Redeposition-free inductively-coupled plasma etching of lithium niobate for integrate... | RTCL.TV
Channel: Social RTCL TV
Date: 2023-09-05

### Keywords ###
#argonetching #inductivelycoupledplasmaetching #integratedphotonics #redeposition #thinfilmlithiumniobate #RTCLTV #shorts

### Article Attribution ###
Title: Redeposition-free inductively-coupled plasma etching of lithium niobate for integrated photonics
Authors: Kaufmann Fabian, Finco Giovanni, Maeder Andreas ,and Grange Rachel
Publisher: De Gruyter
DOI: 10.1515/nanoph-2022-0676
DOAJ URL: https://doaj.org/article/860b27866b734e9db0c49bdf5cc9fae7
Source URL: https://doi.org/10.1515/nanoph-2022-0676



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### Video Timestamps ###
0:00:00 - Summary 
0:00:48 - Title 
0:00:55 - End