# Patent

## Title
Projection objective having adjacently mounted aspheric lens surfaces

## Abstract

A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.

## Background
RELATED APPLICATIONS
This is a divisional application of patent application Ser. No. 10/702,501, filed Nov. 7, 2003, now U.S. Pat. No. 6,903,802, which, in turn, is a divisional application of patent application Ser. No. 10/177,580, filed Jun. 24, 2002 (now U.S. Pat. No. 6,646,718), which, in turn, is a continuation application of International patent application PCT/EP 00/13148, filed Dec. 22, 2000, and claiming priority of U.S. provisional application 60/173,523, filed Dec. 29, 1999, and German applications 100 02 626.5 and 100 21 739.7, filed Jan. 22, 2000 and May 4, 2000, respectively, all incorporated herein by reference.


BACKGROUND OF THE INVENTION
U.S. Pat. No. 6,707,616 discloses catadioptric optic projection objectives which include a plurality of aspheric lens surfaces. For example, the projection objective shown in FIG. 4 includes 12 aspheric lens surfaces for 15 lenses. The manufacturing costs of aspheric lens surfaces with the accuracy required in microlithography are very high. Accordingly, these objectives are of little interest in the marketplace because of the many required aspheric lens surfaces.
U.S. Pat. No. 4.875.380 discloses an optical projection system especially for photolithography. The projection objective known from this publication includes five lens groups. The first, second, third and fifth lens groups each have only one lens. In part, the lenses are provided with aspheric lens surfaces. An aspheric object end mounted lens surface of the fifth lens group follows an aspheric lens surface mounted in the fourth lens group at the image end.
U.S. Pat. No. 6,104,472 discloses the adjacent mounting of aspheric lens surfaces in a projection objective. These aspheric lenses are supported so as to be displaceable in the radial direction. The projection objective is matched via the relative movement of the lenses. The aspheric lens surfaces are especially rotationally unsymmetrical because of the possibility of displacing the aspheres in radial direction with respect to each other. Because of the movable support of the aspheric lenses, this arrangement is not suitable for every projection objective because projection objectives designed especially for short wavelengths react sensitively to the smallest position change of the individual lenses. Accordingly, the position stability, which is achievable because of the special support of the lenses, is not sufficient in order to reliably ensure a good imaging quality.
German patent publication 198 18 444 discloses a projection optic arrangement having a purely refractive projection objective which includes six lens groups G1 to G6. In this projection objective, the lens groups G1, G3 and G5 have positive refractive power. The lens groups G2 and G4 have negative refractive power. To correct imaging errors, some lenses, especially in the fourth and fifth lens groups, have aspheric lens surfaces.
German patent publication 199 42 281.8 discloses additional projection exposure objectives which have six lens groups. The second lens group and the fourth lens group have negative refractive power. In the projection objectives known from this publication, lenses having aspheric lens surfaces are preferably arranged in the first three lens groups. A minimum number of spherical lens surfaces are arranged between the aspheric lens surfaces. This minimum spacing between the aspheric lens surfaces appears necessary so that the utilized aspheric lenses can develop their optimal effect.
From U.S. Pat. No. 4,871,237 it is already known to match an objective in dependence upon barometric pressure via the refractive index of a fill gas in the lens intermediate spaces. For example, spherical aberration, coma and other imaging errors can be corrected with a suitable combination of intermediate spaces.
U.S. Pat. No. 5,559,584 discloses introducing a protective gas into the intermediate spaces between a wafer and/or a reticle and the projection objective in a projection exposure system for manufacturing microstructured components.
SUMMARY OF THE INVENTION
It is an object of the invention to provide a projection objective and a projection exposure system as well as a method for manufacturing microstructured components. These components are improved with respect to the imaging quality and the resolution capacity. Furthermore, it is an object of the invention to reduce manufacturing costs.
The projection objective of the invention defines a maximum lens diameter (D2) and includes: a plurality of lenses defining an object plane (0) and an image plane (0′); at least two of the lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; the double asphere being mounted at a distance from the image plane (0′) corresponding at least to the maximum lens diameter (D2); the lenses of the double asphere defining a mean lens diameter; and, the mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of the mean lens diameter.
In a projection objective having a plurality of lenses, the measure of arranging the double asphere at a spacing of at least the maximum lens diameter of the objective away from the image plane (especially the wafer plane), improves the imaging qualities of a projection objective in comparison to a projection objective without such double aspheres. In the above, at least two mutually adjacent mounted lens surfaces are aspheric and this is identified as a double asphere. The spacing between the aspheric lens surfaces of the double asphere is maximally half the lens diameter of the mean diameter of the double asphere. The numerical aperture can especially be increased in a refractive projection objective with the use of at least one double asphere in that the first convex form is shortened so that, at a constant length of the projection objective, the third convex form experiences an increase of the numerical aperture of approximately 0.03 to 0.05.
Especially in purely refractive projection objectives, the use of double aspheres with an arrangement in the first three lens groups has been shown to be especially advantageous.
In lithographic objectives, there are particular locations, which operate especially well on difficult to control aberrations, when these locations are aspherized. Precisely here it is purposeful to utilize especially the effectiveness at the corresponding location via a complex aspheric function. The region of the first restriction and the end of the second convex form as well as regions behind the diaphragm are predestined. Since the technical realization of complex aspheres is subjected to technical limits, the complex asphere functions are realized by means of double aspheres. In this way, a still more extensive correction is possible and the aspheres of the double asphere are technically realizable.
Furthermore, it has been shown to be advantageous to provide aspheric lens surfaces as aspheric lens surfaces of the double asphere. The radii of the aspheric lens surfaces of the best-fitting spherical lens surface (identified as the profile radius) differ very little. Preferably, the reciprocal values of the profile radius or radii of the double aspheres deviate less than 30% from each other. As a reference value, the reciprocal value of the larger radius in magnitude is applied.
It has been shown to be especially advantageous that the apex radii of the aspherical lens surfaces of the double aspheres differ by less than 30% with reference to the larger apex radius in magnitude.
In the area of microlithography, the developmental work is directed to increasing the resolution. On the one hand, the resolution can be increased by increasing the numerical aperture, utilizing ever smaller wavelengths and even by correcting the occurring imaging errors. For an increase of the image end numerical aperture, the last convex form of the objective arranged at the image end is increased. However, it is problematic that only a fixed pregiven space can be made available for the objective. Accordingly, in order to provide a larger numerical aperture, it is therefore necessary to save space in other regions of the objective.
It has been shown to be advantageous to provide the space needed for increasing the numerical aperture by shortening the first convex form. With the first convex form, especially the input telecentrics and the distortion are corrected. By utilizing double aspheres, it is possible to correct the input telecentrics as well as the distortion with ease and at a short distance. With the double asphere, a variable adjustment of the location is made available at a short distance. With the possibility of varying the location, the distortion can be corrected. Especially the input telecentrics is corrected because the angle can be flexibly influenced.
Corrective means has already been made available in the input region of the objective especially with the use of a double asphere in a refractive projection objective in the region of the first two lens groups, that is, up to and including the first lens group of negative refractive power. Accordingly, the corrective means, which is required in the third convex form, are reduced for ensuring a uniform or constant imaging quality.
Furthermore, by providing a double asphere in the forward region of the objective, especially up to the second restriction, the number of lenses is reduced. This operates advantageously on the manufacturing costs.
In purely refractive projection objectives, it has been shown to be advantageous to provide aspheric lens surfaces in the forward region of the objective ahead of the second restriction to improve the imaging quality. For example, for a numerical aperture of 0.83, the deviation from the wavefront of a spherical wave is reduced to less than 6 mλ with a field of 8×26 mm2 referred to 248 nm.
The imaging characteristics of the objective can be changed because of fluctuations of the atmospheric pressure. In order to compensate for such pressure fluctuations, it has been shown to be advantageous to charge an intermediate space between two lens surfaces with pressure in a targeted manner so that pressure changes, especially of the atmospheric pressure, can be compensated. Furthermore, the targeted application of pressure can be used for a further reduction of imaging errors.
Furthermore, it has been shown to be advantageous to provide at least one of the end plates with a pressure manipulator so that a curvature of the plate or lens can be generated with a two-sided application of pressure of the particular lens or the particular plate. For a three-point support of the end plate and an application of pressure of the gas space, the three-waviness during operation is corrected in a targeted manner by means of the through-bending of the end plate. With an n-point support, an n-waviness can be corrected.
A force, which is directed in the z-direction, for curving the lens can be introduced via coaxially mounted actuators, especially, piezos. The force, which is introduced by the actuators, is directed to the lens center point.



BRIEF DESCRIPTION OF THE DRAWINGS
The invention will now be described with reference to the drawings wherein:
FIG. 1 shows a projection exposure system;
FIG. 2 shows a projection objective for the wavelength 157 nm having a numerical aperture of 0.8;
FIG. 3 is a projection objective for the wavelength 248 nm having a numerical aperture of 0.83;
FIG. 4 is a projection objective for the wavelength 248 nm having a numerical aperture of 0.9;
FIG. 5 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.85;
FIG. 6 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.9;
FIG. 7 is a projection objective for the wavelength 157 nm having a numerical aperture of 0.9;
FIG. 8 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.9;
FIG. 9 is a catadioptric projection objective having a double asphere for the wavelength of 157 nm and having a numerical aperture of 0.8.



DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION
Referring to FIG. 1, the principle configuration of a projection exposure system is described. The projection exposure system 1 includes an illuminating unit 3 and a projection objective 5. The projection objective 5 includes a lens arrangement 19 having an aperture diaphragm AP. An optical axis 7 is defined by the lens arrangement 19. Different lens arrangements are explained in greater detail hereinafter with respect to FIGS. 2 to 6. A mask 9 is mounted between the illuminating unit 3 and the projection objective 5. The mask 9 is held in the beam path by means of a mask holder 11. Such masks 9, which are used in microlithography, have a micrometer-nanometer structure which is imaged demagnified on an image plane 13 by means of the projection objective 5 up to a factor of 10, especially by the factor 4. In the image plane 13, a substrate 15 or a wafer is held. The substrate 15 or wafer is positioned by a substrate holder 17.
The minimal structures, which can still be resolved, are dependent upon the wavelength λ of the light, which is used for the illumination, as well as in dependence upon the image side numerical aperture of the projection objective 5. The maximum attainable resolution of the projection exposure system 1 increases with falling wavelength λ of the exposure illuminating unit 3 and with an increasing image end numerical aperture of the projection objective 5.
The projection objective 19 shown in FIG. 2 includes six lens groups G1 to G6. This projection objective is designed for the wavelength 157 nm. The first lens group G1 or first convex form is defined by the lenses L101 to L103 which are all biconvex lenses. This first lens group has positive refractive power. The last lens surface of this lens group G1, which is mounted at the image end, is aspherized. This lens surface is identified by AS1. The last lens of this lens group G1 is a biconvex lens which can be clearly assigned to the first lens group.
The lens group G2 or first constriction, which follows the lens group G1, includes the three lenses L104 to L106. This lens group G2 has negative refractive power and defines a restriction. An object end mounted lens surface AS2 of the lens L104 is aspheric. Furthermore, the image end mounted lens surface of lens L106 is aspheric. A double asphere is formed by the two lens surfaces AS1 and AS2.
The lens group G3 has positive refractive power and is defined by the lenses L107 to L111. The last lens surface of this lens group is the lens L111 which is arranged at the image end and is aspherized. This lens group is a convex form.
The second lens group G4 of negative refractive power continues from the third lens group. This lens group G4 is defined by the lenses L112 to L115. This lens group defines a constriction.
The fifth lens group G5 has the lenses L116 to L125 and has positive refractive power and includes an aperture diaphragm AP which is mounted between the lens L119 and the lens L120.
The sixth lens group G6 is defined by the lenses or plates L126 and L127. This objective is designed for the wavelength 157 nm having a spectral bandwidth of the illuminating source of 1.5 pm and the lenses L113 to L115 and L119 for this objective are of sodium fluoride. With the use of a second material (here sodium fluoride), especially chromatic errors can be corrected. The chromatic transverse errors are significantly reduced because of the use of NaF in the first restriction. Even the chromatic longitudinal error is somewhat reduced. The largest individual contribution to correction of the chromatic longitudinal errors is achieved with the use of NaF in the lens group G5.
The positive lenses L116 to L118 of the lens group G5 continue from the lens group G4 and are of lithium fluoride. With the use of lithium fluoride at this location in the objective, especially the monochromatic correction is facilitated because only small individual refractive powers are needed for achromatization because of the larger dispersion distance of lithium fluoride and sodium fluoride than of calcium fluoride and sodium fluoride. The basic configuration does not differ so significantly from a chromatic objective because of the special material selection.
The two positive lenses, which are arranged after the diaphragm, are likewise of lithium fluoride and also make, as explained with respect to the lithium lenses mounted ahead of the diaphragm, an important contribution to the correction of the chromatic longitudinal error.
The lens L122, whose two surfaces run almost at a constant spacing to each other, comprises calcium fluoride. The lens is very significant for the monochromatic correction and has only a slight influence on the chromatic longitudinal error.
The last three lenses of the fifth lens group G5, L123 to L125, are of lithium fluoride. These lenses supply a smaller but nonetheless very valuable contribution to the correction of the chromatic longitudinal error.
The sixth lens group includes the lenses or planar plates L126 and L127 which comprise calcium fluoride.
This objective is designed for illuminating a field of 8×26 mm. The structural length from position 0 to position 0′ is 1,000 mm. The numerical aperture is 0.8. The precise lens data are set forth in Table 1.
The aspheric surfaces are in all embodiments described by the equation:




  
    P
    ⁡
    
      (
      h
      )
    
  
  =
  
    
      
        
          δ
          ·
          h
          ·
          h
        
        
          1
          +
          
            
              1
              -
              
                
                  (
                  
                    1
                    +
                    K
                  
                  )
                
                ·
                δ
                ·
                δ
                ·
                h
                ·
                h
              
            
          
        
      
      +
      
        
          C
          1
        
        ⁢
        
          h
          4
        
      
      +
      ...
      +
      
        
          C
          n
        
        ⁢
        
          h
          
            
              2
              ⁢
              n
            
            +
            2
          
        
        ⁢
        
          
        
        ⁢
        δ
      
    
    =
    
      1
      /
      R
    
  




wherein: P is the arrow height as a function of the radius h (elevation to the optical axis 7) with the aspheric constants C1 to Cn given in the Tables. R is the apex radius.

The projection objective shown in FIG. 3 includes six lens groups G1 to G6 having the lenses L201 to L225 and a divided end plate (L226, L227). This objective is designed for the illumination wavelength 248 nm. The space required for this projection objective 19 amounts precisely to 1,000 mm from object plane 0 to image plane 0′. At the image end, this objective 19 has a numerical aperture of 0.83. The field which can be exposed by this projection objective is 8×26 mm.
The first lens group G1 includes the lenses L201 to L204 of which the lenses L201 to 203 are biconvex lenses.
The first lens L204 of the lens group G1 has an aspheric form on the image end lens surface. This asphere is identified by AS1.
The second lens group G2 includes the three lenses L205 to L207. These lenses have a biconcave form and the lens surfaces of the lenses L205 and L207, which face toward the respective bounding lens groups, are aspheric. The aspheric lens surface of the lens L205 is identified by AS2. In this way, a double asphere is formed by the two mutually adjacent aspheric lens surfaces AS1 and AS2. The last lens of the lens group G2 is provided as aspheric on the side facing the wafer.
The third lens group includes the lenses L208 to L212. With this lens group G3, a convex form is provided. The lens L211 is made aspheric on the image end lens surface.
The fourth lens group G4 is formed by the lenses L213 to L215 which are all configured to be biconcave. This lens group G4 is the second lens group of negative refractive power. With this lens group, a restriction is formed.
The lens group G5 includes the lenses L216 to L225. An aperture diaphragm is mounted between the lenses L218 and L219. The diaphragm curvature between the peripheral ray at the diaphragm at a numerical aperture of 0.83 and the intersect point of the chief ray with the optical axis is 30.9 mm. With this lens group, a convex form is provided.
The sixth lens group G6 includes the lenses L226 and L227 and these lenses are configured as planar plates.
The precise lens data of this projection objective 19 are set forth in Table 2. For the same structural length of the objective from 0 to 0′ of 1,000 mm compared to FIG. 2, the aperture is increased further to 0.83 with an excellent correction.
The projection objective shown in FIG. 4 includes six lens groups having the lenses L301 to L327. The objective is designed for the illuminating wavelength 248 nm and has a numerical aperture of 0.9.
The first lens group G1 includes the lenses L301 to L304. This lens group has a positive refractive power. The refractive power especially of lenses L302 to L303 is very low. The focal length of this lens at L302 is 1077.874 mm and is −92397.86 mm at L303.
A lens group of negative refractive power G2 continues from this last lens group and is formed by the three lenses L305 to L307. The first lens surface of this lens group G2 is arranged at the image end and is made aspheric and is identified by AS1. The lens surface of lens L305 facing toward the lens surface AS1 is made aspheric so that a double asphere is formed by the lens surfaces AS1 and AS2. Between these aspheric lens surfaces AS1 and AS2, there is a clearly recognizable spacing provided in contrast to the previous embodiment. In this double asphere, the equidistant arrangement of the surfaces AS1 and AS2 is no longer completely utilized and the double asphere opens somewhat toward the outside.
The next lens group G3 has a positive refractive power and includes the lenses L308 to L311. This lens group G3 includes an aspheric lens surface and this aspheric lens surface is mounted on the image side on the lens L311.
The second lens group of negative refractive power G4 includes the lenses L312 to L315. The lens surface of the lens L314 mounted at the image end is made aspheric.
The next lens group G5 has a positive refractive power and includes the lenses L316 to L325. The diaphragm AP is mounted between the lenses L319 and L320. The two mutually adjacent lens surfaces of lenses L321 and L322 are aspheric and are identified as AS3 and AS4. A double asphere is formed by these aspheres AS3 and AS4. An air space is enclosed by the surfaces AS3 and AS4. With this double asphere, especially the spherical aberration and the sine condition at high aperture are better decoupled and easily corrected.
The sixth lens group includes the lenses L326 and L327 which are configured as thick planar plates. The intermediate space defined by these planar plates is chargeable with an overpressure and an underpressure and/or with a gas for compensating fluctuations of the atmospheric pressure. For more extended correction possibilities, it can be provided that at least one of the planar plates with or without refractive power (that is, also as a lens which is clearly thinner) compensates n-waviness under pressure variation and point mounting. For a targeted deformation of the lens, piezo actuators can be provided on the outer periphery.
The structural length of this objective from object plane 0 to image plane 0′ is 1139.8 mm. The numerical aperture at the image end amounts to 0.9 with an exposable field of 27.2 mm in the diagonal. The precise lens data are set forth in Table 3.
The projection objective 19 shown in FIG. 5 includes six lens groups G1 to G6. This projection objective is designed for a wavelength of 193 nm. The first lens group G1 includes the lenses L401 to L404. Already the first object end mounted lens surface of the lens L401 is made aspheric. This asphere acts especially positively on dish-shaped traces and distortion with excellent entry telecentrics because this asphere is mounted at the location at which the best beam separation exists for the high-aperture lithographic objective.
The lens surface of lens L404, which is provided at the object end, is aspheric and is identified by AS1. A double asphere is formed by this lens surface AS1 and the lens surface of the lens L405 which is mounted at the image end and is likewise aspheric and is identified by AS2. This double asphere operates especially positively on dish-shaped traces while simultaneously providing good correction of the image errors caused by the high aperture. With increasing radial distance from the optical axis, the surfaces AS1 and AS2 of the double asphere have an increasing distance in the direction to the optical axis. This double asphere opens toward the outside and defines a complex corrective means with average beam separation.
The lens L404 belongs already to the second lens group which includes the lenses L405 to L407. This second lens group has a negative refractive power.
The first lenses L402 to L405 have an especially low refractive power fL402=1397.664 mm, fL403=509.911 mm, fL404=1371.145 mm and fL405=−342.044 mm. A further aspheric lens surface is provided at the image end on the lens L407.
The next lens group G3 has a positive refractive power and includes the lenses L408 to L413. The lens L409 has, at the object end, an aspheric lens surface and the lens L413 is provided with an aspheric lens surface at the image side. The aspheric lens L413 has a positive influence on the coma of higher order and on the 45° structures. The air space, which is provided between the lenses L411 and L412 is virtually equidistant.
The lens group G4 has a negative refractive power and is defined by the lenses L414 to L416. The lens L415 has an aspheric lens surface on the image side. This aspheric lens surface operates in a good mixture on aperture dependent and field dependent imaging errors, especially for objectives having a high aperture.
The next lens group G5 is defined by the lenses L417 to L427. A diaphragm AP is mounted between the lenses L420 to L421. The lens surface of the lens L422, which follows the diaphragm AP, has an aspheric form. With this aspheric lens, it is possible to carry out the correction of the spheric aberration without influencing other imaging errors. For this purpose, it is, however, necessary with the presence of a clear diaphragm curvature, that the aspheric surface projects into the region of a slide diaphragm.
Furthermore, the mutually adjacent lens surfaces of the lenses L423 and L424 (identified by AS3 and AS4) are made to have an aspheric form. With this follow-on double asphere, it is especially possible to have an excellent aplanar correction for highest numerical aperture. The simultaneous correction of the spheric aberration and the satisfaction of the sine condition is therefore possible.
The lens group G6 is configured by the lenses L428 to L429 which are configured as planar plates. It can, in turn, be provided that the intermediate space between the planar parallel plates 428 and 429 are chargeable with a fluid.
Quartz glass is provided as a lens material. To reduce the chromatic aberration, the lenses L408 and L409 as well as L413 can be made of calcium fluoride. To reduce the compaction effect because of the high radiation load, it can be provided that calcium fluoride be used as a material for the smaller one or for both planar parallel plates L428 and L429. It is noted that, in this projection objective, the maximum diameter of the lens group G3 has, with 398 mm, a greater maximum diameter than the lens group G5. This objective is very well corrected and the deviation from the wavefront of an ideal spherical wave is >=1.2 mλ referred to 193 nm. The spacing between object plane 0 and image plane 0′ is 1188.1 mm and the exposable field is 8×26 mm. The precise lens data are set forth in Table 4.
The projection objective shown in FIG. 6 includes the lens groups G1 to G6 with the lenses L501 to L530. Planar plates are provided for L529 and L530. This projection objective is designed for the wavelength 193 nm and has a numerical aperture of 0.9. The spacing between the object plane 0 and the image plane 0′ is 1174.6 mm. The exposable field has a size of 8×26 mm. Viewed macroscopically, this projection objective does not differ from the projection objective shown in FIG. 5. Again, especially the lenses L502 and L503 have a low refractive power. The lens L510 is provided especially for the quadratic correction.
Apart from the planar parallel plates L529 and L530, all lenses L501 to L528 are of quartz glass. This projection objective too is very well corrected and the deviation from the ideal wavefront of a spherical wave is <3.0 mλ referred to 193 nm. The lenses L510, L515, L522 have a low refractive power. The precise lens data are set forth in Table 5. The effect of the aspheric surfaces corresponds principally to the effects described with respect to FIG. 5. The effects are still greater because of the high numerical aperture of 0.9.
The projection objective shown in FIG. 7 for the wavelength 157 nm includes six lens groups having lenses L601 to L630 with planar parallel plates L629 and L630. The structural length of this projection objective from object plane 0 to image plane 0′ is 997.8 mm. A field of 7×22 mm can be exposed. The numerical aperture of this objective is 0.9. Calcium fluoride is provided as a lens material. A further correction of chromatic errors is achievable with the use of barium fluoride as a lens material for the lenses L614 to L617. The deviation from the wavefront of an ideal spherical wave is <1.8 mλ referred to 157 nm. Viewed macroscopically, the configuration of the projection objective shown in FIG. 7 differs only slightly from the projection objective described with respect to FIGS. 5 and 6. For this reason, reference is made to the description with respect to FIG. 5. The exact lens data are set forth in Table 6.
The projection objective shown in FIG. 8 includes six lens groups G1 to G6. The first lens group includes the lenses L701 to L704. The lens L701 at the object side and the lens L704 at the image side have aspheric lens surfaces. This first lens group includes only lenses of positive refractive power which have approximately identical diameters.
The second lens group G2 follows and has a negative refractive power and includes the lenses L705 to L708. The lens L705 has an aspheric lens surface on the side facing toward lens L704 and this aspheric lens surface is identified by AS2. A double asphere 21 is formed by the two aspheric lens surfaces AS1 and AS2. This double asphere is curved toward the wafer and opens slightly in the radial direction. Furthermore, the lens L708 has an aspheric lens surface at the image end.
The third lens group G3 has lenses L709 to L714 and has a positive refractive power. This lens group includes two aspheric lenses L710 and L714. The air gap, which is formed between the lenses L712 and L713, has an almost constant thickness.
The fourth lens group G4 includes only two negative lenses L715 and L716 with which a restriction is formed. The lens L715 is provided at the image side with an aspherical lens surface.
The fifth lens group has lenses L717 to L727 and has a positive refractive power. The diaphragm AP is mounted between the lenses L720 and L721. In this lens group, a further double asphere 21 is provided which is formed by the two aspheric lens surfaces AS3 and AS4 of the lenses L723 and L724. Further aspheric lens surfaces are on the lens L721 on the object side and on lens L727 on the image side.
The last lens group G6 follows this lens group and is defined by the two planar parallel plates L728 and L729. An intermediate space 25 is formed by the mutually adjacent surfaces of the planar plates L728 and L729. The intermediate space 25 can be charged with pressure.
This projection objective is designed for the wavelength 193 nm and has a numerical aperture of 0.9. The distance between object plane 0 and image plane 0′ is 1209.6 mm. A field of 10.5×26 mm can be exposed with this projection objective. The maximum deviation from the ideal wavefront of a spherical wave is 3.0 mλ referred to 193 nm. This deviation is determined by means of the program code CODE V. The precise lens data are set forth in Table 7.
In FIG. 9, a catadioptric projection objective is shown which is designed for the wavelength 157 nm. A field of 22×7 mm can be exposed with this projection objective. The numerical aperture is 0.8. All lenses in this projection objective are made of calcium fluoride. The first lens L801 is provided with an aspheric lens surface on the image side. This aspheric lens supplies especially a valuable contribution to the correction of the distortion.
The radiation is deflected by mirror SP 1 and impinges on the lens L802 of negative refractive power. The next lens L803 is provided with an aspheric lens surface on the lens side on the image side in the beam path. This aspheric lens supplies an especially valuable contribution to the correction of the spherical aberration.
The radiation, which propagates from lens L803, is reflected back at the mirror SP 2 and passes the lenses L803 and L802 in the opposite sequence before it is directed via reflection at mirror SP 3 to the lens L804 which is mounted on an optical axis common with the lens L801. An intermediate image Z1 arises between the mirror SP 3 and lens L804. The next lenses L805 and L806 have aspheric lens surfaces AS1 and AS2 on the mutually adjacent surfaces. A double asphere is formed by these aspheres. Furthermore, the objective includes the lenses L807 to L818. The lenses L812, L814, L816 and L818 are provided with aspheric surfaces on the image side and the lens L817 has an aspheric lens surface on the object side. A double asphere is formed by the aspheric lens surfaces of the lenses L816 and L817.
The subject matter of PCT/EP 00/13148, filed Dec. 22, 2000, is incorporated herein by reference.
It is understood that the foregoing description is that of the preferred embodiments of the invention and that various changes and modifications may be made thereto without departing from the spirit and scope of the invention as defined in the appended claims.












TABLE 1







M1197a



REFRACTIVE
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
INDEX AT 157 nm
DIAMETER





0
infinite
32.000000000
N2
1.00000320
54.410



infinite
3.386300000
N2
1.00000320
61.189


L101
331.163350000
17.963900000
CaF2
1.55840983
63.195



−319.616060000
1.476400000
N2
1.00000320
63.531


L102
766.337390000
17.162600000
CaF2
1.55840983
63.346



−447.357070000
0.750000000
N2
1.00000320
62.932


L103
308.080750000
26.167800000
CaF2
1.55840983
61.274



−256.921560000AS
0.781900000
N2
1.00000320
59.279


104
−199.459070000AS
7.000000000
CaF2
1.55840983
59.017



115.459900000
26.055700000
N2
1.00000320
53.978


L105
−155.555940000
7.000000000
CaF2
1.55840983
54.017



181.538670000
32.685400000
N2
1.00000320
57.637


L106
−105.047550000
7.623100000
CaF2
1.55840983
59.819



−6182.626690000AS
16.767300000
N2
1.00000320
74.788


L107
−441.263450000
27.098000000
CaF2
1.55840983
83.940



−151.990780000
2.318200000
N2
1.00000320
88.568


L108
−613.725250000
45.372400000
CaF2
1.55840983
103.501



−150.623730000
2.560000000
N2
1.00000320
107.663


L109
1648.391330000
42.538400000
CaF2
1.55840983
119.260



−255.166800000
2.852600000
N2
1.00000320
120.183


L110
154.432580000
47.915200000
CaF2
1.55840983
110.475



1162.400830000
0.929300000
N2
1.00000320
107.883


L111
261.100680000
20.383600000
CaF2
1.55840983
98.431



614.726380000AS
0.867900000
N2
1.00000320
93.917


L112
359.575500000
7.168800000
CaF2
1.55840983
89.668



126.930570000
40.754900000
N2
1.00000320
76.782


L113
−253.190760000
7.000000000
NAF
1.46483148
74.969



132.038930000
28.180300000
N2
1.00000320
67.606


L114
−338.990070000
7.611900000
NAF
1.46483148
67.535



222.374240000
39.202700000
N2
1.00000320
68.722


L115
−109.896940000
7.095700000
NAF
1.46483148
69.544



705.107390000
19.428900000
N2
1.00000320
84.312


L116
−706.158480000
29.677100000
LIF
1.47810153
90.890



−180.715990000
5.740400000
N2
1.00000320
95.248


L117
1725.475600000
35.904100000
LIF
1.47810153
112.495



−263.017160000
0.750000000
N2
1.00000320
114.191


L118
619.827930000
64.044600000
LIF
1.47810153
121.296



−197.026470000
0.750100000
N2
1.00000320
121.844


L119
−195.861770000
7.000000000
NAF
1.46483148
121.626



−469.620100000
0.750000000
N2
1.00000320
123.300



infinite
0.750600000
N2
1.00000320
122.405


L120
640.893310000
25.458500000
LIF
1.47810153
123.549



−1089.937900000
0.980400000
N2
1.00000320
123.525


L121
322.108140000
34.102200000
LIF
1.47810153
121.602



−1728.500990000
31.928200000
N2
1.00000320
120.573


L122
−234.494140000
46.273400000
CaF2
1.55840983
119.587



−251.236960000
0.974700000
N2
1.00000320
121.785


L123
171.211410000
29.502800000
LIF
1.47810153
103.953



452.301450000
0.887100000
N2
1.00000320
101.542


L124
126.180740000
28.831400000
LIF
1.47810153
88.565



223.894010000
0.796800000
N2
1.00000320
83.098


L125
132.333150000
25.819300000
LIF
1.47810153
76.140



477.745080000
6.457300000
N2
1.00000320
70.847


L126
infinite
59.682500000
CaF2
1.55840983
69.261



infinite
0.838600000
N2
1.00000320
33.343


L127
infinite
4.000000000
CaF2
1.55840983
32.211



infinite
12.000810000
N2
1.00000320
29.804


L128
infinite
0.000000000


13.603










ASPHERIC CONSTANTS





Asphere of Lens L103










K
−0.8141



C1
−1.93290250e−007



C2
 4.16659320e−011



C3
−4.77885250e−015



C4
 3.28605790e−019



C5
−1.03537910e−022



C6
 2.39743010e−026



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L104










K
−1.0887



C1
 1.57414760e−008



C2
 1.63099500e−011



C3
−4.85048550e−015



C4
 9.48501060e−019



C5
−2.37918310e−022



C6
 3.60692700e−026



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L106










K
4235.0115



C1
 1.16160120e−007



C2
−1.37360280e−011



C3
−1.75181710e−016



C4
 1.56917750e−019



C5
−1.57135270e−023



C6
 5.89614270e−028



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L111










K
0.0000



C1
 1.35782560e−009



C2
−2.31506660e−013



C3
 2.14831120e−017



C4
−7.84495330e−022



C5
−4.23732680e−026



C6
 1.17366430e−031



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Refractive index and wavelength are referred to air.





















TABLE 2







M1159a



REFRACTIVE
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
INDEX AT 248.38 nm
DIAMETER





0
infinite
32.000000000
Luft
0.99998200
54.410



infinite
0.750000000
Luft
0.99998200
61.498


L201
359.203085922
16.544139898
SIO2
1.50837298
62.894



−367.814285018
0.750000000
Luft
0.99998200
63.342


L202
376.906582229
16.424149202
SIO2
1.50837298
63.744



−370.266896435
0.750000000
Luft
0.99998200
63.552


L203
623.868133301
12.000921336
SIO2
1.50837298
62.201



−558.943539628
4.488271401
Luft
0.99998200
61.489


L204
−593.881163796
10.597937240
SIO2
1.50837298
60.233



−258.275165583AS
1.300130829
Luft
0.99998200
59.503


L205
−195.528496730AS
7.000000000
SIO2
1.50837298
59.067



114.970814112
27.465616009
Luft
0.99998200
54.855


L206
−150.593037892
7.000000000
SIO2
1.50837298
55.023



203.788990073
29.227930343
Luft
0.99998200
59.359


L207
−116.847756998
7.000000015
SIO2
1.50837298
60.888



−1029423.850607139AS
26.431412586
Luft
0.99998200
74.043


L208
−433.333706324
29.900058462
SIO2
1.50837298
89.733



−145.855178517
0.750000000
Luft
0.99998200
93.351


L209
−740.439232493AS
44.983538148
SIO2
1.50837298
108.655



−155.998681446
0.750000000
Luft
0.99998200
111.280


L210
730.369450038
38.596890643
SIO2
1.50837298
120.834



−339.830855552
0.750000000
Luft
0.99998200
121.150


L211
159.417768241
52.577878183
SIO2
1.50837298
112.765



457732.591606731AS
0.780542469
Luft
0.99998200
110.299


L212
190.812012094
23.738591831
SIO2
1.50837298
94.787



115.677643950
40.245663292
Luft
0.99998200
77.717


L213
−412.140976525
7.000000000
SIO2
1.50837298
76.256



151.701098214
27.102188582
Luft
0.99998200
69.619


L214
−319.487543080
7.000000000
SIO2
1.50837298
69.443



236.707933198
42.112032397
Luft
0.99998200
70.193


L215
−105.934259216
8.769693914
SIO2
1.50837298
71.068



680.231460994
17.681829203
Luft
0.99998200
88.650


L216
−517.056865132
36.235608441
SIO2
1.50837298
91.923



−185.271735391
0.764865888
Luft
0.99998200
100.651


L217
2262.402798068
44.431825566
SIO2
1.50837298
119.658



−267.329724617
8.198939895
Luft
0.99998200
123.247


L218
1103.186796189
40.827914599
SIO2
1.50837298
133.839



−364.593909045
8.280602730
Luft
0.99998200
134.570



infinite
−3.250000000
Luft
0.99998200
133.180


L219
620.770366318
25.036239346
SIO2
1.50837298
134.241



−1858.943929157
0.750000000
Luft
0.99998200
134.164


L220
329.635686681
40.854820783
SIO2
1.50837298
132.227



−1181.581276955
31.972595866
Luft
0.99998200
131.156


L221
−249.799136729
10.000000000
SIO2
1.50837298
130.229



6484.262988004
5.619260320
Luft
0.99998200
130.672


L222
−2574.687141000
38.775298966
SIO2
1.50837298
130.696



−254.665255526
0.750000000
Luft
0.99998200
130.891


L223
203.341746230
25.409827006
SIO2
1.50837298
110.728



463.496973555
0.750000000
Luft
0.99998200
108.517


L224
118.263098967
37.247858671
SIO2
1.50837298
92.529



191.067427473
0.753637388
Luft
0.99998200
84.037


L225
137.671384625
24.859589811
SIO2
1.50837298
78.934



507.533271700
6.693359054
Luft
0.99998200
74.624


L226
infinite
55.768369688
SIO2
1.50837298
72.833



infinite
0.800000000
Luft
0.99998200
35.729


L227
infinite
4.000000000
SIO2
1.50837298
34.512



infinite
11.999970000
Luft
0.99998200
31.851


L228
infinite
0.000000000

1.00000000
13.602










ASPHERIC CONSTANTS





Asphere of Lens L204










K
−0.7780



C1
−1.91000417e−007



C2
 4.02870297e−011



C3
−5.55434626e−015



C4
 1.68245178e−019



C5
 2.20604311e−023



C6
 8.09599744e−027



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L205










K
−0.4166



C1
 5.25344324e−008



C2
 1.26756433e−011



C3
−5.25489404e−015



C4
 7.04023970e−019



C5
−1.04520766e−022



C6
 2.06454806e−026



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L207










K
−2116959451.7820



C1
 1.25171476e−007



C2
−1.53794245e−011



C3
−3.12532578e−016



C4
 2.00967035e−019



C5
−2.05026124e−023



C6
 7.81326379e−028



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L211










K
 0.0000



C1
 2.78321477e−009



C2
 5.89866335e−014



C3
 1.19811527e−017



C4
−7.81165149e−022



C5
 1.66111023e−026



C6
−1.60965484e−031



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Refractive index and wavelength were determined in air.





















TABLE 3







M1222a



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 248.380 nm
DIAMETER





0
infinite
32.000000000
L710

54.410



infinite
0.750000000
L710

62.206


L301
12444.588054076
17.524945114
SIO2
1.50837298
62.427



−167.739069307
0.765384867
L710
0.99998200
63.213


L302
1202.845295516
8.943027554
SIO2
1.50837298
63.724



−1004.036633539
0.757676170
L710
0.99998200
63.750


L303
235.865591780
9.298971429
SIO2
1.50837298
63.464



231.568686620
24.888929767
L710
0.99998200
62.457


L304
−148.910928631
11.307968350
SIO2
1.50837298
62.393



−106.056725042AS
11.531057240
L710
0.99998200
63.087


L305
−135.467082619AS
7.000000000
SIO2
1.50837298
60.496



236.063635384
11.820516442
L710
0.99998200
61.104


L306
−1613.154189634
7.000000000
SIO2
1.50837298
61.565



222.732790977
38.103480975
L710
0.99998200
63.842


L307
−93.477889742
7.004909948
SIO2
1.50837298
64.855



10625258.126273967AS
25.183324680
L710
0.99998200
84.949


L308
−313.395232213
37.921288357
SIO2
1.50837298
94.853



−140.728421777
2.422311655
L710
0.99998200
102.129


L309
−882.714069478AS
62.983288381
SIO2
1.50837298
129.319



−162.454752849
0.750000000
L710
0.99998200
131.820


L310
372.954030958
61.566328910
SIO2
1.50837298
148.956



−446.221051696
0.750000000
L710
0.99998200
148.766


L311
159.626550846
68.423222152
SIO2
1.50837298
126.219



6881.817080351AS
0.754846049
L710
0.99998200
121.302


L312
1035.238560782
11.490813397
SIO2
1.50837298
116.908



181.491627420
22.008897360
L710
0.99998200
97.838


L313
508.638145894
7.024491847
SIO2
1.50837298
96.444



144.727315074
42.480962349
L710
0.99998200
85.818


L314
−315.769132147
7.000000000
SIO2
1.50837298
85.132



168.042488686AS
60.840114041
L710
0.99998200
82.384


L315
−110.641058959
7.000000000
SIO2
1.50837298
82.821



460.993264759
26.383956624
L710
0.99998200
108.073


L316
−573.887503383
33.664255268
SIO2
1.50837298
111.503



−189.203245467
0.750000000
L710
0.99998200
115.508


L317
−4374.531790288
33.200388364
SIO2
1.50837298
144.129



−365.840916872
0.750000000
L710
0.99998200
146.400


L318
5367.437754044
32.001020330
SIO2
1.50837298
162.024



−556.194479444
0.857496674
L710
0.99998200
163.414


L319
1425.923295786
68.540751990
SIO2
1.50837298
172.847



−318.608860176
8.280602730
L710
0.99998200
173.674



infinite
−3.250000000
L710
0.99998200
165.236


L320
524.088279104
18.000000000
SIO2
1.50837298
164.278



896.107746530
0.750000000
L710
0.99998200
163.371


L321
447.468508944
50.493798307
SIO2
1.50837298
161.574



−849.886554129
37.700767601
L710
0.99998200
160.560


L322
−277.232722440
15.000000000
SIO2
1.50837298
159.396



−359.067701243AS
13.800352685
L710
0.99998200
159.582


L323
−283.705002828AS
20.143173981
SIO2
1.50837298
158.903



−264.293409160
0.750000000
L710
0.99998200
159.923


L324
182.924856302
28.086938401
SIO2
1.50837298
124.917



293.542915952
0.750000000
L710
0.99998200
122.142


L325
138.051507251
29.667601165
SIO2
1.50837298
107.973



206.495592035
4.518697859
L710
0.99998200
103.815


L326
137.608373914
37.703252491
SIO2
1.50837298
93.164



2008.206929102AS
6.230615100
L710
0.99998200
88.838


L327
79833.713358573
27.734587521
SIO2
1.50837298
83.516



infinite
5.000000000
L710
0.99998200
62.961


L328
infinite
25.000000000
SIO2
1.50837298
52.694



infinite
10.000000000
L710
0.99998200
34.137


L329
infinite
0.000000000


13.605







L710 = Air at 710 Torr










ASPHERIC CONSTANTS





Asphere of Lens L304










K
−1.5058



C1
−1.86740544e−007



C2
 3.71500406e−011



C3
−8.38153156e−015



C4
 1.06034402e−018



C5
−7.88993246e−023



C6
 2.81358334e−027



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L305










K
−1.3497



C1
 9.59200710e−008



C2
 3.31187872e−011



C3
−1.02270060e−014



C4
 1.45048880e−018



C5
−1.18276835e−022



C6
 5.49446108e−027



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L307










K
−23427671857767355000000000000.0000



C1
 1.13856265e−007



C2
−9.18910043e−012



C3
−2.09482944e−016



C4
 8.75414269e−020



C5
−6.71659158e−024



C6
 1.94896163e−028



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L311










K
 0.0000



C1
 1.36987424e−008



C2
−6.69820602e−013



C3
 2.24912373e−017



C4
−5.16548278e−022



C5
 4.05832389e−027



C6
 3.25008659e−032



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L314










K
 0.0000



C1
−3.81602557e−009



C2
−1.32998252e−012



C3
 0.00000000e+000



C4
−3.24422613e−021



C5
 3.55600124e−025



C6
−2.11130790e−029



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L322










K
 0.0000



C1
 2.20018047e−011



C2
−6.06720907e−016



C3
−1.85544385e−019



C4
 1.99332533e−023



C5
−1.25615823e−028



C6
 5.72017494e−033



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L323










K
 0.0000



C1
 2.59747415e−011



C2
 1.15845870e−015



C3
 2.93792021e−019



C4
−5.20753147e−024



C5
 5.15087863e−028



C6
−3.68361393e−033



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L326










K
 0.0000



C1
 2.53574810e−008



C2
 1.14136997e−012



C3
−2.09898773e−016



C4
 1.80771983e−020



C5
−8.70458993e−025



C6
 1.83743606e−029



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000






















TABLE 4







M1450a



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 193.304 nm
DIAMETER





0
infinite
32.000000000
L710
0.99998200
54.410



infinite
0.700000000
L710
0.99998200
61.369


L401
1072.135967906AS
17.638366552
SIO2
1.56028895
62.176



−274.850778792
10.038841436
HE
0.99971200
62.804


L402
−195.160258125
9.677862773
SIO2
1.56028895
62.822



−159.034954419
15.411706951
HE
0.99971200
63.649


L403
−409.040910955
11.634800854
SIO2
1.56028895
62.424



−184.929247238
18.878098976
HE
0.99971200
62.549


L404
−86.928681017
9.000000000
SIO2
1.56028895
61.870



−81.003682870AS
3.559685814
HE
0.99971200
63.469


L405
−105.055795110AS
6.000000000
SIO2
1.56028895
60.375



−237.059668556
7.135710642
HE
0.99971200
61.325


L406
−170.390902140
6.000000000
SIO2
1.56028895
61.152



179.617978310
40.187039625
HE
0.99971200
64.312


L407
−108.910057000
6.000000000
SIO2
1.56028895
66.769



10000.000000000AS
23.032466424
HE
0.99971200
84.010


L408
−482.423484275
35.657870541
SIO2
1.56028895
98.271



−166.024534852
0.712083613
HE
0.99971200
104.636


L409
−5301.825985682AS
59.184134830
SIO2
1.56028895
129.868



−219.603781546
1.964238192
HE
0.99971200
135.616


L410
−407.514819861
25.000000000
SIO2
1.56028895
141.192



−275.650807138
2.073256156
HE
0.99971200
143.933


L411
812.482278880
41.728126549
SIO2
1.56028895
150.437



2085.321083022
11.867512800
HE
0.99971200
150.588


L412
1989.395979432
66.189720990
SIO2
1.56028895
151.170



−336.825131023
2.208063283
HE
0.99971200
151.249


L413
161.751335222
66.140524993
SIO2
1.56028895
121.860



−7743.125302019AS
0.732008617
HE
0.99971200
115.257


L414
2700.830058670
8.000000000
SIO2
1.56028895
112.928



175.482298866
18.681794864
HE
0.99971200
94.204


L415
330.479176880
8.000000000
SIO2
1.56028895
91.933



215.492418517
37.734500801
HE
0.99971200
86.259


L416
−263.077268094
6.000000000
SIO2
1.56028895
83.596



119.453498304AS
66.406324570
HE
0.99971200
77.915


L417
−126.431526615
6.000000000
SIO2
1.56028895
80.395



1627.715124622
24.178532080
HE
0.99971200
96.410


L418
−517.066851877
30.987035837
SIO2
1.56028895
105.371



−242.666474401
0.700000000
HE
0.99971200
113.249


L419
−737.673536297
30.292644418
SIO2
1.56028895
124.350



−270.925750340
0.700000000
HE
0.99971200
128.112


L420
−1051.979110054
27.301344542
SIO2
1.56028895
137.231



−363.545320262
0.711035404
HE
0.99971200
139.644


L421
914.456821676
50.497126159
SIO2
1.56028895
148.531



−500.741001160
10.000000000
HE
0.99971200
149.700


L422
infinite
−5.000000000
HE
0.99971200
146.693



353.826401507AS
22.748234242
SIO2
1.56028895
147.721


L423
529.864238000
1.376970242
HE
0.99971200
146.294



422.718681400
57.709521396
SIO2
1.56028895
146.003


L424
−733.506899438
37.321473463
HE
0.99971200
143.238



−261.264462802
15.000000000
SIO2
1.56028895
138.711


L425
−292.145870649AS
18.942285163
HE
0.99971200
139.089



−225.638240671AS
19.098948274
SIO2
1.56028895
136.464


L426
−230.537827019
0.700000000
HE
0.99971200
138.299



246.284141218
23.038665896
SIO2
1.56028895
114.892


L427
400.381469987
0.704537226
HE
0.99971200
110.931



131.458744675
28.653621426
SIO2
1.56028895
98.090


L428
200.500973816
0.708148286
HE
0.99971200
93.130



139.428371855
36.540725215
SIO2
1.56028895
87.103


L429
1188.104646109AS
8.107454155
HE
0.99971200
79.764



infinite
25.934594077
CaF2
1.50143563
72.791


L430
infinite
5.000000000
L710
0.99998200
54.980



infinite
25.000000000
CAF2HL
1.50143563
46.911


L431
infinite
10.000000000
L710
0.99998200
29.741



infinite
0.000000000


13.603







L710 = Air at 710 Torr










ASPHERIC CONSTANTS





Asphere of Lens L401










K
 0.0000



C1
 7.64628377e−008



C2
 6.87967706e−013



C3
 6.32367166e−017



C4
 4.65534082e−020



C5
−1.74760583e−023



C6
 3.25143184e−027



C7
−2.97366674e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L404










K
−1.3306



C1
−2.46704917e−007



C2
 1.00943626e−011



C3
−6.88338440e−015



C4
 1.00927351e−018



C5
−1.37371749e−022



C6
 9.94732480e−027



C7
−6.46127195e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L405










K
−1.1682



C1
 8.44108642e−008



C2
 6.67934072e−012



C3
−5.16053049e−015



C4
 8.51835178e−019



C5
−9.37525700e−023



C6
 3.80738193e−027



C7
−7.58518933e−035



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L407










K
 0.0000



C1
 8.18369639e−008



C2
−9.75131236e−012



C3
 3.85197305e−016



C4
 1.05024918e−020



C5
−3.84907914e−024



C6
 3.28329458e−028



C7
−1.16692413e−032



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L409










K
 0.0000



C1
 4.21547093e−009



C2
−2.05810358e−013



C3
−2.19266732e−018



C4
−7.83959176e−023



C5
 6.55613544e−027



C6
−7.33103571e−032



C7
−2.15461419e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L413










K
0.0000



C1
 1.39800416e−008



C2
−1.91505190e−013



C3
−1.26782008e−017



C4
 9.93778200e−022



C5
−5.55824342e−026



C6
 1.85230750e−030



C7
−2.83026055e−035



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L416










K
 0.0000



C1
−1.87949694e−008



C2
−4.87119675e−012



C3
−5.90009367e−017



C4
−5.76749530e−021



C5
−3.07189672e−025



C6
 4.51160541e−029



C7
−5.02037364e−033



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L421










K
−0.0073



C1
 1.63581145e−010



C2
−7.80915457e−015



C3
 6.72460331e−021



C4
 5.33479719e−025



C5
 2.82144185e−028



C6
−6.16219372e−033



C7
 2.37157562e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L424










K
 0.0000



C1
 1.28367898e−010



C2
−1.18938455e−014



C3
−1.84714219e−019



C4
 4.28587779e−023



C5
−1.39213579e−027



C6
 2.04883718e−032



C7
−3.36201584e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L425










K
 0.0000



C1
−2.31584329e−010



C2
 2.47013162e−014



C3
 1.13928751e−018



C4
−1.24997826e−023



C5
−9.59653919e−028



C6
 1.46403755e−032



C7
−1.23684921e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L428










K
 0.0000



C1
 2.79193914e−008



C2
 5.72325985e−013



C3
−1.69156262e−016



C4
 1.45062961e−020



C5
−7.24157687e−025



C6
 1.59130857e−029



C7
 9.07975701e−035



C8
 0.00000000e+000



C9
 0.00000000e+000






















TABLE 5







M1558a



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 193.304 nm
DIAMETER





0
infinite
32.000000000
L710
0.99998200
54.410



infinite
0.700000000
L710
0.99998200
61.800


L501
1062.826934956AS
17.734965551
SIO2
1.56028895
62.680



−280.649155373
9.921059017
HE
0.99971200
63.358


L502
−198.612797944
9.733545477
SIO2
1.56028895
63.454



−157.546275141
15.417407860
HE
0.99971200
64.281


L503
−400.277413338
11.803054495
SIO2
1.56028895
63.163



−182.515287485
19.059582585
HE
0.99971200
63.316


L504
−86.486413985
9.000000000
SIO2
1.56028895
62.723



−79.976798205AS
3.314115561
HE
0.99971200
64.356


L505
−102.262183494AS
6.000000000
SIO2
1.56028895
61.260



−275.242312561
7.844485351
HE
0.99971200
62.494


L506
−191.274205909
6.000000000
SIO2
1.56028895
62.450



180.723494008
40.175681177
HE
0.99971200
65.811


L507
−108.539011643
6.000000000
SIO2
1.56028895
67.752



10000.000000000AS
23.009626916
HE
0.99971200
86.379


L508
−481.040730284
35.657298256
SIO2
1.56028895
100.931



−165.828518942
0.700000000
HE
0.99971200
106.719


L509
−5243.952853546AS
59.233771719
SIO2
1.56028895
134.666



−218.541408733
2.123657562
HE
0.99971200
139.441


L510
−402.136827778
25.000000000
SIO2
1.56028895
145.856



−276.854279724
1.637353303
HE
0.99971200
148.618


L511
796.304534481
36.805305429
SIO2
1.56028895
156.741



2360.950907095
10.808883416
HE
0.99971200
157.059


L512
2256.926430541
60.789786196
SIO2
1.56028895
157.684



−336.450738373
0.801676910
HE
0.99971200
157.856


L513
161.617552542
66.152351274
SIO2
1.56028895
125.624



−6835.350709889AS
0.744366824
HE
0.99971200
121.362


L514
2851.162473443
8.000000000
SIO2
1.56028895
118.726



173.208226906
18.750820117
HE
0.99971200
97.559


L515
318.351302869
8.000000000
SIO2
1.56028895
95.703



214.643166184
38.151364608
HE
0.99971200
89.760


L516
−261.549915460
6.000000000
SIO2
1.56028895
88.331



119.510683982AS
66.550546342
HE
0.99971200
82.116


L517
−126.322271364
6.000000000
SIO2
1.56028895
83.464



1722.207555551
24.185704173
HE
0.99971200
102.415


L518
−506.819064828
30.988960270
SIO2
1.56028895
111.113



−242.042046428
0.700000000
HE
0.99971200
118.861


L519
−728.789614455
30.297084361
SIO2
1.56028895
132.704



−269.518093553
0.700000000
HE
0.99971200
135.576


L520
−1024.754284774
27.306923440
SIO2
1.56028895
147.201



−361.037355343
0.700000000
HE
0.99971200
149.061


L521
929.096482269
49.082091976
SIO2
1.56028895
161.109



−497.886578908
15.000000000
HE
0.99971200
161.854



infinite
−10.000000000
HE
0.99971200
158.597


L522
352.973470359AS
22.735479730
SIO2
1.56028895
159.957



529.864238000
1.119499649
HE
0.99971200
158.688


L523
422.718681400
57.532074113
SIO2
1.56028895
158.278



−733.230538894
37.317449332
HE
0.99971200
156.533


L524
−261.165349728
15.000000000
SIO2
1.56028895
155.119



−292.119447959AS
18.962883498
HE
0.99971200
156.043


L525
−226.263316842AS
19.009003051
SIO2
1.56028895
155.000



−231.163516914
0.700000000
HE
0.99971200
157.710


L526
245.306778718
23.024380018
SIO2
1.56028895
124.547



403.694577141
0.700000000
HE
0.99971200
121.262


L527
132.188567375
28.647981266
SIO2
1.56028895
104.696



199.679919884
0.700019350
HE
0.99971200
101.254


L528
138.967602414
36.537553325
SIO2
1.56028895
93.617



1194.093826692AS
8.108769689
HE
0.99971200
89.148


L529
infinite
25.923824338
CaF2
1.50143563
82.715



infinite
5.000000000
L710
0.99998200
63.301


L530
infinite
25.000000000
CaF2
1.50143563
52.976



infinite
10.000000000
L710
0.99998200
34.253


L531
infinite
0.000000000


13.603







L710 = Air at 710 Torr










ASPHERIC CONSTANTS





Asphere of Lens L501










K
 0.0000



C1
 7.79889739e−008



C2
 5.96475035e−013



C3
 5.73397945e−017



C4
 5.38600405e−020



C5
−2.08145188e−023



C6
 4.05094979e−027



C7
−3.79132983e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L504










K
−1.3308



C1
−2.46633450e−007



C2
 1.00446806e−011



C3
−7.00686898e−015



C4
 9.90840734e−019



C5
−1.31781718e−022



C6
 9.28901869e−027



C7
−6.52628587e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L505










K
−1.1513



C1
 8.27765089e−008



C2
 7.00992841e−012



C3
−5.19825762e−015



C4
 8.12467102e−019



C5
−8.31805913e−023



C6
 2.18925711e−027



C7
 1.11778799e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L507










K
 0.0000



C1
 8.22829380e−008



C2
−9.72735758e−012



C3
 3.85643753e−016



C4
 1.01114314e−020



C5
−3.91221853e−024



C6
 3.39732781e−028



C7
−1.20135313e−032



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L509










K
 0.0000



C1
 4.14637283e−009



C2
−2.13253257e−013



C3
−2.08003643e−018



C4
−7.83152213e−023



C5
 5.30015388e−027



C6
−2.59321154e−033



C7
−3.37000758e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L513










K
 0.0000



C1
 1.39567662e−008



C2
−2.05760928e−013



C3
−1.29919990e−017



C4
 1.00302455e−021



C5
−5.58828742e−026



C6
 1.79594589e−030



C7
−2.49374487e−035



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L516










K
 0.0000



C1
−1.82058286e−008



C2
−4.87410470e−012



C3
−5.89919068e−017



C4
−4.04061992e−021



C5
−6.60202054e−025



C6
 9.31855676e−029



C7
−7.48573635e−033



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L522










K
−0.0071



C1
 1.64455895e−010



C2
−7.76483415e−015



C3
 8.29256873e−021



C4
−5.46990406e−025



C5
 3.42070772e−028



C6
−8.24545949e−033



C7
 2.57783363e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L524










K
 0.0000



C1
 1.18780021e−010



C2
−1.18823445e−014



C3
−1.80162246e−019



C4
 4.08343213e−023



C5
−1.42735407e−027



C6
 2.34804331e−032



C7
−3.79018523e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L525










K
 0.0000



C1
−2.15560895e−010



C2
 2.44929281e−014



C3
 1.12359306e−018



C4
−1.29749910e−023



C5
−1.00106399e−027



C6
 1.88165471e−032



C7
−2.01557723e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L528










K
 0.0000



C1
 2.73896476e−008



C2
 6.17281255e−013



C3
−1.75474902e−016



C4
 1.56329449e−020



C5
−8.82259694e−025



C6
 2.92948124e−029



C7
−4.01055770e−034



C8
 0.00000000e+000



C9
 0.00000000e+000






















TABLE 6







M1587a



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 157.629 nm
DIAMETER





0
infinite
27.171475840
N2
1.00031429
46.200



infinite
0.602670797
N2
1.00031429
52.673


L601
900.198243311AS
15.151284556
CaF2
1.55929035
53.454



−235.121108435
9.531971079
N2
1.00031429
54.049


L602
−167.185917779
8.294716452
CaF2
1.55929035
54.178



−132.673519510
14.020355779
N2
1.00031429
54.901


L603
−333.194588652
9.893809820
CaF2
1.55929035
53.988



−155.450516203
15.930502944
N2
1.00031429
54.132


L604
−73.572316296
7.641977580
CaF2
1.55929035
53.748



−68.248613899AS
2.881720302
N2
1.00031429
55.167


L605
−86.993585564AS
5.094651720
CaF2
1.55929035
52.580



−238.150965327
5.379130780
N2
1.00031429
53.729


L606
−165.613920870
5.094651720
CaF2
1.55929035
53.730



153.417884485
34.150169591
N2
1.00031429
56.762


L607
−92.061009990
5.094651720
CaF2
1.55929035
58.081



8491.086261873AS
19.673523795
N2
1.00031429
74.689


L608
−407.131300451
30.380807138
CaF2
1.55929035
87.291



−140.620317156
0.761662684
N2
1.00031429
91.858


L609
−4831.804853654AS
50.269660218
CaF2
1.55929035
117.436



−192.197373609
1.688916911
N2
1.00031429
121.408


L610
−367.718684892
21.227715500
CaF2
1.55929035
127.704



−233.628547894
2.224071019
N2
1.00031429
129.305


L611
709.585855080
28.736922725
CaF2
1.55929035
137.016



1238.859445357
9.120684720
N2
1.00031429
137.428


L612
1205.457051945
49.281218258
CaF2
1.55929035
138.288



−285.321880705
1.625271224
N2
1.00031429
138.379


L613
137.549591710
56.718543740
CaF2
1.55929035
108.652



−4380.301012978AS
0.623523902
N2
1.00031429
106.138


L614
2663.880214408
6.792868960
CaF2
1.55929035
103.602



149.184979730
15.779049257
N2
1.00031429
84.589


L615
281.093108064
6.792868960
CaF2
1.55929035
83.373



184.030288413
32.341552355
N2
1.00031429
77.968


L616
−222.157416308
5.094651720
CaF2
1.55929035
77.463



101.254238115AS
56.792834221
N2
1.00031429
71.826


L617
−106.980638018
5.094651720
CaF2
1.55929035
72.237



1612.305471130
20.581065398
N2
1.00031429
89.760


L618
−415.596135628
26.398111993
CaF2
1.55929035
96.803



−204.680044631
0.713343960
N2
1.00031429
103.409


L619
−646.696622394
25.867340760
CaF2
1.55929035
116.636



−231.917626896
0.766268682
N2
1.00031429
118.569


L620
−790.657607677
23.400482872
CaF2
1.55929035
128.806



−294.872053725
0.721402031
N2
1.00031429
130.074


L621
786.625567756
40.932308205
CaF2
1.55929035
141.705



−431.247283013
12.736629300
N2
1.00031429
142.089



infinite
−8.491086200
N2
1.00031429
134.586


L622
295.022653593AS
20.185109438
CaF2
1.55929035
139.341



449.912291916
0.619840486
N2
1.00031429
137.916


L623
358.934076212
48.662890509
CaF2
1.55929035
136.936



−622.662988878
30.955714157
N2
1.00031429
135.288


L624
−224.404889753
12.736629300
CaF2
1.55929035
134.760



−251.154571510AS
16.079850229
N2
1.00031429
134.853


L625
−193.582989843AS
16.510083506
CaF2
1.55929035
134.101



−198.077570749
0.880353872
N2
1.00031429
136.109


L626
206.241795157
19.927993542
CaF2
1.55929035
101.240



338.140581666
0.925956949
N2
1.00031429
97.594


L627
111.017549581
24.580089962
CaF2
1.55929035
85.023



169.576109839
0.777849447
N2
1.00031429
81.164


L628
117.982165264
31.161065630
CaF2
1.55929035
75.464



921.219058213AS
6.934980174
N2
1.00031429
69.501


L629
infinite
22.260797322
CaF2
1.55929035
63.637



infinite
4.245543100
N2
1.00031429
48.606


L630
infinite
21.227715500
CaF2
1.55929035
41.032



infinite
8.491086200
N2
1.00031429
26.698



infinite
0.000000000

1.00000000
11.550







Wavelength and refractive index are given referred to Vacuum.










ASPHERIC CONSTANTS





Asphere of Lens L601










K
 0.0000



C1
 1.28594437e−007



C2
 8.50731836e−013



C3
 1.16375620e−016



C4
 2.28674275e−019



C5
−1.23202729e−022



C6
 3.32056239e−026



C7
−4.28323389e−030



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L604










K
−1.3312



C1
−4.03355456e−007



C2
 2.25776586e−011



C3
−2.19259878e−014



C4
 4.32573397e−018



C5
−7.92477159e−022



C6
 7.57618874e−026



C7
−7.14962797e−030



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L605










K
−1.1417



C1
 1.33637337e−007



C2
 1.56787758e−011



C3
−1.64362484e−014



C4
 3.59793786e−018



C5
−5.11312568e−022



C6
 1.70636633e−026



C7
 1.82384731e−030



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L607










K
0.0000



C1
 1.34745120e−007



C2
−2.19807543e−011



C3
 1.20275881e−015



C4
 4.39597377e−020



C5
−2.37132819e−023



C6
 2.87510939e−027



C7
−1.42065162e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L609










K
0.0000



C1
 6.85760526e−009



C2
−4.84524868e−013



C3
−6.28751350e−018



C4
−3.72607209e−022



C5
 3.25276841e−026



C6
−4.05509974e−033



C7
−3.98843079e−035



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L613










K
0.0000



C1
 2.24737416e−008



C2
−4.45043770e−013



C3
−4.10272049e−017



C4
 4.31632628e−021



C5
−3.27538237e−025



C6
 1.44053025e−029



C7
−2.76858490e−034



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L616










K
0.0000



C1
−2.83553693e−008



C2
−1.12122261e−011



C3
−2.05192812e−016



C4
−1.55525080e−020



C5
−4.77093112e−024



C6
 8.39331135e−028



C7
−8.97313681e−032



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L622










K
0.0421



C1
 7.07310826e−010



C2
−2.00157185e−014



C3
−9.33825109e−020



C4
 1.27125854e−024



C5
 1.94008709e−027



C6
−6.11989858e−032



C7
 2.92367322e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L624










K
0.0000



C1
 3.02835805e−010



C2
−2.40484062e−014



C3
−3.22339189e−019



C4
 1.64516979e−022



C5
−8.51268614e−027



C6
 2.09276792e−031



C7
−4.74605669e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L625










K
0.0000



C1
−3.99248993e−010



C2
 5.79276562e−014



C3
 3.53241478e−018



C4
−4.57872308e−023



C5
−6.29695208e−027



C6
 1.57844931e−031



C7
−2.19266130e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L628










K
 0.0000



C1
 4.40737732e−008



C2
 1.52385268e−012



C3
−5.44510329e−016



C4
 6.32549789e−020



C5
−4.58358203e−024



C6
 1.92230388e−028



C7
−3.11311258e−033



C8
 0.00000000e+000



C9
 0.00000000e+000






















TABLE 7







M1630a



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 193.304 nm
DIAMETER





0
infinite
32.989007360
L710
0.99998200
56.080



infinite
2.050119724
L710
0.99998200
63.700


L701
1292.577885893AS
17.083079028
SIO2
1.56028895
64.846



−320.912994055
6.356545111
HE
0.99971200
65.549


L702
−222.076099367
9.996105426
SIO2
1.56028895
65.651



−173.186007383
14.918724377
HE
0.99971200
66.515


L703
−465.289541055
12.849128877
SIO2
1.56028895
65.892



−190.575077708
24.825544140
HE
0.99971200
66.089


L704
−88.003869940
9.278158320
SIO2
1.56028895
64.773



−80.342454766AS
3.110021891
HE
0.99971200
66.529


L705
−104.692897461AS
6.185438880
SIO2
1.56028895
63.593



687.929853355
8.052826671
HE
0.99971200
65.986


L706
−4211.039282601
6.185438880
SIO2
1.56028895
66.833



191.063416206
42.178241931
HE
0.99971200
69.389


L707
−115.620656932
6.185438880
SIO2
1.56028895
71.596



10919.608812170AS
23.544585745
HE
0.99971200
91.649


L708
−462.245785462
36.857934334
SIO2
1.56028895
105.419



−166.710127403
0.922637637
HE
0.99971200
110.921


L709
−2362.175430424AS
61.803635845
SIO2
1.56028895
140.744



−209.701792909
1.020714627
HE
0.99971200
144.651


L710
−389.602200799
25.772662000
SIO2
1.56028895
151.693



−307.008965979
0.721634536
HE
0.99971200
156.014


L711
629.229001456
46.511934207
SIO2
1.56028895
167.044



−859.369679090
24.151857437
HE
0.99971200
167.077


L712
−877.205712077
30.754166393
SIO2
1.56028895
164.429



−357.572652646
4.953800031
HE
0.99971200
164.440


L713
168.111512940
68.382989629
SIO2
1.56028895
129.450



infinite
0.000000000
HE
0.99971200
125.021


L714
infinite
8.247251840
SIO2
1.56028895
125.021



149.672876100AS
23.428435757
HE
0.99971200
98.364


L715
167.316121704
0.000000000
SIO2
1.56028895
92.117



167.316121704
46.368104843
HE
0.99971200
92.117


L716
−276.014955570
6.185438880
SIO2
1.56028895
90.583



122.032488640AS
68.057116286
HE
0.99971200
84.260


L717
−131.026926440
6.185438880
SIO2
1.56028895
85.665



1443.442379280
24.936997937
HE
0.99971200
105.177


L718
−570.720178737
31.985422479
SIO2
1.56028895
114.725



−251.966065824
0.742435413
HE
0.99971200
122.318


L719
−792.022948046
31.395737994
SIO2
1.56028895
136.726



−284.699402375
0.732480789
HE
0.99971200
139.887


L720
−1399.942577177
28.528105133
SIO2
1.56028895
152.678



−405.074653331
0.721634536
HE
0.99971200
154.617


L721
969.181518515
52.876050649
SIO2
1.56028895
166.429



−498.113891823
15.463597200
HE
0.99971200
167.335



infinite
−10.309064800
HE
0.99971200
163.661


L722
369.912797108AS
22.457291722
SIO2
1.56028895
164.702



546.240476474
0.759815621
HE
0.99971200
163.421


L723
435.783427872
59.712335014
SIO2
1.56028895
163.043



−757.138748183
38.604277894
HE
0.99971200
161.173


L724
−268.662949002
15.463597200
SIO2
1.56028895
159.696



−299.983850179AS
20.130367113
HE
0.99971200
160.684


L725
−232.880394011AS
19.892839003
SIO2
1.56028895
159.263



−238.077482924
0.721634536
HE
0.99971200
162.099


L726
238.488298578
23.631362631
SIO2
1.56028895
127.621



378.766536032
0.721634536
HE
0.99971200
124.291


L727
136.105324171
29.608483074
SIO2
1.56028895
108.001



205.107042559
0.785819222
HE
0.99971200
104.429


L728
143.303538802
37.757018324
SIO2
1.56028895
96.584



1247.979376087AS
8.449273703
HE
0.99971200
91.946


L729
infinite
26.717587971
CaF2
1.50143563
85.145



infinite
5.154532400
L710
0.99998200
65.152


L730
infinite
25.772662000
CaF2
1.50143563
54.537



infinite
10.309064800
L710
0.99998200
35.251


L731
infinite
0.000000000


14.020







L710 = Air at 710 Torr










ASPHERIC CONSTANTS





Asphere of Lens L701










K
 0.0000



C1
 6.70377274e−008



C2
 6.84099199e−013



C3
 1.05733405e−016



C4
 3.37349453e−020



C5
−7.15705547e−024



C6
 5.09786203e−028



C7
−6.46970874e−033



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L704










K
−1.3610



C1
−2.19369509e−007



C2
 7.67800088e−012



C3
−6.07796875e−015



C4
 7.90645856e−019



C5
−9.11112500e−023



C6
 5.68885354e−027



C7
−4.26463481e−031



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L705










K
−1.2060



C1
 8.09444891e−008



C2
 4.80824558e−012



C3
−4.20373603e−015



C4
 5.60648644e−019



C5
−4.51520330e−023



C6
 1.54505188e−027



C7
 5.00741161e−032



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L707










K
0.0000



C1
 7.63455153e−008



C2
−8.56292259e−012



C3
 3.01669569e−016



C4
 9.61573017e−021



C5
−2.67588216e−024



C6
 2.05728418e−028



C7
−6.45595651e−033



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L709










K
 0.0000



C1
 3.23214391e−009



C2
−1.67326019e−013



C3
−4.26702152e−019



C4
−5.66712884e−023



C5
−1.24256704e−028



C6
 1.64124726e−031



C7
−4.41379927e−036



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L714










K
0.0000



C1
−1.63753926e−009



C2
 2.54837542e−013



C3
 8.79430055e−018



C4
 9.19127213e−022



C5
−7.01950932e−026



C6
 1.17918461e−029



C7
−8.74308763e−034



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L716










K
0.0000



C1
−1.54725313e−008



C2
−4.26275476e−012



C3
−1.01484275e−016



C4
 8.37843426e−022



C5
−1.29202167e−024



C6
 1.71820044e−028



C7
−1.05335330e−032



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L722










K
−0.0331



C1
 2.56540619e−011



C2
−6.98183157e−015



C3
 7.92101859e−021



C4
−5.85807569e−025



C5
 2.42288782e−028



C6
−5.79467899e−033



C7
 1.63689132e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L724










K
 0.0000



C1
 8.90820785e−011



C2
−1.06772804e−014



C3
−1.68281363e−019



C4
 3.04828021e−023



C5
−1.01185483e−027



C6
 1.61617917e−032



C7
−2.40582729e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L725










K
0.0000



C1
−1.97757640e−010



C2
 2.05110497e−014



C3
 8.96864099e−019



C4
−9.85543257e−024



C5
−7.12993590e−028



C6
 1.30146671e−032



C7
−1.36102788e−037



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L728










K
 0.0000



C1
 2.55097376e−008



C2
 5.47467657e−013



C3
−1.43568713e−016



C4
 1.17677649e−020



C5
−5.95320448e−025



C6
 1.71763367e−029



C7
−1.94556007e−034



C8
 0.00000000e+000



C9
 0.00000000e+000






















TABLE 8







L61



REFRACTIVE INDEX
1⁄2 FREE


LENSES
RADII
THICKNESSES
GLASSES
AT 157.13 nm
DIAMETER





0
infinite
34.000000000

1.00000000
82.150



infinite
0.100000000

1.00000000
87.654


L801
276.724757380
40.000000000
CaF2
1.55970990
90.112



1413.944109416AS
95.000000000

1.00000000
89.442


SP1
infinite
11.000000000

1.00000000
90.034



infinite
433.237005445

1.00000000
90.104


L802
−195.924336384
17.295305525
CaF2
1.55970990
92.746



−467.658808527
40.841112468

1.00000000
98.732


L803
−241.385736441
15.977235467
CaF2
1.55970990
105.512



−857.211727400AS
21.649331094

1.00000000
118.786


SP2
infinite
0.000010000

1.00000000
139.325



253.074839896
21.649331094

1.00000000
119.350


L803′
857.211727400AS
15.977235467
CaF2
1.55970990
118.986



241.385736441
40.841112468

1.00000000
108.546


L802′
467.658808527
17.295305525
CaF2
1.55970990
102.615



195.924336384
419.981357165

1.00000000
95.689


SP3
infinite
6.255658280

1.00000000
76.370



infinite
42.609155219

1.00000000
76.064


Z1
infinite
67.449547115

1.00000000
73.981


L804
432.544479547
37.784311058
CaF2
1.55970990
90.274



−522.188532471
113.756133662

1.00000000
92.507


L805
−263.167605725
33.768525968
CaF2
1.55970990
100.053



−291.940616829AS
14.536591424

1.00000000
106.516


L806
589.642961222AS
20.449887046
CaF2
1.55970990
110.482



−5539.698828792
443.944079795

1.00000000
110.523


L807
221.780582003
9.000000000
CaF2
1.55970990
108.311



153.071443064
22.790060084

1.00000000
104.062


L808
309.446967518
38.542735318
CaF2
1.55970990
104.062



−2660.227900099
0.100022286

1.00000000
104.098


L809
23655.354584194
12.899131182
CaF2
1.55970990
104.054



−1473.189213176
9.318886362

1.00000000
103.931


L810
−652.136459374
16.359499814
CaF2
1.55970990
103.644



−446.489459129
0.100000000

1.00000000
103.877


L811
174.593507050
25.900313780
CaF2
1.55970990
99.267



392.239615259AS
14.064505431

1.00000000
96.610



infinite
2.045119392

1.00000000
96.552


L812
7497.306838492
16.759051656
CaF2
1.55970990
96.383



318.210831711
8.891640764

1.00000000
94.998


L813
428.724465129
41.295806263
CaF2
1.55970990
95.548



3290.097860119AS
7.377912006

1.00000000
95.040


L814
721.012739719
33.927118706
CaF2
1.55970990
95.443



−272.650872353
6.871397517

1.00000000
95.207


L815
131.257556743
38.826450065
CaF2
1.55970990
81.345



632.112566477AS
4.409527396

1.00000000
74.847


L816
342.127616157AS
37.346293509
CaF2
1.55970990
70.394



449.261078744
4.859754445

1.00000000
54.895


L817
144.034814702
34.792179308
CaF2
1.55970990
48.040



−751.263321098AS
11.999872684

1.00000000
33.475


0′
infinite
0.000127776

1.00000000
16.430










ASPHERIC CONSTANTS





Asphere of Lens L801










K
0.0000



C1
 4.90231706e−009



C2
 3.08634889e−014



C3
−9.53005325e−019



C4
−6.06316417e−024



C5
 6.11462814e−028



C6
−8.64346302e−032



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L803










K
 0.0000



C1
−5.33460884e−009



C2
 9.73867225e−014



C3
−3.28422058e−018



C4
 1.50550421e−022



C5
 0.00000000e+000



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L803′










K
 0.0000



C1
 5.33460884e−009



C2
−9.73867225e−014



C3
 3.28422058e−018



C4
−1.50550421e−022



C5
 0.00000000e+000



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L805










K
 0.0000



C1
 2.42569449e−009



C2
 3.96137865e−014



C3
−2.47855149e−018



C4
 7.95092779e−023



C5
 0.00000000e+000



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L806










K
 0.0000



C1
−6.74111232e−009



C2
−2.57289693e−014



C3
−2.81309020e−018



C4
 6.70057831e−023



C5
 5.06272344e−028



C6
−4.81282974e−032



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L811










K
 0.0000



C1
 2.28889624e−008



C2
−1.88390559e−014



C3
 2.86010656e−017



C4
−3.18575336e−021



C5
 1.45886017e−025



C6
−1.08492931e−029



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L813










K
 0.0000



C1
 3.40212872e−008



C2
−1.08008877e−012



C3
 4.33814531e−017



C4
−7.40125614e−021



C5
 5.66856812e−025



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L815










K
 0.0000



C1
−3.15395039e−008



C2
 4.30010133e−012



C3
 3.11663337e−016



C4
−3.64089769e−020



C5
 1.06073268e−024



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L816










K
 0.0000



C1
−2.16574623e−008



C2
−6.67182801e−013



C3
 4.46519932e−016



C4
−3.71571535e−020



C5
 0.00000000e+000



C6
 0.00000000e+000



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000







Asphere of Lens L817










K
 0.0000



C1
 2.15121397e−008



C2
−1.65301726e−011



C3
−5.03883747e−015



C4
 1.03441815e−017



C5
−6.29122773e−021



C6
 1.44097714e−024



C7
 0.00000000e+000



C8
 0.00000000e+000



C9
 0.00000000e+000

## Claims

1. A microlithographic projection objective defining a maximum lens diameter and comprising:
a plurality of lenses defining lens surfaces and defining an object plane and an image plane;
at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere;
said double asphere being mounted from said image plane at a distance of at least said maximum lens diameter; and,
at least two additional ones of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a second double asphere and the mutually adjacent lens surfaces of each double asphere being mounted at a spacing from each other of at most their mean half lens diameter measured from the optical axis.

2. The projection objective of claim 1, wherein the mutually adjacent aspheric lens surfaces of each of said double aspheres define an air gap measured on the optical axis of a maximum of 20% of the mean radius of the corresponding asphere.

3. The projection objective of claim 1, wherein a numerical aperture of said projection objective is at least 0.8.

4. The projection objective of claim 1, wherein a numerical aperture of said projection objective is at least 0.9.

5. The projection objective of claim 1, wherein two mutually adjacent lens surfaces define an intermediate space chargeable with a fluid.

6. The projection objective of claim 1, wherein at least 40% of the lenses are spherical.

7. The projection objective of claim 1, wherein at least 60% of the lenses are spherical.

8. A projection objective defining a maximum lens diameter and comprising:
a plurality of lenses defining lens surfaces and defining an object plane and an image plane;
at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere;
said double asphere being mounted from said image plane at a distance of at least said maximum lens diameter; and,
said projection objective having a numerical aperture of at least 0.83.

9. The projection objective of claim 8, wherein said numerical aperture of said projection objective is at least 0.9.

10. The projection objective of claim 8, wherein two mutually adjacent lens surfaces define an intermediate space chargeable with a fluid.

11. The projection objective of claim 8, wherein at least 40% of the lenses are spherical.

12. The projection objective of claim 8, wherein at least 60% of the lenses are spherical.

13. A microlithographic projection objective defining a maximum lens diameter and comprising:
a plurality of lenses defining lens surfaces and defining an object plane and an image plane;
at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere:
the lens surfaces of said double asphere defining radii of the same sign; and,
at least two additional ones of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a second double asphere and the mutually adjacent lens surfaces of each double asphere being mounted at a spacing from each other of at most their mean half lens diameter measured from the optical axis.

14. The microlithographic projection objective of claim 13, wherein the mutually adjacent aspheric lens surfaces of each of said double aspheres define an air gap measured on the optical axis of a maximum of 20% of the mean radius of the corresponding asphere.

15. A microlithographic projection objective defining a maximum lens diameter and comprising:
a plurality of lenses defining lens surfaces and defining an object plane and an image plane;
at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere;
the lens surfaces of said double asphere defining radii of the same sign; and,
a numerical aperture of said microlithographic projection objective being at least 0.8.

16. The microlithographic projection objective of claim 15, wherein a numerical aperture of said microlithographic projection objective is at least 0.9.

17. The microlithographic projection objective of claim 15, wherein at least 40% of the lenses are spherical.

18. The microlithographic projection objective of claim 15, wherein at least 60% of the lenses are spherical.

19. A microlithographic projection objective defining a maximum lens diameter and comprising:
a plurality of lenses defining lens surfaces and defining an object plane and an image plane;
at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere;
the lens surfaces of said double asphere defining radii of the same sign; and,
two mutually adjacent lens surfaces defining an intermediate space chargeable with a fluid.