EXHIBIT 10.1

|                        
|------------------------
|                        
|                        
|SHARE
PURCHASE AGREEMENT
|                        
|                        

dated September 28, 2012

regarding the
sale and purchase ofall shares held by ZZH Verwaltungsgesellschaft mbH in

ZygoLOT GmbH

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Table of Contents

|    |                                                     |  
|--- | --------------------------------------------------- | -
|1.  | Certain Defined Terms and Abbreviations             | 4
|2.  | Current Status / Shareholders Resolution           | 5
|3.  | Sale and Purchase of the Sale Share;
Effective Date | 5
|4.  | Purchase Price                                      | 6
|5.  | Closing                                             | 6
|6.  | Representations of Seller and Purchaser             | 6
|7.  | Remedies                                            | 7
|8.  | Statute of Limitation                               | 7
|9.  | Taxes                                               | 7
|10. | Settlement                                          | 7
|11. | Notices                                             | 8
|12. | Costs                                               | 8
|13. | Miscellaneous                                       | 9

2

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Certain Defined
Terms and Abbreviations

|                  |  
|----------------- | -
|2012 Profit Claim | 6
|Affiliates        | 4
|Agreement         | 4
|AktG              | 4
|Breach            | 7
|Closing Date      | 6
|Company           | 4
|Effective Date    | 6
|Equity Interests  | 5
|Legacy Claims     | 8
|Legal Entity      | 5
|Parties           | 4
|Party             | 4
|Purchase Price    | 6
|Purchaser         | 4
|Sale Share        | 5
|Seller            | 4
|Seller Claims     | 5
|Tax Liabilities   | 5

3

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SHARE PURCHASE
AGREEMENT

by and between

|   |                                                                                                                                                                                                                               
|-- | ------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|1. | ZZH
Verwaltungsgesellschaft mbH, a limited liability
company (GmbH) under German
law, having its business address at Im Tiefen See 58, 64293 Darmstadt, and
being registered with the Local Court of Darmstadt under HRB 85872
|   |                                                                                                                                                                                                                               
|   | - Seller -                                                                                                                                                                                                                  
|   |                                                                                                                                                                                                                               
|2. | Zygo Germany GmbH, a
limited liability company (GmbH)
under German law, having its business address at Bleichstr. 2, 64283
Darmstadt, and being registered with the Local Court of Darmstadt under HRB
85555                  
|   |                                                                                                                                                                                                                               
|   | - Purchaser -                                                                                                                                                                                                               
|   |                                                                                                                                                                                                                               
|   | -
Seller and Purchaser each a Party and collectively the Parties
-                                                                                                                                                        

PREAMBLE

|   |                                                                                                                                                                                                                                                                   
|-- | ------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|A. | Seller
and Purchaser are the sole shareholders of ZygoLOT GmbH (Company).                                                                                                                                                                                       
|   |                                                                                                                                                                                                                                                                   
|B. | Seller
intends to sell and assign its entire shareholding in the Company to
Purchaser and Purchaser intends to acquire such shareholding. On the date
hereof, the Parties have passed the shareholders resolution attached as Exhibit B for information purposes.

NOW, THEREFORE, the Parties agree as follows:

|   |                                                                                                                                                               
|-- | --------------------------------------------------------------------------------------------------------------------------------------------------------------
|1. | Certain
Defined Terms and Abbreviations                                                                                                                       
|   |                                                                                                                                                               
|   | In this agreement
(the Agreement),
except where set forth otherwise, the following terms and abbreviations shall
have the following meanings:               
|   |                                                                                                                                                               
|   | Affiliates: any individual persons or
Legal Entities who or which are affiliated enterprises (verbundene Unternehmen) within the
meaning of Section 15 AktG.
|   |                                                                                                                                                               
|   | AktG: the German Stock Corporation Act (Aktiengesetz).                                                                                                      
|   |                                                                                                                                                               
|   | Equity Interests: any shares,
partnership interests or other equity interests or voting rights in any Legal
Entity.                                         

4

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|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|--- | -------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|    | Legal Entity: any corporation, company,
partnership, association or other legal entity whether having separate legal
personality or not established pursuant to the laws of any jurisdiction.                                                                                                                                                                                                                                                                                                        
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|    | Tax Liabilities: any and all liabilities
relating to all direct, indirect and other taxes, duties, withholdings,
import duties, levies and social security or other similar contributions imposed
by any regional, national or other authority or body, and all related
charges, interest, penalties, fines and expenses as well as all social
security contributions, without limitation, any taxes, levies and duties
pursuant to Section 3 of the German Tax Code (Abgabenordnung - AO).          
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|    | Seller Claims: any and all claims, known
or unknown, which Seller may have against the Company, except for the 2012
Profit Claim.                                                                                                                                                                                                                                                                                                                                                                    
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|2.  | Current Status / Shareholders Resolution                                                                                                                                                                                                                                                                                                                                                                                                                                                              
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|2.1 | The
Company. The Company is a limited liability company (GmbH) under German law, having its
business address at Im Tiefen See 58, 64293 Darmstadt, and being registered
with the commercial register at the Local Court (Amtsgericht) of Darmstadt under HRB 7622.                                                                                                                                                                                                                                     
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|2.2 | Sale
Share. Seller holds one share in the nominal amount of
EUR 20,000 (in words: Euro twenty-thousand) in the Company (such shareholding and any shareholding
Seller may hold in the Company the Sale Share). Purchaser
holds one share in the nominal amount of EUR 30,000 (in words: Euro
thirty-thousand) in the Company.                                                                                                                                                                        
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|2.3 | Subsidiaries. The
Company does not hold, directly or indirectly, any Equity Interests in
another Legal Entity.                                                                                                                                                                                                                                                                                                                                                                                         
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|2.4 | Shareholder
Resolution. Seller and Purchaser passed the
shareholders resolution attached for information purposes as Exhibit
2.4 (i)hereto approving of the sale and transfer of the Sale
Share by Seller to Purchaser in accordance with Section 14 of the Articles of
Association. The declaration of the Company consenting to the sale and
transfer of the Sale Share in accordance with Section 14 of the Articles of
Association is attached as Exhibit 2.4 (ii) hereto for information
purpose.
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|3.  | Sale
and Purchase of the Sale Share; Effective Date                                                                                                                                                                                                                                                                                                                                                                                                                                                    
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                        
|3.1 | Sale and Transfer of the Sale
Share. Seller
hereby sells (verkauft) and,
subject to the condition precedent (aufschiebende
Bedingung) of the payment of the Purchase Price (as defined in
Section 4.1 below), hereby transfers (tritt
ab) the Sale Share and any and all Seller Claims to Purchaser. Purchaser
hereby accepts this sale and transfer.                                                                                                                                                  

5

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|    |                                                                                                                                                                                                                                        
|--- | ---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|3.2 | Ancillary Rights. Except for the profits of the Company
generated during the fiscal year 2012 (the 2012
Profit Claim), the sale and transfer of the Sale Share shall include all ancillary rights appertaining
thereto (Nebenrechte).
|    |                                                                                                                                                                                                                                        
|3.3 | Effective
Date. The sale of the Sale Share shall be made with
commercial effect (wirtschaftlicher
Wirkung) as of July 1, 2012 0:00 hours (the Effective Date).                                                                       
|    |                                                                                                                                                                                                                                        
|4.  | Purchase
Price                                                                                                                                                                                                                         
|    |                                                                                                                                                                                                                                        
|4.1 | Purchase
Price. The purchase price for the Sale Share (the Purchase
Price) shall be a fixed amount of EUR 2,500,000 (in words: Euro
two million five hundred thousand).                                                              
|    |                                                                                                                                                                                                                                        
|4.2 | Payment
of the Purchase Price. On the Closing Date (as defined in
Section 5.1), Purchaser shall pay the amount of the Purchase Price into the
following bank account of Seller:                                                        

|    |                                                                                                                                                                                                                                                                                                |                                
|--- | ---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- | -------------------------------
|    | Account holder:                                                                                                                                                                                                                                                                                | ZZH Verwaltungsgesellschaft mbH
|    |                                                                                                                                                                                                                                                                                                |                                
|    | Bank:                                                                                                                                                                                                                                                                                          | Commerzbank                    
|    |                                                                                                                                                                                                                                                                                                |                                
|    | Bank code:                                                                                                                                                                                                                                                                                     | 50880050                       
|    |                                                                                                                                                                                                                                                                                                |                                
|    | Account no.:                                                                                                                                                                                                                                                                                   | [*]                          
|    |                                                                                                                                                                                                                                                                                               
|4.3 | Modes of Payment. Any payments
under this Agreement shall be made by wire transfer in immediately available
funds, value as of the relevant due date set out in this Agreement or as
otherwise provided by law, free of bank and other charges.                                               
|    |                                                                                                                                                                                                                                                                                               
|5.  | Closing                                                                                                                                                                                                                                                                                       
|    |                                                                                                                                                                                                                                                                                               
|5.1 | Closing.
On September 28,
2012 (the Closing Date),
Purchaser shall pay to Seller the Purchase Price in accordance with
Section 4 above.                                                                                                                                                     
|    |                                                                                                                                                                                                                                                                                               
|5.2 | Confirmation
of Closing. Upon receipt of the Purchase Price by Seller, Seller and
Purchaser shall execute a joint written confirmation that the Closing has
occurred, and such confirmation shall be provided to the acting notary in
writing or by facsimile or PDF copy without undue delay.
|    |                                                                                                                                                                                                                                                                                               
|6.  | Representations
of Seller and Purchaser                                                                                                                                                                                                                                                       
|    |                                                                                                                                                                                                                                                                                               
|    | Seller represents and warrants in
the form of an independent undertaking (selbständiges
Garantieversprechen) within the meaning of Section 311 (1) of the
German Civil Code (Bürgerliches Gesetzbuch
- BGB) to Purchaser as of the date hereof and as of the Closing
Date:                    

* CONFIDENTIAL TREATMENT HAS BEEN REQUESTED FOR CERTAIN CONFIDENTIAL INFORMATION CONTAINED
IN THIS DOCUMENT, MARKED BY BRACKETS. THE OMITTED INFORMATION HAS BEEN FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24B-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

6

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|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|--- | ----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- | -------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|    | -                                                                                                                                                                                                                                                                                                                                                                                                                                                                 | The Sale Share has been validly
issued in compliance with applicable law. Seller holds full and unrestricted
legal and benefical title (uneingeschränkte
rechtliche und wirtschaftliche Inhaberschaft) to the Sale Share.
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|    | -                                                                                                                                                                                                                                                                                                                                                                                                                                                                 | The Sale Share has been fully
paid up; all contributions with respect to the Sale Share have been made in compliance
with applicable law and no repayments of the stated capital have been made to
Seller.               
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|    | -                                                                                                                                                                                                                                                                                                                                                                                                                                                                 | The Sale Share is not encumbered
by any third party rights.                                                                                                                                                              
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|    | -                                                                                                                                                                                                                                                                                                                                                                                                                                                                 | There are no silent partnerships
or sub-participations with regard to the Sale Share.                                                                                                                                    
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|7.  | Remedies                                                                                                                                                                                                                                                                                                                                                                                                                                                         
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|    | If, and to the extent that,
representations and warranties of the Seller are untrue (the Breach), the Seller shall put the Purchaser in a
position as if such representations and warranties had been correct.                                                                                                                                                                                                                                                 
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|8.  | Time
Limit for Making a Claim                                                                                                                                                                                                                                                                                                                                                                                                                                    
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|    | Claims of the Purchaser resulting
from a Breach, and/or any tax indemnity claims under section 9, Taxes,
below shall be made in writing by the Purchaser to the Seller before January
1, 2014.                                                                                                                                                                                                                                                                 
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|9.  | Taxes                                                                                                                                                                                                                                                                                                                                                                                                                                                            
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|9.1 | Tax Indemnity. Seller shall indemnify and hold harmless
Purchaser, or, at Purchasers election, the Company, from and against 40% of
any Tax Liabilities greater than EUR 10,000, relating to any periods ending
on or before the Effective Date, by paying an amount equal to such Tax
Liabilities to Purchaser, or at Purchasers election, to the Company, if and
to the extent the relevant taxes have not been fully paid on or prior to the
Effective Date.
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|9.2 | Defense. Purchaser shall inform Seller about all
relevant measures of tax authorities (tax audits, tax assessments and
comparable measures) relating to taxes for which Seller may be liable under Section
9.1, and the Parties shall discuss the matter with the intent to reach a
mutually beneficial resolution of any issues. Seller shall be entitled to
participate at its own expenses in proceedings relating to such taxes.                             
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|9.3 | Time Limitation. Any claims of Purchaser pursuant to
Section 9.1 shall be made within 6 (six) months after the final and binding
assessment of the relevant tax.                                                                                                                                                                                                                                                                                                 
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                   |                                                                                                                                                                                                                          
|9.4 | Seller Tax Liability. Seller shall be responsible for its own Tax
Liability from any gains it realized from this transaction.                                                                                                                                                                                                                                                                                                                                    

7

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|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|---- | ----------------------------------------------------------------------------------------------------------------------------------------------------------- | ---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|10.  | Settlement                                                                                                                                                 
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|10.1 | Subject
to Section 10.2, the Parties hereby                                                                                                                
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     | (i)                                                                                                                                                         | agree that this Agreement constitutes the
conclusive and final settlement of any and all mutual claims, known and
unknown, which may exist on the basis of the relationship between the Parties
as shareholders of the Company (Legacy
Claims) and, by way of precaution,
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     | (ii)                                                                                                                                                        | agree to waive any and all Legacy Claims.                                                                                                                                                                                                                                  
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|10.2 | The settlement and waiver in Section 10.1 above shall not affect any
claims between the Parties under this Share Purchase Agreement.                       
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|10.3 | Zygo Corporation and L.O.T.-Oriel Holding
AG have entered into the settlement and waiver agreement attached as Exhibit
10.3 hereto for information purpose.
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|11.  | Notices                                                                                                                                                    
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     | All
notices and other communications hereunder shall be made in writing and shall
be sent by registered mail or courier to the following addresses:        
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     | If to Purchaser, to:                                                                                                                                       
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     |                                                                                                                                                             | Zygo Germany GmbHAttn.:
John A. Tomichc/o Zygo Corporation
Laurel Brook Road
Middlefield, CT 06455
USA
with a copy to:                                                                                                                                                     
|     |                                                                                                                                                             |                                                                                                                                                                                                                                                                            
|     |                                                                                                                                                             | Baker & McKenzieAttn.
Dr. Thomas GillesBethmannstrasse
50.54
60311 Frankfurt am Main
Germany
Fax No. +49-69-299 08 108                                                                                                                                                     

8

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|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|---- | ---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- | -------------------------------------------------
|     | If to Seller, to:                                                                                                                                                                                                                                                                                                                                                                                                                 
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    | ZZH Verwaltungsgesellschaft mbH                  
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    | Attn. Klaus HilgerIm Tiefen See 5864293 Darmstadt
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|     | or to
such other recipients or addresses which may be specified by any Party to the
other Parties in the future in writing.                                                                                                                                                                                                                                                                                                       
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|12.  | Costs                                                                                                                                                                                                                                                                                                                                                                                                                             
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                    |                                                  
|     | All costs, including fees,
expenses and charges, incurred in connection with the preparation,
negotiation, execution and consummation of this Agreement or the transactions
contemplated herein, including, without limitation, the fees and expenses of
professional advisers, shall be borne by the Party having commissioned such
costs. The fees for the notarial recording of this Agreement shall be borne
by the Purchaser.
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.  | Miscellaneous                                                                                                                                                                                                                                                                                                                                                                                                                     
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.1 | Exhibits. All
Exhibits to this Agreement are attached for information purposes.                                                                                                                                                                                                                                                                                                                                                   
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.2 | Entire
Agreement. This Agreement shall comprise the entire
agreement between the Parties concerning the subject matter hereof and shall
supersede and replace all prior oral and written declarations of intention
made by the Parties in respect thereof.                                                                                                                                                                        
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.3 | Amendments. Any
amendments to this Agreement (including amendments to this Section 13.3) are
valid only if made in writing, unless another form is required by mandatory
law.                                                                                                                                                                                                                                                     
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.4 | German
Terms. Where a German term has been inserted in quotation
marks and/or italics, such term alone (and not the English term to which it
relates) shall be authoritative for the interpretation of the respective
provision.                                                                                                                                                                                                  
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.5 | Assignment. Without
the written consent of the other Parties, no Party shall be entitled to
assign any rights or claims under this Agreement. Seller hereby consents to
the assignment by Purchaser of its rights under this Agreement to any of
Purchasers Affiliate.                                                                                                                                                           
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.6 | Governing
Law. This Agreement shall be governed by, and be
construed in accordance with, the laws of the Federal Republic of Germany,
without regard to principles of conflicts of laws.                                                                                                                                                                                                                                          

9

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|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
|---- | --------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|13.7 | Jurisdiction. To the
extent legally permissible, the Regional Court (Landgericht) Frankfurt am Main shall have exclusive
jurisdiction regarding all disputes arising under or in connection with this
Agreement or its validity.                                                                                                                                                                                                                                                                                                                  
|     |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
|13.8 | Partial
Invalidity. In the event that one or more provisions of
this Agreement shall, or shall be deemed to, be invalid or unenforceable, the
validity and enforceability of the other provisions of this Agreement shall
not be affected thereby. In such case, the Parties agree to recognize and
give effect to such valid and enforceable provision or provisions which
correspond as closely as possible with the commercial intent of the Parties.
The same shall apply in the event that this Agreement contains any gaps (Vertragslücken).

10

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Exhibit B

Gesellschafterbeschluss

Shareholders Resolution

Die Zygo Germany GmbH, Darmstadt
und die ZZH Verwaltungsgesellschaft mbH, Darmstadt treten in eine
Gesellschafterversammlung ein und beschließen:

Zygo Germany GmbH, Darmstadt and ZZH
Verwaltungsgesellschaft mbH, Darmstadt come together in a shareholders meeting
and resolve:1.
Der Jahresabschluss zum 30.6.2012 mit einer Bilanzsumme von EUR 5.881.806,60
und einem Jahresübersschuss von EUR 2.127.047,36 wird festgestellt in der Form
des Prüfungsberichtes des Abschlussprüfers Josef Stimpfle, Gerlingen vom
27.7.2012.

The annual financial statement as of June
30th 2012 with a balance sheet total of EUR 5.881.806,60 and a net
earnings of EUR 2.127.047,36 is approved as reported by the auditor Josef
Stimpfle, Gerlingen as of July 27th 2012.2.
Der Bilanzgewinn in Höhe von EUR 2.127.174,80 wird am 28.9.2012 ausgezahlt. Die
einzubehaltende Kapitalertragsteuer und Solidaritätszuschlag reduzieren die
Auszahlungsbeträge.

The retained earnings in the amount of EUR
2.127.174,80 will be paid as a dividend on September 28th 2012. The payments
will be reduced by the capital gain tax and solidarity tax.

3.
Dem Geschäftsführer Arno Köhler wird für das Geschäftsjahr 2011/2012 Entlastung
erteilt.

Geschäftsführer Arno Köhler is released from
his duties of the fiscal year 2011/2012.

4.
Zum Abschlussprüfer für das Geschäftsjahr 2012/2013 wird Herr Josef Stimpfle,
Gerlingen gewählt.

It is resolved that the auditor for the
fiscal year 2012/2013 will remain Mr. Josef Stimpfle, Gerlingen.

Darmstadt 28.9.2012

|                   |                                 |                 | 
|------------------ | ------------------------------- | --------------- | 
|/s/ John A. Tomich |                                 | /s/ Arno Köhler | 
|                   |                                 |                 | 
|                   |                                
|Zygo Germany GmbH  | ZZH Verwaltungsgesellschaft mbH

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Exhibit 2.4 (i)

Written Shareholders Resolution

The undersigned

ZZH Verwaltungsgesellschaft mbH,

registered in the commercial register with the 
Local Court Darmstadt under HRB 85872

and

Zygo Germany GmbH,

registered in the commercial register with the 
Local Court Darmstadt under HRB 85555

(the Shareholders)

in their capacity as sole shareholders of

ZygoLOT GmbH

registered in the commercial register with the 
Local Court Darmstadt under HRB

(the Company)

waiving the
fulfilment of all requirements provided for by law or the articles of
association as to call and notice, hereby pass the following shareholders
resolution:

| |                                                                                                                                     
| | ------------------------------------------------------------------------------------------------------------------------------------
| | The sale and
 transfer of the share held in the Company by ZZH Verwaltungsgesellschaft mbH
 to Zygo Germany GmbH is hereby approved.
| |                                                                                                                                     
| | The managing
 director of the Company is hereby instructed to issue a declaration of
 consent to such share sale and transfer.      

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|                                |                                                  
|------------------------------- | -------------------------------------------------
|ZZH Verwaltungsgesellschaft mbH |                                                  
|                                |                                                  
|place, date:                    | Frankfurt 28,9.12                                
|                                |                                                  
|signature:                      | /s/ Klaus Hilger                                 
|                                |                                                  
|                                |                                                  
|name:                           | Klaus Hilger                                     
|                                |                                                  
|in his capacity as              | Managing Director                                
|                                |                                                  
|ZygoGermany GmbH                |                                                  
|                                |                                                  
|place, date:                    | Middlefield Connecticut,
 USA
 September 27, 2012
|                                |                                                  
|signature:                      | /s/ John A. Tomich                               
|                                |                                                  
|                                |                                                  
|name:                           | John A.
 Tomich                                  
|                                |                                                  
|in his capacity as              | Geschäftsführer/Managing
 Director               

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Exhibit 2.4 (ii)

Declaration of Consent

|   |                                                                                                                                                                                     
|-- | ------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|1. | ZZH Verwaltungsgesellschaft mbH, Darmstadt and Zygo Germany GmbH,
 Darmstadt are the sole shareholders of ZygoLOT GmbH, Darmstadt (Company).                                      
|   |                                                                                                                                                                                     
|2. | ZZH Verwaltungsgesellschaft mbH intends to sell and transfer its
 entire shareholding in the Company to Zygo Germany GmbH, Darmstadt.                                               
|   |                                                                                                                                                                                     
|3. | The Company hereby issues its consent to such contemplated sale and
 transfer of shares in the Company in accordance with Section 14 of the
 Articles of Association of the Company.

|                                 
|---------------------------------
|Date: 28.9.2012                  
|                                 
|Place: Darmstadt                 
|                                 
|/s/ Arno Köhler                  
|                                 
|                                 
|Arno Köhler                      
|                                 
|Managing Director of ZygoLOT GmbH

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Exhibit 10.3

General Settlement Agreement

by and between

L.O.T.-Oriel
Holding AG, Im Tiefen See 58, 64293 Darmstadt, Germany

- L.O.T.  -

and

Zygo
Corporation, a Delaware corporation, Laurel Brook Road, Middlefield, Conneticut
06455-0448, USA

- Zygo -

(together the Parties and individually a Party)

WHEREAS, on
October 2, 1999, L.O.T. and Zygo entered into a certain Joint Venture Agreement
(JV Agreement) relating to
ZygoLOT GmbH, Darmstadt (the Company);

WHEREAS, ZZH
Verwaltungsgesellschaft mbH (hereafter ZZH) is the successor to L.O.T. in
ownership of the Company;

WHEREAS, Zygo
Germany GmbH (hereafter Zygo Germany) is the successor to Zygo in ownership
of the Company;

WHEREAS, on
the date hereof, ZZH and Zygo Germany are the sole shareholders the Company;

and,

WHEREAS, in
connection with the contemplated sale and transfer of the shares currently held
by ZZH in the Company to Zygo Germany under a certain share sale and transfer
agreement (SPA), the Parties wish to clarify and agree that they do not have
any claims, known and unknown, relating to the JV Agreement or the Company,
provided that any claims of L.O.T. against the Company and any claims of the
Company against L.O.T. under the Service Agreement shall remain unaffected.

NOW THEREFORE,
the parties hereto agree as follows:

|   |                                        
|-- | ---------------------------------------
|1. | Termination of JV Agreement / No claims

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|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|--- | ---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|    | The Parties hereby confirm (i) that the JV Agreement is terminated
 and (ii) that none of the Parties is entitled to any claims against the
 respective other Party or the Company in connection with or relating to the
 JV Agreement.                                                                                                                                                                                                                                                                                                                  
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|2.  | Assignment of claims                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                     
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|    | Should L.O.T., on behalf of itself or any affiliated company, despite
 the confirmation in Section 1 above, be entitled to any claim against the
 Company, L.O.T. hereby assigns such claim to Zygo, subject to the condition
 precedent and in consideration of the payment of the purchase price by Zygo
 Germany under the SPA.                                                                                                                                                                                                                       
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|3.  | General settlement                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|    | Subject to the condition precedent of the effectiveness of the
 assignment set forth in Section 2 above and to the extent that such waiver
 can be legally enforced, the Parties, on behalf of themselves and any
 affiliated companies, hereby agree to waive all known and unknown claims
 against each other, which may exist in connection with the JV Agreement.                                                                                                                                                                                    
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.  | Miscellaneous                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                            
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.1 | Entire Agreement. This Agreement shall
 comprise the entire agreement between the Parties concerning the subject
 matter hereof and shall supersede and replace all prior oral and written
 declarations of intention made by the Parties in respect thereof.                                                                                                                                                                                                                                                                                            
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.2 | Amendments. Any amendments to this Agreement
 (including amendments to this Section 4.2) are valid only if made in writing,
 unless another form is required by law.                                                                                                                                                                                                                                                                                                                                                                                     
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.3 | Governing Law. This Agreement shall be
 governed by, and be construed in accordance with, the laws of the Federal
 Republic of Germany, without regard to principles of conflicts of laws.                                                                                                                                                                                                                                                                                                                                                               
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.4 | Jurisdiction. To the extent legally
 permissible, the Regional Court (Landgericht) Frankfurt am Main shall have
 exclusive jurisdiction regarding all disputes arising under or in connection
 with this Agreement or its validity.                                                                                                                                                                                                                                                                                                                      
|    |                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                          
|4.5 | Partial Invalidity. In the event that one or
 more provisions of this Agreement shall, or shall be deemed to, be invalid or
 unenforceable, the validity and enforceability of the other provisions of
 this Agreement shall not be affected thereby. In such case, the Parties agree
 to recognize and give effect to such valid and enforceable provision or
 provisions which correspond as closely as possible with the commercial intent
 of the Parties. The same shall apply in the event that this Agreement
 contains any gaps (Vertragslücken).

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Place: Darmstadt

Date: 28.
Sept. 2012

Name: Ralph
Köhler, CEO

|                        |                 
|----------------------- | ----------------
|Signature:              | /s/ Ralph Köhler
|                        |                 
|L.O.T.-Oriel Holding AG

Place:
Middlefield, Connecticut, USA

Date:
September 28, 2012

Name: John A.
Tomich 
           Vice President,
General Counsel 
           and Secretary

|                 |                   
|---------------- | ------------------
|Signature:       | /s/ John A. Tomich
|                 |                   
|Zygo Corporation

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