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NBSIR 83-2779

Release Notes for STAT2 Version 1.31:

An Addendum to NBS Special

Publication 400-75

US. DEPARTMENT OF COMMERCE

National Bureau of Standards

National Engineering Laboratory

Center for Electronics and Electrical Engineering

Semiconductor Devices and Circuits Division

Washington, D.C. 20234

November 1 983

100 DEPARTMENT OF COMMERCE

, U 56 >NAI_ bureau of standards

33-2779

1933

NATIONAL BtTRIAU Or STANDARDS

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NBSIR 83-2779 * 4 •

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RELEASE NOTES FOR STAT2 VERSION 1.31:

AN ADDENDUM TO NBS SPECIAL

PUBLICATION 400-75

/M’S.

R. L. Mattis and R. Zucker

U S DEPARTMENT OF COMMERCE

National Bureau of Standards

National Engineering Laboratory

Center for Electronics and Electrical Engineering

Semiconductor Devices and Circuits Division

Washington, D C. 20234

November 1 983

U.S. DEPARTMENT OF COMMERCE, Malcolm Baldrige, Secretary

NATIONAL BUREAU OF STANDARDS. Ernest Ambler. Director

Table of Contents

Page

Abstract ..... 1 Warning 2

1 . Introduction 3

2. New Data Array Definition 3

3. New REA Command Formats 3

3.1 Format 4 3

3.2 Format 5. 5

4. The Circular Shaded Map 7

5. New Map and Histogram Options 10

5.1 New Scaling Mode Interpretation 10

5.2 Change in MP3 Contour Map 11 5.3 Maps Inverted .......... 11

6. New Data Base Features 11 6.1 New LDB and SDB Command Format 11

6.2 Data Base Sample Size 13

7 . Other Changes 14

7.1 The ERM Command 14

7.2 The OPN and CLO Commands 14

7.3 New Help File Directory Specification 14

8. Error Messages 15

Reference 17

Appendix Is Listing of UPDATE1 .FOR 18

Appendix II: Listing of UPDATE1.COM 20

Appendix III: Listing of UPDATE1 .HLP 21

List of Figures

1 . Annotated example of a .LGA file to be read using format 4 . . . . 4

2. Annotated example of a .SAD file which is the companion

to the .LGA file of figure 1 5

3. Annotated example of a .LGA file to be read using format 5 . . . . 6

4. Annotated example of a .SAD file which is the companion

to the .LGA file of figure 3 7

5. Sample circular map 8

6. Key to map of figure 5 9

iii
Disclaimer

Certain commercial equipment, instruments or materials are identified in this

report in order to adequately specify the experimental procedure. In no case

does such identification imply recommendation or endorsement by the National

Bureau of Standards, nor does it imply that the material or equipment identified is necessarily the best available for the purpose.

IV
Release Notes for STAT2 Version 1.31:

An Addendum to NBS Special Publication 400-75

Richard L. Mattis and Ruth Zucker

Semiconductor Devices and Circuits Division

National Bureau of Standards

Washington, DC 20234

Abstract

This document describes the changes which have been made in the

STAT2 computer program. The new version contains several new features which provide a more powerful data base capability, improved

displays, and greater compatibility with the automatic tester. In

going from the original version 1.01 to version 1.31, the DATA

array has been redefined and new REA command formats have been

added to be compatible with new data acquisition equipment. A new circular shaded map has been added which gives a more realistic

representation of data variation over a wafer surface. New map and

histogram scaling options allow greater flexibility in specifying

the scale of data displays. A new format for two data base com- mands allows greater flexibility in selectively listing and corre- lating data base entries. The capability has been added for eliminating some unwanted printout, and for creating macro command files

within a STAT2 run. Finally, a new method of specifying the directory containing the Help files makes STAT2 easier to install.

Following the description of the changes is an annotated listing of new error messages.

Key words: ATE; computer program; contour map; data base; outlier;

process validation wafer; statistical analysis; two-dimensional

map; wafer map.

1
Warning

The structure of the data base has been changed in version 1.31 of STAT2. Do

not try to use any of the data base commands of version 1.31 on a data base

created under version 1.01 until the data base has been updated as described

in section 6.2.

2
1 Introduction

This document describes the changes which have been made in the STAT2 computer program since its documentation in NBS Special Publication 400-75, Semiconductor» Measurement Technology

A FORTRAN Program for Analysis of Data from

Microelectronic Test Structures, It is assumed that the reader has this

document, and no attempt is made to review STAT2 features or operation. The new version contains several new features which provide a more powerful data

base capability, improved displays, and greater compatibility with the automatic tester. This report describes the new features and then gives an alphabetical list of new error and warning messages. Three appendices are included which give the files which are needed to update previously created

data bases as explained in section 6.2.

2. New Data Array Definition

In version 1.01 of STAT2 [1], the DATA array was defined such that row 1 was

at the bottom of the wafer. The order in which sites were tested and the

STEND array relating to a sample DATA array were shown in figure 1 of [1],

In version 1.31, row 1 is at the top of the wafer instead of at the bottom.

The order of site testing is left to right in a raster pattern which advances

from the top row to the bottom row. If data taken using the "old” site locations convention are input to version 1.31 of STAT2 , the topological types

for top and bottom and for upper and lower corners will be reversed, and the

mapping commands will produce a display which is a mirror image of the data

about a horizontal axis.

3. New REA Command Formats

3.1 Format 4

STAT2 format 4 is intended for processing data taken by an Accutest 3000

parametric test system. In normal testing operation, the Accutest writes

data values to a binary file having a .LOG extension. The Accutest utility

LOGASC converts the data to ASCII in a file having a .LGA extension. A simple example of a .LGA file is shown in figure 1 . Data from each chip are preceded by a POS statement which identifies the chip by its column and row

numbers. Data values are contained in VAL statements which follow each POS

statement. The data values are given in the order in which they were logged

which, in turn, is governed by the testing program which took the data. The

.LGA file of figure 1, for example, is from a testing program in which two

parameters were measured in each of five chips. Note that there are two VAL

statements associated with each POS statement. The data representing each of

the parameters is distributed throughout the file. The data from the first

parameter measured, which is called data set number one, are contained in the

first VAL statement for each chip. The data from the second parameter measured, which is called data set number two, are given in the second VAL

statement for each chip. When reading data using format 4, the second parameter of the REA command specifies the data set number within the .LGA file

which is to be read and analyzed by STAT2 . For example, data set number 1 would be read by the command REA, 4,1.

3
TPN UTLMOSFET

STA 1 DAT 02-FEB-83

BTI 08:26:16

ETI

OPE

LOT

DEV

WFT

TSN

DSN 1 WFN 1 DIE 1 POS 1 . 000000E+00 1.000000E+00

VAL 1 -8.882344E-01

VAL 2 1 . 403333E-06

BIN 0

DSN 2 WFN 1 DIE 2 POS 2. 000000E+00 1 .000000E+00

VAL 1 -9 . 098073E-01

VAL 2 1 . 463333E-06

BIN 0

DSN 3

WFN 1 DIE 3 POS 3.000000E+00 1.000000E+00

VAL 1 -9.338425E-01

VAL 2 1.430000E-06

BIN 0

DSN 4

WFN 1 DIE 4

POS 1.000000E+00 2. 000000E+00

VAL 1 -9 . 254654E-01

VAL 2 1.41 3333E-06

BIN 0

DSN 5 WFN 1 DIE 5

POS 3 . 000000E+00 2.000000E+00

VAL 1 -9.1 5981 2E-01

VAL 2 1.41 3333E-06

BIN 0

EOF

***

< Column and row of first site measured

<

Value of first parameter at first site

<

Value of second parameter at first site

< Column and row of second site measured

<

Value of first parameter at second site

<

Value of second parameter at second site

Note that no data appears at coordinates

(2,2) which was designated an untested site.

< Column and row of last site measured

<

Value of first parameter at last site

<

Value of second parameter at last site

Figure 1. Annotated example of a .LGA file to be read using format 4.

4
1

10

2

0

3 < First row of sites starts in column 1 and ends in column 3

3 < Second row of sites starts in column 1 and ends in column 3

0 < Signals no more rows of sites

2 < Site at row 2 column 2 is not tested

0 < Signals no more untested sites

Figure 2. Annotated example of a .SAD file which is

the companion to the .LGA file of figure 1.

Coordinate information is contained in a file having a .SAD extension. The

.SAD file which goes with the .LGA file of figure 1 is given in figure 2.

The first part of the .SAD file contains the starting and ending columns

measured for all rows which were probed. This part of the file defines the

STEND array and is followed by a pair of zeroes. Following this are the

row-column coordinate locations of all untested sites within the region

defined by the STEND array. The file concludes with a final pair of zeroes.

In order to read data using format 4, (1) use the ASG command to enter the

file specifier of the .LGA file containing the data to be analyzed, (2) issue

the REA command as REA, 4 , i, where i is the data set number to be read, and

(3) in response to the prompt, enter the file specifier of the .SAD file.

When examining several data sets from the same .LGA file, it is not necessary

to re-issue the ASG command. Furthermore, the file specifier of the .SAD

file need not be re-entered; the user need only enter an asterisk to indicate

that the same .SAD file is to be used.

3.2 Format 5

STAT2 format 5 allows STAT2 to do certain types of analyses on test data

where the test sites are not in a contiguous region but are randomly placed

on a wafer. As with format 4, the data are read from a .LGA file produced on

an Accutest 3000 test system and the second parameter of the REA command

specifies the serial order of the data set within the data from each die. An

example of a .LGA file which can be read using format 5 is given in figure 3.

The accompanying .SAD file differs from that of format 4 in that the first

record contains the number of sites tested, and the subsequent records give

the explicit row-column locations of these sites. The .SAD file which goes

with the .LGA file of figure 3 is shown in figure 4.

5
TPN UTLMOSFET

STA 1 DAT 03-FEB-83

BTI 09:43:22

ETI

OPE

LOT

DEV

WFT

TSN

DSN 1 WFN 1 DIE 1 POS 3.000000E+00 1.000000E+00 < Column and row of first site measured

VAL 1 -8 . 734293E-01 < Value of first parameter at first site

VAL 2 1.382721E-06 < Value of second parameter at first site

BIN 0

DSN 2

WFN 1 DIE 2

POS 7.000000E+00 2.000000E+00 < Column and row of second site measured

VAL 1 -9 . 1 1 4932E-01 < Value of first parameter at second site

VAL 2 1.458231E-06 < Value of second parameter at second site

BIN 0

DSN 3

WFN 1 DIE 3

POS 5.000000E+00 6.000000E+00

VAL 1 -9 . 283744E-01

VAL 2 1.830000E-06

BIN 0

DSN 4

WFN 1 DIE 4

POS 2.000000E+00 4.000000E+00

VAL 1 -9 . 300284E-01

VAL 2 1 . 382773E-06

BIN 0

DSN 5 WFN 1 DIE 5

POS 1.000000E+00 5.000000E+00 < Column and row of last site measured

VAL 1 -9 . 201 833E-01 < Value of first parameter at last site

VAL 2 1.382261E-06 < Value of second parameter at last site

BIN 0

EOF

***

Figure 3. Annotated example of a . LGA file to be read using format 5.

6
5

12

6

4

5

3

7

52

< There were 5 sites measured

<

The first site measured was at row 1 column 3

<

The second site measured was at row 2 column 7

< The last site measured was at row 5 column 1

Figure 4. Annotated example of a .SAD file which is the

companion to the . LGA file of figure 3.

Internally, when reading data in format 5, STAT2 stores data values in

DATA(1,1), DATA (1,2), ... , DATA(1,32), DATA(2,1), ... , etc., until all

values (up to 1024 of them) are read in. The STEND array in this case contains no information about the site locations but only defines the elements

of the DATA array which contain actual data. The actual site locations are contained in two arrays IXCOL and IYROW, each dimensioned (32,32). The

LSITES array still contains a record of excluded sites. The topological type

has no meaning in this situation, and the TYPE array elements of all sites

are set equal to 10. The row or column coordinate of all sites must not

exceed 32.

In order to read data using format 5, (1) use the ASG command to enter the

file specifier of the .LGA file containing the data to be analyzed, (2) issue

the REA command as REA , 5 , i , where i is the data set number to be read, and

(3) in response to the prompt, enter the file specifier of the .SAD file.

When examining several data sets from the same .LGA file, it is not necessary

to re-issue the ASG command. Furthermore, the file specifier of the .SAD

file need not be re-entered; the user need only enter an asterisk to indicate

that the same .SAD file is to be used.

The user must be careful when designing a sampling plan to write a data base

using format 5 data because the subscripts of the DATA array do not give the

actual site locations. Alternatively, sampling plan 4, which includes all

sites measured in the sampling plan, is still valid for format 5 data. Additionally, because the sites are not contiguous when reading in format 5, the

following commands are not allowed and produce an error message: AIP, AXP,

FPL, FQD, MP1 , MP2, MP3, MP4, PLT, SPL, SQD, and XPP.

A new command has been added to draw a shaded or gray- tone map in which the

shades extend to a circular boundary. Extrapolation algorithms are used to

extend the map beyond the region containing the actual test sites to the

boundary. A sample circular shaded map is given in figure 5 and the accom- panying key in figure 6. As with the MP2 map (which is still available), the new map is written specifically for the VAX computer and Printronix P300 line

printer. The format of the new command is

4. The Circular Shaded Map

7
EXAMPLE OF A CIRCULAR SHADED MAP MADE WITH THE MP4 COMMAND

•v .y j. .* y.-. .**•* .**•* ,* .* * /•* /a*v--v*"-

•

• r- •V* •V• *Y* -V• •%*• - » ._» -’'iV-V

- . .• ..• .a .',• .’,s .',•. .y. .,•• ,*,•. y,,

1

j

Iwl

'.' stgigsiiiWW.'.VAW^w/AV

kiY<v.Y.. .sv/.v.-.vivr.wr

Figure 5. Sample circular map.

x. . L;V:xv^v/! /V/Xc.x ;/ 'XP’Xv^V *

' !!•!•«!

8
PARAMETER VALUE # SITES

24. 07 178 TO

23. 87335 TO

23. 67492 TO

23. 27808 TO

23. 07965 TO

22. 88123 TO

22. 63280 TO

24. 27020

24. 07178

23. 87335

23. 67492

23. 47650

23. 27808

23. 07965

22. 88123

3

3

4

6

8

4

7

13

SITES INCLUDED

“ x x x

4- 4 + +•

SAMPLE MEAN

SAMPLE STD DEV

SAMPLE MEDIAN

48

INCLUDED SITES WITHIN SCALE

INCLUDED SITES ABOVE SCALE

INCLUDED SITES BELOW SCALE

23 28777

O. 44482

23. 24650

Figure 6. Key to map of figure 5.

9
MP4, PI ,P2,P3,P4,P5,P6

where PI is the diameter of the map in inches, P2 is the scaling mode, P3 is

a flag to allow entry of a map label, P4 is a flag to allow the format of the

map key to be specified, and P5 and P6 are the lowest value in the lightest

shade and highest value in the darkest shade when P2 is 0. P3 through P6

have the same respective meanings as P4 through P7 of the MP2 command. The

meaning of P2 has been changed as discussed in section 5.1 below. The maxi- mum allowable value of PI is 8 (inches). The minimum depends on the number

of rows and columns in the data array.

Because of the discrete size of the pixels used to produce the map, the precise diameter requested is usually not produced. In addition, because of the

discreteness of the pixels and the forced circular boundary, there are some circumstances in which a map made at a specified diameter may omit points at

the top and bottom or at the right and left edges. Circular shaded maps

should always be examined to see if this has occurred. Selection of another

diameter will usually correct the problem.

The MP4 command is not suitable for use with data measured over a region

which is not approximately circular. For example, when mapping data taken

over a square region, the corners of the DATA array will be clipped. For

this reason, the MP2 command was left in STAT2.

5. New Map and Histogram Options

5.1 New Scaling Mode Interpretation

The scaling mode parameter of the mapping and histogram commands has been

given a slightly different meaning for the case in which the scaling mode is

negative. The scaling mode parameter is PI for the PLT and HIS commands, P2

for the MP3 and MP4 commands, and P3 for the MP1 and MP2 commands. Formerly,

when the scaling mode was negative, the map or histogram was scaled between

(MEAN + K* SIGMA) and (MEAN - K* SIGMA) where K was the multiple of the sample

standard deviation calculated by the XOL command on its last pass. Under

STAT2 version 1.31, it is now possible in addition to set the multiple of

SIGMA by the ENN command rather than have the multiple be calculated only by

the XOL command. For example, if you want a shaded map in which the upper

and lower bounds of the scaled range are to be (MEAN + 4*SIGMA) and (MEAN - 4*SIGMA ) , the command sequence might be:

ASG filename

REA 3 12

ENN 4

PRS

MP2 66-1 1000

END

It is still necessary to execute PRS prior to invoking a mapping or histogram

request.

10
5.2 Change in MP3 Contour Map

Under the previous version, the size or diameter of a contour map made with

an MP3 command was forced to 8 inches, regardless of what diameter was specified in parameter PI . Now, PI can be any value in the range 3 to 8 inclusive, and maps of corresponding diameter are produced. Also, excluded sites

are now represented in the map by 0's rather than by blanks.

5.3 Maps Inverted

The maps MP1 , MP2, MP3, MP4, PLT have been inverted such that row 1 is now

the top row of the map rather than the bottom row. This is discussed in

greater detail in section 2.

6. New Data Base Features

6.1 New LDB and SDB Command Format

The syntax of the LDB and SDB commands has been completely changed in a manner that now provides greater flexibility in selective listing of a data base

and selective calculation of the sample correlation coefficient. Basically,

the user specifies which portion of the data base is to be listed, or the

portion of the data base to be correlated against the reference data sample

using keywords, key values, and key value ranges. The seven regular keywords

are PATTERN, LOT, WAFER, DEVICE, PCODE, ENTRY, and DATE. One or more of

these keywords might appear on a command line, each keyword followed by one

or more key values or key value ranges. For example, to list data from a particular wafer or set of wafers, a user might type one of the following

command lines:

LDB WAFER 7 LDB WAF 7 42 12 57 112 3002 194

LDB W 7-15

LDB W 7-15 23-48

LDB WAFER 46-49 22 7-15 67 921 1000-1010

Note that any number of key values or key value ranges or both may follow the

keyword WAFER, that is used to indicate a range, that key values or ranges do not have to be in ascending numerical order, and that WAFER may be

abbreviated to the number of letters which uniquely defines it among the

other keywords (including the four additional keywords defined below). However, any additional letters beyond the minimum abbreviation must be correct.

Two other rules: there must be no space preceding or following the range

indicator, and there must be no separators other than spaces between key

values or key value ranges. When an LDB command is entered, STAT2 makes a pass through the data base, examines every entry, and lists every entry which

matches the specification of the command line.

11
It may be desirable to list or search entries which have not only a particular wafer number but also a particular device number. The command to perform

such a search might be:

SDB WAFER 2 45 1 3 DEVICE 55-59

The keywords may be combined in any manner on a command line, so long as the

command does not exceed 72 characters in length and there are no repeated

keywords in a command line.

The ENTRY keyword allows a user to specify the serial entry number or numbers

of the entry or entries to be listed.

The DATE keyword has different syntax from the other regular keywords. A

date value may be specified in two ways:

dd-mmm-yy or mm/dd/yy ,

such as

1 8-APR-83 or 4/18/83 .

If a range of dates is to be specified, the dates representing the ends of

the range must be separated by a range indicator. Any number of date

values or date value ranges may be included on the command line, in combination with other keyword specifications, as long as other syntax rules (such

as command length) are not violated.

There are three additional keywords which have no key values associated with

them. They are ALL, OR, and VALUES.

The ALL keyword signifies that all data base entries are to be listed (LDB

ALL) or are to be used in sample correlation coefficient calculations against

the reference data sample (SDB ALL). A warning message is printed if ALL

appears on the same command line as one of the seven regular keywords given

above. In such a case all entries are listed or searched.

The OR keyword is used when it is desired to list or correlate data base

entries in which any of the specifications of a command line are satisfied.

For example, the interpretation of the command

SDB LOT 13 DATE 5-JAN-83

is "calculate the sample correlation coefficient of all entries which have 13

in their LOT field AND which were entered into the data base on January 5,

1983." By comparison, the interpretation of the command

SDB LOT 13 OR DATE 5-JAN-83

is "calculate the sample correlation coefficient of all entries which have

EITHER 13 in their LOT field OR were entered into the data base on January 5,

12
1983." Hie OR keyword may precede any of the other keywords in the command

line or may come at the end of the command line.

The VALUES keyword has meaning only for the LDB command and causes an error

when used in an SDB command line. It causes the data values to be listed

along with the directory information. It may precede any of the other keywords in the command line or may come at the end of the command line.

There is one other keyword which is used only with the SDB command and causes

an error when used in an LDB command line. The COEF keyword allows the user

to specify a minimum correlation coefficient below which printing of the

correlation coefficient is suppressed. This capability was contained in the

sixth parameter of the SDB command under the previous version. Under the new

version, the command

SDB ALL COEF 0.7

causes the sample correlation coefficient to be calculated for all data base

entries against the reference data sample, but only those instances in which

the sample correlation coefficient magnitude is 0.7 or greater are reported

(logged). COEF must have only a single key value not exceeding 1.0 associated with it. If the COEF keyword is omitted, all results of sample correlation coefficient calculations are reported.

Because internally STAT2 uses LDB in its previous form, that command has been

kept but under the name LEN (for List ENtry) . It has the same syntax as LDB

did under version 1.01. For example,

LEN 3 45 0

causes all entries to be listed having entry numbers in the range 3 to 45

inclusive. The command

LEN 14-1

causes all entries having entry numbers beginning at 14 through end of file

to be listed along with the data values. LEN may still be useful in instances where a contiguous range of entries or a single entry is to be

listed. LEN can go directly to the desired entries and list them, whereas

LDB searches the entire data base for entry numbers which match and therefore

takes longer to execute.

6.2 Data Base Sample Size

Under the previous version, it was not possible to include more than 256

sites in a data sample to be stored in a data base. It is now possible to

include up to 1024 sites in a data sample. In order to make this change, it was necessary to increase the size of the NDAT field in the data base label

file. Therefore, a data base made under the previous version must be altered

if it is to be usable by version 1.31 of STAT2. A program, command file, and

13
help file to update a data base are given in Appendices I, II, and III. This

updating must be done once and only once to all old data bases, that is,

those data bases which were created using the CRDB program issued with version 1.01 of STAT2, prior to writing to them or reading from them with version 1.31 of STAT2 . Data bases which are created using the CRDB program

issued with version 1.31 of STAT2 need not and should not be updated.

7. Other Changes

7.1

The ERM Command

The ERM command is used to suppress warning messages. It now serves an additional purpose. When ERM, 0 is executed, subsequent executions of WDB and GET

do not list the data values but give only the directory information. Printing of these data values can be resumed by typing ERM, 1 .

7.2

The OPN and CLO Commands

OPN and CLO are a complementary command pair which enable a user to create a STAT2 command file while executing STAT2. A user who, while using STAT2,

realizes that a certain command sequence is being repeated, can type

OPN file-specifier

At this point, the normal 'STAT2>' prompt is replaced with an 'ENTER>' prompt

and the user may type a sequence of STAT2 commands which are not executed but

are written to a new file identified by the file specifier in the OPN command. This is called the file-create mode. No syntax checking is done, and

once a line is entered the user has no opportunity to make a correction

(other than to type CLO and begin again with a new OPN). The command file

creation is terminated by typing CLO in response to the 'ENTER>' prompt. CLO

in any other context is an illegal command. The user may then invoke the

command file with the MAC command. OPN should not be included as a command

within such a file because the MAC command rejects it upon encountering it.

7.3

New Help File Directory Specification

Under the previous version, the directory containing the Help files was named

explicitly in subroutine HELP of STAT2 . This required a user to modify STAT2

when installing the program or when subsequently moving Help files to another

directory. Under version 1.31, the directory name is specified by a VMS

ASSIGN command, issued prior to running STAT2, which assigns the name to

logical unit 10. An example of such a command is given by:

$ ASSIGN DRB1 : [USERNAME. HELPFILES] FOROIO .

This command could be put in the LOGIN.COM file of all STAT2 users.

14
8. Error Messages

Following is an alphabetical list of error messages which are present in

version 1.31 but were not included in version 1.01. Some error messages have

been removed as a result of additional flexibility built into the program,

but instances of this are not included in this documentation. Lower case letters in the messages represent alphanumeric characters which would appear

in the actual messages.

*** AMBIGUOUS KEYWORD: ' kkkkkkkk

A keyword in an LDB or SDB command has been abbreviated to the extent

that it does not uniquely define a known keyword. Use additional

characters in the abbreviation.

*** CLO MUST BE PRECEDED BY OPN

A CLO command has been issued while not in the file-create mode.

*** COEF KEYWORD ILLEGAL IN LDB COMMAND

A COEF keyword appears in an LDB command line.

*** COMMAND NOT APPLICABLE TO NON-PERIODIC DATA

A command has been entered which is not legal when processing data read

using STAT2 format 5 (random test site locations). A list of these

commands is given at the end of section 3.2.

*** DATE SPECIFICATION EXTENDS BEYOND BYTE 72

In reading the DATE specification of an LDB or SDB command line, the

specification extended beyond the 72-byte length of the command line.

*** DIAM MUST BE BETWEEN 3 AND 8

An illegal diameter specification has been given in the MP3 command.

*** ERROR IN DAY OR MONTH

A month greater than 12 or day greater than 31 has been included in a DATE specification of an LDB or SDB command.

!!! EXCESS KEYWORDS IN ADDITION TO 'ALL'

Other keywords in addition to ALL have been included in an LDB or SDB

command line creating a redundancy. The ALL keyword dominates and causes listing or searching of all entries.

15
! ! ! HELP FILE COULD NOT BE OPENED

Either a directory has not been assigned to logical unit 10 or the

directory which has been assigned does not contain the default help file

HEL.HLP.

*** ILLEGAL CHARACTER 'c' IN POSITION i

An illegal character has been detected in an LDB or SDB command line.

The character may be a comma or semicolon or it could be a letter or digit which is illegal in its particular context.

*** ILLEGAL OPN OR MAC COMMAND

An OPN or MAC command has been encountered while executing a macro

command file.

*** ILLEGAL .SAD FILE

An error occurred in processing the .SAD file during a format 5 read.

Either the number of sites was less than 1 or greater than 1024, a row or column position was not in the range 1 to 32, or there was insufficient

data in the file.

*** ILLEGAL SPECIFICATION FOR MONTH

An illegal three-letter abbreviation of a month has been used in an LDB

or SDB command.

*** ILLEGAL {STEND, DROPIN} ARRAY

An error or inconsistency was detected when processing the .SAD file

during a format 4 read.

*** KEYWORD HAS NO ASSOCIATED VALUES

A keyword which requires one or more key values or key value ranges has

been included in an LDB or SDB command line, but no key values or key

value ranges have been given.

*** NO KEY VALUES SUPPLIED

An LDB or SDB command contains insufficient specifications to permit it

to select entries for listing or searching.

*** NO KEYWORDS IN COMMAND STRING

An LDB or SDB command contains no keywords

.

16
*** PARAMETER 0 HAS MORE THAN 20 CHARACTERS

A number representing a key value of the COEF keyword of the SDB command

is represented by more than 20 digits.

*** PLOT DIAMETER TOO LARGE OR TOO SMALL

The diameter specified in the MP4 command is illegal. The maximum

allowed diameter is 8 (inches). The minimum depends on the number of rows and columns in the data array.

*** R MUST BE IN THE RANGE 0 TO 1

The value associated with the COEF keyword of the SDB command is outside

the range 0 to 1

.

*** RANGE INCOMPLETE

A key value range indicator in an LDB or SDB command is not

immediately followed by a digit.

*** REPEATED KEYWORD

A keyword appears more than once in an LDB or SDB command line.

*** STEND ARRAY FAULT IN MP4

This error is not expected to occur and may indicate a portability

problem.

*** UNKNOWN KEYWORD: 'kkkkkkkk'

A keyword has been detected in an LDB or SDB command line which is not

one of the known keywords.

*** VALUES KEYWORD ILLEGAL IN SDB COMMAND

A VALUES keyword appears in an SDB command line.

Reference

1. Mattis, R. L. , Semiconductor Measurement Technology: A FORTRAN

Program for Analysis of Data from Microelectronic Test Structures, NBS

Special Publication 400-75 (July 1983).

17
non

^

wnjooo-*

non

ooo

non

Appendix I: Listing of UPDATE1 . FOR

C

C PROGRAM UPDATE1

C

C UPDATES A STAT2 DATA BASE LABEL FILE FROM STAT2 REVISION 1.01 TO

C REVISION 1.31. THE DIFFERENCE IS THAT THE NDAT FIELD HAS BEEN

C EXPANDED FROM 13 TO 14, AND AN ADJACENT RESERVED FIELD HAS BEEN

C CONTRACTED FROM 4X TO 3X. OTHER FIELDS ARE NOT ALTERED.

C

BYTE DATE( 9 ) , TIME( 8

)

INTEGER TITLE ( 9

)

INTEGER ENT,DLT,PTR,PAT, WAF,DEV,PCODE

OPEN OLD LABEL FILE.

OPEN ( UNIT=27 , STATUS= ' OLD' , ERR=1 0, ACCESS= ' DIRECT'

,

* FORM= ' FORMATTED ' , ORGANIZATION= ' RELATIVE ' , SHARED

,

* RECL=80 , RECORDTYPE= ' FIXED ' )

OPEN NEW LABEL FILE.

OPEN ( UNIT=37 , STATUS= ' NEW' , ERR= 20, ACCESS= ' DIRECT'

,

* FORM= ' FORMATTED ' , ORGANIZATION= ' RELATIVE ' , SHARED

,

* RECL=80 , RECORDTYPE= ' FIXED '

)

COPY FIRST RECORD.

READ (27' 1,1) TITLE, ISPC,LASTLR,LASTDR

WRITE (37 '1,1) TITLE, ISPC, LASTLR, LASTDR

FORMAT (10X,9A4,2X,I3,1X,I5,1X,I6)

COPY LABEL RECORDS UNTIL END-OF-FILE ENCOUNTERED.

LREC=2

READ ( 27 ' LREC, 3 , ERR=50) ENT, DLT,PTR, NDAT, PAT, LOT, WAF, DEV, PCODE,

* DATE, TIME

FORMAT ( 1 X, 15 , A1 ,I6,I3,4X,I3,I3,I3,I4,I4,2X,9A1 , 1 X, 8A1

)

WRITE ( 37 ' LREC, 4) ENT, DLT, PTR, NDAT, PAT, LOT, WAF , DEV, PCODE,

* DATE, TIME

FORMAT ( 1 X, 15 , A1 , 16 , 14 , 3X, 13, 13, 13 , 14, 14, 2X, 9A1 ,1X,8A1

)

LREC=LREC+1

GOTO 2

PRINT MESSAGE FOR TERMINATION.

50 LREC=LREC1

WRITE (6,51) LREC

51 FORMAT (IX, 'PROGRAM TERMINATION — ' , 15 ,

' RECORDS CONVERTED')

GOTO 60

18
c

C IF ERROR OPENING FILES.

C

10 WRITE (6,11)

11 FORMAT (IX,'*** ERROR OPENING OLD LABEL FILE')

GOTO 60

20 WRITE (6,21)

21 FORMAT (IX,'*** ERROR OPENING NEW LABEL FILE')

60 STOP

END

19
Appendix II: Listing of UPDATE1.COM

$ I $ ! File UPDATE1 .COM

$ 1 $ ASSIGN 'PI' FOR027

$ ASSIGN 'PI' FOR037

$ RUN UPDATE1

20
Appendix III: Listing of UPDATE1 .HLP

File UPDATE1.HLP

UPDATE1 is a Fortran program and VMS command file to update a STAT2 data base

label file from STAT2 version 1.01 to STAT2 version 1.31. The difference is

that the NDAT field (number of data points in the sample) has been expanded

from three digits to four. The data base data file is not affected by going

to the higher version.

To execute the program, type:

@UPDATE1 file-specifier

where 'file-specifier' is the file specifier (including directory if not the

default directory, and including the extension) of the data base label file.

The program reads the old label file and writes a new label file having the same file specifier but a version number one greater than the old label file.

When the program is finished, it prints a message giving the number of

entries converted and exits. The user should verify that this number is

correct by comparing it with the LASTLR field of the first label record.

Once this verification is done, the old label file may be deleted by

purging.

If an error occurs in trying to open either of the label files, a message is

printed as

*** ERROR OPENING OLD LABEL FILE or

*** ERROR OPENING NEW LABEL FILE

21
NBS-114A (REV. 2-80

U.S. DEPT. OF COMM. BIBLIOGRAPHIC DATA

SHEET (See instructions)

1. PUBLICATION OR

REPORT NO. NBSIR 83-2779

2. Performing Organ. Report NoJ 3.

4.

TITLE AND SUBTITLE

Publication Date November 1983

Release Notes for STAT2 Version 1.31: An Addendum to NBS Special Publication 400-75

5. AUTHOR(S)

R. L. Mattis and R. Zucker

6. PERFORMING ORGANIZATION (If joint or other than NBS. see in struction s) 7. Contract/Grant No. national bureau of standards

DEPARTMENT OF COMMERCE 8 . Type of Report & Period Covered

WASHINGTON, D.C. 20234

9.

SPONSORING ORGANIZATION NAME AND COMPLETE ADDRESS (Street. City. State. ZIP)

10.

SUPPLEMENTARY NOTES

[xj Document describes a computer program; SF-185, FlPS Software Summary, is attached.

11.

ABSTRACT (A 200-word or less factual summary of most significant information. If document includes a significant

bi bliography or literature survey, mention it here) This document describes the changes which have been made in the STAT2 computer

program. The new version contains several new features which provide a more powerful data base capability, improved displays, and greater compatibility with the

automatic tester. In going from the original version 1.01 to version 1.31, the DATA

array has been redefined and new REA command formats have been added to be

compatible with new data acquisition equipment. A new circular shaded map has been

added which gives a more realistic representation of data variation over a wafer

surface. New map and histogram scaling options allow greater flexibility in

specifying the scale of data displays. A new format for two data base commands

allows greater flexibility in selectively listing and correlating data base entries.

The capability has been added for eliminating some unwanted printout, and for

creating macro command files within a STAT2 run. Finally, a new method of

specifying the directory containing the Help files makes STAT2 easier to install.

Following the description of the changes is an annotated listing of new error messages

.

12. KEY WORDS (Six to twelve entries; alphabetical order; capitalize only proper names; and separate key words by semicolons)

ATE; computer program; contour map; data base; outlier; process validation wafer;

statistical analysis; two-dimensional map; wafer map.

13. AVAILABILITY 14. NO. OF

|_^J Unlimited

| | For Official Distribution. Do Not Release to NTIS

PRINTED PAGES

26

I Order From Superintendent of Documents, U.S. Government Printing Office, Washington, D.C. 20402. 15. Price

Order From National Technical Information Service (NTIS), Springfield, VA. 22161 $8.50

U5COMM-DC 6043-P80
FEDERAL INFORMATION PROCESSING STANDARD SOFTWARE SUMMARY

01. Summary date

1

04. Software date

Yr. Mo. Day

8 3 0 9 0 1

Yr. Mo. Dc 8 3 0 9 0

02. Summary prepared by (Name and Phone)

Richard L. Mattis (301) 921-3621

05. Software title Release Notes for STAT2 Version 1.31:

to NBS Special Publication 400-75

06. Short title 08. Software type 09. Processing mode 10. General Automated Data Computer Systems

[ | System [~X] Interactive Support/Utility

|x| Computer Program I-

] Batch [33 Scientific/Engineering

| | Subroutine/Module | | Combination | | Bibliographic/Textual

11. Submitting organization and address

03. Summary action New Replacement

0

An Addendum Previous Internal Software ID

Deletion

07. Internal Software ID STAT2

Application area

Specific Management/

Business

Process Control Analysis of Integrated

Circuit Process ValidaOther tion Wafer Test Data

12. Technical contact(s) and phone

Semiconductor Devices and Circuits Division

National Bureau of Standards

Washington, DC 20234

Richard L. Mattis

(301) 921-3621

13. Narrative

The program performs the following functions : read data as a two-dimensional array

in several formats; calculate mean, standard deviation, median; identify outliers;

calculate replacement values for outliers; make gray tone, numerical, and contour

data maps on a line printer; make a numerical map on the user's terminal; make a histogram on a line printer; construct a data base for making correlations among

various data sets; search said data base using several selective keys. The package

includes a set of help files callable from the program.

14. Keywords

Correlation coefficient; data management; outlier; process validation wafer; statistical

analysis; two-dimensional arrays; wafer map.

15. Computer manuf'r and model DEC VAX 11/78016. Computer operating system

VMS 3.3

17. Programing language(s)

FORTRAN

18. Number of source program state- YJ?54

19. Computer memory requirements

630 KB

20. Tape drives None21. Disk/Drum units Disk

l^eded for map scratch

File, data input, help

File

22. Terminals 1 video or hard copy

23. Other operational requirements

25. Documentation availability

Available Inadequate In-house only

g

The user's manual is available and consists

of NBS Spec. Publ . 400-75 and NBSIR 83-2779.

26. FOR SUBMITTING ORGANIZATION USE

24. Software availability

Available Limited 0

In-house only

Standard Form 185

1974 July

U.S. Dept, of Commerce—NBS

(FIPS. Pub. 30)

185-101