Influence of a Tailored Oxide Interface on the Quality Factor of Microelectromechanic... | RTCL.TV
Channel: STEM RTCL TV
Date: 22/10/2023

### Keywords ###
#aluminumnitride #microelectromechanicalresonators #oxideinterface #piezoelectricresonators #radiofrequency #RTCLTV

### Article Attribution ###
Title: Influence of a Tailored Oxide Interface on the Quality Factor of Microelectromechanical Resonators
Authors: David D. Lynes ,and Hengky Chandrahalim
Publisher: Wiley-VCH
DOI: 10.1002/admi.202202446
DOAJ URL: https://doaj.org/article/bc8041b0b02241a5bb445906164ad593
Source URL: https://doi.org/10.1002/admi.202202446



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### Video Timestamps ###
0:00:00 - Summary 
0:01:11 - Title 
0:01:16 - Outro 
0:01:20 - End