3M™ Trizact™ Pad Conditioners
Consistent performance
from every disk, every time
What if you could design and control every element of your chemical mechanical planarization (CMP) pad conditioner to help you meet your semiconductor fabrication process needs? 3M™ Trizact™ Pad Conditioners are for advanced node processes where precision, reliability and consistency are vital. Using 3M’s proprietary microreplication process, virtually every aspect can be specified at the micro scale and manufactured out of diamond-coated ceramic: ▷ Tip shape – designed and controlled ▷ Height dispersion – designed and controlled ▷ Type of shape – a library of unique patterns, designed and controlled Precise microreplicated patterns help give you complete process control
Increased Pad Life ▶ Consistent and predictable pad finish and pad wear from disk-to-disk helps enable predictive performance. ▶ Help lower your cost of consumables through longer disk and pad life. Yield Improvement ▶ Diamond-coated ceramic virtually eliminates defects caused by diamond grit scratching. Metal-Free Surface ▶ Ideal for advanced node processes sensitive to metallic contamination. Reduced Variability ▶ Microreplication enables tight control of preferred height dispersion, tip shape and pattern. Technical Information:  The technical information, recommendations and other statements contained in this document are based upon tests or experience that 3M believes are reliable, but the accuracy or completeness of such information is not guaranteed. Product Use:  Many factors beyond 3M's control and uniquely within user's knowledge and control can affect the use and performance of a 3M product in a particular application. Given the variety of factors that can affect the use and performance of a 3M product, user is solely responsible for evaluating the 3M product and determining whether it is fit for a particular purpose and suitable for user's method of application. Further, user is solely responsible for following all applicable environmental laws regulations when using the product. Warranty, Limited Remedy, and Disclaimer:  Unless an additional warranty is specifically stated on the applicable 3M product packaging or product literature, 3M warrants that each 3M product meets the applicable 3M product specification at the time 3M ships the product. 3M MAKES NO OTHER WARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OR CONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY OR CONDITION ARISING OUT OF A COURSE OF DEALING, CUSTOM OR USAGE OF TRADE. If the 3M product does not conform to this warranty, then the sole and exclusive remedy is, at 3M's option, replacement of the 3M product or refund of the purchase price. Limitation of Liability:  Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product, whether direct, indirect, special, incidental or consequential, regardless of the legal theory asserted, including warranty, contract, negligence or strict liability.
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Electronics Materials Solutions Division 3M Center, Building 224-3N-11 St. Paul, MN 55144-1000 USA 1-800-810-8513 phone 3M.com/CMP 3M and Trizact are trademarks of 3M Company. Used under license by 3M subsidiaries and affiliates. ©3M 2021. All rights reserved. Please recycle. Printed in USA. Issued: 7/21 16723HB 60-5005-0301-0