11th Workshop on Crystalline

Silicon Solar Cell Materials

and Processes

Extended Abstracts and Papers

August 2001 • NREL/BK-520-30838

Workshop Chairman/Editor: B. L. Sopori

Program Committee:

J. Gee, J. Kalejs, T. Saitoh, R. Sinton, M. Stavola,

D. Swanson, T. Tan, E. Weber, J. Werner, and

B.L. Sopori

Holiday Inn

Estes Park, Colorado

August 19-22, 2001

National Renewable Energy Laboratory

1617 Cole Boulevard

Golden, Colorado 80401-3393

NREL is a U.S. Department of Energy Laboratory

Operated by Midwest Research Institute • Battelle • Bechtel

Contract No. DE-AC36-99-GO10337
11th Workshop on Crystalline

Silicon Solar Cell Materials

and Processes

Extended Abstracts and Papers

August 2001 • NREL/BK-520-30838

Workshop Chairman/Editor: B. L. Sopori

Program Committee:

J. Gee, J. Kalejs, T. Saitoh, R. Sinton, M. Stavola,

D. Swanson, T. Tan, E. Weber, J. Werner, and

B. L. Sopori

Holiday Inn

Estes Park, Colorado

August 19-22, 2001

National Renewable Energy Laboratory

1617 Cole Boulevard

Golden, Colorado 80401-3393

NREL is a U.S. Department of Energy Laboratory

Operated by Midwest Research Institute • Battelle • Bechtel

Contract No. DE-AC36-99-GO10337
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11th Workshop on

Crystalline Silicon Solar Cell Materials and Processes

TABLE OF CONTENTS

Title/Author(s): Page 

Workshop Theme: Emerging Technologies for Crystalline Si Solar Cells . . . . . . . . . .

Bhushan Sopori

1

Intrinsic Point Defects in Silicon and Their Control in Crystal Growth and Wafer

Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

R. Falster and V. V. Voronkov

2

The Role of Transition Metals in Solar Cell Efficiency . . . . . . . . . . . . . . . . . . . . .

A. A. Istratov and E. R. Weber

11

Optimization of Silicon Crystal Growth and Wafer Processing for High Efficiency

and High Mechanical Yield . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

G. A. Rozgonyi, A. Karoui, L. Kordas, and T. Ciszek

18

Lifetime Spectroscopy of FeB Pairs in Silicon . . . . . . . . . . . . . . . . . . . . . . . . . .

Daniel Macdonald and Andres Cuevas

24

Electrical Behavior of Crystal Defects in Silicon Influence of a Contamination . . . . . . . .

M. Kittler, W. Seifert, and V. Kveder

32

Restructuring of Photovoltaic R&D Programs in Japan . . . . . . . . . . . . . . . . . . . . .

Tadashi Saitoh

40

Beyond Wafers and Silicon Thin-Films: Third Generation Photovoltaics . . . . . . . . . . .

Martin A. Green

48

Electronic Transport in Amorphous/Crystalline Silicon Heterojunction

Solar Cells . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

U. Rau, N. Jensen, and J. H. Werner

49
The Impact of TC0s on Next-Generation Solar Cells . . . . . . . . . . . . . . . . . . . . . .

 Timothy J. Coutts

57

Resonance Ultrasonic Diagnostics of Elastic Stress in Silicon Wafers . . . . . . . . . . .

A. Belyaev, S. Ostapenko, and I. Tarasov

58

Handling of Crystalline Silicon Solar Cells in High Throughput Production Tools . . . . . .

Julio Bragagnolo, Junichi Akita, Hisashi Sato, Yoshiro Chikaki, Tohru Hashimoto,

Masafumi Ito, and Ichiro Sugiyama

59

Hydrogen in Crystalline Silicon for Solar Cells . . . . . . . . . . . . . . . . . . . . . . . . .

S. Martinuzzi

65

Investigation of Gettering Mechanisms in Crystalline Silicon . . . . . . . . . . . . . . . . . .

T. Y. Tan

73

Lifetime Enhancement and Low-Cost Technology Development for High Efficiency

Manufacturable Silicon Solar Cells . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

A. Rohatgi, V. Yelundur, and J. Jeong

80

Silicon Ribbons – State of the Art and Results from UKN Research . . . . . . . . . . . . . . .

Giso Hahn, Patric Geiger, and Alexander Hauser

85

Protocrystalline-Microcrystalline Phase Transitions in Si:H Materials and Their

Effect on Solar Cell Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C. R. Wronski, R. J. Koval, J. M. Pearce, A. S. Ferlauto, J. Koh, and R. W. Collins

93

Le Châtelier’s “Principle of Moderation” and the Self-Passivation of Extended

Defects in CIS Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Billy J. Stanbery

95

Methods in Microelectronics for Rapid Thermal Annealing of Implanted Dopants . . . . . . .

A. T. Fiory

102

Rapid Thermal Processing for High Throughput Silicon Solar Cell Production . . . . . . . .

Ralf Lüdemann, Daniel Biro, Stefan Peters, Dominik M. Huljic, and Ralf Preu

114

Monitoring Physical Parameters of Si Solar Cells in PV Manufacturing . . . . . . . . . . . .

Bhushan Sopori, Yi Zhang, Roderick Faison, Jamal Madjdpour, Christian Fredrick,

Peter Hacke, Dan Meier, and Juris Kalejs

122

Cu Metallization in Microelectronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Paul S. Ho

128

Self-Doping Silver Contacts for Silicon Solar Cells . . . . . . . . . . . . . . . . . . . . . . . .

D. L. Meier, H. P. Davis, R. A. Garcia, J. A. Jessup, P. Hacke, S. Yamanaka, and J. Salami

129
Thick Film Conductor Technology for Solar Cells . . . . . . . . . . . . . . . . . . . . . . . .

Alan F. Carroll and Richard J. S. Young

137

Thick Film Solutions for High Efficiency, Low Cost Solar Cell Processing . . . . . . . . . . .

Kristina McVicker, Tung Pham, Aziz Shaikh, and Todd Williams

145

Poster Papers

Crystal Growth and PV Devices Using a New Si Feedstock Source . . . . . . . . . . . . . . .

T. F. Ciszek, M. R. Page, T. H. Wang, and J. A. Casey

146

Novel Methods for Purifying Metallurgical-Grade Silicon . . . . . . . . . . . . . . . .

T. F. Ciszek, T. H. Wang, M. R. Page, P. Menna, R. E. Bauer, E. A. Good, and J. A. Casey

150

Thin Layer Si Growth by Atmospheric Pressure Iodine Vapor Transport . . . . . . . . . . . .

T. H. Wang, T. F. Ciszek, M. R. Page, R. E. Bauer, and M. D. Landry

155

Wire Surface Kinetics in Hot-Wire Chemical Vapor Deposition . . . . . . . . . . . . . . . . .

Jason K. Holt, Maribeth Swiatek, David G. Goodwin, and Harry A. Atwater

159

Guidelines for More Accurate Determination and Interpretation of Effective

Lifetime from Measured Quasi-Steady-State Photoconductance . . . . . . . . . . . . . . . .

J. Brody, A. Rohatgi, and A. Ristow

163

Impact of Copper on Minority Carrier Diffusion Length in p-Type and n-Type Silicon . . . .

R. Sachdeva, A. A. Istratov, and E. R. Weber

168

Application of X-Ray Fluorescence Microprobe Technique for the Analysis

of Fully Processed Solar Cells . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

O. F. Vyvenko, A. A. Istratov, T. Buonassisi, E. R. Weber, and R. Schindler

172

Scale-Up of the CSI B-Removal Process for the Production of Solar Grade Silicon . . . . . .

David B. Joyce, Chandra P. Khattak, and Frederick Schmid

177

Application of the Diagram Method in the Theory of Recombination Processes . . . . . . . .

E. V. Kanaki and S.Zh. Karazhanov

183

Development of a Technology of Silicon Production by Recycling Phosphorus

Industry’s Wastes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

M. F. Tamendarov and B. N. Mukashev

189

Rapid ARC Formation Using a Simple and Versatile Etching Process . . . . . . . . . . . . .

C. C. Striemer, F. Shi, and P. M. Fauchet

194
Crystalline Silicon Technologies in CIS Countries . . . . . . . . . . . . . . . . . . . . . . . .

D. S. Strebkov, V. Zadde, A. Pinov, K. Touryan, and L. Murphy

199

Quantitative Modelling of Nucleation Kinetics in Experiments for Poly-Si Growth on

SiO2 by Hot-Wire Chemical Vapor Deposition . . . . . . . . . . . . . . . . . . . . . . . . . .

Maribeth Swiatek, Jason K. Holt, and Harry A. Atwater

208

Influence of Copper on the Carrier Lifetime of n-Type and p-Type Silicon . . . . . . . . . . .

K. Stewart, A. Cuevas, D. Macdonald, and J. Williams

212

A Compact, Contactless Lifetime Tester Using the Resonant-Coupled

Photoconductive Decay Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

R. K. Ahrenkiel and S. W. Johnson

216

Calibration and Error Analysis of High Accuracy Residual Stress Polariscope . . . . . . . . .

S. He and S. Danyluk

220

Gettering of Gold in H+ or He++ Ion Implanted Cz Silicon Wafers . . . . . . . . . . . . . . . .

Isabelle Périchaud

221

Counterdoping of p-Type Silicon by Hydrogen Ion Implantation . . . . . . . . . . . . . . . .

D. Barakel and S. Martinuzzi

225

Light Induced Degradation in Manufacturable Multi-Crystalline Silicon Solar Cells . . . . .

Ben Damiani, Mohamed Hilali, and Ajeet Rohatgi

229

Lifetime Enhancement During Processing of Porous Silicon Cells . . . . . . . . . . . . . . .

M. Hilali, B. Damiani, and A. Rohatgi

235

Temperature-Dependent Cross-Sectional EBIC Study of Hydrogen Passivation of

Defects in mc-Silicon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

O. F. Vyvenko, O. Krüger, and M. Kittler

240

Metallizations by Direct-Write Ink Jet Printing . . . . . . . . . . . . . . . . . . . . . . . . . .

Tanya Rivkin, Alex Miedaner, Calvin Curtis, Jeff Alleman, John Perkins, Lee Smith,

and David Ginley

246

Shunt Detection in Solar Cells with the Corescanner and Lock-In Thermography:

A Comparison . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

O. Breitenstein, J. P. Rakotoniaina, and A. S. H. van der Heide

253

Etch Pit and EBIC Correlations of High Purity Dislocated FZ Silicon . . . . . . . . . . . . .

M. C. Wagener, I. Sen, G. A. Rozgonyi, and T. F. Ciszek

257

In-Line Testing of Minority-Carrier Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Ronald A. Sinton

Room-Temperature Mapping of Defects in mc-Si Wafers and Solar Cells . . . . . . . . . . . .

I. Tarasov, S. Lulu, S. Ostapenko, W. Seifert, M. Kittler, and J. P. Kaleis

264

Effect of Aluminum-Induced Gettering and Backside Surface Field on the

Efficiency of Silicon Solar Cells . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

P. S. Plekhanov, M. D. Negoita, and T. Y. Tan

265

Boron and Phosphorus Dopant Diffusion in Crystalline Si by Rapid Thermal

Activation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

A. T. Fiory, S. G. Chawda, S. Madishetty, N. M. Ravindra, A. Agarwal,

K. K. Bourdelle, J. M. McKinley, H.-J.L. Gossmann, and S. P. McCoy

271

Modelling Low-Temperature Diffusion of H in Si: Influence of Impurities

and Defects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Yi Zhang, Bhushan Sopori, Robert Reedy, Kim Jones, and N. M. Ravindra

279

Pilot Manufacturing of Dendritic Web Photovoltaic Products . . . . . . . . . . . . . . . . . .

J. R. Easoz and D. L. Meier

 285

Processing and Handling of Low Thickness Silicon Solar Cells . . . . . . . . . . . . . . . . .

J. C. Jimeno, R. Gutiérrez, V. Rodríquez, F. Hernando, F. Recart, and G. Bueno

289

Contact Resistance Scanning for Process Optimization: The Corescanner

Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

A. S. H. van der Heide, J. H. Bultman, J. Hoornstra, and A. Schönecker

293

Thin Film Silicon Solar Cells on Low Cost Glass and Glass-Ceramic Substrates:

Recent Progress . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

S. Krasulya and D. G. Ast

297
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4. TITLE AND SUBTITLE

11th Workshop on Crystalline Silicon Solar Cell Materials and Processes: Extended

Abstracts and Papers, 19-22 August 2001

6. AUTHOR(S)

B.L. Sopori, Workshop Chairman

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TA: PVP12501

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National Renewable Energy Laboratory

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NREL/BK-520-30838

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13. ABSTRACT (Maximum 200 words): The 11th Workshop will provide a forum for an informal exchange of technical and scientific

information between international researchers in the photovoltaic and non-photovoltaic fields. Discussions will include the

various aspects of impurities and defects in silicon – their properties, the dynamics during device processing, and their

application for developing low-cost processes for manufacturing high-efficiency silicon solar cells. Sessions and panel

discussions will review impurities and defects in crystalline-silicon PV, advanced cell structures, new processes and process

characterization techniques, and future manufacturing demands.

The workshop will emphasize some of the promising new technologies in Si solar cell fabrication that can lower PV energy

costs and meet the throughput demands of the future. The three-day workshop will consist of presentations by invited

speakers, followed by discussion sessions. Topics to be discussed are: Si Mechanical properties & Wafer Handling,

Advanced Topics in PV Fundamentals, Gettering & Passivation, Impurities & Defects, Advanced Emitters, Crystalline Silicon

Growth, and Solar Cell Processing. The workshop will also include presentations by NREL subcontractors who will review

the highlights of their research during the current subcontract period. In addition, there will be two poster sessions presenting

the latest research and development results. Some presentations will address recent technologies in the microelectronics

field that may have a direct bearing on PV.

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