# Patent

## Title
Process and structure for fabrication of MEMS device having isolated edge posts

## Abstract

A method of fabricating an array of MEMS devices includes the formation of support structures located at the edge of upper strip electrodes. A support structure is etched to form a pair of individual support structures located at the edges of a pair of adjacent electrodes. The electrodes themselves may be used as a hard mask during the etching of these support structures. A resultant array of MEMS devices includes support structures having a face located at the edge of an overlying electrode and coincident with the edge of the overlying electrode.

## Background
BACKGROUND OF THE INVENTION
Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
SUMMARY OF THE INVENTION
In one embodiment, a method of fabricating a microelectromechanical systems (MEMS) device is provided, the method including forming an electrode layer over a substrate, depositing a sacrificial layer over the electrode layer, forming a plurality of support structures, the support structures extending through the sacrificial layer, where at least some of the plurality of support structures include edge support structures, depositing a mechanical layer over the plurality of support structures, patterning the mechanical layer to form strips, where the strips are separated by gaps, and where the gaps are located over a central portion of each of the edge support structures, and etching a portion of each of the edge support structures underlying the gaps, thereby forming isolated edge support structures.
In another embodiment, an apparatus including an array of MEMS devices is provided, the array including a plurality of lower electrodes located over a substrate, a plurality of upper strip electrodes spaced apart from the plurality of lower electrodes by a cavity, the upper strip electrodes separated by gaps, a plurality of isolated edge posts located between the upper strip electrodes and the lower electrodes, where the isolated edge posts include a face extending along the edge of the isolated edge posts facing an adjacent gap.
In another embodiment, a method of fabricating a microelectromechanical systems (MEMS) device is provided, the method including forming an electrode layer over a substrate, depositing a sacrificial layer over the electrode layer, depositing a reflective layer over the sacrificial layer, forming a plurality of support structures, the support structures extending through the sacrificial layer, where at least some of the plurality of support structures include edge support structures, depositing a mechanical layer over the plurality of support structures, patterning the mechanical layer to form strips, where the strips are separated by gaps, and where the gaps are located over a central portion of each of the edge support structures, and etching portions of the reflective layer extending underneath the gaps in the mechanical layer, where etching the reflective layer includes exposing the reflective layer to an etch for a period of time sufficient to electrically isolate portions of the reflective layer located underneath the strips from one another.
In another embodiment, a MEMS device is provided, including first means for electrically conducting, second means for electrically conducting, adjacent second means for electrically conducting, and means for supporting edge portions of and for electrically isolating the second conducting means from the adjacent second conducting means, where the second conducting means is electrically isolated from the first conducting means, and where the second conducting means is movable relative to the first conducting means in response to generating electrostatic potential between the first and second conducting means.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is an isometric view depicting a portion of one embodiment of an interferometric modulator display in which a movable reflective layer of a first interferometric modulator is in a relaxed position and a movable reflective layer of a second interferometric modulator is in an actuated position.
FIG. 2 is a system block diagram illustrating one embodiment of an electronic device incorporating a 3×3 interferometric modulator display.
FIG. 3 is a diagram of movable mirror position versus applied voltage for one exemplary embodiment of an interferometric modulator of FIG. 1.
FIG. 4 is an illustration of a set of row and column voltages that may be used to drive an interferometric modulator display.
FIG. 5A illustrates one exemplary frame of display data in the 3×3 interferometric modulator display of FIG. 2.
FIG. 5B illustrates one exemplary timing diagram for row and column signals that may be used to write the frame of FIG. 5A.
FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a visual display device comprising a plurality of interferometric modulators.
FIG. 7A is a cross section of the device of FIG. 1.
FIG. 7B is a cross section of an alternative embodiment of an interferometric modulator.
FIG. 7C is a cross section of another alternative embodiment of an interferometric modulator.
FIG. 7D is a cross section of yet another alternative embodiment of an interferometric modulator.
FIG. 7E is a cross section of an additional alternative embodiment of an interferometric modulator.
FIGS. 8A-8H are schematic cross-sections depicting certain steps in the fabrication of an array of MEMS devices.
FIG. 9A is a schematic top plan view of a portion of an array of partially fabricated MEMS devices.
FIG. 9B is a schematic cross-section a partially fabricated MEMS device from the array of FIG. 9A, taken along the line 9B-9B.
FIGS. 10A-10F are schematic cross-sections depicting certain steps in the fabrication of an array of MEMS devices.
FIG. 11 is a schematic top plan view of the array of MEMS devices fabricated by the process of FIGS. 10A-10F.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be embodied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. As will be apparent from the following description, the embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.
In some embodiments, the fabrication of an array of MEMS devices, such as interferometric modulators, leads to the creation of residual stringers of conductive material that extend between electrodes, which electrodes should be electrically isolated from one another. In embodiments in which the MEMS devices being fabricated are interferometric modulators, a layer of conductive reflective material often forms these stringers. These conductive stringers may be located underneath portions of support structures which support two adjacent electrodes. By etching a portion of the support structures located between adjacent electrodes, the electrodes can advantageously be reliably electrically isolated from one another, while still providing support for each electrode in the form of a pair of isolated support structures formed from the original support structure. Advantageously, the mechanical layer which forms the electrodes can be used as a hard mask for the etching of the portion of the support structures located between the electrodes.
One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in FIG. 1. In these devices, the pixels are in either a bright or dark state. In the bright (“on” or “open”) state, the display element reflects a large portion of incident visible light to a user. When in the dark (“off” or “closed”) state, the display element reflects little incident visible light to the user. Depending on the embodiment, the light reflectance properties of the “on” and “off” states may be reversed. MEMS pixels can be configured to reflect predominantly at selected colors, allowing for a color display in addition to black and white.
FIG. 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, wherein each pixel comprises a MEMS interferometric modulator. In some embodiments, an interferometric modulator display comprises a row/column array of these interferometric modulators. Each interferometric modulator includes a pair of reflective layers positioned at a variable and controllable distance from each other to form a resonant optical cavity with at least one variable dimension. In one embodiment, one of the reflective layers may be moved between two positions. In the first position, referred to herein as the relaxed position, the movable reflective layer is positioned at a relatively large distance from a fixed partially reflective layer. In the second position, referred to herein as the actuated position, the movable reflective layer is positioned more closely adjacent to the partially reflective layer. Incident light that reflects from the two layers interferes constructively or destructively depending on the position of the movable reflective layer, producing either an overall reflective or non-reflective state for each pixel.
The depicted portion of the pixel array in FIG. 1 includes two adjacent interferometric modulators 12a and 12b. In the interferometric modulator 12a on the left, a movable reflective layer 14a is illustrated in a relaxed position at a predetermined distance from an optical stack 16a, which includes a partially reflective layer. In the interferometric modulator 12b on the right, the movable reflective layer 14b is illustrated in an actuated position adjacent to the optical stack 16b. 
The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include a transparent, conductive electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent, and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.
With no applied voltage, the cavity 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in FIG. 1. However, when a potential difference is applied to a selected row and column, the capacitor formed at the intersection of the row and column electrodes at the corresponding pixel becomes charged, and electrostatic forces pull the electrodes together. If the voltage is high enough, the movable reflective layer 14 is deformed and is forced against the optical stack 16. A dielectric layer (not illustrated in this Figure) within the optical stack 16 may prevent shorting and control the separation distance between layers 14 and 16, as illustrated by pixel 12b on the right in FIG. 1. The behavior is the same regardless of the polarity of the applied potential difference. In this way, row/column actuation that can control the reflective vs. non-reflective pixel states is analogous in many ways to that used in conventional LCD and other display technologies.
FIGS. 2 through 5B illustrate one exemplary process and system for using an array of interferometric modulators in a display application.
FIG. 2 is a system block diagram illustrating one embodiment of an electronic device that may incorporate aspects of the invention. In the exemplary embodiment, the electronic device includes a processor 21 which may be any general purpose single- or multi-chip microprocessor such as an ARM, Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051, a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessor such as a digital signal processor, microcontroller, or a programmable gate array. As is conventional in the art, the processor 21 may be configured to execute one or more software modules. In addition to executing an operating system, the processor may be configured to execute one or more software applications, including a web browser, a telephone application, an email program, or any other software application.
In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in FIG. 1 is shown by the lines 1-1 in FIG. 2. For MEMS interferometric modulators, the row/column actuation protocol may take advantage of a hysteresis property of these devices illustrated in FIG. 3. It may require, for example, a 10 volt potential difference to cause a movable layer to deform from the relaxed state to the actuated state. However, when the voltage is reduced from that value, the movable layer maintains its state as the voltage drops back below 10 volts. In the exemplary embodiment of FIG. 3, the movable layer does not relax completely until the voltage drops below 2 volts. Thus, there exists a window of applied voltage, about 3 to 7 V in the example illustrated in FIG. 3, within which the device is stable in either the relaxed or actuated state. This is referred to herein as the “hysteresis window” or “stability window.” For a display array having the hysteresis characteristics of FIG. 3, the row/column actuation protocol can be designed such that during row strobing, pixels in the strobed row that are to be actuated are exposed to a voltage difference of about 10 volts, and pixels that are to be relaxed are exposed to a voltage difference of close to zero volts. After the strobe, the pixels are exposed to a steady state voltage difference of about 5 volts such that they remain in whatever state the row strobe put them in. After being written, each pixel sees a potential difference within the “stability window” of 3-7 volts in this example. This feature makes the pixel design illustrated in FIG. 1 stable under the same applied voltage conditions in either an actuated or relaxed pre-existing state. Since each pixel of the interferometric modulator, whether in the actuated or relaxed state, is essentially a capacitor formed by the fixed and moving reflective layers, this stable state can be held at a voltage within the hysteresis window with almost no power dissipation. Essentially no current flows into the pixel if the applied potential is fixed.
In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.
FIGS. 4, 5A, and 5B illustrate one possible actuation protocol for creating a display frame on the 3×3 array of FIG. 2. FIG. 4 illustrates a possible set of column and row voltage levels that may be used for pixels exhibiting the hysteresis curves of FIG. 3. In the FIG. 4 embodiment, actuating a pixel involves setting the appropriate column to −Vbias, and the appropriate row to +ΔV, which may correspond to −5 volts and +5 volts, respectively Relaxing the pixel is accomplished by setting the appropriate column to +Vbias, and the appropriate row to the same +ΔV, producing a zero volt potential difference across the pixel. In those rows where the row voltage is held at zero volts, the pixels are stable in whatever state they were originally in, regardless of whether the column is at +Vbias, or −Vbias. As is also illustrated in FIG. 4, it will be appreciated that voltages of opposite polarity than those described above can be used, e.g., actuating a pixel can involve setting the appropriate column to +Vbias, and the appropriate row to −ΔV. In this embodiment, releasing the pixel is accomplished by setting the appropriate column to −Vbias, and the appropriate row to the same −ΔV, producing a zero volt potential difference across the pixel.
FIG. 5B is a timing diagram showing a series of row and column signals applied to the 3×3 array of FIG. 2 which will result in the display arrangement illustrated in FIG. 5A, where actuated pixels are non-reflective. Prior to writing the frame illustrated in FIG. 5A, the pixels can be in any state, and in this example, all the rows are at 0 volts, and all the columns are at +5 volts. With these applied voltages, all pixels are stable in their existing actuated or relaxed states.
In the FIG. 5A frame, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) are actuated. To accomplish this, during a “line time” for row 1, columns 1 and 2 are set to −5 volts, and column 3 is set to +5 volts. This does not change the state of any pixels, because all the pixels remain in the 3-7 volt stability window. Row 1 is then strobed with a pulse that goes from 0, up to 5 volts, and back to zero. This actuates the (1,1) and (1,2) pixels and relaxes the (1,3) pixel. No other pixels in the array are affected. To set row 2 as desired, column 2 is set to −5 volts, and columns 1 and 3 are set to +5 volts. The same strobe applied to row 2 will then actuate pixel (2,2) and relax pixels (2,1) and (2,3). Again, no other pixels of the array are affected. Row 3 is similarly set by setting columns 2 and 3 to −5 volts, and column 1 to +5 volts. The row 3 strobe sets the row 3 pixels as shown in FIG. 5A. After writing the frame, the row potentials are zero, and the column potentials can remain at either +5 or −5 volts, and the display is then stable in the arrangement of FIG. 5A. It will be appreciated that the same procedure can be employed for arrays of dozens or hundreds of rows and columns. It will also be appreciated that the timing, sequence, and levels of voltages used to perform row and column actuation can be varied widely within the general principles outlined above, and the above example is exemplary only, and any actuation voltage method can be used with the systems and methods described herein.
FIGS. 6A and 6B are system block diagrams illustrating an embodiment of a display device 40. The display device 40 can be, for example, a cellular or mobile telephone. However, the same components of display device 40 or slight variations thereof are also illustrative of various types of display devices such as televisions and portable media players.
The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 45, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including, but not limited to, plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment, the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.
The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.
The components of one embodiment of exemplary display device 40 are schematically illustrated in FIG. 6B. The illustrated exemplary display device 40 includes a housing 41 and can include additional components at least partially enclosed therein. For example, in one embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43, which is coupled to a transceiver 47. The transceiver 47 is connected to a processor 21, which is connected to conditioning hardware 52. The conditioning hardware 52 may be configured to condition a signal (e.g., filter a signal). The conditioning hardware 52 is connected to a speaker 45 and a microphone 46. The processor 21 is also connected to an input device 48 and a driver controller 29. The driver controller 29 is coupled to a frame buffer 28 and to an array driver 22, which in turn is coupled to a display array 30. A power supply 50 provides power to all components as required by the particular exemplary display device 40 design.
The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment, the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS, or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.
In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, the network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a memory device such as a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.
The processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to the frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.
In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. The conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.
The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.
Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.
In one embodiment, the driver controller 29, the array driver 22, and the display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, the driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, the array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, the display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).
The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, the input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, or a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.
The power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, the power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, the power supply 50 is a renewable energy source, a capacitor, or a solar cell including a plastic solar cell, and solar-cell paint. In another embodiment, the power supply 50 is configured to receive power from a wall outlet.
In some embodiments, control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some embodiments, control programmability resides in the array driver 22. Those of skill in the art will recognize that the above-described optimizations may be implemented in any number of hardware and/or software components and in various configurations.
The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example, FIGS. 7A-7E illustrate five different embodiments of the movable reflective layer 14 and its supporting structures. FIG. 7A is a cross section of the embodiment of FIG. 1, where a strip of metal material 14 is deposited on orthogonally extending supports 18. In FIG. 7B, the moveable reflective layer 14 is attached to supports 18 at the corners only, on tethers 32. In FIG. 7C, the moveable reflective layer 14 is suspended from a deformable layer 34, which may comprise a flexible metal. The deformable layer 34 connects, directly or indirectly, to the substrate 20 around the perimeter of the deformable layer 34. These connections are herein referred to as support posts or structures 18. The embodiment illustrated in FIG. 7D has support post structures 18 that include support plugs 42 upon which the deformable layer 34 rests. The movable reflective layer 14 remains suspended over the cavity, as in FIGS. 7A-7C, but the deformable layer 34 does not form the support posts by filling holes between the deformable layer 34 and the optical stack 16. Rather, the support posts 18 are formed of a planarization material, which is used to form the support post plugs 42. The embodiment illustrated in FIG. 7E is based on the embodiment shown in FIG. 7D, but may also be adapted to work with any of the embodiments illustrated in FIGS. 7A-7C, as well as additional embodiments not shown. In the embodiment shown in FIG. 7E, an extra layer of metal or other conductive material has been used to form a bus structure 44. This allows signal routing along the back of the interferometric modulators, eliminating a number of electrodes that may otherwise have had to be formed on the substrate 20.
In embodiments such as those shown in FIG. 7, the interferometric modulators function as direct-view devices, in which images are viewed from the front side of the transparent substrate 20, the side opposite to that upon which the modulator is arranged. In these embodiments, the reflective layer 14 optically shields the portions of the interferometric modulator on the side of the reflective layer opposite the substrate 20, including the deformable layer 34. This allows the shielded areas to be configured and operated upon without negatively affecting the image quality. Such shielding allows the bus structure 44 in FIG. 7E, which provides the ability to separate the optical properties of the modulator from the electromechanical properties of the modulator, such as addressing and the movements that result from that addressing. This separable modulator architecture allows the structural design and materials used for the electromechanical aspects and the optical aspects of the modulator to be selected and to function independently of each other. Moreover, the embodiments shown in FIGS. 7C-7E have additional benefits deriving from the decoupling of the optical properties of the reflective layer 14 from its mechanical properties, which are carried out by the deformable layer 34. This allows the structural design and materials used for the reflective layer 14 to be optimized with respect to the optical properties, and the structural design and materials used for the deformable layer 34 to be optimized with respect to desired mechanical properties.
In one embodiment, a method of manufacturing an interferometric modulator, such as those described above, is described with respect to FIGS. 8A-8H. In FIG. 8A, it can be seen that an electrode layer 52 has been deposited on a substrate 50, and that a partially reflective layer 54 has been deposited over the electrode layer 52. The partially reflective layer 54 and the electrode layer 52 are then patterned and etched to form gaps 56 which may define strip electrodes formed from the electrode layer 52. In addition, the gap 56 may comprise, as it does in the illustrated embodiment, an area of the electrode layer 52 and the partially reflective layer 54 which have been removed from underneath the location where a support structure will be formed. In other embodiments, the partially reflective layer 54 and the electrode layer 52 are only patterned and etched to form the strip electrodes, and the partially reflective layer 54 and electrode layer 52 may thus extend underneath some or all of the support structures. In one embodiment, the electrode layer 52 comprises indium-tin-oxide (ITO). In one embodiment, the partially reflective layer 54 comprises a layer of chromium (Cr). In other embodiments, the placement of the layers 52 and 54 may be reversed, such that the partially reflective layer is located underneath the electrode layer 54. In another embodiment, a single layer (not shown) may serve as both the electrode layer and the partially reflective layer. In other embodiments, only one of the electrode layer 52 or the partially reflective layer 54 may be formed.
In FIG. 8B, it can be seen that a dielectric layer 58 has been deposited over the patterned electrode layer 52 and partially reflective layer 54. In one embodiment, the dielectric layer 58 may comprise SiO2. In further embodiments, one or more etch stop layers (not shown) may be deposited over the dielectric layer. These etch stop layers may protect the dielectric layer during the patterning of overlying layers. In one embodiment, a etch stop layer comprising Al2O3 may be deposited over the dielectric layer 58. In a further embodiment, an additional layer of SiO2 may be deposited over the etch stop layer.
In FIG. 8C, a sacrificial layer 60 has been deposited over the dielectric layer 58. In one embodiment, the sacrificial layer 60 comprises molybdenum (Mo) or silicon (Si), but other materials may be appropriate. Advantageously, the sacrificial layer 60 is selectively etchable with respect to the layers surrounding the sacrificial layer 60. As can also be seen in FIG. 8C, a movable layer, in the illustrated embodiment taking the form of a reflective layer 62, has been deposited over the sacrificial layer. In certain embodiments, this movable layer will comprise a conductive material. In the illustrated embodiment, unlike the partially reflective layer 54, the reflective layer 62 need not transmit any light through the layer, and thus advantageously comprises a material with high reflectivity. In one embodiment, the reflective layer 62 comprises aluminum (Al), as aluminum has both very high reflectivity and acceptable mechanical properties. In other embodiments, reflective materials such as silver and gold may be used in the reflective layer 62. In further embodiments, particularly in non-optical MEMS devices in which the movable layer need not be reflective, other materials, such as nickel and copper may be used in the movable layer.
In FIG. 8D, the sacrificial layer 60 and the reflective layer 62 have been patterned and etched to form apertures 64 which extend through the sacrificial and reflective layers 60 and 62. As can be seen in the illustrated embodiment, these apertures 64 are preferably tapered to facilitate continuous and conformal deposition of overlying layers.
With respect to FIG. 8E, it can be seen that a post layer 70 has been deposited over the patterned reflective layer 62 and sacrificial layer 60. This post layer 70 will form support posts located throughout an array of MEMS devices. In embodiments in which the MEMS devices being fabricated comprise interferometric modulator elements (such as modulator elements 12a and 12b of FIG. 1), some of the support posts (such as the support structures 18 of FIG. 1) will be located at the edges of the upper movable electrodes (such as the movable reflective layer 14 of FIG. 1) of those interferometric modulator elements. In addition, as will be discussed in greater detail below with respect to FIG. 9, support posts may also be formed in the interior of the resulting interferometric modulator elements, away from the edges of the upper movable electrode, such that they support a central or interior section of the upper movable electrode. In one embodiment, the post layer 70 comprises SiO2, but a wide variety of post materials may be used. In certain embodiments, the post layer 70 may comprise an inorganic material, but in other embodiments an organic material may be used. Preferably, the post layer 70 is conformally and continuously deposited, particularly over the apertures 64 (see FIG. 8D).
In FIG. 8F, it can be seen that the post layer 70 has been patterned and etched to form a post structure 72. In addition, it can be seen that the illustrated post structure 72 has a peripheral portion which extends horizontally over the underlying layers; this horizontally-extending peripheral portion will be referred to herein as a wing portion 74. As with the patterning and etching of the sacrificial layer 60, the edges 75 of the post structure 72 are preferably tapered or beveled in order to facilitate deposition of overlying layers.
Because the reflective layer 62 was deposited prior to the deposition of the post layer 70, it will be seen that the reflective layer 62 may serve as an etch stop during the etching process used to form the post structure 72, as the portion of the post structure being etched is isolated from the underlying sacrificial layer 60 by the reflective layer 62, even though other portions of the post layer 70 are in contact with the sacrificial layer 60. Thus, an etch process can be used to form the post structures 72 which would otherwise etch the sacrificial layer 60, as well.
Variations to the above process may be made, as well. In one embodiment, the reflective layer may be deposited after the patterning and etching of the sacrificial layer, such that the post layer may be completely isolated from the sacrificial layer, even along the sloped sidewalls of the apertures in the sacrificial layer. Such an embodiment provides an etch stop protecting the post structure during the release etch to remove the sacrificial layer. In another embodiment, the post layer may be deposited over a patterned sacrificial layer prior to the deposition of the reflective layer. Such an embodiment may be used if the sacrificial layer will not be excessively consumed during the etching of the post structure, even without an etch stop.
In FIG. 8G, it can be seen that a mechanical layer 78 has been deposited over the post structures 72 and the exposed portions of the reflective layer 62. As the reflective layer 62 provides the reflective portion of the interferometric modulator element, the mechanical layer 78 may advantageously be selected for its mechanical properties, without regard for the reflectivity. In one embodiment, the mechanical layer 78 advantageously comprises nickel (Ni), although various other materials, such as Al, may be suitable. For convenience, the combination of the mechanical layer 78 and reflective layer 62 may be referred to collectively as the deformable electrode or deformable reflective layer 80.
As will be described in greater detail with respect to FIG. 9, after deposition of the mechanical layer 78, the mechanical layer 78 is patterned and etched to form desired structures. In particular, the mechanical layer 78 may be patterned and etched to form gaps which define electrodes formed from strips of the mechanical layer which are electrically isolated from one another. The underlying reflective layer 62 may also be patterned and etched to remove the exposed portions of the reflective layer 62. In one embodiment, this may be done via a single patterning and etching process. In other embodiments, two different etches may be performed in succession, although the same mask used to pattern and etch the mechanical layer 78 may be left in place and used to selectively etch the reflective layer 62. In one particular embodiment, in which the mechanical layer 78 comprises Ni and the reflective layer 62 comprises Al, the Ni may be etched by a Nickel Etch (which generally comprise nitric acid, along with other components), and the Al may be etched by either a phosphoric/acetic acid etch or a PAN (phosphoric/acetic/nitric acid) etch. A PAN etch may be used to etch Al in this embodiment, even though it may etch the underlying sacrificial layer 60 as well, because the deformable reflective layer 80 has already been formed over the sacrificial layer 60, and the desired spacing between the deformable reflective layer 80 and underlying layers has thus been obtained. Any extra etching of the sacrificial layer 60 during this etch will not have a detrimental effect on the finished interferometric modulator.
In FIG. 8H, it can be seen that the deformable electrode or reflective layer 80, which comprises the mechanical layer 78 and the reflective layer 62, has also been patterned and etched to form etch holes 82. A release etch is then performed to selectively remove the sacrificial layer 60, forming a cavity 84 which permits the deformable reflective layer 80 to deform toward the electrode layer 52 upon application of appropriate voltage. In one embodiment, the release etch comprises a XeF2 etch, which will selectively remove sacrificial materials like Mo, W, or polysilicon without significantly attacking surrounding materials such as Al, SiO2, Ni, or Al2O3. The etch holes 82, along with the gaps between the strip electrodes formed from the mechanical layer 78, advantageously permit exposure of the sacrificial layer 60 to the release etch.
FIG. 9A depicts a portion of a partially finished interferometric modulator array 90. In this embodiment, the mechanical layer 78 (see FIG. 8H) has been patterned and etched, but the underlying reflective layer 62 has not yet been etched. Two upper electrodes 92 formed by patterned and etched sections of the mechanical layer 78 overlie post structures such as post structure 72 of FIG. 8F. The electrodes 92 are separated by a gap 93. In particular, it can be seen that certain post structures are internal posts 94 which are located underneath the upper electrode 92. The support structure 72 (see, e.g., FIGS. 8F-8H), is an example of such an interior support post 94, wherein the mechanical layer 78, which comprises a portion of an upper electrode 92, extends completely over the interior support post 94. Other post structures are edge posts 96 which extend at least partially beyond the upper electrodes 92. The depicted edge posts 96 extend between two adjacent upper electrodes 92, providing support to both electrodes 92. Other edge posts, such as those which are located at the edges of an interferometric modulator array 90, may simply extend beyond the edge of a single upper electrode 92. In certain embodiments, as discussed above, the upper electrode 92 may comprise either a mechanical layer fused to a reflective layer, or a mechanical layer partially separated from the reflective layer at the post edges, as discussed above with respect to FIGS. 7C-7E.
While the size and shape of the internal posts 94 and edge posts 96 may vary, in the illustrated embodiment, these posts comprise wing portions 74, as in the post structure 72 of FIG. 8F. Depending on the shape of the post and the thickness of the deposited post layer, the posts 94 and 96 may further include a sloped portion 98 which tapers inward, as well as a substantially flat portion 99 at the base of the post, as shown in FIG. 9B.
FIG. 9B depicts a cross-section of the partially fabricated interferometric modulator array of FIG. 9A, taken along the line 9B-9B. As can be seen, the mechanical layer 78 (see FIG. 8G) has been removed along the length of the gap 93 between the electrodes 92 (see FIG. 9A). Thus, this stage in the fabrication of the interferometric modulator array corresponds to the stage between those described with respect to FIGS. 8G and 8H, in an embodiment wherein the mechanical layer and the reflective layer 62 are etched by two separate etches, wherein the mechanical layer has been etched and the reflective layer 62 has not yet been etched.
While a substantial portion of the reflective layer 62 located between the electrodes 92 is exposed to the etch, there remains an annular section 102 of the reflective layer 62 which is covered by the wing portion 74 of the post 96. This annular section 102 extends around the periphery of the edge post 96 (see FIG. 9A), such that portions of this annular section extend across the gap 93 between the electrodes 92. If the reflective layer 62 is etched so as to only remove the exposed portions of the reflective layer 62, this annular portion 102 protected by the wing portion 74 of the edge post 96 would remain unetched on the underside of the wing portion 96, in contact with each of the electrodes 92 on opposite sides of the gap 93. As the reflective layer 62 will generally comprise a highly conductive material, such as Al, the existence of this annular portion 102 will result in the two laterally adjacent strip electrodes 92 being shorted to one another, and will have a detrimental effect on the operation of the device.
In one embodiment, in order to remove these portions 102 of the reflective layer 62, the etch used to remove the uncovered portions of the reflective layer 102 is also designed to undercut the support post 96, such that it etches the reflective layer 62 located underneath the wing portion 74. This undercut may be achieved, for example, by exposing the partially fabricated device to the reflective layer etch for a prolonged period of time. However, such undercutting may be difficult to control, and it is therefore difficult to ensure that all of the reflective material located underneath the wing portion 74 of the post 96 will be removed by this undercutting. In certain cases, contiguous portions of the reflective layer 62 may still extend from one of the strip electrodes 92 to an adjacent electrode. Such a contiguous portion may be referred to as a “stringer.” The existence of these stringers may result in the adjacent electrodes 92 being shorted to one another, detrimentally affecting the operation of the device.
In an alternate embodiment, the need for potentially unreliable overetching of the reflective layer may be eliminated through the use of the mechanical layer 78 as a hard mask to etch both the reflective layer 62 and certain portions of the edge posts 96. This embodiment may comprise the steps described with respect to FIGS. 8A-8B. As discussed above, and as can be seen with respect to FIG. 10A, the sacrificial layer 60 is deposited, patterned, and etched to form apertures 64 prior to the deposition of the reflective layer 62. The reflective layer 62 has then been deposited over the patterned sacrificial layer 60, such that it covers the interior surfaces of the aperture 64, in addition to the upper surface of the sacrificial layer 60.
In FIG. 10B, it can be seen that a layer of post material has been deposited over the reflective layer 62, and patterned and etched to form post structures 96. In the illustrated embodiment, the post structure formed is an edge post 96, which will support two adjacent electrodes. The edge post 96 comprises a wing portion 74 extending around the perimeter of the post, as well as a sloped portion 98 and a base portion 99. As described with respect to the previous process flow, the reflective layer 62 may advantageously serve as an etch stop during the etching of the edge post 96, protecting the underlying sacrificial layer 60.
With reference to FIG. 10C, a mechanical layer 78 has been deposited over the edge post 96 and the exposed portions of the reflective layer 62. The mechanical layer 78 has then been patterned to form desired structures. In the illustrated embodiment, the mechanical layer 78 has been patterned and etched to form a gap 93 which separates portions 104 of the mechanical layer 78 from one another. As discussed above, in one embodiment, the mechanical layer 78 comprises nickel and is etched using a nickel etch. The mechanical layer 78 may also be patterned and etched to form etch holes (not shown), such as the etch holes 82 depicted in FIG. 8H.
In FIG. 10D, it can be seen that the mechanical layer 78 has been used as a hard mask to etch the exposed portions of the edge post 96 (FIG. 10C). Thus, while the edge post 96 (FIG. 10C) has been deposited as a single support structure, the etch used to remove a central portion of the edge post 96 (FIG. 10C) has created two isolated edge posts 106. In an embodiment in which the mechanical layer 78 is used as an etch stop, the isolated edge posts 106 comprise a substantially vertical face 107 along the edge of the isolated edge post 106 facing the gap 93. This substantially vertical face 107 extends parallel to the edge of the portion 104 of the mechanical layer 78 along the gap 93, and thus preferably coincides with the edge of the moving electrode or mechanical layer 78. Each isolated edge post 106 further comprises a substantially flat base area 99 corresponding to the base of the tapered apertures 64 (see FIG. 10A), and a sloped side portion 98 corresponding to the tapered edges of the tapered aperture. In the illustrated embodiment, the isolated support post 106 comprises a horizontal wing portion 74 extending around the edges of the isolated support post 106 not facing the gap 93. In alternate embodiments, depending on the etch being used, the face 107 facing the gap 93 may not be substantially vertical, but may rather comprise a taper.
In the illustrated embodiment, the reflective layer 62 which extends underneath the edge post 96 serves as an etch stop for the support post etch at the stage of FIG. 10B. In the illustrated embodiment, the use of a plasma etch to remove the exposed portions of the post is enabled by the existence of the underlying reflective layer 62 at this stage. While Ni is particularly suitable for use in the mechanical layer 78, other metals which may serve as hard masks include, but are not limited to, aluminum and noble metals.
In FIG. 10E, the exposed portion of the reflective layer 62 in the gap 93 has been etched in the gap 93. In embodiments in which the reflective layer 62 comprises a conductive material, such as aluminum, the portions 104 of the mechanical layer 78 and the underlying sections of the reflective layer 62 form upper strip electrodes 92 (such as those shown in FIG. 9A). Because those portions of the support posts underneath the gap 93 between the portions 104 of the mechanical layer have been removed, no portion of the reflective layer 62 located under the gap 93 will be covered by an overlying layer. It is thus much easier to etch the reflective layer 62 to ensure that no portions of the reflective layer extend across the gap 93. The upper strip electrodes 92 are thus electrically isolated from one another. In one embodiment, an etch may be used which is selective with respect to the underlying sacrificial layer 60, which will be exposed to the etch in non-post regions along the gap 93. Examples of a suitable selective etch for the exemplary materials include a PA etch, which includes phosphoric and acetic acids. In an embodiment in which the reflective layer 62 comprises aluminum and the sacrificial layer 60 comprises molybdenum, the PA etch will etch the aluminum while leaving the molybdenum relatively untouched. However, as the mechanical layer 78 has already been deposited, the sacrificial layer 60 can at this point be partially etched without causing problems with the fabrication process. Thus, a PAN etch, which is less selective with respect to the molybdenum than the PA etch, may nevertheless be used, as additional etching of the sacrificial layer 60 at this point will not have a detrimental effect on the fabrication process.
In FIG. 10F, it can also be seen that a release etch has been performed to remove the sacrificial layer 60, creating cavities 84 which permit deflection of the deformable electrode or reflective layer 80 towards the stationary electrode layer 52. In the illustrated interferometric modulator, the cavities 84 define the color reflected by the device in the relaxed position. In one embodiment, the stationary electrode layer 52 comprises first means for electrically conducting, the upper electrodes 92 comprise second means for electrically conducting and adjacent second means for electrically conducting, and the isolated edge posts 106 comprise means for supporting edge portions of the second conducting means and electrically isolating the second conducting means from the adjacent second conducting means.
FIG. 11 depicts an overhead view of a portion of a finished array of interferometric modulators. The portion of the array depicted in FIG. 10F is located along the line 10F-10F. In the illustrated embodiment, two upper electrodes 92 are separated by a gap 93. The edges of these upper electrodes 92 are supported by the isolated edge posts 106. In other words, the gap 93 between electrodes also extends between edge posts 106 with edges facing the gap 93 that coincide with edges of the strip electrodes. In the illustrated embodiment, the edge posts 106 have edges that coincide with both the edges of the reflective layer 62 and the edges of the mechanical layer 78. As can be seen in FIG. 11 in conjunction with FIGS. 10D-10F, the isolated edge posts contain a substantially flat base portion 99, a sloped portion 98, and a substantially horizontal wing portion 74. The isolated edge post 106 comprises a face 107 (see FIG. 10F) extending along the edge of the isolated edge post 106 facing the gap 93. The wing portion 74 extends around the edges of the isolated support post 106 not facing the gap 93.
In further embodiments, the size and shape of the isolated edge posts may be varied in order to provide the desired amount of support. In addition, isolated edge posts may also be formed along the very edges of the array, with no corresponding isolated edge post supporting an adjacent strip electrode.
Various modifications may be made to the above process flows. In particular, depending on the composition of the various layers and the etches used, the order in which certain layers are deposited can be varied. In an embodiment where the support post is formed from a material which is selectively etchable relative to the optical stack, the reflective layer need not serve as an etch stop relative to the optical stack during the etching of the support posts to form isolated edge posts. Thus, the reflective layer may be deposited over the sacrificial layer prior to patterning of the sacrificial layer, as described with respect to FIGS. 8C and 8D. In such an embodiment, the reflective layer 62 would not extend underneath support posts in the interior of an interferometric modulator element, which may lessen the likelihood of a short between the conductive reflective layer 62 and the stationary electrode layer 52. In a further embodiment in which an etch stop layer is located over the dielectric layer, the etch stop layer may serve to protect the optical stack, if the optical stack is not selectively etchable relative to the support structure. Other variations are possible, as well.
In other embodiments, the processes and structures described above with respect to FIGS. 10A-11 may be used in conjunction with the embodiments of FIGS. 1-7E, and in particular the various interferometric modulator structures described with respect to those figures.
It will also be recognized that the order of layers and the materials forming those layers in the above embodiments are merely exemplary. Moreover, in some embodiments, other layers, not shown, may be deposited and processed to form portions of a MEMS device or to form other structures on the substrate. In other embodiments, these layers may be formed using alternative deposition, patterning, and etching materials and processes, may be deposited in a different order, or composed of different materials, as would be known to one of skill in the art.
It is also to be recognized that, depending on the embodiment, the acts or events of any methods described herein can be performed in other sequences, may be added, merged, or left out altogether (e.g., not all acts or events are necessary for the practice of the methods), unless the text specifically and clearly states otherwise.
While the above detailed description has shown, described, and pointed out novel features of the invention as applied to various embodiments, it will be understood that various omissions, substitutions, and changes in the form and details of the device of process illustrated may be made by those skilled in the art without departing from the spirit of the invention. As will be recognized, the present invention may be embodied within a form that does not provide all of the features and benefits set forth herein, as some features may be used or practiced separately from others.

## Claims

1. A method of fabricating a microelectromechanical systems (MEMS) device, comprising:
forming an electrode layer over a substrate;
depositing a sacrificial layer over the electrode layer;
forming a plurality of support structures, said support structures extending through the sacrificial layer, wherein at least some of said plurality of support structures comprise edge support structures;
depositing a mechanical layer over the plurality of support structures;
patterning the mechanical layer to form strips, wherein said strips are separated by gaps, and wherein said gaps are located over a central portion of each of said edge support structures; and
after forming the plurality of support structures, etching a portion of each of said edge support structures underlying the gaps, thereby forming isolated edge support structures.

2. The method of claim 1, wherein etching a portion of each of said edge support structures underlying the gaps comprises etching a central portion of each of said edge support structures to form two isolated edge support structures.

3. The method of claim 1, wherein patterning the mechanical layer to form strips comprises using a mask, and wherein etching a portion of each of said edge support structures comprises using the same mask.

4. The method of claim 1, wherein the patterned mechanical layer is used as a hard mask during the etching of a portion of each of said edge support structures.

5. The method of claim 1, additionally comprising removing said sacrificial material.

6. The method of claim 1, wherein forming a plurality of support structures comprises:
patterning the layer of sacrificial material to form apertures;
depositing a layer of support structure material over the patterned sacrificial layer and into the apertures; and
patterning the layer of support structure material to form support structures.

7. The method of claim 6, wherein patterning the layer of sacrificial material to form apertures comprises patterning the layer of sacrificial material to form tapered apertures.

8. The method of claim 6, additionally comprising depositing a reflective layer over the sacrificial layer prior to patterning the sacrificial layer.

9. The method of claim 6, additionally comprising depositing a reflective layer over the sacrificial layer after patterning the sacrificial layer.

10. The method of claim 9, wherein etching a portion of each of said edge support structures comprises using a plasma etch.

11. The method of claim 9, wherein patterning the layer of support structure material to form support structures comprises using a plasma etch or wet etch.

12. The method of claim 6, wherein patterning the layer of support structure material to form support structures comprises removing portions of the support structure layer located away from the apertures, thereby forming support structures having wing portions which extend horizontally along the sacrificial layer near the apertures.

13. The method of claim 1, wherein the electrode layer comprises indium tin oxide.

14. The method of claim 1, wherein the sacrificial layer comprises molybdenum, silicon, tungsten, or tantalum.

15. The method of claim 1, wherein the support structures comprise a material selected from the group of: SiO2 and SiNx.

16. The method of claim 1, wherein the mechanical layer comprises a material selected from the group of: nickel and aluminum.

17. The method of claim 16, wherein the mechanical layer is used as a hard mask during the etching of the portions of the edge support structures.

18. The method of claim 1, additionally comprising depositing a partially reflective layer over the substrate.

19. The method of claim 18, wherein the partially reflective layer is deposited over the electrode layer.

20. The method of claim 18, wherein the partially reflective layer comprises chromium.

21. The method of claim 1, additionally comprising depositing a dielectric layer over the electrode layer.

22. The method of claim 21, wherein the dielectric layer comprises a material selected from the group of: SiO2 and SiNx.

23. The method of claim 1, additionally comprising depositing a reflective layer over the sacrificial layer.

24. The method of claim 23, wherein the reflective layer comprises a material selected from the group of: aluminum, silver, gold, copper, palladium, platinum, and rhodium.

25. The method of claim 23, additionally comprising etching the reflective layer to remove the portions of the reflective layer located under the gaps in the mechanical layer.

26. A microelectromechanical systems device fabricated by the method of claim 1.