# SAFETY DATA SHEET

1. Product and Company Identification Material name CSL9054C Issue date 18-February-2014 Revision date

- Supersedes date

- CAS # Mixture Product use Chemical mechanical polishing. Synonym(s) None. Spec ID 100000003317 Supplier information Manufacturer/Supplier FUJIFILM Planar Solutions, LLC. 80 Circuit Drive North Kingstown, RI 02852 USA Emergency Telephone Transportation Emergency: FOR ALL TRANSPORTATION ACCIDENTS, CALL CHEMTREC: 1-800-424-9300 Medical Emergency (24HR): FOR ANY HEALTH & MEDICAL EMERGENCY, 24 HOURS /7 DAYS CALL: 1-800-365-8951 Non-Emergency Telephone : General Information: FOR ALL MSDS REQUESTS & QUESTIONS, CALL CUSTOMER SERVICE: 1-800-553-6546 OR FROM OUTSIDE USA: +1 (480) 987-7000 MSDS file 16506_NA_EN_V1.0 Replaces file None 

### 2. Hazards Identification Physical state Liquid. Emergency overview WARNING! Causes eye irritation. May be harmful if swallowed. OSHA regulatory status This product is hazardous according to OSHA 29 CFR 1910.1200. Potential health effects Routes of exposure Eyes. Skin. Ingestion. Eyes Causes eye irritation. Skin Prolonged contact may cause dryness of the skin. Inhalation Under normal conditions of intended use, this material is not expected to be an inhalation hazard. Ingestion May be harmful if swallowed. Target organs Eyes. Chronic effects May adversely affect the developing fetus. Signs and symptoms Eye contact: May cause redness and pain. Potential environmental effectsThe product components are not classified as environmentally hazardous. However, this does not exclude the possibility that large or frequent spills can have a harmful or damaging effect on the environment.

Components CAS # Percent 

### 3. Composition / Information on Ingredients

Proprietary 1-7 Dishing Reducer-1 Proprietary 1-6 Silica Composition comments All concentrations are in percent by weight unless ingredient is a gas. Gas concentrations are in percent by volume. The product contains: Water. Removal Rate Enhancer.

100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 1 / 6 FFEM MSDS NA

### 4. First Aid Measures First aid procedures Eye contact Immediately flush with plenty of water for up to 15 minutes. Remove any contact lenses and open eyelids wide apart. Get medical attention promptly if symptoms occur after washing. Skin contact Remove contaminated clothes and rinse skin thoroughly with water for at least 15 minutes. Get medical attention if irritation develops and persists. Inhalation No specific first aid measures noted. Ingestion Rinse mouth thoroughly with water and give large amounts of milk or water to people not unconscious. Only induce vomiting at the instruction of medical personnel. Get medical attention if any discomfort occurs. Notes to physician Treat symptomatically. 

### 5. Fire Fighting Measures Flammable properties The product is non-combustible. Extinguishing media Suitable extinguishing media Use fire-extinguishing media appropriate for surrounding materials.
Unsuitable extinguishing media None known.
Protection of firefighters Specific hazards arising from the chemical During fire, gases hazardous to health may be formed.
Protective equipment and precautions for firefightersSelection of respiratory protection for firefighting: follow the general fire precautions indicated in the workplace. Self-contained breathing apparatus and full protective clothing must be worn in case of fire. Fire fighting equipment/instructions Use standard firefighting procedures and consider the hazards of other involved materials.

Hazardous combustion products Carbon dioxide. Carbon monoxide. Nitrogen oxides. Silicon oxides.



### 6. Accidental Release Measures Personal precautions Avoid contact with eyes and prolonged skin contact. Wear suitable protective clothing. See Section 8 of the MSDS for Personal Protective Equipment. Environmental precautions Avoid discharge into drains, water courses or onto the ground unless authorized by permit. Methods for cleaning up Absorb spillage with suitable absorbent material. For waste disposal, see Section 13 of the MSDS. 

### 7. Handling and Storage Handling Pregnant women should not work with the product, if there is the least risk of exposure. Avoid contact with eyes and prolonged skin contact. Wear approved safety goggles. Observe good industrial hygiene practices. Storage Store in closed original container at temperatures between 10°C (50oF) and 32°C (90oF). Store away from incompatible materials. 

### 8. Exposure Controls / Personal Protection Occupational exposure limits US. OSHA Table Z-3 (29 CFR 1910.1000)

Value Type Components TWA 0.8 mg/m3 Silica (CAS Proprietary) 20 mppcf Canada. British Columbia OELs. (Occupational Exposure Limits for Chemical Substances, Occupational Health and Safety Regulation 296/97, as amended)

Value Type Form Components TWA 4 mg/m3 Total Silica (CAS Proprietary) 1.5 mg/m3 Respirable. Canada. Ontario OELs. (Control of Exposure to Biological or Chemical Agents)

Value Type Components TWA 10 mg/m3 Silica (CAS Proprietary)

100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 2 / 6 FFEM MSDS NACanada. Quebec OELs. (Ministry of Labor - Regulation Respecting the Quality of the Work Environment)

Value Type Form Components TWA 6 mg/m3 Respirable dust. Silica (CAS Proprietary) Engineering controls No special requirements under ordinary conditions of use and with adequate ventilation. Personal protective equipment Eye / face protection Wear approved safety goggles. Skin protection Risk of contact: Wear protective gloves impervious to the chemicals in use. Also wear appropriate clothing to prevent any possibility of skin contact. Suitable items can be recommended by the protective equipment supplier or by a qualified industrial hygienist. Respiratory protection No personal respiratory protective equipment normally required. General hygiene considerations Always observe good personal hygiene measures, such as washing after handling the material and before eating, drinking, and/or smoking. Routinely wash work clothing and protective equipment to remove contaminants. Observe any medical surveillance requirements. 

### 9. Physical & Chemical Properties Molecular weight Not Applicable/Mixture. Physical state Liquid. Color Colorless to light yellow. Odor None. Odor threshold Not applicable. pH 6 - 7.5 Melting point/Freezing point32 °F (0 °C) Boiling point 212 °F (100 °C) Density < 3.00 g/cm3 Relative density (= specific gravity) < 3
Vapor pressure No data available. Vapor density No data available. Evaporation rate No data available. Solubility (water) Miscible in water. Flash point Not applicable. Auto-ignition temperature No data available. Viscosity No data available. Flammability limits in air, upper, % by volume Not applicable.
Flammability limits in air, lower, % by volume Not applicable.
Decomposition temperature No data available. 

### 10. Chemical Stability & Reactivity Information Chemical stability Stable under normal temperature conditions. Conditions to avoid Excessive heat. Freezing. Incompatible materials Strong oxidizing agents. Strong acids. Hazardous decomposition products At elevated temperatures: Carbon dioxide. Carbon monoxide. Nitrogen Oxides. Silicon oxides.
Possibility of hazardous reactions Will not occur.


### 11. Toxicological Information Sensitization Not a skin sensitizer. Acute effects May be harmful if swallowed. Local effects Causes eye irritation. Chronic effects None known. Carcinogenicity No data available. IARC Monographs. Overall Evaluation of Carcinogenicity Silica (CAS Proprietary) 3 Not classifiable as to carcinogenicity to humans.

100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 3 / 6 FFEM MSDS NAIARC: 1 = Carcinogenic to Humans; There is sufficient evidence of carcinogenicity in humans. 2A = Probably Carcinogenic to Humans; There is limited evidence of carcinogenicity in humans and sufficient evidence of carcinogenicity in experimental animals. 2B = Possibly Carcinogenic to Humans; There is limited evidence of carcinogenicity in humans and less than sufficient evidenceof carcinogenicity in experimental animals. 3 = Not classifiable as to carcinogenicity to humans; The evidence of carcinogenicityis inadequate in humans and inadequate or limited in experimental animals. 4 = Probably not carcinogenic to humans; There is inadequate evidence of carcinogenicity in humans but evidence suggesting lack of carcinogenicity in experimental animals. Notlisted = Not evaluated by IARC. Mutagenicity No data available. Reproductive effects May adversely affect the developing fetus. Symptoms and target organsEye contact: May cause redness and pain. Further information Prolonged contact may cause dryness of the skin. Under normal conditions of intended use, this material is not expected to be an inhalation hazard. 

### 12. Ecological Information Ecotoxicity The product components are not classified as environmentally hazardous. However, this does not exclude the possibility that large or frequent spills can have a harmful or damaging effect on the environment. Persistence and degradabilityNo data available. Bioaccumulation / Accumulation No data available.
Mobility in environmental media The product is miscible with water. May spread in water systems.


### 13. Disposal Considerations Waste codes Not regulated. Disposal instructions Disposal recommendations are based on material as supplied. Disposal must be in accordance with current applicable laws and regulations, and material characteristics at time of disposal. Waste from residues / unused products Dispose of waste and residues in accordance with local authority requirements.
Contaminated packaging Empty containers should be taken to an approved waste handling site for recycling or disposal. 

### 14. Transport Information
DOT Not regulated as a hazardous material by DOT. IATA Not regulated as dangerous goods. IMDG Not regulated as dangerous goods. TDGNot regulated as dangerous goods. 

### 15. Regulatory Information US federal regulations This product is hazardous according to OSHA 29 CFR 1910.1200. For Export Only – Not subject to TSCA. Drug Enforcement Administration (DEA). List 1(i), Precursor Chemicals (21 CFR 1310.02(a) and 1310.04(f)(1)) Not listed. Drug Enforcement Administration (DEA). List 2, Essential Chemicals (21 CFR 1310.02(b) and 1310.04(f)(2) and Chemical Code Number Not listed. TSCA Section 5(a)(2) Final Significant New Use Rules (SNURs)(40CFR 721, Subpt. E) Not regulated. TSCA Section 12(b) Export Notification (40 CFR 707, Subpt. D) Not regulated. Clean Air Act (CAA) Section 112 Hazardous Air Pollutants (HAPs) List Not regulated. CERCLA (Superfund) reportable quantity (lbs) (40 CFR 302.4) None Superfund Amendments and Reauthorization Act of 1986 (SARA) Hazard categories Immediate Hazard - Yes Delayed Hazard - Yes Fire Hazard - No Pressure Hazard - No Reactivity Hazard - No 100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 4 / 6 FFEM MSDS NASARA 302 Extremely hazardous substance Not listed. SARA 311/312 Hazardous chemical Yes
Drug Enforcement Administration (DEA) (21 CFR 1308.11-15) Not controlled

Canadian regulations This product has been classified according to the hazard criteria of the Canadian Controlled Products Regulations, Section 33, and the MSDS contains all required information. WHMIS status Controlled WHMIS classification D2A - Other Toxic Effects-VERY TOXIC D2B - Other Toxic Effects-TOXIC WHMIS labeling

Inventory status Country(s) or region Inventoryname On inventory (yes/no)* Yes Australia Australian Inventory of Chemical Substances (AICS) Yes Canada Domestic Substances List (DSL) No Canada Non-Domestic Substances List (NDSL) Yes Korea Existing Chemicals List (ECL) Yes New Zealand New Zealand Inventory Yes Philippines Philippine Inventory of Chemicals and Chemical Substances (PICCS)

*A "Yes" indicates this product complies with the inventory requirements administered by the governing country(s) For Export Only – Not subject to TSCA.
State regulations This product does not contain a chemical known to the State of California to cause cancer, birth defects or other reproductive harm. US - California Proposition 65 - Carcinogens & Reproductive Toxicity (CRT): Listed substance Not listed. US. Massachusetts RTK - Substance List Silica (CAS Proprietary) Listed. US. New Jersey Worker and Community Right-to-Know Act Silica (CAS Proprietary) US. Pennsylvania Worker and Community Right-to-Know Law Silica (CAS Proprietary) US. Rhode Island RTK Not regulated. Mexico regulations This product is dangerous according to Mexican regulations. 

### 16. Other Information Further information HMIS® is a registered trade and service mark of the NPCA. B - Safety Glasses, Gloves HMIS® ratings Health: 2* Flammability: 0 Physical hazard: 0 Personal protection: B NFPA ratings Health: - Flammability: - Instability: -

100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 5 / 6 FFEM MSDS NADisclaimer THIS MATERIAL SAFETY DATA SHEET (MSDS) HAS BEEN PREPARED IN COMPLIANCE WITH THE FEDERAL OSHA HAZARD COMMUNICATION STANDARD, 29 CFR 1910.1200 AND THE CANADIAN CONTROLLED PRODUCT REGULATION (SOR/88-66). THE INFORMATION IN THIS MSDS SHOULD BE PROVIDED TO ALL WHO WILL USE, HANDLE, STORE, TRANSPORT, OR OTHERWISE BE EXPOSED TO THIS PRODUCT. THIS INFORMATION HAS BEEN PREPARED FOR THE GUIDANCE OF PLANT ENGINEERING, OPERATIONS AND MANAGEMENT AND FOR PERSONS WORKING WITH OR HANDLING THIS PRODUCT. FUJIFILM ELECTRONIC MATERIALS BELIEVES THIS INFORMATION TO BE RELIABLE AND UP TO DATE AS OF THE DATE OF PUBLICATION BUT, MAKES NO WARRANTY THAT IT IS. ADDITIONALLY, IF THIS MSDS IS MORE THAN THREE YEARS OLD, YOU SHOULD CONTACT FUJIFILM ELECTRONIC MATERIALS AT THE PHONE NUMBER 1-800-553-6546 (CUSTOMER SERVICE) TO MAKE CERTAIN THAT THIS DOCUMENT IS CURRENT. MSDS file 16506_NA_EN_V1.0 Replaces file None

100000003317 CSL9054C 913459 MSDS File: 16506_NA_EN_V1.0 6 / 6 FFEM MSDS NA