using an inert gas and/or a reactive gas can be performed.
Here, plasma is generated in the chamber in which the substrate 200 is placed, and plasma 208 acts on the surfaces of the exposed gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b, whereby the surfaces are modified (see FIG. 1C).
For example, the plasma treatment can be performed in such a manner that an inert gas such as an argon (Ar) gas is introduced into a chamber in a vacuum state and a bias voltage is applied to an object (here, the substrate 200), so that a plasma state is produced. When an Ar gas is introduced into the chamber, electrons and cations of Ar are present in plasma, and the cations of Ar are accelerated in a cathode direction (the substrate 200 side). The accelerated cations of Ar collide with the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b which are formed over the substrate 200 so that the surfaces are sputter-etched and can be modified. Note that such plasma treatment is also referred to as “reverse sputtering”.
When the bias voltage is applied to the substrate 200 side and the plasma treatment is performed, the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b can be sputter-etched effectively.
When unevenness is formed on the surface of the gate insulating layer 204, by the plasma treatment, a projection of the gate insulating layer 204 is preferentially sputter-etched and planarity of the surface of the gate insulating layer 204 can be improved.
As a gas used in the above plasma treatment, a helium gas may be used instead of an argon gas. In addition, an argon atmosphere to which oxygen, hydrogen, nitrogen, or the like is added may be used. Further, an argon atmosphere to which Cl2, CF4, or the like is added may be used.
In this embodiment, the plasma treatment can be performed as the surface treatment using a sputtering apparatus as illustrated in FIG. 2, for example.
The sputtering apparatus illustrated in FIG. 2 is provided with, in a chamber 190, a first electrode 191 holding an object 195 (here, the substrate 200) and a second electrode 192 which faces the first electrode 191. In addition, the first electrode 191 is connected to an RF power supply (high frequency power supply) 197, while the second electrode 192 is connected to an RF power supply 198 and a DC power supply 199. A matching box 193 to adjust impedance is provided between the first electrode 191 and the RF power supply 197, while a matching box 194 to adjust impedance is provided between the second electrode 192 and the RF power supply 198.
In the case where the plasma treatment (also referred to as reverse sputtering) is performed on the object 195 using the sputtering apparatus illustrated in FIG. 2, an inert gas such as an argon gas is introduced from an inlet 196, and a high frequency voltage is applied to the first electrode 191; thus, plasma of the inert gas is generated between the first electrode 191 and the second electrode 192. A negative self-bias is generated (that is, a bias voltage is applied) on the side of the object 195 which is provided on the first electrode 191, whereby cations in the plasma are accelerated to collide with the object 195. At this time, when unevenness is formed on the surface of the gate insulating layer 204, a projection is preferentially sputter-etched and the surface of the gate insulating layer 204 can be planarized.
When a high frequency voltage is applied to the first electrode 191, plasma treatment can be performed stably on the substrate 200 which is an insulator.
Note that when a film is formed on the object 195 (sputtering film formation) using the sputtering apparatus illustrated in FIG. 2, a target formed from a material which is desired to be formed may be provided on the second electrode 192 side and a DC voltage or a high frequency voltage may be applied to the second electrode 192 to generate plasma between the first electrode 191 and the second electrode 192, whereby cations in the plasma may be accelerated to collide with the target.
Therefore, when a film is formed on the object 195 after the plasma treatment is performed, a film can be formed on the object 195 by a sputtering method in succession to the plasma treatment without exposing the object 195 to air. In this case, a film can be formed on the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b from which impurities are removed by the plasma treatment.
In this embodiment, it is preferable that a surface layer portion of the gate insulating layer 204 be removed by the surface treatment such as plasma treatment. Preferably, the thickness of the surface layer portion of the gate insulating layer 204, which is removed by the surface treatment, is in the range of from 2 nm to 1⁄2t inclusive (t is a thickness of the gate insulating layer 204 before the surface treatment (the thickness of the gate insulating layer located below the source electrode layer 206a and the drain electrode layer 206b)). For example, in the case where the thickness of the gate insulating layer 204 located below the source electrode layer 206a and the drain electrode layer 206b is 100 nm, the surface layer portion of the gate insulating layer 204 exposed by the surface treatment (the gate insulating layer 204 located between the source electrode layer 206a and the drain electrode layer 206b) is removed by 2 nm to 50 nm. This is because not only an atmospheric component but also various substances are in contact with the surface of the gate insulating layer 204 in accordance with the formation of the source electrode layer 206a and the drain electrode layer 206b, so that impurities are attached to the surface of the gate insulating layer 204 or impurity elements are taken into the surface layer portion of the surface of the gate insulating layer 204 in some cases.
When the gate insulating layer 204 becomes too thin by the surface treatment, the withstand voltage of the gate insulating layer 204 with respect to a voltage to be applied is low in a transistor to be formed later; therefore, the gate insulating layer 204 is preferably removed within the above range.
By the surface treatment such as plasma treatment, entry of impurities between the gate insulating layer 204 and an oxide semiconductor layer to be formed later can be suppressed and element characteristics can be improved.
The surface layer portions of the source electrode layer 206a and the drain electrode layer 206b are preferably removed by the surface treatment. This is because, in accordance with the formation of the source electrode layer 206a and the drain electrode layer 206b, impurities are attached to the surfaces of the source electrode layer 206a and the drain electrode layer 206b or an oxide film or a film into which impurity elements are taken is formed in some cases. When the surface treatment such as plasma treatment is performed on the surfaces of the source electrode layer 206a and the drain electrode layer 206b, contact resistance between the source electrode layer 206a and the oxide semiconductor layer to be formed later and between the drain electrode layer 206b and the oxide semiconductor layer to be formed later can be reduced and element characteristics can be improved.
The surface treatment such as plasma treatment is preferably performed on the source electrode layer 206a and the drain electrode layer 206b so that a tapered shape is formed at end portions of the source electrode layer 206a and the drain electrode layer 206b, in order to improve coverage of the oxide semiconductor layer to be formed later and to prevent disconnection. For example, it is preferable that a taper angle θ2 be greater than or equal to 20° and less than 90°, more preferably, greater than or equal to 30° and less than or equal to 80°. Note that when a layer having a tapered shape (here, the source electrode layer 206a or the drain electrode layer 206b) is observed from a cross-sectional direction (a plane which is perpendicular to the surface of the substrate 200), “the taper angle θ2” refers to an inclination angle of a tip portion inside the layer, which is formed by a side surface of the layer and a bottom surface thereof. That is, the taper angle θ2 corresponds to an angle of the lower end portion of the source electrode layer 206a or the drain electrode layer 206b which is in contact with the gate insulating layer 204 when observed from the cross-sectional direction.
It is preferable that upper end portions of the source electrode layer 206a and the drain electrode layer 206b have curved surfaces (curved surface shapes). For example, radius of curvature R of each upper end portion of the source electrode layer 206a and the drain electrode layer 206b is greater than or equal to 1/100 and less than or equal to 1⁄2 of the thickness of the source electrode layer 206a or the drain electrode layer 206b, preferably, greater than or equal to 3/100 and less than or equal to 1⁄5 of the thickness of the source electrode layer 206a or the drain electrode layer 206b. 
For example, when the thicknesses of the source electrode layer 206a and the drain electrode layer 206b after the surface treatment such as plasma treatment are 100 nm, the radius of curvature R of each upper end portion of the source electrode layer 206a and the drain electrode layer 206b is greater than or equal to 1 nm and less than or equal to 50 nm, preferably greater than or equal to 3 nm and less than or equal to 20 nm. Alternatively, the radius of curvature R of each upper end portion of the source electrode layer 206a and the drain electrode layer 206b may be continuously changed within this range. In the case where the upper end portions of the source electrode layer 206a and the drain electrode layer 206b have curved surfaces, coverage of the oxide semiconductor layer to be formed later can be improved and disconnection can be suppressed. In particular, when the thickness of the oxide semiconductor layer is smaller than the length (step) which is the sum of the thickness of the source electrode layer 206a or the drain electrode layer 206b and the depth of a dent, an effect of suppressing disconnection is remarkable.
It is preferable that a tapered shape be formed at the end portions of the source electrode layer 206a and the drain electrode layer 206b and that a depression portion of the gate insulating layer 204 which is formed when the surface layer portion of the gate insulating layer 204 is removed be formed to have a tapered shape. In this case, coverage of the oxide semiconductor layer formed in a portion where the gate insulating layer 204 is in contact with the source electrode layer 206a or the drain electrode layer 206b can be improved, and disconnection can be prevented effectively. Note that the phrase “a depression portion of the gate insulating layer 204 is formed to have a tapered shape” means that an inclination angle θ3 on the dent side, which is formed by the bottom surface of the depression portion (dent) of the gate insulating layer 204 and the side surface thereof (or an inclination angle on the dent side, which is formed by a side surface of the dent and the surface of the substrate 200) is greater than or equal to 90°. In addition, the depression portion of the gate insulating layer 204 refers to the dent formed in the gate insulating layer 204 when observed from the cross-sectional direction taken along a line connecting the source electrode layer with the drain electrode layer.
Next, an oxide semiconductor layer 209 is formed to cover the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b (see FIG. 1D).
The oxide semiconductor layer 209 can be formed using an In—Ga—Zn—O-based non-single-crystal film. For example, the oxide semiconductor layer 209 can be formed by a sputtering method using an oxide semiconductor target including In, Ga, and Zn (In2O3:Ga2O3:ZnO=1:1:1). The condition of sputtering can be set as follows: the distance between the substrate 200 and the target is 30 mm to 500 mm, the pressure is 0.1 Pa to 2.0 Pa, the direct current (DC) power supply is 0.25 kW to 5.0 kW, the temperature is 20° C. to 100° C., the atmosphere is an argon atmosphere, an oxygen atmosphere, or a mixture atmosphere of argon and oxygen, for example.
Note that when a pulsed direct current (DC) power supply is used, dust can be reduced and thickness distribution becomes uniform, which is preferable. In the case where the oxide semiconductor layer 209 is formed without being exposed to air after the above plasma treatment, attachment of dust or moisture to the interface between the gate insulating layer 204 and the oxide semiconductor layer 209 can be suppressed. In addition, the oxide semiconductor layer 209 may have a thickness of approximately 5 nm to 200 nm.
As the above sputtering method, an RF sputtering method using a high frequency power supply for a power supply for sputtering, a DC sputtering method using a DC power supply, a pulsed DC sputtering method in which a DC bias is applied in a pulse manner, or the like can be employed.
In addition, it is preferable that when the plasma treatment is used as the surface treatment, the plasma treatment and formation of the oxide semiconductor layer 209 be performed in the same chamber in succession. The oxide semiconductor layer 209 is formed without exposure of the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b after the plasma treatment to air, whereby attachment of impurities to the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b and formation of an oxide film or the like on the surfaces of the source electrode layer 206a and the drain electrode layer 206b can be suppressed.
For example, the plasma treatment is performed using the sputtering apparatus illustrated in FIG. 2 on the surfaces of the gate insulating layer 204, the source electrode layer 206a, and the drain electrode layer 206b which are formed over the substrate 200, and then plasma is generated between the first electrode 191 and the second electrode 192 using a DC power supply without exposure of the substrate 200 to air. Cations in the plasma are accelerated to collide with a target provided on the second electrode 192 side, whereby the oxide semiconductor layer 209 can be formed.
Next, the oxide semiconductor layer 209 is selectively etched to form an island-shaped oxide semiconductor layer 210 (see FIG. 1E).
Through the above-described steps, a thin film transistor 250 in which the oxide semiconductor layer 210 is used as a channel formation region can be formed.
In addition, after the oxide semiconductor layer 210 is formed, heat treatment is preferably performed at 100° C. to 600° C., typically, 200° C. to 400° C. For example, heat treatment can be performed under a nitrogen atmosphere at 350° C. for one hour. By this heat treatment, rearrangement of the In—Ga—Zn—O-based oxide semiconductor for forming the island-shaped oxide semiconductor layer 210 is performed at the atomic level. This heat treatment (including light annealing and the like) is important in terms of reduction of distortion which hinders the transfer of carriers in the island-shaped oxide semiconductor layer 210. Note that the timing of the above heat treatment is not particularly limited as long as it is after the formation of the oxide semiconductor layer 209.
Further, oxygen radical treatment may be performed on the island-shaped oxide semiconductor layer 210. When the oxygen radical treatment is performed, a thin film transistor in which the oxide semiconductor layer 210 serves as the channel formation region can be a normally-off type. In addition, when radical treatment is performed, damage of the island-shaped oxide semiconductor layer 210 due to etching can be repaired. The radical treatment can be performed under an atmosphere of O2, N2O, N2 including oxygen, He including oxygen, Ar including oxygen, or the like. Further, the radical treatment may be performed under the above atmosphere to which Cl2 and/or CF4 are/is added. Note that the radical treatment is preferably performed without a bias voltage being applied to the substrate 200 side.
A protective insulating layer may be formed so as to cover the thin film transistor 250 including the oxide semiconductor layer 210, the source electrode layer 206a, the drain electrode layer 206b, and the like. As the protective insulating layer, a single layer or a stacked layer of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, a silicon nitride oxide film, an aluminum oxide film, an aluminum nitride film, an aluminum oxynitride film, or an aluminum nitride oxide film may be formed by a CVD method, a sputtering method, or the like.
Then, various electrodes and wirings are formed, whereby a semiconductor device which includes the thin film transistor 250 is completed.
As described above, even when the oxide semiconductor layer is formed after the gate insulating layer, the source electrode layer, and the drain electrode layer are formed, by performing the surface treatment such as plasma treatment before the oxide semiconductor layer is formed as described in this embodiment, characteristic deterioration of the thin film transistor 250 due to an impurity element or an oxide film formed between the gate insulating layer and the oxide semiconductor layer or between the source or drain electrode layer and the oxide semiconductor layer can be suppressed.
Even when the oxide semiconductor layer is provided over the gate insulating layer, the source electrode layer, and the drain electrode layer, a tapered shape is formed at the end portions of the source electrode layer and the drain electrode layer, whereby coverage of the oxide semiconductor layer can be improved and disconnection can be prevented. In addition, the upper end portions of the source electrode layer and the drain electrode layer are formed to have a curved surface, whereby coverage of the oxide semiconductor layer can be improved and disconnection can be prevented.
According to this embodiment, a semiconductor device including a transistor having high characteristics can be provided. Note that this embodiment can be implemented in combination with any of the other embodiments, as appropriate.
Embodiment 2
In this embodiment, a manufacturing process of a semiconductor device which is one mode of the present invention and different from the above embodiment will be described with reference to drawings. Note that the manufacturing process of the semiconductor device in this embodiment has a lot in common with that in Embodiment 1. Thus, description of the common portions is omitted, and differences are described in detail below.
First, the gate electrode layer 202 is formed over the substrate 200 having an insulating surface, and then the gate insulating layer 204 is formed over the gate electrode layer 202 (see FIG. 3A). For materials and manufacturing methods of the gate electrode layer 202 and the gate insulating layer 204, refer to Embodiment 1.
Next, a conductive layer 216 is formed over the gate insulating layer 204, and then an oxide semiconductor layer 217 is formed over the conductive layer 216 (see FIG. 3B).
The conductive layer 216 can be formed by a sputtering method, a vacuum evaporation method, or the like using metal including an element selected from aluminum (Al), copper (Cu), titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), and scandium (Sc); an alloy including the above element as a component; or a material including nitride or the like in which the above element is a component.
For example, the conductive layer 216 can be formed to have a single-layer structure of a molybdenum film or a titanium film. The conductive layer 216 may be formed to have a stacked structure, for example, a stacked structure of an aluminum film and a titanium film. A three-layer structure in which a titanium film, an aluminum film, and a titanium film are sequentially stacked may be used. A three-layer structure in which a molybdenum film, an aluminum film, and a molybdenum film are sequentially stacked may be used. As the aluminum films used for these stacked structures, an aluminum film including neodymium (Al—Nd) may be used. The conductive layer 216 may have a single-layer structure of an aluminum film including silicon.
The oxide semiconductor layer 217 can be formed using an In—Ga—Zn—O-based non-single-crystal film. For example, the oxide semiconductor layer 217 can be formed over the conductive layer 216 by a sputtering method using an oxide semiconductor target including In, Ga, and Zn (In2O3:Ga2O3:ZnO=1:1:1). The condition of sputtering can be set as follows: the distance between the substrate 200 and the target is 30 mm to 500 mm, the pressure is 0.1 Pa to 2.0 Pa, the direct current (DC) power supply is 0.25 kW to 5.0 kW, the temperature is 20° C. to 100° C., an atmosphere is an argon atmosphere, an oxygen atmosphere, or a mixture atmosphere of argon and oxygen, for example.
The oxide semiconductor layer 217 suppresses oxidation of surfaces of a source electrode layer and a drain electrode layer (the conductive layer 216) which have been formed, and the oxide semiconductor layer 217 also functions as a buffer layer which is used to favorably electrically connect an oxide semiconductor layer serving as a channel formation region to be formed later with the source electrode layer and the drain electrode layer.
In the step of FIG. 3B, it is preferable that the conductive layer 216 be formed and then the oxide semiconductor layer 217 be formed in succession without exposure of the conductive layer 216 to air. The oxide semiconductor layer 217 is formed without exposure of the conductive layer 216 to air, whereby attachment of impurities to or formation of an oxide film on the surface of the conductive layer 216 can be suppressed and contact resistance between the conductive layer 216 and the oxide semiconductor layer 217 can be reduced.
It is preferable that a gas that is less likely to oxidize the surface of the conductive layer 216 be used as a gas used in formation of the oxide semiconductor layer 217. For example, the ratio of a flow rate of an argon gas to a flow rate of an oxygen gas is increased in the formation condition of the oxide semiconductor layer 217 (preferably, an oxygen gas is not introduced). Specifically, the oxide semiconductor layer 217 can be formed under a noble gas atmosphere such as argon or helium or under an atmosphere including an oxygen gas at less than or equal to 10% and a noble gas at greater than or equal to 90%. The ratio of the flow rate of the oxygen gas to the flow rate of the argon gas is reduced, whereby formation of an oxide film on the surface of the conductive layer 216 can be suppressed. As a result, contact resistance between the conductive layer 216 and the oxide semiconductor layer 217 can be reduced, and element characteristics can be improved.
In addition, the ratio of the flow rate of the oxygen gas to the flow rate of the argon gas is reduced, whereby conductivity of the oxide semiconductor layer which is obtained can be increased. In this case, the oxide semiconductor layer serving as the channel formation region to be formed later can be favorably electrically connected to the source electrode layer and the drain electrode layer.
Next, the conductive layer 216 and the oxide semiconductor layer 217 are etched, whereby a source electrode layer 216a, a drain electrode layer 216b, a first buffer layer 217a formed over the source electrode layer 216a, and a second buffer layer 217b formed over the drain electrode layer 216b are formed (see FIG. 3C). The source electrode layer 216a and the drain electrode layer 216b are formed from the etched conductive layer 216, and the first buffer layer 217a and the second buffer layer 217b are formed from the etched oxide semiconductor layer 217.
The oxide semiconductor layer 217 is formed over the conductive layer 216, and then the conductive layer 216 and the oxide semiconductor layer 217 are etched by a photolithography method, whereby the source electrode layer 216a, the drain electrode layer 216b, the first buffer layer 217a, and the second buffer layer 217b can be formed. Here, as an example, the source electrode layer 216a, the drain electrode layer 216b, the first buffer layer 217a, and the second buffer layer 217b are etched using the same mask, and part of a stack 218a including the source electrode layer 216a and the first buffer layer 217a and part of a stack 218b including the drain electrode layer 216b and the second buffer layer 217b are formed so as to overlap the gate electrode layer 202 with the gate insulating layer 204 interposed between the stack 218a and the stack 218b, and the gate electrode layer 202.
The source electrode layer 216a formed in FIG. 3C functions as a source of a transistor, and the drain electrode layer 216b functions as a drain of the transistor. Note that depending on a driving method of the transistor, the source electrode layer 216a functions as a drain, and the drain electrode layer 216b functions as a source.
Next, surface treatment is performed on surfaces of the exposed gate insulating layer 204, the stack 218a, and the stack 218b (see FIG. 3D). As the surface treatment, plasma treatment or the like using an inert gas and/or a reactive gas can be performed.
By the surface treatment, impurities that are attached to the surface of the gate insulating layer 204 and to the surfaces of the stack 218a and the stack 218b can be removed. Note that by the plasma treatment performed on the stack 218a and the stack 218b, not only the surfaces of the first buffer layer 217a and the second buffer layer 217b but also the exposed surfaces of the first the source electrode layer 216a and the second the drain electrode layer 216b are modified.
For a method of the plasma treatment or the like, refer to Embodiment 1.
In this embodiment, it is preferable that a surface layer portion of the gate insulating layer 204 be removed by the surface treatment such as plasma treatment. Preferably, the thickness of the surface layer portion of the gate insulating layer 204, which is removed by the plasma treatment or the like, is in the range of from 2 nm to 1⁄2t inclusive (t is a thickness of the gate insulating layer 204 before the surface treatment). This is because not only an atmospheric component but also various substances are in contact with the surface of the gate insulating layer 204 in accordance with the formation of the stack 218a and the stack 218b, so that impurities are attached to the surface of the gate insulating layer 204 or impurity elements are taken into the surface layer portion of the surface of the gate insulating layer 204 in some cases.
The exposed surface layer portions of the source electrode layer 216a, the drain electrode layer 216b, the first buffer layer 217a, and the second buffer layer 217b are preferably removed by the surface treatment. This is because, in accordance with the formation of the stack 218a and the stack 218b, impurities are attached to the surfaces of the stack 218a and the stack 218b or an oxide film or a film into which impurity elements are taken is formed in some cases.
The surface treatment such as plasma treatment is preferably performed on the stack 218a and the stack 218b so that a tapered shape is formed at end portions of the stack 218a and the stack 218b, in order to improve coverage of the oxide semiconductor layer to be formed later and to prevent disconnection. For example, it is preferable that a taper angle θ2 be greater than or equal to 20° and less than 90°, more preferably, greater than or equal to 30° and less than or equal to 80°.
It is preferable that upper end portions of the stack 218a and the stack 218b (upper end portions of the first buffer layer 217a and the second buffer layer 217b) be formed to have a curved surface. For example, radius of curvature R of each upper end portion of the stack 218a and the stack 218b is greater than or equal to 1/100 and less than or equal to 1⁄2 of the thickness of the stack 218a or the stack 218b, preferably, greater than or equal to 3/100 and less than or equal to 1⁄5 of the thickness of the stack 218a or the stack 218b. 
For example, when the thicknesses of the stack 218a and the stack 218b are 100 nm after the surface treatment such as plasma treatment, the radius of curvature R of each upper end portion of the stack 218a and the stack 218b is greater than or equal to 1 nm and less than or equal to 50 nm, preferably greater than or equal to 3 nm and less than or equal to 20 nm. Alternatively, the radius of curvature R of each upper end portion of the stack 218a and the stack 218b may be continuously changed within this range. The upper end portions of the stack 218a and the stack 218b have curved surfaces, whereby coverage of the oxide semiconductor layer to be formed later can be improved and disconnection can be suppressed.
It is preferable that a tapered shape be formed at the end portions of the stack 218a and the stack 218b and that a depression portion of the gate insulating layer 204 which is formed when the surface layer portion of the gate insulating layer 204 is removed be formed to have a tapered shape. In this case, coverage of the oxide semiconductor layer formed in a portion where the gate insulating layer 204 is in contact with the stack 218a and the stack 218b can be improved, and disconnection can be prevented effectively. Note that the phrase “a depression portion of the gate insulating layer 204 is formed to have a tapered shape” means that an inclination angle θ3 formed by the surface of the depression portion (dent) of the gate insulating layer 204 and the side surface thereof (or an inclination angle formed by the side surface of the dent and the surface of the substrate 200) is greater than or equal to 90°. In addition, the depression portion of the gate insulating layer 204 refers to the dent formed in the gate insulating layer 204 when observed from the cross-sectional direction taken along a line connecting the source electrode layer with the drain electrode layer.
Next, the oxide semiconductor layer is formed so as to cover the gate insulating layer 204, the stack 218a, and the stack 218b, and then the oxide semiconductor layer is selectively etched to form the oxide semiconductor layer 210 (see FIG. 3E). For a material and a manufacturing method of the oxide semiconductor layer 210, refer to Embodiment 1.
Through the above-described steps, a thin film transistor 260 in which the oxide semiconductor layer 210 is used as a channel formation region can be formed.
Since the oxide semiconductor layer 210 functions as the channel formation region of the thin film transistor 260, the oxide semiconductor layer 210 is preferably formed so that its conductivity is equal to or lower than conductivity of the oxide semiconductor layer forming the first buffer layer 217a and the second buffer layer 217b. 
When the oxide semiconductor layer 210, the first buffer layer 217a, and the second buffer layer 217b are formed using In—Ga—Zn—O-based non-single-crystal films, and conductivity of the first buffer layer 217a and the second buffer layer 217b is higher than conductivity of the oxide semiconductor layer 210, formation conditions of the oxide semiconductor layer 217 (the first buffer layer 217a and the second buffer layer 217b) and the oxide semiconductor layer 210 may be different from each other. For example, when the oxide semiconductor layer 210 is formed, the ratio of a flow rate of an oxygen gas to a flow rate of an argon gas is higher than that when the oxide semiconductor layer 217 is formed. Specifically, the oxide semiconductor layer 210 can be formed under an oxygen atmosphere or an atmosphere in which the ratio of a flow rate of an oxygen gas to a flow rate of a noble gas is higher than or equal to 1.
In this embodiment, when the oxide semiconductor layer 210 is formed, the first buffer layer 217a and the second buffer layer 217b are provided over the source electrode layer 216a and the drain electrode layer 216b, respectively. Therefore, even when the oxide semiconductor layer 210 is formed under an atmosphere including a large amount of oxygen, formation of an oxide film on the surfaces of the source electrode layer 216a and the drain electrode layer 216b can be suppressed. As a result, contact resistance between the source electrode layer 216a and the oxide semiconductor layer 210 and between the drain electrode layer 216b and the oxide semiconductor layer 210 can be reduced.
In addition, after the oxide semiconductor layer 210 is formed, heat treatment is preferably performed at 200° C. to 600° C., typically, 300° C. to 500° C. Further, oxygen radical treatment may be performed on the exposed island-shaped oxide semiconductor layer 210. For the detailed description thereon, refer to Embodiment 1.
Then, various electrodes and wirings are formed, whereby a semiconductor device is completed.
Note that in this embodiment, the case is described in which the stack 218a and the stack 218b are formed, and then the surface treatment such as plasma treatment is performed; however, the number of times to perform the surface treatment is not limited to one. For example, in a process illustrated in FIGS. 3A to 3E, after the conductive layer 216 is formed over the gate insulating layer 204 and before the oxide semiconductor layer 217 is formed, the surface treatment may be performed on the conductive layer 216. This case will be described with reference to FIGS. 4A to 4E.
First, the gate electrode layer 202 is formed over the substrate 200, and then the gate insulating layer 204 and the conductive layer 216 are formed over the gate electrode layer 202. After that, surface treatment is performed on the conductive layer 216 (see FIG. 4A).
Here, plasma is generated in the chamber in which the substrate 200 is placed, and plasma 203 acts on the surface of the conductive layer 216 to modify the surface. Note that a method of the plasma treatment in FIG. 4A can be performed in a manner similar to that of the plasma treatment illustrated in either FIG. 1C or FIG. 3D.
Next, the oxide semiconductor layer 217 is formed over the conductive layer 216 (see FIG. 4B).
It is preferable that the plasma treatment and formation of the oxide semiconductor layer 217 be performed in the same chamber in succession. The oxide semiconductor layer 217 is formed without exposure of the surface of the conductive layer 216 after the plasma treatment to air, whereby attachment of impurities to or formation of an oxide film or the like on the surface of the conductive layer 216 can be suppressed.
The formation of the conductive layer 216, the plasma treatment, and the formation of the oxide semiconductor layer 217 may be performed in the same chamber in succession. The plasma treatment is performed without exposure of the conductive layer 216 to air and the oxide semiconductor layer 217 is formed, whereby attachment of impurities to or formation of an oxide film on the surface of the conductive layer 216 can be suppressed effectively and contact resistance between the conductive layer 216 and the oxide semiconductor layer 217 can be reduced.
Next, the conductive layer 216 and the oxide semiconductor layer 217 are selectively removed, and the stack 218a and the stack 218b are formed (see FIG. 4C). After that, surface treatment is performed on the surfaces of the gate insulating layer 204, the stack 218a, and the stack 218b (see FIG. 4D), and then the oxide semiconductor layer 210 is formed over the gate insulating layer 204, the stack 218a, and the stack 218b (see FIG. 4E).
Through the above-described steps, a thin film transistor 270 in which the oxide semiconductor layer 210 is used as the channel formation region can be formed.
In FIG. 4D, the case is described in which plasma is generated in the chamber in which the substrate 200 is placed, and the plasma 208 acts on the surfaces of the gate insulating layer 204, the stack 218a, and the stack 218b, whereby the surfaces are modified. Note that a method of the plasma treatment in FIG. 4D can be performed in a manner similar to that of the plasma treatment illustrated in FIG. 4A.
According to this embodiment, a semiconductor device having high characteristics can be provided at low cost. Note that this embodiment can be implemented in combination with any of the other embodiments, as appropriate.
Embodiment 3
In this embodiment, a manufacturing process of a display device that is an example of a usage pattern of a semiconductor device, which is one mode of the present invention, will be described with reference to drawings. Note that the manufacturing process described in this embodiment has a lot in common with that in Embodiment 1. Thus, description of the common portions is omitted, and differences are described in detail below. Note that in the following description, FIGS. 5A to 5D and FIGS. 6A to 6D are cross-sectional views, and FIG. 7, FIG. 8, FIG. 9, and FIG. 10 are top views.
First, a wiring and an electrode (a gate wiring including the gate electrode layer 202, a capacitor wiring 308, and a first terminal 321) are formed over the substrate 200 having an insulating surface (see FIG. 5A and FIG. 7).
The capacitor wiring 308 and the first terminal 321 can be formed using the same material as that of the gate electrode layer 202. For a material and a manufacturing method of the gate electrode layer 202, refer to Embodiment 1.
Next, the gate insulating layer 204 is formed over the gate electrode layer 202, and then a conductive layer 206 is formed over the gate insulating layer 204 (see FIG. 5B).
The conductive layer 206 can be formed by a sputtering method, a vacuum evaporation method, or the like using metal including an element selected from aluminum (Al), copper (Cu), titanium (Ti), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), neodymium (Nd), and scandium (Sc); an alloy including the above element as a component; or a material including nitride or the like in which the above element is a component.
For example, the conductive layer 206 can be formed to have a single-layer structure of a molybdenum film or a titanium film. The conductive layer 206 may be formed to have a stacked structure, for example, a stacked structure of an aluminum film and a titanium film. A three-layer structure in which a titanium film, an aluminum film, and a titanium film are sequentially stacked may be used. A three-layer structure in which a molybdenum film, an aluminum film, and a molybdenum film are sequentially stacked may be used. As the aluminum films used for these stacked structures, an aluminum film including neodymium (Al—Nd) may be used. The conductive layer 206 may have a single-layer structure of an aluminum film including silicon.
In FIG. 5B, after the gate insulating layer 204 is formed, a contact hole 313 is formed in the gate insulating layer 204. Then, the conductive layer 206 is formed, and thus the first terminal 321 and the conductive layer 206 are electrically connected to each other.
Next, the conductive layer 206 is etched by a photolithography method, whereby the source electrode layer 206a, the drain electrode layer 206b, a connection electrode 320, and a second terminal 322 are formed (see FIG. 5C and FIG. 8).
The second terminal 322 can be electrically connected to a source wiring (a source wiring including the source electrode layer 206a). The connection electrode 320 can be directly connected to the first terminal 321 through the contact hole 313 formed in the gate insulating layer 204.
Next, plasma treatment is performed on the surfaces of the gate insulating layer 204, the source electrode layer 206a, the drain electrode layer 206b, the connection electrode 320, and the second terminal 322 (see FIG. 5D). For a method of the plasma treatment, refer to Embodiment 1.
Next, the oxide semiconductor layer 209 is formed so as to cover the gate insulating layer 204, the source electrode layer 206a, the drain electrode layer 206b, the connection electrode 320, and the second terminal 322 (see FIG. 6A).
It is preferable that the plasma treatment and formation of the oxide semiconductor layer 209 be performed in the same chamber in succession. The plasma treatment and the formation of the oxide semiconductor layer 209 are performed in succession, whereby attachment of impurities to the surfaces of the gate insulating layer 204, the source electrode layer 206a, the drain electrode layer 206b, the connection electrode 320, and the second terminal 322 and formation of an oxide film or the like on the surfaces of the source electrode layer 206a, the drain electrode layer 206b, the connection electrode 320, and the second terminal 322 can be suppressed. For a material and a manufacturing method of the oxide semiconductor layer 209, refer to Embodiment 1.
Next, the oxide semiconductor layer 209 is selectively etched to form the island-shaped oxide semiconductor layer 210, and a thin film transistor 290 is formed (see FIG. 6B and FIG. 9).
Next, heat treatment is preferably performed at 100° C. to 600° C., typically, 200° C. to 400° C. For example, heat treatment is performed under a nitrogen atmosphere at 250° C. for one hour. By this heat treatment, rearrangement of the In—Ga—Zn—O-based non-single-crystal film forming the island-shaped oxide semiconductor layer 210 is performed at the atomic level. This heat treatment (including light annealing) is effective because distortion which hinders the transfer of carriers is reduced by this heat treatment. Note that the timing to perform the heat treatment is not particularly limited as long as it is after the formation of the oxide semiconductor layer 209, and for example, heat treatment may be performed after a pixel electrode is formed.
Further, oxygen radical treatment may be performed on the exposed island-shaped oxide semiconductor layer 210. When the oxygen radical treatment is performed, a thin film transistor in which the island-shaped oxide semiconductor layer 210 serves as a channel formation region can be a normally-off type. In addition, when radical treatment is performed, damage of the island-shaped oxide semiconductor layer 210 due to etching can be repaired. The radical treatment is preferably performed under an atmosphere of O2 or N2O, more preferably N2 including oxygen, He including oxygen, or Ar including oxygen. Further, the radical treatment may be performed under the above atmosphere to which Cl2 and/or CF4 are/is added.
Next, a protective insulating layer 340 covering the thin film transistor 290 is formed, and the protective insulating layer 340 is selectively etched, whereby a contact hole 325 which reaches the drain electrode layer 206b, a contact hole 326 which reaches the connection electrode 320, and a contact hole 327 which reaches the second terminal 322 are formed (see FIG. 6C).
Next, a transparent conductive layer 310 which is electrically connected to the drain electrode layer 206b, a transparent conductive layer 328 which is electrically connected to the connection electrode 320, and a transparent conductive layer 329 which is electrically connected to the second terminal 322 are formed (see FIG. 6D and FIG. 10).
The transparent conductive layer 310 functions as a pixel electrode, and the transparent conductive layers 328 and 329 serve as electrodes or wirings used for connection with an FPC. More specifically, the transparent conductive layer 328 formed over the connection electrode 320 can be used as a terminal electrode for connection which functions as an input terminal of a gate wiring, and the transparent conductive layer 329 formed over the second terminal 322 can be used as a terminal electrode for connection which functions as an input terminal of a source wiring.
In addition, a storage capacitor can be formed using the capacitor wiring 308, the gate insulating layer 204, the protective insulating layer 340, and the transparent conductive layer 310. In this case, the capacitor wiring 308 and the transparent conductive layer 310 each serve as an electrode, and the gate insulating layer 204 and the protective insulating layer 340 serve as a dielectric.
The transparent conductive layers 310, 328, and 329 can be formed using indium oxide (In2O3), an alloy of indium oxide and tin oxide (In2O3—SnO2, abbreviated to ITO), an alloy of indium oxide and zinc oxide (In2O3—ZnO), or the like by a sputtering method, a vacuum evaporation method, or the like. For example, a transparent conductive layer is formed, and then a resist mask is formed over the transparent conductive layer. Then, an unnecessary portion is removed by etching, whereby the transparent conductive layers 310, 328, and 329 can be formed.
Through the above-described steps, elements such as a bottom-gate n-channel thin film transistor and the storage capacitor can be completed. Then, these elements are arranged in matrix corresponding to pixels so that the substrate provided with these elements can be used as one substrate for forming an active matrix display device. In this specification, such a substrate is referred to as an active matrix substrate for convenience.
When an active matrix liquid crystal display device is manufactured, a liquid crystal layer may be provided between an active matrix substrate and a counter substrate provided with a counter electrode, and the active matrix substrate and the counter substrate may be fixed.
The structure described in this embodiment is not limited to the pixel structure illustrated in FIG. 10. An example of another structure is illustrated in FIG. 11. In FIG. 11, the capacitor wiring 308 is not provided, and a storage capacitor is formed using the transparent conductive layer 310 which functions as a pixel electrode and a gate wiring 302 of an adjacent pixel as electrodes and the protective insulating layer 340 and the gate insulating layer 204 as a dielectric.
Note that this embodiment can be implemented in combination with any of the other embodiments, as appropriate.
Embodiment 4
In this embodiment, the case where a semiconductor device (also referred to as a display device) having a display function in which thin film transistors are used for a pixel portion and a driver circuit is manufactured will be described as one mode of the present invention. In addition, part of a driver circuit manufactured using a thin film transistor or the entire driver circuit manufactured using a thin film transistor can be formed over the same substrate as a pixel portion, so that a system-on-panel can be manufactured.
The display device includes a display element. As the display element, a liquid crystal element (also referred to as a liquid crystal display element) or a light-emitting element (also referred to as a light-emitting display element) can be used. The light-emitting element refers to an element, luminance of which is controlled by a current or a voltage. Specifically, the light-emitting element refers to an inorganic EL (electroluminescence) element, an organic EL element, and the like. Further, a display medium whose contrast is changed by an electric effect, such as an electronic ink, can be used.
In addition, the display device includes a panel in which a display element is sealed, and a module in which an IC and the like including a controller are mounted on the panel. The display device relates to one mode of an element substrate before the display element is completed in a manufacturing process of the display device, and the element substrate is provided with a means for supplying a current to the display element in each of a plurality of pixels. Specifically, the element substrate may be in a state provided with only a pixel electrode of the display element, a state after a conductive layer to be a pixel electrode is formed and before the conductive layer is etched to form the pixel electrode, or other states.
A display device in this specification means an image display device, a display device, or a light source (including a lighting device). Further, the display device includes any of the following modules in its category: a module including a connector such as an flexible printed circuit (FPC), tape automated bonding (TAB) tape, or a tape carrier package (TCP); a module having TAB tape or a TCP which is provided with a printed wiring board at the end thereof; and a module having an integrated circuit (IC) which is directly mounted on a display element by a chip on glass (COG) method.
In this embodiment, an example of a liquid crystal display device is described as a semiconductor device which is one mode of the present invention. First, the appearance and a cross section of a liquid crystal display panel, which is one mode of the semiconductor device, is described with reference to FIGS. 12A1, 12A2, and 12B. FIGS. 12A1 and 12A2 are each a top view of a panel in which highly reliable thin film transistors 4010 and 4011 which include a semiconductor layer of an In—Ga—Zn—O-based non-single-crystal film, and a liquid crystal element 4013, which are formed over a first substrate 4001, are sealed between the first substrate 4001 and a second substrate 4006 with a sealing material 4505. FIG. 12B corresponds to a cross-sectional view of FIGS. 12A1 and 12A2 along line M-N.
A sealing material 4005 is provided so as to surround a pixel portion 4002 and a scan line driver circuit 4004 which are provided over the first substrate 4001. The second substrate 4006 is provided over the pixel portion 4002 and the scan line driver circuit 4004. Thus, the pixel portion 4002 and the scan line driver circuit 4004 as well as a liquid crystal layer 4008 are sealed with the sealing material 4005 between the first substrate 4001 and the second substrate 4006. A signal line driver circuit 4003 that is formed using a single crystal semiconductor film or a polycrystalline semiconductor film over a substrate which is prepared separately is mounted in a region that is different from the region surrounded by the sealing material 4005 over the first substrate 4001.
Note that a connection method of a driver circuit which is separately formed is not particularly limited, and a COG method, a wire bonding method, a TAB method, or the like can be used. FIG. 12A1 illustrates an example in which the signal line driver circuit 4003 is mounted by a COG method, and FIG. 12A2 illustrates an example in which the signal line driver circuit 4003 is mounted by a TAB method.
Each of the pixel portion 4002 and the scan line driver circuit 4004 which are provided over the first substrate 4001 includes a plurality of thin film transistors. FIG. 12B illustrates the thin film transistor 4010 included in the pixel portion 4002 and the thin film transistor 4011 included in the scan line driver circuit 4004. Insulating layers 4020 and 4021 are provided over the thin film transistors 4010 and 4011.
As the thin film transistors 4010 and 4011, highly reliable thin film transistors including an In—Ga—Zn—O-based non-single-crystal film as a semiconductor layer can be used. In this embodiment, the thin film transistors 4010 and 4011 are n-channel thin film transistors.
A pixel electrode layer 4030 included in the liquid crystal element 4013 is electrically connected to the thin film transistor 4010. A counter electrode layer 4031 of the liquid crystal element 4013 is formed on the second substrate 4006. A portion where the pixel electrode layer 4030, the counter electrode layer 4031, and the liquid crystal layer 4008 overlap corresponds to the liquid crystal element 4013. Note that the pixel electrode layer 4030 and the counter electrode layer 4031 are provided with insulating layers 4032 and 4033 which function as alignment films, respectively, and the liquid crystal layer 4008 is sandwiched between the pixel electrode layer 4030 and the counter electrode layer 4031 with the insulating layers 4032 and 4033 interposed between the liquid crystal layer 4008, and the pixel electrode layer 4030 and the counter electrode layer 4031.
Note that the first substrate 4001 and the second substrate 4006 can be formed using glass, metal (typically, stainless steel), ceramic, or plastic. As for plastic, a fiberglass-reinforced plastics (FRP) plate, a polyvinyl fluoride (PVF) film, a polyester film, or an acrylic resin film can be used. In addition, a sheet with a structure in which an aluminum foil is sandwiched between PVF films or polyester films can be used.
A columnar spacer 4035 which can be obtained in such a manner that an insulating layer is selectively etched is provided to control a distance (a cell gap) between the pixel electrode layer 4030 and the counter electrode layer 4031. Note that a spherical spacer may also be used. In addition, the counter electrode layer 4031 is electrically connected to a common potential line provided on the same substrate as the thin film transistor 4010. By use of a common connection portion, the counter electrode layer 4031 and the common potential line can be electrically connected to each other through conductive particles arranged between a pair of substrates. Note that the conductive particles are included in the sealing material 4005.
In addition, liquid crystal exhibiting a blue phase without the use of an alignment film may be used. The blue phase is one of liquid crystal phases and a phase which appears just before the transition from a cholesteric phase to an isotropic phase when the temperature of cholesteric liquid crystal is increased. Because the blue phase appears only in a small temperature range, a liquid crystal composition in which greater than or equal to 5 weight % of a chiral agent is mixed is used for the liquid crystal layer 4008 in order to improve the temperature range. The liquid crystal composition including liquid crystal exhibiting a blue phase and a chiral agent has a response speed as high as 10 μs to 100 μs and are optically isotropic; therefore, alignment treatment is unnecessary, and viewing angle dependence is small.
Note that the liquid crystal display device described in this embodiment is an example of a transmissive liquid crystal display device; however, the liquid crystal display device can be applied to either a reflective liquid crystal display device or a semi-transmissive liquid crystal display device.
An example of the liquid crystal display device described in this embodiment is illustrated in which a polarizing plate is provided on the outer surface of the substrate (on the viewer side) and a color layer and an electrode layer used for a display element are provided on the inner surface of the substrate in that order; however, the polarizing plate may be provided on the inner surface of the substrate. The stacked structure of the polarizing plate and the color layer is also not limited to that described in this embodiment and may be appropriately set depending on materials of the polarizing plate and the color layer or conditions of manufacturing steps. In addition, a light-blocking film which functions as a black matrix may be provided.
In this embodiment, in order to reduce surface unevenness of the thin film transistors and to improve reliability of the thin film transistors, the thin film transistors are covered with a protective layer or the insulating layers (the insulating layer 4020 and the insulating layer 4021) which function as planarizing insulating layers. Note that the protective layer is provided to prevent entry of a contaminant impurity such as an organic substance, a metal substance, or moisture floating in air and is preferably a dense film. As the protective layer, a single layer or a stacked layer of any of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, a silicon nitride oxide film, an aluminum oxide film, an aluminum nitride film, an aluminum oxynitride film, or an aluminum nitride oxide film may be formed by a sputtering method. In this embodiment, an example in which the protective layer is formed by a sputtering method is described; however, there is no particular limitation on a method, and various kinds of methods may be used.
Here, the insulating layer 4020 having a stacked structure is formed as the protective layer. Here, a silicon oxide film is formed by a sputtering method, as a first layer of the insulating layer 4020. When the silicon oxide film is used as the protective layer, the silicon oxide film has an effect of preventing a hillock of an aluminum film used as a source electrode layer and a drain electrode layer.
An insulating layer is formed as a second layer of the protective layer. Here, a silicon nitride film is formed by a sputtering method, as a second layer of the insulating layer 4020. The use of the silicon nitride film as the protective layer can prevent mobile ions of sodium or the like from entering a semiconductor region so that variation in electric characteristics of a TFT can be suppressed.
After the protective layer is formed, annealing (300° C. to 400° C.) of the semiconductor layer may be performed.
The insulating layer 4021 is formed as the planarizing insulating layer. An organic material having heat resistance, such as polyimide, acrylic, benzocyclobutene, polyamide, or epoxy can be used for the insulating layer 4021. In addition to such organic materials, it is also possible to use a low-dielectric constant material (a low-k material), a siloxane-based resin, phosphosilicate glass (PSG), borophosphosilicate glass (BPSG), or the like. Note that the insulating layer 4021 may be formed by stacking a plurality of insulating layers formed of these materials.
Note that a siloxane-based resin is a resin formed using a siloxane-based material as a starting material and having the bond of Si—O—Si. As for the siloxane-based resin, an organic group (e.g., an alkyl group or an aryl group) or a fluoro group may be used as a substituent. The organic group may include a fluoro group.
A method for forming the insulating layer 4021 is not particularly limited, and the following method can be used depending on the material of the insulating layer 4021: a sputtering method, an SOG method, a spin coating method, a dip coating method, a spray coating method, a droplet discharge method (e.g., an inkjet method, screen printing, or offset printing), a doctor knife, a roll coater, a curtain coater, a knife coater, or the like. When the insulating layer 4021 is formed using material liquid, annealing (300° C. to 400° C.) of the semiconductor layer may be performed in a baking step at the same time. A baking step of the insulating layer 4021 also serves as the annealing of the semiconductor layer, whereby a semiconductor device can be formed efficiently.
The pixel electrode layer 4030 and the counter electrode layer 4301 can be formed using a light-transmitting conductive material such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium tin oxide (hereinafter referred to as ITO), indium zinc oxide, or indium tin oxide to which silicon oxide is added.
A conductive composition including a conductive high molecule (also referred to as a conductive polymer) can be used for the pixel electrode layer 4030 and the counter electrode layer 4031. The pixel electrode formed using a conductive composition preferably has a light transmittance of greater than or equal to 70% at a wavelength of 550 nm. Further, the resistivity of the conductive polymer included in the conductive composition is preferably less than or equal to 0.1 Ω·cm.
As the conductive polymer, a so-called π-electron conjugated conductive polymer can be used. As examples thereof, polyaniline or a derivative thereof, polypyrrole or a derivative thereof, polythiophene or a derivative thereof, a copolymer of more than two kinds of them, and the like can be given.
Further, a variety of signals and potentials are supplied to the signal line driver circuit 4003 which is formed separately, the scan line driver circuit 4004, and the pixel portion 4002 from an FPC 4018.
In this embodiment, a connection terminal electrode 4015 is formed using the same conductive layer as the pixel electrode layer 4030 included in the liquid crystal element 4013. A terminal electrode 4016 is formed using the same conductive layer as the source and drain electrode layers included in the thin film transistors 4010 and 4011.
The connection terminal electrode 4015 is electrically connected to a terminal of the FPC 4018 through an anisotropic conductive film 4019.
FIGS. 12A1, 12A2, and 12B illustrate an example in which the signal line driver circuit 4003 is formed separately and mounted on the first substrate 4001, but this embodiment is not limited to this structure. The scan line driver circuit may be separately formed and then mounted, or only part of the signal line driver circuit or part of the scan line driver circuit may be separately formed and then mounted.
FIG. 13 illustrates an example in which a TFT substrate 2600 is used for a liquid crystal display module corresponding to one mode of a semiconductor device.
FIG. 13 illustrates an example of a liquid crystal display module, in which the TFT substrate 2600 and a counter substrate 2601 are fixed to each other with a sealing material 2602, and a pixel portion 2603 including a TFT and the like, a display element 2604 including a liquid crystal layer, and a color layer 2605 are provided between the substrates to form a display region. The color layer 2605 is necessary to perform a color display. In the case of the RGB system, color layers corresponding to colors of red, green, and blue are provided for corresponding pixels. A polarizing plate 2606 is provided on the outer side of the counter substrate 2601, while a polarizing plate 2607 and a diffusion plate 2613 are provided on the outer side of the TFT substrate 2600. A light source includes a cold cathode tube 2610 and a reflective plate 2611, and a circuit substrate 2612 is connected to a wiring circuit portion 2608 of the TFT substrate 2600 through a flexible wiring board 2609 and includes an external circuit such as a control circuit and a power supply circuit. The polarizing plate and the liquid crystal layer may be stacked with a retardation plate interposed therebetween.
For the liquid crystal display module, a twisted nematic (TN) mode, an In-Plane-Switching (IPS) mode, an fringe field switching (FFS) mode, a Multi-domain Vertical Alignment (MVA) mode, a patterned vertical alignment (PVA) mode, an Axially Symmetric aligned Micro-cell (ASM) mode, an optically compensated birefringence (OCB) mode, a ferroelectric liquid crystal (FLC) mode, an antiferroelectric liquid crystal (AFLC) mode, or the like can be used.
Through this process, a highly reliable liquid crystal display device as a semiconductor device can be manufactured.
This embodiment can be combined with any structure disclosed in other embodiments, as appropriate.
Embodiment 5
In this embodiment, electronic paper is described as an example of a semiconductor device which is one mode of the present invention.
FIG. 14 illustrates active matrix electronic paper as an example of the semiconductor device. A thin film transistor 581 used for the semiconductor device can be formed in a manner similar to the thin film transistor described in any of Embodiments 1 to 3.
The electronic paper in FIG. 14 is an example of a display device using a twisting ball display system. The twisting ball display system refers to a method in which spherical particles each colored in black and white are arranged between a first electrode layer and a second electrode layer which are used for a display element, and a potential difference is generated between the first electrode layer and the second electrode layer to control orientation of the spherical particles, so that display is performed.
The thin film transistor 581 provided over a substrate 580 is a thin film transistor having a bottom gate structure. A source electrode layer or a drain electrode layer is electrically connected to a first electrode layer 587 through a contact hole formed in insulating layers 583, 584, and 585. Between the first electrode layer 587 and a second electrode layer 588, spherical particles 589 each including a black region 590a and a white region 590b, and a cavity 594 filled with liquid around the black region 590a and the white region 590b are provided. The circumference of each of the spherical particles 589 is provided with a filler 595 such as a resin (see FIG. 14). In FIG. 14, the first electrode layer 587 corresponds to a pixel electrode, and the second electrode layer 588 corresponds to a common electrode. The second electrode layer 588 is electrically connected to a common potential line provided on the same substrate as the thin film transistor 581. A common connection portion described in the above embodiment is used, whereby the second electrode layer 588 provided on a substrate 596 and the common potential line can be electrically connected to each other through the conductive particles arranged between a pair of substrates.
Further, instead of the twist ball, an electrophoretic element can also be used. In that case, a microcapsule having a diameter of approximately 10 μm to 20 μm, in which transparent liquid, positively charged white microparticles, and negatively charged black microparticles are encapsulated, is used. In the microcapsule which is provided between the first electrode layer and the second electrode layer, when an electric field is applied by the first electrode layer and the second electrode layer, the white microparticles and black microparticles move to opposite sides from each other, so that white or black can be displayed. A display element using this principle is an electrophoretic display element, and is called electronic paper in general. The electrophoretic display element has higher reflectance than a liquid crystal display element, and thus, an assistant light is unnecessary, power consumption is low, and a display portion can be recognized in a dim place. In addition, even when power is not supplied to the display portion, an image which has been displayed once can be maintained. Accordingly, a displayed image can be stored even if a semiconductor device having a display function (which may be referred to simply as a display device or a semiconductor device provided with a display device) is distanced from an electric wave source.
In this manner, highly reliable electronic paper can be formed as a semiconductor device.
This embodiment can be combined with the structure disclosed in other embodiments, as appropriate.
Embodiment 6
In this embodiment, a light-emitting display device is described as an example of a semiconductor device which is one mode of the present invention. As a display element included in a display device, a light-emitting element utilizing electroluminescence is described here. Light-emitting elements utilizing electroluminescence are classified according to whether a light-emitting material is an organic compound or an inorganic compound. In general, the former is referred to as an organic EL element, the latter as an inorganic EL element.
In an organic EL element, by application of a voltage to a light-emitting element, electrons and holes are separately injected from a pair of electrodes into a layer containing a light-emitting organic compound, and a current flows. The electrons and holes (i.e., carriers) are recombined, and thus, the light-emitting organic compound is excited. The light-emitting organic compound returns to a ground state from the excited state, thereby emitting light. Owing to such a mechanism, such a light-emitting element is referred to as a current-excitation light-emitting element.
The inorganic EL elements are classified according to their element structures into a dispersion type inorganic EL element and a thin-film inorganic EL element. A dispersion type inorganic EL element has a light-emitting layer where particles of a light-emitting material are dispersed in a binder, and its light emission mechanism is donor-acceptor recombination type light emission that utilizes a donor level and an acceptor level. A thin-film inorganic EL element has a structure where a light-emitting layer is sandwiched between dielectric layers, which are further sandwiched between electrodes, and its light emission mechanism is localized type light emission that utilizes inner-shell electron transition of metal ions. Note that description is made here using an organic EL element as a light-emitting element.
FIG. 15 illustrates an example of a pixel structure to which digital time grayscale driving can be applied, as an example of a semiconductor device which is one mode of the present invention.
A structure and an operation of a pixel to which digital time grayscale driving can be applied are described. Here, an example is described in which two n-channel transistors using an oxide semiconductor layer (In—Ga—Zn—O-based non-single-crystal film) for a channel formation region are used in one pixel.
A pixel 6400 includes a switching transistor 6401, a driving transistor 6402, a light-emitting element 6404, and a capacitor 6403. A gate of the switching transistor 6401 is connected to a scan line 6406, a first electrode (one of a source electrode and a drain electrode) of the switching transistor 6401 is connected to a signal line 6405, and a second electrode (the other of the source electrode and the drain electrode) of the switching transistor 6401 is connected to a gate of the driving transistor 6402. The gate of the driving transistor 6402 is connected to a power supply line 6407 through the capacitor 6403, a first electrode of the driving transistor 6402 is connected to the power supply line 6407, and a second electrode of the driving transistor 6402 is connected to a first electrode (pixel electrode) of the light-emitting element 6404. A second electrode of the light-emitting element 6404 corresponds to a common electrode 6408.
The second electrode of the light-emitting element 6404 (the common electrode 6408) is set to a low power supply potential. The low power supply potential is a potential satisfying the low power supply potential<a high power supply potential with the high power supply potential set to the power supply line 6407 as a reference. As the low power supply potential, GND, 0 V, or the like may be employed, for example. A potential difference between the high power supply potential and the low power supply potential is applied to the light-emitting element 6404, and a current is supplied to the light-emitting element 6404. Here, in order to make the light-emitting element 6404 emit light, each potential is set so that the potential difference between the high power supply potential and the low power supply potential is a forward threshold voltage or higher.
Gate capacitance of the driving transistor 6402 may be used as a substitute for the capacitor 6403, so that the capacitor 6403 can be omitted. The gate capacitance of the driving transistor 6402 may be formed between a channel formation region and the gate electrode layer.
In the case of using a voltage-input voltage driving method, a video signal is input to the gate of the driving transistor 6402 to make the driving transistor 6402 completely turn on or off. That is, the driving transistor 6402 operates in a linear region, and thus, a voltage higher than the voltage of the power supply line 6407 is applied to the gate of the driving transistor 6402. Note that a voltage higher than or equal to (power supply line voltage+Vth of the driving transistor 6402) is applied to the signal line 6405.
In the case of using an analog grayscale method instead of the digital time grayscale method, the same pixel structure as in FIG. 15 can be employed by inputting signals in a different way.
In the case of using the analog grayscale method, a voltage higher than or equal to (forward voltage of the light-emitting element 6404+Vth of the driving transistor 6402) is applied to the gate of the driving transistor 6402. The forward voltage of the light-emitting element 6404 refers to a voltage to obtain a desired luminance, and includes at least a forward threshold voltage. By inputting a video signal to allow the driving transistor 6402 to operate in a saturation region, a current can flow in the light-emitting element 6404. In order to allow the driving transistor 6402 to operate in the saturation region, the potential of the power supply line 6407 is higher than a gate potential of the driving transistor 6402. Since the video signal is an analog signal, a current in accordance with the video signal flows in the light-emitting element 6404, and the analog grayscale method can be performed.
Note that the pixel structure is not limited to that illustrated in FIG. 15. For example, the pixel illustrated in FIG. 15 can further include a switch, a resistor, a capacitor, a transistor, a logic circuit, or the like.
Next, structures of the light-emitting element will be described with reference to FIGS. 16A to 16C. A cross-sectional structure of a pixel will be described by taking an n-channel driving TFT as an example. Driving TFTs 7001, 7011, and 7021 used for semiconductor devices illustrated in FIGS. 16A to 16C can be manufactured in a manner similar to the thin film transistor described in the above embodiment and are highly reliable thin film transistors each including an In—Ga—Zn—O-based non-single-crystal film.
In order to extract light emitted from the light-emitting element, at least one of an anode and a cathode is required to transmit light. A thin film transistor and a light-emitting element are formed over a substrate. A light-emitting element can have a top emission structure in which light is extracted through the surface opposite to the substrate; a bottom emission structure in which light is extracted through the surface on the substrate side; or a dual emission structure in which light is extracted through the surface opposite to the substrate and the surface on the substrate side. The pixel structure can be applied to a light-emitting element having any of these emission structures.
A light-emitting element having a top emission structure will be described with reference to FIG. 16A.
FIG. 16A is a cross-sectional view of a pixel in the case where the driving TFT 7001 is of an n-type and light is emitted from a light-emitting element 7002 to an anode 7005 side. In FIG. 16A, a cathode 7003 of the light-emitting element 7002 is electrically connected to the driving TFT 7001, and a light-emitting layer 7004 and the anode 7005 are sequentially stacked over the cathode 7003. The cathode 7003 can be made of a variety of conductive materials as long as they have a low work function and reflect light. For example, Ca, Al, MgAg, AlLi, or the like is preferably used. The light-emitting layer 7004 may be formed using a single layer or a plurality of layers stacked. When the light-emitting layer 7004 is formed using a plurality of layers, the light-emitting layer 7004 is formed by sequentially stacking an electron-injecting layer, an electron-transporting layer, a light-emitting layer, a hole-transporting layer, and a hole-injecting layer over the cathode 7003. Not all of these layers need to be provided. The anode 7005 is made of a light-transmitting conductive material such as indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, indium tin oxide (hereinafter referred to as ITO), indium zinc oxide, or indium tin oxide to which silicon oxide is added.
The light-emitting element 7002 corresponds to a region where the cathode 7003 and the anode 7005 sandwich the light-emitting layer 7004. In the case of the pixel illustrated in FIG. 16A, light is emitted from the light-emitting element 7002 to the anode 7005 side as indicated by an arrow.
Next, a light-emitting element having a bottom emission structure will be described with reference to FIG. 16B. FIG. 16B is a cross-sectional view of a pixel in the case where the driving TFT 7011 is of an n-type and light is emitted from a light-emitting element 7012 to a cathode 7013 side. In FIG. 16B, the cathode 7013 of the light-emitting element 7012 is formed over a light-transmitting conductive layer 7017 which is electrically connected to the driving TFT 7011, and a light-emitting layer 7014 and an anode 7015 are sequentially stacked over the cathode 7013. A light-blocking film 7016 for reflecting or blocking light may be formed to cover the anode 7015 when the anode 7015 has a light-transmitting property. For the cathode 7013, various materials can be used, like in the case of FIG. 16A, as long as they are conductive materials having a low work function. Note that the cathode 7013 is formed to have a thickness that can transmit light (preferably, approximately 5 nm to 30 nm). For example, an aluminum film having a thickness of 20 nm can be used as the cathode 7013. Similarly to the case of FIG. 16A, the light-emitting layer 7014 may be formed using either a single layer or a plurality of layers stacked. The anode 7015 is not required to transmit light, but can be made of a light-transmitting conductive material like in the case of FIG. 16A. As the light-blocking film 7016, metal or the like which reflects light can be used for example; however, it is not limited to a metal film. For example, a resin or the like to which black pigments are added can also be used.
The light-emitting element 7012 corresponds to a region where the cathode 7013 and the anode 7015 sandwich the light-emitting layer 7014. In the case of the pixel illustrated in FIG. 16B, light is emitted from the light-emitting element 7012 to the cathode 7013 side as indicated by an arrow.
Next, a light-emitting element having a dual emission structure will be described with reference to FIG. 16C. In FIG. 16C, a cathode 7023 of a light-emitting element 7022 is formed over a light-transmitting conductive layer 7027 which is electrically connected to the driving TFT 7021, and a light-emitting layer 7024 and an anode 7025 are sequentially stacked over the cathode 7023. Like in the case of FIG. 16A, the cathode 7023 can be made of a variety of conductive materials as long as they have a low work function. Note that the cathode 7023 is formed to have a thickness that can transmit light. For example, a film of Al having a thickness of 20 nm can be used as the cathode 7023. Like in FIG. 16A, the light-emitting layer 7024 may be formed using either a single layer or a plurality of layers stacked. The anode 7025 can be made of a light-transmitting conductive material like in the case of FIG. 16A.
The light-emitting element 7022 corresponds to a portion where the cathode 7023, the light-emitting layer 7024, and the anode 7025 overlap with one another. In the case of the pixel illustrated in FIG. 16C, light is emitted from the light-emitting element 7022 to both the anode 7025 side and the cathode 7023 side as indicated by arrows.
Although an organic EL element is described here as a light-emitting element, an inorganic EL element can also be provided as a light-emitting element.
In this embodiment, the example is described in which a thin film transistor (a driving TFT) which controls the driving of a light-emitting element is electrically connected to the light-emitting element; however, a structure may be employed in which a TFT for current control is connected between the driving TFT and the light-emitting element.
The structure of the semiconductor device described in this embodiment is not limited to those illustrated in FIGS. 16A to 16C and can be modified in various ways.
Next, the appearance and cross section of a light-emitting display panel (also referred to as a light-emitting panel) which corresponds to one embodiment of the semiconductor device will be described with reference to FIGS. 17A and 17B. FIG. 17A is a top view of a panel in which highly reliable thin film transistors 4509 and 4510 in which an In—Ga—Zn—O-based non-single-crystal film is included as a semiconductor layer, which are formed over a first substrate 4501 and a light-emitting element 4511 are sealed between the first substrate 4501 and a second substrate 4506 with the sealing material 4505. FIG. 17B corresponds to a cross-sectional view taken along line H-I of FIG. 17A.
The sealing material 4505 is provided to surround a pixel portion 4502, signal line driver circuits 4503a and 4503b, and scan line driver circuits 4504a and 4504b, which are provided over the first substrate 4501. In addition, the second substrate 4506 is provided over the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b. Accordingly, the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b are sealed together with a filler 4507, by the first substrate 4501, the sealing material 4505, and the second substrate 4506. It is preferable that packaging (sealing) be performed with a protective layer (e.g., an attachment film or an ultraviolet curable resin film) which has high airtightness and causes less degasification, or a covering material, in order to prevent further exposure to the outside air.
The pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b which are formed over the first substrate 4501 each include a plurality of thin film transistors, and the thin film transistor 4510 included in the pixel portion 4502 and the thin film transistor 4509 included in the signal line driver circuit 4503a are illustrated as an example in FIG. 17B.
As the thin film transistors 4509 and 4510, the highly reliable thin film transistor which includes an In—Ga—Zn—O-based non-single-crystal film as a semiconductor layer, can be employed. In this embodiment, the thin film transistors 4509 and 4510 are n-channel thin film transistors.
Moreover, reference numeral 4511 denotes a light-emitting element. A first electrode layer 4517 that is a pixel electrode included in the light-emitting element 4511 is electrically connected to a source electrode layer or drain electrode layer of the thin film transistor 4510. Note that a structure of the light-emitting element 4511 is not limited to the stacked structure described in this embodiment, which includes the first electrode layer 4517, an electroluminescent layer 4512, and a second electrode layer 4513. The structure of the light-emitting element 4511 can be changed as appropriate depending on the direction in which light is extracted from the light-emitting element 4511, or the like.
A partition wall 4520 is made of an organic resin layer, an inorganic insulating layer, or organic polysiloxane. It is particularly preferable that the partition wall 4520 be formed of a photosensitive material to have an opening over the first electrode layer 4517 so that a sidewall of the opening is formed as an inclined surface with continuous curvature.
The electroluminescent layer 4512 may be formed using a single layer or a plurality of layers stacked.
A protective layer may be formed over the second electrode layer 4513 and the partition wall 4520 in order to prevent oxygen, hydrogen, moisture, carbon dioxide, or the like from entering into the light-emitting element 4511. As the protective layer, a silicon nitride film, a silicon nitride oxide film, a DLC film, or the like can be formed.
A variety of signals and potentials are supplied to the signal line driver circuits 4503a and 4503b, the scan line driver circuits 4504a and 4504b, or the pixel portion 4502 from FPCs 4518a and 4518b. 
In this embodiment, a connection terminal electrode 4515 is formed using the same conductive layer as the first electrode layer 4517 included in the light-emitting element 4511, and a terminal electrode 4516 is formed using the same conductive layer as the source and drain electrode layers included in the thin film transistors 4509 and 4510.
The connection terminal electrode 4515 is electrically connected to a terminal of the FPC 4518a through an anisotropic conductive film 4519.
The second substrate 4506 located in the direction in which light is extracted from the light-emitting element 4511 needs to have a light-transmitting property. In that case, a light-transmitting material such as a glass plate, a plastic plate, a polyester film, or an acrylic film is used.
As the filler 4507, an ultraviolet curable resin or a thermosetting resin can be used, in addition to an inert gas such as nitrogen or argon. For example, polyvinyl chloride (PVC), acrylic, polyimide, an epoxy resin, a silicone resin, polyvinyl butyral (PVB), or ethylene vinyl acetate (EVA) can be used. In this embodiment, nitrogen is used for the filler 4507.
If needed, an optical film, such as a polarizing plate, a circularly polarizing plate (including an elliptically polarizing plate), a retardation plate (a quarter-wave plate or a half-wave plate), or a color filter, may be provided as appropriate on a light-emitting surface of the light-emitting element. Furthermore, the polarizing plate or the circularly polarizing plate may be provided with an anti-reflection film. For example, anti-glare treatment by which reflected light can be diffused by projections and depressions on the surface so as to reduce the glare can be performed.
The signal line driver circuits 4503a and 4503b and the scan line driver circuits 4504a and 4504b may be mounted as driver circuits formed using a single crystal semiconductor film or a polycrystalline semiconductor film over a substrate separately prepared. Alternatively, only the signal line driver circuits or part thereof, or only the scan line driver circuits or part thereof may be separately formed and mounted. This embodiment is not limited to the structure illustrated in FIGS. 17A and 17B.
Through the above process, a highly reliable light-emitting display device (display panel) as a semiconductor device can be manufactured.
This embodiment can be combined with the structure disclosed in other embodiments, as appropriate.
Embodiment 7
A semiconductor device of one embodiment of the present invention can be applied to electronic paper. The electronic paper can be used for electronic devices in a variety of fields as long as they can display data. For example, the electronic paper can be applied to an e-book reader (electronic book), a poster, an advertisement in a vehicle such as a train, or displays of various cards such as a credit card. Examples of the electronic devices are illustrated in FIGS. 18A and 18B and FIG. 19.
FIG. 18A illustrates a poster 2631 using electronic paper. In the case where an advertising medium is printed paper, the advertisement is replaced by hands; however, by using the electronic paper, the advertising display can be changed in a short time. Furthermore, stable images can be obtained without display defects. Note that the poster may have a structure capable of wirelessly transmitting and receiving data.
FIG. 18B illustrates an advertisement 2632 in a vehicle such as a train. In the case where an advertising medium is printed paper, the advertisement is replaced by hands; however, by using electronic paper, the advertising display can be changed in a short time with less manpower. Furthermore, stable images can be obtained without display defects. Note that the advertisement in a vehicle may have a structure capable of wirelessly transmitting and receiving data.
FIG. 19 illustrates an example of an e-book reader 2700. For example, the e-book reader 2700 includes two housings, a housing 2701 and a housing 2703. The housing 2701 and the housing 2703 are combined with a hinge 2711 so that the e-book reader 2700 can be opened and closed with the hinge 2711 as an axis. With such a structure, the e-book reader 2700 can be operated like a paper book.
A display portion 2705 and a display portion 2707 are incorporated in the housing 2701 and the housing 2703, respectively. The display portion 2705 and the display portion 2707 may display one image or different images. In the case where the display portion 2705 and the display portion 2707 display different images, for example, text can be displayed on a display portion on the right side (the display portion 2705 in FIG. 19) and graphics can be displayed on a display portion on the left side (the display portion 2707 in FIG. 19).
FIG. 19 illustrates an example in which the housing 2701 is provided with an operation portion and the like. For example, the housing 2701 is provided with a power switch 2721, an operation key 2723, a speaker 2725, and the like. With the operation key 2723, pages can be turned. Note that a keyboard, a pointing device, and the like may be provided on the same surface as the display portion of the housing. Furthermore, an external connection terminal (an earphone terminal, a USB terminal, a terminal that can be connected to various cables such as an AC adapter and a USB cable, or the like), a recording medium insertion portion, and the like may be provided on the back surface or the side surface of the housing. Moreover, the e-book reader 2700 may have a function of an electronic dictionary.
The e-book reader 2700 may have a structure capable of wirelessly transmitting and receiving data. Through wireless communication, desired book data or the like can be purchased and downloaded from an e-book server.
Embodiment 8
A semiconductor device of one mode of the present invention can be applied to a variety of electronic devices (including an amusement machine). Examples of electronic devices are a television set (also referred to as a television or a television receiver), a monitor of a computer or the like, a camera such as a digital camera or a digital video camera, a digital photo frame, a cellular phone (also referred to as a mobile phone or a mobile phone set), a portable game console, a portable information terminal, an audio reproducing device, a large-sized game machine such as a pachinko machine, and the like.
FIG. 20A illustrates an example of a television set 9600. In the television set 9600, a display portion 9603 is incorporated in a housing 9601. Images can be displayed on the display portion 9603. Here, the housing 9601 is supported by a stand 9605.
The television set 9600 can be operated by an operation switch of the housing 9601 or a separate remote controller 9610. Channels and volume can be controlled by an operation key 9609 of the remote controller 9610 so that an image displayed on the display portion 9603 can be controlled. Furthermore, the remote controller 9610 may be provided with a display portion 9607 for displaying data output from the remote controller 9610.
Note that the television set 9600 is provided with a receiver, a modem, and the like. With the receiver, a general television broadcast can be received. Furthermore, when the television set 9600 is connected to a communication network by wired or wireless connection via the modem, one-way (from a transmitter to a receiver) or two-way (between a transmitter and a receiver, between receivers, or the like) data communication can be performed.
FIG. 20B illustrates an example of a digital photo frame 9700. For example, in the digital photo frame 9700, a display portion 9703 is incorporated in a housing 9701. Various images can be displayed on the display portion 9703. For example, the display portion 9703 can display data of an image shot by a digital camera or the like to function as a normal photo frame.
Note that the digital photo frame 9700 is provided with an operation portion, an external connection portion (a USB terminal, a terminal that can be connected to various cables such as a USB cable, or the like), a recording medium insertion portion, and the like. Although they may be provided on the same surface as the display portion, it is preferable to provide them on the side surface or the back surface for the design of the digital photo frame 9700. For example, a memory storing data of an image shot by a digital camera is inserted in the recording medium insertion portion of the digital photo frame, whereby the image data can be downloaded and displayed on the display portion 9703.
The digital photo frame 9700 may have a structure capable of wirelessly transmitting and receiving data. Through wireless communication, desired image data can be downloaded to be displayed.
FIG. 21A is a portable amusement machine including two housings, a housing 9881 and a housing 9891. The housings 9881 and 9891 are connected with a connection portion 9893 so as to be opened and closed. A display portion 9882 and a display portion 9883 are incorporated in the housing 9881 and the housing 9891, respectively. In addition, the portable amusement machine illustrated in FIG. 21A includes a speaker portion 9884, a recording medium insertion portion 9886, an LED lamp 9890, an input means (an operation key 9885, a connection terminal 9887, a sensor 9888 (a sensor having a function of measuring force, displacement, position, speed, acceleration, angular velocity, rotational frequency, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, electric power, radiation, flow rate, humidity, gradient, oscillation, odor, or infrared rays), or a microphone 9889), and the like. It is needless to say that the structure of the portable amusement machine is not limited to the above and other structures provided with at least a semiconductor device may be employed. The portable amusement machine may include other accessory equipment, as appropriate. The portable amusement machine illustrated in FIG. 21A has a function of reading a program or data stored in a recording medium to display it on the display portion, and a function of sharing information with another portable amusement machine by wireless communication. The portable amusement machine illustrated in FIG. 21A can have various functions without limitation to the above.
FIG. 21B illustrates an example of a slot machine 9900 which is a large-sized amusement machine. In the slot machine 9900, a display portion 9903 is incorporated in a housing 9901. In addition, the slot machine 9900 includes an operation means such as a start lever or a stop switch, a coin slot, a speaker, and the like. It is needless to say that the structure of the slot machine 9900 is not limited to the above and other structures provided with at least a semiconductor device may be employed. The slot machine 9900 may include other accessory equipment, as appropriate.
FIG. 22A illustrates an example of a cellular phone 1000. The cellular phone 1000 is provided with a display portion 1002 incorporated in a housing 1001, an operation button 1003, an external connection port 1004, a speaker 1005, a microphone 1006, and the like.
When the display portion 1002 of the cellular phone 1000 illustrated in FIG. 22A is touched with a finger or the like, data can be input into the cellular phone 1000. Furthermore, operations such as making calls and composing mails can be performed by touching the display portion 1002 with a finger or the like.
There are mainly three screen modes of the display portion 1002. The first mode is a display mode mainly for displaying images. The second mode is an input mode mainly for inputting data such as text. The third mode is a display-and-input mode in which two modes of the display mode and the input mode are combined.
For example, in the case of making a call or composing a mail, a text input mode mainly for inputting text is selected for the display portion 1002 so that text displayed on a screen can be input. In that case, it is preferable to display a keyboard or number buttons on almost all the area of the screen of the display portion 1002.
When a detection device including a sensor for detecting inclination, such as a gyroscope or an acceleration sensor, is provided inside the cellular phone 1000, display on the screen of the display portion 1002 can be automatically switched by determining the direction of the cellular phone 1000 (whether the cellular phone 1000 is placed horizontally or vertically for a landscape mode or a portrait mode).
The screen mode is switched by touching the display portion 1002 or operating the operation buttons 1003 of the housing 1001. Alternatively, the screen mode may be switched depending on the kind of images displayed on the display portion 1002. For example, when a signal of an image displayed on the display portion is of moving image data, the screen mode is switched to the display mode. When the signal is of text data, the screen mode is switched to the input mode.
Furthermore, in the input mode, when input by touching the display portion 1002 is not performed for a certain period while a signal is detected by the optical sensor in the display portion 1002, the screen mode may be controlled so as to be switched from the input mode to the display mode.
The display portion 1002 may function as an image sensor. For example, an image of a palm print, a fingerprint, or the like is taken by touching the display portion 1002 with the palm or the finger, whereby personal authentication can be performed. Furthermore, by providing a backlight or sensing light source emitting a near-infrared light for the display portion, an image of a finger vein, a palm vein, or the like can also be taken.
FIG. 22B also illustrates an example of a cellular phone. The cellular phone illustrated in FIG. 22B has a display device 9410 including a display portion 9412 and operation buttons 9413 in a housing 9411 and a communication device 9400 including operation buttons 9402, an external input terminal 9403, a microphone 9404, a speaker 9405, and a light-emitting portion 9406 which emits light when receiving a call in a housing 9401. The display device 9410 having a display function can be detached from or attached to the communication device 9400 having a telephone function in two directions indicated by the arrows. Accordingly, the display device 9410 and the communication device 9400 can be attached to each other along their short sides or long sides. In addition, in a case where only the display function is needed, the display device 9410 is detached from the communication device 9400 so that the display device 9410 can be used by itself. The communication device 9400 and the display device 9410 are capable of sending and receiving images or input data by a wireless communication or wired communication. The communication device 9400 and the display device 9410 each have a rechargeable battery.
Example 1
In this example, characteristics of a thin film transistor which is formed using an oxide semiconductor layer that is formed after plasma treatment will be described.
A method for manufacturing the transistor used in this example is described below.
First, after a first conductive layer was formed over a substrate 500, the first conductive layer was patterned by a photolithography method, whereby a gate electrode layer 502 was formed. Then, a gate insulating layer 504 was formed over the gate electrode layer 502 (see FIG. 23A). Next, a second conductive layer was formed over the gate insulating layer 504, and then the second conductive layer was patterned by a photolithography method, whereby a source electrode layer 506a and a drain electrode layer 506b part of which overlapped with the gate electrode layer were formed (see FIG. 23B). Then, plasma treatment by which plasma 508 acted on surfaces of the gate insulating layer 504, the source electrode layer 506a, and the drain electrode layer 506b was performed (see FIG. 23C). After an oxide semiconductor layer was formed over the gate insulating layer, the source electrode layer, and the drain electrode layer, the oxide semiconductor layer was patterned by a photolithography method, whereby an island-shaped oxide semiconductor layer 510 which functioned as a channel formation region was formed (see FIG. 23D). Then, heat treatment was performed under a nitrogen atmosphere at 350° C. for one hour. In this manner, a transistor 550 which was used in this example was formed (see FIG. 23E).
As the substrate 500, a glass substrate manufactured by Asahi Glass Co., Ltd. (product name: AN 100) was used.
As the first conductive layer to be the gate electrode layer 502, a tungsten film having a thickness of 100 nm was formed by a sputtering method.
As the gate insulating layer 504, a silicon oxynitride film having a thickness of 100 nm was formed by a plasma-enhanced CVD method.
As the second conductive layer to be the source electrode layer 506a and the drain electrode layer 506b, a tungsten film having a thickness of 100 nm was formed by a sputtering method.
As the oxide semiconductor layer, an In—Ga—Zn—O-based non-single-crystal film having a thickness of 150 nm was formed by a sputtering method. The formation condition was as follows. The pressure was 0.4 Pa, the power was 500 W, the film formation temperature was 25° C., the argon gas flow rate was 10 sccm, the oxygen flow rate was 5 sccm, and the distance between a glass substrate and a target was 170 mm, and a direct current (DC) was applied. As the target, a target in which In2O3:Ga2O3:ZnO=1:1:1 (In:Ga:Zn=1:1:0.5) was used. After the plasma treatment was performed, the oxide semiconductor layer was formed without exposure of the substrate 500 to air in succession. Note that the composition of the oxide semiconductor layer obtained under this formation condition was measured by inductively coupled plasma mass spectrometry (ICP-MS analysis method) and found to be InGa0.94Zn0.40O3.31.
The plasma treatment was performed with a sputtering apparatus. Specifically, the substrate 500 was provided over a first electrode in a chamber, and a high frequency voltage was applied to the first electrode, whereby the plasma 508 was generated between the first electrode and a second electrode. A negative self-bias was generated on the first electrode (the substrate 500) side, and cations in the plasma were accelerated to collide with the substrate 500. As a condition of the plasma treatment, the pressure was 0.4 Pa, and the power was 200 W (13.56 MHz). In this example, argon and/or oxygen were/was used as a gas to be introduced, and the flow rate of argon and the flow rate of oxygen were set to the following conditions. Samples obtained under the following conditions are referred to as Samples A to D, and element characteristic of the transistor were measured. Note that Samples A to D were formed under similar conditions except for the condition of the flow rates of the gases used in the plasma treatment.
(Sample A)
Ar gas flow rate: 10 sccm
Oxygen gas flow rate: 0 sccm
(Sample B)
Ar gas flow rate: 9 sccm
Oxygen gas flow rate: 1 sccm
(Sample C)
Ar gas flow rate: 5 sccm
Oxygen gas flow rate: 5 sccm
(Sample D)
Ar gas flow rate: 0 sccm
Oxygen gas flow rate: 10 sccm
For comparison, Sample E on which plasma treatment was not performed was formed, and transistor characteristics of Sample E were measured.
FIG. 24 illustrates the field-effect mobility that is an index of the operation speed and a Vg-Id curve showing a change of a current (hereinafter referred to as a drain current or Id) flowing between a source and a drain with respect to a change of a voltage (hereinafter referred to as a gate voltage or Vg) between the source and a gate of each of the thin film transistors according to Samples A to E. In FIG. 24, drain currents of Samples A, B, C, D, and E are denoted by drain currents 10001a, 10002a, 10003a, 10004a, and 10005a, respectively, and field-effect mobilities of Samples A, B, C, D, and E are denoted by field-effect mobilities 10001b, 10002b, 10003b, 10004b, and 10005b, respectively. Note that in this example, the transistors were measured under the condition where a drain voltage (voltage between the source and the drain) was set to 1 V.
In this example, structures of the transistors according to Samples A to E were formed as illustrated in FIG. 25. Specifically, in each transistor, the channel length L was 100 μm, the channel width W was 100 μm, the overlap length Ls between the drain electrode layer 506a and the gate electrode layer 502 was 5 μm, the overlap length Ld between the drain electrode layer 506b and the gate electrode layer 502 was 5 μm, and each length A of a region where the oxide semiconductor layer 510 does not overlap with the source electrode layer 506a and the drain electrode layer 506b in a direction parallel to the channel width direction was 5 μm.
It is found from the result of FIG. 24 that the transistors (Samples A to D) on which sputtering treatment was performed each have a higher on-current (in the case of an n-channel transistor, the on-current is generally a drain current when Vg is in a positive region around 0 V (including some negative values)), compared with the transistor (Sample E) on which sputtering treatment was not performed. On the other hand, as for an off-current of the transistors (in the case of an n-channel transistor, the off-current is generally a drain current when Vg is in a negative region around 0 V (including some positive values)), a large difference was not observed in Samples A to E. Accordingly, the ratio (the on/off ratio) of an on-current and off-current of the transistors can be increased by the plasma treatment. It was found that, when an argon gas is used as a gas in the plasma treatment and the percentage of a flow rate of an argon gas is increased, an on-current can be increased, and particularly in the case where only an argon gas is introduced without an oxygen gas being introduced, a high on-current is obtained.
In addition, it was confirmed that the maximum field-effect mobility of each of the transistors (Sample A to D) on which the sputtering treatment was performed was higher than that of the transistor (Sample E) on which the sputtering treatment was not performed. Further, it was found that, when an argon gas is used as a gas in the plasma treatment and the percentage of a flow rate of an argon gas is increased, the field-effect mobility can be increased, and particularly in the case where only an argon gas is introduced without an oxygen gas being introduced, the high field-effect mobility is obtained.
As described above, it was found by plasma treatment performed before an oxide semiconductor layer is formed, the on/off ratio of a transistor can be increased and the field-effect mobility can be increased. Further, it was found that, when an argon gas is used as a gas in the plasma treatment and the percentage of a flow rate of an argon gas is increased, the on/off ratio of the transistor can be increased and the field-effect mobility can be increased.
This application is based on Japanese Patent Application serial No. 2008-286569 filed with Japan Patent Office on Nov. 7, 2008, the entire contents of which are hereby incorporated by reference.

## Claims

1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
forming an oxide semiconductor layer over the conductive layer; and
performing a plasma treatment on a surface of the oxide semiconductor layer, in a chamber into which oxygen is introduced,
wherein the oxide semiconductor layer is formed by a sputtering method in the chamber into which a mixture atmosphere of argon and oxygen is introduced.

2. The method for manufacturing a semiconductor device, according to claim 1, wherein the oxide semiconductor layer is formed by the sputtering method in which a target including indium, gallium, and zinc is used.

3. The method for manufacturing a semiconductor device according to claim 1, wherein the plasma treatment and the formation of the oxide semiconductor layer are performed in the chamber in succession.

4. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
forming an oxide semiconductor layer over the conductive layer; and
performing a plasma treatment on a surface of the oxide semiconductor layer, in a chamber into which oxygen is introduced
wherein the oxide semiconductor layer is formed by a sputtering method at 20° C. or higher.

5. The method for manufacturing a semiconductor device, according to claim 4, wherein the oxide semiconductor layer is formed by the sputtering method in which a target including indium, gallium, and zinc is used.

6. The method for manufacturing a semiconductor device according to claim 4, wherein the plasma treatment and the formation of the oxide semiconductor layer are performed in the chamber in succession.

7. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
forming a first oxide semiconductor layer over the conductive layer;
forming a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked by etching the conductive layer and the first oxide semiconductor layer;
performing a plasma treatment on surfaces of the gate insulating layer, the first stack, and the second stack which are formed over the substrate in a chamber into which an inert gas is introduced; and
forming a second oxide semiconductor layer over the gate insulating layer, the first stack, and the second stack after the plasma treatment is performed,
wherein the first and the second oxide semiconductor layers are formed by a sputtering method in the chamber into which a mixture atmosphere of argon and oxygen is introduced.

8. The method for manufacturing a semiconductor device, according to claim 7, wherein the first and the second oxide semiconductor layers are formed by the sputtering method in which a target including indium, gallium, and zinc is used.

9. The method for manufacturing a semiconductor device according to claim 7, wherein the plasma treatment and the formation of the second oxide semiconductor layer are performed in the chamber in succession.

10. The method for manufacturing a semiconductor device, according to claim 7, wherein an argon gas is used as the inert gas.

11. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
performing a first plasma treatment on a surface of the conductive layer;
forming a first oxide semiconductor layer over the conductive layer after the first plasma treatment is performed;
forming a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked by etching the conductive layer and the first oxide semiconductor layer;
performing a second plasma treatment on surfaces of the gate insulating layer, the first stack, and the second stack; and
forming a second oxide semiconductor layer over the gate insulating layer, the first stack, and the second stack after the second plasma treatment is performed,
wherein the first and the second oxide semiconductor layers are formed by a sputtering method in a chamber into which a mixture atmosphere of argon and oxygen is introduced.

12. The method for manufacturing a semiconductor device, according to claim 11, wherein the first and the second oxide semiconductor layers are formed by the sputtering method in which a target including indium, gallium, and zinc is used.

13. The method for manufacturing a semiconductor device according to claim 11, wherein the first plasma treatment and the formation of the first oxide semiconductor layer are performed in the chamber in succession, and the second plasma treatment and the formation of the second oxide semiconductor layer are performed in the chamber in succession.

14. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
forming a first oxide semiconductor layer over the conductive layer;
forming a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked by etching the conductive layer and the first oxide semiconductor layer;
performing a plasma treatment on surfaces of the gate insulating layer, the first stack, and the second stack which are formed over the substrate in a chamber into which an inert gas is introduced; and
forming a second oxide semiconductor layer over the gate insulating layer, the first stack, and the second stack after the plasma treatment is performed,
wherein the first and the second oxide semiconductor layers are formed by a sputtering method at 20° C. to 100° C.

15. The method for manufacturing a semiconductor device, according to claim 14, wherein the first and the second oxide semiconductor layers are formed by the sputtering method in which a target including indium, gallium, and zinc is used.

16. The method for manufacturing a semiconductor device according to claim 14, wherein the plasma treatment and the formation of the second oxide semiconductor layer are performed in the chamber in succession.

17. The method for manufacturing a semiconductor device, according to claim 14, wherein an argon gas is used as the inert gas.

18. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate;
forming a gate insulating layer over the gate electrode layer;
forming a conductive layer over the gate insulating layer;
performing a first plasma treatment on a surface of the conductive layer;
forming a first oxide semiconductor layer over the conductive layer after the first plasma treatment is performed;
forming a first stack in which the conductive layer and the first oxide semiconductor layer are stacked and a second stack in which the conductive layer and the first oxide semiconductor layer are stacked by etching the conductive layer and the first oxide semiconductor layer;
performing a second plasma treatment on surfaces of the gate insulating layer, the first stack, and the second stack; and
forming a second oxide semiconductor layer over the gate insulating layer, the first stack, and the second stack after the second plasma treatment is performed,
wherein the first and the second oxide semiconductor layers are formed by a sputtering method at 20° C. to 100° C.

19. The method for manufacturing a semiconductor device, according to claim 18, wherein the first and the second oxide semiconductor layers are formed by the sputtering method in which a target including indium, gallium, and zinc is used.

20. The method for manufacturing a semiconductor device according to claim 18, wherein the first plasma treatment and the formation of the first oxide semiconductor layer are performed in a chamber in succession, and the second plasma treatment and the formation of the second oxide semiconductor layer are performed in a chamber in succession.