Measurement and analysis technology, Sensors

## Ultra High Speed SEM Specimen Preprocessing Apparatus -A New Solution to nano-Level Observation-

Keyword: Ultra High Speed Preprocessing Technology using High Current Density Glow Discharge, A New Approach to SEM Specimen Preprocessing, Collaboration between University and Industry Researchers

## Organizations Involved

O Kenichi Shimizu, Professor, University Chemical Laboratory, Keio University

O Tomoaki Mitani, Deputy Manager, Center for Materials Analysis and Testing, Keio University

O Akihiro Hirano, Manager, Scientific Instruments Division, Horiba, Ltd.

Prof. Shimizu Mr. Mitani

Mr. Hirano

## 【Abstract】

A novel ultra high speed SEM (Scanning Electron Microscope) specimen preprocessing method using high current density glow discharge was developed at Keio University. The technology has been proven and commercialized through collaboration with Horiba, Ltd. With the support from Keio University Intellectual Property Center for a joint research agreement, patent applications and a license agreement and cooperation with the company, the commercial product was delivered to the market within 2 years from the original proposal.

## 【Summary of the technology transfer】Technological Impact

An apparatus with ease of operation was developed for SEM specimen preprocessing, which used to require dedicated art. An ultra high speed preprocessing was realized using high current density discharge.

(1) Surface preprocessing with a very short time( 10 sec. for example. 1/1000 of the time necessary using conventional methods.) is possible.

(2) Reduce surface damages to a minimum.

(3) Mono-layer level fine surface preprocessing.

## Market Impact

The new product was delivered to the market in the autumn of 2006 and full shipment is expected in fiscal year 2007. Around 200 systems per year are expected to be sold in the domestic market as a tool to obtain maximum outputs from high performance SEM or to get better research efficiency for those who are not familiar with the conventional specimen preprocessing art. Higher volume shipment is also expected in overseas market in the future.

●Social Impact

Cross section and interface observation by SEM is the base technology for product valuation in the development of high performance materials such as steel, semiconductor, ceramics, etc. . Speedy, efficient and high level observation technology will contribute to a better efficiency in research and developments.

## Special Features of the Collaboration

Collaboration in joint research was effective in reducing time to market through prototype improvements, development of application and expansion of the areas of application.

## Project Background

University researchers proposed a novel method to the industry. Interested industry agreed to collaborate to prove and develop the technology.

## Funding History

1. 2004/9~2005/9

Joint Research

2. 2006/1~2006/9

Sponsored Research

## I ntellectual property protection

Patent Applications: Japanese 7, Foreign 2

「Glow Discharge Drilling Apparatus」

Japanese Application 2005-121473

US Application 11/405,891

EP Application 06008021.5

## Ultra High Speed SEM Specimen Preprocessing Apparatus

## TENSEC

Apparatus enables, with easy operation, ultra high speed preprocessing of SEM specimen surfaces for observation. 50eV low energy argon ions at high current density give high speed operation with nearly damage free surface.

Fig. Cross section of ceramic spray coating

## Turning point in the Project

○Foster and develop researcher’s inspiration.

○「Seeing is Believing」 Objective valuation of technology with data.

○Promote collaboration between university researchers and industry researchers.