EXHIBIT 10.2

ZYGO CORPORATION2002 EQUITY INCENTIVE PLANSTOCK OPTION AGREEMENT

AGREEMENT, made as of the __ day of ______________, 200_, by and between Zygo Corporation, a Delaware
corporation (the Company), and _________________________ (the Optionee).

WI T N E S S E T H:

WHEREAS, pursuant to the Zygo Corporation 2002 Equity Incentive Plan (the Plan), the Company
desires to grant to the Optionee, and the Optionee desires to accept, an option to purchase shares
of common stock, $.10 par value, of the Company (the Common Stock) upon the terms and
conditions set forth in this Agreement.

NOW, THEREFORE, the parties hereto agree as follows:

1.The Company hereby grants to the Optionee an option to purchase ______ shares of Common Stock at an
exercise price per share of $_______. This option is not intended to be treated as an incentive
stock option within the meaning of Section 422 of the Internal Revenue Code of 1986, as amended.

2.Notwithstanding anything to the contrary contained herein, unless sooner terminated, this option shall
expire if and to the extent it is not exercised within ten years from the date hereof.

3.Except as specifically provided otherwise herein, this option shall become exercisable in accordance
with the following schedule based upon the period of the Optionees continuous employment or
other service with the Company or any one or more of its subsidiaries, affiliates or associated entities
(collectively with the Company, the Company Group) following the date hereof:

| | Period of  | Incremental | Cumulative 
| | ---------- | ----------- | -----------
| | Continuous | Percentage  | Percentage 
| | Service    | Exercisable | Exercisable

4.This option may be exercised by written notice to the Company stating the number of full shares with
respect to which it is being exercised, and accompanied by payment of the exercise price for the
number of shares so purchased and payment or arrangement for payment of any federal, state or local
income or other taxes incurred by reason of the exercise and required to be withheld by the Company.
The exercise price shall be payable by cash or check or, if the Committee in its sole and absolute
discretion so permits, payment may also be made in whole or in part (a) by means of any cashless exercise procedure approved
by the Committee, if the Common Stock is publicly traded, (b) in the form of unrestricted shares
of Common Stock which, (i) in the case of shares acquired upon exercise of an option, have been owned
by the Optionee for more than six (6) months on the date of surrender, and (ii) have a Fair Market
Value on the date of surrender equal to the aggregate exercise price of the shares of Common Stock
as to which such option shall be exercised, (c) in any other form of consideration approved by the
Committee and permitted by applicable law, or (d) in any combination of the foregoing.

5.Upon a termination of the Optionees employment or other service with the Company Group for any
reason other than a termination by the Company Group for Cause (as defined in the Plan) or a termination
at a time when grounds for a termination for Cause exist, then (a) that portion of this option, if
any, which is not then exercisable shall terminate, and (b) unless sooner terminated under the terms
hereof, that portion of this option, if any, which is then exercisable shall remain exercisable for
the ninety (90) day period (or, in the event of a termination due to the Optionees death, the
one year period) commencing on the date of such termination and, to the extent not exercised during
such period, shall thereupon terminate. Upon a termination of the Optionees employment by,
or other service with, the Company Group for Cause (or a termination at a time when grounds for a
termination for Cause exist), this option (whether or not otherwise exercisable) shall immediately
terminate and cease to be exercisable.

6.The Companys obligation to sell and deliver shares upon the exercise of this option is subject
to such compliance with federal and state laws, rules and regulations applying to the authorization,
issuance or sale of securities as the Committee deems necessary or advisable. The Company shall be
entitled to postpone the time of delivery of certificates for shares

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of its Common Stock for such additional time as the Company shall deem necessary or desirable to enable it to (a) file a registration statement under the Securities Act of 1933, as amended, with respect to the shares of Common Stock which may be purchased under this option, or (b) comply with the listing requirements of any securities exchange upon which the Common Stock may be listed.
7.This option is not assignable or transferable except upon the Optionees death to a beneficiary
  designated by the Optionee in a manner acceptable to the Committee or, in the absence of a surviving
  designated beneficiary, pursuant to the Optionees will or by the laws of descent and distribution.
  This option is exercisable during the Optionees lifetime only by the Optionee. In the event
  of any attempt by the Optionee to alienate, assign, pledge, hypothecate or otherwise dispose of this
  option or any right hereunder, except as provided for herein, or in the event of any levy of any
  attachment, execution or similar process upon the rights or interests hereby conferred, the Company
  may terminate this option by notice to the Optionee and it shall thereupon become null and void.
8.Nothing contained in this Agreement shall confer upon the Optionee any right with respect to the continuation
of the Optionees employment or other service with any one or more of the Company Group or interfere
in any way with the right of the Company Group at any time to terminate such employment or other
service or to increase or decrease, or otherwise adjust, the other terms and conditions of the Optionees
employment or other service with the Company Group.
9.Neither the Optionee nor any person entitled to exercise the Optionees rights in the event of
death shall have any of the rights of a stockholder with respect to the shares subject to this option,
except to the extent that certificates for such shares shall have been issued upon the exercise of
this option as provided for herein.
10.This option is granted pursuant to the Plan and is governed by the terms and conditions of the Plan,
including, without limitation, the provisions of Section 11 of the Plan. The Optionee agrees to be
bound by the terms and conditions of this Agreement and the Plan (a copy of which the Optionee acknowledges
receipt of) and any future amendments to the Plan which do not adversely affect the Optionees
rights hereunder. The provisions of the Plan are hereby incorporated by reference and shall govern
if and to the extent that there are inconsistencies between the provisions of the Plan and this Agreement.
In the event that any controversy shall arise with respect to the nature, scope or extent of any
one or more rights conferred by this Agreement, the determination of the Committee of the rights
of the Optionee shall be final, binding and conclusive upon the Optionee and any other person who
shall assert any right based upon this Agreement.
11.This Agreement shall be governed by and construed in accordance with the laws of the State of Delaware,
without regard to its principles of conflicts of law. This Agreement shall be binding upon and shall
inure to the benefit of the parties hereto and their respective successors and permitted assigns.
This Agreement constitutes the entire agreement between the parties with respect to the subject matter
hereof and may not be modified, other than as provided in the Plan, except by written instrument
executed by the parties.
IN WITNESS WHEREOF, this Agreement has been executed as of the date first above written.
ZYGO CORPORATIONBy:_____________________________________________Name:Title:OPTIONEE2