# TOTAL ELECTRONICS INDUSTRY Emission Threshold (Mt CO2 Eq) 1,000 10,000 25,000 100,000 Number of Facilities below 51 102 122 161 Percent of Facilities below 23.6% 47.2% 56.5% 74.5% Total Emissions of Facilities below 22,372 171,262 361,893 1,246,840 Percent of Emissions below 0.4% 2.9% 6.0% 20.8% Number of Facilities above 165 114 94 55 Percent of Facilities above 76.4% 52.8% 43.5% 25.5% Total Emissions of Facilities above 5,962,091 5,813,200 5,622,570 4,737,622 Percent of Emissions above 99.6% 97.1% 94.0% 79.2% Emissions Threshold 25,000 Mt CO2 Eq 

# Sector Semiconductors MEMs LCD PV Emissions Threshold 25,000 Mt CO 2 

# Eq. 25,000 Mt CO 2 

# Eq. 25,000 Mt CO 2 

# Eq. 25,000 Mt CO 2 

# Eq. Total Number of Facilities in Sector 175 12 9 20 Total Emissions of Sector (Mt CO2 Eq.) 5,741,676 146,115 23,632 73,039 Number of Facilities above 91 2 0 1 Percent of Facilities above 52% 16.7% 0.0% 5.0% Emission of Facilities above (Mt CO2 Eq.) 5,492,066 96,164 0 34,340 Percent of Emissions above 95.7% 65.8% 0.0% 47.0% Total number of Electronics Facilities 216 Total Emissions From All Electronics (Mt CO2 Eq) 5,984,463 Total Semiconductor Emissions (Mt CO2 Eq) 5,741,676 Total MEMs Emissions (Mt CO2 Eq) 146,115.41 Total FPD Emissions (Mt CO2 Eq) 23,632 Total PV Emissions (Mt CO2 Eq) 73,039

## Total Number of Semiconductor Facilities 175

Comments: Semiconductor facilities include both full-scale and pilot/R&D facilities. Semiconductor Emission Threshold Summary: Emission Threshold (Mt CO2 Eq) 1,000 10,000 25,000 100,000 Number of Facilities below 41 67 84 120 Percent of Facilities below 23.4% 38.3% 48.0% 68.6% Total Emissions of Facilities below 20,187 98,467 249,610 1,004,054 Percent of Emissions below 0.4% 1.7% 4.3% 17.5% Number of Facilities above 134 108 91 55 Percent of Facilities above 76.6% 61.7% 52.0% 31.4% Total Emissions of Facilities above 5,721,490 5,643,209 5,492,066 4,737,622 Percent of Emissions above 99.6% 98.3% 95.7% 82.5% Total Number of MEMs Facilities 12 Comments: MEMs facilities are obtained from Wo rld Fab Watch 2007 database. However, this database does not appear to contain a complete list of MEMs fabrication facilities in the US. MEMs Emission Threshold Summary: Emission Threshold (Mt CO2 Eq) 1,000 10,000 25,000 100,000 Number of Facilities below 2 8 10 12 Percent of Facilities below 16.7% 66.7% 83.3% 100.0% Total Emissions of Facilities below 801 25,377 49,952 146,115 Percent of Emissions below 0.5% 17.4% 34.2% 100.0% Number of Facilities above 10 4 2 0 Percent of Facilities above 83.3% 33.3% 16.7% 0.0% Total Emissions of Facilities above 145,314 120,739 96,164 0 Percent of Emissions above 99.5% 82.6% 65.8% 0.0%

## Total Number of FPDs Facilities 9 Comments: FPD facilities that are assumed to use PFCs in clude LCOS, a-Si TFT-LCDs, OLEDs (assuming active matrix), HTPS, TFT, Single Crystal AMLCD, LTPS. FPDs Emission Threshold Summary: Emission Threshold (Mt CO2 Eq) 1,000 10,000 25,000 100,000 Number of Facilities below 4 8 9 9 Percent of Facilities below 44.4% 88.9% 100.0% 100.0% Total Emissions of Facilities below 811 8,720 23,632 23,632 Percent of Emissions below 3.4% 36.9% 100.0% 100.0% Number of Facilities above 5 1 0 0 Percent of Facilities above 55.6% 11.1% 0.0% 0.0% Total Emissions of Facilities above 22,821 14,912 0 0 Percent of Emissions above 96.6% 63.1% 0.0% 0.0% Total Number of PV Facilities 20 Comments: F acilities are estimated (see 'PV' tab for assumpti ons) and include only silicon based PV (both crystalline and amorphous). Due to time contraints of analysis, we could only rely on report by Burton, 2006 ( PV Emissions during Photovoltaic (PV) Cell Fabrication: A Scoping R eport). PFC Emissions and PFC using PV plants are likely overestimates (Please see Note 8). PV Emission Threshold Summary: Emission Threshold (Mt CO2 Eq) 1,000 10,000 25,000 100,000 Number of Facilities below 4 19 19 20 Percent of Facilities below 20.0% 95.0% 95.0% 100.0% Total Emissions of Facilities below 572 38,699 38,699 73,039 Percent of Emissions below 0.8% 53.0% 53.0% 100.0% Number of Facilities above 16 1 1 0 Percent of Facilities above 80.0% 5.0% 5.0% 0.0% Total Emissions of Facilities above 72,466 34,340 34,340 0 Percent of Emissions above 99.2% 47.0% 47.0% 0.0%Electronics Tier 1 Default Emission Factors (mean)CF4C2F6CHF3C3F8NF3SF6C6F14Overall Emission Factor (Mt CO2Eq)Source:Semiconductors (kg/m2Si)0.901.000.040.050.040.200.30Semiconductors (Mt CO2 Eq/m2 Si)23.19IPCC, 2007TFT-FPD (g/m2 TFT-FPD)0.500.904.00TFT-FPD (Mt CO2 Eq/m2 TFT-FPD)0.11IPCC, 2007PV-Cells (g/m2 PV-Cell)5.000.20PV-Cells (Mt CO2 Eq/m2 PV-Cell)0.03IPCC, 2007MEMs (kg/m2 Si)1.02MEMs (Mt CO2 Eq/m2 Si)24.41Estimated (see Note 4)Source: IPCC, 2006Semiconductors (Mt CO2 Eq/m2TMLA)3.425PEVM 4.0.0701.0701Comment:The upper bound of the 95% confidence interval in this sectoris not used, as the uncertainties vary between 0 and 200% forsemiconductors and TFT-FPD. Additionally, no uncertainties are availablefor heat transfer fluids, MEMs, and PV.Semiconductor Gas Usage CalculationsCF4C2F6CHF3C3F8NF3SF6Emission Factor (Tier 2a)0.90.60.40.40.110.2Gas Usage (kg/m2 Si)1.01.70.10.10.41.0Percent of Total GasUsage24%39%2%3%9%24%Source: IPCC, 2006

### Large Facilties Facility Est Actual TMLA in MSI (Average for 2006) Est Actual Area of Si (m2) Emissions from etching/cleanin g (MMTCE) Emissions from etching/cleaning (Mt CO2 Eq) Emissions from heat transfer fluids (MMTCE) Emissions from heat transfer fluids (Mt CO2 Eq) Total Emissions (Mt CO2 Eq) Cummulative Emissions (Mt CO2 Eq) Facility 1 325.72 42,024 0.04 139,625.66 0.00 14,776.26 154,401.93 154,402 Facility 2 289.53 37,355 0.03 124,111.70 0.00 13,134.46 137,246.16 291,648 Facility 3 427.51 26,265 0.05 183,258.68 0.01 19,393.85 202,652.53 494,301 Facility 4 309.60 21,888 0.04 132,717.10 0.00 14,045.15 146,762.25 641,063 Facility 5 356.26 21,888 0.04 152,715.57 0.00 16,161.54 168,877.11 809,940 Facility 6 407.15 21,012 0.05 174,532.08 0.01 18,470.33 193,002.41 1,002,942 Facility 7 150.80 19,456 0.07 271,829.33 0.01 28,767.08 300,596.40 1,303,539 Facility 8 144.76 18,677 0.02 62,055.85 0.00 6,567.23 68,623.08 1,372,162 Facility 9 244.29 17,510 0.03 104,719.25 0.00 11,082.20 115,801.45 1,487,963 Facility 10 132.70 17,121 0.02 56,884.53 0.00 6,019.96 62,904.49 1,550,868 Facility 11 123.16 15,890 0.01 52,795.95 0.00 5,587.28 58,383.23 1,609,251 Facility 12 183.37 14,786 0.02 78,604.08 0.00 8,318.49 86,922.57 1,696,174 Facility 13 78.38 14,446 0.04 141,283.29 0.00 14,951.69 156,234.98 1,852,409 Facility 14 171.00 14,008 0.08 308,254.45 0.01 32,621.86 340,876.32 2,193,285 Facility 15 190.00 13,619 0.02 81,448.30 0.00 8,619.49 90,067.79 2,283,353 Facility 16 159.24 12,841 0.02 68,261.44 0.00 7,223.95 75,485.39 2,358,838 Facility 17 92.29 11,907 0.01 39,560.60 0.00 4,186.61 43,747.21 2,402,585 Facility 18 18.16 11,712 0.01 32,728.25 0.00 3,463.56 36,191.81 2,438,777 Facility 19 190.00 11,673 0.02 81,448.30 0.00 8,619.49 90,067.79 2,528,845 Facility 20 81.43 11,673 0.01 34,906.42 0.00 3,694.07 38,600.48 2,567,445 Facility 21 126.67 11,673 0.06 228,336.63 0.01 24,164.34 252,500.98 2,819,946 Facility 22 126.67 11,673 0.01 54,298.87 0.00 5,746.33 60,045.19 2,879,992 Facility 23 108.57 11,673 0.01 46,541.89 0.00 4,925.42 51,467.31 2,931,459 Facility 24 183.67 11,284 0.02 78,733.36 0.00 8,332.17 87,065.53 3,018,524 Facility 25 69.22 11,163 0.01 29,670.45 0.00 3,139.96 32,810.41 3,051,335 Facility 26 128.25 10,506 0.01 54,977.61 0.00 5,818.15 60,795.76 3,112,131 Facility 27 128.25 10,506 0.01 54,977.61 0.00 5,818.15 60,795.76 3,172,926 Facility 28 146.57 10,506 0.02 62,831.55 0.00 6,649.32 69,480.87 3,242,407 Facility 29 94.10 10,117 0.01 40,336.30 0.00 4,268.70 44,605.00 3,287,012 Facility 30 101.34 9,339 0.01 43,439.10 0.00 4,597.06 48,036.16 3,335,048 Facility 31 75.95 8,908 0.01 32,557.51 0.00 3,445.49 36,002.99 3,371,051 Facility 32 142.50 8,755 0.02 61,086.23 0.00 6,464.62 67,550.84 3,438,602 Facility 33 66.35 8,561 0.03 119,604.90 0.00 12,657.51 132,262.42 3,570,865 Facility 34 87.88 8,098 0.01 37,669.84 0.00 3,986.51 41,656.35 3,612,521 Facility 35 108.57 7,782 0.01 46,541.89 0.00 4,925.42 51,467.31 3,663,988 Facility 36 108.57 7,782 0.05 195,717.11 0.01 20,712.29 216,429.41 3,880,418 Facility 37 135.72 7,004 0.02 58,177.36 0.00 6,156.78 64,334.14 3,944,752 Facility 38 97.72 7,004 0.01 41,887.70 0.00 4,432.88 46,320.58 3,991,072 Facility 39 80.75 6,615 0.04 145,564.60 0.00 15,404.77 160,969.37 4,152,042 Facility 40 9.42 6,080 0.00 16,989.33 0.00 1,797.94 18,787.28 4,170,829 Facility 41 45.49 6,019 0.02 81,994.77 0.00 8,677.32 90,672.09 4,261,501 Facility 42 81.43 5,837 0.01 34,906.42 0.00 3,694.07 38,600.48 4,300,102 Facility 43 95.00 5,837 0.01 40,724.15 0.00 4,309.74 45,033.90 4,345,135 Facility 44 48.52 5,691 0.01 20,798.41 0.00 2,201.05 22,999.45 4,368,135 Facility 45 60.80 5,603 0.03 109,601.58 0.00 11,598.88 121,200.47 4,489,335 Facility 46 47.52 5,574 0.01 20,371.24 0.00 2,155.84 22,527.08 4,511,862 Facility 47 8.48 5,472 0.00 15,290.40 0.00 1,618.15 16,908.55 4,528,771 Facility 48 8.48 5,472 0.00 3,636.08 0.00 384.80 4,020.88 4,532,792 Facility 49 8.31 5,362 0.00 14,984.59 0.00 1,585.79 16,570.38 4,549,362 Facility 50 48.86 5,253 0.02 88,072.70 0.00 9,320.53 97,393.23 4,646,756 Facility 51 6.79 4,378 0.00 12,232.32 0.00 1,294.52 13,526.84 4,660,282 Facility 52 20.36 4,378 0.00 8,726.60 0.00 923.52 9,650.12 4,669,932 Facility 53 27.02 4,358 0.00 11,583.76 0.00 1,225.88 12,809.64 4,682,742 Facility 54 33.59 4,334 0.00 14,398.90 0.00 1,523.80 15,922.70 4,698,665 Facility 55 19.54 4,202 0.01 35,229.08 0.00 3,728.21 38,957.29 4,737,622 Facility 56 64.53 3,918 0.01 27,661.52 0.00 2,927.36 30,588.87 4,768,211 Facility 57 24.13 3,891 0.01 43,492.69 0.00 4,602.73 48,095.42 4,816,306 Facility 58 31.67 3,891 0.02 57,084.16 0.00 6,041.09 63,125.24 4,879,432 Facility 59 31.10 3,648 0.02 56,064.80 0.00 5,933.21 61,998.01 4,941,430 Facility 60 21.71 3,502 0.00 9,308.38 0.00 985.08 10,293.46 4,951,723 Facility 61 20.36 3,283 0.01 36,696.96 0.00 3,883.56 40,580.51 4,992,304 Facility 62 20.36 3,283 0.00 8,726.60 0.00 923.52 9,650.12 5,001,954 Facility 63 23.16 3,064 0.01 41,742.79 0.00 4,417.54 46,160.33 5,048,114 Facility 64 26.46 2,845 0.01 47,706.05 0.00 5,048.62 52,754.67 5,100,869 Facility 65 4.22 2,724 0.00 1,809.96 0.00 191.54 2,001.51 5,102,870 Facility 66 12.21 2,627 0.01 22,018.18 0.00 2,330.13 24,348.31 5,127,219 Facility 67 22.08 2,374 0.01 39,795.81 0.00 4,211.50 44,007.31 5,171,226 Facility 68 3.62 2,335 0.00 6,523.90 0.00 690.41 7,214.31 5,178,440 Facility 69 3.53 2,280 0.00 6,371.00 0.00 674.23 7,045.23 5,185,485 Facility 70 30.96 2,189 0.02 55,809.96 0.00 5,906.24 61,716.20 5,247,202F ac ili ty E s t Ac tu a l T M L A i n M S I ( A v e r a g e fo r 2006) E s t Ac tu a l

A r ea of S i ( m 2) E m i ss i on s f r o m

e t c h i ng/c l ea n i ng ( MM T C E) E m i ss i on s f r o m

e t c h i ng/c l ea n i ng ( M tC O 2 E q) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( MM T C E) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( M tC O 2 E q) Tot a l

E m i ss i on s ( M t C O 2 E q) C u mm u l a t i v e

E m i ss i on s ( M tC O 2 E q) 

### L a rg e F ac il t i es F a cili t y 71 20 . 36 2 , 189 0 . 00 8 , 726 . 60 0 . 00 923 . 52 9 , 650 . 12 5 , 256 , 852 F a cili t y 72 3 . 39 2 , 189 0 . 00 6 , 116 . 16 0 . 00 647 . 26 6 , 763 . 42 5 , 263 , 615 F a cili t y 73 3 . 39 2 , 189 0 . 00 1 , 454 . 43 0 . 00 153 . 92 1 , 608 . 35 5 , 265 , 224 F a cili t y 74 18 . 66 2 , 189 0 . 01 33 , 638 . 88 0 . 00 3 , 559 . 93 37 , 198 . 80 5 , 302 , 422 F a cili t y 75 9 . 05 1 , 946 0 . 00 16 , 309 . 76 0 . 00 1 , 726 . 02 18 , 035 . 78 5 , 320 , 458 F a cili t y 76 9 . 05 1 , 946 0 . 00 16 , 309 . 76 0 . 00 1 , 726 . 02 18 , 035 . 78 5 , 338 , 494 F a cili t y 77 3 . 02 1 , 946 0 . 00 5 , 436 . 59 0 . 00 575 . 34 6 , 011 . 93 5 , 344 , 506 F a cili t y 78 7 . 96 1 , 868 0 . 00 14 , 352 . 59 0 . 00 1 , 518 . 90 15 , 871 . 49 5 , 360 , 377 F a cili t y 79 15 . 86 1 , 860 0 . 00 6 , 799 . 48 0 . 00 719 . 57 7 , 519 . 05 5 , 367 , 896 F a cili t y 80 8 . 14 1 , 751 0 . 00 14 , 678 . 78 0 . 00 1 , 553 . 42 16 , 232 . 21 5 , 384 , 129 F a cili t y 81 14 . 93 1 , 751 0 . 01 26 , 911 . 10 0 . 00 2 , 847 . 94 29 , 759 . 04 5 , 413 , 888 F a cili t y 82 2 . 71 1 , 751 0 . 00 4 , 892 . 93 0 . 00 517 . 81 5 , 410 . 74 5 , 419 , 298 F a cili t y 83 2 . 52 1 , 626 0 . 00 4 , 544 . 65 0 . 00 480 . 95 5 , 025 . 60 5 , 424 , 324 F a cili t y 84 2 . 41 1 , 557 0 . 00 4 , 351 . 42 0 . 00 460 . 50 4 , 811 . 92 5 , 429 , 136 F a cili t y 85 12 . 67 1 , 556 0 . 01 22 , 833 . 66 0 . 00 2 , 416 . 43 25 , 250 . 10 5 , 454 , 386 F a cili t y 86 2 . 12 1 , 368 0 . 00 3 , 822 . 60 0 . 00 404 . 54 4 , 227 . 14 5 , 458 , 613 F a cili t y 87 10 . 26 1 , 204 0 . 01 18 , 501 . 38 0 . 00 1 , 957 . 96 20 , 459 . 34 5 , 479 , 072 F a cili t y 88 5 . 43 1 , 167 0 . 00 2 , 327 . 09 0 . 00 246 . 27 2 , 573 . 37 5 , 481 , 646 F a cili t y 89 1 . 81 1 , 167 0 . 00 3 , 261 . 95 0 . 00 345 . 20 3 , 607 . 16 5 , 485 , 253 F a cili t y 90 7 . 24 1 , 167 0 . 00 3 , 102 . 79 0 . 00 328 . 36 3 , 431 . 15 5 , 488 , 684 F a cili t y 91 1 . 70 1 , 094 0 . 00 3 , 058 . 08 0 . 00 323 . 63 3 , 381 . 71 5 , 492 , 066 F a cili t y 92 1 . 62 1 , 046 0 . 00 2 , 922 . 17 0 . 00 309 . 25 3 , 231 . 41 5 , 495 , 297 F a cili t y 93 1 . 51 973 0 . 00 2 , 718 . 29 0 . 00 287 . 67 3 , 005 . 96 5 , 498 , 303 F a cili t y 94 4 . 15 973 0 . 00 7 , 475 . 31 0 . 00 791 . 09 8 , 266 . 40 5 , 506 , 570 F a cili t y 95 1 . 49 963 0 . 00 639 . 95 0 . 00 67 . 72 707 . 68 5 , 507 , 277 F a cili t y 96 1 . 36 876 0 . 00 2 , 446 . 46 0 . 00 258 . 90 2 , 705 . 37 5 , 509 , 983 F a cili t y 97 3 . 57 837 0 . 00 6 , 428 . 76 0 . 00 680 . 34 7 , 109 . 10 5 , 517 , 092 F a cili t y 98 5 . 04 788 0 . 00 9 , 082 . 50 0 . 00 961 . 18 10 , 043 . 68 5 , 527 , 135 F a cili t y 99 3 . 62 778 0 . 00 6 , 523 . 90 0 . 00 690 . 41 7 , 214 . 31 5 , 534 , 350 F a cili t y 100 8 . 31 766 0 . 00 14 , 984 . 59 0 . 00 1 , 585 . 79 16 , 570 . 38 5 , 550 , 920 F a cili t y 101 1 . 13 730 0 . 00 2 , 038 . 72 0 . 00 215 . 75 2 , 254 . 47 5 , 553 , 175 F a cili t y 102 2 . 90 623 0 . 00 5 , 219 . 12 0 . 00 552 . 33 5 , 771 . 45 5 , 558 , 946 F a cili t y 103 4 . 59 608 0 . 00 8 , 282 . 30 0 . 00 876 . 50 9 , 158 . 80 5 , 568 , 105 F a cili t y 104 0 . 85 547 0 . 00 1 , 529 . 04 0 . 00 161 . 81 1 , 690 . 85 5 , 569 , 796 F a cili t y 105 0 . 75 486 0 . 00 1 , 359 . 15 0 . 00 143 . 84 1 , 502 . 98 5 , 571 , 299 F a cili t y 106 0 . 75 486 0 . 00 1 , 359 . 15 0 . 00 143 . 84 1 , 502 . 98 5 , 572 , 802 F a cili t y 107 0 . 71 460 0 . 00 1 , 284 . 39 0 . 00 135 . 92 1 , 420 . 32 5 , 574 , 222 F a cili t y 108 34 . 61 420 0 . 02 62 , 384 . 83 0 . 00 6 , 602 . 04 68 , 986 . 87 5 , 643 , 209 F a cili t y 109 3 . 62 389 0 . 00 6 , 523 . 90 0 . 00 690 . 41 7 , 214 . 31 5 , 650 , 423 F a cili t y 110 35 . 29 350 0 . 00 15 , 126 . 11 0 . 00 1 , 600 . 76 16 , 726 . 88 5 , 667 , 150 F a cili t y 111 2 . 99 350 0 . 00 5 , 382 . 22 0 . 00 569 . 59 5 , 951 . 81 5 , 673 , 102 F a cili t y 112 0 . 50 323 0 . 00 902 . 47 0 . 00 95 . 51 997 . 98 5 , 674 , 100 F a cili t y 113 0 . 34 219 0 . 00 611 . 62 0 . 00 64 . 73 676 . 34 5 , 674 , 776 F a cili t y 114 0 . 34 219 0 . 00 611 . 62 0 . 00 64 . 73 676 . 34 5 , 675 , 453 F a cili t y 115 1 . 58 195 0 . 00 2 , 854 . 21 0 . 00 302 . 05 3 , 156 . 26 5 , 678 , 609 F a cili t y 116 0 . 90 195 0 . 00 1 , 630 . 98 0 . 00 172 . 60 1 , 803 . 58 5 , 680 , 412 F a cili t y 117 1 . 36 175 0 . 00 2 , 446 . 46 0 . 00 258 . 90 2 , 705 . 37 5 , 683 , 118 F a cili t y 118 0 . 24 153 0 . 00 428 . 13 0 . 00 45 . 31 473 . 44 5 , 683 , 591 F a cili t y 119 0 . 23 146 0 . 00 407 . 74 0 . 00 43 . 15 450 . 89 5 , 684 , 042 F a cili t y 120 0 . 19 125 0 . 00 350 . 66 0 . 00 37 . 11 387 . 77 5 , 684 , 430 F a cili t y 121 0 . 17 109 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 5 , 684 , 768 F a cili t y 122 0 . 17 109 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 5 , 685 , 106 F a cili t y 123 9 . 10 90 0 . 00 3 , 902 . 54 0 . 00 413 . 00 4 , 315 . 53 5 , 689 , 422 F a cili t y 124 7 . 31 89 0 . 00 3 , 131 . 88 0 . 00 331 . 44 3 , 463 . 32 5 , 692 , 885 F a cili t y 125 0 . 14 88 0 . 00 244 . 65 0 . 00 25 . 89 270 . 54 5 , 693 , 156 F a cili t y 126 0 . 12 78 0 . 00 217 . 46 0 . 00 23 . 01 240 . 48 5 , 693 , 396 F a cili t y 127 7 . 54 78 0 . 00 3 , 232 . 08 0 . 00 342 . 04 3 , 574 . 12 5 , 696 , 970 F a cili t y 128 6 . 35 63 0 . 00 2 , 722 . 70 0 . 00 288 . 14 3 , 010 . 84 5 , 699 , 981 F a cili t y 129 5 . 13 62 0 . 00 9 , 242 . 20 0 . 00 978 . 08 10 , 220 . 28 5 , 710 , 201 F a cili t y 130 0 . 39 50 0 . 00 695 . 88 0 . 00 73 . 64 769 . 53 5 , 710 , 971 F a cili t y 131 0 . 08 49 0 . 00 135 . 91 0 . 00 14 . 38 150 . 30 5 , 711 , 121 F a cili t y 132 0 . 07 46 0 . 00 127 . 37 0 . 00 13 . 48 140 . 85 5 , 711 , 262 F a cili t y 133 2 . 48 34 0 . 00 4 , 478 . 26 0 . 00 473 . 92 4 , 952 . 18 5 , 716 , 214 F a cili t y 134 0 . 97 31 0 . 00 1 , 739 . 71 0 . 00 184 . 11 1 , 923 . 82 5 , 718 , 138 F a cili t y 135 0 . 72 31 0 . 00 1 , 304 . 78 0 . 00 138 . 08 1 , 442 . 86 5 , 719 , 581 F a cili t y 136 0 . 92 26 0 . 00 1 , 651 . 36 0 . 00 174 . 76 1 , 826 . 12 5 , 721 , 407 F a cili t y 137 2 . 65 26 0 . 00 4 , 770 . 60 0 . 00 504 . 86 5 , 275 . 47 5 , 726 , 682 F a cili t y 138 0 . 03 22 0 . 00 61 . 16 0 . 00 6 . 47 67 . 63 5 , 726 , 750 F a cili t y 139 1 . 43 18 0 . 00 2 , 568 . 79 0 . 00 271 . 85 2 , 840 . 64 5 , 729 , 591 F a cili t y 140 1 . 76 18 0 . 00 756 . 31 0 . 00 80 . 04 836 . 34 5 , 730 , 427 F a cili t y 141 0 . 36 16 0 . 00 652 . 39 0 . 00 69 . 04 721 . 43 5 , 731 , 148 F a cili t y 142 0 . 33 14 0 . 00 587 . 15 0 . 00 62 . 14 649 . 29 5 , 731 , 798F ac ili ty E s t Ac tu a l T M L A i n M S I ( A v e r a g e fo r 2006) E s t Ac tu a l

A r ea of S i ( m 2) E m i ss i on s f r o m

e t c h i ng/c l ea n i ng ( MM T C E) E m i ss i on s f r o m

e t c h i ng/c l ea n i ng ( M tC O 2 E q) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( MM T C E) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( M tC O 2 E q) Tot a l

E m i ss i on s ( M t C O 2 E q) C u mm u l a t i v e

E m i ss i on s ( M tC O 2 E q) 

### L a rg e F ac il t i es F a cili t y 143 0 . 29 12 0 . 00 521 . 91 0 . 00 55 . 23 577 . 15 5 , 732 , 375 F a cili t y 144 0 . 02 11 0 . 00 30 . 58 0 . 00 3 . 24 33 . 82 5 , 732 , 409 F a cili t y 145 0 . 06 8 0 . 00 116 . 89 0 . 00 12 . 37 129 . 26 5 , 732 , 538 F a cili t y 146 0 . 42 8 0 . 00 761 . 12 0 . 00 80 . 55 841 . 67 5 , 733 , 380 F a cili t y 147 0 . 78 8 0 . 00 336 . 14 0 . 00 35 . 57 371 . 71 5 , 733 , 751 F a cili t y 148 0 . 78 8 0 . 00 1 , 413 . 51 0 . 00 149 . 59 1 , 563 . 10 5 , 735 , 314 F a cili t y 149 0 . 71 7 0 . 00 1 , 272 . 16 0 . 00 134 . 63 1 , 406 . 79 5 , 736 , 721 F a cili t y 150 0 . 14 6 0 . 00 260 . 96 0 . 00 27 . 62 288 . 57 5 , 737 , 010 F a cili t y 151 0 . 14 6 0 . 00 260 . 96 0 . 00 27 . 62 288 . 57 5 , 737 , 298 F a cili t y 152 0 . 13 5 0 . 00 228 . 34 0 . 00 24 . 16 252 . 50 5 , 737 , 551 F a cili t y 153 0 . 15 5 0 . 00 271 . 83 0 . 00 28 . 77 300 . 60 5 , 737 , 851 F a cili t y 154 0 . 11 5 0 . 00 195 . 72 0 . 00 20 . 71 216 . 43 5 , 738 , 068 F a cili t y 155 0 . 10 4 0 . 00 183 . 48 0 . 00 19 . 42 202 . 90 5 , 738 , 271 F a cili t y 156 0 . 19 4 0 . 00 342 . 50 0 . 00 36 . 25 378 . 75 5 , 738 , 650 F a cili t y 157 0 . 35 4 0 . 00 636 . 08 0 . 00 67 . 31 703 . 40 5 , 739 , 353 F a cili t y 158 0 . 10 3 0 . 00 173 . 97 0 . 00 18 . 41 192 . 38 5 , 739 , 545 F a cili t y 159 0 . 02 3 0 . 00 43 . 49 0 . 00 4 . 60 48 . 10 5 , 739 , 593 F a cili t y 160 0 . 09 3 0 . 00 165 . 14 0 . 00 17 . 48 182 . 61 5 , 739 , 776 F a cili t y 161 0 . 08 2 0 . 00 139 . 18 0 . 00 14 . 73 153 . 91 5 , 739 , 930 F a cili t y 162 0 . 16 2 0 . 00 285 . 42 0 . 00 30 . 21 315 . 63 5 , 740 , 246 F a cili t y 163 0 . 07 2 0 . 00 134 . 56 0 . 00 14 . 24 148 . 80 5 , 740 , 394 F a cili t y 164 0 . 17 2 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 5 , 740 , 733 F a cili t y 165 0 . 17 2 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 5 , 741 , 071 F a cili t y 166 0 . 01 2 0 . 00 21 . 75 0 . 00 2 . 30 24 . 05 5 , 741 , 095 F a cili t y 167 0 . 07 2 0 . 00 119 . 60 0 . 00 12 . 66 132 . 26 5 , 741 , 227 F a cili t y 168 0 . 14 1 0 . 00 247 . 70 0 . 00 26 . 21 273 . 92 5 , 741 , 501 F a cili t y 169 0 . 02 1 0 . 00 42 . 81 0 . 00 4 . 53 47 . 34 5 , 741 , 548 F a cili t y 170 0 . 00 0 0 . 00 6 . 80 0 . 00 0 . 72 7 . 51 5 , 741 , 556 F a cili t y 171 0 . 02 0 0 . 00 38 . 06 0 . 00 4 . 03 42 . 08 5 , 741 , 598 F a cili t y 172 0 . 01 0 0 . 00 16 . 31 0 . 00 1 . 73 18 . 04 5 , 741 , 616 F a cili t y 173 0 . 01 0 0 . 00 26 . 91 0 . 00 2 . 85 29 . 76 5 , 741 , 646 F a cili t y 174 0 . 01 0 0 . 00 16 . 82 0 . 00 1 . 78 18 . 60 5 , 741 , 664 F a cili t y 175 0 . 01 0 0 . 00 10 . 87 0 . 00 1 . 15 12 . 02 5 , 741 , 676 7 , 443 736 , 358 1 . 42 5 , 192 , 198 0 . 15 549 , 478 5 , 741 , 676 833 , 788 , 442F ac ili ty F a cili t y 1 F a cili t y 2 F a cili t y 3 F a cili t y 4 F a cili t y 5 F a cili t y 6 F a cili t y 7 F a cili t y 8 F a cili t y 9 F a cili t y 10 F a cili t y 11 F a cili t y 12 F a cili t y 13 F a cili t y 14 F a cili t y 15 F a cili t y 16 F a cili t y 17 F a cili t y 18 F a cili t y 19 F a cili t y 20 F a cili t y 21 F a cili t y 22 F a cili t y 23 F a cili t y 24 F a cili t y 25 F a cili t y 26 F a cili t y 27 F a cili t y 28 F a cili t y 29 F a cili t y 30 F a cili t y 31 F a cili t y 32 F a cili t y 33 F a cili t y 34 F a cili t y 35 F a cili t y 36 F a cili t y 37 F a cili t y 38 F a cili t y 39 F a cili t y 40 F a cili t y 41 F a cili t y 42 F a cili t y 43 F a cili t y 44 F a cili t y 45 F a cili t y 46 F a cili t y 47 F a cili t y 48 F a cili t y 49 F a cili t y 50 F a cili t y 51 F a cili t y 52 F a cili t y 53 F a cili t y 54 F a cili t y 55 F a cili t y 56 F a cili t y 57 F a cili t y 58 F a cili t y 59 F a cili t y 60 F a cili t y 61 F a cili t y 62 F a cili t y 63 F a cili t y 64 F a cili t y 65 F a cili t y 66 F a cili t y 67 F a cili t y 68 F a cili t y 69 F a cili t y 70 E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( MM T C E) E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( M t C O 2 E q) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( MM T C E) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( M t C O 2 E q) Tot a l

E m i ss i on s ( M tC O 2 E q) 0 . 01 39 , 795 . 81 0 . 00 4 , 211 . 50 44 , 007 . 31 0 . 02 56 , 064 . 80 0 . 00 5 , 933 . 21 61 , 998 . 01 0 . 01 36 , 696 . 96 0 . 00 3 , 883 . 56 40 , 580 . 51 0 . 00 14 , 984 . 59 0 . 00 1 , 585 . 79 16 , 570 . 38 0 . 00 1 , 529 . 04 0 . 00 161 . 81 1 , 690 . 85 0 . 04 141 , 283 . 29 0 . 00 14 , 951 . 69 156 , 234 . 98 0 . 00 5 , 382 . 22 0 . 00 569 . 59 5 , 951 . 81 0 . 02 55 , 809 . 96 0 . 00 5 , 906 . 24 61 , 716 . 20 0 . 00 61 . 16 0 . 00 6 . 47 67 . 63 0 . 00 8 , 282 . 30 0 . 00 876 . 50 9 , 158 . 80 0 . 00 4 , 544 . 65 0 . 00 480 . 95 5 , 025 . 60 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 0 . 03 119 , 604 . 90 0 . 00 12 , 657 . 51 132 , 262 . 42 0 . 01 47 , 706 . 05 0 . 00 5 , 048 . 62 52 , 754 . 67 0 . 00 6 , 523 . 90 0 . 00 690 . 41 7 , 214 . 31 0 . 01 32 , 728 . 25 0 . 00 3 , 463 . 56 36 , 191 . 81 0 . 00 2 , 922 . 17 0 . 00 309 . 25 3 , 231 . 41 0 . 00 135 . 91 0 . 00 14 . 38 150 . 30 0 . 00 15 , 290 . 40 0 . 00 1 , 618 . 15 16 , 908 . 55 0 . 00 244 . 65 0 . 00 25 . 89 270 . 54 0 . 01 20 , 798 . 41 0 . 00 2 , 201 . 05 22 , 999 . 45 0 . 00 8 , 726 . 60 0 . 00 923 . 52 9 , 650 . 12 0 . 01 43 , 439 . 10 0 . 00 4 , 597 . 06 48 , 036 . 16 0 . 02 78 , 604 . 08 0 . 00 8 , 318 . 49 86 , 922 . 57 0 . 02 78 , 733 . 36 0 . 00 8 , 332 . 17 87 , 065 . 53 0 . 00 639 . 95 0 . 00 67 . 72 707 . 68 0 . 00 9 , 308 . 38 0 . 00 985 . 08 10 , 293 . 46 0 . 00 8 , 726 . 60 0 . 00 923 . 52 9 , 650 . 12 0 . 00 902 . 47 0 . 00 95 . 51 997 . 98 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 0 . 00 611 . 62 0 . 00 64 . 73 676 . 34 0 . 00 217 . 46 0 . 00 23 . 01 240 . 48 0 . 02 62 , 055 . 85 0 . 00 6 , 567 . 23 68 , 623 . 08 0 . 04 132 , 717 . 10 0 . 00 14 , 045 . 15 146 , 762 . 25 0 . 01 27 , 661 . 52 0 . 00 2 , 927 . 36 30 , 588 . 87 0 . 01 54 , 977 . 61 0 . 00 5 , 818 . 15 60 , 795 . 76 0 . 01 54 , 977 . 61 0 . 00 5 , 818 . 15 60 , 795 . 76 0 . 01 43 , 492 . 69 0 . 00 4 , 602 . 73 48 , 095 . 42 0 . 00 14 , 398 . 90 0 . 00 1 , 523 . 80 15 , 922 . 70 0 . 00 6 , 116 . 16 0 . 00 647 . 26 6 , 763 . 42 0 . 05 174 , 532 . 08 0 . 01 18 , 470 . 33 193 , 002 . 41 0 . 02 61 , 086 . 23 0 . 00 6 , 464 . 62 67 , 550 . 84 0 . 02 58 , 177 . 36 0 . 00 6 , 156 . 78 64 , 334 . 14 0 . 04 152 , 715 . 57 0 . 00 16 , 161 . 54 168 , 877 . 11 0 . 01 34 , 906 . 42 0 . 00 3 , 694 . 07 38 , 600 . 48 0 . 01 40 , 724 . 15 0 . 00 4 , 309 . 74 45 , 033 . 90 0 . 00 11 , 583 . 76 0 . 00 1 , 225 . 88 12 , 809 . 64 0 . 02 81 , 448 . 30 0 . 00 8 , 619 . 49 90 , 067 . 79 0 . 02 62 , 831 . 55 0 . 00 6 , 649 . 32 69 , 480 . 87 0 . 01 46 , 541 . 89 0 . 00 4 , 925 . 42 51 , 467 . 31 0 . 01 34 , 906 . 42 0 . 00 3 , 694 . 07 38 , 600 . 48 0 . 02 81 , 448 . 30 0 . 00 8 , 619 . 49 90 , 067 . 79 0 . 00 12 , 232 . 32 0 . 00 1 , 294 . 52 13 , 526 . 84 0 . 00 6 , 371 . 00 0 . 00 674 . 23 7 , 045 . 23 0 . 00 16 , 989 . 33 0 . 00 1 , 797 . 94 18 , 787 . 28 0 . 00 6 , 799 . 48 0 . 00 719 . 57 7 , 519 . 05 0 . 00 2 , 327 . 09 0 . 00 246 . 27 2 , 573 . 37 0 . 00 428 . 13 0 . 00 45 . 31 473 . 44 0 . 04 145 , 564 . 60 0 . 00 15 , 404 . 77 160 , 969 . 37 0 . 00 611 . 62 0 . 00 64 . 73 676 . 34 0 . 00 3 , 058 . 08 0 . 00 323 . 63 3 , 381 . 71 0 . 00 1 , 454 . 43 0 . 00 153 . 92 1 , 608 . 35 0 . 00 6 , 523 . 90 0 . 00 690 . 41 7 , 214 . 31 0 . 00 14 , 678 . 78 0 . 00 1 , 553 . 42 16 , 232 . 21 0 . 01 26 , 911 . 10 0 . 00 2 , 847 . 94 29 , 759 . 04 0 . 00 16 , 309 . 76 0 . 00 1 , 726 . 02 18 , 035 . 78 0 . 02 57 , 084 . 16 0 . 00 6 , 041 . 09 63 , 125 . 24 0 . 05 195 , 717 . 11 0 . 01 20 , 712 . 29 216 , 429 . 41 0 . 00 16 , 309 . 76 0 . 00 1 , 726 . 02 18 , 035 . 78 0 . 00 9 , 082 . 50 0 . 00 961 . 18 10 , 043 . 68F ac ili ty F a cili t y 71 F a cili t y 72 F a cili t y 73 F a cili t y 74 F a cili t y 75 F a cili t y 76 F a cili t y 77 F a cili t y 78 F a cili t y 79 F a cili t y 80 F a cili t y 81 F a cili t y 82 F a cili t y 83 F a cili t y 84 F a cili t y 85 F a cili t y 86 F a cili t y 87 F a cili t y 88 F a cili t y 89 F a cili t y 90 F a cili t y 91 F a cili t y 92 F a cili t y 93 F a cili t y 94 F a cili t y 95 F a cili t y 96 F a cili t y 97 F a cili t y 98 F a cili t y 99 F a cili t y 100 F a cili t y 101 F a cili t y 102 F a cili t y 103 F a cili t y 104 F a cili t y 105 F a cili t y 106 F a cili t y 107 F a cili t y 108 F a cili t y 109 F a cili t y 110 F a cili t y 111 F a cili t y 112 F a cili t y 113 F a cili t y 114 F a cili t y 115 F a cili t y 116 F a cili t y 117 F a cili t y 118 F a cili t y 119 F a cili t y 120 F a cili t y 121 F a cili t y 122 F a cili t y 123 F a cili t y 124 F a cili t y 125 F a cili t y 126 F a cili t y 127 F a cili t y 128 F a cili t y 129 F a cili t y 130 F a cili t y 131 F a cili t y 132 F a cili t y 133 F a cili t y 134 F a cili t y 135 F a cili t y 136 F a cili t y 137 F a cili t y 138 F a cili t y 139 F a cili t y 140 F a cili t y 141 F a cili t y 142 E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( MM T C E) E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( M t C O 2 E q) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( MM T C E) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( M t C O 2 E q) Tot a l

E m i ss i on s ( M tC O 2 E q) 0 . 00 1 , 284 . 39 0 . 00 135 . 92 1 , 420 . 32 0 . 02 88 , 072 . 70 0 . 00 9 , 320 . 53 97 , 393 . 23 0 . 03 109 , 601 . 58 0 . 00 11 , 598 . 88 121 , 200 . 47 0 . 06 228 , 336 . 63 0 . 01 24 , 164 . 34 252 , 500 . 98 0 . 04 139 , 625 . 66 0 . 00 14 , 776 . 26 154 , 401 . 93 0 . 03 124 , 111 . 70 0 . 00 13 , 134 . 46 137 , 246 . 16 0 . 00 1 , 809 . 96 0 . 00 191 . 54 2 , 001 . 51 0 . 00 1 , 359 . 15 0 . 00 143 . 84 1 , 502 . 98 0 . 00 4 , 351 . 42 0 . 00 460 . 50 4 , 811 . 92 0 . 00 350 . 66 0 . 00 37 . 11 387 . 77 0 . 00 127 . 37 0 . 00 13 . 48 140 . 85 0 . 00 30 . 58 0 . 00 3 . 24 33 . 82 0 . 01 33 , 638 . 88 0 . 00 3 , 559 . 93 37 , 198 . 80 0 . 02 68 , 261 . 44 0 . 00 7 , 223 . 95 75 , 485 . 39 0 . 01 32 , 557 . 51 0 . 00 3 , 445 . 49 36 , 002 . 99 0 . 01 37 , 669 . 84 0 . 00 3 , 986 . 51 41 , 656 . 35 0 . 01 54 , 298 . 87 0 . 00 5 , 746 . 33 60 , 045 . 19 0 . 01 41 , 887 . 70 0 . 00 4 , 432 . 88 46 , 320 . 58 0 . 00 3 , 636 . 08 0 . 00 384 . 80 4 , 020 . 88 0 . 00 2 , 446 . 46 0 . 00 258 . 90 2 , 705 . 37 0 . 01 22 , 833 . 66 0 . 00 2 , 416 . 43 25 , 250 . 10 0 . 01 41 , 742 . 79 0 . 00 4 , 417 . 54 46 , 160 . 33 0 . 00 2 , 718 . 29 0 . 00 287 . 67 3 , 005 . 96 0 . 00 6 , 428 . 76 0 . 00 680 . 34 7 , 109 . 10 0 . 01 52 , 795 . 95 0 . 00 5 , 587 . 28 58 , 383 . 23 0 . 02 56 , 884 . 53 0 . 00 6 , 019 . 96 62 , 904 . 49 0 . 07 271 , 829 . 33 0 . 01 28 , 767 . 08 300 , 596 . 40 0 . 00 2 , 854 . 21 0 . 00 302 . 05 3 , 156 . 26 0 . 00 3 , 261 . 95 0 . 00 345 . 20 3 , 607 . 16 0 . 00 1 , 359 . 15 0 . 00 143 . 84 1 , 502 . 98 0 . 00 407 . 74 0 . 00 43 . 15 450 . 89 0 . 00 4 , 892 . 93 0 . 00 517 . 81 5 , 410 . 74 0 . 01 39 , 560 . 60 0 . 00 4 , 186 . 61 43 , 747 . 21 0 . 01 22 , 018 . 18 0 . 00 2 , 330 . 13 24 , 348 . 31 0 . 00 14 , 352 . 59 0 . 00 1 , 518 . 90 15 , 871 . 49 0 . 01 40 , 336 . 30 0 . 00 4 , 268 . 70 44 , 605 . 00 0 . 00 8 , 726 . 60 0 . 00 923 . 52 9 , 650 . 12 0 . 01 18 , 501 . 38 0 . 00 1 , 957 . 96 20 , 459 . 34 0 . 00 3 , 822 . 60 0 . 00 404 . 54 4 , 227 . 14 0 . 05 183 , 258 . 68 0 . 01 19 , 393 . 85 202 , 652 . 53 0 . 01 46 , 541 . 89 0 . 00 4 , 925 . 42 51 , 467 . 31 0 . 03 104 , 719 . 25 0 . 00 11 , 082 . 20 115 , 801 . 45 0 . 01 29 , 670 . 45 0 . 00 3 , 139 . 96 32 , 810 . 41 0 . 01 20 , 371 . 24 0 . 00 2 , 155 . 84 22 , 527 . 08 0 . 00 3 , 102 . 79 0 . 00 328 . 36 3 , 431 . 15 0 . 00 1 , 630 . 98 0 . 00 172 . 60 1 , 803 . 58 0 . 00 5 , 436 . 59 0 . 00 575 . 34 6 , 011 . 93 0 . 00 5 , 219 . 12 0 . 00 552 . 33 5 , 771 . 45 0 . 00 7 , 475 . 31 0 . 00 791 . 09 8 , 266 . 40 0 . 00 14 , 984 . 59 0 . 00 1 , 585 . 79 16 , 570 . 38 0 . 00 6 , 523 . 90 0 . 00 690 . 41 7 , 214 . 31 0 . 08 308 , 254 . 45 0 . 01 32 , 621 . 86 340 , 876 . 32 0 . 00 2 , 038 . 72 0 . 00 215 . 75 2 , 254 . 47 0 . 02 81 , 994 . 77 0 . 00 8 , 677 . 32 90 , 672 . 09 0 . 00 761 . 12 0 . 00 80 . 55 841 . 67 0 . 00 2 , 568 . 79 0 . 00 271 . 85 2 , 840 . 64 0 . 02 62 , 384 . 83 0 . 00 6 , 602 . 04 68 , 986 . 87 0 . 00 6 . 80 0 . 00 0 . 72 7 . 51 0 . 00 116 . 89 0 . 00 12 . 37 129 . 26 0 . 00 587 . 15 0 . 00 62 . 14 649 . 29 0 . 00 228 . 34 0 . 00 24 . 16 252 . 50 0 . 00 165 . 14 0 . 00 17 . 48 182 . 61 0 . 00 139 . 18 0 . 00 14 . 73 153 . 91 0 . 00 260 . 96 0 . 00 27 . 62 288 . 57 0 . 00 4 , 478 . 26 0 . 00 473 . 92 4 , 952 . 18 0 . 00 21 . 75 0 . 00 2 . 30 24 . 05 0 . 00 26 . 91 0 . 00 2 . 85 29 . 76 0 . 00 42 . 81 0 . 00 4 . 53 47 . 34 0 . 00 2 , 722 . 70 0 . 00 288 . 14 3 , 010 . 84 0 . 00 336 . 14 0 . 00 35 . 57 371 . 71 0 . 00 756 . 31 0 . 00 80 . 04 836 . 34 0 . 00 15 , 126 . 11 0 . 00 1 , 600 . 76 16 , 726 . 88F ac ili ty F a cili t y 143 F a cili t y 144 F a cili t y 145 F a cili t y 146 F a cili t y 147 F a cili t y 148 F a cili t y 149 F a cili t y 150 F a cili t y 151 F a cili t y 152 F a cili t y 153 F a cili t y 154 F a cili t y 155 F a cili t y 156 F a cili t y 157 F a cili t y 158 F a cili t y 159 F a cili t y 160 F a cili t y 161 F a cili t y 162 F a cili t y 163 F a cili t y 164 F a cili t y 165 F a cili t y 166 F a cili t y 167 F a cili t y 168 F a cili t y 169 F a cili t y 170 F a cili t y 171 F a cili t y 172 F a cili t y 173 F a cili t y 174 F a cili t y 175 E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( MM T C E) E m i ss i on s

f r o m e t c h i ng/c l ea n i ng ( M t C O 2 E q) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( MM T C E) E m i ss i on s

f r o m h ea t t r a n s f e r f l u i d s ( M t C O 2 E q) Tot a l

E m i ss i on s ( M tC O 2 E q) 0 . 00 2 , 446 . 46 0 . 00 258 . 90 2 , 705 . 37 0 . 00 173 . 97 0 . 00 18 . 41 192 . 38 0 . 00 271 . 83 0 . 00 28 . 77 300 . 60 0 . 00 695 . 88 0 . 00 73 . 64 769 . 53 0 . 00 3 , 131 . 88 0 . 00 331 . 44 3 , 463 . 32 0 . 00 134 . 56 0 . 00 14 . 24 148 . 80 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 0 . 00 305 . 81 0 . 00 32 . 36 338 . 17 0 . 00 16 . 82 0 . 00 1 . 78 18 . 60 0 . 00 183 . 48 0 . 00 19 . 42 202 . 90 0 . 00 1 , 739 . 71 0 . 00 184 . 11 1 , 923 . 82 0 . 00 1 , 304 . 78 0 . 00 138 . 08 1 , 442 . 86 0 . 00 260 . 96 0 . 00 27 . 62 288 . 57 0 . 00 521 . 91 0 . 00 55 . 23 577 . 15 0 . 00 1 , 651 . 36 0 . 00 174 . 76 1 , 826 . 12 0 . 00 119 . 60 0 . 00 12 . 66 132 . 26 0 . 00 342 . 50 0 . 00 36 . 25 378 . 75 0 . 00 195 . 72 0 . 00 20 . 71 216 . 43 0 . 00 10 . 87 0 . 00 1 . 15 12 . 02 0 . 00 43 . 49 0 . 00 4 . 60 48 . 10 0 . 00 9 , 242 . 20 0 . 00 978 . 08 10 , 220 . 28 0 . 00 652 . 39 0 . 00 69 . 04 721 . 43 0 . 00 3 , 902 . 54 0 . 00 413 . 00 4 , 315 . 53 0 . 00 38 . 06 0 . 00 4 . 03 42 . 08 0 . 00 3 , 232 . 08 0 . 00 342 . 04 3 , 574 . 12 0 . 00 247 . 70 0 . 00 26 . 21 273 . 92 0 . 00 16 . 31 0 . 00 1 . 73 18 . 04 0 . 00 1 , 413 . 51 0 . 00 149 . 59 1 , 563 . 10 0 . 00 1 , 272 . 16 0 . 00 134 . 63 1 , 406 . 79 0 . 00 636 . 08 0 . 00 67 . 31 703 . 40 0 . 00 4 , 770 . 60 0 . 00 504 . 86 5 , 275 . 47 0 . 00 285 . 42 0 . 00 30 . 21 315 . 63 0 . 01 35 , 229 . 08 0 . 00 3 , 728 . 21 38 , 957 . 29

## F a c t o r s a nd A ss u m p t i o ns 17 5 N u m b e r of S e m i c o ndu c t o r f a c ili t i es 5 , 98 7 T ot a l T M L A of P a rt n e rF a c ili t i es 744 3 T ot a l T M L A A ll F a c ili t i es 0 . 7 0 2006 S e m i c o ndu c t o r P a rt n e r r e p o rt e d e m i ss i o n s ( MM T C E) 0 . 0 7 2006 S e m i c o ndu c t o r P a rt n e r e s t i m a t e d h ea t t r a n s f e r f luid e m i ss i o n s ( MM T C E) 3 . 6 6 2006 U S U n c o n t r o ll e d S e m i c o ndu c t o r E m i ss i o n s ( MM T C E) . PEV M v 4 . 0 . 0701 . 0701 0 . 3 9 2006 U S e s t i m a

t e d h ea t t r a n s f e r f luid e m i ss i o n s ( MM T C E) 12 . 0 2 T ot a l U S E m i ss i o n s M t C O 2 E q (P a rt n e r r e p o rt e d + N o n -P a rt n e r un c o n t r o ll e d , sc a l e d - up t o in c lud e h ea t t r a n s f e r f luid s)

# MEMs

F ac ili ty S ub s t r a t e P r o cesse d

( m2 S i) E m i ss ion s ( M t C O 2 E q) F a c ili t y 1 547 . 19 13 , 356 . 07 F a c ili t y 2 21 . 89 534 . 24 F a c ili t y 3 218 . 88 5 , 342 . 43 F a c ili t y 4 2 , 188 . 76 53 , 424 . 28 F a c ili t y 5 153 . 21 3 , 739 . 70 F a c ili t y 6 218 . 88 5 , 342 . 43 F a c ili t y 7 459 . 64 11 , 219 . 10 F a c ili t y 8 10 . 94 267 . 12 F a c ili t y 9 87 . 55 2 , 136 . 97 F a c ili t y 10 218 . 88 5 , 342 . 43 F a c ili t y 11 109 . 44 2 , 671 . 21 F a c ili t y 12 1 , 751 . 01 42 , 739 . 43 T ot al 5 , 986 . 27 146 , 115 . 41

# F PD

F ac ili ty S ub s t r a t e A r ea

( m2) E m i ss ion s

( M t C O 2 E q) F a c ili t y 1 24760 . 13224 2625 . 812024 F a c ili t y 2 12000 1272 .6 F a c ili t y 3 848 . 2300165 89 . 95479325 F a c ili t y 4 2120 . 575041 224 . 8869831 F a c ili t y 5 1178 . 097245 124 . 9372128 F a c ili t y 6 24760 . 13224 2625 . 812024 F a c ili t y 7 3502 . 023346 371 . 3895759 F a c ili t y 8 13056 1384 . 5888 F a c ili t y 9 140616 14912 . 3268 T ot al 222841 . 1901 23632 . 30821

# C on v e r s ions

C o n ve r s i o n T y pe C o n ve r s i o n F ac t or U n i ts C o mm e n ts S F 6 SA R G WP 23 , 900 C O 2 Eq N F 3 G WP 8 , 000 C O 2 Eq 17 , 200 i sA R 4 G W P. 10 , 800 i s T A R G W P. C F 4 SA R G WP 6 , 500 C O 2 Eq C 2 F 6 SA R G WP 9 , 200 C O 2 Eq C 3 F 6 SA R G WP C 3 F 8 SA R G WP 7 , 000 C O 2 Eq C 4 F 6 SA R G WP C 4 F 8 O SA R G WP 12 , 10 0 C O 2 Eq T h i s i s G W P pub li s h e d b y m a nu f a c t u r e r , a nd t h e r ef o r e , i s n ot u s e d i n t h i s r e p o rt. S o u r c e : h tt p ://www . f u t u r e - f a b . c o m / d o c u m e n t s . as p?d_ I D = 1653 c -C 4 F 8 SA R G WP 8 , 700 C O 2 Eq C 5 F 8 SA R G WP CH F 3 SA R G WP 11 , 700 C O 2 Eq C 6 F 14 SA R G WP 7 , 400 C O 2 Eq K g t o Mt 0 . 001 M t/Kg C t o C O2 3 . 67 C O 2 /C un i t s i n o n e m illi o n un i ts 1 , 000 , 000 NA U n i t s i n o n et h o u s a nd un i ts 1 , 000 NA S qu a r e i n c h e st o s qu a r e f eet 0 . 006944 ft 2 / i n2 S qu a r e f eet t o s qu a r e m et e rs 0 . 092900 m 2 /ft2 E l e c t r o n i c sA v g C a p a c i t y U t ili z at i on 100 % p e r c e nt W e ass u m e d t h at a ll f a b s r un c l o s et o 100 % u t ili z at i o n i n e l e c t r o n i c s i ndu s t ry .

h eat t r a n s f e r f l u i d e m i ss i o n s f a c t or 11 % p e r c e nt W e ass u m e d t h at 9 . 57 % of t ot a l s e m i c o ndu c t o r e m i ss i o n s a r e f r o m h eat t r a n s f e r f l u i d s (H TF s ) . B as e d o n p r o p o rt i o n of h eat t r a n s f e r f l u i d e m i ss i o n s u s i ng 2006 IP CC t i e r 1 d ef a u l t v a l u e s , w e f i nd t h at 2 . 22 M t C O 2 E q / s qu a r e m et e r s of s ili c o n o u t of 23 . 19 M t C O 2 E q / s qu a r e m et e r s of s ili c o n a r e f r o m H TF s . T h e r ef o r e , t o f i nd t h e H TF e m i ss i o n s w e m u l t i p l y et c h i ng / c l ea n i ng e m i ss i o n s b y 11 % ( o r 9 . 57 %/ 90 . 43 % ). mm 2 t o m2 1 .E - 06 m 2 / mm2 v a l ue

PEV M E m i ss i o n F a c t or 0 . 000602601 MM T C E/ M SI of T M LA PEV M E m i ss i o n F a c t or 0 . 002209538 M t C O 2 E q / s qu a r e i n c h e s of T M LA PEV M E m i ss i o n F a c t or 3 . 425122636 M t C o O 2 E q / m 2 of T M LA PEV M E m i ss i o n F a c t o r ( w/ H eat t r a n s f e r f l u i d s) 0 . 000602601 MM T C E/ M SI of T M LA C a p a c i t y U t ili z at i o n f o r R & D a nd P il ot F a c ili t i es 20% p e r c e nt

# N o t es

5 . A ss u m ed t h a t o n l y M E M s f ab st h a t u s e P F C s (a s oppo s ed t o li q u i d e t c h a n t s ) are t h o s e t h a t m a nu f a c t u re w a f er s o f a t l ea s t 6 i n c h e s i n d i a m e t er. 3 . A ss u m ed t h a t a ll f u ll - s c a l e s e m i c o n d u c t or f a c ili t i e s opera t e a t 100 % o f de s i g n c apa c i t y a n d a ll p il o t/ R & D f a c ili t i e s opera t e a t 20 % o f de s i g n c apa c i t y. 2 . A ss u m ed t h a t p il o t/ R & D s e m i c o n d u c t or f abr i c a t i o n f a c ili t i e s m a nu f a c t u re l og i c de v i c e s ( w h e n prod u c t c l a ss w a s n o t s pe c i f i ed). A bbre v i a t i o n s : L CD = L i q u i d C rys t a l D i s p l a y , O L E D = O rga n i c L i g h t E m i tt i n g D i ode , H T PS = H i g h T e m pera t u re P o l ys ili c o n , A ML CD = A c t i v e Ma t r i x L i q u i d C rys t a l D i s p l a y , L T PS = Lo w T e m pera t u re P o l ys ili c on 1 . N o SA R G W P va l u e e x i s t s f or N F 3 . W e h a v e u s ed N F 3 G W P o f 8 , 000 f or t h i s a n a l ys i s ( s o u r c e : Mo li n a e t a l , G eop h ys i c a l R e s ear c h Le tt er s , V o l . 22 , 1873-6 (1995)) . T h i s va l u e i s l o w er t h a n bo t h t h e TA R (10 , 800) a n d F A R (17 , 200) G W P s f or N F 3 . T h e 8 , 000 G W P va l u e w a s u s ed i n t h e U S I n v e n t ory f or

G H G E m i ss i o n s a n d S i n k s f or t h e s e m i c o n d u c t or s e c t or ( EPA , 2008).

4 . N o I P CC T i er 1 de f a u l t e m i ss i o n f a c t or f or M E M s . A ss u m ed t h a t M E M s e m i ss i o n f a c t or i s eq u a l t o 1 . 2 x (1 /. 24) x I P CC T i er 1 S F 6 e m i ss i o n f a c t or f or s e m i c o n d u c t or de v i c e s . W e m ade t h i s a ss u m p t i o n be c a u s e a n i s o t rop i c e t c h e s are de s i red f or M E M s , w h i c h m ea n s B o s c h pro c e ss i s de s i red ( w h i c h u s e s S F 6/ C 4 F 8 pro c e ss re c i pe) . C 4 F 8 h a s a h i g h u t ili z a t i o n , w h erea s , S F 6 h a s l o w u t ili z a t i o n . T h ere f ore , w e h a v e a ss u m ed e m i ss i o n ra t e o f M E M s i s eq u a l t o t h a t o f S F 6 e t c h i n g i n s e m i c o n d u c t or s . H o w e v er , S F 6 u s age ( i n K g s o f ga s ) i n s e m i c o n d u c t or m a nu f a c t u r i n g a cc o un t s f or o n l y 24 % o f t o t a l P F C ga s u s age ( w h erea s w e a ss u m e i t a cc o un t s f or 100 % o f u s age i n M E M s m a nu f a c t u r i n g) . T h ere f ore , t h e s e m i c o n d u c t or S F 6 e m i ss i o n f a c t or i s s c a l ed- u p b y 1 /. 24 . A dd i t i o n a ll y , a n o t h er f a c t or o f 1 . 2 i s u s ed t o s c a l e- u p t h e s e m i c o n d u c t or e m i ss i o n f a c t or t o a cc o un t f or

t h e f a c t t h a t d u r i n g M E M s prod u c t i o n f a s t e t c h i n g i s n eeded ( t h ere f ore , m ore S F 6 ga s i s u s ed-- t h ereb y de c rea s i n g u t ili z a t i o n ) t o e n s u re t h a t t h e f abr i c a t i o n f a c ili t y re m a i n s pro f i t ab l e.

6 . W F W , 2007 appear st o n o t c o n t a i n a c o m p l e t e li s t i n g o f U . S . M E M s f ab s i n t h e U . S . 7 . F P D s u b s t ra t e area i s m u l t i p li ed b y 2 a st h e I P CC 2006 de f a u l t e m i ss i o n f a c t or i s i n t er m s o f t o t a l F P D area ( i n c l u d i n g bo t h t h e TFT s u b s t ra t e area a n d t h e c o l or f il t er s u b s t ra t e area , e v e n t h o u g h o n l y t h e TFT s u b s t ra t e area u t ili z e s P F C s ) .

# N o t es

12 . W e a ss u m ed t h a t 9 . 57 % o f t o t a l s e m i c o n d u c t or e m i ss i o n s are f ro m h ea t t ra n s f er f l u i d s ( H TF s ) . B a s ed o n proport i o n o f h ea t t ra n s f er f l u i d e m i ss i o n s u s i n g 2006 I P CC t i er 1 de f a u l t va l u e s , w e f i n d t h a t 2 . 22 M t C O 2 E q /s q u are m e t er o f s ili c o n o u t o f 23 . 19 M t C O 2 E q /s q u are m e t er o f s ili c o n are f ro m H TF s . T h ere f ore , t o f i n d t h e H TF e m i ss i o n s w e m u l t i p li ed e t c h i n g / c l ea n i n g e m i ss i o n s b y 11 % (or 9 . 57 % / 90 . 43 % ). 9 . D u e t o l a ck o f da t a o f c rys t a lli n e PV p l a n t s , w e h a v e a ss u m ed t h a t a ll p l a n t s h a v e a c apa c i t y o f appro x i m a t e l y 10M W ( E xpert J u dg m e n t ) . W e h a v e de t er m i n ed t h e t o t a l nu m ber o f f a c ili t i e s i n t h e U S b y d i v i d i n g o u r e s t i m a t e f or t o t a l c rys t a lli n e PV prod u c t i o n c apa c i t y i n t h e U S b y 10M W . F u rt h er a n a l ys i s / p u r c h a s i n g o f re s ear c h report s c o u l d c l ar i f y t h e d i s t r i b u t i o n o f c rys t a lli n e PV f a c ili t i e s i n t h e U S.

11 . T h e u pper bo un d o f t h e 95 % c o n f i de n c e i n t erva l i n t h i s s e c t or i s n o t u s ed t o de t er m i n e a l t er n a t i v e t h re s h o l d c apa c i t i e s , a s n o e x a c t un c ert a i n t y f or 2006 I P CC de f a u l t f a c t or s e x i s t f or s e m i c o n d u c t or s a n d TFT - F P D (o n l y i n f or m a t i o n a va il ab l e i st h a t un c ert a i n t i e s vary be t w ee n 0 a n d 200 % f or s e m i c o n d u c t or s a n d TFT - F P D ) . A dd i t i o n a ll y , n o un c ert a i n t i e s are a va il ab l e f or h ea t t ra n s f er f l u i d s , m e m s , a n d p v. 8 . D u e t o t i m e c o n t ra i n t s o f a n a l ys i s , w e c o u l d o n l y re l y o n report b y B u rt o n , 2006 ( PV E m i ss i o n s d u r i n g P h o t o vo l t a i c ( PV ) C e ll F abr i c a t i o n : A S c op i n g R eport ) . A t t h a t t i m e t h ere w ere v ery li tt l e t h i n f il m PV de v i c e s m ade . S i n c e t h a t t i m e t h i n f il m w e h a v e n ' t l ear n ed a n y m ore abo u t t h e u s e o f P F C s i n c ys t a lli n e s ili c o n (a n d t h e 2006 report i t s e l f h ad li tt l e i n f or m a t i o n o n u s e o f P F C s i n c ys t a lli n e s ili c o n ) . O n t h e t h i n f il m s i de , a l t h o u g h w e do n ' t k n o w m u c h abo u t P F C u s e , w e k n o wt h a t t h i n f il m prod u c t i o n h a s grea t l y i n c rea s ed i n t h e f or m o f a m orp h o u s s i - C I G S , a n d C d T e . F or l a t er t w o t y pe s o f t e c hn o l og y , P F C s are n o t u s ed . F or a m orp h o u s S il c o n , P F C s are o n l y u s ed i f t h e s ili c o n i s depo s i t ed i n PE C V D c h a m ber s a n d t h e c h a m ber s are c l ea n ed w i t h P F C s d u r i n g PE C V D . S o m e c o m pa n i e s m a y h a v e de v e l oped pro c e ss e st h a t de s o s i t t h e a m orp h o u s s ili c o n w i t h m e t h od s o t h er t h a n PE C V D , a n d o f t h o s e t h a t u s e PE C V D , un p u b li s h ed report s i n d i c a t e t h a t t h e y m a y be c l ea n i n g t h e i r c h a m ber s w i t h o u t u s i n g P F C s .

10 . W e h a v e a ss u m ed 100 % u t ili z a t i o n e ff i c i e n c y f or a ll e l e c t ro n i c s s e c t or s d u e t o i n s u ff i c i e n t da t at o de t er m i n e e x a c t c apa c i t y u t ili z a t i o n.

# Methodology To Conduct Electronics Thresholds Analysis: 1. Estimate emissions (from etch and clean proc esses) from Semiconductor facilities based on Total Manufactured Layer Area and emissions from Pa rtners and Non- Partners. The TMLA of each Partner facility was divided by total Partner TMLA and the TMLA of each Non-Partner facility was divided by total Non-Partner TMLA to obtain a proportion of each facility to total. The proportion of each Partner facility was multiplied by the total emissions for Partners and the proportion of each Non-Partner facility was multiplied by the total em issions for Non-Partners in order to estimate emissions from each facility. The emissions reported by Partners were accepted as the quantity emitted from the share of the i ndustry represented by those Partner s. Remaining emissions, those from non-Partners, were estimated using EPA's PFC Emissions Vintage Model (PEVM). PEVM is based on the recognition that PFC emissions from semiconductor manufacturing vary with (1) the number of layers that comprise different kinds of semiconductor devices, including both silicon wafer and metal interconnect layers, and (2) silicon consumption (i.e., the area of semiconductors produced) for each kind of device . The product of these two quantities, Total Manufactured Layer Area (TMLA), constitutes the activity data for semiconductor manufacturing. PEVM also incorporates an emission factor that expresses emissions per unit of layer-area. Emissions are estimated by multiplying TMLA by this emission factor. For more details please see US Inventory of Greenhouse Gas Emissions and Sinks: 1990-2006 (US EPA, 2008) and EPA's PFC Emissions Vintage Model (PEVM) v.2.14: Description and Documentation (Burton and Beizaie, 2001). 2. Estimate emissions from HTF. It was assumed that 9.57% of total semiconductor emissions are from heat transfer fluids (HTFs). Based on proportion of heat transfer fluid emissions using 2006 IPCC tier 1 default values, it is determined that 2.22 Mt CO2 Eq/square mete rs of silicon out of 23.19 Mt CO2 Eq/square meters of silicon are from HTFs. Therefore, to find the HTF emissions, emissions from etching and cleaning are multiplied by 11% (or 9.57%/90.43%). 3. Estimate emissions for MEMs facilities using c apacity data and a derived emission factor. Assumed that MEMs emission factor is equal to 1.2 x (1/.24) x IPCC Tier 1 SF6 emission factor for semiconductor devices. See "Notes" tab for additional detail regarding assumptions on development of MEMs emission factor. 4. Estimate emissions for FPD and PV facilities using capacity data and IPCC 2006 Tier I default emission factors (IPCC 2006). 5. Find the number/percent of utilities that fall above/below each emissions threshold (e.g., 1 000, 10 000, 25 000, and 100 000 Mt CO2). 

# 6. Find the total emissions/percent of total emissions from the group of facilities that fall above/below each emissions threshold.