<PAGE>

                                                                    EXHIBIT 10.7

                           MASTER PATENT ASSIGNMENT
                           ------------------------

     This Agreement, dated March 31, 2001, between Millipore Corporation, a
Massachusetts corporation having a place of business at 80 Ashby Road, Bedford,
Massachusetts 01730 ("Millipore") and Mykrolis Corporation, a Delaware
corporation, having a place of business at Patriots Park, Bedford, Massachusetts
01730 ("Mykrolis").

     WHEREAS, the Board of Directors of Millipore Corporation has determined
that it is in the best interest of Millipore and its stockholders to separate
Millipore's existing businesses into two independent businesses;

     WHEREAS, as part of the foregoing, Millipore and Mykrolis, have entered
into a Master Separation and Distribution Agreement (as defined below) which
provides, among other things, for the separation of certain Mykrolis assets and
Mykrolis liabilities, the initial public offering of Mykrolis stock, the
distribution of such stock and the execution and delivery of certain other
agreements in order to facilitate and provide for the foregoing;

     WHEREAS, Millipore is the owner via assignment from the inventor(s) or
other assignors of the inventions claimed and described in the Letters Patents
or applications for Letters Patent set forth on Exhibit A ("Patents"); and

     WHEREAS, Mykrolis is desirous of acquiring said Patents.

     NOW, THEREFORE, for good and valuable consideration, the receipt of which
is hereby acknowledged, MILLIPORE by these presents do sell, assign and transfer
unto Mykrolis its successors and assigns the full, exclusive and worldwide right
to the said invention including the United States of America, and the entire
right, title and interest in, to and under any Letters Patent which may be
granted on said invention, or any parts thereof, or on any continuation,
division or reissue thereof in the United States of America, in the territorial
possessions of the United States of America and in any country foreign to the
United States of America, and including all rights to sue and recover for past
infringement of the Patents, the same to be held and enjoyed by Mykrolis, its
successors and assigns as fully and entirely as the same would have been held by
MILLIPORE, had this assignment not been made.

     And MILLIPORE hereby authorizes and requests the Commissioner of Patent and
Trademarks of the United States of America and respective Patent Office
officials in any country foreign to the United States of America to issue said
Letters Patent to Mykrolis as the assignee of its entire right, title and
interest in, to and under the same, and MILLIPORE hereby further authorizes
Mykrolis to apply for Letters Patent in its own name, utilizing any benefits
which may exist under any International Agreement, in any country foreign to the
United States of America.

     And MILLIPORE does hereby agree for itself and for its successors and
assigns to execute any lawful document and to testify as to any material fact or
thing which Mykrolis, its successors and assigns may deem necessary in order to
secure unto itself, its
<PAGE>

successors and assigns the full right, title and interest in and to the full
enjoyment of said invention or any part thereof and any Letters Patent, the same
to be done without any further consideration.

          IN WITNESS WHEREOF, I set my hand on March 31, 2001.

          /s/ Francis J. Lunger
          --------------------------------
                    (Signature)

          Francis J. Lunger
          ---------------------------

          Executive Vice President, Millipore Corporation
          -------------------------------------------------


          On this day and year aforesaid, before me personally appeared  Francis
                                                                         -------
     J. Lunger, known to me to be the person described in and the person who
     ---------
     executed the foregoing instrument of assignment and he/she did acknowledge
     the same to be his/her free act and deed.

                               /s/ Patricia Ann Powers
                               ---------------------------------
                               Patricia Ann Powers
                               ----------------------------------, Notary Public

                               My Commission expires 8/9/2007
                                                    -------------------------

          IN WITNESS WHEREOF, I set my hand on March 31, 2001.

          /s/ Jean-Marc Pandraud
          --------------------------------
               (Signature)

          Jean-Marc Pandraud
          -------------------
               (Typed Name)
          President, Mykrolis Corporation
          ----------------------------------

          On this day and year aforesaid, before me personally appeared  Jean-
                                                                         ----
     Marc Pandraud, known to me to be the person described in and the person who
     -------------
     executed the foregoing instrument of assignment and he/she did acknowledge
     the same to be his/her free act and deed.

                               /s/ Patricia Ann Powers
                               -----------------------------------
                               Patricia Ann Powers
                               ----------------------------------, Notary Public

                               My Commission expires 8/9/2007
                                                    -------------------------
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                            Patent List                                                            Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-173/                     EPC       86907119.1        92/05                0262151                   Granted
Austria                                30-Oct-1986       29-Jan-1992          29-Jan-1992               30-Oct-2006
                                                     Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-275/                     EPC       88104393.9        0283965              0283965                   Granted
Austria                                18-Mar-1988                            08-Jun-1994               18-Mar-2008
                                                     Title: Process and Composition for Drying of Gaseous Hydrogen Halides

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
----------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                   Patent List                                              Page: 1
----------------------------------------------------------------------------------------------------------------------------
Code Number/Subcase         Case            Application         Publication          Patent            Status
Country Name                Type            Number/Date         Number/Date          Number/Date       Expiration Date
----------------------------------------------------------------------------------------------------------------------------
<S>                         <C>             <C>                 <C>                  <C>               <C>
MCA-372/                    ORD             83060/87                                 606110            Granted
Australia                                   24-Dec-1987                              23-May-1991       24-Dec-2007
                                                         Title: Flow Responsive Transmitter and Indicator

----------------------------------------------------------------------------------------------------------------------------
MCA-372/1                   DIV             52930/90                                 624493            Granted
Australia                                   05-Apr-1990                              06-Oct-1992       05-Apr-2010
                                                         Title: Flow Responsive Transmitter and Indicator

----------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                           Page: 1
-----------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-173/                      EPC       86907119.1          92/05               0262151             Granted
Belgium                                 30-Oct-1986         29-Jan-1992         29-Jan-1992         30-Oct-2006
                                             Title: Filter Pump Head Assembly

-----------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                              Patent List                                                     Page: 1
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
----------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>            <C>                      <C>                 <C>
MCA-262/                      PCT       2188649                                                     Pending
Canada                                  25-Apr-1997
                                                       Title: Compositions and Processes for Separating and Concentrating Certain
                                                              Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                              Membranes
----------------------------------------------------------------------------------------------------------------------------------
MCA-278/                      PCT       2098317                                 2098317             Granted
Canada                                  13-Dec-1991                             27-Jun-2000         13-Dec-2011
                                                       Title: In-Line Detector System for Real-Time Determination of Impurity
                                                              Concentration in a Flowing Gas Stream
----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                      ORD       556859                                  1335043             Granted
Canada                                  19-Jan-1988                             04-Apr-1995         04-Apr-2012
                                                       Title: Flow Responsive Transmitter and Indicator
----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
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Wednesday, March 21,2001                               Patent List                                            Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case            Application           Publication         Patent             Status
Country Name                  Type            Number/Date           Number/Date         Number/Date        Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>             <C>                   <C>                 <C>                <C>
MCA-173/                      EPC             86907119-1            92/05               0262151            Granted
Switzerland                                   30-Oct-1986           29-Jan-1992         29-Jan-1992        30-Oct-2006
                                                                 Title: Filter Pump Head Assembly

-----------------------------------------------------------------------------------------------------------------------------------
MCA-275/                      EPC             88104393.9            0283965             0283965            Granted
Switzerland                                   18-Mar-1988                               08-Jun-1994        18-Mar-2008
                                                                 Title: Process and Composition for Drying of Gaseous Hydrogen
                                                                        Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-343/                      ORD             2669/88-0                                 674263             Granted
Switzerland                                   13-Jul-1988                               15-May-1990        13-Jul-2008
                                                                 Title: Capacitance Manometer Having Stress Relieve for Fixed
                                                                        Electrode

-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>


<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                          Patent List                                               Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/ Subcase               Case         Application        Publication         Patent         Status
Country Number                     Type         Number/Date        Number/Date         Number/Date    Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>          <C>                <C>                 <C>            <C>
MCA-262/                           PCT           95193666.2                                           Pending
China                                            25-Apr-1997
                                                            Title: Compositions and Processes for Separating and Concentrating
                                                                   Certain Ions from Mixed Ion Solutions Using Ion-Binding
                                                                   Ligands Bonded to Membranes
------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                           PCT           95193755.3        CN1151125A                          Published
China                                            20-Jun-1995       04-Jun-1997                         26-Jun-2015
                                                            Title: High Efficiency Metal Membrane Getter Element and Process for
                                                                   Making
------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                           PCT           95193838.X        CN1151706A                          Published
China                                            26-Jun-1995       11-Jun-1997                         26-Jun-2015
                                                            Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                   Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-278/5                          PCT            95190604.6       1130423                              Published
China                                             30-Jun-1995      04-Sep-1996                          30-Jun-2015
                                                            Title: In-line Detector System for Real-Time Determination of Impurity
                                                                   Concentration in a Flowing Gas Stream

-----------------------------------------------------------------------------------------------------------------------------------
MCA-289/                           PCT            96180085.2       1209086A                             Published
China                                             13-Dec-1996      24-Feb-1999
                                                            Title: Formation of Dendritic Metal Powders

------------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                          ORD            97116298.0       CN1195569A                           Published
China                                             10-Sep-1997      14-Oct-1998
                                                            Title: Apparatus for Isolating and Containing Reactive Medium

------------------------------------------------------------------------------------------------------------------------------------
MCA-296/                           ORD            97111913.9       CN1173389A                           Published
China                                             25-Jun-1997      18-Jan-1998
                                                            Title: Low Volume Disposable Filter Module (LVD)

------------------------------------------------------------------------------------------------------------------------------------
MCA-297/                           ORD            97112224.5       CN1182632A                           Published
China                                             11-Jul-1997      27-May-1998
                                                            Title: Disposable Separation Module with Quick Connect Capability
------------------------------------------------------------------------------------------------------------------------------------
MCA-309/                           ORD            98103093.9       1206690A                             Published
China                                             29-Jul-1998      03-Feb-1999
                                                            Title: Composition and Process for Removing Moisture from Hydrogen
                                                                   Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA-328/                           PCT            98810367.2                                            Pending
China                                             20-Apr-2000
                                                            Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                   from a Gas

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                               Patent List                                                      Page: 2
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase         Case         Application          Publication          Patent              Status
Country Name                Type         Number/Date          Number/Date          Number/Date         Expiration Date
---------------------------------------------------------------------------------------------------------------------------------
<S>                         <C>          <C>                  <C>                  <C>                 <C>
MCA-359/1                   PCT          95197568.4                                                    Published
China                                    20-Nov-1995          04-Mar-1998                              20-Nov-2015
                                                        Title: Flow Controller, Parts of Flow Controller and Related Method

---------------------------------------------------------------------------------------------------------------------------------
MCA-380/                    ORD          98104437.9           1191309A                                 Published
China                                    13-Feb-1998          26-Aug-1998
                                                        Title: Automated Gas Cylinder Tracking System

---------------------------------------------------------------------------------------------------------------------------------
MCA-388/                    ORD          99/105676.0          CN1232925A                               Published
China                                    21-Apr-1999          27-Oct-1999
                                                        Title: Apparatus for Dispensing Precise Volumes of Liquid

---------------------------------------------------------------------------------------------------------------------------------
MCA-431/                    PCT                                                                        Pending
China                                    22-Oct-1999
                                                        Title: A System and Method for Integration of Gas Components

---------------------------------------------------------------------------------------------------------------------------------
MCA-443/                    ORD          00132947.2                                                    Pending
China                                    16-Nov-2000
                                                        Title: Gas Flow Purification System and Method

---------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                       Patent List                                       Page: 1
------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case              Application           Publication          Patent            Status
Country Name                  Type              Number/Date           Number/Date          Number/Date       Expiration Date
-------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>               <C>                   <C>                  <C>               <C>
MCA-262/                      PCT               PV 3097-96                                                   Pending
Czech Republic                                  25-Apr-1995
                                                             Title: Compositions and Processes for Separating and Concentrating
                                                                    Certain Ions from Mixed Ion Solutions Using Ion-Binding
                                                                    Ligands Bonded to Membranes

-------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                   Patent List                                                    Page 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase              Case         Application           Publication              Patent                  Status
Country Name                     Type         Number/Date           Number/Date              Number/Date             Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                              <C>          <C>                   <C>                      <C>                     <C>
MCA-155/                          EPC          89107944.4            0340732                  P68923319.1             Granted
Germany, Federal Republic of                   02-May-1989                                    05-Jul-1995             02-May-2009
                                                              Title: Fluorcarbon Membranes and Process for Making Fluorocarbon
                                                                     Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-173/                          EPC          8690719.1             92/05                    0262151                 Granted
Germany, Federal Republic of                   30-Oct-1986           29-Jan-1992              29-Jan-1992             30-Oct-2006
                                                              Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-187/                          EPC          92108369.7            0513843                  P69212223.0             Granted
Germany, Federal Republic of                   18-May-1992                                    17-Jul-1996             18-May-2012
                                                              Title: Integrated Dispensing System and Method for Filtering and
                                                                     Dispensing Fluid

------------------------------------------------------------------------------------------------------------------------------------
MCA-218/                          EPC          93114362.2            0588217                  P69308435.9             Granted
Germany, Federal Republic of                   07-Sep-1993           23-Mar-1994              05-Mar-1997             07-Sep-2013
                                                              Title: Reactive Matrix for Removing Impurities from Hydride and Inert
                                                                     Gases and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-224/                          EPC          93115812.5            0591847A2                                        Published
Germany, Federal Republic of                   30-Sep-1993           13-Apr-1994                                      30-Sep-2013
                                                              Title: Apparatus for Monitoring Impurities in a Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-235/                          EPC          69221119                                       DE69221119              Granted
Germany, Federal Republic of                   04-Sep-1992                                    28-Aug-1997             04-Sep-2012
                                                              Title: Metallic Porous Membrane and Method of Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-236/                          EPC          94108234.9            0627256                  P69401031.6             Granted
Germany, Federal Republic of                   07-Dec-1994                                    30-Apr-1997             27-May-2014
                                                              Title: High Efficiency Metal Membrane Element, Filter and Process
                                                                     for Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                          EPC          95924003.7            0766589                  69504075.8              Granted
Germany, Federal Republic of                   20-Jun-1995           09-Apr-1997              12-Aug-1998             20-Jun-2015
                                                              Title: High Efficiency Metal Membrane Getter Element and Process
                                                                     for Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                          EPC          95927251.9            0768913                  69502024.2              Granted
Germany, Federal Republic of                   26-Jun-1995           23-Apr-1997              08-Apr-1998             26-Jun-2015
                                                              Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                     Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-273/                          EPC          88104383.0            0283961                  P3854793.7              Granted
Germany, Federal Republic of                   18-Mar-1988                                    20-Dec-1995             18-Mar-2008
                                                              Title: Process and Composition for Purifying Arsine, Phosphine,
                                                                     Ammonia, and Inert Gases to Remove Lewis Acid and Oxident
                                                                     Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                   Patent List                                        Page: 2
------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase               Case           Application        Publication          Patent             Status
Country Name                      Type           Number/Date        Number/Date          Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------
<S>                               <C>            <C>                <C>                  <C>                <C>
MCA-275/                          EPC            88104393.9         0283965              0283965            Granted
Germany, Federal Republic of                     18-Mar-1988                             08-Jun-1994        18-Mar-2008
                                                               Title: Process and Composition for Drying of Gaseous Hydrogen
                                                                      Halides

--------------------------------------------------------------------------------------------------------------------------------
MCA-276/                          EPC            90905985.9         0521849              P69024976.4        Granted
Germany, Federal Republic of                     30-Mar-1990                             17-Jan-1996        30-Mar-2010
                                                               Title: Process, Composition and Apparatus for Purifying Inert
                                                                      Gases to Remove Lewis Acid & Oxidant Impurities Therefrom

---------------------------------------------------------------------------------------------------------------------------------
MCA-278/                          EPC            92903528.5         0565610               0565610            Granted
Germany, Federal Republic of                     13-Dec-1991        25-Jun-1992           03-Nov-1999        13-Dec-2011
                                                               Title: In-Line Detector System for Real-Time Determination of
                                                                      Impurity Concentration in a Flowing Gas Stream

----------------------------------------------------------------------------------------------------------------------------------
MCA-289/                          PCT            96945331.5                                                  Pending
Germany, Federal Republic of                     13-Dec-1996
                                                               Title: Formation of Dendritic Metal Powders

----------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                         EPC            97115631.0                                                  Pending
Germany, Federal Republic of                     09-Sep-1997
                                                               Title: Apparatus for Isolating and Containing Reactive
                                                                      Medium

-----------------------------------------------------------------------------------------------------------------------------------
MCA-296/                          EPC            97109973.4         0815928T1                                 Published
Germany, Federal Republic of                     18-Jun-1997        28-May-1998
                                                               Title: Low Volume Disposable Filter Module(LVD)

-----------------------------------------------------------------------------------------------------------------------------------
MCA-297/                          EPC            97111656.1                                                   Pending
Germany, Federal Republic of                     09-Jul-1997
                                                               Title: Disposable Separation Module with Quick Connect Capability

-----------------------------------------------------------------------------------------------------------------------------------
MCA-309                           EPC            98114019.7         69800126              69800126            Granted
Germany, Federal Republic of                     27-Jul-1998        21-Sep-2000           21-Sep-2000
                                                               Title: Composition and Process for Removing Moisture from
                                                                      Hydrogen Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-343                           ORD            P3838333.0                               3838333             Granted
Germany, Federal Republic of                     11-Nov-1988         16-Nov-1989          10-Dec-1990         11-Nov-2008
                                                               Title: Capacitance Manometer Having Stress Relieve for Fixed
                                                                      Electrode

-----------------------------------------------------------------------------------------------------------------------------------
MCA-358/                          ORD            P3408779.6          3408779              3408779.6           Granted
Germany, Federal Republic of                     09-Mar-1984         21-Mar-1985          22-Jul-1993         09-Mar-2004
                                                               Title: Adjustable Laminar Flow Bypass

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/                          EPC            95940785.9                                                   Pending
Germany, Federal Republic of                     20-Nov-1995
                                                               Title: Flow Controller, Parts of Flow Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21,2001                                   Patent List                                              Page: 3
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase              Case          Application        Publication          Patent          Status
Country Name                     Type          Number/Date        Number/Date          Number/Date     Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                              <C>           <C>                <C>                  <C>             <C>
MCA-359/3                        EPC           99108929.3                                              Pending
Germany, Federal Republic of                   05-May-1999

                                                              Title: Flow Controller, Parts of Flow Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                         EPC           87115487.8         0275374              3773883.6       Granted
Germany, Federal Republic                      22-Oct-1987                             16-OCt-1991     22-Oct-2007

                                                              Title: Flow Responsive Transmitter and Indicator
-----------------------------------------------------------------------------------------------------------------------------------

</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                   Patent List                                                    Page 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase              Case         Application           Publication              Patent                  Status
Country Name                     Type         Number/Date           Number/Date              Number/Date             Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                              <C>          <C>                   <C>                      <C>                     <C>
MCA-155/                          ORD          89107944.4            0340732                   0340732                Granted
European Patent Convention                     02-May-1989                                     05-Jul-1995             02-May-2009
                                                              Title: Fluorcarbon Membranes and Process for Making Fluorocarbon
                                                                     Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-173/                          PCT          86907119.1            92/05                    0262151                 Granted
European Patent Convention                     30-Oct-1986           29-Jan-1992              29-Jan-1992             30-Oct-2006
                                                              Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-187/                          ORD          92108369.7            0513843                  513843                  Granted
European Patent Convention                     18-May-1992           19-Nov-1992              17-Jul-1996             18-May-2012
                                                              Title: Integrated Dispensing System and Method for Filtering and
                                                                     Dispensing Fluid

------------------------------------------------------------------------------------------------------------------------------------
MCA-218/                          ORD          93114362.2            0588217                  0588217                 Granted
European Patent Convention                     07-Sep-1993           23-Mar-1994              05-Mar-1997             07-Sep-2013
                                                              Title: Reactive Matrix for Removing Impurities from Hydride and Inert
                                                                     Gases and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-224/                          ORD          93115812.5            0591847A2                                        Published
European Patent Convention                     30-Sep-1993           13-Apr-1994                                      30-Sep-2013
                                                              Title: Apparatus for Monitoring Impurities in a Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-235/                          PCT          92918910                                       559904                  Granted
European Patent Convention                     04-Sep-1992                                    23-Jul-1997             04-Sep-2012

                                                              Title: Metallic Porous Membrane and Method of Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-236/                          ORD          94108234.9            0627256                  0627256                 Granted
European Patent Convention                     27-May-1994           07-Dec-1994              04-Dec-1996             27-May-2014
                                                              Title: High Efficiency Metal Membrane Element, Filter and Process
                                                                     for Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-262/                          PCT          95916458.3                                                             Pending
European Patent Convention                     25-Apr-1995
                                                              Title: Compositions and Processes for Separating and Concentrating
                                                                     Certain Ions from Mixed Ion Solutions Using Ion-Binding Ligands
                                                                     Bonded to Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                          PCT          95924003.7            0766589                  0766589                 Granted
European Patent Convention                     20-Jun-1995           09-Apr-1997              12-Aug-1998             20-Jun-2015
                                                              Title: High Efficiency Metal Membrane Getter Element and Process for
                                                                     Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                          PCT          95927251.9            0768913                  0768913                 Granted
European Patent Convention                     26-Jun-1995           23-Apr-1997              16-Feb-1999             26-Jun-2015
                                                              Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                     Manufacture

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>



<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                 Patent List                                                    Page: 2
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case         Application          Publication            Patent                   Status
Country Name                  Type         Number/Date          Number/Date            Number/Date              Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>          <C>                  <C>                    <C>                      <C>
MCA-273/                      ORD          88104383             0283961                0283961                  Granted
European Patent Convention                 18-Mar-1988          28-Sep-1988            20-Dec-1995              18-Mar-2008
                                                          Title: Process and Composition for Purifying Arsine, Phosphine, Ammonia,
                                                                 and Inert Gases to Remove Lewis Acid and Oxident Impurities
                                                                 Therefrom

-----------------------------------------------------------------------------------------------------------------------------------
MCA-275/                      ORD          88104393.9           0283965                0283965                  Granted
European Patent Convention                 18-Mar-1988                                 08-Jun-1994              18-Mar-2008
                                                          Title: Process and Composition for Drying of Gaseous Hydrogen Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-278/                      PCT          92903528.5           0565610                                         Published
European Patent Convention                 13-Dec-1991          25-Jun-1992                                     13-Dec-2011
                                                          Title: In-Line Detector System for Real-Time Determination of Impurity
                                                                 Concentration in a Flowing Gas Stream

-----------------------------------------------------------------------------------------------------------------------------------
MCA-278/4                     PCT          95928680.9           0720739                0720739                  Granted
European Patent Convention                 30-Jun-1995          10-Jul-1996            10-Jul-1996              30-Jun-2015
                                                          Title: In-Line Detector System for Real-Time Determination of Impurity
                                                                 Concentration in a Flowing Gas Stream

-----------------------------------------------------------------------------------------------------------------------------------
MCA-278/5                     PCT          99200890.4           0939315                                         Published
European Patent Convention                 13-Dec-1991          01-Sep-1999
                                                          Title: In-Line Detector System for Real-Time Determination of Impurity
                                                                 Concentration in a Flowing Gas Stream

-----------------------------------------------------------------------------------------------------------------------------------
MCA-280/                      PCT         94923268.0            0714425                                         Published
European Patent Convention                28-Jun-1994           05-Jun-1996                                     28-Jun-2014
                                                          Title: Process and Composition for Purifying Semiconductor Process Gases
                                                                 to Remove Lewis Acid and Oxidant Impurities Therefrom

-----------------------------------------------------------------------------------------------------------------------------------
MCA-289/                      PCT         96945331.5            0881957                                         Published
European Patent Convention                13-Dec-1996           09-Dec-1998                                     13-Dec-2016
                                                          Title: Formation of Dendritic Metal Powders

-----------------------------------------------------------------------------------------------------------------------------------
MCA-289/D                     DIV         00110665.7            1043098                                         Published
European Patent Convention                18-May-2000           11-Oct-2000
                                                          Title: Formation of Dendritic Metal Powders

-----------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                     ORD         97115631.0            0831268                                         Published
European Patent Convention                09-Sep-1997           25-Mar-1998
                                                          Title: Apparatus for Isolating and Containing Reactive Medium

-----------------------------------------------------------------------------------------------------------------------------------
MCA-296                       ORD         97109973.4            0815928                0815928                  Published
European Patent Convention                18-Jun-1997           07-Jan-1998
                                                          Title: Low Volume Disposable Filter Module (LVD)

-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 3
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case         Application          Publication            Patent                   Status
Country Name                  Type         Number/Date          Number/Date            Number/Date              Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>          <C>                  <C>                    <C>                      <C>
MCA-297/                      ORD          97111656.1           0818228                                         Published
European Patent Convention                 09-Jul-1997          14-Jan-1998
                                                         Title: Disposable Separation Module with Quick Connect Capability

-----------------------------------------------------------------------------------------------------------------------------------
MCA-303/                      PCT          98924881.0                                                           Nationaliz
European Patent Convention                 26-May-1998
                                                         Title: Vibrationally-Induced Dynamic Membrane Filtration

-----------------------------------------------------------------------------------------------------------------------------------
MCA-308/                      PCT          98946069.6           1019709                                         Published
European Patent Convention                 10-Sep-1998          19-Jul-2000
                                                         Title: Method and Apparatus for Measuring Moisture Content in a Gas

-----------------------------------------------------------------------------------------------------------------------------------
MCA-309/                      ORD          98114019.7           0894527                0894527                  Published
European Patent Convention                 27-Jul-1998          03-Feb-1999
                                                         Title: Composition and Process for Removing Moisture from Hydrogen Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-328/                      PCT          98946014.2           1028800                                         Published
European Patent Convention                 10-Sep-1998          23-Aug-2000
                                                         Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                from a Gas

-----------------------------------------------------------------------------------------------------------------------------------
MCA-338/                      ORD         99918761.0            1076633                                         Published
European Patent Convention                01-Aug-2000           21-Feb-2001
                                                         Title: Reactive Matrix for Removing Moisture from a Fluorine Containing
                                                                Gas and Process

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/                      DIV         99108928.5            0940741                                         Published
European Patent Convention                05-May-1999           08-Sep-1999
                                                         Title: Flow Controller, Parts of Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/1                     PCT         95940785.9            0800672                0800672                  Pending
European Patent Convention                20-Nov-1995                                                           20-Nov-2015
                                                         Title: Flow Controller, Parts of Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/2                     DIV         99108927.7            0940740                                         Published
European Patent Convention                05-May-1999           09-Sep-1999
                                                         Title: Flow Controller, Parts of Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/3                     DIV         99108929.3            0940742                                         Published
European Patent Convention                05-May-1999           08-Sep-1999
                                                         Title: Flow Controller, Parts of Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                      ORD         87115487.8                                   0275374                  Granted
European Patent Convention                22-Oct-1987                                  16-Oct-1991              22-Oct-2007
                                                         Title: Flow Responsive Transmitter and Indicator

-----------------------------------------------------------------------------------------------------------------------------------

</TABLE>

<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                    Patent List                                                      Page 4
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case        Application           Publication          Patent           Status
Country Name                          Type        Number/Date           Number/Date          Number/Date      Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>         <C>                   <C>                  <C>              <C>
MCA-380/                              ORD         98250044.9            0860648                               Published
European Patent Convention                        05-Feb-1998           26-Aug-1998
                                                            Title: Automated Gas Cylinder Tracking System

------------------------------------------------------------------------------------------------------------------------------------
MCA-388/                              ORD         99106951.9            0959331                               Published
European Patent Convention                        08-Apr-1999           24-Nov-1999
                                                            Title: Apparatus for Dispensing Precise Volumes of Liqiud

------------------------------------------------------------------------------------------------------------------------------------
MCA-399/                              PCT         999372188                                                   Pending
European Patent Convention                        08-Feb-2001
                                                            Title: Connector Apparatus and System Including Connector Apparatus

------------------------------------------------------------------------------------------------------------------------------------
MCA-401/                              ORD         00117948.0            1081098                               Published
European Patent Convention                        21-Aug-2000           07-Mar-2001
                                                            Title: Filtration and Purification System for Aqueous Hydrofluoric Acid

------------------------------------------------------------------------------------------------------------------------------------
MCA-443/                              ORD         00124812.9                                                  Pending
European Patent Convention                        14-Nov-2000
                                                            Title: Gas Flow Purification System and Method

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>


-----------------------------------------------------------------------------------------------------------------------------------

Wednesday, March 21,2001                             Patent List                                                            Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-275/                     EPC       88104393.9        0283965              0283965                   Granted
Spain                                  18-Mar-1988                            08-Jun-1994               18-Mar-2008
                                                     Title: Process and Composition for Drying of Gaseous Hydrogen Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/                     EPC       95940785.9                                                        Pending
                                       20-Nov-1995
                                                     Title: Flow Controller, Parts of Flow Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/3                    EPC       99108929.3                                                        Pending
Spain                                  05-May-1999

                                                     Title: Flow Controller, Parts of Flow Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                         Patent List                                                Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case          Application           Publication             Patent             Status
Country Name                 Type          Number/Date           Number/Date             Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                         <C>           <C>                    <C>                     <C>                <C>
MCA-155/                     EPC           89107944.4            0340732                 0340732            Granted
France                                     02-May-1989                                   05-Jul-1995        02-May-2009
                                                          Title: Fluorcarbon Membranes and Process for Making Fluorocarbon
                                                                 Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-173/                     EPC           86907119.1            92/05                   0262151            Granted
France                                     30-Oct-1986           29-Jan-1992             29-Jan-1992        30-Oct-2006
                                                          Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-187/                     EPC           92108369.7            0513843                 513843             Granted
France                                     18-May-1992           19-Nov-1992             17-Jul-1996        18-May-2012
                                                          Title: Integrated Dispensing System and Method for Filtering and
                                                                 Dispensing Fluid

-----------------------------------------------------------------------------------------------------------------------------------
MCA-218/                     EPC           93114362.2            0588217                 0588217            Granted
France                                     07-Sep-1993           23-Mar-1994             05-Mar-1997        07-Sep-2013
                                                          Title: Reactive Matrix for Removing Impurities from Hydride and Inert
                                                                 Gases and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-224/                     EPC           93115812.5            0591847A2                                  Published
France                                     30-Sep-1993           13-Apr-1994                                30-Sep-2013
                                                          Title: Apparatus for Monitoring Impurities in a Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-235/                     EPC           92918910                                      559904             Granted
France                                     04-Sep-1992                                   23-Jul-1997        04-Sep-2012
                                                          Title: Metallic Porous Membrane and Method of Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-236/                     EPC           94108234.9            0627256                 0627256            Granted
France                                     27-May-1994           07-Dec-1994             04-Dec-1996        27-May-2041
                                                          Title: High Efficiency Metal Membrane Element and Process for Making

-----------------------------------------------------------------------------------------------------------------------------------
MCA-265/                     EPC           95924003.7            0766589                 0766589            Granted
France                                     20-Jun-1995           09-Apr-1997             12-Aug-1998        20-Jun-2015
                                                          Title: High Efficiency Metal Membrane Getter Element and Process for
                                                                 Making

-----------------------------------------------------------------------------------------------------------------------------------
MCA-267/                     EPC           95927251.9            0768913                 0768913            Granted
France                                     26-Jun-1995           23-Apr-1997             08-Apr-1998        26-Jun-2015
                                                          Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                 Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-273/                     EPC           88104383              0283961                 0283961            Granted
France                                     18-Mar-1998           28-Sep-1988             20-Dec-1995        18-Mar-2008
                                                          Title: Process and Composition for Purifying Arsine, Phosphine, Ammonia,
                                                                 and Inert Gases to Remove Lewis Acid and Oxident Impurities
                                                                 Therefrom
------------------------------------------------------------------------------------------------------------------------------------
</TABLE>














<PAGE>

<TABLE>
<CAPTION>
----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                            Patent                                                               Page: 2
----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration/Date
----------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-275/                     EPC       88104393.9        0283965              0283965                   Granted
France                                 18-Mar-1988                            08-Jun-1994               18-Mar-2008
                                                     Title: Process and Composition for Drying of Gaseous Hydrogen Halides


----------------------------------------------------------------------------------------------------------------------------------
MCA-276/                     EPC       90905985.9        0521849              0521849                   Granted
France                                 30-Mar-1990       13-Jan-1993          17-Jan-1996               30-Mar-2010
                                                     Title: Process, Composition and Apparatus for Purifying Inert Gases to Remove
                                                            Lewis Acid & Oxidant Impurities Therefrom


---------------------------------------------------------------------------------------------------------------------------------
MCA-278/                     EPC       92903528.5        0565610                                        Published
France                                 13-Dec-1991       25-Jun-1992                                    13-Dec-2011
                                                     Title: In-Line Detector System for Real-Time Determination of Impurity
                                                            Concentration in a Flowing Gas Stream


---------------------------------------------------------------------------------------------------------------------------------
MCA-289/                     PCT                                                                        Pending
France                                 13-Dec-1996
                                                     Title: Formation of Dendritic Metal Powders


---------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                    EPC       97115631.0                                                       Pending
France                                 09-Sep-1997
                                                     Title: Apparatus for Isolating and Containing Reactive Medium


---------------------------------------------------------------------------------------------------------------------------------
MCA-296/                     EPC       97109973.4                                                       Pending
France                                 18-Jun-1997
                                                     Title: Low Volume Disposable Filter Module (LVD)


---------------------------------------------------------------------------------------------------------------------------------
MCA-297/                     EPC       97111656.1                                                       Pending
France                                 09-Jul-1997
                                                     Title: Disposable Separation Module with Quick Connect Capability


---------------------------------------------------------------------------------------------------------------------------------
MCA-309/                     EPC                                                                        Unfiled
France
                                                     Title: Composition and Process for Removing Moisture from Hydrogen Halides


---------------------------------------------------------------------------------------------------------------------------------
MCA-343/                     ORD       8809402                                8809402                   Granted
France                                 11-Jul-1988       10-Nov-1989          03-Sep-1993               11-Jul-2008
                                                     Title: Capacitance Manometer Having Stress Relieve for Fixed Electrode

---------------------------------------------------------------------------------------------------------------------------------
MCA-358/                     ORD       84/02519          2551545              84/20519                  Granted
France                                 20-Feb-1984                            21-Jul-1989               20-Feb-2004
                                                     Title: Adjustable Laminar Flow Bypass


---------------------------------------------------------------------------------------------------------------------------------
MCA-359/                     EPC       95940785.9                                                       Pending
France                                 20-Nov-1995
                                                     Title: Flow Controller, Parts of Flow Controller and Related Method


---------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                             Patent List                                                          Page: 3
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-359/3                    EPC       99108929.3                                                       Pending
France                                 05-May-1999
                                                     Title: Flow Controller, Parts of Flow Controller and Related Method


----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                     EPC       87115487.8        0275374              87115487.8                Granted
France                                 22-Oct-1987                            16-Oct-1991               22-Oct-2007
                                                     Title: Flow Responsive Transmitter and Indicator


----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>

------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                            Patent List                                            Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase            Case     Application           Publication          Patent          Status
Country Name                   Type     Number/Date           Number/Date          Number/Date     Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                            <C>      <C>                   <C>                  <C>             <C>
MCA-155/                       EPC      89107944.4            0340732              0340732         Granted
United Kingdom                          02-May-1989                                05-Jul-1995     02-May-2009
                                                       Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-173/                       EPC      86907119.1            92/05                0262151         Granted
United Kingdom                          30-Oct-1986           29-Jan-1992          29-Jan-1992     30-Oct-2006
                                                       Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-187/                       EPC      92108369.7            0513843              513843          Granted
United Kingdom                          18-May-1992           19-Nov-1992          17-Jul-1996     18-May-2012
                                                       Title: Integrated Dispensing System and Method for Filtering and
                                                              Dispensing Fluid

------------------------------------------------------------------------------------------------------------------------------------
MCA-218/                       EPC      93114362.2            0588217              0588217         Granted
United Kingdom                          07-Sep-1993                                05-Mar-1997     07-Sep-2013
                                                       Title: Reactive Matrix for Removing Impurities from Hydride and Inert
                                                              Gases and Process
------------------------------------------------------------------------------------------------------------------------------------
MCA-224/                       EPC      93115812.5            0591847A2                            Published
United Kingdom                          30-Sep-1993           13-Apr-1994                          30-Sep-2013
                                                       Title: Apparatus for Monitoring Impurities in a Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-235/                       EPC      92918910                                   559904           Granted
United KIngdom                          04-Sep-1992                                23-Jul-1997      04-Sep-2012
                                                       Title: Metallic Porous Membrane and Method of Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-236/                       EPC      94108234.9            0627256              0627256          Granted
United Kingdom                          27-May-1994           07-Dec-1994          04-Dec-1996      27-May-2041
                                                       Title: High Efficiency Metal Membrane Element, Filter and Process for
                                                              Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                       EPC      95924003.7            0766589              0766589          Granted
United Kingdom                          20-Jun-1995           09-Apr-1997          12-Aug-1998      20-Jun-2015
                                                       Title: High Efficiency Metal Membrane Getter Element and Process for Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-273                        EPC      88104383              0283961              0283961          Granted
United Kingdom                          18-Mar-1988           28-Sep-1988          20-Dec-1995      18-Mar-2008
                                                       Title: Process and Composition for Purifying Arsine, Phosphine, Ammonia,
                                                              and Inert Gases to Remove Lewis Acid and Oxident Impurities
                                                              Therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-275/                       EPC      88104393.9            0283965              0283965          Granted
United Kingdom                          18-Mar-1988                                08-Jun-1994      18-Mar-2008
                                                       Title: Process and Composition for Drying of Gaseous Hydrogen Halides

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>



<PAGE>


<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 2
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-276/                      EPC       90905985.9          0521849             0521849             Granted
United Kingdom                          30-Mar-1990         13-Jan-1993         17-Jan-1996         30-Mar-2010
                                             Title: Process, Composition and Apparatus for Purifying Inert Gases to
                                                    Remove Lewis Acid & Oxidant Impurities Therefrom
-------------------------------------------------------------------------------------------------------------------------
MCA-289/                      PCT                                                                   Pending
United Kingdom                          13-Dec-1996
                                             Title: Formation of Dendritic Metal Powders
-------------------------------------------------------------------------------------------------------------------------
MCA-290/1                     EPC       97115631.0                                                  Pending
United Kingdom                          09-Sep-1997
                                             Title: Apparatus for Isolating and Containing Reactive Medium
-------------------------------------------------------------------------------------------------------------------------
MCA-296/                      EPC       97 109 973.4                                                Pending
United Kingdom                          18-Jun-1997
                                             Title: Low Volume Disposable Filter Module (LVD)
-------------------------------------------------------------------------------------------------------------------------
MCA-297/                      EPC       97111656.1                                                  Pending
United Kingdom                          09-Jul-1997
                                             Title: Disposable Separation Module with Quick Connect Capability
-------------------------------------------------------------------------------------------------------------------------
MCA-309/                      EPC                                                                   Unfiled
United Kingdom
                                             Title: Composition and Process for Removing Moisture from Hydrogen Halides
-------------------------------------------------------------------------------------------------------------------------
MCA-343/                      ORD       8826782.8                               2218207             Granted
United Kingdom                          16-Nov-1988         08-Nov-1989         08-Apr-1992         16-Nov-2008
                                             Title: Capacitance Manometer Having Stress Relieve for Fixed Electrode
-------------------------------------------------------------------------------------------------------------------------
MCA-358/                      ORD       84/000171           2146781             2146781A1           Granted
United Kingdom                          05-Jan-1984         24-Apr-1985         13-Apr-1988         05-Jan-2004
                                             Title: Adjustable Laminar Flow Bypass
-------------------------------------------------------------------------------------------------------------------------
MCA-359/                      EPC       95940785.9                                                  Pending
United Kingdom                          20-Nov-1995
                                             Title: Flow Controller, Parts of Flow Controller and Related Method
-------------------------------------------------------------------------------------------------------------------------
MCA-372/                      EPC       87115487.8                              0275374             Granted
United Kingdom                          22-Oct-1987                             16-Oct-1991         22-Oct-2007
                                             Title: Flow Responsive Transmitter and Indicator
-------------------------------------------------------------------------------------------------------------------------
MCA-524/                      DES       2094686                                                     Pending
United Kingdom                          03-Aug-2000
                                             Title: OPTIMIZER FILTER AND MANIFOLD
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 1
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-275/                      EPC       88104393.9          0283965             0283965             Granted
Greece                                  18-Mar-1988                             08-Jun-1994         18-Mar-2008
                                             Title: Process and Composition for Drying of Gaseous Hydrogen Halides
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                         Patent List                                       Page: 1
---------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase         Case            Application           Publication          Patent             Status
Country Name                Type            Number/Date           Number/Date          Number/Date        Expiration Date
---------------------------------------------------------------------------------------------------------------------------
<S>                         <C>             <C>                   <C>                  <C>                <C>
MCA-431/                    PCT                                                                           Pending
Indonesia                                   22-Oct-1999
                                                          Title: A System and Method for Integration of Gas Components

---------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                         Patent List                                              Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase         Case            Application           Publication          Patent             Status
Country Name                Type            Number/Date           Number/Date          Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                         <C>             <C>                   <C>                  <C>                <C>
MCA-280/                    ORD             110156                                     P/110156           Granted
Israel                                      29-Jun-1994                                24-May-1998        29-Jun-2014
                                                          Title: Process and Composition for Purifying Semiconductor Process Gases
                                                                 to Remove Lewis Acid and Oxidant Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>











<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 1
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-155/                      EPC       89107944.4          0340732             0340732             Granted
Italy                                   02-May-1989                             05-Jul-1995         02-May-2009
                                             Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-173/                      EPC       86907119.1          92/05               0262151             Granted
Italy                                   30-Oct-1986         29-Jan-1992         29-Jan-1992         30-Oct-2006
                                             Title: Filter Pump Head Assembly
-------------------------------------------------------------------------------------------------------------------------
MCA-265/                      EPC       95924003.7          0766589             0766589             Granted
Italy                                   20-Jun-1995         09-Apr-1997         12-Aug-1998         20-Jun-2015
                                             Title: High Efficiency Metal Membrane Getter Element and Process for Making
-------------------------------------------------------------------------------------------------------------------------
MCA-267/                      EPC       95927251.9          0768913             0768913             Granted
Italy                                   26-Jun-1995         23-Apr-1997         08-Apr-1998         26-Jun-2015
                                             Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                    Manufacture
-------------------------------------------------------------------------------------------------------------------------
MCA-273/                      EPC       88104383            0283961             0283961             Granted
Italy                                   18-Mar-1988         28-Sep-1988         20-Dec-1995         18-Mar-2008
                                             Title: Process and Composition for Purifying Arsine, Phosphine, Ammonia,
                                                    and Inert Gases to Remove Lewis Acid and Oxident Impurities Therefrom
-------------------------------------------------------------------------------------------------------------------------
MCA-275/                      EPC       88104393.9          0283965             0283965             Granted
Italy                                   18-Mar-1988                             08-Jun-1994         18-Mar-2008
                                             Title: Process and Composition for Drying of Gaseous Hydrogen Halides
-------------------------------------------------------------------------------------------------------------------------
MCA-276/                      EPC       90905985.9          0521849             0521849             Granted
Italy                                   30-Mar-1990         13-Jan-1993         17-Jan-1996         30-Mar-2010
                                             Title: Process, Composition and Apparatus for Purifying Inert Gases to
                                                    Remove Lewis Acid & Oxidant Impurities Therefrom
-------------------------------------------------------------------------------------------------------------------------
MCA-289/                      PCT                                                                   Pending
Italy                                   13-Dec-1996
                                             Title: Formation of Dendritic Metal Powders
-------------------------------------------------------------------------------------------------------------------------
MCA-290/1                     EPC       97115631.0                                                  Pending
Italy                                   09-Sep-1997
                                             Title: Apparatus for Isolating and Containing Reactive Medium
-------------------------------------------------------------------------------------------------------------------------
MCA-296/                      EPC       97 109 973.4                                                Pending
Italy                                   18-Jun-1997
                                             Title: Low Volume Disposable Filter Module (LVD)
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                               Patent List                                            Page: 2
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-297/                      EPC       97111656.1                                                  Pending
Italy                                   09-Jul-1997
                                                       Title: Disposable Separation Module with Quick Connect Capability
-------------------------------------------------------------------------------------------------------------------------
MCA-309/                      EPC                                                                   Unfiled
Italy
                                                       Title: Composition and Process for Removing Moisture from Hydrogen
                                                              Halides
-------------------------------------------------------------------------------------------------------------------------
MCA-359/                      EPC       95940785.9                                                  Pending
Italy                                   20-Nov-1995
                                                       Title: Flow Controller, Parts of Flow Controller and Related
                                                              Method
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 1
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-131/                      ORD       60-504408           07-017782           2128513             Granted
Japan                                   08-Oct-1985         01-Mar-1995         25-Apr-1997         08-Oct-2005
                                             Title: Microporous Membranes of Ultrahigh Molecular Weight Polyethylene
-------------------------------------------------------------------------------------------------------------------------
MCA-131/2                     PCT       06-041793           7-48471             2727296             Published
Japan                                   08-Oct-1985         11-Mar-1998                             08-Oct-2005
                                             Title: Microporous Membranes of Ultrahigh Molecular Weight Polyethylene
-------------------------------------------------------------------------------------------------------------------------
MCA-155/                      ORD       112400/89                               2573524             Granted
Japan                                   02-May-1989         22-Jan-1997         24-Oct-1996         02-May-2009
                                             Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-155/1                     DIV       087672/95           8-34874             2548092             Granted
Japan                                   22-Mar-1995         06-Feb-1996         08-Aug-1996         02-May-2009
                                             Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-173/                      PCT       506094/1986                             2594551             Granted
Japan                                   30-Oct-1996                             19-Dec-1996         30-Oct-2006
                                             Title: Filter Pump Head Assembly
-------------------------------------------------------------------------------------------------------------------------
MCA-187/                      ORD       147955/92                                                   PENDING
Japan                                   15-May-1992                                                 15-May-2012
                                             Title: Integrated Dispensing System and Method for Filtering and Dispensing
                                                    Fluid
-------------------------------------------------------------------------------------------------------------------------
MCA-218/                      ORD       5246030             6228233                                 Published
Japan                                   08-Sep-1993         16-Aug-1994                             08-Sep-2013
                                             Title: Reactive Matrix for Removing Impurities from Hydride and Inert Gases
                                                    and Process
-------------------------------------------------------------------------------------------------------------------------
MCA-224/B                     ORD       276034/93                                                   PENDING
Japan                                   08-Oct-1993                                                 08-Oct-2013
                                             Title: Apparatus for Monitoring Impurities in a Gas Stream
-------------------------------------------------------------------------------------------------------------------------
MCA-235/                      ORD       91250220                                                    Pending
Japan                                   04-Sep-1991
                                             Title: Metallic Porous Membrane and Method of Manufacture
-------------------------------------------------------------------------------------------------------------------------
MCA-235/1                     DIV       92258851                                5195110             Granted
Japan                                   03-Sep-1992                             03-Aug-1993         03-Sep-2012
                                              Title: Metallic Porous Membrane and Method of Manufacture
-------------------------------------------------------------------------------------------------------------------------
MCA-236/                      ORD       06-144102           7-136434                                Published
Japan                                   03-Jun-1994         30-May-1995                             03-Jun-2014
                                             Title: High Efficiency Metal Membrane Element, Filter and Process for Making
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                        Patent List                                                Page: 2
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case          Application           Publication          Patent          Status
Country Name                          Type          Number/Date           Number/Date          Number/Date     Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>           <C>                                        <C>             <C>
MCA-262/                              PCT           7-527746                                   3100638         Granted
Japan                                               25-Apr-1995                                18-Aug-2000     25-Apr-2015
                                                                 Title: Compositions and Processes for Separating and Concentrating
                                                                        Certain Ions from Mixed Ion Solutions Using Ion-Binding
                                                                        Ligands Bonded to Membranes
------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                              PCT           08-502567             9-508580                             Published
Japan                                               20-Jun-1995           02-Sep-1997                          20-Jun-2015
                                                                 Title: High Efficiency Metal Membrane Getter Element and Process
                                                                        for Making
------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                              PCT           08-503988             10-502296                            Published
Japan                                               26-Jun-1995           03-Mar-1998                          26-Jun-2015
                                                                 Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                        Manufacture
------------------------------------------------------------------------------------------------------------------------------------
MCA-273/                              ORD           67458/88              57314/93             1846411         Granted
Japan                                               23-Mar-1988           23-Aug-1993          07-Jun-1994     23-Mar-2008
                                                                 Title: Process and Composition for Purifying Arsine, Phosphine,
                                                                        Ammonia, and Inert Gases to Remove Lewis Acid and Oxident
                                                                        Impurities Therefrom
------------------------------------------------------------------------------------------------------------------------------------
MCA-275/                              ORD           67457/88              61416/95             2031606         Granted
Japan                                               23-Mar-1988           05-Jul-1995          19-Mar-1996     23-Mar-2008
                                                                 Title: Process and Composition for Drying of Gaseous Hydrogen
                                                                        Halides
------------------------------------------------------------------------------------------------------------------------------------
MCA-276/                              PCT           505716/90                                  1001627         Granted
Japan                                               30-Mar-1990           17-Oct-1991          12-Nov-1999     30-Mar-2010
                                                                 Title: Process, Composition and Apparatus for Purifying Inert Gases
                                                                        to Remove Lewis Acid & Oxidant Impurities Therefrom
------------------------------------------------------------------------------------------------------------------------------------
MCA-278/                              PCT           503995/96                                                  Pending
Japan                                               30-Jun-1995                                                30-Jun-2015
                                                                 Title: In-Line Detector System for Real-Time Determination of
                                                                        Impurity Concentration in a Flowing Gas Stream
------------------------------------------------------------------------------------------------------------------------------------
MCA-278/1                             PCT           503341/92                                                  Pending
Japan                                               13-Dec-1991                                                13-Dec-2011
                                                                 Title: In-Line Detector System for Real-Time Determination of
                                                                        Impurity Concentration in a Flowing Gas Stream
------------------------------------------------------------------------------------------------------------------------------------
MCA-280/                              PCT           503603/95                                                  Pending
Japan                                               28-Jun-1994                                                28-Jun-2014

                                                                 Title: Process and Composition for Purifying Semiconductor Process
                                                                        Gases to Remove Lewis Acid and Oxidant Impurities Therefrom
------------------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>


<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 3
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-289/                      PCT       09-530134                                                   Pending
Japan                                   13-Dec-1996
                                             Title: Formation of Dendritic Metal Powders
-------------------------------------------------------------------------------------------------------------------------
MCA-290/1                     ORD       09-259391           11-19438                                Published
Japan                                   09-Sep-1997         29-Jan-1999
                                             Title: Apparatus for Isolating and Containing Reactive Medium
-------------------------------------------------------------------------------------------------------------------------
MCA-296/                      ORD       09-186059           10-66836                                Published
Japan                                   27-Jun-1997         10-Mar-1998
                                             Title: Low Volume Disposable Filter Module (LVD)
-------------------------------------------------------------------------------------------------------------------------
MCA-297/                      ORD       09-196346           10-71326                                Published
Japan                                   08-Jul-1997         17-Mar-1998
                                             Title: Disposable Separation Module with Quick Connect Capability
-------------------------------------------------------------------------------------------------------------------------
MCA-303/                      PCT       2000-507,464                                                Pending
Japan                                   26-May-1998
                                             Title: Vibrationally-Induced Dynamic Membrane Filtration
-------------------------------------------------------------------------------------------------------------------------
MCA-308/                      PCT       2000-514127                                                 Pending
Japan                                   10-Sep-1998
                                             Title: Method and Apparatus for Measuring Moisture Content in a Gas
-------------------------------------------------------------------------------------------------------------------------
MCA-309/                      ORD       10-209,116          11-139,805                              Published
Japan                                   24-Jul-1998         25-May-1999
                                             Title: Composition and Process for Removing Moisture from Hydrogen Halides
-------------------------------------------------------------------------------------------------------------------------
MCA-328/                      PCT       2000-518772                                                 Pending
Japan                                   10-Sep-1998
                                             Title: Process and Apparatus for Removing Metal Carbonyls and Moisture from
                                                    a Gas
-------------------------------------------------------------------------------------------------------------------------
MCA-343/                      ORD       280250/88                               1701368             Granted
Japan                                   04-Nov-1988         08-Oct-1991         14-Oct-1992         04-Nov-2008
                                             Title: Capacitance Manometer Having Stress Relieve for Fixed Electrode
-------------------------------------------------------------------------------------------------------------------------
MCA-344/                      ORD       4-350321                                92350321            Pending
Japan                                   02-Dec-1992
                                             Title: Thottle Valve
-------------------------------------------------------------------------------------------------------------------------
MCA-358/                      ORD       15298/84            78926/94            1960809             Granted
Japan                                   01-Feb-1984         05-Oct-1994         10-Aug-1995         01-Feb-2004
                                             Title: Adjustable Laminar Flow Bypass
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                        Patent List                                       Page: 4
----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase               Case           Application          Publication             Patent              Status
Country Name                      Type           Number/Date          Number/Date             Number/Date         Expiration Date
----------------------------------------------------------------------------------------------------------------------------------
<S>                               <C>            <C>                  <C>                     <C>                 <C>
MCA-359-1                         PCT            520980/96                                                        Pending
Japan                                            20-Nov-1995                                                      20-Nov-2015
                                                               Title: Flow Controller, Parts of Flow Controller and Related
                                                                      Method

----------------------------------------------------------------------------------------------------------------------------------
MCA-363/                          ORD            149659/97                                                        Pending
Japan                                            06-Jun-1997
                                                               Title: Fluid Flow Meter with Reduced Orientation Sensitivity

----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                          ORD                                                         2566802             Granted
Japan                                            29-Dec-1987                                  03-Oct-1996         29-Dec-2007
                                                              Title: Flow Responsive Transmitter and Indicator

----------------------------------------------------------------------------------------------------------------------------------
MCA-377/                          ORD            247153/92                                                        Pending
Japan                                            25-Aug-1992
                                                               Title: Method for Making Thin Film Piezoresistive Sensor

----------------------------------------------------------------------------------------------------------------------------------
MCA-380/                          ORD            46339/98             267198/98                                   Published
Japan                                            12-Feb-1998          09-Oct-1998
                                                               Title: Automated Gas Cylinder Tracking System

----------------------------------------------------------------------------------------------------------------------------------
MCA-388/                          ORD            11-105336            11-337385               3057082             Granted
Japan                                            13-Apr-1999          10-Dec-1999             14-Apr-2000
                                                               Title: Apparatus for Dispensing Precise Volumes of Liquid

----------------------------------------------------------------------------------------------------------------------------------
MCA-390/C                         PCT            2000-557927                                                      Pending
Japan                                            01-Jul-1999
                                                               Title: Process for Coating a Solid Surface with a Liquid
                                                                      Composition

----------------------------------------------------------------------------------------------------------------------------------
MCA-401/                          ORD                                                                             Unfiled
Japan                                                          Title: Filtration and Purification System for Aqueous Hydrofluoric
                                                                      Acid

----------------------------------------------------------------------------------------------------------------------------------
MCA-435/                          ORD           10-335573                                                        Pending
Japan                                            26-Nov-1998
                                                               Title: Process for Attaching Films, and Spiral Porous Film
                                                                      Conjugate

----------------------------------------------------------------------------------------------------------------------------------
MCA-443/                          ORD            2000-348859                                                     Pending
Japan                                            15-Nov-2000
                                                               Title: Gas Flow Purification System and Method

---------------------------------------------------------------------------------------------------------------------------------
MCA-458/                          ORD            11-143946                                                       Pending
Japan                                            24-May-1999
                                                               Title: A Filter Housing Apparatus

----------------------------------------------------------------------------------------------------------------------------------
</TABLE>


<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                            Patent List                                                            Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country                      Type      Number/Date       Number/Date          Number/Date               Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-173/                     PCT       1987-701174       1991-2902            44321                     Granted
Korea, Republic of                     30-Oct-1986       05-May-1991          16-Sep-1991               30-Oct-2006
                                                     Title: Filter Pump Head Assembly


-----------------------------------------------------------------------------------------------------------------------------------
MCA-218/                     ORD       18087/93          94-7070              259,029                   Granted
Korea, Republic of                                       26-Apr-1994          16-Mar-2000
                                                     Title: Reactive Matrix for Removing Impurities from Hydride and Inert Gases
                                                            and Process


-----------------------------------------------------------------------------------------------------------------------------------
MCA-224/                    ORD        20709/93          949672               10-263724                 Granted
Korea, Republic of                     07-Oct-1993       20-May-1994          19-May-2000               07-Oct-2013
                                                     Title: Apparatus for Monitoring Impurities in a Gas Stream


-----------------------------------------------------------------------------------------------------------------------------------
MCA-236                      ORD       12645/94          95916                272990                    Granted
Korea, Republic of                     04-Jun-1994       03-Jan-1995          31-Aug-2000
                                                     Title: High Efficiency Metal Membrane Element, Filter and Process for Making


-----------------------------------------------------------------------------------------------------------------------------------
MCA-262/                     PCT      706003/1996                                                      Pending
Korea, Republic of                    25-Apr-1995
                                                     Title: Compositions and Processes for Separating and Concentrating Certain
                                                            Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                            Membranes.


-----------------------------------------------------------------------------------------------------------------------------------
MCA-265/                     PCT       707343/96                                                        Pending
Korea, Republic                        20-Jun-1995                                                      20-Jun-2015
                                                     Title: High Efficiency Metal Membrane Getter Element and Process for Making

-----------------------------------------------------------------------------------------------------------------------------------
MCA-267/                     PCT       707589                                                           Pending
Korea, Republic of                     26-Jun-1995
                                                     Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                            Manufacture


-----------------------------------------------------------------------------------------------------------------------------------
MCA-278/2                    ORD       701038/1996       96-705205                                      Published
Korea, Republic of                     30-Apr-1996       09-Oct-1996
                                                     Title: In-Line Detector System for Real-Time Determination of Impurity
                                                            Concentration in a Flowing Gas Stream


-----------------------------------------------------------------------------------------------------------------------------------
MCA-289/                     PCT       1998-706483                                                      Pending
Korea, Republic of                     13-Dec-1996
                                                     Title: Formation of Dendritic Metal Powders


-----------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                    ORD       97-46490          98-24486                                       Published
Korea, Republic of                     10-Sep-1997       06-Jul-!998
                                                     Title: Apparatus for Isolating and Containing Reactive Medium


-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                            Patent List                                                            Page: 2
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>      <C>                <C>                  <C>                       <C>
MCA-296/                     ORD       28338/1997        98-558               240857                    Granted
Korea, Republic of                     27-Jun-1997       30-Mar-1998          29-Oct-1999               27-Jun-2017
                                                     Title: Low Volume Disposable Filter Module (LVD)


------------------------------------------------------------------------------------------------------------------------------------
MCA-297/                     ORD       32306/1997                             225219                    Granted
Korea, Republic of                     11-Jul-1997                            16-Jul-1999               11-Jul-2017
                                                     Title: Disposable Separation Module with Quick Connect Capability


------------------------------------------------------------------------------------------------------------------------------------
MCA-308/                     ORD       7003494                                                          Pending
Korea, Republic of                     10-Sep-1998
                                                     Title: Method and Apparatus for Measuring Moisture Content in a Gas


-----------------------------------------------------------------------------------------------------------------------------------
MCA-309/                     ORD       30358/1998        1999-14247                                     Published
Korea, Republic of                     28-Jul-1998       25-Feb-1999
                                                     Title: Composition and Process for Removing Moisture from Hydrogen Halides


-----------------------------------------------------------------------------------------------------------------------------------
MCA-328/                     PCT                                                                        Pending
Korea, Republic of                     10-Sep-1998
                                                     Title: Process and Apparatus for Removing Metal Carbonyls and Moisture from
                                                     a Gas


-----------------------------------------------------------------------------------------------------------------------------------
MCA-343/                     ORD       16383/88          93-4079              66935                     Granted
Korea, Republic of                     09-Dec-1988       20-May-1993          26-Oct-1993               09-Dec-2008
                                                     Title: Capacitance Manometer Having Stress Relieve for Fixed Electrode


-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/1                    PCT       704536/97                                                        Pending
Korea, Republic of                     20-Nov-1995
                                                     Title: Flow Controller, Parts of Flow Controller and Related Method


-----------------------------------------------------------------------------------------------------------------------------------
MCA-380/                     ORD       98-4266                                                          Pending
Korea, Republic of                     13-Feb-1998
                                                     Title: Automated Gas Cylinder Tracking System


-----------------------------------------------------------------------------------------------------------------------------------
MCA-388/                     ORD       10-1999-14100     1999-83353                                     Published
Korea, Republic of                     20-Apr-1999       25-Nov-1999
                                                     Title: Apparatus for Dispensing Precise Volumes of Liquid


-----------------------------------------------------------------------------------------------------------------------------------
MCA-401/                     ORD       10-2000-49139                                                    Pending
Korea, Republic of                     24-Aug- 2000
                                                     Title: Filtration and Purification System for Aqueous Hydrofluoric Acid


------------------------------------------------------------------------------------------------------------------------------------
MCA-443/                     ORD       10-2000-67580                                                    Pending
Korea, Republic of                     15-Nov-2000
                                                     Title: Gas Flow Purification System and Method


-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                                       Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase             Case      Application         Publication              Patent              Status
Country Name                    Type      Number/Date         Number/Date              Number/Date         Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                             <C>       <C>                 <C>                      <C>                 <C>
MCA-173/                        EPC       86907119.1          92/05                    0262151             Granted
Netherlands                               30-Oct-1986         29-Jan-1992              29-Jan-1992         30-Oct-2006
                                                         Title: Filter Pump Head Assembly
------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                        EPC       95924003.7          0766589                  0766589             Granted
Netherlands                               20-June-1995        09-Apr-1997              12-Aug-1998         20-Jun-2015
                                                         Title: High Efficiency Metal Membrane Getter Element and Process for Making
------------------------------------------------------------------------------------------------------------------------------------
MCA-275/                        EPC       88104393.9          0283965                  0283965             Granted
Netherlands                               18-Mar-1988                                  08-Jun-1994         18-Mar-2008
                                                         Title: Process and Composition for Drying of Gaseous Hydrogen Halides
------------------------------------------------------------------------------------------------------------------------------------
MCA-289/                        PCT                                                                        Pending
Netherlands                               13-Dec-1996
                                                         Title: Formation of Dendritic Metal Powders
------------------------------------------------------------------------------------------------------------------------------------
MCA-296/                        EPC       97109973.4          0815928                  0815928             Published
Netherlands                               18-Jun-1997         07-Jan-1998
                                                         Title: Low Volume Disposable Filter Module (LVD)
------------------------------------------------------------------------------------------------------------------------------------
MCA-309/                        EPC       98114019.7                                   0894527             Pending
Netherlands                               27-Jul-1998
                                                         Title: Composition and Process for Removing Moisture from Hydrogen Halides
------------------------------------------------------------------------------------------------------------------------------------
MCA-358/                        ORD       84/00089                                     8400089             Granted
Netherlands                               11-Jan-1984                                  01-Apr-1985         11-Jan-2004
                                                         Title: Adjustable Laminar Flow Bypass
------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-262/                           PCT            284360                                                           Pending
New Zealand                                       25-Apr-1995
                                                               Title: Composition and Processes for Separating and Concentrating
                                                                      Certain Ions from Mixed Ion Solutions Using Ion-Binding
                                                                      Ligands Bonded to Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-372/                           ORD            222322                                       222322              Granted
New Zealand                                       28-Oct-1987                                  01-May-1991         28-Oct-2007
                                                               Title: Flow Responsive Transmitter and Indicator
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>


<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 1
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-275/                      EPC       88104393.9          0283965             0283965             Granted
Sweden                                  18-Mar-1988                             08-Jun-1994         18-Mar-2008
                                             Title: Process and Composition for Drying of Gaseous Hydrogen Halides
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March, 2001                                        Patent List                                        Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case       Application         Publication           Patent                 Status
Country Name                  Type       Number/Date         Number/Date           Number/Date            Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                           <C>        <C>                 <C>                   <C>                    <C>
MCA-262/                      PCT        9611821-1                                                        Pending
Singapore                                25-Apr-1995
                                                          Title: Compositions and Processes for Separating and Concentrating
                                                                 Certain Ions from Mixed Ion Solutions Using Ion-Binding Ligands
                                                                 Bonded to Membranes

-----------------------------------------------------------------------------------------------------------------------------------
MCA-308/                      ORD        200001653-5                                                      Pending
Singapore                                10-Sep-1998
                                                          Title: Method and Apparatus for Measuring Moisture Content in a Gas

-----------------------------------------------------------------------------------------------------------------------------------
MCA-309/                      ORD        9802799-8                                                        Pending
Singapore                                25-Jul-1998
                                                          Title: Composition and Process for Removing Moisture from Hydrogen
                                                                 Halides

-----------------------------------------------------------------------------------------------------------------------------------
MCA-328/                      PCT        200002513-0                                                      Pending
Singapore                                10-Sep-1998
                                                          Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                 from a Gas

-----------------------------------------------------------------------------------------------------------------------------------
MCA-359/1                     PCT        9702828-6                                 42612                  Granted
Singapore                                20-Nov-1995                               27-Apr-1999            20-Nov-2015
                                                          Title: Flow Controller, Parts of Flow Controller and Related Method

-----------------------------------------------------------------------------------------------------------------------------------
MCA-380/                      ORD        9800245-4           0069267                                      Published
Singapore                                04-Feb-1998         21-Dec-1999
                                                          Title: Automated Gas Cylinder Tracking System

-----------------------------------------------------------------------------------------------------------------------------------
MCA-388/                      ORD        9901833-0                                                        Pending
Singapore                                17-Apr-1999
                                                          Title: Apparatus for Dispensing Precise Volumes of Liquid

-----------------------------------------------------------------------------------------------------------------------------------
MCA-401/                      ORD        200004571-6                                                      Pending
Singapore                                17-Aug-2000
                                                          Title: Filtration and Purification System for Aqueous Hydrofluoric Acid

-----------------------------------------------------------------------------------------------------------------------------------
MCA-443/                      ORD        200006603-5                                                      Pending
Singapore                                14-Nov-2000
                                                          Title: Gas Flow Purification System and Method

-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-380/                           ORD            042268                                       34059               Granted
Thailand                                          13-Feb-1998                                  23-Jul-1999
                                                       Title: Automated Gas Cylinder Tracking System
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                         Patent List                                               Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase               Case             Application             Publication          Patent             Status
Country Name                      Type             Number/Date             Number/Date          Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                               <C>              <C>                     <C>                  <C>                <C>
MCA-218/                          ORD              82107222                288024               81463              Granted
Taiwan, Province of China                          03-Sep-1993             11-Oct-1996          11-Oct-1996        03-Sep-2013
                                                                    Title: Reactive Matrix for Removing Impurities from Hydride and
                                                                           Inert Gases and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-224/B                         ORD              84216914                297509               UM-120893          Published
Taiwan, Province of China                          23-Sep-1993             01-Feb-1997                             23-Sep-2005
                                                                    Title: Apparatus for Monitoring Impurities in a Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                          ORD              84106992                326001               97215              Granted
Taiwan, Province of China                          22-Jun-1994             01-Feb-1998          01-Feb-1998        05-Jul-2015
                                                                    Title: High Efficiency Metal Membrane Getter Element and Process
                                                                           for Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                          ORD              84106993                294606               83681              Granted
Taiwan, Province of China                          01-Jul-1994             01-Jan-1997          11-Jun-1997        01-Jul-2014
                                                                    Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                           Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-309/                          ORD              87112304                                                        Allowed
Taiwan, Province of China                          28-Jul-1998
                                                                    Title: Composition and Process for Removing Moisture from
                                                                           Hydrogen Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA-338/                          ORD              88106740                                                        Pending
Taiwan, Province of China                          21-Apr-1999
                                                                    Title: Reactive Matrix for Removing Moisture from a Fluorine
                                                                           Containing Gas and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/                          ORD                                                           081535             Granted
Taiwan, Province of China                          20-Nov-1995                                  11-Sep-1996
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-380/                          ORD              87108591                                                        Pending
Taiwan, Province of China                          02-Jun-1998
                                                                    Title: Automated Gas Cylinder Tracking System

-----------------------------------------------------------------------------------------------------------------------------------
MCA-388/                          ORD              88106341                                                        Pending
Taiwan, Province of China                          03-May-1999
                                                                    Title: Apparatus for Dispensing Precise Volumes of Liquid

------------------------------------------------------------------------------------------------------------------------------------
MCA-389/                          ORD              89101500                                                        Pending
Taiwan, Province of China                          28-Jan-2000
                                                                    Title: Microporous Hollow Fiber Membranes from Perfluorinated
                                                                           Thermoplastic Fibers (Submarine Fibers)

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>



<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                       Patent List                                              Page: 2
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>           <C>                            <C>                 <C>
MCA-397/                           ORD            89101495                                                         Pending
Taiwan, Province of China                         28-Jan-2000
                                                                Title: Method for Manufacturing Hollow Fiber Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-399/                           ORD            88111784                                                         Pending
Taiwan, Province of China                         28-Jul-1999
                                                                Title: Connector Apparatus and System Including Connector Apparatus
-----------------------------------------------------------------------------------------------------------------------------------
MCA-400/                           ORD            89101501                                                         Pending
Taiwan, Province of China                         28-Jan-2000
                                                                Title: Method for Forming a Perfluorinated, Thermoplastic Hollow
                                                                       Fiber Module
-----------------------------------------------------------------------------------------------------------------------------------
MCA-408/                           ORD                                                                             Unfiled
Taiwan, Province of China
                                                                Title: Apparatus and Methods for Pumping High Viscosity Pumps
                                                                       (Vertical Teflon Pump)
-----------------------------------------------------------------------------------------------------------------------------------
MCA-418/                           ORD            88117425                                                         Pending
Taiwan, Province of China                         08-Oct-1999
                                                                Title: Filtration Module Including Unitary Filter Cartridge-Bowl
                                                                       Construction
-----------------------------------------------------------------------------------------------------------------------------------
MCA-420/                           ORD            88115459                                                         Pending
Taiwan, Province of China                         08-Sep-1999
                                                                Title: Component Heater for Use in Semiconductor Manufacturing
                                                                       Equipment
-----------------------------------------------------------------------------------------------------------------------------------
MCA-422/                           ORD            89101503                                                         Pending
Taiwan, Province of China                         28-Jan-2000
                                                                Title: Skinned Hollow Fiber Membrane and Method of Manufacture
-----------------------------------------------------------------------------------------------------------------------------------
MCA-428/                           ORD            89101494                                                         Pending
Taiwan, Province of China                         28-Jan-2000
                                                                Title: Hollow Fiber Membrane Contactor
-----------------------------------------------------------------------------------------------------------------------------------
MCA-429/                           ORD            89100903                                                         Pending
Taiwan, Province of China                         20-Jan-1999
                                                                Title: Flow Controller
-----------------------------------------------------------------------------------------------------------------------------------
MCA-430/                           ORD            88120448                                                         Pending
Taiwan, Province of China                         23-Nov-1999
                                                                Title: Pump Controller for Precision Pumping Apparatus
-----------------------------------------------------------------------------------------------------------------------------------
MCA-431/                           ORD            88120310                                                         Pending
Taiwan, Province of China                         20-Nov-1999
                                                                Title: A System and Method for Integration of Gas Components
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                   Patent List                                   Page: 3
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication          Patent            Status
Country Name                       Type           Number/Date         Number/Date          Number/Date       Expiration Date
---------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                  <C>               <C>
MCA-437/                           ORD            89101497                                                   Pending
Taiwan, Province of China                         28-Jan-2000
                                                                  Title: A Perflourinated Thermoplastic Filter Cartridge

----------------------------------------------------------------------------------------------------------------------------------
MCA-439/                           ORD            89113385                                                   Pending
Taiwan, Province of China                         06-Jul-2000
                                                                  Title: In-Line Real Time Fluid Dispense Monitor

----------------------------------------------------------------------------------------------------------------------------------
MCA-443                            ORD                                                                       Unfiled
Taiwan, Province of China
                                                                  Title: Gas Flow Purification System and Method

----------------------------------------------------------------------------------------------------------------------------------
MCA-447/                           ORD            89106988                                                   Pending
Taiwan, Province of China                         28-Apr-2000
                                                                  Title: Method of Making Thin Film Piezoresistive Sensor

----------------------------------------------------------------------------------------------------------------------------------
MCA-449/                           ORD            88121183                                                   Pending
Taiwan, Province of China                         09-Mar-2000
                                                                  Title: Filtration Cartridge and Process for Filtering a Slurry

----------------------------------------------------------------------------------------------------------------------------------
MCA-451/                           ORD            89113530                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                  Title: Digital Mass Flow Control System and Method of Operation

----------------------------------------------------------------------------------------------------------------------------------
MCA-452/                           ORD            89113538                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                   Title: System and Method for a Variable Gain Proportional-
                                                                          Integral (PI) Controller

----------------------------------------------------------------------------------------------------------------------------------
MCA-453/                           ORD            89113526                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                   Title: Method and System for Driving a Solenoid

----------------------------------------------------------------------------------------------------------------------------------
MCA-454/                           ORD            89113547                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                   Title: Method and System for Regulating a Voltage Supply

----------------------------------------------------------------------------------------------------------------------------------
MCA-455/                           ORD            89113530                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                   Title: A System and Method for a Digital Mass Flow Controller

----------------------------------------------------------------------------------------------------------------------------------
MCA-459/                           ORD            89113537                                                   Pending
Taiwan, Province of China                         07-Jul-2000
                                                                   Title: Sensor Response Linearization

----------------------------------------------------------------------------------------------------------------------------------
</TABLE>


<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 4
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-464/                      ORD       89110879                                                    Pending
Taiwan, Province of China               03-Jun-2000
                                             Title: HYDROPHOBIC AND HYDROPHILIC MEMBRANES TO VENT
                                                    TRAPPED GASES IN A PLANTING CELL
-------------------------------------------------------------------------------------------------------------------------
MCA-466/                      ORD       89110876                                                    Pending
Taiwan, Province of China               03-Jun-2000
                                             Title: SIMULTANEOUS ELECTRICAL AND FLUID CONNECTION FOR
                                                    ANODE
-------------------------------------------------------------------------------------------------------------------------
MCA-467/CP                    ORD       89119357                                                    Pending
Taiwan, Province of China               20-Sep-2000
                                             Title: REGENERATION OF PLATING CELLS
-------------------------------------------------------------------------------------------------------------------------
MCA-470/                      ORD       89119060                                                    Pending
Taiwan, Province of China               19-Sep-2000
                                             Title: PROCESS AND FILTER FOR FILTERING A SLURRY
-------------------------------------------------------------------------------------------------------------------------
MCA-472/                      ORD                                                                   Pending
Taiwan, Province of China               28-Feb-2001
                                             Title: Disposable Fluid Separation Device and Manifold Assembly Design With
                                                    Easy Change-Out Feature
-------------------------------------------------------------------------------------------------------------------------
MCA-473/                      ORD       89121061                                                    Pending
Taiwan, Province of China               09-Oct-2000
                                             Title: HOUSING DESIGN WITH TWIST RING TO ENGAGE AND
                                                    DISENGAGE BOWL OR BOWL ASSEMBLY
-------------------------------------------------------------------------------------------------------------------------
MCA-477/                      ORD       89121304                                                    Pending
Taiwan, Province of China               12-Oct-2000
                                             Title: FILTER WITH REMOVABLE ALIGNMENT FIN

-------------------------------------------------------------------------------------------------------------------------
MCA-478/                      ORD       89121317                                                    Pending
Taiwan, Province of China               12-Oct-2000
                                             Title: Fluorocarbon Polymeric Compositions Having Hydrophilic Functional
                                                    Groups and Process
-------------------------------------------------------------------------------------------------------------------------
MCA-489/                      ORD       90100845                                                    Pending
Taiwan, Province of China               15-Jan-2001
                                             Title: System and Method for Liquid Filtration Based on a Neutral Filter
                                                    Material
-------------------------------------------------------------------------------------------------------------------------
MCA-497/                      ORD       90102923                                                    Pending
Taiwan, Province of China               09-Feb-2001
                                             Title: Porous or Non-Porous Substrate Coated With a Polymeric Composition
                                                    Having Hydrophilic Functional Groups and Process
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 1
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-131/                           ORD            658600                                       4778601            ISSUED
United States of America                          09-Oct-1984                                  18-Oct-1988        18-Oct-2005
                                                      Title: Microporous Membranes of Ultrahigh Molecular Weight Polyethylene
-----------------------------------------------------------------------------------------------------------------------------------
MCA-131/1                          DIV            192595                                       4828772             ISSUED
United States of America                          09-May-1988                                  09-May-1989         09-May-2006
                                                      Title: Microporous Membranes of Ultrahigh Molecular Weight Polyethylene
-----------------------------------------------------------------------------------------------------------------------------------
MCA-155/                           ORD            190285                                       4902456             ISSUED
United States of America                          04-May-1988                                  20-May-1990         20-Feb-2007
                                                      Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-155/2                          DIV            346976                                       4906377             ISSUED
United States of America                          03-May-1989                                  06-Mar-1990         06-Mar-2007
                                                      Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-155/C1                         CIP            412959                                       4990294             ISSUED
United States of America                          26-Sep-1989                                  05-Feb-1991         26-Sep-2009
                                                      Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-155/D                         CIP             569060                                       5032274             ISSUED
United States of America                          17-Aug-1990                                  26-Jul-1991         17-Aug-2010
                                                      Title: Fluorcarbon Membranes and Process for Making Fluorocarbon Membranes
-----------------------------------------------------------------------------------------------------------------------------------
MCA-173/                          ORD             852221                                       4690621             ISSUED
United States of America                          15-Apr-1986                                  01-Sep-1987         15-Apr-2006
                                                      Title: Filter Pump Head Assembly
-----------------------------------------------------------------------------------------------------------------------------------
MCA-187/                          ORD             703148                                       5262068             ISSUED
United States of America                          17-May-1991                                  16-Nov-1993         17-May-2011
                                                      Title: Integrated Dispensing System and Method for Filtering and Dispensing
                                                             Fluid
-----------------------------------------------------------------------------------------------------------------------------------
MCA-218/                          ORD             943355                                       5340552             ISSUED
United States of America                          10-Sep-1992                                  23-Aug-1994         23-Aug-2011
                                                      Title: Reactive Matrix for Removing Impurities from Hydride and Inert Gases
                                                             and Process
-----------------------------------------------------------------------------------------------------------------------------------
MCA-224/                           ORD            958384                                       5339675             ISSUED
United States of America                          08-Oct-1992                                  23-Aug-1994         23-Aug-2011
                                                      Title: Apparatus for Monitoring Impurities in a Gas Stream
-----------------------------------------------------------------------------------------------------------------------------------
MCA-224/1                          CIP            08/281286                                    5477716             ISSUED
United States of America                          27-Jul-1994                                  26-Dec-1995         27-Jul-2014
                                                      Title: Apparatus for Monitoring Impurities in a Gas Stream
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 2
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-224/3                     REI       08/671,231                              RE35544             ISSUED
United States of America                27-Jun-1996                             01-Jul-1997         27-Jul-2016
                                             Title: Apparatus for Monitoring Impurities in a Gas Stream
-------------------------------------------------------------------------------------------------------------------------
MCA-235/                      ORD       054928                                  5417917             ISSUED
United States of America                28-Apr-1993                             23-May-1995         23-May-2012
                                             Title: Metallic Porous Membrane and Method of Manufacture
-------------------------------------------------------------------------------------------------------------------------
MCA-236/1                     CON       08/281047                               5487771             ISSUED
United States of America                27-Jul-1994                             30-Jan-1996         30-Jan-2013
                                             Title: High Efficiency Metal Membrane Element, Filter and Process for Making
-------------------------------------------------------------------------------------------------------------------------
MCA-236/2                     REI       09/016706                               36249               Granted
United States of America                30-Jan-1998                             13-Jul-1999         30-Jan-2018
                                             Title: High Efficiency Metal Membrane Element, Filter and Process for Making
-------------------------------------------------------------------------------------------------------------------------
MCA-262/                      ORD       08/233640                               5547760             ISSUED
United States of America                26-Apr-1994                             20-Aug-1996         26-Apr-2014
                                             Title: Compositions and Processes for Separating and Concentrating Certain
                                                    Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                    Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-262/1                     DIV       08/685432                               5618433             Granted
United States of America                23-Jul-1996                             08-Apr-1997
                                             Title: Compositions and Processes for Separating and Concentrating Certain
                                                    Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                    Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-262/2                     DIV       08/745026                               5980987             Granted
United States of America                07-Nov-1996                             09-Nov-1999
                                             Title: Compositions and Processes for Separating and Concentrating Certain
                                                    Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                    Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-262/3                     DIV       09/337837                                                   Pending
United States of America                22-Jun-1999
                                             Title: Compositions and Processes for Separating and Concentrating Certain
                                                    Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                    Membranes
-------------------------------------------------------------------------------------------------------------------------
MCA-265/                      ORD       08/263636                               5456740             ISSUED
United States of America                22-Jun-1994                             10-Oct-1995         22-Jun-2014
                                             Title: High Efficiency Metal Membrane Getter Element and Process for Making
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                            Pending                                                Page: 3
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case          Application           Publication          Patent          Status
Country Name                          Type          Number/Date           Number/Date          Number/Date     Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>           <C>                                        <C>             <C>
MCA-267/                              ORD           08/269,980                                 5695702         ISSUED
United States Of America                            01-Jul-1994                                09-Dec-1997     09-Dec-2014
                                                           Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                  Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-272/1                             CIP           117207                                     4738693         ISSUED
United States Of America                            04-Nov-1987                                19-Apr-1988     04-Nov-2007
                                                          Title: Valve Block and Container For Semiconductor Source Reagent
                                                                 Dispensing or Purification

------------------------------------------------------------------------------------------------------------------------------------
MCA-273/                              ORD           029632                                     4781900         ISSUED
United States Of America                            24-Mar-1987                                02-Aug-1988     02-Aug-2005
                                                            Title: Process and Composition for Purifying Arsine, Phosphine,
                                                                   Ammonia, and Inert Gases to Remove Lewis Acid and Oxident
                                                                   Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-273/1                             DIV           154917                                     4781900         ISSUED
United States Of America                            11-Feb-1988                                01-Nov-1988     01-Nov-2005
                                                            Title: Process and Composition for Purifying Arsine, Phosphine,
                                                                   Ammonia, and Inert Gases to Remove Lewis Acid and Oxident
                                                                   Impurities Therefrom


------------------------------------------------------------------------------------------------------------------------------------
 MCA-273/2                             DIV           163792                                     4983363         ISSUED
United States Of America                             03-Mar-1988                                08-Nov-1991     08-Nov-2008
                                                             Title: Process and Composition for Purifying Arsine, Phosphine,
                                                                    Ammonia, and Inert Gases to Remove Lewis Acid and Oxident
                                                                    Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-274/                               ORD           080478                                     4797227         ISSUED
United States Of America                             31-Jul-1987                                10-Jan-1992     10-Jan-2009
                                                             Title: Process and composition for purifying hydrogen selenide and
                                                                    hydogen telluride, to remove moisture and oxident impurities
                                                                    therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-274/1                              DIV           255765                                     4865822         ISSUED
United States Of America                             11-Oct-1988                                12-Sep-1989     12-Sep-2006
                                                             Title: Process and composition for purifying hydrogen selenide and
                                                                    hydogen telluride, to remove moisture and oxident impurities
                                                                    therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-275/                               ORD           029631                                     4853148         ISSUED
United States Of America                             24-Mar-1987                                01-Aug-1989     01-Aug-2006
                                                             Title: Process and Composition for Drying of Gaseous Hydrogen Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA- 275/1                             DIV          357049                                      4925646         ISSUED
United States Of America                            25-May-1989                                 15-May-1990     15-May-2007
                                                             Title: Process and Composition for Drying of Gaseous Hydrogen Halides

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 4
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase         Case         Application          Publication            Patent                   Status
Country Name                Type         Number/Date          Number/Date            Number/Date              Expiration Date
---------------------------------------------------------------------------------------------------------------------------------
<S>                         <C>          <C>                  <C>                    <C>                      <C>

MCA-276/                    ORD          169400                                      4950419                  ISSUED
United States of America                 17-Mar-1988                                 21-Aug-1990              21-Aug-2007
                                                       Title: Composition Process and Apparatus for Purifying Inert Gases to
                                                              Remove Lewis Acid & Oxidant Impurities Therefrom

---------------------------------------------------------------------------------------------------------------------------------
MCA-276/1                   DIV          494976                                      5015411                  ISSUED
United States of America                 16-Mar-1990                                 14-May-1991              14-May-2008
                                                       Title: Composition Process and Apparatus for Purifying Inert Gases to
                                                              Remove Lewis Acid & Oxidant Impurities Therefrom

---------------------------------------------------------------------------------------------------------------------------------
MCA-277/                    ORD          323302                                      5057242                  ISSUED
United States of America                 14-Mar-1989                                 15-Oct-1991              15-Oct-2008
                                                       Title: Composition Process and Apparatus for Removal of Water and
                                                              Silicon Mu-Oxides From Chlorosilane

---------------------------------------------------------------------------------------------------------------------------------
MCA-277/1                   DIV          737181                                      5094830                  ISSUED
United States of America                 29-Jul-1991                                 10-Mar-1992              10-Mar-2009
                                                       Title: Composition Process and Apparatus for Removal of Water and
                                                              Silicon Mu-Oxides From Chlorosilane

---------------------------------------------------------------------------------------------------------------------------------
MCA-278/                    ORD          628490                                      5138869                  ISSUED
United States of America                 14-Dec-1990                                 18-Aug-1992              14-Dec-2010
                                                       Title: In-Line Detector System for Real-Time Determination of Impurity
                                                              Concentration in a Flowing Gas Stream

---------------------------------------------------------------------------------------------------------------------------------
MCA-278/1                   CIP          930184                                      5325705                  ISSUED
United States of America                 17-Aug-1992                                 05-Jul-1994              05-Jul-2011
                                                       Title: In-Line Detector System for Real-Time Determination of Impurity
                                                              Concentration in a Flowing Gas Stream

---------------------------------------------------------------------------------------------------------------------------------
MCA-278/2                   CIP          08/270171                                   5583282                  ISSUED
United States of America                 01-Jul-1994                                 10-Dec-1996              01-Jul-2014
                                                       Title: In-Line Detector System for Real-Time Determination of Impurity
                                                              Concentration in a Flowing Gas Stream

---------------------------------------------------------------------------------------------------------------------------------
MCA-279/                    ORD          898840                                      5260585                  ISSUED
United States of America                 12-Jun-1992                                 09-Nov-1993              09-Nov-2010
                                                       Title: Endpoint and/or Back Diffusion Gas Impurity Detector & Method
                                                              of Using the Same

---------------------------------------------------------------------------------------------------------------------------------
MCA-280/                    ORD          084414                                      5385689                  ISSUED
United States of America                 29-Jun-1993                                 31-Jan-1995              31-Jan-2012
                                                       Title: Process and Composition for Purifying Semiconductor Process Gases
                                                              to Remove Lewis and Oxidant Impurities Therefrom

---------------------------------------------------------------------------------------------------------------------------------
</TABLE>

<PAGE>

<TABLE>
<CAPTION>
---------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21,2001                                     Patent List                                                Page 5
---------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase         Case         Application          Publication            Patent                   Status
Country Name                Type         Number/Date          Number/Date            Number/Date              Expiration Date
---------------------------------------------------------------------------------------------------------------------------------
<S>                         <C>          <C>                  <C>                    <C>                      <C>
MCA-280/1                    DIV         08/322315                                   5531971                  ISSUED
United States of America                 14-Oct-1994                                 02-Jul-1996              02-Jul-2013
                                                       Title: Process and Composition for Purifying Semiconductor Process Gases to
                                                              Remove Lewis Acid & Oxidant Impurities Therefrom

---------------------------------------------------------------------------------------------------------------------------------
MCA-289/                     ORD         08/604811                                   5814272                  ISSUED
United States of America                 21-Feb-1996                                 29-Sep-1998              21-Feb-2016
                                                       Title: Formation of Dendritic Metal Powders

---------------------------------------------------------------------------------------------------------------------------------
MCA-289/1                    DIV         08/820762                                                            Pending
United States of America                 19-Mar-1997
                                                       Title: Formation of Dendritic Metal Powders

---------------------------------------------------------------------------------------------------------------------------------
MCA-289/2                    DIV         09/168776                                   6197085                  Granted
United States of America                 08-Oct-1998                                 06-Mar-2001
                                                       Title: Formation of Dendritic Metal Powders

---------------------------------------------------------------------------------------------------------------------------------
MCA-289/3                    DIV         09/168795                                   6193778                  Granted
United States of America                 08-Oct-1998                                 27-Feb-2001
                                                       Title: Formation of Dendritic Metal Powders

---------------------------------------------------------------------------------------------------------------------------------
MCA-289/4                    CON         09/724147                                                            Pending
United States of America                 28-Nov-2000
                                                       Title: Formation of Dendritic Metal Powders

---------------------------------------------------------------------------------------------------------------------------------
MCA-290/                     ORD         08/711525                                   5738335                  ISSUED
United States of America                 10-Sept-1996                                14-Apr-1998              10-Sep-2016
                                                       Title: Apparatus for Isolating and Containing Reactive Medium

---------------------------------------------------------------------------------------------------------------------------------
MCA-290/1                    CIP         08/921,059                                  5984267                  Granted
United States of America                 29-Aug-1997                                 16-Nov-1999
                                                       Title: Apparatus for Isolating and Containing Reactive Medium

---------------------------------------------------------------------------------------------------------------------------------
MCA-296/                     ORD         08/674599                                   5762789                  ISSUED
United States of America                 28-Jun-1996                                 09-Jun-1998              28-Jun-2016
                                                       Title: Low Volume Disposable Filter Module (LVD)

---------------------------------------------------------------------------------------------------------------------------------
MCA-297/                     ORD         08/678795                                   6068770                  Granted
United States of America                 12-Jul-1996                                 30-May-2000
                                                       Title: Disposable Separation Module with Quick Connect Capability
---------------------------------------------------------------------------------------------------------------------------------
MCA-303/                     ORD         08/863850                                   5985160                  Granted
United States of America                 27-Aug-1997                                 16-Nov-1999              27-Aug-2017
                                                       Title: Vibrationally-Induced Dynamic Membrane Filtration
---------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                    Patent List                                                      Page 6
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case        Application           Publication          Patent           Status
Country Name                          Type        Number/Date           Number/Date          Number/Date      Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>         <C>                   <C>                  <C>              <C>
MCA-308/                              ORD         08/941977                                  5844125          ISSUED
United States of America                          01-Oct-1997                                01-Dec-1998      01-Oct-2017
                                                            Title: Method and Apparatus for Measuring Moisture Content in a Gas

------------------------------------------------------------------------------------------------------------------------------------
MCA-309/C                             CON         09/653214                                                   Pending
United States of America                          31-Aug-2000
                                                            Title: Composition and Process for Removing Moisture from Hydrogen
                                                                   Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA-309/C2                            CON         09/653212                                                   Pending
United States of America                          31-Aug-2000
                                                            Title: Composition and Process for Removing Moisture from Hydrogen
                                                                   Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA-309/C3                            CON         09/653213                                                   Pending
United States of America                          31-Aug-2000
                                                            Title: Composition and Process for Removing Moisture from Hydrogen
                                                                   Halides

------------------------------------------------------------------------------------------------------------------------------------
MCA-328/                              ORD         08/964934                                  6077487          Granted
United States of America                          05-Nov-1997                                20-Jun-2000
                                                            Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                   from a Gas

------------------------------------------------------------------------------------------------------------------------------------
MCA-328/1                             DIV         09/195365                                  6042796          Granted
United States of America                          18-Nov-1998                                28-Mar-2000      05-Nov-2017
                                                            Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                   from a Gas

------------------------------------------------------------------------------------------------------------------------------------
MCA-334/                              ORD                                                                     Unfiled
United States of America
                                                            Title: Intelligent Control System of Pumping System for Filtering and
                                                                   Dispensing Process Fluid

------------------------------------------------------------------------------------------------------------------------------------
MCA-335/                              ORD         09/005172                                  6109881          Granted
United States of America                          09-Jan-1998                                29-Aug-2000
                                                            Title: Gas Driven Pump for the Dispensing and Filtering of Process Fluid

------------------------------------------------------------------------------------------------------------------------------------
MCA-336/                              ORD         09/041699                                  6179132          Granted
United States of America                          13-Mar-1998                                30-Jan-2001      13-Mar-2018
                                                            Title: Surface Modified Polymeric Substrate and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-337/                              ORD         08/605878                                  5772899          ISSUED
United States of America                          23-Feb-1996                                30-Jun-1998      23-Feb-2016
                                                            Title: Fluid Dispensing System Having Independently Operated Pumps

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent                                                        Page: 7
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase               Case             Application             Publication          Patent             Status
Country Name                      Type             Number/Date             Number/Date          Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                               <C>              <C>                     <C>                  <C>                <C>
MCA-337/1                         ORD              09/106586                                    6105829            Granted
United States of America                           29-Jun-1998                                  22-Aug-2000        29-Jun-2018
                                                                    Title: Fluid Dispensing System Having Independently Operated
                                                                           Pumps

------------------------------------------------------------------------------------------------------------------------------------
MCA-337/2                         CON              09/503862                                                       Pending
United States of America                           14-Feb-2000
                                                                    Title: Fluid Dispensing System Having Independently Operated
                                                                           Pumps

------------------------------------------------------------------------------------------------------------------------------------
MCA-338/                          ORD              09/069432                                    6033460            Granted
United States of America                           29-Apr-1998                                  07-Mar-2000        29-Apr-2018
                                                                    Title: Reactive Matrix for Removing Moisture from a Fluorine
                                                                           Containing Gas and Process

------------------------------------------------------------------------------------------------------------------------------------
MCA-341/                          ORD              107866                                       5516429            ISSUED
United States of America                           18-Aug-1993                                  14-May-1996        18-Aug-2013
                                                                    Title: Fluid Dispensing System

------------------------------------------------------------------------------------------------------------------------------------
MCA-342/                          ORD              329525                                       5167837            ISSUED
United States of America                           28-Mar-1989                                  01-Dec-1992        01-Dec-2009
                                                                    Title: Filtering and Dispensing System With Independently
                                                                           Activated Pumps in Series

------------------------------------------------------------------------------------------------------------------------------------
MCA-343/                          ORD              189780                                       4823603            ISSUED
United States of America                           03-May-1988                                  25-Apr-1989        03-May-2008
                                                                    Title: Capacitance Manometer Having Stress Relieve for Fixed
                                                                           Electrode

------------------------------------------------------------------------------------------------------------------------------------
MCA-344/                          ORD              78365                                        5413139            ISSUED
United States of America                           16-Jun-1993                                  09-May-1995        13-Jun-2013
                                                                    Title: Thottle Valve

------------------------------------------------------------------------------------------------------------------------------------
MCA-345/                          ORD              08/088317                                    5396803            ISSUED
United States of America                           07-Jul-1993                                  14-Mar-1995        07-Jul-2013
                                                                    Title: Dual Balanced Capacitance for Suppressing Vibration
                                                                           Effects

------------------------------------------------------------------------------------------------------------------------------------
MCA-346/                          ORD              701200                                       5118078            ISSUED
United States of America                           16-May-1991                                  02-Jun-1992
                                                                    Title: Butterfly Valve Having Improved Sealing Characteristics

------------------------------------------------------------------------------------------------------------------------------------
MCA-347/                          ORD              660552                                       5099881            Granted
United States of America                           22-Feb-1991                                  31-Mar-1992        22-Feb-2011
                                                                    Title: Flow Dividing Structure of Mass Flow Controller

------------------------------------------------------------------------------------------------------------------------------------
MCA-349/                          ORD              06/736224                                    4720807            Granted
United States of America                           20-May-1985                                  19-Jan-1988        20-May-2005
                                                                    Title: Adaptive Pressure Control System

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>










<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent                                                        Page: 8
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase               Case             Application             Publication          Patent             Status
Country Name                      Type             Number/Date             Number/Date          Number/Date        Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                               <C>              <C>                     <C>                  <C>                <C>
MCA-358/                          ORD              529057                                       4524616            ISSUED
United States of America                           02-Sep-1983                                  25-Jun-1985        02-Sep-2003
                                                                    Title: Adjustable Laminar Flow Bypass

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/                          ORD              365861                                       5660207            ISSUED
United States of America                           29-Dec-1994                                  26-Aug-1997        29-Dec-2014
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/1                         CON              691061                                       5765283           ISSUED
United States of America                           01-Aug-1996                                  16-Jun-1998       01-Aug-2016
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/2                         DIV             685260                                        5850850            Granted
United States of America                          23-Jul-1996                                   22-Dec-1998        23-Jul-2016
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/3                         DIV              08/685322                                    5765283            Granted
United States of America                           23-Jul-1996                                  16-Jun-1998        23-Jul-2016
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-359/4                         CON              08/860343                                    5901741            Granted
United States of America                           24-Jun-1997                                  11-May-1999        29-Dec-2014
                                                                    Title: Flow Controller, Parts of Flow Controller and Related
                                                                           Method

------------------------------------------------------------------------------------------------------------------------------------
MCA-363/                          ORD              691061                                       5763774            ISSUED
United States of America                           01-Aug-1996                                  09-Jun-1998        01-Aug-2016
                                                                    Title: Fluid Flow Meter with Reduced Orientation Sensitivity

------------------------------------------------------------------------------------------------------------------------------------
MCA-364/                          ORD              08/682170                                    5785297            ISSUED
United States of America                           16-Jul-1996                                  28-Jul-1998        16-Jul-2016
                                                                    Title: Valve Mechanism

------------------------------------------------------------------------------------------------------------------------------------
MCA-367/                          ORD              588586                                       5191793            Granted
United States of America                           12-Mar-1984                                  09-Mar-1993
                                                                    Title: Fluid Mass Flow Meter Device with Reduced Attitude
                                                                           Sensitivity

------------------------------------------------------------------------------------------------------------------------------------
MCA-371/                          ORD              792150                                       4745811            ISSUED
United States of America                           28-Oct-1985                                  24-May-1988        24-May-2008
                                                                    Title: Pressure Monitoring Apparatus Having a Hall-Effect
                                                                           Detector

------------------------------------------------------------------------------------------------------------------------------------
MCA-372/                          ORD              5830                                         4898036            ISSUED
United States of America                           21-Jan-1987                                  06-Feb-1990        21-Jan-2009
                                                                    Title: Flow Responsive Transmitter and Indicator

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 9
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-372/1                     DIV       430133                                  5056373             ISSUED
United States of America                01-Nov-1989                             15-Oct-1991         01-Nov-2009
                                             Title: Flow Responsive Transmitter and Indicator
-------------------------------------------------------------------------------------------------------------------------
MCA-375/                      ORD       872,350                                 5218991             ISSUED
United States of America                23-Apr-1992                             15-Jun-1993         23-Apr-2012
                                             Title: Regulator Flow Control
-------------------------------------------------------------------------------------------------------------------------
MCA-376/                      ORD       872407                                  5253669             ISSUED
United States of America                23-Apr-1992                             19-Oct-1993         23-Apr-2012
                                             Title: Controlling Process Gas Flow
-------------------------------------------------------------------------------------------------------------------------
MCA-377/                      DIV       427846                                  5518951             ISSUED
United States of America                26-Apr-1995                             21-May-1996         26-Apr-2015
                                             Title: Method for Making Thin Film Piezoresistive Sensor
-------------------------------------------------------------------------------------------------------------------------
MCA-378/                      ORD       683774                                  5697173             ISSUED
United States of America                17-Jul-1996                             16-Dec-1997         17-Jul-2016
                                             Title: Inventory Control Collar
-------------------------------------------------------------------------------------------------------------------------
MCA-378/1                     DES       29/057078                               D390111             ISSUED
United States of America                16-Jul-1996                             03-Feb-1998         16-Jul-2016
                                             Title: Inventory Control Collar
-------------------------------------------------------------------------------------------------------------------------
MCA-379/                      DES       29/057079                               D390138             ISSUED
United States of America                16-Jul-1996                             03-Feb-1998         03-Feb-2012
                                             Title: Inventory Control Probe
-------------------------------------------------------------------------------------------------------------------------
MCA-380/                      ORD       08/802168                               5953682             Granted
United States of America                24-Feb-1997                             14-Sep-1999         24-Feb-2017
                                             Title: Automated Gas Cylinder Tracking System
-------------------------------------------------------------------------------------------------------------------------
MCA-381/                      ORD       08/683702                               5949049             Granted
United States of America                17-Jul-1996                             07-Sep-1999
                                             Title: Inventory Control Probe and Control Module with Docking Station
-------------------------------------------------------------------------------------------------------------------------
MCA-382/                      ORD       08/683715                               5713692             ISSUED
United States of America                17-Jun-1996                             03-Feb-1998         17-Jun-2016
                                             Title: Inventory Control Collar Locking Ring
-------------------------------------------------------------------------------------------------------------------------
MCA-388/                      ORD       09/063079                               6021925             Granted
United States of America                21-Apr-1998                             08-Feb-2000         21-Apr-2018
                                             Title: Apparatus for Dispensing Precise Volumes of Liquid
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 10
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-390/C                     PCT       09/743008                                                   Pending
United States of America                29-Dec-2000
                                             Title: Process for Coating a Solid Surface with a Liquid Composition
-------------------------------------------------------------------------------------------------------------------------
MCA-391/                      ORD       09/060524                               5932987             Granted
United States of America                14-Apr-1998                             03-Aug-1999         14-Apr-2008
                                             Title: Variable Step Rate Precision Pumping Apparatus
-------------------------------------------------------------------------------------------------------------------------
MCA-392/                      ORD       09/060454                                                   Pending
United States of America                14-Apr-1998
                                             Title: Universal Track Interface
-------------------------------------------------------------------------------------------------------------------------
MCA-396/                      ORD       656490                                  4599902             ISSUED
United States of America                01-Oct-1984                             15-Jul-1986         01-Oct-2004
                                             Title: Condition Responsive Apparatus
-------------------------------------------------------------------------------------------------------------------------
MCA-399/                      ORD       09/113837                                                   Pending
United States of America                10-Jul-1998
                                             Title: Connector Apparatus and System Including Connector Apparatus
-------------------------------------------------------------------------------------------------------------------------
MCA-399DE/                    DES       29/090540                               D423081             Granted
United States of America                10-Jul-1998                             18-Apr-2000         18-Apr-2014
                                             Title: Connector
-------------------------------------------------------------------------------------------------------------------------
MCA-401/                      ORD       09/383055                                                   Pending
United States of America                25-Aug-1999
                                             Title: Filtration and Purification System for Aqueous Hydrofluoric Acid
-------------------------------------------------------------------------------------------------------------------------
MCA-408/                      ORD       09/451498                                                   Pending
United States of America                30-Nov-1999
                                             Title: Apparatus and Methods for Pumping High Viscosity Pumps
                                                    (Vertical Teflon Pump)
-------------------------------------------------------------------------------------------------------------------------
MCA-420/                      ORD       09/150458                               6078030             Granted
United States of America                09-Sep-1998                             20-Jun-2000         09-Sep-2018
                                             Title: Component Heater for Use in Semiconductor Manufacturing Equipment
-------------------------------------------------------------------------------------------------------------------------
MCA-424/UT                    ORD       09/439911                                                   Pending
United States of America                12-Nov-1999
                                             Title: Packaged Silicon Micromechanical Devices and Methods for
                                                    Manufacturing Same
-------------------------------------------------------------------------------------------------------------------------
MCA-427/                      ORD       09/438452                                                   Pending
United States of America                12-Nov-1999
                                             Title: Spiral Anode for Metal Plating Baths
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                Patent List                                            Page: 11
-------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase           Case      Application         Publication         Patent              Status
Country Name                  Type      Number/Date         Number/Date         Number/Date         Expiration Date
-------------------------------------------------------------------------------------------------------------------------
<S>                           <C>       <C>                 <C>                 <C>                 <C>
MCA-429/UT                    ORD       09/488146                                                   Pending
United States of America                20-Jan-2000
                                             Title: Flow Controller
-------------------------------------------------------------------------------------------------------------------------
MCA-430/1                     ORD       09/447504                                                   Pending
United States of America                23-Nov-1999
                                             Title: Pump Controller for Precision Pumping Apparatus
-------------------------------------------------------------------------------------------------------------------------
MCA-431/1                     ORD       09/216251                                                   Pending
United States of America                03-Mar-1999
                                             Title: A System and Method for Integration of Gas Components
-------------------------------------------------------------------------------------------------------------------------
MCA-431/CP                    CPA                                                                   Pending
United States of America                28-Nov-2000
                                             Title: A System and Method for Integration of Gas Components
-------------------------------------------------------------------------------------------------------------------------
MCA-439/                      ORD       09/597331                                                   Pending
United States of America                19-Jun-2000
                                             Title: In-Line Real Time Fluid Dispense Monitor
-------------------------------------------------------------------------------------------------------------------------
MCA-441/                      ORD       09/441984                                                    Pending
United States of America                04-Oct-1999
                                             Title: Gas Filtration/Purification Device
-------------------------------------------------------------------------------------------------------------------------
MCA-443/                      ORD       09/440749                                                   Pending
United States of America                16-Nov-1999
                                             Title: Gas Flow Purification System and Method
-------------------------------------------------------------------------------------------------------------------------
MCA-447/                      ORD       09/291486                                                   Pending
United States of America                14-Apr-1999
                                             Title: Method for Making Thin Film Piezoresistive Sensor
-------------------------------------------------------------------------------------------------------------------------
MCA-451/                      ORD       09/350744                                                   Pending
United States of America                09-Jul-1999
                                             Title: Digital Mass Flow Control System and Method of Operation
-------------------------------------------------------------------------------------------------------------------------
MCA-451/1                     DIV       09/755994                                                   Pending
United States of America                05-Jan-2001
                                             Title: Digital Mass Flow Control System and Method of Operation
-------------------------------------------------------------------------------------------------------------------------
MCA-452/                      ORD       09/351098                                                   Pending
United States of America                09-Jul-1999
                                             Title: System and Method for a Variable Gain Proportional-Integral (PI)
                                                    Controller
-------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 12
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-453/                           ORD            09/351111                                                        Pending
United States of America                          09-Jul-1999
                                                      Title: Method and System for Driving a Solenoid
-----------------------------------------------------------------------------------------------------------------------------------
MCA-454/                           ORD            09/350746                                                        Pending
United States of America                          09-Jul-1999
                                                      Title: Method and System for Regulating a Voltage Supply
-----------------------------------------------------------------------------------------------------------------------------------
MCA-455/                           ORD            09/351120                                                        Pending
United States of America                          09-Jul-1999
                                                      Title: A System and Method for a Digital Mass Flow Controller
-----------------------------------------------------------------------------------------------------------------------------------
MCA-456/                           ORD            09/330543                                                        Pending
United States of America                          11-Jun-1999
                                                      Title: Polymeric Membranes Functionalized with Polyhydroxypyridinone
                                                             Ligands
-----------------------------------------------------------------------------------------------------------------------------------
MCA-459/                          ORD             09/350747                                                         Pending
United States of America                          09-Jul-1999
                                                      Title: Sensor Response Linearization
-----------------------------------------------------------------------------------------------------------------------------------
MCA-467/                           ORD            09/578388                                                        Pending
United States of America                          25-May-2000
                                                      Title: REGENERATION OF PLATING CELLS
-----------------------------------------------------------------------------------------------------------------------------------
MCA-467/CP                         CIP            09/651016                                                        Pending
United States of America                          30-Aug-2000
                                                      Title: REGENERATION OF PLATING CELLS
-----------------------------------------------------------------------------------------------------------------------------------
MCA-470/                           ORD            09/660795                                                        Pending
United States of America                          13-Sep-2000
                                                      Title: PROCESS AND FILTER FOR FILTERING A SLURRY
-----------------------------------------------------------------------------------------------------------------------------------
MCA-472/                           ORD                                                                            Pending
United States of America                          28-Feb-2001
                                                      Title: Disposable Fluid Separation Device and Manifold Assembly Design With
                                                             Easy Change-Out Feature
-----------------------------------------------------------------------------------------------------------------------------------
MCA-473/                           ORD            09/418978                                                        Pending
United States of America                          14-Oct-1999
                                                      Title: HOUSING DESIGN WITH TWIST RING TO ENGAGE AND DISENGAGE BOWL OR BOWL
                                                             ASSEMBLY
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 13
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-477/                           ORD            09/417035                                                        Pending
United States of America                          12-Oct-1999
                                                      Title: FILTER WITH REMOVABLE ALIGNMENT FIN
-----------------------------------------------------------------------------------------------------------------------------------
MCA-477/1                          CIP            09/670280                                                        Pending
United States of America                          27-Sep-2000
                                                      Title: FILTER WITH REMOVABLE ALIGNMENT FIN
-----------------------------------------------------------------------------------------------------------------------------------
MCA-489/                           ORD            09/759920                                                        Pending
United States of America                          12-Jan-2001
                                                      Title: System and Method for Liquid Filtration Based on a Neutral Filter
                                                             Material
-----------------------------------------------------------------------------------------------------------------------------------
MCA-524/                           DES            29/127333                                                        Pending
United States of America                          03-Aug-2000
                                                      Title: OPTIMIZER FILTER AND MANIFOLD
-----------------------------------------------------------------------------------------------------------------------------------
MCA-526/PR                         PRO            60/229421                                                        Pending
United States of America                          31-Aug-2000
                                                      Title: Porous or Non-Porous Substrate Coated with a Cross-Linked Polymeric
                                                             Composition Having Sulfonyl Groups and Hydrophilic Functional Groups
                                                             and Process
-----------------------------------------------------------------------------------------------------------------------------------
MCA-527/PR                         PRO            60/229213                                                        Pending
United States of America                          31-Aug-2000
                                                      Title: Modular Two Way Check Valve Construction
-----------------------------------------------------------------------------------------------------------------------------------
MCA-529/                           PRO            60/232209                                                        Pending
United States of America                          13-Sep-2000
                                                      Title: Liquid Filtration Device
-----------------------------------------------------------------------------------------------------------------------------------
MCA-537/                           ORD                                                                             Unfiled
United States of America
                                                      Title: Methods and Apparatus to Regenerate Loaded Filters by Chemical Means
-----------------------------------------------------------------------------------------------------------------------------------
MCA-539/PR                         PRO            60/267295                                                        Pending
United States of America                          07-Feb-2001
                                                      Title: Process for Degassing an Aqueous Plating Solution
-----------------------------------------------------------------------------------------------------------------------------------
MCA-541/                           ORD                                                                             Unfiled
United States of America
                                                      Title: Process for Regenerating a Filtration Cartridge For Filtering a Slurry
-----------------------------------------------------------------------------------------------------------------------------------
MCA-542/PR                         PRO                                                                             Pending
United States of America                          20-Feb-2001
                                                      Title: Vacuum Sensor
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                            Pending                                                Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case          Application           Publication          Patent          Status
Country Name                          Type          Number/Date           Number/Date          Number/Date     Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>           <C>                   <C>                  <C>             <C>
MCA-131/                              ORD           US85/01936                                 WO8602282       Granted
Patent Cooperation Treaty                           08-Oct-1985                                24-Apr-1986
                                                          Title: Microporous Membranes of Ultrahigh Molecular Weight Polyethylene
------------------------------------------------------------------------------------------------------------------------------------
MCA-173/                              ORD           86/02380                                   87/06306        Granted
Patent Cooperation Treaty                           13-Dec-1986                                22-Oct-1987
                                                          Title: Filter Pump Head Assembly

------------------------------------------------------------------------------------------------------------------------------------
MCA-235/                              ORD           JP92/01137            9305190                              Published
Patent Cooperation Treaty                           04-Sep-1992           18-Mar-1993
                                                          Title: Metallic Porous Membrane and Method of Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-262/                              ORD           US95/04833                                                 Pending
Patent Cooperation Treaty                           25-Apr-1995
                                                          Title: Compositions and Processes for Seperating and Concentrating Certain
                                                                 Ions from Mixed Ion Solutions Using Ion-Binding Ligands Bonded to
                                                                 Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-265/                              ORD           95/07821                                                   Pending
Patent Cooperation Treaty                           20-Jun-1995
                                                          Title: High Efficiency Metal Membrane Getter Element and Process for
                                                                 Making

------------------------------------------------------------------------------------------------------------------------------------
MCA-267/                              ORD           US95/09046                                                 Pending
Patent Cooperation Treaty                           26-Jun-1995
                                                          Title: Thermoplastic Hollow Fiber Membrane Module and Method of
                                                                 Manufacture

------------------------------------------------------------------------------------------------------------------------------------
MCA-276/                              ORD           US90/01700                                 WO9115868       Granted
Patent Cooperation Treaty                           30-Mar-1990                                17-Oct-1991
                                                          Title: Process, Composition and Apparatus for Purifying Inert Gases
                                                                 to Remove Lewis Acid and Oxident Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
MCA-278/                              ORD           US91/09356                                 WO9210749       Granted
Patent Cooperation Treaty                          14-Dec-1991                                 25-Jun-1992
                                                          Title: In-Line Dectector System for Real-Time Determination of Impurity
                                                                 Concentration in a Flowing Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-278/3                             ORD           US95/09415           WO9601423                             Published
Patent Cooperation Treaty                           30-Jun-1995          18-Jan-1996
                                                          Title: In-Line Dectector System for Real-Time Determination of Impurity
                                                                 Concentration in a Flowing Gas Stream

------------------------------------------------------------------------------------------------------------------------------------
MCA-280/                              ORD           US94/07300                                                 Pending
Patent Cooperation Treaty                           28-Jun-1994
                                                          Title: Process and Composition for Purifying Semiconductor Process Gases
                                                                 to Remove Lewis Acid and Oxident Impurities Therefrom

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                            Pending                                                Page: 1
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                   Case          Application           Publication          Patent          Status
Country Name                          Type          Number/Date           Number/Date          Number/Date     Expiration Date
------------------------------------------------------------------------------------------------------------------------------------
<S>                                   <C>           <C>                   <C>                  <C>             <C>
MCA-289/                              ORD           US96/20904                                                 Pending
Patent Cooperation Treaty                           13-Dec-1996
                                                          Title: Formation of Dendritic Metal Powders

------------------------------------------------------------------------------------------------------------------------------------
MCA-303/                              ORD           US98/10641                                                 Pending
Patent Cooperation Treaty                           26-May-1998
                                                          Title: Vibrationally-Induced Dynamic Membrane Filtration

------------------------------------------------------------------------------------------------------------------------------------
MCA-308/                              ORD           US98/19213                                                 Nationaliz
Patent Cooperation Treaty                           10-Sep-1998
                                                          Title: Method and Apparatus for Measuring Moisture content in a Gas

------------------------------------------------------------------------------------------------------------------------------------
MCA-328/                              ORD           US98/18846          WO992284                               Nationaliz
Patent Cooperation Treaty                           10-Sep-1998          14-May-1999
                                                          Title: Process and Apparatus for Removing Metal Carbonyls and Moisture
                                                                 from a Gas

------------------------------------------------------------------------------------------------------------------------------------
MCA-338/                              ORD           US99/08755           WO99/5562                             Published
Patent Cooperation Treaty                           21-Apr-1999          04-Nov-1999
                                                          Title: Reactive Matrix for Removing Moisture from a Flourine Containing
                                                                 Gas and Process


------------------------------------------------------------------------------------------------------------------------------------
MCA-359/1                             ORD           US95/15157                                                 Pending
Patent Cooperation Treaty                           20-Nov-1995
                                                          Title: Flow Controller, Parts of Flow Controller and Related Method


------------------------------------------------------------------------------------------------------------------------------------
MCA-389/                              ORD           US00/02198           WO0044484                             Published
Patent Cooperation Treaty                           27-Jan-2000          03-Aug-2000
                                                          Title: Microporous Hollow Fiber Membranes from Perfluorinated
                                                                 Thermoplastic Fibers (Submarine Fibers)

------------------------------------------------------------------------------------------------------------------------------------
MCA-390/C                             ORD           US99/15024           00/01495                              Published
Patent Cooperation Treaty                           01-Jul-1999          13-Jan-2000
                                                          Title: Process for Coating a Solid Surface with a Liquid Composition

------------------------------------------------------------------------------------------------------------------------------------
MCA-397/                              ORD           US00/02382           WO00044480                            Published
Patent Cooperation Treaty                           28-Jan-2000          03-Aug-2000
                                                          Title: Method for Manufacturing Hollow Fiber Membranes

------------------------------------------------------------------------------------------------------------------------------------
MCA-399/                              ORD           US99/15462                                                 Pending
Patent Cooperation Treaty                           09-Jul-1999
                                                          Title: Connector Apparatus and System Including Connector Apparatus

------------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                 Patent List                                              Page: 3
------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase              Case            Application         Publication         Patent               Status
Country Name                     Type            Number/Date         Number/Date         Number/Date          Expiration Date
------------------------------------------------------------------------------------------------------------------------------
<S>                              <C>             <C>                 <C>                 <C>                  <C>
MCA-400/                         ORD             US00/02193          WO0044483                                Published
Patent Cooperation Treaty                        27-Jan-2000         03-Aug-2000
                                                                 Title: Method for Forming a Perflourinated, Thermoplastic
                                                                        Hollow Fiber Module

------------------------------------------------------------------------------------------------------------------------------
MCA-408/                         ORD             US00/32865                                                   Pending
Patent Cooperation Treaty                        30-Nov-2000
                                                                 Title: Apparatus and Methods for Pumping High Viscosity
                                                                        Pumps (Vertical Teflon Pump)

-------------------------------------------------------------------------------------------------------------------------------
MCA-418/                         ORD             US99/22347                                                   Pending
Patent Cooperation Treaty                        28-Sep-1999
                                                                 Title: Filtration Module Including Unitary Filter Cartridge-
                                                                        Bowl Construction

-------------------------------------------------------------------------------------------------------------------------------
MCA-420/                         ORD             US99/19885                                                   Pending
Patent Cooperation Treaty                        03-Sep-1999
                                                                 Title: Component Heater for Use in Semiconductor Manufacturing
                                                                        Equipment

-------------------------------------------------------------------------------------------------------------------------------
MCA-422/                         ORD             US00/02194          WO0044482                                Published
Patent Cooperation Treaty                        27-Jan-2000         03-Aug-2000
                                                                 Title: Skinned Hollow Fiber Membrane and Method of Manufacture

--------------------------------------------------------------------------------------------------------------------------------
MCA-428/                         ORD             US00/02378          WO0044479                                Published
Patent Cooperation Treaty                        27-Jan-2000         03-Aug-2000
                                                                 Title: Hollow Fiber Membrane Contactor

---------------------------------------------------------------------------------------------------------------------------------
MCA-429/                         ORD             US00/01493                                                   Pending
Patent Cooperation Treaty                        20-Jan-2000
                                                                 Title: Flow Controller

---------------------------------------------------------------------------------------------------------------------------------
MCA-430/                         ORD             US99/28002                                                   Pending
Patent Cooperation Treaty                        23-Nov-1999
                                                                 Title: Pump Controller for Precision Pumping Apparatus

---------------------------------------------------------------------------------------------------------------------------------
MCA-431/                         ORD             US99/24770                                                   Pending
Patent Cooperation Treaty                        22-Oct-1997
                                                                 Title: A System and Method for Integration of Gas Components

---------------------------------------------------------------------------------------------------------------------------------
MCA-436/                         ORD             US00/05179                                                   Pending
Patent Cooperation Treaty                        01-Mar-2000
                                                                 Title: Center Ring Diffuser/Filter

---------------------------------------------------------------------------------------------------------------------------------
MCA-437/                         ORD             US00/02423          WO0044485                                Published
Patent Cooperation Treaty                        29-Jan-1999         03-Aug-2000
                                                                 Title: A Perflourinated Thermoplastic Filter Cartridge

---------------------------------------------------------------------------------------------------------------------------------
</TABLE>











<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                            Patent List                                                            Page: 4
------------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase          Case      Application       Publication          Patent                    Status
Country Name                 Type      Number/Date       Number/Date          Number/Date               Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                          <C>       <C>               <C>                  <C>                       <C>
MCA-439/                     ORD       US00/16843                                                       Pending
Patent Cooperation Treaty              19-Jun-2000
                                                     Title: In-Line Real Time Fluid Dispense Monitor


-----------------------------------------------------------------------------------------------------------------------------------
MCA-441/                     ORD       US00/27326                                                       Pending
Patent Cooperation Treaty              04-Oct-2000
                                                     Title: Gas Filtration/Purification Device


-----------------------------------------------------------------------------------------------------------------------------------
MCA-447/                     ORD       US00/09858        WO0062030                                      Published
Patent Cooperation Treaty              13-Apr-2000       19-Oct-2000
                                                     Title: Method of Making Thin Film Piezoresistive Sensor


-----------------------------------------------------------------------------------------------------------------------------------
MCA-449/                     ORD       US99/28501                                                       Pending
Patent Cooperation Treaty              02-Dec-1999
                                                     Title: Filtration Cartridge and Process for Filtering a Slurry


-----------------------------------------------------------------------------------------------------------------------------------
MCA-451/                     ORD       US00/17062        WO01/04715                                     Published
Patent Cooperation Treaty              21-Jun-2000       18-Jan-2001
                                                     Title: Digital Mass Flow Control System and Method of Operation


-----------------------------------------------------------------------------------------------------------------------------------
MCA-452/                     ORD       US00/40275        WO01/04717                                     Published
Patent Cooperation Treaty              21-Jun-2000       18-Jan-2001
                                                     Title: System and Method for a Variable Gain Proportional-Integral (PI)
                                                            Controller


-----------------------------------------------------------------------------------------------------------------------------------
MCA-453/                     ORD       US00/40274        WO01/04923                                     Published
Patent Cooperation Treaty              21-Jun-2000       18-Jan-2001
                                                     Title: Method and System for Driving a Solenoid


-----------------------------------------------------------------------------------------------------------------------------------
MCA-454/                     ORD       US00/40252        WO01/04580                                     Published
Patent Cooperation Treaty              20-Jun-2000       18-Jan-2001
                                                     Title: Method and System for Regulating a Voltage Supply


-----------------------------------------------------------------------------------------------------------------------------------
MCA-455/                     ORD       US00/40251        WO01/04716                                     Published
Patent Cooperation Treaty              20-Jun-2000       18-Jan-2001
                                                     Title: A System and Method for a Digital Mass Flow Controller


-----------------------------------------------------------------------------------------------------------------------------------
MCA-456/                     ORD       US00/16110                                                       Pending
Patent Cooperation Treaty              09-Jun-2000
                                                     Title: Polymeric Membranes Functionalized with Polyhydroxypyridinone
                                                            Ligands


-----------------------------------------------------------------------------------------------------------------------------------
MCA-459/                     ORD       US00/40254        WO01/04582                                     Published
Patent Cooperation Treaty              20-Jun-2000       18-Jan-2001
                                                     Title: Sensor Response Linearization


-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>
<PAGE>

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------------------------------------
Wednesday, March 21, 2001                                     Patent List                                                Page: 5
-----------------------------------------------------------------------------------------------------------------------------------
Case Number/Subcase                Case           Application         Publication              Patent              Status
Country Name                       Type           Number/Date         Number/Date              Number/Date         Expiration Date
-----------------------------------------------------------------------------------------------------------------------------------
<S>                                <C>            <C>                 <C>                      <C>                 <C>
MCA-464/                           ORD            US00/14976          WO0075402A                                   Published
Patent Cooperation Treaty                         31-May-2000         14-Dec-2000
                                                      Title: HYDROPHOBIC AND HYDROPHILIC MEMBRANES TO VENT TRAPPED GASES IN A
                                                             PLANTING CELL
-----------------------------------------------------------------------------------------------------------------------------------
MCA-466/                           ORD            US00/14975          WO0075401A                                   Published
Patent Cooperation Treaty                         31-May-2000         14-Dec-2000
                                                      Title: SIMULTANEOUS ELECTRICAL AND FLUID CONNECTION FOR ANODE
-----------------------------------------------------------------------------------------------------------------------------------
MCA-467/CP                         ORD            US00/23807                                                       Pending
Patent Cooperation Treaty                         28-Aug-2000
                                                      Title: REGENERATION OF PLATING CELLS
-----------------------------------------------------------------------------------------------------------------------------------
MCA-470/                           ORD            US00/24976                                                       Pending
Patent Cooperation Treaty                         13-Sep-2000
                                                      Title: PROCESS AND FILTER FOR FILTERING A SLURRY
-----------------------------------------------------------------------------------------------------------------------------------
MCA-472/                           ORD                                                                             Pending
Patent Cooperation Treaty                         28-Feb-2001
                                                      Title: Disposable Fluid Separation Device and Manifold Assembly Design With
                                                             Easy Change-Out Feature
-----------------------------------------------------------------------------------------------------------------------------------
MCA-473/                           ORD            US00/27363                                                       Pending
Patent Cooperation Treaty                         04-Oct-2000
                                                      Title: HOUSING DESIGN WITH TWIST RING TO ENGAGE AND DISENGAGE BOWL OR BOWL
                                                             ASSEMBLY
-----------------------------------------------------------------------------------------------------------------------------------
MCA-477/                           ORD            US00/27181                                                       Pending
Patent Cooperation Treaty                         02-Oct-2000
                                                      Title: FILTER WITH REMOVABLE ALIGNMENT FIN
-----------------------------------------------------------------------------------------------------------------------------------
MCA-478/                           ORD            US00/28019                                                       Pending
Patent Cooperation Treaty                         10-Oct-2000
                                                      Title: Fluorocarbon Polymeric Compositions Having Hydrophilic Functional
                                                             Groups and Process
-----------------------------------------------------------------------------------------------------------------------------------
MCA-489/                           ORD            US01/01293                                                       Pending
Patent Cooperation Treaty                         12-Jan-2001
                                                      Title: System and Method for Liquid Filtration Based on a Neutral Filter
                                                             Material
-----------------------------------------------------------------------------------------------------------------------------------
MCA-497/                           ORD            US01/03129                                                       Pending
Patent Cooperation Treaty                         31-Jan-2001
                                                      Title: Porous or Non-Porous Substrate Coated With a Polymeric Composition
                                                             Having Hydrophilic Functional Groups and Processes
-----------------------------------------------------------------------------------------------------------------------------------
</TABLE>