SAFETY DATA SHEET

1. Product and Company Identification

Material name CSL9054C

Issue date 18-February-2014

Revision date -

Supersedes date -

CAS # Mixture

Product use Chemical mechanical polishing.

Synonym(s) None.

Spec ID 100000003317

Supplier information

Manufacturer/Supplier FUJIFILM Planar Solutions, LLC.

80 Circuit Drive

North Kingstown, RI 02852

USA

Emergency Telephone Transportation Emergency:

FOR ALL TRANSPORTATION ACCIDENTS, CALL CHEMTREC: 1-800-424-9300

Medical Emergency (24HR):

FOR ANY HEALTH & MEDICAL EMERGENCY, 24 HOURS /7 DAYS CALL:

1-800-365-8951

Non-Emergency Telephone :

General Information:

FOR ALL MSDS REQUESTS & QUESTIONS, CALL CUSTOMER SERVICE:

1-800-553-6546

OR FROM OUTSIDE USA: +1 (480) 987-7000

MSDS file 16506_NA_EN_V1.0

Replaces file None

2. Hazards Identification

Physical state Liquid.

Emergency overview WARNING! Causes eye irritation. May be harmful if swallowed.

OSHA regulatory status This product is hazardous according to OSHA 29 CFR 1910.1200.

Potential health effects

Routes of exposure Eyes. Skin. Ingestion.

Eyes Causes eye irritation.

Skin Prolonged contact may cause dryness of the skin.

Inhalation Under normal conditions of intended use, this material is not expected to be an inhalation hazard.

Ingestion May be harmful if swallowed.

Target organs Eyes.

Chronic effects May adversely affect the developing fetus.

Signs and symptoms Eye contact: May cause redness and pain.

Potential environmental effects The product components are not classified as environmentally hazardous. However, this does not

exclude the possibility that large or frequent spills can have a harmful or damaging effect on the

environment.

Components CAS # Percent

3. Composition / Information on Ingredients

Dishing Reducer-1 Proprietary 1-7

Silica Proprietary 1-6

Composition comments All concentrations are in percent by weight unless ingredient is a gas. Gas concentrations are in

percent by volume.

The product contains: Water. Removal Rate Enhancer.

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4. First Aid Measures

First aid procedures

Eye contact Immediately flush with plenty of water for up to 15 minutes. Remove any contact lenses and open

eyelids wide apart. Get medical attention promptly if symptoms occur after washing.

Skin contact Remove contaminated clothes and rinse skin thoroughly with water for at least 15 minutes. Get

medical attention if irritation develops and persists.

Inhalation No specific first aid measures noted.

Ingestion Rinse mouth thoroughly with water and give large amounts of milk or water to people not

unconscious. Only induce vomiting at the instruction of medical personnel. Get medical attention if

any discomfort occurs.

Notes to physician Treat symptomatically.

5. Fire Fighting Measures

Flammable properties The product is non-combustible.

Extinguishing media

Suitable extinguishing

media

Use fire-extinguishing media appropriate for surrounding materials.

Unsuitable extinguishing

media

None known.

Protection of firefighters

Specific hazards arising

from the chemical

During fire, gases hazardous to health may be formed.

Protective equipment and

precautions for firefighters

Selection of respiratory protection for firefighting: follow the general fire precautions indicated in

the workplace. Self-contained breathing apparatus and full protective clothing must be worn in

case of fire.

Fire fighting

equipment/instructions

Use standard firefighting procedures and consider the hazards of other involved materials.

Hazardous combustion

products

Carbon dioxide. Carbon monoxide. Nitrogen oxides. Silicon oxides.

6. Accidental Release Measures

Personal precautions Avoid contact with eyes and prolonged skin contact. Wear suitable protective clothing. See Section

8 of the MSDS for Personal Protective Equipment.

Environmental precautions Avoid discharge into drains, water courses or onto the ground unless authorized by permit.

Methods for cleaning up Absorb spillage with suitable absorbent material. For waste disposal, see Section 13 of the MSDS.

7. Handling and Storage

Handling Pregnant women should not work with the product, if there is the least risk of exposure. Avoid

contact with eyes and prolonged skin contact. Wear approved safety goggles. Observe good

industrial hygiene practices.

Storage Store in closed original container at temperatures between 10°C (50oF) and 32°C (90oF). Store

away from incompatible materials.

8. Exposure Controls / Personal Protection

Occupational exposure limits

US. OSHA Table Z-3 (29 CFR 1910.1000)

Components Type Value

Silica (CAS Proprietary) TWA 0.8 mg/m3

20 mppcf

Canada. British Columbia OELs. (Occupational Exposure Limits for Chemical Substances, Occupational Health and

Safety Regulation 296/97, as amended)

Components Type Value Form

Silica (CAS Proprietary) TWA 4 mg/m3 Total

1.5 mg/m3 Respirable.

Canada. Ontario OELs. (Control of Exposure to Biological or Chemical Agents)

Components Type Value

Silica (CAS Proprietary) TWA 10 mg/m3

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Canada. Quebec OELs. (Ministry of Labor - Regulation Respecting the Quality of the Work Environment)

Components Type Value Form

Silica (CAS Proprietary) TWA 6 mg/m3 Respirable dust.

Engineering controls No special requirements under ordinary conditions of use and with adequate ventilation.

Personal protective equipment

Eye / face protection Wear approved safety goggles.

Skin protection Risk of contact: Wear protective gloves impervious to the chemicals in use. Also wear appropriate

clothing to prevent any possibility of skin contact. Suitable items can be recommended by the

protective equipment supplier or by a qualified industrial hygienist.

Respiratory protection No personal respiratory protective equipment normally required.

General hygiene

considerations

Always observe good personal hygiene measures, such as washing after handling the material

and before eating, drinking, and/or smoking. Routinely wash work clothing and protective

equipment to remove contaminants. Observe any medical surveillance requirements.

9. Physical & Chemical Properties

Molecular weight Not Applicable/Mixture.

Physical state Liquid.

Color Colorless to light yellow.

Odor None.

Odor threshold Not applicable.

pH 6 - 7.5

Melting point/Freezing point 32 °F (0 °C)

Boiling point 212 °F (100 °C)

Density < 3.00 g/cm3

Relative density (= specific

gravity)

< 3

Vapor pressure No data available.

Vapor density No data available.

Evaporation rate No data available.

Solubility (water) Miscible in water.

Flash point Not applicable.

Auto-ignition temperature No data available.

Viscosity No data available.

Flammability limits in air,

upper, % by volume

Not applicable.

Flammability limits in air,

lower, % by volume

Not applicable.

Decomposition temperature No data available.

10. Chemical Stability & Reactivity Information

Chemical stability Stable under normal temperature conditions.

Conditions to avoid Excessive heat. Freezing.

Incompatible materials Strong oxidizing agents. Strong acids.

Hazardous decomposition

products

At elevated temperatures: Carbon dioxide. Carbon monoxide. Nitrogen Oxides. Silicon oxides.

Possibility of hazardous

reactions

Will not occur.

11. Toxicological Information

Sensitization Not a skin sensitizer.

Acute effects May be harmful if swallowed.

Local effects Causes eye irritation.

Chronic effects None known.

Carcinogenicity No data available.

IARC Monographs. Overall Evaluation of Carcinogenicity

Silica (CAS Proprietary) 3 Not classifiable as to carcinogenicity to humans.

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IARC: 1 = Carcinogenic to Humans; There is sufficient evidence of carcinogenicity in humans. 2A = Probably Carcinogenic to

Humans; There is limited evidence of carcinogenicity in humans and sufficient evidence of carcinogenicity in experimental animals.

2B = Possibly Carcinogenic to Humans; There is limited evidence of carcinogenicity in humans and less than sufficient evidence of

carcinogenicity in experimental animals. 3 = Not classifiable as to carcinogenicity to humans; The evidence of carcinogenicity is

inadequate in humans and inadequate or limited in experimental animals. 4 = Probably not carcinogenic to humans; There is

inadequate evidence of carcinogenicity in humans but evidence suggesting lack of carcinogenicity in experimental animals. Not listed

= Not evaluated by IARC.

Mutagenicity No data available.

Reproductive effects May adversely affect the developing fetus.

Symptoms and target organs Eye contact: May cause redness and pain.

Further information Prolonged contact may cause dryness of the skin. Under normal conditions of intended use, this

material is not expected to be an inhalation hazard.

12. Ecological Information

Ecotoxicity The product components are not classified as environmentally hazardous. However, this does not

exclude the possibility that large or frequent spills can have a harmful or damaging effect on the

environment.

Persistence and degradability No data available.

Bioaccumulation /

Accumulation

No data available.

Mobility in environmental

media

The product is miscible with water. May spread in water systems.

13. Disposal Considerations

Waste codes Not regulated.

Disposal instructions Disposal recommendations are based on material as supplied. Disposal must be in accordance

with current applicable laws and regulations, and material characteristics at time of disposal.

Waste from residues / unused

products

Dispose of waste and residues in accordance with local authority requirements.

Contaminated packaging Empty containers should be taken to an approved waste handling site for recycling or disposal.

14. Transport Information

DOT

Not regulated as a hazardous material by DOT.

IATA

Not regulated as dangerous goods.

IMDG

Not regulated as dangerous goods.

TDG

Not regulated as dangerous goods.

15. Regulatory Information

US federal regulations This product is hazardous according to OSHA 29 CFR 1910.1200.

For Export Only – Not subject to TSCA.

Drug Enforcement Administration (DEA). List 1(i), Precursor Chemicals (21 CFR 1310.02(a) and 1310.04(f)(1))

Not listed.

Drug Enforcement Administration (DEA). List 2, Essential Chemicals (21 CFR 1310.02(b) and 1310.04(f)(2) and Chemical

Code Number

Not listed.

TSCA Section 5(a)(2) Final Significant New Use Rules (SNURs)(40CFR 721, Subpt. E)

Not regulated.

TSCA Section 12(b) Export Notification (40 CFR 707, Subpt. D)

Not regulated.

Clean Air Act (CAA) Section 112 Hazardous Air Pollutants (HAPs) List

Not regulated.

CERCLA (Superfund) reportable quantity (lbs) (40 CFR 302.4)

None

Superfund Amendments and Reauthorization Act of 1986 (SARA)

Hazard categories Immediate Hazard - Yes

Delayed Hazard - Yes

Fire Hazard - No

Pressure Hazard - No

Reactivity Hazard - No

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SARA 302 Extremely hazardous substance

Not listed.

SARA 311/312 Hazardous

chemical

Yes

Drug Enforcement

Administration (DEA) (21 CFR

1308.11-15)

Not controlled

Canadian regulations This product has been classified according to the hazard criteria of the Canadian Controlled

Products Regulations, Section 33, and the MSDS contains all required information.

WHMIS status Controlled

WHMIS classification D2A - Other Toxic Effects-VERY TOXIC

D2B - Other Toxic Effects-TOXIC

WHMIS labeling

Inventory status

Country(s) or region Inventory name On inventory (yes/no)*

Australia Australian Inventory of Chemical Substances (AICS) Yes

Canada Domestic Substances List (DSL) Yes

Canada Non-Domestic Substances List (NDSL) No

Korea Existing Chemicals List (ECL) Yes

New Zealand New Zealand Inventory Yes

Philippines Philippine Inventory of Chemicals and Chemical Substances Yes

(PICCS)

*A "Yes" indicates this product complies with the inventory requirements administered by the governing country(s)

For Export Only – Not subject to TSCA.

State regulations This product does not contain a chemical known to the State of California to cause cancer, birth

defects or other reproductive harm.

US - California Proposition 65 - Carcinogens & Reproductive Toxicity (CRT): Listed substance

Not listed.

US. Massachusetts RTK - Substance List

Silica (CAS Proprietary) Listed.

US. New Jersey Worker and Community Right-to-Know Act

Silica (CAS Proprietary)

US. Pennsylvania Worker and Community Right-to-Know Law

Silica (CAS Proprietary)

US. Rhode Island RTK

Not regulated.

Mexico regulations This product is dangerous according to Mexican regulations.

16. Other Information

Further information HMIS® is a registered trade and service mark of the NPCA.

B - Safety Glasses, Gloves

HMIS® ratings Health: 2*

Flammability: 0

Physical hazard: 0

Personal protection: B

NFPA ratings Health: -

Flammability: -

Instability: -

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Disclaimer THIS MATERIAL SAFETY DATA SHEET (MSDS) HAS BEEN PREPARED IN COMPLIANCE

WITH THE FEDERAL OSHA HAZARD COMMUNICATION STANDARD, 29 CFR 1910.1200 AND

THE CANADIAN CONTROLLED PRODUCT REGULATION (SOR/88-66). THE INFORMATION IN

THIS MSDS SHOULD BE PROVIDED TO ALL WHO WILL USE, HANDLE, STORE,

TRANSPORT, OR OTHERWISE BE EXPOSED TO THIS PRODUCT. THIS INFORMATION HAS

BEEN PREPARED FOR THE GUIDANCE OF PLANT ENGINEERING, OPERATIONS AND

MANAGEMENT AND FOR PERSONS WORKING WITH OR HANDLING THIS PRODUCT.

FUJIFILM ELECTRONIC MATERIALS BELIEVES THIS INFORMATION TO BE RELIABLE AND

UP TO DATE AS OF THE DATE OF PUBLICATION BUT, MAKES NO WARRANTY THAT IT IS.

ADDITIONALLY, IF THIS MSDS IS MORE THAN THREE YEARS OLD, YOU SHOULD CONTACT

FUJIFILM ELECTRONIC MATERIALS AT THE PHONE NUMBER 1-800-553-6546 (CUSTOMER

SERVICE) TO MAKE CERTAIN THAT THIS DOCUMENT IS CURRENT.

MSDS file 16506_NA_EN_V1.0

Replaces file None

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