prompt_front: Now, answer the following question based on the text below, only give me the answer and do not output any other words.

Question: Who compiled the 88-page letter to the HHS regarding vaccine safety?

Read the following text and answer briefly.

Context 1: A special tribute to Del Bigtree (pictured) and his team at ICAN for his stunning 88 page letter to the HHS regarding vaccine safety  As Del reported - in the latest edition of Highwire - the letter, in response to an earlier reply from the then acting Director National Vaccine Program Office, Melinda Wharton, took virtually a year to compile, and is a meticulous piece of research  Most sensationally they researched the HHS claim through US government archives that at least some pediatric vaccines had been trialed against genuine placebo, and came to a negative conclusion  Not only that, they established that none of the vaccines those vaccines had been trialed against had ever been trialed against genuine placebo either  At the end of the line the toxic products were only being compared with other toxic products, rather than against saline 
Leave aside the sceptics, for any believer in the vaccine program as a necessary intervention in public health, this should be a devastating finding  Fundamentally, the research into the safety of any of the products before marketing was simply not there  The manufacturers apparently had no faith that their proto-products could withstand this scrutiny, and for the rest they just did not care: under the alleged imperative of protecting the population it seems anything went  So even before all the sham monitoring procedures and reviews which Del and his team dismantle in forensic detail we are left with the proposition that none of the present products being given to US children – and frequently other children across most of the developed world – have any meaningful pre-marketing safety data all  If you are believer in the program you have been let down: if you wanted a program with any pretensions to safety - supposing such a thing to be possible - it looks like you would have to start from scratch  The manufacturers did this: the governments, the politicians and the regulators (internationally) let it happen 
This damning document is published simultaneously with a demand in the UK from the Royal Society for Public Health (which I had never heard of) to shut down comment about vaccines on the web  It echoes calls from Seth Berkley of GAVI, Heidi Larson of the Vaccine Confidence Project and the European Parliament  The pamphlet airily dismisses concerns that vaccines have side effects or that you could possibly have too many  It is pure public relations, and if the RSPH claims to be "independent" it also admits that the publication was paid for by Merck, a detail which was reported by British Medical Journal and the Guardian, but not true to form by the BBC  We have, in truth, been building to this moment for two decades: as the evidence piles up that every single aspect of the program lacks integrity or is simply rotten to the core all the perpetrators can do is call for the silencing of their critics, and maintain the products are safe because they say so 
Please help give the ICAN letter the widest possible distribution, particularly to politicians 
"The outcome of disease always depends both on the virulence of the pathogen and the health of the individual immune system "
Nope  This makes no sense  Lots of people who seemed vibrant will get a very severe case of the same illness that a vulnerable baby overcomes in a day 
And under the germ theory it doesn't matter how strong your immune system *was*  Once it's been overcome by the pathogen it is every bit as weak as anybody else's with that pathogen 
What you say makes no sense  There's no reason for me to reply to you again 
"Why do you think that within a few years (not many) of the introduction of the vaccines for them, pertussis, measles, mumps, rubella, tetanus, diphtheria, Hib disease, and chickenpox (and others) almost entirely disappeared?"
Why do you keep asking this question when I've already provided the answer hundreds of times? Why are you so desperate to believe the people who you already recognize are harming our children?
Why would Walter Reed be any more trustworthy than Paul Offit or Senator Pan? Why would Jenner or Pasteur?
And you went no way to explaining my arguments against germ theory  If we are attacked by billions of viruses every day then if even a tiny fraction of them are pathogenic then we couldn't possibly survive  And even if we could, we would already be immune rendering every vaccine pointless  Once we had survived our first few days on earth, then we could never get sick again 
If that's wrong then we must conclude that precisely 0% of germs are pathogenic 
Plus your comment about the immune system completely misunderstood my point  The immune system does not allow us to overcome our math problem  In fact, it makes it worse 
You did provide one solitary example of a patient with what are presumably yellow fever symptoms but you didn't say whether they had been given any toxic medical treatments 
And like I said before, the whole "incubation period" is more than a little suspicious  Clearly they never found what they thought they would and just rigged the results to tell them what they want to hear 
Like every other germ theorist/vaccine promoter in history 
Many kinds of bacteria are constantly evolving and changing, like flu viruses  Others are more stable over time, like the yellow fever virus  Those that change develop new ways of infiltrating the cells of the organism being attacked (from our point of view, from its unconscious point of view, it's just carrying out its need to replicate, which it can only do inside the cells of its host)  The changes which allow it to better infiltrate are more successful and result in more viruses with those traits 
Our immune system is designed to detect and destroy potentially dangerous invading pathogens  Many bacteria are usually harmless and absolutely necessary  The minority are dangerous, and most people's immune systems do a good job of analyzing them and killing them, often with no signs of disease  Others experience a clinical infection, and the immune system usually mounts a successful attack on them 
The outcome of disease always depends both on the virulence of the pathogen and the health of the individual immune system  Vaccines are usually effective in giving immunity to the targeted diseases  They also have many dangers which everyone should be aware of, and vaccines should be avoided whenever possible  But in the case of the most dangerous diseases, everyone should learn about them and think about what he wants to do to protect himself and his children from them, considering all the factors involved  And no one can have 100% certainty that he has made the right decision, but that's life  But if you live in the Congo and many people around you are currently dying of yellow fever, then that means that you yourself are at risk of being bitten by a loaded mosquito and getting, often dying, of yellow fever  The yellow fever vaccine is very effective at preventing yellow fever  From there, each person must make a choice 
At the end of this stage there is a remission of two or three days  About 80% of those with clinical disease recover at this point, with permanent immunity  The other 20% enter the toxic stage, with a return of the fever, black vomit (coffee-ground emesis), diarrhea, a slowing of the pulse (Faget's sign), jaundice, yellow eyes, yellow skin, and failure of the kidneys, liver, and heart  The patient gets a strange hiccup (like with Ebola, a related disease), falls into a coma, and dies  About half of those patients who enter the toxic stage dies, even now, even with the best of hospital care  The Faget's sign can also occur at the end of the first stage 
You asked specifically about the symptoms of the Americans on Dr  Reed's team who got yellow fever in Cuba in 1900  I'll give the passage from The American Plague (162-5), which describes the course of Jesse Lazear's illness  "In his logbook, Lazear wrote an unusual entry on September 13  In all cases before those, page after page of records, Lazear had used the soldier's name and simply the date he was bitten, with no other attention to the mosquito  A one-line entry with a name and a date  On that day, however, in his elegant hand, Lazear did not write the soldier's name, but instead wrote 'Guinea Pig No  1 ' He went on to write that this guinea pig had been bitten by a mosquito that developed from an egg laid by a mosquito that developed from an egg laid by a mosquito that fed on a number of yellow fever cases: Suarez, Hernández, De Long, Ferández  It was a precise, detailed history that proved beyond doubt that the mosquito was loaded with the virus when it bit a healthy soldier   (If he had entered his name, then his death would have been considered medical suicide by the insurance company, and his wife and two children would not have gotten any payment ) For the next few days, Lazear's life continued much as it had over the last few months in Cuba  He fed and cared for the mosquitoes in the lab    Then he began to lose his appetite  He skipped a few meals in the mess hall  He didn't mention it to anyone, nor did he ask to see one of the yellow fever doctors; instead, he worked hard in the lab trying to ignore the oncoming headache 
"On September 18, he complained of feeling 'out of sorts,' and stayed in his officer's quarters  His head pounded and L  decided to write a letter    (he wrote to his mother, and referred to his one-year old son Houston and the baby his wife Mabel was about to have: they were staying with his mother in the US)    That night, L  started to feel chilled as the fever came on  He never went to sleep but worked at his desk all through the night, trying to get all the information about the mosquitoes organized  By morning, he showed all the signs of a severe attack of yellow fever  The camp doctors made the diagnosis, and L  agreed to go to the yellow fever ward    L  was carried by litter out of the two-room, white pine board house in which he had lived since he and Mabel first arrived in Cuba    (In the yellow fever ward, in a separate one-room building), Lena Warner (the immune nurse who had survived the yellow fever in 1878, when she was nine, and was found in her boarded-up house by a former slave who first thought she was dead, and carried her to safety) nursed J L , recording his vitals  (I put up a link to his case record and vital signs last week  The surgeon general required that this record be made for every yellow fever patient )    (On September 25,) Lena Warner braced L's arms with all of her weight, shouting for help  Still he bolted from the bed, darting around the small frame-wood room as wildly as a trapped insect beating against glass  Two soldiers ran into the ward, pinning L to his bed, tying restraints around his wrists and elbows    Warner sponged his body with iced whiskey and water  She recorded his temperature, which had held at 104 degrees for days, on the chart beside his bed    (Warner watched him sleep ) But the quiet did not last  L's body began to lurch, and black vomit rolled from his mouth; through the bar hanging above his hospital cot  He writhed in the bed, and his skin grew deep yellow  His 104 temperature slowly fell, leveling out 99 degrees, and JL died at 8:45 p m  at the age of thirty-four "
As is obvious, there are many problems with vaccines  But, that being said, most of them usually work for a period of time to prevent the targeted diseases  The basic science behind vaccines is correct  Why do you think that within a few years (not many) of the introduction of the vaccines for them, pertussis, measles, mumps, rubella, tetanus, diphtheria, Hib disease, and chickenpox (and others) almost entirely disappeared? In the case of the routine childhood diseases, this was a bad thing, but it is a true thing 
Vaccines usually don't cause any obvious reactions  While they usually prevent the diseases, and that's why people continue to get them  With the increasing vaccination schedule, more and more are severely and permanently damaged, and it is immoral to mandate any vaccine for anyone for this reason  But it would also be immoral to prohibit vaccines for those who want them enough to take the risk 
Your article said as though it had any probative value that 90% of those who get pertussis had been vaxxed  The old DPT vaccine was MUCH more effective at preventing pertussis, but it was so dangerous (again, not to most, but to many), that developed countries replaced it with the acellular version, DTaP  From the beginning about twenty years ago, it was clear that it was not very effective and that huge numbers of vaxxed people got pertussis anyway, including my daughter who got pertussis at eight month old after having gotten three DTaPs  The pertussis vaccine continues to be very dangerous, and I do not recommend that anyone get it  It used to be a killer disease, but evolved to become much milder, to the extent that the disease is very rarely dangerous (usually only to newborns under three months old), while the vaccine is very dangerous  And they're trying to see how they can go back to the old DPT  This does not show that vaccine science has collapsed, but rather that the vaccine they developed to replace the DPT turned out to be much less effective than they first thought, while continuing to be much more dangerous than they first thought 
Your article extrapolated from that that modern medical science in general has collapsed, but that, again, is going too far  A older woman in Mexico City who is like my mother to me had a pacemaker inserted about two months ago to aid her failing heart, and it has restored her to optimism and energy, when she was despondent, weak, and close to death  I took my daughter to the dentist yesterday, who said she has three wisdom teeth coming in and that she said that the lower right one was sore  So, although I am cautious about X-rays, I made an appointment for a panoramic X-ray in a month to assess the wisdom teeth, and, if it seems appropriate, I'll take her to an oral surgeon to have one or more extracted under IV sedation, in his office, if possible (the dentist thought that it would be)  And I am confident that there will be no serious problems, but this is thanks to technology and training in modern medicine that haven't been available for that long 
I think that everyone should inform himself on all medical procedures before agreeing to anything, but I also think that he should have access to any medical procedure which is reasonable (and opinions can differ as to that) 
One problem is that you have not said how you think people should protect themselves against tetanus, bacterial meningitis, and yellow fever in the relevant cases, for example  These are diseases which healthy, well-nourished people used to die from very readily 
If most people stopped vaxxing and the mortality from these diseases rose to something like pre-vaccine levels, do you think they should just accept dying from them?
I put that in a separate paragraph because it is the crucial issue 
balinaheuchter Air Traffic Control You Tube - Colin Campbell example of - How to "Fudge a Nudge" -"Deal" or "No Deal" "Not in a month of Sundays" "No exceptions/no compromise?" -make a trade off -do an exception- everyone get's a good deal /good outcome!
Hans, you are right that we are looking at one of the biggest crimes in all history  When I read the story of that poor girl who was so healthy and is now confined to a wheelchair after getting her third Gardasil shot I could not believe that Merck could produce such a toxic vaccine and give it out to girls like it was something they absolutely had to have only to be mislead and made into cripples  Merck should be prosecuted for the damage they have done to so many girls who got the Gardasil vaccine and were physically debilitated for life  There is a place for the people who perpetrated this crime on young girls and women and it is called hell  They have destroyed people's lives and gotten away with it  My heart goes out to those who have suffered this damage for no damn good reason except to help make huge profits for Merck!
Here is the reason that the germ theory is nonsense 
1) Everyday we are bombarded with billions of germs  Presumably at least some of them are of the kind that germ theorists believe are dangerous (otherwise we would have to conclude that none of them are dangerous)  So how do we survive?
2) Let's just say that we ignore 1 and imagine that, by way of magic, none of the billions of viruses we get bombarded with are pathogenic but all those that are are tucked away somewhere  Ok  But presumably they reside in sick people right? So where are there lots of sick people? Doctor offices and hospitals! So everybody must be dying the moment they enter these places right?
3) I love this one because I have never seen anybody else ever raise it  Under the germ theory there are no negative feedbacks  This makes a stable biological system by definition impossible  The immune system is *not* a negative feedback it is the opposite  It actually reinforces our math problem because the immune system will weaken as the number of pathogens increase 
There is no way of resolving this problem without a discontinuity  A Deus ex Machina as The Almighty Pill so beautifully put it  So the germ theory is quite literally, mathematically impossible 
There is as much chance of it being true as 2+2 = 5 
There are plenty of other massive problems with germ theory such as why did things like SARS and bird flu magically disappear? Why do we have the symptoms that we do? Is our body controlling the symptoms to help fight the germs and if so, why would suppressing the symptoms with antibiotics or Tamiflu be considered a good idea? If the virus is causing the symptoms then why would it cause these kinds of things?
Context 2: Paper Info

Title: Specific-heat ratio effects on the interaction between shock wave and heavy-cylindrical bubble: based on discrete Boltzmann method
Publish Date: May 29, 2023
Author List: Yanbiao Gan (from School of Liberal Arts and Sciences, Hebei Key Laboratory of Trans-Media Aerial Underwater Vehicle, North China Institute of Aerospace Engineering), Yudong Zhang (from School of Mechanics and Safety Engineering, Zhengzhou University)

Figure

Figure 1: Research orientation and tasks of DBM 
Figure 2: Sketch of D2V16 model The numbers in the figure represent the index i in Eq  (3) 
Figure 3: The computational configuration of the shock-bubble interaction 
In the figure, results from odd rows are experimental, and the even rows indicate DBM simulation results The typical wave patterns and bubble's main characteristic structures are marked out in the figures Numbers in the pictures represent the time in µs Schlieren images of DBM results are calculated from the density gradient formula, i e , |∇ρ|/|∇ρ| max , with |∇ρ| = (∂ ρ/∂ x) 2 + (∂ ρ/∂ y)2  At t = 0µs, the incident shock wave impacts the upstream interface, and subsequently generates a transmitted shock (TS) propagating downstream in the bubble and a reflected shock wave moving upward in ambient gas The incident shock wave travels downstream contin-
The definitions and the corresponding physical meanings of the common TNE quantities in DBM, where the operator ∑ ix,iy indicates integrating over all the fluid units and multiply the unit area dxdy From a certain perspective, the TNE strength is increasing; While from a different perspective, the TNE strength, on the other hand, may be decreasing It is one of the concrete manifestations of the complexity of non-equilibrium flow behavior 
Figure 4: Snapshots of schlieren images of the interaction between a shock wave and a heavy-cylindrical bubble The odd rows represent experimental results from Ref  [31] with permission, and the even rows are DBM simulation results The typical wave patterns and the bubble's main characteristic structure are marked out in the figures Numbers in the picture represent the time in µs 
Figure 5: The temporal variations of length and width of the bubble The symbols represent DBM results and the lines are experimental The definition of the length and the width of the bubble can be seen in the illustration Experimental results are obtained from Fig  12, in Ref  [31] with permission 
Figure 6: Density contours and particle tracer images at three different moments (i e , t = 0 07,t = 0 11, and t = 0 16) with various specific-heat ratios The odd rows represent density contours, and the even rows are tracer particle images 
Figure 9: Vorticity contours at t = 0 134, with various specific-heat ratios The arrows in the vorticity image point out the apparent difference between case γ = 1 4 and case γ = 1 09 
Figure 11: Density contours (first row) and mixing degree M (second row) at several typical moments 
Figure 13: (a) Temporal evolution of D * 3,1 and D * 4,2  (b) Temporal evolution of D * 2 and D * 3  Lines with different colors represent the cases with various specificheat ratios 
The development of schemes for checking TNE state, extracting TNE information and describing corresponding TNE effects in DBM 

abstract

Specific-heat ratio effects on the interaction between a planar shock wave and a two-dimensional heavy-cylindrical bubble are studied by the discrete Boltzmann method  Snapshots of schlieren images and evolutions of characteristic scales, being consistent with experiments, are obtained  The specific-heat ratio effects on some relevant dynamic behaviors such as the bubble shape, deformation process, average motion, vortex motion, mixing degree of the fluid system are carefully studied, as well as the related Thermodynamic Non-Equilibriums (TNE) behaviors including the TNE strength, entropy production rate of the system 
Specifically, it is found that the influence of specific-heat ratio on the entropy production contributed by non-organized energy flux (NOEF) is more significant than that caused by non-organized momentum flux (NOMF)  Effects of specific-heat ratio on entropy production caused by NOMF and NOEF are contrary 
The effects of specific-heat ratio on various TNE quantities show interesting differences  These differences consistently show the complexity of TNE flows which is still far from clear understanding 

Introduction

The applications of shock-accelerated inhomogeneous flows (SAIFs) are of significant value in biomedicine, energy utilization, and astrophysics fields, including but not limited to scenarios such as the impact of shock waves on kidney stones, the interaction between shock waves with foams, the impacting of detonation wave with burning flames in supersonic combustion systems, the formation of supernova remnants, etc  
Shock-bubble interaction (SBI) is one of the most fundamental problems in the research of SAIFs  Its applications and academic research are interdisciplinary  Generally, there are two kinds of problems encountered in SBI research: (i) The geometry of shock waves, the shape of material interfaces, and the structure of container are complex in the actual scene 
They will result in various wave patterns and significantly affect the flow morphology and bubble's evolution  (ii) There usually exist multi-physics coupling problem in the engineering application of SBI  Such as the supersonic combustion machines  When the shock waves passing through the reactants, it may lead to phase transition and chemical reactions, making the flow morphology more complex and inducing small structure (or fast-changing pattern)  
In an underwater explosion experiment, the interaction between shock waves and bubbles may refer to the cavitation and annihilation effects  The other scene is the inertial confinement fusion (ICF), in which the laser ablation, electron heat conduction, self-generated electromagnetic field, radiation, and many other factors may complicate the investigation of hydrodynamic instabilities  
Commonly, research on SBI mainly includes three methods: theoretical derivation, experiment, and numerical simulation  As a fundamental research method, theoretical research can provide a clear understanding of physical processes  In 1960, Rudinger et al  developed a theory that permits computing the response of bubbles to accelerations  
In order to describe the formation and evolution processes of vortex structure quantitatively, many scholars have developed circulation models   However, theoretical works provide limited information  Meanwhile, in the late stage of SBI evolution, the bubble deformation and flow morphology dominated by the developed Richtmyer-Meshkov instability (RMI) and Kelvin-Helmholtz instability (KHI) are difficult to be predicted accu-rately 
As the research method closest to engineering application, the experimental results are often regarded as standard results to verify the rationality and accuracy of theoretical and numerical works  To study the SBI process accurately, the scholars have made a series of improvements to experimental equipment or technique, including the generation techniques of different types of shock waves, interface formation methods, schlieren facilities, and image recognition techniques  
Among these, two of important and valuable works are performed by Ding et al   Based on the soap film technique, they formed kinds of initial interfaces with different curvatures through the wire-restriction method and captured the wave patterns and interface evolution with high-speed schlieren photography  
Other works, such as evolutions of a spherical gas interface under reshock conditions , developments of a membrane-less SF 6 gas cylinder under reshock conditions , and interactions of a cylindrical converging shock wave with an initially perturbed gaseous interface , are also performed by many other scholars 
However, we know that the experimental studies mainly depend on the experimental platform  When studying some complex and demanding condition problems, it takes much work to build the experimental platform  In this situation, numerical simulation research becomes an option  Generally, there are three kinds of physical modeling methods (or models) for SBI numerical research, i e , the macroscopic, mesoscopic, and microscopic modeling methods 
Most of the existing numerical researches on SBI are related to the macroscopic modeling methods (such as the Euler and Navier-Stokes (NS) models) based on the continuous hypothesis (or equilibrium and nearequilibrium hypothesis)   For example, presented the computational results on the evolution of the shock-accelerated heavy bubbles through the multi-fluid Eulerian equation  
There also exist a few SBI works based on the mesoscopic modeling method, such as the Direct Simulation Monte Carlo method   The microscopic modeling methods such as the Molecular dynamics (MD) simulation, is capable of capturing much more flow behaviors but restricted to smaller spatiotemporal scales because of its huge computing costs 
In the numerical research on SBI, three points need to be concerned  (i) Investigation of kinetic modeling that describes the non-continuity/non-equilibrium flows  Most of the current researches are based on macroscopic models  However, there exist abundant small structure (and fast-changing patterns) behaviors and effects such as the shock wave, boundary layer, material defects, etc 
For cases with small structures, the mean free path of molecules cannot be ignored compared to the characteristic length, i e , the non-continuity (discreteness) of the system is pronounced, which challenge the rationality and physical function of the macroscopic models based on the continuity hypothesis 
For cases with fast-changing patterns, the system dose not have enough time to relax to the thermodynamic equilibrium state, i e , the system may significantly deviate from the thermodynamic equilibrium state  Therefore, the rational-ity and physical function of the macroscopic models based on the hypothesis of thermodynamic equilibrium (or near thermodynamic equilibrium) will be challenged 
(ii) Improvement of method that describes the evolution characteristics of bubbles and flows morphology  Most of the studies describe bubble characteristics and flows morphology from a macroscopic view  The mesoscopic characteristics such as the kinetic effects which help understand the kinetic process, are rarely to be studied 
(iii) Further studies of effects of specific-heat ratio on SBI process  The specific-heat ratio is an essential index for studying the compressibility of the gas  Research from Igra et al  has shown that the differences in the specific-heat ratio of bubbles would cause various wave patterns and pressure distribution inside the bubbles during the interaction process  
Besides, many works on hydrodynamic instability have also demonstrated the importance of investigating the specific-heat ratio effect   Among these, Chen et al  investigated the specific-heat ratio effects on temperature gradient and the TNE characteristics of compressible Rayleigh-Taylor (RT) system  
For the above three points, in this work we apply the recently proposed discrete Boltzmann method (DBM)   The Lattice Boltzmann Method (LBM) research has two complementary branches   One aims to work as a kind of new scheme for numerical solving various partial differential equation(s)  The other aims to work as a kind of new method for constructing kinetic model to bridge the macro and micro descriptions 
The two branches have different goals and consequently have different rules  The current DBM is developed from the second branch of LBM and focusing more on the Thermodynamic Non-Equilibrium (TNE) behaviors that the macro modeling generally ignore  It breaks through the continuity and near-equilibrium assumptions of traditional fluid modeling, discards the lattice gas image of standard LBM, and adds various methods based on phase space for checking, exhibiting, describing and analyzing the non-equilibrium state and resulting effects 
More information extraction technologies and analysis methods for complex field are introduced with time  The numerical simulation includes three parts, as shown in Fig    (1) Physical modelling, (2) Algorithm design, (3) Numerical experiments and analysis of complex physical fields  The research of equation algorithm corresponds to the part (2) of the above three parts 
The DBM aims at parts (1) and (3) of the three mentioned above  It belongs to a physical model construction method rather than a numerical solution for the equations  The tasks of DBM are to: (i) Ensure the rationality of the physical model (theoretical model) and balance the simplicity for the problem to be studied; (ii) Try to extract more valuable physical information from massive data and complex physical fields 
Based on the coarse-grained modeling method of nonequilibrium statistical physics, the DBM aims to solve the following dilemma: (i) The traditional hydrodynamic modelings are based on the continuous hypothesis (or near-equilibrium hypothesis)  They only concern the evolution of three conserved kinetic moments of the distribution function, i e  the density, momentum and energy, so their physical functions are insufficient 
(ii) The situation that the MD can be used is restricted to too small spatial-temporal scales  The physical requirement for the modeling is that except for the Hydrodynamic Non-Equilibriums (HNE), the most related TNE are also needed to be captured  Theoretically, the Boltzmann equation is suitable for all-regime flows, including the continuum regime, slip regime, transition regime, and free molecule flow regime 
Based on the Chapman-Enskog (CE) multiscale analysis , through retaining various orders of Kn number (or considering different orders of TNE effects), the Boltzmann equation can be reduced to the various orders of hydrodynamic equations  They can be used to describe the hydrodynamic behaviors, i e , the conservations of mass, momentum and energy , in corresponding flow regimes 
Because what the traditional hydrodynamic equations describe are only the conservation laws of mass, momentum and energy  Consequently, it should be pointed out that, the information lost in the traditional hydrodynamic equations increases sharply with increasing the Kn number  With increasing the Kn number, to ensure the describing capability not to decrease significantly, the more appropriate hydrodynamic equations should be the Extended Hydrodynamic Equations (EHEs) which include not only the evolution equations of conserved kinetic moments but also the most relevant nonconserved kinetic moments of distribution function 
For convenience of description we refer the modeling method that derives EHEs from the fundamental kinetic equation to Kinetic Macroscopic Modeling (KMM) method  It is clear that, the complex process of CE expansion is necessary and the simulation is still based on the macroscopic equations in KMM  As a comparison, the DBM is a kind of Kinetic Direct Modeling (KDM) method 
In DBM modeling, the CE analysis is only used to quickly determine which kinetic moments should keep values unchanged, the final EHEs are not needed, and the simulation is not based on the complicated EHEs  As the TNE degree of the flow to be described rises gradually, the complexity of the derivation process and difficulty of numerical simulation in the KMM method increase sharply 
However, in the DBM method, to describe flows in a one-order more deeper depth of TNE, only two more related kinetic moments need to be added  Since without needing to derive and solve the EHEs, as the TNE degree deepens, the complexity of the DBM approach increases much slower than that of KMM method 
The core step in DBM modeling is to provide a feasible scheme for detecting, describing, presenting, and analyzing TNE effects and behaviors beyond traditional macroscopic modeling  Based on the non-equilibrium statistical physics, we can use the non-conservative moments of ( f − f eq ) to describe how and how much the system deviates from the thermodynamic equilibrium state and to check corresponding effects due to deviating from the thermodynamic equilibrium 
The non-conservative moments of ( f − f eq ) open a phase space, and this space and its subspaces provide an intuitive geometric correspondence for describing complex TNE system properties  The development of schemes for checking TNE state, extracting TNE information and describing corresponding TNE effects in DBM are seen in Table  
Actually, this set of TNE describing methods has been applied in many kinds of complex fluid systems such as hydrodynamic instability system , combustion and detonation systems , multiphase flow system , plasma system , etc  Besides the scheme for detecting, describing, presenting, and analyzing TNE effects and behaviors, the DBM incorporates other methods for analyzing the complex physical field 
One of them is the tracer particle method  The introduction of the tracer particle method makes the gradually blurred interface appear clearly   The rest of the paper is structured as follows  Section 2 shows Year Scheme for investigating TNE effects and behaviors Before 2012 Two classes of LBMs did not show a significant difference in physical function 
2012 Use the non-conservative moments of ( f − f eq ) to check and describe TNE   This is the starting point of current DBM approach  2015 Open TNE phase space based on non-conservative moments of ( f − f eq ) and define a TNE strength using the distance from a state point to the origin  This is the starting point of the phase space description method  
2018 Extend the distance concepts in phase space to describe the TNE difference/similarity of TNE states and kinetic processes   2021 Further extend the phase space description methodology to any set of system characteristics   the modeling method  Then, the numerical simulations and results are presented in Section 3, which includes two subsections 
Section 4 concludes the paper  Other complementary information is given in the Appendix 

Model construction

Based on the Bhatnagar-Gross-Krook (BGK) singlerelaxation model, a two-fluid DBM with a flexible specific-heat ratio is presented in this part  From the origin Boltzmann equation to a DBM, four fundamental steps are needed: (i) Simplification and modification of the Boltzmann equation according to the research requirement 
(ii) Discretization of the particle velocity space under the condition that the reserved kinetic moments keep their values unchanged  (iii) Checking the TNE state and extracting TNE information  (iv) The selection/design of the boundary conditions 

Simplification and modification of the Boltzmann equation

As we know, the collision term in the original Boltzmann contains high dimensional distribution functions  Therefore, the direct solution to it needs too much computing consumption  The most common method to simplify the collision operator is to introduce a local equilibrium distribution function ( f eq ) and write the complex collision operator in a linearized form, i e , the original BGK collision operator − 1 τ ( f − f eq ), where τ is the relaxation time  
The original BGK operator describes the situation where the system is always in the quasi-equilibrium state  Namely, it characterizes only the situation where the Kn number of the system is small enough and f ≈ f eq   The currently used BGK operator for non-equilibrium flows in the field is a modified version incorporating the meanfield theory description  
Based on the above considerations, the simplified Boltzmann equation describing the SBI process is where the two-dimensional equilibrium distribution function is ) where ρ, T , v, u, I, R, and η are the mass density, temperature, particle velocity vector, flow velocity vector, the number of the extra degrees of freedom including molecular rotation and vibration inside the molecules, gas constant, and a free parameter that describes the energy of the extra degrees of freedom, respectively 
The specific-heat ratio is flexible by adjusting parameter I, i e , γ = (D + I + 2)/(D + I), where D = 2 represents the two-dimensional space 

Discretization of the particle velocity space and determination of f σ ,eq i

The continuous Boltzmann equation should be discretized for simulating  Specifically, the continuous velocity space can be replaced by a limited number of particle velocities  So that the values of continuous kinetic moments can be obtained from the summation form of kinetic moments  In this process, it requires the reserved kinetic moments, which are used to characterize the system behaviors, keep their values unchanged after discretizing the velocity space 
Namely, f the reserved kinetic moments  According to the CE analysis, f can be expressed by f eq   Therefore, in the process of discretization, the reserved kinetic moments of f eq should keep their values unchanged, i e , where i represents the kind of discrete velocities and α (α = x or y) is the direction in cartesian coordinate 
To simulate the interaction between two different fluids, a two-fluid DBM should be constructed  Based on the singlerelaxation model, the discrete two-fluid Boltzmann equation can be written as : where σ represents the types of material particle and f σ ,eq i = f σ ,eq i (ρ σ , u, T)  In two-fluid DBM, the macroscopic quantities of the mixture and each component are
where ρ σ and u σ are the mass density and flow velocity of the component σ , respectively  ρ and u represent the mass density and flow velocity of the mixture, respectively  There exist two kinds of temperature (internal energy) definitions in two-fluid DBM because the definition of temperature (internal energy) depends on the flow velocity to be chosen as a reference 
The first definition is by choosing the velocity of the mixture to be a reference, i e , So that the expressions of temperature of component σ and mixture are where We can also choose the flow velocity of component as a reference, i e , , where u σ is the flow velocity of component σ   The corresponding definitions of temperature for component σ and the mixture are
where ∆E * I is It is clear to see that these two definitions of temperature for mixture are the same, but for temperature of component σ are different  We choose the first definition in this manuscript  To solve the Eq  ( ), it is necessary to determine the values of f σ ,eq i   Its values depend on the reserved kinetic moments which characterize the main system behaviors 
In DBM modeling, the CE multiscale analysis is used to determine quickly the reserved kinetic moments  Specifically, when constructing a DBM which only the first order term of Kn number is retained (i e , only the first order TNE effects are retained), seven kinetic moments should be reserved, i e , the M 0 , M 1 , M 2,0 , M 2 , M 3,1 , M 3 , M 4,2  
Two more kinetic moments ( M 4 and M 5,3 ) are needed when the second order TNE is considered   However, it should be noted that the function of CE analysis in DBM modeling is only to determine the kinetic moments that need to be preserved  Whether or not to derive the hydrodynamic equations does not affect the DBM simulation 
The kinetic moments used in our physical modeling are shown in the Appendix B  Their expressions can be obtained by integrating v and η with continuous-form f eq   For better understanding, the Appendix C gives the two-fluid hydrodynamic equations recovered from the Boltzmann equation  The kinetic moments in Appendix B can be written in matrix form, i e , C • f σ ,eq = fσ,eq , (
where C is the matrix of discrete velocity and feq represents the kinetic moments  A proper discrete velocity model is needed to confirm the values of f σ ,eq i   The f σ ,eq can be obtained by solving the inverse matrix, i e , f σ ,eq = C −1 • fσ,eq , where C −1 is the inverse matrix of C  It is very convenient to obtain the inverse matrix of C through some mathematical softwares such as Mathematica, etc 
The D2V16 model is chosen in this paper, its sketches can be seen in Fig    The specific values of D2V16 are given in the following equations: where "cyc" indicates cyclic permutation and c is an adjustable parameter of the discrete velocity model  The sketch of η in D2V16 is η i = η 0 for i = 1 − 4, and η i = 0 for i = 5 − 16 

Checking the TNE state and extracting TNE information

Many physical quantities can characterize the degree of TNE in a fluid system, such as relaxation time, Kn number, viscosity, heat conduction, the gradients of macroscopic quantity, etc  They are all helpful to characterize the TNE strength and describe the TNE behaviors of a fluid system from their perspectives 
But it is not enough only relying on these quantities  Besides the above physical quantities describing the TNE behaviors, in DBM modeling, we can also use the non-conservative moments of ( f − f eq ) to characterize the TNE state and extract TNE information from the fluid system  Fundamentally, four TNE quantities can be defined in a firstorder DBM, i e , ∆ σ * 2 , ∆ σ * 3,1 , ∆ σ * 3 , and ∆ σ * 4,2  
Their definitions can be seen in Table , where v * i = v i − u represents the central velocity and u is the macro flow velocity of the mixture  Physically, ∆ σ * 2 = ∆ σ * 2,αβ e α e β and ∆ σ * 3,1 = ∆ σ * 3,1 e α represent the viscous stress tensor (or non-organized momentum flux, NOMF) and heat flux tensor (or non-organized energy flux, NOEF), respectively 
The e α (e β ) is the unit vector in the α (β ) direction  The later two higher-order TNE quantities contain more condensed information  Specifically, and it indicates the flux information of ∆ σ * 2   To describe the TNE strength of the whole fluid system, some TNE quantities contained more condensed information are also defined, i e ,
Other TNE quantities can be defined based on specific requirements  All the independent components of TNE characteristic quantities open a highdimensional phase space, and this space and its subspaces provide an intuitive image for characterizing the TNE state and understanding TNE behaviors   It should be emphasized that: (i) The TNE strength/intensity/degree is the most basic parameter of non-equilibrium flow description; And any definition of non-equilibrium strength/intensity/degree depends on the research perspective 
(ii) The physical meaning of D * m,n is the TNE strength of this perspective  (iii) From a certain perspective, the TNE strength is increasing; While from a different perspective, the TNE strength, on the other hand, may be decreasing  It is normal, one of the concrete manifestations of the complexity of non-equilibrium flow behavior 
Strictly speaking, those TNE intensity and effect descriptions that do not account for the research perspective are not correct  Do not explain the research perspective, the corresponding is not dependent on the research perspective 

Numerical simulations and results

In this section, we first validate the DBM code by comparing the DBM results with experimental results  Then, the effects of specific-heat ratio on the dynamic process and TNE behaviors on SBI are investigated 

Comparison with experimental results

In the following part, we use a first-order two-fluid DBM to simulate the interaction between a planar shock wave with a 2-D heavy-cylindrical bubbles, and compare the DBM results with the experimental results from Ref    The computational configuration can be seen in Fig    In a flow field which is filled with Air, there is a static bubble composed of 26% Air and 74% SF 6  
A shock with Ma = 1 2 would pass through the bubble from left to right  The initial conditions of ambient gas are ρ 0 = 1 29kg/m 3 , T 0 = 293K, p 0 = 101 3kPa  Ignoring the pressure difference between interior gas and ambient gas, the initial parameters of the bubble are ρ bubble = 4 859kg/m 3 , p bubble = 101 3kPa,
and T 0 = 293K  For simulating, these actual physical quantities should be transferred to dimensionless parameters  This process can refer to the Appendix A  The dimensionless conditions of macroscopic quantities of the fluid field in initial time are (ρ, T, u x , u y ) bubble = (4 0347, 1 0, 0 0, 0 0), (ρ, T, u x , u y ) 1 = (1 3416,
1 128, 0 3616, 0 0), (ρ, T, u x , u y ) 0 = (1 0, 1 0, 0 0, 0 0), where the subscript "0" ("1") represents downstream (upstream) region  In two-fluid DBM code, the distribution function f Air is used to describe the ambient gas, i e , Air  The f bubble characters the bubble which is a mixture that composed of Air and SF 6  
The grid number is N x × N y = 800 × 400, where the N x and N y are grid number in x and y direction, respectively  This grid size has passed the mesh convergence test  The below results also show that it is sufficient to meet the requirements of the following research problem  Other parameters used for the simulation are: c = 1 0, η Air = η bubble = 10 0,
I Air = 3, I bubble = 15, ∆x = ∆y = 1 2 × 10 −4 and ∆t = 1 × 10 −6   The viscosity effect is feeble compared to the shock compression effect, so it does not significantly affect the deformation of the bubble  Therefore, in this part, the relaxation time τ is set sufficiently small  The inflow (outflow) boundary condition is used in the left (right) boundary, and the periodic boundary is adopted in the y direction 
The first-order forward difference scheme is used to calculate the temporal derivative, and the second-order nonoscillatory nonfree dissipative scheme is adopted to solve the spatial derivative in Eq  ( )   Two quantitative comparisons between experimental results and DBM simulations are shown in the following part, including snapshots of schlieren images and evolutions of characteristic scales for the bubble 
The first is shown in Fig  non-organized momentum flux (NOMF) uously to form a diffracted shock (DS)  As TS propagates, it will split into three branches due to the considerable pressure perturbations caused by the gradual decay of the DS strength   Afterward, as shown in the subfigure at about t = 128µs, two high pressure regions (ROH) generate because of the interaction of these branches 
Subsequently, at about t = 148µs, the two ROHs meet, causing the shock focusing  On the one hand, at about t = 168µs, the shock focusing causes the generation of downstream-propagating second transmitted shock (STS) and upward-moving rarefaction wave  On the other hand, it will produce high pressure region inside the bubble, which later leads to a jet structure, as shown at about t = 288µs 
At about t = 428µs, due to the deposited vorticity, there will produce a pair of counter-rotating vortexes at the pole region of the bubble  The further development of the vortex pair and the effect of viscosity decrease the amplitude of the jet  Finally, the jet structure disappears  The second quantitative comparison is the interface structure described by the length and width of the bubble, as shown in Fig   
The experimental data are extracted from Fig  , in Ref    Quantitative agreements between DBM simulation and experimental results are seen  For the profile of bubble width, there are mainly two stages  At an early time (t < 150µs), it decreases to a minimum value because of the shock compression effect 
After the shock wave passes through the bubble (t > 150µs), the developed vortex pair caused by the deposited vorticity gradually dominates the growth of bubble width  Different from width evolution, the temporal variation of length experiences three stages  In the early stages (t < 150µs), it decreases quickly due to the shock compression effect 
Then, the jet structure emerges, which results in a growth in length (150µs < t < 250µs)  Because the upstream interface moves faster than the downstream interface, the bubble length would decrease at 250µs < t < 500µs  In the third stage (t > 500µs), the vortex pair forms and then leads to a continuous development of bubble length 
Both the length and width experience oscillations in the later stages due to complex wave patterns  The quantitative agreements between DBM simulation and experimental results indicate the following two facts: (i) the order of TNE considered in the current DBM is sufficient, (ii) the choosing of discrete velocities and spatial-temporal steps and simulation parameters like the relaxation times is suitable for characterizing the deformation of bubble, wave patterns, main characteristics of flow morphology 

Effects of specific-heat ratio on SBI

The major of current works on SBI research have not focused on specific-heat ratio effects  In this part, the simulation parameters are fine-adjusted based on the parameters in Section 3 1 to highlight the influence of specific-heat ratio  Through adjusting the extra degree of freedom I, five cases with various specific-heat ratios of the bubble are simulated, i e , γ = 1 4,
1 28, 1 18, 1 12, and 1 09  Two kinds of analysis methods, including tracer particle method and two-fluid model, are used to characterize qualitatively the macroscopic behaviors such as the shape, deformation process, mixing degree, etc  The related TNE behaviors are also studied 

Effects of specific-heat ratio on jet shape, deformation process, and average motion

We first observe the specific-heat ratio effect on the bubble shape from the view of density contour and images of particle tracer visually  As shown in Fig  , pictures with three typical moments are plotted, i e , t = 0 07,t = 0 11, and t = 0 16  The odd rows represent density contours and the even rows are tracer particle images 
It can be seen that the specific-heat ratio significantly affects the length and shape of the jet structure  The smaller the specific-heat ratio is, the stouter the jet structure can be seen  The reason is that the specific-heat ratio significantly changes the propagation speed of shock waves and wave patterns inside the bubble 
The specific-heat ratio also influences the vortex structure in early stage but contributes little effects to it in later stage  In the later stage, for cases with different specific-heat ratios, the differences in vortex pairs are almost invisible  Then, the effects of specific-heat ratio on deformation process are analyzed 
Shown in Fig  are the evolutions of characteristic scales which used to describe the bubble size, i e , width and length  It can be seen that the smaller the specific-heat ratio of bubble, the smaller the bubble width and length  For the fluid with smaller specific-heat ratio, it is easier to be compressed 
Therefore, the characteristic scales of bubbles with smaller specific-heat ratio tend to be compressed smaller  It can also be seen that the case with the largest specific-heat ratio reaches the minimum characteristic scales firstly  The reason is that the shock wave propagates faster in case with larger specific-heat ratio 
Through the method of tracer, information on the average motion of the bubble is easy to obtain  Shown in Fig  are the average position and average velocity of the bubble, with different specific-heat ratios  It is found that, in the shock compression stage (t < 0 03), the effect of specific-heat ratio contributes little to the average motion 
However, when the shock wave passes through the bubble (t > 0 03), a larger specific-heat ratio speeds up the average motion of the bubbles  The reason is that the bubbles with smaller specific-heat ratio need more energy to compress their size, so their translational energy is smaller 

Effects of specific-heat ratio on vortex motion

Vorticity is one of the most important physical quantities in describing the vortex motion  In the 2-D case, the vorticity can be calculated by the following equation: The positive (negative) value of ω represents the positive (negative) direction along the z axis  Vorticity contours at t = 0 134, with various specific-heat ratios, are shown in Fig   
The discernable difference between cases with various specific-heat ratios can be observed  The arrows in the vorticity images point out the obvious differences around the interface between case γ = 1 4 and case γ = 1 09  That is to say, there exists influences of specific-heat ratio on the rotational motion of the bubble 
The strength of vorticity is described by circulation Γ, where Γ = ∑ ω∆x∆y  Γ + = ∑ ω| ω>0 ∆x∆y is the positive circulation and Γ − = ∑ ω| ω<0 ∆x∆y represents the negative circulation  Figure shows the temporal evolution of circulations on SBI process  It can be seen that the values of Γ are equal to zero all the time because the values of Γ + and Γ − are the same 
But they point in the opposite direction  In the shock compression stage (t < 0 03), the specific-heat ratio effect contributes little to the circulation of the bubble  When the shock wave sweeps through the bubble (t > 0 03), the specific-heat ratio affects the value of circulation obviously  The cases with a smaller specific-heat ratio experiences a larger range of amplitude of change, which is caused by its good compressibility 

Effects of specific-heat ratio on mixing degree

The mixing process is a fundamental research content on SBI  In two-fluid DBM, the mixing degree at each fluid unit can be defined as M = 4 • M A M B , where M σ represents the mass fraction of component σ   The higher the value of M, the higher the mixing amplitude  Images of density (first cow) and mixing degree M (second row) at several typical moments are shown in Fig   
As can be seen, the mass mixing occurs in the region where two media contact  In addition, the mixing degree M g described the whole fluid field can be defined where the symbol "−" indicates integrating the M σ over the whole fluid field and then dividing the grid size N x • N y   Shown in Fig  is the temporal evolution of the global mixing degree M g  
As can be seen, temporal profiles of the global mixing degree show two stages: t < 0 03 and t > 0 03  When t < 0 03, there is almost no difference between cases with various specific-heat ratios  But for t > 0 03, the stronger the specific-heat ratio effect, the larger the mixing degree  Actually, there are mainly two indicators that measure the global mixing degree: the amplitude of mixing and the area of the mixing zone between two fluids 
At the stage t > 0 03, the shock compression dominates the mix by enhancing the mixing amplitude and increasing the area of the mixing zone simultaneously  In this stage, the specific-heat ratio effect contributes little to the mix  However, when the shock passes through the bubble, the deformation of interface and the evolution of vortex core both significantly raise the area of the mixing zone 
As can be seen in Fig  , the smaller specific-heat ratio of bubble, the stronger global mixing degree of fluid field  Intuitively, for the fluid with smaller specific-heat ratio, it is easier to deform and compress, which is beneficial for the fluid mixing  It can also be explained by the diffusion formula, i e ,  
The specific-heat ratio affects both the temperature T and the gradient of density simultaneously  Therefore, these two aspects comprehensively influence the material diffusion between the two fluids  Due to the complex reflected shock wave, the global mixing degree shows a tendency for oscillating growth 

Effects of specific-heat ratio on TNE behaviors

The investigation of TNE behaviors is of great importance for understanding the kinetics process on SBI  These TNE quantities describe the fluid system deviating from the thermodynamic state from their own perspectives  The effects of specific-heat ratio on global TNE strength, i e , D * 2 , D * 3 , D * 3,1 , and D * 4,2 , are shown in Fig   
It can be seen that the effects of specific-heat ratios on various TNE quantities are different  Theoretically, the influence of specific-heat ratio on the non-equilibrium effect is reflected in two aspects: transport coefficient and macroscopic quantity gradient  For example, on the one hand, the specific-heat ratio reduces heat conductivity, while on the other hand, it enhances the temperature gradient 
Therefore, the effect of specific heat ratio on NOEF is the comprehensive result of the competition between the two aspects  As shown in Fig  , the smaller the specific-heat ratio, the stronger strength of D * 3,1   It indicates that the specific-heat ratio increase the strength of D * 3,1 by raising the heat conductivity  
For the strength of D * 3 , as shown in Fig  (b), it is seen that it decreases as the specific-heat ratio becomes small  The reason is that a smaller specific-heat ratio decreases the temperature gradient  Effects of specific-heat ratio on D * 4,2 show two-stage  In the shock compression stage (t < 0 03), the smaller specificheat ratio, the larger the strength of D * 4,2  
But the situation is reversed at the stage t > 0 03  For strength of D * 2 , the specificheat effects are more significant in later stage 

Effects of specific-heat ratio on entropy production rate

and entropy production The concepts of entropy are commonly used in complex flows   In DBM, there are two kinds of en- tropy production rates, i e , ṠNOEF and ṠNOMF   They are key factors in compression science field  The former is induced by temperature gradient and the NOEF (∆ * 3,1 )  The latter is affected by velocity gradient and the NOMF (∆ * 2 ) 
The entropy production rates are defined by the following formulas : Integrating the ṠNOEF and ṠNOMF over time t, the entropy generations over this period of time are obtained, i e , S NOEF = t 0 ṠNOEF dt and S NOMF = t 0 ṠNOMF dt  Plotted in Fig  ) and 14(b) are the temporal evolution of ṠNOMF and ṠNOEF , respectively 
The evolution of entropy generation rate is related to two aspects: (i) the propagation of the shock wave, and (ii) the deformation of the bubble  The former generates a macroscopic quantity gradient, and the latter makes the contact interface wider, longer, and deformed  Depending on the location of the shock wavefront, there exist two critical moments in this SBI process: (i) at around t = 0 03, the shock wave just sweeps through the bubble, and (ii) at t = 0 06, the shock wave exits the flow field 
Therefore, the temporal evolution of the entropy production rate shows three stages, i e , t < 0 03, 0 03 < t < 0 06, and t > 0 06  At the stage t < 0 03, the shock compression stage, the shock effects compress the bubble  It generates the large macroscopic quantity gradients, resulting in a quick increase of ṠNOMF  
At around t = 0 03, the shock wave passed through the bubble  So the values of ṠNOMF decreases  The values of ṠNOMF would continue to decrease due to the gradually wider contact interface caused by the diffusion effect  At around t = 0 06, the shock wave comes out of the flow field so that the values of ṠNOMF drops rapidly 
In the third stage, i e , t > 0 06, because of the diffusive effect, the general trend of ṠNOMF is downward  However, it shows an oscillatory trend due to the influence of various reflected shock waves  The specific heat ratio indirectly changes the value of ṠNOMF by changing the velocity gradient  The smaller the specific-heat ratio, the larger ṠNOMF  
Different understanding can be seen in Fig  , where the temporal evolution of ṠNOEF is plotted  In the first stage (t < 0 03), cases with different specific-heat ratios show various trends  At the stage where the bubble deformation is not very large, i e , 0 03 < t < 0 06, values of ṠNOEF fluctuate near the average value 
In the third stage (t > 0 06), evolutions of ṠNOEF in cases with larger specific-heat ratios show an apparent growing tendency  Differently, the values of ṠNOEF in cases with smaller specific-heat ratios remain almost unchanged  The influence of specific heat ratio on the ṠNOEF , similar with the effect on NOEF, is also affected by the heat conductivity and the temperature gradient 
It can be seen that, except for the case of γ = 1 09, the larger the specific-heat ratio, the higher entropy production rate ṠNOEF   The temporal evolutions of ṠNOEF of case γ = 1 09 and case γ = 1 12 are very similar  Consequently, the specific-heat ratio increases the ṠNOEF by raising the temperature gradient 
Further understanding can be seen in Fig  , where the entropy productions over this period are plotted  For convenience, the sum and difference between S NOMF and S NOEF are also plotted in the figure  The variation range of S NOEF is larger than that of S NOMF   It indicates that the influence of specific-heat ratio on S NOEF is more significant than that on S NOMF  
Effects of specific-heat ratio on entropy production caused by NOMF and NOEF are contrary  Specifically, it can be seen that the entropy production contributed by NOMF increases with re- duced specific-heat ratio  But the entropy production caused by NOEF first reduces with decreasing specific-heat ratio and then approaches to a saturation value 
The S NOEF in case γ = 1 09 is almost the same with it in case γ = 1 12  When the specificheat ratio γ is smaller than a threshold value γ c (γ c ≈ 1 315), the entropy production induced by NOEF is more significant than that caused by NOMF  However, in the case of γ > γ c , the situation reverses  The temporal evolution of the total entropy production (S NOMF +S NOEF ) is similar to the S NOEF profile 
The difference between S NOMF and S NOEF increases with decreasing specific-heat ratio 

Conclusions

Specific-heat ratio effects on the interaction between a planar shock wave and a 2-D heavy-cylindrical bubble are studied by a two-fluid DBM which has a flexible specific-heat ratio and includes several schemes for analyzing the complex physical fields  Besides the HNE that NS easily describes, the DBM pays more attention to the related TNE that NS is not convenient to describe 
First, both the snapshots of schlieren images and evolutions of characteristic scales from DBM simulation are compared with those from experiment  The quantitative agreements between them indicate the following two facts: (i) the order of TNE considered in the current DBM is sufficient, (ii) the choosing of discrete velocities, spatial-temporal steps, and simulation parameters like the relaxation times are suitable for the following physical researches 
Then, five cases with various specific-heat ratios are simulated  Several analysis methods for complex physical fields, including the description scheme of TNE behaviors, tracer particle method, and two-fluid model, are used to characterize the effects of specific-heat ratio on the bubble shape, deformation process, average motion, vortex motion, mixing degree of the fluid system, TNE strength, and entropy production 
Specifically, for bubble shape, bubbles with different specific-heat ratios display various jet structures  The smaller the specific-heat ratio is, the stouter the jet structure can be seen  For the case with smaller specific-heat ratio, the fluid is easier to be compressed  So, the characteristic scales of bubbles with smaller specific-heat ratio tend to be compressed smaller 
For the bubble, the smaller the specific-heat ratio, the slower average motion  In the shock compression stage, the specific-heat ratio contributes little effects to the vortex motion  Differently, after the shock passes through the bubble, it significantly influences the vorticity around the interface and the corresponding amplitude of circulation due to the development of KHI 
The larger the difference in specific-heat ratio between the bubble and ambient gas, the higher the degree of material mixing  Effects of specific-heat ratio on various TNE quantities are different  These differences consistently show the complexity of TNE flows which is still far from a clear understanding 
In addition, it is found that the temporal evolution of the entropy production rates ṠNOMF and ṠNOEF both show three stages because of the influence of the shock wave location  The smaller the specific-heat ratio, the larger the velocity gradient, which indirectly enhances the strength of ṠNOMF   The specific-heat ratio increases the ṠNOEF by raising the temperature gradient 
The influence of specific-heat ratio on S NOEF is more significant than that on S NOMF   Effects of specific-heat ratio on entropy production caused by NOMF and NOEF are contrary  Specifically, the entropy production contributed by NOMF increases with reduced specific-heat ratio  But the entropy production caused by NOEF first reduces with decreasing specific-heat ratio and then approaches to a saturation value 
When the specific-heat ratio γ is smaller than a threshold value γ c (γ c ≈ 1 315), the entropy production induced by NOEF is more significant than that caused by NOMF  However, in the case of γ > γ c , the situation reverses  The fundamental research in this paper helps to understand the interaction mechanism between shock waves and bubbles in ICF, supersonic combustors, underwater explosions, etc 
The effects of viscosity and heat conduction on the interaction between shock waves and bubbles will be studied in the following work  where the subscript "m, n" means that the m-order tensor is contracted to n-order tensor  According to the CE multiscale analysis, the Boltzmann-BGK equation can be reduced to the hydrodynamic equations 
In the following part, the derivation process from Boltzmann-BGK equation to a two-fluid hydrodynamic equation are shown  More details can see the reference presented by Zhang et al    The discrete Boltzmann equation for component σ is (C 1) In Eq  C 1 there are two equilibrium distribution functions, i e , f σ ,seq = f σ ,seq (ρ σ , u σ , T σ ) and f σ ,eq = f σ ,eq (ρ σ , u, T ) 
For convenience, S σ i is defined as We perform the CE expansion around the f σ ,seq   That is, the distribution function f σ i can be expanded as where ε is a coefficient referring to Knudsen number  The partial derivatives of time and space can also be expanded to Substituting the above four equations into Eq 
(C 1), we can obtain (C 6) When retaining to ε terms, the following equation is obtained When retaining to ε 2 terms, we can obtain where M 2,αβ ( f σ ,(1) ) = ∑ i v iα v iβ f σ ,(1) i and M 3,1,α ( f σ ,(1) ) =   Substituting Eq  (C 14) into the above three equations, and replacing the time derivatives with the space derivatives, we obtain It should be noted that the ability to recover the corresponding level of macroscopic fluid mechanics equations is only part of the physical function of DBM 
The corresponding to the physical functions of DBM is the EHEs, which, in addition to the conserved moments evolution equations corresponding to the three conservation laws of mass, momentum and energy, also includes some of the most closely related nonconserved moments evolution equations  We refer the EHEs derivation based on kinetic equation to as KMM 
The necessity of the expanded part, the evolution equations of the relevant non-conserved moments, increases rapidly as increasing the degree of non-continuity/non-equilibrium  As the degree of non-continuity/non-equilibrium increases, the complexity will rapidly make KMM simulation studies, deriving and solving EHE, impossible 
Context 3: PROBLEM TO BE SOLVED: To provide a vacuum processor which can suppress the rise of manufacture cost while coping with the enlargement of diameter of a sample, and besides is excellent in maintainability  SOLUTION: This vacuum processor comprises an air loader 1 which is equipped with a plurality of juxtaposed cassette stands 2a and 2b and a carrier 13 for carrying a wafer 20 from or to the cassette stands, a vacuum loader 7 which is equipped with etching treatment chambers 11 and 11b for processing the wafer and a vacuum carriage chamber 16 connected to them through gate valves 15a and 15b, and a lock device 6 consisting of a load lock chamber 6b and an unload lock chamber 6b equipped with gate valves 12a, 12b, 12c, and 12d for connecting the said carrier 13 with the vacuum carriage chamber 16  For the etching treatment chambers, two are provided only on the opposite side of the vacuum carriage chamber symmetrically about the axis line A passing the center, and besides the arrangement positions of the two etching treatment chambers are at an acute angle on the opposite side of the vacuum carriage chamber 
エッチング，ＣＶＤ（化学的気相成長），スパッタリング，アッシング，リンサ（水洗）等の枚葉処理をするのに好適な真空処理装置とそれを用いて半導体デバイスを製造する半導体製造ラインに関するものである。 Those etching, CVD (chemical vapor deposition), sputtering, ashing, to rinser (water washing) suitable vacuum processing apparatus for single wafer processing, such as a semiconductor manufacturing line for manufacturing a semiconductor device using the same  
【従来の技術】試料を処理する真空処理装置は、大別すると、カセットブロックと真空処理ブロックから構成されており、カセットブロックは、半導体製造ラインのベイ通路に面して長手方向に伸びるフロントを有し、試料用のカセットや試料のオリエンテーションを合わせるアライメントユニットと、大気ロボットがある。 BACKGROUND OF THE INVENTION Vacuum processing apparatus for processing a sample, the roughly is constituted by a cassette block and a vacuum processing block, the cassette block, a front extending in the longitudinal direction facing the bay aisle of a semiconductor manufacturing line a, an alignment unit for aligning the cassette and sample orientation for sample, there is an atmospheric robot  真空処理ブロックには、ロード側ロードロック室，アンロード側ロードロック室，真空処理室，後真空処理室，真空ポンプ及び真空ロボット等が設けられている。 The vacuum processing block, the load-side load lock chamber, the unload side load lock chamber, the vacuum processing chamber, a rear vacuum processing chamber, a vacuum pump and a vacuum robot and the like 
【０００３】これらの真空処理装置では、カセットブロックのカセットから取り出された試料が、大気ロボットにより真空処理ブロックのロードロック室まで搬送される。  In these vacuum processing apparatus, a sample taken from the cassette in the cassette block is transported to the load lock chamber in the vacuum processing block by the atmospheric robot  ロードロック室から真空ロボットによりさらに処理室に搬送され、電極構造体上にセットされた試料は、プラズマエッチング等の処理がなされる。 Is conveyed from the load lock chamber to the further processing chamber by the vacuum robot, the sample is set on an electrode structure, processing such as plasma etching is performed  その後、必要に応じて後真空処理室に搬送，処理される。 Thereafter, the conveyance to the rear vacuum processing chamber as necessary and processed  処理済みの試料は、真空ロボット及び大気ロボットによりカセットブロックのカセットに搬送される。 Processed sample is conveyed to the cassette of the cassette block by the vacuum robot and the atmospheric robot 
【０００４】試料をプラズマエッチング処理する真空処理装置の例としては、例えば特公昭61−8153号公報，特開昭63−133532号公報，特公平6−30369号公報，特開平  Examples of the sample vacuum processing apparatus for plasma etching treatment, for example Japanese Patent Publication 61-8153, JP-Sho 63-133532 and JP Kokoku 6-30369, JP-A No 
6−314729号公報，特開平6−314730号公報，米国特許第 6-314729, JP-A No  6-314730, JP-U S  Patent No 
5,314,509号明細書および5,784,799号明細書に記載されたようなものがある。 There are such as described in Pat and 5,784,799 Pat 5,314,509 
509号明細書に記載された装置は、真空処理ブロックの中央付近に真空ロボット、その周囲に３個の処理室が同心状に配置され、真空ロボットとカセットブロックの間に、ロード側ロードロック室，アンロード側ロードロック室が設けられている。 Device described in 509 Pat are vacuum robot in the vicinity of the center of the vacuum processing block, three process chambers around it are arranged concentrically, between the vacuum robot and the cassette block, the load-side load-lock chamber , unload side load lock chamber is provided  これらの装置では、大気ロボットや真空ロボットの搬送アームの回転角度が大きく従って装置全体の必要床面積が大きいという問題がある。 In these devices, there is a problem that needs floor space for the entire rotation angle is large therefore device of the transfer arm of the atmospheric robot and the vacuum robot is large 
【０００６】一方、真空処理装置の真空処理ブロック内の処理室や真空ポンプその他各種の配管機器については、定期，不定期に点検修理等のメンテナンスを行うことが必要である。  On the other hand, the processing chamber and the vacuum pump and other various piping components of the vacuum processing block of the vacuum processing apparatus, periodically, it is necessary to perform maintenance such as inspection and repair irregularly  そのため、一般に、真空処理ブロックの周囲には、扉が設けられており、この扉を開けることにより、ロードロック室，アンロードロック室，処理室，真空ロボット及び各種の配管機器の点検修理ができるようになっている。 Therefore, in general, around the vacuum processing block, the door is provided by opening the door, load lock chambers, unload lock chambers, processing chambers, the servicing of the vacuum robot and various piping devices It has become way 
キャリアポッドが必要となるために、約３５０mm程度と大きくなり、複数のキャリアポッドを収納するカセットブロックの幅も大きくなる。 For carrier pod required, large as about 350 mm, the greater width of the cassette block for housing a plurality of carrier pods  この幅に合わせて真空処理ブロックの幅を決定すると、真空処理装置全体が大きなスペースを必要とすることになる。 When determining the width of the vacuum processing block in accordance with the this width, the entire vacuum processing apparatus requires a large space  一例として、４個のキャリアポッドを収納するカセットブロックについて考えると、試料の直径ｄが８インチから１２インチになった場合、カセットの幅は少なくとも約４０cm以上大きくならざるを得ない。 As an example, considering the cassette block for accommodating four carriers pods, if the diameter d of the sample was a 12-inch 8 inch wide cassette inevitably increases at least about 40cm or more 
【０００８】一方、試料に各種の処理を行いながら大量の処理を行うために、一般の半導体製造ラインでは、同じ処理を行う複数の真空処理装置を同じベイに集め、各ベイ間の搬送を自動またはマニュアルで行っている。 On the other hand, in order to perform a lot of processing while performing various processes in the sample, in a general semiconductor manufacturing lines, gathering a plurality of vacuum processing apparatus for performing the same processing in the same bay, automatic conveyance between the bays or it is carried out manually  このような半導体製造ラインは、高いクリーン度を必要とするため、半導体製造ライン全体が大きなクリーンルーム内に設置される。 Such a semiconductor manufacturing line, requires a high degree of cleanliness, the whole semiconductor manufacturing line is placed in a large clean room  試料の大口径化に伴う真空処理装置の大型化は、クリーンルーム占有面積の大型化を伴うが、これはもともと建設コストの高いクリーンルームの建設コストを一層増加させることになる。 Size of the vacuum processing apparatus due to the large diameter of the sample is accompanied by a large clean room area occupied, which will be further increased construction costs of the high construction cost clean room originally  もし、同じ面積のクリーンルームに占有面積の大きな真空処理装置を設置するとすれば、真空処理装置の全体の台数を減らすか、あるいは各真空処理装置間の間隔を狭くせざるを得ない。 If, if the clean room of the same area to install a large vacuum processing apparatus of the occupied area, reduce the overall number of the vacuum processing apparatus, or interval narrower forced between the vacuum processing apparatus  同じ面積のクリーンルームにおける真空処理装置の設置台数減少は、必然的に半導体の製造ラインの生産性の低下ひいては半導体の製造コストの上昇を伴う。 Installed base reduction in the vacuum processing apparatus in a clean room having the same area is accompanied inevitably rise of the semiconductor decrease and thus the semiconductor manufacturing cost of productivity of the production line  他方、各真空処理装置間の間隔を狭くすることは、点検修理のためのメンテナンススペースが不足し、真空処理装置のメンテナンス性を著しく阻害する。 On the other hand, to reduce the distance between each of the vacuum processing apparatus, the maintenance space for inspection and repair is insufficient to significantly inhibit the maintenance of the vacuum processing apparatus 
【０００９】本発明の目的は、試料の大口径化に対応しつつ、製造コストの上昇を抑えることのできる真空処理装置を提供することにある。 An object of the present invention, while corresponding to the large diameter of the sample, is to provide a vacuum processing apparatus capable of suppressing an increase in manufacturing cost 
【００１０】本発明の他の目的は、試料の大口径化に対応しつつ、メンテナンス性に優れた真空処理装置を提供することにある。 Another object of the present invention, while corresponding to the large diameter of the sample is to provide a vacuum processing apparatus having excellent maintainability 
【００１１】本発明の他の目的は、試料の大口径化に対応しつつ、真空処理装置の必要設置台数を確保して製造コストの上昇を抑え、かつ、メンテナンス性も損なわない半導体製造ラインを提供することにある。 Another object of the present invention, while corresponding to the large diameter of the sample, to ensure the necessary number of installed vacuum processing apparatus suppressing an increase in manufacturing cost, and a semiconductor manufacturing line is not impaired maintainability It is to provide 
【課題を解決するための手段】本発明は、並設した複数のカセット台およびカセット台から、あるいはカセット台へウエハを搬送するための搬送装置を備えた大気ローダと、ウエハを処理するための真空処理室およびこれにゲート弁を介して連接された真空搬送室を備えた真空ローダと、前記搬送装置と前記真空搬送室とを連接するためのゲート弁を備えたロードロック室およびアンロードロック室からなるロック装置とを含んで構成される真空処理装置において、ウエハを処理するための真空処理室は、有磁場ＵＨＦ帯電磁波放射放電方式リアクタ（以下、ＵＨＦ−ＥＣＲリアクタという。）によって形成される真空処理室であり、該真空処理室には、分解可能な側壁インナーユニットおよびアンテナが設けられ、該真空処理室は、真空搬 The present invention SUMMARY OF THE INVENTION from a plurality of cassette tables and cassette stand juxtaposed, or the atmosphere loader having a conveying device for conveying the wafer to the cassette table, for processing a wafer the load lock chamber and the unload lock having a gate valve for connecting the vacuum loader vacuum processing chamber and having a vacuum transfer chamber which is connected via a gate valve to the said vacuum transfer chamber and the conveying device in the vacuum processing apparatus configured to include a lock device comprising a chamber, a vacuum processing chamber for processing a wafer it is formed by a magnetic field UHF band electromagnetic wave radiation discharge type reactor (hereinafter  referred UHF-ECR reactor) that a vacuum processing chamber, the vacuum processing chamber, degradable sidewall inner unit and an antenna are provided, the vacuum processing chamber, a vacuum transportable 室およびロック装置の中央を通る軸線に対して対称にして、かつ真空搬送室を中心にしてロック装置の反対側のみに２つ設けられ、かつ真空搬送室に対して前記２つの真空処理室の配置位置は鋭角をなしている真空処理装置を提供する。 And symmetrically with respect to the axis passing through the center of the chamber and the locking device, and the opposite side only two provided for to lock device around the vacuum transfer chamber, and the two vacuum processing chamber to the vacuum transfer chamber position is to provide a vacuum processing apparatus which forms an acute angle 
ＣＲリアクタによって形成される真空処理室であり、該真空処理室は、真空搬送室およびロック装置の中央を通る軸線に対して対称にして、かつ真空搬送室を中心にしてロック装置の反対側のみに２つ設けられ、かつ真空搬送室に対して前記２つの真空処理室の配置位置は鋭角をなしており、ＵＨＦ−ＥＣＲのアンテナは、前記軸線に対して平行で、かつ前記真空搬送室とは反対側に開放される真空処理装置を提供する。 A vacuum processing chamber formed by a CR reactor, vacuum processing chamber, and symmetrically with respect to the axis passing through the center of the vacuum transfer chamber and the locking device, and the opposite side of the locking device around the vacuum transfer chamber only two provided, and positions of the two vacuum processing chamber to the vacuum transfer chamber is an acute angle, the UHF-ECR antennas, and parallel, and the vacuum transfer chamber with respect to said axis to provides a vacuum processing apparatus is opened to the opposite side



ground_truth: Del Bigtree and his team at ICAN.

prompt_front: Now, answer the following question based on the text below, only give me the answer and do not output any other words.

Question: How does the specific-heat ratio affect the average motion of the bubble?

Read the following text and answer briefly.

Context 3: 
かつ真空搬送室を中心にしてロック装置の反対側のみに２つ設けられ、かつ真空搬送室に対して前記２つの真空処理室の配置位置は鋭角をなしており、大気ローダ，真空ローダおよびロック装置はＴ字配置とされた真空処理方法を提供する。 And around the vacuum transfer chamber opposite only two provided a locking device, and positions of the two vacuum processing chamber to the vacuum transfer chamber is an acute angle, atmospheric loader, vacuum loader and locking apparatus to provide a vacuum processing method which is a T-arrangement 
【００１５】本発明は、並設した複数のカセット台およびカセット台から、あるいはカセット台へウエハを搬送するための搬送装置を備えた大気ローダと、ウエハを処理するための真空処理室およびこれにゲート弁を介して連接された真空搬送室を備えた真空ローダと、前記搬送装置と前記真空搬送室とを連接するためのゲート弁を備えたロードロック室およびアンロードロック室からなるロック装置とを含んで構成される真空処理装置が平行に複数台並設された真空処理システムにおいて、ウエハを処理するための真空処理室は、ＵＨＦ−ＥＣＲリアクタによって形成される真空処理室であり、該真空処理室は、真空搬送室およびロック装置の中央を通る軸線に対して対称にして、かつ真空搬送室を中心にしてロック装置の反対側のみに２ The present invention, a plurality of cassette tables and cassette stand juxtaposed, or the atmosphere loader having a conveying device for conveying the wafer to the cassette base, the vacuum processing chamber for processing the wafer and to a vacuum loader having a vacuum transfer chamber which is connected via a gate valve, the locking consisting of the conveying device and the load lock chamber and the unload lock chamber with gate valves for connecting the said vacuum transfer chamber apparatus and in the vacuum processing system vacuum processing apparatus is constituted with a plurality Tainami set in parallel include vacuum processing chamber for processing a wafer is vacuum processing chamber formed by the UHF-ECR reactor, vacuum processing chamber, and symmetrically with respect to the axis passing through the center of the vacuum transfer chamber and the locking device, and 2 only on the opposite side of the locking device around the vacuum transfer chamber 設けられ、かつ真空搬送室に対して前記２つの真空処理室の配置位置は鋭角をなしており、並設された複数の真空処理装置のすべての真空処理室に一直線上に配列される真空処理システムを提供する。 Provided, and positions of the two vacuum processing chamber to the vacuum transfer chamber is an acute angle, a vacuum process that is arranged in alignment with all of the vacuum processing chamber of a plurality of vacuum processing apparatus are arranged in parallel to provide a system 
【発明の実施の形態】以下、本発明にかかる一実施例を図面に基づいて説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, will be explained based on an embodiment according to the present invention with reference to the accompanying drawings 
１０Ｂ，１０Ｃで示す。 10B, shown by 10C 
【００１８】図１に示す真空処理システムを説明する前に、図２から図４に基づいて真空処理装置を説明する。  Before describing the vacuum processing system shown in FIG  1, illustrating a vacuum processing apparatus on the basis of FIGS  2-4 
５ｂを介して連接された真空搬送室１６を備えた真空ローダ７と、前記搬送装置と前記真空搬送室とを連接するためのゲート弁を備えたロードロック室６ａおよびアンロードロック室６ｂからなるロック装置６とを含んで構成される。 5b a vacuum loader 7 having a vacuum transfer chamber 16 which is connected via consist load lock chamber 6a and the unload lock chamber 6b has a gate valve for connecting and said vacuum transfer chamber and the conveying device configured to include a locking device 6 
平行形に配置され、その位置および姿勢を変えることなく、装置への導入／払出しが可能な位置、すなわち、カセット１ａないし１ｃを略水平の平面上で常に一定の位置に固定される。 Arranged parallel type, without changing its position and orientation, the introduction / dispensing of the locations of the device, i e , always fixed to a constant position to free the cassette 1a 1c on a substantially horizontal plane  カセット台２ａおよび２ｂは、平行に隣合わせて配置してある。 Cassette tables 2a and 2b, are arranged side by side in parallel  カセット台２ｃは、最右端に配置してある。 Cassette table 2c is, are arranged on the top right edge  カセット１ａおよび１ｂは、処理を行うための末処理ウエハを収納したり、処理済みのウエハを回収するためのもので、複数枚（通常２５枚）の被処理基板であるウエハ２０が収納可能となっている。 Cassettes 1a and 1b, or storing the processed wafers end for processing, for recovering the processed wafer, the wafer 20 is a substrate to be processed in a plurality (25 pieces Normal) can be stored going on  カセット１ｃは、この場合、プラズマを用いたドライクリーニング（以下、「プラズマクリーニング」という。）を行うためのダミーウエハを収納したり、プラズマクリーニング後のダミーウエハを回収するためのもので、複数枚（通常２５枚）のダミーウエハ３０が収納可能となっている。 Cassette 1c in this case, dry cleaning using plasma (hereinafter, "plasma cleaning" hereinafter ) Or housing a dummy wafer for performing, for recovering the dummy wafers after plasma cleaning, a plurality (usually dummy wafer 30 of 25 sheets) has become can be stored 
とカセット１ａ，１ｂとの間でウエハ２０を、そしてロードロック室６ａおよびアンロードロック室６ｂとカセット１ｃとの間でダミーウエハ３０を授受可能に動作する。 A cassette 1a, the wafer 20 with the 1b, and operates to allow exchanging dummy wafer 30 between the load lock chamber 6a and the unload lock chamber 6b and the cassette 1c 
ａ，１５ｂを介して真空処理室であるエッチング処理室１１ａ，１１ｂが設けてある。 a, etching chamber is a vacuum processing chamber through a 15b 11a, 11b are provided  以下、エッチング処理室を例に取って説明する。 Hereinafter will be described taking the etching chamber as an example  真空搬送室１６内には、ロードロック室６ａ，アンロード室６ｂおよびエッチング処理室１１ａ，１１ｂとの間でウエハ２０またはダミーウエハ３０を授受可能に動作する搬送装置１４が設けてある。 The vacuum transfer chamber 16, load lock chambers 6a, unload chamber 6b and etching chambers 11a, conveying device 14 is provided that operates to allow transferring the wafer 20 or dummy wafer 30 between 11b  真空搬送室１６は、独立に真空排気可能な真空排気装置１７を装備している。 Vacuum transfer chamber 16 is equipped with a vacuum evacuable vacuum evacuation device 17 independently 
【００２２】ＵＨＦ−ＥＣＲリアクタのエッチング処理室１１ａ，１１ｂは、この場合、同一の構成で対称配置とされてエッチング処理が行われるようになっている。 The UHF-ECR reactor etching chambers 11a, 11b is in this case are symmetrically arranged in the same configuration so that the etching process is performed 
エッチング処理室１１ａを例に説明する。 The etching chamber 11a will be described as an example  エッチング処理室１１ａは、ウエハ２０を配置するための試料台を有し、試料台８ａの上部に放電部７ａを形成するように放電室が設けてある。 Etching chamber 11a has a sample stage for placing the wafer 20, the discharge chamber so as to form a discharge portion 7a at the top of the sample table 8a is provided  エッチング処理室１１ａは、放電部７ａへの処理ガス供給のためのガス導入装置１０ａを有するとともに、エッチング処理室１１ａ内を所定圧力に減圧排気する真空排気装置９ａを有し、放電部７ａの処理ガスをプラズマ化するための、この場合、ＵＨＦ波と磁場の発生手段を有している。 The etching chambers 11a, which has a gas introduction device 10a for processing the gas supply to the discharge portion 7a, having a vacuum exhaust device 9a for evacuating the etching chamber 11a to a predetermined pressure, the process of the discharge portion 7a for plasma gas, in this case, it has a generating means of the UHF wave and magnetic field 
９は、センサ１８からの計測値を所定値と比較して、エッチング処理室内のクリーニング時期を判断する。 9, the measured value from the sensor 18 is compared with a predetermined value to determine the cleaning time of the etching chamber  また、制御装置１９は、真空搬送装置１３および１４を制御して、ダミーウエハ３０をカセット１ｃおよびエッチング処理室１１ａないし１１ｂの間で搬送制御する。 The control device 19 controls the vacuum transfer apparatus 13 and 14, to the dummy wafer 30 to the cassette 1c and the etching process chamber 11a carrying controlled between 11b 
いずれかの方法によりウエハ処理またはプラズマクリーニングを実行する。 It executes the wafer processing or plasma cleaning by any method 
によって、カセット１ａ内のウエハ２０を下から順にエッチング処理室１１ａ，１１ｂに搬入し、それぞれのウエハ２０をエッチング処理する。 Accordingly, the wafer 20 to an etching treatment chamber in order from the bottom 11a of the cassette 1a, and carried into 11b, and each of the wafer 20 is etched  処理されたそれぞれのウエハ２０は、真空搬送装置１４および搬送装置１３によって、カセット１ａ内の元の位置に収納する。 Each wafer 20 processed by vacuum transfer apparatus 14 and the carrier 13 is housed in its original position in the cassette 1a  この場合、運転開始から終了に至る間、カセットの位置および姿勢を変えることなく未処理のウエハを取り出し、そして処理済みのウエハを未処理のウエハが収納されていた元の位置に戻して収納する。 In this case, while leading to completion of the start of the operation, it takes out an unprocessed wafer without changing the position and posture of the cassettes, and the processed wafer unprocessed wafer is accommodated back into position which is housed   このようにすることで、生産ラインの自動化への対応が容易で、且つ、ゴミの発生によるウエハの汚染を低減でき、高い生産効率と高い製品歩留まりを実現できる。 In this way, it is easy to respond to automation of production lines, and can reduce the contamination of the wafer due to the generation of dust can achieve high production efficiency and high product yield 
の処理が全て終り次のカセットの内のウエハ処理に移る前でも良い。 Of the process is good, even before moving on to the wafer processing of all end next cassette 
【００２７】プラズマクリーニングの実施にあたっては、次の順序で行われる。 The practice of plasma cleaning is performed in the following order  この場合、カセット１ｃに収納されたダミーウエハ３０（この



ground_truth: The specific-heat ratio affects the average motion of the bubble. The bubbles with smaller specific-heat ratios have slower average motion.

prompt_front: Now, answer the following question based on the text below, only give me the answer and do not output any other words.

Question: How is the vacuum processing system configured in terms of the arrangement of the vacuum processing apparatus?

Read the following text and answer briefly.

Context 4: 0 PPS、QC4 0协议 - 支持两路DP/DM - 支持CV/CC（分段CC）功能 - 支持定制PDO - 支持A+C双口工作，电压自动回5V - 支持FB/OPTO反馈 - 封装：QFN3x3-20L VPWR FB PowerSystem 100K GND R1 GND 19 VIN 17 FB FUNC1 FUNC2 20 15 18 13 PLUGIND VFB FS8628 QFN3x3-20L AGATE 47K 7 5K 47K 7 5K 1 16 8 7 3 4 5 6 10 9 11 CGATE CVBUS CC2 CC1 CDP CDM AVBUS DM DP ISP ISN 12 应用图 2 V3P3 100Ω 1u EP GND GND CVBUS TYPE- C CC2 CC1 CDP CDM CGND TYPE-A AVBUS DM DP 10n 200 AGND 5mΩ GND FS8611K USB-C AC-DC DC-DC 7550B-T CCM-8611K-A FS8611K USB-C 采用2颗FS8611K搭配CCM-8611K-A （MCU）工作，7550B-T配合工作 - 支持PD2 0/PD3 0/QC2 0/AFC/FCP - 支持PDO定制 - 任意单 C 的为 35W(可定制) - 双插18W（可定制15W/20W） - BOM极简，成本低 FS212C+ACM-212C-A+7550B-T 双C方案 FS212C USB-C AC-DC DC-DC 7550B-T ACM-212C-A FS8623B-A+C方案 AC-DC DC-DC FS8623B USB-A USB-C USB-A 采 用 1 颗 F S 2 1 2 C 搭 配 ACM-212C-A 工 作，7550B-T配合工作 - 支持PD2 0/PD3 0 - 支持PDO定制 - 任意单 C 的为20W - 双插7 5W回5V - BOM极简，成本低 采用一颗FS8623B实现A+C方案 - 兼容兼容Apple2 4A/低压直充 QC2 0 Class A/QC3 0 Class A/B/ FCP/SCP等 - 兼 容Type -C PD2 0 / PD3 0 / PD3 0PPS/QC4 0协议 - 支持PDO定制 - 双插回5V 
多口方案选型 产品选型 受电端芯片选型 速芯微现有多种多口的方案选择：A+C，C+C，C+C+A，C+C+C，C+C+A+A等方案。对于 A+C的方案，可使用1颗芯片实现，也可用多颗芯片来实现。 速芯微现有多种受电端诱骗芯片，客户可根据应用需求进行选择。 受电端诱骗芯片应用领域 筋膜枪 无线充 线材 无人机 产品型号 PD2 0 PD3 0 PD3 1 第三方协议 诱骗电压(V) 控制方式 内置Emarker 定制 封装 FS312A √ √ 5/9/12/15/20 电阻阻值 可变电压策略 SOT23-5 FS312AE √ √ 5/9/12/15/20 电阻阻值 √ (公头专用) 可变电压策略 SOT23-5 FS312BL √ √ √ √ 5/9/12/15/20 电阻阻值 可变电压策略 DFN2x2-6 FS312BLE √ √ √ √ 5/9/12/15/20 电阻阻值 √ (公头专用) 可变电压策略 DFN2x2-6 FS312BH √ √ √ √ 5/20/28/36/48 电阻阻值 可变电压策略 DFN2x2-6 FS312BHE √ √ √ √ 5/20/28/36/48 电阻阻值 √ (公头专用) 可变电压策略 DFN2x2-6 FS312LC √ √ √ 5/9/12 电阻阻值 可变第三方 协议 SSOP10 FS312HC √ √ √ 5/9/12/15/20 电阻阻值 可变第三方 协议 SSOP10 FS2711Q √ √ √ 任意设置 I2C √ QFN3x3-16 FS2711P √ √ √ 任意设置 I2C √ QFN3x3-16 FS2711PA √ √ 全协议 任意设置 I2C √ SSOP10 FS2711SW √ √ 全协议 SSOP10 FS512 √ √ 全协议 任意设置 I2C √ SSOP10 方案 类型 产品型号 单C 单A 双插 A+C方案 FS8623 20W（PPS）（可定制） A口全协议18w 5V共享3A FS8623B 20W（PPS）(可定制) A口全协议18w 5V共享3A FS8628 20W（PPS）(可定制) A口全协议18w 5V共享3A FS8611RPC+FS116DB 65W（PPS）(可定制) A口全协议18w A口：5V/2 4A C口：45W FS8628RC+FS116DB 35W(可定制) A口全协议18w A口：5V（BC1 2，Apple 2 4） C口：20W 方案类型 产品型号 单C1 单C2 C1/C2 C+C方案 FS8611RPB*2 30W(可定制) 30W(可定制) C1/C2：5V/3A(或5V/2 4A) FS8611GH*2 35W（可定制） 35W（可定制） C1/C2:18W（可定制） FS8628P*2 35W（可定制） 35W（可定制） C1/C2：17 4W可定制） FS8611KL*2 20W（可定制） 20W（可定制） C1/C2：5V/1 5 A FS8611PC*2 35W 35W C1/C2：18W FS8611BH*2 65W（可定制） 65W（可定制） C1：45W（可定制）C2：20W（可定制） FS8628RPC+FS8611RB 45W（可定制）） 36W （可定制）） C1：30W（可定制）C2：5V/1 5A（可定制） 方案类型 产品型号 单C1 单C2 单A C1+C2 C1/C2+A C1+C2+A C+C+A FS8611S*2+FS116DB 65W（可定制） 65W（ 可定制）） A口全协议18w 智能分配功率 45W+18W C1/C2：智能分配功率 A：18W（或5V1 5A） FS8612C+FS8628P 100W（可定制） 35W （可定制）） 20W C1：65W C2：20W C1+A：65W+20W C2+A：7 5W+7 5W C1：65W C2：7 5W A：7 5W 其他 
Source-TYPE C协议芯片选型 Source-TYPE A协议芯片选型 速芯微现有多种TYPE-C的快充协议芯片，支持多种协议，支持客户定制，多样化，满 足客户对TYPE C的各种快充需求。 速芯微现有多种TYPE A快充协议芯片，支持全协议，支持定制，满足客户对A口协议的各种需 求。速芯微的TYPE-A快充协议芯片的协议丰富，FS112系列拥有多种的型号；FS116D 系列带插入指示，可搭配TYPE-C快充协议芯片，实现A+C，A+C+C，A+A+C+C等多口方 案，协议丰富，其中FS116A一般用于插入指示使用 Source-TYPE A协议芯片引脚封装图 D+ VSS FB 1 2 3 FS112 6 5 4 D- VDD FUNC GATE VIN FUNC FB LED/PLUG_IN 1 2 3 4 5 FS116D 10 DM 9 8 7 6 DP CSP CSN VSS速芯微的各TYPE-C快充协议芯片之间可搭配使用，实现多口方案，更多详情请咨 询我司工作人员。 多口降功率专用快充协议芯片：FS8611RB，FS8611RC，FS8611RPB，FS8611RPC， FS8612CP。 带I2C快充协议芯片：FS8611S，FS8611SP 产品型号 BC1 2 Apple 2 4 QC2 0 QC3 0 AFC FCP SCP HISCP 大电流直充 封装 FS112 √ √ √ √ √ √ √ SOT23-6 FS112H √ √ √ √ √ √ √ √ √ SOT23-6 FS113 √ v √ √ √ √ √ √ √ SOT23-6 FS116DP √ √ √ √ √ √ √ √ SSOP10 FS116DB √ √ √ √ √ √ √ √ SSOP10 FS116E √ √ √ √ √ √ √ √ √ SSOP10 FS116A √ √ SSOP10 其他 可定制 PD2 0 PD3 0 PD3 0 PPS 第三方协议 反馈方式 MOS CV/CC 定制 封装 FS212C √ √ FB √ SOT23-6 FS212CM √ √ FB PMOS(可省) √ SOT23-6 FS212D √ √ √ FB √ SOT23-6 FS212DH √ √ √ FB √ SOT23-6 FS212DP √ √ √ FB PMOS √ SOT23-6 FS212DG √ √ √ FB PMOS √ SOT23-6 FS8611G √ √ FB PMOS(可省) √ SOP-8 FS8611K √ √ QC2 0/AFC/FCP FB PMOS(可省) √ SOP8 FS8611J √ √ √ 全协议 FB PMOS(可省) √ SOP8 FS8611B √ √ √ 全协议 FB PMOS(可省) √ SSOP10 FS8611RB √ √ 全协议 FB PMOS √ SSOP10 FS8611RC √ √ 全协议 FB PMOS √ SSOP10 FS8611S √ √ √ 全协议 FB PMOS √ SSOP10 FS8611PP √ √ √ 全协议 FB PMOS √ SSOP10 FS8611BP √ √ √ 全协议 FB PMOS(可省) √ SSOP10 FS8611RPB √ √ √ 全协议 FB PMOS √ SSOP10 FS8611RPC √ √ √ 全协议 FB PMOS √ SSOP10 FS8611SP √ √ √ 全协议 FB PMOS(可省) SSOP10 FS8612 √ √ √ 全协议 OPTO PMOS √ √ SSOP16 FS8612B √ √ √ 全协议 FB PMOS √ √ SSOP16 FS8612BP √ √ √ 全协议 FB PMOS √ √ SSOP16 FS8612C √ √ √ 全协议 FB/OPTO PMOS √ √ QFN4x4-16 FS8612CP √ √ √ 全协议 FB/OPTO PMOS √ √ QFN4x4-16 
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ground_truth: Multiple vacuum processing apparatuses are arranged in parallel.