Process ofspheri cal photoresi st spi n coati ngLI UXi ao- hanl ’孙,FEN GXi ao- gu01。ZH AOJ i ng—l i l ,G AOJ i n- son91,ZH AN G H ong—shen91,CH EN G Zhi —fen91' 2( 1.Key Laboratory of O pti cal SystemAdvancedM anufacturi ng Technol ogy,ChangchunInsti tuteof O pti cs,Fi neM echani cs andPhysi cs,Chi neseAcadem y of Sci ences,Changchun 130033,Chi na;,2.G raduateU ni versi ty of Chi neseAcadem y of Sci ences,Bei j i ng 100039,Chi na)*Correspondi ng author,E-m ai l :l i uxi aohanci om p@ sohu.cornAbstract:Acentri fugal coati ng technol ogyw as researched t ocoati ngthe uni f ormthi cknessphotoresi ston a concavespheri cal surface.Fi rstl y,the cri ti cal factors affecti ng the uni formof photosensi ti ve re-si st and the fi l mf orm i ng force w erei nvesti gated.Then,the centri fugal gl ueadhesi ve force duri ngthefl ow st at e w as anal ysedi n thespheri cal photoresi st spi n coati ng dow nopeni ngbased on the hydrody—nam i c theory.Am athem ati cal m odelt o descri be therel ati onshi p am ongthe fi l mthi ckness and centri -fuge speed,vi scosi tyofphotoresi stand thespi n coati ngti m e w asderi ved.Fi nal l y,i norder t overi fythe correct ness of the f orm ul a,som eexperi m entsof photoresi st spi n coati ng on the K9gl assconcavespherew i th a di am eter of 120m m ,radi us of 300 m m ,vectorhei ghtof 12.5 m mw ereperf orm ed.Theexperi m ental resul tscerti fythat theproposed theoryi s consi stent w i th the actualsi tuati on w el l .O n收稿日期:2010—12—02;修订日期:2010-12-17.基金项目:国防科技预研基金资助项目( N o.10.4.2.ZKl 001)万方数据 第8期刘小涵,等:球面旋涂光刻胶工艺1811the theoreti cal anal ysi s,the uni f ormfi l mthi ckness on the i nner surface ofan enti resphere canbe ob—tai ned w i th thedi sal i gnm entofphotoresi s pi n coati ngaxi s and the m ai n axi s of el ectri cengi ne.W henthevi scosi tyof photoresi sti s 1.1~1.9 Pa and thespeedof m ai n axi s i s 3 000—6 000/r· rai n~,theuni f ormfi l mthi ckness i s0.5~1弘mon a concave sphere.Key w ords:photoresi st;centri fugal coati ng;hydrom echani cs;fi l mthi ckness;vi scosi ty;rotati ng speed