# Patent

## Title
Method of fabricating a quantum device

## Abstract

A method for forming field oxide regions includes the formation of cavities in a semiconductor substrate. A layer of thermal oxide is then grown on the substrate. A layer of planarizing material is deposited over the device, filling the cavities. The planarizing layer is etched back to expose a portion of the cavities. A conformal layer of undoped oxide or a layer of polycrystalline silicon that is converted to oxide is deposited over the device, followed by a second layer of planarizing material, The planarizing material and conformal layer are then etched back to expose the active areas in the substrate.

## Background
1. Field of the Invention

The present invention relates generally to semiconductor integrated circuits, and more specifically to the formation of field oxide regions in a semiconductor substrate.

2. Description of the Prior Art

The increase in densities of integrated circuits has raised issues of how to miniaturize components within an integrated circuit, while maintaining the reliability and proper operation of the device. When building a variety of components on one integrated circuit, it is necessary to isolate active areas in the substrate. A common method for isolating active areas is through the formation of field oxide regions. In this process regions of silicon dioxide are selectively formed on the substrate. This is typically known in the art as local oxidation of silicon, or LOCOS.

Several problems are encountered however, with the conventional process of forming field oxide regions. First, LOCOS produces a bird's beak caused by lateral diffusion of the silicon dioxide. This lateral diffusion has the undesirable effect of reducing the size of the active areas within the substrate.

Another problem is a condition known as latchup. Latchup is caused by parasitic devices which are inherent components of any CMOS device. These parasitic components are formed by the various physical regions which make up the CMOS device.

Those skilled in the art will recognize that one technique used to lower the probability of latchup is the formation of a channel stop region. Another possible solution is to form a field oxide region which extends deeper into the substrate. This has the effect of increasing the threshold voltages of the parasitic components. However, when forming a field oxide region that extends deeper into the substrate, the resulting structure becomes more non-planar. This undesirable effect makes further processing steps more difficult.

Therefore, it would be desirable to provide a technique for forming field oxide regions that are more planar with the substrate and extend deeper into the substrate, and that when formed have little or no bird's beak.

It is therefore an object of the present invention to provide a method for forming field oxide regions which extend deeply into the semiconductor substrate.

It is another object of the present invention to provide a method for forming field oxide regions which are more planar with the upper surface of the semiconductor substrate.

It is another object of the present invention to provide such a method and structure which is compatible with standard process flows, and which add minimal additional complexity to the fabrication of a typical integrated circuit.

Therefore, according to the present invention, a method for forming field oxide regions includes the formation of cavities in a semiconductor substrate. A layer of thermal oxide is then grown on the substrate. A layer of planarizing material is deposited over the device, filling the cavities. The planarizing layer is etched back to expose a portion of the cavities. A conformal layer of undoped oxide or a layer of polycrystalline silicon that will be converted to oxide is deposited over the device, followed by a second layer of planarizing material. The planarizing material and conformal layer are then etched back to expose the active areas in the substrate.

The novel features believed characteristic of the invention are set forth in the appended claims. The invention itself however, as well as a preferred mode of use, and further objects and advantages thereof, will best be understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawings, wherein:

FIGS. 1-8 illustrate a preferred method of forming field oxide regions for integrated circuits according to the present invention.

The process steps and structures described below do not form a complete process flow for manufacturing integrated circuits. The present invention can be practiced in conjunction with integrated circuit fabrication techniques currently used in the art, and only so much of the commonly practiced process steps are included as are necessary for an understanding of the present invention. The figures representing cross-sections of portions of an integrated circuit during fabrication are not drawn to scale, but instead are drawn so as to illustrate the important features of the invention.

Referring to FIG. 1, an integrated circuit will be formed in and on a substrate 10. A masking layer 12 is deposited and patterned on the surface of the substrate 10 Cavities 14, 16 are then formed by etching into the substrate 10. The preferred method for creating cavities 14, 16 is to perform an anisotropic etch on the exposed areas of the substrate 10. However, the cavities 14, 16 can also be formed by isotropically etching the substrate lo.

FIG. 2 illustrates the integrated circuit after the masking layer 12 is removed, and a layer of oxide 18 is grown over the device. Those skilled in the art will recognize that a channel stop implant or diffusion 20 can be formed before the layer of oxide 18 is grown over the device. The purpose of the channel stop 20 is to prevent latchup, which is caused by turning on the parasitic components within the device.

Referring to FIG. 3, a layer of planarizing material 22 is deposited over the device. The planarizing layer can be formed from any material which can be planarized and has physical properties consistent with its use as described below. For example, reflowable or spin on glass can be used as planarizing material. An anisotropic etch is then performed over the device to expose the active areas within the substrate. The etchants should be matched with the planarizing material so that the oxide 18 and planarizing material 22 etch at approximately the same rate. If the upper surface of layer 22 is actually substantially planar, as shown, an isotropic etchback could also be performed if desired.

FIG. 4 illustrates the device after the planarizing 22 and oxide 18 layers are etched back. As can be seen, the planarizing material 22 is removed so as to expose a portion of the cavities.

Referring to FIG. 5, a conformal layer 24 is then deposited over the device, followed by a second layer of planarizing material 26. The conformal layer 24 can be made of undoped oxide or polycrystalline silicon converted to oxide. The second layer 26 can consist of reflowable or spin on glass. The selection of materials, however, for the first conformal layer 24 and the second layer of planarizing material 26 is not critical, so long as the upper surface of the second layer 26 is planar, and the second layer 26 and the first conformal layer 24 can be etched at the same rate using a single etch chemistry. An anisotropic etch is then performed over the device to expose the active areas within the substrate.

FIG. 6 illustrates the device after formation of the field oxide regions is complete. The integrated circuit is now ready for further processing using techniques which are known in the art.

An alternative to the above described process is illustrated in FIG. 7. First conformal layer 28 is deposited over the device, followed by a layer of planarizing material 30. The first conformal layer 28 can be a layer of polycrystalline silicon converted to oxide or an undoped deposited oxide. The second layer of planarizing material 30 can consist of reflowable or spin on glass. The selection of materials, however, for the conformal layer 28 and the second layer 30 is not critical, so long as the upper surface of the second layer 30 is planar, and the second layer 30, the first conformal layer 28, and the oxide layer 28 can be etched at the same rate using a single etch chemistry. FIG. 8 illustrates the device after formation of the oxide regions is complete. The integrated circuit is now ready for further processing using techniques which are known in the art.

As an example of the preferred embodiment, the following dimensions are used to illustrate the process flow. The cavities 14, 16 within the substrate 10 can be formed to a depth between approximately 2000 to 8000 angstroms. The layer of oxide 18 can be grown to be 1000-3000 angstroms thick. The first planarizing layer 22 can reach a thickness of 3000 angstroms or more. The conformal layer 24 can be approximately 1000 angstroms thick. Finally, the second layer of planarizing material 26 can be approximately 1000 angstroms thick.

As will be appreciated by those skilled in the art, the technique described above creates field oxide regions which are planar with the upper surface of the semiconductor substrate and contain little or no bird's beak. This maximizes the ratio of useful active area to total chip area, and eliminates field oxide step coverage problems. Additionally, the field oxide extends deeper or further into the substrate. This provides the added advantage of increasing field threshold voltages of the parasitic components within the integrated circuit.

While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.

## Claims

1. A method for formation of an isolation region in an integrated circuit, comprising the steps of: extending into said cavities; expose a portion of the substrate between the cavities; said cavities; layer to expose a portion of the substrate between the cavities.

2. The method of claim 1, wherein said step of creating cavities in the semiconductor substrate comprises: openings;

3. The method of claim 2, wherein said step of removing a portion of the substrate comprises anisotropically etching said substrate.

4. The method of claim 2, wherein the masking layer includes a photoresist mask.

5. The method of claim 1, wherein said step of forming a layer of oxide comprises thermally growing said oxide.

6. The method of claim 1, wherein said first planarizing layer includes a material other than thermal oxide.

7. The method of claim 6, wherein said first planarizing layer comprises reflowable or spin on glass.

8. The method of claim 1, wherein said second planarizing layer includes a material other than thermal oxide.

9. The method of claim 1, wherein said conformal layer comprises undoped deposited oxide or polycrystalline silicon converted to oxide.

10. The method of claim 8, wherein said second planarizing layer comprises reflowable or spin on glass.

11. The method of claim 1, wherein said step of removing a portion of the first and second planarizing layers comprises anisotropically etching said layers.

12. The method of claim 1, wherein a channel stop region is formed below the cavities before the layer of oxide is grown.

13. The method of claim 12, wherein said step of forming a channel stop region comprises implanting dopants into said region of the substrate.

14. A method for formation of an isolation region in an integrated circuit, comprising the steps of: define openings therein; cavities in the substrate; extending into said cavities; portion of the substrate between the cavities and a portion of the cavities; said cavities; portion of the substrate between the cavities.

15. The method of claim 14, wherein the masking layer includes a photoresist mask.

16. The method of claim 14, wherein said step of removing a portion of the substrate comprises anisotropically etching said substrate.

17. The method of claim 14, wherein said step of forming a layer of oxide comprises thermally growing said oxide.

18. The method of claim 14, wherein said first planarizing layer includes a material other than thermal oxide.

19. The method of claim 18, wherein said first planarizing layer comprises reflowable or spin on glass.

20. method of claim 14, wherein said first planarizing layer is a multilayer comprising a first conformal layer and a second layer which can be planarized.

21. The method of claim 20, wherein said first conformal layer comprises undoped oxide or polycrystalline silicon converted to oxide.

22. The method of claim 20, wherein said second layer comprises reflowable or spin on glass.

23. The method of claim 14, wherein said conformal layer comprises undoped oxide or polycrystalline silicon converted to oxide.

24. The method of claim 14, wherein said second planarizing layer includes a material other than thermal oxide.

25. The method of claim 24, wherein said second planarizing layer comprises reflowable or spin on glass.

26. The method of claim 14, wherein said step of removing a portion of the first and second planarizing layers comprises anisotropically etching said layers.

27. The method of claim 14, wherein a channel stop region is formed in the substrate beneath the cavities before the oxide layer is grown.

28. The method of claim 27, wherein said step of forming a channel stop region comprises implanting dopants into said region of the substrate.