National Bur

Library, N.W. Bldg

NOV 5 1964

Reference book not to be

i~i. or

> from thfi library.

^ecknic&l v2©te 232

BIBLIOGRAPHY ON THE MEASUREMENT OF BULK

RESISTIVITY OF SEMICONDUCTOR MATERIALS

FOR ELECTRON DEVICES

JUDSON C. FRENCH

U. S. DEPARTMENT OF COMMERCE

NATIONAL BUREAU OF STANDARDS
THE NATIONAL BUREAU OF STANDARDS

The National Bureau of Standards is a principal focal point in the Federal Government for assuring

maximum application of the physical and engineering sciences to the advancement of technology in industry and commerce. Its responsibilities include development and maintenance of the national stand- ards of measurement, and the provisions of means for making measurements consistent with those

standards; determination of physical constants and properties of materials; development of methods

for testing materials, mechanisms, and structures, and making such tests as may be necessary, particularly for government agencies; cooperation in the establishment of standard practices for incorporation in codes and specifications; advisory service to government agencies on scientific and technical problems; invention and development of devices to serve special needs of the Government; assistance

to industry, business, and consumers in the development and acceptance of commercial standards and

simplified trade practice recommendations; administration of programs in cooperation with United

States business groups and standards organizations for the development of international standards of

practice; and maintenance of a clearinghouse for the collection and dissemination of scientific, technical, and engineering information. The scope of the Bureau's activities is suggested in the following

listing of its four Institutes and their organizational units. Institute for Basic Standards. Electricity. Metrology. Heat. Radiation Physics. Mechanics. Applied Mathematics. Atomic Physics. Physical Chemistry. Laboratory Astrophysics.* Radio Standards Laboratory: Radio Standards Physics; Radio Standards Engineering.** Office of Standard Ref- erence Data. Institute for Materials Research. Analytical Chemistry. Polymers. Metallurgy. Inorganic Materials. Reactor Radiations. Cryogenics.** Office of Standard Reference Materials.

Central Radio Propagation Laboratory.** Ionosphere Research and Propagation. Troposphere

and Space Telecommunications. Radio Systems. Upper Atmosphere and Space Physics.

Institute for Applied Technology. Textiles and Apparel Technology Center. Building Research.

Industrial Equipment. Information Technology. Performance Test Development. Instrumentation.

Transport Systems. Office of Technical Services. Office of Weights and Measures. Office of Engineering Standards. Office of Industrial Services.

* NBS Group, Joint Institute for Laboratory Astrophysics at the University of Colorado.

* * Located at Boulder, Colorado.
NATIONAL BUREAU OF STANDARDS

Technical Note 232

ISSUED OCTOBER 21, 1964

BIBLIOGRAPHY ON THE MEASUREMENT OF BULK RESISTIVITY

OF SEMICONDUCTOR MATERIALS FOR ELECTRON DEVICES

Judson C. French

NBS Technical Notes are designed to supplement the Bureau's regular publications program. They provide a means for making available scientific data that are of transient or limited interest. Technical Notes may be

listed or referred to in the open literature.

For sale by the Superintendent of Documents, U.S. Government Printing Office Washington, D.C., 20402 - Price 60 cents
Contents

Page

1. Introduction .1

2. Index to Subject Matter 2

2a. Index Categories ....................3

2b. Index Tabulation t

3. Index to Authors ....7

4. Bibliography. 13

li
Bibliography on the Measurement of iiulk Resistivity

of Semiconductor Materials for Electron Devices

Judson C. French

In support of a study of accurate

measurements of the bulk resistivity of

semiconductor materials such as germanium

and silicon which are used in electron devices, a literature search has led to the

development of a rather large collection

of references. The file cards making up

the bibliography are reproduced in this

Technical iJote for the assistance of others

who are concerned with the improvement and

standardization of these measurements.

1. Introduction

In the course of a study of accurate measurements of the bulk

resistivity of semiconductor materials for use in electron devices for

example, germanium and silicon, a search of the literature has been conducted. 1 The result has been the accumulation of quite a number of

references which appear to offer promise of being helpful to the study.

The subject matter includes topics which are obviously pertinent, such as measurement procedures and correction factors, as well as topics of a more indirectly applicable nature, such as sample preparation techniques

and dimensional measurements, surface and pressure effects, uniformity,

and so on. In regard to the former category, the collection is believed

to be quite complete through 1963; a number of entries in the period to

about mid-1964 are also included. The entries in the latter category

are only those which have been selected as being of present or anticipated application to some of the specific problems of this study.

This work has been supported in part by the Advanced Research Projects

Agency under Order No. 373-62 and the Air Force Cambridge Research

Laboratories under PRO 61-560 and 62-200.
Nevertheless, others who are concerned with semiconductor resistivity measurements have expressed interest in having the collection

made available for their use. For this reason, the file cards which

form the working bibliography have been reproduced in this Technical

Note with the hope that they will indeed be helpful in this field.

Because of the overlapping nature of the topics in many of the

articles, no attempt has been made to group the cards by subject matter.

Instead, they are arranged alphabetically on the basis of the author's

name. An abstract is included as a guide to the article's content.

This is frequently the author's abstract. To provide a brief index to

the material covered by the references, a breakdown of the bibliography

into thirteen categories of especial interest to the present study has

been made. This has been based in many instances only on the statement

in the abstract. It is recommended that this index be considered only

to be a means of quickly finding the major references in these categories.

It provides a starting point in seeking a complete set of references on

a given topic. The identification numbers of the cards, which are used

in the index, are to be found typed near the upper right hand corners of the cards.

Although the cards have been reproduced on both sides of a page,

they may be cut out and attached to suitable file cards using two copies

of the Technical Note if this should be desirable to provide a working

file.

2. Index to Subject Matter

The subject matter of the collected references has been divided

into the thirteen categories listed on page 3 in Section 2a. In Section

2b on pages 4 to 6 , the identification numbers of appropriate cards are listed below the numbers corresponding to these categories.
2a. Index Categories

1. Bulk resistivity measurement: dc methods requiring probes or other

contacts.

2. Bulk resistivity measurement: ac methods requiring probes or other

contacts. (See also Category 1 for applicable techniques.)

3. Bulk resistivity measurement: ac contactless methods, excluding

microwave frequencies, but including measurements of related properties such as dielectric constant and carrier lifetimes.

4. Bulk resistivity measurement: microwave methods, including microwave measurements of related properties such as dielectric constant

and carrier lifetimes.

5. Bulk resistivity measurement: other methods than in Categories 1

to 4.

6. Layer resistivity measurement, including epitaxial and diffused

layers. (See also Categories 1 to 5 for bulk measurement methods

applicable to thin samples.)

7. Resistivity measurements at resistivities of 100 ohm-cm or greater.

8. Material properties, excluding inhomogeneities and anisotropics,

but including surface and contact phenomena (see also Category 10),

probe wear effects, mobility and lifetime measurements not included

elsewhere, the dependence of resistivity on pressure, temperature

and nuclear radiation, etc.

9. Sample inhomogeneities and anisotropics, including growth methods

and defect determination.

10. Sample preparation and associated techniques, including crystal

orientation, sawing, lapping, polishing, dimensional measurement,

plating, application of leads, surface evaluation, etc. (See also

Category 8, especially for contact phenomena.)

11. Miscellaneous equipment and techniques.

12. Correction factors, mathematical principles, and error analysis.

(See also references on the specific method of measurement of interest. This category generally excludes papers with a theoretical

introduction to a described method of measurement unless extensive

correction factors are tabulated also.

)

13. Survey articles.
2b. Index Tabulation

Categories 1-6

2 3 4

A4 L7 V3 A6 B25 A8 K27 A3 A6

A5 LI 3 V4 A7 C2 A9 LI A6 A12

A7 M2 V5 Bll CIO A10 L8 B9 Bl

A9 M6 V6 C6 D9 All L10 B14 B18

A10 M9 V8 D9 Dll A15 Lll B30 B30

All Mil V10 D16 D16 B5 L12 D14 B34

A12 N7 Wl F9 G7 B9 M21 D16 C13

A13 03 W3 L13 G13 BIO 111 E2 D7

B2 05 W7 P3 H12 B13 N2 F3 D16

B6 P3 W9 P16 13 B17 N3 F6 Fll

B15 P6 wia P17 K28 B28 N4 G3 Gl

B22 P12 wm R19 K29 B29 N5 G7 G6

B26 P13 W16 R20 M6 C5 Nil Gil Gil

330 P16 V12 M20 C7 Rl H3 H9

C4 R7 N10 C8 R2 K8 H23

Cll R9 N13 C9 R4 K9 14

C16 R12 01 CIO R16 K15 Kl

C20 R18 04 C13 S2 K26 K7

D6 R19 P15 D9 S21 LI 4 K19

D7 R20 P16 D16 S29 Ml 2 K23

Dll S9 P17 Fl S30 01 K25

D13 S10 P19 Fll S39 06 K26

D14 Sll R19 F15 Tl 07 K28

D16 S20 S26 G13 T2 08 L3

E7 S22 Tl G17 T24 P2 M6

F2 S24 T24 G18 Z3 P8 M12

F6 S27 W6 Hll R5 N5

F8 S28 Yl H20 R6 N7

G3 S33 Z2 1121 R20 PI

Gil S35 H22 S22 P15

m S40 H25 S40 P21

H5 S42 H27 S41 R6

H6 S46 H28 S50 R18

H7 S47 13 T8 S9

H15 S48 Jl W16 S10

H19 S49 J2 Sll

H23 S50 J3 S16

H26 T5 J4 S33

13 T6 J5 S35

K5 T19 K2 S42

K6 T20 K17 S47

K7 Ul K18 S49

K14 VI K19 T8

K25 V2 K24 T18

T19
2b. Index Tabulation

Categories 7-9

8

A7 Al . F12 N8 V9 Al H8 S19

B22 A2 F13 N10 Vll A4 H10 S23

C5 All F14 02 V12 A5 HI 3 S24

F9 A16 F16 PI W2 A12 H14 S25

H19 B2 G2 P4 W5 A15 H17 S27

13 B5 G4 P5 W7 A16 H24 S28

J3 B7 G7 P7 W8 B6 H26 S31

J5 B8 G9 P10 W10 B7 J9 S32

K8 BIO G13 P14 W15 38 Kl S49

K29 B15 G15 P16 W17 B12 K3 S50

N10 B19 G16 P18 Yl B14 Kll T3

P12 B20 H2 P20 Zl B15 K20 T4

R16 B21 H6 P21 Z3 B16 K21 T7

R19 B24 H15 R8 B23 K26 T10

T6 B27 12 R9 B26 L2 Til

B29 14 RIO B29 L4 T12

B33 15 Rll B30 L5 T13

C2 J6 R12 CI L6 T15

C6 J7 R13 C3 L9 T16

C9 J8 R14 C5 Ml T17

C12 J9 R15 CIO Mil T20

cm Kl R18 C14 M14 T22

C15 K4 R21 C15 M15 T23

C17 Kll SI D2 M16 V6

C18 K13 S5 D6 M19 V13

C20 K16 S6 D8 N9 W3

C22 K22 S7 D15 02 W5

Dl K24 S8 D16 06 W7

D2 L5 S18 El 07 Wll

D4 L14 S24 E2 08 W14

D5 L15 S25 E5 P9 W16

D9 L16 S28 E7 P21

D15 M3 S29 F10 R3

D16 M4 S35 G3 R8

D17 M5 S40 G4 R14

D18 M7 sm G5 R17

D19 Ml 3 Tl G8 R19

El M17 T2 G9 S4

E5 M19 T3 G12 Sll

E6 M21 T4 G14 S14

E7 M22 T7 G15 S15

F4 M23 T10 HI S16

F5 Ml Til m S17

F9 N6 T14

V7

Ml S18
2b. Index Tabulation

10 11 12 13

Al S36 Alt A4 B33

A6 S37 D3 A5 C17

A13 S38 D13 Bl C18

B3 543 H10 B34 D16

B4 S44 H18 C4 13

B15 S45 P3 Cll K14

B20 T21 S3 C16 K29

B24 W7 S30 C21 N10

B31 W12 T9 D16 P5

B32 W17 V5 F2 P13

C6 V10 H4 R9

C19 Wll H5 RIO

D10 J6 R19

D12 K5 S5

D16 K7 S6

Categories 10 - 13

11 12

Alt A4

D3 A5

D13 Bl

H10 B34

HI 8 C4

P3 Cll

S3 C16

S30 C21

T9 D16

V5 F2

V10 H4

Wll H5

J6

K5

K7

L7

LI 3

L16

HI 8

N12

P14

R7

S20

S28

S33

S34

S46

S47

S48

S49

Ul

V2

V3

V8

W4

E3 L7 S7

Et LI

3

S8

E6 L16 StO

F2 Ml 8 W16

F7

Git

G16

H6

H9

H15

H16

II

K10

K12

L2

L15

M7

M8

M10

09

P3

Pll

P20

P22

P23

R19

S12

S13

S28
3. Index to Authors

Abe, T. , K3

Ablova, M.S., Al, A2

Acs, E. , A3

Adlington, R.E. , G12

Afanas'ev, V.F. , M8

Airapetyants, S.V. , A- Albert, M.P. , A5 , C16

Allen, C.C. , A6 , A7

Allerton, G.L. , A8, A' Amer, S. , A12

American Society for Testing and

Materials, A13

Anderson, J.R. , C6

Antler, M. , A14

Arai, Y. , II

Armstrong- n.R. .

A4

L *A7

A8, A9, A10, All

, . . , ~ — trong, D.B. , C7, C8, C9

Aron, C.P. , A15

Arthur, J.3. , A16

Auletta, L.V. , A14

Axelrod, S.D. , W7

Backenstoss, G. , Bl

Bailey, G.C. , B2

Baker, D. , B3, B4

Balchin, N.C. , M20

Banis, T. Ya. , B5

Baranskii, P.I., B6 , 37, B£

Bardeen, J. , P7

Barlow, H.E.M. , BIO, K19

Barlow, H.M., B9

Barry, A.L. , Bll

Bate, R.T. , B12, D13

Baynham, A.C., B13 . Beach, A.L. , T13

Bean, C.P. , B14

Beer, A.C. , B12

,

Bell, J.C., S28

Benanti, M. , Jl, J2

Benjamin, R. , Jl, J2 , J3, J5

Bennett, D.C. , B16

Benson, K.E. , C3 .. Berkova, A.V. , M14

Bhar, J.N. , 317

Biard, J.R. , B18

tfean, u.r.

,

Bit

Beer, A.C.

,

B12 , 315, D14

Bell, J.C., S28

T3/-m-> -5-1-1-1- ? M T1 TO

Blakemore, J.S., B19

Blum, S.E. , RIO

3oat right, A. , 320

3oiko, I.I., B21

Bolognesi, G.P. , B22

Booker, G.R. , S37, S38

Borneman, E.H., W17

3ourassa, F. , B23

Bowden, F.P. , 324

A. , Jl, J2, J3

Bowden, F.P. , 324

Brand, F.A. , Jl, . Rl, k*

Bresler, M.S. , A4

Brice, J.C. , 325, B26

Briggs, H.B. , B27

Brock, G.E. , DG

3rodwin, M.E. , B28

Broersma, S. , F15

Brooks, H. , C2 , P5

Brown, J. , 39

Brown, M.A.C.S.

,

Brown, S.C. , H27

Brownson, J. , B3< Buck, T.M. , B31, B32

3urg<

, J4, J5

— * •»•" t - • » —

Brown, M.A.C.S. , 329

Brown, S.C. , H27

n, J. , B .M., B31

, R.E.,

n, E. , 3

K.M. , B3

r, E.G., A6

Brownson, J. , B30

Buck, T.M. , B31, B32, L4

Burgess, R.E. , 1J13

Burstein, £., B33

Busen, K.M. , B34

Bylander, E.G. , /

Cahn, J.H. , S28

Camp, P.R. , CI

Cardona, M. , C2

Carruthers, J.R. , C2

Caspari, M.E. , R4

Catalano, S.3. , C4

Cerny, L. , C5

Chaikin , S.W. , C6

Champlin, K.S. , C7,

Ch'ang-hou, S. , Cll

Chaplin, N.J. , P6

Chapman, P.W. , C12

Chatterji, C.K. , C13, N3,

Chizhevskaya, S.N. , G7

Chukichev, M.V. , C14

C8, C9, CIO

.13, N4
Cihelka, J. , C5

Cleland, J.W. , C15

Combs, J.F. , A5, C16

Con ley, J. , A14

Conwell, E.M., C17, C18, D5 , Z3

Coughlin, B.J. , C19

Crawford, J.H. , Jr., C15

Creamer, R.H. , C20

Crow, E.L. , C21

Csavinszky, P. , C22

Cuevas, M. , F13

D_

Danielson, G.C., Nil

Das, P., Nl, N5

Dash, W.C. , Dl, D2

Dauphinee, T.M. , D3

Davies, E.A. , D4

Davis, G.L. , C19

DeBlois, R.W. , B14

Debye, P.P. , D5

Denene, M.V. , B5

Dew-Hughes, P., D6

Dickey, D.H. , D7,

Dickhoff, J. A.M. , D8

Donovan, 3. , D9

Donovan, T.M. , D10

Dorin, V.A. , Dll

Dorosheski , G. , K7

Dreiner, R. , D12

Drickamer, H.G., M17, SI

D

1 Stefan, D.J. , K12

Duga, J.J. , D13, D14

Dumas, G. , D15

Finn 1 ;2T^ U P .Tn m

Eisner, R.L. , E6

Ertel, A. , E7

:-i9

Dumas, G. , D15

Dunlap, W.C. , Jr. , Dunsmuir, R. , H25,

Dykman, I.M., D17,

Dzong, T.K. , R12

Dzyubenko, G.M., B

r

Easton, W.B. , G6

Eckhardt, G. , El

Edwards, D.F. , E2

Edwards, J.W., E3,

Edwards, W.D., E5,

Egli, P. II. , B33

D16

Lll

D18, D19

E4

Bll

Fabricand, B.P., M5no Falkvik, I. , Fl

Fan, H.Y., Tl

Feucht, D.L., H20, H21, H22

Finne, R.M. , S45

Fischer, E. , F2

Fischer, G. , F3

Fistul', V.I., F4, F5, R18

Fivaz, R. , F6

Flores, J.M. , F7

Foster, L.M., <K22, L9

Fowler, V.J. , Z3

Frank, H. , F8, F9

Frank, R.C. , F10

Frpi A.H. Fll

V13

Frank, «.w. , Frei, A.H. , til

Frenkel' , V. Ya. , V13

Freundlich, J.J., D13

Fritzsche, H. , F12 , F13

Frei,

Frenk

Freun _ ._ Fritzsche, H. , F12

Fuller, C.S. , F14

Furdyna, J.K. , F15

Fursenko, V.D. , K28

Furukawa, Y. , F16

G

Gardner, E.E, , Gl

Garnache, R. , D12

Gartner, U.W. , G2

Geballe, T.H., Pir

, D15

w^j.^-1-j , ^y. , Go

Gibbs, W.E.K., G4

Gibson, A.F.

,

G5

Gartner, U.W. , G2

Geballe, T.H., P16, P17

Georges, C. , D15

Gergely, Gy. , G3

Gibbs, W.E.K., G4

Gibson, A.F., A16, 313,

Gilman, J. J. , W10

Glang, R. , G6

Glazov, V.M., G7

Glazunov, P. Ya. , V9

Goetzberger, A., G8 , HI, S23

Goldey, J.M. , H27

Golovin, 3.1. , M15

Good, R.H., Jr. , L12

Goorissen, J., G9

Gorid'ko, N. Ya.

Gorkun, Y"

, G10

u. I. , Gil
Gosling, D.S. , DH

Goss, A.J. , G12

Gossenberger, H.F.,

Gossick, B.R. , G13

Gould, H.G. , G14

Grandjean, C. , G15

Grantham, L.F. ,. Yl

Granville, J.W. , A16 , Greenwood, J. A. , Greig, D. , F3

Gubenko, A. Ya. , Guldbrandsen, T. , M12

Guldner, W.G. , T13

Gunderson, P.D., C9

Gunn, M.W. , G17, G18

M10

B13

G16

Ft

H

, J., Hll

Hait z G8,

HJigglund,

Haitz, R.M. , Hall, G.L. , H2

Hallenback , J.F.

Hamer, H. , H3

Hanamura,

HI

Jr. , Gl, S9, S10

, E., T2

Hansen, E.B. , H4

Hant ay, 0. , G3

Hargreaves, J.K. , H5

Harman, G.G., H6 , H15

Harman, T.C. , H7

Harrick, W.J. , H8, 119 Harris, P.T. , T16

Haupin, W.E. , H10

Hedvall, P. , Hll

Heinecke, W.J., Ml

Heitz, A. , W12

Hellinger, 0. , N10

Helpert, E. , M10

Henisch, H.K. , H12

Herring, C. , H13

Heywang, W. , H14

Higier, T. , H6 , H15

Hillegas, W.J. , Jr., H16

Hirshon, J.M., H17

Hitchcox, G. , H18

Hoffman, A. , H19

Holmes, D.A. , H20, H21, H22 , J5

Hora, H. , H23

Horn, F.H. , H24

Horner, F. , H25

Hornstra, J. , H26

Ilsieh, H. , H27

Husa, (Gusa) V., C5 , 1128, K27

Ida, I., II

Il'ina, M.A. , 12

Ioffe, A.F., 13

Irvin, J.C. , IH

Isaacs, J. , 02

Ittner, W.B. Ill, 15

Ivko, V.M. , S3

Jackson, W. , H25

Jacobs, H. , H22, Jl, J2 , J3, J4,

J5, Rl, R2

Jacobson, A.H., Jr., J6

Jaggi, R. , J7

Johnson , W.E. , J8

Jones, A.H. , D6

Jorgensen, M.. J9

Kl,

K2

Kahng, D.

,

Kalvenas

Karstensen,

Kato, H. , K3

Keller, J.B. , K4

Kennedy, D.P. , K5

Kennedy, J.K. , K6

Keywell

., T8

> , S « P . , stensen, F. , G9

Kate

Khotkevich, V.I., K8, K9

Kingsnorth, R.L., C19

Kirvalidze, I.D., K10, Kll

Klein, D.L. , K12, S45

Klein, M.A. , K23

Klinger, M.I. , K13

Knight, G. , Jr. , Kit

Ko, W.-H. , K15

Kobayashi, M. , T2

Koenig, S.H., K16

Kohane, T. , K17, K18

Koike, R. , K19

Kokorev, D.T. , K20

Kolb, E.D., K21
Kolb, G.A. , S45

Konoplyasova, N.S.,

Kovtonyuk, N.F., K2

Kozak, M.I. , Zl

Kozlov, M.M. , Dll

Kramer, R.A. , K22

Kressel, H. , K23

Krishna, K.V.G. , BIO

Kroemer, H. , K24

Krongard, R.R. , CIO

Ksoll, G. , K25

Kudman, I. , K26

Kurilo, P.M. , B8

Kurova, I. A. , 12

Kutsko, M. , L10

Kuz'menko, P.P. , G10

Kvasil, B. , H2 8, K27

Kynev, St. , K28

Kytttniemi, T. , K29

B7

Labuda, E.F.

LaChapelL

LI

T.J., L2

Lamb, J. , H25

Lamorte, M.F. , L3

Lander, J.J. , L4

Landwehr, G. , L5

J8

Lang, A.R. , L6

LaPlume, J. , L7

Lark-Horovitz, K.

,

Larrabee, R.D., L8

Leboeuf , M.B. , T10

LeCraw, R.C. , LI

Lederhandler, S.R. , El

Lewis , J.E. , L9

Liben, W. , P15

Lindmayer, J. , L10

Linhart, J.G. , Lll

Liu, S.H. , L12

Logan, M.A. , L13

Logan, R.A. , F1M- Long, D. , C12, L14

Lorinczy, A., L15

Love, E.R. , L16

Luchsinger, E.B., Yl

MacDonald, A.L., Ml, M2

Machlup, S. , M13

Maczuk, J. , M3, M4

Magill, P.J. , 15

Maita, J.P. , M22

Maker, P.D. , E2

Many, A. , 06, 07

Manz, R.C. , Kl,

March, N.H. , D9

Martinuzzi, S. , M6

Maruyama, S. , M7

Maslova, L.V. , M"

Matare, H.F. , R8

Mathews , J.R. , L4

Matveev, O.A. , M8

Mazur, R.G. , M9

McDonald, 3. , G8

McKean, W.J. , P18

, B32

, M5

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, 03

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McNc amara , J . E . , V712 Mehl, W. , M10

Mpinrll . ,T. ,T1 ,T9

T23

, .. . , ,.,_*„ Meindl, J., Jl, J2 , J3, J4, J5

Meltzer, G. , Mil

Merkl, W.A. , B20

Mette, II. , B20

Meyer, N.I. , J9, M12

Michels, A. , M13

Millard, D. , H5

Mills, A.D. , T4

Mil'vidskii, M.G., M14, M15

,

Minden, H.T. , M16

Minomura, S. , Ml

7

Mircea, A. , M18

Miselyuk, E.G. , Vll

Mizuguchi, K. , S4

Mlavsky, A.I., W7

Montgomery, H.C., M19

Moore, P. , B25

Mooser, E. , F3

Mordike, B.L., M20

Morgan, T.N. , M21

Morin, F.J. , M22, , Morozov, G.P. , P8

Motchenbacher, CD.,

Muraoka, H. , K3

Myers, J. , L14

M23

L14

N

Nag, B.R. , C13, III, N2 , N3, N4, N5

Nakamura, M. , N6

Nakhodkin, N.G. , N7

Nemeth, T. , L15

10
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Nesbitt, L.B.

,

Bit

Neuberger, M. N8

Newkirk, J.B.

,

N9

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Newkirk, , Nibler, F. , N10

Nishina, Y. , L12,

Nomura, Y. , N12

Novikov, N.N. , G10

Nyberg, D.W. , N13

Ogawa, T. , 01

Okada, 0. , M7

Okkerse , B, , G9

Oldfield, W.W., Jr., S29

Oliver, C.R. , 02

Olshefski, P.J., 03, 04

Omel'yanovskii, E.M. , F5

Oroshnik, J., 05, 06, 07, 08

Ostapkovich, P.L., 09

P_

Pagnia, H. , PI

Paige, E.G.S., A16

,

Pankey, T. , P2

Pany, F.G. , P3

Patskevich, V.M., V9

Paul, W. , C2, Pt, P5

Paulnack, C.L. , P6, £ Pearson, G.L. , P7

Peat, A.J. , Wll

Petrusevich, V.A.

,

Pfann, W.G., P9 , PI Pharo, W.B. , Pll

Pierno, A. , B22

P'i-huang, C. , P12

Pistoulet, B., P13

Plakida, N.M. , Pit

Poehler, T.O. , P15

Pollak, M., P16, P17

Poltinnikov, S.A. , St2

Pompliano, L.A. , St5

Potter, R.F. , P18

Powell, R.C. , P19

Pozhela, Yu.K. , B5,

Presnov, V.A. , P20

Price, P.J. , P21

Pugh, E.N., P22, P2:

G5

P8

P10

K2

Ramsa, A. P. , Rl, R2

Ranaldi, M. , 09

Ransom, P. , R3

Rashba, E.I. , B21

Rasmussen, A.L. , P19

Rau, R.R. , Rt

Ravich, Yu.I., R5

Rawlins, T.G.R

-" » ---» *•» Lns, T.G.R. , Reber, J.M. , R7

Redaelli, G. , B2

Reed, B. , R8

Regel, A.R. , A2

Reid, F.J.,

Regel, A.R. , A2

Reid, F.J., R9 , RIO

Reuschel, K. , H19

Reynolds, J.E. , Rll

Ri enter, G. , R12

Rindner, W. , R13

Roberts, D.H. , Rlt

Robin, J. , R15

Rose, K. , R16

Rothberg, M. , W6

Rouse, R.L. , R17

Roy, S.K. , C13, N2, N3, Nt, N5

Rubinshtein, R.N. , R18

Rudenberg, H.G., R19

Runyan, W.R. , A7

Runnrecht. H. . H19

Runyan, W.R. , A7

Rupprecht , H. , H. Ryan, F.M. , R20

Ryuzan, 0., R21

Samara, G. A. , SI

Samuels, L.E. , P22, P23

Sandus, 0. , S2

Santos, G.J., Jr., C6

Sapogin, L.G. , S3

Sasaki, W. , N6 , St

Sawyer, B. , B16

Scarlett, R.M. , G8, HI

Scheibner, E.J. , S5, S6, S7, S8

Schmidt-Tiedemann, K.J., J9

Schnable, G.L. , HI

Schreiber, H. , Lt

Schumann, P. A., Jr., Gl, S9, S10

Schwabe, G. , S12

Sll

11
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S16, S17

Seeger, A. , S18, S19

Seifert, J.R. , A8, A9 , A10, All

Selikson, B. , S20

Seraphin, B.O., D10

Seybolt , A.U. ,

VI 11

Sharpe, C.3. , 521

Sheiner, L.S., Sll

Sheinkman, M.K. , K28

Shelykh, A.I. , S22

Shlbuya, M. , S4

Shim, G.A. , 334

Shockley, W. , HI, S23

Shou-wu, W. , S24

Shul'ga, I.B. , K28

Shuvalov, Yu. N. , S25

Sidyakin, V.G. , S26

Silverman, S.J., S27

Simon, R. , S28

Sirvetz, M.H. , K18, S29

Skorik, E.T. , S26

Smith, K.D. , V3

Smith, M.J. A. , S30

Smith, R.C. , S31, S32

Smits, F.M. , S33

Smythe, W.R. , S3

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Snodgrass, R.J., S35

Soffa, A. , Wl

Soled, J. , M2

Spitzer, W.G. , S36

Statz, H. , S19

Stearns, C.A. , M2

Stickler, R. , S37, S38

Strause, 3.M. , T10

Stride, A. A. , B26

Strutt, M.J.O., Fll

Stubb, T. , S39

Stuttard, B. , S40

Subashiev, V.K. , P8, S41

Subashchiev, V.K. , S42

Sullivan, M.V., S43, S44, S45

Sunde, E.D. , S46

Swartzendruber, L.J. , S47, S48,

S49

Swiderski, J., S50

Synorov, V.F. , P20

Szebeni, P. , L15

Tanaka, S. , Tl, T2

Tanenbaum, M. , K21,

Tar.m' nV H T^

idiienuaum, ri. Tarnick, U. ,

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Tauc, J. , T7

Taylor, T.A. , 1125 I.M. , Lll

336, T3, T4

Templeton, I.M. , Lll

Ten Seldam, C.A. , Mi:

Thomas, CO. , Kl, T8

„..., -.-.. , ...... Thomas, CO. , Kl, T8

Thomas, J.L. , T9

Thompson, B.A. , T10

Thornton, F.D., Til

Thornton, P.R. , T12

Thurmond, CD. , T13

Tillman, J.R. , 35

Tomchuk, P.M., D17, D18, D19, T14

Tomono, M. , T15

Trainor, A. , T16

Tramposch, R.F. , R13

Trofimenko, A. P. , B21

Trumbore, F.A., T17

Tufte, O.N., C12, T18 , T19

Tulk, A.S., T20

Turner, D.R. , T21

Turovskii, 3.M., T22, T23

Tzoar, N. , T2 4

Uchinokura, K. , T2

Uhlir, A. , Jr. , Ul

V_

Valdes, L.B. , VI, V2 , V3

Van der Pauw, L.J. , H26, V4, V5

,

V6

Van Eck, J. , M13

Vasil'yev, G.F. , V7

Vaughan, D.E. , V8

Vavilov, V.S., C14, V9

Verbra, A.I. , 35

Verma, J. K.D. , V10

Vernon, R.J. , B28

Vinetskii, R.M. , Vll

Vodop'yanov, L.K. , V12

Volchock, B.A. , V13

12
Wagrez, P. , 171 Ward, A.L. , W2

Wasscher, J.D., W3

Watelski, S.B. , B18

Weaver, F.W. , W4

Webb, J.K. , W5

Weingarten, I.R. , W6

Weinreich, O.A., R8

Weinstein, M. , W7

Weisberg, L.R. , W8

Weitz, S., J4, J5

Wenner, F. , W9

Wernick, J. II. , 119 Westbrook, J.H. , W10, Wll

Whitten, W.N. , Jr., W12

Wike, R. , Yl

Willardson, R.K. , D1U, RIO

Williams, CM. , 32

Williamson, J.B.P. , B24, G16

Wilson, B.L.H. , R14

Wintenberger, M. , W13, W14-

Wolfe, G.H. , W15

Woods, J.F. , W16

Wurst, E.C. , Jr. , W17

Yosim, S.J. , Yl

Yurkov, B. Ya. , V9

Zabara, M. Ya. , K8, K9

Zerbst, M. , HI 4

Zhukov, V.F. , K10, Kll

Zhuravlev, V.A. , Zl

Zimmerman, J.E., Z2

Zook, J.D. , C12

Zucker, J. , H12 , Z3

4. Bibliography

The bibliography is presented on the following pages.

The assistance provided by members of the Electron Devices Section,

especially Barbara Averitt, Frank H. Brewer and Eydon J. Swart zendruber,

in the preparation of the material for this Technical Note is gratefully

acknowledged.

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ffl o * U. S. GOVERNMENT PRINTING OFFICE : 1964

O - 746-427
ADDENDUM

to accompany

NBS TECHNICAL NOTE 232

Bibliography on the Measurement of Bulk Resistivity

of Semiconductor Materials for Electron Devices

Judson C. French

The following references, not included in the Bibliography,

should be noted. Reference (1) should be assigned the identification

number K4.1, added to the Index to Subject Matter under categories 3 and 7, and added to the Author Index following Keller, J.B. Reference

(2) should be assigned the identification number D16.1, added to the

Index to Subject Matter under category 2, and added to the Author Index

following Dunsmuir, R.

Reference 1:

W. Keller

Measurement of the Specific Resistance of Semiconductor Crystals Using

High Frequencies (In German)

Zeitschrift fllr angewandte Physik, vol. 11, p. 346, September, 1959

Several methods for the measurement of resistivity of semiconductor

materials using high frequency techniques are briefly reviewed. These

include an induced current method, a two-point (currentless voltage

probe) method, an oscillator method and a bridge method. A method is

then described in detail for measurements of rod-shaped samples in

which no contact is made to the silicon crystal. The crystal may be

wrapped in a protective material. Resistance is indicated by the degree

of damping of a tuned circuit which is capacitively coupled to the

sample. It is necessary to calibrate the measurement using crystals of

known resistivity.

Reference 2:

J. Dusek

Measurement of the Hall Coefficient and Electrical Conductivity in

Semiconductors by the Method of an Alternating Magnetic Field and

Alternating Current

Czechoslovak Journal of Physics, vol. 9, p. 250, 1959

A description is given of electronic equipment which enables the

simultaneous measurement of the Hall coefficient and the electrical con- ductivity by using a low frequency alternating magnetic field and alternating current. The instrument is adapted for measuring a minimum

Hall coefficient of 3 x 10" 11 Vcm/AG and electrical resistance 10~ 5

ft to 10 3 ft; the smallest measurable Hall voltage is lyV. Deviations from

the results obtained by the classical dc method do not exceed 5%.

Division 425.02

October 20, 1964

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