# Patent

## Title
Planar flexure system with high pitch stiffness

## Abstract

A flexure system for miniature camera and the like is disclosed. The flexure system can include a frame and a stage that is configured to move with respect to the frame. One or more flexures can interconnect the frame and the stage. Each flexure can have one or more film hinges formed thereon. The film hinges can be widely spaced and/or extended in length so as to substantially mitigate undesirable pitching of the stage.

## Background
PRIORITY CLAIM
This patent application is a continuation application of U.S. patent application Ser. No. 12/201,676, filed on Aug. 29, 2008 now abandoned which claims the benefit of the priority date of U.S. provisional patent application Ser. No. 60/968,711, filed on Aug. 29, 2007 and entitled Planar Flexure System With High Pitch Stiffness pursuant to 35 USC 119. The entire contents of both this regular patent application and this provisional patent application are hereby expressly incorporated by reference.


TECHNICAL FIELD
The present invention relates generally to micro electromechanical systems (MEMS). The present invention relates more particularly, for example, to a planar flexure system having high pitch stiffness that is suitable for used in miniature cameras and the like.
BACKGROUND
Flexures for use in micro electromechanical system (MEMS) are known. Such flexures typically allow movement in one direction while inhibiting movement in other directions or about selected axes. Thus, such flexures can facilitate the controlled movement of one structure or device relative to another structure or device.
BRIEF SUMMARY
Methods and systems for mitigating undesirable pitch in components of miniature cameras and the like are disclosed herein. For example, in accordance with an an embodiment one or more film hinges can be used to mitigate the undesirable pitch of optical components.
According to an example of an embodiment, a flexure system for a miniature camera or the like can comprise at least one film hinge. A film hinge can be formed from a substantially rigid material by making the material sufficiently thin such that desired motion is facilitated.
According to an example of an embodiment, a flexure system for a miniature camera can comprise at least one film hinge, a frame, a stage, and means for interconnecting the frame and the stage. The means for interconnecting the frame and the stage can include the film hinge(s).
According to an example of an embodiment, a method for making a flexure system can comprise using MEMS manufacturing techniques. The MEMS manufacturing techniques can be used to form at least one film hinge of the flexure system.
According to an example of an embodiment, a method for moving a stage can comprise inhibiting pitching of the stage using at least one film hinge. The film hinge can define a portion of a flexure that controls the motion of the stage.
According to an example of an embodiment, a method for focusing a camera can comprise moving a stage having a lens attached thereto. The lens can facilitate focusing, zooming, image stabilization, or any other function of the camera. Pitching of the stage can be inhibited by at least one film hinge.
Benefits include reduced costs and increased yield in the production of MEMS devices, such as miniature cameras.
Embodiments of the present invention will be more fully understood in conjunction with the following detailed description taken together with the following drawings.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a semi-schematic perspective view of a planar flexure assembly having film hinges, according to an example of an embodiment;
FIG. 2 is a semi-schematic enlarged perspective view of a planar flexure, including the film hinges thereof, of a planar flexure assembly, according to an example of an embodiment;
FIG. 3 is a semi-schematic top view of a planar flexure assembly with film hinges having a lens attached to the stage thereof, according to an example of an embodiment; and
FIG. 4 is a semi-schematic front view of a personal electronic device, such as a cellular telephone, comprising a camera having a flexure assembly, according to an example of an embodiment.



Embodiments of the present invention and their advantages are best understood by referring to the detailed description that follows. It should be appreciated that like reference numerals are used to identify like elements illustrated in one or more of the figures.
DETAILED DESCRIPTION
A method and system for providing a two-dimensional, i.e., planar, flexure assembly for use in miniature cameras (such as those of cellular telephones) and the like is disclosed. The flexure assembly can substantially mitigate undesirable pitching of components, such as optical elements.
As those skilled in the art will appreciate, undesirable pitching of a component results in a misalignment thereof. For example, pitching of a camera lens results in misalignment of the optical axis of the lens with respect to the optical axis of the camera within which the lens is used. Such misalignment can result in a degradation of the performance of the camera. For example, images obtained with the camera can have poor focus and resolution. Undesirable pitching can also result in pre-mature wear and/or damage to components.
According to an example of an embodiment, the flexure system can comprise thin film hinges. More particularly, a system of generally coplanar flexures having thin film hinges can provide motion control for the optical elements, e.g., lens, lens assembly, mirror, prism, filter, and/or imaging sensor, of a miniature camera.
For example, the flexure system can readily facilitate desired motion along the z axis, i.e., in an out-of plane direction, of approximately 150 microns. This motion can be used to focus a lens, for example. The flexure system can have a very low spring rate, e.g., approximately 15 N/m, for motion along the z axis and very high spring rates, e.g., approximately 70,000 N/m or 1500 mN-mm/R in all other directions, for example. Contemporary simple planar flexure systems have very poor pitch stiffnesses which are typically a factor of 1000 less than is desired for miniature camera applications.
The high in-plane and pitch stiffnesses mitigate the undesirable occurrence of snap-in that is associated with electrostatic actuation. When power is applied to an electrostatic actuator to move it out of plane, large in-plane forces also develop. If these forces are not resisted by high in-plane stiffness and pitch stiffness, the two portions of the actuator at differing potentials could translate together in-plane (snap in), and create an electrical short.
An example of an embodiment can comprise thin film hinges. For example, either widely separated pairs of film hinges or single hinges having a comparatively larger lateral extent, can be used. Any desired combination of such widely separated pairs of film hinges and extended hinges can be used. In any instance, the hinges can interconnect a substantially rigid stationary frame with a moving member, such as a stage.
Each flexure of the assembly can be soft for motion along z axis and can be very rigid in twist or rotation about its own length. Three or more of these flexures oriented radially, such as from an outer frame, can attach to an inner stage. The stage can define a lens mount ring. In this manner, a flexure system that is soft in the z direction and that is very stiff in all other degrees of freedom can be provided to facilitate focusing of a camera, for example.
According to an example of an embodiment, desirable motion control can be provided using a flexure assembly that is substantially planar in configuration. Alternatively, the flexure assembly can have non-planar portions or components and can even be substantially non-planar. Planar configuration facilitates fabrication from a silicon wafer utilizing contemporary MEMS processing techniques, for example.
According to an example of an embodiment, a flexure system for a miniature camera can comprise one or more film hinges. The flexure system can comprise a frame, a stage, and at least one flexure interconnecting the frame and the stage. At least one film hinge can attach the flexure(s) to the frame. Similarly, at least one film hinge can attach the flexure(s) to the stage.
One or more film hinges can be disposed upon each end of flexure(s). The film hinges can connect the flexures to the frame and/or the stage. For example, either a pair of widely spaced film hinges or a single extended film hinge can be disposed upon each end of a flexure so as to connect the flexure to the frame and the stage.
When a pair of widely spaced film hinges is used, the two film hinges can be separated by a distance that is sufficient so as to substantially inhibit pitching of the stage. When a single extended film hinge is used, the single hinge can have an extent or length that is sufficient so as to substantially inhibit pitching of the stage. A single extended film hinge can, at least in some instances, be somewhat analogous to a pair of widely spaced film hinges having a continuous hinge formed between the two hinges.
Various configurations of hinges are suitable for use according to examples of embodiments. Various combinations of widely spaced hinges and continuous hinges are suitable for such use. Generally, the overall length of the hinge or hinges determine the ability thereof to inhibit pitching.
Thus, two film hinges can be separated by a distance that is sufficient so as to substantially inhibit pitching of the stage. For example, the two film hinges can be separated by a distance that is greater than one half of a diameter of the stage. The two film hinges can be separated by a distance that is approximately equal to a diameter of the stage. The two film hinges can be separated by a distance that is greater than a diameter of the stage.
Similarly, a single film extended hinge can have a length that is sufficient so as to substantially inhibit pitching of the stage. For example, the length of the single extended hinge can be greater than one half of a diameter of the stage. The length of the single extended hinge can be approximately equal to a diameter of the stage. The length of the single extended hinge can be greater than a diameter of the stage.
The frame can be generally square. The frame can be generally square and one flexure can extend from each side of the frame inwardly to the stage. As discussed below, the frame can be of any other desired shape. Any desired number of flexures can extend from one side of the frame to the stage.
The frame can be defined by a housing or package. For example, the frame can be defined by a camera housing. As a further example, the frame can be defined by a cellular telephone housing.
The stage can define a lens mount. The lens mount can be disposed generally centrally within the frame. The stage can be located non-centrally with respect to the frame. The stage can be either co-planar with respect to the frame or can be non-co-planar with respect thereto.
The frame can be substantially rigid. The flexures can be substantially rigid. The stage can be substantially rigid.
The film hinges can be configured to provide out-of-plane movement of the stage. Such out-of-plane movement can be used to focus a camera, zoom a camera, facilitate image stabilization for a camera, or for any other desired purpose.
As discussed above, the spring rate for out-of-plane movement can be comparatively very low and the spring rate for in-plane movement is comparatively very high. For example, the spring rate for out-of-plane movement can be approximately 15 N/m and the spring rate for in-plane movement is approximately 70,000 N/m.
The flexures can extend generally radially from the frame to the stage. The flexures do not have to extend directly from the frame to the stage. For example, the flexures can follow a tortuous or contorted path from the frame to the stage.
The flexures can be spaced at approximately equal angles about the stage. Alternatively, the flexures can be spaced at unequal angles about the stage.
As discussed herein, the frame, stage, flexures, and film hinges can be substantially monolithic in construction. For example, the frame, stage, flexures, and film hinges can be formed monolithically from silicon. The frame, stage, flexures, and film hinges can be formed monolithically from a single silicon wafer using MEMS manufacturing techniques.
Thus, four flexures can connect to the central moving portion or stage and extend radially outward and connect to the frame. Three, instead of four flexures, can alternatively be used. Any desired number of flexures can be used. It is not necessary to dispose the flexures evenly about the central moving portion or stage, although this can be done. The usage of three or more flexures provides the moving portion with low Z stiffness, for allowed motion, and high stiffness in all other degrees of freedom (X, Y, θX, θY, θZ).
Referring now to FIG. 1, an example of an embodiment can comprise a generally planar flexure assembly having with high pitch stiffness. The high pitch stiffness can inhibit undesirable pitching, as discussed below.
A substantially rigid frame 101 can be attached to a stage 102 via one or more flexures 103. The substantially rigid frame 101, stage 102, and the flexures 103 can be formed substantially integrally with one another, such as from a single, monolithic piece of silicon, e.g., a wafer.
The frame 101 can be generally square in configuration. Alternatively, the frame 101 can have any other desired shape. For example, the frame can be triangular, rectangular, pentagonal, octagonal, round, or oval in configuration.
The frame 101 can be any shape that rigidly connects the thin-film hinges to one another. For example, the frame 101 can define a window frame, e.g., hollow square, rectangle, or trapezoid.
Similarly, the stage 102 can be generally round in configuration. For example, the stage 102 can be generally round so as to better facilitate the mounting of a lens or lens assembly thereto. Alternatively, the stage 102 can have any other desired shape. For example, the stage 102 can be triangular, square, rectangular, pentagonal, octagonal, round, or oval in configuration. As those skilled in the art will appreciate, a non-round stage can readily accommodate a round lens or lens assembly.
The stage 102 can have an opening 110 formed therein. The opening 110 can be formed generally centrally within the stage 102. The opening 110 can have the same general shape as the stage 102. Alternatively, the opening 110 can have a different shape with respect to the shape of the stage and the opening 110 need not be formed generally centrally within the stage 102.
Any desired number of flexures 103 can be used. For example, 1, 2, 3, 4, 5, 6, or more flexures can be used. The number of flexures can correspond to the number of sides of the frame 101. For example, a triangular frame can have three flexures and a square or rectangular frame can have four flexures. Not all sides of a frame necessarily require a corresponding flexure.
Referring now to FIG. 2, an example of an embodiment a flexure 103 can comprise one or more hinges 201 at each end thereof. The hinges 201 can be configured so as to inhibit pitching of the stage 102 (and consequently of the optical element(s) disposed thereon). In this manner, undesirable misalignment of an optical element can be mitigated.
More particularly, a flexure 103 can comprise an interconnecting member 106, which can be defined by a radially extending and elongated portion of the flexure 103. The interconnecting member can have two widely spaced film hinges 201 formed at a proximal end thereof and can have two widely spaces film hinges 201 formed at a distal end thereof. The film hinges 201 at the proximal end of the interconnecting member 106 can attach the interconnecting member 106 to the frame 101. The film hinges 201 at the distal end of the interconnecting member 106 can attach the interconnecting portion 106 to the stage 102.
The widely separated hinges 102 can comprise at least two hinges wherein the two hinges that are the farthest apart are sufficiently far apart so as to substantially inhibit pitching of the stage 102. For example, the distance, Dimensions A and B, between the two hinges 201 that are the farthest apart can be greater than one half of the diameter, Dimension C, of the opening 110 in the stage 102. As a further example, the distance, Dimensions A and B, between the two hinges 201 that are the farthest apart can be approximately equal to the diameter, Dimension C, of the opening 110 in the stage 102.
The distance, Dimension A, between the two hinges 201 at the proximal end 104 of the interconnecting member 106 can be different from the distance, Dimension B, between the two hinges 201 at the distal end 105 of the interconnecting member 106.
Local twist stiffness is provided by the separation between the pair of hinges at each end, or by the lateral extent of a single hinge. This local twist stiffness inhibits undesirable pitching of the stage 102.
As discussed herein, rather than two widely spaced hinges 201, a single extended hinge can be used. Any desired number of hinges and/or configuration of hinges that mitigates undesirable pitching can be used.
The above described configuration of hinges and frame, by itself, can be undesirably non-linear. That is, the stiffness in the Z direction increases with increasing Z deflection. The cause of the nonlinearity is mid-plane stretching. The flexure needs to become longer as Z deflection increases, and the flexure is comparatively stiff axially and resists extension.
According to an example of an embodiment, a pair of linearizing flexures 202 can be placed between the frame side hinges 201 and the frame 101. This pair of linearizing flexures 202 can be substantially stiff in Z, tangentially (perpendicular to the radial direction, which also means perpendicular to the axial direction of the flexure), and in twist about the flexure axis.
The linearizing flexures 202 can be elongated members that bow so as to accommodate out-of-plane movement of the stage 102. The linearizing flexures 202 effectively increase the length of the flexure assembly 103 as the out-of-plane movement of the stage 102 increases (as the stage 102 moves further along the z axis).
The high pitch stiffness can inhibit rotation about the x axis and the y axis. The use of pairs of hinges (as shown) or elongated hinges for a flexure inhibits pitching or twisting about the longitudinal axis of that flexure.
Referring now to FIG. 3, an optical element 801, such lens, lens assembly, mirror, prism, filter, and/or imaging sensor can be attached to the stage 102. Any desired device or item (including non-optical elements) can be mounted to or otherwise in mechanical communication with the stage 102 so as to effect movement of the device.
The optical element(s) can be held in position via a mount or can attach directly to the stage 102. Any desired method for mounting an optical element or other device or item to the stage can be used.
For example, optical element 801 can be a lens assembly for a miniature camera, such as a miniature camera for a cellular telephone (such as cellular telephone 1001 of FIG. 4). Thus, the stage 102 can move along the z axis (in and out of the plane of the paper) so as to effect focusing of the camera, for example. Movement of the stage 102 can effect focusing, zooming, image stabilization, or any other desired function. An actuator or motor can be used to effect such movement of the stage 102. The actuator or motor can be either a MEMS actuator or motor or a non-MEMS actuator or motor.
Referring now to FIG. 4, a camera 1002 can be made according to an example of an embodiment. The camera 1002 can have a flexure assembly for facilitating focusing, zooming, and or image stabilization thereof can be built into a cellular telephone 1001, according to an example of an embodiment. The use of MEMS deployment flexures can better facilitate miniaturization and construction of such a camera. The cost of the camera can be substantially reduced and the reliability thereof can be enhanced.
As used herein, the term “pitch” can refer to rotation about any axis that is contained within the plane of the flexure assembly. For example, pitch can refer to rotation about the x axis or the y axis as shown in the figures.
As used herein, the term “film” can refer to a portion of a structure that is thinner than other portions thereof (such as immediately adjacent portions) such that the film defines a hinge, like a living hinge. The hinge can facilitate relative movement of structures that are adjacent to the hinge (such as rotation of one structure relative to the other structure).
As used herein, the term “housing” can refer to any package, container, product, device, or structure within which and/or to which a flexure assembly can be contained and/or attached.
As used herein, the term “diameter” can refer to a major dimension of a structure that provides some indication of the size thereof. Thus, the term diameter is not restricted to the characterization of circles.
One or more embodiments facilitate the construction of devices such as miniature cameras at reduced cost and with increased yield. Improved operation and reliability can be provided.
Embodiments described above illustrate, but do not limit, the invention. It should also be understood that numerous modifications and variations are possible in accordance with the principles of the present invention. Accordingly, the scope of the invention is defined only by the following claims.

## Claims

1. A flexure system for a miniature camera, the flexure system comprising:
a frame;
a stage;
an interconnecting member;
a first film hinge connecting between the frame and a proximal end of the interconnecting member; and
a second film hinge interconnecting between the stage and a distal end of the interconnecting member, wherein the flexure system is formed from a planar wafer having a first thickness such that the frame, the stage, and the interconnecting member are planar and have the first thickness and the first and second film hinges have a second thickness that is less than the first thickness.

2. The flexure system as recited in claim 1, further comprising a linearizing flexure through which the first film hinge connects to the frame.

3. The flexure system as recited in claim 1, wherein the first film hinge comprises two first film hinges and the two first film hinges are separated by a distance that is sufficient so as to substantially inhibit pitching of the stage.

4. The flexure system as recited in claim 1, wherein the second film hinge comprises two second film hinges and the two second film hinges are separated by a distance that is sufficient so as to substantially inhibit pitching of the stage.

5. The flexure system as recited in claim 3, wherein the two first film hinges are separated by a distance that is greater than one half of a diameter of the stage.

6. The flexure system as recited in claim 4, wherein the two second film hinges are separated by a distance that is approximately equal to a diameter of the stage.

7. The flexure system as recited in claim 1, wherein each of the first and second film hinges have a length that is sufficient so as to substantially inhibit pitching of the stage.

8. The flexure system as recited in claim 1, wherein the frame is generally square.

9. The flexure system as recited in claim 1, wherein the stage defines a lens mount.

10. The flexure system as recited in claim 1, wherein the stage defines a lens mount that is disposed generally centrally within the frame.

11. The flexure system as recited in claim 1, wherein the stage is generally co-planar with respect to the frame.

12. The flexure system as recited in claim 1, wherein the frame is substantially rigid.

13. The flexure system as recited in claim 1, wherein the interconnecting member is substantially rigid.

14. The flexure system as recited in claim 1, wherein the stage is substantially rigid.

15. The flexure system as recited in claim 1, wherein a spring rate for actuation of the stage in the orthogonal direction is approximately 15 N/m and a spring rate for in-plane movement is approximately 70,000 N/m.

16. The flexure system as recited in claim 1, wherein the interconnecting member comprises four interconnecting members.

17. The flexure system as recited in claim 1, wherein the interconnecting member extends radially from the frame to the stage.

18. The flexure system as recited in claim 1, wherein the wafer is a silicon wafer.