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1. Field of the Invention The present invention relates to a hard film, a sliding part, and a method of manufacturing the sliding part. 2. Description of the Related Art Techniques for reducing the friction of sliding parts have been intensively studied to contribute to reduction of fuel consumption in internal combustion engines and to improvement in the working life of parts. Their typical examples are development for the solid lubrication films and development of texturing allowing a desired concavo/convex shape to be formed on the surface. Solid lubrication films exhibit satisfactory effects in a circumstance with no lubrication and, in contrast, the texturing, which uses a structure in which lubrication oils are accumulated, effectively functions in a circumstance where the lubrication oils are used. Further, by combining the techniques described above, a technique in which the solid lubrication film and the texture coexist has been devised. Such a combined technique is applied to a sliding circumstance where the thickness of the oil membrane of the lubrication oil changes or to a lubrication circumstance where the thickness of the oil membrane is thin and a solid contact is innegligible. A technique of providing a concavo/convex shape to the surface of a film has been developed as in JP-2002-235852-A and JP-H06 (1994)-41721-A. According to JP-2002-235852-A, a film having a plateau shape at the surface prevents oil run out and exhibits a low friction property in a lubrication oil. According to JP-H06 (1994)-41721-A, a hard film having a truncated concavo/convex shape ensures oil retention and thus has anti-galling property and wear resistance. Meanwhile, DLC (Diamond-like Carbon) is a typical material for a solid lubrication film. DLC is well-known as a film adapted to allow high hardness and self-lubrication property to coexist. DLC is a film which is a material also referred to as amorphous carbon, a-C (amorphous carbon), a-C:H (hydrogenated amorphous carbon), i-C (i-carbon), and hard carbon. The film deposition method of DLC includes a PVD method or a plasma CVD method such as sputtering and arc ion plating, wherein when a hydrocarbon gas is used for the starting material, a carbon film containing hydrogen is formed. The micro structure of DLC is an amorphous structure including both sp2 bonding and sp3 bonding as bonding of carbon atoms to each other but not having a distinct crystal structure (not having grain boundary). DLC can provide high hardness and high toughness in comparison with a crystalline hard film made of TiN (titanium chloride), TiAlN (titanium aluminum nitride), and CrN (chromium nitride), or the like. DLC has a low friction coefficient since it has self-lubricity derived from the sp2 bonding. However, DLC suffers from deterioration of film quality such as a decrease in film strength or formation of defects on the surface in a temperature region of 300° C. or higher, with DLC having heat resistant temperature that is remarkably low compared with about 500° C. of TiN and about 800° C. of TiAlN. Since the friction surface is at a high temperature state