# Patent

## Title
Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same

## Abstract

The present invention is directed to a top surface of a workpiece surface influencing device and a method of using the same. The top surface of the workpiece surface influencing device is adapted for use in an electrochemical mechanical processing apparatus in which a solution becomes disposed onto a conductive surface of a workpiece and electrochemical mechanical processing of the conductive surface is performed while relative movement and physical contact exists between the top surface and the conductive surface. The top surface comprises a ceramic material that presents a substantially planar contact area to the conductive surface, the ceramic material having a hardness greater than that of the conductive surface. A plurality of channels are formed through the top surface.

## Background
RELATED APPLICATIONS
This application claims priority to U.S. Provisional Application Serial No. 60/331,783 filed Nov. 21, 2001, and is a continuation-in-part of Ser. No. 10/165,673 filed Jun. 6, 2002, which is a divisional of Ser. No. 09/373,681, filed Aug. 13, 1999, now U.S. Pat. No. 6,409,904,which is a continuation in part application of Ser. No. 09/201,929,filed Dec. 1, 1998, now U.S. Pat. No. 6,176,992, and Ser. No. 09/285,621, filed Apr. 3, 1999 now U.S. Pat. No. 6,328,872.


FIELD
The present invention relates to manufacture of semiconductor integrated circuits and, more particularly to a method for planar deposition or etching of conductive layers.
BACKGROUND
Conventional semiconductor devices generally include a semiconductor substrate, usually a silicon substrate, and a plurality of sequentially formed dielectric interlayers such as silicon dioxide and conductive paths or interconnects made of conductive materials. Copper and copper alloys have recently received considerable attention as interconnect materials because of their superior electromigration and low resistivity characteristics. The interconnects are usually formed by filling copper in features or cavities etched into the dielectric interlayers by a metallization process. The preferred method of copper metallization process is electroplating. In an integrated circuit, multiple levels of interconnect networks laterally extend with respect to the substrate surface. Interconnects formed in sequential interlayers can be electrically connected using vias or contacts.
In a typical process, first an insulating interlayer is formed on the semiconductor substrate. Patterning and etching processes are performed to form features such as trenches and vias in the insulating layer. Then, copper is electroplated to fill all the features. However, the plating process results in a thick copper layer on the substrate some of which need to be removed before the subsequent step. Conventionally, after the copper plating, CMP process is employed to globally planarize or reduce the thickness of the copper layer down to the level of the surface of the insulation layer. However, CMP process is a costly and time consuming process that reduces production efficiency.
The adverse effects of conventional material removal technologies may be minimized or overcome by employing an Electrochemical Mechanical Processing (ECMPR) approach that has the ability to provide thin layers of planar conductive material on the workpiece surface, or even provide a workpiece surface with no or little excess conductive material. The term of Electrochemical Mechanical Processing (ECMPR) is used to include both Electrochemical Mechanical Deposition (ECMD) processes as well as Electrochemical Mechanical Etching (ECME), which is also called Electrochemical Mechanical Polishing. It should be noted that in general both ECMD and ECME processes are referred to as electrochemical mechanical processing (ECMPR) since both involve electrochemical processes and mechanical action.
FIG. 1 shows an exemplary conventional ECMPR system 2, which system 2 includes a workpiece-surface-influencing device (WSID) 3 such as a mask, pad or a sweeper, a carrier head 4 holding a workpiece 5 and an electrode 6. The workpiece-surface-influencing-device (WSID) is used during at least a portion of the electrotreatment process when there is physical contact or close proximity and relative motion between the workpiece surface and the WSID. Surface of the WSID 3 sweeps the surface of the workpiece 5 while an electrical potential is established between the electrode 6 and the surface of the workpiece. Channels 7 of the WSID 3 allow a process solution 8 such as an electrolyte to flow to the surface of the workpiece 5. If the ECMD process is carried out, the surface of the workpiece 5 is wetted by a deposition electrolyte which is also in fluid contact with the electrode (anode) and a potential is applied between the surface of the workpiece and the electrode rendering the workpiece surface cathodic. If the ECME process is carried out, the surface of the workpiece 5 is wetted by the deposition electrolyte or a special etching electrolyte, which is also in fluid contact with an electrode (cathode) and a potential is applied between the surface of the workpiece and the electrode rendering the workpiece surface anodic. Thus etching takes place on the workpiece surface. Very thin planar deposits can be obtained by first depositing a planar layer using an ECMD technique and then using an ECME technique on the planar film in the same electrolyte by reversing the applied voltage. Alternately, the ECME step can be carried out in a separate machine and a different etching electrolyte. The thickness of the deposit may be reduced in a planar manner.
Descriptions of various planar deposition and planar etching methods i.e. ECMPR approaches and apparatus can be found in the following patents and pending applications, all commonly owned by the assignee of the present invention. U.S. Pat. No. 6,126,992 entitled “Method and Apparatus for Electrochemical Mechanical Deposition.” U.S. application Ser. No. 09/740,701 entitled “Plating Method and Apparatus that Creates a Differential Between Additive Disposed on a Top Surface and a Cavity Surface of a Workpiece Using an External Influence,” filed on Dec. 18, 2001, and application Ser. No. 09/169,913 filed on Sep. 20, 2001, entitled “Plating Method and Apparatus for Controlling Deposition on Predetermined Portions of a Workpiece”. These methods can deposit metals in and over cavity sections on a workpiece in a planar manner. They also have the capability of yielding novel structures with excess amount of metals selectively over the features irrespective of their size, if desired.
The surface of the WSID preferably contains hard-abrasive material for efficient sweeping. U.S. application Ser. No. 09/960,236 filed on Sep. 20, 2001, entitled “Mask Plate Design,”,U.S. Provisional Application Serial No. 60/326,087 filed on Sep. 28, 2001, entitled “Low Force Electrochemical Mechanical Processing Method and Apparatus,” and U.S. application Ser. No. 10/155,828 filed May 23, 2002, all of which are assigned to the same assignee as the present invention, disclose various workpiece-surface-influencing device embodiments.
Fixed abrasive sheets or pads, which are supplied by companies such as 3M and which are commonly used in CMP applications, work efficiently on WSID surfaces. Such abrasive sheets are generally comprised of abrasive composites that have a discernible precise shape such as pyramidal or cylindrical. The abrasive composite shapes include a plurality of abrasive grains dispersed in a binder that also bonds abrasive composite shapes to a backing. During a CMP process, as the abrasive sheet is being used to abrade a surface, the abrasive composite shapes break down and expose unused abrasive grains embedded in the binder. As the sheet is used for an extended time period, the composite shapes further break down and expose more abrasive grains. For an ECMPR process, due to the constant breaking down of the abrasive layer, such abrasive sheets have relatively short life time and need to be replaced often. This in turn lowers throughput and also adversely affect product consistency.
Therefore, it will be desirable to provide a longer life abrasive and hard surface for the WSID used in an ECMPR technique.
SUMMARY OF THE INVENTION
The present invention is directed to a top surface of a workpiece surface influencing device and a method of using the same. The top surface of the workpiece surface influencing device is adapted for use in an electrochemical mechanical processing apparatus in which a solution becomes disposed onto a conductive surface of a workpiece and electrochemical mechanical processing of the conductive surface is performed while relative movement and physical contact exists between the top surface and the conductive surface. The top surface comprises a ceramic material that presents a substantially planar contact area to the conductive surface, the ceramic material having a hardness greater than that of the conductive surface. A plurality of channels are formed through the top surface.
In one aspect, the substantially planar contact area includes a plurality of contact regions, each of the contact regions including a region top surface that is substantially planar with other region top surfaces. These plurality of contact regions may each be raised above a layer disposed below, which layer may be another ceramic material, or a metal that can be used as an anode or a cathode. Each of the plurality of contact regions will have an associated region top surface, which may be flat, rounded, triangular or some other shape, such that the top portion of each of the region top surfaces together form a substantially planar contact area
In another embodiment each of a plurality of contact regions is formed as a separable sweep element, thereby resulting in a plurality of separable sweep elements. The separable sweep elements can have a region top surface that is flat, rounded, triangular, or some other shape. Further, the sweep elements may include drain channels, particularly on the leading edge of the sweep element.
The method according to the present invention provides for electrochemical mechanical processing of a conductive surface of a workpiece using a workpiece surface influencing device as described above and hereinafter.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 schematically depicts an ECMPR system;
FIG. 2 schematically depicts a portion of an ECMPR system using an embodiment of a WSID of the present invention;
FIG. 3 schematically depicts a planar view of an embodiment of a WSID of the present invention;
FIG. 4 schematically depicts a side cross section of an embodiment of a WSID of the present invention;
FIG. 5A schematically shows sweep elements in conjunction with the WSID according to the present invention;
FIGS. 5B–5H schematically shows cross-sectional views of various embodiments of the sweep elements and drain channels according to the present invention;
FIG. 5I schematically shows a perspective view of a sweep element and drain channel according to the present invention;
FIGS. 6A to 6D schematically show a method of making an embodiment of a WSID of the present invention;
FIG. 6E schematically shows an alternative step in method of making a WSID of the present invention; and
FIG. 7 schematically depicts a planar copper layer formed on a surface of a workpiece using the WSID of the present invention.



DETAILED DESCRIPTION
In one embodiment, a workpiece surface influencing device (WSID) of the present invention includes a pattern of raised regions that provides a longer life cycle when compared to a conventional WSID. As used herein, the terms “workpiece surface,” “wafer surface” and the like include, but are not limited to, the surface of the work piece or wafer prior to processing and the surface of any layer formed thereon, including oxidized metals, oxides, spun-on glass, ceramics, etc.
Reference will now be made to the drawings wherein like numerals refer to like parts throughout. FIG. 2 schematically depicts one embodiment of a WSID of the present invention, which WSID is placed in close proximity of a workpiece 11, such as a wafer, having a surface 12 to be plated.
The WSID may include a body 13 having a plurality of raised regions 14 and recessed regions 18 distributed on an upper surface of the WSID body 13. Recessed regions 18 are surface channels extending along the surface 15 of the WSID body 13. A top surface 19 of the raised regions 14 sweeps the wafer surface 12 during the process. The WSID body 13 may be constructed of more than one layer. Preferably, the body 13 is comprised of materials that are non-reactive with the deposited or etched metal layer and the process solution that is used. Thus, the body 13 may be one of a reinforced or pure polymeric material, a metallic material, a ceramic material, a glass material, and mixtures thereof. Useful polymeric materials include polypropylene and polyvinyl chloride (PVC). Metallic materials can include titanium, tantalum, or their platinum coated versions. The WSID body 13 can also be an electrode for example an anode for the above described ECMD processes and a cathode for the above described ECME processes. In such case, parts of the WSID body that may contact the workpiece can be coated with an insulator layer, or the raised regions can be made of insulating materials. Irrespective of whether the body 13 is an electrode or just a support element for the raised regions, the WSID body 13 preferably includes a plurality of openings or channels 17. Channels 17 communicate electrolyte between an electrode (not shown) and the wafer surface 12 on which a metal layer, preferably copper layer, may be deposited (See also FIG. 1). Channels 17 are connected to the recessed regions 18 and may have the same width and length as the recessed regions 18. The plurality of raised regions 14 may be an integral part of or non-separable from the body 13. Thus, the raised regions 14 may comprise the same material as the body 13. Additionally, the plurality of raised regions 14 is preferably disposed in a pattern, and the recessed regions 18 continue among them. While each of the raised regions 14 is illustrated as being of the same size and configuration, the present invention contemplates that the raised regions 14 may be constructed with differing sizes and configurations. In general, the raised regions 14 and in particular the top surface 19 of the raised regions, may serve to sweep the electrolyte across the wafer surface 12 as well as polish the wafer surface 12. As with the raised regions 14, the recessed regions 18 among the raised regions may be constructed with the same or differing sizes and configurations.
FIG. 3 schematically shows a top view of an exemplary embodiment of a WSID 40 with a pattern of raised regions 42 together with recessed regions 44 and channels 46 or holes. While FIG. 3 shows the patterns of raised regions 42 and recessed regions 44 in a regular sequence, the scope of the present invention also includes a pattern of an irregular sequence. In FIG. 3, the raised regions 42 may be in the shape of ribs or blades. The raised regions 42 may also have a triangular cross section (not shown). Between the raised regions 42 may be a plurality of recessed regions 44 connected to the channels 46.
As shown in FIG. 4, in another embodiment, which schematically depicts a side cross sectional view of a portion of a WSID 30. The WSID 30 may include a top surface 29. In this embodiment, an outer layer 31 is formed on and conformally coats and the top surface 29 and hence the raised and recessed regions 14, 18. As will be described below, the outer layer may 31 be made of an insulating material. As seen in FIG. 4, the outer layer 31 may have openings 32 to enable the electrolyte to flow between the channels 17 and the recessed regions 18.
Optionally, and as shown in FIG. 5A, top of the WSID 30 may further include a plurality of surface features 34 or sweep elements integrated and/or separable from the WSID 30. The sweep elements 34 can help sweep the electrolyte from the work piece surface 12 (see FIG. 2). The sweep elements 34 may also be integrated into and/or separable from the raised regions 14. In other words, the plurality of sweep elements 34 may be removable, replaceable, and/or re-buildable as needed. For example, the sweep elements 34 may be placed into or held in place by grooves 35 formed in the WSID body 13 or in the raised regions 14. When the sweep elements 34 are worn, they can be replaced by a new set of sweep elements 34 (such as with a cartridge of sweep elements). Replacement of them can be performed by sliding the sweep elements 34 into the grooves 35. Accordingly, the sweep elements 34 may be made of titanium, titanium oxide, aluminum oxide, polyamides, epoxies, reinforced structural polymers or ceramics or various combinations. The sweep elements may be of various configurations, such as that shown in FIG. 5B, to cooperate with the raised regions 14 in sweeping process solution across and from the wafer surface 12. A useful dimension for the sweep element 34 is between about 0.1 micron to 20 mm.
The sweep elements 34 may also contain channels 34a for draining electrolyte off the surface 12 of the work piece 11 (FIG. 2). Also, the channels 34a can enhance fluid mixing or transfer within the fluid boundary layer regions between the sweep elements 34 and work piece 11 (FIG. 2). Concurrently, the affected electrolyte is prevented from accumulating in front of the sweep elements 34 by draining through the channels 34a. Thus, the channels 34a enhances mass transfer at the work piece interface and help reduce the accumulation of electrolyte in the work piece interface during the sweeping action. The channels 34a in the sweep elements may be of various configurations, such as circular, rectangular, and triangular. Regardless of the shape of the channels 34a, the channels may be spread from one another by around 2 to 5 mm. The drain channels 34a of the sweep elements 34 may be parallel or inclined to the leading edge of the sweep elements 34. The relative position of the channels 34a and their orientation is such that they can maximize the preferential deposition of high quality metal in the various features or cavities (see FIG. 7) in the work piece 11.
In making the WSID 30, FIGS. 6A to 6D schematically depict one preferred method. In FIG. 6A, the WSID body 13 may initially be patterned by one of a photolithographic method and/or a masking method. While the foregoing methods are preferred due to manufacturing ease, conventional machining, laser ablation, or water jet material fabrication methods may also be used. Either of the foregoing preferred methods can employ conventional techniques to produce a patterned mask 22 on the top surface 29 of the WSID body 13. The patterned mask 22 preferably provides a pattern that matches the pattern of raised regions 14 that will eventually be produced on the top surface 29.
Next, as shown in FIG. 6B, exposed portions 29a of the top surface 29 can be etched so as to produce relief structures 23 that may become the eventual recessed regions 18. Thereafter, the patterned mask 22 may be removed by conventional methods; thereby leaving the raised regions 14 and the recessed regions 18 integrated onto the top surface 29, as shown in FIG. 6C.
In FIG. 6D, the outer layer 31 or an insulating layer, which is also shown in FIG. 4, may be formed on the exposed surfaces of the raised and recessed regions using methods such as anodization, sputtering, spin coating, and baking. The insulating layer 31 is a hard material and serves to polish the workpiece surface 12 (see FIG. 2) as it is plated. The layer 31 protects the WSID 30 and provides electrical insulation for it when contact is made with the workpiece surface 12. Accordingly, the insulating layer 31 may be made of Al2O3, SiN, TiO2, or other ceramics, and particulate reinforced chemical resistant polymers and mixtures thereof, and produced by well-known methods such as dipping, spin coating, spraying and sputtering. In a specific example, the insulating layer 31 may be fabricated by anodizing the exposed surfaces of raised and recessed regions 14, 18. For example the WSID maybe made of Ti or Ta and the surface may be anodized to obtain a protective hard layer of Ti-oxide or Ta-oxide. Referring to FIG. 6D, in another specific example, if the WSID body 13 is made of a hard polymeric material such as a polycarbonate or high density polyethylene, the layer 31 can be formed as a hard coating or an abrasive surface. In this case abrasiveness of the layer 31 can be controlled by selecting materials from different friction coefficients. For example, if the coating include alumina it will be hard and abrasive. If it includes diamond like carbon coating, it will be hard but less abrasive because such coatings are more slippery. Best abrasive coating can be selected by selecting the coating without changing the shape of the surface of the WSID.
Following the formation of the insulating layer 31, the channels 17 may be formed by machining the channels through the WSID 30. The channels may be formed by various methods such as drilling, electro etching, wet etching, laser ablation, water jet cutting, etc.
Alternatively, the insulating layer 31 may be formed after the openings 32 are formed, thereby producing an insulating layer 31 not only over the raised and recessed regions 14, 18 but also over the walls of the channels 17, as shown in FIG. 6E. In another embodiment, the initial topography of the WSID structure, including the raised regions 14, the channels 17 and recessed regions 18, may be fabricated by mechanically machining the WSID. Thereafter, the structure's surface can be selectively anodized or spin coated with a suitable insulating, abrasive or electrolyte sweeping elements or devices.
In view of the above, it can be seen that the present invention can provide a way of rebuilding of a plurality of newer raised regions and recessed regions after the raised regions in use are worn. In other words, a second plurality of raised regions and recessed regions are produced by reprocessing the used WSID. Such rebuilding can be accomplished by removing the worn raised regions or surface, such as by wet etch methods, oxygen plasma, or machine resurfacing. Thereafter, new or second raised regions are reformed, such as by anodizing the prepared surface or spin coating on the prepared surface. Although not necessary, a reformed or second mask may correlate to the prior pattern of raised regions and recessed regions. The exposed areas of the second mask may then be insulated or anodized with another insulating or anodized layer. The entire WSID may be then annealed to toughen the WSID 30, and improve its chemical resistance to various electrolytes.
Whichever particular embodiment of the WSID 10, WSID 30 or method of the present invention is employed, FIG. 7 schematically depicts a portion 50 of the workpiece 11, shown in FIG. 2, on which a planar metal layer 28, a copper layer, produced using the ECMPR. The planar metal layer 28 is formed on the workpiece by filling features or cavities such as vias 51 and trenches 52 formed through an insulating layer 33. Conventionally, a barrier layer 26, preferably a Ta or TaN layer and a seed layer 27, preferably a thin copper layer are coated over the insulating layer 33 having the features 51, 52 before the copper plating of the workpiece. The WSID of the present invention may be used to remove, i.e., etch or electro-etch or electro-polish as in the CMP of copper on a wafer or a substrate.
It should be understood, of course, that the foregoing relates to preferred embodiments of the invention and that modifications may be made without departing from the spirit and scope of the invention.

## Claims

1. An electrochemical mechanical processing apparatus for processing comprising:
a workpiece surface influencing device comprising a top surface having a sweeping surface comprising a ceramic material that presents a substantially planar contact area to a conductive surface of the wafer, wherein the substantially planar contact area includes a plurality of contact regions, each of the contact regions including a region top surface that is substantially planar with other region top surfaces;
a plurality of channels formed through the top surface, the channels being configured to communicate electrolyte therethrough to the conductive surface of the wafer while relative movement and physical contact exists between the sweeping surface and the conductive surface, wherein each of the plurality of contact regions is formed over a conducting material, the conducting material having recessed and raised regions, the ceramic material coating the raised and recessed regions to define the contact regions; and
an electrode configured to be in contact with the electrolyte while relative movement and physical contact exists between the sweeping surface and the conductive surface.

2. The apparatus according to claim 1 further including an exposed area of the conducting material adapted to provide an electrical connection to the conducting material and enabling the conducting material to operate as one of a cathode and an anode.

3. The apparatus according to claim 1, wherein the region top surface of each of the plurality of contact regions is rounded, such that a top rounded portion of each of the rounded contact regions together form the substantially planar contact area.

4. The apparatus according to claim 1, wherein the region top surface of each of the plurality of contact regions is triangular such that a top edge portion of each of the triangular contact regions forms the substantially planar contact area.

5. The apparatus according to claim 1, wherein:
a material below the ceramic material of each of the plurality of contact regions is formed over another material disposed below each of the plurality of contact regions, and
the ceramic material over each of the plurality of contact areas is formed by anodization.

6. The apparatus according to claim 5 wherein the material is the same as the another material.

7. The apparatus according to claim 6 wherein the material is a metal and the another material is another metal.

8. The apparatus according to claim 7 wherein the metal is the same as the another metal.

9. An electrochemical mechanical processing apparatus in which an electrolyte becomes disposed onto a conductive surface of a wafer and electrochemical mechanical processing of the conductive surface is performed while relative movement and physical contact exists between a top surface of a workpiece surface influencing device of the apparatus and the conductive surface, the apparatus comprising:
the workpiece surface influencing device comprising a top surface having a sweeping surface comprising a ceramic material that presents a substantially planar contact area to the conductive surface of the wafer, wherein the substantially planar contact area includes a plurality of contact regions, each of the contact regions including a region top surface that is substantially planar with other region top surfaces, wherein each of the plurality of contact regions is formed over a conducting material as a separable sweep element, thereby resulting in a plurality of separable sweep elements;
a plurality of channels formed through the top surface; and
an electrode configured to be in contact with the electrolyte while relative movement and physical contact exists between the sweeping surface and the conductive surface.

10. The apparatus according to claim 9 wherein the region top surface of each of the plurality of separable sweep elements is flat.

11. The apparatus according to claim 9 wherein the region top surface of each of the plurality of separable sweep elements is rounded, such that a top rounded portion of each of the separable sweep elements together form the substantially planar contact area.

12. The apparatus according to claim 9 wherein the region top surface of each of the plurality of separable sweep elements is triangular, such that a top edge portion of each of the separable sweep elements together form the substantially planar contact area.

13. The apparatus according to claim 9, wherein adjacent ones of the plurality of contact areas create therebetween a top part of one of the plurality of channels that is wider than a lower part of the one of the plurality of channels.

14. A top surface of a workpiece surface influencing device for use in an electrochemical mechanical processing apparatus in which an electrolyte becomes disposed onto a conductive surface of a wafer and electrochemical mechanical processing of the conductive surface is performed while relative movement and physical contact exists between the top surface and the conductive surface, the top surface comprising:
a sweeping surface comprising a ceramic material that presents a substantially planar contact area to the conductive surface of the wafer, wherein the substantially planar contact area includes a plurality of contact regions, each of the contact regions including a region top surface that is substantially planar with other region top surfaces, wherein each of the plurality of contact regions is formed over a conducting material as a separable sweep element, thereby resulting in a plurality of separable sweep elements, wherein at least some of the plurality of separable sweep elements further include drain channels; and
a plurality of channels formed through the top surface.

15. The top surface according to claim 14 wherein the drain channels open to a leading edge of at least some of the plurality of separable sweep elements.

16. A top surface of a workpiece surface influencing device for use in an electrochemical mechanical processing apparatus in which an electrolyte becomes disposed onto a conductive surface of a wafer and electrochemical mechanical processing of the conductive surface is performed while relative movement and physical contact exists between the top surface and the conductive surface, the top surface comprising:
a sweeping surface comprising a ceramic material that presents a substantially planar contact area to the conductive surface of the wafer, wherein the substantially planar contact area includes a plurality of contact regions, each of the contact regions including a region top surface that is substantially planar with other region top surfaces, wherein each of the plurality of contact regions is formed over a conducting material as a separable sweep element, thereby resulting in a plurality of separable sweep elements; and
a plurality of channels formed through the top surface, wherein:
a material below the ceramic material of each of the plurality of contact regions is formed over another material disposed below each of the plurality of contact regions, and
the ceramic material over each of the plurality of contact areas is formed by anodization.

17. The top surface according to claim 16, wherein the material is the same as the another material.

18. The top surface according to claim 17, wherein the material is a metal and the other material is another metal.

19. The top surface according to claim 18, wherein the metal is the same as the another metal.