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Programs of the 

Manufacturing 

Engineering 

Laboratory 
i

March 2010
ii

Abstract

The National Institute of Standards and Technology’s 

Manufacturing Engineering Laboratory (MEL) promotes 

innovation and the competitiveness of U.S. 

manufacturing through measurement science, 

measurement services, and critical technical 

contributions to standards. This report contains 

highlights of MEL research programs and 

accomplishments from April 2008 through 

March 2010. 

Keywords

Manufacturing, manufacturing engineering, technology, 

measurements, metrology, standards

Disclaimer

Certain commercial equipment, instruments, or 

materials are identified in this report to specify the 

experimental procedure adequately. Such identification 

is not intended to imply recommendations or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or 

equipment identified are necessarily the best available 

for the purpose.

For More Information

Manufacturing Engineering Laboratory 

Stop 8200 

Gaithersburg, MD 20899-8200

Phone 301-975-3400

www.nist.gov/mel
iii

Table of Contents

A Message from the Acting Director ........................................................................................... 1

Manufacturing Engineering at a Glance..................................................................................... 3

Precision Engineering................................................................................................................. 7

Dimensional Metrology...................................................................................................... 12

Nanomanufacturing Metrology........................................................................................... 18

Next-Generation Nanometrology ....................................................................................... 26

Manufacturing Metrology ........................................................................................................ 35

Metrology for Advanced Optics.......................................................................................... 40

Measurements and Standards for Science-Based Manufacturing ......................................... 47

Mechanical Metrology ....................................................................................................... 57

Intelligent Systems................................................................................................................... 73

Intelligent Manufacturing Industrial Control Systems & Network Standards........................ 76

Intelligent Manufacturing Robotics and Automation Interoperability Standards................... 82

Measurement Science for Intelligent Manufacturing Robotics and Automation................... 89

Manufacturing Systems Integration........................................................................................ 105

Sustainable and Lifecycle Information-based Manufacturing ............................................ 108

Supply Chain Integration ................................................................................................. 122

Appendix................................................................................................................................ 129

Publications............................................................................................................................ 149
iv
1

A Message from the

Acting Director

The Manufacturing Engineering Laboratory (MEL) at the National Institute of Standards and Technology 

(NIST) is pleased to present summaries of its technical 

work covering March 2008 through February 2010. 

MEL’s mission is to promote innovation and the competitiveness of U.S. manufacturing through measurement 

science, measurement services, and critical technical 

contributions to standards. We do this by performing 

research and development, developing and providing 

needed measurement services, and providing technical 

contributions and leadership in standards activities. Our 

long-term goal is best summed up by the Laboratory’s 

core purpose — to promote a healthy U.S. manufacturing economy by solving tomorrow’s measurement and 

standards problems today.

The economic difficulties of the past two years have 

drawn attention to the central role that manufacturing 

plays in the US economy. The President’s Framework 

for Revitalizing American Manufacturing recognizes 

that “America’s manufacturers are at the heart of our 

country’s economy, providing good-paying jobs for 

millions of American families.” With a value-added 

contribution of $1.6 trillion, U.S. manufacturing — our 

customer base — directly accounts for approximately 

11.5 % of the U.S. gross domestic product. Dollar for 

dollar, manufacturing has the highest-leverage economic impact of all of the economic sectors. For every 

dollar of economic output produced by manufacturing, 

$1.40 of additional output is stimulated in the rest of 

the economy. As such, the ability of domestic manufacturers to innovate and compete is vital to all the other 

sectors of the economy. 

MEL brings to bear considerable resources in support of U.S. manufacturing, including dedicated staff 

and associates, and numerous unique facilities. MEL 

staff competencies span a broad range of technical 

disciplines, reflecting the multidisciplinary nature of 

manufacturing engineering, and have the manufacturing domain expertise needed to understand and address 

manufacturers’ measurement and standards challenges. 

The pages that follow provide an opportunity to learn 

more about MEL’s programs and capabilities, and how 

they are applied to solve critical industry problems.

MEL serves the manufacturing sector of the U.S. 

economy in a broad sense, working with partners from 

industry as well as other government agencies and academia to develop the measurement tools and infrastructure that enable new products, higher productivity, and 

improved processes. Our customers span the full range 

from established to emerging-technology industries 

— including automotive, aerospace, construction and 

agricultural equipment, medical devices, microelectronics, optics, telecommunications, and nanotechnology. 

MEL also provides mechanical design and fabrication 

services to other NIST operating units through its stewardship of the Fabrication Technology Division.
2

Nearly all of the nation’s manufacturers rely on MEL in 

some way, and we design our programs, in consonance 

with our mission, to respond to manufacturing’s most 

critical current and future needs. Working collaboratively with our external partners, MEL staff members 

solve measurement and standards problems that allow 

our customers to overcome barriers to product and 

process innovation, to seamlessly and accurately share 

manufacturing information, and to take full advantage 

of the latest technologies essential to their competitiveness and mission success. In the last two years, we 

have placed increasing emphasis on research in areas of 

increasing strategic and tactical interest to our constituency: sustainable manufacturing, next generation robotics, in-process dimensional metrology, and additive 

manufacturing. A key strategy in many of our activities 

is to use performance metrics and performance-based 

standards as a means to catalyze innovation. Our customers also depend on MEL calibration services to meet 

their most challenging mechanical and dimensional 

measurement needs for research, development — and 

the requirements of the modern extended enterprise in 

commerce, and international trade.

This document will give you a sense of the challenges 

faced by U.S. manufacturers in areas related to the 

MEL mission, and how we are addressing them. As you 

review our portfolio of technical activities, we invite 

your comments and questions, we welcome opportunities to collaborate, and we thank you for your interest in 

our work.

Howard Harary

Acting Director

Manufacturing Engineering Laboratory

National Institute of Standards and Technology

Gaithersburg, Maryland 20899

Howard.Harary@NIST.gov

301 975 3401
3

MEL Mission

MEL promotes innovation and the competitiveness of 

U.S. manufacturing through measurement science, 

measurement services, and critical technical 

contributions to standards 

MEL Vision

MEL will be the world leader in creating critical 

measurement solutions and promoting technically 

rigorous, equitable standards to stimulate innovation 

and foster U.S. manufacturing competitiveness

MEL Core Purpose

To promote a healthy U.S. manufacturing

economy by solving tomorrow’s measurement 

and standards problems today

MEL Divisions

Precision Engineering

Provides the foundation for dimensional 

measurements over 12 orders of magnitude 

Manufacturing Metrology 

Fulfills mechanical metrology and advanced 

manufacturing technology measurements and 

standards needs

Intelligent Systems 

Provides the measurement and standards 

infrastructure needed for the application of 

intelligent systems 

Manufacturing Systems Integration

Develops and applies measurements and standards 

that advance the use of information-based 

manufacturing technologies

Fabrication Technology

Provides world-class instrument and specialized 

fabrication support for NIST researchers

Measurement Service Areas

•	 Length 

•	 Diameter and Roundness 

•	 Complex Dimensional Standards 

•	 Optical Reference Plane Standards 

•	 Angular Measurements 

•	 Surface Texture 

•	 Laser Frequency/Wavelength and Ranging 

•	 Mass Standards 

•	 Force 

•	 Vibration 

•	 Acoustics

MEL Resources

Staff 

•	 171 Full-time permanent 

•	 99 Guest Researchers

•	 2 NRC postdoctoral researchers

Funding 

$48.7 M annual budget 

(FY2010 estimated, excludes Shops)

•	 $35.5 M NIST Appropriations

•	 $7.1 M Other Agency/External R&D

•	 $4.8 M Calibration service fees/Reimbursable 

Facilities and Testbeds

•	 M-48 Coordinate Measuring Machine Laboratory

•	 60-meter Laser & Artifact Calibration Range

•	 Next-Generation Nanometrology 

Laboratories

•	 Mass Metrology and Standards Facility

•	 Force Metrology Laboratories

•	 Small Force Metrology Laboratory 

•	 Smart Machining And Machine Tool 

Interoperability Testbed

•	 Dimensional Metrology Interoperability Testbed 

•	 Industrial Control Networking and 

Cybersecurity Testbed

•	 Industrial Robotics Measurement 

Science Testbed

•	 Advanced Manufacturing Systems And Networking 

Testbed (AMSANT) and Simulation Laboratories

Technical Specialities

Manufacturing 

Enginee MELring at a Glance

www.nist.gov/mel
4

MEL American Recovery and Reinvestment Act (ARRA) 

Equipment and Facility Investments

The American Recovery and Reinvestment Act (ARRA) provides funding to MEL for high value research, measurement, and production equipment, and funding for a Robot Test Facility, to better meet our 

customers’ current and future needs. The table below presents a summary of MEL equipment to be 

procured with ARRA funds.

Item Division Purpose

Critical Dimension 

Atomic Force 

Microscope (CD-AFM)

PED Provide reference linewidth measurements with 1 nm uncertainty. The instrument 

will replace an earlier generation CD-AFM, with improved uncertainty to meet 

increasingly demanding industry needs.

Atom Metrology 

Scanning Electron 

Microscope

PED Provide 3D traceable metrology in the 10 mm to 10 nm range for nano-, nano-bioand integrated circuit technology measurements and standards calibrations.

Line Scale InterferometerPED Ensure continued and improved calibration of fundamental macro-scale artifacts 

that are critical to manufacturing quality control, such as graduated length scales 

and lithographic grids. The nearly 50 year-old instrument used to support these 

high-impact calibrations of industry fundamental length standards has exceeded its 

life expectancy, has become unsupportable, and likely will fail completely in the 

near future.

Calibrated Atomic 

Force Microscope

PED Provide fundamental nanoscale length metrology, especially, pitch and step height, 

for customers in the semiconductor manufacturing, optics and photonics, data storage, and biomedical industries among others. Capabilities include 300 mm wafer 

capacity (upgradeable), tip characterization, image stitching, and dimensional 

aspects of material characterization, required for both our external and NIST-internal customers.

Large Mass Standards MMD Enhance reliability of the realization/dissemination of the SI unit of Mass at the 

large scales (11.12 kN [2500 lb], 44.48 kN [10,000 lb] and 88.97 kN [20,000 

lb])). New stainless steel standards will significantly reduce the current Type B 

uncertainty measurements related to material properties so that NIST large mass 

calibration services continue to meet performance demands for the U.S. military, 

nuclear power industry, aerospace companies, and the State Weights and Measures 

Laboratories that disseminate the unit of mass throughout the country.

Metal-based Additive Manufacturing 

System

MMD/FTD Serve as a testbed for research on emerging metal-based additive manufacturing 

processes. The research will address measurement and standards barriers to the 

adoption of these processes by U.S. manufacturers to improve innovation and competitiveness, and the development and application of metrology tools for sciencebased process improvement.

Micro-wire and EDM 

Machines

FTD Ultra-precision CNC Wire EDM Machine to fabricate parts for Nanomanufacturing 

and Nanometrology programs (0.03 - 0.01 mm feature sizes)

CNC Vertical and 

Horizontal Milling 

Machines

FTD CNC Mills to replace aging manual mills in Contact Shops and Main Shop

CNC Long-bed and 

Tool Room Lathes

FTD Large Long-bed CNC Lathe to replace aging manual 15” (0.381 m) chuck lathe in 

Main Shop; Tool Room Lathes 10” ( 0.254 m) dia capacity to replace aging manual 

lathes in Shop

5-axis CNC 

Machining Center

FTD Ultra-precision 5-axis CNC Machining Center to fabricate complex contoured parts
5

The new NIST Robot Test Facility will be a unique national resource for testing and improving the performance of robots used in search-and-rescue, law enforcement, and homeland and national defense missions. The facility is 

intended to replace existing test facilities that are currently housed on a decommissioned Nike defensive missile site 

near the main NIST campus. The 650 m2 to 762 m2 facility is to include areas for robot test methods and artifacts, 

development and fabrication, and briefings and test administration. The supported projects facilitate manufacturing 

and deployment of advanced robotic capabilities through standard performance test methods, measurement services, 

and safety and training guidelines. These efforts are largely funded by other federal agency sponsors, and they have 

important synergies with MEL’s manufacturing robotics work.

NIST Robot Test Facility Elevations and Floor Plan

7

Providing the foundation of dimensional measurement that 

meets the needs of the U.S. industrial and scientific communities

Precision Engineering

The Precision Engineering Division (PED) is one of five divisions of the Manufacturing Engineering Laboratory (MEL) at the National Institute of Standards and Technology (NIST). PED 

provides the United States with the foundation for dimensional measurements ranging over 

twelve orders of magnitude (from kilometers to nanometers). PED establishes both artifact and 

documentary standards through research, development, measurement services, and information dissemination. PED also conducts infrastructural research and development in precision 

engineered length-metrology-intensive systems in instrumentation for both measurement and 

production.

PED delivers to industry important length-related measurements, standards, and technology 

services that directly support U.S. manufacturing’s products and processes. These standards 

are measured by a whole array of instrumentation ranging from atomic force microscopes 

(AFM) to conventional and frameless coordinate measuring machines (CMM) using 

contact, particle beam and optical measuring probes, machines, and systems. Features 

of interest range in size from one kilometer (calibrated telecommunication cables) to 

meters (laser trackers) to nanometers (critical dimension metrology instruments and 

nanoparticle dimensional metrology).

Chief: 

Michael Postek

NIST

100 Bureau Drive 

Stop 8210

Gaithersburg, MD 

20899-8210

Phone: 301 975 2299

Fax: 301 869 0822

Email:

michael.postek@nist.gov
8

Mission

The mission of the Precision Engineering Division is to provide the foundation of dimensional measurement that meets the needs of the U.S. industrial and 

scientific communities. The division attains that goal by: 

•	 Conducting research in dimensional measurements 

•	 Developing new measurement methods

•	 Providing measurement services

•	 Developing National and International artifact and 

documentary standards

•	 Disseminating the resulting technology and lengthbased standards

It is also within the mission of the Precision Engineering 

Division to provide dimensional metrology assistance to 

other federal government agencies to address problems 

and needs that leverage NIST expertise, facilities, and 

capabilities.

Overview

PED is committed to developing the metrology needed to support U. S. manufacturing and has 

been instrumental in the development of instrumentation, metrology and standards especially for the semiconductor, automotive and aerospace industries. PED is 

also a primary partner in the development of the needed 

metrology for the Department of Defense and many 

other agencies. PED has also been a strong contributor 

to the National Nanotechnology Initiative (NNI). The 

continual push of the semiconductor industry to smaller 

and smaller gate structures has also pushed PED to ever 

improving nanoscale measurements and standards and a 

drive to encourage instrument manufacturers for higher 

performance. This has strategically positioned PED for 

leadership in the development of accurate metrology 

for nanotechnology and nanomanufacturing. Thus, for 

over a decade, the Manufacturing Engineering Laboratory and the Precision Engineering Division have been 

deeply involved in the development of metrology for the 

nascent nanomanufacturing industry (Lyons and Postek, 

2009).1

1 Lyons, K., and Postek, M. T. 2009. Historic commitment of the 

NIST Manufacturing Engineering Laboratory to nanomanufacturing and nanometrology. SPIE Proceedings. Proc. SPIE 7405 

740503-1 – 740503-18.

The Precision Engineering Division (821.00) is broken 

into four managerial units or groups and these are:

•	 Large-Scale Coordinate Metrology Group (821.11) 

Supports the Division’s mission with a concentration 

on measurements of one meter or larger. For example, 

measurements are made by coordinate measuring 

machines and frameless coordinate length-metrology 

systems. These measurements involve mechanicalprobe, laser-ranging, theodolite, and related interferometric systems. 

•	 Engineering Metrology Group (821.12) 

Supports the Division’s mission with a concentration 

on measurements of one millimeter to one meter. 

These measurements are often of complex shape, such 

as turbine blades, threaded fasteners, and gears. Measurements are made by general and special-purpose 

feature and coordinate measuring systems. 

•	 Surface and Microform Metrology Group (821.13) 

Supports the Division’s mission with a concentration 

on measurements of one micrometer to one millimeter 

where surface roughness and microform are critical. 

Measurements are made by tunneling microscopes, 

mechanical profilometry, phase-measuring interferometry and related techniques. 

•	 Nanoscale Metrology Group (821.14) 

Supports the Division’s mission with a concentration 

on dimensional measurements of one nanometer to 

one micrometer. Measurements are made by tunneling, atomic-force, electron, ion, and visible- and 

ultraviolet-light microscopies. The group places special emphasis on satisfying the advanced needs of U.S. 

microelectronic manufacturing industries. 

MEL/PED Programs. Noting that the talents of workers within one group are valuable in cross divisional 

and even cross laboratory collaborations, the Precision 

Engineering Division has developed three programs to 

best utilize the talents of its personnel and thus meet 

its mission with maximum effectiveness. These three 

programs are:

•	 Dimensional Metrology 

•	 Nanomanufacturing Metrology

•	 Next-Generation Nanometrology 
9

Core competencies and Industry Drivers. The core 

competencies of the PED Programs reside in measurement science and rigorous traceability in the mechanical, dimensional, and nanomanufacturing domains. The 

ability to understand and develop a measure of measurement uncertainty for the development of accurate 

dimensional metrology is a core competency unparalleled in the world.

The work of the three programs is strongly influenced by 

industrial drivers that reflect important trends in manufacturing, especially:

•	 Increased Pace of Technological Change. 

•	 Rapid innovation in 

many emerging areas, 

especially nanotechnology

•	 Need for improved 

measurement accuracy and precision

•	 Requirement for new 

and more complex 

measurements

•	 Globalization

•	 Flat-world2 supply 

chains require measurement traceability 

to the International 

System of Units (SI, from Systeme International 

d’Unités)

•	 Greater regulatory requirements

•	 Harmonization of international standards that 

reflect and support U.S. needs

The implications of these drivers for PED include:

•	 Technology Change, generating demand for new 

metrologies 

•	 Globalization, leading to increased dependence on 

traceable measurements and international documentary standards

•	 Globalization, requiring integration and harmonization between formerly separate industry sectors, each 

with entrenched practices and terminologies (this is 

especially true for nanotechnology)

2 “The World is Flat” by Thomas L. Friedman. columnist at The 

New York Times

 Staffing Challenges

One of the main challenges confronting PED continues to be a “graying” of the highly trained and 

specialized metrology workforce. This, coupled with 

reduced budget, limits the ability to train replacements 

in place. As a result, the contractor labor pool has grown 

while the Federal staff-to-contractor ratio continues to 

fall. Additionally, trained contractors can readily leave 

NIST, taking their training and experience to outside 

companies, further exacerbating the problem. In addition, 

contracting a workforce is only a 

partial solution since intellectual 

property (IP) issues and government regulations can restrain 

a contractor from working on 

particular projects.

PED is also facing a steadily 

decreasing technician-to-professional ratio, again for budgetary 

reasons. The complexity of the 

highly specialized metrology 

instrumentation within PED 

(helium ion microscope, scanning electron microscopes, etc.) 

requires dedicated instrument 

technical professionals to operate 

and maintain the instrumentation 

at the high levels demanded by 

the metrologies.

Facilities and Equipment

PED was fortunate in obtaining about $5 M of the 

American Reinvestment and Recovery Act (AARA) funds 

provided to NIST for the procurement of new stateof-the-art equipment. These funds are being used to 

purchase the following equipment:

•	 New Linescale Interferometer (LSI) –The current LSI 

has proven world class performance in recent international intercomparisons, but is a 50-year-old instrument with fragile and fail-susceptible sub-systems that 

is in urgent need of replacement. The new LSI will 

be operated in parallel with the existing LSI for a few 

years to ensure continuity in the measurement control 

history.

•	 New Calibrated Atomic Force Microscope (AFM) – 

The new Traceable AFM (T-AFM) will provide funResources

Staff

•	 35 permanent NIST staff 

•	 1 NRC post-doctoral researcher

•	 22 Guest Researchers

FY2010 Estimated Funding

•	 $9.2 M STRS (excluding Innovation in 

Measurement Science)

•	 $0.6 M NIST Innovation in 

Measurement Science

•	 $1.0 M Reimbursable

(calibration services)

•	 $1.9 M Other Agency
10

damental traceable nanoscale length metrology for 

customers in industries such as semiconductor manufacturing, optics and photonics, data storage, and 

biomedical among others. It will be used to measure 

height, pitch, surface roughness, line width roughness 

(top down), and other nanoscale features found on 

technologically relevant surfaces. The instrument will 

be traceable to the SI meter in all three axes. 

•	 New Critical-Dimension (CD) AFM - This new instrument, will act as a reference for a wide variety of 

measurements in semiconductor dimensional metrology, and will be calibrated to have traceability to 

the definition of the meter through the use of atomic 

lattice based techniques. 

•	 New Atomic Resolution Particle Beam Instrument - 

The state-of-the-art instrument, combined with the 

sophisticated imaging methodology and metrology 

expertise within PED, will give us unique capabilities 

for characterizing and measuring nanometer-sized 

objects and features, unequaled anywhere in the 

world, and very necessary for the advancement of 

nanoscience and nanotechnology. 

These instruments remain in the procurement cycle and 

once contracts are released, renovation of appropriate 

space within the NIST Advanced Measurement Laboratory (AML) will begin.

Current Equipment and 

Facilities include:

More extensive equipment descriptions are included in 

the PED materials provided.

Building 220

•	 World class 60 meter laser & artifact calibration range. 

•	 Large scale coordinate metrology laboratory. 

•	 LineScale Interferometer. 

•	 Optical Tweezers 

Building 219

•	 World’s most accurate coordinate measuring machine

•	 World-class roundness measuring machine 

•	 Laser frequency / wavelength laboratory

•	 Molecular Measuring Machine

•	 Five chamber atomic resolution Ultra-High Vacuum 

Scanning Tunneling Microscope (UHV STM) with 

picometer resolution interferometry 

•	 Highest resolution 193 nm wavelength fully custom 

scatterfield optical microscope 

•	 High resolution Variable Pressure scanning electron 

microscope (SEM) Reference Measurement System

•	 World’s most accurate Microform Calibration System 

for Rockwell Hardness Standardization 

•	 A Unique NIST 2D and 3D Ballistics Signature Measurement and Correlation System 

Building 218

•	 Calibrated Atomic Force Microscope (AFM). Custombuilt AFM with active interferometer-based metrology 

on X and Y axes, and in situ interferometer calibrated 

capacitance gage on Z axis 

Building 217

•	 World’s First Commercial Helium Ion Microscope 

•	 High resolution Cold Field Emission scanning transmission electron microscope (STEM) / SEM 

•	 High-resolution dual beam Focused-ion Beam (FIB) 

and SEM with laser interferometer stage

•	 World’s first scatterfield optical microscope with demonstrated sub-nanometer resolution 

•	 Optical overlay microscope Instrument 

•	 Ultraviolet (UV) Transmission Microscope 
11

Facilities and Equipment Challenges

PED is continually challenged by its customers to develop metrology solutions that go beyond current 

capabilities. One of the most demanding customers 

has been the semiconductor industry, which has been 

pushing the metrology envelope for many years via the 

International Technology Roadmap for Semiconductors 

(ITRS). Meeting the semiconductor industry’s needs gave 

PED a head start when the emphasis on nanotechnology 

became apparent because PED had already been developing methodologies and performing measurements at 

the sub-100 nanometer scale. Hence, basic infrastructural technologies were already in place to support the 

metrology. PED’s work has been facilitated by the new 

laboratories now residing in the Advanced Measurement 

Laboratory and the procurement and future delivery of 

the AARA equipment.

PED Advanced Measurement Laboratory (AML) Facilities. Over 20 years ago, PED proposed to NIST management a vision for an advanced measurement laboratory 

with stringent environmental controls to meet the future 

metrology needs of the United States. This facility has 

now been built and most of PED’s metrology equipment 

has been installed there. Numerous metrology experiments have experienced a wide variety of improvements 

through this move. For example, in the new scanning 

electron microscope reference measurement instrument 

laboratory, site surveys by the instrument manufacturer 

prior to the microscope’s installation found no measurable vibration. The instrument manufacturer’s Applications Laboratory representative was quoted as saying 

that “there is no environmental excuse we can use in 

this laboratory to blame for poor performance of our 

instrument.” In all cases, improved performance of the 

metrology instruments has been documented.

Safety

Since the last panel visit, NIST has undergone a massive safety campaign. Although safety in PED 

has always been excellent and no major incidents have 

occurred, PED management has undertaken hazard 

reviews of all of the laboratories and upgraded the safety 

procedures throughout. All of the managers within PED 

have been trained in Occupational Safety and Health 

Administration (OSHA) 6000 procedures, a Division 

Safety Officer has been identified and the staff has 

received safety training as needed for the type of work 

being done (i.e., laser safety, confined space training, 

crane safety, etc.)

193 nm Scatterfield microscope
12

PED Program

Dimensional Metrology

Addressing selected needs in dimensional metrology over length scales ranging from 

micrometers to kilometers. This includes calibrations of measuring instruments such 

as laser interferometers and laser trackers, a wide array of engineering gauges, standard reference materials, and specialized measurements, e.g., high accuracy coordinate measuring machines (CMMs). The program also provides expertise and representation of U. S. interests in national and international standards committees. The DMP 

frequently provides metrology expertise to other government agencies including The 

Department of Defense (DOD), Department of Energy (DOE), National Aeronautics 

and Space Administration (NASA), and National Institute of Justice (NIJ).

Staff

18.5 NIST staff

5.5 Guest researchers / Contractors 

22.5 Total FTEs 

Challenge

To promote innovation and enhance U.S. productivity by optimizing MEL’s dimensional metrology portfolio 

to take advantage of advances in information, computational, and optoelectronic measurement technology for 

high accuracy dimensional metrology.

Technical Strategies

The DMP focuses on developing dimensional measurement infrastructure to support significant 

improvements in U.S. productivity. In particular, the 

Dimensional Metrology program (DMP) targets building 

new measurement capability for enabling technologies 

and high value products in which the U.S. has a significant industrial presence. Selected national and international standards, particularly in emerging technologies, 

are aggressively supported to promote international 

trade, foster innovation, and reduce manufacturing 

costs. The program also strives to increase the leverage 

of NIST’s measurements through deep penetration of its 

measurements into the U.S. metrology chain. 

Selected Results 

and Impacts

•	 Implemented a comprehensive quality system for all 

PED dimensional calibrations resulting in conformity 

with international accreditation practices. 

•	 Developed the NIST micro-feature probe that provides 

the most accurate dimensional measurement of features in the 50 mm to 100 mm size range in the world. 

•	 Harmonized the U.S. with the ISO standards for 

coordinate measuring machines by producing major 

revisions to both documents resulting in lower costs to 

U.S. manufacturing companies. 
13

Publications 

Muralikrishnan B., Stone J., Stoup J., Area measurement 

of knife-edge and cylindrical apertures using ultra-low 

force contact fiber probe on a CMM, Metrologia 45 

281-289, 2008

Phillips, S.D., Krystek, M., Shakarji, C., and Summerhays, K., 2009. Three-Dimensional Imaging Metrology: 

Dimensional measurement traceability of 3D imaging data, Proceedings of the SPIE, Volume 7239, pp. 

72390E-72390E-7.

J. Song, T. Vorburger, S. Ballou, T. Renegar, A. Zheng, 

and M. Ols, “Traceability for Ballistics Signature Measurements in Forensic Science,” Journal of Measurement, DOI 10.1016/j.measurement.2009.

Contact Information:

Steven Phillips, Program Manager

301-975-3565

steven.phillips@nist.gov

Selected Staff Recognition 

Board Memberships

Staff Board Memberships

S.D. Phillips Board of the North American Coordinate Metrology 

Association 

S.D. Phillips Board for U.S. Standard Technical Advisory Group

Leadership

Staff Leadership

S.D. Phillips and C. Shakarji DOC Gold Medal, for leadership in 

international standards

Excellence

Staff Excellence

J. Stone DOC Silver Medal, for development of the NIST 

microfeature CMM probe 

D. Sawyer and C. Shakarji NIST Bronze Medal, for the design and fabrication of an 

operating room computer assisted orthopedic hip surgery 

artifact

S.D. Phillips and W.T. Estler 2009. ASME’s Certificate of Achievement” for outstanding 

national standards work

S. D. Phillips, W. T. Estler, B. R. Borchardt, 

C. Blackburn, D.S. Sawyer

 The NIST Judson C. French Award, for significant 

improvements in accuracy and extensions of range in 

the calibration of long length standards
14

Dimensional Metrology Projects

Ongoing Reimbursable 

Dimensional Calibrations 

and Quality System

Challenge/Problem Addressed 

U.S. industries that involve dimensional metrology rely on NIST to provide state of the art high accuracy calibrations in order to maintain the measurement 

traceability and international competitiveness. To assure 

the international acceptance of NIST measurements, 

NIST has developed a Quality System based on the ISO 

17025 Standard. 

Project Objective 

Provide industry high accuracy dimensional measurements within an internationally accepted quality 

system. DMP measurements are targeted to provide 

measurement results that are either of very high value 

to our customers or high leverage into the industrial 

metrology community, i.e. a single calibration may 

propagate into hundreds or thousands of subsequent 

measurement results. 

Impact/Benefits

DMP delivered calibrations have very high market penetration, for example, master tapes calibrated at 

NIST control the millions of measuring tapes produced 

in the U.S. each year. Similarly, each NIST gauge block 

calibration explicitly controls – as cited by calibration 

report numbers – a thousand subsequent gauge block 

calibrations performed in industrial laboratories. The 

new, more flexible capability of the Moore M48 CMM 

has performed high value calibrations including cylinders for the Calculable Capacitor (NIST), alignment 

fixtures for the James Webb Telescope (NASA) and a 

triple retroreflector for the SIMlite Astrometric Observatory (NASA).

Customers & Collaborators

DMP calibrations serve a wide range of industries 

including high end calibration laboratories, gauge 

and instrument manufactures, aerospace and defense 

contractors, and federal and state governments. In the 

period of FY2005 to FY2009 the DMP provided dimensional measurement services to 360 different industrial customers and 25 government entities. The DMP 

calibrates over 5,000 master gauges, instruments, and 

artifacts per year with gross revenues of approximately 

$0.8 M per year. 

Measurement of API Rotary Master Gauge on CMM
15

Improvements in 

Calibrations and 

Uncertainty Evaluation

Challenge/Problem Addressed

Practical access to the International System of Units (SI) unit of length for U.S. manufactures requires 

continuous upgrades to the DMP dimensional calibrations through reduced uncertainty, greater throughput, 

and new measurands. 

Project Objective

Provide industry with higher accuracy dimensional calibrations and more technologically relevant calibrations to enhance U.S. productivity and quality. 

Impact/Benefits

New measurement capabilities and improved measurement uncertainties are listed below:

•	 Acquired UMAP multi-sensor Coordinate Measuring 

Machine (CMM) that extends range of small feature 

calibration below 50 μm to provide microfeature calibration capability, 2009

•	 The second Moore M48 CMM was installed in the 

AML and is currently being error mapped. It will provide new video based calibration capability; 2010 

Customers

Our industrial calibration customers and the general 

metrology community will benefit from improvements 

in theoretical infrastructure and the new measurement 

capabilities provided by extensions and improvements 

in the GUM and related uncertainty standards. 

Collaborators include

Michigan Metrology, Detroit, MI; Taylor Hobson, Chicago, IL;Veeco Metrology, Tucson, AZ; Zygo Corporation, Middlefield, CT; national and international standards laboratories and standard committees.

Optical Comb and 

Refractometry

Challenge/Problem Addressed

Measurement accuracy originates with the realization of the SI meter and this project will allow 

the PED to more accurately and compressively realize 

the meter. A better determination of the refractive index 

of air will enable more accurate laser wavelength (in 

air) measurements (or calculations), which is the basic 

limitation on the accuracy of interferometric length measurement. Additionally, this will also help determine the 

wavelength of lasers that do not operate at the usual red 

wavelength, satisfy the needs of multicolor interferometry, and enable new, novel measurement systems. 

Project Objective

Advancing the realization of the meter through the use of absolute refractometry to achieve below one 

part in 108 accuracy. Realization of practical frequency 

standards from the comb are expected by 2011.

Impact/Benefits

I

t is anticipated that deployment of the refractometer 

into other PED calibration instruments, including the 

Moore M48 CMMs, will reduce the measurement uncertainty associated with the interferometry to a negligible 

contribution, in contrast to it being a major uncertainty 

source in the current systems. The second goal of this 

project is the practical realization of extremely high 

accuracy optical reference source can be created in a 

manner that can be realized in industry. 

Customers

The optical comb will serve internal needs as the top of the traceability chain in PED. There are both 

internal and external (e.g., DOD) needs for calibration at 543 nm, and the multicolor capabilities of the 

comb will fulfill this need. State-of-art refractive index 

measurements will be needed to meet future industrial 

needs, particularly for the semiconductor industry where 

refractive index corrections limit our ability to deliver 

measurements of the highest accuracy. 
16

MicroFeature Calibration 

Development

Challenge/Problem Addressed

Micro-parts are becoming increasingly important to our economy, but systems for their measurement 

are still in their infancy. 

Project Objective

Develop multiple approaches for high accuracy measurements of small features (1 mm to 50 μm). 

Impact/Benefits

The new capabilities have opened up entirely new industries as customers. We have made high accuracy 

measurements on small nozzles and fuel injectors, center hole of fiber ferrules, very small volume standards, 

Lithography, Electroplating, and Molding or Lithographie, Galvanoformung, Abformung (LIGA -produced 

gears, areas of knife edge apertures, and many other 

artifacts. Measurements of the holes in fuel injectors 

make it possible to carefully quantify the errors associated with current measurement techniques (e.g., X-ray 

tomography). Our measurements of knife-edge apertures 

are the most accurate in the world, providing a path 

toward improved radiometry standards. Measurements 

of micro-pivots help to elucidate how form relates to 

function. Some fiber-probe measurements are illustrated 

in the section below. 

Customers & Collaborators

The most immediate need is for measurement of advanced fuel injectors from manufacturers of internal 

combustion engines. NIST has also received requests for 

measurements of micro-optical switching components 

that we could not perform previously but now have 

suitable capability; more generally, we hope to serve the 

needs of the telecom industry or other users of fiberbased micro-optical components. This work was done 

in collaboration with: WT&T; Canada (fiber optics); 

InsituTec; Charlotte NC (CMM probes); MSP Corp Shoreview, MN (small holes); University of Hartford (probes); 

Optical Technology Division, NIST (knife-edge apertures); Mitutoyo of America (UMAP); DOE (fuel cells); 

Ceramics Division at NIST (Wolfgang Haller)

Complex Geometry 

Instrumentation and 

Standards

Challenge/Problem Addressed

Complex surfaces are increasingly employed in manufacturing, especially for large components. 

The U.S. is a major supplier of technologies that meet 

this need; these systems include laser trackers, LADAR 

(Laser Detection and Ranging), and CMMs used laser 

probes. Currently there are few calibration facilities and 

no national or international standards for this class of 

metrology instruments. 

Project Objective

Provide access to high accuracy calibrations, artifacts, research facilities, and documentary standards, applicable to large scale complex geometry 

instrumentation. 

Impact/Benefits 

•	 Completed both the International Standard on coordinate metrology ISO 10360.2 (2009) and harmonized 

the U.S. with the international community by the 

development and publication of ASME B89.4.10360-2 

(2008) Acceptance test and re-verification test for 

coordinate measuring machines (CMMs)

•	 First official NIST laser tracker calibration per the 

ASME B89.4.19 standard, 2009

•	 First official NIST articulated arm CMM calibration per 

ASME B89.4.22, 2009.

Customers & Collaborators

The target customers of this project are instrumentation companies that are developing new scanning 

technology and need access to calibration facilities to 

determine their actual measurement errors and thus 

enable improvements in the technology. Collaborators 

include: FARO Technologies, Kennett Square PA; The 

Boeing Company; Seattle, WA; Automated Precision 

Inc, Gaithersburg MD; QuantaPoint Inc, Pittsburgh, PA; 

Metris Inc., Manassas, VA
17

Micrometer level Surface 

Finish Metrology 

Challenge/Problem Addressed

U.S. manufacturing needs improved speed, resolution, and accuracy of surface finish measurements 

to enable improved productivity. Criminologists need 

a traceability system for optical inspection devices of 

bullets and casings in crime laboratories according to 

recently developed guidelines of the American Society 

of Crime Laboratory Directors (ASCLD). 

Project Objective

Provide optical three-dimensional surface topography measurement at the micrometer level. Applications 

include the traceable measurement of topography of 

bullets and casings in crime labs, where the fine individual characteristics that produce positive identification 

of individual weapons need to be separated from longer 

scale characteristics of overall shape. 

Impact/Benefits 

•	 The NIST Report, Surface Topography Analysis for a 

Feasibility Assessment of a National Ballistics Imaging 

Database, was heavily cited by the National Academies in their publication, entitled Ballistic Imaging, 

one of the reports leading to a substantial ongoing reevaluation of the use of firearms evidence from fired 

bullets and casings; 2008. 

•	 The On-line Surface Metrology Algorithm Testing System has received thousands of hits by users and has 

been used in an international comparison of Surface 

Metrology Software, recently published by NPL (UK). 

Customers & Collaborators

National and local forensic laboratories such as the National Laboratory Center of the Bureau of 

Alcohol, Tobacco, Firearms and Explosives, and the Central Laboratory of Federal Bureau of Investigation; the 

local ATF, FBI and police laboratories and the National 

Integrated Ballistics Information Network including 250 

forensic laboratories nationwide; International customers include the Federal Criminal Police Office in Germany, the FTI (Forensic Technology Inc.) in Canada and 

a private company (Spzoocenzin Co.) in Poland. 
18

PED Program

Nanomanufacturing Metrology

Advance U.S. leadership in nanomanufacturing through the development of physical 

standards traceable to the International System of Units (SI) and through the development of physics-based models and calibration techniques that enable accurate determination of dimensional information.

Staff

11 NIST Staff

6.5 Guest Researchers/Contractors 

17.5 Total FTEs 

Challenge

Provide the calibration techniques and artifacts that realize the Système International 

d’unités (SI) definition of the meter 

to meet the most demanding 

nanoscale industrial needs.

Technical 

Strategy

The program aims to provide industry with accurate and timely dimensional scale 

metrology at the nanoscale to enhance U.S. productivity and innovation. Fundamental to this objective is meeting the current and anticipated one and two 

dimensional scale calibration and the SI dimensional 

traceability requirements for improved yield and product 

qualification for the constantly evolving nanomanufacturing industry. The fundamental goals for this objective 

are to provide accessibility to the SI unit of length to the 

nanomanufacturing industries, such as semiconductor 

manufacturing, data storage, and photonics, by means 

of reference metrology instruments and calibration 

standards that are compatible with industry metrology 

instrumentation. 

Selected Results 

and Impacts

•	 C-AFM used extensively in international comparisons. 

NIST participated in an international round robin 

of two dimensional pitch measurements using the 

C-AFM. Two gratings – 1000 nm and 290 nm pitch – 

were measured. Commenced tri-lateral comparison 

of pitch measurements with A-Star (Singapore) and 

a commercial standards supplier (ASM) also 

completed.

•	 Developed two Reference Metrology 

Scanning Electron Microscopes (SEMs) 

equipped with laser interferometry, 

ready for traceable calibrations of 

masks, wafers and other samples 

and characterized all important SEM parameters to 

minimize measurement 

uncertainty. 
19

Selected Publications

Attota, R., Germer, T., and Silver, R.M., “Nanoscale 

measurements with a through-focus scanning optical 

microscope”, Future Fab, 30, 2009 p. 83-88.

Silver, R.M., Barnes, B., Attota, R., Jun, J., Stocker, M., 

Marx, E., and Patrick, H., “Scatterfield Microscopy to 

Extend the Limits of Image-based Optical Metrology,” 

Applied Optics, Vol. 46, 2007, p. 4248-4257.

Contact Information:

Richard Silver, Program Manager

Group Leader, Surface and Microform Metrology

Bldg. 220, A119

Gaithersburg MD

301-975-5609

richard.silver@nist.gov

Selected Staff Recognition

Board Memberships

Staff Board Memberships

Richard Silver SPIE Advanced Lithography Executive Committee, 

2006-2010

James Potzick SEMI Standards Microlithography Committee

Leadership 

Staff Leadership

Richard Silver SPIE Advanced Lithography, Organizing committee, 

2001-2008

Ronald Dixson Chair of ISO/TC201/SC9/SG3

Excellence

Staff Excellence

Richard Silver Elected Fellow of SPIE, 2008

Richard Silver, James Potzick, and Ravikirran Attota 2008 Dept of Commerce Silver Medal for advances 

in optics
20

Nanomanufacturing Metrology 

Projects

Optical Linescale Metrology

Challenge/problem Addressed

The cornerstone of traceability for the SI Unit of length (the meter) is the Linescale Interferometer 

(LSI) that provides world-class one-dimensional scale 

calibrations traceable to the SI. The LSI performance is 

verified by international intercomparisons, where it consistently performs as one of the top instruments in the 

world. This facility provides calibrations for customers in 

the nanomanufacturing industry, such as major metrology tool suppliers. It is also the traceability link for most 

of the other dimensional metrology instruments within 

NIST, and more than ten Standard Reference Materials 

(SRMs) (i.e., 473, 475, 1692, 1960, 1961, 1965, 2059, 

2800, 5000, 5001), as well as other SRMs in 

development.

Objectives

Ensure continued operation of the facility (which is more that 40 years old) with reduced uncertainty, 

and procure a new instrument that substantially decreases the dominant uncertainty due to index of refraction.

Accomplishments

•	 The LSI was one of top performing instruments in the 

Nano3 key comparison.

•	 The LSI is one of the top instruments in the preliminary results of the Euromet.L-K7 key comparison.

Planned Future Accomplishments

•	 Over the past 5 years, the LSI performed 74 calibrations, some of which have very high impact. A single 

LSI calibration can directly control several hundred 

million dollars of industrial production around the 

world, and indirectly control billions of dollars of 

industrial production. A continued level of calibration 

performance is a key future deliverable.

Customers and Collaborators

VLSI Standards, Nikon, Northrop Grumman Space, Pratt 

& Whitney, Lockheed Martin, Corning, U.S. DOE, Mitutoyo America, ALCOA, U.S. Customs Lab, IBM, L.S. 

Starret, EuroMet, Dupont/Toppan Photomask

Nanometer Scale 

Dimensional Metrology: 

Calibrated Atomic Force 

Microscope

Challenge/problem Addressed

The semiconductor and nanotechnology industries have rapidly increasing dimensional metrology 

requirements in regimes where traceability to the SI unit 

of length is not always readily available. For example, 

the International Technology Roadmap for Semiconductors (ITRS) identifies dimensional metrology as a key 

enabling technology for the development of next-generation integrated circuits.

Objective

Meet the needs of users of scanned probe microscope (SPM) metrology in the nanotechnology 

and semiconductor industries – where relevant feature sizes continue to shrink and are now approaching 

atomic dimensions. 

The NIST C-AFM is shown above from a side view 

in which the head is visible above the specimen 

platform in the foreground. and the lateral displacement measuring interferometers are visible behind.
21

Selected Accomplishments

•	 The C-AFM was used to perform a traceable 100 

nm grating pitch measurement with 6 × 10-4 relative 

expanded uncertainty in support of SEM metrology of 

gold nano particles for NIST Reference Material (RM) 

project.

•	 Completed NIST participation in an international 

round robin of two dimensional pitch measurements 

using the C-AFM. Two gratings – 1000 nm and 

290 nm pitch – were measured.

Planned Future Accomplishments

•	 Traceable nanoscale length measurements for U.S. 

nanotechnology industries directly or through commercial standards suppliers (e.g. VLSI Standards, 

K-TEK, Veeco Probes) or consortia (e.g., SEMATECH).

•	 Perform international comparisons on step height. 

Work on one and two-dimensional grating period 

measurements. Perform comparisons of two-dimensional AFM pitch metrology, the C-AFM 

measurements with relative expanded uncertainty 

(k = 2) of about 1 × 10-3.

Customers and Collaborators

 VLSI Standards,Veeco Probes (Nanodevices), 

K-TEK,PTB, VLSI Standards, Advanced Surface 

Microscopy, NRC-INMS

Wafer Level AFM Metrology 

for Critical Dimension 

Measurements. 

Challenge/problem Addressed

To address traceability problems in semiconductor dimensional metrology, NIST in collaboration with 

SEMATECH developed and implemented a criticaldimension atomic force microscope (CD-AFM) based 

reference measurement system (RMS). The key goal of 

the system is to transfer traceable length measurements 

to tools used in the semiconductor industry.

Objectives

Develop traceable CD-AFM based dimensional measurement systems for calibration of linewidth, step 

height, pitch, and related features, and disseminate the 

measurements and underlying technology to industry. 

Accomplishments

•	 Introduced and disseminated SI traceable width 

samples to SEMATECH member companies.

•	 Disseminated methods for implementing a reference 

measurement system to U.S. semiconductor industry. Developed of a reference measurement system at 

SEMATECH.

•	 Developed a rigorously traceable linewidth 

calibration system.

Planned Future Accomplishments

•	 Continue measurement and development support for 

SEMATECH metrology program by providing reference 

measurements for litho metrology projects. 

•	 Develop and disseminate SI traceable methods for 

CD-AFM-based sidewall angle measurements.

Customers and Collaborators

VLSI Standards, International SEMATECH, Advanced 

Metrology Advisory Group, member companies, 

Dupont/Toppan Photomask, International Technology 

Roadmap for Semiconductors; Microscopy and Metrology, FEI Co, ISO, E. Fjeld Co.
22

Wafer-Level SEM Metrology 

for Critical Dimension 

Measurements: 

SEM Metrology

Challenge/problem Addressed

The U.S. industry needs high-precision, accurate, shape-sensitive dimension measurement methods 

and relevant calibration standards. The SEM Metrology 

Project supports all aspects of this need since scanning 

electron microscopy is key microscopic technique used 

for this sub-100 nm metrology.

Objectives

Provide the microelectronics industry with highly accurate scanning electron microscope measurement 

and modeling methods for shape-sensitive measurements and relevant calibration standards with 

nanometer-level resolution. 

Selected Accomplishments:

•	 Developed two Reference Metrology SEMs equipped 

with laser interferometry, ready for traceable calibrations of masks, wafers and other samples.

•	 Characterized all important SEM parameters to minimize measurement uncertainty.

Planned Future Accomplishments

•	 The Helium Ion Microscopy (HIM) technology is not 

yet as optimized, developed or as mature as the SEM. 

As a new technique, HIM is just beginning to show 

promise and many potentially advantageous applications for integrated circuit and nanotechnology have 

yet to be exploited. 

•	 Develop models to correctly interpret the signal generation mechanisms and to understand the imaging 

mechanisms. These are indispensable for accurate 

nanometer-level metrology. 

Customers and Collaborators

International SEMATECH, Advanced Metrology Advisory 

Group, International Technology Roadmap for Semiconductors; Microscopy and Metrology Sections, Zeiss/ALIS 

Corp, FEI Co., ISO, E. Fjeld Co.
23

Wafer-Level SEM Metrology 

for Critical Dimension 

Measurements: Modeling

Challenge/problem Addressed

Width, linewidth, and boundary contours must generally be determined from an object’s image. 

However, the image is not an exact replica of the line. 

The scanning electron microscope (SEM), scanning 

probe microscope (SPM), and optical microscope all 

have image artifacts that are important at the relevant 

size scales. These artifacts are related to the probe 

sample interaction physics and often result in systematic 

edge assignment errors. These errors may vary due to 

details of the sample shape, instrument condition, the 

proximity of neighboring features, charging, contamination, etc. Determinations of width, roughness, and contour position therefore require modeling of the probe/

sample interaction in order to correct image artifacts and 

identify edge locations.

Objectives

Develop and validate instrument function models for scanning electron microscopes and atomic 

force microscopes, use those models to analyze existing 

measurement practices, alert industry metrologists to 

significant unrecognized errors, and suggest measurement practices less subject to error; and use the models 

to correct images for measurement artifacts, thereby 

obtaining improved accuracy. 

Selected Accomplishments

•	 Developed and published an unbiased linewidth 

roughness metric. Subsequently developed and published (with Applied Materials) a variant of the method 

that can be used with lines that shrink during measurement, as photoresist does.

•	 Wrote an SEM simulator that accepts samples of arbitrary 3-D shapes.

Planned Future Accomplishments

•	 Collaborate with researchers at the Illinois Institute of 

Technology to further extend the software capabilities 

to encompass applications where images, samples, 

and tips are represented by “dexels” rather than pixels. 

Dexels may have multiple heights in place of a pixel’s 

single height, thereby allowing reentrant features to be 

represented.

Customers and Collaborators

 Victor Katsap, Nu Flare Technologies, Maki Tanaka, 

Hitachi Ltd., Prof. Xiaoping Qian, Illinois Institute of 

Technology, Veeco Instruments, B. D. Bunday, SEMATECH, Z. J. Ding, University of Science and Technology 

of China, R. Katz, C. D. Chase, R. Kris, and R. Peltinov, 

Applied Materials
24

Photomask Dimensional 

Metrology

Challenge/problem Addressed

Measurement of linewidth or critical dimension (CD) on photomasks used in the manufacture of 

semiconductor devices continues to be one of the most 

fundamental dimensional metrology needs in the semiconductor and nanomanufacturing industries.

Objectives

The goal of this project is to provide industry with accurate and timely dimensional metrology at the 

nanoscale to enhance U.S. productivity and innovation. In particular, to provide accurate critical dimension 

metrology for photomask features, and traceable to the 

meter.

Selected Accomplishments

•	 Collaborated directly with representatives of the photomask industry and SEMATECH Mask Advisory Steering Council to determine their requirements in the 

next generation NIST photomask linewidth standard.

•	 Completed a bilateral intercomparison on photomask 

linewidth standards between NIST and Physicalishe 

Technicshe Bundesanstalt (PTB) to ensure agreement 

between the leading two international suppliers of 

photomask calibration standards.

Planned Future Accomplishments

•	 Develop new measurement techniques to produce 

sharper edge profiles to reduce linewidth measurement uncertainty. Develop better models to understand the physical process that results in a broadened 

line edge and with this information we will be able 

to more accurately automate the assignment physical 

edge during measurement. 

•	 Develop accurate physics based modeling to deduce 

the object dimensions from the microscope image. 

Image modeling will also extend the limits of optical 

metrology to feature sizes well below the wavelength 

of light used. This will be based on improved parametric modeling.

Customers and Collaborators

SEMATECH, Photronics, Toppan Photomasks, Inc., VLSI 

Standards, IBM, Intel, SEMI International Standards, 

Physikalisch Technische Bundesanstalt (Germany), BIPM

Overlay Instrument 

and Wafer 

Target Designs

Challenge/problem Addressed

A significant challenge for the semiconductor manufacturing industry is to develop advanced metrology techniques for overlay and registration to enable the 

continued long-term advance of device performance 

based on the stringent International Technology Roadmap for Semiconductors (ITRS) industry guidelines. 

Objectives

Develop advanced position metrology, techniques and standards for overlay and registration that meet 

the critical semiconductor industry needs and those 

future challenges of the demanding nanomanufacturing 

industry. 

Selected Accomplishments

•	 One major impact of the overlay project was the 

incorporation of NIST-developed methods into the 

hardware tool sets of leading metrology tool manufacturers. Target reversal procedures developed in the 

Nanomanufacturing program have been installed that 

help achieve the lowest tool induced shift (TIS) - a 

measure of tool accuracy for overlay measurement, 

location in the field of view.

•	 SEMATECH applied for a joint NIST/SEMATECH patent in Feb, 2008, for the new super-resolution overlay 

target. These targets have the potential to change the 

target designs and methodology widely in used by the 

industry.
25

Planned Future Accomplishments

•	 Through-focus scanning optical microscope (TSOM) is 

another new optical method being developed at NIST 

for nanometrology. A conventional optical microscope is used to collect the images of a given target 

as it is scanned along the focus axis. Two dimensional 

TSOM images generated by processing acquired optical images show good promise for demonstration of 

nanometer sensitivity and accuracy. 

•	 Scatterfield microscopy is one of the methods developed in this project for advanced optical nanometrology based on optical signal analysis rather than 

optical image processing. This technique is now being 

investigated for applications in overlay measurements. 

Arrayed targets with updated designs are now being 

tested.

Customers and Collaborators

KLA Tencor, Nanometrics, Nova, AMD, SEMATECH, 

ISMI, IBM, Intel, SEMI International Standards

TSOM image of a composite overlay target designed for double patterning showing 

sensitivity for different overlay values indicated.

May

3,

4,

5,

and

7
26

PED Program

Next-Generation Nanometrology

Meeting the electronics industry’s rallying cry for ever smaller and faster components 

requires more than improvements in manufacturing techniques: engineers must be 

able to see and measure what they are building. The limits of conventional imaging 

have been reached and passed, so NIST is devising new ways to measure and image 

nanoscale components quickly and accurately.

Staff

5 NIST staff

9 Guest researchers

14 Contractors 

14 Total FTEs

Challenge 

The next generation of nanotechnology manufacturing will hit a wall without new measurement 

techniques to image, analyze, and refine the atomically 

dimensioned devices now being envisioned. 

Technical Strategies

The program has several strategies to develop methods to accurately measure nanoscale features. Current measurement techniques are not only slow -- scanning a sample by sending an electron beam back and 

forth across it, for example -- but often entail damage or 

destruction of a product to see its interior. Current optical microscopes can rapidly examine objects without 

doing damage, but can only measure features down to 

about the wavelength of light. The program will develop 

advanced optical microscopes using a technique called 

scatterfield microscopy, which can extract quantitative 

information from measurements of the angle, polarization and other attributes of light bouncing off a sample. 

The program also aims to improve non-optical microscopy. The flagship is the scanning helium ion microscope, a novel instrument related to the scanning electron microscope that scans with a beam of helium ions 

instead of electrons. The technique has better resolution 

than scanning electron microscopy, and can also modify 

a sample by implanting helium ions or milling away 

material at the surface to reveal additional features. 

The program also focuses on measuring nanoparticles, 

a challenge that is vital to U.S. industry because of 

nanoparticles’ promise for the pharmaceutical industry 

along with their possible environmental risks. NIST is 

also investigating the “fate of nanoparticles in biological systems” thus developing the accurate dimensional 

metrology for the environment, health and safety. 

The final program focus represents a jump from NIST’s 

history of creating exact measurement standards to distribute for calibration purposes. Project researchers wish 

instead to provide measurement methods that allow 

companies to create their own standards – such as by 

publishing a “certified” value for some natural standard, 

like a crystal lattice spacing. Customers could then prepare their own crystal as a calibration standard.
27

Selected Results and 

Impacts

•	 Demonstrated imaging and characterization of intact 

liposome-based targeted nanoparticle delivery systems 

by scanning probe microscopy in a fluid imaging environment. This paves the way for targeted liposomes to 

be used in nanomedicine.

•	 Developed an electron microscope image simulator 

capable of dealing with complex three-dimensional 

samples. This helps in inferring dimensions from 

actual images in new 3D microelectronics and nanomedicine technology. 

•	 Developed in collaboration with other NIST laboratories the new gold nanoparticle size standards: RM 

8011, RM 8012, and RM 8013 will provide a method 

to accurately measure air samples to assess potential 

health risks.

•	 Released RM 8820 Multipurpose dimensional 

metrology standard for calibration of SEMs for all 

applications.

Selected Publications

Dagata, J.A.; Farkas, N.; Dennis, C.L.; Shull, R.D.; Hackley, V.A.; Yang, C.; Pirollo, K.F.; Chang, E.H., “Physical 

characterization methods for iron-oxide contrast agents 

encapsulated within a targeted liposome-based delivery 

system,” Nanotechnology 19, 305101, 2008

Cizmar, P.; Vladar, A. E.; Postek, M. T., “Optimization 

of Accurate SEM imaging by use of artificial images” 

2009 SCANNING/SPIE Proceedings 7378:737815-1 – 

737815-6, 2009

Gorman, J. J.; Balijepalli, A.; and LeBrun, T. W.; “Control of Optically Trapped Particles for Brownian Motion 

Suppression.” Accepted to be published in the IEEE 

Transactions on Control Systems Technology, 2009

Contact Information:

John Kramar, Program Manager

301-975-3447

john.kramar@nist.gov

http://www.nist.gov/mel/ped/nm/ngn.cfm

Selected Staff Recognition

Board Memberships

Staff Board Membership

M.T. Postek Nanotechnology Briefs Board of Directors

A. Vladar SPIE Advanced Lithography Advisory Board

Leadership

Staff Leadership

J.A. Dagata Organizing committee, National Science Foundation (NSF)-

sponsored workshop on Grand Challenges for Bio-Nano Integrated Manufacturing, Arlington VA April 14-16, 2008

A. Vladar ISO TC 204 SEM Image Sharpness Metrology Standard, 2009

Excellence

Staff Excellence

R. Attota and R.M. Silver Nano 50 Award for Scatterfield Optical Microscopy

R.M. Silver DOC Silver Medal, “for development of optical methods in 

overlay metrology.” 2008
28

Next-Generation Nanometrology

Projects

Scanning Particle-Beam 

Microscope Innovations

Challenge/Problem Addressed

Nanotechnology is already facing dimensional measurement and characterization challenges that far 

exceed the capabilities of current measurement science 

and techniques. Three-dimensional nanometer-scale objects and features must be measured with unprecedented precision and uncertainty, and with high throughput.

Objectives

Develop accurate methods for the characterization and three-dimensional (3D) metrology of nanoscale 

materials and features. This is becoming more and more 

necessary as, for example, new microelectronics technologies and nanomedicine innovations extend into the 

vertical dimension.

Selected Accomplishments

•	 Developed He ion lithography and nanomilling methods with approximately 10 nm smallest fabricated 

structures. These are the finest features ever nanomilled, and open up new possibilities for innovation.

•	 Developed a strong cooperation with Zeiss regarding 

the optimization and implementation of HIM. NIST 

expertise is currently being used to improve the performance of the HIM to make it a viable alternative to 

SEM for nanotechnology and nanomanufacturing.

Planned Future Accomplishments

•	 Optimize and develop new image capture and averaging techniques to enhance the performance for SEM 

and HIM imaging by developing within frame drift 

correction.

•	 Characterize the sensitivity of the HIM for high-resolution metrology of linewidths in silicon, photoresist, 

and mask materials, to qualify the potential of HIM as 

a metrology method for next-generation 

nanoelectronics.

Customers and Collaborators

International SEMATECH, Advanced Metrology Advisory 

Group; International Technology Roadmap for Semiconductors, Microscopy and Metrology Sections; Zeiss/ALIS 

Corp.; FEI Co; Hitachi Co.; E. Fjeld Co.

Helium Ion Microscope
29

Atomic Force Microscope 

Nanoparticle Metrology

Challenge/Problem Addressed

This project is working to enable a metrological basis for optimized formulation and regulatory approval 

of diagnostic and therapeutic nanoparticle formulations. Without consistent measurement methods and a 

correlation between physical and biological assays, new 

nanomedicines face a huge hurdle to human use.

Objectives

Provide new measurement methodologies that track the formulation, manufacture, and bio-distribution 

of nanoparticles. 

Accomplishments 

•	 Demonstrated optimized methods for immobilizing 

intact liposome-based nanoparticle delivery systems 

(NDS) for scanning probe microscope (SPM) imaging 

and characterization under fluid conditions, a critical 

first step for quantitative measurements. 

•	 Evaluated improved magnetic coatings for fluid and 

dry magnetic force microscopy (MFM) for characterizing dispersed and aggregated magnetic resonance 

imaging (MRI) contrast enhancement agents. Improving the contrast agents increases sensitivity for imaging smaller features, like incipient tumors.

Planned Future Accomplishments

•	 Develop complementary, multiple-technique 

protocols for characterizing the mean size and size 

distribution of soft nanoparticles, combining the 

unique strength of dynamic light scattering, fluid scanning probe microscopy, and electron and 

optical microscopy.

•	 Demonstrate methods for quantitatively examining membrane dynamics and nanoparticle uptake, 

motion, and eventual fate in living cells. This information is critical for understanding how nanoparticles 

may damage living cells, or may be used as therapeutic nanomedicine agents.

Customers and Collaborators 

U.S. National Cancer Institute (NCI), Bethesda MD, U.S. 

Food & Drug Administration, White Oak, MD, Georgetown University Medical Center (GUMC), Washington 

DC, Aparna Biosciences, Rockville MD, Nanotechnology Characterization Laboratory (NCL), Frederick MD, 

University of Akron, Akron OH, National Institute of 

Allergy and Infectious Diseases (NIH), Rockville MD
30

Nanoparticle Manipulation 

and Metrology

Challenge/Problem Addressed

Nanoparticles are the most mature sector of the rapidly growing nanotechnology industry, but methods to select and fully manipulate nanoparticles are still 

rudimentary or nonexistent. This limits development of 

nanofabrication processes at every step from sorting and 

characterizing nanomaterials to prototyping and testing 

functional nanodevices assembled from heterogeneous 

components.

Objectives

Advance basic nanomanipulation technology to the point that 2D and 3D nanostructures can be rapidly 

prototyped and tested to enable efficient development of 

functional nanodevices. 

Selected Accomplishments 

•	 Developed an integrated scanning trap system for 

fast 6D manipulation of complex nanoparticles. This 

first-in-the-world capability is an important step for 

nanostructure assembly with optical tweezers.

•	 Demonstrated broad applicability of trapping and 

instrument performance by trapping a wide range of 

particles including nanowires, and simultaneously 

trapping red blood cells and pharmaceutical nanoparticles. Trapping multiple objects simultaneously is 

necessary for complex assembly.

Planned Future Accomplishments

•	 Demonstrate robust trapping of sub-100-nm nanoparticles using high-speed, intelligent servo control systems to modulate the position of the optical trap based 

on the observed disturbances and the prior knowledge 

of the detailed trap-particle interaction potential. This 

will bring optical trapping down to the realm of true 

nanoparticles.

•	 Demonstrate the unique value of true, individual 

nanoparticle trapping capability for controlled 

nanomanufacturing. An initial example could be a 

reference material consisting of an ordered array of 

nanoparticle defects.

Customers and Collaborators

National Cancer Institute (NCI), Nanotechnology Characterization Laboratory (NCL); University of Maryland; 

Korea Institute of Science and Technology (KIST), Korea; 

University of Western Michigan; Purdue University
31

Molecular Measuring 

Machine (M3)

Challenge/Problem Addressed

The emerging nanotechnology industry is in need of nanometer-accurate two-dimensional position metrology of nanometer-scale objects and features. 

Objectives

Provide the ultimate metrology capability for feature placement and two-dimensional position metrology over macroscopic distances. This instrument will 

then serve as the traceability link for industry metrology 

instruments via artifacts that will be calibrated on M3, 

or through the identification and validation of intrinsic 

standards and the publication of accepted values and 

best practices.

Selected 

Accomplishments 

•	 Developed a compact, compound actuator and sensor 

for controlled metrological motion and measurement. 

This actuator is a novel design that incorporates a 

3 mm range coarse motion and an 8 μm range, 

guided, fine motion actuator with a capacitance gage 

sensor, all within a (25 mm)3 volume.

•	 Developed a method to perform high resolution 

heterodyne interferometry in vacuum using fiber optic 

beam delivery. The heterodyne beams are separated 

for traversal through the fiber optic to avoid mixing 

and the consequent periodic non-linearity, and then 

recombined in vacuum. Fiber optic delivery minimizes errors from beam pointing stability and air 

turbulence.
32

Planned Future Accomplishments

•	 Measure an atomic-resolution lattice over an area of 

a few optical fringes in X and Y to characterize the 

interferometer metrology system with reference to the 

crystal lattice.

•	 Utilize the demonstrated sub-nanometer-level, closedloop control capabilities of M3

 with a suitable surface 

modification or nanowriting technique to produce 

highly perfect nanoscale calibration standards and 

experimental test samples.

Customers and Collaborators

Center for Space Research, Massachusetts Institute of 

Technology, National Aeronautics and Space Administration (NASA), George Washington University, National 

Taiwan University

Atom-based Dimensional 

Metrology

Challenge/Problem Addressed

Nanometrology will play a key role in addressing the challenges in the upcoming nanotechnology 

industry. There is a need for specialized metrology tools 

and processes to meet these requirements. The ultimate 

limit for nanoscale length metrology is the development 

of intrinsic calibration standards, where the reference dimensions are based on atom spacing within an ordered, 

crystalline lattice.

Objectives

Develop intrinsic calibration standards based on the crystalline lattice and to develop the underlying 

measurement science needed to enable parallel, highthroughput, atomically-precise manufacturing for NIST 

standards development and for a variety of industrial applications. The current focus is on developing methods 

to prepare photo-lithographically patterned 3D structures in silicon substrates appropriate for atom counting; 

and to achieve parallel high-throughput atomically-precise manufacturing (APM) using a multitude of parallel 

Scanning Tunneling Microscopy (STM) tips simultaneously. 

Selected Accomplishments: 

•	 Awarded a five year, three phase DARPA contract to 

conduct collaborative research in atomically precise 

positioning, patterning and metrology, validating the 

applicability and potential value of this work.

•	 Designed and built a five chamber ultra high vacuum 

(UHV) facility regularly capable of producing 1 x 10-8

Pa base pressures for performing nanometer scale 

metrology on various metallic and semiconductor 

surfaces.
33

Planned Future Accomplishments

•	 Develop intrinsic calibration standards for pitch and 

linewidth based on atom-spacings in the crystal lattice. This will bring accurate dimensional standards 

down into the nanoscale range, necessary for nanomanufacturing. 

•	 Develop tip processing procedures involving field 

evaporation and thermal processing to consistently 

obtain tips from a variety of materials that are capable 

of achieving atomic-scale resolution images in the 

STM, and capable of consistently effecting atomicallyprecise surface modification.

Customers and Collaborators

SEMATECH, DARPA, Zyvex Labs Inc., Intel, University 

of Maryland, University of Illinois at Urbana Champagne, University of Texas at Austin, University of Texas 

at Dallas

High-Throughput 

Nanometrology with 

Scatterfield Microscopy

Challenge/Problem Addressed

Nanomanufacturing requires innovative highthroughput, non-contact metrology methods to 

minimize defects, quantify critical dimensions, and 

sample large areas effectively for maximum yield. This 

presents a tremendous challenge, to quantify features 

and identify defects at the nanometer scale over areas 

ranging from 1000 μm2 to 1 m2 in dimension. 

Objectives

Develop an ensemble of optical microscopy techniques, termed scatterfield microscopy, that enable 

dimensional metrology beyond traditional optical resolution barriers. The goal is to enable the cost-effective 

mass-production of nanotechnology products through 

accurate, production capable metrology solutions. 

Accomplishments 

•	 Constructed a dedicated platform for scatterfield 

microscopy (λ = 450 nm).

•	 Quantitative agreement achieved between rigorous 

modeling and experimental data. Published results 

demonstrate quantitative agreement for scatterfield 

measurements of densely arrayed 100 nm sized lines 

which vary in 1 nm increments, validating the utility 

of optical metrology methods for far sub-wavelength 

features. 
34

Planned Future Accomplishments

•	 Expand the use to scatterfield microscopy techniques to 

new areas, such as characterizing catalyst loading and 

catalyst particle size on membranes used in fuel cells. 

This will provide a critically-needed high-throughput 

process control measurement method.

•	 Demonstrate the capability of scatterfield microscopy for 

quantitative measurements of defects, nanoparticles, and 

nanometer-accuracy overlay measurements. This will 

extend the used of optical measurement methods into the 

next generation of nanoelectronics manufacturing.

Customers and 

Collaborators

KLA-Tencor, Nanometrics, Zyvex, Applied Materials, 

SEMATECH, Intel, IBM, University of Maryland

193 nm Scatterfield microscope
35

Manufacturing Metrology

Overview

To fulfill its mission and to respond to the needs of U.S. industry and government, the Manufacturing Metrology Division (MMD) has organized its technical work into three programs. 

The three MEL programs led by MMD are: 

•	 Mechanical Metrology

•	 Metrology for Advanced Optics

•	 Measurements and Standards for Science-Based Manufacturing

The division consists of a strong team of scientists, engineers, technicians, and support 

staff, including post-doctoral fellows, full-time guest researchers, and part-time students. 

The division is fortunate to have staff with expertise and skill in many disciplines, 

including mechanical engineering, electrical engineering, applied mechanics, 

physics, optics, acoustics, computer science, and chemistry. Division staff contribute 

to technical advancements and industry impacts in all six of the MEL core 

competence focus areas: mechanical metrology, dimensional metrology, 

nanomanufacturing metrology, manufacturing systems, manufacturing 

processes, and manufacturing equipment. 

Several drivers for U.S. manufacturing have influenced the selection, direction, 

and content of the MMD programs, in particular: 

•	 Growth of international trade

•	 Global and distributed manufacturing 

•	 Continual push for higher quality, better performing, customized products

Fulfilling the measurements and standards needs of the United States 

in mechanical metrology and advanced manufacturing technology

Chief: 

Kevin Jurrens (Acting)

NIST

100 Bureau Drive 

Stop 8220

Gaithersburg, MD 

20899-8220

Phone: 301 975 6600

Fax: 301 869 3536

Email:

kevin.jurrens@nist.gov
36

•	 Pressures to increase productivity and reduce costs

•	 Increased pace of technological change

Through frequent interactions and collaborations, the 

division ensures that our measurements and standards 

activities address the needs and priorities of our customers. Informed by these interactions, the MMD programs 

are structured to respond to key, high-priority manufacturing industry needs that result from the above drivers.

Mission

To fulfill the measurements and standards needs of the United States in mechanical metrology and 

advanced manufacturing technology by: 

•	 conducting research and development in realizing, 

maintaining, and disseminating SI mechanical units 

(mass, force, acoustics, vibration); 

•	 developing methods, models, sensors, and data to 

improve metrology, machines, and processes; 

•	 providing services in mechanical metrology, machine 

metrology, process metrology, workpiece property 

metrology, and sensor integration; and 

•	 leading in the development of national and international standards.

In addition, MMD provides service to other federal government agencies to address problems and needs that 

leverage NIST expertise, facilities, and capabilities.

MMD Program Manufacturing Industry Need

Mechanical 

Metrology

•	 Measurement traceability to the SI

•	 Compliance with regulatory requirements

•	 Harmonized international standards that reflect U.S. needs

•	 Improved measurement accuracy, precision, and efficiency

•	 Capability to cost-effectively manufacture higher quality and/or more complex parts 

and assemblies

Metrology for 

Advanced Optics

•	 Measurement traceability to the SI

•	 Harmonized international standards that reflect U.S. needs

•	 Improved measurement accuracy, precision, and efficiency

•	 Ability to make new and more complex measurements

•	 Capability to cost-effectively manufacture higher quality and/or more complex parts 

and assemblies

Measurements 

and Standards for 

Science-Based 

•	 Harmonized international standards that reflect U.S. needs

•	 Ability to make new and more complex measurements

Manufacturing •	 Capability to cost-effectively manufacture higher quality and/or more complex parts 

and assemblies

•	 Model-based manufacturing systems and processes

•	 Integration and management of manufacturing systems, processes, and equipment

•	 Predictable, well-characterized manufacturing processes, equipment, and systems

•	 Flexible, reconfigurable manufacturing systems
37

Staffing Challenges

The primary challenge in effective management of MMD staffing and financial resources arises from 

the division’s broad, multi-faceted technical mission. In 

each of the division’s technical areas, MMD staff supply world-class expertise, experience, and knowledge. 

However, staffing numbers in each area are relatively 

small, particularly in comparison to National Measurement Institutes in other countries or to parts of NIST that 

have a more singular mission. 

The division’s challenge is to 

meet today’s demands while 

also preparing resources and 

technical expertise for the 

future. Future retirements 

and staff departures must be 

constantly kept in mind, since 

the specialized metrology and 

standards expertise required by 

MMD are not readily available 

and may take years for newlyhired staff to develop. The 

typical MMD metrology expert 

has deep knowledge in a very 

specialized field; crossover of 

the specialized expertise to 

different areas of metrology – 

even within the division – is 

rare. Currently the division’s 

professional staffing is very 

lean, with some metrology areas having only one or 

two permanent employees. High-quality guest researchers and contractors provide tremendous benefit. MMD 

continues to encourage and pursue additional NRC 

post-doctoral researchers for the division. 

Facilities and Equipment

MMD manages technical laboratories in several buildings across the NIST campus. NIST’s newest 

building, the Advanced Measurement Laboratory (AML), 

provides world-leading environmental control for air 

quality, temperature, humidity, vibration, and electrical 

shielding – all critical for MEL precision measurement 

capabilities. MMD facilities typically include one or 

more of the following characteristics: 

•	Single-purpose facilities that 

are too expensive for one company to develop or maintain

•	State-of-the-art metrology and 

research

•	Support for next-generation 

instruments or technology

•	Provision of effective access 

to NIST equipment and expertise

•	Neutral location for industry 

competitors to come to develop 

tests and standards that benefit 

the whole industry

MMD was fortunate to receive 

approximately $2 M of the 

American Reinvestment and 

Recovery Act (ARRA) funds provided to NIST for procurement 

of new state-of-the-art equipment. These funds were 

used to purchase new mass standards required to meet 

industry needs in large mass calibrations.

MMD Facilities 

Mechanical Metrology Program

•	 Mass Metrology and Standards Facility: Home of 

the U.S. National Standard for the Kilogram. Custom 

clean-room environment that provides the U.S. measurement system with the most accurate calibrations 

available, traceable to the national standard of mass.

Resources

Staff

•	 33 permanent NIST staff

•	 2 NRC post-doctoral researchers

•	 7 guest researchers

FY2010 Estimated Funding

•	 $6750 K STRS (excluding NIST IMS)

•	 $1050 K NIST Innovation in Measurement Science (IMS)

•	 $1000 K Reimbursable (calibration 

services)

•	 $ 815 K Other Agency
38

•	 Small Force Metrology Laboratory: Worldleading facility devoted to measuring forces as 

small as 10-8 N – the force needed to break three 

covalent bonds. Application to measurements of 

coatings, thin films, magnetic disk-drive spring 

constants, and future mechanical nanodevices. 

•	 Low Frequency Vibration Laboratory: Environmentally-controlled facility devoted to nextgeneration low-frequency vibration metrology 

(~0.2 Hz to 200 Hz) to meet increasing customer 

needs for traceable calibrations of accelerometers in this range. 

•	 Force Metrology Laboratories: Custom-built, 

multi-story facility that houses force metrology 

deadweight machines for SI-traceable calibration of force sensors (load cells, proving rings). 

Home of the 4.45 MN (1 million lbf) deadweight 

machine – the world’s largest machine with the 

ability to perform direct, high-accuracy calibration of high-load force sensors. 

•	 Acoustic Anechoic Chamber: A large, well-characterized, ultra-quiet chamber used to precisely 

characterize sound sensors (hearing aids, sound 

level meters, microphones) and to perform highprecision acoustic measurements. 

Metrology for 

Advanced Optics Program

•	 Extremely Accurate Calibration Interferometer (XCALIBIR): A unique multi-configuration, 

phase-shifting interferometry system with an aperture 

of 300 mm that can perform demanding measurements and calibrations of optical figure, wavefront, 

and radius of curvature. The instrument is located in a 

class 1000 clean room with temperature control to ± 

0.02 oC. 

•	 Infrared Interferometer (IR3

): Custom-designed 

infrared interferometer with an aperture of 300 mm for 

measuring the thickness variation of silicon wafers. 

•	 Geometric Measuring Machine (GEMM): Custombuilt experimental system for estimating the form 

errors of aspheric and freeform surfaces from measurements of local curvature. 

•	 Wyko 6000 Interferometer: Commercial phaseshifting interferometer with an aperture of 150 mm for 

measurement and calibration of optical 

elements. 

Precise measurement methods for the complex 

motion of manufacturing equipment with five or 

more degrees of freedom, necessary to fabricate 

the complex, free-form products of the future, are 

currently non-existent. In this photo a reearcher 

sets up an experiment designed to evaluate proposed test methods for inclusion in a new standard.

Earl Zubkoff
39

Measurements and Standards for 

Science-Based Manufacturing 

Program

•	 DMG 5-axis High-Speed Machining Center: Research 

platform for machine tool metrology, process metrology, and next-generation machine control. Shared 

resource with the MEL Fabrication Technology 

Division. 

•	 Makino 4-axis High-Speed Machining Center:

Research platform for high-speed machining. Shared 

resource with the MEL Fabrication Technology 

Division. 

•	 Edgetek Machining Center: Instrumented testbed for 

measuring process phenomena (e.g., cutting forces, 

temperatures, chip formation) during orthogonal 

cutting. The testbed has a unique high-speed, dualspectrum (infrared and visible) micro-videography 

system for measuring material flow and temperature 

distribution. 

•	 Mazak 5-axis Turning Center: Research platform for 

machine tool metrology, process metrology, and smart 

machining concepts.

•	 Pulse-Heated Kolsky Bar Facility: A unique, NIST-built 

device that measures the stress-strain properties of 

materials undergoing rapid heating and rapid increase 

of strain. Such data improves models for high-speed 

machining processes, ballistic impacts, and structural 

failure. 

•	 Smart and Wireless Sensors Laboratory: A unique 

facility for testing reference implementations of 

interoperability standards for smart and wireless sensors. 

•	 Micro-Machining Laboratory: Research facility for 

development of new metrology concepts relevant to 

meso-scale machine tools for fabricating micro- and 

meso-scale parts. 

•	 Diamond Turning Laboratory: Moore M-18 3-axis 

diamond turning machine for high-precision machine 

tool metrology and machining process metrology. 

Facilities and Equipment 

Challenges

The division’s existing laboratory facilities are generally sufficient to meet today’s customer needs. 

Aging of the NIST general purpose laboratories and their 

environmental systems remain a liability for NIST (and 

the division) to continue to serve our customers and 

to meet future, higher-precision metrology demands. 

Divisions with space outside of the AML will likely need 

future investments in specialized laboratory renovations 

to meet ever-increasing environmental requirements 

for state-of-the-art metrology. Another challenge for the 

division is to upgrade calibration system equipment and 

components to take advantage of current technologies 

while maintaining complete traceability and confidence 

in measurements for customer calibrations. 

Laboratory Safety

Since the last visit of the NRC Assessment Panel, NIST has undergone a substantial effort to transform 

the safety culture of the organization and to implement 

new safety procedures. As part of this change, MMD 

has completed a very thorough hazards assessment 

of our laboratory and office spaces. Many new safety 

procedures are now in place, and lab-specific safety 

information has been developed for each MMD laboratory. All MMD managers have taken significant amounts 

of safety training, including the week-long Occupational 

Safety and Health Administration (OSHA) 6000 training 

and hazards recognition. Division staff have received 

task-specific safety training as needed for their work, 

such as for laser safety, chemical safety, crane safety, 

fall hazards, and safe handling of gas cylinders. Safety 

improvements and reviews are ongoing, with strong support from division staff and managers. 
40

MMD Program

Metrology for Advanced Optics

From projecting computer chip designs onto silicon wafers to imaging remote galaxies, advanced optics are crucial to modern technology and science. As the demand 

for sophisticated optical components increases, so does the need for versatile and 

accurate inspection methods. NIST works with industry, universities, and government 

agencies to improve measurement methods for precision optical surfaces, to develop 

metrology for emerging nano-structured optics, to improve international measurement standards, and to calibrate optical reference artifacts. Program results contribute to innovations in the application and manufacture of advanced optical elements 

and precision surfaces.

Staff

2 NIST staff

3 guest researchers

5 total FTEs

Challenge

The program addresses infrastructural metrology needs of the U.S. optics and photonics industry for 

the manufacture of precision optical elements possessing high added-value. The optics and photonics industry 

is a vibrant part of the U.S. economy. Advanced optical 

and photonic components enable product innovations 

in many high-technology areas, ranging from medical 

technology and defense to consumer electronics and 

astronomy. Optical and photonic technologies furthermore boost competitiveness and technological leadership in manufacturing. “Light is the tool of the future”, 

as evidenced by the growth in machine vision, optical 

inspection, and laser systems for material processing. 

Advances in nano-scale and semiconductor manufacturing continue to depend on advances in optical technologies, such as optical projection lithography.

Both the manufacture and development of advanced 

optical components critically depend on the ability 

to measure their performance. Only optical surfaces 

that can be measured can be made. This is particularly 

important for imaging systems performing at the diffraction limit imposed by the wave nature of light, be they 

very large optical telescopes with apertures of many 

meters, or small cameras in mobile phones which must 

achieve good imaging performance in a tiny space.

Advanced optical systems incorporate features that 

yield vastly improved performance but pose significant 

measurement challenges. Examples of such features 

are complex surfaces, i.e., surfaces that are neither flat 

nor spherical, micro- and nano-scale surface structures, 

extreme accuracies, special materials and coatings, and 

adaptive technologies. The development and manufacture of these advanced features depends on advances in 

traceable metrology for optical figure and wavefront. In 

high-impact applications, such as semiconductor lithography, the required accuracies are at demanding subnanometer levels. Traceability requires standards-compliant uncertainty statements that are rare in the optics 

industry, but increasingly mandated for ISO-certified 

quality systems and export. No general, widely-recognized, validated way exists to calibrate complex optical 

surfaces or the performance of nano-structured optics, 

and the application range and uncertainty of existing 

methods are poorly understood. This is a measurement 

barrier to the widespread manufacture and adoption of 

these optical elements, despite their ability for product 

innovations.

Technical Strategies

The program seeks to promote innovations in the application and fabrication of advanced optical elements by providing methods, services, and standards for 

SI-traceable metrology of optical figure and wavefront. 

The program focuses on optical interferometry, the most 
41

widely used measurement method for precision optics 

and surfaces, because no other method can achieve the 

same versatility and accuracy. The program addresses 

the following infrastructural metrology needs: 

1.Methods that address the challenge of measuring the 

performance of the rapidly evolving class of nanostructured optics and its relation to fabrication errors. 

2.Methods that address the challenge of measuring the 

shape of complex optical surfaces (rotationally symmetric and freeform).

3.Measurement methods and reference artifacts that 

address future requirements of the semiconductor 

industry in the areas of silicon wafer flatness and 

extreme ultraviolet lithography (EUVL) optics.

4.International comparisons of measurement capability 

and harmonized standards that ensure effective access 

to international markets by the U.S. optics industry. 

5.Measurement methods and services for flatness, 

sphericity, and radius of curvature of optical reference 

surfaces required for interferometric measurements of 

precision surfaces and optical elements.

The program concentrates on the development of 

infrastructural measurement methods and services that: 

1) promote innovations in a wide range of optical and 

photonic applications; 2) have a high impact on the 

U.S. metrology chain; 3) provide a generic approach 

to characterize and reduce measurement uncertainties; 

and 4) remove controversy in commerce over measurement results and specification compliance. The program 

has a strategic focus on techniques and protocols that 

allow users to make traceable measurements in their 

own facilities. Where possible, the program seeks to 

eliminate the requirement of calibrated transfer artifacts through the development of absolute calibration 

methods. The program develops uncertainty statements, 

compliant with the Guide to the Expression of Uncertainty in Measurement (GUM), for typical measurement 

set-ups. The program contributes to the ANSI Optics 

and Electro-Optics Standards Council Technical Advisory Group to improve standards developed by the ISO/

TC172 Technical Committee on Optics and Photonics. 

Research in new areas, such as nano-structured optics, is 

conducted in collaboration with partners and customers 

working on leading-edge applications.

The NIST XCALIBIR reconfigurable interferometer for the measurement of ultra-precision flat, 

spherical, and aspherical optical elements and precision surfaces.
42

Results and Impacts

•	 Developed a new method for deformation-free flatness measurements of thin optics, such as photomask 

blanks for extreme ultraviolet (EUV) lithography. In the 

method, the optic is floated on a liquid with a high 

specific gravity. This eliminates mounting induced 

deformations, and the measured flatness error results 

only from fabrication errors and coating stresses. At 

the request of SEMATECH, flatness measurements 

were performed on photomask blanks and substrates 

for EUV lithography. The measurement results are used 

to model photomask blank behavior on chucks. 

•	 Developed a new approach to the challenge of 

measuring the radius of curvature of surfaces with a 

large radius of curvature. Examples of such surfaces 

are mirrors in beamlines and imaging systems, and 

test plates for evaluating lenses. The traditional radius 

bench measurement method is difficult to apply to 

these surfaces due to the required large displacement 

of the test artifact and the large cavity length. The 

new NIST approach eliminates these requirements 

through the application of a twin-Fresnel zone plate, a 

nano-structured optical element that incorporates two 

different focal lengths.

•	 Developed, in collaboration with NASA, a method 

that employs a mirror with a special height relief pattern to assess the spatial height transfer function of an 

interferometer and its variation over the interferometer aperture. The increasing need for measurements 

of complex structures with high spatial frequency 

content requires consideration of the height transfer 

function. Analytical and experimental studies were 

completed that characterize the height transfer function for several interferometers and operating 

conditions.

•	 Completed, in collaboration with NASA, the design 

and theoretical analysis of a new measurement technique that uses two Computer Generated Holograms 

(CGHs) to address the challenge of measuring mandrels for the fabrication of x-ray telescope mirrors. 

•	 Developed a toolbox for designing and analyzing 

phase shifting algorithms for interferometry, making it possible to measure a wider range of test 

parts while lowering uncertainties. For example, the 

toolbox made it possible to address the challenge of 

measuring the flatness error of optical windows with 

near-parallel surfaces by generating a phase-shifting 

algorithm that is insensitive to parasitic interference 

from the “back”-surface. Photomask substrates are an 

important example of this type of optical surface.

Publications

“Computer-Generated Hologram Cavity Interferometry 

Test for Large X-Ray Mandrels: Design,” G. Gao, J.P. 

Lehan, W.W. Zhang, U. Griesmann, J.A. Soons, Optical 

Engineering, 48 (06), 063602, 2009.

“Radius Measurement of Spherical Surfaces with Large 

Radii-of-Curvature Using Dual-Focus Zone Plates,” Q. 

Wang, G. Gao, and U. Griesmann, in Optical Fabrication and Testing, OSA Technical Digest, paper OWB2, 

2008.

“Measuring the Phase Transfer Function of a PhaseShifting Interferometer,” J. Chu, Q. Wang, J. Lehan, U. 

Griesmann, and G. Gao, Proc. SPIE, Volume 7064, 

2008. 

Contact Information

Johannes Soons, Program Manager, 

(301) 975-6474

soons@nist.gov
43

Metrology for Advanced Optics 

Projects

Nano-Structured Optics

Challenge/Problem Addressed

The challenge is to advance the fabrication and performance evaluation of nano-structured optical 

surfaces for product innovations and for application to 

long-standing measurement challenges. 

Modern nano-fabrication technology has made possible 

the realization of complex structures with dimensions 

comparable to, or smaller than, the wavelength of light. 

This capacity opens up many new ways to engineer the 

phase and amplitude of light waves, leading to the emergence of the new class of nano-structured optics. Nanostructured optics have properties that polished optics 

cannot achieve. For example, a nano-structured lens 

can be designed to focus a light-wave at several points 

in space simultaneously. Nano-structured elements 

offer many opportunities for innovations in optics and 

photonics and have become a vibrant field of research. 

Nano-structured optics also help solve problems in the 

measurement of polished optical elements. A special 

class of nano-structured optics, computer generated 

holograms (CGHs), are used as auxiliary optics for the 

form measurement of aspheric surfaces.

A recently purchased novel massively-parallel optical 

lithography tool will enable us to overcome several 

barriers in the fabrication of demanding nano-structured 

optics. This innovative new tool presents a radically new 

opportunity for the measurement science of precision 

surfaces, not merely a gradual improvement. For the first 

time, a tool is available that can generate features with 

sizes down to (and below) half the wavelength of light, 

while having a sufficiently high write speed to pattern 

the large areas needed for metrology holograms in an 

acceptable time. In addition, it will be possible to write 

directly on dimensionally stable, optical quality substrates. Incorporation of this technology into the proposed research will enable NIST to overcome existing 

barriers to the fabrication of metrology holograms.

Our research on nano-structured optics is conducted 

in collaboration with customers working on leadingedge applications. For example, in collaboration with 

NASA we developed a new measurement technique 

that uses two CGHs to measure the shape and dimension of non-focusing optical surfaces. An example of this 

type of surface is the mandrel used to form segmented 

mirrors for x-ray telescopes. The segments must meet 

tight form error specifications but also must have small 

dimensional errors to have the same focus. The new 

measurement approach addresses the shortcomings of 

other methods for this very challenging measurement 

problem. 

Objectives

•	 Develop methods for the performance evaluation of 

nano-structured optics, especially for optics with small 

feature sizes.

•	 Characterize the effect of fabrication errors on the 

performance of nano-structured optics and improve 

fabrication techniques.

•	 Improve methods and uncertainty statements for the 

application of nano-structured optics to solve longstanding challenges in the calibration of high-performance free-form optical surfaces.

Accomplishments

•	 Completed, in collaboration with NASA, the design 

and theoretical analysis of a new measurement technique that uses two CGHs to measure mandrels for 

the fabrication of x-ray telescope mirrors. Completed 

the measurement setup and design of the CGHs. 

Developed unique fiducialization scheme to align the 

CGHs and fix the absolute scale of the measurement. 

Completed theoretical analysis of measurement uncertainties. Designed an optical test, using Hartmann 

screens, for the initial performance evaluation of the 

CGHs. Conducted process characterization experiments for fabricating the diffractive optical elements.

•	 Developed a new approach, using a nano-structured 

optical element, to the challenge of measuring the 

radius of curvature of surfaces with a large radius 

of curvature. Examples of such surfaces are mirrors 

in beamlines and imaging systems, and test plates 

for evaluating lenses. The traditional radius bench 

measurement method is difficult to apply to these 

surfaces due to the required large displacement of the 

test artifact and the large cavity length. The new NIST 

approach eliminates these requirements through the 

application of a twin-Fresnel zone plate, a nano-structured optical element that incorporates two different 

focal lengths.
44

Planned Future Accomplishments

•	 Experimentally validate the CGH-based method to 

measure the form and dimension of a mandrel for 

shaping segmented mirrors for the International X-ray 

Observatory (IXO) telescope.

•	 Experimentally and theoretically evaluate the uncertainty and application range of the new method to 

measure the radius of curvature of surfaces with a 

large radius of curvature.

•	 Develop procedures for the design, fabrication, validation, and application of CGHs for the measurement 

of polished optical surfaces with complex shapes. 

Develop capability for the fabrication and validation 

of high-performance metrology CGHs. 

Customers and Collaborators

NASA Goddard Space Flight Center; University of Stuttgart, Institute for Technical Optics; University of Arizona, 

College of Optical Sciences

Aspheric Optics

Challenge/Problem Addressed

The goal of this project is to characterize and improve generic methods for the measurement of aspheric 

surfaces, i.e., surfaces that are neither flat nor spherical. 

Aspheric surfaces are indispensable in modern optical systems through their combination of high optical 

performance, low system weight, and low cost. However, 

measuring aspheric surfaces poses formidable metrology 

problems because of the difficulty of obtaining a reference wave-front that closely matches the desired form 

of the asphere. Several methods have been proposed 

and applied to measure aspheres, such as sub-aperture 

stitching, measurement of local curvature, and computer 

generated holograms. However, the application range 

and achievable uncertainties of these methods are poorly 

understood. This is a measurement barrier to the development, manufacture, and application of aspheric optics.

Objective

Characterize and improve the uncertainty and application range of generic methods for measuring aspheric 

surfaces, with a focus on sub-aperture stitching, local 

curvature measurement, and computer generated 

holograms (CGHs).

Accomplishments

•	 Developed methods for the uncertainty evaluation of 

asphere measurements obtained with stitching and 

local curvature metrology.

•	 Completed the design and fabrication of the Small 

Aperture Digital Interferometer (SADI), a NIST 

developed experimental interferometric sensor that 

improves the range and uncertainty of local curvature 

measurements. 

Planned Future Accomplishments

•	 Complete performance evaluation of the SADI sensor 

for local curvature measurements. 

•	 Develop generic methods for the uncertainty evaluation of asphere measurements obtained with CGHs.

Customers and Collaborators

Argonne National Laboratory, Advanced Photon Source; 

NASA Goddard Space Flight Center
45

Optical Metrology for the 

Semiconductor Industry

Challenge/Problem Addressed

The semiconductor industry expects continued demand for improved wafer flatness at the exposure 

site to avoid blurring of ever smaller circuit features due 

to out-of-focus exposures. The International Roadmap 

for the Semiconductor Industry (ITRS) predicts an allowed site flatness error for 300 mm wafers of less than 

42 nm by 2010, and 23 nm for 450 mm wafers by 2015. 

This is a challenge for both wafer polishing and wafer 

metrology tools. In addition, next-generation extreme 

ultraviolet lithography (EUVL) has strict flatness requirements for the photomasks to avoid aberrations of the 

projected circuit features. 

Objective

Provide measurement methods and reference artifacts that address future requirements of the semiconductor industry in the areas of silicon wafer flatness and 

extreme ultraviolet lithography

Accomplishments

•	 Developed capability for the measurement of nextgeneration 450 mm wafers with the 300 mm NIST 

infrared interferometer through stitching.

•	 Developed a new method for the deformation-free 

flatness measurement of EUVL photomask blanks and 

substrates, and provided photomask measurements to 

SEMATECH for modeling photomask blank behavior 

on chucks. 

Planned Future Accomplishments

•	 Complete the upgrade of the phase-shifting range 

and algorithms of the NIST infrared interferometer to 

enable measurement of thin wafers (250 μm) and to 

reduce measurement errors due to ghost reflections 

and non-linearities in phase shifting.

•	 Validate the recently developed method for the separate measurement of wafer thickness variation and 

refractive index variation, yielding lower uncertainties 

in thickness variation measurements.

Customers and Collaborators

Intel; MEMC Electronic Materials Inc.; QED 

Technologies; SEMATECH; Wavefront Sciences

Standards and Calibrations

Challenge/Problem Addressed

Controversies on specification compliance, measurement procedures, and traceability continue to 

hamper international commerce in advanced optical 

elements. Uncertainty statements that comply with the 

GUM, the Guide to Uncertainty in Measurement, are 

rare in the optics industry. Companies increasingly need 

to adopt ISO-certified quality procedures, especially 

for goods that are exported. Having traceable in-house 

metrology with well-documented uncertainty statements 

is thus becoming essential.

Phase-shifting interferometry with computer-aided data 

analysis is the leading method for measurement of ultraprecision surfaces and optical elements. The measurement uncertainty is to a large extent determined by the 

form errors of the reference surfaces. Optical flats and 

spheres are used for this purpose, and are critical components in the traceability chain for measurements of 

optical elements. The need for measurements of surfaces 

with high spatial frequency content is increasing, which 

also requires consideration of the spatial height transfer 

function of the interferometer. 

Objectives

•	 Provide measurement methods and services for flatness, sphericity, and radius of curvature of optical reference surfaces used for interferometric measurements 

of precision surfaces and optical elements. Where 

possible, eliminate the requirement of calibrated 

transfer artifacts through the development of absolute 

calibration methods.

•	 Develop uncertainty statements, compliant with the 

GUM, for typical measurement set-ups. 

•	 Ensure effective access to international markets by the 

U.S. optics industry through international comparisons and harmonized standards for optical figure and 

wavefront.
46

Accomplishments

•	 Organized a preliminary international comparison of 

flatness measurement capability of 300 mm diameter 

optical flats. Designed the comparison protocol, reference artifact, fixturing, and instrumented 

shipping container. 

•	 Contributed to the ANSI Optics and Electro-Optics 

Standards Council Technical Advisory Group to 

improve standards developed by the ISO/TC172 Technical Committee on Optics and Photonics.

•	 Provided measurement services (NIST special tests) for 

flatness and sphericity of optical reference surfaces.

•	 Developed, in collaboration with NASA, a method 

that employs a mirror with a special height relief pattern to assess the spatial height transfer function of an 

interferometer and its variation over the interferometer 

aperture. Developed fabrication procedures for the 

mirror and completed analytical and experimental 

studies on the characteristics of the height transfer 

function for several interferometers and operating 

conditions.

•	 Developed a toolbox for designing and analyzing 

phase shifting algorithms for interferometry, making it possible to measure a wider range of test 

parts while lowering uncertainties. For example, the 

toolbox made it possible to address the challenge of 

measuring the flatness error of optical windows with 

near-parallel surfaces by generating a phase-shifting 

algorithm that is insensitive to parasitic interference 

from the “back”-surface. Photomask substrates are an 

important example of this type of optical surface.

Planned Future Accomplishments

•	 Complete an international comparison of flatness 

measurement capability of 300 mm diameter optical 

flats, with NIST acting as the pilot lab. The NMIs planning to participate are: CSIRO (Australia), NPL (UK), 

NMIJ (Japan), KRISS (Republic of Korea), and PTB 

(Germany). 

•	 Develop a service for full-area calibration of optical 

reference surfaces, bridging the gap between recent 

advances achieved at NIST on the calibration of 

optical reference surfaces and the efficient delivery 

of an economically viable measurement service to 

customers. 

•	 Develop the capability for full-area calibration of 

optical flats in a horizontal orientation.

Customers and Collaborators

Goodrich; ITT Space Systems Division; L-3 Communications; NASA; Raytheon; Zeiss IMT; Zygo
47

MMD Program

Measurements and Standards for 

Science-Based Manufacturing

To remain competitive in the global marketplace, U.S. manufacturing is currently 

implementing fundamental changes, focused on designing and building complex, 

highly-customized, high quality goods -- all built speedily to meet the rapidly changing demands of the market. Manufacturers must shorten product development cycles 

and increase flexibility and speed of production systems and supply networks. They 

must do all this while also reducing environmental impacts and energy requirements. 

These changes require a transformation from manufacturing practices based on 

human experience towards scientific-based modeling, decision making, and production. This program develops fundamental measurements, standards, and tools to 

enable U.S. manufacturers to make this transformation.

Staff

11 NIST staff

1 NRC post-doctoral researcher

2 guest researchers

14 total FTEs

Challenge

U.S. manufacturing is undergoing fundamental changes in response to global economic and 

technological forces. Industry trends are shaping a new 

future for U.S. manufacturers – one where high-value, 

knowledge-intensive, highly-customized products and 

processes will be the new cornerstones for growth and 

prosperity. To remain competitive and promote growth, 

manufacturers must adapt to new market challenges 

that require more complex and individually customized products with improved quality, functionality, and 

performance. Furthermore, rapidly changing market 

demands require shorter innovation cycles, more flexible and rapidly reconfigurable manufacturing systems, integrated and streamlined communications and 

supply networks, reduced environmental impacts, and 

improved energy efficiencies. In the future, U.S. manufacturing processes must be more accurate, flexible, automated, intelligent, interoperable, reconfigurable, and 

sustainable. For this vision to come about, an underlying 

measurements and standards foundation and infrastructure must be developed and implemented so that U.S. 

manufacturers can quickly capitalize on future gamechanging opportunities and technological innovations. 

This program aims to provide competitive advantage and 

stimulate innovation for U.S. manufacturers by developing the metrology and standards infrastructure necessary 

for a science-based approach to the manufacture of 

complex, high-value, knowledge-intensive products.

Technical Strategies

This MEL program builds upon NIST expertise and MEL core competencies in measurements and 

standards for manufacturing systems, processes, and 

equipment, along with substantial external partnerships 

with industry, academia, and other government agencies, to respond to the drivers and trends outlined above 

for the future of U.S. manufacturing, as well as to the 

critical measurement needs identified in the NIST Assessment of the U.S. Measurement System (USMS). The 

program addresses a science-based approach to develop 

the fundamental metrology and standards infrastructure 

necessary for U.S. manufacturers - established industries 

(e.g., aerospace and defense) as well as growth industries (e.g., medical devices, pharmaceuticals, alternative 

energy, communications, and sensors) - to overcome key 

technical barriers to manufacturing innovation. Results 

of this program will help position U.S. manufacturers 

to remain competitive and to achieve the future vision 
48

of U.S. manufacturing. The fundamental metrology and 

standards developed by this program will be relevant 

to a wide variety of new and emerging manufacturing 

processes and equipment, including multi-function and 

reconfigurable systems for fabrication, additive manufacturing systems, intelligent assembly systems, and meso/

micro-scale fabrication systems important for the medical devices industry. The objectives of this program are: 

1.Develop advanced process metrology methods and 

tools to increase scientific understanding of manufacturing processes, including metal-based additive 

processes, to enable cost-effective production and 

decision making in response to changing conditions in 

the manufacturing environment.

2.Develop fundamental metrology, standards, and performance metrics for accurate complex 5-axis motion 

of manufacturing equipment enabling the production 

of complex high-value products. 

3.Develop metrology methods, standards, and performance metrics to achieve accurate, real-time, onmachine (in-situ) part measurement and certification, 

as well as process monitoring and control using wireless sensor networks.

Results and Impacts

•	 Completed comprehensive literature study on metalbased additive processes and interacted with system 

users to identify the current state-of-the-art and challenges. Evaluated typical part errors and use of test 

parts as the basis for new standards to characterize the 

performance of additive manufacturing systems.

•	 Contributed to two milestone events for advancing 

additive manufacturing capabilities: initiation of firstever standards activities for additive manufacturing 

through the newly-formed ASTM F42 (Additive Manufacturing Technologies) committee and development 

of a roadmap with industry experts to set priorities and 

guide additive manufacturing research over the next 

10-12 years.

•	 Demonstrated the successful operation of a newly 

developed in-situ measurement system for cutting tool 

dynamics ensuring efficient stable machining processes, greatly reducing time and expertise necessary 

to conduct such measurements by machine operators 

on the shop floor.

•	 Reduced the measurement uncertainty of infrared 

micro-videography for measuring the temperature 

distribution of the cutting zone during orthogonal 

cutting, enabling temperature measurement of small 

features such as the shear zone. Results are used to 

improve predictive models of machining processes. 

•	 Completed characterization of material properties of 

titanium alloy at cutting conditions. The experimental 

data is used to develop a science-based understanding 

of differences in machineability.

•	 Conducted, in collaboration with Kennametal, highspeed micro-videography experiments for the effects 

of tool insert geometry on material flow and other 

phenomena in the cutting zone to aid development of 

new cutting tools.

•	 Contributed towards the first-ever ISO draft standards 

in two critical areas that respond to industry needs for 

high-precision complex products:

•	 Standard test methods for evaluating the accuracy of 5-axis complex motion for a new generation of 4- and 5-axis machine tools (ISO/CD 

10791-6, Test Conditions for Machine Centers),

•	 Standard test methods for evaluating on-machine 

measuring performance of machine tools using 

touch-trigger probes (ISO/DIS 230-10, Test Code 

for Machine Tools).

Selected Publications

“Development of a metrology frame to improve the 

positioning accuracy of micro/meso-scale machine 

tools,” S.P. Moylan, D. Hong, B.N. Damazo, J.A. Soons, 

and M.A. Donmez, International Journal of Mechatronics and Manufacturing Systems, Vol. 2, No. 5/6, 2009.

“High-Speed Microvideography Observations of the 

Periodic Catastrophic Shear Event in Cutting AISI 1045 

Steel,” J.C. Heigel and E.P. Whitenton, Transactions of 

NAMRI/SME, Vol. 37, 2009. (Best Paper Award) 

“Characterization of Uncertainties when Measuring 

Metal Cutting Temperatures Using Infrared Radiation 

Thermography,” E.P. Whitenton, Proceedings of SPIE 

Volume 7299, Thermosense XXXI, 2009. 

Contact Information

Alkan Donmez, Program Manager

(301) 975-6618

alkan.donmex@nist.gov
49

Measurements and Standards for 

Science-Based Manufacturing 

Projects

Fundamental Metrology for 

Material Processing

Challenge/Problem Addressed

Manufacturing of high-value, knowledge-intensive products requires timely and accurate knowledge 

about the manufacturing process and the condition of 

the equipment, process, and part. Knowledge-intensive 

manufacturing processes with advanced capability 

and functionality will be the primary enabler for U.S. 

companies to cost-effectively manufacture complex and 

difficult-to-make products. For most manufacturing situations, this process knowledge is largely non-existent, 

incomplete, or non-quantified. There is currently insufficient science-based understanding of manufacturing 

processes to achieve the desired knowledge-intensive 

products and processes in a cost-efficient and highly 

productive manner. Fundamental metrology methods 

and standards are needed for real-time manufacturing 

process monitoring and control and for characterizing 

the key process phenomena necessary for making informed manufacturing decisions in response to changing 

conditions in the manufacturing environment. In addition, once timely and accurate process knowledge is 

obtained, further methods and standards are needed for 

the unambiguous representation and communication of 

such knowledge and the integration of information from 

diverse sources. 

Objectives

Develop the advanced process metrology methods and tools to increase scientific understanding of 

existing, as well as new and emerging manufacturing 

processes and equipment, including multi-function and 

reconfigurable systems for fabrication, intelligent assembly systems, and meso/micro-scale fabrication systems. 

Determine specific application case studies as appropriate based on industry interactions and priorities. Several 

process parameters and phenomena are expected to 

be of critical importance for multiple manufacturing processes, such that common and generic process 

metrology approaches can be devised. These process 

phenomena include forces, temperatures, and material 

transformations at the material/tool interface, tool wear 

and performance, friction considerations, system vibrations and dynamic response, bulk material properties, 

and waste by-products of the manufacturing process. 

Obtain enhanced information related to manufacturing 

processes and equipment through the new measurement methods and from in-situ and real-time sensing for 

process validation. Standardized approaches for sharing 

process knowledge among the various manufacturing 

system components will be used for intelligent, real-time 

decision-making. Generic, physics-based measurement 

methods will be developed, promoted through national 

and international standards organizations, and transferred to industry to increase scientific understanding of 

manufacturing systems, processes, and equipment. 

Accomplishments

•	 Applied the NIST pulse-heated Kolsky bar to characterize material properties at conditions relevant to 

machining (high strain rates and rapid heating) for 

titanium and steel. Conducted instrumented orthogonal cutting experiments with high-speed videography 

to measure strain, strain rate, chip segmentation and 

contact length; infrared videography to measure the 

temperature distribution of chip and tool; dynamometry to measure cutting forces; and post-process chip 

and tool microscopy to measure chip morphology, 

tool wear, and adhered inclusions on the tool. Results 

were combined with finite element simulations of the 

cutting process to improve science based understanding of differences in machineability. 

•	 Conducted, in collaboration with Kennametal, highspeed micro-videography experiments for the effects 

of tool insert geometry on material flow and other 

phenomena in the cutting zone to aid development of 

new cutting tools.
50

•	 Obtained results from the NIST pulse-heated Kolsky 

bar tests on AISI 1075 steel that demonstrate that the 

unique rapid heating technique reveals constitutive 

material behavior that cannot be predicted by the 

Johnson-Cook flow stress model that is widely used 

for the simulation of high-speed machining processes.

•	 Reduced the measurement uncertainty of infrared 

micro-videography for measuring the temperature 

distribution of the cutting zone during orthogonal 

cutting. Characterized and reduced the significant 

measurement errors that can occur during segmented 

chip formation due to motion blur, the small size of 

regions with elevated temperatures, and the camera 

transfer function. Reduced the uncertainty of temperature measurements of tool inserts by establishing that 

“pre-oxidizing” reduces emissivity variations during 

cutting experiments. Developed a technique to measure the temperature of cutting inserts with embedded 

thermocouples and compared thermocouple readings 

with thermal images, achieving good agreement.

•	 Developed a technique that enables implementation 

of material data obtained from Kolsky bar experiments 

into proprietary material models used in finite element 

software for the analysis of machining processes. A 

key part of the technique is the application of the 

software to simulate a Kolsky bar experiment.

Planned Future Accomplishments

•	 Publish a guide to uncertainty assessment for infrared 

micro-videography of cutting processes.

•	 Develop new metrology devices, methods and 

standards for critical manufacturing process parameters (such as force, torque, power, current, temperature, etc.) to enable real-time process monitoring 

and control.

•	 Develop non-contact optical measurement capability 

for characterizing material strain and transformations 

during manufacturing processes to better understand 

the manufacturing process by observing its effect on 

the workpiece material.

Customers and Collaborators

Third Wave Systems; Kennametal; Caterpillar; Ford 

Motor; United Technologies; Alcoa; Los Alamos 

National Laboratory
51

Investigation of 

Measurements and 

Standards Needs for 

Metal-Based 

Additive Processes

Challenge/Problem Addressed

Emerging manufacturing technologies for producing highly-complex customized components include 

metal-based additive processes, such as selective laser 

sintering (SLS), direct-metal laser sintering (DMLS), and 

laser engineered net shaping (LENS). Technologies such 

as these have been in development over the past decade 

and their capabilities have grown significantly. However, 

several barriers have prevented metal-based additive 

processes from reaching their potential. Primary barriers 

are insufficient part accuarcy and surface finish, lacck of 

standards for proccess certification, limited data formats, 

and low processing speed.

Objectives

I

nvestigate the fundamental characteristics of these 

new processes, address critical measurement and standards issues, and develop metrology tools to improve 

the science-based understanding of these processes. 

Leverage existing MEL skills and expertise to impact 

metal-based additive manufacturing in areas such as 

precision motion control, equipment performance 

assessment and metrics, manufacturing process control 

and automation, measurement methods for determining process parameters such as temperatures and forces, 

and remote sensing and condition monitoring of system 

performance. The fundamental metrology and standards 

developed by this program will be relevant to a wide 

variety of new and emerging manufacturing processes 

and equipment.

Accomplishments

•	 Completed comprehensive literature study on metalbased additive processes and interacted with system 

users to identify the current state-of-the-art and challenges. Evaluated typical part errors and use of test 

parts as the basis for new standards to characterize the 

performance of additive manufacturing systems.

•	 Contributed to two milestone events for advancing 

additive manufacturing capabilities: initiation of firstever standards activities for additive manufacturing 

through the newly-formed ASTM F42 (Additive Manufacturing Technologies) committee and development 

of a roadmap with industry experts to set priorities and 

guide additive manufacturing research over the next 

10-12 years.

Planned Future Accomplishments

Develop performance metrics and metrology tools to characterize metal-based additive fabrication 

process.

Customers and Collaborators

3D Systems; Honeywell; Boing; GE Aviation; U.S. Air 

Force Research lab; Medical Modeling Inc.
52

Metrology and Standards 

for Coordinated 

5-axis Motion

Challenge/Problem Addressed

The high-value, complex (free-form) products of the future require manufacturing processes and equipment capable of generating accurate complex motion, 

including coordinated multi-axis linear and rotational 

motion. Existing measurement methods and standards 

focus on evaluating the single-axis motion needed for 

the manufacture of simple, prismatic products. Although 

methods are available to examine errors associated 

with coordinated motion of two simply-moving components, precise measurement methods for the complex 

motion of manufacturing equipment with five or more 

degrees of freedom, necessary to fabricate the complex, 

free-form products of the future, are currently nonexistent. The measurement problem is compounded for 

the manufacture of meso/micro-scale products since 

traditional metrology instruments are typically too large 

and cannot fit within the workspaces of the manufacturing systems needed at this scale. New measurement 

methods, systems, standards, and performance metrics 

are urgently needed by U.S. manufacturers to understand and apply the capabilities of the next-generation, 

multi-axis reconfigurable manufacturing equipment for 

innovative new products. 

Objectives

Develop fundamental metrology, standards, and performance metrics for accurate complex motion 

for manufacturing equipment enabling the production of 

complex high-value products.

Accomplishments

•	 Developed a method to determine the orientation of 

a non-orthogonal axis of rotation of a rotary table in 

the machine coordinate system, providing a means 

to compensate for inaccuracies in the orientation 

and thus greatly improving the performance of 5-axis 

machine tools.

•	 In collaboration with an international working group, 

designed and machined a test artifact for testing 5-axis 

machine tools. The form measurements of the test artifact were compared to kinematic test results obtained 

by the telescoping ballbar to validate the method of 

using test artifacts to quickly evaluate 5-axis machine 

performance.

•	 Completed experiments that compared multiple test 

methods, patterns, and data analyses considered for 

the new draft standard (ISO/CD 10791-6) for assessing the contouring performance of coordinated 5-axis 

motion to ensure the uniformity and consistency in 

the test results. The results of the study were presented 

to the ISO committee to modify the draft standard.

•	 Developed kinematic and control system models of 

the NIST 5-axis machine tool to predict its contouring 

performance. Such models will be used to interpret 

measurement data and for diagnostics.

•	 Developed solid models of the 5-axis machine 

structure, measuring equipment, and the fixtures to 

virtually assemble the measurement setup to reduce 

time for designing and carrying out tests for various 

machine structures.

Planned Future Accomplishments

•	 Integrate structural models, kinematic models, and 

servo control models to develop comprehensive performance models for machine structures.

•	 Finalize test artifacts and test methods using machined 

test pieces to be proposed for standardization.

•	 Develop international standard for testing 5-axis coordinated motion for manufacturing equipment.

Customers and Collaborators

Ford Motor; Lockheed Martin; BAE Systems; Caterpillar; 

Remmele Engineering; United Technologies; Cincinnati 

Machines 
53

Ultra-Precision Linear 

Motion Metrology

Challenge/Problem Addressed

Many new emerging applications of nanotechnologies require the use of small precision linear 

translation stages that have an exceptionally long range 

of motion (tens of millimeters) with sub-micrometer 

positioning accuracy and repeatability. A short list 

of these technologies may include micro/meso-scale 

machine tools and coordinate measuring machines, 

lithography equipment, and scanning probe microscopy instruments, to name a few. The need has inspired 

the development of many off-the-shelf turnkey linear 

translation systems that have travel ranges in the tens of 

millimeters with specified positioning accuracies on the 

order of tens of nanometers or better. Manufacturers and 

customers of such systems have begun to recognize the 

difficulties in certifying the accuracy and repeatability 

of the performance measurements of these systems with 

appropriate levels of uncertainty, i.e., a few nanometers 

or better. Sources of measurement uncertainty that were 

once considered insignificant when measuring in the 

micrometer regime are now becoming very significant 

while measuring in the nanometer regime. 

Objectives

I

n collaboration with manufacturers of long-range, 

linear nano-translation stages, investigate and evaluate 

the best practices, standards, and equipment used for 

measuring and determining the accuracy and repeatability of positioning numerically-controlled axes and 

establish a low uncertainty measurement capability at 

NIST. 

A variety of measurement uncertainty sources including, 

but not limited to, the measuring devices, environment, 

measurement setup, and the thermal behavior of the 

stage will be examined. Instrumentation and techniques 

crucial in reducing the measurement uncertainty will 

be evaluated. Based on the findings, the measurement 

facilities will be upgraded to enable significant reductions in uncertainties. 

Accomplishments

This project was initiated in FY2010.

Planned Future Accomplishments

•	 Develop detailed uncertainty analysis and uncertainty 

budgets associated with the measurement methods 

and instrumentation used for performance measurements of linear translation stages.

•	 Evaluate two long-range, linear 

nano-translation stages.

•	 Develop a highly-controlled test chamber.

•	 Develop a measurement capability with an 

uncertainty better than 5 nm.

•	 Publish a technical paper describing the methods 

to reduce the uncertainties and the results of performance measurements under these conditions.

Customers and Collaborators

Aerotech
54

In-situ 3D Optical and Mechanical Metrology of 

Fabricated Parts

Challenge/Problem Addressed

A key objective in durable goods manufacturing is faster throughput by eliminating the need for offline part inspection, typically performed using coordinate measuring machines (CMMs) and related inspection tools. U.S. manufacturers currently use off-line 

part measurement and certification for quality control 

of high-value products. Despite their high accuracy, 

CMM measurements are time-consuming and must be 

performed in specialized environments removed from 

the production floor, resulting in increased production 

times and higher manufacturing costs. This project will 

address one component of this challenge by developing 

on-machine (in-situ) metrology methods, standards, and 

performance metrics for inspecting and certifying highvalue products while the fabricated part is still fixtured 

within the manufacturing equipment – with a focus on 

the growing importance of micro/meso-scale fabrication 

systems and products. 

The measurement problem is more complex for micro/

meso-scaled components due to difficulties in handling the small parts after their fabrication. Optical and 

mechanical metrology methods will be incorporated 

into manufacturing systems and evaluated for in-situ 

part certification and independent measurement of part 

features relevant to a variety of platforms and applications. The real-time product data obtained by the in-situ 

measurement systems will form the basis for future 

manufacturing process monitoring and control. 

Objectives

Develop measurement methods and systems to enable in-situ 3D optical and mechanical metrology for fabricated parts to obtain faster throughput by 

eliminating the need for off-line part inspection. Research will focus on extending the application range and 

accuracy of 3D imaging systems in production environments, overcoming existing limitations due to line-ofsight requirements, surface imperfections, and variability 

in part reflectivity, lighting, shadowing, and color. 

Accomplishments

•	 Completed the implementation of the metrology frame 

on the meso-scale milling machine demonstrating 

over 90% improvement in machine performance.

•	 Completed the development and installation of fringe 

projection based measurement system for on-machine 

measurement of 3D features of meso/micro scale 

machined components.

•	 Completed the uncertainty analysis of two-dimensional measurements by the fringe projection system, 

using symbolic manipulations to enable the complex 

analysis required and highlighting the sensitivity to the 

initial calibration procedure.

•	 Developed a new Matlab code for image processing 

to be used with the fringe projection system to enable 

on-machine measurements of dimensions and form of 

micro-scale to meso-scale parts.

•	 Completed development of the in-situ automated 

measuring system for tool dynamics, demonstrating 

transparent operation without needing a dynamics 

expert on the shop floor and the benefits of up-to-date 

use of tool dynamics information in predicting stability regions.

Planned Future Accomplishments

•	 Reduce the uncertainty of fringe projection measurements by a factor of 30%.

•	 In collaboration with other MEL programs, establish 

method to combine multiple views of the same part 

into a single data set without the need for registration 

artifacts.

•	 Develop method for on-machine coordinate metrology assisted by metrology frames to reduce the 

uncertainty of dimensional measurements by a factor 

of 30%.

Customers and Collaborators

Atometric; Microlution; Remmele Engineering
55

Performance Metrics for 

Manufacturing Equipment 

Used as Measuring Tools

Challenge/Problem Addressed

One aspect of the future vision for U.S. manufacturing is that product inspection and certification will 

occur while the fabricated part remains fixtured within 

the manufacturing equipment that produced the part. A 

primary benefit of this approach is that further processing of the part is greatly simplified if the inspection 

results indicate that changes are necessary. However, a 

substantial challenge is presented to maintain measurement accuracy when the manufacturing equipment is 

also used as a measuring machine. Specifically, significant measurement uncertainties can be generated if 

the manufacturing equipment uses the same controlled 

motion, axes, and algorithms to measure the part as it 

used to create the part. The potential exists for machine 

errors to create unintended deviations in the part that 

may go undetected in the part inspection and certification measurements. 

Objectives

Develop the performance standards and standardized performance metrics for on-machine measurements 

and their associated uncertainty budgets that are critical 

to achieve accurate, in-situ part inspection and certification. These standards are necessary to drive product and 

process innovations in sensors for manufacturing, manufacturing control systems, product fabrication systems, 

and metrology tools for manufacturing. 

Accomplishments

•	 In collaboration with the international working group, 

developed and validated a series of tests to assess the 

measuring performance of machine tools using touch 

trigger probes. The draft standard (ISO/DIS 230-10, 

Test Code for Machine Tools) is currently being circulated for comments from the member bodies.

Planned Future Accomplishments

•	 Develop a methodology for geometry-based uncertainty budgets applicable for various on-machine 

measurement implementations.

•	 Complete the internationally-accepted ISO 230-10 

standard.

Customers and Collaborators

Renishaw; General Motors; Ford Motor; Caterpillar; 

United Technologies; Remmele Engineering; TechSolve
56

Manufacturing Process 

Monitoring and Control 

Using Wireless Sensor 

Networks

Challenge/Problem Addressed

Sensors are indispensable in a wide variety of manufacturing applications, ranging from equipment and 

environmental control, monitoring and adjustment of 

production processes, and quality control of finished 

products. The large majority of current sensor implementations in factory settings are based on wired communications, rather than wireless. In comparison to traditional wired networks, wireless sensor systems would 

provide advantages in the manufacturing environment, 

such as increased flexibility for locating and reconfiguring sensors, elimination of wires in potentially hazardous locations, and ease of network maintenance. This is 

particularly true for the installation of sensor network/

systems on an existing shop floor, because wireless sensors are easy and quick to apply and reconfigure, and 

there is no need for time-consuming and costly cable 

laying and maintenance. The technical challenges that 

now preclude widespread and effective use of wireless sensors and communications on the factory floor 

include (1) reliable receipt of sensor signals, (2) sufficient power for the sensor to provide the desired signal 

strength, useful life, and continuous communications, 

and (3) lack of interoperable sensor data and systems.

Objectives

Develop models and performance metrics to understand 

and predict response of sensors used for measurement 

and control of the manufacturing process. Develop a 

prototype wireless sensor network based on the IEEE 

1451 family of smart transducer interface standards that 

enables us to gain better insights into the implementation of wireless sensor standards and how they can be 

applied to shop floor application. 

Accomplishments

•	 Developed a model that enables analysis of signals 

from accelerometers used to monitor machining 

center manufacturing process. Analytical models are 

essential tools for understanding and predicting sensor 

response.

•	 Developed the hardware, software, and web-browser 

data viewer for a microprocessor-based wireless transducer interface module. These are essential prerequisites to the development of a prototype wireless sensor 

network.

•	 Developed and conducted tests of a preliminary wireless sensor network on the NIST shop floor for monitoring three IEEE 1451-based sensors installed on a 

Mazak turning center. A three-axis accelerometer and 

two temperature sensors provided five data channels. 

Data integrity was found to change significantly as the 

wireless transmission environment was varied.

Planned Future Accomplishments

•	 Develop and implement a wireless sensor network 

including network processor, and multiple wireless 

transducer interface modules and sensors based on 

wireless sensor standards. This enables us to gain better insights into the implementation of wireless sensor 

standards. 

•	 Develop IEEE 1451-based software modules and 

application program interface and integrate with the 

wireless sensor network to demonstrate new capabilities for manufacturing equipment monitoring.

Customers and Collaborators

Agilent; Emerson; E-Sensors; Exxon Mobil; Lockheed 

Martin; Northrop Grumman; Open Geospatial Consortium; Raytheon; Texas Instruments; Tyson Foods
57

Staff

18 NIST staff

1 NRC post-doctoral researcher

2 guest researchers

21 total FTEs

Challenge 

Advance the science of International System of Units (SI) mechanical metrology to anticipate the future 

needs – and address unmet present needs – of U.S. 

industry and government in the areas of acoustics, force, 

mass, and vibration. New and innovative approaches 

that push the limits of the current state-of-the-art are 

required to establish the future measurements and standards needed for continued advancement and competitiveness of critical U.S. industries in the global market.

Technical Strategies 

Mechanical metrology plays a critical role in nearly all sectors of the U.S. economy and in everyday life. Industry needs for measurement traceability, 

compliance with regulatory requirements, harmonized 

standards for international trade, and improved capabilities to cost-effectively manufacture higher quality and 

more complex products require advancements in traceable measurements for the mechanical metrology areas 

of acoustics, force, mass, and vibration. 

MEL provides industry and government with measurement services and research for next-generation measurement capabilities, ensuring delivery of state-of-the-art 

measurement accuracy for high-impact SI mechanical 

metrology. Program priorities are identified and established based on ongoing interactions with industry and 

other partners. This customer input is used to direct the 

program technical agenda for current and future measurements, services, and standards. 

For each MEL mechanical metrology area, the program 

contains the following elements:

•	 Research and Development

•	 Measurement Services

•	 Quality System Development and Conformance

•	 Leadership in National and International Standards

•	 International Comparisons of Measurement Capability

To ensure the competitiveness of U.S. industry in the 

world marketplace, the program maintains active participation in corresponding CIPM (International Committee for Weights and Measures) consultative committees 

and SIM (Interamerican Metrology System) metrology 

working groups. The program fulfills NIST’s role as a 

signatory of the Mutual Recognition Arrangement (MRA) 

for measurement capabilities in the areas of mass, force, 

acoustics, and vibration. Measurement methods and 

uncertainty evaluation techniques developed by MEL are 

transferred to U.S. industry and other government agencies through participation in national and international 

standards activities. The program provides state-of-theart measurement services in compliance with the ISO 

MMD Program

Mechanical Metrology

Providing critical measurements of mass, force, vibration, and acoustics for a broad 

range of industries and aspects of everyday life. Such measurements establish uniformity and reliability for countless products and applications, such as grocery store 

scales, microphones, pharmaceuticals, and the structural integrity of bridges. The 

program’s wide-ranging goals include participating in international efforts to redefine 

the Kilogram, establishing new molecular force standards, improving timeliness and 

performance of current calibration services, and developing next-generation measurements for acoustics and vibration. Such services help provide industry with the tools 

needed to maintain or establish the highest levels of competitiveness in world markets.
58

17025 quality system standard to provide NIST customers with traceable calibrations at the top of the SI traceability chain. 

A primary program objective is to conduct cutting-edge 

research and development to anticipate and drive future 

advancements of U.S. industry in all four mechanical 

metrology areas. Research activities ensure that MEL will 

meet increasing U.S. industry and government demands 

for higher-accuracy, more cost-effective mechanical measurements by: (1) developing next-generation 

measurements and calibration systems with lower 

measurement uncertainties and expanded measurement 

ranges; and (2) developing innovative new approaches 

to measuring mechanical quantities. 

Results and Impacts 

•	 Completed crucial steps towards a practical method 

for realization of a new kilogram definition, including 

development of a stable suspension technique based 

on magnetic field sensing and servo control, analysis 

of the effect of magnetic pole shapes on suspension 

and stability, and stable levitation (less than 1 mg) of 

200 g to 1 kg mass artifacts using the new suspension. This will provide the link between the existing 

artifact-based definition realized in air and the future 

realization of mass based on fundamental constants in 

vacuum. This link is essential to guarantee continuity 

and equivalency of mass measurements. 

•	 Demonstrated first accurate scheme for practically 

realizing forces below a nanonewton enabling direct 

calibration of probes used in single molecule mechanical characterization experiments.

•	 Developed reliable methods for performing complex 

single DNA molecule experiments and achieved the 

first traceable measurements of this force, therefore 

demonstrating the use of biological molecules as 

intrinsic force standards.

•	 Demonstrated stable creation and manipulation of 

single atom chains using a new instrument developed 

as part of the intrinsic force project. As part of this 

instrument development, also created a fiber interferometer system for the accurate measurement of 

picoscale displacements.

•	 Completed the development of new measurement 

system, software, and procedures for reciprocity 

calibrations of laboratory standard microphones from 

31.5 Hz to 20 kHz in plane-wave air-filled couplers. 

This allows NIST to provide next-generation acoustical 

measurement services that halves our measurement 

uncertainties in the most critical frequency range. 

•	 Completed analysis and final reports of critical key 

comparisons in the areas of force and vibration 

metrology where NIST served as pilot laboratory. This

guarantees the recognition and validity of the calibration and measurement capabilities of the participating 

countries under the mutual recognition arrangement 

(MRA), thereby supporting international trade. 

•	 Provided critical and state-of-the-art measurement 

services to the U.S. government and industry through 

nearly 2000 tests performed annually for over 100 

customers.

Key Publications

Jabbour, Z.J., Abbott, P., Williams, E., Liu, R., Lee, V., 

“Linking air and vacuum mass measurement by magnetic levitation,” Metrologia, 46, 339 (2009).

Smith, Pratt, and Howard, “A fiber-optic interferometer 

with subpicometer resolution for dc and low-frequency 

displacement measurement,” Rev. Sci. Instr., 80, 

035105 (2009).

Evans, D.J.; Hornikova, A.; Leigh, S.D.; Rukhin, A.L.; 

Strawderman, W. “Report on Acceleration Comparison 

SIM.AUV.V-K1,” Metrologia, 46, Tech. Suppl., 09003 

(2009). 

Contact Information

Zeina Jabbour, Program Manager, 

(301) 975-4468

zeina.jabbour@nist.gov
59

Mechanical Metrology Projects

Redefinition of the 

Kilogram: Air-to-Vacuum 

Mass Comparison

Challenge/Problem Addressed

Experiments to redefine the kilogram with an invariant of nature (such as the 

Watt balance or the Avogadro 

project) are performed in vacuum, while current realization of 

the mass unit and all associated 

methods of dissemination of the 

unit are done in air. Transfer of 

the unit to vacuum requires an 

unbroken traceability chain to the 

international prototype kilogram, 

as well as characterization of the 

stability of the artifacts and their 

surfaces during transfers from air 

to vacuum and vice versa. This 

requirement remains a major 

challenge and obstacle for further 

advances in redefining the unit 

of mass. 

Objectives

Establish the first complete stable realization and dissemination system that directly ties the current air-based 

kilogram definition to the vacuum-based alternative 

definition using stable artifacts with wear-resistant and 

chemical inertness characteristics that are maintained 

in controlled environments. The realization apparatus 

will use magnetic suspension to couple a mass artifact 

in the air chamber to a sensitive balance in the vacuum 

chamber. In this way, the artifact in air can be compared 

to a stable artifact traceable to the new definition of the 

kilogram in the vacuum chamber.

Accomplishments

•	 Completed the design and in-house construction of 

the non-magnetic aluminum vessel accommodating separate air and vacuum chambers. Incorporated 

appropriate vacuum technology (pumps, gauges, 

and components), vacuum and leak testing, and 

design and construction of vibration isolated 

support structure.

•	 Completed the design and construction of a new, 

non-magnetic aluminum magnetic suspension system 

to interface with sensitive (20 μg resolution) mass balance in air-to-vacuum vessel.

•	 Achieved stable (less than 1 mg) levitation with 200 g 

– 1 kg mass artifacts using new suspension outside of 

the vacuum chamber.

•	 Completed long-term (over 18 

months) study of several diamond-like carbon (DLC) coated 

stainless steel 1 kg mass artifacts 

for mass stability. Several coating 

processes are being considered to 

achieve chemical inertness, wear 

resistance, and overall stability in 

the dissemination of the unit of 

mass.

Planned Future 

Accomplishments

•	 Incorporate new suspension 

system into non-magnetic vessel 

and interface with sensitive mass 

balance and make first direct 

air-to-vacuum mass comparison 

using magnetic suspension technique with 1 kg mass artifacts.

•	 Identify sources of measurement uncertainty in magnetic suspension technique 

and estimate their magnitudes. Refine experimental 

technique to have combined relative standard uncertainty of 2 x 10-8 or lower.

•	 Based on long term study results, identify suitable 

coating for use in making stable mass artifacts.

•	 Propose magnetic suspension air-to-vacuum mass 

comparison technique as a Mise en Pratique (practical 

method for realization) for traceability to and dissemination of new kilogram definition. 

Customers and Collaborators

U.S. State Weights & Measures Laboratories; National 

Metrology Institutes; fundamental constants scientific 

community; Argonne National Laboratory; SilcoTech
60

Small Force Metrology

Challenge/Problem Addressed

The challenge is to provide accurate references (standards and techniques) for the calibration of forces 

measured using instrumented indentation equipment, 

optical and magnetic tweezers, surface forces apparatuses, and interfacial and atomic force microscopes. 

The forces measured by these instruments range from 

piconewtons (the light pressure exerted by a typical laser 

pointer) in singlemolecule biophysical studies of disease 

therapies, to tens of 

millinewtons (the 

weight corresponding to a gram mass) in 

studies of new dielectric coatings for metals 

and semiconductors. 

No accurate standards 

or reference forces exist below 10 micronewtons for the calibrations of these various 

scientific instruments.

The major push for 

accurate force measurement across 

the growing range 

of nanotechnological characterization 

tools is twofold. First, 

accuracy is required 

to reconcile theory 

with experiment. The 

leading wave of nanomanufactured products 

is composed primarily 

of new, nanostructured 

materials. The manufacturers creating these materials (most notably large 

U.S. multi-national companies focused on polymer coatings) cannot adequately characterize the performance of 

these new nanoengineered materials using the existing 

state of nanoscale materials characterization tools, and 

must instead rely on costly functional testing. Second, 

instrument providers and users demand a common level 

playing field to resolve inconsistencies between various 

manufacturers’ claims in an increasingly competitive 

nanotechnology market. 

More and more instrument users are lobbying for ready 

access to cheap, reliable force standards, even taking 

the initiative to work with instrument manufacturers to 

develop ASTM and ISO standards. Although mechanical 

characterization is widely used in nanotechnology for 

industrial as well as scientific applications, the forces 

applied by atomic force microscopes do not have SI 

traceability over the 

commonly used force 

range from piconewtons (10-12 N) to 

nanonewtons (10-9 N). 

Current generation SI 

traceability relies on a 

technologically challenging force transfer 

in a NIST-operated 

electrostatic force balance that provides a 

micronewton (10-6 N) 

force calibration 

with nanonewton 

sensitivity.

Objectives

•	Create the means to 

achieve SI traceability 

for small force measurement and instrumentation, including 

development and testing of internationallyaccepted standards 

of force in the regime 

below 10-3 N, exploration of atomic and 

single-molecule forces 

as potential intrinsic 

standards and references, and development of new instrument platforms 

at NIST that are capable of realizing ever smaller 

values of force in terms of traceably realized SI base 

units and quantum invariants.

Robert Rathe
61

•	 Develop or improve upon techniques for the dissemination of small force using microcantilevers to support 

nanomechanical investigators who are using atomic 

force microscopy to probe the physical characteristics 

of matter at the nanoscale.

•	 Lead and participate in international comparisons of 

small force calibration and the related topic of cantilever stiffness calibration with the objective of representing U.S. industrial and scientific interests as new 

international standards are proposed and vetted.

Accomplishments

•	 Demonstrated the first accurate scheme for practically realizing forces below the level of a nanonewton 

enabling the direct calibration of probes used in single 

molecule mechanical characterization experiments. 

The technique, which exploits a calculable electrostatic force between a flat probe tip and a thirty 

micrometer diameter metallic sphere, has been used 

as the basis for calibrating both normal and lateral 

force sensitivities of colloidal probe AFM instruments 

used at NIST. 

•	 Demonstrated that biological molecules could serve 

as intrinsic force standards. Biological molecules, in 

general, and DNA, in particular, exhibit some unique 

properties that make them excellent candidates for 

future NIST reference materials. In 2009, reliable 

methods for performing this complex single molecule 

experiment were developed and the first traceable 

measurements of this force were achieved. 

•	 Demonstrated the stable creation and manipulation of single atom chains using a newly-developed 

instrument for the feedback-stabilized break junction 

experiment. To achieve this result, we created a fiber 

interferometer system for the accurate measurement of 

picoscale displacements.

•	 Demonstrated a new method for characterizing the 

sliding friction between an atomic force microscope 

(AFM) cantilever tip and a compliant surface. The new 

technique yields the coefficient of friction between 

the surface and tip and also allows us to correct the 

results of cantilever-on-cantilever calibrations of AFM 

sensitivities. The results greatly improve the calibration 

accuracy (by as much as 20% in some instances). 

•	 Completed an informal round robin study of small 

force calibrations with Korea, Germany, and England 

that was initiated in 2008. This test is a first step in 

verification that micronewton force instruments and 

associated practices for dissemination of the micronewton are in agreement among the NMI laboratories 

that support such measurements. This comparison 

should also underpin the new ISO standard on cantilever stiffness calibration. 

Planned Future Accomplishments

•	 Complete development of the new platform for accurate single molecule tensile testing to achieve a stable, 

traceable system for calibrating intrinsic force standards based on molecular interactions. 

•	 Validate the accuracy of dynamic calibration techniques that use laser vibrometers to measure AFM 

cantilever thermal response and establish accurate 

correction coefficients to enable accurate, highthroughput calibration of AFM cantilever stiffness. 

•	 Implement photon momentum to apply calculable 

dynamic forces directly to a force sensor to obtain 

accurate optical forces. 

Customers and Collaborators

Asylum Research; Veeco Products
62

Next-Generation Rectilinear 

Wide-Bandwidth Vibration 

Measurements 

Challenge/Problem Addressed

Vibration measurements are used for environmental testing, diagnostics, product development, condition 

monitoring, process control, servo sensors, and global 

positioning. Some applications involve very high volume 

products or very expensive products. For example, the 

automotive industry relies heavily on absolute measurements of acceleration involving hundreds of transducers 

per test, and many tens of staff years are spent measuring 

accelerations on vehicles for airbag-deployment systems 

and for ride control of specific vehicle classes. Delivery 

of such systems in vehicles is measured in the millions 

of units. Other vibration metrology applications include 

the development and qualification of products of very 

high cost, such as aircraft and their components.

NIST currently provides vibration calibration services 

for a broad range of industries and government agencies using four aging accelerometer calibration systems 

developed in early 1960s. NIST customers, especially 

in the automotive and aerospace industries, need lower 

uncertainty in vibration calibrations due to increased 

global competitive pressures and safety requirements. 

Customer requirements drive the need for a costeffective, operationally efficient, and reliable system to 

calibrate the magnitude and phase sensitivity of accelerometers with reduced uncertainty and turn-around time. 

The performance limitations and maintenance needs of 

the current calibration systems create significant bottlenecks in timely and accurate NIST response to customer 

requirements.

Objective:

Develop and implement a next-generation calibration system for measurement of dynamic acceleration that would operate over the extended frequency 

range of 5 Hz to 20 kHz (covering the majority of 

current vibration measurement service requests) and 

replace four aging calibration systems used in five NIST 

SP250 measurement services. The new system will also 

provide a new capability to calibrate the phase of accelerometers - particularly important for accelerometers 

used for modal analysis and measurement of transient 

events (e.g., shock).

 Accomplishments

•	 Developed testbed for the evaluation of shakers 

consisting of a vibration isolated table, instrumentation, interferometer and optics, and a vibrometer. This 

testbed allows for easy setup of shakers for evaluation 

in typical operational configurations. 

•	 Characterized performance of a commercial shaker, 

including characteristics such as harmonic distortion, 

cross-axis (transverse) motion, magnetic field strength, 

temperature, and uniformity of motion of the table of 

the moving element.

•	 Collaborated with the Air Force Primary Standards Lab 

to establish specifications, test methods, and targets 

for shaker performance. The Air Force has expressed 

interest in the results of our shaker evaluations. 

Planned Future Accomplishments

•	 Identify commercial vibration generator that matches 

NIST specifications as closely as possible. Model, 

design, and implement any modifications required for 

the commercial vibration generator to meet the specified criteria. 

•	 Develop, test, and validate SI-traceable measurement 

procedures using the new vibration source and establish the uncertainty budget for the new system. 

Customers and Collaborators

Air Force Primary Standards Lab
63

Advanced Acoustical 

Measurements: Infrasound 

Metrology

Challenge/Problem Addressed 

The challenge is the development of first-ever SItraceable acoustical measurement capabilities and 

services in the infrasonic regime (from 2 Hz to 20 Hz) 

to provide accuracy, traceability, and credibility in 

infrasonic measurements to meet industry and governmental needs. These needs are driven by the desire 

to study, detect, and warn of many important natural 

phenomena and man-made events. Natural phenomena 

include volcanic activity, hurricanes, tornadoes, landslides, earthquakes, meteors, atmospheric turbulence, 

and oceanic waves. Man-made events, such as rocket 

launches, airbag deployment, supersonic aircraft travel, 

explosions resulting from weapons tests, and tactical 

military operations involving vehicles and weapons also 

generate high-amplitude, low-frequency infrasound of 

great significance. Infrasonic measurements are important to the transportation industry, medical community, 

geophysical-science community, meteorologists, and 

U.S. government agencies responsible for supporting the 

International Monitoring System (IMS) as part of the U.S. 

involvement in the Comprehensive Nuclear-Test-Ban 

Treaty, conducting atmospheric and climate studies, developing weather prediction models (e.g., NOAA), and 

designing new applications for the military and national 

defense. Manufacturers of component infrasound transducers and systems also need the new NIST measurement capabilities and service for recognized, validated 

SI traceability. Measurements of hazardous sounds with 

high-amplitude infrasonic components, such as those 

produced by automotive airbag deployment, would also 

be provided with improved accuracy, traceability, and 

credibility. In particular, the Society of Automotive Engineers (SAE) requires a more accurate calibration method 

and standard for measuring infrasound to influence 

the design and operation of automotive airbags and to 

protect the hearing of vehicle occupants during airbag 

deployment. 

Objectives

Develop new acoustical measurement capabilities and a service in the infrasonic regime (from 2 Hz 

to 20 Hz) to provide accuracy, traceability, and credibility in infrasonic measurements to meet industry and 

governmental needs.

Accomplishments

•	 Completed component selection and established the 

basic reciprocity-based measurement system design 

using a high-order bandpass filter set, signal generator, 

signal conditioning/switching apparatus, voltmeter, 

temperature probe, barometer, and personal computer 

as controller of these components using software 

developed by the project team. 

•	 Completed the assembly and integration of these 

components, the optimization of equipment power 

and signal interfaces, the development of a sequence 

of measurement steps in the initial procedure involving the pressure-field reciprocity method and air-filled 

plane-wave acoustical couplers, and the development 

of control and data analysis software for the initial version of the system. 

•	 Developed software to calculate microphone sensitivities from data measured with the system, in accord 

with equations based on reciprocity and the use of 

air-filled plane-wave couplers consistent with ANSI 

S1.15-2 and IEC 61094-2 published standards. 

Planned Future Accomplishments

•	 Perform preliminary measurements with laboratory 

standard microphones and select system configuration 

parameters for proof tests of system.

•	 Perform proof tests of system using laboratory standard 

microphones and complete the evaluation and documentation of this system, software, and procedures. 

•	 Develop quality system documentation and transition 

the new capabilities to a measurement service.

Customers and Collaborators

U.S. Department of Energy; Sandia National Laboratory; 

Los Alamos National Laboratory; U.S. Department of 

Defense; U.S. Army; NOAA; National Weather Service; 

Chapparel Physics
64

Uniform Realization of the 

Unit of Torque in the U.S.

Challenge/Problem Addressed

Torque measurements are used heavily during product assembly and testing throughout the aerospace, 

automotive, and manufacturing sectors. Uncertainty 

evaluations surrounding the measurements are based 

upon current best efforts by private and independent 

organizations. The lack of a singular national torque 

standards laboratory in the U.S. requires time-consuming and costly maneuvers by each of multiple individual 

users throughout the supply chain to justify their own 

systems to even a basic level of uncertainty acceptance 

by other users. For example recalling a single jet engine 

due to any problem including poor assembly of torqued 

components can trigger costs to the manufacturer that 

begin at $500,000. The human and capital costs can be 

far higher when improper torque values are not identified and component failure occurs. 

Various U.S. manufacturers and commercial secondary standards laboratories, including Boeing Aircraft, 

Instron Corporation, Interface Inc, HBM Inc, and Tovey 

Engineering, have either endorsed an ASTM request for 

NIST to conduct SI-traceable torque calibrations or have 

solicited NIST directly with the same request. The industry claim is that NIST involvement is needed to provide 

absolute measurements that will solve the existing disagreement among current laboratory calibration results. 

The ASTM Mechanical Testing committee has submitted 

a formal request to NIST as part of their effort to write 

and place into use several U.S. torque documentary 

standards that will be based upon physical metrology. 

NIST maintains the technically correct position that 

torque measurements performed by industry can claim 

traceability to international standards by combining 

traceable measurements of the various components 

from which a torque value is derived - length and force. 

Secondary torque laboratories in the U.S. either use 

this approach or procure calibration of their secondary 

standard torque transducers from a foreign National 

Measurement Institute (NMI) that offers a torque calibration service. 

Industry has been less than satisfied by the NIST position 

on torque due to widely differing laboratory measurement comparison results; the rates of interlaboratory 

non-agreement approached 50% in one study . This 

discrepancy is due to a lack of uniformity in physical 

standards, measurement techniques, and documentary 

standards. The lack of uniformity within the torque community is a technical roadblock to widespread metrological comparability that is not addressed by the current 

NIST position on torque; hence, the impetus for NIST to 

become more involved. 
65

Objectives

Provide the tools and measurement methods required to assist U.S. industry and secondary calibration 

laboratories to identify and resolve the technical causes 

for the current measurement disagreements. 

Improve the secondary calibration system in the U.S. 

by improving NIST torque measurement capabilities to 

decrease the measurement uncertainty and provide a 

reference torque value at a single targeted range, contributing to planning and execution of a torque measurement comparison among U.S. secondary laboratories, 

analyzing comparison results and identifying areas for 

improvement in the secondary system, and supporting 

development of torque metrology standards within the 

ASTM Mechanical Testing committee. 

Conduct bi-lateral or multi-lateral comparisons with 

key NMI torque laboratories to verify U.S. capabilities according to the international Mutual Recognition 

Arrangement (MRA). Validate the U.S. torque measurement system and achieve comparability of industrial 

torque measurements through uniform practices and 

SI traceability. 

Accomplishments

•	 Designed and fabricated specialty components and 

adapters for torque load cell installation to the NIST 

torque machine.

•	 Performed the first torque calibration using the complete setup of the NIST torque machine and a commercial torque load cell. 

•	 Evaluated the integrity of the torque machine setup 

which resulted in a redesign of the adapter parts for 

improved durability.

•	 Developed a unique supported torque arm 

methodology that will decrease torque 

measurement uncertainties. 

Planned Future Accomplishments

•	 Complete the design, fabrication, and implementation of the supported torque arm methodology. 

Perform first initial torque calibration using the supported torque arm methodology and compare results 

between unsupported vs. supported torque arm calibration and their uncertainties. 

•	 Circulate transducer to selected U.S. secondary 

laboratories to obtain comparison data, analyze 

results, identify sources for disagreement, and 

determine possible methods to achieve more 

uniform measurements.

Customers and Collaborators

Boeing Aircraft; Instron Corporation; Interface Inc; HBM 

Inc; Tovey Engineering
66

Automation Update of 

Force Laboratory 

Deadweight Machines

Challenge/Problem Addressed

Calibrations conducted at the laboratory’s deadweight force standard workstations are highly dependent on 

automation systems that were designed and implemented in the late 1980’s. Malfunctions have been appearing 

in the computers, interface components, and voltageratio measuring instrumentation that can no longer be 

corrected by NIST staff or repair facilities. Simple replacements with current generation instruments cannot 

be made on an individual unit basis, due to incompatibilities with former generation computers, interfaces, or 

software. A unified upgrade of these items is necessary 

to prevent degradation of the force calibration services. 

Objectives

Update all force laboratory automation hardware and software to maintain the current capability of force 

calibration services. A FY2005 modernization effort 

identified and validated the methods that will now be 

used to modernize the automation of the remaining five 

force laboratory deadweight machines. 

The primary impact of this work will be to prevent 

catastrophic and lengthy interruption of NIST force 

calibration services to customers, who depend upon 

NIST for traceability in force measurements in all 

phases of science, industry, and commerce. In addition, 

improved force calibration efficiencies will result from 

the automation upgrade, including a greater selection of 

voltage-ratio measuring instruments and automation of 

deadweight machine features that currently can only be 

performed manually. The enhanced automation will also 

save wear and tear on the hydraulic pumps by allowing 

shutdown of the hydraulic system after a calibration is 

complete.

Accomplishments

•	 Completed automation update for both the NIST 

1.334 MN and 4.448 MN deadweight machines, 

including custom control programs, modern data 

acquisition systems, interfaces to new reference multimeters, and improved user interfaces. 

•	 Evaluated and integrated a laser measurement sensor 

into the 113 kN dead weight machine to replace a 

failed optical sensor (infrared shadow sensor). The sensor will allow us to operate the machine in split-frame 

mode under full automation whenever this machine 

upgrade is completed in the future.

•	 Outfitted the 27kN machine that was automated 

earlier as the pilot project with programs to allow 

calibration with the new voltmeters. 

Planned Future Accomplishments

•	 Complete automation update for the NIST 498 kN and 

2.2 kN deadweight machines. 

•	 Complete automation update for the NIST 113 kN 

deadweight machine. 

Customers and Collaborators

Boeing Aircraft; Instron Corporation; Interface Inc; HBM 

Inc; Tovey Engineering; Morehouse; Lockheed; United 

Technologies
67

Implement Robotic Mass 

Measurements in SP250 

Services

Challenge/Problem

Traditional implementation of SP250 mass calibration services require the physical presence of NIST staff 

during the measurement of a customer’s mass standards 

using weighing designs. As such, the human operator’s 

presence introduces thermal effects and operator-dependent repeatability issues into the measurement, as well 

as resulting in a larger turnaround time for the service 

and a larger statistical uncertainty. The major statistical 

barrier with the existing robotic balances is that some of 

the currently used weighing designs published in NIST 

Technical Note 952 are not feasible for the robotic balances. New (orthogonal or non-orthogonal) weighing 

designs must be constructed, tested, and evaluated.

Objectives

Develop and implement the procedures required to have fully automated / robotic mass measurement 

services in the range from 1 mg to 64 kg and for solid 

density measurements of mass standards in the range of 

1 kg to 10 g. This will eliminate human-induced errors, 

shorten turnaround time (since measurements can be set 

up to be performed outside of regular business hours), 

and possibly lower the cost for the service in the future.

Develop, test, and evaluate weighing designs, uncertainty budgets, and statistical process control procedures. Develop quality system for newly developed 

methods and incorporate into the SP250 calibration 

services for customers.

Accomplishments

•	 Implemented the 64kg robotic balance for SP250 

services for weights in the 10 kg to 64 kg range. 

•	 Developed new weighing designs for the 1 kg to 1 mg 

range; they are currently under testing and evaluation.

Planned Future Accomplishments

•	 Complete testing, analysis, and evaluation of new 

weighing designs.

•	 Develop the statistical process control procedures 

uncertainty budget in compliance with the ISO guide 

to measuring uncertainty.

•	 Develop all documentation required for the ISO 

17025-compliant quality manual for mass calibration 

procedures.

•	 Deliver robotic measurement services for SP250 tests 

in the range of 1 mg to 1 kg and fully automated density measurements.

Customers and Collaborators

U.S. State Weights & Measures Laboratories; Army, 

Navy, and Air Force Calibration Laboratories; Boeing; 

Lockheed; Amgen; Troemner; Mettler-Toledo; Los Alamos National Laboratory Robert Rathe
68

Next-Generation Acoustic 

Measurements of 

Microphones

Challenge/Problem Addressed 

The challenge is to meet the new and more demanding needs of NIST calibration customers, such as 

the U.S. Army and U.S. Air Force primary standards 

laboratories, Lockheed-Martin Corporation, Mine Safety 

and Health Administration, and measuring instrument 

manufacturers, such as Bruel & Kjaer North America, 

who are increasingly sending new types of laboratory 

microphones to NIST for calibration. These microphones 

can meet new and more demanding customer needs 

because the microphone properties enable them to be 

calibrated to smaller uncertainties over a wider frequency range than those of current NIST SP250 measurement services. Microphones calibrated at NIST via these 

services are used by customers to provide traceability for 

many thousands of other acoustical measuring instruments used in critical measurements for product design 

and conformance, worker and military personnel safety, 

and health care. Provision of next-generation microphone pressure calibration services with smaller uncertainties by NIST will enable customers to meet competitive and contractual pressures to provide state-of-the-art 

measurements, to satisfy legal metrology needs and 

avoid costly litigation and damages, and to achieve reliable measurements of noise emission close to regulated 

or mandated limits. As examples: (1) a 1 dB difference in 

noise measurements for an aircraft certification could be 

worth $100 million; and (2) air conditioning units that 

do not meet new classroom noise standards for school 

construction could be shut out of that very large market. 

Objectives 

Develop and provide next-generation acoustical measurement services that meet the needs of our 

customers by reducing our measurement service uncertainties for pressure-field calibrations of next-generation 

laboratory standard microphones (ANSI/IEC Types LS2aP 

and LS1Pn). 

Accomplishments

•	 Completed the design, test, and integration of the 

measurement system, software, and procedures 

required for reciprocity calibrations of Type LS2aP 

laboratory standard microphones from 31.5 Hz to 20 

kHz in plane-wave air-filled couplers. This measurement capability halves our measurement uncertainties 

in the most critical frequency range. 

•	 Calibrated a Type LS2aP microphone for the Air Force 

Primary Standards Laboratory from 31.5 Hz to 20 kHz 

using the newly developed next-generation 

measurement service. 

Planned Future Accomplishments

•	 Complete the design, test, and integration of the measurement system, software, and procedures required 

for reciprocity calibrations of Type LS1Pn laboratory 

standard microphones from 50 Hz to 10 kHz in planewave air-filled couplers. 

•	 Provide a next-generation measurement service 

for Type LS1Pn microphones that halves our 

measurement uncertainties in the most critical 

frequency range.

Customers and Collaborators

U.S. Army and Air Force Primary Standards Labs; Bruel 

& Kjaer North America; Mine Safety and Health Administration; Lockheed-Martin Corporation; Wyle Laboratories; Honeywell
69

Low Frequency Vibration 

Metrology

Challenge/Problem Addressed

Accurate measurement of low frequency vibration is critical for applications such as inertial guidance 

systems, assessment of whole-body vibration in vehicles, 

and monitoring of seismic vibrations in nuclear reactors and other structures. Specific industries that require 

accurate low frequency vibration measurements include 

the transportation industry, off-road heavy equipment 

manufacturers, nuclear power industry, building and 

construction industry, and transducer manufacturers. The 

current NIST low frequency vibration calibration system 

is outdated, requires significant time and expense for 

maintenance, and is inefficient in its operation. 

Objectives

Establish a new low frequency measurement capability and calibration service that covers lower frequencies (0.2 Hz – 200 Hz) with reduced uncertainty for 

the entire target frequency range and retire the existing 

exceedingly high-maintenance and operationally-inefficient low frequency vibration system that is currently 

used for much of the target range. 

Validate the new measurement capability and procedures and establish the basis for using the new system 

for customer calibrations by conducting a measurement 

comparison with other National Measurement Institutes. 

Accomplishments

•	 Designed the low frequency calibration system and 

acquired all system components (e.g., temperature 

sensors, zero-position controllers, data acquisition 

hardware and software). 

•	 Designed, fabricated, installed, and tested the optical components for measuring the motion of the two 

shakers of the new calibration system.

•	 Performed extensive measurements to characterize 

the motion of the new vibration generators as a function of frequency and amplitude, including analysis 

of rocking motion (yaw, pitch, and roll), transverse 

motion, harmonic distortion, and signal-to-noise 

ratios. 

•	 Analyzed various components of the measurement 

uncertainty budget, including the degree of vibration 

isolation between system components, the calibration 

of the function generator, and the magnetic flux densities produced by the vibration generators. 

Planned Future Accomplishments

•	 Complete operational testing and analysis of the new 

low-frequency vibration metrology system and establish final measurement uncertainty budget. 

•	 Conduct the international measurement comparison 

in low-frequency vibration. 

•	 Develop all quality system documentation to transition the new measurement capability to a measurement service for NIST customers. 

Customers and Collaborators

NASA; Air Force and Navy Primary Standards Labs; 

Sandia National Laboratory; Duke Energy; Rockwell 

Automation; Raytheon; Boeing; Caterpillar; John Deere; 

Endevco; Kistler Instruments
70

Acceleration

- ANSI S2 Mechanical Vibration & Shock (ViceChair)

WG2 Terminology (Chair)

WG5 Calibration & Use of Instruments (Chair) 

- ANSI/ASA US TAG for ISO TC108 (Chair) 

- ANSI/ASA US TAG for ISO TC108/SC3 Use and 

Calibration of Mechanical Vibration & Shock Measuring Instruments (Chair)

- Metrology Working Group 9 Acoustics & Vibration

- CC for Acoustics, Ultrasound, and Vibration 

(CCAUV)

- ISO TC 108 Mechanical Vibration & Shock (Chair 

of US Delegation)

- WG 1 Terminology

- WG 26 Signal processing methods for analysis of 

mech. vibration & shock (Convener)

- SC3 Use and Calibration of Vibration & Shock 

Instrumentation (Chair of US Delegation)

- SC3/WG6 Calibration of Vibration & Shock Transducers

- SC3/WG10 Vib. Condition Monitoring Transducers and Instrumentation

Force

- ASTM E28 Mechanical Testing

- Metrology Working Group 7 Mass & 

Related Quantities

- USNWG / OIML TC9 

/ WG1 Load Cells

- CC for Mass and 

Related Quantities 

(CCM) WG on Force

- ISO TC 201 SC9 

Scanning Probe 

Microscopy

Mass

- ASTM E41.06 Weighing 

Devices

- Metrology Working 

Group 7 Mass & Related 

Quantities

- OIML TC9 Instruments 

for Measuring Mass & 

Density

- OIML TC9 SC3 Weights 

(Tech Advisor)

- CC for Mass and Related 

Quantities (CCM) WG on 

Mass & Density

Not generally applicable

National 

Standards

SIM

OIML

CIPM Consultative Committees (CC) 

ISO/IEC

Standards Leadership And Participation
71

Manufacturing Technology

- ANSI/ASME B5 Machine Tools

- ANSI/ASME B5/TC52 Machining & Turning 

Centers

- ANSI/ASME B5/TC56 Information Technology for 

Machine Tools (Chair)

- ANSI/ASME B89.3.4 Axes of Rotation

- IEEE P1451 Smart Transducer Interface for Sensors & Actuators; P1451.0, .1, .2, .3, .4, .5, & .7 

WGs 

- IEEE 1588 Precision Synchronization for Networked Measurement & Control WG

- IEEE I&M Society TC9 Sensor Technology Committee (Chair)

- IEEE-SA Standards Committee (I&M Society 

liaison)

- ASTM F42 Additive Manufacturing Technologies

Not generally applicable

Not generally applicable

Not generally applicable

- ISO TC 39 Machine Tools 

- ISO TC 39/SC2 Test Conditions for Machine Tools 

(Secretariat)

- ISO TC 39/SC2/WG1 Geometric Accuracy of 

Machine Tools

- ISO TC 39/SC2/WG3 Test Conditions for Machining Centers

- ISO TC39/CS2/WG4 Test Conditions for Turning 

Centers

- ISO TC 39/SC2/WG6 Thermal Effects (Convener)

- ISO TC39/SC2/WG7 Capability of Machine Tools

- ISO TC 184/SC4 Industrial Data

Optics

- ANSI/Optics and Electro-Optics 

Standards Council (OEOSC) US TAG 

for ISO TC 172 Optics and 

Photonics

Not generally applicable

Not generally applicable

Not generally applicable

- ISO TC 172 Optics and Photonics

Acoustics

- ANSI/ASA S1 Acoustics 

- WG 1 Standard Microphones & Their 

Calibration (Chair)

- WG21 EMS of Acoustical Instruments

- ANSI/ASA S3 Bioacoustics

- WG48 Hearing Aids

- ASA Committee on Standards 

(ASACOS)

- SAE Emergency Vehicle Siren (J1849) 

Task Force (Vice-Chair)

- SAE Emergency Warning Lights and 

Devices

- ANSI US TAG for IEC TC87 

Ultrasonics

- Metrology Working Group 9 Acoustics & Vibration

- US National WG for OIML TC13 

Measuring Instruments for Acoustics 

and Vibration (Technical Advisor)

- CC for Acoustics, Ultrasound, and 

Vibration (CCAUV)

- IEC TC 29 Electroacoustics (Chair of 

US Delegation)

- IEC TC 29/WG5 Measurement Microphones

- US National Committee for IEC 

(Member, as Technical Advisor for TC 

29 Electroacoustics)
72
73

Developing the measurements and standards infrastructure 

needed for the application of intelligent systems

Intelligent Systems 

Overview

The Intelligent Systems Division supports a future in which U. S. manufacturing becomes more accurate, agile, intelligent, interoperable, and reconfigurable through constant innovation. Our work promotes the development of measurement science and interoperability standards that will enhance manufacturing robotics and automation equipment and the underlying 

industrial control systems. 

Federal and industry groups have specifically stressed the importance of innovation in robotics, manufacturing automation, and control systems for maintaining U. S. primacy in innovation and high-value-added manufacturing. For example, key technologies for the future 

of manufacturing cited by a National Research Council publication1 include interoperability/interoperability standards; pervasive and adaptive process control; security and 

other protection systems; modeling and simulation technology; and the incorporation 

of intelligence into processes and products. The President’s Framework for Revitalizing American Manufacturing recognizes the importance of “developing advanced 

robotics technologies that allow the U.S. to retain manufacturing, and respond 

rapidly to new products and changes in consumer demand.”2 

1 National Research Council, “New Directions in Manufacturing: Report of a Workshop,”

http://www.nap.edu/catalog/11024.html, 2004.

2 Executive Office of the President, “A Framework for Revitalizing American Manufacturing,” December 2009.

Chief: 

Elena Messina (Acting)

NIST

100 Bureau Drive 

Stop 8230

Gaithersburg, MD 

20899-8230

Phone: 301 975-3510

Fax: 301 990 9688

Email:

elena.messina@nist.gov
74

The 2011 Budget proposed by the Administration states 

that “standards and measurements can improve the societal benefits from emerging technologies by allowing for 

interoperability, promoting efficiencies, and enabling 

better manufacturing methods.”3 

Robotics holds tremendous untapped potential in manufacturing. It is estimated that 90% of potential users have 

not yet adopted robotics.4 Development and adoption 

of next-generation robotics technology – supported and 

accelerated by new measurements and performancebased standards – will “enable the nation to maintain a 

strong, globally competitive manufacturing base, ensure 

our continued economic growth, and help safeguard 

our national security.”5 “Robotics is a key transformative 

technology that can revolutionize manufacturing... the 

promise of flexible automation and automation for mass 

customization has not been realized except for special 

cases.... Robots [need] to be smarter, more flexible, and 

able to operate safely in less structured environments 

shared with human workers6.” 

Current and emerging user communities lack any 

means whatsoever of specifying quantitatively what 

performance they need from a robot. Nor are there any 

means of objectively and reproducibly measuring how 

well robots or their components meet a given set of 

requirements. As robots and other manufacturing equipment become more flexible and adaptable, and work in 

closer unison with humans, safe operations become a 

paramount issue. It is essential for progress in the area 

of human-robot collaboration that there be consensus 

standards for measuring the performance of safety sensors, control systems, and other equipment for industrial 

robot arms and for mobile robots.

Other manufacturing equipment that is much more pervasive on the shop floor needs to also support greater 

agility. Agility requires well-defined interoperability standards that permit reconfiguration of equipment without 

necessitating costly and unreliable translators. 

3 Office of Science and Technology Policy, R&D Summary - 

Investing in the Building Blocks of American Innovation, http://

www.whitehouse.gov/sites/default/files/fy2011rd%20final.pdf, 

February 2010.

4 World Robotics 2006 statistics summarized by H. Christensen 

in presentation “’New’ Applications in Industrial Robotics,” 

RoboBusiness 2007, Boston, MA, May 2007.

5 “A Roadmap for US Robotics: From Internet to Robotics,” 

Computing Community Consortium (CCC) and Computing 

Research Association (CRA) report, May 21, 2009, http://www.

us-robotics.us/reports/CCC Report.pdf 

6 ibid

The interoperability standards must allow for rich 

information exchange to enable new programs to be 

executed on machines without the typical trial and error 

fine-tuning currently needed. With greater information flowing through the entire work cell and beyond, 

adjustments and corrections can be made to allow parts 

to continue to be produced correctly without incurring 

costly human intervention or scrap. 

As factory equipment becomes more tightly networked 

within the work cells as well as with external systems, 

security and performance issues grow in importance. 

The vision of more agile and efficient enterprises relies 

on manufacturing equipment and software systems that 

have control systems that communicate vast quantities of information through shop floor networks. These 

industrial control systems and their networks must have 

well-characterized and reliable performance and must 

be impervious to security threats. Beyond traditional 

manufacturing enterprises, the Nation’s critical infrastructure also relies on similarly complex and vulnerable 

industrial control systems. Concerted efforts in characterizing and securing industrial control systems can 

therefore benefit numerous sectors. In particular, there 

is an urgent mandate for making the Smart Grid secure 

and interoperable. NIST’s expertise in working with the 

critical infrastructure networks and control systems is 

being leveraged for the new Smart Grid initiative.

Referring to the Drivers and Needs for U. S. Manufacturing Innovation and Competitiveness identified by the 

Manufacturing Engineering Laboratory, the Intelligent 

Systems Division seeks to address the increasing pace of 

technological change, which encompasses product and 

process innovation, as well as reduction in time to market, higher quality and better performance of customized products, increased productivity and reduced costs, 

and new safety and security challenges.

The Intelligent Systems Division tackles the challenges 

posed in attaining this vision of the future by partnering 

with industry and academia to ensure that innovation in 

manufacturing systems is well-characterized and quantifiable (through development of a measurement science), 

open, extensible, and reconfigurable (through development of interoperability standards), as well as safe and 

secure (through industrial control network security standards). To target these challenges, our Division’s work 

is organized into three programs. The Measurement 

Science for Manufacturing Robotics and Automation 

Program provides means of characterizing, 
75

measuring, and assuring the performance of advances in 

technologies that make possible manufacture of higher 

quality and more complex parts and assemblies through 

predictable, well-characterized manufacturing equipment. Flexible, reconfigurable manufacturing systems 

and model-based manufacturing require well-defined 

and rich information transfer, which is addressed by 

the Intelligent Manufacturing Robotics and Automation Interoperability Standards Program. The Intelligent 

Manufacturing Industrial Control Systems and Network 

Standards Program responds to 

the need for safe, secure, and 

reliable manufacturing control 

systems. The Intelligent Systems 

Division is world-renowned 

for its accomplishments in 

development of measurement 

science, tools, and interoperability solutions for leading-edge 

mobile robots and other complex automation that has been 

applied to defense, transportation, and security. We bring 

this core competence to bear in 

our work within the manufacturing domain.

Mission

To develop the measurements and standards 

infrastruture needed for the application of 

intelligent systems

Facilities and Equipment 

I

SD is expanding the set of equipment and facilities that 

support its measurements and infrastructure mission. 

ISD uses unique facilities and tools to define performance 

metrics and measurement methods and to serve as testbeds 

for industry and researchers.

Dimensional Metrology Interoperability Testbed: Supports 

development and validation of new data and interface protocols and test suites for quality measurement information. 

Smart Machining And Machine Tool Interoperability 

Testbed: Supports validation and testing of emerging data 

standards for machining equipment.

Industrial Control Networking and Cybersecurity Testbed:

Supports development and testing of new network performance standards 

Industrial Robotics Measurement Science Testbed: 

Supports development and validation of new performance 

test methods for advanced industrial robot arms and 

mobile robots.

Micro- through Nano-devices 3D Metrology Testbed: 

Provides 1D, 2D, and 3D assembly and positioning 

metrology and test facilities using high-precision MEMS 

stages, controllers, nanoprobes and calibration devices.

Nanorobotics and NEMS Testbed: Develops foundational sensing and measurements for nanorobotics and 

NEMS with an emphasis on 

nanoscale displacement 

and force.

Indoor and Outdoor Position 

Measurement and Tracking 

Facilities: Permits evaluation 

of sensors and algorithms for 

mobile robots through a variety 

of dynamic vehicle and sensor 

data collection efforts. This set 

of facilities includes standard 

and draft test method installations, as well as several unique 

buildings and outdoor areas appropriate for applicationspecific scenarios for evaluating robot performance. 

Examples include military and bomb squad operations. 

State-of-the art 3D and 6D sensors: Support 

characterization and development of test methods and 

reference data sets (ground truth) against which to 

measure sensing and positioning accuracy, both 

statically and dynamically.

Facilities and Equipment 

Challenges 

NIST is currently slated to relinquish the site that houses the Indoor and Outdoor Position Measurement and Tracking Facilities in the coming years. A new 

building will be constructed on campus using American 

Recovery and Reinvestment Act funding. However, the 

allocated funding is insufficient to replicate current 

square footage available offsite.

Resources

Staff

•	 31 NIST Staff

•	 14 Guest Researchers

FY2010 Estimated Funding

•	 $5,509,600 STRS

•	 $3,348,368 Other Agency
76

ISD Program

Intelligent Manufacturing 

Industrial Control 

Systems & Network Standards

The introduction of information technologies, such as wireless and Ethernet, into critical 

industrial infrastructure systems has provided greater and more agile control over electric power, water, oil, natural gas and manufacturing facilities around the country. The 

modernization of these systems, however, requires that security measures , termed 

“critical infrastructure protection” (CIP), be implemented to protect them from accidental and intentional incidents. This program develops the security standards and guidelines 

for the computerized systems that control the nation’s utilities as well as other staples of 

daily life. It also drives development of new security tools for future systems. 

Staff

3 NIST Staff 

3 Total FTEs 

Challenge

Safe, secure, and reliable industrial control systems (ICS) are essential for U.S manufacturers and other 

critical infrastructure. As inter-connectivity grows, the 

challenges in guaranteeing the security of the most critical systems increase correspondingly. The same problems arise as with conventional business information 

technology, but are made more difficult by the increased 

demands for reliability and real-time execution required 

by industrial automation. It is not enough to apply IT 

security solutions to the computers in the control room – 

great care must be taken to ensure that equipment spanning decades of 24/7 operation remain operating. 

Technical Strategies

The program has three primary strategies to address the challenges: secure existing systems; drive 

toward built-in security for new systems that will be 

deployed in the future; and develop security and performance test methods for these systems.

Results & Impacts

•	 Participated in the development of NIST Special Publication (SP) 800-53, Recommended Security Controls 

for Federal Information Systems and Organizations, 

Revision 3 to standardize the security controls for federally owned/operated ICS. NIST SP 800-53, Revision 

3 has been accessed over 1,250,000 times since its 

release in February 2009. 

•	 Participated in the development of the North American Electric Reliability Corporation (NERC) CIP, 

Revision 2 cyber security standards, CIP-002-2 – CIP009-2, which were approved by the NERC Board of 

Trustees on May 6, 2009. These revised NERC CIP 

cyber security standards will play a major role in 

securing the North American Bulk Electric System and 

the future Smart Grid.

•	 Participated in the development of the NIST Framework and Roadmap for Smart Grid Interoperability 

Standards, Release 1.0 report that identifies a foundational set of standards for grid interoperability and 

security, as well as high-priority action plans to fill 

gaps where additional standards are needed. 

•	 Developed NIST Special Publication (SP) 800-82, 

Guide to Industrial Control Systems (ICS) Security that 

has been accessed over 750,000 times since the initial 

public draft. NIST SP 800-82 is recognized by the 
77

community as one of the most valuable ICS security 

documents available today and is heavily used and 

referenced in the private sector, which owns/operates 

90% of the critical infrastructure.

•	 Developed and published version 1.0.1 of the Industrial Ethernet Network Performance (IENetP) Test Tool 

in April 2009. This test tool helps product developers 

improve the reliability of their product(s) before they 

are shipping to customers.

Publications

ANSI/ISA-99.02.01-2009 – Security for Industrial Automation and Control Systems: Establishing an Industrial 

Automation and Control Systems Security Program

Industrial Control System (ICS) Security Standards and 

Guidelines, World Cyber Security Summit, 

Kuala Lumpur, Malaysia, May 20-21, 2008

Testing, Comparing Industrial Ethernets, InTech 

Magazine, August 2009, Cover Story, pp. 12-15.

Contact Information 

Keith Stouffer

301-975-3877

keith.stouffer@nist.gov

Board Memberships

Staff Board Membership

Jim Gilsinn Managing Director of 5 Committees, International Society of Automation’s (ISA’s) Standards & Practices (S&P) 

Board

Leadership

Staff Leadership

Jim Gilsinn Editor, ISA-99 Committee on Security for Industrial 

Automation & Control Systems, Working Group 2 and 7

Jim Gilsinn Leadership Committee, ISA-99

Jim Gilsinn Chair, ISA Expo Security Conference Committee 2007-

2009

Jim Gilsinn Coordinator, ODVA, Inc. EtherNet/IP Implementors 

Workshop

Keith Stouffer Technical Advisor, US TAG for the IEC TC65 committee

Keith Stouffer Leadership committee, ISA-99

Keith Stouffer Co-Chair, NIST Smart Grid Industry-to-Grid (I2G) 

Domain Expert Working Group

Keith Stouffer Coordinator, NERC Critical Infrastructure Protection 

(CIP) Standards Drafting Team Kick Off Meeting, NIST, 

October 2008

Keith Stouffer Technical Advisor, CIGRE B5 committee

Keith Stouffer Invited speaker at over 20 international conferences and 

forums

Awards and Leadership
78

Intelligent Manufacturing 

Industrial Control Systems & 

Network Standards Projects

Federal Industrial Control 

System Security

Challenge/Problem Addressed

Safe, secure, and reliable federally owned or operated industrial control systems are essential for the 

National critical infrastructure. Currently, federal and 

private sector organizations in the electric sector follow 

different security standards.

Objectives

•	 Provide federal organizations that operate industrial 

control systems (e.g., Bonneville Power Administration, Bureau of Reclamation, Federal Aviation Administration, Tennessee Valley Authority), the required 

technical guidance and baseline security safeguards 

to secure these systems, significantly reducing the risk 

of compromise and negative impacts to federal critical 

infrastructure. 

•	 Actively work with the North American Electric 

Reliability Corporation (NERC) and Federal Energy 

Regulatory Commission (FERC) to facilitate the development of security standards for the North American electric sector that are commensurate with the 

security standards for federal agencies that operate 

industrial control systems in the electric sector.

Accomplishments

•	 NIST SP 800-53, Revision 3 was developed to standardize the security controls for federally owned/

operated ICS. This standard, “Recommended Security 

Controls for Federal Information Systems,” is the first, 

and currently only, security standard that addresses 

both general information technology (IT) systems and 

ICS. This allows the federal agencies, as well as the 

private sector if desired, to use one document to determine the proper security controls for their IT systems 

as well as to effectively secure their industrial control 

systems while addressing their unique requirements. 

NIST SP 800-53, Revision 3 is also actively being 

vetted within the ISA-99 WG4 (Industrial Automation 

and Control Systems Security) and IEC TC65/WG10 

(Security for Industrial Process Measurement and 

Control) standards committees, which are developing 

private sector international cyber security standards 

for industrial control systems. NIST SP 800-53, Revision 3 has been accessed over 1,250,000 times since 

its release in February 2009.

•	 Developed NIST Special Publication (SP) 800-82, 

Guide to Industrial Control Systems (ICS) Security

which has been accessed over 750,000 times since 

the initial public draft. NIST SP 800-82 is recognized 

by the community as one of the most valuable ICS 

security documents available today and is heavily 

used and referenced in the private sector, which owns/

operates 90% of the critical infrastructure.

•	 Participated in the development of NERC CIP, Revision 

2 cyber security standards, CIP-002-2 – CIP-009-2 

(Cyber Security), which were approved by the NERC 

Board of Trustees on May 6, 2009 after passage by 

the electric industry with a quorum of 94.37% and 

an 88.32% approval rating. These revised NERC CIP 

cyber security standards will play a major role in 

securing the North American Bulk Electric System and 

the future Smart Grid. These standards cover Asset 

Identification, Management Controls, Personnel and 

Training, Electronic Perimeters, Physical Security, Incident Reporting and Recovery. 

Planned Future Accomplishments

•	 Contribute to the development of NERC CIP, Revision 4 cyber security standards which will address a 

larger portion of the electrical grid that will play an 

even greater role in securing the North American Bulk 

Electric System and the future Smart Grid.

Customers and Collaborators

Bonneville Power Administration, Bureau of 

Reclamation, CIGRE - International Council for Large 

Electric Systems, Department of Homeland Security, 

Federal Aviation Administration, Federal Energy Regulatory Commission, Instrumentation, Systems, and Automation Society (ISA), North American Electric Reliability 

Corporation, Tennessee Valley Authority 
79

Private Sector 

Industrial Control 

System Security

Challenge/Problem Addressed

Public and private sector critical infrastructure organizations currently have different 

security requirements and safeguards in place, 

which could lead to vulnerabilities and inefficiencies. A harmonized set of security requirements and baseline security safeguards will 

provide consistent levels of protection for both 

public and private sector critical infrastructure.

Objectives

•	 Provide private sector organizations that operate 

industrial control systems the technical guidance and 

baseline security safeguards to secure these systems, 

significantly reducing the risk of compromise and 

negative impacts to these systems. 

•	 Provide leadership within standards development 

organizations (e.g. ISA-99 Industrial Automation and 

Control System Security Committee) to drive the adoption and implementation of common security requirements and baseline security safeguards. 

Accomplishments

•	 Developed ANSI/ISA-99.02.01-2009 Security for 

Industrial Automation and Control Systems: Establishing and Industrial Automation and Control Systems 

Security Program, which provides comprehensive 

guidance on developing an industrial control system 

security program. Contributed to the development 

and publication as the lead editor of the first normative standard from the International Society of Automation (ISA) on Security for Industrial Automation and 

Control Systems, ANSI/ISA-99.02.01-2009 establishing 

an Industrial Automation and Control Systems Security 

Program. This is the first normative standard in the 

ISA-99 series of standards. The standard is also being 

published through the International Electrotechnical 

Commission (IEC) in the 62443 series of standards. 

This standard applies to the much broader commercial 

ICS base and leads the way for comprehensive and 

universal cybersecurity. 

Planned Future Accomplishments

•	 Update ANSI/ISA-99.02.01-2009 to address comments 

from the International Electrotechnical Commission 

(IEC) 62443 committee.

•	 Revise ISA-99.02.01 to better align with the IEC 

27000 series of standards covering Information 

Technology – Security Techniques. Alignment with 

the IEC paves the way for commercial availability of 

security products that directly support the needs of the 

industrial base. 

Customers & Collaborators

ChevronTexaco, Department of Homeland Security, 

Dow, ExxonMobil, General Motors, Georgia-Pacific, 

International Electrotechnical Commission, ISA, 

Procter & Gamble

NIST Industrial Control Security Testbed
80

Industrial Performance Test 

Methods and Tools

Challenge/Problem Addressed

A lack of performance test methods has prevented the wider acceptance of standards by industrial control systems users and developers. This limits advancements in performance and reliability of manufacturing 

and other enterprises that rely heavily or entirely on 

networks for conducting their operations.

Therefore, industrial performance test methods increase 

standards adoption by providing users with a way to 

determine standards compliance and to verify that the 

standards are technically sound and feasible. These 

performance test methods will ensure device reliability 

and that users can more easily estimate overall network 

performance based on statistically sound device performance metrics. 

Objectives 

•	 Work with device vendors to define performance 

measures and validate the test methods to promote 

confidence in and adoption of commonly-accepted 

performance test methods. 

•	 Develop tools that help capture and visualize performance data to increase awareness and understanding 

by the community, leading to improvements in device 

and network performance.

Accomplishments

•	 Developed and published version 1.0.1 of the Industrial Ethernet Network Performance (IENetP) Test Tool 

in April 2009. This test tool is capable of analyzing 

network capture files and reporting a standard set of 

performance metrics. Vendors can use this information to improve the reliability of their products, such 

as controllers, motors, and sensors. Users can utilize 

the standardized metrics to compare the performance 

characteristics of multiple vendor’s products in common terminology, similar to the automobile fuel 

economy tests.

•	 IENetP software being used by industrial vendors 

and users. The software has been downloaded from 

SourceForge over 375 times. Multiple vendors have 

stated that they are using the software in-house to 

analyze the performance of their devices during 

their development phase. The vendors have all had 

comments and feature requests about how NIST can 

improve the software for their particular need.

•	 Eight presentations have been made to the EtherNet/IP 

Implementors Workshop. The main vendor supporting 

EtherNet/IP has started recommending the IENetP 

to their OEM customers to improve their endproducts and to their users to help improve their 

site installations.

•	 Gilsinn, J., Johnson, F., Test Tool for Industrial Ethernet 

Network Performance, presented at 55th International 

Instrumentation Symposium (IIS), June 1-5, 2009. This 

paper was well received at the IIS conference and was 

turned into a cover story article for InTech magazine. 

Gilsinn, J., Johnson, F., Testing, Comparing Industrial 

Ethernets, InTech Magazine, August 2009, Cover Story, 

pp. 12-15.
81

Planned Future Accomplishments

•	 Expand the mathematical analysis capability of the 

performance testing system to better characterize the 

performance of the device and/or system being tested. 

This will also include a re-analysis of the performance 

metrics to determine how the more detailed mathematical analysis can be presented to the user in a 

cohesive and understandable way.

•	 Develop additional test methodologies based on 

industry requirements to increase the overall performance analysis capability of the test system. These 

new test methodologies will allow for additional protocols and physical media to be investigated, including a greater number of industrial protocols, wireless 

protocols, and web-based protocols.

•	 Develop the protocol analysis capability to analyze 

a greater number of industrial protocols. The industrial Ethernet market currently consists of 10-15 full 

protocols with a multitude of supporting protocols, 

including but not limited to: Modbus/TCP, Profinet, 

Foundation Fieldbus HSE, ISA-100.11a, IEEE-802.11/

WiFi, Zigbee, and OPC. By expanding the number 

of protocols, the IENetP software will benefit a 

larger number of national and international 

vendors and users.

•	 Provide users with both test tools and test plans for 

conducting performance testing at their facility with 

their equipment. The ability for vendors to conduct 

tests themselves greatly speeds up the testing process, 

and makes learning from failure less risky. These test 

tools will be designed to be as open-source and freely 

available as possible.

Customers

Chrysler, Ford, General Motors, HMS Industrial Networks, Industrial Security Compliance Institute (ISCI), 

ODVA, Inc., Rockwell Automation, Schneider Electric 

Siemens, United Stated Council for Automotive Research 

(USCAR), Woodhead
82

ISD Program

Intelligent Manufacturing 

Robotics and Automation 

Interoperability Standards

In a global economy with competition from developing countries that have much 

lower labor rates, innovation is America’s best hope to remain competitive. Innovation 

opens up new business opportunities and creates new ways to put people to work. 

Innovation means answering “what if” and it ought to be easy to answer questions 

like “what if we could move our custom applications between robots from all our 

vendors? What if we can apply all our post-process measurement software to inprocess measurements? What if we could use the same data for cutting non-uniform 

materials that we use for modeling them?” By making it easy to answer these 

questions, we can reduce the cost of innovation. 

Staff: 

4 NIST staff

3 guest researchers

5.5 total FTEs

Challenge

I

f manufacturers are bound by single-vendor stovepiped products, they will end up with single-use 

stovepiped innovation. Breaking free means being 

able to put together best-in-class products from niche 

technology vendors to build creative solutions, making it easier for U.S. manufacturers to innovate on the 

shop floor and deliver products found nowhere else at 

affordable costs. Enabling interoperability – putting 

it all together quickly and easily – is the goal of this 

program. The problem is hard because the factory floor 

is where engineers from many different disciplines come 

together in a tangle of incompatible equipment, and are 

tasked with making things work on tight schedules. The 

different disciplines have different perspectives on the 

information that is necessary; hence it is a tremendous 

challenge to determine which data are needed, and how 

to express them unambiguously and efficiently. 

Technical Strategy

Standards are a prerequisite to interoperability between different vendors. Our role as a measurements and standards organization is to make standards 

better by working with manufacturers to write correct, 

complete, and unambiguous standards; define conformance tests for use in the certification of implementations; perform public interoperability testing; and 

publicize standards activities.

We recognize that integration architectures can extend 

the reach of data exchange standards, but this program 

is not proposing new architectures. Rather, we are working within architectures currently in place and accepted 

by our industrial partners, and focusing on standards 

that fit within them. We continually assess which standards have the most potential to enable innovation, so 

that our contributions matter. The metric is the degree of 

industry support from both manufacturing end users and 

automation vendors. End users need to believe that the 

standard will make it easier for them to innovate, and 

need to commit to buy products that support the standard. Vendors need to believe that adherence of their 

products to the standard will raise demand for them, 

and that the cost of supporting the standard will be 

paid back over a reasonable time. The results are better 

standards and an American manufacturing environment 
83

in which it is easy to fit together best-in-class pieces to 

build a world-class product.

When companies believe that a standard is valuable 

to their businesses, they are willing to spend money to 

develop the standard. Often this is to ensure that their 

specific business interests are taken into account. However, the work that it takes to conduct test pilots, validate 

the standard and provide conformance tools provides 

benefits that accrue to all companies equally. No single 

company is willing to pay unequally for this. In some 

cases, companies pool their resources and set up an 

organization that is specifically funded to do the work, 

usually involving in-kind contributions from companies’ 

technical staff. In other cases, public agencies like NIST 

or NASA take on this role, allocating some of their discretionary funding. However, the lack of any funded or 

in-kind industrial group is a warning that the proposed 

standard lacks value and does not merit a one-sided 

public investment. In the projects proposed here, we 

are working with well-organized industry groups with 

substantial in-kind investment and some funded 

membership. 

Results and Impact

•	 Demonstrated integration of tolerance information 

from design with machining and inspection using the 

STEP-NC standard at Boeing’s Renton WA facility in 

May 2009. A complex mold part was used as the basis 

for data exchange. STEP-NC data was easily visualized for operations and tools. Parts were machined at 

Boeing, Connecticut Center for Advanced Technology, KTH/Sweden and NIST, and brought to Mitutoyo/

Kirkland for inspection. The association between 

measured surfaces and the tools and operations that 

created them made it easy to see how tooling choices 

impacted quality; NIST results showed undercutting 

due to some tooling compromises. 

•	 Tested the MTConnect machine tool data acquisition standard at Boeing’s Auburn WA facility, writing 

a machine monitoring “dashboard” application that 

collects actual production figures for analysis and 

archiving. Tests were conduct during May 2009 on 60 

machine tools from two vendors. 

•	 NIST co-sponsored in 2009 the 6th and final public 

demonstration of interoperability using I++ DME ((a 

non-proprietary language for communicating with a 

coordinate measuring machine) at the Control Show 

in Stuttgart, Germany. The demo was co-sponsored 

by the International Association of CMM Manufacturers. Bill Rippey was the demo leader, technical 

coordinator, and demo results analyst. Seven execution software products and five Coordinate Measuring 

Machine (CMM) products implementing I++ DME 

measured three challenging parts with non-trivial 

operations (e.g., scanning, tool-changing, touch-probing), publicly demonstrating that interoperability is a 

commercial reality. 

•	 Dane Barrager, Vice President of ASI DataMyte and 

chairman of the Automotive Industry Action Group 

(AIAG) Quality Measurement Data (QMD) Committee, 

noted that “the NIST QMD test suite greatly helped 

Statistical Process Control (SPC) software vendors to 

validate their QMD implementations. The validation 

was so correct and thorough that the vendors never 

passed any data [to other vendors] until the show 

Quality Expo Chicago 2007 began and everything 

worked correctly the first time.” The QMD interoperability demonstration in 2007 was one of three such 

demonstrations, including one at Quality Expo Detroit 

in 2008. 

Testing standard interfaces for dimensional metrology 

equipment
84

•	 NIST released version 2.1.5 1of its Dimensional 

Measuring Interface Standard (DMIS) Conformance 

Test Suite, based on DMIS version 5.1. The DMIS Test 

Suite forms the basis for the recently-released DMIS 

Certification program of the DMSC (Dimensional 

Metrology Standards Consortium). Four major dimensional metrology corporations have applied for DMIS 

certification to test DMIS Conformance against the 

DMIS Standard. 

Publications

Thomas Kramer and Frederick Proctor, “Feature-based 

Process Planning Based on STEP,” and John Michaloski, 

Thomas Kramer, Frederick Proctor, Xun Xu, Sid Venkatesh and David Odendahl, “STEPNC++ – An Effective 

Tool for Feature-based CAM/CNC,” in Advanced Design 

and Manufacturing Based on STEP, Springer Series in 

Advanced Manufacturing, Xun Xu, Xun and Andrew 

Nee (Editors), 2010, ISBN: 978-1-84882-738-7. 

John Michaloski, Fred Proctor, Sid Venkatesh, Sydney 

Ly and Byeon-Eon Lee, “Quantifying the Performance 

of MT-Connect in a Distributed Manufacturing Environment,” in Proceedings of the ASME International Design 

Engineering Technical Conferences & Computers and 

Information in Engineering Conference, August 30 – 

September 2, 2009, San Diego, CA USA. 

CMM Quarterly (Special Edition on the DMSC), Sept 

2009: John Horst, “Reduce Costs and Increase Quality 

with Information Exchange Standards for Manufacturing 

Quality”; William Rippey, “The Dimensional Markup 

Language Specification for Inspection Results Data,” 

and “Update on DMIS Certification”; Thomas Kramer, 

“The NIST DMIS Test Suite Can Work for You”.

1 http://www.isd.mel.nist.gov/projects/metrology_interoperability/

dmis_test_suite.htm

Contact Information: 

Frederick M. Proctor 

Group Leader, Control Systems Group 

301-975-3425

frederick.proctor@nist.gov 
85

Awards and Leadership

Board Membership

Staff Board Membership

John Horst Board of Directors, Dimensional Metrology Standards 

Consortium

John Horst Advisory Board, Collaboration & Interoperability 

Congress

Leadership

Staff Leadership

Fred Proctor Chair, ASME Computers and Information in Engineering 

Division

Fred Proctor Executive Committee of the ASME Computers and Information in Engineering Division. 

Fred Proctor Conference Chair, 2009 ASME Computers in 

Engineering conference,

John Horst Chair, Dimensional Metrology Standards Consortium’s 

High-Level Measurements Process Planning (HIPP) 

Committee

John Horst Chair, DMSC Exchange of Quality Measurement Process 

Plans (eQuiPP) Committee

John Michaloski Chair, Open Modular Architecture Controller (OMAC) 

Human-Machine Interface Working Group

Bill Rippey Chair, Dimensional Metrology Standards Consortium’s 

Dimensional Markup Language (DML) Subcommittee

John Horst Co-Chair, Automotive Industry Action Group (AIAG), 

Metrology Interoperability Project Team Executive 

Committee

Awards

Staff Award

Bill Rippey Best Presentation, Metromeet 2009, “DMSC Offers New 

DMIS Certification to Enable Interoperability”

John Horst and Tom Kramer (Guest Researcher) Certificate of Achievement, Dimensional Metrology 

Standards Consortium, April 2008

Bill Rippey and John Horst AIAG Chairman’s Award 2009 to NIST for work done on 

QMD and DML specifications (and other projects)
86

Intelligent Manufacturing Robotics 

and Automation Interoperability 

Standards Projects 

Intelligent Manufacturing 

Interoperability Standards

Challenge

I

n a global economy with competition from developing 

countries that have much lower labor rates, innovation 

is America’s best hope to remain competitive. Innovation 

opens up new business opportunities and creates new 

ways to put people to work. The increasing pace of technological change and expectations of shorter time-tomarket for new products represent growing challenges 

for U.S. manufacturers. These pressures, combined with 

the push for distributed manufacturing facilities, create 

an urgent need for shop floor automation equipment 

that offer:

•	 Real-time integration between engineering, production, 

and business function, which may be geographically 

dispersed. Information and instructions need to be 

transmitted and acted upon without the delays that currently occur because of missing or misinterpreted data.

•	 Faster, more accurate, and more autonomous onboard 

planning, re-planning, and execution abilities that are 

driven by product and process models and respond to 

changes elsewhere in the manufacturing enterprise. 

Machine tools, robots, and coordinate measurement 

machines currently require extensive trial-and-error 

debugging whenever a new program is downloaded. 

This rework and tuning by human operators results 

from the hard-coded nature of the programs, which 

cannot adapt to individual differences in each piece of 

equipment. The challenge is to provide the necessary 

information about the part design (features, tolerances, 

etc.) as well as the machine’s own characteristics so 

that it can automatically adjust for its own motion 

errors and other variations.

•	 Interoperability of products from diverse vendors. 

Manufacturing enterprises must be able to buy the 

best equipment for their needs and to outsource production of various components. For these options to 

be economically viable, data must be reliably transferred among machine tools, robots, and coordinate 

measurement machines. U.S. manufacturers must be 

able to buy equipment with confidence that it will 

integrate with the rest of their enterprise.

The problem is hard because the factory floors is where 

engineers from many different disciplines come together 

in a tangle of incompatible equipment, and are tasked 

with making things work on tight schedules. The different disciplines have disparate perspectives on the 

information that is necessary; hence it is a tremendous 

challenge to determine which data are needed, and how 

to express them unambiguously and efficiently.

Objective 

Help U.S. manufacturers reduce the cost of innovation, by removing the barriers they face when 

bringing together best-in-class automation solutions to 

build world-class products. 

Technical Plan

We are working to achieve a vision of the seamless transfer of “smarter” data. This is an essential 

prerequisite not only for reliable transfer of information 

between equipment controllers, but also for providing 

enough richness in the information to enable the shop 

floor equipment to make in situ decisions when new 

programs are received and when conditions change. 

This vision of seamless smart data transfer presents business and technical challenges. To address the business 

challenge, which is rooted in resistance to standards, 

ISD involves vendors and end users in the definition of 

requirements, standards, and validation. The technical 

challenges center on the definition of the data models 

and interface protocols themselves: are they complete, 

efficient, unambiguous, and correct? ISD is addressing 

the technical challenges by developing measures of the 

correctness of interface language specifications and by 

implementing standards validation tools and processes.

We are focusing on two key segments of the industrial 

automation market: metrology equipment and machine 

tools. Metrology equipment standards cover interfaces 

between computer aided-design (CAD) and product life 

cycle management software, inspection process planning software, inspection execution software, coordinate 

measuring machines, and reporting and analysis software. For machine tools, ISD has been focusing on the 

ISO 10303 (Standard for the Exchange of Product Model 

data, “STEP”) standards for product date exchange, 

specifically the STEP-Numeric Control (NC) standard 

for programming machine tools; and two standards 

for extracting real-time production information from 

machining equipment: OPC and MTConnect. 
87

Quality Information 

Interoperability

Challenge 

The information incompatibility problem in manufacturing quality is costly to everyone: end users, 

software vendors, and equipment vendors. Information 

exchange standards eliminate these costs, as long as 

there is strong end user leadership and strong vendor 

participation. 

Objective 

Enable verifiably correct, complete, unambiguous, and timely information exchange standards 

and implementations of those standards. This enables 

greater interoperability and collaboration using standard 

information exchange languages. This further enables 

cost savings and greater agility to the entire enterprise. 

This finally fosters technology and product innovation. 

Technical Plan 

The scope of this industry-led effort is on the exchange of information between quality measurement-related activities such as design, planning, measurement, analysis, and process feedback, including 

feedback of results to manufacturing production. NIST’s 

role is to 1) help industry define correct, complete, and 

unambiguous interface standards, 2) design, build, and 

maintain conformance tests, 3) help industry design and 

lead public interoperability tests, and 4) act as standards 

consultants and leaders in appropriate industry 

standards organizations. 

Results and Impacts 

•	 NIST and the International Association of CMM Manufacturers co-sponsored in 2009 the 6th and final public 

demonstration of interoperability using I++ DME (a 

non-proprietary language for communicating with a 

coordinate measuring machine) at the Control Show 

in Stuttgart, Germany. Seven execution software products and five CMM products implementing I++ DME 

measured three challenging parts with non-trivial 

operations (e.g., scanning, tool-changing, touch-probing), publicly demonstrating that interoperability is a 

commercial reality. As a result of these efforts metrology systems users are now using I++ DME compliant 

products in their production facilities worldwide. 

•	 NIST released version 2.1.5 of its DMIS Conformance 

Test Suite, based on DMIS version 5.1. The DMIS Test 

Suite forms the basis for the recently-released DMIS 

Certification program of the DMSC (Dimensional 

Metrology Standards Consortium). Four major dimensional metrology corporations have applied for DMIS 

certification. Certification will help bring about greater 

levels of interoperability. 

•	 At the 2009 Collaboration and Interoperability 

Conference (CIC), a non-proprietary conference on 

design information interoperability, ISD organized and 

conducted a session entitled, “CAD Manufacturing 

Interoperability,” and moderated a panel discussion 

entitled, “I Want My PMI! (Product Manufacturing 

Information) But How Do I Use It and Benefit From 

It?” Requirements from users for Computer aided 

Design (CAD) + PMI information accessible to downstream applications in non-proprietary formats have 

been increasing over the last several years. 

•	 With MEL support, the DMIS standard progressed 

from versions 5.1 and 5.2, incorporating information 

required by important new technologies. DMIS 5.2 

is now an ANSI standard and should become an ISO 

standard in 2010. 

•	 Moved DML (Dimensional Mark-up Language) effort 

moved from AIAG to to a DMSC subcommittee, where 

it continues to thrive, with the strong hope for ISO 

standardization sometime in 2011. 

Customers and Collaborators 

Ford Motor Company, Honeywell FMT, General Electric 

Aviation, Deere and Co., Chrysler LLC, Daimler, Audi, 

Volvo, Volkswagen, Peugeot, Timkin, Caterpillar, BMW, 

International Association of Coordinate Measuring 

Machine Manufacturers (IA.CMM), Automotive Industry 

Action Group (AIAG), Society of Manufacturing Engineers (SME), ISO STEP, Inspection-plus-plus Group (I++), 

Longview Associates, Dimensional Metrology Standards 

Consortium (DMSC), Mitutoyo, Wenzel, Metromec, 

Hexagon Wilcox, Hexagon Brown & Sharp, Sheffield, 

Helmel Engineering, Dassault, Renishaw, Faro, Applied 

Precision, Inc., Zeiss, Hexagon Messtechnik Wetzlar, 

Wenzel Xspect Solutions, Statpoint, Minitab, New River 

Kinematics, QMC, Infinity QS, Prolink, Nikon Metrology, Metrosage, Rolls Royce
88

Next Generation Machine 

Tool Control

Challenge: 

The challenge is to make possible the development of faster, more accurate, and more autonomous machine tools that are driven by product and process models and are responsive to the manufacturing enterprise. 

Challenges to realizing the vision of smart data for smart 

machines are the resistance of vendors to standardization (a business challenge) and the development of the 

data models themselves (a technical challenge).

Objective: 

Support industry groups by validating data exchange standards. Paraphrasing BASF, “We don’t make 

the standards you use, we make the standards you 

use better.”

Technical Plan: 

To address the business challenge, we realize that vendors and end users must be involved in the 

development of standards and pull for their success. 

Looking at the extent of vendor- and end-user involvement and the potential markets for U.S. companies, MEL 

prioritizes candidate standards and selects those that 

have the most potential. Along the way, it is essential to 

continually assess these markers to decide whether to 

continue participating. STEP-NC, OPC and MTConnect 

have shown growing involvement from vendors and end 

users (aerospace and automotive) with more impressive 

demonstrations each year.

Results and Impacts: 

•	 Demonstrated integration of tolerance information 

from design with machining and inspection using the 

STEP-NC standard at Boeing’s Renton WA facility in 

May 2009. A complex mold part was used as the basis 

for data exchange. STEP-NC data was easily visualized for operations and tools. Parts were machined at 

Boeing, Connecticut Center for Advanced Technology, 

KTH/Sweden and NIST, and brought to Mitutoyo/Kirkland for inspection. 

•	 Tested the MTConnect machine tool data acquisition 

standard at Boeing’s Auburn WA facility by writing 

a machine monitoring “dashboard” application that 

collects actual production figures for analysis and 

archiving. Tests were conducting during May 2009 on 

60 machine tools from two vendors. 

Customers and Collaborators 

Boeing, General Motors, GE/Fanuc, Lockheed-Martin, 

Mastercam, Okuma USA, Sandvik Tooling, Siemens PLM 

Software, STEP Tools Inc., The Association for Manufacturing Technology (AMT), The International Organization 

for Standardization (ISO), The Open Modular Architecture Controller (OMAC) Users Group
89

ISD Program

Measurement Science for 

Intelligent Manufacturing 

Robotics and Automation

Seamless cooperation between humans and robots in manufacturing systems can 

combine the precision of machines with the dexterity and fault tolerance of people—

providing a revolution in creativity and speed on the factory floor. But creating such 

systems will require huge innovations for automated equipment, such as robots and 

machine tools, to intelligently carry out production plans and easily adapt them in 

response to changes in material, process, equipment, or surroundings. This project 

seeks new measurement science on all scales, from the macro to the nano, to explore 

how intelligent systems might do anything from perceiving movement in their vicinity 

to meeting production goals to protecting nearby humans. Such flexible systems will 

improve safety and make it easier and quicker to build new products.

Staff

10 FTE NIST staff

5 Guest Researchers

15 total FTEs

Challenge 

Manufacturers anticipate a future in which humans will work side by side on the shop floor with 

versatile and adaptable robots and automation systems. 

To realize this vision, equipment will need to perceive 

the geometry, location, color, features, and movements 

of items and people in its vicinity and have an intrinsic 

ability to adjust for variations in parts, environment, and 

other conditions, rather than relying on fixed automation 

and costly infrastructure. This must be achieved in both 

macro-scale manufacturing and in the emerging microand nano-scale manufacturing industries. The long-term 

challenges include developing the performance measurement science to characterize constituent components of intelligent manufacturing systems, defining the 

target performance goals, and measuring how well a 

component or overall system meets the goals.

Technical Strategies 

Most current factory machinery is painstakingly programmed to blindly repeat a single task over 

and over until told to stop, so that new production lines 

require major retooling. In addition, machinery – especially industrial robots - is walled off from human 

workers because it is deemed unsafe to function in their 

presence. To enable safer, more flexible manufacturing 

environments, the program is working with industry, 

including airplane and car manufacturers, to provide the 

measurements, standards, and performance evaluation 

methods necessary to make robots more adaptable.

A micro-sized six degree of freedom manipulator.
90

One of the most crucial necessities is providing robots 

with the ability to accurately perceive their surroundings. A machine that can perceive complex activity in 

its vicinity can make adjustments on the fly for changes 

in materials, equipment, or surroundings. The Measurement Science Program develops robust, quantitative 

tests to ensure that advanced perception systems—from 

the physical sensors themselves to the software programs 

that run them—accurately sense the three-dimensional 

world of moving parts in their vicinity, allowing them to 

alter plans when they detect an anomaly in production.

As well as providing flexibility on the shop floor, sensors 

can be programmed to detect and avert situations in 

which humans could be harmed. NIST works with the 

standards community to define methods and evaluation 

tests by which intelligent automation, including robots 

and automatic guided vehicles can be “certified safe,”

ushering in an era of human-robot cooperation that can 

provide U.S. industry with the high-quality, high-precision manufacturing methods it needs to maintain global 

competitiveness.

Furthermore, the Program provides industries with the 

necessary standards, performance metrics, and infrastructure technology to support the use of semi-autonomous and autonomous manipulators and vehicles, 

control system architectures, and advanced measurement tools and methods that enable their use in static 

and dynamic assembly operations and material handling 

for manufacturing. It accomplishes this through both 

real-world tests on a shop-floor test bed that includes 

an industrial robot and an autonomous vehicle, and 

through a physics-based simulation environment that 

merges seamlessly with the real world but provides 

adaptable, safe, and repeatable environment where 

manufacturing automation and robot performance standards can be safely developed and rapidly tested.

The Program also addresses standards for the newest branch of automation: nanorobotics. Nanorobotics encompasses both minuscule machines and large 

machines that fabricate minuscule objects. The program works to develop control and positioning systems 

for nanoscale measurements and manipulation and 

to enable interfaces to the macro-scale world. Standards are needed to determine the accuracy of such 

machines—did it really insert a new part exactly 10 

nanometers to the left as expected?—as well as to evaluate the precision with which tiny devices are built. 

Results and Impacts 

•	 The Virtual Manufacturing Automation Competition 

was successfully run at the IEEE International Conference on Robotics and Automation. The competition 

featured autonomous unit loaders performing intrafactory transport of goods. These competitions foster 

innovation and provide an ideal venue for testing 

performance measures.

•	 As a result of sensor measurements conducted under 

the program, wording in the ANSI B56.5 standard 

for Guided Industrial Vehicles and Automated 

Functions of Manned Industrial Vehicles was 

modified to allow industrial vehicles to utilize 

non-contact safety sensors.

The real-virtual environment: (left) Virtual Test Bed, (center) Virtual 

Atuonomous Guided Vehicle (AGV), (right) Real Test Bed.
91

•	 Two patent disclosures have been submitted for nanoscale measurements. An embedded Micro-ElectroMechanical Systems (MEMS) nano-displacement 

measurement sensor with accuracy between 8 nm and 

9 nm was invented and constructed, and a dynamic 

nano-rheology sensor was developed (with NIST’s 

Material Sciences and Engineering Laboratory) to 

measure the dynamic rheology properties of nanoscale material solutions. These instruments enable 

high precision dynamic measurements of displacement and chemical properties of great interest for 

pharmaceuticals and custom materials development.

•	 Members of the program participate in a new USCAR1

project, titled “Advanced Perception and System for 

Safe and Dynamic Human Robot Interaction”. The 

project is evaluating the possibility of reducing the 

need for fencing and other space-consuming safety 

equipment by the use of advanced perception and 

human detection and tracking. This could have a large 

impact on factory floor layouts, reduce the resources 

needed for safety equipment, and reduce the entry 

costs for small and medium-sized businesses that want 

to employ robots 

1 USCAR is an umbrella organization of DaimlerChrysler, Ford 

and General Motors, formed to conduct cooperative, pre-competitive research.

Publications 

B. Balaguer, S. Balakirsky, S. Carpin, A. Visser, “Evaluating maps Produced by Urban Search and Rescue 

Robots: Lessons Learned from RoboCup.” Autonomous 

Robots, Springer US, 2009, vol. 27, no. 4, pp. 449-464

R. Eastman, E. Messina, T. Hong, H. Huang, M. Shneier, 

J. Shi, and J. Wells, “Dynamic Perception Workshop 

Report: Requirements and Standards for Advanced 

Manufacturing,” NIST-IR 7664, 2010. 

G.F. Christopher, N. G. Dagalakis, S.D. Hudson, K.B. 

Migler, “MEMS Parallel-Plate Rheometer for Small 

Amplitude Oscillatory Shear Micro Rheology Measurements,” Society of Rheology, 81st Annual Meeting, 

Madison, WI, October 18-22, 2009.

Contact Information

Michael Shneier, Program Manager

(301) 975-3421

michael.shneier@nist.gov

http://www.nist.gov/mel/isd/si/msimra.cfm.
92

Awards and Recognition

Staff Leadership

Roger Bostelman •	 Sub-Committee member – “American National Standards Institute/Industrial Truck Standards Development Foundation (ANSI/ITSDF) B56.5 Safety Standard for Driverless, Automatic Guided Industrial Vehicles and Automated Functions of Manned Industrial Vehicles”

Jason Gorman •	 Special Sessions Chair, IEEE International Conference on Automation Science and Engineering, Toronto, Canada, 2010

•	 Co-Organizer, Symposium on Measurement and Control of Micro- and Nanosystems, 

Conference on Micro- and Nanosystems, ASME IDETC, Montreal, Canada, 2010.

•	 Invited presentation: “Microrobotic Technologies,” Unmanned Systems Summit 2009, 

National Harbor, MD.

•	 Invited presentation: “Precision MEMS for Nanoinstrumentation,” AVS Regional Meeting, 

Gaithersburg, MD, 2009. 

•	 Invited presentation: “Precision MEMS/NEMS in Nanoinstrumentation,” nanotxUSA’08 

International Nanotechnology Conference, Dallas, TX.

Tsai Hong •	 Chair Workshop on Dynamic Perception Workshop: Requirements and Standards for 

Advanced Manufacturing at the RIA Conference in June, 2009.

•	 Co-chair of session on Performance metrics for Perception in Intelligent Manufacturing.

•	 Co-chair of session on Ground Truth and Testbeds for Performance Testing in PerMIS 2009.

•	 Invited presentation at the department of Mechanical and Aerospace Engineering 

of GW University. 

Nicholas Dagalakis •	 Became a Senior member of the IEEE

•	 Recognized by US Senate Special Committee on Aging 2008

•	 NIST Bronze Medal Award

•	 Member of the Robotic Industries Association (RIA) 15.06 committee on industrial robot 

safety standards. 

Stephen Balakirsky •	 Best paper award for: S. Balakirsky, F. Proctor, C. Scrapper, T. Kramer. A Mobile Robot 

Control Framework: From Simulation to Reality. 2008. International Conference on Simulation, Modeling, and Programming for Autonomous Robots (SIMPAR 2008). 11-3-2008.

•	 S. Balakirsky, F. Proctor, J. Falco, Government Open Source Conference (GOSCON) 

Engaging Citizens Award.

•	 Executive committee of RoboCup International. 

•	 Program Co-chair for America for Simulation, Modeling, and Programming, for 

Autonomous Robots (SIMPAR)

•	 2010 Co-organizer for ICRA 2010 Workshop “ICRA 2009 Robot Challenge Event: Outcomes and Future Directions”

•	 Co-organizer for IROS 2009 Workshop “Robots, Games, and Research: Success stories in 

USARSim”

•	 Invited talk to MIT Laboratory for Manufacturing and Productivity.
93

Measurement Science for 

Intelligent Manufacturing 

Robotics and Automation Projects

Metrology and Standards 

for Advanced Perception 

Systems for Intelligent 

Manufacturing

Challenge/Problem Addressed

The challenge is to enable wide use of advanced perception systems by intelligent automated manufacturing applications in unstructured environments. 

Despite substantial advances in sensors and algorithms 

over the past decade, there remains a lack of reliable, 

well-validated commercial perception systems. This is a 

major bottleneck in the development and deployment of 

flexible manufacturing systems that can use intelligent 

perception to sense and react in real-time.

In the National Council for Advanced Manufacturing (NACFAM)2

 study and the Computing Community 

Consortium’s Robotics Roadmap3, advanced perception systems and sensors were identified as technology 

enablers that could shift manufacturing to more flexible, adaptable and safe automated systems. Automated 

manufacturing is starting to rely heavily on sensors as 

it moves into less structured environments and deals 

with a greater variety of tasks and components. Sensors 

are needed to locate parts, identify them and determine 

their properties, and manipulate them robustly in threedimensional space. Currently, very few manufacturing 

applications involve any sensing at all, and those that 

do usually involve simple measurements under highly 

restricted conditions. These limitations incur costs in 

terms of efficiency, restricted work cell layout, and the 

need for expensive work cell components such as fixturing and handling equipment. This is one of the major 

factors that have prevented the widespread adoption 

of robotics and automated manufacturing by small and 

medium sized businesses. 

2 Report on industry Views Towards: Categories of innovative and 

Potentially Disruptive Advanced Manufacturing Technologies.” 

NACFAM (2005).

3 “A Roadmap for U.S. Robotics: From Internet to Robotics,” CCC 

and CRA (NSF-funded), 2009, http://www.us-robotics.us/

View of the laser tracker and SmartTRACK target in 

the test bed, measuring a calibration target

Barriers to the introduction of sensors have typically 

included the high costs of developing custom applications, the lack of guarantees that the sensor systems will 

work consistently enough for a production environment, and the fact that, in the automation community, 

sophisticated sensing is still in its infancy and users have 

little experience in using it in their applications. The 

project addresses these barriers by defining performance 

measures and metrics for sensor systems and promoting 

standards that help vendors describe their products in 

a uniform way and help users select the right products 

for their applications. The project also addresses another 

current barrier to more widespread use of advanced 

automation: the need to separate robots and automation 

equipment from people working in the same work area. 

Sensors will have a major part in enabling people and 

robots to work together safely. The project addresses the 

performance metrics and standards that are needed to 

ensure that sensors provide the necessary levels of safety 

and reliability to enable human-robot collaboration.

Laser tracker SmartTRACK

target
94

Objectives

Develop quantitative, reproducible test methods to evaluate the robustness, accuracy and performance 

characteristics of advanced perception systems for 

general assembly, human robot collaboration and other 

macro scale manufacturing operations.

•	 Develop reliable and accurate procedures for internal 

and external calibration of 2D, 3D and six degree of 

freedom (6DOF) sensors, so as to enable cross-sensor 

comparison and evaluation.

•	 Develop metrology and test methods to evaluate the 

accuracy and performance of 3D and 6DOF sensors 

under dynamic conditions.

Technical accomplishments 

•	 Established and validated a test bed for evaluating 

six degrees of freedom (6DOF) perception sensing. 

The test bed will help develop standardized evaluation procedures that will assist industry and academia 

to establish clear performance metrics for research 

algorithms and help manufacturers measure and 

understand the motion of conveyances, parts and 

assemblies.

•	 Developed performance evaluation methods and 

procedures for pose determination algorithms in static 

and dynamic environments and published the results 

in PerMIS 2008 and 2009. Such methods will enable 

manufacturers to compare pose measurement systems 

in a standardized way.

•	 Conducted a performance evaluation of the external 

calibration of a camera and laser range finder. Used 

the procedure to validate the calibration of a suite of 

sensors for General Dynamics Robotic Systems.

•	 Conducted a Dynamic Perception Measurement for 

Autonomous Manufacturing Workshop at the RIA 

International Robots, Vision & Motion Control Show 

in June, 2009. The workshop produced sensor requirements and test scenarios useful for evaluating perception systems in next generation manufacturing, which 

are documented in a workshop report.

•	 Organized a special workshop session on Performance Metrics for Perception in Intelligent Manufacturing as part of the PerMIS workshop in 2008. 

Published a book chapter on this session. The workshop produced an initial roadmap for measurement of 

perception systems in next generation manufacturing.

•	 Designed and constructed a set of modular manufacturing-part artifacts for evaluating perception systems. 

Incorporated 6DOF sensing into a comprehensive 

robotic ontology and developed a first draft of a 

proposed standard terminology for 6DOF sensing. 

The standardized artifacts and ontology will facilitate 

understanding of and research in dynamic perception.

Planned Future Accomplishments 

•	 Continue to develop standard procedures and 

metrics for 6DOF sensors by developing mathematical 

techniques for calibration and performance metrics; 

prototyping a generic data collection system to foster 

system evaluations; establishing reference standards 

for 6DOF sensors, and validating these standards and 

metrics using commercial and academic 

vision systems.

•	 Continue to establish a standards group for 6DOF 

performance metrology and standards that will 

include developing consensus-based performance test 

methods and metrics to evaluate advanced perception 

systems in dynamic and unstructured environments 

and developing a comprehensive kit of standardized 

parts for these test methods.

•	 Collaborate with industry and academic groups 

including work with USCAR on their fenceless robotics project, which involves performance evaluation of 

perception systems for detecting humans. If successful, this work will greatly increase the flexibility and 

decrease the costs of work cells.

•	 Work with Middlebury College on metrics and ground 

truth for evaluation of multi-view stereo, which should 

lead to standards and performance measures for 

determining the positions and orientations of parts 

using stereo.

Customers and Collaborators 

USCAR, GM, Ford, Chrysler, Automated Precision, Inc., 

Braintech, Inc., JAI Inc., Loyola University, Purdue University, Middlebury College, Army Research Laboratory, 

General Dynamics Robotic Systems. 
95

Next Generation 

Robot Safety

Challenge/Problem Addressed

Collaborative human-robot interaction holds promise for a growing number of applications. Robots 

can work closely with humans to reduce the frequency 

of repetitive tasks, to reduce the time humans take to 

perform tasks, and to reduce human fatigue and injuries. 

Current safety standards limit human-robot interaction, 

require significant portions of valuable manufacturing 

production floor space for fences and other protective 

devices, and involve significant expenditure for protective equipment. The typical unit cost for industrial robots 

ranges from approximately $30 K to $50 K, but the cost 

of protective equipment frequently doubles the cost of 

the robotic units themselves. To enable human-robot interactions requires new, inexpensive and reliable safety 

technologies and relevant, up-to-date safety standards. 

Advances in technology and standards will lead to reductions in the cost of manufacturing and an increase in 

U.S. competiveness. 

Objectives

•	 Install safety system on testbed robot to provide protection to NIST and outside researchers from injuries 

caused by test bed robot and to gain experience with 

current industrial safety standards.

•	 Assist standards organization in developing humanrobot collaborative safety standards and test 

procedures.

•	 Work with manufacturers to develop safety requirements and technologies to enable humans and robots 

to interact in assembly operations.

•	 Develop a robot test bed for verifying that proposed 

safety standards provide required protections.

Technical accomplishments

•	 Completed installation of a safety system in the NIST 

robot test bed, in accordance with the current standard. Carried out and documented several verification tests and presented them at a Robotics Industries 

Association (RIA) robot safety meeting.

•	 Participated in the RIA/ISO robot safety standard effort 

to develop a technical specification for human-robot 

collaboration. Contributed significantly to all the RIA 

and ISO meetings. Assessed human-robot collaborative safety features for new robots at a number of 

robot manufacturers to determine the gaps between 

what is currently offered and what is needed for the 

new standard (ISO 10281-2).

•	 Drafted a technical specification (TS) for speed and 

position monitoring (SPM) of robots at RIA’s request. 

Using SPM, robot systems are designed to maintain 

a safe distance between the operator and the robot. 

Sent a draft specification to RIA for submission to 

the ISO 10218 (Robots for Industrial Environments) 

committee. Completion of the ISO 10218-2 safety 

standard requires completion of the TS. A prototype 

SPM safety module was implemented on the robot test 

bed and tests were begun to evaluate SPM functionality and to validate the TS. Completion of the TS will 

allow industry to proceed with development of safe 

human-robot collaborative applications and products.

Planned Future Accomplishments

•	 Contribute to the technical specification for ISO 

10218-2 robot safety standard through further work 

on speed and position monitoring. Material proposed 

by other ISO members will be reviewed and perhaps 

tried out in the test bed. Use the robot test bed to 

verify SPM scenarios and to develop SPM test and 

verification procedures. It will also serve as an environment for measuring SPM performance.

•	 Write a report covering the state of the art in human 

sensing and robot safety features to assist the USCAR 

project team in their feasibility study. 

Customers and Collaborators

Robotics Industry Association 15.06 committee on 

industrial robot safety; ISO 10218-2 Robot Safety Committee; USCAR, GM, Ford and Chrysler
96

Mobility and Manipulation 

Performance Metrics and 

Standards Project

Challenge/Problem Addressed

The project provides industries with standards, performance metrics, and infrastructure technology to 

support the use of semi-autonomous and autonomous 

manipulators and vehicles, control system architectures, 

vehicle safety systems, and measurement tools and 

methods in static and dynamic assembly and material 

handling for manufacturing. Collaborations with key 

robot arm and automated guided vehicle (AGV) developers and user partners advance the state of autonomous robotic technology through robot arms, mobile 

robots, non-contact safety sensors and open, modular 

control system architectures that enable broader use of 

advanced perception, autonomous navigation, manipulation, and parts and material handling techniques in the 

automotive, aerospace, and other industries.

Automobile, heavy equipment, and many other manufacturers can benefit from safe human-robot collaboration where vehicles and humans are expected to operate 

in robot work cells safely. To understand current and 

future automated equipment performance capabilities, 

the program is developing a manufacturing test bed 

and invites industry to provide application scenarios for 

prototyping. The manufacturing test bed also provides an 

integration environment for the other projects within the 

program.

The test bed is used to measure performance of automated assembly scenarios and to develop performance 

standards for manufacturing equipment and tools used 

in this and other advanced human-robot collaborative 

applications.

Objective(s)

•	 Design and develop an autonomous assembly 

and measurement test bed to provide an environment similar to that in industry. The test bed 

provides the infrastructure for developing performance measures and standards to be used in 

manufacturing.

•	 Develop performance measurement methods for 

autonomous assembly and measure performance 

of automated assembly methods in the test bed. 

This will lead to new standards and ways of 

evaluating products in real-world environments.

•	 Lead industrial robot and vehicle standards committees by developing performance test methods 

and data. These standards will encourage the 

next-generation in advanced human-robot collaborative applications. 
97

Accomplishments

•	 Designed, procured, installed and tested equipment 

for the robot test bed for the autonomous assembly 

performance measurements and standards efforts.

•	 Developed autonomous assembly scenarios showing 

AGV and robot collaboration to illustrate to AGV and 

robot vendors the potential of such interactions and 

the barriers to their realization.

•	 Designed and tested the AGV with safety systems 

based on ANSI B56.5 standard. This standard defines 

safety requirements for powered, unmanned automatic guided industrial vehicles. Performed advanced 

sensor measurements in support of ANSI B56.5 and 

developed text to improve the standard to now 

allow industrial vehicles to utilize non-contact 

safety sensors.

•	 Led a Special Session on Performance Measurements Towards Improved Forklift Safety, PerMIS 2009. 

This led to a lot of industry interest, including three 

articles written by trade journals describing proposed 

improvements.

•	 Developed a novel safety sensor system design for 

AGVs and forklifts and measured the performance of 

advanced 3D imagers that could be used to provide 

all-round safety coverage for these vehicles.

•	 Converted a standard AGV into a safer, more generic 

vehicle through low level electronics replacement and 

enhancements to provide proof-of-concept that AGVs 

can be used safely with humans in close proximity.

Planned Future Accomplishments

•	 Implement manufacturing assembly scenarios based 

on direct industry interaction to study manufacturing 

challenges and leading to improved performance and 

standards. 

•	 Measure the performance of advanced 3D imagers for 

use in a robot work cell for safe and effective human/

robot/vehicle collaboration.

•	 Work with standards organizations to provide draft 

test methods and results from experiments with 

advanced sensing and control technologies for safe 

autonomous assembly, material transport, logistics, 

and other shop floor operations. This includes evaluation of auxiliary safety sensors for fork lifts (with or 

without human drivers). 

•	 Analyze and work with international standards organizations (ISO 13482) to leverage common technologies 

between medical/healthcare equipment and manufacturing equipment. Examples of such potential crossover technology include prosthetic arms vs. industrial 

robots and autonomous chairs vs. AGV’s and forklifts.

Customers/Collaborators

USCAR: GM, Ford, Chrysler;SAE, Boeing, Northrop 

Grumman, US Army, Navy, Air Force, Robotics Industries Association (RIA), Material Handling Industries 

Association (MHIA), ISO, AGV manufacturers and users, 

Forklift manufacturers and users, Sensor manufacturers 

and users
98

Performance Simulation 

(PerfSim)

Challenge/Problem Addressed

The challenge is to provide industry with an adaptable, safe, and repeatable environment where manufacturing automation and robot performance standards 

can be developed and rapidly tested. The project will 

develop both a standardized simulation interface and a 

validation framework that will allow researchers to know 

when the use of a particular simulation is appropriate. 

The use of simulation is expected to accelerate the introduction of more advanced robotics for manufacturing by 

allowing for greater flexibility and speed in experimentation and validation.

Standardized simulation interfaces allow researchers 

and developers to test against, and participate in, the 

development of evolving performance standards without 

costly infrastructure requirements. However, these tests 

are only as good as the simulation is valid. The project 

uses a hybrid real/virtual system and modular architecture that allows for the seamless integration of real hardware components and algorithms with virtual reality. The 

framework makes it possible to validate simulated components as well as create novel notional components. 

For example, simulated avatars will be able to test robot/

human safety standards, repeatable simulated system 

faults test reliability and fault tolerance, and simulated 

sensor outputs allow for the analysis of potential system 

improvements through the incorporation of currently 

unattainable levels of sensor performance. 

Objectives

•	 Develop task specific validation techniques for 

simulation systems. By determining simulation fidelity requirements for a range of common simulation 

applications, developers will better understand when 

the use of simulation is a viable alternative to physical 

testing and development.

•	 Develop a framework that allows for the seamless 

transition of virtual performance metrics to realizable physical artifacts that remain coupled to the 

simulation environment. Use of test environments 

that combine real and virtual elements will allow for 

performance quantification of systems that are in the 

vicinity of humans or in collaboration with them without posing any risk to human participants.

•	 Support the use of simulation systems in international 

competitions. These competitions foster innovation 

and provide a high-visibility test environment for 

emerging performance metrics.
99

Accomplishments

•	 The Mobility Open Architecture Simulation and Tools 

(MOAST) and Unified System for Automation and 

Robot Simulation (USARSim) were recognized with 

the Government Open Source Conference “Engaging Citizens” award. This award was for promoting 

performance evaluation and benchmarking for robot 

systems and facilitating innovations in robotics. 

•	 A full day workshop entitled “Robots, Games, and 

Research: Success stories in USARSim” was hosted at 

the 2009 IEEE/RSJ International Conference on Intelligent Systems and Robots. This workshop brought 

together government, industry, and academia for 

discussion and presentations on USARSim. Twelve 

papers were presented at this workshop along with 

discussion on the future of USARSim exposing many 

novices to technical issues within the international 

community.

•	 A subset of the USARSim interface standard (utilized by two different international competitions and 

numerous international researchers) was ported to 

a new, more capable game engine. This new game 

engine allows for more realistic physics simulation, 

a larger number of simulated bodies, and higher 

visual fidelity.

•	 Robot arms were added to the interface and several 

industrial quality arms were modeled. In addition to 

the arms, grippers were examined and modifications 

to the USARSim interface to support arms and grippers 

were explored.

Three simulated robotic arms performing mixed palletizing utilizing the MOAST controller.
100

•	 The Virtual Manufacturing Automation Competition 

was successfully run at IEEE International Conference on Robotics and Automation. The competition featured autonomous unit loaders performing 

intra-factory transport of goods. This competition has 

been successful in focusing university researchers on 

manufacturing-related robotics, a subject that is otherwise largely neglected in U.S. universities, which favor 

military or service robotics.

Planned Future Accomplishments

•	 Complete the full port of the USARSim interface to 

the new game engine. This will provide a much better physics basis for the simulation and enable more 

complex simulations to be implemented.

•	 Extend the framework to include a study of “levels of 

validation”. Different applications require different 

simulation fidelities and accuracies of validation. This 

framework will allow vendors and users of simulation 

to understand for what applications each simulation is 

appropriate. 

•	 Extend the framework to include virtual humans 

known as avatars. These avatars will interact with both 

virtual and real systems and allow for safe testing of 

novel safety systems and robotic algorithms.

•	 Continue to work with industry and academia to 

develop performance standards for specific factory 

tasks such as intra-factory transport of goods and 

mixed palletizing.

Customers and Collaborators

Kuka Robotics, Georgia Institute of Technology, 

University of California-Merced, University of Freiburg, 

University of New Mexico, University of Zagreb, 

Croatia, Army Corps of Engineers
101

Advanced Control Systems 

and Positioning for 

Nanoscale Measurements 

and Standards

Challenge/Problem Addressed

Metrology and fabrication of micro- and nanostructures are two key technologies for nano-manufacturing. A central challenge of micro- and nanomanufacturing is the development of methods to build 

complex three-dimensional (3-D) micro- and nano-scale 

structures and devices using techniques that allow 

them to interface with the macro scale world (scale up). 

The metrology of micro- and nano-structures, such as 

nanowires, nanoparticles, proteins, cells, etc., is a key 

enabling technology for the advancement of micro- and 

nano-technology and manufacturing, presenting many 

opportunities for novel micro- and nano-electromechanical and biomedical systems. 

Objectives

•	 Develop world-class advanced control and 

positioning systems:

•	 for nanoscale measurements and standards to 

support emerging industries producing products 

or conducting research in micro- and nano-scale 

environments including nanowires, nanoparticles, proteins, cells, etc.

•	 for nanoscale manipulation and standards, to 

enable controlled positioning and assembly of 

micro- and nano-scale components for industries 

in a range of industries including electronics, 

medical, sensors, and custom materials

•	 Develop scale-up interfaces and standards 

between the micro- and nano-manufacturing 

tools and the macro scale world to enable processes to be visualized and controlled.

Accomplishments

•	 Transferred MEL research to industry through a Phase 

I Small Business Innovation Research (SBIR) project. EM Optomechanical received SBIR funding for 

“Micro-Positioner Replacement of Piezo Actuators in 

Long Working Distance Interference Microscopes”As 

a result of the interaction with MEL researchers EM 

Optomechanical was able to design and build a prototype based on MEL research of the proposed high 

precision device.

•	 Invented, built prototypes of, and measured the 

performance of a MEMS nanopositioner embedded 

optical nano-displacement measurement sensor. The 

performance results indicate that sensor accuracy 

error ranges between 8 and 9 nanometers with the 

main source of error probably coming from the data 

acquisition PC card, algorithmic numerical errors and 

nanopositioner motion errors. Error sources will be 

investigated in FY2010. A patent disclosure application has been prepared. This sensor will be used for 

high precision nanopositioning and manipulation 

of nano-scale components for assembly and 

dynamic testing.

•	

Array of planar MEMS nanopositioners fitted with 

nanoprobes for robotic manipulation. The external 

dimensions of each nanopositioner are approximately 3 mm x 3 mm.

•	 Invented, built prototypes of, and measured the 

performance of a dynamic nano rheology sensor in 

collaboration with NIST Material Science and Engineering Laboratory researchers. These are precision 

nano positioners for the measurement of the dynamic 

rheology properties of nano material solutions. The 

results of testing prototypes indicate that the sensors 

accurately measure dynamic rheology properties. A 

patent disclosure application has been submitted. The 

polymers and pharmaceutical industries will benefit 

from this work through being able to measure properties of very small quantities of chemical substances, 

including dynamic modeling of chemical structures.
102

•	 Built and tested embedded piezoresistor nano force 

sensor prototypes to provide force feedback and stiffness measurements at the nano scale. 

•	 John Wason, a PhD candidate from Rensselaer 

Polytechnic Institute, Troy, NY, has been using NISTfabricated artifacts to testing the performance of 

difficult automated micro assembly operations. This 

collaboration will result in automated assembly of a 

MEMS version of the MEL 6D nanopositioner/robotic 

manipulator, invented by MEL staff a few years ago. 

Collaborators and customers

NASA, RPI, University of Maryland at College Park, 

University of Maryland at Baltimore County, George 

Washington University, NIST Material Science and 

Engineering Laboratory, NIST Electronics and Electrical 

Engineering Laboratory, NIST Information Technology 

Laboratory APNanotech, East Mountain Optomechanical

Coordinated manipulation of a 15 micro 

meter diameter particle by two 

nanopositioner nanoprobes.

Publications

J. C. Chiao, J. M. Goldman, D. A. Heck, P. Kazanzides, 

W. J. Peine, J. B Stiehl, D. Yen and N. G. Dagalakis, 

“Metrology and Standards Needs for Some Categories of 

Medical Devices,” Journal of Research of the National 

Institute of Standards and Technology, Vol. 113, No. 2, 

pp. 121-129, March-April 2008.

G.F. Christopher, N. G. Dagalakis, S.D. Hudson, K.B. 

Migler, “MEMS Parallel-Plate Rheometer for Small 

Amplitude Oscillatory Shear Micro Rheology Measurements,” Society of Rheology, 81st Annual Meeting, 

Madison, WI, October 18-22, 2009.

J.D.Wason, W.T. Gressick, J.T.Wen, J.J. Gorman, N.G. 

Dagalakis, “Vision Guided Multi-probe Microassembly,” 

Accepted by the IEEE/ASME Transactions on Mechatronics subject to modifications.
103

Nanorobotics and NEMS 

Measurement Science

Challenge/Problem Addressed

Although still in its infancy, the field of nanorobotics has the prospect of addressing a number of 

critical problems related to nanomanufacturing, biomedical research, and integrated nanotechnologies. As 

viewed in this project, nanorobots are mechanisms that 

can sense and manipulate the nanoscale environment 

using a combination of embedded sensors, actuators, 

control systems, and primitive logic. These robots may 

be tens of micrometers in size but will be composed of 

subcomponents with nanoscale dimensions. One of the 

most promising technologies for developing nanorobots 

is the field of nanoelectromechanical systems (NEMS), 

which is also in its early stages of development. As 

with macroscale mechanisms, measuring the motion 

and resulting reaction forces of nanorobots and NEMS 

is critical to understanding their mechanics. However, 

this is a significant challenge since many of the measurement methods typically used at the macroscale do 

not scale well and the measurement requirements are 

demanding (e.g., required force resolution can be on the 

order of piconewtons). Therefore, this project focuses on 

measurement science for nanorobotics and NEMS with 

an emphasis on nanoscale displacements and forces. 

Within this project there are three thrusts: 1) measurement methods based on macroscale instrumentation for 

off-chip mechanism characterization and calibration; 

2) embedded sensing within nanorobots and NEMS for 

real-time measurement and control; and 3) the application of micro/nanoelectromechanical systems (MEMS/

NEMS) to the design of advanced nanometrology and 

nanomanufacturing systems.

Objectives 

•	 Develop near-field and far-field optical methods for 

measuring the in-plane and out-of-plane motion of 

nanorobots and NEMS with sub-nanometer resolution and Radio frequency (RF) bandwidth. These 

methods will be used to evaluate the electromechanical dynamics of nanoscale mechanisms and provide 

traceable calibration for embedded nanoscale displacement sensors. 

•	 Develop NEMS sensors for measuring nanoscale 

displacement and force for embedded sensing in 

nanorobots, and process characterization and control 

in nanomanufacturing. The priority of this research is 

on increasing both the resolution and measurement 

rate compared to existing MEMS technologies. 

•	 Utilize MEMS/NEMS to develop next-generation scanning probe instruments for nanometrology and nanomanufacturing. In particular, MEMS/NEMS are used to 

dramatically increase the scan rates for nanometrology methods such as atomic force microscopy and 

scanning tunneling microscopy as well as increase the 

number of active scanning probes. 
104

Technical accomplishments

•	 Successfully designed, fabricated, and characterized 

a prototype MEMS scanning tunneling microscopy 

(STM) scanner with an embedded displacement sensor. The achievable scan rate is higher than 80,000 

nm/s, which is at least ten times faster than conventional STM. 

•	 Successfully completed Phase I of the DARPA TipBased Nanofabrication program ahead of schedule. 

This will enable manufacture of nanostructures, 

specifically nanowires, nanotubes, and quantum dots, 

with nanometer-scale control over the size, orientation, and position of each nanostructure. Phase II of 

the program, already awarded, will require the development of a 5 X 1 MEMS STM array that can image 

silicon surfaces with atomic precision.

Planned Future Accomplishments

•	 Demonstrate the measurement of out-of-plane NEMS 

motion with sub-nanometer resolution and 1 Mhz 

bandwidth using a diffraction-limited homodyne interferometer that will be part of the nanoscale motion 

microscope (NMM). (Complete by 3rd Quarter 2010) 

•	 Demonstrate structural modal analysis of a NEMS 

using a custom near-field scanning optical microscope 

(NSOM) that will achieve 50 nm spatial resolution 

or better.

•	 Fabricate and characterize a piezoelectric resonant 

NEMS force sensor that is designed to measure force 

gradients (as present in atomic force microscopy) by 

tracking frequency shifts in its resonant frequency in 

the MHz range.

•	 Demonstrate imaging of (100) silicon with atomic 

resolution in UHV using a closed-loop controlled 

3-axis MEMS-based STM scanner. 

Customers and Collaborators

DARPA, Zyvex Labs, Integrated Circuit Scanning Probe 

Instruments (ICSPI), University of Waterloo, University of 

Michigan
105

Promoting economic growth by working with industry to 

develop and apply interoperability measurements and standards 

for software used in all aspects of manufacturing

Manufacturing Systems 

Integration

Overview

The U.S. manufacturing sector has significant impact on the economy, society, environment, and global relations as it contributes 11% of the Gross Domestic Product (GDP) and provides 10% of the nation’s workforce with high-paying jobs. As the U.S. manufacturing sector 

sells globally, it also sources globally. It manages a global supply chain in all four major 

phases of a typical product’s life cycle: raw material input, product realization, customer 

use, and material recovery. As the U.S. manufacturers and their global suppliers struggle 

with sustainability issues in the product life cycle, they are discovering that they need to 

measure, control, manage, and report sustainability metrics in a complex mix of temporal (life cycle) and spatial (global supply chain) dimensions. Additionally, they have to 

respond to the impact of their actions on economic, social, and environmental issues 

in this complex space-time domain.

The world’s economy is rapidly developing into a single interconnected entity. Successful companies are under increasing pressure to continue to evolve into global 

and sustainable operations as they strive to maintain their competitive edge with 

others around the world. An essential element of this evolution is interoperability – the ability for companies to exchange information seamlessly among their 

own partners around the world. Business executives are concerned with the 

same business objectives that have consumed them through the ages, including revenue growth, cost reduction, asset utilization, and risk management; 

but how they expect to achieve these business goals has undergone significant 

Chief: 

Vijay Srinivasan 

NIST

100 Bureau Drive 

Stop 8260

Gaithersburg, MD 

20899-8260

Phone: 301 975 3508

Fax: 301 258 9749

Email:

vijay.srinivasan@nist.gov
106

changes. For several years, these executives focused on 

product innovation as a driver of competitive advantage, 

recognizing that innovation is a means to achieve all 

those other goals. More recently their understanding 

of what enables innovation has changed, leading to a 

new focus not just on innovating products, but also on 

innovating business processes and business models that 

influence the creation of innovative products. Product development takes place in a complex network of 

partners as shown in Figure 1. This, in turn, has elevated 

the status of product lifecycle management (PLM) from 

being merely an engineering concern to an enterprisewide business concern, with emphasis on information 

integration and collaboration with partners.1

 Achieving, assuring, and maintaining global interoperability is 

too large a task for all but the biggest corporations. We 

at NIST are increasingly asked by our nation’s companies to help address the interoperability problem at the 

global level.

Working with industry, MSID is helping to devise 

sustainable solutions for this multifaceted and global 

challenge in supply chain requirements and the business 

aspects of PLM. We have led the way in developing 

several major international standards for exchanging 

product information and for managing the torrents of 

data that businesses now must organize and process. 

1 Srinivasan V. A comprehensive business approach to product 

realization using service oriented architecture. In: Tomovic 

M, Wang S, editors. Product realization: A comprehensive approach. Springer; 2009.

Among these are international modeling language 

standards. Their impact is that they create common 

languages for systems’ communication, and thus create 

“speech communities” that do not depend on a particular choice of vendor. They contribute to training 

analysts and engineers, providing vocabularies and a 

constant way to represent the manufacturing enterprise 

concepts and provide a means of communication, one 

community to the other. This enables more people to 

communicate with each other throughout the manufacturing process. It also contributes toward bridging 

engineering and business disciplines throughout the 

PLM. MSID continues to bridge ISO 10303 (Standard 

for the Exchange of Product model data – STEP) application protocols to these modeling language standards. 

Another notable standardization achievement is the 

Simulation Interoperability Standard’s Organization Core 

Manufacturing Simulation Data specification standardization. MSID continues to enhance on-line testing services that enable design-engineering, 

supply chain, and e-business software 

vendors to validate the conformance 

of their products to emerging or existing standards, and provides tools to 

the standardization community to 

ensure rigorous quality for the standards themselves.

MSID has selected to focus and 

address a set of key industrial “pain 

points” for maximum impact. The 

selected set includes: (1) improving 

the information flow across the supply 

chain, (2) gathering and disseminating 

best practices in sustainable manufacturing, and (3) identifying meaningful sustainability metrics that lead to 

improvements. In choosing our work, we have been 

influenced by several major industrial drivers that reflect 

significant trends relating to information exchange in the 

manufacturing industry:

•	 Globalization

•	 Off-shoring of suppliers

•	 Increases in foreign markets for 

U.S. manufacturers

•	 Concentration on core competencies within 

manufacturing companies

Maintenance 

and Support 

Distributors

/Retailers 

Production

and Test

Analysis and 

Simulation Suppliers

Sourcing

Collaborative

Design

Concept

Development

Development

Partners

Requirement

Management

Product

Portfolio

Management

Customer Needs

Management

Customers

OEMs

Manufacturing Process

Planning

Manufacturers

Figure 1: Complex network of PLM partners
107

•	 Intermixing of previously separate industrial 

“stovepipes” between sectors

•	 Sustainable manufacturing

•	 Increased attention to the entire product lifecycle, including disposal or recycling

•	 Growing regulatory pressure on hazardous waste 

production, greenhouse gas emissions, and 

energy consumption

The implications of these drivers 

include:

•	 Globalization creates increased dependence on electronic information exchange.

•	 Globalization requires 

integration between 

formerly separate industry sectors, each with 

entrenched practices and

terminologies.

•	 Sustainable manufacturing necessitates richer 

information structures to 

capture more than simple 

product geometry.

•	 Increased emphasis on 

sustainability has focused 

attention on the supply chain --- one is only 

as green as its supply 

chain. It has now become a new practice to refer to a 

“closed-loop” supply chain, which includes both the 

forward and the reverse supply chains.

•	 Complex systems increase the difficulty of achieving 

interoperability. 

In response to these drivers, MSID 

has two programs:

•	 Sustainable and Lifecycle Information-based 

Manufacturing

•	 Supply Chain Integration

Staffing Challenges: 

•	 Attracting postdoctoral researchers continues to 

remain difficult, even though the economic downturn 

has generated a little more interest. NIST’s entry-level 

salary structure for postdoctoral researchers, relative 

to that of engineers and computer scientists in the 

private sector, continues to remain a problem complicated further still by the requirement that postdoctoral 

research candidates must be U.S. citizens. 

•	 Our permanent staff has a top-heavy demographic 

– senior staff have topped-out salaries and we cannot replenish junior employee ranks, as our budget 

remains relatively static. This also influences the 

appeal to supervise formally, as there is no financial 

compensation for managers who 

have topped-out salaries. 

Facilities and 

Equipment

Advanced Manufacturing Systems And Networking Testbed 

(AMSANT) and Simulation Laboratories: these are multi-purpose 

computer laboratories that support 

the Manufacturing Engineering 

Laboratory staff and a host of other 

project-specific applications for 

other NIST operating units and 

other agency sponsors. Both 

laboratories provide a multi-media 

environment of computers, audio, video, wireless, and 

networked distribution systems. The Simulation Laboratory complements the services provided by the AMSANT, offering a wide variety of simulation tools, as well 

as a 3D laser scanner that support modeling in manufacturing and other domains. The Simulation Laboratory 

allows us to build manufacturing simulations to support 

testing objectives and work with industrial partners using 

the same tools they use in real-time. Both laboratories 

foster a collaborative physical and virtual environment 

for worldwide communication and demonstration. 

Facilities and Equipment Challenges:

The continuing drop in the price of computing systems allows us to provide excellent computing 

support for our work in a cost-effective manner without 

technical capability degradation.

Resources

Staff

•	 26 permanent NIST staff 

•	 1 part-time permanent, technical

•	 1 NRC post-doctoral researcher

•	 34 guest researchers

FY2010 Estimated Funding

•	 $9,909.9 K STRS 

•	 $602.454 K Other Agency
108

MSID Program

Sustainable and Lifecycle 

Information-based Manufacturing

To prepare for a future where manufacturing has a zero net impact on the environment, 

the United States industry will require key resources and methods that will enable it to 

measure sustainability along several dimensions allowing accurate assessment of status 

and progress. These resources and methods require a science-based identification of 

dimensions, associated measurements and classification and characterization of information relevant to sustainable products, processes, and services. Such traceable information is critical to product designers and manufacturing engineers so that they can 

incorporate sustainability in their efforts and comply with international regulations. To 

create this information infrastructure the program will: analyze standards requirements 

and best practices for sustainable manufacturing; create lifecycle information models for 

interoperability among systems and tools that support sustainable manufacturing; and 

validate and test information models for sustainable design and manufacturing.

Staff

8.75 NIST Staff

9 Guest Researcher FTEs

17.75 Total FTEs

Challenge

As green thinking enters the economic mainstream, U.S. industry is considering how to employ cradleto-cradle strategies to lessen the environmental impact 

of manufacturing. Monitoring the lifecycle of a fully recyclable, sustainable product -- to include modeling the 

evolution of a product across its lifecycle on a computer, 

including its design, manufacture, use and eventual 

disposal -- requires clear science-based methods and 

traceable information to define, assess and measure various indicators of sustainability. Currently manufacturers 

are confronted with too many choices involving ethical 

decisions and often vague concepts. How to interpret 

sustainability according to products, industry sector, 

regional and global factors? Must the carbon footprint 

of every single object used be taken into account? Is 

it better to send disposable products to a landfill or to 

clean reusable products with potential waste of energy, 

water and perhaps chemicals? Having government and 

public agreement on these concepts is only the first 

step -- manufacturers using computer models to find 

the best practices to accommodate a triple bottom line 

of economics, environmental stewardship, and social 

relevance need to know that the software they rely on 

embodies a quantitative, precise understanding of this 

new green territory. The manufacturing floor, with its 

dependence on enterprise wide and interoperable software across the supply chain, simply cannot afford to 

use ill-defined concepts. Precise information exchange 

between design, engineering, manufacturing and endof-life steps is the key for producing sustainable products. Failures in information exchange at the interfaces 

between design, engineering, manufacturing and other 

functions can be viewed as the Achilles heel of good 

product development. Further, for green manufacturing 

systems to achieve their goals, rigorous, clearly defined 

measurements for sustainable indicators are essential.

Technical Strategy

The Sustainable and Lifecycle Information-based Manufacturing program has three primary objectives. First is providing key standards requirements 

and best practices for sustainable manufacturing. This 

includes analyzing and defining the relevant standards 

from carbon footprint determination to energy resource 

management to hazardous material management. The 

program is also developing a scheme for computing the 

carbon footprint of a manufactured product -- a critical 

mathematical “score” that can help resolve concerns 

such as the issue of reusable versus disposable products. NIST is looking to ensure that new standards mesh 
109

with current practices, so researchers are working to 

harmonize their green information standards with existing software standards for manufacturing product data, 

such as ISO 10303, the Standard for the Exchange of 

Product model data (STEP).

Second, the program is providing a framework for 

environmental manufacturing models by determining 

the key attributes and developing information models 

necessary for sustainable manufacturing. For example, 

a model that truly takes into account all environmental 

impacts would have to include, among other things, 

the energy costs of making the equipment that is used 

to manufacture the product and the cost of recycling 

the product at the end of its lifetime. Additionally, to 

understand and calculate the historical environmental impacts of products, processes, and services the 

program is developing strategies to support storage and 

access for long-term archiving of engineering lifecycle 

information.

Third, researchers are developing protocols for testing 

and simulating the application of green standards. Current manufacturing digital simulations would need to 

be extended to address such additional issues such as 

energy consumption, pollution, unnecessary transportation costs, and inventory stockpiling. NIST will also 

develop a test bed that will allow comparison of computer simulation predictions with physical prototypes.

Results and Impacts

Organized two workshops, held in Bangalore, India and at NIST respectively, which brought together 

experts and various stakeholders to identify and discuss 

measurements and standards for sustainable manufacturing, and to understand the global issues. The workshops 

identified major challenges facing the industry and key 

recommendations to address these challenges and were 

documented in the workshop reports.

Developed formal process semantics included in a 

major revision of the Business Process Model and 

Notation (BPMN), Systems Modeling Language, and 

Unified Modeling Language, as standardized by the 

Object Management Group (OMG). This significantly 

improved the interoperability and precision of standards 

widely used in manufacturing. Impact of this work is 

underscored by the following statement from IBM’s Vice 

President of Standards: “The emerging OMG BPMN 2.0 

standard will facilitate productivity improvements and 

ongoing business process innovation across many of the 

industrial and manufacturing sectors IBM serves.”

Created and implemented mappings from ISO 10303-

11 (“STEP” EXPRESS) to the Unified Modeling Language 

(UML), UML Profile of EXPRESS, and EXPRESS to the 

Web Ontology Language (OWL) for data exchange and 

reasoning. These mappings and tools make existing STEP 

data exchange models useful to the current generation of 

software developers. For example, PDES Inc. has plans 

to put a link to one of the mapping tools – OntoSTEP – 

on their consortium web site, which will result in wide 

dissemination of OntoSTEP.

Publications

“An Analysis of Description Logic Augmented with 

Domain Rules for the Development of Product Models,” 

X. Fiorentini, S. Rachuri, H. Suh, J. Lee, J., and R. D. 

Sriram, Journal of Computing and Information Science 

in Engineering, Vol. 10, March 2010.

“Carbon Weight Analysis for Machining Operation 

and Allocation for Redesign,” G. Ameta, M. Mani, S. 

Rachuri, S. C. Feng, R. D. Sriram, K. W. Lyons, International Journal of Sustainable Engineering, Volume 2, 

Issue 4, 2009 , pages 241 – 251.

“Sustaining Engineering Informatics: Toward Methods 

and Metrics for Digital Curation,” J. Lubell, S. Rachuri, 

M. Mani, E. Subrahmanian, The International Journal of 

Digital Curation Issue 2, Volume 3, 2008.

Contact Information: 

Ram D. Sriram, Program Manager

(301) 975-3507

ram.sriram@nist.gov
110

Awards and Recognition

Board Membership

Staff Board Membership

Ram D. Sriram •	 Member Editorial Board, “Research for Engineering Design,” Springer Verlag

•	 Advisory Board, Several international conferences

•	 Scientific Officer, National Center for Biomedical Ontologies

•	 Advisory Board, Journal of Concurrent Engineering: Research and Applications

•	

Shaw Feng •	 Member, Editorial board of the International Journal of Sustainable Manufacturing.

Guodong Shao •	 Executive Board member, Winter Simulation Conference

Leadership

Staff Leadership

Ram D. Sriram •	 Member, Executive Committee, Computers in Engineering Division and organized 

several panels in ASME IDETC/CIE 2009, August.

•	 Panel organizer, Shared Ontologies for Engineering Design, ICORD’2009, January, 

Bangalore, India

•	 Panel organizer, Healthcare Automation and Sustainable Manufacturing, IEEE CASE 

2009, August, Bangalore, India

Rachuri Sudarsan •	 U.S. Regional Editor, International Journal of Product Development (IJPD)

•	 Associate Editor, International Journal of Product Lifecycle Management (IJPLM)

•	 Special Issue Co-Editor, IJPLM – Developing Sustainable Products, Processes And 

Services, Vol. 4, No. 1-3, 2009

•	 Guest editor, Special issue International Journal of Product Lifecycle Management 

(IJPLM), “Exploring the Role of Knowledge Management Technologies in PLM”. 

•	 Co-Chair, Indo-US Workshop on Designing Sustainable Products, Services and 

Manufacturing Systems, August, 2009, Indian Institute of Science (IISc), Bangalore, India.

•	 Workshop Chair, NIST Workshop on Sustainable Manufacturing: Metrics, Standards, and Infrastructure, October 2009, NIST, Gaithersburg, MD, USA

•	 Program Committee Member, International Conference on Software Knowledge 

Information Management and Applications (SKIMA) 2006, 2008, 2009.

•	 Program Committee Member, International Product Lifecycle Management Conference, 2003-present.

•	 Special Session and Panel Organizing Chair, 2008 ASME International Design 

Engineering Technical Conferences (IDETC) and Computers and Information in 

Engineering Conference (CIE).
111

Staff Leadership

Rachuri Sudarsan •	 Organizer, Special Session “The role of ICT in Sustainable Manufacturing Systems”, 

Fifth Annual IEEE Conference on Automation Science and Engineering (IEEE CASE 

2009), IEEE Robotics and Automation Society, Bangalore, India.

•	 Organizer for sessions and panels, AMSE DETC Conference, 2009, San Diego, CA.

•	 Associate Member (invited) of CIRP (College International pour la Recherche en 

Productique-International Academy for Production Engineering)

Conrad Bock •	 Panel organizer, Open Standards for Model-based Enterprise and Engineering 

Integration, American Society of Mechanical Engineers, San Diego, California, 

September, 2009.

•	 Lead and editor for Formal Semantics Workgroup in Semantics Of A Foundational 

Subset Of Executable UML Models Finalization Task Force at the Object Management Group.

•	 Lead and editor for the Activities Workgroup in the Systems Modeling Language 

Revision Task Force at the Object Management Group.

Prabir Sarkar •	 Special Issue Co-Editor, IJPLM, Developing Sustainable Products, Processes And 

Services, Vol. 4, No. 1-3, 2009

•	 Chief Editor, International Journal of Product Design, Serials Publications.

•	 Organizing member, Indo-US Workshop on Designing Sustainable Products, 

Services and Manufacturing Systems, August 2009, Indian Institute of Science 

(IISc), Bangalore, India.

Swee Leong •	 Chair, Simulation Interoperability Standards Organization (SISO) Core 

Manufacturing Simulation Data (CMSD) Product Development Group standards 

development effort 

•	 Lead: Simulation Standards Consortium

Mahesh Mani •	 Symposium Organizer: Modeling Tools and Metrics for Sustainable Manufacturing; ASME-IDETC/CIE 2010, August 2010, Montreal, Canada

•	 Symposium Co-organizer and Session Chair: Modeling Tools and Metrics for Sustainable Manufacturing; ASME-IDETC/CIE 2009, August 2009, San Diego, California.

•	 Organizer Special Session: Performance Metrics for Sustainable Manufacturing; 

Performance Metrics for Intelligent Systems Workshop, National Institute of Standards and Technology, Gaithersburg, September 2009

•	 Coordinator: Panel on Performance Metrics for Sustainable Manufacturing, Performance Metrics for Intelligent Systems Workshop, National Institute of Standards 

and Technology, Gaithersburg, September 2009

•	
112

Staff Leadership

Guodong Shao •	 Conference committee member, Industrial Simulation Conference 2008.

•	 Track chair, Virtual Reality and Graphical Simulation for Industrial Simulation Conference 2008.

•	 Session chair, Winter Simulation Conference 2008.

•	 Advisory chair, SIMUL 2009 –The International Conference on Advances in System 

Simulation

•	 Conference committee member, SIMUL 2009 –The International Conference on 

Advances in System Simulation

•	 Conference committee member, Industrial Simulation Conference 2009.

•	 Track chair, Virtual Reality and Graphical Simulation for Industrial Simulation Conference 2009.

•	 Session chair, Industrial Simulation Conference 2009.

•	 Conference committee member, North American Simulation Technology Conference (NASTEC) 2009.

•	 Advisory chair, SIMUL 2010 –The International Conference on Advances in System 

Simulation

•	 Conference committee member, SIMUL 2010 –The International Conference on 

Advances in System Simulation

•	 Conference committee member, North American Simulation Technology Conference (NASTEC) 2010. 

Kevin Lyons •	 Co-editor, Special Nanotechnology issue of the ASME Journal of Manufacturing 

Science and Engineering, Summer 2010

•	 Session chair, NanoMaterials for Defense 2008 Conference, half-day plenary session entitled Nanoscale Production Challenges.

•	 Co-organizer and session co-chair, NSF workshop, “Grand Challenges for BioNanomanufacturing for Year 2020, instrumentation, metrology, and standards for 

bio-nanomanufacturing areas.

•	 Moderator and presenter, Nanomanufacturing Panel at the ASME Micro- and Nanosystems (MNS) Conference 2008.

•	 Symposium co-organizer, Modeling Tools and Metrics for Sustainable Manufacturing; 2009 ASME International Design Engineering Technical Conferences (IDETC)/

Computers in Engineering (CIE) for 2009 and 2010

Allison Barnard 

Feeney

•	 Project Editor, ISO 10303-233 Application Protocol: Systems Engineering within 

ISO TC 184-SC 4 Industrial Data.
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Staff Excellence Recognized

Ram D. Sriram •	 Elected as a Fellow of the American Association for the Advancement of Science, 

2010.

•	 Keynote Speaker, TEKES’ launch of a three year 100 million euros Digital Product 

and Process initiative (5/7-5/9) in Finland. 

•	 Keynote Speaker, Tools and Methods of Competitive Engineering 2008, April 2008 

(Topic: Information Modeling Framework and Ontology Development for PLM) 

Rachuri Sudarsan •	 ASME Certificate of Appreciation, Contribution to ASME Y14.5.1 standard and 

ASME Y14.5.1 working group participation

•	 Received testimonies from industry leaders from Xerox, Ford, and URS Corporation 

regarding work on sustainability related research and leadership

•	 Keynote talk, Model based Engineering and Standards for Sustainable Manufacturing System, CIRP meeting, “The Role of Interoperability Standards in Enabling Sustainable Enterprise”, Fifth International Conference on Signal Image Technology 

and Internet Based Systems (SITIS 2009), November 2009, Marrakech, Morocco

Conrad Bock •	 Received testimonial letters from John Deere, SAP, International Business 

Machines, and Lockheed for work on formalization and standardization of process 

and products models.

Allison Barnard 

Feeney

•	 Member, INCOSE Model Driven System Design Working Group, received INCOSE 

Working Group Award for bringing the STEP Systems Engineering standard (AP233) 

to completion.

•	 Received testimonial letters from John Deere and Lockheed Martin for work aligning systems engineering standards across INCOSE, OMG and ISO TC 184-SC 4.

Josh Lubell •	 Testimonials from the Balisage Markup Conference chairs and also from the inventor of the Schematron XML schema language for the paper “Documenting and 

Implementing Guidelines with Schematron.”

Kevin Lyons •	 Invited member, NSF Nanomanufacturing Center panel to review the NSF Center 

for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems (NanoCEMMS) located at the University of Illinois.

•	 Invited participant, MEL representative, Manufacturing Trends 2020 strategic planning workshop sponsored by NIST and organized by SRI Consulting: Business 

Innovation (SRIC-BI) to identify potential research directions for NIST in the area of 

manufacturing.

Shaw Feng •	 Invited to join the ASME Sustainable Manufacturing Research Committee to 

lead and coordinate efforts in developing sustainability metrics and 

measurement methods.
114

Sustainable and Lifecycle 

Information-based 

Manufacturing Projects

Sustainability Standards 

Landscape

Challenge/Problem Addressed

There is a variety of voluntary and regulatory standards related to sustainability. Selecting applicable 

standards across the entire lifecycle is a critical and 

challenging task for manufacturers. Using these standards one can develop best practices and recommended 

practices to reduce environmental impact of products, 

processes, and services. To develop these practices it is 

critical to understand these standards from the information and modeling point of view that will take into 

account requirements of various stakeholders. Further, to 

assess the impact of recently proposed international or 

national standards, and to compare the effect of various 

applicable standards on products, processes, and services it is critical to understand the impacts of changes 

proposed in these sustainability standards.

Objective(s)

•	 Develop a typology of mandatory and voluntary standards related to sustainability.

•	 Analyze each standard from the information and modeling point of view that will take into account requirements of various stakeholders such as customer, 

researcher, government, industry and others.

•	 Develop a web-portal to help various stakeholders to 

study and compare standards in a formal way using 

ontologies.

•	 Analyze standards using the Zachman framework 

for gaps and overlap analysis, and help industries to 

understand issues related to standard implementation.

•	 Develop a repository of indicators and measures for 

sustainability of products, processes, and services 

using triple bottom line.

Accomplishments

•	 Analyzed a large set of standards related to sustainability such as ISO 14000, REACH (Registration, 

Evaluation, Authorization and Restriction of Chemicals), RoHS (Restriction of Hazardous Substances) 

and related standards for the web-portal and developed a web-portal that consolidates information 

on sustainability related standards. These standards 

were analyzed using a Zachman framework. Plans 

are underway to include this web-portal as part of 

the DOC/ITA’s (U.S. Department of Commerce/International Trade Administration) Sustainable Business 

Clearinghouse, which will enable various stakeholders to implement sustainability related standards in a 

meaningful manner. 

•	 Developed a method for assessing sustainability. 

The measure is based on energy and material flow 

and it is designed in such a way that a designer can do 

comparative analysis among the design alternatives, 

incomplete and evolving information. Based on this 

sustainability impact measure, the industry can 

define a “baseline impact of product”, which does 

not exist now.

Planned Future Accomplishments

•	 Analyze standards using Zachman framework for gaps 

and overlap analysis, and help industries to understand issues related to standard implementation.

•	 Evaluate the above newly developed method for 

assessing sustainability of products in industries.

Customers and Collaborators

Department of Commerce/International Trade Administration (DOC/ITA); Environmental Protection Agency; 

American National Standards Institute; Aerospace 

Industries Association; American Society of Testing and 

Materials E60; Washington State University; Xerox Corporation; The Boeing Company. 
115

Sustainability Indicator 

Repository

Challenge/Problem Addressed

Akey challenge for manufacturing companies is to overcome the barrier in measuring sustainability 

performance throughout a product’s life cycle. In an 

attempt to address the challenge, many sustainability indicators have been developed by different international, 

national, and private organizations. There are overlaps 

and inconsistency among the developed indicator sets. 

An emerging industry need is on an open, neutral, and 

inclusive indicator set. 

Objective(s)

•	 Develop an indicator repository that provides harmonization to existing indicators. Sustainability indicators 

in the repository include those that are harmonized 

with existing sets, others that are derived industry 

practices, and the others that are identified as additional needed indicators to meet industry needs. 

•	 Provide definitions of fundamental terms frequently 

used in sustainability measurement, indicator 

characteristics of the sustainability indicators, 

the format/template of the statement of the 

measurement purpose, and the need of sustainable 

manufacturing metrics.

•	 Develop suggested Indicator hierarchies, which are 

developed using a structure of categories and the 

relationship with the product life cycle. Also, develop 

example applications of the repository to facilitate 

understanding. Include the developed indicator hierarchies and examples in the indicator repository.

Accomplishments

•	 Developed an initial measurement infrastructure for 

sustainable manufacturing and published an overview 

of the infrastructure in the 7th Global Conference on 

Sustainable Manufacturing, December 2009. This will 

enable the U.S. manufacturing industry to measure 

sustainability in their products and processes and will 

help them to compete in the international markets. 

Planned Future Accomplishments

•	 Publish an overview of sustainable manufacturing 

metrics development at NIST in the 17th CIRP Life 

Cycle Engineering Conference in May 2010.

•	 Develop an indicator repository that provides harmonization to existing indicators, defining fundamental 

terms frequently used in sustainability measurement.

•	 Create a web site of the sustainability indicator repository for manufacturing companies to retrieve necessary indicators to measure their sustainability performance in products and processes. 

Customers and Collaborators

Organization of Economic Cooperation and Development; University of Kentucky, Texas Tech University; GE 

Aviation, Lexmark, Toyota, Proctor and Gamble
116

STEP Evolution and 

Transition

Challenge:

One key factor in the success of many best-of-breed enterprises is efficient information management. 

Increasingly, enterprises are employing Model Driven 

Architectures, semantics, ontologies and Semantic Web 

technologies to successfully enable efficient and integrated information management. 

The STEP and related ISO TC 184 SC4 Industrial Data 

standards developed over the past two decades provide a rich source of consensus-based domain-specific 

information models. Production implementations of 

STEP have resulted in real cost savings of $150M per 

year to US industry. However, STEP lacks a consistent 

IT architecture based on widely used technologies. 

The STEP focus on data means that its standards do not 

address other viewpoints that have become key to business process reengineering and systems integration over 

the past several years.

Enabling interoperability between STEP and the technologies standardized in OMG and W3C enables the 

proven information models of STEP to be part of an 

enterprise integration solution based on inter-related 

data exchange, ontology and service specifications.

Accordingly, tools and methods are needed to allow 

reuse of existing STEP standards within an evolving 

standards infrastructure, and to help manufacturers 

ensure that established STEP implementations can be 

retooled to work with more widespread implementation 

technologies.

Objectives

•	 Enable engineering enterprise integration based on 

inter-related data exchange, ontology and service 

specifications

•	 Greatly reduce barriers to the use of SC4 standards in 

industry by enabling the successful integration of STEP 

with OMG and W3C standards 

•	 Demonstrate a process for migration of STEP data 

models to more widely implemented modeling and 

implementation technologies.

Accomplishments

•	 Created and implemented mappings from STEP 

EXPRESS to Unified Modeling Language (UML), UML 

Profile of EXPRESS, and EXPRESS to Web Ontology 

Language (OWL) for data exchange and reasoning. 

The mappings and tools developed under this project 

make existing STEP data exchange models useful to 

the current generation of software developers.

•	 Led the publication of STEP standard for exchanging 

Systems Engineering information (AP233), which will 

result in significant reduction in time and costs of 

developing complex systems.

•	 Created, implemented, and demonstrated a mapping 

between OMG’s Systems Modeling Language (SysML) 

and STEP AP233 (Application Protocol 233, the STEP 

Systems Engineering project), which will facilitate 

interoperability of systems engineering (SE) tools 

with other SE tools and computer-aided engineering 

software.

•	 Initiated project to propose Future SC4 (ISO 10303, 

Technical Committee 184, Sub-committee 4 on Industrial Data) Architecture within the ISO subcommittee 

responsible for STEP development. The proposed 

Future SC4 Architecture supports direct use of OMG 

and W3C standards and enables enterprise integration 

based on inter-related data exchange, ontology and 

service specifications.

Planned Future Accomplishments

•	 Publish proposed Future SC4 Architecture for SC4 ballot.

•	 Make freely available the mapping specifications and 

tools that enable integration of STEP and OMG and 

W3C standards and technologies.

•	 Develop methods and guidelines for implementing the 

Future SC4 Architecture.

•	 Identify and work with a pilot project to demonstrate 

that the Future SC4 Architecture enables enterprise 

integration based on inter-related data exchange, 

ontology and service specifications.

Customers and Collaborators

PDES, Inc.; ISO TC184/SC 4 Industrial Data; Object 

Management Group (OMG); World Wide Web Consortium (W3C); Eurostep, Inc.; John Deere; 

Lockheed Martin
117

Information Models for 

Sustainable Manufacturing

Challenge/Problem Addressed

Manufacturing has become increasingly complicated due to many new factors that must be 

considered, such as sustainability, and a wider range of 

collaborators involved. Engineers interact across a wide 

range of specialties, especially to account for an increasing number of process alternatives in the reverse supply 

chain, such as disassembly and recycling. Consideration 

of multiple lifecycle stages and more collaboration result 

in better and more sustainable products, but also place 

a significant burden on engineers to examine a larger set 

of alternative designs at varying levels of detail. Collaboration is often hampered by lack of uniform interpretation of modeling languages and terminologies, leading 

to rework when discrepancies are discovered. 

A major aspect of sustainability is the reverse supply 

chain, which prepares products for reuse, remanufacture, or recycling. Disassembly is a critical operation in this chain, separating products into reusable, 

remanufacturable, recyclable, and disposable parts. The 

disassembly process includes separation of functional 

parts from the rest of the product, the cleaning of usable 

parts, and quality inspection. Disassembly planning 

requires information from design, such as disassembly 

operations, sequencing, disassembly features, their relationships, and subassemblies. Designers need the cost 

of disassembly and available equipment to determine 

disassemblability of a design. This project provides an 

information model to exchange disassembly information 

among lifecycle applications, such as design, disassembly planning, and reverse logistics.

This project facilitates collaborative exploration of 

manufacturing alternatives by providing formal and 

model-based representations of engineering information 

beyond those typically available, including sustainability 

information such as disassembly. Semantically consistent 

engineering information simplifies lifecycle management, including capture of alternatives and incremental 

refinements that meet requirements and earlier engineering commitments. They also lead to more reliable 

interpretation of models across the product lifecycle 

due to more rigorous language semantics. Model-based 

techniques provide engineering-friendly languages, 

freeing engineers from learning the specifics of formal approaches, while still having their benefits. The 

project improves the power of model-based engineering 

languages, to enable different or overlapping aspects of 

manufacturing information to be developed separately, 

or built on each other, then assembled rapidly and flexibly with the aid of automated consistency checking.

Objective(s)

•	 Develop product and process modelling languages 

based on semantically precise foundation.

•	 Develop a disassembly information model and demonstrate it with test cases collected from industry.

Accomplishments

•	 Developed formal process semantics included in a 

major revision of the Business Process Model and 

Notation, Systems Modeling Language, and Unified 

Modeling Language, as standardized by the Object 

Management Group. This significantly improved the 

interoperability and precision of standards widely 

used in manufacturing.

•	 Developed a product modeling language combining the capabilities of ontology and model based 

approaches. This is expected to facilitate collaborative 

exploration of manufacturing design alternatives. 

•	 Evaluated the Web Ontology Language for capturing manufacturing assembly structure and product 

modeling languages. This contributed to research on 

applying formally defined languages to manufacturing 

problems.

•	 Developed a draft disassembly model with features, 

tolerance, work piece, equipment, and workflow. This 

will improve the reliability of exchanging disassembly 

information among lifecycle applications, such as 

disassembly planning and reverse logistics.
118

Planned Future Accomplishments

•	 Develop a process modeling language combining the 

capabilities of ontology and model-based approaches, 

and integrate it with the product modeling language.

•	 Extend the product modeling language to capture testing and evaluation of product designs.

•	 Develop a prototype modeling system to 

demonstrate the usage of the product and process 

modeling languages.

•	 Document and demonstrate the disassembly model. 

The model enables developing new software systems 

of design for eco-friendly products for reuse, recycle, 

and remanufacturing. The model also provides a basis 

for reliable data exchange of disassembly information among design, disassembly planning, and reverse 

logistics in product lifecycle applications.

Customers and Collaborators

John Deere; Caterpillar; Lockheed Martin; Raytheon; 

The Boeing Company; Airbus; International Business 

Machines; SAP; Oracle; Dell Computers; U.S. National 

Aeronautics and Space Administration; Object Management Group; Georgia Institute of Technology; Korea 

Advanced Institute of Science and Technology; Texas 

Tech University; University of Toronto; San Jose University; University of Miami
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Long Term Knowledge 

Retention

Challenge/Problem Addressed

Lack of an infrastructure for archiving digital representation of manufactured artifacts impedes the 

ability to retrieve and use prior engineering knowledge. 

The nature of product and process information must be 

characterized to allow developing methodologies for 

sustaining long-term usability of engineering information, and defining metrics for digital preservation of 

engineering information from Computer-Aided Design 

(CAD), Computer-Aided Engineering, Computer-Aided 

Manufacturing, Product Lifecycle Management (PLM) 

and Life Cycle Assessment (LCA) and green (sustainable) 

manufacturing related tools.

This project focuses on two problem areas:

•	 Ingest of information packages into an archival system, 

because downstream archive functions (data management, access) depend on ingest quality, and ingest is 

arguably the most domain-sensitive archival function.

•	 Specification of engineering-specific descriptive metadata, to be used in conjunction with existing administrative and packaging metadata to aid in future access 

(query and retrieval).

Objective(s)

•	 Specify descriptive metadata for various partial 

descriptions of the product design to be archived, 

employing an ontological multi-layered modeling 

approach.

•	 Use the structure specified in the “Technical Data 

Packages” US Military Standard (MIL-STD-31000) to 

guide the descriptive metadata partitioning.

•	 Predict future access requirements for managing 

archived digital engineering objects by collecting use 

cases and developing access scenarios.

Accomplishments

•	 Developed a ship gate valve maintenance long-term 

archiving demonstration scenario using a variety of 

information types, some provided by the Navy. The 

scenario is outlined in a document containing UML 

diagrams and will serve as a roadmap for a proof-ofconcept demonstration.

•	 Proposed an initial architecture for ingest of a product 

model information package employing ontologicallyinspired representations for descriptive metadata 

and data elements inspired by the “Technical Data 

Packages” US Military Standard (MIL-STD-31000) for 

packaging metadata. The approach is documented in a 

completed proposal to the National Archives Records 

Administration as well as in an paper in preparation.

Planned Future Accomplishments

•	 Develop an ontologically specified schema representing engineering domain-specific descriptive information (metadata) to aid access to a product model data 

repository, with a documented procedure for populating the schema.

•	 Demonstrate product model data repository ingest 

and access to show the effectiveness of the proposed 

ingest approach and descriptive metadata schema.

Customers and Collaborators

US National Archives Records Administration; Naval 

Surface Warfare Center: Carderock Division; Automotive 

Industry Action Group; PDES, Inc.; University of Dijon
120

Simulation of 

Manufacturing 

Enterprises for 

Sustainability

Challenge/Problem Addressed

Modeling and Simulation (M&S) can play a major role in the success of sustainable manufacturing 

through the ability to predict the impact of implementing certain facilities, processes, or product actions. M&S 

has proven to be an effective tool for analyzing complex 

manufacturing systems. However, to utilize M&S effectively, it is essential to develop a suitable infrastructure 

(such as measurements, standards, frameworks, models, and tools) that promotes interoperability and the 

application of simulation technologies for sustainable 

manufacturing, making their use transparent to the user. 

The need for effective M&S will continue to grow with 

increasing system complexity, promoting new requirements for addressing global sustainability and seamless 

exchange of vast quantities of information across the 

design, manufacturing, and distribution network.

Objective(s)

•	 Develop an essential and suitable infrastructure (such 

as measurements, standards, frameworks, models, 

and tools) that promotes interoperability and the 

application of simulation technologies for sustainable 

manufacturing. 

•	 Develop an architecture for the integration of an 

identified set of modeling and simulation applications, 

engineering tools, standards and repositories of data.

•	 Implement reference information models supporting key extensions to simulation interfaces, evaluation metrics, modeling tools and reference data sets 

needed to support sustainability. 

•	 Define taxonomy and templates supporting the characterization of key manufacturing unit processes that 

incorporate sustainability information that can be used 

to calculate performance metrics (process monitoring, 

control, and improvement. 

•	 Capture best practices and performance metrics to 

evaluate objectively a company’s progress and maturity level regarding the use of simulation in pursuit of 

sustainable manufacturing objectives.

•	 Provide focused demonstrations and case studies to 

illustrate extended simulations that support sustainable manufacturing.

Accomplishments

•	 Held symposium on “Modeling tools and metrics 

for sustainable manufacturing,” American Society of 

Mechanical Engineers (ASME), International Design 

Engineering Technical Conferences (IDETC) and 

Computers and Information in Engineering (CIE) 

Conference (successful participation in 2009, regular 

session within CIE for 2010.) Developed a new track 

on “Modeling and Simulation for Sustainable Manufacturing” at the Winter Simulation Conference 2010.

The symposiums are providing a needed forum to 

discuss, promote, and disseminate the new needs 

and requirements for M&S towards sustainable 

manufacturing.

•	 Published six conference papers, one journal paper 

and 1 NIST Internal Report (NISTIR). Publications 

disseminate results to various stakeholders. Publications market NIST subject-matter technical expertise, 

acknowledge NIST research interests, disseminate 

results to various stakeholders, and serve as a tool for 

promoting university and industry partnering.

•	 Initiated three industry collaborations on sustainable 

practices. Having industry partners establishes relevance and credibility of work and assists industry in 

establishing priorities regarding their sustainable 

best practices. 

•	 Performed first phase combinatorial study of manufacturing process using simulation methods. This will 

result in more sustainable friendly factories to be built 

in reduced time and costs. 
121

Planned Future Accomplishments

•	 Define a preliminary structure of the simulation architecture and corresponding infrastructural components 

facilitating new trends toward science-based manufacturing and simulation. (Architecture)

•	 Develop preliminary information models supporting 

simulation for sustainable manufacturing. (Reference 

information models) 

•	 Define a top-level taxonomy and classification for 

unit processes; define a generic template supporting 

science-based characterization of unit processes; create a repository for templates facilitating the characterization of unit processes, related reference information 

models and case studies. (Unit process)

•	 Determine initial set of manufacturing best practices; 

identify sustainability metrics for scoring such as 

energy consumption, types and quantities of material 

used, etc. (Sustainability maturity model)

•	 Identify new industrial relationships and potential 

collaborations; define initial extensions to simulation 

objectives, evaluation metrics, unit processes, modeling tools and reference data sets needed to support 

sustainability; demonstrate an initial set of extended 

case studies. (Industrial case studies and outreach)

Customers and Collaborators

Boeing Seattle, St. Louis; General Motors, Volvo, 

USCAR; Stanley Black and Decker (tentative); Unigraphics, Dassault systems – Delmia; Doyle Center, Pittsburgh; University of Maryland, Wichita State University, 

Washington State University, University of Michigan, 

Chalmers University, Sweden; Tampere University, 

Finland. 
122

MSID Program

Supply Chain Integration 

Where once U.S. manufacturers might have built and controlled the transport for all the 

supplies needed for a product, they now rely on suppliers from all over the world. This 

increases flexibility and lowers costs but also opens up a slew of supply chain infrastructure problems, from tracking the supplies as they are shipped around the globe to 

quickly finding new suppliers whose goods can be integrated into an already-running 

production system. This program works with industry to establish the standards needed 

to permit compatibility across a massive, worldwide network of software applications 

covering supplier inventories, supply production schedules and shipment tracking information -- everything needed to get goods from a remote business to one’s own. 

Challenge

Throughout most of the 20th century, production and labor capabilities of individual original equipment 

manufacturers (OEMs) defined competitive advantage. 

combined capabilities of the suppliers that make up the 

OEMs’ supply chain now defines competitive advantage is defined now by the. Therefore, the only way 

to improve competitive advantage is to improve those 

combined capabilities through better integration – that 

is information exchange across the supply chain. The 

challenge for this program is to develop and demonstrate an open, standards-based, testing and integration 

infrastructure that enables the automated exchange 

of information across the supply chain. Since every 

supplier can benefit from such an infrastructure, no 

individual supplier or OEM will commit the substantial 

resources necessary for its development and deployment. In addition, historically, the private sector has not 

invested heavily in such work because of (1) the difficulty assessing its potential costs and benefits and (2) the 

high technical risk and market uncertainty. 

Overview

This program’s business focus is two, critical, supplychain-management issues: supplier discovery and 

long-range logistics. Both of these issues involve a 

number of integration problems. The program’s technical focus is on the development and testing of standards 

needed to address those problems. It collaborates with 

organizations, such as Open Applications Group, Inc. 

(OAGi), that develop domain standards. This collaboration yields architectures and tools to improve the 

creation, validation, and testing of those standards. The 

program also collaborates with organizations, such as 

OMG and W3C that develop knowledge representation 

standards. This collaboration ensures that issue-specific 

manufacturing knowledge can be represented using 

those standards. Finally, the program collaborates with 

users, vendors, and industrial consortia to define particular integration problems and to demonstrate/ implement the solutions to those problems. 

Key Accomplishments 

and Impacts

•	 Completed pilot exercise demonstrating Materials 

Off-Shore Sourcing (MOSS) solution for long-range 

logistics. Based on exercise cost/benefit analysis, the 

Automotive Industry Action Group (AIAG) predicts 

more than 400% internal rate of return and less than a 

3-month payback.

•	 Completed Naming Design Rules (NDR) testing of 

Open Applications Group’s Integration Specification 

(OAGIS) 9.0 specifications, which define interoperability points between business applications. Numerous 

errors were found and corrected before public release, 

strengthening the creditability of 9.0 as an implementable solution, and increasing interoperability 

across additional capabilities, e.g., logistics, shopping, 

and payment services.
123

Future Directions 

and Plans

•	 Extend long-range logistics project to include intracontinental movement of goods to extend and apply 

demonstrated benefits from off-shore supplier pilot to 

intra-continental suppliers

•	 Initiate new project on reverse logistics supply chains 

to support new initiative in sustainable manufacturing 

(for reuse, recycle, and remanufacturing)

•	 Develop and demonstrate new integration 

infrastructure to support supplier discovery by 

U.S. manufacturers

Publications

Vujasinovic, M., Ivezic, N., Kulvatunyou, B., Barkmeyer 

E., Missikoff, M., Taglino, F., Marjanovic, Z., Miletic, I., 

“A Semantic Mediation Architecture for Interoperable 

Supply Chain Applications,” International Journal of 

Computer Integrated Manufacturing, 976-986, Volume 

22, Issue 6, 2008.

Shin, J., Kim, J., Ivezic, N., “Application information 

mapping test: An efficient content-level semantic equivalence test procedure for B2B integration,” International 

Journal of Computer Integrated Manufacturing, 1362-

3052, Volume 22, Issue 10, 2009.

Vujasinovic, M., Ivezic, N., Kulvatunyou, B., Barkmeyer 

E., Missikoff, M., Taglino, F., Marjanovic, Z., Miletic, I., 

“Semantic Mediation for Standard-Based B2B Interoperability,” IEEE Internet Computing, 52-63, Volume 14, 

Issue 1, 2010.

Contact Information: 

Albert Jones, Program Manager

(301) 975-3554

albert.jones@nist.gov
124

Recognition and Awards

Board Membership

Staff Board Membership

Albert Jones •	 Member of Advisory Board Engineering Dept, Loyola University

•	 Member of Enterprise Architecture Board, Penn State University

Leadership

Staff Leadership

Evan Wallace •	 Co-Chair - OMG Ontology Platform Special Interest Group : since it’s chartering – now

•	 Co-Chair - OMG Ontology Definition Metamodel Finalization Task Force, until Sept 

2008 when the group disbanded after completing work leading to the formal ODM 

specification

•	 Co-Chair - OMG Ontology Definition Metamodel Revision Task Force : 

Sept 2008 – now

•	 NIST representative - W3C OWL (Web Ontology Language) Working Group : which 

produced a Recommendation for a revision of OWL called OWL 2

Albert Jones •	 Government representative to the international Intelligent Manufacturing 

Systems Program

Edward Barkmeyer •	 Chairman of the OMG Finalization Task Force for the EXPRESS Metamodel

•	 Standard Chair of the Revision Task Force for the ISO/OMG Common Warehouse 

Metamodel

Nenad Ivezic •	 Member of the International Program Committee for the Interoperability for Enterprise 

Systems and Applications (I-ESA) Conference 2008, 2009

•	 Member of the International Program Committee for the eChallenges 

Conference 2008, 2009

Excellence 

Staff Excellence Recognized

Susanne Müller •	 Certificate of Appreciation for M-19: Materials Off-Shore Sourcing (MOSS) Project

Peter Denno •	 AIAG Outstanding Technical Achievement Award, 2008 and 2009

Nenad Ivezic •	 Invited expert to the Global eBusiness Interoperability Test Bed Methodologies (GITB) 

project of the European Standardization Committee (CEN), 2009

•	
125

Supply Chain Integration Projects

Increase Quality of 

Standards

Challenge

Most supply chain interface standards have been created as XML (Extensible Markup Language) 

schemas. The standards development organizations 

(SDOs) responsible for creating those standards have 

published a set of guidelines, called naming and design 

(NDR) rules. These guidelines, which govern both the 

creation and use of these standards, vary considerably 

from one organization to another. Additionally, they 

were published originally in English text, which made 

testing very difficult. The early challenges for this project 

were to develop computer interpretable rules and a set 

of tools that can be used to test the standards against 

these new computational rules. MSID completed a project to convert the English text into computer interpretable rules and built associated tools to test the standards 

against these rules. 

It is likely that the next generation of existing supply 

chain standards will be developed using a more formal modeling language, like Web Ontology Language 

(OWL) or First Order Logic (FOL). Manufacturers will 

likely use these languages, or others, to capture business 

rules/processes. It is important to capture them, because 

they form a major part of the context in which integration testing will take place. The current challenge for this 

project is to ensure that these languages are capable of 

modeling manufacturing information and manufacturing 

rules/processes. 

Overview

This project has been collaborating with two SDOs to verify conformance of their supply chain standards 

to their NDRs: United Nations Center for Trade Facilitation and Electronic Business (UN/CEFACT) and The 

Open Applications Group Integration Specification (OAGIS). UN/CEFACT published a number of E-Commerce 

related standards. This verification was done using a collection of software testing tools that are now available as 

web services. OAGIS published a collection of interface 

standards used by both the aerospace and automotive 

industries. The project has also been working with OMG 

and W3C to publish a number of important standards. 

Accomplishments

•	 Completed NDR testing of OAG 9.0, found many 

errors and corrected them before public release, 

strengthening the creditability of 9.0 as an implementable solution, and increasing interoperability 

across additional capabilities, e.g., logistics, shopping, 

and payment services.

•	 Completed six interoperability exercises for SYSML 

(Systems Modeling Language) and AP233. NIST provided the Validator, which provides a key capability 

for these exercises. These exercises provide a foundation for interoperability between applications that 

implement these two standards.

Planned Future Accomplishments

•	 Complete development of testing Web Service as a 

readily accessible service for industry and standards 

development organizations to access.

Collaborators and Partners

OAGi, UN/CEFACT, OMG, W3C
126

Reduce Shipping Delays 

and Costs in Longdistance Supply Chains

Challenge

Studies conducted by the Automotive Industry Action Group (AIAG) strongly suggested that the existing 

paper-based information exchange and communication 

systems have caused huge problems in the mangement 

of long-distance supply chains. Those studies concluded 

that a completely paperless system could (1) reduce 

shipment delays, inventory holdings, flow disruptions, 

and logistics costs, and (2) improve compliance with 

Customs-Trade Partnership Against Terrorism and World 

Customs Organization standards for secure trade, and 

increase stability and predicability of material flows. The 

challenge of this project was to develop and demonstrate such a paperless system. 

Overview

AIAG’s Material Off-Shore Sourcing (MOSS) project was designed to improve the business processes 

and information exchanges that drive the intercontinental shipment of goods. Over the last five years of the 

project, the stakeholders involved in these shipments 

have included customer, supplier, carriers, third party 

logistics providers (3PLs), freight forwarders, customs 

brokers, and government agencies. In FY2007, AIAG 

asked MSID researchers to participate in the MOSS 

project. NIST worked with several of these stakeholders 

and a number of software vendors to develop the much 

needed paperless system. That system would include 

standardized Electronic Data Interchange (EDI) message 

definitions, a standardized encoding of the information 

content of these messages, guidelines for how to use the 

messages, and, methods and /tools for automatic generation of all required paper documents from these messages. A demonstration of the systems was to be conducted 

on a real shipment of batteries from Korea to the United 

States, with a subsequent analysis to measure the actual 

costs and benefits.

Accomplishements

•	 Completed development of the paperless system that 

addressed the challenges from long-distance supply 

chain identified above.

•	 Completed conformance testing of software vendor 

implementations against the EDI messages. This was 

necessary for vendors to particiapte in the pilot 

exercise.

•	 Completed pilot exercise and subsequenet cost/benefit 

analysis. The anlysis showed an internal rate of return 

gretaer than 400% with a payback period for participating stakeholders of less than three months.

Planned Future Accomplishments

•	Complete second pilot from the EU to the US to 

derive the same benefits gleaned from the Korea-toUS pilot.

•	Complete Cost/benefit analysis for second pilot to 

quantify the benefits from the preceding activity.

•	Extend MOSS solutions to intra-continental logistics 

to derive the same benefits gleaned from the Koreato-US pilot.

Collaborators

OMG, Lockheed-Martin, Dept. of Defense, Lockheed-Martin, all major UML tool providers, users of 

OMG Meta-Object Facility (MOF -technology tools 

(e.g., UML tools)
127

Facilitate Discovery of New 

Partners in Virtual Supplier 

Networks

Challenge

Rigid supply chain structures are giving way to virtual supply networks of collaborative partnerships – 

sometimes call supplier discovery networks. These 

networks will develop rapidly in response to market 

opportunities; and, they will disband just as quickly 

when those opportunities disappear. They will require 

the Original Equipment Manufacturers (OEMs) to have 

real-time knowledge of the capabilities and capacities 

of all suppliers. Moreover, they will require suppliers to 

have real-time access to and a thorough understanding 

of product requirements and engineering changes. A 

critical requirement for these forming collaborative partnerships is supplier discovery --- the ability for OEMs 

to find suppliers who have the capabilities to meet their 

design requirements. The challenge for this project is to 

develop an integrating infrastructure that automates, to 

the extent possible, the process of supplier discovery.

Overview

This project was established under MEL’s competitive Exploratory Projects program funding. This funding 

is used to: perform preliminary work as the foundation 

of a future initiative proposal; develop a project that will 

eventually be funded by sources outside of MEL; explore 

the possibility of a new MEL Program; or start work 

related to an existing program that may be eventually 

incorporated into that program. Initial discussion with 

DSN Innovations, Pittsburgh, PA, and Army’s Picatinny 

Arsenal, NJ indicated a need for such an integration 

infrastructure that facilitates internet-based discovery of 

suppliers. Such an infrastructure will include standard 

models for representing requirements and capabilities, 

tools that enable OEMs and suppliers to register those 

requirements and capabilities, and methods and tools 

that allow designers to find potential suppliers whose 

capabilities match their requirements automatically. This 

planning project was initiated last spring. It will create 

a technical plan for developing and demonstrating such 

an infrastructure.

Accomplishments

•	 Completed detailed project plan that provides the 

research roadmap for the project.

•	 Completed a review of matchmaking technologies 

that are a fundamental part of the research roadmap. 

•	 Completed review of several on-line marketplaces. 

This review will provide a state-of-the-practice understanding for the project.

Planned Future Accomplishments

•	 Select candidate matching techniques to improve 

automated efficiencies of supplier discovery.

•	 Develop experimental plan to choose from among 

candidates to select the most effective technique.

•	 Pilot test the selected candidate with stakeholder 

industrial collaborators.

Collaborators

University of Texas, Others to be determined
128

Improve Content Testing 

for Manufacturing 

Integration Solutions

Challenge

Supply chain partners still face enormous technical integration problems exchanging manufacturing 

messages using existing supply chain integration standards and the commercial software solutions that implement them. Currently available testing tools can verify 

conformance of the form and structure of the messages 

to the form and structure specified in the underlying 

standards. But, these tools cannot determine whether the 

content of messages is “correct.” The challenge of this 

project is to develop new approaches for testing content 

for an individual message and for a flow of messages associated with a particular business process. This requires 

a new kind of testing, which we call content testing.

Overview

Content testing examines the manufacturing data itself and the context in which it is being used. 

Whether the manufacturing data has a well-defined 

meaning may depend on the context in which it is 

used. For individual messages, that context can often be 

expressed as one (or more) constraints(s). For these situations, we propose a constraint-based testing approach. 

This approach attempts to constrain the values of the 

data by applying the underlying standard. We identified a number of such constraints within the standard, 

developed a suite of associated tools, and tested those 

tools against a small subset of Open Applications Group 

(OAG) specifications. 

When dealing with a collection of interdependent messages, this testing approach is not sufficient. This situation arises frequently when the manufacturing scenario 

involves the execution of a complicated business process – the Materials Off-Shore Sourcing MOSS project is 

one example. To address content testing in such scenarios, we propose a new architecture that uses ontologies 

to capture business rules and other types of necessary 

knowledge and a new type of reasoner to execute the 

actual content testing of the messages. 

Accomplishments

•	 Developed ontology-based content testing architecture that will be the foundation for all of our future 

testing activities.

•	 Completed content-checking tools for initial class of 

constraints. These will be used to conduct testing on 

selected OAG specifications.

•	 Demonstrated use of semantic mediation in Businessto-Business (B2B) interoperability testing. Semantic 

mediation is the fundamental technology needed for 

successful interoperability testing. 

Planned Future Accomplishments

•	 Demonstrate new tools on selected supply chain 

standards to apply the results from the previous 

accomplishment against real-time customer 

manufacturing data.

•	 Develop initial ontology-based testing tools and associated models to verify correctness.

•	 Demonstrate tools and models on selected MOSS 

messages to expand the applied usefulness for intracontinental supply chains.

Customers and Collaborators

Open Applications Group, Automotive Industry Action 

Group, University of Maryland Baltimore Campus
129

Appendix
130

PED Staff Recognition 2009-2010

Board Memberships

Staff Board Membership

Estler, Tyler •	 BIPM Director’s Advisory Group on Uncertainty, Sevres, France

Phillips, Steven •	 Association of Coordinate Metrology, Canada

•	 Board of the North American Coordinate Metrology Association 

•	 Board for US Standard Technical Advisory Group

Postek, Michael •	 SPIE Advanced Lithography Advisory Board

•	 SCANNING Editorial and Advisory Boards

•	 SPIE/SCANNING Conference Co-chairman and organizer 

•	 SPIE Instrumentation, Metrology and Standards for Nanomanufacturing Conference 

Co-chairman and organizer

•	 Nanotechnology Briefs Board of Directors

Potzick, James •	 SEMI Standards Microlithography Committee

Silver, Richard •	 SPIE Advanced Lithography Executive Committee, 2006-2010

•	 North American Regional Standards Committee, SEMI Standards 

•	 Advanced Metrology Advisory Group, SEMATECH 

•	 Editorial Board, Nanotechnology E-Bulletin

•	 NIST Patent Review Committee, 2007-2009

Vladar, Andras •	 ISMI/SEMATECH Advanced Lithography Advisory Board

•	 SCANNING Editorial and Advisory Boards

•	 ITRS International Road Map for Semiconductor Technology –Metrology Section
131

Conference Chairmanships

Staff Conference Chairmanships

Dixson, Ronald •	 2nd Annual Tri-National Workshop on Standards for Nanotechnology NIST, Feb. 2008

Postek, Michael •	 Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2008, San Diego CA.

•	 Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2009, San Diego CA.

•	 Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2010, San Diego CA.

•	 Electron/Instrument Interaction Modeling in the Scanning Electron Microscope XII. A NIST Sponsored Workshop, 2008 SCANNING, April, 2008.

Silver, Richard •	 Modeling Aspects in Optical Metrology, SPIE International Conference, 2007, 2009

•	 Nanotechnology Working Group, Co-chair, 2005-2009, SPIE sponsored sessions.

•	 SEMI Standards Microlithography Committee, Co-chair, 2004-2009

Vladar, Andras •	 XII. 2008 SCANNING, NIST, Gaithersburg April, 2008

Stoup, John •	 ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty. April 4-6, 

2009, Albuquerque, NM

Session Chairmanships

Staff Session Chairmanships

Orji, George •	 Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2009, San Diego CA.

•	 Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2010, San Diego CA.

Phillips, Steven •	 NACMA: Coordinate Metrology, Mexico 2009

•	 ACMC: CMMs, Windsor CA, 2008

Potzick, James •	 SPIE Photomask Technology 2009

•	 SPIE Photomask Technology 2010

Silver, Richard •	 SPIE Advanced Lithography, metrology sessions chair, 2004-2010

•	 Instrumentation, Metrology and Standards for Nanomanufacturing, Program Committee

Song, John •	 Advanced surface evaluations for the Ninth International Symposium on Measurement 

Technology and Intelligent Instruments (ISMTII 2009), Sat Petersburg, Russia, June, 29 to July 3, 

2009. 

•	 Traceability in other areas for the IMEKO TC8 2008 conference, November 2008. Torino, Italy.

•	 Advanced surface metrology for the 4th International Symposium on Precision Mechanical 

Measurements (ISPMM 2008), Hefei, China, September 2008. 

Villarrubia, John •	 Chair of Modeling session and Metrology session at Scanning, 2008, Monterery, CA.

•	 Chair of Modeling session, Scanning, 2009.

•	 Chair of Modeling session, Scanning, 2010.

Vladar, Andras •	 Charged Particle Metrology XII. A NIST Sponsored Workshop, 2008 SCANNING, April, 2008.
132

Technical Workshops and Short Courses Presented

Staff Workshops/Short Courses

Dixson, Ronald •	 NIST-SPIE sponsored workshop in conjunction with SPIE Advanced Lithography Conference, March 2008, 2009

Orji, George •	 Invited short course: “Introductory Metrology” International SEMATECH Manufacturing Initiative Symposium on Manufacturing Effectiveness. Austin TX, 

October 21-24, 2008

•	 Moderator: Panel Discussion on “Contour Metrology” at the SPIE Advance Lithography 

Conference 2009

•	 Moderator: SPIE Panel discussion on Reference Metrology (with Ronald Dixson). SPIE 

Advanced Lithography Conference. San Jose CA. February 28th 2008

Postek, Michael •	 Scanning Microscopy in Forensic Science (with Frank Platek, USDA and Dennis Ward, 

FBI). Scanning 2009, Monterey, CA. 

•	 Scanning Microscopy in Forensic Science (with Frank Platek, USDA and Michael 

Trimpe. Scanning 2010, Monterey, CA. 

Song, John •	 The NIST workshop for SRM 2461 standard casings was hold in Largo, FL, 

January 8, 2008.

•	 The first workshop for NIST National Ballistics Imaging Comparison (NBIC) project, 

July 8, 2008, Orlando, FL.

•	 The second workshop for NIST National Ballistics Imaging Comparison (NBIC) project, January 8, 2009, New Orleans.

Potzick, James •	 Short course Nanoscale metrology--theory and practice (with Brian Grenon, Grenon 

Consulting, Inc.) at BACUS 2007 and 2008.
133

Leadership Demonstrated

Staff Leadership Demonstrated

Dagata, John A. •	 Organizing committee, NSF-sponsored workshop on Grand Challenges for Bio-Nano Integrated Manufacturing, Arlington VA April 14-16, 2008.Organizing committee and keynote 

speaker, 2008 International Workshop on Tip-based Nanofabrication, National Taiwan 

University of Science and Technology, Taipei, Taiwan, October 19-21, 2008.

Dixson, Ronald •	 Chair of ISO/TC201/SC9/SG3

Estler, Tyler •	 Chairman ASME B89.7.4 Measurement Risk Analysis

•	 Chairman JCGM WG1 S/C 3 Conformity Assessment

•	 Chairman, Scientific and Technical Committee P (Precision Engineering and Metrology), 

CIRP – the International Academy for Production Engineering

Phillips, Steven •	 NIST Representative to SIM (North & South American Metrology) Coordinator, Mexico 2009

•	 Chair, ASME B89.4 Division on Coordinate Metrology

•	 Chair, ASME B89.4.7 Working Group on Measurement Uncertainty

•	 Chair, ASTM E57 Working Group on Short Range Laser Scanners

•	 Subject Matter Expert #1 for US to ISO TC213 WG10 on Coordinate Metrology

•	 Subject Matter Expert #1 for US to ISO TC213 WG4 on Measurement Uncertainty 

Postek, Michael •	 National Science Foundation COV CMMI 

Potzick, James •	 Convener and leader, SEMI Standards Task Force Terminology for 

Microlithography Metrology

•	 Leader Nano1 international comparison of linewidth measurements for BIPM.

Renegar, Brian •	 Task force chair ASME B46 Surface Texture revision

Sawyer, Daniel •	 Chairman ASME B89.1. Oil and Survey Tapes

•	 Chairman ASME B89.4.19 Laser Trackers

Silver, Richard •	 SPIE Advanced Lithography, Organizing committee, 2001-2010

•	 Instrumentation, Metrology and Standards for Nanomanufacturing, Program Committee

•	 Instrumentation, Metrology and Standards for Nanomanufacturing, 

Organizing Committee, 2007-2010

•	 Modeling Aspects in optical Metrology, Organizing Committee, 2008-10.

•	 SEMI Microlithography Committee Chair

•	 SEMI Standards two-dimensional grids task force leader

•	 SEMI Standards overlay metrology task force leader

•	 Overlay Metrology Advisory Group, SEMATECH

•	 Defect Metrology Advisory Group, SEMATECH

•	 Special Appt. to the Faculty, Dept of Physics, Univ. of Maryland

Sharkarji, Craig •	 Chairman, ASME B89.4.10, Coordinate Metrology Software
134

Staff Leadership Demonstrated

Song, John •	 Post-Doc Research Adviser of NRC/NAS for Dr. Al Hilton’s research project entitled “Ballistics Identification using Topography Measurements and Correlations” (2007-present). 

•	 Official Observer for the CIPM (BIPM) Consultative Committee for Mass and Related Quantities - Working Group on Hardness (CCM-WGH).

•	 Council Member for the ICMI (International Committee on Measurements and 

Instrumentation)

•	 Committee Member for International Measurement Confederation (IMEKO) TC 5 (Hardness 

Measurement)

•	 International Committee Member for the ISMTII (International Symposium on Measurement 

Technology and Intelligent Instruments)

•	 International Committee Member for the ISIST (International Symposium on Instrumentation 

Science and Technology)

•	 International Committee Member for the ISPMM (International Symposium on Precision 

Mechanical Measurements);

Stanfield, Eric •	 Chairman ASME B89.1.19 Master Balls

•	 MEL Fuel Cell Project Manager for DOE Hydrogen Program sponsored Multi-Year Project 

“Metrology for Fuel Cell Manufacturing.”

Stone, Jack •	 BIPM, Consultative Committee for Length (CCL), Sevres, France

•	 Chairman, ad hoc Working Group on Unstabilized Lasers in the Mise en Pratique 

of the CCL

•	 Working Group on Dimensional Metrology of the CCL

•	 ASME B89.1.8 Laser Interferometers

Vorburger, Ted •	 SME #1 ISO TC213 WG16 Areal and profile surface texture

Vladar, Andras •	 ISO TC 204 SEM Image Sharpness Metrology Standard, NIST 2009

•	 ISO Nanoparticle Metrology Standards, Tel Aviv 2009 - 2010

Everett, Dennis •	 API Sub-Committee 5 Member – Tubular Goods

•	 ASME B1 Main Committee Member/NIST Liason

•	 ASME B1.2 Member - Gages and Gaging for Unified Inch Screw Threads
135

Manuscript Reviewer

Staff Manuscript Reviewer

Attota, Ravikiran •	 WEAR, 2008

Borchardt, Bruce •	 Journal: Measurement Science and Technology 2007

•	 PED WERB sponsor

Estler, Tyler •	 Annals of the CIRP – The International Academy of Production Engineering,, 2008 – multiple 

paper reviews

•	 Measurement Science and Technology, 2007

Phillips, Steven •	 Journal of Manufacturing Science and Engineering

Postek, Michael •	 Electron, Ion, and Photon Beam Technology and Nanofabrication/JVST, 2009.

•	 SCANNING 2009

•	 SCANNING 2008

Silver, Richard •	 JVST B

•	 Journal of Chem Physics

Vladar, Andras •	 SCANNING, 2005 - 2010.

•	 UltraMicroscopy 2005 - 2010
136

Excellence Recognized (Awards)

Staff Excellence Recognized

Attota, Ravi •	 Nano 50 Award for Scatterfield Optical Microscopy

Blackburn, Chris •	 The NIST Judson C. French Award, for significant improvements in accuracy 

and extensions of range in the calibration of long length standards

Borchardt, Bruce •	 The NIST Judson C. French Award, for significant improvements in accuracy 

and extensions of range in the calibration of long length standards

Estler, Tyler •	 The NIST Judson C. French Award, for significant improvements in accuracy 

and extensions of range in the calibration of long length standards

Estler, Tyler •	 2009. ASME’s Certificate of Achievement” for outstanding national 

standards work

Phillips, Steven •	 DOC Gold Medal, for leadership in international standards

Phillips, Steven •	 The NIST Judson C. French Award, for significant improvements in accuracy 

and extensions of range in the calibration of long length standards

Phillips, Steven •	 2009. ASME’s Certificate of Achievement” for outstanding national 

standards work

Potzick, James •	 Elected Fellow of SPIE

Sawyer, Daniel •	 The NIST Judson C. French Award, for significant improvements in accuracy 

and extensions of range in the calibration of long length standards

Sawyer, Daniel •	 NIST Bronze Medal, for the design and fabrication of an operating room computer assisted orthopedic hip surgery artifact

Shakarji, Craig •	 DOC Gold Medal, for leadership in international standards

•	 NIST Bronze Medal, for the design and fabrication of an operating room computer assisted orthopedic hip surgery artifact

Silver, Richard •	 Nano 50 Award for Scatterfield Optical Microscopy

•	 Elected Fellow of SPIE, 2008 

•	 DOC Silver Medal 2008, for development of optical methods in 

overlay metrology.

Stone, Jack •	 DOC Silver Medal, for development of the NIST microfeature CMM probe 
137

Invited Presentations

Staff Invited Presentations

Attota, Ravikiran •	 Invited author: “Nanoscale measurements with a through-focus scanning optical microscope,” 

Future Fab, 30, pp 83-88, (2009).

•	 Invited presentation: “Nano-scale dimensional analysis with through-focus scanning optical 

microscope imaging method”, SME Nanomanufacturing, April 1-2, 2009, Minneapolis, MN

Dixson, Ronald •	 “Reference Metrology in a Research Fab: The NIST Clean Calibrations Program,”SEMATECH 

Advanced Metrology Advisory Group, Austin, TX, September 24, 2008.

•	 “Traceable AFM Dimensional Metrology at NIST,” NIST Workshop on Calibrations and Standards 

For Nanomechanical Measurements, Gaithersburg, MD, June 16, 2009.

Orji, George •	 Keynote presentation: “Traceability: The Kay to Nanomanufacturing” Sixth International Conference on “Precision, Meso, Micro and Nano Engineering, Coimbatore, India December 2009

•	 “Measurement traceability and quality assurance in a nanomanufacturing environment” Instrumentation, Metrology and Standards for Nanomanufacturing. SPIE 2009, San Diego CA.

•	 “NIST Traceable AFM Program” SEMATECH Advanced Metrology Advisory Group (AMAG) 

meeting, Albany, September 2009.

•	 “NIST Reference Metrology Program” - Global Collaboration on Reference Metrology - SPIE 

Advance Lithography Conference 2009

•	 “NIST –SEMATECH CD-AFM RMS Project” Program Advisory Group (PAG) Meetings. 

February 2008

•	 “Carbon Nanotubes as AFM tips” 2nd Annual Tri-National Workshop on Standards for 

Nanotechnology February 2008

Phillips, Steven •	 Keynote presentation, 2009 Quality Measurement Conference, May 2009 Orlando, FL. 

•	 Invited talk, “Dimensional Measurement Traceabilty of 3D Imaging Data”, SPIE, January 2009, 

San Jose, CA.

•	 Invited talk, “Economics of Measurement Uncertainty and Tolerances”, July, 2009, Peoria IL. 

•	 Invited talk, “Laser Trackers and Standards”, North American Coordinate Metrology Conference, 

September 2009, Mexico.

•	 Invited Talk: “Laser Trackers: Testing and Standards”, Manufacturing & Measurement Conference, 

Clearwater, FL, 2008
138

Staff Invited Presentations

Postek, Michael •	 Measurement Science Addressing the EH&S Aspects of Engineered Nanomaterials “Tiny Threats” 

by the International Life Sciences Institute (ILSI). 2009. Tuscon, AZ. 

•	 Measurements, Instrumentation and Standards for Nanotechnology. Society of Manufacturing 

Engineers, 2008, Second Manufacturing Education Leadership Forum Long Island, NY.

•	 Nanotechnology: Important link between trees and airplanes. 2008 Forest Products Industry 

National Meeting St. Louis MO.

•	 NANOTEX 2008. The Potentials of Helium Ion Microscopy for Semiconductor Process Metrology. 

Dallas Texas.

•	 2008 Advanced Curriculum Working Group: Nanotechnologies. Society of Manufacturing Engineers Second Manufacturing Education Leadership Forum, Long Island, NY.

•	 2008 Cellulose Nanocrystals the Next Big Nano-thing? SPIE Instrumentation, Metrology and Standards for Nanomanufacturing. August 2008 San Diego, CA.

•	 2008 Helium Ion Microscopy: Revolutionary Measurement Technology? Zeiss Laboratory opening, Boston, MA

•	 2008 NSF/Purdue University Workshop on Predictive Modeling “Predictive Modeling of Materials 

at the Nanoscale” 

•	 2008 Nanotechnology Directions within the Dimensional and Mechanical Metrology Programs of 

the NIST Manufacturing Engineering Laboratory for the Tri-National Workshop held at NIST 

•	 2008 Key Elements for the Future of Nanomanufacturing: Instrumentation, Metrology, and Standards at a workshop hosted by the Center for Hierarchical Manufacturing, an NSF Nanoscale 

Science & Engineering Center

•	

Potzick, James •	 Invited presentation: “Limits of optical dimensional metrology at the nano-scale,” 

2nd Tri-National Workshop on Standards for Nanotechnology.

Silver, Richard •	 Invited Plenary Presentation, “Improving Optical Measurement Accuracy using Multi-Technique 

Nested Uncertainties”, SPIE Advanced Lithography, 2009.

•	 Invited Plenary Presentation, “STM Induced Surface Modification with Reactive Ion Etch Pattern 

Transfer”, EIPBN, Marco FL, 2009.

•	 Invited Paper, “Angle-resolved Optical Metrology using Multi-Technique Nested Uncertainties”, 

SPIE Germany, 2009.

•	 SEMATECH AMAG, two invited presentations on OCD limits and advanced optical overlay 

metrology, March 2009.

•	 SEMATECH DMAG, invited presentation on Advanced Optical Defect Metrology, March 2007, 

March 2009.
139

Staff Invited Presentations

Song, John •	 Invited presentation for NIST SRM 2460/2461 Standard Bullets and Casings Project, to be presented at the Scanning/NIST 2008 Conference in the session of “Databases for Bullet Identification”, scheduled on April 15, 2008 at NIST.

•	 Invited presentation: “Establish the Golden Images of NIST SRM 2460/2461 Standard Bullets and 

Casings for Ballistics Measurement Traceability”, The 2008 National Integrated Ballistics Information Network (NIBIN) Users Congress, January 8, 2008 Largo, FL. 

•	 Invited talk: “NIST microform calibration system for Rockwell hardness standardization,” at the 

4th International Symposium on Precision Mechanical Measurements (ISPMM), September 2008, 

Hefei, China.

•	 Invited talk: “Three steps towards the metrological traceability for ballistics measurements,” at the 

9th ISMTII, July, 2009, Sat Petersburg.

•	 Invited talk: “NIST SRM 2460/2461 standard bullets and casings project,” in the 4th International 

Forensic Weapons Study Conference, October 2009, Saratov, Russia. 
140

MMD Evidence of MEL Leadership (Since 2008)

Board Memberships

Staff Board Membership

Donmez, Alkan •	 Member, Industrial Advisory Board, MTConnect Institute

•	 Member, Industrial Advisory Board, Smart Machine Platform Initiative (SMPI)

•	 Member, Editorial Board of International Journal of Mechatronics and Manufacturing 

Systems (IJMMS)

Fick, Steve •	 Member, NIST Research Library Advisory Board; responsible for guiding the NIST 

library for decisions about content and new acquisitions

Harper, Kari •	 Member, NIST Assessment Review Board (ARB); responsible for conducting and 

approving quality system reviews for the measurement services of each NIST division

Ivester, Robert •	 Member, Board of Directors of the North American Manufacturing Research Institute 

of the Society of Mechanical Engineering (NAMRI/SME)

Nedzelnitsky, Victor •	 Member, NIST Institutional Review Board (IRB); appointed by the NIST Director

Rhorer, Richard •	 Member, American Society for Precision Engineering (ASPE) Board of Directors

•	 Chair, NIST Museum Committee; responsible for the display and preservation of NIST 

artifacts and instruments that have historical importance

Leadership

Staff Leadership

Bruins, Jeanne •	 Participant in the year-long Administrative Professionals Career Development Program 

sponsored by the Department of Commerce

Cooke, April •	 Member, ASTM Technical Committee F42 on Additive Manufacturing Technologies

Donmez, Alkan •	 Secretariat, ISO TC39/SC2 Standards Committee “Test Conditions for Machine Tools”

•	 Chair, ANSI/ASME U.S. Technical Advisory Group to ISO/TC39 – Machine Tools

•	 Member, ANSI/ASME B5 Standards Committee “Machine Tools – Components, Elements, Performance, and Equipment”

•	 Member, ANSI/ASME B5/TC52 Standards Committee “Machine Tool Performance”

•	 Member, ANSI/ASME B5/TC56 Standards Committee “Information Technology for 

Machine Tools”

•	 Member, Organizing Committee of the 3rd International Conference on Micromanufacturing [2008]

•	 Member, International Steering Committee of the Lamdamap 9th International Conference on Machine Metrology [2009]
141

Staff Leadership

Evans, Dave •	 Chair of U.S. Delegation for the ISO TC108 Standards Committee “Mechanical Vibration and Shock”

•	 Chair of U.S. Delegation for the ISO TC108/SC3 Standards Committee “Use and Calibration of Vibration and Shock Instrumentation”

•	 Vice-Chair, ANSI/ASA S2 Standards Committee “Mechanical Vibration and Shock”

•	 Chair, ANSI/ASA S2/WG2 Standards Committee “Terminology”

•	 Chair, ANSI/ASA S2/WG5 Standards Committee “Calibration and Use of Instruments”

Griesmann, Ulf •	 Member, Optics and Electro-Optics Standards Council (OEOSC), a forum of technical experts that provides guidance on behalf of the U.S. for national and international 

standards in the areas of optics and optical measurements

•	 Co-Chair of the Optical Society of America (OSA) Topical Meeting on Optical Fabrication and Testing, October 2008, Rochester, NY

•	 Program Committee member of the Optical Society of America (OSA) Topical Meeting 

on Optical Fabrication and Testing

Ivester, Rob •	 Chair of the 11th CIRP Conference on Modeling of Machining Operations, Gaithersburg, MD [2008]

•	 Completed the one-year NIST New Leaders Program training for leadership and management skills [2008]

•	 NIST Program Analyst, NIST Director’s Office [2008-2010]

Jabbour, Zeina •	 Invited Member and Member of Steering Committee, CIPM Consultative Committee 

on Mass and Related Quantities (CCM) working group on redefinition of the SI units

•	 Member of Steering Committee, CIPM Consultative Committee on Mass and Related 

Quantities (CCM) working group on uncertainty components in mass metrology

•	 Member, International Organizing Committee for the 2010 IMEKO Technical Committee 3 on “Measurement of Force, Mass, and Torque,” November, 2010, Thailand

Lee, Kang •	 Chair, IEEE Instrumentation and Measurement Society TC9 Sensor Technology 

Committee

•	 Chair, Sensor Standards Harmonization Working Group for the Department of Homeland Security

•	 Member, International Committee for Information Technology Standards (INCITS) Ad 

Hoc working group on Sensor Networks

•	 Technical Co-chair, International Symposium on Precision Clock Synchronization 

(ISPCS), September 22-26, 2008, University of Michigan

•	 General Co-chair, International Symposium on Precision Clock Synchronization 

(ISPCS), October 12-16, 2009, University of Brescia, Italy

•	 Session Chair, Performance of Precision Synchronization Systems, International Symposium on Precision Clock Synchronization (ISPCS), October 12-16, 2009, University 

of Brescia, Italy.

•	 Workshop Chair, Wireless Sensors for Shop Floor Monitoring, October 6, 2009, ISA 

Expo, Houston, TX
142

Staff Leadership

Lee, Vincent •	 Completed the year-long NIST “Building The Next Generation” leadership training 

program [2008]

Moylan, Shawn •	 Member, Organizing Committee for SME MicroManufacturing Conference [2008, 

2009, 2010]

•	 Member, Organizing Committee for 11th CIRP Conference on Modeling of Machining 

Operations [2008]

•	 Co-Editor, Proceedings of the 11th CIRP Conf on Modeling of Machining 

Operations [2009]

•	 Co-Chair, 2010 ASME Symposium on “Advances in Micro-Scale Manufacturing and 

Metrology Systems”

Nedzelnitsky, Victor •	 Technical advisor to the U.S. National Committee of the IEC for the IEC TC29 Standards Committee “Electroacoustics” 

•	 Chair, ANSI/ASA S1/WG1 Standards Committee “Standard Microphones and their 

Calibration”

Shaw, Gordon •	 Vice-chair, MEMS and Nanotechnology Technical Division for the Society for Experimental Mechanics Annual Meeting [2009 and 2010]

•	 Co-organizer and Session Chair on Nanotechnology at the 2009 Society for Experimental Mechanics (SEM) Annual Conference, Albuquerque, NM

Soons, Johannes •	 Chair, ANSI/ASME B5/TC56 Standards Committee “Information Technology for 

Machine Tools”

•	 Alternate Member, ANSI/ASME B5/TC52 Standards Committee “Machine Tool 

Performance”

•	 Member, ANSI/ASME B5 Standards Committee “Machine Tools – Components, Elements, Performance, and Equipment”

•	 Member, ANSI/ASME U.S. Technical Advisory Group to ISO/TC39 – Machine Tools

•	 Member, ASTM Technical Committee F42 on Additive Manufacturing Technologies

Wagner, Randy •	 Vice-Chair, SAE Emergency Vehicle Siren Task Force

Whitenton, Eric •	 Completed the year-long NIST “Building The Next Generation” leadership training 

program [2009]
143

Excellence

Staff Excellence Recognized

Chesnutwood, Kevin •	 Recipient, Best Paper and Overall Best Paper Awards at the 2009 National Conference 

on Standards Laboratories International (NCSL-I) Annual Symposium for the paper 

“Automating Data Acquisition on a Mechanical Equal Arm Balance Used in Large Mass 

Calibrations” 

•	 Participant in 2008 BIPM Metrology Summer Program

Chu, Jiyoung •	 Invited Speaker, “Measuring the Phase Transfer Function of a Phase-Shifting Interferometer,” SPIE Optics and Photonics Conference, San Diego, CA, August 2008

Cooke, April •	 Best Poster Runner-up in the Engineering Category during the annual NIST Sigma XI 

postdoctoral poster presentation, for the poster “High-Bandwidth Imaging of Serrated 

Chip Formation During Orthogonal Cutting of Ti-6AL-4V,” [2009]

•	 Profiled in the Winter 2009/Spring 2010 Minority College Issue of Diversity/Careers in 

Engineering and Information Technology, a magazine and web site focused on technical 

careers for groups traditionally underrepresented in technology

Donmez, Alkan •	 Guest Editor, International Journal of Mechatronics and Manufacturing Systems (IJMMS), 

Special Issue on “Smart Machining Systems” [Vol. 2, No.5/6, 2009]

•	 Invited Speaker, “New Standards on Machine Tool Performance Testing,” Machine 

Metrology for the 21st Century, Clemson University International Center for Automotive 

Research [2010]

•	 Invited Speaker, “Axis of Rotation Metrology Applied to Machine Tool Rotary Tables,” 

International Machine Tool Engineers Conference, Taichun, Taiwan [2008]

•	 Invited Speaker, “National and International Machine Tool Performance Standards,” 

ASPE Special Seminar at the International Manufacturing Technology Show [2008]

•	 Invited Speaker, “A Novel Cooling System to Reduce Thermally-Induced Errors of 

Machine Tools,” Special CIRP Seminar at the Swiss Federal Institute of Technology 

(ETH), January 22, 2008, Zurich, Switzerland

Griesmann, Ulf •	 Invited Speaker, seminar on “New Trends in Flatness Measurement Technology,” Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany, October 20, 2009

•	 Invited Speaker, “New Method for Deformation-Free Flatness Measurements of Thin 

Optics and EUV Photomask Blanks,” Max Planck Institute for the Physics of Light (MPL), 

Erlangen, Germany, October 22, 2009

•	 Invited visit to the Australian Centre for Precision Optics (ACPO), part of the Australian 

national science and research organization CSIRO, Australia, July 6-20, 2009. Visit cosponsored by CSIRO.

Ivester, Rob •	 Recipient, 2008 NIST Bronze Medal Award for Superior Federal Service for outstanding 

technical achievements that have dramatically advanced the state-of-the-art of measurement science for manufacturing processes

Jabbour, Zeina •	 Invited Speaker, “Redefinition of the Kilogram: Status and Impact on Mass Metrology,” 

Measurement Science Conference, March 13-14, 2008, Anaheim, CA

•	 Featured in an episode of the Modern Marvels television show on the topic of “Measurement,” History Channel, 2008
144

Staff Excellence Recognized

Lee, Kang •	 Recipient, two Certificates of Appreciation from the IEEE Standards Board for contributions to development of the IEEE 1451.0 and 1451.5 standards [2009]

•	 Keynote Speaker, “Smart Sensor Standards for Interoperable Sensor Networks,” 9th 

International Conference on Electronic Measurement & Instruments (ICEMI 2009), 

August 16-18, 2009, Beijing, China

•	 Invited expert on smart sensor networks and standards, Austrian Academy of Sciences, 

Research Unit for Integrated Sensor Systems

•	 Invited Speaker, “IEEE 1451.5 wireless sensors,” NASA Space Sensors and Measurement 

Techniques Workshop, August 5-6, 2008, Newport News, VA

•	 Invited Speaker, “Sensors Standards,” DoD Unattended Ground Sensor Standards Working Group, June 23, 2009, VA

•	 Invited Speaker “Global Sensors Standards Harmonization,” U.S. Measurement and 

Signature Intelligence (MASINT) workshop, August 12, 2009

•	 Invited Speaker, “Smart Sensors and Sensor Networks,” Institute of Instrument Science, 

Tsinghua University, August 19, 2009, Beijing, China

Pratt, Jon •	 Recipient, 2008 Nano 50 Award for “Contributions to the field of nanomechanical test 

instrumentation and as a pioneer in the development of standards and practices that 

provide common, traceable references that enable instrument manufacturers and users 

to compare across measurement platforms and among competing methodologies”

•	 Invited Speaker, “Mechanical Metrology at the Scale Where Top-Down Meets BottomUp Manufacturing,” BIPM Workshop on Metrology at the Nano-Scale, Sevres, France, 

February, 2010

Seifarth, Rick •	 Participant in 2008 BIPM Metrology Summer Program

Shaw, Gordon •	 Recipient, 2008 Nano 50 Award for “Contributions to the field of nanomechanical test 

instrumentation and as a pioneer in the development of standards and practices that 

provide common, traceable references that enable instrument manufacturers and users 

to compare across measurement platforms and among competing methodologies”

Soons, Johannes •	 Recipient, Certificate of Appreciation from the ASME Council on Codes and Standards 

for service as Chair of the B5 Technical Committee 56 “Information Technology for 

Machine Tools” [2009]

•	 Recipient, Certificate of Recognition from the ASME Council on Codes and Standards 

for “Dedicated Voluntary Service to ASME Codes and Standards” [2009]

Whitenton, Eric •	 Recipient, 2008 NIST Bronze Medal Award for Superior Federal Service for outstanding 

technical achievements that have dramatically advanced the state-of-the-art of measurement science for manufacturing processes

•	 Recipient, 2009 NAMRI/SME Outstanding Paper Award for the paper “High-Speed 

Microvideography Observations of the Periodic Catastrophic Shear Event in Cutting AISI 

1045 Steel,” co-authored with Jarred Heigel
145

ISD Staff Recognition 

Other evidence of technical excellence, not necessarily tied to above programs, but supporting Division Projects and Mission

Adam Jacoff •	 Chair, ASTM E54.08.01 Homeland Security Applications, Operational Equipment, Urban 

Search & Rescue Robots (2010)

•	 Executive Committee, RoboCup Rescue Robot League, 2006-2010

•	 Member, U. S. RoboCup Committee

•	 Chair, RoboCup Rescue Robot League, which has grown under his leadership to be one of 

the premier international competitions stimulating advancements in mobile robot autonomy 

and mobility

•	 Award for Excellence in Physical Sciences and Mathematics for Springer Handbook of 

Robotics, 2008

•	 Certificate of Appreciation from the Montgomery County Fire and Rescue Service for hosting several national capital region bomb squads in a three-day field training class in improvised explosive device disposal (IEDD) in preparation for their deployment to the National 

Mall during the 2009 Presidential inauguration. 

•	 Certificate of Recognition and Appreciation, “for continued support and assistance provided 

to the National Capital Region Bomb Squad Community for conducting full scale robotic 

testing and evaluation for selection and procurement.” 2009

•	 Special Act Award from the Department of the Army, for “ significant contributions in the 

initiation of a major new Collaborative Technology Alliance in Robotics.” 2010
146

Raj Madhavan •	 Program Chair, Performance Metrics for Intelligent Systems Workshop (2008-2010)

•	 Chair–Elect, IEEE Washington Section (2010)

•	 Industry Editor, IEEE Robotics and Automation Magazine, Industry Column – (2010)

•	 Associate Vice President and Standards Chair, Industrial Activities Board, IEEE Robotics and 

Automation Society (2010-2011)

•	 Member–At–Large, Industrial Activities Board, IEEE Robotics and Automation Society 

(2009-present)

•	 Service Award, IEEE Washington Section 2008 Volunteer of the Year (May 2009)

•	 Service Award, 2008 IEEE Washington/Northern Virginia Section Robotics and Automation 

Chapter Chair – Raj Madhavan (May 2009)

•	 Service Award, IEEE Washington Section 2008 Treasurer (May 2009)

•	 Service Award, 2007 IEEE Washington/Northern Virginia Section Robotics and Automation 

Chapter Chair (May 2008)

•	 Co-Editor, IEEE Robotics and Automation Magazine, Industry/Research News & Technology 

Watch (2008-present)

•	 IEEE Representative, Emerging Leaders Alliance Capstone Program (2009)

•	 Vice Chair & Membership Development Chair, IEEE Washington Section (2009)

•	 Founding Chair, IEEE Washington/Northern Virginia Section Sensor Council Joint Chapter 

(2008-2009)

•	 Founding Chair, IEEE Washington/Northern Virginia Section Robotics and Automation 

Society Joint Chapter (2007-2009)

•	 Treasurer, IEEE Washington Section (2008)

•	 Advisory Board Member, European Commission Integrating Project BRICS (Best Practice in 

Robotics) (2009-2013)

•	 Invited Independent Expert Reviewer, European Commission’s Cognitive Systems and 

Robotics Call under the Seventh Framework Programme (FP7

•	 Invited External Evaluator, RoSta (Robot Standards and Reference Architectures), a 26 month 

Coordination Action project funded under the European Commission’s Sixth Framework 

Programme (FP6) 

Craig Schlenoff, 

Michelle Steves 

(ITL), Ann Virts, 

Brian Weiss

•	 Department of Commerce Bronze Medal “For developing and administering a 

groundbreaking performance evaluation framework for characterizing complex 

intelligent systems.” (2008)

Craig Schlenoff, 

Brian Weiss

•	 Track Chairs, “Test Methods and Performance Evaluations for Intelligent Systems”, International Test and Evaluation Association (ITEA) Annual Conference (2009)

Brian Weiss •	 Best Paper and Best Presentation Awards ITEA annual Conference (2009)

Zeid Kootbally •	 Best Presentation Award, ITEA annual Conference (2009)

Hui-Min Huang •	 Chair, SAE AS4-D Committee on Unmanned Systems Performance Measures Committee 

•	 Task Group Chair, Terminology effort in ASTM E54.08.01 Response Robotics 

•	 Chair, Autonomy Levels for Unmanned Systems (ALFUS) Working Group 
147

Raj Madhavan, 

Elena Messina

•	 Co-Founders and Co-Chairs, IEEE-RAS Technical Committee, “Performance Evaluation and 

Benchmarking Robotic and Automation Systems” (TC-PEBRAS) (2009-present)

•	 Editors (with Eddie Tunstel of JHU Applied Physics Laboratory), Performance Evaluation and 

Benchmarking of Intelligent Systems, Springer Books, 2009.

Elena Messina •	 Chair, ASTM E54.08.01 Homeland Security Applications, Operational Equipment, Urban 

Search & Rescue Robots (2008-2009)

•	 Advisory Board Member, Texas A&M Texas Engineering Extension Service

•	 Member of Research Management Board for Army Research Laboratory’s Micro Autonomous Science and Technology Collaborative Technology Alliance 

•	 General Chair, Performance Metrics for Intelligent Systems 2008, 2009, 2010

•	 Invited Distinguished Lecture, Case Western Reserve University, 2009

•	 Invited Lecture on Homeland Security Technologies, University of South Florida, 2008

•	 Invited Speaker, Mid-Atlantic Technology Showcase, 2008

•	 Workshops Chair, American Nuclear Society Joint Topical Conference, 2008

•	 Organizer/Co-chair: ANS Robots for Emergency Response Workshop, part of Joint Topical 

Conference Emergency Preparedness and Robotics for Hazardous Environments 

(March 2008)

•	 Keynote Speaker, IEEE International Conference on Intelligent Robots and Systems Workshop on “Performance Evaluation and Benchmarking for Next Intelligent Robots and 

Systems” 2009

•	 Participant in NSF/CCC/CRA Robotics Roadmapping Workshop (Manufacturing and Automation Systems) 

•	 Special Act Award from the Department of the Army, for “ significant contributions in the 

initiation of a major new Collaborative Technology Alliance in Robotics.” 2010

Sandor Szabo, 

Joe Falco, Rick 

Norcross

•	 Department of Commerce Bronze Medal Award – For the development of performance test 

and measurement methods for automotive crash warning systems, 2009 

•	 NHTSA – Plaque – “In recognition of dedication and technical contributions to the successful execution of the Intelligent Vehicle-Based Safety Systems (IVBSS) Verification Tests” 2009
148
149

Publications
150



_______________________________________

List of Publications

For

FY2008 to FY2010

Publication Type - All Publication Type

_______________________________________

(October 1, 2007 to March 1, 2010)
151



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited







	




 D. E. Gilsinn, B. R. Borchardt, A. Tebbe, "Volume Estimation of Molded Artifacts by B-Splines" Proceedings of the SIAM

Conference on Mathematics for Industry: Challenges and Frontiers, San Francisco, CA, United States, 10/09/2009 to

10/10/2009, 0 pp., (09-Oct-2009) 

 R. Eastman, T. H. Hong, J. Shi, T. Hanning, B. Muralikrishnan, S. S. Young, T. Chang, "Performance Evaluation and Metrics

for Perception in Intelligent Manufacturing" Performance Evaluation and Benchmarking of Intelligent Systems, Chapter: -,

Springer, 101 Philip Drive, Norwell, MA, 02061, United States, pp. 269-310, (31-Dec-2009) 

	



 S. Smith, A. Tsiamis, M. McCallum, A. Hourd, J. Stevenson, A. Walton, R. G. Dixson, R. A. Allen, J. E. Potzick, M. W.

Cresswell, N. Orji, "Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks" IEEE

Transactions on Semiconductor Manufacturing, Vol. 22, pp. 72-79, (19-Feb-2009) 

M. Coll Bau, C. Hacker, L. H. Miller, D. R. Hines, E.C. Williams, C. A. Richter, "Ultrasmooth Gold as a Top Metal Electrode

for Molecular Electronic Devices" Electrochemical Society Transactions, Vol. 16, No. 25, pp. 139-146, (07-Apr-2009) 

J. J. Gorman, Y.S. Kim, A. E. Vladar, N. G. Dagalakis, "Design of an on-chip microscale nanoassembly system" International

Journal of Nanotechnology, Vol. 6, pp. 710-721, (10-Feb-2009) 

 J. A. Stone, J. Decker, P. Gill, A. Lewis, P. Juncar, D. Rovera, M. Villiseid, "Advice from the CCL on the use of unstabilized

lasers as standards of wavelength: the helium-neon laser at 633 nm" Metrologia, Vol. 46, pp. 11-18, (01-Jan-2009) 

M. T. Postek, A. E. Vladar, "Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology

" Scanning, Vol. 30, pp. 457-462, (04-Nov-2008) 

J. Li, Y.L. Shen, J. Jeong, F. Scire, J. A. Kramar, "A COMPACT, COMPOUND ACTUATOR FOR THE MOLECULAR

MEASURING MACHINE" American Society for Precision Engineering, Annual Meeting | 23rd | Proceedings of ASPE 23rd

Annual Meeting | American Society for Precision Engineering, American Society for Precision Engineering, Annual Meeting |

23rd | Proceedings of ASPE 23rd Annual Meeting | American Society for Precision Engineering, Portland, OR, United States,

10/19/2008 to 10/24/2008, 4 pp., (19-Oct-2008) 

 S. C. Feng, C. B. Joung, T. V. Vorburger, "Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force

Microscopy" International Journal of Nanotechnology, (15-Oct-2008) 

T. A. Germer, H. Patrick, R. M. Silver, B. Bunday, "Developing an Uncertainty Analysis for Optical Scatterometry"

Metrology, Inspection, and Process Control for Microlithography XXIII, San Jose, CA, United States, 02/22/2009 to

02/27/2009, (03-Aug-2009) 

Z. H. Levine, S. E. Grantham, D. S. Sawyer, A. P. Reeves, D. F. Yankelevitz, "A Low Cost Fiducial Reference for Computed

Tomography" Academic Radiology, Vol. 113, No. 6, pp. 335-340, (11-Nov-2008) 
152



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

 G. Stan, C. Ciobanu, T. Thayer, G. Wang, R. Creighton, P. P. Kavuri, L. A. Bendersky, R. F. Cook, "Elastic Modulus of

Faceted Aluminum Nitride Nanotubes Measured by Contact Resonance Atomic Force Microscopy" Nanotechnology, Vol. 20,

No. 3, 4 pp., (17-Dec-2008) 

 L. Pakstis, A. Zheng, T. V. Vorburger, J. Dunkers, T. P. Quinn, M. T. Cicerone, "Evaluation of Polydimethylsiloxane

Modification Methods for Cell Response" Journal of Biomedical Materials Research Part A, (20-Feb-2009) 

K. W. Lyons, M. T. Postek, "A Decade of Commitment from the NIST Manufacturing Engineering Laboratory to

Nanomanufacturing and Nanometrology" Proceedings of the SPIE Optics and Photonics NanoScience and Engineering

Conference 2009, San Diego, CA, United States, 08/02/2009 to 08/06/2009, (27-Aug-2009) 

C. W. Jones, J. A. Kramar, S. Davidson, R. Leach, J. R. Pratt, "Comparison of NIST SI Force Scale to NPL SI Mass Scale"

Proceedings from the American Society for Precision Engineering, 2008, American Society for Precision Engineering 23rd

Annual Meeting, Portland, OR, United States, 10/19/2008 to 10/24/2008, 4 pp., (19-Oct-2008) 

J. S. Villarrubia, Z. Ding, "Sensitivity of SEM width measurements to model assumptions" Proceedings of SPIE Advanced

Lithography, Vol 7272, San Jose, CA, United States, 02/23/2009 to 02/27/2009, (31-Mar-2009) 

 F. Tian, X. Qian, J. S. Villarrubia, "Blind estimation of general tip shape in AFM imaging" Ultramicroscopy, Vol. 109, pp. 44-

53, (01-Dec-2008) 

D. E. Gilsinn, B. R. Borchardt, A. Tebbe, "Estimating Volumes of Simulated Lung Cancer Nodules" NIST Interagency/Internal

Report (NISTIR) 7571, (15-Jul-2009) 





J. A. Stone, "Using uncalibrated lasers as wavelength standards" Proceedings, Simposio de Metrología 2008, Queretaro, -1,

Mexico, 10/22/2008 to 10/24/2008, 1 pp., (01-Oct-2008) 

 M. W. Cresswell, R. A. Allen, W. F. Guthrie, C. E. Murabito, R. G. Dixson, A. Hunt, "Comparison of SEM and HRTEM CD

Measurements Extracted from Test-Structures Having Feature Linewidths from 40 nm to 240 nm" IEEE Transactions on

Instrumentation and Measurement, Vol. 57, No. 1, pp. 100-109, (01-Jan-2008) 

 J.F. Song, P. Rubert, X. A. Zheng, T. V. Vorburger, "Topography Measurements for Determining the Decay Factors in Surface

Replication" Measurement Science & Technology, Vol. 19, No. 8, pp. 1-5, (04-Jul-2008) 

 B. Muralikrishnan, J. A. Stone, J. R. Stoup, "Area Measurement of Knife Edge and Cylindrical Apertures using Ultra Low

Force Contact Fiber Probe on a CMM" Metrologia, Vol. 45, No. 3, pp. 281-289, (01-Jan-2008) 

 D.I. Kim, J. Grobelny, P. Namboodiri, R. F. Cook, "Origin of Adhesion in Humid Air" Langmuir, Vol. 24, pp. 1873-1877, (18-

Apr-2008) 

 K.H. Chung, S. Scholz, G. A. Shaw, J. A. Kramar, J. R. Pratt, "SI traceable calibration of an instrumented indentation sensor

spring constant using electrostatic force" Review of Scientific Instruments, Vol. 79, No. 9, pp. 095105-095105-8, (22-Sep-
153



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

2008) 

T. V. Vorburger, R. G. Dixson, J. N. Fu, N. Orji, S. C. Feng, M. W. Cresswell, R. A. Allen, W. F. Guthrie, W. Chu, "Nano- and

Atomic-Scale Length Metrology" Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007)

(Allied Publishers Pvt. Ltd, Chennai, 2007), 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007),

Trivandrum, India, 12/14/2007 to 12/14/2007, pp. 13-18, (14-Dec-2007) 

K. W. Lyons, M. T. Postek, "Metrology at the Nanoscale: What are the Grand Challenges?" SPIE NanoScience and

Engineering, San Diego, CA, United States, 08/10/2008 to 08/14/2008, 12 pp., (06-Aug-2008) 

M. T. Postek, A. E. Vladar, J. A. Dagata, N. Farkas, B. Ming, R. Sabo, T. H. Wegner, "Cellulose Nanocrystals the Next Big

Nano-thing?" Proceedings of SPIE, Instrumentation, Metrology, and Standards for Nanomanufacturing, San Diego, CA, United

States, 08/10/2008 to 08/14/2008, Vol. 7042, (06-Aug-2008) 

 R. Attota, R. M. Silver, R. G. Dixson, "Line Width Measurement Technique Using Through-Focus Optical Images" Applied

Optics, Vol. 47, pp. 495-503, (01-Jan-2008) 

N. G. Dagalakis, Y.S. Kim, D. S. Sawyer, C. M. Shakarji, "Development of Tools for Measuring the Performance of Computer

Assisted Orthopaedic Hip Surgery Systems" Proceedings of the Performance Metrics for Intelligent Systems | 2007 | PerMIS |,

Performance Metrics for Intelligent Systems Workshop (PerMIS) 2007, Gaithersburg, MD, 08/29/2007 to 08/30/2007, (28-Dec2007) 

N. G. Dagalakis, J. B. Stiehl, Y.S. Kim, D. S. Sawyer, C. M. Shakarji, "NIST Medical Phantom Device to Assist With the

Calibration and Performance Testing of CAOS Systems" NIST Medical Phantom Device to Assist With the Calibration and

Performance Testing of CAOS Systems, , (09-Nov-2007) 

 J. Clarke, M. Schmidt, N. Orji, "Photoresist Cross-sectioning with Negligible Damage using a Dual-beam

FIB-SEM: A High Throughput Method for Profile Imaging" Journal of Vacuum Science and Technology B, Vol. 25, No. 6, pp.

2526-2530, (01-Nov-2007) 

 H. Patrick, R. Attota, B. M. Barnes, T. A. Germer, M. T. Stocker, R. M. Silver, M. R. Bishop, "Optical Critical Dimension

Measurement of Silicon Grating Targets Using Back Focal Plane Scatterfield Microscopy" Journal of Microlithography

Microfabrication and Microsystems, Vol. 7, No. 1, pp. 013012-1-013012-11, (02-Jan-2008) 

D.I. Kim, P. Namboodiri, F. DelRio, R. F. Cook, "Mechanical and electrical coupling at metal-insulator-metal nano-scale

contacts" Applied Physics Letters, Vol. 93, (22-May-2008) 

C. Wang, R. L. Jones, K.W. Choi, C. Soles, E. K. Lin, W.L. Wu, J. S. Clarke, J. S. Villarrubia, B. Bunday, "Line Width

Roughness and Cross Sectional Measurements of Sub-50 nm Structures with CD-SAXS and CD-SEM" SPIE Conference

Proceedings, Vol. 6922, 6 pp., (24-Mar-2008) 

 T. D. Doiron, "Gauge Blocks - A Zombie Technology" Journal of Research (NIST JRES), Vol. 113, No. 3, pp. 175-184, (01-

May-2008) 
154



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

S. C. Feng, C. B. Joung, T. V. Vorburger, "A Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic

Force Microscopy" Scanning 2008, Gaithersburg, MD, 04/15/2008 to 04/17/2008, 2 pp., (17-Mar-2008) 

M. T. Postek, A. E. Vladar, "The Potentials of Helium Ion Microscopy for Semiconductor Process Metrology" Proceedings of

SPIE, Proceedings of SPIE--the International Society for Optical Engineering, San Jose, CA, United States, 02/24/2008 to

02/28/2008, Vol. 6922, (06-Feb-2008) 

 R. N. Kacker, A. Forbes, R. Kessel, K. D. Sommer, "Bayesian Posterior Predictive p-value of Statistical Consistency in

Interlaboratory Evaluations " Metrologia, Vol. 45, pp. 512-523, (17-Sep-2008) 

 R. N. Kacker, A. Forbes, R. Kessel, K. D. Sommer, "Classical and Bayesian Interpretation of the Birge Test of Consistency and

Its Generalized Version in Interlaboratory Evaluations" Metrologia, Vol. 45, No. 3, pp. 257-264, (10-Apr-2008) 

S. Smith, M. McCallum, A. Hourd, J. T. Stevenson, A. J. Walton, R. G. Dixson, R. A. Allen, J. E. Potzick, M. W. Cresswell, N.

Orji, "Comparison of Measurement Techniques for Advanced Photomask Metrology" Proceedings of the 2008 IEEE

Conference on Microelectronics Test Structures, 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, -1,

United Kingdom, 03/24/2008 to 03/27/2008, pp. 35-39, (24-Mar-2008) 
155



_______________________________________

List of Publications

For

FY2008 to FY2010

Publication Type - All Publication Type

_______________________________________

(October 1, 2007 to March 1, 2010)
156



NIST 114 Filed

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ERB Approved

Refereed

Invited







	




 D. R. Defibaugh, P. J. Abbott, J. A. Fedchak, "Interlaboratory comparison of Helium Low Gas Flow Measurements in the range

10-13 to 10-11 mol/s (10-9 to 10-7 cm3/s)" NCSL International Measure, Vol. 5, pp. 58-68, (01-Mar-2010) 

 Z. J. Jabbour, "Getting Closer to Redefining the Kilogram" Weighing and Measurement + Magazine, Dave E. Mathieu WAM

Pumblishing Company, PO Box 2247, Hendersonville, TN, 37077, United States, pp. 24-26, (30-Oct-2009) 

J. C. Heigel, E. P. Whitenton, "The Effects of Integration Time and Size-of-Source on the Temperature Measurement of

Segmented Chip Formation Using Infrared Thermography" Proceedings of the ASME 2009 International Manufacturing

Science and Engineering Conference, ASME International Manufacturing Science and Engineering Conference, West

Lafayette, IN, United States, 10/04/2009 to 10/07/2009, 10 pp., (07-Oct-2009) 

 K.H. Chung, J. R. Pratt, M. Reitsma, "Lateral Force Calibration: Accurate Procedures for Colloidal Probe Friction

Measurements in Atomic Force Microscopy" Langmuir, Vol. 26, No. 2, 3 pp., (19-Jan-2010) 

Y.(. Song, K. B. Lee, "An Interoperability Test System for IEEE 1451.5-802.11 Standard

" SAS 2010 - IEEE Sensors and Applications Symposium

, Limerick, -1, Ireland, 02/23/2010 to 02/25/2010, pp. 183-188, (25-Feb-2010) 

	



 T. J. Burns, S. P. Mates, R. Rhorer, E. P. Whitenton, D. Basak, "Dynamic Properties for Modeling and Simulation of

Machining: An Update of Results from the NIST Pulse-Heated Kolsky Bar" Proceedings of the 12th CIRP Conference on

Modelling of Machining Operations, 12th CIRP Conference on Modelling of Machining Operations, San Sebastian, -1, Spain,

05/07/2009 to 05/08/2009, pp. 255-262, (07-May-2009) 

Y.(. Song, K. B. Lee, "Integration of IEEE 1451 Smart Transducers and OGC-SWE Using STWS" SAS 2009 - IEEE Sensors

Applications Symposium, New Orleans, LA, United States, 02/17/2009 to 02/19/2009, pp. 298-303, (17-Feb-2009) 

Y.(. Song, K. B. Lee, "Service-oriented Sensor Data Interoperability for IEEE 1451 Smart Transducers" the Proceedings of

2009 IEEE International Instrumentation and Measurement Technology Conference , Singapore, -1, Singapore, 05/05/2009 to

05/07/2009, pp. 1043-1048, (05-May-2009) 

K. B. Lee, Y.(. Song, "Sensor Alert Web Service for IEEE 1451-Based Sensor Networks" Proceedings of 2009 IEEE

International Instrumentation and Measurement Technology Conference, Singapore, -1, Singapore, 05/05/2009 to 05/07/2009,

pp. 1049-1054, (05-May-2009) 

 S. P. Moylan, B. N. Damazo, M. A. Donmez, "Implementation of a metrology frame to improve positioning of micro/mesoscale machine tools" 2009 Transactions of the North American Manufacturing Research Conference, North American

Manufacturing Research Conference (NAMRC), Greenville, SC, United States, 05/15/2009 to 05/22/2009, Vol. 37, pp. 573-

580, (15-Jul-2009) 

G. A. Shaw, D. J. Ross, S. E. Fick, W. N. Vreeland, "Contactless Differential Conductivity Detection" Proceedings of
157



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

microTAS 2008, microTAS 2008, San Diego, CA, United States, 10/12/2008 to 10/16/2008, 3 pp., (12-Oct-2008) 

J. R. Pratt, D. T. Smith, L. Howard, "Accurate Picometers for DC and Low-Frequency Displacement Measurement" ASPE

2009 Spring Topical Meeting Mechanical Metrology and Measurement Uncertainty, ASPE 2009 Spring Topical Meeting

Mechanical Metrology and Measurement Uncertainty, Albuquerque, NM, United States, 04/06/2009 to 04/07/2009, 4 pp., (06-

Apr-2009) 

K. B. Lee, S. E. Fick, R. Gao, R. Yan, "IMECE2008-66937

Local Geometric Projection-Based Noise Reduction for Vibration Signal Analysis in Rolling Bearings" Proceedings of

IMECE2008, 2008 ASME International Mechanical Engineering Congress and Exposition, Boston, MA, United States,

10/31/2008 to 11/06/2008, pp. 1-7, (31-Oct-2008) 

C. W. Jones, J. A. Kramar, S. Davidson, R. Leach, J. R. Pratt, "Comparison of NIST SI Force Scale to NPL SI Mass Scale"

Proceedings from the American Society for Precision Engineering, 2008, American Society for Precision Engineering 23rd

Annual Meeting, Portland, OR, United States, 10/19/2008 to 10/24/2008, 4 pp., (19-Oct-2008) 

 D. J. Evans, A. Hornikova, S. D. Leigh, A. L. Rukhin, W. E. Strawderman, "Report on Acceleration Comparison SIM.AUV.VK1 - Draft B" Metrologia, Vol. 46, (20-Mar-2009) 

 S. P. Moylan, D. Hong, B. N. Damazo, J. A. Soons, M. A. Donmez, "Development of a metrology frame to improve the

positioning accuracy of micro/meso-scale machine tools" International Journal of Mechatronics and Manufacturing Systems,

Vol. 2, No. 5/6, pp. 600-619, (03-Aug-2009) 

R. P. Wagner, V. Nedzelnitsky, "Determination of Wave Motion Correction Values Required for Comparison Calibrations of a

New Working Standard Microphone." NIST Interagency/Internal Report (NISTIR) 7526, pp. 1-13, (11-Dec-2008) 

J. R. Pratt, L. M. Kumanchik, T. L. Schmitz, "A Platform for Observing the Behavior of AFM Cantilevers During Quasi-Static

Loading" Proceedings ASPE 2008 Annual Meeting, ASPE 23rd Annual Meeting & 12th ICPE, Portland, OR, United States,

10/19/2008 to 10/24/2008, 4 pp., (19-Oct-2008) 

 K. B. Lee, R. X. Gao, R. Yan , L. Zhang, "A Module-Based Software System for Spindle Condition Monitoring" International

Journal of Mechatronics and Manufacturing Systems, Vol. 2, No. 5/6, pp. 532-551, (15-Apr-2009) 

A. L. Cooke, M. A. Davies, "High-Bandwidth Thermal Microscopy of the Tool-Chip Interface during Orthogonal Machining of

AISI 4140 Steel" Proceedings of the 12th CIRP Conference on Modelling of Machining Operations, 12th CIRP Conference on

Modelling of Machining Operations, San Sebastian, -1, Spain, 05/07/2009 to 05/08/2009, pp. 389-394, (07-May-2009) 

E. P. Whitenton, "Characterization of Uncertainties When Measuring Metal Cutting Temperatures Using Infrared Radiation

Thermography" SPIE Defense, Security, and Sensing 2009 Conference - Thermosense XXXI, Orlando, FL, United States,

04/13/2009 to 04/17/2009, Vol. 7299, pp. 72990G-1-72990G-12, (01-Jun-2009) 

 J. R. Pratt, "SI Traceability: Current status and future trends for forces below 10 micronewtons" Measurement, pp. 1-14, (24-

Sep-2009) 
158



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

 K.H. Chung, G. A. Shaw, J. R. Pratt, "Accurate Picoscale Forces for Insitu Calibration of AFM" XIX IMEKO World Congress:

Fundamental and Applied Metrology, IMEKO XIX World Congress Fundamental, Lisbon, -1, Portugal, 09/06/2009 to

09/11/2009, 10 pp., (03-Sep-2009) 

Y.(. Song, K. B. Lee, "A Standards-based Global Ocean Monitoring System" Proceedings for 2009 International Conference on

Electronic Measurement & Instruments (ICEMI)

, Beijing, -1, China, 08/16/2009 to 08/18/2009, pp. 1-445-1-449, (16-Aug-2009) 

K. L. Chesnutwood, "Automating Data Acquisition on a Mechanical Equal Arm Balance Used in Large Mass Calibrations"

Proceedings of the National Conference of Standards Laboratories International (NCSLI), NCLSI Workshop and Symposium,

San Antonio, TX, United States, 07/26/2009 to 07/30/2009, (27-Jul-2009) 

S. P. Moylan, G. W. Vogl, "Uncertainty Analysis of a Simple Fringe Projection System" Proceedings of the American Society

for Precision Engineering 2009 Summer Meeting, Peoria, IL, United States, 07/07/2009 to 07/08/2009, Vol. 46, pp. 32-35, (01-

Jul-2009) 

G. A. Shaw, K.H. Chung, D. T. Smith, J. R. Pratt, "Methods for transferring the SI unit of force from millinewtons to

piconewtons" Proceedings of the Society for Experimental Mechanics Annual Meeting, 2009, Society for Experimental

Mechanics Annual Meeting, Albuquerque, NM, United States, 06/01/2009 to 06/05/2009, 5 pp., (01-Jun-2009) 

K. B. Lee, Y.(. Song, T. O'Reilly, K. Headley, D. Edgington, C. Rueda, J. Zedlitz , J. Del Rio, E. Delory, S. Fairgrieve, L.

Bermudez , "Instrument Interface Standards for Interoperable Ocean Sensor Networks" Proceedings for IEEE OCEANS 2009

Conference, Bremen, -1, Germany, 05/11/2009 to 05/14/2009, pp. 1-9, (11-May-2009) 

 M. A. Donmez, J. A. Soons, "Impact of automation on precision" Handbook of Automation, Chapter: Chapter 1 - Introduction,

Springer, Tiergartenstrasse 17, Heidelberg, 69121, Germany, pp. 117-126, (03-Aug-2009) 

 G. A. Shaw, J. J. Maurer, S. E. Fick, T. P. Moffat, J. J. Mallett, J. L. Hudson, "Electrochemical Micromachining of Hastelloy B2 with Ultrashort Voltage Pulses" Electrochimica Acta, Vol. 55, No. 3, pp. 952-958, (08-Sep-2009) 

 K.H. Chung, G. A. Shaw, J. R. Pratt, "Accurate Noncontact Calibration of Colloidal Probe Sensitivities in Atomic Force

Microscopy" Review of Scientific Instruments, Vol. 80, No. 6, pp. 065107-1-065107-13, (15-Jun-2009) 

 G. Gao, J. P. Lehan, W. W. Zhang, U. Griesmann, J. A. Soons, "Computer-Generated Hologram Cavity Interferometry Test for

Large X-Ray Mandrels: Design" Optical Engineering, Vol. 46, No. 6, pp. 063602-1-063602-11, (01-Jun-2009) 

 Z. J. Jabbour, P. J. Abbott, E. R. Williams, R. Liu, V. J. Lee, H.K. Liu, "Linking Air and Vacuum Mass Measurement by

Magnetic Levitation" Metrologia, Vol. 46, pp. 339-344, (12-May-2009) 

 P. J. Abbott, Z. J. Jabbour, R. Liu, E. R. Williams, J. Chalfoun, "A magnetic levitation technique for the simultaneous

comparison of mass artifacts in air and vacuum." IEEE Transactions on Instrumentation and Measurement, Vol. 58, No. 4, pp.

878-883, (01-Apr-2009) 
159



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

 Q. Wang, G. Gao, U. Griesmann, "Radius Measurement of Spherical Surfaces With Large Radii-of-Curvature Using DualFocus Zone Plates" Technical Digest of the 2008 Optical Society of America Optical Fabrication and Testing Meeting, Optical

Fabrication and Testing 2008, Rochester, NY, United States, 10/20/2008 to 10/23/2008, 3 pp., (20-Oct-2008) 

M. L. McGlauflin, S. P. Moylan, "Error Motions of a Non-orthogonal Rotary Axis" Proceedings ASPE 2008 Annual Meeting,

Portland, OR, United States, 10/19/2008 to 10/24/2008, 4 pp., (19-Oct-2008) 





 S. E. Fick, "Long-term Stability of the NIST Standard Ultrasonic Source" Journal of Research of the National Institute of

Standards and Technology, Vol. 113, No. 5, pp. 281-286, (01-Oct-2008) 

 Y.H. Tang, T. W. Bartel, J. E. Sims, "Ratio Calibration of a Digital Voltmeter for Force Measurement Using the Programmable

Josephson Voltage Standard" Measure: The Journal of Measurement Science 32813, Vol. 3, No. 2, pp. 70-75, (01-Jun-2008) 

 J. C. Heigel, R. W. Ivester, E. P. Whitenton, "Cutting Temperature Measurements of Segmented Chips using Dual-Spectrum

High-Speed Microvideography" Transactional Analysis Journal 823005, Vol. 36, pp. 73-80, (20-May-2008) 

V. J. Lee, Z. J. Jabbour, "Constant Pressure and Vacuum Transporter for 1 kg Mass Standards" NIST Interagency/Internal

Report (NISTIR), No. NISTIR 7515, pp. 1-8, (08-Sep-2008) 

Z. J. Jabbour, P. J. Abbott, E. R. Williams, R. Liu, V. J. Lee, "Magnetic Levitation System for the Dissemination of a NonArtifact Based Kilogram" IMEKO International Conference, IMEKO International Conference, Merida, Mexico, 11/27/2007 to

12/01/2007, 11 pp., (27-Nov-2007) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Oscillator for SI-Traceable Measurements in Atomic Force

Microscopy" Mechanics Conference to Celebrate the 100th Anniversary of the Department of Engineering Science and

Mechanics, Mechanics Conference to Celebrate the 100th Anniversary of the Department of Engineering Science and

Mechanics, Blacksburg, VA, 05/29/2008 to 05/30/2008, 1 pp., (29-May-2008) 

K. B. Lee, J. T. Cain, "Integrating Sensors and Actuators into RFID Tags" RFID Technology and Applications, Cambridge

Press, Boston, MA, , (01-Jan-2008) 

P. M. McGuiggan, J. S. Wallace, D. T. Smith, I. Sridhar, Z. W. Zheng, K. L. Johnson, "Contact Mechanics of Layered Elastic

Materials: Experiment and Theory" Journal of Physics D-Applied Physics, Vol. 40, No. 19, pp. 5984-5994, (07-Oct-2007) 

 G. Gao, J. Lehan, U. Griesmann, "Dual-CGH Interferometry Test for X-Ray Mirror Mandrels" Optical Measurement Systems

for Industrial Inspection, SPIE Europe Optical Metrology, Muenchen, -1, Germany, 06/15/2009 to 06/18/2009, Vol. 7389, pp.

73891B-1-73891B-5, (15-Jun-2008) 

 E. P. Whitenton, J. C. Heigel, R. W. Ivester, "Measurement and Characterization of Dynamics in Machining Chip

Segmentation" 11th CIRP International Workshop on Modeling of Machining Operations, Gaithersburg, MD, United States,

09/16/2008 to 09/17/2008, pp. 237-246, (16-Sep-2008) 
160



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

J. Chu, Q. Wang, J. P. Lehan, U. Griesmann, G. Gao, "Measuring the Phase Transfer Function of a Phase-Shifting

Interferometer" Proceedings of SPIE Volume 7064: Interferometry XIV: Applications, SPIE Optics and Photonics 2008, San

Diego, CA, United States, 08/10/2008 to 08/14/2008, Vol. 7064, pp. 70640C-1-70640C-8, (13-Aug-2008) 

J. C. Heigel, R. W. Ivester, E. P. Whitenton, "Implementation of Dynamic Material Property Data in Finite-Element Modeling

Simulations" Proceedings of the 11th CIRP Conference on Modeling of Machining Operations, 11th CIRP Conference on

Modeling of Machining Operations, Gaithersburg, MD, United States, 09/16/2008 to 09/18/2008, pp. 113-120, (16-Sep-2008) 

 Y.(. Song, K. B. Lee, "Sensor Network based on IEEE 1451.0 and IEEE p1451.2-RS232" IIMTC 2008-IEEE International

Instrumentation and Measurement Technology Conference

, Victoria, Vancouver Island, Canada, 05/12/2008 to 05/15/2008, pp. 1728-1733, (12-May-2008) 

Y.(. Song, K. B. Lee, "An Application Framework for IEEE 1588 Standard" Proceedings of 2008 International IEEE

Symposium on Precision Clock Synchronization (ISPCS) , Ann Arbor, MI, United States, 09/22/2008 to 09/26/2008, pp. 23-28,

(29-Sep-2008) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Microdevice for SI-Traceable Forces in Atomic Force Microscopy"

SEM XI International Congress & Exposition on Experimental and Applied Mechanics, Orlando, FL, 06/02/2008 to

06/05/2008, 9 pp., (02-Jun-2008) 

J. C. Heigel, S. P. Moylan, R. W. Ivester, "Proceedings of the 11th CIRP Conference on Modeling of Machining Operations"

Proceedings of the 11th CIRP Conference on Modeling of Machining Operations, 11th CIRP Conference on Modeling of

Machining Operations, Gaithersburg, MD, United States, 09/16/2008 to 09/18/2008, 11 pp., (16-Sep-2008) 

 Y.(. Song, K. B. Lee, "STWS: A Unified Web Service for IEEE 1451 Smart Transducers" IEEE Transactions on

Instrumentation and Measurement, Vol. 57, No. 8, pp. 1749-1756, (01-Aug-2008) 

 V. Nedzelnitsky, R. P. Wagner, "Non-contact Methods for Measuring Front Cavity Depths of Laboratory Standard

Microphones Using a Depth-Measuring Microscope" Journal of Research of the National Institute of Standards and Technology

823015, Vol. 113, No. 2, pp. 97-119, (03-Mar-2008) 

 K.H. Chung, S. Scholz, G. A. Shaw, J. A. Kramar, J. R. Pratt, "SI traceable calibration of an instrumented indentation sensor

spring constant using electrostatic force" Review of Scientific Instruments, Vol. 79, No. 9, pp. 095105-095105-8, (22-Sep2008) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Oscillator for SI-Traceable Measurements in Atomic Force

Microscopy" 12th Conference on Nonlinear Vibrations, Dynamics, and Multibody Systems, Blacksburg, VA, 06/01/2008 to

06/05/2008, 2 pp., (01-Jun-2008) 

G. A. Shaw, "Reducing Thermal Noise in Molecular Force Spectroscopy" Proceedings of the Society for Experimental

Mechanics Annual Meeting

Orlando, FL, 2008, Orlando, FL, 06/02/2008 to 06/05/2008, 6 pp., (02-Jun-2008) 
161



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

 G. W. Vogl, J. R. Pratt, "Development of a Self-Excited Oscillator for SI-Traceable Measurements in Atomic Force

Microscopy" ASME 2008 International Design Engineering Technical Conferences & Computers and Information in

Engineering Conference (IDETC/CIE 2008), New York City, NY, United States, 08/03/2008 to 08/06/2008, pp. 1-10, (03-Aug2008) 

U. Griesmann, Q. Wang, N. Laurenchet, J. A. Soons, "Stationary and non-stationary deformations in three-flat tests"

Proceedings of the International Commission for Optics 21st meeting, July 7-10, 2008., ICO 21 2008 Congress, Sydney,

Australia, 07/07/2008 to 07/10/2008, pp. 258-258, (07-Jul-2008) 

 Y.H. Tang, T. W. Bartel, J. E. Sims, "Ratio Calibration of a Digital Voltmeter for Force Measurement Using the Programmable

Josephson Voltage Standard" Measure, Vol. 3, No. 2, pp. 70-75, (02-Jun-2008) 

 K. B. Lee, "Smart and Wireless Sensor Standards for Distributed Measurements" IEEE Transactions on Instrumentation and

Measurement, pp. 1-2, (07-Apr-2008) 

R. Yan, R. Gao, Z. Li, K. B. Lee, "Modal Parameter Identification from Output-only Measurement Data: Application to

Operating Spindle Condition Monitoring" Proceedings of the 8th International Conference on Frontiers of Design and

Manufacturing

, ICFDM 2008, Tianjin, China, 09/23/2008 to 09/26/2008, (23-Sep-2008) 

Y.(. Song, K. B. Lee, "Understanding IEEE 1451 - Networked Smart Transducer Interface Standard" IEEE Instrumentation and

Measurement Magazine 823045, pp. 1-17, (01-Apr-2008) 

 K.J. Lee, M. A. Donmez, "Repeatability Analysis on the Tool Point Dynamics for Investigations on Uncertainty in Milling

Stability" 2007 ASME International Mechanical Engineering Congress & Exposition (IMECE2007), 2007 ASME International

Mechanical Engineering Congress & Exposition (IMECE2007), Seattle, WA, 11/11/2007 to 11/15/2007 823028, (11-Nov2007) 

 E. P. Whitenton, R. W. Ivester, J. C. Heigel, "A Novel Peak Detection Algorithm for Use in the Study of Machining Chip

Segmentation" ISCA Proceedings of the 20th International Conference on Computers and Their Applications in Industry and

Engineering (CAINE-2007), November 7-9, 2007, San Francisco, CA, ISCA 20th International Conference on Computers and

Their Applications in Industry and Engineering, San Francisco, CA, 11/07/2007 to 11/09/2007 823018, (07-Nov-2007) 

 R. Gao, R. Yan, L. Zhang, K. B. Lee, "Condition Monitoring of Operating Spindle Based on Stochastic Subspace

Identification" 2007 ASME International Mechanical Engineering Congress and Exposition, 2007 ASME International

Mechanical Engineering Congress and Exposition, Seattle, WA, 11/11/2007 to 11/15/2007, pp. 1-7, (11-Nov-2007) 

 T. W. Bartel, "Statistical Analysis of 4 MN Force Range Key Comparison" Proceedings of the IMEKO 20th TC3, 3rd TC16,

and 1st TC22 International Conference, IMEKO 20th TC3, 3rd TC16 & 1st TC22 International Conference Force, Mass,

Torque, Density, Pressure, Vacuum and Vibrations, Merida, Mexico, 11/27/2007 to 12/01/2007 823017, (27-Nov-2007) 

Y.(. Song, K. B. Lee, "An Implementation of Smart Transducer Web Services for IEEE 1451-based Sensor Systems" SAS 2007
162



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

- IEEE Sensors and Applications Symposium, SAS 2007 - IEEE Sensors and Applications Symposium, San Diego, CA,

02/06/2007 to 02/08/2007, pp. 1-6, (06-Feb-2008) 
163

Intelligent Systems Division

_______________________________________

List of Publications

For

FY2008 to FY2010

Publication Type - All Publication Type

_______________________________________

(October 1, 2007 to March 1, 2010)
164

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 2

FY2010 Publications:

(I) R. Eastman, T. H. Hong, J. Shi, T. Hanning, B. Muralikrishnan, S. S. Young, T. Chang, "Performance Evaluation and Metrics

for Perception in Intelligent Manufacturing" Performance Evaluation and Benchmarking of Intelligent Systems, Chapter: -,

Springer, 101 Philip Drive, Norwell, MA, 02061, United States, pp. 269-310, (31-Dec-2009) 

T. Kramer, F. M. Proctor, "Feature-based Process Planning Based on STEP" Advanced Design and Manufacturing Based on

STEP, Springer, Ashbourne House, The Guildway , Old Portsmouth Road , Guildford, Surrey , GU3 1LP, United Kingdom,

(31-Dec-2009) 

J. A. Horst, "Interoperability and the DMIS experience" Quality Magazine, Maggie McFadden, Managing Editor, 050 IL Route

83, Suite 200, Bensenville, IL, 60106, United States, 5 pp., (30-Oct-2009) 

(R) T. Chang, T. H. Hong, M. Shah, R. D. Eastman, "Mathematical Metrology for Evaluating a 6DOF Visual Servoing System"

Proceedings of the Performance Metrics for Intelligent Systems (PerMIS) 2009, Gaithersburg, MD, United States, 09/21/2009

to 09/23/2009, 6 pp., (08-Oct-2009) 

J. L. Michaloski, B.E. Lee, F. M. Proctor, S. Venkatesh, S. Ly, "Quantifying the Performance of MT-Connect in a Distributed

Manufacturing Environment

" Proceedings of the 2009 ASME International Design Engineering Technical Conferences (DETC), San Diego, CA, United

States, 08/30/2009 to 09/02/2009, 7 pp., (08-Oct-2009) 

(R) C. I. Schlenoff, "Ontology Formalisms: What is Appropriate for Different Applications?" Proceedings of the Performance

Metrics for Intelligent Systems (PerMIS) 2009, Gaithersburg, MD, United States, 09/21/2009 to 09/23/2009, 8 pp., (06-Oct2009) 

(I) C. J. Scrapper Jr, R. Madhavan, A. S. Jacoff, R. Lakaemper, A. Censi, A. A. Godil, A. Wagan, "Quantitative Assessment of

Robot-generated Maps" Performance Evaluation and Benchmarking of Intelligent Systems, Chapter: -, Springer, 101 Philip

Drive , Norwell, MA, 02061, United States, pp. 221-248, (08-Oct-2009) 

J. L. Michaloski, T. Kramer, F. M. Proctor, X. Xu, S. Venkatesh, D. Odendahl, "STEPNC++ - An Effective Tool for Featurebased CAM/CNC" Chapter in Advanced Design and Manufacturing Based on STEP", Springer-Verlag , Old Portsmouth Road,

Ashbourne House, The Guildway , Guildford, Surrey , GU3 1LP, United Kingdom, 28 pp., (01-Dec-2009) 

(RI) S. B. Balakirsky, S. Carpin, G. Dimitoglou, B. Balaguer, "From Simulation to Real Robots with Predictable Results: Methods

and Examples" Performance Evaluation and Benchmarking of Intelligent Systems, Chapter: -, Springer, 101 Philip Drive ,

Norwell, MA, 02061, United States, (01-Dec-2009) 

W. P. Shackleford, R. V. Bostelman, "Data Collection Test-bed for the Evaluation of Range Imaging Sensors for ANSI/ITSDF

B56.5 Safety Standard for Guided Industrial Vehicles" Proceedings of the Performance Metrics for Intelligent Systems

Workshop | 2009 | PerMIS |, Performance Metrics for Intelligent Systems Workshop (PerMIS) 2009, Gaithersburg, MD, United

States, 09/21/2009 to 09/23/2009, 6 pp., (29-Oct-2009) 
165

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 3

T. H. Hong, E. Messina, H.M. Huang, M. O. Shneier, R. Eastman, J. Shi, J. Wells, "DYNAMIC PERCEPTION WORKSHOP

REPORT: Requirements and Standards for Advanced Manufacturing" NIST Interagency/Internal Report (NISTIR) 7664, 34

pp., (14-Jan-2010) 

FY2009 Publications:

W. G. Rippey, "Update on DMIS Certification" CMM Quarterly, (01-Oct-2009) 

W. G. Rippey, "The Dimensional Markup Language Specification for Inspection Results Data" CMM Quarterly, (01-Oct-2009)

B. A. Weiss, M. Menzel, "Development of Domain-Specific Scenarios for Training and Evaluation of Two-Way, Free Form,

Spoken Language Translation Devices" Proceedings of the 2009 International Test and Evaluation Association Symposium,

Baltimore, MD, United States, 09/28/2009 to 10/01/2009, (01-Oct-2009) 

J. J. Gorman, Y.S. Kim, A. E. Vladar, N. G. Dagalakis, "Design of an on-chip microscale nanoassembly system" International

Journal of Nanotechnology, Vol. 6, pp. 710-721, (10-Feb-2009) 

(R) R. Madhavan, E. Messina, "Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS 08) Workshop,

August 19-21, 2008" Special Publication (NIST SP) 1090, (10-Feb-2009) 

(I) E. Messina, "Robots to the Rescue" Crisis Response Journal, Vol. 5, No. 3, pp. 42-43, (30-Jun-2009) 

D. Odendahl, S. Venkatesh, J. L. Michaloski, F. M. Proctor, "Standardization of Auxiliary Equipment for Next Generation

CNC Machining" ISA 2008 Technical Conference, Houston, TX, United States, 10/14/2008 to 10/17/2008, (17-Oct-2008) 

(I) T. Kramer, X. Xu, "STEP in a Nutshell" Advanced Design and Manufacturing Based on STEP, Chapter: STEP in a Nutshell,

Springer, 236 Gray's Inn Road, Floor 6, London, -1, WC1X 8HL, United Kingdom, pp. 1-22, (29-Sep-2009) 

(I) J. D. Gilsinn, K. Knake, "EtherNet/IP Interoperability Recommendations" Proceedings of the Open DeviceNet Vendor

Association (ODVA), 2009 Conference and 13th Annual Meeting, Howey-in-the-Hills, FL, United States, 02/24/2009 to

02/26/2009, 7 pp., (22-Apr-2009) 

S. Szabo, J. A. Falco, R. J. Norcross, "An Independent Measurement System for Testing Automotive Crash Warning Systems"

NIST Interagency/Internal Report (NISTIR) 7545, 36 pp., (02-Apr-2009) 

D. Le, N. G. Dagalakis, "Performance of a Nanopositioner Controller Filter Compensator" Precision Meso/Micro Systems for

Nanomanufacturing, (12-Aug-2009) 

J. D. Gilsinn, F. Johnson, "Test Tool for Industrial Ethernet Network Performance" Proceedings of the 55th International

Instrumentation Symposium, League City, TX, United States, 06/01/2009 to 06/05/2009, (05-Jun-2009) 

(I) J. A. Horst, "Reduce Costs and Increase Quality with Information Exchange Standards for Manufacturing Quality" CMM

Quarterly - Special DMSC Edition, 12 pp., (04-Sep-2009) 
166

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 4

T. Kramer, J. A. Horst, "System Builders Manual for Version 2.1.5 of the NIST DMIS Test Suite" NIST Interagency/Internal

Report (NISTIR) 7610, (19-Aug-2009) 

T. H. Hong, R. Eastman, R. V. Bostelman, H.M. Huang, B. McMorris, "Proceedings of the Dynamic Measurement and Control

for Autonomous Manufacturing Workshop" NIST Interagency/Internal Report (NISTIR), (29-May-2009) 

G. Rosenbush, T. H. Hong, R. D. Eastman, "Super-Resolution Enhancement of Flash LADAR Range Data" NIST

Interagency/Internal Report (NISTIR) 7582, (30-Apr-2009) 

(I) R. V. Bostelman, J. S. Albus, "Robotic Patient Lift and Transfer" Service Robots, Aleksandar Lazinica, Editor, Kirchengasse

43/3, A-1070, Vienna, -, American Samoa, (31-Dec-2008) 

A. S. Jacoff, A. Downs, A.M. Virts, E. Messina, "Stepfield Pallets: Repeatable Terrain for Evaluating Robot Mobility"

Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States,

08/19/2008 to 08/21/2008, pp. 29-34, (31-Dec-2008) 

J. A. Horst, "Proprietary Design Information and Fruit Pies" Published in the Collaboration & Interoperability Market Report

2008, pp. 51 53, (07-Nov-2008) 

T. Kramer, J. A. Horst, "Users Manual for Version 2.1.5 of the NIST DMIS Test Suite (for DMIS 5.1)" NIST

Interagency/Internal Report (NISTIR) 7603, (19-Aug-2009) 

(R) B. A. Weiss, C. I. Schlenoff, "The Impact of Scenario Development on the Performance of Speech Translation Systems

Prescribed by the SCORE Framework" Proceedings of the Performance Metrics for Intelligent Systems (PerMIS) 2009,

Gaithersburg, MD, United States, 09/21/2009 to 09/23/2009, 8 pp., (25-Sep-2009) 

S. B. Balakirsky, R. Madhavan, "Advancing Manufacturing Research Through Competitions" Proceedings of the SPIE

Defense Security and Sensing, Orlando, FL, April 13-17, 2009., Orlando, FL, United States, 04/13/2009 to 04/17/2009, (17-

Apr-2009) 

(R) C. I. Schlenoff, B. A. Weiss, M. P. Steves, G. A. Sanders, F. M. Proctor, A.M. Virts, "Evaluating Speech Translation Systems:

Applying SCORE to TRANSTAC Technologies" Proceedings of the Performance Metrics for Intelligent Systems (PerMIS)

2009, Gaithersburg, MD, United States, 09/21/2009 to 09/23/2009, 8 pp., (29-Sep-2009) 

FY2008 Publications:

(I) M. O. Shneier, R. V. Bostelman, J. S. Albus, W. P. Shackleford, T. Chang, T. H. Hong, "A Common Operator Control Unit

Color Scheme for Mobile Robots" Performance Metrics for Intelligent Systems Workshop | 2007 | PerMIS |, Performance

Metrics for Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

M. O. Shneier, T. Chang, T. H. Hong, W. P. Shackleford, "Learning Traversability Models for Autonomous Mobile Vehicles"

Autonomous Robots, Vol. 24, No. 1, pp. 69-86, (21-Nov-2007) 
167

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 5

R. Madhavan, E. Messina, "Proceedings of the Performance Metrics for Intelligent Systems (PerMIS)2007 Workshop, August

28-30, 2007" Special Publication (NIST SP) 1073, (28-Dec-2007) 

C. I. Schlenoff, J. G. Ajot, R. Madhavan, "PRIDE: A Framework for Performance Evaluation of Intelligent Vehicles in

Dynamic, On-Road Environments" 2004 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD,

08/24/2004 to 08/26/2004, (24-Jul-2008) 

C. J. Scrapper Jr, R. Madhavan, S. B. Balakirsky, "Stable Navigation Solutions for Robots in Complex Environments"

Proceedings of the IEEE International Workshop on Safety, Security, and Rescue Robotics (SSRR2007) , Rome, -1, Italy,

09/27/2007 to 09/29/2007, (15-Nov-2007) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Oscillator for SI-Traceable Measurements in Atomic Force

Microscopy" Mechanics Conference to Celebrate the 100th Anniversary of the Department of Engineering Science and

Mechanics, Mechanics Conference to Celebrate the 100th Anniversary of the Department of Engineering Science and

Mechanics, Blacksburg, VA, 05/29/2008 to 05/30/2008, 1 pp., (29-May-2008) 

R. Madhavan, M. Foedissch, T. Chang, T. H. Hong, "Grouping Sensory Primitives for Object Recognition and Tracking"

Applied Imagery Pattern Recognition (AIPR) 2005, Applied Imagery Pattern Recognition (AIPR) 2005, Washington, DC,

10/19/2005 to 10/21/2005, (03-Dec-2007) 

J. S. Albus, "Reverse Engineering the Brain" Proceedings of the Fall Symposium of the American Association for Artificial

Intelligence (AAAI), Arlington, VA, United States, 11/07/2008 to 11/09/2008, (09-Nov-2007) 

F. M. Proctor, W. G. Rippey, J. A. Horst, J. A. Falco, T. Kramer, "Interoperability Testing for Shop Floor Measurement"

Proceedings of the Performance Metrics for Intelligent Systems Workshop | 2007 | PerMIS |, Performance Metrics for

Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

N. G. Dagalakis, J. B. Stiehl, Y.S. Kim, D. S. Sawyer, C. M. Shakarji, "NIST Medical Phantom Device to Assist With the

Calibration and Performance Testing of CAOS Systems" NIST Medical Phantom Device to Assist With the Calibration and

Performance Testing of CAOS Systems, , (09-Nov-2007) 

R. V. Bostelman, J. S. Albus, "Design of the HLPR ChairHome Lift Position and Rehabilitation Chair" NIST

Interagency/Internal Report (NISTIR) 7459, (09-Nov-2007) 

S. Venkatesh, R. Morihara, J. L. Michaloski, F. M. Proctor, "Closed Loop CNC Manufacturing -- Connecting the CNC to the

Enterprise" International Computers and Information in Engineering Conference | 2007 | ASME |, International Computers and

Information in Engineering Conference, Las Vegas, NV, United States, 09/04/2007 to 09/07/2007, (26-Nov-2007) 

B. A. Weiss, B. Antonishek, R. J. Norcross, "Fused quad audio/visual and tracking data collection to enhance mobile robot and

operator performance analyses" SPIE Defense and Security Symposium 2008, SPIE Defense and Security Symposium 2008,

Orlando, FL, 03/17/2008 to 03/20/2008, (20-Mar-2008) 

C. I. Schlenoff, Z. Kootbally, R. Madhavan, "Driver Aggressivity Analysis Within the Prediction In Dynamic Environments
168

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 6

(PRIDE) Framework" Proceedings of SPIE | 2007 |, SPIE, 04/09/2007 to 04/13/2007, (19-Oct-2007) 

R. V. Bostelman, J. S. Albus, "Sensor Experiments to Facilitate Robot Use in Assistive Environments" 1st International

Conference on PErvasive Technologies Related to Assistive Environments PETRA 2008, 1st International Conference on

PErvasive Technologies Related to Assistive Environments PETRA 2008, Athens, -1, Greece, 07/16/2008 to 07/19/2008, (19-

Jul-2008) 

S. B. Balakirsky, C. J. Scrapper Jr, S. Carpin, "The Evolution of Performance Metrics in the RoboCup Rescue Virtual Robot

Competition" Proceedings of the Performance Metrics for Intelligent Systems Workshop | 2007 | PerMIS |, Performance

Metrics for Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

T. Kramer, "Evaluating Manufacturing Machine Control Language Standards: An Implementer s View" Proceedings of PerMIS

| 2007 |, PerMIS, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

B. A. Weiss, C. I. Schlenoff, "Evolution of the SCORE Framework to Enhance Field-Based Performance Evaluations of

Emerging Technologies

" Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States,

08/19/2008 to 08/21/2008, pp. 1-8, (21-Aug-2008) 

J. Wason, W. Gressick, J. Wen, J. J. Gorman, N. G. Dagalakis, "Multi-Probe Assembly" IEEE, (31-Dec-2007) 

Z. Kootbally, C. I. Schlenoff, R. Madhavan, S. Foufou, "Fuzzy-Logic-Based Approach for Identifying Objects of Interest in

the PRIDE Framework" Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop,

Gaithersburg, MD, United States, 08/19/2008 to 08/21/2008, pp. 17-24, (21-Aug-2008) 

R. V. Bostelman, J. S. Albus, "HLPR Chair A Novel Patient Transfer Device" Proceedings of the 2008 Performance Metrics

for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States, 08/19/2008 to 08/21/2008, pp. 302-305, (21-

Aug-2008) 

H.M. Huang, E. Messina, T. H. Hong, C. I. Schlenoff, "Ontological Perspectives for Autonomy Performance" Proceedings of

the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States, 08/19/2008 to

08/21/2008, pp. 101-107, (21-Aug-2008) 

H.M. Huang, "Autonomy Levels for Unmanned Systems (ALFUS) Framework:Safety and Application Issues" Performance

Metrics for Intelligent Systems Workshop | 2007 | PerMIS |, Performance Metrics for Intelligent Systems (PerMIS) 2007,

Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

T. H. Hong, S. Hu, S. S. Young, "Performance of Super-Resolution Enhancement for Flash LADAR Data" Proceedings of the

2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States, 08/19/2008 to

08/21/2008, pp. 143-148, (21-Aug-2008) 

S. Venkatesh, B. Sides, J. L. Michaloski, F. M. Proctor, "Case Study in the Challenges of Integrating CNC Production and

Enterprise Systems " 2007 ASME International Mechanical Engineering Congress and Exposition, 2007 ASME International
169

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 7

Mechanical Engineering Congress and Exposition, Seattle, WA, 11/11/2007 to 11/15/2007, (03-Dec-2007) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Microdevice for SI-Traceable Forces in Atomic Force Microscopy"

SEM XI International Congress & Exposition on Experimental and Applied Mechanics, Orlando, FL, 06/02/2008 to

06/05/2008, 9 pp., (02-Jun-2008) 

G. Roberts, S. B. Balakirsky, S. Foufou, "3D Reconstruction of Rough Terrain for USARSim Using a Height-map Method"

Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States,

08/19/2008 to 08/21/2008, pp. 259-264, (21-Aug-2008) 

G. W. Vogl, J. J. Gorman, G. A. Shaw, J. R. Pratt, "A New Oscillator for SI-Traceable Measurements in Atomic Force

Microscopy" 12th Conference on Nonlinear Vibrations, Dynamics, and Multibody Systems, Blacksburg, VA, 06/01/2008 to

06/05/2008, 2 pp., (01-Jun-2008) 

Z. Kootbally, C. I. Schlenoff, R. Madhavan, "A Brief History of PRIDE" Proceedings of PerMIS | 2007 |, Performance

Metrics for Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

C. T. Pepper, S. B. Balakirsky, C. J. Scrapper Jr, "Robot Simulation Physics Validation" PerMIS Conference | 2007 |,

Performance Metrics for Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007, (28-Dec-2007) 

S. B. Balakirsky, F. M. Proctor, C. J. Scrapper Jr, T. Kramer, "A Mobile Robot Control Framework: From Simulation to

Reality" International Conference on Simulation, Modeling, and Programming for Autonomous Robots (SIMPAR 2008),

Venice, Italy, 11/03/2008 to 11/07/2008, (07-Dec-2007) 

S. B. Balakirsky, F. M. Proctor, C. J. Scrapper Jr, T. Kramer, "An Integrated Control and Simulation Environment for Mobile

Robot Software Development" Proceedings of IDETC/CIE 2008 ASME 2008 International Design Engineering Technical

Conference & Computers and Information in Engineering Conference, New York, NY, United States, 08/04/2008 to

08/07/2008, (07-Aug-2008) 

Z. Kootbally, C. I. Schlenoff, R. Madhavan, S. Foufou, "Performance Evaluation of Cost-Based vs. Fuzzy-Logic-Based

Prediction Approaches in PRIDE" SPIE Defense and Security Symposium 2008, Orlando, FL, 03/16/2008 to 03/20/2008, (20-

Mar-2008) 

B. A. Weiss, C. I. Schlenoff, G. A. Sanders, M. P. Steves, S. Condon, J. Phillips, D. Parvaz, "Performance Evaluation of Speech

Translation Systems" Proceedings of the 6th edition of the Language Resources and Evaluation Conference, 6th edition of the

Language Resources and Evaluation Conference, Marrakech, Morocco, 05/28/2008 to 05/30/2008, (28-May-2008) 

(I) J. S. Albus, "A Computational Model of the Human Visual Cortex" Proceedings of the SPIE Defense and Security 2008, SPIE

Defense and Security 2008, Orlando, FL, 03/18/2008 to 03/20/2008, (20-Mar-2008) 

T. Chang, T. H. Hong, M. O. Shneier, G. Holguin, J. Park, R. Eastman, "Dynamic 6DOF Metrology for Evaluating a Visual

Servoing" Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD,

United States, 08/19/2008 to 08/21/2008, pp. 173-180, (21-Aug-2008) 
170

Legend:

F - NIST 114 Filed

S - Submitted to ERB

A - ERB Approved

R - Refereed

I - Invited

March 1, 2010 8

J. H. Daruwalla, N. G. Dagalakis, "Calibration of a Force Feedback Joystick" Calibration of a Force Feedback Joystick, , (29-

Aug-2008) 

S. Condon, J. Phillips, C. Doran, J. Aberdeen, D. Parvaz, B. Oshika, G. A. Sanders, C. I. Schlenoff, "Applying Automated

Metrics to Speech Translation Dialogs" Proceedings of the 2008 LREC (Language Resources and Evaluation Conference),

Morocco, -1, United States, 05/28/2008 to 05/30/2008, (30-Jun-2008) 

C. J. Scrapper Jr, R. Madhavan, S. B. Balakirsky, "Performance Analysis for Stable Mobile Robot Navigation Solutions"

Proceedings of the SPIE Defense and Security Symposium, SPIE Defense and Security Symposium 2008, Orlando, FL, United

States, 03/18/2008 to 03/20/2008, (20-Mar-2008) 

N. G. Dagalakis, Y.S. Kim, D. S. Sawyer, C. M. Shakarji, "Development of Tools for Measuring the Performance of Computer

Assisted Orthopaedic Hip Surgery Systems" Proceedings of the Performance Metrics for Intelligent Systems | 2007 | PerMIS |,

Performance Metrics for Intelligent Systems Workshop (PerMIS) 2007, Gaithersburg, MD, 08/29/2007 to 08/30/2007, (28-Dec2007) 

B. K. Taylor, S. B. Balakirsky, E. Messina, R. D. Quinn, "Design and Validation of a Whegs Robot in USARSim" Proceedings

of PerMIS | 2007 |, Performance Metrics for Intelligent Systems (PerMIS) 2007, Gaithersburg, MD, 08/28/2007 to 08/30/2007,

(31-Jan-2008) 

H.M. Huang, E. Messina, "Autonomy Levels for Unmanned Systems (ALFUS) FrameworkVolume II: Framework Models

Initial Version" Special Publication (NIST SP) 1011-II-1.0, (28-Dec-2007) 

J. S. Albus, R. V. Bostelman, T. H. Hong, T. Chang, W. P. Shackleford, M. O. Shneier, "Integrating Learning Into a

Hierarchical Vehicle Control System" ICAE Journal, (31-Dec-2007) 

C. J. Scrapper Jr, R. Madhavan, S. B. Balakirsky, "Using a High-Fidelity Simulation Framework for Performance Singularity

Identification and Testing" Proceedings of Applied Imagery Pattern Recognition (AIPR) 2007, Washington, DC, United States,

10/10/2007 to 10/12/2007, (21-Nov-2007) 

F. Johnson, "Exploitation of Security Vulnerabilities Inherent in Common Development of Process Control Systems" Poster

Session, 17th USENIX Security Symposium (USENIX Security 08), 07/28/2008 to 08/01/2008, San Jose, CA, -, United States,

(01-Aug-2008) 

J. C. Chiao, J. M. Goldman, D. A. Heck, P. Kazanzides, W. J. Peine, J. B. Stiehl, D. Yen, N. G. Dagalakis, "Metrology and

Standards Needs of Some Categories of Medical Devices" Journal of Research (NIST JRES), (30-Apr-2008) 
171




_______________________________________

List of Publications

For

FY2008 to FY2010

Publication Type - All Publication Type

_______________________________________

(October 1, 2007 to March 1, 2010)
172



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited







	




G. Ameta, M. Mani, R. Sudarsan, K. W. Lyons, S. C. Feng, R. D. Sriram, "Carbon Weight Analysis for Machining Operation

and Allocation for Redesign" NIST Interagency/Internal Report (NISTIR) 7560, 23 pp., (16-Dec-2009) 

G. Shao, N. E. Bengtsson, B. J. Johansson, "Interoperability for Simulation of Sustainable Manufacturing" Proceedings of the

2010 Spring Simulation Multi-conference (SpringSim '10), Orlando, FL, United States, 04/12/2010 to 04/16/2010, 10 pp., (24-

Feb-2010) 

D. Kibira, G. Shao, S. -. Nowak, "System Dynamics Modeling of Corn Ethanol as a Bio Transportation Fuel in the United

States" NIST Interagency/Internal Report (NISTIR) 7649, 22 pp., (28-Jan-2010) 

J. Cuvillier, K. C. Morris, "QOD Standalone Users Guide" NIST Interagency/Internal Report (NISTIR) 7662, 15 pp., (16-Dec2009) 

S. Fenves, E. Subrahmanian, M. Mani, A. T. Jones, "An Enabler for Supplier Discovery in Virtual Supply Chains: A Shared

Terminology" NIST Interagency/Internal Report (NISTIR) 7647, 10 pp., (05-Nov-2009) 

B. J. Johansson, A. Skoogh, M. Mani, S. K. Leong, "Discrete Event Simulation as Requirements Specification for Sustainable

Manufacturing Systems Design" Proceedings of the PerMIS'09 Conference, Gaithersburg, MD, United States, 09/21/2009 to

10/23/2009, 12 pp., (04-Dec-2009) 

S. C. Feng, H. Lee, C. B. Joung, P. Ghodous, "Development Overview of an Information Model for Disassembly" Proceedings

of the 7th Global Conference on Sustainable Manufacturing, Chennai, -1, India, 12/02/2009 to 12/04/2009, 7 pp., (23-Dec2009) 

S. K. Leong, G. Shao, N. E. Bengtsson, "THE ROLE OF SIMULATION IN TRACKING MOBILE ASSETS USING

AUTOMATIC IDENTIFICATION SYSTEMS" Proceedings of the National Defense Industrial Association (NDIA) 12th

Annual Systems Engineering Conference, San Diego, CA, United States, 10/26/2009 to 10/29/2009, (15-Oct-2009) 

D. Kibira, S. K. Leong, "TEST OF CORE MANUFACTURING SIMULATION DATA SPECIFICATION IN AUTOMOTIVE

ASSEMBLY" Proceedings of the Simulation Interoperability Standards Organization (SISO)and Society for Modeling and

Simulation (SCS) International European Multi Conference , Orlando, FL, United States, 04/12/2010 to 04/16/2010, 10 pp.,

(19-Jan-2010) 

 F. Neuhaus, "The Semantics of Modules in Common Logic" Interontology 2010, Tokyo, -1, Japan, 02/27/2010 to 02/28/2010, 5

pp., (20-Jan-2010) 

S. C. Feng, C. B. Joung, "An Overview of a Proposed Measurement Infrastructure for Sustainable Manufacturing" Proceedings

of the 7th Global Conference on Sustainable Manufacturing, Chennai, China, 12/02/2009 to 12/04/2009, 12 pp., (23-Dec-2009) 

C. Bock, X. Zha, H.W. Suh, J.H. Lee, "Ontological Product Modeling for Collaborative Design" NIST Interagency/Internal

Report (NISTIR) 7643, (30-Oct-2009) 
173



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ERB Approved

Refereed

Invited





	

R. D. Sriram, A. T. Jones, M. Mani, R. Sudarsan, E. Subrahmanian, "NETWORK-CENTRIC PRODUCT REALIZATION

AND THE ROLE OF STANDARDS" International Conference on Frontiers of Interface between Statistics and Sciences,

Hyderabad, -1, India, 12/30/2009 to 01/02/2010, 6 pp., (18-Feb-2010) 

S. C. Feng, C. B. Joung, "Development Overview of Sustainable Manufacturing Metrics" Proceedings of the 17th CIRP

International Conference on Life Cycle Engineering 2010, Anhui, -1, China, 05/19/2010 to 05/21/2010, 6 pp., (18-Feb-2010) 





A. Cardone, R. D. Sriram, W. Albers, H. C. Pant, "Study of interaction of the cyclin-dependent kinase 5 with its activator, p25

and with the p25-derived inhibitor, CIP" NIST Interagency/Internal Report (NISTIR) 7552, (15-Jan-2009) 

M. Mani, A. T. Jones, J.H. Shin, R. D. Sriram, "Towards Information Networks to Support Composable Manufacturing"

Proceedings of the PERMIS Workshop, Gaithersburg, MD, United States, 08/19/2008 to 08/21/2008, (15-Oct-2008) 

M. Vujasinovic, N. Ivezic, B. Kulvatunyou, E. J. Barkmeyer, M. Missikoff, F. Taglino, Z. Marjanovic, I. Miletic, "A SemanticMediation Architecture for Interoperable Supply-Chain Applications" International Journal of Computer Integrated

Manufacturing, 15 pp., (10-Nov-2008) 

S. Krima, R. Barbau, X. Fiorentini, R. Sudarsan, R. D. Sriram, "OntoSTEP: OWL-DL Ontology for STEP" NIST

Interagency/Internal Report (NISTIR) 7561, (04-May-2009) 

X. Fiorentini, R. Sudarsan, H.W. Suh, J.H. Lee, R. D. Sriram, "An Evaluation of Description Logic for the Development of

Product Models" Journal of Computing and Information Science in Engineering, 20 pp., (10-Nov-2008) 

M. Sarigecili, R. Uptal, R. Sudarsan, R. D. Sriram, "Development of Functionality-Based Conformance Classes for ISO 10303 

Conformance Classes for Tolerancing Functionality" Proceedings of the CAD09 Conference, Reno, NV, United States,

06/08/2009 to 06/12/2009, (15-Jun-2009) 

S. J. Kemmerer, "Manufacturing Interoperability Program, a Synopsis" NIST Interagency/Internal Report (NISTIR) 7533, (24-

Feb-2009) 

P. O. Denno, E. J. Barkmeyer, F. Neuhaus, "Use of Semantic Mediation in Manufacturing Supply Chains" Book Title: Use of

Semantic Mediation in Manufacturing Supply Chains, IGI Global, 701 E. Chocolate Avenue, Suite 200, Hershey, PA, 17033,

United States, (06-Apr-2009) 

F. Neuhaus, "Ontology-based Technologies - Technology Transfer from Bioinformatics?" Proceedings of the Ontology for the

Intelligence Community 2008, Columbia, MD, United States, 11/30/2008 to 12/01/2008, 3 pp., (05-Nov-2008) 

 M. Vujasinovic, N. Ivezic, B. Kulvatunyou, E. J. Barkmeyer, M. Missikoff, F. Taglino, Z. Marjanovic, I. Miletic, "SemanticMediation for Standards-based B2B Interoperability" IEEE Internet Computing, (15-Jun-2009) 

S. Jain, "Tradeoffs in Building a Generic Supply Chain Simulation Capability" 2008 Winter Simulation Conference, Miami,
174



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ERB Approved

Refereed

Invited





	

FL, United States, 12/07/2008 to 12/10/2008, (15-Oct-2008) 

J. Lubell, B. Harvey, P. Goyal, K. C. Morris, "NDRProfile Schema Version 1.0 User Guide" NIST Interagency/Internal Report

(NISTIR) 7547, 14 pp., (16-Dec-2008) 

G. Shao, S. K. Leong, C. R. McLean, "Simulation-based Manufacturing Interoperability Standards and Testing" Proceedings of

the 9th International Conference on Progress of Machining Technology, Kunming, China, 04/25/2009 to 04/28/2009, (07-Jan2009) 

K. C. Morris, S. P. Frechette, P. Goyal, J. Lubell, B. Kulvatunyou, S. Sidi Malick, N. Brayard, S. Tixier, "User's Guide for the

Quality of Design Testing Tool and the Content Checker" NIST Interagency/Internal Report (NISTIR) 7538, 35 pp., (05-Nov2008) 

P. Sarkar, R. Sudarsan, H.W. Suh, K. W. Lyons, R. D. Sriram, "A Measure of Product Sustainability Based on Triple Bottom

Line" Proceedings of the ASME 2009 International Design Engineering Technical Conferences &

Computers and Information in Engineering Conference

IDETC/CIE 2009

, same, San Diego, CA, United States, 08/30/2009 to 09/02/2009, (15-Jun-2009) 

N. Krdzavac, C. Bock, "Reasoning in Manufacturing Part-Part Examples with OWL 2" NIST Interagency/Internal Report

(NISTIR) 7535, 21 pp., (29-Oct-2008) 

 J. Lubell, B. Kassel, R. Sudarsan, "Descriptive Metadata Requirements for Long-term Archival of Digital Product Models"

Proceedings of the Indo-US Workshop on International Trends in Digital Preservation, Indo-US Workshop on International

Trends in Digital Preservation, Pune, -1, India, 03/24/2009 to 03/25/2009, (25-Feb-2009) 

 J. Lubell, "Documenting and Implementing Guidelines with Schematron" Proceedings of Balisage: The Markup Conference

2009, Balisage Series on Markup Technologies. doi:10.4242/BalisageVol3.Lubell01, Montreal, -1, Canada, 08/11/2009 to

08/14/2009, Vol. 3, (26-Aug-2009) 

G. Shao, C. R. McLean, A. Brodsky, P. Ammann, "PARAMETER VALIDATION USING CONSTRAINT OPTIMIZATION

FOR MODELING AND SIMULATION" Proceedings of the Industrial Simulation Conference 2009, Loughborough, -1,

United Kingdom, 06/01/2009 to 06/03/2009, (11-May-2009) 

J.C. Cheng, K. H. Law, A. T. Jones, R. D. Sriram, "Service Oriented and Orchestrated Framework for Supply Chain

Integration" Proceedings of the ASME 2009 International Design Engineering Technical Conferences &

Computers and Information in Engineering Conference IDETC/CIE 2009

, San Diego, CA, United States, 08/30/2009 to 09/02/2009, (08-Jun-2009) 

 M. Vujasinovic, E. J. Barkmeyer, N. Ivezic, Z. Marjanovic, "Interoperable Supply-Chain Applications: Message Metamodelbased Semantic Reconciliation of B2B Messages" International Journal of Cooperative Information Systems, (13-May-2009) 

M. S. Lanz, R. Tuokko, "GENERIC REFERENCE ARCHITECTURE FOR DIGITAL, VIRTUAL, AND REAL
175



NIST 114 Filed

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ERB Approved

Refereed

Invited





	

REPRESENTATIONS OF MANUFACTURING SYSTEMS" Proceedings of the Indo-US Workshop on Designing Sustainable

Products, Services, and Manufacturing Systems, Bangalore, India, 08/18/2009 to 08/20/2009, (13-Aug-2009) 

K. W. Lyons, M. T. Postek, "A Decade of Commitment from the NIST Manufacturing Engineering Laboratory to

Nanomanufacturing and Nanometrology" Proceedings of the SPIE Optics and Photonics NanoScience and Engineering

Conference 2009, San Diego, CA, United States, 08/02/2009 to 08/06/2009, (27-Aug-2009) 

K. C. Morris, J. Lubell, S. Sidi Malick, "Framework for XML Schema Naming and Design Rules Development Tools" NIST

Interagency/Internal Report (NISTIR) 7589, (09-Jul-2009) 

S. Jain, C. McLean, "Recommended Practices for Homeland Security Modeling and Simulation" Proceedings of the 2009

Winter Simulation Conference, Austin, TX, United States, 12/13/2009 to 12/16/2009, (13-Aug-2009) 

A. Weissman, S. K. Gupta, X. Fiorentini, R. Sudarsan, R. D. Sriram, "Formal Representation of Product Design Specifications

for Validating Product Designs" NIST Interagency/Internal Report (NISTIR) 7626, (27-Aug-2009) 

N. E. Bengtsson, G. Shao, Y.T. T. Lee, S. K. Leong, C. R. McLean, B. Johansson, A. Skoogh, "Input Data Management

Methodology for Discrete Event Simulation" Proceedings of the 2009 Winter Simulation Conference, Austin, TX, United

States, 12/13/2009 to 12/16/2009, (26-Aug-2009) 

D. Kibira, S. Jain, C. McLean, "A System Dynamics Modeling Framework for Sustainable Manufacturing" Proceedings of the

27th Annual System Dynamics Society Conference, Albuquerque, NM, United States, 07/26/2009 to 07/30/2009, (10-Aug2009) 

X. Fiorentini, R. Sudarsan, S.R. Ray, R. D. Sriram, "Towards a Method for Harmonizing Information Standards" Proceedings

of the fifth annual IEEE Conference on Automation Science and Engineering (IEEE CASE 2009), Bangalore, -1, India,

08/22/2009 to 08/25/2009, (19-Aug-2009) 

S. Krima, R. Barbau, X. Fiorentini, R. Sudarsan, S. Foufou, R. D. Sriram, "OntoSTEP: OWL-DL Ontology for STEP"

Proceedings of the 6th International Conference on Product Lifecycle Management, Bath, -1, United Kingdom, 07/06/2009 to

07/08/2009, (15-Jun-2009) 

C. R. McLean, S. Jain, Y.T. T. Lee, "Overview of MSA Needs for Homeland Security" Proceedings of the Interservice/Industry

Training, Simulation & Education Conference (iitsec.org), Orlando, FL, United States, 11/30/2009 to 12/03/2009, (29-Jul-2009)

 S. C. Feng, C. B. Joung, T. V. Vorburger, "Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force

Microscopy" International Journal of Nanotechnology, (15-Oct-2008) 

 R. D. Sriram, S. Fenves, "The Role for Engineers in Health Care Information Systems" Industrial Engineer, (30-Dec-2008) 

B. J. Johansson, A. Fasth, J. Stahre, J. Heilala, S. K. Leong, Y.T. T. Lee, F. H. Riddick, "Enabling Flexible Manufacturing

Systems by Using Level of Automation as Design Parameter" Proceedings of the 2009 Winter Simulation Conference, Austin,

TX, United States, 12/13/2009 to 12/16/2009, (19-Aug-2009) 
176



NIST 114 Filed

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ERB Approved

Refereed

Invited





	

 R. Sudarsan, R. D. Sriram, P. Sarkar, "Metrics, Standards and Industry Best Practices for Sustainable Manufacturing Systems"

The fifth annual IEEE Conference on Automation Science and Engineering (IEEE CASE 2009), , Bangalore, -1, India,

08/22/2009 to 08/25/2009, (10-Aug-2009) 

G. Shao, "System Testing Using Use Cases for an ER Simulation Model" Proceedings of the North-American Simulation

Technology Conference (NASTEC 09), Atlanta, GA, United States, 08/26/2009 to 08/28/2009, (29-Jul-2009) 

F. H. Riddick, Y.T. T. Lee, "Representing Layout Information in the CMSD Specification" Proceedings of the 2009 Fall

Simulation Interoperability Workshop of the Simulation Interoperability Standards Organization (SISO), Orlando, FL, United

States, 09/21/2009 to 09/25/2009, (26-Aug-2009) 

X. Fiorentini, R. Sudarsan, "STEP-OAGIS Harmonization Joint Working Group, PDM Subgroup Interim Report" NIST

Interagency/Internal Report (NISTIR) 7618, (27-Aug-2009) 





S. C. Feng, C. B. Joung, T. V. Vorburger, "A Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic

Force Microscopy" Scanning 2008, Gaithersburg, MD, 04/15/2008 to 04/17/2008, 2 pp., (17-Mar-2008) 

X. Fiorentini, R. Sudarsan, M. Mani, S. Fenves, R. D. Sriram, "An Evaluation of Description Logic for the Development of

Product Models" NIST Interagency/Internal Report (NISTIR) 7481, 31 pp., (15-Apr-2008) 

R. D. Sriram, S. Fenves, "Manufacturing Metrology and Standards for the Health Care Enterprise Program Summary

" NIST Interagency/Internal Report (NISTIR) 7487, 10 pp., (07-Apr-2008) 

J. Kim, B. Kulvatunyou, N. Ivezic, A. T. Jones, "A Layered Approach to Semantic Similarity Analysis of XML Schemas"

Proceedings of the 2008 IEEE International Conference on Information Reuse and Integration, Las Vegas, NV, 07/13/2008 to

07/15/2008, 8 pp., (07-Apr-2008) 

R. Sudarsan, E. Subrahmanian, "Engineering Informatics: Introduction to the Special Issue" Journal of Computing and

Information Science in Engineering, (01-Mar-2008) 

 R. Gao, R. Yan, L. Zhang, K. B. Lee, "Condition Monitoring of Operating Spindle Based on Stochastic Subspace

Identification" 2007 ASME International Mechanical Engineering Congress and Exposition, 2007 ASME International

Mechanical Engineering Congress and Exposition, Seattle, WA, 11/11/2007 to 11/15/2007, pp. 1-7, (11-Nov-2007) 

S. C. Feng, S. P. Frechette, "The State of Container Security Standards" NIST Interagency/Internal Report (NISTIR) 7153, (17-

Oct-2007) 

P. O. Denno, T. Thurman, J. Mettenburg, D. Hardy, "On Enabling a Model-based Systems Engineering Discipline" The 18th

International Symposium of the International Council on Systems Engineering (INCOSE), The Netherlands, Netherlands,

06/15/2008 to 06/19/2008, 10 pp., (28-May-2008) 
177



NIST 114 Filed

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ERB Approved

Refereed

Invited





	

R. D. Sriram, A. S. Deshmukh, A. G. Banerjee, S. K. Gupta, "Content-Based Assembly Search: A Step Towards Assembly

Reuse" To Appear in the Journal of CAD, (07-Nov-2007) 

G. Ameta, R. Sudarsan, X. Fiorentini, M. Mani, S. Fenves, K. W. Lyons, R. D. Sriram, "Extending the Notion of Quality from

Physical Metrology to Information and Sustainability" NIST Interagency/Internal Report (NISTIR) 7517, 34 pp., (30-Jul-2008) 

J. Lubell, M. Mani, E. Subrahmanian, R. Sudarsan, "Long Term Sustainment Workshop Report" NIST Interagency/Internal

Report (NISTIR) 7496, 24 pp., (26-Mar-2008) 

D. Kibira, C. R. McLean, "Modeling and Simulation for Sustainable Manufacturing" Proceedings of the 2nd IASTED 2008

Africa Conference on Modeling and Simulation, SCIENCE AND TECHNOLOGY INNOVATION FOR SUSTAINABLE

DEVELOPMENT, Gaborone, Botswana, 09/08/2008 to 09/10/2008, 11 pp., (11-Jun-2008) 

J. Lubell, R. Sudarsan, E. Subrahmanian, M. Mani, "Sustaining Engineering Informatics: Toward Methods and Metrics for

Digital Curation" International Journal of Digital Curation, Vol. 3, No. 2, 11 pp., (01-Jul-2008) 

S. K. Leong, M. Johansson, B. Johansson, Y.T. T. Lee, F. H. Riddick, "A Real World Pilot implementation of the Core

Manufacturing Simulation Information Model" Proceedings of the Simulation Interoperability Standards Organization (SISO)

Spring 2008 SIW Workshop, 2008 Euro Simulation Interoperability Workshop, Edinburgh, Scotland, United States, 06/16/2008

to 06/19/2008, 11 pp., (23-Jun-2008) 

G. Shao, C. R. McLean, "ER Simulation Prototypes for Incident Management Training" Industrial Simulation Conference 2008,

Lyon, France, 06/09/2008 to 06/11/2008, 10 pp., (19-May-2008) 

M. Mani, K. W. Lyons, R. Sudarsan, E. Subrahmanian, R. D. Sriram, "Introducing Sustainability Early into Manufacturing

Process Planning" Proceedings of the 14th International Conference on Manufacturing Science and Engineering, ASME,

Evanston, IL, 10/07/2008 to 10/10/2008, 7 pp., (07-May-2008) 

 S. Jain, C. R. McLean, "Components for an Incident Management Simulation and Gaming Framework and Related

Developments " Simulation-Transactions of the Society for Modeling and Simulation International, 52 pp., (12-Mar-2008) 

 G. Shao, Y.T. T. Lee, "Applying Software Product Line Technology to Simulation Modeling of Emergency Response Facility"

Simulation-Transactions of the Society for Modeling and Simulation International, (15-Jul-2008) 

A. Bouras, R. Sudarsan, E. Subrahmanian, J.P. Legrange, "ICT for Supply Chains and Product Lifecycle Management: A

Research Agenda for French-US Collaboration" NIST Interagency/Internal Report (NISTIR), (24-Oct-2007) 

C. R. McLean, S. Jain, Y.T. T. Lee, "A Taxonomy of Homeland Security Modeling, Simulation, and Analysis Applications

" Proceedings of the Simulation Interoperability Standards Organization (SISO) Spring 2008 SIW Workshop, 2008 SISO SIW

Workshop, Providence, RI, 04/14/2008 to 04/18/2008, 12 pp., (14-Apr-2008) 

S. Kim, S.Y. Shin, I.H. Lee, S.J. Kim, R. D. Sriram, B.T. Zhang, "PIE: An Online Prediction System for Protein-Protein

Interactions from Text" Nucleic Acid Research, Special Issue on Web Services, 12 pp., (17-Apr-2008) 
178



NIST 114 Filed

Submitted to ERB

ERB Approved

Refereed

Invited





	

C. R. McLean, S. Jain, Y.T. T. Lee, "Homeland Security Simulation Domain: A Needs Analysis Overview" Simulation

Interoperability Standards Organization (SISO) 2008 European Simulation Interoperability Workshop (2008 Euro SIW),

Edinburgh, United States, 06/16/2008 to 06/19/2008, 9 pp., (19-May-2008) 

Y.T. T. Lee, F. H. Riddick, C. R. McLean, S. K. Leong, "Current Activities Related to the Core Manufacturing Simulation Data

Standards Development Effort" Proceedings of the Fall 2008 Simulation Interoperability Workshop, Orlando, FL, United

States, 09/14/2008 to 09/19/2008, 11 pp., (07-Aug-2008) 

V. Liang, C. Bock, X. Zha, "An Ontological Modeling Platform" NIST Interagency/Internal Report (NISTIR) 7509, 20 pp.,

(04-Jun-2008) 

X. Zha, R. D. Sriram, M. Fernandez, F. Mistree, "Knowledge-Intensive Collaborative Decision Support for Design Processes:

A Hybrid

Decision Support Model and Agent" Computers in Industry, 15 pp., (10-Sep-2008) 

F. H. Riddick, Y.T. T. Lee, "REPRESENTING LAYOUT INFORMATION IN THE CMSD SPECIFICATION" 2008 Winter

Simulation Conference, Miami, FL, United States, 12/07/2008 to 12/10/2008, 11 pp., (09-Jul-2008) 

K. C. Morris, P. Goyal, S. P. Frechette, "Development Life Cycle and Tools for Data Exchange Specification" Proceedings of

the ASME 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering

Conference, IDETC/CIE 2008, Brooklyn, NY, United States, 08/03/2008 to 08/06/2008, 12 pp., (19-May-2008) 

G. Roberts, S. B. Balakirsky, S. Foufou, "3D Reconstruction of Rough Terrain for USARSim Using a Height-map Method"

Proceedings of the 2008 Performance Metrics for Intelligent Systems (PerMIS) Workshop, Gaithersburg, MD, United States,

08/19/2008 to 08/21/2008, pp. 259-264, (21-Aug-2008) 

C. P. Cheng, J. Pan, G. T. Lau, K. H. Law, A. T. Jones, "Relating Taxonomies with Regulations" Proceedings of the 9th Annual

International Conference on Digital Government Research, Montreal, Canada, 05/18/2008 to 05/21/2008, 14 pp., (13-May2008) 

P. Hoffmann, S. C. Feng, G. Ameta, P. Ghodous, L. Qiao, "Towards a Multi-View Semantic Model for Product Feature

Description" Concurrent Engineering 2008, Belfast, 07/24/2008 to 07/25/2008, 7 pp., (28-May-2008) 

T. V. Vorburger, R. G. Dixson, J. N. Fu, N. Orji, S. C. Feng, M. W. Cresswell, R. A. Allen, W. F. Guthrie, W. Chu, "Nano- and

Atomic-Scale Length Metrology" Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007)

(Allied Publishers Pvt. Ltd, Chennai, 2007), 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007),

Trivandrum, India, 12/14/2007 to 12/14/2007, pp. 13-18, (14-Dec-2007) 

K. W. Lyons, M. T. Postek, "Metrology at the Nanoscale: What are the Grand Challenges?" SPIE NanoScience and

Engineering, San Diego, CA, United States, 08/10/2008 to 08/14/2008, 12 pp., (06-Aug-2008) 
179