# Patent

## Title
Monolithic system and method for enhanced Raman spectroscopy

## Abstract

Devices, systems, and methods for enhancing Raman spectroscopy and hyper-Raman are disclosed. A molecular analysis device for performing Raman spectroscopy comprises a substrate and a laser source disposed on the substrate. The laser source may be configured for emanating a laser radiation, which may irradiate an analyte disposed on a Raman enhancement structure. The Raman enhancement structure may be disposed in a waveguide. The molecular analysis device also includes a wavelength demultiplexer and radiation sensors disposed on the substrate and configured for receiving a Raman scattered radiation, which may be generated by the irradiation of the analyte and Raman enhancement structure.

## Background
CROSS REFERENCE TO RELATED APPLICATIONS
The present application is related to concurrently filed U.S. patent application Ser. No. 11/044,676 entitled INTEGRATED MODULAR SYSTEM AND METHOD FOR ENHANCED RAMAN SPECTROSCOPY, and concurrently filed U.S. patent application Ser. No. 11/044,781 entitled INTEGRATED SYSTEM AND METHOD FOR TRANSVERSAL ENHANCED RAMAN SPECTROSCOPY.
FIELD OF THE INVENTION
The present invention relates to chemical analysis using Raman spectroscopy. More particularly, the present invention relates to integrated systems for enhancement of Raman spectroscopy combining a radiation source and Raman scattered radiation sensing. In addition, the present invention relates to hyper-Raman, where the excitation wavelength is approximately an integer multiple of the Raman wavelength.
BACKGROUND OF THE INVENTION
Raman Spectroscopy is a well-known spectroscopic technique for performing chemical analysis in the gas, liquid or solid phase. In conventional Raman Spectroscopy, high intensity monochromatic light from a light source, such as a laser, is directed onto an analyte to be chemically analyzed. The analyte may contain a single species of molecules or mixtures of different molecules. Furthermore, Raman Spectroscopy may be performed on a number of different molecular configurations, such as organic and inorganic molecules in crystalline or amorphous states.
For a system that does not have surface or nanostructure enhancement, the majority of the incident photons of the light are elastically scattered by the analyte molecule. In other words, the scattered photons have the same frequency, and thus the same energy, as the photons that were incident on the analyte. This is known as Rayleigh scattering. However, a small fraction of the photons (i.e., 1 in 107 photons) are inelastically scattered by the un-enhanced analyte molecule at a different optical frequency than the incident photons. The inelastically scattered photons are termed the “Raman scattered radiation” and may be scattered at frequencies greater than, but most are usually scattered at a frequency lower than, the frequency of the incident photons. When the incident photons collide with the molecules and give up some of their energy, the Raman scattered photons emerge with a lower energy and thus at a lower frequency. The lower energy Raman scattered photons are commonly referred to in Raman spectroscopy as the “Stokes radiation.” A small fraction of the molecules are already in an energetically excited state and when the incident photons collide with the molecules, the Raman scattered photons emerge at a higher energy and thus at a higher frequency. The higher energy Raman scattered photons are commonly referred to in Raman spectroscopy as the “anti-Stokes radiation.” Raman scattering can occur from the rotational, vibrational, or electronic states of the molecules.
The Stokes and the anti-Stokes Raman scattered photons are collected using optics, the different frequencies are dispersed spatially with some type of spectrometer, and the photons are registered by a detector, such as a photomultiplier, resulting in a spectral graph of intensity at a corresponding frequency (i.e., proportional to energy) for the Raman scattered photons. By plotting the intensity of the inelastically scattered Raman photons against frequency, a unique Raman spectrum, which corresponds to the particular analyte molecules, is obtained. This Raman spectrum may be used to identify chemical species, as well as other physical properties of the analyte. While conventional Raman Spectroscopy is suitable for bulk chemical analysis, it is not effective for surface studies because the signal from the bulk Raman scattered photons overwhelms any signal from Raman scattered photons near the surface.
In hyper-Raman spectroscopy, when excitation radiation impinges on an analyte molecule, a very small number of photons may be scattered at frequencies corresponding to the higher order harmonics of the excitation radiation, such as the second and third harmonics (i.e., twice or three times the frequency of the excitation radiation). Some of these photons may be Raman scattered photons with a frequency that is Raman-shifted relative to the frequencies corresponding to the higher order harmonics of the excitation radiation. Therefore, in hyper-Raman spectroscopy, the incident excitation photons have approximately 1⁄2, 1⁄3, or 1⁄4 the frequency of the Raman photons.
Due to the deficiencies with performing surface studies using conventional Raman Spectroscopy, another Raman Spectroscopy technique called Surface Enhanced Raman Spectroscopy (SERS), which is effective for performing surface studies, has been developed. In SERS, a monolayer or sub-monolayer amount of the molecules to be analyzed is adsorbed onto a specially roughened metal surface. Typically, the metal surface is made from gold, silver, copper, lithium, sodium, or potassium. Raman Spectroscopy has also been used employing metallic nanoparticles or nanowires for the metal surface, as opposed to a roughened metallic surface, which is hereinafter referred to as Nano-Enhanced Raman Spectroscopy (NERS). The intensity of the Raman scattered photons from a collection of molecules adsorbed on such a surface is typically about 104–106 greater than conventional Raman Spectroscopy from a similar number of molecules in a bulk specimen, and can be as high as 108–1014 for a single molecule adsorbed near two or more metal nanoparticles. Although not thoroughly understood, the selectivity of the surface Raman signal results from the presence of surface enhancement mechanisms and is mainly attributed to two primary mechanisms: electromagnetic enhancement and chemical enhancement, with the electromagnetic enhancement being the dominant mechanism. The enhanced electromagnetic field is highly dependent on the surface roughness features of the enhancement surface. The chemical enhancement is believed to be dependent on the altered electronic structure of the enhancement surface due to adsorption of the analyte. The enhanced electromagnetic field of the enhancement surface, which is adjacent to the analyte, irradiates the analyte, producing an enhanced Raman signal having a strength that is, in part, proportional to the square of the enhanced electromagnetic field. Thus, Raman spectroscopy may be used to study monolayers of materials adsorbed on metals, and even single molecules adsorbed near an appropriate metal nanostructure (i.e., NERS).
In a conventional SERS system, a spectrometer collects all radiation, including the Stokes radiation, anti-Stokes radiation, and the elastically scattered radiation, and provides a spectrum of the scattered radiation. The spectrum may then be used to identify the chemical species, as well as other physical properties, of the analyte. Conventionally, the spectrometer may include various optical elements such as lenses, gratings, photomultipliers, and filters. While this arrangement may be flexible, it is often bulky, expensive, and requires significant user interaction to analyze a chemical species.
An integrated monolithic Raman spectroscopy analysis system, which integrates a laser light source and a scattered radiation dispersing and detection element, may be a smaller and less costly system. This integrated Raman spectroscopy analysis system may be easier to use and may be adaptable to detection of a predetermined set of molecules. In addition, a monolithic Raman spectroscopy analysis system may integrate the Raman scattering enhancement structure (surface or nanostructure), creating a self-contained integrated Raman spectroscopy analysis system.
BRIEF SUMMARY OF THE INVENTION
The present invention, in a number of embodiments, includes devices for generating Raman scattered radiation, Surface Enhanced Raman Spectroscopy (SERS) systems, Nano-Enhanced Raman Spectroscopy (NERS) systems (NERS), and methods of performing SERS and NERS.
In one aspect of the present invention, a molecular analysis device comprises a substrate and a laser source disposed on the substrate and configured to generate laser radiation. The molecular analysis device also includes a waveguide disposed on the substrate and configured for substantially containing the laser radiation. The waveguide includes an opening formed in a first surface of the waveguide. A Raman enhancement structure may be disposed in the opening of the waveguide and configured to generate a Raman scattered radiation when the laser source irradiates an analyte disposed on the Raman enhancement structure. The molecular analysis device also includes a wavelength demultiplexer disposed on the substrate and configured for dispersing the Raman scattered radiation into at least two unique wavelengths. At least two radiation sensors disposed on the substrate are configured for sensing one of the at least two unique wavelengths.
Another embodiment of the present invention comprises a molecular analysis device. The molecular analysis device includes a substrate, a laser source disposed on the substrate and configured to generate a laser radiation, and a chirped photonic crystal. The chirped photonic crystal comprises a root waveguide configured for receiving and guiding the laser radiation and configured for guiding a Raman scattered radiation. A Raman enhancement structure may be disposed in an opening of the root waveguide and configured to generate the Raman scattered radiation when the laser source irradiates an analyte disposed on the Raman enhancement structure. The chirped photonic crystal also includes at least two wavelength-specific waveguides, each wavelength-specific waveguide disposed at a position along a chirped axis correlated with one of at least two unique wavelengths, and wherein each wavelength-specific waveguide is configured for guiding one of the at least two unique wavelengths. The molecular analysis device also includes at least two radiation sensors disposed on the substrate are configured for sensing one of the at least two unique wavelengths.
Another embodiment of the present invention includes a method for performing Raman spectroscopy. The method of performing Raman spectroscopy comprises generating a laser radiation from a laser source disposed on a substrate, confining the laser radiation in a waveguide disposed on the substrate, and disposing an analyte over at least a portion of a Raman enhancement structure disposed in an opening in the waveguide. The method further includes irradiating the analyte and the Raman enhancement structure with the laser radiation to generate a Raman scattered radiation, dispersing the Raman scattered radiation into at least two unique wavelengths, and sensing the at least two unique wavelengths with at least two radiation sensors disposed on the substrate.
Another embodiment of the present invention includes a method for performing Raman spectroscopy. The method of performing Raman spectroscopy comprises generating a laser radiation from a laser source disposed on a substrate, confining the laser radiation in a root waveguide formed in a chirped photonic crystal, and disposing an analyte over at least a portion of a Raman enhancement structure disposed in an opening in the root waveguide. The method further includes irradiating the analyte and the Raman enhancement structure with the laser radiation to generate a Raman scattered radiation, dispersing the Raman scattered radiation into at least two unique wavelengths, and sensing the at least two unique wavelengths with at least two radiation sensors disposed on the substrate.



BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
While the specification concludes with claims particularly pointing out and distinctly claiming that which is regarded as the present invention, the advantages of this invention can be more readily ascertained from the following description of the invention when read in conjunction with the accompanying drawings in which:
FIG. 1A is a top view of an exemplary molecular analysis device including a Raman enhancement structure disposed in an opening of a waveguide;
FIG. 1B is a side view of the exemplary molecular analysis device of FIG. 1A;
FIG. 2 is a top view of an exemplary wavelength demultiplexer employing an arrayed waveguide grating; and
FIG. 3 is a top view of an exemplary wavelength demultiplexer employing a chirped photonic crystal; and
FIG. 4 is a top view of another exemplary molecular analysis device including a Raman enhancement structure disposed in an opening of a waveguide, wherein the waveguide is formed in a chirped photonic crystal.



DETAILED DESCRIPTION OF THE INVENTION
The present invention, in a number of embodiments, includes structures and devices for use in Surface Enhanced Raman Spectroscopy (SERS) systems, Nano-Enhanced Raman Spectroscopy (NERS) systems and methods of performing SERS and NERS. Systems that may incorporate SERS and NERS techniques are generally referred to herein as employing Enhanced Raman Spectroscopy (ERS). As shown in the figures and described in further detail below, molecular analysis structures and molecular analysis devices of the present invention incorporate a laser source, a waveguide, a wavelength demultiplexer, and at least two radiation sensors integrated onto a substrate. A Raman enhancement structure may be disposed in an opening in the waveguide, where the Raman enhancement structure and an analyte disposed on the Raman enhancement structure may be exposed to laser radiation from the laser source. In addition, the sensitivity of Raman spectroscopy systems of the present invention may be enhanced by the type of surface on the Raman enhancement structure to enable more accurate and sensitive detection of chemical species and other physical properties of the sample being analyzed, including single molecule detection. Furthermore, the Raman spectroscopy systems of the present invention may be employed as an analytical instrument for detecting specific chemicals.
FIGS. 1A and 1B illustrate an exemplary embodiment of a molecular analysis device 100 employing ERS. The molecular analysis device 100 includes the substrate 110, the laser source 120 disposed on the substrate 110, the waveguide 130 disposed on the substrate 110, the wavelength demultiplexer 240 disposed on the substrate 110, and at least two radiation sensors 290 disposed on the substrate 110.
This embodiment of FIGS. 1A and 1B may be used as a self-contained ERS analysis system. A Raman enhancement structure 300 may be disposed in an opening 138 of the waveguide 130, an analyte 310 may then be disposed on the Raman enhancement structure 300. In operation, the laser source 120 emits a laser radiation 125 to irradiate the analyte 310 on the Raman enhancement structure 300. The combined irradiation of the Raman enhancement structure 300 and the analyte 310 may generate Raman scattered radiation 160. The Raman scattered radiation 160 may be detected as a variety of wavelengths by the radiation sensors 290, as explained more fully below.
The waveguide 130 may be configured for containing the laser radiation 125 emanating from the laser source 120 and the Raman scattered radiation 160 emanating from the analyte 310 on the Raman enhancement structure 300. The waveguide 130 may be formed to include a resonant cavity 134 formed between a first reflector 132 and a second reflector 136. In addition, if the resonant cavity 134, second reflector 136, and first reflector 132 are configured for a specific wavelength, the waveguide 130 may also amplify the laser radiation 125 substantially near that specific wavelength. An opening 138 may be formed through the first reflector 132 (also referred to as a first surface) such that the Raman enhancement structure 300 may be disposed within the resonant cavity 134 and on a surface of the second reflector 136 as shown in FIG. 1A.
The first reflector 132 and second reflector 136 may be structures, such as, for example, distributed Bragg reflectors (also referred to as Bragg Mirrors) or distributed Bragg gratings. Bragg reflectors may be formed in a number of ways using a variety of materials configured as alternating layers; one layer with a low refractive index and the other layer with a high refractive index. Each layer is configured with a thickness of about one quarter of an odd multiple of the specific wavelength to be confined by the waveguide 130. For example, the layers may be configured with a thickness of 1⁄4 of a wavelength or 3⁄4 of a wavelength. The resulting Bragg reflector may also be referred to as a quarter-wave stack. As an example, a Bragg reflector may be formed from alternating layers of GaAs (gallium arsenide) and AlGaAs (aluminum gallium arsenide). Another suitable material combination for forming Bragg reflectors is alternating layers formed respectively from silicon and silicon dioxide. Implementing a larger number of alternating pairs in a Bragg reflector results in a higher refractive index. About thirty layers may create a reflectivity as high as 99.99%.
The Raman enhancement structure 300 disposed in the opening 138 may be used to effect the electromagnetic enhancement of the Raman signal, chemical enhancement of the Raman signal, or both. The Raman enhancement structure 300 may be associated with the second reflector 136 by chemically bonding or merely disposing the same on the second reflector 136, followed by weak bonding thereto or, alternatively, no bonding at all.
As used herein, the term “Raman enhancement structure” means any structure configured and formed of a material that may produce chemical enhancement of the Raman signal, electromagnetic enhancement of the Raman signal, or both. Exemplary materials for formation of the Raman enhancement structure 300 are metallic materials, which include gold, silver, copper, aluminum, chromium, lithium, sodium, potassium. However, any other suitable material that may produce chemical enhancement of the Raman signal, electromagnetic enhancement of the Raman signal, or both, is contemplated as within the scope of the present invention.
It has been shown that a relatively rough surface enhances the amount of Raman scattered radiation 160 that may emanate from the Raman enhancement structure 300 when an analyte 310 disposed on the Raman enhancement structure 300 is irradiated. As a result, the Raman enhancement structure 300 may be formed as a single monolithic layer, possibly with a roughened surface, or the Raman enhancement structure 300 may comprise one or more discrete particles.
As one or more discrete particles, the Raman enhancement structure 300 may have a variety of exemplary configurations, such as, nanowires (e.g., a rod shaped configuration), nanodots, nanoparticles (including employing a single nanoparticle), or metallic particles in a colloidal suspension. It is currently preferred to employ at least two silver nanoparticles spaced apart, such that an analyte 310 molecule may be draped therebetween. The aforementioned nanostructures for the Raman enhancement structure 300 may be formed by chemical vapor deposition (CVD), molecular beam epitaxy (MBE), atomic layer deposition (ALD), or any other known technique for depositing the Raman enhancement structure 300 on a surface.
The substrate 110 may be any suitable substrate for integrating the laser source 120, the wavelength demultiplexer 240, and the radiation sensors 290. In addition, if optional components 190 are present, the substrate 110 may be selected for its properties of directing and modifying either optical signals, electrical signals, or both optical signals and electrical signals. By way of example, conventional silicon substrates as well as Group III-V materials, such as gallium arsenide, and indium phosphide may be desirable.
It may be desirable to include other optional components 190 to create an enhanced Raman spectroscopy analysis system. By way of example, Application Specific Integrated Circuits (ASIC), microprocessors, microcontrollers, digital signal processors, and discrete components may be useful. In addition, optical components such as collimators, lenses, filters, waveguides and resonant cavities may be useful. Furthermore, nanowire-type sensor arrays may be desirable for verifying the presence and composition of some analytes 310.
The laser source 120 may be a conventional laser diode, which emits a laser radiation 125 with a wavelength that is effective for ERS analysis. By way of example, an edge-emitting laser diode is illustrated in the exemplary embodiments. However, it is understood that other laser diode implementations are possible and encompassed by the scope of the invention, such as, for example, a Vertical Cavity Surface Emitting Laser (VCSEL). In addition, the laser diode may be integrated into the substrate 110 as part of a monolithic integration, including the substrate 110 and, possibly, other optional components 190.
Similarly, the wavelength demultiplexer 240 and radiation sensors 290 may be integrated into the substrate 110 as part of a monolithic integration. Exemplary embodiments of a wavelength demultiplexer 240 include an Arrayed Waveguide Grating (AWG) element 240′ (FIG. 2) and a chirped photonic crystal 240′′ (FIG. 3). An AWG may operate as a wavelength multiplexer and a wavelength de-multiplexer. An exemplary AWG 240′ is shown in FIG. 2. A root waveguide 242′ guides the Raman scattered radiation 160 to a free propagation region 244 where the Raman scattered radiation 160 may diverge to an array of waveguides 246. The array of waveguides 246 is configured such that the optical path lengths of adjacent waveguides differ by substantially near an integer multiple of the central wavelength. The individual waveguides of the array of waveguides 246 arrive at an output aperture 248 where they are recombined. Receiver waveguides (also referred to as wavelength-specific waveguides 258′) are placed at a proper position along an image plane in the output aperture 248 such that spatial separation of the various wavelengths achieves the wavelength de-multiplex function. As a result, each wavelength-specific waveguide 258′ carries a unique wavelength 260′ out of the AWG 240′.
Another exemplary wavelength demultiplexer 240, illustrated in FIG. 3, includes a chirped photonic crystal 240′′. A conventional two-dimensional photonic crystal 240′′ material may be formed by periodically dispersing rods or columns 254 of a material of one refractive index within a matrix 255 having a different refractive index. Two-dimensional photonic crystals 240′′ exhibit periodicity in only two dimensions (i.e., the directions perpendicular to the length of the rods or columns 254), but no periodicity is exhibited in the direction parallel to the length of the columns 254. The photonic crystal 240′′ material, as shown in a top view in FIG. 3, creates a highly refractive behavior in the two dimensions of the photonic crystal 240′′ material. As a result, a waveguide may be created in the photonic crystal 240′′ by introducing a series of defects. The defects may be formed by removing or failing to form one or more columns 254 along a path for the radiation to follow. Alternatively, the defects may be formed as air gaps or as spatially confined areas of a different material such as glass or epoxy. The defects in the photonic crystal material create a waveguide along the path of the defects due to the high reflectivity in the plane perpendicular to the columns 254. For example, in the exemplary embodiment of FIG. 3, a root waveguide 242′′ and three wavelength-specific waveguides 258′′ are shown.
In addition to a conventional periodic arrangement of columns 254 forming the photonic crystal 240′′, a photonic crystal 240′′ may be formed with a “chirped” arrangement. As a chirped photonic crystal 240′′, the periodicity (i.e. spacing between columns 254) changes along the chirped axis 256. This chirping is useful in creating wavelength-specific waveguides 258′′.
As shown in FIG. 3, the photonic crystal 240′′ includes a chirped axis 256 substantially in a horizontal direction. In other words, the columns 254 become farther apart (or closer together) as the radiation travels from left to right along the chirped axis 256. A root waveguide 242′′ may carry the Raman scattered radiation 160 along this chirped axis 256. Wavelength-specific waveguides 258′′ may tap off at various points along the root waveguide 242′′. Only radiation of wavelengths substantially matching the periodicity of the columns 254 at that point along the chirped axis 256 (i.e. unique wavelengths 260′′) will pass through the photonic crystal 240′′ and enter the wavelength-specific waveguide 258′′ at that location.
By demultiplexing the Raman scattered radiation 160, the unique wavelengths 260 exiting the wavelength demultiplexer 240 may be sensed by a radiation sensor 290 configured for each unique wavelength. Conventional photodiodes responsive to a broad range of wavelengths may be used as the radiation sensors 290.
If the radiation sensors 290 are not positioned substantially near the wavelength demultiplexer 240, optional transmission waveguides 270 (as shown in FIGS. 1A and 1B) may direct the unique wavelengths 260 from the wavelength demultiplexer 240 to the radiation sensors 290. While shown as straight lines in FIG. 1A, a person of ordinary skill in the art will recognize that the transmission waveguides 270 may be formed in a large variety of shapes, which may be useful for various configurations on the substrate 110. Also, if desired, optical amplifiers 275 may be implemented in the transmission waveguides 270 to amplify the unique wavelengths 260 and generate amplified unique wavelengths for reception by each radiation sensor.
As a result, of the configuration of the wavelength demultiplexer 240 and radiation sensors 290, the molecular analysis device 100 may be configured to simultaneously detect a variety of wavelengths of Raman scattered radiation 160, such that a Raman spectrum may be obtained. The Raman spectrum may be used to determine specific analytes 310. In this fashion, an inexpensive molecular analysis device 100 may be developed to detect a predetermined set of analytes 310.
The molecular analysis device 100 may also be used for hyper-Raman spectroscopy. When excitation radiation impinges on an analyte 310 molecule, a small number of photons may be scattered at frequencies corresponding to the higher order harmonics of the excitation radiation, such as the second and third harmonics (i.e., twice or three times the frequency of the excitation radiation). Some of these photons may be Raman scattered photons with a frequency that is Raman-shifted relative to the frequencies corresponding to the higher order harmonics of the excitation radiation. Therefore, in hyper-Raman spectroscopy, as examples and not limitations of higher order harmonics, the incident excitation photons may have approximately 1⁄2, 1⁄3, or 1⁄4, the frequency of the Raman photons.
This hyper-Raman excitation has the added advantage that the excitation frequency and Rayleigh scattered radiation at the excitation frequency may be easily filtered out from the Raman signal frequency by an inexpensive optical filter 170. In this invention, we define ERS to include Raman, hyper-Raman and higher multiple excitation photons.
For illustration of a specific example, and not a limitation, the excitation photon may have a wavelength of about 980 nm, and the Raman signal may have wavelengths of about 490 nm. As a result, the optical filter 170 may be configured to substantially filter out the radiation at and near the 980 nm wavelength, while passing the shorter wavelengths. Alternatively photodiodes comprising GaN/InGaN/AlGaN, which are transparent to 980 nm, but detect frequencies near 490 nm, may be used.
In operation of a Raman spectroscopy system, and referring to FIGS. 1A, 1B, 2, and 3, the laser source 120 irradiates the Raman enhancement structure 300 and analyte 310, producing an enhancement effect therein (i.e., chemical, electromagnetic, or both). In other words, irradiation of the Raman enhancement structure 300 and analyte 310 by radiation impinging on the Raman enhancement structure 300 and analyte 310, in part, produces a strong electromagnetic field in the Raman enhancement structure 300. Because the electromagnetic field is adjacent to the analyte 310, the analyte 310 is, in turn, irradiated by a very strong electromagnetic field. The irradiation of the analyte 310 by the enhanced field from the Raman enhancement structure 300 produces the aforementioned Stokes, anti-Stokes, or combined (Stokes/anti-Stokes) Raman scattered photons (also referred to as Raman scattered radiation 160) that are characteristic of the particular analyte 310 being analyzed. Because the intensity of the Raman scattered photons is, in part, proportional to the square of the electromagnetic field that irradiates the analyte 310, the enhancement effect from the Raman enhancement structure 300 may increase the intensity of the Raman signal by as much as 1014.
Some of the Raman scattered radiation 160 may emanate into the wavelength demultiplexer 240. The wavelength demultiplexer 240 separates the Raman scattered radiation 160 into a plurality of unique wavelengths 260, which are sensed by the radiation sensors 290. The radiation sensors 290 convert the intensity detected into electrical signals.
The electrical signals may be directed to electronic equipment located apart from the molecular analysis device 100 or may be directed to other optional components 190, which may be disposed on the substrate 110, for development of a Raman spectrum for use in identifying specific analytes 310.
FIG. 4 illustrates a top view of another exemplary embodiment of a molecular analysis device 100′. In the embodiment of FIG. 4, the laser source 120 emanates the laser radiation 125 directly into the root waveguide 242′′ of the wavelength demultiplexer 240 configured as a photonic crystal 240′′. An opening 138 is formed in the photonic crystal 240′′ such that a Raman enhancement structure 300 may be disposed in the photonic crystal 240′′ and in the path of the root waveguide 242′′. As explained earlier, the laser radiation 125 impinging on an analyte 310 disposed on the Raman enhancement structure 300 may generate a Raman scattered radiation 160. Some of the Raman scattered radiation 160 may emanate into the root waveguide 242′′. Wavelength-specific waveguides 258′′ may tap off at various points along the root waveguide 242′′. Only radiation of wavelengths substantially matching the periodicity of the columns 254 at that point along the chirped axis 256 will pass through the photonic crystal 240′′ and enter the wavelength-specific waveguide 258′′ at that location. Radiation sensors 290, positioned near the other end of the wavelength-specific waveguide 258′′ may sense the unique wavelength in that wavelength-specific waveguide 258′′.
The radiation sensors 290 convert the intensity of the unique wavelengths 260 detected into electrical signals. The electrical signals may be directed to electronic equipment located apart from the molecular analysis device 100 or may be directed to other optional components 190, which may be disposed on the substrate 110, for development of a Raman spectrum for use in identifying specific analytes 310. In addition, the molecular analysis device of FIG. 4 may be used for hyper-Raman spectroscopy as previously described.
Although the foregoing description contains many specifics, these are not to be construed as limiting the scope of the present invention, but merely as providing certain exemplary embodiments. Similarly, other embodiments of the invention may be devised which do not depart from the spirit or scope of the present invention. The scope of the invention is, therefore, indicated and limited only by the appended claims and their legal equivalents, rather than by the foregoing description. All additions, deletions, and modifications to the invention, as disclosed herein, which fall within the meaning and scope of the claims, are encompassed by the present invention.

## Claims

1. A molecular analysis device, comprising:
a substrate;
a laser source disposed on the substrate and configured to generate a laser radiation;
a waveguide disposed on the substrate and configured for substantially containing the laser radiation, the waveguide including an opening formed in a first surface of the waveguide, the opening configured to receive a Raman enhancement structure, the Raman enhancement structure configured to generate a Raman scattered radiation when the laser source irradiates an analyte disposed thereon;
a wavelength demultiplexer disposed on the substrate and configured for dispersing the Raman scattered radiation into at least two unique wavelengths; and
at least two radiation sensors disposed on the substrate, wherein each radiation sensor of the at least two radiation sensors is configured for sensing one of the at least two unique wavelengths.

2. The device of claim 1, wherein the substrate, the laser source, the waveguide, the wavelength demultiplexer, and the at least two radiation sensors comprise a monolithic integration.

3. The device of claim 1, wherein the waveguide further comprises:
a first reflector;
a second reflector; and
a resonant cavity disposed between the first reflector and the second reflector;
and wherein the opening is formed through the first reflector and the resonant cavity.

4. The device of claim 1, wherein the laser radiation comprises a wavelength that is an integer multiple of a wavelength substantially near the Raman scattered radiation.

5. The device of claim 4, further comprising an optical filter disposed between the Raman enhancement structure and the wavelength demultiplexer, the optical filter configured for substantially filtering out radiation substantially near the wavelength of the laser radiation.

6. The device of claim 1, wherein the wavelength demultiplexer comprises a chirped photonic crystal, the chirped photonic crystal comprising:
a root waveguide configured for receiving and guiding the Raman scattered radiation; and
at least two wavelength-specific waveguides, each wavelength-specific waveguide disposed at a position along a chirped axis correlated with one of the at least two unique wavelengths and each wavelength-specific waveguide configured for guiding one of the at least two unique wavelengths.

7. The device of claim 1, wherein the wavelength demultiplexer comprises an arrayed waveguide grating.

8. The device of claim 1, further comprising at least two transmission waveguides, each transmission waveguide configured for guiding one of the at least two unique wavelengths between the wavelength demultiplexer and one of the at least two radiation sensors.

9. The device of claim 8, further comprising at least two optical amplifiers, each optical amplifier disposed within one of the at least two transmission waveguides and configured for amplifying the unique wavelength guided by the one of the at least two transmission waveguides.

10. The device of claim 1, wherein the Raman enhancement structure comprises a metallic material selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

11. The device of claim 10, wherein the Raman enhancement structure is substantially roughened to increase a surface enhancement effect of the Raman scattered radiation.

12. The device of claim 1, wherein the Raman enhancement structure comprises a plurality of nanostructures including a metallic material, wherein the plurality of nanostructures are selected from the group consisting of nanodots and nanowires.

13. The device of claim 12, wherein the metallic material is selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

14. The device of claim 1, wherein the Raman enhancement structure comprises a colloid containing metallic particles, wherein the metallic particles are selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

15. The device of claim 1, further comprising at least one electronic component configured for receiving electronic signals from the at least two radiation sensors.

16. A molecular analysis device, comprising:
a substrate;
a laser source disposed on the substrate and configured to generated a laser radiation,
a chirped photonic crystal, the chirped photonic crystal comprising:
a root waveguide configured for receiving and guiding the laser radiation and configured for guiding a Raman scattered radiation;
an opening in the root waveguide, the opening configured to receive a Raman enhancement structure, the Raman enhancement structure configured to generate the Raman scattered radiation when the laser source irradiates an analyte disposed thereon; and
at least two wavelength-specific waveguides, each wavelength-specific waveguide disposed at a position along a chirped axis correlated with one of at least two unique wavelengths, wherein each wavelength-specific waveguide is configured for guiding one of the at least two unique wavelengths; and

at least two radiation-sensors disposed on the substrate, wherein each radiation sensor is configured for sensing one of the at least two unique wavelengths.

17. The device of claim 16, wherein the laser radiation comprises a wavelength that is an integer multiple of a wavelength substantially near the Raman scattered radiation.

18. The device of claim 16, wherein the Raman enhancement structure comprises a metallic material selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

19. The device of claim 18, wherein the Raman enhancement structure is substantially roughened to increase a surface enhancement effect of the Raman scattered radiation.

20. The device of claim 16, wherein the Raman enhancement structure comprises a plurality of nanostructures including a metallic material, wherein the plurality of nanostructures are selected from the group consisting of nanodots and nanowires.

21. The device of claim 20, wherein the metallic material is selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

22. The device of claim 16, wherein the Raman enhancement structure comprises a colloid containing metallic particles, wherein the metallic particles are selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

23. The device of claim 16, further comprising at least one electronic component configured for receiving electronic signals from the at least two radiation sensors.

24. A method of performing Raman spectroscopy, comprising:
generating a laser radiation from a laser source disposed on a substrate;
confining the laser radiation in a waveguide disposed on the substrate;
disposing an analyte over at least a portion of a Raman enhancement structure disposed in an opening in the waveguide;
irradiating the analyte and the Raman enhancement structure with the laser radiation to generate a Raman scattered radiation;
dispersing the Raman scattered radiation into at least two unique wavelengths; and
sensing the at least two unique wavelengths with at least two radiation sensors disposed on the substrate.

25. The method of claim 24, further comprising generating a wavelength of the laser radiation that is an integer multiple of a wavelength substantially near the Raman scattered radiation.

26. The method of claim 25, further comprising filtering the Raman scattered radiation to substantially remove radiation substantially near the wavelength of the laser radiation.

27. The method of claim 24, wherein dispersing the Raman scattered radiation further comprises:
receiving the Raman scattered radiation in a root waveguide of a chirped photonic crystal;
positioning at least two wavelength-specific waveguides in the chirped photonic crystal, each wavelength-specific waveguide disposed at a position along a chirped axis correlated with one of the at least two unique wavelengths; and
guiding each of the at least two unique wavelengths through each of the at least two wavelength-specific waveguides.

28. The method of claim 24, wherein dispersing the Raman scattered radiation is performed by an arrayed waveguide grating.

29. The method of claim 24, further comprising guiding each of the at least two unique wavelengths between a wavelength demultiplexer and one of the at least two radiation sensors.

30. The method of claim 24, further comprising generating at least one amplified unique wavelength by amplifying at least one of the at least two unique wavelengths and sensing the at least one amplified unique wavelength with at least one of the at least two radiation sensors.

31. The method of claim 24, wherein disposing the analyte comprises disposing at least one molecule of the analyte.

32. The method of claim 24, wherein the Raman enhancement structure comprises a metallic material selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

33. The method of claim 24, wherein the Raman enhancement structure comprises a colloid including metallic particles selected from the group consisting of gold, silver, copper, aluminum, chromium, lithium, sodium, and potassium.

34. The method of claim 24, wherein the Raman enhancement structure comprises at least one particle in the form of a nanodot or a nanorod.

35. A method of performing Raman spectroscopy, comprising:
generating a laser radiation from a laser source disposed on a substrate;
confining the laser radiation in a root waveguide formed in a chirped photonic crystal;
disposing an analyte over at least a portion of a Raman enhancement structure disposed in an opening in the root waveguide;
irradiating the analyte and the Raman enhancement structure with the laser radiation to generate a Raman scattered radiation;
dispersing the Raman scattered radiation into at least two unique wavelengths; and
sensing the at least two unique wavelengths with at least two radiation sensors disposed on the substrate.

36. The method of claim 35, further comprising generating a wavelength of the laser radiation that is an integer multiple of a wavelength substantially near the Raman scattered radiation.

37. The method of claim 36, further comprising filtering the Raman scattered radiation to substantially remove radiation substantially near the wavelength of the laser radiation.

38. The method of claim 35, wherein dispersing the Raman scattered radiation further comprises:
positioning at least two wavelength-specific waveguides in the chirped photonic crystal, each wavelength-specific waveguide disposed at a position along a chirped axis correlated with one of the at least two unique wavelengths; and
guiding each of the at least two unique wavelengths through each of the at least two wavelength-specific waveguides.

39. The method of claim 35, wherein disposing the analyte comprises disposing at least one molecule of the analyte.