#include <bits/stdc++.h>
#define all(vec) vec.begin(), vec.end()
using namespace std;
using ll = long long;
using P = pair<int, int>;
constexpr ll INF = (1LL << 30) - 1LL;
constexpr ll LINF = (1LL << 60) - 1LL;
constexpr ll MOD = 1e9 + 7;
template <typename T> void chmin(T &a, T b) { a = min(a, b); }
template <typename T> void chmax(T &a, T b) { a = max(a, b); }
template <std::uint_fast64_t Modulus> class modint {
    using u64 = std::uint_fast64_t;

  public:
    u64 a;
    constexpr modint(const u64 x = 0) noexcept : a(x % Modulus) {}
    constexpr u64 &value() noexcept { return a; }
    constexpr const u64 &value() const noexcept { return a; }
    constexpr modint operator+(const modint rhs) const noexcept {
        return modint(*this) += rhs;
    }
    constexpr modint operator-(const modint rhs) const noexcept {
        return modint(*this) -= rhs;
    }
    constexpr modint operator*(const modint rhs) const noexcept {
        return modint(*this) *= rhs;
    }
    constexpr modint operator/(const modint rhs) const noexcept {
        return modint(*this) /= rhs;
    }
    constexpr modint operator^(const u64 rhs) const noexcept {
        return modint(*this) ^= rhs;
    }
    constexpr modint &operator+=(const modint rhs) noexcept {
        a += rhs.a;
        if (a >= Modulus) {
            a -= Modulus;
        }
        return *this;
    }
    constexpr modint &operator-=(const modint rhs) noexcept {
        if (a < rhs.a) {
            a += Modulus;
        }
        a -= rhs.a;
        return *this;
    }
    constexpr modint &operator*=(const modint rhs) noexcept {
        a = a * rhs.a % Modulus;
        return *this;
    }
    constexpr modint &operator/=(modint rhs) noexcept {
        u64 exp = Modulus - 2;
        while (exp) {
            if (exp % 2) {
                *this *= rhs;
            }
            rhs *= rhs;
            exp /= 2;
        }
        return *this;
    }
    constexpr modint &operator^=(u64 exp) {
        modint rhs = modint(*this);
        a = 1;
        while (exp) {
            if (exp % 2) {
                *this *= rhs;
            }
            rhs *= rhs;
            exp /= 2;
        }
        return *this;
    }
};
using mint = modint<MOD>;
vector<mint> f, fi;
void comb(int n) {
    f.resize(n + 1);
    fi.resize(n + 1);
    f[0] = 1;
    for (ll i = 1; i <= n; i++) {
        f[i] = f[i - 1] * mint(i);
    }
    fi[n] = mint(1) / f[n];
    for (ll i = n - 1; i >= 0; i--) {
        fi[i] = fi[i + 1] * mint(i + 1LL);
    }
}
mint ncr(ll n, ll r) {
    if (n < r) {
        return mint(0);
    }
    if (r == 0) {
        return mint(1);
    }
    return f[n] * fi[n - r] * fi[r];
}
template <class T> vector<T> fzt(vector<T> a, bool toUpper) {
    int n = a.size();
    for (int i = 1; i < n; i <<= 1)
        for (int j = 0; j < n; j++)
            if ((j & i) == 0) {
                if (toUpper) {
                    a[j] += a[j | i];
                } else {
                    a[j | i] += a[j];
                }
            }
    return a;
}
int main() {
    cin.tie(0);
    ios::sync_with_stdio(false);
    int n;
    cin >> n;
    vector<ll> a(1 << 20);
    for (int i = 0; i < n; i++) {
        int aa;
        cin >> aa;
        a[aa]++;
    }
    a = fzt(a, true);
    mint res = 0;
    for (int i = 0; i < (1 << 20); i++) {
        if (__builtin_popcount(i) % 2) {
            res -= (mint(2) ^ a[i]) - mint(1);
        } else {
            res += (mint(2) ^ a[i]) - mint(1);
        }
    }
    cout << res.a << endl;
}


Measured memory_bytes: 19124