沈文正. 实用集成电路工艺手册.北京 :宇航 出 版社 , 1989 No rm an C S3 ,C how T P , B ow e ~r D H B tc~ n g ch arac teris Ei c s o f p oly M llc o: ~.S iO i a nd MoS i | i n N F 8 a,l d S plas ~'aas S 3l ’ d S tate T e eh n ology ,1983, 26( 1) : i 15~ 123 4 N gt,. y ~ n M i n. h.E f f ec t8 of 0 I a n d S ∞tlm an lso t~op i e e t ch in g of po ty si - l l c or~.S emi ∞n dIL ct0 Irttc rc,ati on at. 1986. ( 5) : i tON i 13 5 E isel e K M . S . a pr ef era bl e c t ch a n t f o r pl a sm a e tch i n g si lt con j E lec t ro — t h em So c . 1981. 12 p ( 1) j 123~ i 26 B P in to R et a 1.R ea c tl v o i on e tchi n g in S F 6 g &s m ix tures J E lec troc hem S e e, t 987. 104( 1) :I 65~ i 76 · 7 7 · 维普资讯 http://www.cqvip.com 1 IC CA D /CA T 技 术 W D 4001用运算放太器宏模型改 进 噪 声 分 析= I m prove nOis e; ~lla ly s is w it h op — a m p.m & c ro mode|( 刊, 葵 ~/ Buxt on, J . E / ec Lr onic Des. 1 992, 40 ( 7) T 5~ 7 4, 76~ 81 .