## Sensors, Control and robotics

## Manufacturing Technology

# Ultra small robots and ultra small volume liquid dispensing system

Keyword: Inertia Drive Micro Robot, Magnetic Drive Micro Robot, Ultra Small Volume Liquid Dispensing System

○ Naoyuki Aoyama, Professor, Communications Department, The University of Electro-Communications

Organizations Involved

○ Masahiko Inami, Professor, Communications Department, The University of Electro-Communications

○ Koji Kato, President, Applied Micro Systems

## 【Abstract】

Building on the foundation of the research in micro robot systems by UEC and Prof. Aoyama, UEC started a venture in January 2005, carried out technology transfer by licensing agreement with Applied Micro Systems, and succeeded in developing the following products: (1) Inertia Drive Micro Robot, (2) Magnetic Drive Micro Robot, and (3) Ultra Small Volume Liquid Dispensing System

## [Summary of the technology transfer]

## Technological Impact

(1) Inertia Drive Micro Robot: While observing in a scanning electronic microscope, the robot can manipulate nano-, or micro X, Y, $ \theta $ , or tilt, and consists only of a piezoelectric device. It can perform strength tests on carbon nanotubes, or be used to check for semiconductor defects and repair.

(2) Magnetic Drive Micro Robot: Constructed of a piezoelectric device and an electromagnet, it attaches firmly to magnetic metal baseplates by using the electromagnet, can climb sidewalls, move on ceilings, and move in the directions X, Y, and $ \theta $ . It can be used to position mirrors on a laser interferometer and other tasks.

## Market Impact

Ultra Small Volume Liquid Dispensing System: It is an ultra small volume liquid dispensing system for users who have problems dispensing liquid according to the inkjet method. It can dispense liquid of 1 to 20,000 cP from 0.1 to hundreds of picoliters. Its applications include 1) the divided injection of protein DNA, 2) Application of bond or soldering paste, 3) Repair of wire-breaking in liquid panels, and others.

It solves problems of the inkjet method as follows:

1) Focusing on one desired place is difficult

2) Changing the amount to dispense is bothersome

3) Can’t use baseplates with bumps

4) High-viscosity liquids cannot be dispensed

5) Half of the liquid remains in the ink room

## Project Background

UEC Prof. Aoyama first conceived starting the university venture, and requested that former President of a piezoelectric device maker (NEC Tokin) become the first president. Following that, he also became advisor to UEC Prof. Inami.

## Funding History

1. Oct. 2006 capital investment from Collabo SANGAKUKAN Fund

2. Nov. 2006-Oct. 2007 JST Collaborative Development of Innovative Seeds [Potentiality verification stage]

## I ntellectual property protection

Patent No. 3574293

Application No. 2005-07492 and others

## I nertia Drive Micro Robot (3cm

Pointer

Position

Adjustment Section

Surface to which liquid is to be dispensed

Ultra Small Volume Liquid Dispensing System

## Turning point in the Project

To achieve results from productization through technology transfer, it is vital that the university research lab and development divisions have clearly defined roles and close cooperation.

For more information, contact : Naofumi IDA, Research Cooperation Office, The University of Electro-Communications, +81-42-443-5137, onestop@kikou.uec.ac.jp