# Patent

## Title
Method of forming a plurality of electronic component packages

## Abstract

A method of forming a plurality of electronic component packages includes attaching electronic components to a carrier, wherein high aspect ratio spaces exist between the electronic components. A dielectric sheet is laminated around the electronic components thus filling the spaces and forming a package body. The spaces are completely and reliably filled by the dielectric sheet and thus the package body has an absence of voids. Further, an upper surface of the package body is planar, i.e., has an absence of ripples or other non-uniformities. Further, lamination of the dielectric sheet is performed with a low cost lamination system.

## Background
BACKGROUND OF THE INVENTION
Field of the Invention
The present application relates to the field of electronics, and more particularly, to methods of forming electronic component packages and related structures.
Description of the Related Art
Electronic component packages are fabricated in an array to minimize fabrication cost. Initially, electronic components are mounted face down to a carrier. The electronic components are then molded by injecting molding compound around the electronic components.
During the molding process, the electronic components are often moved and displaced due to the force of the injected molding compound. This misalignment of the electronic components results in loss of yield thus increasing the overall cost of each electronic component package.
SUMMARY OF THE INVENTION
A method of forming a plurality of electronic component packages includes attaching electronic components to a carrier, wherein high aspect ratio spaces exist between the electronic components. A dielectric sheet is laminated around the electronic components thus filling the spaces and forming a package body. The spaces are completely and reliably filled by the dielectric sheet and thus the package body has an absence of voids. Further, an upper surface of the package body is planar, i.e., has an absence of ripples or other non-uniformities. Further, lamination of the dielectric sheet is performed with a low cost lamination system.
These and other features of the present invention will be more readily apparent from the detailed description set forth below taken in conjunction with the accompanying drawings.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a block diagram of a mold compound lamination electronic component package fabrication method in accordance with one embodiment;
FIG. 2 is a cross-sectional view of an array during the fabrication of a plurality of electronic component packages in accordance with one embodiment;
FIG. 3 is a cross-sectional view of the array of FIG. 2 at a later stage during fabrication in accordance with one embodiment;
FIG. 4 is an enlarged cross-section view of the region IV of the array of FIG. 3; and
FIGS. 5, 6, 7, 8, 9 are cross-section views of the array of FIG. 4 at later stages during fabrication in accordance with various embodiments.



In the following description, the same or similar elements are labeled with the same or similar reference numbers.
DETAILED DESCRIPTION
As an overview, referring to FIGS. 2, 3, and 4 together, electronic components 206 are attached to a carrier 204, wherein high aspect ratio spaces 216 exist between electronic components 206. A dielectric sheet 218 (FIG. 2) is laminated around electronic components 206 thus filling spaces 216 and forming a package body 322 (FIGS. 3, 4). Spaces 216 are completely and reliably filled by dielectric sheet 218 and thus package body 322 has an absence of voids. Further, an upper surface 322U of package body 322 is planar, i.e., has an absence of ripples or other non-uniformities. Further, lamination of dielectric sheet 218 is performed with a low cost lamination system.
Now in more detail, FIG. 1 is a block diagram of a mold compound lamination electronic component package fabrication method 100 in accordance with one embodiment. FIG. 2 is a cross-sectional view of an array 200 during the fabrication of a plurality of electronic component packages 201 in accordance with one embodiment. Referring now to FIGS. 1 and 2, in an apply adhesive to carrier operation 102, an adhesive 202 is applied to a carrier 204, sometimes called a support panel. In one embodiment, after application, adhesive 202 is cut to conform to the shape of carrier 204.
From apply adhesive to carrier operation 102, flow moves to an attach electronic components to adhesive operation 104. In attach electronic components to adhesive operation 104, electronic components 206 are mounted to adhesive 202, and generally to carrier 204.
In one embodiment, electronic components 206 are integrated circuit chips, e.g., active components. However, in other embodiments, electronic components 206 are passive components such as capacitors, resistors, or inductors.
In accordance with this embodiment, electronic components 206 include active surfaces 208 and opposite inactive surfaces 210. Electronic components 206 further includes bond pads 212 formed on active surfaces 208 and sides 214 extending between active surfaces 208 and inactive surfaces 210.
Active surfaces 208 of electronic components 206 are pressed into adhesive 202 on carrier 204 and thus stick to carrier 204 by adhesive 202.
In one embodiment, die processing operations are performed on electronic components 206 prior to attachment to adhesive 202. Illustratively, electronic components 206 are probed to verify the integrity of electronic components 206 while still in wafer form. The wafer of electronic components 206 is mounted in a wafer singulation apparatus, singulated, e.g., sawed, and cleaned. A bar-code label is applied to electronic components 206 and they are optically inspected to verify the integrity of electronic components 206.
In one embodiment, the aspect ratio of spaces 216 between electronic components 206 is relatively high. The aspect ratio is defined as the ratio of the height H of a space 216 to the width W of a space 216.
Illustratively, height H is in the range of 400 micrometers (400 μm) to 500 μm and width W is 100 μm. Stated another way, the distance between electronic components 206 is 100 μm and the thickness or height of electronic components 206 between active surfaces 208 and inactives surface 210 is in the range of 400 μm to 500 μm. Although various dimensions are provided herein, in light of this disclosure, it is to be understood that the dimensions may not be exact, but only substantially exact to within accepted manufacturing tolerances.
Although attachment of single electronic components 206 is illustrated and discussed, in other embodiments, each electronic component package 201 includes multiple electronic components, e.g., in a side-by-side arrangement, a stacked arrangement, a System in Package (SIP) with passives arrangement, or a Package on Package (PoP) arrangement.
From attach electronic components to adhesive operation 204, flow moves to a laminate dielectric sheet operation 106. In laminate dielectric sheet operation 106, a dielectric sheet 218 is laminated around electronic components 206.
More particularly, dielectric sheet 218 is located above electronic components 206 as illustrated in FIG. 2. Dielectric sheet 218 is moved downward onto electronic components 206 as indicated by the arrow 220.
In one embodiment, dielectric sheet 218 is formed of mold compound, e.g., in a rectangular, or disc, e.g., circular, form. Using a lamination system, dielectric sheet 218 is pressed downward onto electronic components 206 while dielectric sheet 218, or the entire array 200, is heated to cause dielectric sheet 218 to flow, i.e., to have a sufficiently low viscosity to conform around electronic components 206. Dielectric sheet 218 flows around electronic components 206 and to adhesive 202 filling spaces 216 between electronic components 202. In one embodiment, after lamination, dielectric sheet 218 is cut to conform to the shape of carrier 204.
FIG. 3 is a cross-sectional view of array 200 of FIG. 2 at a later stage during fabrication in accordance with one embodiment. FIG. 4 is an enlarged cross-section view of the region IV of array 200 of FIG. 3. Referring now to FIGS. 1, 2, 3, and 4 together, after lamination of dielectric sheet 218, dielectric sheet 218 forms a dielectric package body 322 as illustrated in FIGS. 3, 4.
Spaces 216 are completely and reliably filled by dielectric sheet 218 and thus package body 322 has an absence of voids. Further, an upper, e.g., first surface 322U of package body 322 is planar, i.e., has an absence of ripples or other non-uniformities. Further, lamination of dielectric sheet 218 is performed with a low cost lamination system. Accordingly, lamination of dielectric sheet 218 is performed at a relatively low cost, e.g., with a low capital expenditure.
As set forth above, the aspect ratio of spaces 216 is high. Using a lamination process, spaces 216 are reliably filled with package body 322 while also providing a planar upper surface 322U.
In contrast, the inventor has discovered that applying a dielectric layer using a spin coating technique produces a dielectric layer having substantial non-uniformity for high aspect ratio spaces. More particularly, the upper surface of the spin coating applied dielectric layer includes radiating ripples in a spoke wheel type pattern. Non-uniformity of the dielectric layer is undesirable.
The inventor has also discovered that applying a dielectric layer using a stencil printing method, sometimes called a printing method, forms voids within the dielectric material for high aspect ratio spaces. These voids are formed from out gassing from the dielectric material as the dielectric material cures. Further, as the dielectric material cures, the dielectric material shrinks resulting in undesirable shifting and moving of the electronic components. The formation of voids and electronic component shift is undesirable.
In the case where mold compound is injected around the electronic components, the electronic components are often moved and displaced due to the force of the injected molding compound. Further, molding equipment is relatively expensive thus increasing the capital expenditure necessary to produce the electronic component packages.
Paying particular attention now to FIGS. 3, 4, package body 322 includes a lower, e.g., second, surface 322L attached to adhesive 202. Package body 322 completely encloses electronic components 206 including inactive surfaces 210 and sides 214 and the exposed portion of adhesive 202. Lower surface 322L is coplanar with active surfaces 208 of electronic components 206.
Package body 322 is thicker having a thickness T1 greater than a thickness T2 of electronic components 206. More particularly, upper surface 322U of package body 322 is above and spaced apart from inactive surfaces 210 such that inactive surfaces 210 are covered in package body 322.
In one embodiment, package body 322 is ground down from upper surface 322U to expose inactive surfaces 210 of electronic components 206. In one embodiment, inactive surfaces 210 are also ground down thus thinning both package body 322 and electronic components 206.
FIG. 5 is a cross-section view of array 200 of FIG. 4 at a later stage during fabrication. Referring now to FIGS. 1, 4, and 5 together, from laminate dielectric sheet operation 106, flow moves to a remove adhesive and carrier operation 108. In remove adhesive and carrier operation 108, adhesive 202 and carrier 204 (see FIG. 4) are removed as illustrated in FIG. 5. Package body 322 is a relatively rigid material allowing adhesive 202 and carrier 204 to be removed. In various embodiments, adhesive 202 and carrier 204 are removed by peeling, etching, grinding, or other removal technique.
After removal of adhesive 202 and carrier 204, array 200 is sometimes called a reconstituted wafer. In various embodiments, dielectric sheet 218 (package body 322) is cured and/or cooled prior to or after removal of adhesive 202 and carrier 204 to harden dielectric sheet 218 (package body 322).
Referring now to FIGS. 1 and 5 together, from remove adhesive and carrier operation 108, flow moves to an apply first buildup dielectric layer operation 110. For simplicity, in the remaining figures, the operations will be discussed as being performed with a single electronic component 206 as illustrated. However, in light of this disclosure, those of skill in the art will understand that the operations are performed simultaneously to the plurality of electronic components 206 of array 200.
In apply first buildup dielectric layer operation 110, a first buildup dielectric layer 524 is applied to lower surface 322L of package body 322 and active surface 208 of electronic component 206 including bond pads 212. More particularly, an upper, e.g., first, surface 524U is applied to lower surface 322L of package body 322 and active surface 208 of electronic component 206. First buildup dielectric layer 524 further includes a lower, e.g., second, surface 524L.
From apply first buildup dielectric layer operation 110, flow moves to a patterned first buildup dielectric layer operation 112. In pattern first buildup dielectric layer operation 112, first buildup dielectric layer 524 is patterned to form bond pad via apertures 526 in first buildup dielectric layer 524.
Bond pad via apertures 526 are formed entirely through first buildup dielectric layer 524. Bond pad via apertures 526 extend through first buildup dielectric layer 524 and to bond pads 212. Bond pads 212 are exposed through bond pad via apertures 526.
FIG. 6 is a cross-section view of array 200 of FIG. 5 at a later stage during fabrication. Referring now to FIGS. 1, 5, and 6 together, from pattern first buildup dielectric layer operation 112, flow moves to a form first circuit pattern operation 114. In form first circuit pattern operation 114, an electrically conductive first circuit pattern 628 is formed. First circuit pattern 628 is sometimes called a redistribution layer (RDL).
First circuit pattern 628 includes electrically conductive bond pad vias 630 formed within bond pad via apertures 526. Bond pad vias 630 are electrically connected to bond pads 212.
First circuit pattern 628 further includes electrically conductive lands 632 and electrically conductive traces 634. In accordance with this embodiment, lands 632 and traces 634 are formed on lower surface 524L of first buildup dielectric layer 524. Traces 634 electrically connect bond pad vias 630 with lands 632.
In one embodiment, first circuit pattern 628 is formed by plating an electrically conductive material such as copper. In one embodiment, a resist is applied to first buildup dielectric layer 524 and patterned to form a circuit pattern artifact therein, e.g., a positive image of first circuit pattern 628. The circuit pattern artifact formed within the resist is filled with the electrically conductive material to form first circuit pattern 628. The resist is then removed.
In another embodiment, an electrically conductive material is plated to cover first buildup dielectric layer 524. The electrically conductive material on first buildup dielectric layer 524 is then selectively etched to form first circuit pattern 628.
As set forth above, first circuit pattern 628, e.g., lands 632 and traces 634 thereof, is formed on lower surface 524L of first buildup dielectric layer 524. However, in another embodiment, first circuit pattern 628, e.g., lands 632 and traces 634 thereof, is embedded into first buildup dielectric layer 524 at lower surface 524L.
In accordance with this embodiment, a circuit pattern artifact, e.g., a positive image of first circuit pattern 628, is formed in first buildup dielectric layer 524 at lower surface 524L. The circuit pattern artifact is formed using laser ablation, for example.
The circuit pattern artifact formed within first buildup dielectric layer 524 is filled with the electrically conductive material to form first circuit pattern 628. First circuit pattern 628 is embedded within first buildup dielectric layer 524.
FIG. 7 is a cross-section view of array 200 of FIG. 6 at a later stage during fabrication. Referring now to FIGS. 1 and 7 together, from form first circuit pattern operation 114, flow moves to an apply second buildup dielectric layer operation 116. In apply second buildup dielectric layer operation 116, a second buildup dielectric layer 736 is applied to lower surface 524L of first buildup dielectric layer 524 and to first circuit pattern 628.
More particularly, an upper, e.g., first, surface 736U of second buildup dielectric layer 736 is applied to lower surface 524L of first buildup dielectric layer 524 and first circuit pattern 628. Second buildup dielectric layer 736 further includes a lower, e.g., second, surface 736L.
From apply second buildup dielectric layer operation 116, flow moves to a pattern second buildup dielectric layer operation 118. In pattern second buildup dielectric layer operation 118, second buildup dielectric layer 736 is patterned to form blind via apertures 738 in second buildup dielectric layer 736. Blind via apertures 738 extend entirely through second buildup dielectric layer 736 to expose first circuit pattern 628, e.g., lands 632 thereof. In one embodiment, blind via apertures 738 are formed by laser ablating through second buildup dielectric layer 736, although other blind via aperture formation techniques are used in other embodiments.
FIG. 8 is a cross-section view of array 200 of FIG. 7 at a later stage during fabrication. Referring now to FIGS. 1, 7, and 8 together, from pattern second buildup layer operation 118, flow moves to a form second circuit pattern operation 120. In form second circuit pattern operation 120, an electrically conductive second circuit pattern 840 is formed.
Second circuit pattern 840 includes electrically conductive blind vias 842 formed within blind via apertures 738. Blind vias 842 are electrically connected to first circuit pattern 628, e.g., lands 632 thereof.
Second circuit pattern 840 further includes electrically conductive lands 844 and electrically conductive traces 846. In accordance with this embodiment, lands 844 and traces 846 are formed on lower surface 736L of second buildup dielectric layer 736. Traces 846 electrically connect blind vias 842 with lands 844.
In one embodiment, second circuit pattern 840 is formed by plating an electrically conductive material such as copper. In one embodiment, a resist is applied to second buildup dielectric layer 736 and patterned to form a circuit pattern artifact therein, e.g., a positive image of second circuit pattern 840. The circuit pattern artifact formed within the resist is filled with the electrically conductive material to form second circuit pattern 840. The resist is then removed.
In another embodiment, an electrically conductive material is plated to fill blind via apertures 738 and to cover second buildup dielectric layer 736. The electrically conductive material on second buildup dielectric layer 736 is then selectively etched to form second circuit pattern 840.
As set forth above, second circuit pattern 840, e.g., lands 844 and traces 846 thereof, is formed on lower surface 736L of second buildup dielectric layer 736. However, in another embodiment, second circuit pattern 840, e.g., lands 844 and traces 846 thereof, is embedded into second buildup dielectric layer 736 at lower surface 736L.
In accordance with this embodiment, a circuit pattern artifact, e.g., a positive image of second circuit pattern 840, is formed in second buildup dielectric layer 736 at lower surface 736L. The circuit pattern artifact is formed using laser ablation, for example.
The circuit pattern artifact formed within second buildup dielectric layer 736 is filled with the electrically conductive material to form second circuit pattern 840. Second circuit pattern 840 is embedded within second buildup dielectric layer 736.
Although first circuit pattern 628 and second circuit pattern 840 are set forth as containing particular features, e.g., bond pad vias, lands, traces, and blind vias, in light of this disclosure, those of skill in the art will understand that circuit patterns can be formed with other and/or different features depending on the particular signal routing desired.
From form second circuit pattern operation 120, flow moves to a form solder mask operation 122. In form solder mask operation 122, a dielectric solder mask 850 is formed. More particularly, solder mask 850 is applied to lower surface 736L of second buildup dielectric layer 736 and second circuit pattern 840. Solder mask 850 is patterned to form land openings 852 in solder mask 850. Land openings 852 expose lands 844 of second circuit pattern 840.
FIG. 9 is a cross-section view of array 200 of FIG. 8 at a later stage during fabrication. Referring now to FIGS. 1, 8, and 9 together, from form solder mask operation 122, flow moves, optionally, to a form interconnection balls operation 124. In form interconnection balls operation 124, interconnection balls 954, e.g., solder, are formed on lands 844 and in land openings 852 of solder mask 850. Interconnection balls 954 are distributed in a Ball Grid Array (BGA) in one embodiment. Interconnection balls 954 are ref lowed, i.e., heated to a melt and re-solidified, to mount electronic component packages 201 to another structure such as a printed circuit motherboard.
The formation of interconnection balls 954 is optional. In one embodiment, interconnection balls 954 are not formed.
From form interconnection balls operation 124 (or directly from form solder mask operation 122 in the event that form interconnection balls operation 124 is not performed), flow moves to a singulate operation 126. In singulate operation 126, array 200 is singulated, e.g., by sawing. More particularly, package body 322, first buildup dielectric layer 524, second buildup dielectric layer 736, and solder mask 850 are cut to singulate electronic component packages 201 from one another. As set forth above, a plurality of electronic component packages 201 are formed simultaneously in array 200 using the methods as described above. Array 200 is singulated to singulate the individual electronic component packages 201 from one another in singulate operation 126.
In one embodiment, prior to singulation, a ball grid final thickness operation is performed to insure that interconnection balls 954 have a uniform final thickness and electronic component packages 201 are laser marked. Further, after singulation, electronic component packages 201 are tray loaded, have a FVI gate operation performed thereon, are packed and finally tested.
Although formation of an array 200 of electronic component packages 201 is described above, in other embodiments, electronic component packages 201 are formed individually using the methods as described above.
The drawings and the forgoing description gave examples of the present invention. The scope of the present invention, however, is by no means limited by these specific examples. Numerous variations, whether explicitly given in the specification or not, such as differences in structure, dimension, and use of material, are possible. The scope of the invention is at least as broad as given by the following claims.

## Claims

1. A method of forming an electronic component package, the method comprising:
attaching electronic components having height dimensions of at least 400 micrometers (μm) to a carrier, where the attached electronic components are integrated circuit (IC) chips that each have a width dimension in a first direction greater than a respective height dimension and that are spaced no more than 100 μm apart in the first direction;
laminating a dielectric sheet around and over the electronic components, said laminating comprising:
filling the spaces between the attached electronic components with the dielectric sheet; and
pressing the dielectric sheet onto the electronic components and simultaneously heating the dielectric sheet to cause the dielectric sheet to flow around the electronic components,
wherein the dielectric sheet forms a package body enclosing the electronic components, where the package body comprises a first thickness for those portions of the package body in the spaces between the electronic components, and a second thickness, less than the first thickness, for those portions of the package body over the attached electronic components;

removing the carrier;
attaching a buildup dielectric layer directly to a respective active surface of each of the electronic components and to the package body;
forming a circuit pattern on the buildup dielectric layer; and
cutting at least the package body and the buildup dielectric layer to singulate the electronic component package.

2. The method of claim 1 further comprising:
attaching an adhesive to the carrier;
wherein the attaching electronic components to a carrier comprises temporarily attaching the electronic components to the adhesive.

3. The method of claim 1, comprising:
forming a second buildup dielectric layer on the buildup dielectric layer and the circuit pattern;
forming a second circuit pattern on the second buildup dielectric layer that is electrically connected to the circuit pattern; and
attaching a package interconnection structure to the second circuit pattern at a location directly beneath one of the integrated circuit chips.

4. The method of claim 1, comprising after said laminating, cutting the dielectric sheet to conform to a shape of the carrier.

5. The method of claim 1, comprising after said attaching a buildup dielectric layer, forming a via aperture through the attached buildup dielectric layer.

6. A method of forming an electronic component package, the method comprising:
attaching electronic components having height dimensions of at least 400 micrometers (μm) to a carrier, where the attached electronic components are integrated circuit (IC) chips that each have a width dimension in a first direction greater than a respective height dimension and that are spaced no more than 100 μm apart in the first direction;
laminating a dielectric sheet around the electronic components, said laminating comprising pressing the dielectric sheet onto the electronic components and simultaneously heating the dielectric sheet to cause the dielectric sheet to flow around the electronic components, wherein the dielectric sheet forms a package body around the electronic components, and the package body encloses inactive surfaces and sides of the electronic components, the package body comprising:
a first planar surface; and
a second surface attached to an adhesive, the second surface being coplanar with a respective active surface of each of the electronic components,
wherein the package body comprises a first thickness for those portions of the package body in spaces between the electronic components and a second thickness, less than the first thickness, for those portions of the package body over the electronic components.

7. The method of claim 6 wherein said attaching electronic components to a carrier comprises temporarily attaching the electronic components to the carrier with the adhesive.

8. The method of claim 6 wherein each respective active surface comprises bond pads, and said attaching electronic components to a carrier comprises attaching the respective active surface of each of the electronic components to the adhesive.

9. The method of claim 6 wherein said laminating a dielectric sheet around the electronic components comprises flowing the dielectric sheet around the electronic components and to the adhesive.

10. The method of claim 6, comprising after said laminating, cutting the dielectric sheet to conform to a shape of the carrier.

11. The method of claim 6, comprising, after said laminating a dielectric sheet:
removing the carrier and the adhesive; and
applying a buildup dielectric layer to the respective active surface of each of the electronic components and to the second surface of the package body; and
forming a circuit pattern on the buildup dielectric layer.

12. The method of claim 11, comprising:
forming a second buildup dielectric layer on the buildup dielectric layer and the circuit pattern;
forming a second circuit pattern on the second buildup dielectric layer that is electrically connected to the circuit pattern; and
attaching a package interconnection structure to the second circuit pattern at a location directly beneath one of the integrated circuit chips.

13. The method of claim 11, comprising, after said applying a buildup dielectric layer, forming a via aperture through the applied buildup dielectric layer.

14. A method of forming an electronic component package, the method comprising:
attaching electronic components having height dimensions of at least H to a carrier, where the attached electronic components are integrated circuit (IC) chips that each have a width dimension in a first direction greater than a respective height dimension and that are spaced no more than distance W apart in the first direction, where W is no more than 100 micrometers (μm), and wherein the ratio of H to W is at least four;
laminating a dielectric sheet around the electronic components, said laminating comprising:
filling the spaces between the attached electronic components with the dielectric sheet; and
pressing the dielectric sheet onto the electronic components and simultaneously heating the dielectric sheet to cause the dielectric sheet to flow around the electronic components,
wherein the dielectric sheet forms a package body enclosing the electronic components, where the package body comprises a first thickness for those portions of the package body in the spaces between the electronic components and a second thickness, less than the first thickness, for those portions of the package body over the attached electronic components;

removing the carrier;
attaching a buildup dielectric layer to a respective active surface of each of the electronic components and to the package body;
forming a circuit pattern on the buildup dielectric layer; and
cutting the package body and the buildup dielectric layer to singulate the electronic component package.

15. The method of claim 14 wherein H is no greater than 500 μm.

16. The method of claim 14 wherein H is no less than 400 μm.

17. The method of claim 14, comprising attaching an adhesive to the carrier, and wherein said attaching electronic components to a carrier comprises temporarily attaching the electronic components to the adhesive.

18. The method of claim 14, comprising:
forming a second buildup dielectric layer on the buildup dielectric layer and the circuit pattern;
forming a second circuit pattern on the second buildup dielectric layer that is electrically connected to the circuit pattern; and
attaching a package interconnection structure to the second circuit pattern at a location directly beneath one of the integrated circuit chips.

19. The method of claim 14, comprising after said laminating, cutting the dielectric sheet to conform to a shape of the carrier.

20. The method of claim 14, comprising after said attaching a buildup dielectric layer, forming a via aperture through the attached buildup dielectric layer.