REFERENCE

NBS

PUBLICATIONS

NAT'L INST. OF STAND & TECH

AlllOb OSlblH

NBSIR 85-3292

Release Notes for STAT2 Version 2.00A:

An Addendum to NBS Special

Publication 400-75

C. H. Ellenwood and R. L. Mattis

U.S. DEPARTMENT OF COMMERCE

National Bureau of Standards

National Engineering Laboratory

Center for Electronics and Electrical Engineering

Semiconductor Electronics Division

Gaithersburg, MD 20899

January 1986

QC ‘ARTMENT OF COMMERCE

100

.1156

85-3292

1986

C . 3

BUREAU OF STANDARDS

NBSIR 85-3292

RELEASE NOTES FOR STAT2 VERSION 2.00A:

AN ADDENDUM TO NBS SPECIAL

PUBLICATION 400-75

C. H. Ellenwood and R. L. Mattis

U S. DEPARTMENT OF COMMERCE

National Bureau of Standards

National Engineering Laboratory

Center for Electronics and Electrical Engineering

Semiconductor Electronics Division

Gaithersburg, MD 20899

January 1986

U.S. DEPARTMENT OF COMMERCE, Malcolm Baldrige, Secretary

NATIONAL BUREAU OF STANDARDS. Ernest Ambler. Director
'
Release Notes for STAT2 Version 2.00A:

An Addendum to NBS Special Publication 400-75

Page

Abstract 1

Disclaimer 1

1. Introduction 1

2. Program Capabilities 2

3. Logical Unit Assignments 3

4. Program Installation 3

Acknowledgments 4

References 4

Appendix I. Source Listing of PCFG Program 5

Appendix II. Sample Run of PCFG Program 12

Appendix III. STAT2 Version 2.00A Commands 13

in
‘

'

.
Release Notes for STAT2 Version 2.00A:

An Addendum to NBS Special Publication 400-75

C. H. Ellenwood and R. L. Mattis

Semiconductor Electronics Division

National Bureau of Standards

Gaithersburg, MD 20899

Abstract

STAT2 is a FORTRAN program which is used to analyze and display data from

microelectronic test structures fabricated on semiconductor wafers. The program

reads data as a two-dimensional array, extracts sample statistical values, identifies

outliers, calculates replacement values for outliers, and makes histograms and

circular gray-tone data maps. Version 2.00A is an adaptation of STAT2 to run

under Version 3.2 of the RSX-11M operating system. This operating system is used on the automatic tester which acquires the test structure data. Data can

therefore be taken and analyzed on the same system.

Key Words: ATE; computer program; outlier; process validation wafer; statistical

analysis; two-dimensional map; wafer map.

Disclaimer

Certain commercial equipment, instruments, or materials axe identified in this

report in order to adequately specify the experimental procedure. In no case does such identification imply recommendation or endorsement by the National

Bureau of Standards, nor does it imply that the material or equipment identified

is necessarily the best available for the purpose.

1. Introduction

This document describes the changes that were made to the STAT2 computer program

documented in NBS Special Publication 400-75, Semiconductor Measurement Technology:

A FORTRAN Program for Analysis of Data from Microelectronic Test Structures [l] and

NBSIR 83-2779, Release Notes for STAT2 Version 1.31: An Addendum to NBS Special

Publication 400-75 [2]. The changes were made in order to make STAT2 run under Version

3.2 of the RSX-ll/M operating system. The referenced publications are to be used as the

program manuals, for this document contains no review of STAT2 features or operation.

Data base structure, functional fits, and the help facility are not included in this version of

STAT2. This version was designed to contain the essential commands for statistical analysis of data taken on an Accutest 3000 automatic tester. The gray-tone map produced by

the MP4 command is written specifically for a Printronix P300 or P600 line printer/plott< r

1
2. Program Capabilities

The STAT2 ASG and REA commands are used for reading input. Format 4 of the REA

command is the only acceptable format which can be used with this version. Any other

formats will give the error message “*** FORMAT TYPE MUST BE 4.” The .SAD file asked for by the REA command is a file which gives the STEND array and the row-column

coordinate locations of all untested sites within the region defined by the STEND array.

This .SAD file is made using a stand-alone program called PCFG. A listing of PCFG

is included in Appendix I. PCFG is a Pascal program which prompts the user for the

beginning and ending columns of chips on each row of the wafer. It about the locations of

the untested sites on the wafer and uses this information to generate the needed .SAD file. This program also generates the .PDF file and the .PID file which are needed to run a test plan on the automatic tester. A sample run of the PCFG program is shown in Appendix

II.

PRS, DIS, LAP, LIP, and LNS, which give statistical information about the data, are

available in version 2.00A. Also available are XOL, XPP, XNS, XGT, XLT, XIP, LXP, IIP,

and RES, which deal with test site exclusion, as well as AXP and AIP which deal with

data value replacement.

To meet the need to analyze small sample sizes, a new command, XSS (for exclude small

sample), has been added to STAT2 which can be used to identify and exclude outliers

when the number of included sites is in the range 3 to 25, inclusive. The format of the

command is “XSS PI” where PI represents the probability that one or more good sites

might be excluded along with the outliers. PI may be given values of 0.6, 0.4, 0.2, 0.1,

0.04, 0.02, or 0.01; however, the value of 0.2 was found to be reasonable for most data sets. Other values produce an error message.

The algorithm for the XSS command employs the Dixon test [3]. For this test, data values

are first sorted and then tests are made on the extreme values. If one of the extreme values

is excluded, a second examination is made based on the new extreme values. This process

continues until no more values are excluded. Conceivably, with a sample size of only 3 or

4, XSS may exclude one or two sites, leaving fewer than the minimum three sites required.

XSS will automatically calculate and print statistics upon completion. A typical command

sequence might be as follows:

ASG FILE.DAT

REA 4 15

FILE.SAD

XGT 1E10

XLT 0

XIP 1 6

XSS 0.2

END

Assign input data file. Read in the desired data set. Specify .SAD file Exclude values which are known to be bad data or

to have physical defects.

! Invoke XSS.

! End of this example.

Additional information concerning the XSS command is contained in the introductory

2
comments to subroutine XSS in the source code.

The PLT, HIS, and MP4 commands are available to produce various types of data displays.

The PLT command differs from previous versions in that the display is written to the

STAT2.LOG file as well as to the terminal. The MP4 command differs from previous

versions in that parameter P4, previously used to optionally specify the format of the map

key, no longer performs that function. P4 must still be present; but regardless of its value,

the numbers in the key print in F10.5 or E12.5 format depending on their magnitude.

Miscellaneous commands such as END, PAU, ERM, REM, and MAC still function as under previous versions.

The features which are not included in Version 2. 00A are commands for functional fits, data

base commands and the help facility. These commands give the error message “*** COMMAND NOT AVAILABLE” if entered. (These commands axe still subjected to syntax

checking even though they are not implemented.)

A list of commands which are available in Version 2.00A along with a brief description is given in Appendix III.

3. Logical Unit Assignments

The logical unit assignments used by STAT2 Version 2.00A along with a description are given below.

1 - Input data file 2 - Macro command file 3 - .SAD file 4 - STAT2.LOG file 5 - Command input

6 - Command echoes and error messages

7 - Scratch file used by the MP4 command

4. Program Installation

For STAT2 to run under the RSX-ll/M operating system, it was necessary to divide

the program into overlays. The code sections of STAT2 are: (l) ST2MAIN.FTN, (2)

ST20V1.FTN, (3) ST20V2.FTN, (4) ST20V3.FTN, and (5) ST20V4.FTN. The code

sections are compiled separately, and the task is built to form one program unit. The

program requires approximately 30 KB of memory.

The main segment, ST2MAIN, contains the command interpreter, program initialization,

and several subroutines that are needed by the program code in more than one overlay.

The subroutines relating to the ASG, REA, MAC, and HIS commands are contained in

ST20V1. ST20V2 includes subroutines relating to the test site exclusion and statistical

calculations. ST20V3 contains subroutines relating to the calculation and specification of

replacement values for outliers. The subroutines relating to the PLT and MP4 commands

are contained in ST20V4.

3
ST2ACCU1.TKB is a task-building command file called by typing:

TKB ©ST2ACCU1.TKB

The .TKB file consists of the following commands:

STAT2,STAT2/-SP=ST2ACCU1/MP

ACTFIL = 7

UNITS = 7

ASG - TI0:6,SY0:7

//

The first line of the .TKB file contains the output filenames and the name of the .ODL file. ST2ACCU1.0DL contains the names of the files needed by the task builder and defines the

overlay structure. The form of ST2ACCU1.0DL is as follows, where LIBRARY.LIB represents a FORTRAN object library:

01: .FCTR ST20V1-LIBRARY.LIB/LB

02: .FCTR ST20V2-LIBRARY.LIB/LB

03: .FCTR ST20V3-LIBRARY.LIB/LB

04: .FCTR ST20V4-LIBRARY.LIB/LB

RT: .FCTR ST2MAIN-LIBRARY.LIB/LB

.ROOT RT- * (0 1 ,02 ,03 ,04

)

.END

The ACTFIL option in the .TKB file declares the number of files that are simultaneously open in a task and the UNITS option declares the number of logical units that

are used by the task. The ASG option makes the appropriate logical unit assignments.

Acknowledgments

The authors are indebted to Ruth Zucker for writing the PCFG program and to Loren

W. Linholm for careful reading and helpful suggestions regarding the manuscript. The

manuscript was prepared with proficiency by E. Jane Walters.

References

1. Mattis, R. L., Semiconductor Measurement Technology: A FORTRAN program for

Analysis of Data from Microelectronic Test Structures, NBS Special Publication 400-

75 (July 1983).

2. Mattis, R. L. and Zucker, R., Release Notes for STAT2 Version 1.31: An Addendum

to NBS Special Publication 400-75, NBSIR 83-2779 (November 1983).

3. Natrella, M. G., Experimental Statistics, NBS Handbook 91, pp.17-3 and T-27 (Reprinted

October 1966).

4
APPENDIX I

Source Listing of PCFG Program

PROGRAM PCFG (INPUT , OUTPUT , PIDFILE , EXTFILE , PDFFILE)

;

(* CREATE A PROBER IDENTIFICATION AND DESCRIPTION FILE, .PID, .SAD AND .PDF*)

(**** REVISED FEBRUARY 1983 ***)

LABEL 100,250,300, 350 , 400 , 500 , 600 , 700 , 800 , 900

;

CONST LSTEN=32

;

NDROPS=20;

0NE=1

;

ZER0=O

;

VAR DR0WS,DC0LS: INTEGER;

FLAG ,I,IA,I1,I2,J,JA,K,KL, LDROPS , LASTCOL : INTEGER

;

LOCATION , N , NCHAR , NCOLS , NROWS , NTEMP , NUMBER : INTEGER

;

L, TALLY, X: INTEGER;

RTEMP : REAL

;

DROPS: ARRAY [1..20] OF ARRAY [1..2] OF INTEGER;

DIESIZE: ARRAY [1..2] OF INTEGER;

RDIE: ARRAY [1 . .2] OF REAL;

RREF: ARRAY [1 . .2] OF REAL;

REFERENCE: ARRAY [1..2] OF INTEGER;

COMPDROPS: ARRAY [1..20] OF ARRAY [1..2] OF INTEGER;

STEND: ARRAY [1..32] OF ARRAY [1..2] OF INTEGER;

XLOC: ARRAY [1..1024] OF INTEGER;

YLOC: ARRAY [1..1024] OF INTEGER;

RXLOC: ARRAY [1..1024] OF REAL;

RYLOC: ARRAY [1..1024] OF REAL;

NAMEPID : PACKED ARRAY [1 . . 20] OF CHAR

;

NAMEEXT : PACKED ARRAY [1 . . 20] OF CHAR

;

NAMEPDF : PACKED ARRAY [1 . . 20] OF CHAR

;

FILENAME: PACKED ARRAY [1.. 9] OF CHAR;

PIDEXT , SADEXT , PDFEXT , DISKNAME : PACKED ARRAY [1.. 4] OF CHAR;

BLANK: CHAR;

PIDFILE, EXTFILE, PDFFILE : TEXT;

PROCEDURE PRINTINFO;

BEGIN

WRITELN (’ NROWS= * , NROWS: 3, * NCOLS=’, NCOLS: 3);

WRITELN (’DIE SIZE=’ ,DIESIZE[1] :5, DIESIZE[2] :5)

;

WRITELN (’REFERENCE^, REFERENCE [1] : 5, REFERENCE [2] : 5)

;

WRITELN;

WRITELN (’ I’, ’ STEND [1,1] ’ ,

’ STEND [I , 2]

’ )

;

FOR I := 1 TO NROWS DO

BEGIN

WRITELN (I: 5, STEND [1,1] : 10, STEND [1,2] :10)

END;

WRITELN;

WRITELN (’ DROP-IN LOCATIONS’);

WRITELN (’ NO.’, ’ ROW’, ’ COLUMN’);

FOR I := 1 TO LDROPS DO

BEGIN

WRITELN (1: 5, DROPS [1,1] : 10, DROPS [1,2] :10)

5
END;

END;

PROCEDURE FILEPID (VAR F1,F2,F3 : TEXT);

BEGIN

REWRITE (F1,NAMEPID);

WRITELN (FI, ’ IDENTIFICATION, 1034XD’);

WRITELN (FI, * DIE’, DIESIZE[1] ,DIESIZE[2] )

;

WRITELN (FI, * REFERENCE’, REFERENCE [1] , REFERENCE [2] )

;

NUMBER := LOCATION;

WRITELN (FI,’ NUMBER’, NUMBER);

WRITELN (FI, ’ END’);

FOR I := 1 TO NUMBER DO

BEGIN

WRITELN (FI,’ LOCATION ’ , I , XLOC [I] , YLOC [I]

)

END;

WRITELN (FI,’ END’);

CLOSE (FI);

REWRITE (F2 , NAMEEXT)

;

FOR I := 1 TO NROWS DO

BEGIN

WRITELN (F2, STEND [I, 1] ,STEND [1,2]

)

END;

WRITELN (F2, ZERO, ZERO);

IF (LDROPS > 0) THEN

BEGIN

FOR I := 1 TO LDROPS DO

BEGIN

WRITELN (F2 , DROPS [1,1], DROPS [1,2])

END;

END;

WRITELN (F2, ZERO, ZERO);

CLOSE (F2)

;

REWRITE (F3,NAMEPDF)

;

WRITELN (F3, ’ 1034XD’);

RDIE[1] := DIESIZE[1] ; RDIE [2] := DIESIZE[2] ; RREF[1] := REFERENCE [1]

;

RREF [2] : = REFERENCE [2]

;

RTEMP := ZERO;

NTEMP := ZERO;

FOR I := 1 TO NUMBER DO

BEGIN

RXLOC [I] := XLOC [I]

;

RYLOC[I] := YLOC [I]

END;

WRITELN (F3 , ONE : 14 , NUMBER : 5 , RDIE[1] :7:0,RDIE[2] :7:0,

RREF[1] : 7 : 0 , RREF [2] :7:0);

WRITELN (F3 , ZERO : 14 , RTEMP : 13 , RTEMP : 13 , RTEMP : 13)

;

FOR I := 1 TO NUMBER DO

BEGIN

WRITELN (F3 , I : 14 , RXLOC [I] : 7 : 0 , RYLOC [I] : 7 : 0)

END;

CLOSE (F3)

;

6
BEGIN

BLANK

PIDEXT: = \PID’;

SADEXT : = ’ . SAD ’

;

PDFEXT : = ’

. PDF *

;

DISKNAME : = * FW2 :

’

;

WRITELN (* ENTER DIE SIZE, 2 INTEGERS IN MACHINE UNITS’);

WRITELN (

* X(=WIDTH) , Y (=HEIGHT) ’ )

;

READLN (DIESIZE [1] , DIESIZE [2] )

;

WRITELN (’ ENTER REFERENCE DIE POSITION, (COLUMN, ROW) , 2 INTEGERS’);

READLN (REFERENCE [1] , REFERENCE [2] )

;

WRITELN (’ ENTER STEND[I,1], STEND[I,2], 2 INTEGERS PER LINE’);

WRITELN (’ TYPE 0 0 TO END INPUT TO STEND ARRAY’);

I := 1;

100 : WRITE (’ ROW ’, 1:2, ’ > ’); READ (STEND [I, 1] , STEND [1,2] )

;

IF (STEND [1,1] < 0) OR (STEND [1,2] < 0) THEN

FLAG := 2

ELSE

IF (STEND [1,1] = 0) THEN

FLAG := 4

ELSE

IF (STEND [1,1] >= STEND [1,2]) THEN

FLAG := 1 ELSE

IF (STEND [1,2] > LSTEN) THEN

FLAG := 3

ELSE

FLAG := 5;

IF (FLAG <= 3) THEN

CASE FLAG OF

1:

BEGIN

WRITELN (’ *** STEND [1,1] .GE. STEND [I, 2] ’)

;

GOTO 100

END;

2 : BEGIN

WRITELN (’ *** NEGATIVE STEND VALUE’);

GOTO 100

END;

3:

BEGIN

WRITELN (’ *** STEND [1,2] > 32’);

7
GOTO 100

END;

1 END;

IF (FLAG = 5) THEN

BEGIN

I := I+lj

IF ( I <= LSTEN) THEN

GOTO 100

ELSE

BEGIN

WRITELN (’ *** ROW 32 ENTERED, STEND COMPLETE’);

NROWS : =32

;

GOTO 250

END;

END;

NROWS := I—1

;

IF (NROWS = 0) THEN

BEGIN

WRITELN (’ *** NO FILES CREATED’);

GOTO 900

END;

250:

NCOLS := 0;

FOR I := 1 TO NROWS DO

BEGIN

IF (STEND [1,2] > NCOLS) THEN

NCOLS := STEND [1,2]

END;

WRITELN (’ ENTER COORDINATES OF DROP-IN SITES, (COLUMN, ROW) , 2 INTEGERS PER LINE’);

WRITELN (’ TYPE 0 0 TO END INPUT TO DROPS ARRAY’);

I := 1;

300:

WRITE (’ DROP-IN ’, 1:2, ’ > ’); READ (DROPS [1,2] , DROPS [1, 1] )

;

IF (DROPS [1,2] = 0) THEN

GOTO 350;

IA := DROPS [1,1];

JA := DROPS [1,2]

;

IF (IA > NROWS) OR (IA < 0) THEN

BEGIN

WRITELN (’ *** INCORRECT DROP IN ROW VALUE’);

GOTO 300

END;

IF (JA < STEND [IA,1] ) OR (JA > STEND [IA, 2]) THEN

BEGIN

WRITELN (’ *** INCORRECT DROP-IN COLUMN VALUE’);

GOTO 300

END;

IF (I = 1) THEN

BEGIN

8
I := 1+1;

GOTO 300

END;

KL : =1—1

;

FOR K := 1 TO KL DO

BEGIN

" IF ( (DROPS [K,l] = DROPS [1,1]) AND

(DROPS [K, 2] = DROPS [I, 2])) THEN

BEGIN

WRITELN (’ *** DUPLICATE DROP-IN COORDINATES’);

GOTO 300

END;

END;

I := 1+1;

IF (I <= NDROPS) THEN

GOTO 300

ELSE

WRITELN (’ *** DROP-IN 20 ENTERED’);

350:

LDROPS := 1-1;

PRINTINFO;

N : =9

;

FOR I : =1 TO 20 DO

BEGIN

NAMEPID [I] -BLANK;

NAMEEXT [I] :=BLANK;

NAMEPDF [I] -BLANK

END;

FOR I—1 TO N DO

FILENAME [I] :=BLANK;

WRITELN (’ ENTER FILENAME ONLY (9 OR LESS CHARACTERS) FOR’);

WRITELN (’ .PID, .PDF, AND .SAD FILES’);

READLN (FILENAME);

1 -0 ; REPEAT

I: =1+1;

UNTIL (FILENAME [I] =BLANK) OR (I=N)

;

IF (ION) THEN NCHAR:=I-1

ELSE

NCHAR : =1

;

L:=NCHAR+4;

FOR I : =1 TO 4 DO

NAMEPID [I] : =DISKNAME [I]

;

FOR I:=l TO NCHAR DO

NAMEPID [1+4] :=FILENAME[I]

;

FOR I:=l TO 4 DO

9
NAMEPID [I+L] : =PIDEXT [I]

;

FOR I:=l TO 4 DO

NAMEEXT [I] : =DISKNAME [I]

;

FOR I : =1 TO NCHAR DO

NAMEEXT [1+4] : =FILENAME [I]

;

FOR I : =1 TO 4 DO

NAMEEXT [I+L] :=SADEXT[I]

;

FOR I:=l TO 4 DO

NAMEPDF [I] : =DISKNAME [I]

;

FOR I : =1 TO NCHAR DO

NAMEPDF [1+4] : =FILENAME [I]

;

FOR 1 2=1 TO 4 DO

NAMEPDF [I+L] : =PDFEXT [I]

;

TALLY := LDROPS;

FOR K := 1 TO TALLY DO

BEGIN

COMPDROPS [K, 1] := COMPDROPS [K,2] := END;

LOCATION := 0;

I := 1;

DROPS [K,l];

DROPS [K,2]

4CX):

X := STEND [1,1]

;

LASTCOL := STEND [I, 2];

500:

IF (TALLY = 0) THEN

GOTO 700

ELSE

K := 1;

600:

DROWS := COMPDROPS [K, 1]

;

DCOLS := COMPDROPS [K, 2]

;

IF (I = DROWS) AND (X = DCOLS) THEN

BEGIN

TALLY := TALLY- 1;

FOR J := K TO TALLY DO

BEGIN

COMPDROPS [J,l] := COMPDROPS [J+l , 1]

;

COMPDROPS [J, 2] := COMPDROPS [J+l, 2]

END;

GOTO 800

10
END

ELSE

IF (K < TALLY) THEN

BEGIN

K := K+l;

GOTO 600

END

ELSE

700:

LOCATION := LOCATION+1;

YLOC [LOCATION] := I;

XLOC [LOCATION] := X;

800:

IF ( X < LASTCOL) THEN

BEGIN

X := X+l;

GOTO 500

END

ELSE

IF ( I< NROWS) THEN

BEGIN

I := 1+1;

GOTO 400

END

ELSE

FILEPID (PIDFILE , EXTFILE , PDFFILE)

900:

END.

11
APPENDIX II

Sample Run of PCFG Program

>RUN PCFG

ENTER DIE SIZE, 2 INTEGERS IN MACHINE UNITS

X(=WIDTH) , Y (=HEIGHT)

5430 5430

ENTER REFERENCE DIE POSITION, (COLUMN, ROW) , 2 INTEGERS

4 1 ENTER STEND [1,1], STEND[I,2], 2 INTEGERS PER LINE

TYPE 0 0 TO END INPUT TO STEND ARRAY

ROW 1 > 4 10

ROW 2 > 1 12

ROW 3 > 1 12

ROW 4 > 4 10

ROW 5 > 0 0

ENTER COORDINATES OF DROP-IN SITES, (COLUMN, ROW) , 2 INTEGERS PER LINE

TYPE 0 0 TO END INPUT TO DROPS ARRAY

DROP-IN 1 > 0 0

NROWS= 4 NCOLS= 12

DIE SIZE= 5430 5430

REFERENCE= 4 1

1

12

3

4

STEND [1,1]

4

1

14

STEND [1,2]

10

12

12

10

DROP-IN LOCATIONS

NO . ROW COLUMN

ENTER FILENAME ONLY (9 OR LESS CHARACTERS) FOR

.PID, .PDF, AND .SAD FILES

SAMPLE

>

12
Appendix III

Stat2 Version 2.00A Commands

Following is an alphabetical list of legal commands for Version 2.00A:

AIP - ASG - AXP - DIS - END - ENN - ERM - HIS - IIP - LAP - LIP - LNS - LXP - MAC - MP4 - PAU - PLT - PRS - REA - REM - RES - XGT - XIP - XLT - XNS - XOL - XPP - XSS -Alter an individual point

Assign input data file

Alter excluded points

Display distribution

Terminate STAT2 execution

Set N to a specified value

Error message switch

Draw a histogram

Include an individual point

List all points

List an individual point

List points beyond N*SIGMA from mean

List excluded points

Execute command macro

Circular shaded map

Pause STAT2 execution

Draw character display of DATA array

Print statistics

Read input data file

Set or reset remote mode

Restore all points to included status

Exclude points greater than a value

Exclude an individual point

Exclude points less than a value

Exclude points beyond N*SIGMA from mean

Exclude outliers

Exclude peripheral points

Exclude small sample

13
NBS-114A irev. 2-8C) U.S, ni'PT. OF COMM. BIBLIOGRAPHIC DATA

SHEET (See instructions)

1. PUB1

! CATION OR

REPuRT NO. NBSIR 85/3292

2. Performing Organ. Report NoJ 3. Publication Date January 1986

4. TITLE AND SUBTITLE

Release Notes for STAT2 Version 2.00A: An Addendum to NBS Special Publication 400-75

5. AUTHOR(S)

C. H. Ellenwood and R. L. Mattis

6. PERFORMING ORGANIZATION (If joint or other than NBS, see Instructions)

NATIONAL BUREAU OF STANDARDS

DEPARTMENT OF COMMERCE

WASHINGTON, D.C. 20234

7. Contract/Grant No.

8. Type of Report & Period Covered

9. SPONSORING ORGANIZATION NAME AND COMPLETE ADDRESS (Street. City. State. ZIP)

10. SUPPLEMENTARY NOTES

J Document describes a computer program; SF-185, FIPS Software Summary, is attached.

11. ABSTRACT (A 200-word or less factual summary of most significant information. If document includes a significant

bibliography or literature survey, mention it here) STAT2 is a FORTRAN program which is used to analyze and display data from

microelectronic test structures fabricated on semiconductor wafers. The program

reads data as a two-dimensional array, extracts sample statistical values,

identifies outliers, calculates replacement values for outliers, and makes

histograms and circular gray-tone data maps. Version 2.00A is an adaptation

of STAT2 to run under Version 3.2 of the RSX-11M operating system. This operating

system is used on the automatic tester which acquires the test structure data.

12. Data can then be taken and analyzed on the same system.

KEY WORDS (Six to twelve entries; alphabetical order; capitalize only proper names; and separate key words by semicolon s) ATE; computer program; outlier; process validation wafer; statistical analysis;

two-dimensional map; wafer map

13. AVAILABILITY

[~XJ Unlimited

| | For Official Distribution. Do Not Release to NTIS

Order From Superintendent of Documents, U.S. Government Printing Office, Washington, D.C.

20402.

[X] Order From National Technical Information Service (NTIS), Springfield, VA. 22161

14. NO. OF

PRINTED PAGES

18

15. Price

$9.95

USCOMM-DC 6043-P80
FEDERAL INFORMATION PROCESSING STANDARD SOFTWARE SUMMARY

01. Summary date 02. Summary prepared by (Name and Phone) 03. Summary action

Yr. Mo. Day Colleen Ellenwood (301) 921-3801 New Replacement Deletion 8 1 5 1 04. Software

l| 2 1

date

1 05. Release

Software title Notes for STAT2 Version 2.00A; An Addendum Previous anInternal Software ID

Yr. Mo. Day to NBS Special Publication 400-75

Hi i 2 1 1 07. Internal Software ID om7\m'>

06. Short title 08. Software type

Automated Data

[ | System

[~X| Computer Program ^ Subroutine/Module

09. Processing mode

|~%] Interactive Batch

| | Combination

10. General Computer Systems

| | Support/Utility

Scientific/Engineering

| I Bibliographic/Textual

11. Submitting organization and address Semiconductor Electronics Division

National Bureau of Standards

Gaithersburg, MD 20899

Application area

Management/

Business

Process Control Other

Specific Analysis of Integrated

Circuit Process Validation Wafer Test Data

12. Technical contact(s) and phone

Colleen H. Ellenwood

(301) 921-3801

13. Narrative The program reads data as a two-dimensional array, extracts sample statistical values,

identifies outliers, calculates replacement values for outliers, and makes histograms

and circular gray-tone data maps. Version 2 . 00A is an adaptation of STAT2 to run under Version 3 . 2 of the RSX-11M operating system. This operating system is used on

the automatic tester which acquires the test structure data. Data can therefore be

taken and analyzed on the same system.

14. Keywords

ATE; computer program; outlier; process validation wafer; statistical analysis;

two-dimensional map; wafer map

15. Computer manuf’r and model DEC LSI 11/23

16. Computer operating system

RSX-11M 3.2

17. Programing language(s)

FORTRAN

18. Number of source program state- ments 6364

19. Computer memory requirements

30kB

20. Tape drives None21. Disk/Drum units Disk

needed for map scratch

file, data input

22. Terminals 1 video or hard copy

23. Other operational requirements

24. Software availability 25. Documentation availability

Available Limited In-house only Available Inadequate In-house only

m Q

The user's manual is available and consists

of NBS Spec . Publ

.

400-75, NBSIR 83-2779,

and NBSIR 85-3292

26. FOR SUBMITTING ORGANIZATION USE

Standard Form Its

1974 July

U.S. Dept of Commerce—N BS

(FIPS. Pub JO)

185-101
INSTRUCTIONS

01. Summary Date. Enter date summary prepared. Use Year, Month, Day format: YYMMDD.

02. Summary Prepared By. Enter name and phone number (including area code) of individual who prepared this summary.

03. Summary Action. Mark the appropriate box for new summary, replacement summary or deletion of summary. If this software summary is a replace- ment, enter under "Previous Internal Software ID" the internal software identification as reported in item 07 of the original summary, and enter the new internal software identification in item 07 of this form; complete all other items as for a new summary. If a software summary is to be deleted, enter under "Previous Internal Software ID” the internal software identification as reported in item 07 of the original summary; complete only Items

01, 02, 03 and 11 on this form.

04. Software Date. Enter date software was completed or last updated. Use Year, Month, Day format: YYMMDD.

05. Software Title. Make title as descriptive as possible.

06. Short Title. (Optional) Enter commonly used abbreviation or acronym which identifies the software.

07. Internal Software ID. Enter a unique identification number or code.

08. Software Type. Mark the appropriate box for an Automated Data System (set of computer programs). Computer Program, or Subroutine/Module,

whichever best describes the software.

09. Processing Mode. Mark the appropriate box for an Interactive, Batch, or Combination mode, whichever best describes the software.

10. Application Area. General: Mark the appropriate box which best describes the general area of application from among: Computer Systems Support/Utility Process Control Management/Business Bibliographic/Textual

Scientific/Engineering Other

Specific: Specify the sub-area of application; e.g.: “COBOL optimizer” if the general area is “Computer Systems Support/Utility”; "Payroll" if the

general area is "Management/Business”; etc. Elaborate here if the general area is “Other."

11. Submitting Organization and Address. Identify the organization responsible for the software as completely as possible, to the Branch or Division level, but including Agency, Department (Bureau/Administration), Service, Corporation, Commission, or Council. Fill in complete mailing address, including mail code, street address, city, state, and ZIP code.

12. Technical Contact(s) and Phone: Enter person(s) or office(s) to be contacted for technical information on subject matter and/or operational aspects

of software. Include telephone area code. Provide organization name and mailing address, if different from that in item 11.

13. Narrative. Describe concisely the problem addressed and methods of solution. Include significant factors such as special operating system modifications, security concerns, relationships to other software, Input and output media, virtual memory requirements, and unique hardware features.

Cite references, If appropriate.

14. Keywords. List significant words or phrases which reflect the functions, applications and features of the software. Separate entries with semicolons.

15. Computer Manufacturer and Model. Identify mainframe computer(s) on which software is operational.

16. Computer Operating System. Enter name, number, and release under which software is operating. Identify enhancements in the Narrative (item 13).

17. Programing Language(s). Identify the language(s) in which the software is written, including version; e.g., ANSI COBOL, FORTRAN V, SIMSCRIPT 11.5, SLEUTH II.

18. Number of Source Program Statements. Include statements in this software, separate macros, called subroutines, etc.

19. Computer Memory Requirements. Enter minimum internal memory necessary to execute software, exclusive of memory required for the operating system. Specify words, bytes, characters, etc., and number of bits per unit. Identify virtual memory requirements in the Narrative (item 13).

20. Tape Drives. Identify number needed to operate software. Specify, if critical, manufacturer, model, tracks, recording density, etc.

21. Disk/Drum Units. Identify number and size (in same units as “Memory"

item 19) needed to operate software. Specify, if critical, manufacturer, model, etc.

22. Terminals. Identify number of terminals required. Specify, If critical, type, speed, character set, screen/line size, etc.

23 Other Operational Requirements. Identify peripheral devices, support software, or related equipment not Indicated above, e.g., optical character devices,

facsimile, computer-output microfilm, graphic plotters.

24. Software Availability. Mark the appropriate box which best describes the software availability from among: Available to the Public, Limited Availability

(e.g.: for government use only), and For-ln-house Use Only. If the software is “Available", include a mail or phone contact point, as well as the price and form in which the software is available, if possible.

25. Documentation Availability. Mark the appropriate box which best describes the documentation availability from among: Available to the Public, In- adequate for Distribution, and For In-house Use Only. If documentation Is "Available”, include a mail or phone contact point, as well as the price and

form in which the documentation is available, if possible. If documentation is presently "Inadequate”, show the expected availability date.

26. For Submitting Organization Use. This area is provided for the use of the organization submitting this summary. It may contain any information deemed useful for internal operation.

C.PO : 1974 O -