# Patent

## Title
Methods of fabricating integrated circuitry

## Abstract

A substrate including a plurality of integrated circuitry die is fabricated or otherwise provided. The individual die have bond pads. A passivation layer comprising a silicone material is formed over the bond pads. Openings are formed through the silicone material to the bond pads. After the openings are formed, the die are singulated from the substrate. In one implementation, a method of fabricating integrated circuitry includes providing a substrate comprising a plurality of integrated circuitry die. Individual of the die have bond pads. A first blanket passivation layer is formed over the substrate in contact with the bond pads. A different second blanket passivation layer comprising silicone material is formed over the first passivation layer. Openings are formed through the first and second passivation layers to the bond pads. After the openings are formed, the die are singulated from the substrate. Other aspects and implementations are contemplated.

## Background
RELATED PATENT DATA
This patent resulted from a continuation application of U.S. patent application Ser. No. 10/302,328, filed Nov. 22, 2002, now abandoned entitled “Methods of Fabricating Integrated Circuitry”, naming Tongbi Jiang and Mike Connell as inventors, the disclosure of which is incorporated by reference.


TECHNICAL FIELD
This invention relates to methods of fabricating integrated circuitry.
BACKGROUND OF THE INVENTION
Integrated circuitry fabrication typically fabricates multiple discrete integrated circuits or chips over a single substrate. A typical substrate utilized today is a monocrystalline silicon wafer within and upon which integrated circuitry is fabricated. Regardless, at the completion of fabrication, the substrate is cut or otherwise processed to singulate the die into individual integrated circuitry chips/die. Typically, the individual chips/die are mounted and electrically connected with larger circuit boards, lead frames or other substrates which connect or otherwise become a part of some form of larger operable hardware.
In many applications, the individual die as connected/mounted to another substrate are encapsulated in epoxy resin mold materials for fixating and protecting the mounted chip. Typically, the epoxy mold compounds have a much higher thermal coefficient of expansion than that of the typical silicon die and even other substrate materials to which the die are mounted. These differences in thermal coefficients of expansion can result in considerable internal stresses in the ultimately encapsulated device, in some cases leading to circuitry failure.
One manner of overcoming the stress caused by differences in thermal coefficients of expansion includes silicon dioxide filler materials within the mold compound. Typically, the intent and effect is to modify the thermal coefficient of expansion of the pure molding material to better approximate that of the die and other substrate materials. Unfortunately, the hard silicon dioxide particles can create their own problems. Specifically, upon application and cure of the molding material, the silicon dioxide particles can penetrate into the outer passivation layers fabricated on the chip. This can result in the cracking of those layers as well as the material of the integrated circuitry underlying the passivation layers and lead to failure.
While the invention was motivated in addressing the above issues and improving upon the above-described drawbacks, it is in no way so limited. The invention is only limited by the accompanying claims as literally worded (without interpretative or other limiting reference to the above background art description, remaining portions of the specification or the drawings) and in accordance with the doctrine of equivalents.
SUMMARY
The invention includes methods of fabricating integrated circuitry. In one implementation, a substrate comprising a plurality of integrated circuitry die is provided. The individual die have bond pads. A passivation layer comprising a silicone material is formed over the bond pads. Openings are formed through the silicone material to the bond pads. After the openings are formed, the die are singulated from the substrate.
In one implementation, a method of fabricating integrated circuitry includes providing a substrate comprising a plurality of integrated circuitry die. Individual of the die have bond pads. A first blanket passivation layer is formed over the substrate in contact with the bond pads. A different second blanket passivation layer comprising silicone material is formed over the first passivation layer. Openings are formed through the first and second passivation layers to the bond pads. After the openings are formed, the die are singulated from the substrate.
Other aspects and implementations are contemplated.



BRIEF DESCRIPTION OF THE DRAWINGS
Preferred embodiments of the invention are described below with reference to the following accompanying drawings.
FIG. 1 is a diagrammatic top view of an exemplary substrate at a processing step in accordance with an aspect of the invention.
FIG. 2 is a diagrammatic sectional view taken through line 2-2 in FIG. 1.
FIG. 3 is a view of the FIG. 2 substrate at a processing step subsequent to that shown by FIG. 2.
FIG. 4 is a view of the FIG. 3 substrate at a processing step subsequent to that shown by FIG. 3.
FIG. 5 is a view of the FIG. 4 substrate at a processing step subsequent to that shown by FIG. 4.
FIG. 6 is a view of the FIG. 5 substrate at a processing step subsequent to that shown by FIG. 5.
FIG. 7 is a view of the FIG. 6 substrate at a processing step subsequent to that shown by FIG. 6.
FIG. 8 is a view of the FIG. 7 substrate at a processing step subsequent to that shown by FIG. 7.
FIG. 9 is an alternate embodiment of the FIG. 5 substrate at a processing stop subsequent to that depicted by FIG. 5.
FIG. 10 is a view of the FIG. 9 substrate at a processing step subsequent to that shown by FIG. 9.
FIG. 11 is an alternate embodiment of the FIG. 4 substrate at a processing stop subsequent to that depicted by FIG. 4.
FIG. 12 is a view of the FIG. 11 substrate at a processing step subsequent to that shown by FIG. 11.
FIG. 13 is a view of the FIG. 12 substrate at a processing step subsequent to that shown by FIG. 12.
FIG. 14 is a view of the FIG. 8 substrate at a processing step subsequent to that shown by FIG. 8.
FIG. 15 is a view of the FIG. 14 substrate at a processing step subsequent to that shown by FIG. 14.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
This disclosure of the invention is submitted in furtherance of the constitutional purposes of the U.S. Patent Laws “to promote the progress of science and useful arts” (Article 1, Section 8).
In accordance with aspects of the invention, and by way of example only, preferred methodical embodiments are described with reference to FIGS. 1–12. The illustrated relationships between the various layers and die are exaggerated in the figures for clarity, and are only diagrammatic depictions thereof. Referring initially to FIGS. 1 and 2, a substrate in the form of a semiconductor wafer is indicated generally with reference numeral 10. In the context of this document, the term “semiconductor substrate” or “semiconductive substrate” is defined to mean any construction comprising semiconductive material, including, but not limited to, bulk semiconductive materials such as a semiconductive wafer (either alone or in assemblies comprising other materials thereon), and semiconductive material layers (either alone or in assemblies comprising other materials). The term “substrate” refers to any supporting structure, including, but not limited to, the semiconductive substrates described above. Substrate 10 has been processed to include a plurality of integrated circuitry die 12. Such have been fabricated to include a plurality of bond pads 14 which will be utilized ultimately in electrically connecting the integrated circuitry of the die with external components.
Referring to FIG. 3, an exemplary first passivation layer 16 is formed over substrate 10 and in contact with bond pads 14. An exemplary preferred material is undoped silicon dioxide, for example deposited by decomposition of tetraethylorthosilicate (TEOS). In one preferred embodiment, first passivation layer 16 consists essentially of silicon dioxide. By way of example only, a thickness range for layer 16 is from 5,000 Angstroms to 10,000 Angstroms.
Referring to FIG. 4, another passivation layer 18 is formed over and on (meaning in contact with) first passivation layer 16. An exemplary material for layer 18 is silicon nitride, with layer 18 consisting essentially of silicon nitride in one preferred embodiment. An exemplary preferred thickness range for layer 18 is from 0.2 micron to 5 microns.
Referring to FIG. 5, another passivation layer 20 is formed over and on passivation layer 18. A preferred material is polyimide, with an exemplary preferred thickness range being from 1 micron to 10 microns.
Referring to FIG. 6, a passivation layer 22 comprising one or more silicone materials is formed over and on passivation layer 20. Layer 22 is most preferably formed to have a Young's modulus of no greater than 9.0 GPa. Exemplary preferred silicone materials include those available from Dow Corning of Auburn, Mich. for example the Dow Corning MXX-P family of silicones, with M300-P from such family being one specific example. An exemplary such layer can act as a stress buffer and preclude silica or other particles within molding compounds or other materials from cracking layers and other material therebeneath.
Referring to FIG. 7, a photoresist layer 24 has been formed over passivation layer 22 comprising silicone material. A series of openings 26 have been formed therein over bond pads 14.
Referring to FIG. 8, openings 26 have been extended through passivation layers 22, 20, 18 and 16 to expose bond pads 14. Photoresist layer 24 would then be completely removed from the substrate. An exemplary dry chemistry for etching through the silicone material and polyimide material would be O2 plasma. Such would also typically etch photoresist, which would warrant making the photoresist layer sufficiently thick to complete etching through the silicone material and the polyimide before the photoresist was etched completely away. Silicon dioxide and silicon nitride can be etched using CF4 and CHF3 chemistries.
Such provides but one example of forming openings through the passivation layer 22 comprising silicone material to the bond pads, with such method utilizing photolithography and etch employing a photoresist that is completely removed from the substrate prior to the singulating of the die from the substrate. FIG. 9 illustrates an alternate embodiment processing with respect to a substrate 10a. Like numerals from the first described embodiment are utilized where appropriate, with differences being indicated with the suffix “a” or with different numerals. In FIG. 9, a passivation layer 22a comprising a silicone material is formed to be inherently photoimageable. An example preferred photoimageable silicone material for passivation layer 22a is the same M300-P material referred to above. Such can enable the fabrication of the substrate using photolithography without using a separate photoresist material which is ultimately removed from the substrate. FIG. 9 depicts exemplary alternate processing to that depicted by FIG. 8, whereby passivation layer 22a has been photopatterned, for example utilizing a mask, with suitable actinic energy effective to change the solubility in a solvent of selected regions of the passivation layer which are received over bond pads 14. FIG. 9 depicts such substrate as having been exposed to a suitable developing solvent effective to remove the selected regions from over the bond pads, thereby forming exemplary openings 26 therein/in place thereof. Accordingly, if desired, such processing can be essentially identical to that of FIG. 7, but void of any photoresist layer over passivation layer 22a. 
Referring to FIG. 10, the removed selected regions of passivation layer 22a have been etched through, utilizing layer 22a as a mask, layers 20, 18 and 16 to expose bond pads 14. Again and preferably, such can be conducted without any use of photoresist over layer 22a. 
The above depicts but two example of forming openings through silicone material containing passivation layer 22 to bond pads 14, with each utilizing photolithography and etch. However, other methods utilizing photolithography and etch, as well as methods not utilizing photolithography and etch, are also contemplated, and whether existing or yet-to-be developed. Further, the above exemplary processing forms the passivation layer comprising silicone material over one or more other passivation layers, for example those comprising polyimide and silicon nitride. One or both of the polyimide or silicon nitride layers might be eliminated, or one or more other layers substituted therefor. The same applies with respect to the preferred embodiment undoped silicon dioxide passivation layer 16. Further, the orders of any of the above layers could be switched or otherwise modified, with the embodiment in the initially described order being but one preferred example. Further but less preferred, the passivation layer comprising the silicone material might be fabricated to be other than the outermost layer. Also in the depicted and preferred embodiments, the passivation layer comprising silicone material is formed such that it is not in contact with bond pads 14, although such could be fabricated to be in contact with bond pads 14.
FIG. 11 illustrates an alternate embodiment processing with respect to a substrate 10b. Like numerals from the first described embodiments are utilized where appropriate, with differences being indicated with the suffix “b” or with different numerals. FIG. 11 illustrates processing subsequent to that of FIG. 4 whereby openings 50 have been formed through layers 18 and 16 to bond pads 14. Such could be by photolithographic and etch manners, or by any other means whether existing of yet-to-be-developed.
Referring to FIG. 12, a polyimide comprising passivation layer 20b is formed over passivation layers 16 and 18 to within openings 50. Silicone material comprising passivation layer 22 is formed thereover.
Referring to FIG. 13, openings 26 are formed to bond pads 14. Again, such could be by photolithographic and etch manners, or by any other means whether existing of yet-to-be-developed.
Referring to FIG. 14, die 12 have been singulated from substrate 10/10a/10b. Such as-singulated die comprise at least some outermost layer, i.e., layer 22/22a, which predominately comprises the passivation layer having the silicone material. Alternately, the substrate might be fabricated such that the illustrated uppermost/outermost layer does not predominately comprise the passivation layer containing silicone material. Regardless if desired, such can be mounted or otherwise provided with respect to other substrates, and wire or other bond connections made through the illustrated openings to the bond pads.
Referring to FIG. 15, an exemplary additional substrate 40 is shown bonded to die 12 using a resin 42 containing solid particles 44. Such provides but one example of contacting the passivation layer comprising silicone material with a silica particle containing resin, in but one exemplary preferred embodiment.
In compliance with the statute, the invention has been described in language more or less specific as to structural and methodical features. It is to be understood, however, that the invention is not limited to the specific features shown and described, since the means herein disclosed comprise preferred forms of putting the invention into effect. The invention is, therefore, claimed in any of its forms or modifications within the proper scope of the appended claims appropriately interpreted in accordance with the doctrine of equivalents.

## Claims

1. A method of fabricating integrated circuitry comprising:
providing a substrate comprising a plurality of integrated circuitry die, individual of the die having bond pads;
forming a passivation layer comprising polyimide over the bond pads;
forming a passivation layer comprising a silicone material over the bond pads and over the passivation layer comprising polyimide;
forming openings through said passivation layer comprising a silicone material and said passivation layer comprising polyimide to the bond pads; and
after forming the openings and while the openings through the silicone material are outwardly exposed, singulating the die from the substrate.

2. The method of claim 1 comprising forming the passivation layer comprising silicone material to have a Young's modulus of no greater than 9.0 GPa.

3. The method of claim 1 wherein the forming of openings comprises photolithography and etch utilizing photoresist that is completely removed from the substrate prior to the singulating.

4. The method of claim 1 wherein the forming of openings comprises photolithography and etch utilizing a photosensitive substance that comprises a part of the singulated die.

5. The method of claim 1 wherein the passivation layer comprising silicone material is not formed in contact with the bond pads.

6. The method of claim 1 comprising after the singulating, contacting the passivation layer comprising silicone material with a solid particle-containing resin.

7. The method of claim 1 comprising forming the passivation layer comprising silicone material on the passivation layer comprising polyimide.

8. The method of claim 1 wherein the passivation layer comprising polyimide consists essentially of polyimide.

9. The method of claim 1 comprising forming a passivation layer comprising silicon nitride over the substrate, and forming the passivation layer comprising silicone material over the passivation layer comprising silicon nitride.

10. The method of claim 1 wherein the die as singulated from the substrate comprise an outermost layer predominately comprising the passivation layer comprising silicone material.

11. A method of fabricating integrated circuitry comprising:
providing a substrate comprising a plurality of integrated circuitry die, individual of the die having bond pads;
forming a silicon dioxide-comprising passivation layer over the bond pads;
forming a silicon nitride-comprising passivation layer over the silicon dioxide comprising silicon dioxide-comprising passivation layer;
forming openings through the passivation layer comprising silicon nitride and through the passivation layer comprising silicon dioxide to the bond pads;
forming a passivation layer comprising polyimide over the passivation layer comprising silicon nitride and to contact the bond pads within the openings formed through the passivation layer comprising silicon nitride and the passivation layer comprising silicon dioxide;
forming a passivation layer comprising a silicone material over the passivation layer comprising polyimide;
forming openings through the silicone material and the passivation layer comprising polyimide to the bond pads, said openings formed through the silicone material and the passivation layer comprising polyimide being formed through the openings previously formed to the bond pads through the passivation layer comprising silicon nitride and through the passivation layer comprising a silicon dioxide; and
after forming the openings through the silicone material and the passivation layer comprising polyimide to the bond pads and while the openings through the silicone material are outwardly exposed, singulating the die from the substrate.

12. A method of fabricating integrated circuitry comprising:
providing a substrate comprising a plurality of integrated circuitry die, individual of the die having bond pads;
forming a silicon dioxide-comprising passivation layer over the bond pads;
forming a silicon nitride-comprising passivation layer over the silicon dioxide-comprising passivation layer;
forming openings through the passivation layer comprising silicon nitride and through the passivation layer comprising silicon dioxide to the bond pads;
forming a passivation layer comprising polyimide over the passivation layer comprising silicon nitride and to contact the bond pads within the openings formed through the passivation layer comprising silicon nitride and the passivation layer comprising silicon dioxide;
forming a passivation layer comprising a photoimageable silicone material over the passivation layer comprising polyimide;
photopatterning the passivation layer comprising a photoimageable silicone material with actinic energy effective to change solubility in a solvent of selected regions of the passivation layer which are received over the bond pads;
exposing the photopatterned passivation layer to the solvent effective to remove the selected regions from over the bond pads and thereby form openings in the photopatterned passivation layer over the bond pads to the passivation layer comprising polyimide, and then etching through the passivation layer comprising polyimide effective to extend the openings formed in the photopatterned passivation layer to the bond pads; the openings formed in the photopatterned passivation layer over the bond pads to the passivation layer comprising polyimide and the extended openings formed in the photopatterned passivation layer being formed through the openings previously formed to the bond pads through the passivation layer comprising silicon nitride and through the passivation layer comprising silicon dioxide; and
after the etching, singulating the die from the substrate.

13. The method of claim 12 wherein the photopatterning is void of any photoresist layer received over the passivation layer comprising photoimageable silicone material.

14. The method of claim 12 wherein the photopatterning is void of any photoresist layer received over the passivation layer comprising photoimageable silicone material, and the etching is void of any photoresist layer received over the passivation layer comprising photoimageable silicone material.

15. The method of claim 12 comprising after the singulating, contacting the passivation layer comprising silicone material with a solid particle-containing resin.

16. The method of claim 12 comprising forming the passivation layer comprising silicone material to have a Young's modulus of no greater than 9.0 GPa.

17. The method of claim 12 wherein the passivation layer comprising silicone material is not formed in contact with the bond pads.

18. The method of claim 12 wherein the die as singulated from the substrate comprise an outermost layer predominately comprising the passivation layer comprising silicone material.