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                                                                   EXHIBIT 10.16

                                 Entegris, Inc.
                         Executive Employment Agreement


This Agreement is between Entegris, Inc. (the "Company"), and
_________________________ ("Executive") and effective as of August 26, 2002.

1. In the event that a Change of Control of the Company occurs, and the
Executive is terminated without Cause or there is any material reduction in the
Executive's responsibilities, duties, terms of employment or change of location
of employment of 50 miles or more without executives agreement, then the
Executive is entitled to receive: (i) his base salary and basic benefits
(health, life and dental) for 12 months following termination, (ii) a lump-sum
payment equal to his/her then current annual bonus target; and (iii) all
unvested stock options become immediately vested and exercisable. "Change of
Control" means: (A) any merger or asset sale other than one in which at least
51% of the outstanding voting securities of the surviving or acquiring company
are owned in the aggregate by the shareholders of the Company immediately before
the transaction; or (B) the issuance of securities or other acquisition of
Company securities such that any person becomes the beneficial owner of 50% or
more of the Company's outstanding securities. "Cause" means: (a) gross
dereliction of duties; (b) willful or gross misconduct that harms the Company;
(c) willful and material violation of laws applicable to the Company; or (d)
embezzlement or theft of Company property.

2. Exclusive Remedy. This Agreement specifies all of Executive's compensation
and benefits resulting from actual or constructive termination in connection
with a Change In Control. Executive shall not be entitled to any other
compensation or benefits from the Company except to the extent provided under
any written Company benefit plan, stock option agreement or indemnification
agreement, or as may be required under applicable law.

3. Golden Parachute Excise Tax. If the benefits provided for in this Agreement
or otherwise payable to Executive constitute "parachute payments" within the
meaning of Section 280G of the Code and will be subject to the excise tax
imposed by Section 4999 of the Code, then Executive's severance benefits under
Section 1 shall be (i) delivered in full, or (ii) delivered as to such lesser
extent which would result in no portion of such severance benefits being subject
to the Excise Tax, whichever of the foregoing amounts, taking into account the
applicable federal, state and local income taxes and the Excise Tax, results in
the receipt by Executive on an after-tax basis, of the greatest amount of
severance benefits.

4. Assignment. This Agreement shall bind and benefit (a) Executive's heirs,
executors and legal representatives upon Executive's death and (b) any successor
of the Company. Any such successor of the Company shall be deemed substituted
for the Company under the terms of the Agreement for all purposes. "Successor"
shall include any person, firm, corporation or other business entity which at
any time, whether by purchase, merger or otherwise, directly or indirectly
acquires all or substantially all of the assets or business of the Company.
Executive has no other right to assign this Agreement and any such attempted
assignment is void.

5. Notices. All notices, requests, demands and other communications under this
Agreement shall be in writing and shall be deemed given if (i) delivered
personally, (ii) one day after being sent by Federal Express or a similar
commercial overnight service, or (iii) three days after being mailed by
registered or certified mail, return receipt requested, prepaid and addressed to
Company at its principal office, attention: Chief Executive Officer, or to
Executive at his last principal residence known to the Company, or at such other
addresses as the parties may designate by written notice.

6. Severability. In the event that any provision hereof becomes or is declared
by a court of competent jurisdiction to be illegal, unenforceable or void, this
Agreement shall continue in full force and effect without said provision.

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7. Entire Agreement. This Agreement and any proprietary information and
invention assignment, stock option, stock purchase or indemnification agreement
represent the entire agreement and understanding between the Company and
Executive concerning Executive's employment relationship with the Company.

8. Arbitration and Equitable Relief. (i) Any dispute or controversy arising out
of, relating to, or in connection with this Agreement, or the interpretation,
validity, construction, performance, breach, or termination thereof shall be
settled by arbitration to be held in Minneapolis, Minnesota in accordance with
the National Rules for the Resolution of Employment Disputes then in effect of
the American Arbitration Association (the "Rules"). The arbitrator may grant
injunctions or other relief in such dispute or controversy. The decision of the
arbitrator shall be final, conclusive and binding on the parties to the
arbitration. Judgment may be entered on the arbitrator" decision in any court
having jurisdiction. (ii) The arbitrator shall apply Minnesota law to the merits
of any dispute or claim, without reference to rules of conflict of law. The
arbitration proceedings shall be governed by federal arbitration law and by the
Rules, without reference to state arbitration law. (iii) The Company shall pay
the costs and expenses of such arbitration. Each party shall separately pay its
counsel fees and expenses. (iv) Executive understands that nothing in this
Agreement modifies Executive's at-will status. Either the Company or Executive
can terminate the employment relationship at any time, with or without cause.

9. No Oral Modification, Cancellation or Discharge. This Agreement may only be
amended, canceled or discharged in writing signed by Executive and the Company.

10. Withholding. The Company shall be entitled to withhold, or cause to be
withheld, from payment any amount of withholding taxes required by law with
respect to payments made to Executive in connection with his employment
hereunder.

11. Governing Law. This Agreement shall be governed by the laws of the state of
Minnesota (with the exception of its conflict of laws provisions).

12. Representations. Executive represents that he has had the opportunity to
discuss this matter with and obtain advice from his private attorney, has had
sufficient time to, and has carefully read and fully understands all the
provisions of this Agreement, and is knowingly and voluntarily entering into
this Agreement.


Entegris Inc.


/s/Roger McDaniel
ROGER McDANIEL
DIRECTOR


/s/Executive Signature
EXECUTIVE NAME