iNIST

PUBLICATIONS

A111D2 Tbbb7b

c NIST SPECIAL PUBLICATION 400-81

U.S. DEPARTMENT OF COMMERCE/National Institute of Standards and Technology

QC100

.U57

#400-81

1988

C.2

Warren K. Gli

Walter M. I

N1S>7C OIL IVO »US7

Semiconductor Measurement Technology:

Automatic Determination

of the Interstitial Oxygen Content

of Silicon Wafers Polished on Both Sides

Warren K. Gladden,* Stephen R. Slaughter,^

Walter M. Duncan,^ and Asian Baghdad!,*

* Semiconductor Electronics Division

Center for Electronics and Electrical Engineering

National Engineering Laboratory

National Institute of Standards and Technology

Gaithersburg, MD 20899

^Texas Instruments, Incorporated

Dallas, TX 75265

November 1988

NOTE: As of 23 August 1988, the National Bureau of

Standards (NBS) became the National Institute of Standards and Technology (NIST) when President

Reagan signed into law the Omnibus Trade and

Competitiveness Act.

U.S. DEPARTMENT OF COMMERCE, C. WHliam Verity, Secretary

NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, Ernest Ambler, Director J^^'^''j^

(formerly National Bureau of Standards) ^^'^
Library of Congress Catalog Card Number: 88-600601

National Institute of Standards and Technology Special Publication 400-81

Natl. Inst. Stand. Technol. Spec. Publ. 400-81, 71 pages (Nov. 1988)

CODEN: NSPIJE2

U.S. GOVERNMENT PRINTING OFFICE

WASfflNGTON: 1988

For sale by the Superintendent of Documents, U.S. Government Printing Office, Washington, DC 20402-9325
TABLE OF CONTENTS

Page

I. Introduction 1

II. Outline of the Algorithm 2

III. Annotated Programs 7

A. FORTRAN Program 7

B. PASCAL Program 21

IV. Sample Data 33

V. Results 62

LIST OF FIGURES

Page

1. Transmittsince spectrum of a p-type Czochralski silicon wafer with a resistivity

of 9 f2-cm and £in oxygen content of 20 parts per million (atomic) 3

2. Absorption coefficient spectrum of a p-type Czochralski silicon wafer with a

resistivity of 9 fi-cm and an oxygen content of 20 parts per million (atomic) ... 4

iii

Semiconductor Measurement Technology:

Automatic Determination of the Interstitial Oxygen Content

of Silicon Wafers Polished on Both Sides

Warren K. Gladden,** Stephen R. Slaughter,

t

Walter M. Duncan,^ and Asian Baghdadi*

•National Institute of Standards and Technology

(formerly National Bureau of Standards)

Gaithersburg, MD 20899

^Texas Instrtunents, Incorporated

Dallas, TX 75265

ABSTRACT

This Special Publication contains FORTRAN and PASCAL computer programs which

implement sua. ASTM test method for the automatic determination of the interstitial oxygen

content of silicon. The programs are to be used as illustrative examples by programmers

wishing to implement the ASTM algorithm on their computers. The Publication also

includes sample data that can be used to test the computer programs. The sample data

are included in two forms: in print, and on an MS-DOS floppy disk.

Key words: algorithm; analysis of infrared spectra; computer programs; interstitial oxygen;

silicon.

I. INTRODUCTION

This work is an outgrowth of an American Society for Testing and Materials (ASTM)

project to automate test methods for the determination of the oxygen and carbon content in silicon using IR absorption. The ASTM task force on this project recommended

a test procedure for obtaining the IR spectra and an algorithm for computing the oxygen

content from the spectra. This test procedure has been proposed for adoption by ASTM

Committee F-1 as a Standard Test Method. This Special Publication includes as examples

a FORTRAN computer program and a PASCAL program, each of which implements the

ASTM aJgorithm. The FORTRAN program was written at the National Institute of Standards and Technology, and the PASCAL progran was written at Texas Instruments. Also

included are example spectra that can be used to test any program written implementing

the ASTM algorithm.

* Now at AT&T Bell Laboratories, AUentown, Pennsylvania.

1
The proposed ASTM method can be used to analyze IR spectra obtained on either dispersive (DIR) or Fourier-transform (FT-IR) infrared spectrophotometers. It can be used

with samples ranging in thickness from 0.3 mm to 2.5 mm. The samples must be polished

on both sides. The lower resistivity limits are 0.05 fl-cm for n-type and 0.5 0-cm for

p-type samples. There are no upper resistivity limits. The oxygen content of float-zoned

silicon has been measured with resistivities well above 100 fi-cm. The range of oxygen

concentrations measured by this method is 1 X 10^^ to 2 x 10^® atoms/cm~^.

II. OUTLINE OF THE ALGORITHM

The interstitial oxygen content of silicon can be determined by measuring the net peak

height of the oxygen vibrational absorption at 1107 cm~^.§ The transmittance through

the sample, taking into account the additional intensity due to mvdtiple reflections between

the parallel polished surfaces of the sample, is given

(1 - Rfe-'^

and rearrangement of this equation yields the absorption coefficient as

1, r -0.49 + VO.2401 + 0.36T2 ) « = ^

/'

where the silicon reflectivity, R, has been set equal to 0.30, its value over the carrier concentrations and frequencies considered here. Figure 1 shows a typical silicon transmittance

spectrum and figure 2 shows the region about the oxygen peak where the transmittance

data have been converted to absorption coefficient using eq (2). To determine this peak

height, a baseline is drawn between the two minima, one on either side of the peak. The

peak height is determined at 1107 cm'"-', and the baseline absorption is determined by

finding the intercept of the baseHne at 1107 cm"-'. The net peak height is then the differ- ence between these two values of absorption coefficient. A calibration constant has been

determined relating this net peak height to the quantity of interstitial oxygen in parts per

million (atomic) using absolute techniques such as charge particle and/or photon activation

§ See ASTM Test Method F 121, 1987 Annual Book of ASTM Standards, V. 10.05, p. 247.^ See ASTM Standard Practices F 120, 1987 Annual Book of Standards, V. 10.05, p. 245.

2
TRANSMITTANCE SPECTRUM

500 1000 1500

WAVENUMBER (cm-'')

2000

Figure 1: Transmittance spectrum of a p-type Czochralski silicon wafer with a resistivity

of 9 n-cm and an oxygen content of 20 parts per million (atomic).

3
ABSORPTION COEFFICIENT SPECTRUM

6 I

1 1 r 1 1 1 1 1 r

0 I I I I I I I I L_ I 900 1000 1100 1200 1300 1400

WAVENUMBER (cm-^)

Figure 2: Absorption coefficient spectrum of a p-type Czochralski silicon wafer with a

resistivity of 9 17-cm and an oxygen content of 20 parts per million (atomic). The thick

sections of the line indicate the wavenimiber regions used to calcvdate the oxygen content

(see page 2).

4
analysis. This constant is 6.28 cm-ppma."^

This procedure was converted to a computer algorithm. The following is an outline of the

algorithm.

• The measured IR transmittance of the sample is read from a data file and only those

transmittances between 1000 and 1300 wavenumbers are stored. Three regions about

the interstitial oxygen minimum, 1010 to 1060 cm~^, 1200 to 1260 cm"-', and 1090

to 1123 cm~^, are considered for further analysis. The first two regions are used to

determine the baseline for the minimum. By the method of least-squares, a thirdorder polynomial is fitted to the transmittance data in each of these two regions. For

the absorption majcimum, a fourth-order polynomial is used.

• The two transmittance majcima, the minimum, and the wavenumbers at which they occur are determined from the least-squares-fit curves. The transmittance values are denoted by Tmaxi, Tp^ak-, and Tmaxi- The respective wavenumbers are denoted by

^ max \i CTpeak, and ^ max2 •

• The baseline transmittance is determined from a linear interpolation between the two

majcima of the form

T2 - Ti

Tba»e{o-) = Ti -I (o- - Cri).

<T2 — <Ti

• ocpeak and abase are determined by solving eq (2) using the appropriate calculated

transmittance.

• The net absorption coefficient is calculated by

+ A. Baghdad!, W. M. Bullis, M. C. Croarkin, Li Yue-zhen, R. I. Scace, R. W. Series,

P. Stallhofer, and M. Watanabe, to be pubUshed in the Journal of the Electrochemical

Society.

5
Lattice absorption at 1107 cm ^ due to lattice bands contributes an additional net absorption of 0.5 cm~^,^ so the oxygen content is calculated by

ppm atomic = 6.28 x {anet — 0.5).

This algorithm has been implemented in FORTRAN and PASCAL computer programs,

which are listed in the sections IIIA and IIIB, respectively. These programs should only

be considered as examples rather than as the approved methods for implementing the

algorithm. Section IV contains four sample transmission spectra. These spectra (plus

two more) have also been written on 5^-in. MS-DOS* floppy disks that can be found

in a pocket on the end of this Special Publication. Section V is a Hsting of the output

from the FORTRAN and PASCAL programs listed in section III, as applied to all six

sample spectra. The thicknesses of the silicon wafers used to produce the IR spectra

are included in the output listed in section V. The oxygen contents determined for these

spectra should match the oxygen contents listed in this output. Thus, these spectra can

be used to test a computer program based upon the algorithm by comparing the oxygen

content computed using the program to the listed oxygen content. The oxygen contents

in section V are listed to four significant figures, rather than the three significant figures

which is appropriate considering the precision of the IR measurement, in order to facilitate

the comparison of computer programs.

* See ASTM Test Method F 121, 1988 Annual Book of ASTM Standards, V. 10.05, to

be published.

* Certain commercial equipment, instruments or materials are identified in this paper

in order to adequately specify the experimental procedure. Such identification does not

imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the

best available for the purpose.

6
ANNOTATED PROGRAMS

Section IIIA. FORTRAN Program
PROGRAM ASTMDSP

Q Atik*******!****************** ASTMDSP

C * * C * THIS PROGRAM COMPUTES THE INTERSTITIAL OXYGEN CONTENT OF * C * DOUBLE-SIDE POLISHED SILICON SAMPLES IN PARTS PER MILLION ATOMIC. * C * THE PROCEDURE IS A MODIFICATION OF THAT PRESENTED IN THE GREY * C * PAGES OF THE ASTM HANDBOOK. INSTEAD OF TAKING AVERAGE VALUES FOR * C * THE TWO MAXIMA AND THE MINIMUM, A LEAST-SQUARES POLYNOMIAL IS FIT * C * TO SEVERAL DATA POINTS AROUND EACH FEATURE. ALSO, THE WAVENUMBERS * C * WHERE THE MAXIMA AND MINIMUM OCCUR ARE DETERMINED FROM THE FIT. A * C * 3RD-0RDER POLYNOMIAL IS USED '"OR THE MAXIMA AND A 4TH-0RDER * C * POLYNOMIAL IS USED FOR THE MINIMUM. THE 4TH ORDER FIT WAS CHOSEN * C * IN ORDER TO BE COMPATIBLE WITH THE PROCEDURE GIVEN IN THE ANNEX * C * FOR THE OXYGEN DETERMINATION IN THIN SLICES. * C * * C

* NOTE: * C * IT IS COMMON PRACTICE TO SPEAK OF THE INTERSTITIAL * C * OXYGEN PEAK. THIS IS ONLY TRUE WHEN WORKING IN * C * ABSORBANCE. ALL DATA REDUCTION IN THIS PROGRAM IS * C * DONE IN TRANSMITTANCE, THUS WE SPEAK OF THE * C * INTERSTITIAL OXYGEN MINIMUM. * C * * Q ]|t4:]|C]fc>|e lie stole sic ******4: lie sic 4c*** sec  ASTMDSP ** *******************************

DIMENSION ABSRB(500) ,FUNC(200) , IFLAG(6) ,SIGMA(500) ,SPEC(600) ,W(6)

,

+ WAVE(600) ,WEIGHT(200) ,WORK(500)

CHARACTER*40 F I LE I N , F I LEOUT

DOUBLE PRECISION ANSWER(200)

INTEGER DAY, YEAR

REAL MAX1 ,MAX2,MINPK,MAXCAL,MINCAL,NET,NETABS,NODE(200)

DATA I FLAG, W, WE I GHT/6*0,1 010. ,1060. ,1090. ,1123. ,1200. ,1260. , . + 200*1./

1001 F0RMAT(3I2)

1002 F0RMAT(A40)

1003 F0RMAT(F10.4)

1011 FORMATCIHI/' ASTMDSP ',12,'/', 12.'/'. 12, + 35X,'PAGE ',11)

1012 FORMATCIHI/' ASTMDSP ',12,'/', 12.'/', 12, + 34X,'PAGE ',12)

1013 FORMATC *****spectrum***** ' ,A40)

1014 FORMATC thickness Is ' ,f6.4, 'cm'

)

1015 FORMATC/' TC',F6.1,') - ',F6.4,' residual std. dev.-',e10.

+3/' TC',F6.1,') - ',F6.4,' residual std. dev.-' ,e10.3/' T

+C',F6.1,') - ',F6.4,' residual std. dev.-' ,e10.3)

1016 FORMATC/' BASELINE TRANSMITTANCE AT ',F6.1,' WAVENUMBERS- ', F7 . 4)

1017 FORMATC ——> ALPHACBASE) - ',F5.3,' ALPHACPEAK) - ',F7.5/)

1018 FORMATC NET ABSORBANCE PEAK HEIGHT - ',F8.6/)

1019 FORMAT C 1 0X ,'*******************************'/, 1 0X ,' * OXYGEN CONTEN

+T IS ' F5.2 ' PPMA *'/ 1 0X ' ******sic************************ ' /

)

NLINES-0

IPAGE-1

C

Q *********************************************************************

C * FILE 'MODEL. RES' IS USED FOR STORAGE OF THE RESULTS. THE OUTPUT * C * IS PRINTED TO THIS FILE IN SUCH A WAY THAT YOU CAN OBTAIN A * C * FORMATTED HARD-COPY OF THE FILE AT A LATER TIME. * *********************************************************************

8
OPEN(UNIT-30,F ILE-' MODEL. RES' , STATUS- ' NEW

)

C

Q ******************************************************

C * INPUT DATE, NAME OF TRANSM I TTANCE FILE, AND THICKNESS OF WAFER. *

c WRITE(6,*) ' TODAY"S DATE ' READ (5,1 001 )MONTH, DAY, YEAR

5 WRITE (6,*) ' NAME OF DSP TRANSM I TTANCE DATA FILE.'

READ(5,1002)FILEIN

WRITE(6,*) ' THICKNESS OF WAFER.'

READ(5,1003)TAU

0PEN(UNIT-7,F ILE=F ILE IN,STATUS='OLD'

)

IFCNLINES.EQ.O.AND. IPAGE.EQ.1) THEN

WR ITE(30,1011 )MONTH,DAY,YEAR, I PAGE

NL INES=NL INES+1

END IF WRITEOO,*)'

WRITE (30,*)'

WR ITE(30,1013)F ILE IN WR ITE(30,1014)TAU

C

C * READ TRANSM I TTANCE DATA AND SELECT THOSE DATA POINTS BETWEEN 1000 * C * AND 1300 WAVENUMBERS (INCLUSIVE). * C * FORMAT OF DATA FILE: *

C * (1) FIRST LINE CONTAINS THE NUMBER OF LINES OF DATA

C * (2) EACH SUBSEQUENT LINE CONTAINS THE COUNTER VALUE

C * CORRESPONDING TO THE LINE OF DATA, WAVENUMBER , AND

C * TRANSM I TTANCE.

c

K-1

READ(7,*)NCNT

DO 10 1-1 ,NCNT

READ(7,*,ERR-115)LL,WAVENM, TRANSM

I F ( ( WAVENM . GE . 1 000 . ) . AND . ( WAVENM . LE . 1 300 . ) ) THEN

WAVE(K)-WAVENM

SPEC(K)-TRANSM

K-K+1

GO TO 10

ELSE IF (WAVENM. GT.1 300. ) THEN

GOTO 15

END IF 10 CONTINUE

15 NDP-K-1

C

C * DETERMINE WAVENUMBER REGIONS FOR LEAST-SQUARES FIT OF * C * DATA AT MAXIMA AND MINIMUM ABOUT 1107 WAVENUMBER ABSORPTION *

C

9
MAXDEG-3

KNT-0

INDEX—

1

DO 100 1-1 ,NDP

IF(WAVE( I ) .GE.W(I)) INDEX-2

IF(WAVE( I ) .GE.W(3)) INDEX-4

IF(WAVE( I ) .GE.W(5)) INDEX-S

IF( INDEX. LT.O)GOTO 100

C

C * CREATE ARRAYS OF NODES AND FUNCTION VALUES FOR LEAST SQUARES FIT. * Q 3|C3|c)tcJ|(34c]K3lc3K4e3k3|e}|c3|e)k3|cilc3|c)Kik)lc)|e}|c>|c4c9|e4c>lc3k)lc4c)|c3k>^ C

IF( IFLAGC INDEX) .EQ.1 )GOTO 100

25 IF(KNT.EQ.O) ITST-INDEX

IF( ITST.NE. INDEX) THEN

KNT-0

GO TO 25

END IF 35 IF(WAVE( I ) .LE.W( INDEX)) THEN

KNT-KNT+1

NODE(KNT)-WAVE( I

)

IF( INDEX.EQ.4)N0DE(KNT)=N0DE(KNT)-1107.

FUNC(KNT)-SPEC( I GO TO 100

END IF C

C * COMPUTE LEAST SQUARES FIT. *

C

45 IFLAGC I NDEX)-1

EPS—1 . IF( INDEX.EQ.4) THEN

MAXDEG-4

CALL LEAST(KNT , NODE , FUNC , WE I GHT , EPS .MAXDEG , NDEG .WORK .ANSWER

)

ll-INDEX-1

GOTO 65

ELSE

MAXDEG=3

CALL LEAST ( KNT . NODE . FUNC .WE I GHT , EPS .MAXDEG , NDEG , WORK . ANSWER

)

ll-INDEX-l

WAVCAL-QKPR IM(WORK.MAXDEG)

IF(WAVCAL.GE.W( I I ) . AND . WAVCAL . LE . W( INDEX))GOTO 65

END IF C

C * ROUTINE TO USE INSTEAD OF DERIVATIVE PROCEDURE. THIS SECTION OF * C * CODE IS NECESSARY SINCE IT IS POSSIBLE FOR THE FIT NOT TO HAVE A * C * DISTINCT Ml N OR MAX. *

c

10
STEP-(WAVE(2)-WAVE(1 ))/5.

WAVNUM=W( I I

)

KK-0

55 IF(WAVNUM.LE.W( INDEX)) THEN

KK-KK+1

ABSRB(KK)-EVAL(WAVNUM,MAXDEG,WORK,MAXDEG)

SIGMA(KK)-WAVNUM

WAVNUM-WAVNUM+ST E P GO TO 55

END IF WAVCAL-MAXCAL ( S I GMA , ABSRB , KK

)

C

C * COMPUTE RESIDUAL STANDARD DEVIATION OF THE FIT AND THE * C * WAVENUMBERS AT WHICH MAXIMA AND MINIMUM OCCUR. *

c 65 SUM-0.

DO 70 J-1 ,KNT

SUM-SUM+ ( FUNC ( J )-SNGL ( ANSWER ( J ) )

) **2

70 CONTINUE

RESID-SQRT(SUM/FL0AT(KNT-1 ))

IF( INDEX. LT.1 .OR. INDEX. GT. 6) THEN

GOTO 135

ELSE IF( INDEX. EQ. 2) THEN

WAVE1-WAVCAL

MAX 1 -EVAL ( WAVE 1 .MAXDEG .WORK .MAXDEG)

R1-RESID

GO TO 100

ELSE IF( INDEX.EQ.4) THEN

CALL PEAKCL (MAXDEG .WORK, WAVEP .M I NPK)

R2-RESID

GO TO 100

ELSE IF( INDEX. EQ. 6) THEN

WAVE2-WAVCAL

MAX2-EVAL(WAVE2 .MAXDEG .WORK .MAXDEG)

R3-RESID

ELSE

GO TO 135

END IF 100 CONTINUE

WRITE(30,1015)WAVE1 .MAX1 ,R1 .WAVEP .M I NPK . R2 , WAVE2 ,MAX2 , R3

C

C * CALCULATE THE BASE TRANSM I TTANCE AT 1107 WAVENUMBERS. AND THE * C * ABSORPTION COEFFICIENTS AT THE PEAK AND BASE OF THE ABSORPTION. *

c BASE- ( ( WAVE 2-WAVEP ) *MAX 1 + ( WAVEP-WAVE 1

) *MAX 2 ) / ( WAVE 2-WAVE 1

)

ALFAB-DSPCOR(BASE ,TAU)

ALFAP-DSPCOR (M I NPK , TAU

)

ALFNET-ALFAP-ALFAB

11
C * OUTPUT REMAINING RESULTS. *

c NETABS-ALFNET*TAU/2 . 303

PPM-(ALFNET-0.5)*6.28

WR I TE ( 30 , 1 01 6)WAVEP , BASE

WR ITE(30,1017)ALFAB,ALFAP

WRITE(30,1018)NETABS

WRITE(30,1019)PPM

C

C * RESET 'I FLAG' ARRAY. *

c DO 110 MM-1 ,6

110 IFLAG(MM)-0

C

Q )|C}|C9k9|C3|C9fc9|e9|c4C3k3|C3k3|C3|C)|C4C3K9k3|e3|c:|(4C3lC3le3k4C3k3|C3fc)k3lC3k C * CHECK FOR FULL PAGE. * Q 3|e 4c }k )lc )|C 9|C 3|C 3|c lie 3|c 4c ik 3k i|c A)|c 3lc 3|C 3|C 3|e i|c lie 4c lie 3lc # Ik A sfc 3k 4c 3|c 4c ^ c NLINES-NLINES+16

IF((NLINES+16) .GE.60) THEN

NLINES-1

IPAGE-IPAGE+1

IF( IPAGE.LT.10) THEN

WR I TE ( 30 , 1 01 1 )MONTH , DAY , YEAR , I PAGE

ELSE

WR I TE ( 30 , 1 01 2 )MONTH , DAY , YEAR , I PAGE

END IF END IF GO TO 5

C

Q 3k3k3k3k9k9k3k3k3k3k3k3k3k3k9k9k9k3k)k3k)k3k)kik3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3k3^ C * ERROR MESSAGES AND TERMINATION. * Q )k)k9k)k)k3k)k3k)k3k3k3k3k)k3k>kik3k3k3k9k3k9k>k)k9k3k3kik3k3k3k3k)k)k3k3k3k}k)kik3k3k3k^ c 115 WRITE(6,*) ' ERROR ENCOUNTERED IN READING DATA.'

GO TO 200

125 WRITE(6,*) ' WAVENUMBER CALCULATED IS OUTSIDE OF RANGE.'

WR ITE(6,*) INDEX

NUM-3*MAXDEG

DO 130 JJ-1 ,NUM

130 WRITE(6,*)JJ,W0RK(JJ)

GO TO 200

135 WRITE(6,*) ' HOW DID YOU CHANGE "INDEX"??????'

200 STOP

END

12
FUNCTION DSPC0R(A1 ,A2)

C

C * THIS FUNCTION COMPUTES ABSORPTION COEFFICIENT BASED ON * C * THE DSP TRANSMITTANCE EQUATION. *

0

TERM=(-0.49+SQRT(0.2401+0.36*A1**2))/(0.18*A1)

DSPCOR—AL0G1 0(TERM)*2 . 303/A2

RETURN

END

REAL FUNCTION MAXCAL ( ARRAY1 , ARRAY2 , NUM)

C

C * THIS FUNCTION FINDS THE MAXIMUM TRANSMITTANCE WITHIN THE * C * WAVENUMBER RANGE SPECIFIED BY THE W( I I ) AND W( INDEX). * Q ********** *4:**«******«***«*************»»*««*****]|c*«ik*«**»«**«**]te****

0

DIMENSION ARRAY1 (*) ,ARRAY2(*)

PEAK-0.25

DO 10 KNT-1 ,NUM

IF(ARRAY2(KNT) .LT.PEAK)GOTO 10

MAXCAL-ARRAY1 (KNT)

PEAK-ARRAY2(KNT)

10 CONTINUE

RETURN

END

REAL FUNCTION MINCAL(D)

C

C * WHEN A FOURTH-ORDER POLYNOMIAL IS FIT TO THE OXYGEN TRANSMITTANCE * C * MINIMUM, THE RESULTING DERIVATIVE IS A CUBIC EQUATION. THE * C * THE SOLUTION OF THIS EQUATION, IN THE SUBROUTINE 'PEAKCL', IS 3

* C * ROOTS. THIS FUNCTION FINDS THE ROOT CLOSEST IN ABSOLUTE VALUE TO * C * 1107 WAVENUMBERS. THIS ROOT SHOULD BE THE WAVENUMBER OF THE * C * INTERSTITIAL OXYGEN MINIMA. *

0

DIMENSION D(3)

VALUE-ABS(D(1))

IK-1

DO 20 KK-2,3

I F(ABS(D(KK) ) .LT.VALUE) IK-KK

20 CONTINUE

MINCAL-D( IK)

RETURN

END

13
SUBROUTINE PEAKCL (NDEG .ARRAY ,WAVENM .VALUE)

C

C * CODE TO DETERMINE COEFFICIENTS OF THE FOURTH-ORDER POLYNOMIAL * C * FITTED TO THE OXYGEN MINIMUM AND THEN SOLVE THE CUBIC EQUATION * C * FOR THE WAVENUMBER AT THE MINIMUM. * Q :|: 4c 3lc 4c 3fc 3|c 3|c 3lc 3lc 3lotc 4! >ic sfc 4c 4: 3fc 4: C

REAL MINCAL

DIMENSION ARRAY(*)

C0EFX3-4.*ARRAY(12)

C

SUM=0.

DO 100 JJ=4,1 ,-1

100 SUM=SUM+ARRAY( JJ)

C0EFX2=-3 . *ARRAY( 1 2)*SUM+3 . *ARRAY( 1 1

)

C

SUM1-0.

SUM2-0.

SUM3=0.

DO 200 JJ=4,2,-1

SUM2=SUM2+ARRAY(JJ+3)

SUM3-SUM3+ARRAY( JJ-1

)

JJM1-JJ-1

DO 200 LL=JJM1 ,1 ,-1

200 SUM1-SUM1+ARRAY( JJ)*ARRAY(LL)

COEFX 1 —2 . *ARRAY ( 1 2

) * ( SUM1 -SUM2 )-2 . *ARRAY (11) *SUM3+2 . *ARRAY (10)

C

SUM1-0.

SUM2-0.

SUM3-0.

SUM4-0.

DO 300 JJ-4,3,-1

SUM2-SUM2+ARRAY(JJ-2)

SUM3-SUM3+ARRAY( JJ+2)

JJM1-JJ-1

DO 300 LL»=JJM1 ,2,-1

JJM2-JJ-2

DO 300 MM=JJM2,1 ,-1

300 SUM1=ARRAY( JJ)*ARRAY(LL)*ARRAY(MM)

DO 400 LL-3,2,-1

LLM1-LL-1

DO 400 MM-LLM1 ,1 ,-1

400 SUM4-SUM4+ARRAY ( LL ) *ARRAY (MM

)

COEFXO—ARRAY(12)*(SUM1-(ARRAY(4)*(ARRAY(5)+ARRAY(6)) )+

* ARRAY(3)*ARRAY(5)+ARRAY(2)*ARRAY(7)+

* (ARRAYd )*(ARRAY(6)+ARRAY(7))))+ARRAY(11 )*(SUM4-SUM3)-

* ARRAY(10)*SUM2+ARRAY(9)

C

A2-C0EFX2/C0EFX3

A1=C0EFX1/C0EFX3

A0=COEFX0/COEFX3

14
CALL CUBIC(A0,A1 ,A2,R1 ,R2,R3)

R00T-MINCAL(R1 ,R2,R3)

WAVENM-1107.+R0OT

VALUE-EVAL ( ROOT , NDEG , ARRAY , NDEG

)

RETURN

END

FUNCTION QKPR IM(ARRAY,NUM)

0

C * THIS FUNCTION COMPUTES THE WAVENUMBER AT WHICH THE FIRST * C * DERIVATIVE OF THE 3RD-0RDER POLYNOMIAL LEAST SQUARES FIT IS ZERO. * Q 4c4c***************4c *******************************alc :k** ******4c***»

C

DIMENSION ARRAY(*)

A-3.*ARRAY(9)

SUM-O.

DO 10 I l-NUM,1 ,-1

10 SUM-SUM+ARRAY( I I

)

B— (2.*SUM*ARRAY(9)-2.*ARRAY(8))

SUM1-0.

DO 30 I l-NUM,1 ,-1

NUM1-I 1-1

IF(NUM1 .NE.O) THEN

DO 20 KK-NUM1 ,1,-1

20 SUM1-SUM1+ARRAY( I I )*ARRAY(KK)

END IF 30 CONTINUE

SUM2-0.

NUM2-2*NUM-2

NUM1-NUM+1

DO 40 I I-NUM1 .NUM2

40 SUM2-SUM2+ARRAY( I I

)

SUM3-ARRAY(1 )+ARRAY(2)

C-AR R AY ( 9

) * ( SUM1 -SUM2 ) -ARRAY ( 8) *SUM3+ARRAY ( 7

)

ARGMNT-(B**2)-4.*A*C

IF(ARGMNT.GE.O) THEN

TERMI-SQRT(ARGMNT)

QKPR IM-(-B+TERM1 )/(2.*A)

IF(QKPR IM.LT.O. )QKPR IM-(-B-TERM1 )/(2.*A)

RETURN

ELSE

QKPR IM—1 . RETURN

END IF END

15
SUBROUTINE LEA.ST(M,X,F,W, EPS, MAXDEG,NDEG, ARRAY, R)

C

C THE SUBROUTINE LEAST AND THE FUNCTION EVAL CALCULATE THE LEAST

C SQUARES POLYNOMIAL APPROXIMATION TO A SET OF DATA SPECIFIED BY THE

C ARRAY OF M NODES, X, WITH CORRESPONDING FUNCTION VALUES AND WEIGHTS

C IN THE ARRAYS F AND W, RESPECTIVELY. THE WEIGHTS MUST ALL BE

C POSITIVE. THE POLYNOMIAL IS DETERMINED IN LEAST AND EVALUATED IN

C EVAL. ON INPUT EPS IS THE DESIRED WEIGHTED RMS ERROR. THE CODE

C INCREASES THE DEGREE OF THE FIT IN AN ATTEMPT TO MEET THIS ERROR

C REQUEST. ON RETURN EPS IS SF TO THE WEIGHTED RMS ERROR OF THE FIT.

C BECAUSE EPS IS USED FOR BOTH .NPUT AND OUTPUT, IT MUST BE A VARIABLE

C IN THE CALLING PROGRAM. MAXDEG IS THE HIGHEST DEGREE ALLOWED AND MUST

C BE LESS THAN OR EQUAL TO (M-1) . THE ACTUAL DEGREE OF THE FIT IS

C RETURNED IN NDEG. TO FORCE THE CODE TO USE THE PARTICULAR DEGREE

C MAXDEG, SET EPS NEGATIVE ON INPUT. THE DOUBLE PRECISION VECTOR R GF M

C WORDS OUTPUTS THE DOUBLE PRECISION VALUES OF THE POLYNOMIAL FIT AT

C EACH OF THE DATA POINTS X(I). THE VECTOR "ARRAY" SPECIFIES THE

C ORTHOGONAL POLYNOMIAL FIT AND PROVIDES WORKING STORAGE. THE DIMENSION

C OF ARRAY IN THE CALLING PROGRAM MUST BE AT LEAST 2*M+3*MAXDEG . THE

C ARRAYS X,F,W, ARRAY AND R MUST BE DIMENSION IN THE CALLING PROGRAM.

C

DIMENSION X(*) ,F(*) ,W(*) ,ARRAY(0

DOUBLE PRECISION R(*) , SUM, CK, TEMP

C

C INITIALIZE STORAGE AND CONSTANTS.

C

IB=MAXDEG+1

IBL2=MAXDEG-1

IC=IB+IBL2

I0L1=IC+MAXDEG

I1L1=I0L1+M

RM=:M T0L=RM*EPS**2

C

C CALCULATE CONSTANT FIT.

C NDEG=0

S=0.

SUM,=0 . ODO

DO 1 1=1,

M

S=S+W(I)

1 SUv.=SUW+DBLE(W(I))*D3LE(F(I})

RNO=S

rC CK IS THE COEFFICIENT C(0) HERE.

C CK=SUM/RNO

ARRAY (IC)=CK

ERROR=0.0

DO 2 1=1,

M

R(I)=CK

2 ERR0R=ERR0R+W(I)*SNGL(CK-DB..E(F(I)))^^2

IF (NDEG. EQ. MAXDEG) GO TO 14

IF(EPS.LT.O.O)G0 TO 3

IF(ERROR.LE.TOL)GO TO 14

C

C CALCULATE LINEAR FIT.

C

3 NDEG=1

16
ES=ERROR

SUM=0 . ODO

DO 4 1=1,

M

4 SUM=SUM+DBLE(W(I))*DBLE(X(I))

C

C CALCULATE A(l)

.

C

ARRAY (1)=SUM/RN0

' C

C CALCULATE Ql(.)

.

C

S=0.0

SUM=O.ODO

DO 5 1=1,

M

ARRAY (IlLl+I) =X (I) -ARRAY (1)

S=S+W(I)*ARRAY(I1L1+I)*»2

TEMP=DBLE(F(I))-R(I)

5 SUM=SUM+DBLE(W(I)) *DBLE(ARRAY(I1L1+I)) *TEMP

RN1=S

C

C CK IS THE COEFFICIENT C(l) HERE.

C

CK=SUM/RN1

ARRAY (IC+1)=CK

C

C CALCULATE THE VALUE OF THE FIT AT THE DATA POINTS AND

C ALSO THE RMS ERROR.

C

ERROR=0.0

DO 6 1=1,

M

R (I) =R (I) +CK*DBLE (ARRAY (IlLl+I)

)

6 ERROR=ERROR+W (I) SNGL (R (I) -DBLE (F (I) )

) * *2

IF(ERR0R.GT.ES.AND.EPS.GE.O.O)G0 TO 12

IF(NDEG.EQ.MAXDEG)GO TO 14

IF(ERR0R.LE.T0L.AND.EPS.GE.O.O)G0 TO 14

DO 7 1=1,

M

7 ARRAY (lOLl+I) =1.0

NDEG=2

K=2

C

C GENERAL FIT.

C

8 ES=ERROR

C

C CALCUUTE B(K)

.

C

ARRAY (IBL2+K) =RN1/RN0

C

C CALCULATE A (K)

.

C

SUM=O.ODO

DO 9 1=1,

M

9 SUM=SUM+DBLE(W(I) ) DBLE (X (I) ) *DBLE (ARRAY (IlLl+I)) **2

ARRAY (K)=SUM/RN1

C

C CALCULATE QK(.) OVERWRITING ON qK-2(.).

C

S=0.0

SUM=O.ODO

17
DO 10 1=1,

M

ARRAY (lOLl+I) = (X (I) -ARRAY (K) ) *ARRAY (IlLl+I)

1 -ARRAY (IBL2+K)*ARRAY(I0L1+I)

S=S+W(I) *ARRAY(I0L1+I) **2

TEMP=DBLE(F(I))-R(I)

10 SUM=SLIM+DBLE (W (I) ) DBLE (ARRAY (lOLl-^I) ) *TEMP

RN0=RN1

RN1=S

C

C SWAP INDICES SO II REFERS TO STORAGE OF CIK(.)

C AND 10 TO RK-1(.)

.

C

IT=I0L1

I0L1=I1L1

I1L1=IT

C

C CK IS THE COEFFICIENT C(K) HERE.

C

CK=SUM/RN1

ARRAY (IC+K)=CK

C

C CALCULATE THE VALUE OF THE FIT AT THE DATA POINTS AND

C ALSO THE RMS ERROR.

C

ERROR=0.0

DO 11 1=1,

M

R (I) =R (I) +CK*DBLE (ARRAY (IlLl+I)

)

11 ERROR=ERROR+W (I) SNGL (R (I) -DBLE (F (I) )

) * *2

IF(ERR0R.GT.ES.AND.EPS.GE.O.O)G0 TO 12

IF(NDEG.EQ.MAXDEG)GO TO 14

IF(ERR0R.LE.T0L.AND.EPS.GE.O.O)G0 TO 14

NDEG=NDEG+1

K=K+1

GO TO 8

C

C HERE IF ERROR INCREASED ON RAISING DEGREE.

C

12 NDEG=NDEG-1

ERROR=ES

DO 13 1=1,

M

13 R (I) =R (I) -CK*DBLE (ARRAY (IlLl+I)

)

C

C EXIT.

C

14 EPS=SQRT(ERROR/RM)

RETURN

END

FUNCTION EVAL(Y,N, ARRAY, MAXDEG)

C

C THE FUNCTION EVAL EVALUATES THE ORTHOGONAL POLYNOMIAL

C FIT COMPUTED BY LEAST AND SPECIFIED BY THE VECTOR

C ARRAY. THE FIT OF DEGREE N IS EVALUATED AT THE ARGUC MENT Y. N MUST BE LESS THAN OR EQUAL TO NDEG AS

C RETURNED FROM LEAST. LEAST IS CALLED ONLY ONCE FOR

C EACH FIT, BUT EVAL IS CALLED ONCE FOR EACH ARGUMENT

C AT WHICH WE RQUIRE THE VALUE OF THE FIT. MAXDEG MUST

C HAVE THE SAME VALUE AS IN THE CALL TO LEAST.

C

DIMENSION ARRAY (1)

18
IB=MAXDEG+1

IC=MAXDEG+IB-1

C

C EVALUATE N=0,1 AS SPECIAL CASES.

C

IF(N.GT.O)G0 TO 1 EVAL=ARRAY(IC)

RETURN

1 IF(N.GT.1)G0 TO 2

EVAL=ARRAY (IC) +ARRAY (IC+1) * (Y-ARRAY (1)

)

RETURN

C

C GENERAL RECURRENCE RELATION.

C

2 DKP2=ARRAY(IC+N)

DKP1=ARRAY (IC+N-1) (Y-ARRAY (N) ) *DKP2

NL2=N-2

IF(NL2.LT.1)G0 TO 4

DO 3 L=1,NL2

K=1+NL2-L

DK=ARRAY (IC+K) + (Y-ARRAY (K+1) ) DKPl

1 -ARRAY (IB-»-K)*DKP2

DKP2=DKP1

3 DKP1=DK

4 EVAL=ARRAY (IC) + (Y-ARRAY (1) ) *DKP1

1 -ARRAY (IB) *DKP2

RETURN

END

19
SUBROUTINE CUBIC (AO, A1,A2,R1,R2,R3)

C

C * THIS SUBROUTINE WAS WRITTEN BY JERRY LOWNEY * C TO SOLVE THE CUBIC EQUATION: * C * X*3 + A2*X^2 * A1*X + AO = 0 * C ^tf^f^itifi^t^ift^firm********** ************ **************

c COMPLEX X1,X2,X3,T,U,D,E,F

P=A2

Q=A1

R=AO

A=1./3*(3*Q-P**2)

B=l . /27* (2*P**3-9*P*Q+27*R)

D=B**2/4+A**3/27

E=-B/2+CSQRT(D)

IF(E.Eq.(0,0)) THEN

T=0

GO TO 15

END IF

IF(AIMAG(E) .EQ.O. .AND.REAL(E) .LT.O.)THEN

T=-EXP (ALOG (CABS (E) ) /3)

GO TO 15

END IF

T=CEXP(CL0G(E)/3)

15 F=-B/2-CSQRT(D)

IF(F.EQ.(0,0)) THEN

U=0

GO TO 16

END IF

IF(AIMAG(F) .EQ.O. .AND.REAL(F) .LT.O.)THEN

U=-EXP (ALOG (CABS (F) ) /3)

GO TO 16

END IF

U=CEXP(CL0G(F)/3)

16 X1=:T+U

X2=- . 5* (T+U) . 5* (T-U) CSQRT ( (-3 , 0)

)

X3=- . 5* (T+U) - . 5* (T-U) *CSQRT ( (-3 , 0)

)

Rl=:Xl-P/3

R2=X2-P/3

R3=X3-P/3

RETURN

END

20
Section IIIB. PASCAL Program

21
ASTMDSP [Pascal Version]

program as tmdsp ( Input , output , fn)

;

(*F-1 Proposal p 112*)

(*Interstitial Oxygen Content Of Silicon Slices By*)

(*Computer-Assisted Infrated Spectrophotometry*)

(*10/16/85*)

(*Double Side Polished*)

(*

*) (* Modified by Warren Gladden

(* date: 8/21/87

(*

*)

const

maxr=32

;

maxc=9

;

(*max data points in fit*)

(*max number of variables in fit*)

type

sstring

drayr

drayc

ddrayl

ddray2

packed array [1.. 40] of char;

array [ 1 . .maxr] of real;

array [ 1 .. maxc ] of real;

array [ 1 . .maxr , 1 . .maxc ] of real;

array [ 1 . .maxc , 1 . .maxc] of real;

(*filename type*)

(*array types for fits*)

(* *)

(* *)

(* *)

yar

coef ,nal : drayc

;

(*ls fit vars*)

x.y.yemp,

dual : drayr

;

(*ls vars*)

xl : array [ 1 .. 1001 ] of real; (*wavenumber array*)

yl : array [1. .1001] of real; (*transmittance array*) corco ,yco ,xco : real (*ls vars*)

xint ,xwave : real (*interpolate vars*)

smax2 , speak, tmaxl , smaxl , tmax2 : real (*astra vars*)

tr , thk : real (*temp trans , thick*)

rsdmaxl , rsdmax2 , rsdpeak : real (*residual vars*)

nmaxl , nmax2 , npeak : real (*# pts fit*)

apeak, abase , tpeak, temp , tempi : real (*abs pk.base*)

ppm, anet , latnet : real (*conc var*)

tbase, tbl,tb2 : real (*baseline var*)

al , a2 , a3 , alphas : real (*abs coef var*)

e , del , firstx , roffset : real (*uncertainty var*)

sumy2 , ysum2 : real (*stan. dev. var*)

nrow,ncol ,num,noffset : integer

;

(*array sizes and degree*)

startwave , endwave , wavel , wave

2

: integer

;

(*wavenumber limit for fit*)

dummy , i , j , xtemp : integer

;

(*loop and temp, var*)

fname , fnames , j unk : string [ 14 ] ; (*f ilename , ref, samp*)

fn : text; (*file var*)

(*

*) procedure base;

begin

tbl :=smax2- speak;

(*baseline @ oxygen*)

22
tb2 : =speak- smaxl

;

tbase :=tbl*tmaxl+tb2*tmax2

;

tbase :=tbase/(smax2-smaxl)

;

end;

(*

*) procedure alpha; (*absorption coefficient*)

begin

al :=-0.49+sqrt(0. 2401+0. 36*sqr ( tr) )

;

a2:=al/(0.18*tr)

;

a3:=ln(a2);

alphas :=-l/thk*a3;

end;

(*

*) procedure uncertainty; (*non-s3mimetrical uncertainty*)

begin

e: = (rsdmaxl/(ninaxl-4) ) + (rsdpeak/(npeak-5) ) + (rsdniax2/(ninax2-4) )

;

e:=2*sqrt(e)

;

end;

(*

*) procedure standev; (*standard deviation*)

begin

svuny2 : =0

;

ysum2 :=0

j:=0;

for i:=l to num do

begin

if (xl[i]>=2000) and (xl [ i]<=2060) then

begin

sumy2 : =yl [ i

] *y 1 [ i

] +sumy2

;

ysum2 : =yl [ i

] +ysum2

;

j:=j+i:

end

;

end;

ysum2 :=sqr (ysuin2)

;

ysuin2 :=ysuni2/j ; suiny2 :=s\iiny2-ysuin2

;

sumy2 :=suiny2/( j -2)

sumy2 :=sqrt(sumy2)

;

end;

(*

*) procedure OpenlnFile;

var

OK : boolean;

begin

repeat

write ('Enter name of transmittance file: ');

readln(fnaine) ; assign(fn, fname)

;

{$!-} reset(fn) {$1-);

OK:=(IOresult = 0);

if not OK then write In (' Cannot find file: ', fname);

until OK;

end;

23
(*-

*) procedure OpenFile;

begin

assign(fn,fnaine) ; rewrite(fn)

;

end;

(*

*) procedure sorttrans; (*move target trans values*)

begin

for i:=l to num do

begin

if (xl [i]>=wavel) and (xl [ i]<=wave2) then

begin

if j=l then startwave :=i

;

x[j]:=xl[i];

y[j]:=yi[i];

j:=j+i;

end;

end;

nrow : =j - 1

;

endwave : =s tartwave+j - 2

;

end;

(*

*) procedure minmax; (*sort trans values*)

begin

for i:=l to nrow-1 do

for j :=i+l to nrow do

begin

if y[i]<y[j] then

begin

temp:=y[i]; tempi :=x[i];

y[i]:=y[j]; x[i]:=x[j];

y[j]:=temp; x[ j ] :=templ

;

end;

end;

end;

(*

*) procedure dataout; (*output fit results to file*)

var

i : integer

;

to ' ,wave2)

;

begin

writeln(fn,wavel ,

writeln(fn)

;

writeln(fn, ' y ycalc residual');

writeln(fn)

;

for i:=l to nrow do

writeln(fn,x[i] :7:4, '

' ,y [ i] : 10 : 6

, ' ' ,yemp [ i] : 10 : 6 , dual [ i] :9:3)

;

writeln(fn)

;

writeln(fn, ' correlation coef is ' , corco : 8 : 5)

;

writeln(fn)

;

for i:=l to ncol do

writeln(fn, ' coefficient ' , coef [ i ] )

;

24
writeln(fn)

;

end;

(*

*) procedure s2

(var x:ddrayl;

var y:drayr;

var a:ddray2;

var g:drayc;

var nrow.ncol : integer)

;

(*least squares fit to # of*)

(*x,y points in nrow*)

var

i.k,l : integer;

begin

for k:=l to ncol do

begin

for 1:=1 to k do

begin

a[k.l]:=0;

for i:=l to nrow do

begin

a[k,l]:=a[k,l]+x[i.l]*x[i.k];

if kO>l then a[ 1 ,k] :=a[k, 1]

end

end;

g[k]:=0;

for i:=l to nrow do

g[k]:=g[k]+y[i]*x[i,k]

end

end;

(*

*) procedure curvel (var b :ddray2;

y : drayc

;

var coef : drayc;

ncol : integer)

;

varw

cfile

i,j ,k,l,nv,rw,cl,n,ll

sure , triad , keep , sum , t , ab , great

*

: array [ 1 . .maxc , 1 . .maxc ] of real;

; array [ 1 . .maxc , 1 . .maxc] of integer;

: integer;

; real

;

(*) procedure xchng(var a,b:real);

var

keep

begin

keep :=a; a:=b;

b : =keep

;

end;

(*

*) procedure curve2;

: real

;

(*swap*)

25
var

i,j,k,l,ll :integer;

(*

*) procedure curve3;

var

1 : integer

;

begin

if rwOcl then

begin

sure :=- sure

;

for 1:=1 to n do

xchng(b[rw,l] ,b[cl,l])

;

if nv>0 then

for 1:=1 to nv do

xchng(w[rw, 1] ,w[cl , 1]

)

end

end;

begin

nv:=l

;

n:=ncol

;

for i:=l to n do

begin

w[i,l]:=y[i];

cfile[i,3] :=0

end;

sure:=l .0;

for i:=l to n do

begin

great: =0,0;

for j :=1 to n do

begin

if cfile[j ,3]Ol then

begin

for k:=l to n do

begin

if cfile[k,3]<l then

if abs(b[ j ,k] )>great then

begin

rw:=j ; cl:=k;

great :=abs(b[j ,k]

)

end

end

end

end;

cfile[cl,3] :=cfile[cl,3]+l;

cfile [ i , 1 ] :=rw; cfile[i,2] :=cl; curve 3

;

triad:=b[cl,cl]

;

26
sure : =sure*triad

;

b[cl,cl] :=1.0;

for 1:=1 to n do

b[cl,l] :=b[cl,l]/triad;

if nv>0 then

for 1:=1 to nv do

w[cl,l] :=w[cl,l]/triad;

for 11 :=1 to n do

begin

if llOcl then

begin

t:=b[ll,cl];

b[ll,cl] :=0.0;

for 1:=1 to n do

b[ll,l]:=b[ll,l]-b[cl,l]*t;

if nv>0 then

for 1:=1 to nv do

w[ll,l]:=w[ll,l]-w[cl.l]*t;

end

end

end;

end;

begin

curve 2

;

for i:=l to n do

begin

l:=n-i+l;

if cfile[l,l]Ocfile[l,2] then

begin

rw:=cfile [1,1]

;

cl:=cfile[l,2]

;

for k:=l to n do

xchng (b[k,rw] ,b[k,cl])

end

end;

for i:=l to n do

coef [i] :=w[i,l]

;

end;

(*

*) procedure curve (x,y :drayr;

var yemp : drayr

;

var dual : drayr

;

var coef :drayc;

var nal rdrayc;

nrow : integer; var ncol : integer);

var

xmatr : ddrayl

;

a : ddray2

g : drayc

;

27
i.j.nm : integer;

xi ,yi ,yc , srs , see , suni__y , sum_y2 :real;

begin

for i:=l to nrow do

begin

xi:=x[i];

xmatr[i, 1] :=1 .0;

for j :=2 to ncol do

xmatr[i, j ] :=xinatr[i, j

- l]*xi

end;

s2(xmatr ,y ,a,g,nrow,ncol)

;

curvel(a,g,coef ,ncol)

;

stim_y : =0 . 0

;

sum_y2 : =0 . 0

;

srs:=0.0;

for i:=l to nrow do

begin

yi:=y[i];

yc:=0.0;

for j :=1 to ncol do

yc :=yc+coef [ j ]*xmatr [ i , j ]

;

yemp [ i ]

: =yc

;

dual[i] :=yc-yi; srs :=srs+sqr (dual [ i] )

;

sum_y : =suin_y+yi

;

siam__y2 : =sum_y2+yi*yi

;

end;

corco:=sqrt(l .0- srs/ (sum_y2-sqr(suin_y) /nrow) )

;

if nrow=ncol then nm:=l

else nm:=nrow-ncol

;

see :=sqrt(srs/nm)

;

for i:=l to ncol do

nal[i] :=see*sqrt(a[i, i]

)

end;

(*

*) procedure polythree;

begin

xco :=x[ 1

] -2

;

temp : =0 . 0

;

tempi :=0 . 0

;

for i:=l to 400 do

begin

xco :=xco+0 , 01

;

yco:=coef [1 ]+coef [2]*xco+coef [ 3]*sqr(xco)+coef [4]*xco*sqr(xco)

;

if yco>temp then

begin

temp : =yco

;

tempi :=xco;

end; (*if*)

end; (*loop*)

xtemp : =trunc ( temp 1 )

;

xint : =temp 1 - trunc ( temp 1 )

;

xwave:=xl [xtemp+startwave]+xint*l .925;

28
end; (*polythree*)

(*

*) procedure polyfour;

begin

xco:=x[nrow] -2

;

temp: =10.0;

tempi : =0.0;

for i:=l to 400 do

begin

xco:=xco+0.01

;

yco :=coef [1 ]+coef [2]*xco+coef [3]*sqr(xco)+coef [4]*xco*sqr(xco)+coef [5]*sqr(xco)*

if yco<temp then

begin

temp : =yco

;

tempi :=xco

;

end; (*if*)

end; (*loop*)

xtemp : =trunc ( tempi )

;

xint : =temp 1 - t rune ( temp 1 )

;

xwave :=xl [xtemp+startwave]+xint*l . 925 ;

' end; (*polyfour*)

(*

*) procedure Isl;

begin

j:=i:

wavel:=1010;

wave2:=1060;

sorttrans

;

for i:=l to nrow do

x[i]:=i;

ncol:=3;

begin

ncol :=ncol+l

;

curve (x , y , yemp , dual , coef , nal , nrow , ncol)

;

dataout

;

end;

minmax

;

polythree;

smaxl :=xwave

;

tmaxl :=temp

;

rsdmaxl : =nal [ 1 ]

;

nmaxl :=nrow;

writeln(fn)

;

writeln(fn, ' tmaxl ', tmaxl);

writeln(fn, ' smaxl ', smaxl);

writeln(fn, ' rsdmaxl ', rsdmaxl);

writeln(fn, '# pts, fit ',nrow);

writeln(fn)

;

end; (*lsl*)

(*

*) procedure ls2;

begin

j:=i:

wavel -.=1090;

29
wave2:=1123;

sorttrans

;

for i:=l to 17 do

x[i]:=i;

ncol :=4;

begin

ncol :=ncol+l

;

curve (x,y,yemp, dual ,coef ,nal,nrow,ncol)

;

dataout

;

end;

minmax

;

polyfour;

speak :=xwave

;

tpeak:=temp

;

rsdpeak : =nal [ 1 ]

;

npeak:=nrow;

writeln(fn)

;

writeln(fn, ' tpeak '.tpeak);

writeln(fn, ' speak '.speak);

writeln(fn, 'rsdpeak '

, rsdpeak)

;

writeln(fn, '# pts. fit ',nrow);

writeln(fn)

;

end; (*ls2*)

*) procedure ls3;

begin

j:=i;

wavel :=1200;

wave2:=1260;

sorttrans

;

for i:=l to 32 do

x[i]:=i;

ncol : =3

;

begin

ncol :=ncol+l

;

curve (x.y.yemp, dual, coef,nal,nrow, ncol)

;

dataout

;

end;

minmax

;

polythree

;

smax2 : =xwave

;

tmax2 : =temp

;

rsdmax2 : =nal [ 1 ]

;

nmax2 :=nrow;

writeln(fn)

;

writeln(fn, ' tmax2 ',tmax2);

writeln(fn, ' smax2 ',smax2);

writeln(fn, ' rsdmax2 ',rsdmax2);

writeln(fn, '# pts. fit ',nrow);

writeln(fn)

;

end; (*ls3*)

(*

*) procedure fileout; (*output results*)

begin

30
fname:='resltd51 .dat'

;

OpenFile

;

writeln(fn, ' sample file name

vn:iteln(fn, ' thickness (mils)

writeln(fn)

;

writeln(fn, 'tbase

writeln(fn, 'tpeak

writeln(fn, 'abase

writeln(fn, 'apeak

writeln(fn)

;

writeln(fn, 'anet

writeln(fn, 'uncertainty write In ( fn, ' standard deviation

writeln(fn, 'ppm (6.28)

close(fn)

;

, fnames)

;

,thk/0. 00254);

, tbase)

;

, tpeak)

, abase)

;

, apeak)

;

, anet)

;

,e)

;

,sumy2)

;

,ppm)

;

end;

(*--

*) begin (*MAIN PROGRAM*)

OpenlnFile

;

fnames : =fname

;

readln(fn,num)

;

writeln(num)

;

for i:=l to num do

begin

readln(fn, dummy ,xl [ i] ,yl [ i] )

;

if yl[i]>1.0 then yl [i] :=yl [i]/100;

end;

close(fn)

;

del:=xl[2]-xl[l]

;

f irstx:=xl [ 1 ]

;

roffset :=(f irstx/del) ; (* noffset :=int (roffset) ; *)

writeln(roffset , del , f irstx)

;

writeln( ' thickness (cm) ');

readln(thk)

;

thk:=thk*1.0;

fname : = ' leas t . dat

'

;

OpenFile

;

writeln(fn, ' sample file name '.fnames);

writeln(fn, ' thickness (cm) ',thk/1.0);

writeln(fn)

;

close(fn)

;

base

;

tr :=tbase;

alpha;

abase : =alphas

;

tr :=tpeak;

alpha

;

apeak : =alphas

;

anet : =apeak-abase

;

latnet:=anet-0. 5

;

Isl;

ls2;

ls3;

31
ppm : =latnet*6 . 28

;

uncertainty;

standev;

writeln( 'OXYGEN PPM (6.28) '.ppm);

writeln;

write In ('UNCERTAINTY ',e);

writeln;

writeln( ' STANDARD DEVIATION '

, sximy2) ; fileout

;

end.

32
Section IV. SAMPLE DATA

The data are listed in three columns, with two sets of three columns per page. The first column is just an index number. The second column lists the wavenumber, and the third

column lists the transmittance at that wavenumber. The single integer number at the head

of each spectrum is the number of data points in that spectrum.

33
Samp 1le: 1 840

D07

261 501 .401 0 .46960

262 503 .330 0 .46700

263 505 .258 0 .46442

264 507 .187 0 . 46066

265 509 .115 0 .45473

266 511 .044 0 .44725

267 512 .972 0 .44130

268 514 .901 0 .44220

269 516 .829 0 .44576

270 518 .758 0 .44822

271 520 .686 0 .45390

272 522 .615 0 .45969

273 524 .543 0 .46176

274 526 .471 0 .46235

275 528 .400 0 .46203

276 530 .328 0 .46114

277 532 .257 0 .46034

278 534 .185 0 .45943

279 536 .114 0 .45866

280 538 .042 0 .45804

281 539 .971 0 .45698

282 541 .899 0 .45474

283 543 .828 0 .45230

284 545 .756 0 .45063

285 547 .685 0 .44929

286 549 .613 0 .44864

287 551 .542 0 .44810

288 553 .470 0 .44630

289 555 .398 0 .44405

290 557 .327 0,. 44202

291 559 .255 0,.44026

292 561 .184 0,.43863

293 563,.112 0,.43723

294 565,.041 0,,43681

295 566,,969 0,,43722

296 568,,898 0.,43896

297 570,,826 0.,44246

298 572..755 0..44637

299 574.,683 0.,44892

300 576.,612 0. 44954

301 578.,540 0. 44934

302 580.,469 0. 44890

303 582.,397 0. 44707

304 584, 326 0. 44355

305 586. 254 0. 43886

306 588. 182 0. 43340

307 590. 111 0. 42661

308 592. 039 0. 41782

309 593. 968 0. 40774

310 595. 896 0. 39597

311 597. 825 0. 38115

312 599. 753 0. 36256

313 601. 682 0. 34260

314 603. 610 0. 32663

315 605. 539 0. 31448

316 607. 467 0. 30306

317 609. 396 0. 29526

318 611 .324 0 . 29407

319 613 .253 0 .29794

320 615 .181 0 .30223

321 617 .109 0 .30424

322 619 .038 0 .30586

323 620 .966 0 .31074

324 622 .895 0 .32582

325 624 .823 0 .35559

326 626 .752 0 .39533

327 628 .680 0 .43551

328 630 .609 0 .46502

329 632 .537 0 .47996

330 634 .466 0 .48596

331 636 .394 0 .48837

332 638 .323 0 .49016

333 640 .251 0 .49234

334 642 .180 0 .49368

335 644 .108 0 .49471

336 646 .036 0 .49555

337 647 .965 0 .49591

338 649,.893 0 .49675

339 651,.822 0,.49760

340 653,.750 0,.49810

341 655,,679 0,.49854

342 657,,607 0.,49898

343 659,,536 0,,49959

344 661.,464 0.,49968

345 663.,393 0,,49990

346 665.,321 0.,49975

347 667.,250 0.,49796

348 669. 178 0. 49785

349 671.,107 0.,50024

350 673. 035 0..50163

351 674. 963 0. 50216

352 676. 892 0. 50297

353 678. 820 0. 50352

354 680. 749 0..50305

355 682. 677 0. 50219

356 684. 606 0. 50201

357 686. 534 0. 50235

358 688. 463 0. 50276

359 690. 391 0. 50286

360 692. 320 0. 50254

361 694. 248 0. 50323

362 696. 177 0. 50546

363 698. 105 0. 50767

364 700. 034 0. 50817

365 701. 962 0. 50730

366 703. 890 0. 50631

367 705. 819 0. 50468

368 707. 747 0. 50161

369 709. 676 0. 49768

370 711. 604 0. 49243

371 713. 533 0. 48546

372 715. 461 0. 47828

373 717. 390 0. 47242

374 719.318 0. 46809

375 721. 247 0. 46433

376 723. 175 0. 46016

34
377 725 .104 0 .45587

378 727 .032 0 .45224

379 728 .961 0 .44886

380 730 .889 0 .44554

381 732 .817 0 .44276

382 734 .746 0 .43980

383 736 .674 0 .43686

384 738 .603 0 .43605

385 740 .531 0 .43816

386 742 .460 0 .44186

387 744 .388 0 .44549

388 746 .317 0 .44848

389 748 .245 0 .45117

390 750 .174 0 .45307

391 752 .102 0 .45431

392 754 .031 0 .45566

393 755 .959 0 .45651

394 757 .888 0 .45704

395 759 .816 0 .45794

396 761 .745 0 .45926

397 763 .673 0 .46062

398 765 .601 0 .46116

399 767 .530 0 .46109

400 769 .458 0 .46123

401 771 .387 0 .46151

402 773 .315 0 .46171

403 775 .244 0 .46163

404 777 .172 0 .46167

405 779 .101 0 .46222

406 781 .029 0 .46290

407 782 .958 0 .46355

408 784,.886 0 ,46413

409 786,,815 0,,46439

410 788,,743 0,,46463

411 790.,672 0,, 46507

412 792..600 0,.46578

413 794..528 0. 46716

414 796. 457 0. 46973

415 798. 385 0. 47269

416 800. 314 0. 47414

417 802. 242 0. 47344

418 804. 171 0. 47130

419 806. 099 0. 46875

420 808. 028 0. 46692

421 809. 956 0. 46560

422 811. 885 0. 46432

423 813. 813 0. 46300

424 815. 742 0. 46196

425 817. 670 0. 46176

426 819. 599 0. 46219

427 821. 527 0. 46323

428 823. 455 0. 46511

429 825. 384 0. 46756

430 827. 312 0. 47035

431 829. 241 0. 47370

432 831. 169 0. 47722

433 833. 098 0. 47986

434 835. 026 0. 48132

435 836. 955 0. 48239

436 838 .883 0 .48299

437 840 .812 0 .48252

438 842 .740 0 .48117

439 844 .669 0 .47958

440 846 .597 0 .47846

441 848 .526 0 .47769

442 850 .454 0 .47675

443 852,.382 0 .47558

444 854,.311 0 .47381

445 856,.239 0 .47217

446 858,.168 0 .47083

447 860,,096 0 .46848

448 862,,025 0 .46577

449 863.,953 0 .46384

450 865.,882 0 .46251

451 867. 810 0 .46162

452 869..739 0,.46074

453 871. 667 0,.45976

454 873. 596 0..45898

455 875. 524 0..45840

456 877. 453 0,,45814

457 879. 381 0,,45767

458 881. 309 0.,45655

459 883. 238 0.,45538

460 885. 166 0.,45449

461 887. 095 0..45431

462 889. 023 0..45481

463 890. 952 0..45488

464 892. 880 0..45447

465 894. 809 0..45435

466 896. 737 0..45475

467 898. 666 0..45508

468 900. 594 0..45530

469 902. 523 0..45612

470 904. 451 0..45761

471 906. 380 0..45901

472 908. 308 0..46016

473 910. 236 0.,46137

474 912. 165 0.,46300

475 914. 093 0.,46478

476 916. 022 0.,46641

477 917. 950 0..46779

478 919. 879 0.,46885

479 921. 807 0.,46997

480 923. 736 0.,47143

481 925. 664 0.,47271

482 927. 593 0..47343

483 929, 521 0.,47395

484 931. 450 0.,47474

485 933. 378 0. 47570

486 935. 307 0. 47667

487 937. 235 0. 47742

488 939. 163 0. 47766

489 941. 092 0. 47777

490 943. 020 0, 47796

491 944. 949 0. 47769

492 946. 877 0. 47711

493 948. 806 0. 47686

494 950. 734 0. 47682

35
495 952 .663 0 .47634

496 954 .591 0 .47555

497 956 .520 0 .47529

498 958 .448 ' 0 .47553

499 960 .377 0 .47556

500 962 .305 0 .47536

501 964 .234 0 .47537

502 966 .162 0 .47577

503 968 .090 0 .47627

504 970 .019 0 .47666

505 971 .947 0 .47733

506 973 .876 0 .47826

507 975 .804 0 .47913

508 977 .733 0 .47996

509 979 .661 0 .48104

510 981 .590 0 .48221

511 983 .518 0 .48332

512 985 .447 0 .48455

513 987 .375 0 .48575

514 989 .304 0 .48692

515 991 .232 0 .48838

516 993 .161 0 .48969

517 995 .089 0 .49079

518 997.017 0 .49185

519 998 .946 0 .49266

520 1000 .874 0 .49337

521 1002 .803 0 .49408

522 1004,.731 0,.49472

523 1006,.660 0,.49550

524 1008,,588 0,.49630

525 1010,,517 0,.49681

526 1012,,445 0,,49720

527 1014,,374 0,,49795

528 1016.,302 0.,49895

529 1018.,231 0. 49967

530 1020. 159 0. 50038

531 1022. 088 0. 50105

532 1024. 016 0. 50145

533 1025. 944 0. 50199

534 1027. 873 0. 50242

535 1029. 801 0. 50244

536 1031. 730 0. 50266

537 1033. 658 0. 50295

538 1035. 587 0. 50319

539 1037. 515 0. 50343

540 1039. 444 0. 50351

541 1041. 372 0. 50333

542 1043. 301 0. 50303

543 1045. 229 0. 50285

544 1047. 158 0. 50273

545 1049. 086 0. 50239

546 1051. 015 0. 50183

547 1052. 943 0. 50132

548 1054. 871 0. 50111

549 1056. 800 0. 50069

550 1058. 728 0. 49976

551 1060. 657 0. 49881

552 1062. 585 0. 49780

553 1064. 514 0. 49681 f IT

M 554 1066 .442 0 .49577 C F f 555 1068 .371 0 .49413

556 1070 ftft ft .299 0 .49227

ITr "7 557 1072 ft ft ft .228 0 . 49030

ceo 568 1074 . 156 0 J ft "T ^ ^ .48766 c c ri 559 1076 .085 ft0 .48458

CCA 560 1078 .013 ft0 J ft 1 ft

F .48105

561 1 ft "7 ft 1079 ft

J ft .942 0 .47694

562 1081 ft

T .870 0 .47217

if r» o 563 4 Aft o 1083 ^ft ft .798 0 .46656

564 1085 ft ^ .121 0 . 46026

565 1087 ^ F

F .655 0 .45329

f> 566 1089 .584 0 .44575

567 1091 .512 0 .43788

568 1093 .441 0 .42984

569 1095 .369 0 .42187

570 1097 ft ft ft .298 0 .41427

571 4 /\ftft 1099 Oft

O .226 ft0 A ft "7 ^ ft .40762

572 1101 < F

F .155 0 .40221

573 1103 .083 0

ft ft *Tft ft .39798

574 1105.012 0 .39523

575 1106,.940 0 . 39405

576 1108 ,.869 0

ft ftJ ft ft .39428

577 1110,.797 0

ft ft ^ 4 ft .39610

578 1112,,725 0 O ft ft ft ft .39932 T 579 1114 ,

,654 0 . 40384

580 1116,.582 0 .40977

581 1118 ,

,511 0 .41668

FO 582 1120,.439 0 J ft ,j ft ft .42433

FOO 583 1122..368 0,

A ftft^A .43274

FOJ 584 1124.,296 0,.44144 F O F 585 1126,,225 0, A Fft.Oft .45002 F ft ^ 586 1128,,153 0, A r* Tft .45796 F ft T 587 1130,,082 0,,46495 F ft ft 588 1132,.010 0,,47091 F ft ft 589 1133,,939 0. J ^ F ft ft ,47589

590 1135,,867 0,

A ^ftftft ,47999

F ft 4 591 1137,,796 0,A ft ft ft ft ,48322

F ftft 592 1139,,724 0,J ftF ft ft ,48583

593 1141, 652 0,,48783

FftA 594 1143.,581 0,,48921 F ft r 595 1145.,509 0., 49030

596 1147. 438 0,,49132

*T 597 1149.,356 0.,49233

598 1151. 295 0.

,4 ft ft 4 ft ,49310

599 1153. 223 0.

A ^ A 49364

600 1155. 152 0. 49431

601 1157. 080 0.49511

602 1159. 009 0. 49594

603 1160. 937 0. 49662

604 1162. 866 0. 49698

605 1164. 794 0. 49730

606 1166. 723 0. 49781

ft^ 607 1168. 651 0. 49837

608 1170.579 0. 49881

609 1172. 508 0. 49930

610 1174. 436 0. 49998

611 1176. 365 0. 50071

612 1178. 293 0. 50142

36
613 1180 .222 0 .50189

614 1182 .150 0 .50200

615 1184 .079 0 . 50221

616 1186 .007 0 .50274

617 1187 .936 0 .50346

618 1189 .864 0 .50419

619 1191 .793 0 .50478

620 1193 .721 0 . 50539

621 1195 .650 0 . 50601

622 1197 .578 0 .50655

623 1199 .506 0 .50716

624 1201 .435 0 .50776

625 1203 .363 0 .50819

626 1205 .292 0 .50861

627 1207 .220 0 . 50901

628 1209 .149 0 . 50933

629 1211 .077 0 . 50969

630 1213 .006 0 . 50997

631 1214 .934 0 .51005

632 1216 .863 0 .50998

633 1218 .791 0 .51005

634 1220 .720 0 .51017

635 1222 .648 0 .51010

636 1224,.577 0 .50998

637 1226 .505 0..50992

638 1228,.433 0,. 50992

639 1230..362 0,, 50994

640 1232,,290 0,,51012

641 1234,,219 0,,51048

642 1236,,147 0.,51074

643 1238.,076 0. 51078

644 1240. 004 0. 51074

645 1241. 933 0. 51070

646 1243. 861 0. 51064

647 1245. 790 0. 51059

648 1247. 718 0. 51066

649 1249. 647 0. 51079

650 1251. 575 0. 51089

651 1253. 504 0. 51082

652 1255. 432 0. 51071

653 1257. 360 0. 51073

654 1259. 289 0. 51092

655 1261. 217 0. 51102

656 1263. 146 0. 51093

657 1265. 074 0. 51068

658 1267. 003 0. 51056

659 1268. 931 0. 51055

660 1270. 860 0. 51057

661 1272. 788 0. 51048

662 1274. 717 0. 51019

663 1276. 645 0. 50994

664 1278. 574 0. 50988

665 1280. 502 0. 50955

666 1282. 431 0. 50910

667 1284. 359 0. 50887

668 1286. 287 0. 50878

669 1288. 216 0. 50850

670 1290. 144 0. 50814

671 1292. 073 0. 50792

672 1294 .001 0 .50787

673 1295 .930 0 . 50792

674 1297 .858 0 .50812

675 1299 .787 0 .50813

676 1301 .715 0 . 50794

677 1303 .644 0 .50810

678 1305 .572 0 .50853

679 1307 .501 0 . 50889

680 1309 .429 0 .50915

681 1311 .358 0 . 50936

682 1313 .286 0 .50971

683 1315 .214 0 .51023

684 1317 .143 0 .51061

685 1319 .071 0 .51082

686 1321 .000 0 .51122

687 1322 .928 0 .51174

688 1324 .857 0 .51212

689 1326 .785 0 .51265

690 1328 .714 0 .51327

691 1330 .642 0 .51348

692 1332 .571 0 .51350

693 1334 .499 0 .51353

694 1336 .428 0 .51361

695 1338 .356 0 .51396

696 1340 .285 0 .51428

697 1342 .213 0 .51443

698 1344 .141 0 .51459

699 1346 .070 0 .51465

700 1347 .998 0 .51461

701 1349 .927 0 .51454

702 1351,.855 0 .51443

703 1353,.784 0 .51436

704 1355,.712 0 .51432

705 1357,.641 0,.51420

706 1359,.569 0,.51402

707 1361,,498 0,.51388

708 1363,,426 0,,51366

709 1365,,355 0,,51346

710 1367.,283 0.,51335

711 1369.,212 0.,51327

712 1371.,140 0. 51330

713 1373. 068 0. 51328

714 1374. 997 0. 51315

715 1376. 925 0. 51315

716 1378. 854 0. 51337

717 1380. 782 0. 51381

718 1382. 711 0. 51427

719 1384. 639 0. 51427

720 1386. 568 0. 51387

721 1388. 496 0. 51363

722 1390. 425 0. 51374

723 1392. 353 0. 51375

724 1394. 282 0. 51365

725 1396. 210 0. 51381

726 1398. 139 0. 51402

727 1400.067 0. 51414

728 1401. 995 0. 51427

729 1403. 924 0. 51414

730 1405. 852 0. 51394
731 1407 .781 0 .51388

732 1409 .709 0 .51374

733 1411 .638 0 .51358

734 1413 .566 0 .51347

735 1415 .495 0 .51326

736 1417 .423 0 .51295

737 1419 .352 0 .51267

738 1421 .280 0 .51257

739 1423 .209 0 .51238

740 1425 .137 0 .51191

741 1427 .066 0 .51141

742 1428 .994 0 .51095

743 1430 .922 0 .51048

744 1432 .851 0 .51000

745 1434 .779 0 . 50952

746 1436 .708 0 .50900

747 1438,.636 0,.50851

748 1440,.565 0,.50808

749 1442,.493 0,, 50774

750 1444,,422 0,.50751

751 1446,,350 0,,50751

752 1448,.279 0,,50763

753 1450..207 0,,50780

754 1452.,136 0.,50819

755 1454.,064 0. 50864

756 1455. 993 0. 50903

757 1457.,921 0. 50944

758 1459. 849 0. 51000

759 1461. 778 0. 51082

760 1463. 706 0. 51173

761 1465. 635 0. 51277

762 1467. 563 0. 51373

763 1469. 492 0. 51440

764 1471. 420 0. 51513

765 1473. 349 0. 51603

766 1475. 277 0. 51696

767 1477. 206 0. 51785

768 1479. 134 0. 51858

769 1481. 063 0. 51921

770 1482. 991 0. 51980

771 1484. 920 0. 52036

772 1486. 848 0. 52092

773 1488. 777 0. 52136

774 1490. 705 0. 52176

775 1492. 634 0. 52206

776 1494. 562 0. 52220

777 1496. 490 0. 52234

778 1498. 419 0. 52277

779 1500. 347 0. 52334

780 1502. 276 0. 52356

781 1504. 204 0. 52333

782 1506. 133 0. 52331

783 1508.061 0. 52369

784 1509. 990 0. 52403

785 1511. 918 0. 52416

786 1513. 847 0. 52423

787 1515. 775 0. 52438

788 1517. 704 0. 52441

789 1519. 632 0. 52430

790 1521 .561 0 .52416

791 1523 .489 0 .52417

792 1525 .417 0 .52428

793 1527 .346 0 .52438

794 1529 .274 0 .52457

795 1531 .203 0 .52483

796 1533 .131 0 .52492

797 1535 .060 0 .52489

798 1536 .988 0 .52458

799 1538 .917 0 .52418

800 1540 .845 0,.52420

801 1542 .774 0,.52441

802 1544,.702 0,.52452

803 1546,.631 0,.52467

804 1548 .559 0 .52470

805 1550 .488 0,.52466

806 1552 .416 0,.52489

807 1554 .344 0,.52515

808 1556 .273 0,.52492

809 1558 .201 0,.52432

810 1560 .130 0,.52407

811 1562 .058 0,.52440

812 1563 .987 0,.52477

813 1565 .915 0,.52494

814 1567 .844 0,.52497

815 1569 .772 0 .52493

816 1571 .701 0,.52489

817 1573 .629 0,.52490

818 1575 .558 0,.52494

819 1577 .486 0 .52512

820 1579 .415 0 .52523

821 1581 .343 0 .52513

822 1583 .271 0,.52508

823 1585 .200 0,.52516

824 1587,.128 0,.52524

825 1589,.057 0,.52529

826 1590,.985 0,,52518

827 1592,.914 0,,52508

828 1594,.842 0.,52518

829 1596,,771 0.,52524

830 1598,.699 0. 52525

831 1600,,628 0. 52528

832 1602.,556 0., 52530

833 1604.,485 0. 52532

834 1606.,413 0. 52535

835 1608. 342 0. 52531

836 1610. 270 0. 52530

837 1612. 198 0. 52528

838 1614. 127 0. 52519

839 1616. 055 0. 52514

840 1617. 984 0. 52536

841 1619. 912 0. 52554

842 1621. 841 0. 52531

843 1623. 769 0. 62509

844 1625. 698 0. 52523

845 1627. 626 0. 52535

846 1629. 555 0. 52542

847 1631. 483 0. 52549

848 1633. 412 0. 52546

38
849 1635 .340 0 .52541

850 1637 .269 0 .52558

851 1639 .197 0 .52578

852 1641 .125 0 .52573

853 1643 .054 0 .52561

854 1644 .982 0 .52551

855 1646 .911 0 .52546

856 1648 .839 0 .52557

857 1650 .768 0 . 52550

858 1652 .696 0 .52520

859 1654 .625 0 . 52530

860 1656 .553 0 .52567

861 1658 .482 0 .52583

862 1660 .410 0 .52572

863 1662 .339 0 .52553

864 1664 .267 0 .52555

865 1666 .196 0 .52571

866 1668 .124 0 .52583

867 1670 .052 0 .52593

868 1671 .981 0,.52602

869 1673,.909 0,, 52604

870 1675,.838 0,,52602

871 1677,.766 0.,52597

872 1679,,695 0.,52602

873 1681.,623 0. 52600

874 1683.,552 0. 52571

875 1685. 480 0. 52562

876 1687. 409 0. 52592

877 1689. 337 0. 52612

878 1691. 266 0. 52609

879 1693. 194 0. 52597

880 1695. 123 0. 52575

881 1697. 051 0. 52559

882 1698. 979 0. 52543

883 1700. 908 0. 52525

884 1702. 836 0. 52522

885 1704. 765 0. 52516

886 1706. 693 0. 52483

887 1708. 622 0. 52461

888 1710. 550 0. 52452

889 1712. 479 0. 52444

890 1714. 407 0. 52427

891 1716. 336 0. 52381

892 1718. 264 0. 52349

893 1720. 193 0. 52360

894 1722. 121 0. 52376

895 1724. 050 0. 52372

896 1725. 978 0. 52366

897 1727. 906 0. 52365

898 1729. 835 0. 52389

899 1731. 763 0. 52414

900 1733. 692 0. 52427

901 1735. 620 0. 52457

902 1737. 549 0. 52496

903 1739. 477 0.52516

904 1741. 406 0. 52540

905 1743. 334 0. 52581

906 1745. 263 0. 52608

907 1747. 191 0. 52624

908 1749 .120 0 .52641

909 1751 .048 0 .52664

910 1752 .977 0 .52691

911 1754 .905 0 .52717

912 1756 .833 0 .52733

913 1758 .762 0 .52746

914 1760 .690 0 .52749

915 1762 .619 0 .52755

916 1764 .547 0 .52766

917 1766 .476 0 .52769

918 1768 .404 0 .52766

919 1770 .333 0 .52753

920 1772 .261 0 .52748

921 1774 .190 0 .52757

922 1776 .118 0 .52767

923 1778 .047 0 .52772

924 1779 .975 0 .52768

925 1781 .904 0 .52766

926 1783 .832 0 .52773

927 1785 .760 0 .52784

928 1787 .689 0 .52794

929 1789 .617 0 .52785

930 1791 .546 0 .52773

931 1793 .474 0 .52771

932 1795 .403 0 .52773

933 1797 .331 0 .52777

934 1799 .260 0 .52783

935 1801 .188 0 .52790

936 1803 .117 0 .52797

937 1805 .045 0 .52794

938 1806 .974 0 .52784

939 1808,.902 0,.52778

940 1810,.831 0,.52785

941 1812,,759 0,.52798

942 1814,,688 0,,52802

943 1816,,616 0,, 52809

944 1818.,544 0.,52824

945 1820.,473 0.,52826

946 1822.,401 0. 52815

947 1824. 330 0. 52799

948 1826. 258 0. 52797

949 1828. 187 0. 52810

950 1830. 115 0. 52821

951 1832. 044 0. 52829

952 1833. 972 0. 52825

953 1835. 901 0. 52814

954 1837. 829 0. 52820

955 1839. 758 0. 52837

956 1841. 686 0. 52840

957 1843. 615 0. 52847

958 1845. 543 0. 52856

959 1847. 471 0. 52862

960 1849. 400 0. 52863

961 1851. 328 0. 52851

962 1853. 257 0. 52835

963 1855. 185 0. 52831

964 1857. 114 0. 52848

965 1859. 042 0. 52873

966 1860. 971 0. 52892

39
967 1862 .899 0 .52900

968 1864 .828 0 .52891

969 1866 .756 0 .52876

970 1868 .685 0 . 52880

971 1870 .613 0 . 52895

972 1872 .542 0 .52912

973 1874 .470 0 .52917

974 1876 .398 0 .52906

975 1878 .327 0 .52900

976 1880 .255 0 . 52904

977 1882 .184 0 . 52903

978 1884 .112 0 .52912

979 1886 .041 0 .52927

980 1887 .969 0 .52925

981 1889 .898 0 .52913

982 1891 .826 0 .52917

983 1893 .755 0 . 52929

984 1895,.683 0,.52937

985 1897,.612 0,,52940

986 1899,,540 0,, 52932

987 1901,,469 0,,52927

988 1903.,397 0,, 52930

989 1905.,325 0.,52938

990 1907.,254 0., 52949

991 1909. 182 0.,52949

992 1911. 111 0, 52945

993 1913. 039 0.,52949

994 1914. 968 0. 52964

995 1916. 896 0. 52978

996 1918. 825 0. 52970

997 1920. 753 0. 52958

998 1922. 682 0. 52966

999 1924. 610 0. 52982

1000 1926. 539 0. 52987

1001 1928. 467 0. 52982

1002 1930. 396 0. 52986

1003 1932. 324 0. 52997

1004 1934. 252 0. 53007

1005 1936. 181 0. 53021

1006 1938. 109 0. 53027

1007 1940. 038 0. 53016

1008 1941. 966 0. 53013

1009 1943. 895 0. 53010

1010 1945. 823 0. 52996

1011 1947. 752 0. 52991

1012 1949. 680 0. 53010

1013 1951. 609 0. 53036

1014 1953. 537 0. 53047

1015 1955. 466 0. 53043

1016 1957.394 0.53035

1017 1959. 323 0. 53033

1018 1961. 251 0. 53038

1019 1963. 179 0. 53050

1020 1965. 108 0. 53067

1021 1967. 036 0. 53073

1022 1968, 965 0. 53059

1023 1970. 893 0. 53056

1024 1972. 822 0. 53057

1025 1974. 750 0. 53064

1026 1976 .679 0 .53081

1027 1978 .607 0 . 53083

1028 1980 .536 0 .53074

1029 1982 .464 0 . 53066

1030 1984 .393 0 .53066

1031 1986 .321 0 .53079

1032 1988 .250 0 . 53090

1033 1990 .178 0 .53101

1034 1992 .106 0 .53111

1035 1994 .035 0 .53121

1036 1995 .963 0 .53122

1037 1997 .892 0 .53115

1038 1999 .820 0 .53113

1039 2001 .749 0 .53108

1040 2003 .677 0 . 53094

1041 2005 .606 0 .53087

1042 2007 .534 0 . 53097

1043 2009 .463 0 .53124

1044 2011 .391 0 .53145

1045 2013 .320 0 .53149

1046 2015 .248 0 .53156

1047 2017 .177 0 .53158

1048 2019 .105 0 .53143

1049 2021 .033 0 .53140

1050 2022 .962 0 .53151

1051 2024,.890 0 .53147

1052 2026,,819 0,.53134

1053 2028,,747 0,,53135

1054 2030,,676 0,,53166

1055 2032,,604 0,,53183

1056 2034,,533 0,,53177

1057 2036.,461 0,,53170

1058 2038.,390 0.,53165

1059 2040.,318 0.,53159

1060 2042. 247 0. 53147

1061 2044. 175 0. 53145

1062 2046. 104 0. 53161

1063 2048. 032 0. 53181

1064 2049. 960 0. 53186

1065 2051. 889 0. 53190

1066 2053. 817 0. 53204

1067 2055. 746 0. 53214

1068 2057. 674 0. 53204

1069 2059. 603 0. 53186

1070 2061. 531 0. 53179

1071 2063. 460 0. 53177

1072 2065. 388 0. 53176

1073 2067. 317 0. 53199

1074 2069. 245 0. 53225

1075 2071. 174 0. 53222

1076 2073. 102 0. 53220

1077 2075. 031 0. 53215

1078 2076. 959 0. 53206

1079 2078. 887 0. 53208

1080 2080. 816 0. 53220

1081 2082. 744 0. 53221

1082 2084. 673 0. 53223

1083 2086. 601 0. 53242

1084 2088.530 0. 53262

40
1085 2090 .458 0 .53247

1086 2092 .387 0 .53230

1087 2094 .315 0 .53235

1088 2096 .244 0 .53232

1089 2098 .172 0 .53228

1090 2100 .101 0,.53234

1091 2102,.029 0,.53239

1092 2103,.958 0,.53249

1093 2105,,886 0,,53258

1094 2107,,814 0.,53258

1095 2109. 743 0. 53251

1096 2111. 671 0. 53237

1097 2113. 600 0. 53240

1098 2115. 528 0. 53230

1099 2117. 457 0. 53218

1100 2119. 385 0. 53245
Samp le: D12

602

501 964 .234 0 .49003

502 966 .162 0 .49035

503 968 .090 0 .49108

504 970 .019 0 .49175

505 971 .947 0 .49243

506 973 .876 0 .49335

507 975 .804 0 .49438

508 977,.733 0 .49546

509 979,.661 0 .49669

510 981,.590 0,.49791

511 983,.518 0,.49917

512 985,,447 0,,50055

513 987,,375 0,, 50208

514 989.,304 0,,50354

515 991. 232 0., 50485

516 993. 161 0.,50603

517 995. 089 0. 50711

518 997. 017 0. 50840

619 998. 946 0. 50978

520 1000. 874 0, 51085

521 1002. 803 0. 51183

522 1004. 731 0. 51270

523 1006. 660 0. 51347

524 1008. 588 0. 51419

525 1010. 517 0. 51474

526 1012. 445 0. 51517

527 1014. 374 0. 51566

528 1016. 302 0. 51649

529 1018. 231 0. 51759

530 1020. 159 0. 51850

531 1022. 088 0. 51906

532 1024. 016 0. 51951

533 1025. 944 0. 52010

534 1027. 873 0. 52069

535 1029. 801 0. 52098

536 1031. 730 0. 52127

537 1033. 658 0. 52176

538 1035. 587 0. 52204

539 1037. 515 0. 52196

540 1039. 444 0. 52182

541 1041. 372 0. 52187

542 1043. 301 0. 52206

543 1045. 229 0. 52203

544 1047. 158 0. 52181

545 1049. 086 0. 52134

546 1051. 015 0. 52066

547 1052. 943 0. 52016

548 1054. 871 0. 51983

549 1056. 800 0. 51926

550 1058. 728 0. 51851

551 1060. 657 0. 51772

552 1062. 585 0. 51680

553 1064. 514 0. 51554

554 1066. 442 0. 51402

555 1068. 371 0. 51246

556 1070. 299 0. 51061

557 1072. 228 0. 50825

558 1074 .156 0 .50541

559 1076 .085 0 .50212

560 1078 .013 0 .49817

561 1079 .942 0 .49355

562 1081 .870 0 .48833

563 1083 .798 0 .48228

564 1085 .727 0 .47535

565 1087 .655 0 .46771

566 1089 .584 0 .45924

567 1091 .512 0 .45028

568 1093 .441 0 .44132

569 1095 .369 0 .43255

570 1097 .298 0 .42423

571 1099 .226 0 .41666

572 1101 .155 0 .41035

573 1103 .083 0 .40570

574 1105 .012 0 .40268

575 1106 .940 0 .40144

576 1108,.869 0 .40198

577 1110,.797 0 .40421

578 1112,.725 0,.40799

579 1114,,654 0,.41300

580 1116,,582 0,,41922

581 1118,,511 0,,42687

582 1120,,439 0..43576

583 1122.,368 0,,44555

584 1124.,296 0.,45540

585 1126.,225 0.,46488

586 1128. 153 0. 47408

587 1130. 082 0.,48238

588 1132.,010 0.,48932

589 1133. 939 0. 49504

590 1135. 867 0.,49954

591 1137. 796 0.,50286

592 1139. 724 0. 50550

593 1141. 652 0. 50780

594 1143. 581 0. 50968

595 1145. 509 0. 51125

596 1147. 438 0. 51266

597 1149. 366 0. 51379

598 1151. 295 0. 51458

599 1153. 223 0. 51527

600 1155. 152 0. 51620

601 1157. 080 0. 51706

602 1159. 009 0. 51770

603 1160. 937 0. 51819

604 1162. 866 0. 51881

605 1164. 794 0. 51940

606 1166. 723 0. 51990

607 1168. 651 0. 52043

608 1170. 579 0. 52111

609 1172. 508 0. 52201

610 1174. 436 0. 52286

611 1176. 365 0. 52341

612 1178. 293 0. 52383

613 1180. 222 0. 52428

614 1182. 150 0. 52474

615 1184. 079 0. 52537

616 1186. 007 0. 52606

42
617 1187 .936 0 .52678

618 1189 .864 0 .52753

619 1191 .793 0 .52825

620 1193 .721 0 .52882

621 1195 .650 0 .52936

622 1197 .578 0 .53005

623 1199 .506 0 .53079

624 1201 .435 0 .53141

625 1203 .363 0 .53195

626 1205 .292 0 .53239

627 1207 .220 0 .53268

628 1209 .149 0 .53300

629 1211 .077 0 .53342

630 1213 .006 0 .53383

631 1214 .934 0 . 53405

632 1216 .863 0 .53399

633 1218 .791 0 .53379

634 1220 .720 0 .53368

635 1222 .648 0 .53374

636 1224 .577 0 .53388

637 1226 .505 0 .53402

638 1228 .433 0 .53406

639 1230 .362 0 .53396

640 1232 .290 0 .53403

641 1234 .219 0 .53435

642 1236 .147 0 .53462

643 1238 .076 0 .53467

644 1240 .004 0 .53460

645 1241 .933 0,. 53453

646 1243 .861 0,,53447

647 1245,.790 0,,53442

648 1247,.718 0,,53456

649 1249,,647 0,,53474

650 1251,,575 0,,53479

651 1253,,504 0. 53465

652 1255,,432 0. 53449

653 1257,.360 0. 53441

654 1259,,289 0. 53439

655 1261. 217 0. 53436

656 1263.,146 0. 53433

657 1265. 074 0. 53433

658 1267. 003 0. 53433

659 1268. 931 0. 53423

660 1270. 860 0. 53397

661 1272. 788 0. 53355

662 1274. 717 0. 53312

663 1276. 645 0. 53289

664 1278. 574 0. 53284

665 1280. 502 0. 53269

666 1282. 431 0. 53239

667 1284. 359 0. 53196

668 1286. 287 0. 53159

669 1288. 216 0. 53128

670 1290. 144 0. 53106

671 1292. 073 0. 53107

672 1294. 001 0. 53114

673 1295. 930 0. 53099

674 1297. 858 0. 53085

675 1299. 787 0. 53077

676 1301 .715 0 .53080

677 1303 .644 0 .53115

678 1305 .572 0 .53159

679 1307 .501 0 .53176

680 1309 .429 0 .53189

681 1311 .358 0 .53214

682 1313 .286 0 .53247

683 1315 .214 0 .53286

684 1317 .143 0 .53335

685 1319 .071 0 .53383

686 1321 .000 0 .53430

687 1322 .928 0 .53471

688 1324 .857 0..53496

689 1326,.785 0,,53531

690 1328,.714 0,,53590

691 1330,,642 0,,53633

692 1332,,571 0,,53654

693 1334,,499 0.,53661

694 1336.,428 0.,53672

695 1338.,356 0..53707

696 1340.,285 0..53745

697 1342.,213 0, 53748

698 1344..141 0. 53735

699 1346. 070 0. 53727

700 1347. 998 0. 53731

701 1349. 927 0. 53732

702 1351. 855 0. 53719

703 1353. 784 0. 53704

704 1355. 712 0. 53698

705 1357. 641 0. 53679

706 1359. 569 0. 53635

707 1361. 498 0. 53606

708 1363. 426 0. 53602

709 1365, 355 0. 53595

710 1367. 283 0. 53579

711 1369. 212 0. 53559

712 1371..140 0. 53538

713 1373. 068 0. 53531

714 1374.,997 0. 53547

715 1376.,925 0. 53555

716 1378.,854 0. 53563

717 1380.,782 0. 53564

718 1382. 711 0. 53546

719 1384. 639 0. 53521

720 1386. 568 0. 53517

721 1388. 496 0. 53539

722 1390. 425 0. 53557

723 1392. 353 0. 53563

724 1394. 282 0. 53583

725 1396. 210 0. 53605

726 1398. 139 0. 53612

727 1400. 067 0. 53617

728 1401. 995 0. 53630

729 1403. 924 0. 53639

730 1405. 852 0. 53632

731 1407. 781 0. 53615

732 1409. 709 0. 53609

733 1411. 638 0. 53599

734 1413. 566 0. 53572

43
735 1415 .495 0.53528 794 1529.274 0.54764

736 1417 .423 0.53492 795 1531.203 0.54772

737 1419 .352 0.53474 796 1533.131 0.54767

738 1421 .280 0 . 53462 797 1535.060 0.54760

739 1423 .209 0.53433 798 1536.988 0.54742

740 1425 .137 0.53399 799 1538.917 0.54713

741 1427 .066 0.53362 800 1540.845 0.54706

742 1428 .994 0.53308 801 1542.774 0.54722

743 1430 .922 0.53246 802 1544.702 0.54751

744 1432 .851 0.53185 803 1546.631 0.54775

745 1434 .779 0.53114 804 1548.559 0.54778

746 1436 .708 0.53061 805 1550.488 0.54763

747 1438 .636 0 . 53034 806 1552.416 0.54751

748 1440 .565 0.53010 807 1554.344 0.54749

749 1442 .493 0.52983 808 1556.273 0.54728

750 1444 .422 0.52963 809 1558.201 0.54689

751 1446 .350 0.52947 810 1560.130 0.54691

752 1448 .279 0.52936 811 1562.058 0.54733

753 1450 .207 0.52941 812 1563.987 0.54776

754 1452 .136 0.52988 813 1565.915 0.54796

755 1454 .064 0.53044 814 1567.844 0.54791

756 1455 .993 0.53074 815 1569.772 0.54777

757 1457 .921 0.53128 816 1571.701 0.54775

758 1459 .849 0.53221 817 1573.629 0.54765

759 1461 .778 0.53308 818 1575.558 0.54749

760 1463 .706 0.53404 819 1577.486 0.54769

761 1465 .635 0.53503 820 1579.415 0.54799

762 1467 .563 0.53600 821 1581.343 0.54797

763 1469 .492 0.53699 822 1583.271 0.54783

764 1471,.420 0.53773 823 1585.200 0.54775

765 1473,,349 0.53840 824 1587.128 0.54768

766 1475,.277 0.53937 825 1589.057 0.54770

767 1477,.206 0.54041 826 1590.985 0.54774

768 1479.,134 0.54137 827 1592.914 0.54783

769 1481.,063 0.54214 828 1594.842 0.54796

770 1482. 991 0.54272 829 1596.771 0 . 54802

771 1484. 920 0.54321 830 1598.699 0.54811

772 1486. 848 0.54355 831 1600.628 0.54810

773 1488. 777 0.54383 832 1602.556 0.54803

774 1490. 705 0.54436 833 1604.485 0.54807

775 1492. 634 0.54486 834 1606.413 0.54806

775 1494. 562 0.54511 835 1608.342 0.54807

777 1496. 490 0.54516 836 1610.270 0.54818

778 1498. 419 0.54538 837 1612.198 0.54825

779 1500. 347 0.54576 838 1614.127 0.54812

780 1502. 276 0.54596 839 1616.055 0.54778

781 1504. 204 0.54590 840 1617.984 0.54777

782 1506. 133 0.54593 841 1619.912 0.54803

783 1508. 061 0.54636 842 1621.841 0.54793

784 1509. 990 0.54693 843 1623.769 0.54778

785 1511. 918 0.54712 844 1625.698 0.54782

786 1513. 847 0.54712 845 1627.626 0.54773

787 1515. 775 0.54716 846 1629.565 0.54778

788 1517. 704 0.54724 847 1631.483 0.54789

789 1519. 632 0.54731 848 1633.412 0.54779

790 1521. 561 0.54723 849 1635.340 0.54763

791 1523. 489 0.54716 850 1637.269 0.54773

792 1525. 417 0.54727 851 1639.197 0.54803

793 1527. 346 0.54745 852 1641.125 0.54829

44
853 1643 .054 0 .54829

854 1644 .982 0 .54800

855 1646 .911 0 .54780

856 1648 .839 0 .54798

857 1650 .768 0 .54786

858 1652 .696 0 .54740

859 1654 .625 0 .54763

860 1656 .553 0 .54828

861 1658 .482 0 .54848

862 1660 .410 0 .54832

863 1662 .339 0 .54822

864 1664 .267 0 .54837

865 1666 .196 0 .54854

866 1668 .124 0 .54841

867 1670 .052 0 .54837

868 1671 .981 0 .54849

869 1673 .909 0 .54849

870 1675 .838 0 .54847

871 1677 .766 0,.54847

872 1679 .695 0,,54857

873 1681,.623 0,,54852

874 1683,.552 0,,54817

875 1685,.480 0,,54820

876 1687,,409 0..54872

877 1689,,337 0., 54904

878 1691,.266 0.,54901

879 1693,,194 0.,54859

880 1695.,123 0. 54807

881 1697. 051 0. 54788

882 1698. 979 0. 54784

883 1700. 908 0. 54785

884 1702. 836 0. 54796

885 1704. 765 0. 54794

886 1706. 693 0. 54771

887 1708. 622 0. 54750

888 1710. 550 0. 54735

889 1712. 479 0. 54720

890 1714. 407 0. 54678

891 1716. 336 0. 54627

892 1718. 254 0. 54618

893 1720. 193 0. 54638

894 1722. 121 0. 54645

895 1724. 050 0. 54651

896 1725. 976 0. 54661

897 1727. 906 0. 54661

898 1729. 835 0. 54668

899 1731. 763 0. 54674

900 1733. 692 0. 54678

901 1735. 620 0. 54716

902 1737. 549 0. 54764

903 1739. 477 0. 54783

904 1741 .406 0. 54813

905 1743. 334 0. 54877

906 1745. 263 0. 54921

907 1747. 191 0. 54921

908 1749.,120 0. 54908

909 1751. 048 0. 54917

910 1752. 977 0. 54955

911 1754. 905 0. 54982

912 1756 .

833 0. 54995

913 1758. 762 0. 55011

914 1760. 690 0. 55009

915 1762. 619 0. 55010

916 1764. 547 0. 55031

917 1766. 476 0. 55048

918 9 X w 1768. 404 0. 55056

919 1770. 333 0. 55045

920 1772 261 0. 55038

921 1774 .

190 0. 55045

922 1776 .

118 0. 55048

923 1778 X ( f w • 047 0. 55045

924 1779 975 0. 55044

925 1781 904 0. 55036

926 1783. 832 0. 55029

927 1785. 760 0. 55039

928 1787. 689 0. 55065

929 1789. 617 0. 55068

930 1791 .

546 0. 55038

931 1793. 474 0. 55027

932 1795. 403 0. 55043

933 1797.,331 0., 55054

934 1799.,260 0., 55052

935 1801 X Ww X 4,188 0,, 55049

936 9 wV 1803 ,

,117 0,, 55059

937 1805 X www 1.045 0,, 55066

938 9 wV 1806 X Www ..974 0,,55061

939 1808 X WWW 1.902 0 . 55066

940 1810 X W X w <.831 0 . 55076

941 1812 .759 0 . 55076

942 1814 .688 0 .55080

943 1816 X W X w .616 0 . 55087

944 1818 X V X w « 544 w~~ 0 . 55087

945 1820 X w^w .473 0 . 55077

946 1822 .401 0 . 55072

947 1824 .330 0 . 55067

948 1826 .258 0 . 55066

949 1828 X w^w .187 0 . 55076

950 1830 X www .115 0 . 55075

951 9 w X 1832 .044 0 . 55077

952 1833 .972 0 .55095

953 1835 .901 0 . 55093

954 1837 .829 0 .55072

955 1839 .758 0 .55077

956 9WW 1841 .686 0 .55085

957 9w f 1843 .615 0 .55094

958 9 ws/ 1845 X WT^W .543 0 .55106

959 9w 9 1847 X W~ r .471 0 .55111

960 9WW 1849 X w^ w .400 0 .55111

961 1851 X Vw X .328 0 .55108

962 9w^ 1853 X WWW .257 0 .55104

063 1855 X WWW .185 0 .55102

Q64 1857 X Vw r • 114 X x~ 0 .55106

965 9Vw 1859 X Vw w .042 0 . 55107

966 1860 X WWW .971 0 . 55102

1862 X wwib .899 0 .55091

968 9WW 1864 .828 0 .55092

969 1866 .756 0 .55103

970 1868 .685 0 .55119

45
971 1870 .613 0 .55120

972 1872 .542 0 .55120

973 1874 .470 0 .55130

974 1876 .398 0 .55128

975 1878 .327 0 .55127

976 1880 .255 0 .55126

977 1882 .184 0 .55114

978 1884 .112 0 .55115

979 1886 .041 0 .55135

980 1887 .969 0 .55145

981 1889 .898 0 .55144

982 1891 .826 0 .55151

983 1893 .755 0 .55160

984 1895 .683 0 .55151

985 1897 .612 0 .55143

986 1899 .540 0 .55144

987 1901 .469 0 .55142

988 1903 .397 0 .55136

989 1905 .325 0 .55132

990 1907 .254 0 .55138

991 1909 .182 0 .55157

992 1911 .111 0 .55171

993 1913,,039 0 .55173

994 1914,.968 0,.55166

995 1916,,896 0,,55157

996 1918,.825 0,,55150

997 1920.,753 0.,55146

998 1922.,682 0.,55149

999 1924. 610 0.,55163

1000 1926. 539 0. 55171

1001 1928. 467 0. 55177

1002 1930. 396 0. 55181

1003 1932. 324 0. 55170

1004 1934. 252 0. 55157

1005 1936. 181 0. 55158

1006 1938. 109 0. 55177

1007 1940. 038 0. 55189

1008 1941. 966 0. 55178

1009 1943. 895 0. 55170

1010 1945. 823 0. 55175

1011 1947. 752 0. 55175

1012 1949. 680 0. 55173

1013 1951. 609 0. 55173

1014 1953. 537 0. 55182

1015 1955. 466 0. 55193

1016 1957. 394 0. 55189

1017 1959. 323 0. 55190

1018 1961. 251 0. 55186

1019 1963. 179 0. 55184

1020 1965. 108 0. 55190

1021 1967. 036 0. 55204

1022 1968. 965 0. 55216

1023 1970. 893 0. 55219

1024 1972. 822 0. 55208

1025 1974. 750 0. 55200

1026 1976. 679 0. 55193

1027 1978. 607 0. 55197

1028 1980. 536 0. 55212

1029 1982. 464 0. 55225

1030 1984 .393 0 .55225

1031 1986 .321 0 .55205

1032 1988 .250 0 .55198

1033 1990 .178 0 .55215

1034 1992 .106 0 .55229

1035 1994 .035 0 .55237

1036 1995 .963 0 .55237

1037 1997 .892 0 .55225

1038 1999 .820 0 . 55208

1039 2001 .749 0 .55200

1040 2003 .677 0 .55212

1041 2005 .606 0 . 55222

1042 2007 .534 0 .55226

1043 2009 .463 0 .55236

1044 2011 .391 0 .55233

1045 2013 .320 0 .55229

1046 2015 .248 0 .55232

1047 2017 .177 0 .55236

1048 2019 .105 0 .55243

1049 2021 .033 0 .55238

1050 2022 .962 0 .55221

1051 2024 .890 0 .55218

1052 2026 .819 0 .55229

1053 2028 .747 0 .55240

1054 2030 .676 0 .55240

1055 2032 .604 0 .55233

1056 2034 .533 0 .55243

1057 2036 .461 0 .55231

1058 2038 .390 0 .55205

1059 2040 .318 0 .55204

1060 2042 .247 0 .55217

1061 2044 .175 0 .55235

1062 2046 .104 0 .55237

1063 2048 .032 0 .55238

1064 2049 .960 0,.55258

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1066 2053,.817 0,,55267

1067 2055,,746 0,,55268

1068 2057.,674 0.,55264

1069 2059,,603 0.,55263

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1071 2063.,460 0.,55269

1072 2065.,388 0.,55272

1073 2067.,317 0. 55266

1074 2069. 245 0. 55251

1075 2071. 174 0. 55247

1076 2073. 102 0. 55255

1077 2075. 031 0. 55255

1078 2076. 959 0. 55246

1079 2078. 887 0. 55254

1080 2080. 816 0. 55258

1081 2082. 744 0. 55245

1082 2084. 673 0. 55249

1083 2086. 601 0. 55274

1084 2088. 530 0. 55288

1085 2090. 458 0. 55287

1086 2092. 387 0. 55279

1087 2094. 315 0. 55282

1088 2096. 244 0. 55282

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301 578 .540 0 ,45869

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48
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49
535 1029 .801 0 .51438

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50
653 1257 .360 0.,52371

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51
771 1484 .920 0 . 53306

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52
889 1712 .479 0 .53733

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899 1731 .763 0 .53695

900 1733 .692 0 .53677

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902 1737 .549 0 .53777

903 1739 .477 0 .53802

904 1741 .406 0 .53841

905 1743 .334 0 .53905

906 1745 .263 0 .53955

907 1747 .191 0 .53969

908 1749 .120 0 .53966

909 1751 .048 0 .53975

910 1752 .977 0 .54018

911 1754 .905 0 .54055

912 1756 .833 0 .54069

913 1758 .762 0,.54078

914 1760,.690 0,, 54084

915 1762 .619 0,.54087

916 1764,,547 0.,54104

917 1766,,476 0.,54107

918 1768,,404 0. 54105

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920 1772. 261 0. 54086

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935 1801. 188 0. 54140

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940 1810. 831 0. 54170

941 1812. 759 0. 54170

942 1814. 688 0. 54183

943 1816. 616 0. 54190

944 1818. 544 0. 64189

945 1820. 473 0. 54184

946 1822. 401 0. 54170

947 1824. 330 0. 54165

948 1826 .258 0 .54164

949 1828 .187 0 .54178

950 1830 .115 0 .54190

951 1832 .044 0 .54186

952 1833 .972 0 .54198

953 1835 .901 0 .54199

954 1837 .829 0 .54183

955 1839 .758 0 .54195

956 1841 .686 0 .54197

957 1843 .615 0 .54189

958 1845 .543 0 .54199

959 1847 .471 0 .54213

960 1849 .400 0 .54226

961 1851 .328 0 .54232

962 1853 .257 0 .54223

963 1855 .185 0 .54226

964 1857 .114 0 .54229

965 1859 .042 0 .54225

966 1860 .971 0 .54228

967 1862 .899 0 .54240

968 1864 .828 0 .54246

969 1866 .756 0 .54227

970 1868 .685 0 .54211

971 1870 .613 0 .54228

972 1872 .542 0 .54245

973 1874 .470 0 .54257

974 1876 .398 0 .54266

975 1878 .327 0 .54264

976 1880 .255 0 .54269

977 1882 .184 0 .54274

978 1884 .112 0 .54275

979 1886 .041 0 .54280

980 1887 .969 0 .54275

981 1889,.898 0,.54270

982 1891..826 0,.54272

983 1893,.755 0.,54270

984 1895..683 0.,54266

985 1897.,612 0.,54270

986 1899.,540 0. 54280

987 1901. 469 0. 54296

988 1903. 397 0. 54310

989 1905. 325 0. 54299

990 1907. 254 0. 54289

991 1909. 182 0. 54299

992 1911. 111 0. 54304

993 1913. 039 0. 54312

994 1914. 968 0. 54317

995 1916. 896 0. 54300

996 1918. 825 0. 54299

997 1920. 753 0. 54309

998 1922. 682 0. 54300

999 1924. 610 0. 54306

1000 1926. 539 0. 54322

1001 1928. 467 0. 54343

1002 1930. 396 0. 54356

1003 1932. 324 0. 54341

1004 1934. 252 0. 54343

1005 1936. 181 0. 54364

1006 1938. 109 0. 54371

53
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589 1133. 939 0. 50470

590 1135. 867 0. 50813

591 1137. 796 0. 51083

592 1139. 724 0. 51270

593 1141 .652 0 .51418

594 1143 .581 0 .51526

595 1145 .509 0 .51606

596 1147 .438 0 .51706

597 1149 .366 0 .51817

598 1151 .295 0 .51904

599 1153 .223 0 .51973

600 1155 .152 0 .52035

601 1157 .080 0 . 52082

602 1159 .009 0 .52126

603 1160 .937 0 .52167

604 1162 .866 0 .52203

605 1164 .794 0 .52251

606 1166 .723 0 .52308

607 1168 .651 0 .52351

608 1170 .579 0 .52398

609 1172 .508 0 .52460

610 1174 .436 0 .52520

611 1176 .365 0 .52574

612 1178 .293 0 .52626

613 1180 .222 0 .52668

614 1182 .150 0 .52697

615 1184 .079 0 .52733

616 1186 .007 0 .52780

617 1187 .936 0 .52838

618 1189 .864 0 .52894

619 1191 .793 0 .52945

620 1193 .721 0 .52987

621 1195 .650 0 .53042

622 1197 .578 0 .53109

623 1199 .506 0 .53160

624 1201 .435 0 .53196

625 1203 .363 0 . 53234

626 1205 .292 0 .53265

627 1207 .220 0 .53298

628 1209 .149 0,.53347

629 1211,.077 0,,53381

630 1213,.006 0,.53397

631 1214.,934 0.,53408

632 1216.,863 0. 53400

633 1218.,791 0. 53387

634 1220. 720 c. 53373

635 1222. 648 0. 53371

636 1224. 577 0. 53388

637 1226. 505 0. 53404

638 1228. 433 0. 53408

639 1230. 362 0. 53415

640 1232. 290 0. 53412

641 1234. 219 0. 53417

642 1236. 147 0. 53437

643 1238. 076 0. 53458

644 1240. 004 0. 53470

645 1241. 933 0. 53472

646 1243. 861 0. 53471

647 1245. 790 0. 53467

648 1247. 718 0. 53466

649 1249. 647 0. 53465

650 1251. 575 0. 53475

651 1253. 504 0. 53495

57
652 1255.432 0w • 53518 W WW X w 711 1369 212 0V . OO^'^777 III 653 1257 .360 0.53542 712 1371 . 140 0w . WWR37fiR f 654 1259.289 0 53552 713 1373 068 0 537t;7 W . WW / WW

655 1261 .217 0 53544 714 1374 997

W • WW f 057 656 1263.146 0 53554 715 1376 Xwf W 925 ^^w w . WW / OH

657 1265.074 0.53559 716 1378 X W 1 w • 854 ww~ 0w • w53809 wOwx. 658 1267.003 0.53536 717 1380 XWWW 782 f w^ 0W a WWW^O 53898

659 1268.931 0w • 53529 www^^ 718 1382 711 0V/ . OOO R'^ftl1 o^ 660 1270 860 0W 53534 WWWW~ 719 1384 Xww^ • 639 Ww9 V . OO r DO

661 1272 788 0w • 53518 wwwXw 720 1386 XwWW • 568 www

662 121A. in 0 53498 721 1388 X wWw 496 ~ ^w

V . OO /Of

663 1276 645 0W • 53473 WW~ f w 722 13Q0 Xw7w • 49^ "tilw 664 1278.574 0w • 53434 wwTw^ 723 I ^w xw9iC . www

665 1280 502 0\^ • 53410 WW r X ^/ 724

666 1282.431 0W • 53416 WW~XV 725 1396 Xw^V/ • 210 x.Xw 667 1284.359 0 53401 726 1398 XW^W a 139 XW 0W

a WWO^ *?3ft97/ 668 1286,287 0W • 53365 WWV^WW 727 1400 X ~WW • 067 \/W # 0 53ft^4

669 1288 216 0w > 53350 WWWwV/ 728 1401 X T W X • 995w w 0W

a 53845 WwO*TW

670 1290.144 0W 53340 WWW T W 729 1403 X iWW • 924 0W

a 53847 WwO*t / 671 1292 073 0w » 53336 wwwww 730 1405 X T WW • 852 WW4L 0W a 53841 WWW"t X 672 1294 001 0w • 53346 www • w 731 1407 .781 0W a 53835 WWWWw

673 1295 930 0w • 53331 wWWWX 732 1409 X ' w V • 709 * ^/ V 0W

a 53839 WWWW 7

674 1297 858 0w • 53298 wwX. ^ w 733 1411 X • X X • 638 Www 0W

a 53851 WWOW X 675 1299 787 0W • 53303 WWWWW 734 1413 X ~ X W • 566 Www 0W a 53834 WWWW*T

676 1301 715 0v/ • 53321 wwwx. X 735 1415 X « X w • 495 ~ ^ w 0V

a 53787 WW f %J 1 677 1303 644 0w • 53332 wwww^ 736 1417 x^x* • 423 » X. w 0W a 53733 WW 1 WW

678 1305 572 0w • 53354 wwww~ 737 1419 X T X W • 352 WW 0w • 53689 WwwO 9

679 1307 X wV f • 501 Vw X 0w • 53386 wwwUU 738 1421 .280 0W

a 53681 WWWO X 680 1309 429 0w 53413 ww"T X w 739 1423 • X W 209 Xw ^ 0W a 53695 WWW 9 W

681 1311 XWXX s^wW 358 0w • 53435 wwtww 740 1425.137 0W

a 53679 WwW 1 ^ 682 1313 286 0V > 53465 WW T V./ W 741 1427 066 0W • 53625 WWWXiW

683 1315.214 0 53489 742 1428 994 0W • 53590 WWWw

684 1317.143 0w • 53507 wwww /743 1430 922 0W « 53540 WWW T w 685 1319 071 0W • 53538 WWWWliif 744 1432 851 0W « 53473 WW~ 1 w 686 1321 000 0w • 53586 wwwwW 745 1434 .779 0W * 53419 WW~ X w 687 1322 928 0W • 53639 WW^i'w? 746 1436 708 0W < 53392 WWW ^X

688 1324 857 0w • 53683 wwwV/w 747 1438 636 0W

a 53366 WWWWW

689 1326 785 0w * 53716 WW f X w 748 1440 565 0W • 53327 WWWX. f 690 1328.714 0W > 53763 WW # SJ\J 749 1442.493 0W • 53295 WWA. ^ W

691 1330 642 0w • 53817 wwvi/ X f 750 1444 .422 0W 53270 WWX 1 w 692 1332 X WW^ • 571 V r X 0w • 53838 wwwwU 751 1446 X • T W • 350 www 0w a 53973 ww^ r w 693 1334 499 0W • 53823 WWWX.O 752 1448 .279 0W a wwwww 53303

694 1336 X www • 428 T ^w 0 53825 753 1450 X ~WW * 207 ^w ( 0w • wwwwW 53308

695 1338 X www • 356 www 0W • 53854 WWWW~ 754 1452 X~W^

a 136 XWW 0w • 53306 WwwwU

696 1340 X W * • 285 ^Ww 0w • 53869 wwW^ 755 1454 X T W^T

a 064W^ 0w • WW"53398 WX.O 697 1342.213 0w • 53875 wwW r w 756 1455 X~ww • 993 9^w 0W a 53345 www*tw

698 1344.141 0W

a 53881 WWWX 757 1457 X ~W f a 921X 0W

a 53379 WWW f 7

699 1346 070 0w 53871 www # X 758 1459 X ~WW

a 849 W~ W 0w . 53466 wwtW

700 1347 998 0w • 53869 wwww w 759 1461 778 0W

a 53555 WWWWW

701 1349 927 0W • 53878 www / O

760 1463 X~ww • 706 / wW 0 ti3fi19

702 1351 855 0w • 53871 www < X 761 1465 X~ww • 635 Www 0W

a 53688 WWWWW

703 1353 . 784 0w • 53855 wwwWW 762 1467 X^W r

a 563 www 0w 53795 WW r 9w

704 1355 712 0W • 53850 wwwWW 763 1469 X~W a~9^ 492 0 53861

705 1357 X f • 641 w^T X 0w • 53819 wwU X 7 764 1471 490 V/ . 90000

706 1359 569 0W • 53768 WW f WW 765 147^ X ^ • W

a W*t ^4Q^ 707 1361 X W X • 498<7 W 0W • 53768 WW ff WW 766 147^; 977

708 1363.426 0W » 53793 WW ff <^ w 767 • w # I All 00& ft K7

709 1365.355 0.53775 768 1479.134 0.54231

710 1367.283 0.53762 769 1481.063 0.54297

58
770 1482 .991 0 .54361

771 1484 .920 0 .54424

772 1486 .848 0 .54453

773 1488 .777 0 .54460

774 1490 .705 0 .54498

775 1492 .634 0 .54552

776 1494 .562 0 .54572

777 1496 .490 0 .54573

778 1498 .419 0 .54594

779 1500 .347 0 .54626

780 1502 .276 0 .54657

781 1504 .204 0 .54634

782 1506 .133 0 .54576

783 1508 .061 0 .54604

784 1509 .990 0 .54688

785 1511 .918 0 .54716

786 1513 .847 0 .54719

787 1515 .775 0 .54741

788 1517 .704 0 .54738

789 1519 .632 0 .54716

790 1521 .561 0 .54714

791 1523,.489 0,.54714

792 1525,,417 0,,54700

793 1527,,346 0,,54718

794 1529.,274 0.,54773

795 1531.,203 0.,54781

796 1533.,131 0. 54767

797 1535.,060 0. 54786

798 1536. 988 0. 54741

799 1538. 917 0. 54646

800 1540. 845 0. 54636

801 1542. 774 0. 54688

802 1544. 702 0. 54746

803 1546. 631 0. 54801

804 1548. 559 0. 54792

805 1550. 488 0. 54749

806 1552. 416 0. 54755

807 1554. 344 0. 54771

808 1556. 273 0. 54722

809 1558. 201 0. 54650

810 1560. 130 0. 54655

811 1562. 058 0. 54714

812 1563. 987 0. 54752

813 1565. 915 0. 54780

814 1567. 844 0. 54783

815 1569. 772 0. 54774

816 1571. 701 0. 54798

817 1573. 629 0. 54789

818 1575. 558 0. 54747

819 1577. 486 0. 54766

820 1579. 415 0. 54792

821 1581. 343 0. 54784

822 1583. 271 0. 54796

823 1585. 200 0. 54811

824 1587. 128 0. 54802

825 1589. 057 0. 54807

826 1590. 985 0. 54824

827 1592. 914 0. 54819

828 1594. 842 0. 54814

829 1596 .771 0 .54824

830 1598 .699 0 .54819

831 1600 .628 0 .54819

832 1602 .556 0 .54825

833 1604 .485 0 .54801

834 1606 .413 0 .54791

835 1608 .342 0 .54815

836 1610 .270 0 .54814

837 1612 .198 0 .54804

838 1614 .127 0 .54800

839 1616 .055 0 .54778

840 1617 .984 0 .54787

841 1619 .912 0 .54834

842 1621 .841 0 .54836

843 1623 .769 0 .54795

844 1625 .698 0 .54782

845 1627 .626 0 .54800

846 1629 .555 0 . 54808

847 1631 .483 0 . 54807

848 1633 .412 0 .54792

849 1635 .340 0 .54764

850 1637 .269 0 .54761

851 1639 .197 0 .54801

852 1641 .125 0 .54824

853 1643 .054 0 .54807

854 1644 .982 0 .54789

855 1646 .911 0 .54794

856 1648 .839 0 .54800

857 1650 .768 0 .54757

858 1652,.696 0 .54695

859 1654,.625 0,.54730

860 1656,,553 0,,54830

861 1658.,482 0.,54869

862 1660.,410 0,,54853

863 1662.,339 0.,54840

864 1664.,267 0.,54858

865 1666. 196 0. 54863

866 1668. 124 0. 54823

867 1670. 052 0. 54810

868 1671. 981 0. 54835

869 1673. 909 0. 54834

870 1675. 838 0. 54839

871 1677. 766 0. 54859

872 1679. 695 0. 54872

873 1681. 623 0. 54862

874 1683. 552 0. 54808

875 1685. 480 0. 54803

876 1687. 409 0. 54872

877 1689. 337 0. 54897

878 1691. 266 0. 54870

879 1693. 194 0. 54834

880 1695. 123 0. 54791

881 1697. 051 0. 54762

882 1698. 979 0. 54734

883 1700. 908 0. 54724

884 1702. 836 0. 54752

885 1704. 765 0. 54772

886 1706. 693 0. 54778

887 1708. 622 0. 54774

59
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1005 1936. 181 0. 55227

60
1006 1938 .109 0 .55239

1007 1940 .038 0 .55255

1008 1941 .966 0 .55248

1009 1943 .895 0 . 55224

1010 1945 .823 0 .55229

1011 1947 .752 0 .55236

1012 1949 .680 0 .55225

1013 1951 .609 0 .55227

1014 1953 .537 0 .55244

1015 1955 .466 0 .55259

1016 1957 .394 0 .55271

1017 1959 .323 0 .55273

1018 1961 .251 0 .55259

1019 1963 .179 0 .55255

1020 1965 .108 0 .55272

1021 1967 .036 0 .55270

1022 1968 .965 0 .55267

1023 1970 .893 0 .55298

1024 1972 .822 0 .55303

1025 1974 .750 0 .55289

1026 1976 .679 0 .55313

1027 1978 .607 0 .55321

1028 1980 .536 0 .55286

1029 1982 .464 0 .55276

1030 1984 .393 0 .55284

1031 1986 .321 0 .55281

1032 1988,.250 0 . 55304

1033 1990,.178 0,.55328

1034 1992,.106 0,.55311

1035 1994..035 0,.55292

1036 1995,.963 0,.55309

1037 1997,.892 0,.55335

1038 1999,,820 0,,55342

1039 2001,,749 0.,55334

1040 2003.,677 0..55318

1041 2005.,606 0. 55320

1042 2007.,534 0.,55343

1043 2009. 463 0. 55348

1044 2011. 391 0. 55336

1045 2013. 320 0. 55336

1046 2015. 248 0. 55337

10^7 2017. 177 0. 55334

1048 2019. 105 0. 55343

1049 2021. 033 0. 55349

1050 2022. 962 0. 55330

1051 2024. 890 0. 55321

1052 2026. 819 0. 55337

1053 2028. 747 0. 55350

1054 2030. 676 0. 55359

1055 2032. 604 0. 55358

1056 2034. 533 0. 55360

1057 2036. 461 0. 55358

1058 2038. 390 0. 55361

1059 2040. 318 0. 55361

1060 2042. 247 0. 55345

1061 2044. 175 0. 55354

1062 2046. 104 0. 55377

1063 2048. 032 0. 55372

1064 2049. 950 0. 55369

1065 2051 .889 0 .55379

1066 2053 .817 0 .55367

1067 2055 .746 0 .55363

1068 2057 .674 0 .55374

1069 2059 .603 0 .55365

1070 2061 .531 0 .55353

1071 2063 .460 0 .55348

1072 2065 .388 0 .55351

1073 2067 .317 0 .55379

1074 2069 .245 0 .55418

1075 2071 .174 0 .55420

1076 2073 .102 0 .55388

1077 2075 .031 0 .55376

1078 2076 .959 0 .55383

1079 2078 .887 0 .55374

1080 2080 .816 0 .55371

1081 2082 .744 0,. 55368

1082 2084 .673 0,.55358

1083 2086 .601 0,.55374

1084 2088,.530 0..55399

1085 2090,.458 0.,55393

1086 2092,.387 0..55374

1087 2094.,315 0, 55385

1088 2096.,244 0. 55406

1089 2098. 172 0. 55413

1090 2100. 101 0. 55403

1091 2102. 029 0. 55385

1092 2103. 958 0. 55375

1093 2105. 886 0. 55371

1094 2107. 814 0. 55366

1095 2109. 743 0. 55361

1096 2111. 671 0. 55373

1097 2113. 600 0. 55400

1098 2115. 528 0. 55400

1099 2117. 457 0. 55393

1100 2119. 385 0. 55393

61
Section V. RESULTS

62
ASTMDSP [Fortran version] 4/22/88 PAGE 1

*****spectrum***** modelcIO?

thickness is 0.0603cm

T (1038. 7) = 0.5033 residual std. dev.= 0.152E-03

7(1107.9) = 0.3939 residual std. dev.= 0.844E-04

T(1259.8) = 0.5110 residual std. dev.= 0.233E-03

BASELINE TRANSMITTANCE AT 1107.9 WAVENUMBERS= 0.5057

===> ALPHA (BASE) = 0.877 ALPHA (PEAK) = 4.51057

NET ABSORBANCE PEAK HEIGHT = 0.095142

* OXYGEN CONTENT IS 19.68 PPMA *

spectrum***** modeldl2

thickness is 0.0588cm

T(1040.5) = 0.5221 residual std. dev.= 0.192E-03

T(1107.8) = 0.4015 residual std. dev.= 0.255E-03

T (1259. 8) = 0.5346 residual std. dev.= 0.242E-03

BASELINE TRANSMITTANCE AT 1107.8 WAVENUMBERS= 0.5259

===> ALPHA (BASE) = 0.336 ALPHA (PEAK) = 4.33700

NET ABSORBANCE

*

PEAK HEIGHT = 0.102129

****»* OXYGEN CONTENT IS 21.99 PPMA *

*****spectrum***** modeld26

thickness is 0.0552cm

7(1039.3) = 0.5151 residual std. dev.= 0.189E-03

T (1107. 8) = 0.3974 residual std. dev.= 0.146E-03

T(1259.8) = 0.5241 residual std. dev.= 0.241E-03

BASELINE TRANSMITTANCE AT 1107.8 WAVENUMBERS= 0.5179

==> ALPHA (BASE) = 0.593 ALPHA (PEAK) = 4.78783

NET ABSORBANCE PEAK HEIGHT = 0.100500

***************»*«*«*

* OXYGEN CONTENT IS 23.21 PPMA * ********

63
ASTWDSP 4/22/88 PAGE 2

*****spectrum***** modeld36

thickness is 0.0476cm

T(1039.3) = 0.5264 residual std. dev.= 0.172E-03

T (1107. 9) = 0.4355 residual std. dev.= 0.995E-04

T(1259.8) = 0.5357 residual std. dev.= 0.207E-03

BASELINE TRANSMITTANCE AT 1107.9 WAVENUMBERS= 0.5292

==> ALPHA (BASE) = 0.303 ALPHA (PEAK) = 3.82890

NET ABSORBANCE PEAK HEIGHT = 0.072947

* OXYGEN CONTENT IS 19.00 PPMA *

spectrum***** modeld37

thickness is 0.0602cm

T(1041.2) = 0.5117 residual std. dev.= 0.146E-03

T(1108.0) = 0.4043 residual std. dev.= 0.168E-03

T(1259.8) = 0.5224 residual std. dev.= 0.211E-03

BASELINE TRANSMITTANCE AT 1108.0 WAVENUMBERS= 0.5149

==> ALPHA (BASE) = 0.624 ALPHA (PEAK) = 4.12879

NET ABSORBANCE PEAK HEIGHT = 0.091619

* OXYGEN CONTENT IS 18.87 PPMA * *******************************

*****spectrum***** modeldSl

thickness is 0.0596cm

T(1040.5) = 0.5201 residual std. dev.= 0.164E-03

T(1107.9) = 0.4033 residual std. dev.= 0.102E-03

T (1259. 8) = 0.5301 residual std. dev.= 0.249E-03

BASELINE TRANSMITTANCE AT 1107.9 WAVENUMBERS= 0.5232

=> ALPHA (BASE) = 0.405 ALPHA (PEAK) = 4.20695

NET ABSORBANCE PEAK HEIGHT = 0.098407

*********** * OXYGEN CONTENT IS 20.74 PPMA * *******************************

64
ASTMDSP [Pascal version] 6/29/88 PAGE 1

sample file name modeld07.dat

thickness (mils) 2 . 3740157480E+01

tbase 6.0573972500E-01

tpeak 3.9389457650E-01

abase 8 .760629531 OE-01

apeak 4.5103899343E+00

anet 3 .634326981 2E+00

uncertainty 1 .07353501 29E-02

standard deviation 5 . 2676600221 E+02

ppm (6.28) 1 .9683573442E+01

sample file name modeld12.dat

thickness (mils) 2.3149606299E+01

tbase 6.2596866007E-01

tpeak 4.0144105833E-01

abase 3 . 3447332586E-01

apeak 4 . 3352775874E+00

anet 4. 000804261 5E+00

uncertainty 1 .5548042721 E-02

standard deviation 5 . 2676600221 E+02

ppm (6.28) 2.1985050762E+01

sample file name modeld26.dat

thickness (mils) 2 . 1732283465E+01

tbase 5. 1786107475E-01

tpeak 3.9734250844E-01

abase 5.9342275614E-01

apeak 4.7850185869E+00

anet 4. 1915958308E+00

uncertainty 1 . 2867481 063E-02

standard deviation 5 . 2676600221 E+02

ppm (6.28) 2.3183221817E+01

65
FEDERAL INFORMATION PROCESSING STANDARD SOFTWARE SUMMARY

01. Summary date

Yr. Mo. Day

0 5 11

04. Software date

Yr. Mo. 0 5Day 1 1

02. Summary prepared by (Name and Phone)

Asian Baghdadi 975-2062

05. Software title Automatic Determination of the Oxygen Content

of Silicon Wafers Polished on Both Sides

06. Short title DSPOX

03. Summary action New Replacement Deletion B

Previous Internal Software ID

07. Internal Software ID DSPOX

08. Software type

Automated Data System

Computer Program

Subroutine/Module

09. Processing mode

I I Interactive Q Batch

I I Combination

10. General

Application area

Specific Computer Systems

Q Support/Utility

I I Scientific/Engineering

I I Bibliographic/Textual

Management/

I I Business

Process Control Other

11. Submitting organization and address Semiconductor Electronics Division

National Institute of Standards & Technology

Gaithersburg, MD 20899

12. Technical contact(s) and phone

Asian Baghdadi

301/975-2062

13. Narrative These programs implement an ASTM Standard Test Method for the Determination of the

Oxygen Content of Silicon Wafers That are Polished on Both Sides. The data are initially obtained on a computer-assisted infrared spectrometer.

14. Keywords

Infrared, IR, oxygen, silicon spectrum

15. Computer manuf'r and model 1. VAX 11/785

2 . IBM AT

16. Computer operating system

1 . VMS 4 .

7

2 . DOS 3 .

2

17. Programing language(s) 1 . FORTRAN

2. TURBO PASCAL

18. Number of source program state- ments

19. Compi sr memory requirements 20. Tape drives 21. Disk/Drum units 22. Terminals

23. Other operational requirements

24. Software availability

Available Limited In-house only

s

25. Documentation availability

Available Inadequate In-house only

Q

26. FOR SUBMITTING ORGANIZATION USE

185-101 Standard Form 185

1974 July

U.S. Dept. of Commerce—NBS

(FIPS. Pub. 30)
4t;
U.S. Department of Commerce

National Institute of Standards and Technology

(formerly National Bureau of Standards)

Gaitiiersburg, MD 20899

Official Business

Penalty for Private Use $300

Stimulating America's Progress 1913-1988