Plasma-Therm Metal Etcher
Channel: nano@stanford
Date: 2016-08-26

Operating Instructions of the Plasma-Therm Metal Etcher at the Stanford Nanofabrication Facility.

Chapter 1:  Intro to PT-MTL: 0:09
Chapter 2:  Prepare Tool: 0:41
Chapter 3:  Load Wafer: 3:43
Chapter 4:  Run Process: 4:17
Chapter 5:  Unload Wafer:   6:32

For more information:
https://snf.stanford.edu/
http://nanolabs.stanford.edu/