MEMS Micromachining Overview 9/9/2014
Channel: Matthias Pleil
Date: 2014-09-10

This lecture was given to my MEMS Manufacturing Process class Fall 2014.  It is only an overview of Surface, Bulk and LIGA micromachining processes. This is similar to a previous lecture given in the spring, 2014. You can find more educational materials on our website: http://scme-nm.org