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EXHIBIT 10.13 (PACTRUST LOGO)
    
    2000 Wyatt Drive, Suite 7
Santa Clara California 95054
408/588-4630  Facsimile: 408/588-4636
 May 18, 2005 Eli Porat, CEO
Tvia, Inc.
4001 Burton Drive
Santa Clara, CA 95054 Dear Mr. Porat: Re:
    
    Facility No. mp10 tviainc/COR4001 Burton Drive, Santa Clara, California (the Premises)
 Enclosed please find one fully executed 5th Amendment to Lease Agreement
for the above referenced Premises. Please keep this copy for your records. If you have questions, please
feel free to call me at (408) 588-4630. Very truly yours,PACIFIC REALTY ASSOCIATES, L.P./s/ Aurora DreyerAurora DreyerAdministrative Assistant
 Encl. 1




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FIFTH AMENDMENT TO LEASE
AGREEMENT THIS FIFTH AMENDMENT TO LEASE (this Amendment) is made and entered into this
17th day of May, 2005, by and between KOLL/INTEREAL BAY
AREA, a California general partnership (Landlord), and
TVIA, INC., a Delaware corporation (Tenant). RECITALS This Amendment is made with reference to the following facts, intentions and objectives: A.         Landlord and
InteGraphics System, Inc., a California corporation and Tenants
predecessor-in-interest
(InteGraphics), entered into that certain Mission Park Multi-Tenant Single-Building
Modified-Net Lease dated October 27, 1995, as amended by that certain First Amendment to
Lease Agreement dated January 15, 1999, as further amended by that certain Second Amendment to
Lease Agreement dated May 6, 1999, as further amended by that certain Third Amendment to Lease
Agreement dated June 27, 2003, and as further amended by that certain Fourth Amendment to
Lease dated June 7, 2004 (said lease as amended by said amendments is collectively known
hereinafter as the Lease) for that certain real property situated in the City of
Santa Clara, County of  Santa Clara, State of California, which real
property is commonly known as 4001 Burton Drive, Santa Clara,
California, and is more particularly described
and defined in said Lease as the Premises. InteGraphics changed its name to IGS
Technologies,
 Inc., a California corporation, and then to Tvia, Inc., a California corporation
(Tvia Inc. California), in August 1997 and March 2000. In August 2000, Tvia Inc.
California merged into the Tenant and by virtue of such merger, Tenant succeeded to all of
Tvia Inc. Californias rights under the Lease and assumed all obligations of Tvia Inc.
California under the Lease. B. Landlord
and Tenant have agreed to further extend the term of the Lease. Landlord
and Tenant acknowledge that the net Monthly Rent payable under the
Lease by Tenant as of the
commencement of the extended term of the Lease is based upon utilization by Tenant of that
port-ion of the Premises comprising approximately ten thousand
(10,000) square feet and more
particularly shown in Exhibit 1 attached hereto and incorporated herein of the Premises (the
In-Use Portion). C. Accordingly,
Landlord and Tenant have agreed to the modifications to the Lease as
set forth below. NOW,
THEREFORE, in consideration of the foregoing, the receipt of which is acknowledged, and
of the mutual agreement of the parties hereto to the terms and conditions hereinafter contained,
Landlord and Tenant agree as follows: 1. Recitals. Landlord
and Tenant hereby agree that the hereinabove recitals are true
and correct. 2. Effective Date;
Capitalized Terms. Except
as may be specifically set forth herein, the provisions of this Amendment shall be
effective as of the date Landlord executes this Amendment as shown
next to Landlords signature
below (the Effective Date). Capitalized terms used in this Amendment and not defined shall be
deemed to have the same meaning ascribed to them in the Lease. 3. Further Extension of
Term of Lease; Net Monthly Rent. 3.1.
Additional Period. The term of the Lease currently expires on July 31, 2005. The
existing term of the Lease is hereby further extended for an
additional seventeen (17) months
commencing on August 1, 2005 and continuing through and including December 31, 2006 (the
Additional Period). All references in the Lease and in
this Amendment to Term shall mean the
existing term of the Lease as extended through the Additional Period. 2




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3.2.
Net Monthly Rent. Net Monthly Rent for each and every month of the Additional
Period shall be Nine Thousand Five Hundred and no/100 Dollars ($9,500.00) per mouth. 4. As Is. Tenant shall continue to lease the Premises for the Additional Period in its AS IS
condition on the date of the commencement of the Additional Period. Landlord shall have no
obligation to make any improvements, alterations, modifications, repairs or refurbishments of
any nature whatsoever to the Premises as a condition to or in connection with Tenants lease of
the Premises for the Additional Period. Nothing contained in this Paragraph 4 shall release
Landlord of any repair obligations it may have under Paragraph 17(a) of the Lease. 5. Brokers. Landlord and Tenant acknowledge and agree that no real estate brokers were involved in
the negotiation of this Amendment. Landlord and Tenant (each being hereinafter referred to in
this Paragraph 5 as the Indemnitor) each agrees to defend with counsel reasonably
satisfactory to the other party and indemnify the other party from and against all liability,
claims, actions, causes of action, suits, demands, damages, or costs of any kind arising from
or connected with any brokers or finders fee or commission or charge claimed to be due any
person arising from the Indemnitors conduct with respect to said transaction, other than the
commission provided for above. This obligation shall survive and be enforceable following the
expiration or earlier termination of the Lease. 6. Ratification. Except as otherwise provided herein, the Lease is hereby ratified and affirmed and
remains in full force and effect. 7. Successors and Assigns. This
Amendment shall be binding upon and shall inure to the benefit of the parties
hereto, their successors, transferees, heirs, personal
representatives and assigns. IN WITNESS WHEREOF, the
parties hereto have executed this Amendment on the respective
dates set opposite their signatures below, but this Amendment on behalf of such party shall be
deemed to have been dated as of the date first above written. TENANT:
    
    LANDLORD:TVIA, INC.,
    
    KOLL/INTEREAL BAY AREA,a Delaware corporation
    
    a California general partnershipBy:
    
    Washcop Limited Partnership,
a Delaware limited partnership,Its:
    
    General PartnerBy:
    
    Pacific Resources Associates LLC,a Delaware limited liability company,Its:
    
    General PartnerBy:
    
    /s/ Eli Porat
    
    
    
    
    
    BY:
    
    /s/ Shari L. ReedName:
    
    Eli Porat
    
    
    
    
    
    Name :
    
    Shari L. ReedIts:
    
    CEO
    
    
    
    
    
    It:
    
    Vice President
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