POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    R. Schorr Berman
                                    (Signature)







<PAGE>
                              POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    Arthur R. Buckland
                                    (Signature)







<PAGE>
                               POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    Frank Gabron
                                    (Signature)










<PAGE>
                               POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    Milton C. Lauenstein
                                    (Signature)










<PAGE>
                               POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    Marvin G. Schorr
                                    (Signature)










<PAGE>
                             POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                   Wickham Skinner
                                   (Signature)











<PAGE>
                               POWER OF ATTORNEY




     KNOW ALL MEN BY THESE PRESENTS, that the undersigned Director of Helix
Technology Corporation, a Delaware corporation (the "Corporation"), hereby
constitutes and appoints Robert J. Lepofsky, Beverly L. Armell, and William
Williams II, or any one of them, his true and lawful attorney or attorneys
and agent or agents to do any and all acts and to execute any and all
instruments which said attorney or attorneys and agent or agents may deem
necessary or advisable to enable the Corporation to comply with the
Securities Exchange Act of 1934, as amended, and any rules, regulations,
requirements or requests of the Securities and Exchange Commission
thereunder or in respect thereof in connection with the filing under such
Act of the Annual Report of the Corporation on Form 10-K for the year 1996
including specifically, but without limiting the generality of the
foregoing, power and authority to execute the name of the undersigned
Director as indicated below to the Form 10-K to be filed with the
Securities and Exchange Commission and to execute his name with respect to
any amendment to such Form 10-K and the undersigned does hereby ratify and
confirm all that said attorney or attorneys and agent or agents or any one
of them shall do or cause to be done on his behalf by virtue hereof.

     IN WITNESS WHEREOF, the undersigned has executed this Power of
Attorney this 20th day of February, 1997.





                                    Mark S. Wrighton
                                    (Signature)