Abstract　For　the　semiconductor　material,　the　PL　(photoluminescence)　is　a　powerful　but　no　destructive　technology,　which　has　been　widely　used　in　the　semiconductor　industry　and　research　areas,　especially　important　for　the　research　in　the　optical　properties　of　the　third　generation　semiconductor　material.　By　analyzing　the　photoluminescence　spectra,　we　can　get　the　band　gap　of　semiconductor　materials,　estimate　the　composition　of　the　compound　semiconductor　materials,　and　learn　the　inner　layer　of　the　heterostructur　which　is　is　very　difficult　to　get　through　general　physical　or　electrical　measurements.　According　to　different　testing　requirements,　PL　has　evolved　into　a　variety　of　means,　such　as　emission　spectra,　excitation　spectra　and　transient　spectroscopy.　But　the　general　PL　spectrum　measurement　which　we　usually　use,　reflect　only　the　single　point　material　properties　in　the　entire　semiconductor　epitaxial　film.　Although　we　can　get　a　basic　message　such　as　peak　position,　FWHM,　and　further　the　peak　position　of　the　band　edge,　internal　quantum　efficiency.　However,　due　to　the　difference　in　the　environment　of　the　reaction　chamber　in　the　growth　process　of　the　light-emitting　diode　industrial　production,　there　will　be　some　differences　in　the　crystal　quality　of　the　epitaxial　wafers　in　different　locations.　Today　in　order　to　improve　the　industrial　growth　process,　we　need　a　more　efficient　macrodetermine　of　epitaxial　wafers　quality,　and　further　explore　the　reasons.　The　photoluminescence　scanning　technology　(PL-Mapping)　will　play　an　important　role　in　this　regard.　LabVIEW,　as　a　graphical　programming　language,　in　which　programming　can　be　like　building　blocks　and　the　content　of　the　program　itself　also　depend　on　easily　rememberable　icons　and　lines.　It　greatly　reduces　the　test　faced　by　engineers　and　scientists　in　programming.　Programmers　neither　need　to　remember　complex　grammar　and　function　prototypes,　nor　spend　lengthy　learning　time　as　normal　text　programming.　Non-software　industry　researchers　could　quickly　build　a　small　automated　measurement　and　test　systems,　or　develop　a　large-scale　distributed　data　acquisition　and　control　system,　which　LabVIEW　is　fully　capable　of　that.　At　present,　many　厦门大学博硕士论文摘要库research　papers　and　test　system　application　examples　have　been　widespread　concerned.　This　article　provides　an　overview　of　LabVIEW-based　semiconductor　structures　photoluminescence　scanning　system　using　LabVIEW.　In　consideration　of　the　spectra　collected　distortion　originate　from　excessive　weak　fluorescent　signal　of　epitaxial　wafers,　inhomogeneous　background　illumination　noises　and　then　the　inaccurate　physical　parameters　in　spectra　analysis　and　others,　methods　for　optimizing　system　such　as　backlight　deduction,　sample　isolation,　Gaussian　Fitting　are　developed.　The　communication　and　control　with　the　spectrometer　and　motorized　is　realized　with　the　help　of　strong　ability　of　instrument　control　such　as　calling　DLL　and　ActiveX　in　LabVIEW,　Owing　to　the　same　wonderful　ability　in　Data　analysis　and　display,　the　process　of　measuring,　read,　analysis　and　real-time　display　is　easily　integrated　into　a　interface,　hence　the　optical　property　of　sample　on　spatial　discrimination　is　obtained　effectively　and　efficiently.　Finally　Luminance　Uniformity　of　epitaxial　wafer　in　this　paper　is　preliminary　analysed.　Wavelengths　agree　with　temperatures　distribution,　which　affirm　the　importance　of　maintaining　consistent　temperature　in　growth　chamber.　It　is　a　system　friendly　interfaced,　easy　to　use,　high　real-time　and　built　simply,　which　offers　researcher　accurate　and　rapid　measurement.　Keyword:　LabVIEW,　uniformity,　photoluminescence.　厦门大学博硕士