<PAGE>

                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20569

                                    FORM 10-Q

              [X] Quarterly Report Pursuant to Section 13 or 15(d)
                     of the Securities Exchange Act of 1934

                                       Or

              [ ] Transition Report Pursuant to Section 13 or 15(d)
                     of the Securities Exchange Act of 1934
<TABLE>
<S>                                                                <C>
For the Quarterly Period Ended September 30, 1999                  Commission file number        0-23150
                               ------------------                                                -------
</TABLE>

                           IBIS TECHNOLOGY CORPORATION
--------------------------------------------------------------------------------
             (Exact name of registrant as specified in its charter)

         Massachusetts                                          04-2987600
-------------------------------                              -------------------
(State or other jurisdiction of                              (I.R.S. Employer
incorporation or organization)                               Identification No.)

          32 Cherry Hill Drive, Danvers, MA                       01923
--------------------------------------------------------------------------------
       (Address of principal executive offices)                 (Zip Code)

                                 (978) 777-4247
--------------------------------------------------------------------------------
              (Registrant's telephone number, including area code)

Indicate by check mark whether the registrant (1) has filed all reports required
to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during
the preceding 12 months (or for such shorter period that the registrant was
required to file such reports), and (2) has been subject to such filing
requirements for the past 90 days.

                                                        Yes   X         No
                                                            -----          ----

     8,112,306 shares of Common Stock, par value $.008, were outstanding on
                               November 5, 1999.

                                                        Total Number of Pages 21
                                                                              --
                                                        Exhibit Index at Page 20
                                                                              --
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                      INDEX

<TABLE>
<CAPTION>
                                                                                                         PAGE
PART 1 - FINANCIAL  INFORMATION                                                                         NUMBER
-------------------------------                                                                         ------

    <S>                                                                                                   <C>
    Item 1 - Financial Statements:

      Balance Sheets
          December 31, 1998 and September 30, 1999 ................................................        3

      Statements of Operations
          Three Months Ended September 30, 1998 and 1999 and Nine Months Ended
          September 30, 1998 and 1999 ..............................................................       4

      Statements of Cash Flows
         Nine Months Ended September 30, 1998 and 1999 .............................................       5

      Notes to Financial Statements ................................................................       6

    Item 2 - Management's Discussion and Analysis of Financial
          Condition and Results of Operations ......................................................       9

    Item 3 - Quantitative and Qualitative Disclosure About Market Risk .............................      17


PART II - OTHER INFORMATION

Item 1 - Legal Proceedings .........................................................................      18

Item 2 - Changes in Securities .....................................................................      18

Item 3 - Defaults upon Senior Securities ...........................................................      18

Item 4 - Submission of Matters to a Vote of Security Holders .......................................      18

Item 5 - Other Information .........................................................................      18

Item 6 - Exhibits and Reports on Form 8-K ..........................................................      18

Signatures .........................................................................................      19

Exhibit Index ......................................................................................      20
</TABLE>


                                       2
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 BALANCE SHEETS

<TABLE>
<CAPTION>
                                                                      DECEMBER 31,          SEPTEMBER 30,
                                                                         1998                   1999
                                                                      ------------          -------------
                                                                                             (UNAUDITED)

<S>                                                                  <C>                    <C>
ASSETS
CURRENT ASSETS:
   Cash and cash equivalents..................................       $ 12,819,366           $ 34,550,015
   Accounts receivable, trade, net............................            546,935              6,656,074
   Unbilled revenue...........................................          2,448,327              2,358,246
   Inventories................................................          3,121,084              3,360,485
   Prepaid expenses and other current assets..................            151,106                 38,999
                                                                     ------------           ------------
         Total current assets.................................         19,086,818             46,963,819
                                                                     ------------           ------------
Property and equipment........................................         14,948,862             13,869,590
   Less:  Accumulated depreciation and amortization...........         (9,872,843)            (9,100,215)
                                                                     ------------           ------------
         Net property and equipment...........................          5,076,019              4,769,375
Patents and other assets, net.................................            144,481                144,291
                                                                     ------------           ------------
         Total assets.........................................       $ 24,307,318           $ 51,877,485
                                                                     ============           ============
LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
   Capital lease obligation, current..........................       $    507,258           $    104,890
   Accounts payable...........................................            411,065              1,058,301
   Accrued liabilities........................................          1,336,720              1,680,841
                                                                     ------------           ------------
         Total current liabilities............................          2,255,043              2,844,032
                                                                     ------------           ------------

Capital lease obligation, noncurrent..........................             39,630                 32,560
Other accrued liabilities.....................................          1,403,702              1,280,652
                                                                     ------------           ------------
         Total liabilities....................................          3,698,375              4,157,244
                                                                     ------------           ------------

STOCKHOLDERS' EQUITY:
   Undesignated preferred stock, $.01 par value.
    Authorized 2,000,000 shares; none issued..................                 --                     --
   Common stock, $.008 par value.
    Authorized 20,000,000 shares; issued 6,858,556 and
       8,067,134 shares at December 31, 1998 and
       September 30, 1999, respectively.......................             54,868                 64,537
    Additional paid-in capital................................         36,610,064             62,930,715
    Accumulated deficit.......................................        (16,055,989)           (15,275,011)
                                                                     ------------           ------------
         Total stockholders' equity...........................         20,608,943             47,720,241
                                                                     ------------           ------------
         Total liabilities and stockholders' equity...........       $ 24,307,318           $ 51,877,485
                                                                     ============           ============
</TABLE>

                 See accompanying notes to financial statements.


                                       3
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                            STATEMENTS OF OPERATIONS
                                   (UNAUDITED)

<TABLE>
<CAPTION>
                                                                      THREE MONTHS ENDED               NINE MONTHS ENDED
                                                                         SEPTEMBER 30,                    SEPTEMBER 30,
                                                                ----------------------------     ------------------------------
                                                                   1998            1999             1998               1999
                                                                ----------       -----------     ------------       -----------

   <S>                                                          <C>              <C>             <C>                <C>
   SALES AND REVENUE:
     Product sales........................................      $  445,010       $ 1,321,730     $  2,462,718       $ 3,970,195
     Contract and other revenue...........................         265,750           155,401          934,421           555,487
     Equipment revenue....................................       4,176,841         3,205,071        8,491,225         9,711,809
                                                                ----------       -----------     ------------       -----------
         Total sales and revenue..........................       4,887,601         4,682,202       11,888,364        14,237,491

   COST OF SALES AND REVENUE:
     Cost of product sales................................       1,046,387         1,122,360        3,617,981         3,509,006
     Cost of contract and other revenue...................         230,630           138,981          815,432           361,935
     Cost of equipment revenue............................       2,600,484         2,384,458        5,467,661         6,937,189
                                                                ----------       -----------     ------------       -----------
         Total cost of sales and revenue..................       3,877,501         3,645,799        9,901,074        10,808,130
                                                                ----------       -----------     ------------       -----------

         Gross profit.....................................       1,010,100         1,036,403        1,987,290         3,429,361
                                                                ----------       -----------     ------------       -----------

   OPERATING EXPENSES:
     General and administrative...........................         427,734           408,941        1,375,374         1,367,481
     Marketing and selling................................         102,534           261,516          319,933           714,298
     Research and development.............................         495,263           386,178        1,423,215         1,163,865
                                                                ----------       -----------     ------------       -----------
         Total operating expenses.........................       1,025,531         1,056,635        3,118,522         3,245,644
                                                                ----------       -----------     ------------       -----------

         Income (loss) from operations....................         (15,431)          (20,232)      (1,131,232)          183,717
                                                                ----------       -----------     ------------       -----------

   OTHER INCOME (EXPENSE):
     Interest income......................................         136,729           318,078          495,340           617,118
     Interest expense.....................................         (26,724)           (8,436)         (91,492)          (39,961)
     Other................................................              --            (2,760)              --            21,360
                                                                ----------       -----------     ------------       -----------
         Total other income...............................         110,005           306,882          403,848           598,517
                                                                ----------       -----------     ------------       -----------

         Income (loss) before income taxes................          94,574           286,650         (727,384)          782,234

   Income tax expense.....................................              --                --            1,256             1,256
                                                                ----------       -----------     ------------       -----------

         Net income (loss)................................      $   94,574       $   286,650     $   (728,640)      $   780,978
                                                                ----------       -----------     ------------       -----------

   Net income (loss) per common share:
    Basic.................................................      $     0.01       $      0.04     $      (0.11)      $      0.11
                                                                ==========       ===========     ============       ===========
    Diluted...............................................      $     0.01       $      0.03     $      (0.11)      $      0.10
                                                                ==========       ===========     ============       ===========

   Weighted average number of common shares outstanding:
    Basic.................................................       6,786,416         7,643,845        6,732,314         7,162,780
                                                                ==========       ===========     ============       ===========
    Diluted...............................................       7,061,658         8,224,887        6,732,314         7,624,525
                                                                ==========       ===========     ============       ===========
</TABLE>

                 See accompanying notes to financial statements.


                                       4
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                            STATEMENTS OF CASH FLOWS
                                   (UNAUDITED)

<TABLE>
<CAPTION>
                                                                                          NINE MONTHS ENDED
                                                                                            SEPTEMBER 30,
                                                                                   -------------------------------
                                                                                       1998               1999
                                                                                   -----------         -----------

<S>                                                                                <C>                 <C>
CASH FLOWS FROM OPERATING ACTIVITIES:
   Net income (loss)........................................................       $  (728,640)        $   780,978
   Adjustments to reconcile net income (loss) to net cash used in operating
       activities:
     Depreciation and amortization..........................................         1,338,684           1,035,398
     Loss on disposal of asset..............................................                --               2,550
     Changes in operating assets and liabilities:
         Accounts receivable, trade.........................................          (746,159)         (6,109,139)
         Unbilled revenue...................................................        (2,803,193)             90,081
         Inventories........................................................         1,484,848            (239,401)
         Prepaid expenses and other assets..................................            (9,909)            112,107
         Accounts payable...................................................          (213,042)            647,236
         Accrued liabilities................................................           242,429             221,071
                                                                                   -----------         -----------

         Net cash used in operating activities..............................        (1,434,982)         (3,459,119)
                                                                                   -----------         -----------

CASH FLOWS FROM INVESTING ACTIVITIES:
   Additions to property and equipment......................................        (1,579,883)           (695,459)
   Decrease (increase) in other assets......................................            64,738             (35,655)
                                                                                   -----------         -----------

         Net cash used in investing activities..............................        (1,515,145)           (731,114)
                                                                                   -----------         -----------

CASH FLOWS FROM FINANCING ACTIVITIES:
   Payments of capital lease obligations....................................          (299,277)           (409,438)
   Exercise of stock options ...............................................           978,876             790,696
   Proceeds from sale of common stock, net of issuance costs................                --          25,539,624
                                                                                   -----------         -----------

         Net cash provided by financing activities..........................           679,599          25,920,882
                                                                                   -----------         -----------

         Net increase (decrease) in cash and
          cash equivalents..................................................        (2,270,528)         21,730,649

Cash and cash equivalents, beginning of period..............................        13,309,823          12,819,366
                                                                                   -----------         -----------

Cash and cash equivalents, end of period....................................       $11,039,295         $34,550,015
                                                                                   -----------         -----------

SUPPLEMENTAL DISCLOSURE OF CASH FLOW INFORMATION:
   Cash paid during the period for interest.................................       $    91,492         $    39,961
                                                                                   ===========         ===========
</TABLE>

                 See accompanying notes to financial statements.


                                       5
<PAGE>



                           IBIS TECHNOLOGY CORPORATION

                          NOTES TO FINANCIAL STATEMENTS
                                   (UNAUDITED)

(1) INTERIM FINANCIAL STATEMENTS

         The accompanying financial statements are unaudited, except for the
Balance Sheet as of December 31, 1998, and have been prepared by the Company in
accordance with generally accepted accounting principles.

         In the opinion of management, the interim financial statements include
all adjustments which consist only of normal and recurring adjustments,
necessary for a fair presentation of the Company's financial position and
results of operations. Results of operations for the interim periods are not
necessarily indicative of the results to be expected for the full year. These
financial statements should be read in conjunction with the financial statements
of the Company as of and for the year ended December 31, 1998 which are included
in the Annual Report on Form 10-K.

(2) REVENUE RECOGNITION

         Revenue from product sales is recognized upon shipment. Revenue derived
from consulting services is recognized upon performance. Contract and equipment
revenue is recognized on the percentage-of-completion method. Provisions for
anticipated losses are made in the period in which such losses become
determinable. Unbilled revenue represents equipment and contract revenue earned
but not yet billable based on the terms of the contract which include shipment
of the product, achievement of milestones or completion of the contract.

(3) CHANGE IN ESTIMATE

         During 1998 the Company changed depreciable lives for some of its
equipment from five years to eight years. As a result, depreciation for the
third quarter ended September 30, 1999 was reduced by approximately $192,000.
For the nine months ended September 30, 1999 depreciation was reduced by
approximately $580,000.

(4) INVENTORIES

         Inventories consist of the following:

<TABLE>
<CAPTION>
                                                                                   DECEMBER 31,     SEPTEMBER 30,
                                                                                      1998              1999
                                                                                   ----------        ----------

           <S>                                                                     <C>               <C>
           Raw materials.................................................          $  197,734        $   49,017
           Work in process...............................................              76,343            26,367
           Finished goods................................................             191,762            71,460
                                                                                   ----------        ----------
             Subtotal wafer inventory....................................             465,839        $  146,844
           Equipment inventory...........................................           2,655,245         3,213,641
                                                                                   ----------        ----------
             Total inventories...........................................          $3,121,084        $3,360,485
                                                                                   ==========        ==========
</TABLE>


                                       6
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                          NOTES TO FINANCIAL STATEMENTS
                                   (UNAUDITED)

(5) EARNINGS PER SHARE RECONCILIATION

         The reconciliation of the numerators and denominators of the basic and
diluted net income (loss) per common share computations for the Company's
reported net income (loss) is as follows:

<TABLE>
<CAPTION>
                                                              THREE MONTHS ENDED                 NINE MONTHS ENDED
                                                                SEPTEMBER 30,                       SEPTEMBER 30,
                                                     --------------------------------      --------------------------------
                                                         1998                 1999            1998               1999
                                                     -------------        -----------      ------------       -------------

<S>                                                  <C>                  <C>              <C>                <C>
Basic net income (loss)............................  $      94,574        $   286,650      $   (728,640)      $     780,978
                                                     =============        ===========      ============       =============

Weighted average common
   shares outstanding-basic........................      6,786,416          7,643,845         6,732,314           7,162,780
                                                     =============        ===========      ============       =============

Net additional common shares upon assumed
   exercise of stock options and warrants..........        275,242            581,042                --             461,745
                                                     -------------        -----------      ------------       -------------

Weighted average common
   shares outstanding-diluted......................      7,061,658          8,224,887         6,732,314           7,624,525
                                                     =============        --=========      ============       =============

Net income (loss) per common share
         Basic.....................................  $        0.01        $      0.04      $      (0.11)      $        0.11
                                                     =============        ===========      ============       =============

         Diluted...................................  $        0.01        $      0.03      $      (0.11)      $        0.10
                                                     =============        ===========      ============       =============
</TABLE>

(6) INDUSTRY SEGMENTS

         The Company adopted SFAS No. 131, Disclosures about Segments of an
Enterprise and Related Information during the fourth quarter of 1998. SFAS No.
131 established the standards for reporting information about operating segments
in annual financial statements and requires selected information about operating
segments in interim financial reports issued to stockholders.

         The Company's reportable segments are SIMOX Wafer Products, SIMOX
Equipment and Other Products or Services. For purposes of segment reporting,
equipment, spares and field service revenue are combined and reported as SIMOX
Equipment. Government contracts, other services, and license revenue are
combined and reported as Other Products or Services. In previous financial
statements spares and field service revenue were included in the Other Products
or Services segment. This reclassification was made in the third quarter of 1999
and all prior periods presented reflect this reclassification.


                                       7
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                          NOTES TO FINANCIAL STATEMENTS
                                   (UNAUDITED)

         The table below provides  information  for the nine months ended
September 30, 1998 and 1999 pertaining to the Company's three industry
segments.

<TABLE>
<CAPTION>
                                                   SIMOX
                                                   WAFER             SIMOX           OTHER PRODUCTS
                                                  PRODUCTS         EQUIPMENT          OR SERVICES          TOTAL
                                                  --------         ---------         --------------        -----
<S>                                            <C>                 <C>                    <C>          <C>
NET REVENUES
Nine Months Ended September 30, 1998           $ 2,462,718         $ 8,491,225            $ 934,421    $ 11,888,364
Nine Months Ended September 30, 1999             3,970,195           9,711,809              555,487      14,237,491

OPERATING INCOME (LOSS)
Nine Months Ended September 30, 1998            (1,586,952)          1,712,103              118,991         244,142
Nine Months Ended September 30, 1999               277,629           1,080,016              193,552       1,551,197

ASSETS
December 31, 1998                                5,411,282           5,296,619              319,200      11,027,101
September 30, 1999                               5,348,066          11,369,941              154,773      16,872,780
</TABLE>

         The table below provides the reconciliation of reportable segment
  operating income (loss) and assets to the Company's totals.

<TABLE>
<CAPTION>
                                                                  NINE MONTHS ENDED
                                                           ----------------------------------
SEGMENT RECONCILIATION                                      9/30/98                9/30/99
----------------------                                      -------                -------

<S>                                                        <C>                    <C>
Income (Loss) Before Income Taxes:
    Total operating income for reportable segments         $   244,142            $ 1,551,197
    Corporate general & administrative expenses             (1,375,374)            (1,367,480)
    Net other income                                           402,592                597,261
                                                           -----------            -----------
    Income (loss) before income taxes                         (728,640)               780,978
                                                           ===========            ===========



<CAPTION>
                                                            12/31/98                9/30/99
                                                            --------                -------
Assets:
    Total assets for reportable segments                    11,027,101             16,872,780
    Cash & cash equivalents not allocated to segments       12,819,366             34,550,015
    Other unallocated assets                                   460,851                454,690
                                                            ----------            -----------
    Total assets                                            24,307,318             51,877,485
                                                            ==========            ===========
</TABLE>


                                       8
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
                  FINANCIAL CONDITION AND RESULTS OF OPERATIONS

OVERVIEW

         Ibis Technology Corporation ("Ibis" or the "Company") was formed in
October 1987 and commenced operations in January 1988. The Company's initial
activities consisted of producing and selling SIMOX-SOI wafers and conducting
research and development activities. This research led to the Company's
development of a proprietary second generation implanter, the Ibis 1000, which
it began selling in 1996, and to other proprietary process technology.

         Initially, much of the Company's revenue was derived from research and
development contracts and sales of SIMOX-SOI wafers for military applications.
Over the years, there has been a shift in revenue to sales of SIMOX-SOI wafers
for commercial applications and sales of Ibis 1000 implanters. To date, most
customers of the Company that have purchased wafers for what the Company
believes are commercial applications have done so solely for the purpose of
characterizing and evaluating the wafers and developing prototypes. In addition,
we believe the sales of Ibis 1000 implanters have been for the evaluation or
pilot production of SIMOX-SOI wafers. Thus, historical sales are not necessarily
indicative of future operations because such sales would not be considered of a
recurring nature. However, three of the Company's customers have indicated their
intentions to adopt SIMOX-SOI technology in commercial products. One of these
customers has indicated that it would be delivering volume quantities of high
performance microprocessors built on SIMOX-SOI to internal customers by the end
of 1999.

         The Company has experienced quarterly fluctuations in revenue and
earnings due to the timing of receipt of orders from major customers, product
mix, shifts in customer demand, the cyclical nature of the semiconductor
industry and the amount of research and development expenses associated with new
or enhanced wafer products or implanters. The Company may continue to experience
fluctuations in revenue and earnings due to these factors.

         The Company currently utilizes two Ibis 1000 oxygen implanters for the
production of wafers, one of which was funded by Motorola Corporation and must
first be used to serve Motorola's production requirements. The Company
recognized revenue on the sale of Ibis 1000 implanters using the
percentage-of-completion method.

RESULTS OF OPERATIONS

THIRD QUARTER ENDED SEPTEMBER 30, 1999 COMPARED TO THIRD QUARTER ENDED SEPTEMBER
30, 1998

         PRODUCT SALES. Wafer product sales increased $876,720, or 197%, to
$1,321,730 for the third quarter ended September 30, 1999 from $445,010 for the
third quarter ended September 30, 1998. The increase in product sales is
attributable to increased wafer sales to customers in the United States and
Europe partially offset by decreased wafer sales to customers in Japan.


                                       9
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
            FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         CONTRACT AND OTHER REVENUE. Contract and other revenue decreased for
the third quarter ended September 30, 1999 to $155,401 from $265,750 for the
third quarter ended September 30, 1998, a decrease of $110,349 or 42%. This
decrease is attributable to a decrease in revenues derived from government
contracts.

         EQUIPMENT REVENUE. Equipment revenue represents revenue recognized from
the sale of Ibis 1000 implanters, sales of spare parts and field service
revenue. Equipment revenue decreased to $3,205,071 for the third quarter ended
September 30, 1999 from $4,176,841 for the third quarter ended September 30,
1998. This decrease is attributable to a decrease in revenues recognized on
equipment which were partially offset by an increase in revenues generated from
the customer support organization and the sale of spare parts. At the end of
1998, the customer support organization was established to support the Ibis 1000
implanters in the field. This revenue accounted for $49,649 or 2% of equipment
revenue for the third quarter ended September 30, 1999 as compared to no revenue
for the quarter ended September 30, 1998. Sales of spare parts accounted for
$622,422 or 19% of equipment revenue for the third quarter ended September 30,
1999 as compared to $24,841 or 1% of equipment revenue for the third quarter
ended September 30, 1998.

         TOTAL SALES AND REVENUE. Total sales and revenue for the third quarter
ended September 30, 1999 was $4,682,202 a decrease of $205,399, or 4%, from
total revenue of $4,887,601 for the third quarter ended September 30, 1998. This
decrease resulted from decreases in equipment revenue and contract and other
revenue partially offset by increased product sales.

         TOTAL COST OF SALES AND REVENUE. Cost of product sales for the third
quarter ended September 30, 1999 was $1,122,360, as compared to $1,046,387 for
the third quarter ended September 30, 1998, an increase of $75,973 or 7%. Cost
of contract and other revenue for the third quarter ended September 30, 1999 was
$138,981, as compared to $230,630 for the third quarter ended September 30,
1998, a decrease of $91,649, or 40%. Cost of equipment revenue for the third
quarter ended September 30, 1999 was $2,384,458 as compared to $2,600,484 for
the third quarter ended September 30, 1998, a decrease of $216,026 or 8%. The
gross margin for all sales was 22% for the third quarter ended September 30,
1999 as compared to 21% for the third quarter ended September 30, 1998. The
increase in gross margin is primarily attributable to substantially improved
wafer product sales for the quarter. The fundamental fixed cost nature of wafer
product sales, which was absorbed by a larger number of wafers sold during the
third quarter of 1999 as compared to the same quarter in the previous year,
resulted in a positive impact on margins. Cost of contract and other revenue
consists of labor and materials expended during the quarter. Contract margins
can vary from year to year based on the type of contracts that the Company
enters into. Additionally, different fee arrangements and indirect cost
absorption can contribute to margin variability.

         GENERAL AND ADMINISTRATIVE EXPENSES. General and administrative
expenses for the third quarter ended September 30, 1999 were $408,941 (or 9% of
total revenue) as compared to $427,734 (or 9% of total revenue) for the third
quarter ended September 30, 1998, a decrease of $18,793, or 4%. The decrease is
due to decreases in consulting and professional service fees incurred in the
quarter.


                                       10
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         MARKETING AND SELLING EXPENSES. Marketing and selling expenses for the
third quarter ended September 30, 1999 were $261,516 (or 6% of total revenue) as
compared to $102,534 (or 2% of total revenue) for the third quarter ended
September 30, 1998, an increase of $158,982, or 155%. The increase is due to
increases in payroll and payroll related expenses incurred in the establishment
of a customer support organization.

         RESEARCH AND DEVELOPMENT EXPENSES. Internally funded research and
development expenses decreased by $109,085 or 22%, to $386,178 (or 8% of total
revenue) for the third quarter ended September 30, 1999, as compared to $495,263
(or 10% of total revenue) for the third quarter ended September 30, 1998. The
decrease is primarily due to a decrease in material expenses and payroll and
payroll related expenses. Last year the Company introduced a new wafer product
line, Advantox(R), which resulted in increased material expenses during the
third quarter ended September 30, 1998.

         LOSS FROM OPERATIONS. The loss from operations for the third quarter
ended September 30, 1999 was $20,232 as compared to $15,431 for the third
quarter ended September 30, 1998, an increase of $4,801, or 31%. The increase in
the loss from operations is the result of decreases in equipment revenue and
contract and other revenue and the increase in operating expenses which was
partially offset by increased in product sales.

         OTHER INCOME (EXPENSE). Total other income for the third quarter ended
September 30, 1999 was $306,882 as compared to $110,005 for the third quarter
ended September 30, 1998, an increase of $196,877, or 179%. The increase in
total other income is attributable to increased interest income earned on the
increased cash balance due in part to receipt of the proceeds of our sale of
1,000,000 shares of Common Stock in August 1999 and reduced interest expense on
capitalized leases.

         INCOME BEFORE INCOME TAXES. The income before income taxes was $286,650
for the third quarter ended September 30, 1999, as compared to $94,574 for the
third quarter ended September 30 , 1998. The improvement of $192,076, or 203%,
is due to increased product sales, and increased interest income which was
partially offset by decreases in equipment revenue and contract and other
revenue and an increase in operating expenses.

NINE MONTHS ENDED SEPTEMBER 30, 1999 COMPARED TO NINE MONTHS ENDED SEPTEMBER 30,
1998

         PRODUCT SALES. Wafer product sales increased $1,507,477, or 61%, to
$3,970,195 for the nine months ended September 30, 1999 from $2,462,718 for the
nine months ended September 30, 1998. The increase in product sales is
attributable to increased wafer sales to customers in the United States and
Europe partially offset by decreased wafer sales to customers in Japan.

         CONTRACT AND OTHER REVENUE. Contract and other revenue decreased for
the nine months ended September 30, 1999 to $555,487 from $934,421 for the nine
months ended September 30, 1998, a decrease of $378,934 or 41%. This decrease is
attributable to a decrease in revenues from various government contracts along
with revenue derived from a contract for consulting services for Orion
Equipment, Inc. ("Orion"). Revenue from


                                       11
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

the Orion contract amounted to approximately $161,000 in the first nine months
of 1998 and there was no revenue in the first nine months of 1999. These
decreases were partially offset by revenue generated by license fee revenue and
other service revenue, which accounted for 25% and 13% of contract and other
revenue, respectively, for the nine months ended September 30, 1999 as compared
to 8% and 15%, respectively in the nine months ended September 30, 1998.

         EQUIPMENT REVENUE. Equipment revenue represents revenue recognized from
the sale of Ibis 1000 implanters, sales of spare parts and field service
revenue. Equipment revenue increased to $9,711,809 for the nine months ended
September 30, 1999 from $8,491,225 for the nine months ended September 30, 1998.
This increase is attributable to an increase in revenues recognized on
equipment, due to the timing of milestones completed, revenues generated from
the customer support organization and the sale of spare parts. At the end of
1998, the customer support organization was established to support the Ibis 1000
implanters in the field. This revenue accounted for $130,609 or 1% of equipment
revenue for the nine months ended September 30, 1999, as compared to no revenue
for the nine months ended September 30, 1998. Sales of spare parts accounted for
$746,200 or 8% of equipment revenue for the nine months ended September 30, 1999
as compared to $139,224 or 2% of equipment revenue for the nine months ended
September 30, 1998.

         TOTAL SALES AND REVENUE. Total sales and revenue for the nine months
ended September 30, 1999 was $14,237,491, an increase of $2,349,127, or 20%,
from total revenue of $11,888,364 for the nine months ended September 30, 1998.
This increase resulted from increases in equipment revenue and product sales
which was partially offset by decreased contract and other revenue.

         TOTAL COST OF SALES AND REVENUE. Cost of product sales for the nine
months ended September 30, 1999 was $3,509,006, as compared to $3,617,981 for
the nine months ended September 30, 1998, a decrease of $108,975 or 3%. Cost of
contract and other revenue for the nine months ended September 30, 1999 was
$361,935, as compared to $815,432 for the nine months ended September 30, 1998,
a decrease of $453,497, or 56%. Cost of equipment revenue for the nine months
ended September 30, 1999 was $6,937,189 as compared to $5,467,661 for the nine
months ended September 30, 1998, an increase of $1,469,528 or 27%. The gross
margin for all sales was 24% for the nine months ended September 30, 1999 as
compared to 17% for the nine months ended September 30, 1998. The increase in
gross margin is primarily attributable to substantially improved wafer product
sales for the nine month period. The fundamental fixed cost nature of wafer
product sales, which was absorbed by a larger number of wafers sold during the
first nine months of 1999 as compared to the same period in the previous year,
resulted in a positive impact on margins. Cost of contract and other revenue
consists of labor and materials expended during the period. Contract margins can
vary from year to year based on the type of contracts that the Company enters
into. Additionally, different fee arrangements and indirect cost absorption can
contribute to margin variability.


                                       12
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         GENERAL AND ADMINISTRATIVE EXPENSES. General and administrative
expenses for the nine months ended September 30, 1999 were $1,367,481 (or 10% of
total revenue) as compared to $1,375,374 (or 12% of total revenue) for the nine
months ended September 30, 1998, a decrease of $7,893, or 1%.

         MARKETING AND SELLING EXPENSES. Marketing and selling expenses for the
nine months ended September 30, 1999 were $714,298 (or 5% of total revenue) as
compared to $319,933 (or 3% of total revenue) for the nine months ended
September 30, 1998, an increase of $394,365, or 123%. The increase is due to
increases in payroll and payroll related expenses incurred in the establishment
of the customer support organization.

         RESEARCH AND DEVELOPMENT EXPENSES. Internally funded research and
development expenses decreased by $259,350 or 18%, to $1,163,865 (or 8% of total
revenue) for the nine months ended September 30, 1999, as compared to $1,423,215
(or 12% of total revenue) for the nine months ended September 30, 1998. The
decrease is primarily due to a decrease in material expenses. Last year the
Company introduced a new wafer product line, Advantox(R), which resulted in
increased material expenses for the nine months ended September 30, 1998.

         INCOME FROM OPERATIONS. The income from operations for the nine months
ended September 30, 1999 was $183,717 as compared to a loss of $1,131,232 for
the nine months ended September 30, 1998, an increase of $1,314,949, or 116%.
The increase in the income from operations is the result of increases in
equipment revenue and product sales, which were partially offset by decreases in
contract and other revenue, as well as the increase in operating expenses.

         OTHER INCOME (EXPENSE). Total other income for the nine months ended
September 30, 1999 was $598,517 as compared to $403,848 for the nine months
ended September 30, 1998, an increase of $194,669, or 48%. The increase in total
other income is attributable to increased interest income earned on the cash
balance and reduced interest income earned on capitalized leases.

         INCOME (LOSS) BEFORE INCOME TAXES. The income before income taxes was
$782,234 for the nine months ended September 30, 1999, as compared to a loss of
$727,384 for the nine months ended September 30, 1998. The increase of
$1,509,618, or 208%, is due to increased equipment revenue, product sales and
increased interest income, which were partially offset by decreases in contract
and other revenue and increased operating expenses.

IMPACT OF THE YEAR 2000 ISSUE

         THE YEAR 2000 ISSUE

         The Year 2000 Issue refers to potential problems with computer systems
or any equipment with computer chips or software that use dates where the date
has been stored as just two digits (e.g., 98 for 1998). On January 1, 2000, any
clock or date recording mechanism incorporating date sensitive software which
uses only two digits to represent the year may recognize a date using 00 as the
year 1900 rather than the year 2000. This could result in a system failure or
miscalculations causing disruption of operations, including, among other things,
a temporary inability to process transactions, send invoices, or engage in
similar business activities.


                                       13
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         THE COMPANY'S STATE OF READINESS

         To determine the effect, if any, of the Year 2000 Issue on its
operations, the Company began a review of its internal information systems in
the third quarter of 1998. The Company has implemented a common software system
in both the operations and financial management areas for the purpose of
integrating the various systems. The Company believes that such common system is
Year 2000 compliant and is fully operational. The Company tested less critical
information systems and completed all required upgrades.

         During the first quarter of 1998, the Company conducted a test plan on
its Ibis 1000 implanter equipment and determined based on these tests that the
current version is Year 2000 compliant. It was also determined that the
operating system of one older version Ibis 1000 had to be upgraded in order to
be Year 2000 compliant; the largest issue being with the file manager displaying
and sorting the date properly after 2000. An updated version of the file manager
which corrects this problem was installed in July 1999.

         The Company has reviewed its ancillary production equipment and has
determined the extent of software upgrades necessary in order for the systems to
be Year 2000 compliant. The Company completed the necessary software upgrades
during the third quarter of 1999, except for one piece of equipment which the
Company elected not to upgrade. This is because the Company's ability to use
this equipment will not be impacted, as the systems is stand-alone and the
functions are not date sensitive. The worst case scenario is that the Company
could turn the computer clocks back.

         The Company contacted its major suppliers and customers in an effort to
determine the extent to which the failure of these parties to timely identify
and correct their own problems associated with the Year 2000 Issue may affect
the Company. A re-evaluation of critical suppliers was completed during the
second quarter of 1999, and letters were obtained from these suppliers
documenting their Year 2000 status and proof of compliance. The Company will
continue to obtain updates from critical suppliers. The Company has not
identified any situations of non-compliance that would materially or adversely
affect the Company's operations or financial condition.

         The Company has completed its review and believes that its principal
information systems correctly define the year 2000 and thus, the impact of the
Year 2000 Issue will have no material effect on its systems.

         COSTS ASSOCIATED WITH THE YEAR 2000 ISSUE

         The costs incurred by the Company to conduct the review of its internal
information systems and to identify the impact of the Year 2000 issue on its
major suppliers and customers have been immaterial. The costs to implement the
common software system are not considered Year 2000 costs as they were included
in the Company's integration plan and were not accelerated due to Year 2000
issues. The costs to perform upgrades to correct the Year 2000 Issues that the
Company has identified to date are estimated at approximately $30,000. However,
the costs incurred by the Company to address the Year 2000 Issue could increase
materially if the Company identifies any other problems related to the Year 2000
Issue which must be addressed.


                                       14
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         RISKS ASSOCIATED WITH THE YEAR 2000 ISSUE

         To the extent that the Company's assessment is completed without
identifying any non-compliant systems operated by the Company or by third
parties, the Year 2000 issue could have a material adverse effect on the
operations of the Company. The Company could experience delays in the
manufacturing of wafers or the building of equipment. The severity of these
possible problems would depend on the nature of the problem and how quickly it
could be corrected or an alternate implemented, which is unknown at this time.

         CONTINGENCY PLANS

         Contingency plans, such as securing alternate suppliers or accelerating
the delivery of materials scheduled for the first half of January 2000, have
been identified for certain suppliers who have not supplied the Company with
adequate information on their compliance or will not be ready in time to meet
the Year 2000 deadline.

         Based on currently available information, the Company does not believe
that the Year 2000 Issue will have a material effect on the Company's internal
information systems or operations. There can be no assurance, however, that the
Company will not in the future identify non-compliant systems or other problems
related to the Year 2000 issue which may have a material adverse effect on the
Company's future operating results or financial condition. In addition, there
can be no assurance that the failure to ensure Year 2000 capability by a
supplier or another third party would not have a material adverse effect on the
Company.

LIQUIDITY AND CAPITAL RESOURCES

         As of September 30, 1999, the Company had cash and cash equivalents of
$34,550,015, reflecting in large part the Company's receipt of approximately $25
million in net proceeds from the August 1999 sale of 1,000,000 shares of Common
Stock. During the nine months ended September 30, 1999, the Company consumed
$3,459,119 in cash from operating activities as compared to cash consumed from
operations of $1,434,982 for the same period in 1998. Depreciation and
amortization expense for the nine months ended September 30, 1999 and 1998 was
$1,035,398 and $1,338,684, respectively. This accounted for 7% and 11% of total
revenue, respectively. Due to the capital intensive nature of the Company's
business and the anticipated expansion of its facilities and production
capacity, management expects that depreciation and amortization will continue to
be a significant portion of its expenses. To date, the Company's working capital
requirements have been funded through debt and equity financings, warrant
conversions, exercise of options and warrants, equipment lines of credit, a
working capital line of credit, a term loan, sale leaseback arrangements,
collaborative relationships, government contracts and product and equipment
sales. The principal uses of cash during the nine months ended September 30,
1999 were to fund the Company's operations and additions to property and
equipment which totaled approximately $695,000. As of September 30, 1999, the
Company had invested $15,644,003 in property and equipment. At September 30,
1999, the Company had commitments to purchase approximately $5,731,000 in
material or subassemblies to be used for manufacturing Ibis 1000 implanters
currently under construction.


                                       15
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

         On August 6, 1999, the Company closed on a public offering of one
million shares of common stock in an offering underwritten by SoundView
Technology Group. The shares were included in a shelf registration statement
filed with the Securities and Exchange Commission on July 8, 1999 and declared
effective on July 26, 1999. Net proceeds from the offering were approximately
$25 million and Ibis intends to use the proceeds to fund research and
development, capital expenditures, working capital and for other general
corporate purposes.

         The Company anticipates that it may be required to raise substantial
additional capital in the future in order to finance further expansion of its
manufacturing capacity and its research and development programs. The Company's
existing cash resources together with funds generated from operations are
believed to be sufficient to support the Company's operations on their
anticipated scale for at least the next eighteen months. Management of the
Company currently believes that this anticipated scale of operations will
include the addition of Ibis 1000 oxygen implanters (in addition to its two
oxygen implanters currently on-line), the purchase of support equipment and the
expansion of the Company's facilities. Additional implanters are expected to be
transferred to production at various times as additional capacity is needed to
meet demand.

EFFECTS OF INFLATION

         The Company believes that over the past three years inflation has not
had a significant impact on the Company's sales or operating results.

BUSINESS OUTLOOK

         This Form 10-Q contains forward-looking statements within the meaning
of the "safe harbor" provisions of the Private Securities Litigation Reform Act
of 1995. Such statements are based on management's current expectations and are
subject to a number of factors and uncertainties which could cause actual
results to differ materially from those described in the forward-looking
statements. Such factors and uncertainties include, but are not limited to, the
timely implementation by the Company of its plan to prepare its computer systems
for the Year 2000, the costs to the Company of such implementation and the
timely conversion by other parties upon which the Company's business relies; the
uncertainty that the performance advantages of SIMOX-SOI wafers will continue to
be realized commercially or that a commercial market for SIMOX-SOI wafers will
continue to develop; the dependence by the Company on key customers (during
1996, 1997 and 1998, revenues from four customers averaged in the aggregate
between 56% and 85% of the Company's revenues, so that the loss of one or more
of these major customers and the failure of the Company to obtain other sources
of revenue could have a material adverse impact on the Company); the loss of the
services of one or more of the Company's key individuals, which could have a
material adverse impact on the Company; the dependence by the Company on key
suppliers, so that the loss of services of one or more suppliers could have a
material adverse impact on the Company; the development of competing or superior
technologies and products from manufacturers, many of which have substantially
greater financial, technical and other resources than the Company; the impact of
rapidly changing technology; limitations on the ability to protect the Company's
patents and proprietary technology; the Company's limited history with regard to
sales of implanters; the Company's lack of experience in producing commercial


                                       16
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                 PART I - ITEM 2

                     MANAGEMENT'S DISCUSSION AND ANALYSIS OF
         FINANCIAL CONDITION AND RESULTS OF OPERATIONS (CONTINUED)

quantities of its products at acceptable costs; the Company's ability to
successfully complete the manufacture of its implanters and that these
implanters will be accepted by its customers; the Company's ability to develop
and maintain strategic alliances for the manufacturing, marketing and
distribution of its products and sale of equipment; the cyclical nature of the
semiconductor industry, which has negatively affected the Company's sales of
SIMOX-SOI wafers during industry downturns and which could continue to do so in
the future; the limited availability of critical materials and components for
wafer products and implanters, as a shortage of such materials and components or
a significant increase in the price thereof could have a material adverse effect
on the Company's business and results of operations; the availability of
additional capital to fund expansion on acceptable terms, if at all; and general
economic conditions.

                                 PART I - ITEM 3

           QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

         The exposure of market risk associated with risk-sensitive instruments
is not material to the Company, as the Company does not transact its sales
denominated in other than United States dollars, invests primarily in short-term
commercial paper, holds its investments until maturity and has not entered into
hedging transactions.


                                       17
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                     PART II

                                OTHER INFORMATION

Item 1 - LEGAL PROCEEDINGS
         None

Item 2 - CHANGES IN SECURITIES
         None

Item 3 - DEFAULTS UPON SENIOR SECURITIES
         None

Item 4 - SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS
         None

Item 5 - OTHER INFORMATION
         None.

Item 6 - EXHIBITS AND REPORTS ON FORM 8-K

         (a)       Exhibits furnished as Exhibits hereto:

                   27        Financial Data Schedule

         (b)      Reports on Form 8-K:

                  The Company filed with the Securities and Exchange Commission
                  on July 23, 1999 a Current Report on Form 8-K for the July 23,
                  1999 event reporting a profitable 1999 second quarter and 1999
                  first half, and 1999 first half revenues increase of 37% over
                  revenues in the 1998 first half.

                  The Company filed with the Securities and Exchange Commission
                  on July 27, 1999 a Current Report on Form 8-K for the July 27,
                  1999 event reporting a proposed public offering of 1,000,000
                  shares of common stock.

                  The Company filed with the Securities and Exchange Commission
                  on August 4, 1999 a Current Report on Form 8-K for the August
                  3, 1999 event reporting the pricing of 1,000,000 shares of
                  common stock being offered to the public at $27.00 per share.

                  The Company filed with the Securities and Exchange Commission
                  on August 10, 1999 a Current Report on Form 8-K for the August
                  9, 1999 event of the closing of its previously announced
                  public offering of 1,000,000 shares of common stock at $27.00
                  per share.


                                       18
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                   SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the
registrant has duly caused this report to be signed on its behalf by the
undersigned, thereunto duly authorized.

                                      Ibis Technology Corporation

Date:  November 8, 1999               By: /s/ Debra L. Nelson
                                          -----------------------
                                          Debra L. Nelson
                                          Chief Financial Officer, Treasurer
                                            and Clerk
                                          (principal financial and accounting
                                            officer)

Date:  November 8, 1999               By: /s/ Thomas F. Lacey
                                          ----------------------
                                          Thomas F. Lacey
                                          Controller and Assistant Treasurer


                                       19
<PAGE>

                           IBIS TECHNOLOGY CORPORATION

                                  EXHIBIT INDEX

<TABLE>
<CAPTION>
EXHIBIT NO.           DESCRIPTION                                           PAGE
-----------           -----------                                           ----
<S>               <C>                                                        <C>
27                Financial Data Schedule                                    22
</TABLE>


                                       20