Measurement and analysis technology, Sensors

# Development of Multi-element Simultaneous Monitoring System

- Monitoring Semiconductor Manufacturing Processes -

Keyword: Beneficial results of fundamental research into plasma diagnostics, Patenting technology meeting both economical and social needs, Development of multi-element simultaneous monitoring system by human network support that transcends regions

Masafumi Ito, Professor and Takayuki Ohta, Assistant Professor, Wakayama university

Organizations

Involved

○ Masaru Hori, Professor, Nagoya university

Yasuhiro Higashijima, President, NU System. Co., Ltd.

O Hiroyuki Kano, President, NU EcoEngineering Co., Ltd.

M. Ito

T. Ohta

M.Hori

Y. Higashijima H. Kano

## 【Abstract】

In order to investigate species behavior in plasma processes, Wakayama University and Nagoya University have jointly developed a measurement method and a light source for monitoring species using a micro hollow cathode plasma. Two venture companies were founded under the support of the Knowledge Cluster Initiative of MEXT in order to develop a system capable of simultaneously monitoring the absolute density of multiple metal atoms in semiconductor manufacturing processes such as MBE, plasma deposition, and sputtering. A multi-element simultaneous monitoring system was manufactured successfully.

## [Summary of the technology transfer]

## Technological Impact

• Development of a light source for multi-element simultaneous monitoring system by which small-sized multiple metal atoms can be simultaneously monitored using a micro hollow cathode plasma.

• Unlike the conventional approach in which multiple elements can only be monitored sequentially, with this monitoring system it is possible to simultaneously monitor multiple elements in a plasma that changes very rapidly with time.

• This system is capable of monitoring a variety of processes including MBE, plasma deposition, sputtering and so on.

• It is possible to construct an autonomous processing system by controlling the process through feeding back the measurement results to the processing system. This will enable precisely controlled functional thin films to be produced and will improve yields.

## Market Impact

• The shape of the monitor can be adapted freely to suit the shape of the processing system. It can be mounted on virtually all commercially available processing systems. Market research regarding various semiconductor processing services such as reducing the size of the system and increasing the number of elements that can be measured are currently being carried out.

• Trial calculation of the market size for the monitoring system by the number of units sold for plasma CVD, metal CVD, and sputtering.

2010: 3.5 billion yen

2015: 13.3 billion yen

(Source: NU System survey)

## Project Background

The venture companies were established to manufacture systems that use the absorption spectroscopic technique and light source technique, the joint research results of Nagoya University and Wakayama University, with the support of the Knowledge Cluster Initiative of the Ministry of Education, Culture, Sports, Science and Technology.

## Funding History

1. 2005-2006 Ministry of Education, Culture, Sports, Science and Technology: Knowledge Cluster Initiative (Cooperation with the Industrial Cluster Project)

2. 2003-2007 Wakayama University internal grant : Project research of Faculty of Systems Engineering

## I ntellectual property protection

Patent application: Domestic 2, Overseas 1「Hollow cathode array discharge tube and multi-element simultaneous absorption spectrometer;

patent application 2004-16894], etc.

## Multi-element monitor

Emission of 4 metallic element

Opposed type multi-element monitor light source (diameter: 34 mm, length: 40 mm)

Opposed type multi-element monitoring photo receiver

• Monitor simultaneously the absolute densities of multiple ions of Cu, In, Zn, Mo, and Pb.

• It is possible to monitor multiple metal elements in multitarget sputtering, MBE, plasma devices etc.

## Turning point in the Project

OIt is crucial to commercialise creative research results based on the fundamental research in the university.

OIt is important to constantly check the requirements of the market, and to understand problems associated with it, in addition to the needs at the forefront of industry.

OIt is important to develop human resources who can develop products and understand market trends from a global viewpoint.