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                                                                    EXHIBIT 99.1
 
SPEEDFAM INTERNATIONAL, INC.
305 NORTH 54TH STREET
CHANDLER, ARIZONA 85226-2416
 
          THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
 
     The undersigned shareholder of SpeedFam International, Inc., an Illinois
corporation, hereby acknowledges receipt of the Notice of Special Meeting of
Shareholders and the Joint Proxy Statement, each dated                  , 1999,
and hereby appoints Richard J. Faubert, James N. Farley and Roger K. Marach and
each of them, proxies and attorneys-in-fact, with full power to each of
substitution, on behalf and in the name of the undersigned, to represent the
undersigned at the Special Meeting of Shareholders of SpeedFam International,
Inc. to be held on                  , 1999 at      :00 a.m., local time, at
SpeedFam's corporate headquarters located at 305 North 54(th) Street, Chandler,
Arizona 85226, and any adjournments thereof, and to vote all shares of Common
Stock of SpeedFam International, Inc. which the undersigned would be entitled to
vote if then and there personally present, on the matters set forth below.
 
     THIS PROXY WHEN PROPERLY EXECUTED WILL BE VOTED IN THE MANNER DIRECTED
HEREIN BY THE UNDERSIGNED SHAREHOLDER. IF NO DIRECTION IS MADE, THIS PROXY WILL
BE VOTED "FOR" PROPOSAL 1, PROPOSAL 2 AND PROPOSAL 3.
 
              DETACH BELOW AND RETURN USING THE ENVELOPE PROVIDED.
 
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                          SPEEDFAM INTERNATIONAL, INC.
 
           PROXY CARD FOR SPECIAL MEETING ON                  , 1999
 
     (1) To approve the issuance of shares of SpeedFam common stock pursuant to
the merger of a wholly-owned subsidiary of SpeedFam into Integrated Process
Equipment Corp. as described in the accompanying Joint Proxy
Statement/Prospectus.
 
                                     [ ] FOR       [ ] AGAINST       [ ] ABSTAIN
 
     (2) To approve the amendment to SpeedFam's Articles of Incorporation to
change the corporate name of SpeedFam to "SpeedFam-IPEC, Inc." provided that the
merger of a wholly-owned subsidiary of SpeedFam into Integrated Process
Equipment Corp. as described in the accompanying Joint Proxy
Statement/Prospectus is consummated.
 
                                     [ ] FOR       [ ] AGAINST       [ ] ABSTAIN
 
     (3) To approve an amendment to SpeedFam's 1995 Employee Stock Purchase Plan
to increase the maximum aggregate number of shares of SpeedFam common stock
reserved for issuance thereunder from 1,800,000 to 3,300,000.
 
                                     [ ] FOR       [ ] AGAINST       [ ] ABSTAIN
 
     (4) IN THEIR DISCRETION, THE PROXIES ARE AUTHORIZED TO VOTE UPON SUCH OTHER
BUSINESS AS MAY PROPERLY COME BEFORE THE MEETING.
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Dated:
----------------------------              No. of Shares:--------------------
 
Address Change?
Mark box [ ]              Name Change? [ ]
Indicate changes below:
 
                                                Signature(s) in Box
 
                                                Please sign exactly as your name
                                                appears on this card. When
                                                shares are held by joint
                                                tenants, both should sign. When
                                                signing as attorney, executor,
                                                administrator, trustee or
                                                guardian, please give your full
                                                title as such. If a corporation,
                                                please sign in corporate name by
                                                president or other authorized
                                                officer. If a partnership,
                                                please sign in partnership name
                                                by authorized person.
 
            Please vote, sign, date and return this proxy promptly.