Micromachining
Technologies

No opportunity too small.
No production goal too ambitious.
Makino provides ultra-precision micromachining
technologies for the most challenging parts andfeatures. At Makino, we’re machining parts with micro
scale features to micron level tolerances every day.
As applications grow in complexity and shrink in size,
Makino provides the milling and EDM solutions with theextreme accuracy necessary to machine these micro andminiature parts.

Makino Micromachining
In response to demand for new innovations from ourcustomers, Makino is committed to providing new
ideas for micro scale manufacturing. It is our aim tofoster innovation that will lead to engineering of newhigh value products that previously could not be madewithout our technology.
This guide will provide a reference to better understand
Makino’s micro machining technologies, and introduce
key components that must be considered to work inconcert with the machine tool. Without this supporting
investment, it will not be possible to consistently reachthe full potential of this high level machining technology.

20kV

X70

200mm

0165

50 30 SEI

The Key Ingredients
Although Makino cannot present a business model andoperating structure to guarantee complete success,we can help you identify the physical elements that are
required to create a proper foundation from which yourmicromachining business can grow and succeed.
It is critical to have a basic understanding of these
individual items, what they provide, and how theyinteract and affect other elements. A lack of upfront
planning and investment will ultimately result inmachining performance and part quality that will likely
not meet your expectations on a consistent basis.

Cutting Tools

Temperature
Control

Workholding

Toolholding

Temperature Control. Thermal environment
surrounding the machine tool, and associated supporting
devices. For machining accuracy, and repeatability of
2µm or less, it is recommended that the temperature
variation of your machining environment not exceed±1°C.*
Tool Holding. Precision tooling device for holding
and locating the cutting tool. Ideally, this device should
provide locating repeatability of less than 1µm whenclamped in the spindle interface device.
Work Holding. Tooling device for holding the workpiece. Ideally this device should provide kinematic
locating accuracy, repeatability and alignment of 1µm
or less when clamped in the table interface device, ortransferred to another like interface receiver on anothermachine or set-up location.

Machine Tool

Metrology

Machine Tool. Motion device that is essentially thephysical interface between the part design and the final
physical part. If it is assumed that the electronic partmodel is free of error, then this is the point where allgeometric error is entered into the final part.

Metrology. The methodology of inspecting themachining result in reference to a qualified standard.
Gauge R&R standards typically require the inspection
device to provide accuracy and repeatability notexceeding 10% of the total feature tolerance.
Cutting Tools. The physical interface between themachine tool and work piece material. This tool is
responsible for work piece material removal. This tool
can represent a rotating or stationary cutting tool, drill,tap, EDM electrode, or wire EDM electrode.
*If this is not possible, a Thermal Chamber option is available from Makino
to provide a temperature control environment immediately surrounding themachine tool.

The UPN-01 ultra precision wire EDM platform isthe pinnacle of Makino’s 30+ years of research anddevelopment, as directed by the customer’s mostchallenging demands. This machine is regarded as thehighest accuracy wire EDM machine in the world.
This machine was developed specifically to provide“reference” level accuracy, for master gauges and ultra
precision tooling that otherwise could not be produced.

 By implementing the very latest technologies inaxis slideway and motion control systems, this ultra
precision wire EDM platform provides the highest levelof wire EDM machining precision available in the world,
providing guaranteed positioning accuracy of ±500nm(0.5 microns), with 500nm repeatability and achievable
machining shape accuracy of ±500nm.
 Provides capability of utilizing 15 micron diameter wire
 Self-contained machine thermal chamber ensuresconsistent temperature environment for machine Can successfully auto thread 20 micron diameter wire
through 30 micron diameter start hole
 Roundness of machined hole is 600nm in XY plane,
and when tapering, UV plane roundness of hole iswithin 200nm

0.0169mm

Machine Tool

Ultra Precision Wire EDM

Machine Tool

Why Horizontal

1. Superior automatic wire threading
performance
The innovative wire threading system on the UPN01 and UPJ-2 machines, provide automatic threading
performance in situations that are not possible to thread
the wire manually. This technology permits completely
unmanned threading operations where the start holediameter is as small as 30microns, with pitch distances
between holes of 150microns. Since the wire is fed
through the start hole by using an air vacuum system,
there is very little chance of a failed threading operation.

These start hole configurations most commonly create
failure for conventional wire threading systems. These
scenarios are easily managed by the UPN-01 and UPJ-2
wire feeding systems. This unique ability provides
the assurance of a fully completed job cycle during
unmanned operations.

Wire Diameter - 20mm

Diameter

30mm

Pitch

150mm

Thickness

300mm

Machine Tool

2. Safe removal of slug, during unmanned
operation

3. Slug management / unmanned cut-off
operation with fine diameter wire

During slug removal, the slug falls freely to the bottomof the tank, safely away from the upper and lower
heads, which are positioned to the left and right handsides of the work piece. During the same operation ona vertical wire EDM, small slugs occasionally enter the
lower head, thus interrupting machine operation.

During the slug cutoff routine, the slug naturally falls
downward, away from the wire. When this operation is
performed on a conventional vertical wire EDM, small
slugs commonly contact the wire during cut-off , thus
breaking the wire, and interrupting automatic machine
operation. This situation is especially common while
using wire diameters of 70 microns and smaller.

Completely Unattended Operation

Core Remover Option

Vertical Wire

Horizontal Wire

Core remains in workpiece.

wire

wire
core

workpiece
core

workpiece

Sensor for
confirming
core removal
Jet nozzle toflush coreCore falls naturally.

Core remains in workpiece.

UPJ-2
 Horizontal wire feed Submicron accuracy
 20µm minimum wire diameter Auto feed Æ30µm start hole
 Dielectric oil

Benefits of Using an Ultra Precision
Machine Platform High predictability of machining result
 High repeatability of machining result after processadjustment is made
 Improves ability to reach high level surface finish, as
multiple pass processing is needed. Nanometer levelsof positioning repeatability facilitate “mirror finish”
surface finish results
 Gauge level feature accuracy is achieved with standard
machining processes

UPV-series
 Vertical wire feed
 1µm accuracy
 50µm minimum wire diameter

0.06959

 100mm cut thickness
 Dielectric oil

mm
0.500
0.400

x2000

0.300
0.200
0.100
0.000
-0.100-0.200-0.300-0.400Roundness
0.00041mm-0.500 Tungsten cabide 0.2µm Rz surface finish

WYKO NT8100(VEECO)
Minimum Resolution: 0.1nm

 0.16mmRy surface finish Æ70mm machined hole

 10mm thick 400mm roundness shape error Tungsten carbide

Machine Tool

Other Ultra Precision Wire EDM Platforms

Machine Tool

Part Samples

PCD Cutting Insert
 70µm wire used
 PCD Thickness: 1.5mm
 Substrate Thickness: WC / 3.0mm
Spinerret Die Number of Passes: 4

 60µm start holes Surface Finish: 0.7µmRz 30µm wire used

 Machining Time: 23 minutes

 70µm width of finished feature Machine Used: UPV-3

 Work piece thickness: 7mm
 Machine Used: UPJ-2
Key Machine Technologies
 Automatic wire threading
 Utilization of 30µmØ diameter wire Ultra precision positioning accuracy of machine tool
Benefits
 Reliable, predictable machining results
 Reduced cost of tool / part production
 Unmatched precision of completed tools

Key Machine Technologies
 Dielectric oil Anti-electrolysis generator
Benefits
 Enhanced surface finish
 Elimination of electrolysis
 Improved tool life

Machine Tool

Micro Module Gear 15µm wire used
 Module: 0.018mm- Module = Length of pitch circle diameter per tooth

Fine Blanking Punch

 Outer Gear Diameter: 0.216mm

 150µm wire used

 Number of Teeth: 10

 Punch Thickness: 15mm

 Work piece thickness: 0.200mm

 Surface Finish: 0.2µmRz

 Material: Tungsten carbide

 Material: Tungsten Carbide

 Machining Time: 76 minutes

 Machine Used: UPV-5

 Machine Used: UPN-01

Key Machine Technologies
 Dielectric oil Anti-electrolysis
 Fine finishing generator
Benefits
 Achieve 2x better surface finish vs water dielectric Eliminate electrolysis
 Eliminate manual polishing Improved tool life, geometric integrity of tooling This immensely flexible CNC sinker platform isregarded as the most accurate sinker EDM in theworld, relative to its travel envelope and wide scope of
flexibility
 Provides positioning accuracy of 1 micron across theentire XY axes stroke, and axis squareness of 1 micron Using a uniquely designed, intercooled Z axis, theEDAC1 effectively provides Z axis depth control within
1 micron even during long hours of high-speed Z axis
jumping

The intercooled spindle incorporates the circulation
temperature controlled oil to thermally stabilize themoving components of the Z axis ram
 Long duration, Z axis jump motion, without change
in electrode position
 Consistent surface blend of Z level tool surfaces to
sub micron levels

 Using rotary scale feedback, the Mi C-axis of the
EDAC1 provides indexing accuracy of 2 arc seconds,
facilitating ultra precision indexing during unmanned
operation The EDFH1, based upon the mechanical platform of
the EDAC1, provides a fully automated system forproducing high precision, micro-sized holes

Coolant

Machine Tool

Ultra Precision Sinker EDM

Fine Hole Machining Approaches
Guided ElectrodeIntelligent design, incredible flexibility /provides the following capabilities in asingle machine Precision CNC die sinking / with automatic global
orbiting in any axis direction
 Spindle rotation (2000rpm) + indexing
 Maximum electrode weight of 5kg
 Maximum work piece weight of 50kg
 Best achievable surface finish of 0.2umRy Fine diameter electrode spin-dressing / minimum
dressed diameter of 0.006mm
 Guided electrode machining / smallest diameter of
0.015mm Through spindle flushing with 10mPa flushing pressure
 Automatic electrode changing of pipe electrodes andguide with diameter as small as 0.080mm.

 Incorporates electrode guide, and generally uses
rotating electrode Can utilize pipe eletrode with through electrodeflushing up to 1560psi
 Ideal for precision start holes Ideal for large quantity of repeating holes, where longer
electrode length is desired for automatiion purposes Must use stock diameter electrode material/stock die
guide size
 Aspect ratio of hole can be as high as 75:1 from eachside of the work piece Smallest hole: Æ25µm

Machine Tool

CNC Sinking + Fine Hole EDM

Fine Hole Machining Approaches

Extrusion Die insert: Tungsten Carbide

Dressed Electrode 0.100mm holes through 0.5mm thickness (x780)

 Incorporates spindle mounted electrode - no guide

Key EDFH1 Machine Technologies

 Provides for custom dressed electrode diameter,
shape as desired Through spindle flushing (1500psi)
 Guided, rotating electrode Tungsten carbide machining circuit
Machining Technique: Guided pipe electrode Ideal for high-precision finished hole, or precision
location of hole
 Can utilize dressing electrode mounted to table, orwire dressing option
 Aspect ratio of hole generally less than 15:1 fromeach side of the work piece Smallest hole: Æ10µm

Dressed electrode: Æ14µm

Machined hole: Æ20µm through 0.150mm thickness

Machine Tool

Fine Hole Machining Approaches

Machine Tool

Part Samples

Micro Probe

Plastic Mold/Mobile Phone 0.030mm shank x 1.00mm long / 0.050mm sphere Cavity Material: Stavax

 Material: Tungsten carbide Electrode Material: Oxygen-free copper

Key Machine Technologies

 1μmRz(0.12Ra).

 Precision rotating spindle (2000 rpm)

Key Machine Technologies

 Ultra fine spark generator (SPG circuit) Ultra fine spark generator (SPG circuit) Tungsten carbide machining circuit Mirror finishing circuitry

 Sub-micron positioning accuracy/repeatability

 Highly rigid machine structure facilitates larger
workpiece and electrode sizes Machining technique: Spin dressing + side machining 30 amp power supply provides aggressive roughing
performance for larger electrodes

Machine Tool

Part Samples

Micro Rotary Tool

Connector Mold Insert

 Æ0.4mm x 300mm

 Material: Stavax

 Material: Stainless steel Electrode Material: Oxygen-free copper
Key Machine Technologies
 Ultra fine spark generator (SPG circuit) Horizontal machining and orbiting Sub-micron orbiting increment for ultra precise size
control

Key Part Feature 5µm inside corner radii
Key Machine Technologies
 Ultra fine spark generator (SPG circuit) High accuracy Mi C-axis (2 arc second positioning
accuracy)
 Sub-micron positioing accuracy/repeatability
 Z-axis core cooled spindle

High Value Target Market Segments

It is no secret that all consumers consistently expect
innovative, higher quality products, at the same pricepoint or lower than a previously used product. Thesehigh expectations place more performance and costpressures on the tooling providers than ever before.

 LED mold surfaces

Makino is helping to meet these demands by providing
machine tool products that reduce the dependence uponhigh cost labor and subsequent finishing operations. Our
end goal is to help you present a higher quality productto your customer, in a shorter period of time, at a lower
price point.
These high precision, high performance machine
platforms incorporate a wealth of accumulated
technologies to run faster, machine hardened materials,
and provide finished tool surfaces that do not require
subsequent finishing operations.

 Finished mold components, cavities for micro mold tooling Ultra precision stamping die components
 Gauges Micro drilling Micro thread finishing Fuel cell tooling Solar power generation
 Fresnel optics
 Electrode machining Hard tooling/direct machining
 Mold/part for semiconductor manufacturing
 Ultra precision single piece components
 Research & development

Machine Tool

Market Place DemandTo establish final mechanical alignment, our ultra
precision machines are assembled in individuallycontrolled rooms, that match the environment of thecustomer’s installation site.

Meticulous preparation, assembly, and alignment of themachine tool components provides a foundation for long
lasting mechanical precision.

*Linear accuracy is easily electronically compensated according totemperature after installation, but the squaring alignment of themoving axes must be established and held at constant temperature.

Hand scraping of guideway surface.

Precision ground and lapped guideway surfaces.

Machine Tool

Control and CraftsmanshipSimply stated, work piece surface finish is a direct resultof the travelling motion of the cutting tool edge as it
interfaces with the work piece material. The ability ofthe machine tool to consistently repeat this motion, will
dictate the minimum achievable surface finish.

The Makino Spindle
In addition to exceptional quality machine tool
construction and loop stiffness, Makino’s patented
spindle technology delivers: Precise control of the cutting tool edge
 Sub micron tool run-out and spindle vibration,
characteristics that are critical in optimizing tool life andhigh quality surface finish
 Predictable, efficient and consistent performance formicro drilling application
 Unusually wide range of machining capability (400 45,000 rpm operating speed on same spindle)- Rough machining- Rigid tapping / thread milling- Core cooling to provide continuous full rpm operation
for finishing processes- At full rpm, peak to peak vibration level is below 1µm

The inherent stiffness and mass of the machine tooland spindle interface to the cutting tool, will ultimately
dictate the tool’s ability to efficiently machine hardmaterial.

Machine Tool

Machine Loop Stiffness =Cutting Tool Stability

Machine Tool

Sub-micron Positioning of the Tool Tip

What Is Hybrid Tool Length Measuring Device?

Makino’s unique Hybrid Tool Length Measurement(HTLM) technology provides simple, delicate andhighly accurate tool length measurement of tools withdiameters as small as 10µm. Facilitates effective
utilization of micro end mills and micro drills providing
submicron control of tool tip location and control of tool
blend accuracy to less than 1µm.

Non-contact sensor

Key Features:
 Provides tool length measurements to 1µm accuracy
and repeatability for tools as small as Æ10µm
 Automatically compensates for slight spindle
displacement changes for varying spindle speeds

Low pressure contact type probe

Benefits:
How Does the HTLM/Measuring Process Work?

 Automated, reliable, safe pickup of micro tools
 Tool length measurement accuracy and repeatability
is 5-6x better than conventional laser. This issue isespecially critical for smaller diameter tools

Rotate atslow speed

Spindle rotation
applied using samecommand as program

When spindle displacement
stabilizes, machining begins withcompensated values

 Consistent control of tool blending, regardless of
spindle speed

GrowthMeasure Tool
LengthMeasureSpindle Nose

Spindle Growth

Measure Spindle Nose
Displacement

HTLM Tool Blend Example
Material:

NAK80

Tool:

R1 ball end millSize:

10 x 10mm

Slope of machined face:

15°

Surface step difference:

<1mm

1mm

40k min-1

30k min-1

30k min-1

20k min-1

Mechanical Micro Drilling

Machining Approach Hale machining / non rotating cutter
 Using monocrystal diamond 2000mm / min feed rate Sub-micron positioning accuracy/repeatability
 Material:

A7075

 Step over:

0.200mm Step down: 0.002mm
Features: Machine platform: iQ300 Vertical Machining Center Thermally controlled, stable mechanical platform 10nm minimum increment of axis movement
Benefits:
 Submicron control of feature shape, form accuracy possible
 Near optic-quality surface can achieved directly from machine Aperture: 75µm thick brass
 Holes ranging from Æ12µm (0.0005”) to Æ100µm (0.004”)
 Mechanical drilling of holes ranging in diameter From (12µm to 100µm) facilitated by machine stiffness, lowspindle vibration and run-out as well as using the ATLM
device for tool tip registration.

Machine Tool

Optic Surface Sample - 0.012mmRa Finish Hole diameter:

Machine Tool

Filter Insert

Restrictor Plate

Æ100µm Material thickness: 500µm / 5:1 aspect ratio Number of holes:

1229 / 1 drill used

 Material:

6061 Al / water soluble coolant

 Machine used:

V22

Key Tecnologies:

 Hole diameter:

 SGI.4 / Precise, efficient control of drilling peck cycle

 Material thickness: 500µm / 10:1 aspect ratio HTLM Tool length measurement

 Number of holes:

61 / 1 drill used

 Low vibration, low run out spindle

 Material:

303 Stainless Steel / water soluble coolant

 Machine used:

V22

Æ50µm

Benefits:
 Efficient, predictable, high speed micro drilling

Key Tecnologies:

 Simple, effective measurement of drill tip to within 1µm accuracy

 SGI.4 / Precise, efficient control of drilling peck cycle
 HTLM Tool length measurement
 Low vibration, low run out spindle
Benefits:
 Efficient, predictable, high speed micro drilling Simple, effective measurement of drill tip to within 1µm accuracy

Keys to Successful Micro Drilling

Keys to Successful Micro Milling High quality micro drill geometry / no run out fromshank to flute to tip High quality flute and cutting edge tool geometry

 High precision tooling assembly / no run out fromspindle interface to tool holder to collet to drill shank Effective control of moving elements of the machine
tool during machining cycle / it is important tohave optimized movement of machine axes, yet nodeviation in position can be tolerated as the fragile tool
will be damaged

 High precision, highly controlled spindle / dynamic
characteristics of spindle should not add run out or
vibration to the tip of the drill Effective control of moving elements of the machine tool
during machining cycle / it is important to have optimized
movement of machine axes, yet no deviation in position
can be tolerated as the fragile tool will be damaged
 Full understanding, and correct management of chip loadon tool Implementation of correct entry and exit (lead in, lead out
tool strategy. This subject goes hand in hand with the“chip load” statement above Zero run out tooling / regardless of shrink style or collet
style holders
 Get to know the basics of the material structure of yourwork piece. This information will provide insight to themost effective ways to machine the material. E.g. What isthe best tool geometry, feed rate, coolant type, abrasive
or non abrasive machining, etc.
 Work holding: It is imperative to employ effective workholding strategies, as this provides the foundation of yourentire process. Considerations: Does my strategy permit simple and accurate movement of
the part, on-off-on the machine during machining. In processinspection, or from one machine to another High quality twist drill Does your strategy provide access to multiple sides of the part?

 Æ50µm x 900µm length of flute Does your strategy place an external clamping force on the partthat cannot be tolerated by your final part?

Cutting Tools

 High precision, highly controlled spindle / dynamic
characteristics of spindle should not add run out or
vibration to the tip of the drill High precision tooling assembly / no run out from spindleinterface to tool holder to collet to drill shank

Workholding Solutions
Work holding solutions can be as varied as the partgeometry, so it is important to be flexible and creative.
Since cutting forces during micro machining are notcommonly high, consider the following ideas that are
effective solutions: Thin material: Can generally be mounted to a flat surface
and held from the back side using various types ofadhesive**: Tape Epoxy
 Super Glue**Make sure you plan your exit strategy first (how will you
remove your finished part, what solvents are safe to use, etc.)

 Parts with complex outer geometry that need to be
externally clamped.
 Create a machined nest that conforms to theperimeter of the part. A collapsing jaw designed
into this nest will work nicely as a custom formed
clamping vice. A cleverly planned stop pin will also
provide a positive stop so as not to crush the workpiece during clamping.

Do not confine your micro work holding solutions to yourexperience on macro sized parts.

Toolholding / Workholding Consider “potting” the part inside of a nest using
machine-able, and dissolvable epoxy. This solution
will permit you to machine the part from manydifferent directions, while still having a firm hold on
the part. After certain operations are completed,more epoxy can be added to that surface so as
to maintain effective hold. After all machining
operations are complete, the epoxy can be removed
with appropriate solvents or release procedures.

High Quality Tooling/MillingHigh Quality Tooling, Supplies for EDM

It is imperative that high quality cutting tools, micro
drills and tool holders are employed to provide optimum
spindle performance, tool life and surface finish. This is
not a place where cost short cuts should be considered,as this is one of the most critical points that affect tool
life, surface finish, cut accuracy and longevity of thespindle.

Fine Hole EDM Electrodes:
 Sumitomo Electric Balzer / Germany

The following is a recommended list of companies that
we recognize as consistent suppliers of high quality
tooling, and tool holders.

Tool Holders:
 MST
 Nikken Yukiwa
 Big Kaiser

Dielectric Oil:
 Iona Plus Commonwealth Oil

Toolholding / Workholding

Cutting Tools / Micro Drills:
 Union Tools
 NS Tool
 OSG
 Hitachi
 Contour Fine Tool /diamond tooling Polkhom / Voha
 Titex
 Guhring

Fine Diameter EDM Wire: Sumitomo Electric (Æ15µm to Æ50µm)

Integrated ToolingIntegrated Tooling Examples

It is recognized that the most time consuming, and high risk
portion of the parts manufacturing process occurs during
the initial set-up and qualification of the work piece element.
In order to eliminate the duplication of this effort during thepart manufacturing process, an integrated tooling systemshould be implemented. Several commercial solutions areavailable that provide the following benefits:

Erowa (Compact Combi)

 Kinematic locating surfaces that provide locating
repeatability of <2µm. During daily use, it has beenfound that these systems actually provide less than 1µm
repeatability in most applications

Machining Chuck

Right Angle Adaptor

Part Pallet/Holder

Hirschmann Standardized chucking devices provide transferrable
location and mounting across separate machine platforms
Toolholding / Workholding During process development, it is common to require
removal of the part from the machine to perform offline
inspection. Integrated tooling provides simple on-off-on
chucking without concern of re-locating the work piece orelectrode pallet.
 Once a work offset is established and saved for yourmachine, it is possible to simply re-register this work
location via nc program when the job is re-introduced tothe machine tool.

System 3R (Macro Nano) If you are preparing materials for an outside customer,
integrated tooling allows you to literally “transfer” partand pallet locations from your facility to your customer.
 Following manufacturers guidelines, these systems
can be implemented in the following manufacturing
processes:
 Grinding Molding Turning Wire EDM
 Milling Sinker EDM
 Stamping Laser

Machining Chuck

Machining Chuck and Work PalletMachine Environment Control

Machine Thermal Chamber

Temperature stability is critical in controlling micronlevel machining and inspection processes. Variation ofthermal stability, creates variation in process results.

In the case where the complete machining room cannot
be thermally controlled, an optional thermal chamber canbe selected for the machine tool. This chamber isolates
the machine tool from temperature fluctuations that may
occur in the machining room, thus minimizing change inoverall machining accuracy.

Reference:
The thermal expansion coefficient of steel is 7.6 (10 -6 in/in°F)

UPV-3 (without thermal chamber)

UPV-3 / (with thermal chamber)

Environmental Control

Thermal Chamber Test Results:
Total room temperature fluctuation of room = 5.0°C / Machining chamber
thermal fluctuation = 0.6°C

me-trol-o-gy: The science of weights andmeasures, or measurement

Metrology for Micromachining
Identifying the perfect inspection device for validating
your micromachining requirement will be challenging.
Due to the specific design intent of these highly
specialized devices, it is important to realize that you will
not be able to find that singular “perfect” inspection toolthat satisfies all of your needs.
The following pages will provide illustration of commonlyused metrology devices to help make you aware of thesechoices and the benefits that they may present to you.
These systems are provided for reference and example.
You may find systems that provide superior performanceand value specific to your application and budget.

Metrology

3D Optical Microscope

3D Optical microscope systems are extremely useful inproviding high quality, high resolution 3D images of partsor features that must be magnified for effective viewing
and interpretation.

Hirox KH7700

Image of Æ120µm cross holes

Strengths:
 Qualitative analysis / medium range focal depth,
magnification range from 50x - 7000x
 Quantitative measurements / to within 2 microns,
dependent upon magnification level and calibration
 High magnification movie recording, provides rotational
imaging of part or features, as well as capturing ofactuating features/parts, to illustrate movement andinteraction.
Image of Æ50µm micro drill High depth of field (presents 3D image where most of
the image field is “in-focus”
 3D synthesis of “pocketed” features, cross sectionalviewing of blind features
Limitations:
Metrology

 Measuring capability is limited by pixel resolution(generally not advised for inspection accuracies lessthan 3 microns).

Multi-Sensor Vision System
Strengths:
 Through hole or through feature measurements, whereback lighting contrast can be applied Blind feature measurement, where top surface contrast
can be detected Depth measurement in Z axis direction
 Feature measurement in XY plane / using contact
probe or optical vision system Pitch accuracy measurement (center to center location
measurement of multiple features on the same workpiece) / Accuracy of this measurement is solely reliant
upon precision of XY stage
Limitations of Use:
 User selectable variables such as lighting, magnificationand focal height may effect measurement accuracy
 Stage travel of XYZ will limit overall part size

Vision systems provide excellent measurement capability
where feature profiles can be highlighted with surface
and/or back light illumination. Additional capabilities oflaser and contact probe measurements provide excellent
utility for surface depth measurements as well asfeature sizes in the XY plane. Submicron measurement
accuracy can be realized in many cases, while depth
accuracy of 1 micron can be achieved using a “throughthe-lens laser. Size and pitch accuracy will be part andfeature dependent, and will vary based upon the X,Ystage accuracy of the measuring device.

Metrology

Alicona Infinite Focus
In the micromachining environment, it becomesincreasingly difficult to apply traditional tactile
measurement techniques to quantify features of formand surface topography. The unique capabilities ofInfinite Focus provides a simple, yet powerful interface
to quickly acquire and analyze highly dense surface data
points, with sub micron resolution and measurementcertainty. This technology enables the user the ability
to understand and make efficient judgments related tomicro scale surface features.

Infinite Focus technology combines the ability tocharacterize surface roughness and form measurement
using the same instrument:
 Non contact, high resolution, 3D metrology technology
 Rotary scanning of cutting tools provides the ability
to fully analyze cutting tool flute geometry, diameters,
relief angles and cutting edge tip radii Provides the ability to acquire surface data on verticalflanks up to 87 degrees
 Highly dense data sets from scans, allow for precise
quantitative comparison to native model, as well as
reverse engineering into tool path
 Field Imaging for larger surfaces / automatic stitching
using true color alignment of data sets
 Vertical measurement resolution as fine as 10nm
(dependent on objective)

Tooth Surface

Micro Turbine

Alicona / IFM G4 Micro Coordinate Measurement System(Images courtesy of Alicona)

Metrology

Optical Interferometric Profilers
Strengths:
 High resolution measurement of surface roughness,
surface topography (below 1nm or better) Non contact sensing / no harm to surface being
measured 1nm measurement repeatability
Limitations of Use: Sensitive to the angle of the measured surface relative
to the focal plane XY field of measurement is limited by objective lensand focal depth Relatively “shallow” measurement height in Z direction

Metrology

Coordinate Measuring Machine (CMM)

Stylus Profilometry

Utilizes contact probe to identify and measure workpiece surface in XYZ plane.

Utilizes low force, contact probe to scan work piecesurface.

Strengths:

Strengths:

 Provides 3 dimensional information for part or feature
position.

 Large scanning distance (up to 120mm) / X axis
direction

 Vision based (non contact) measurements can be
performed with optional equipment

 Large topographical sampling range (up to 4mm) / Z
axis direction

 Large travel envelope / facilitates larger part andfeature span measurements Surface finish and topography measurement data areprovided

Limitations of Use: Measurement “spot size” can be as small as 200nm(dependent upon material, probe size and probe force) Relatively high probing force / can produce artificial
error due to part deflection
 Probe diameter will limit access to and measurementof micro features

 Cost effective solution vs. optical interferometricsolutions / (application dependent)
 High resolution in Z axis plane
Limitations of Use:
 Typical measurement is along single axis line. If
additional data is required, probe would need to be repositioned and a new scan would need Contact probe can potential “scratch” material surface
during measurement process

Metrology

Glossary
Makino micromachining
The process by which a part feature having dimensionof 1mm x 1mm or smaller is produced by a removal
machining technology that is relevant to the Makino
machine tool products such as Wire EDM, Ram EDM,
vertical and horizontal machining centers.
Precision machining
The machining process by which a machined feature
can be produced to a specified size within a tolerance of
1 micron, and located to a of 1 micron, and then can be
replicated to within a tolerance of 1 micron.
Ultra precision machining
The machining process by which a machined feature canbe produced to a specific size and located to an accuracyof less than 1 micron. The replication of this process
shall produce the feature to a specific size and location
where the deviation shall be less than 1 micron.
Air bearing slide way
Where the machine tool slide way surface is lubricatedby pressurized and conditioned air
Thermal chamber
Where the machine tool enclosure is insulated andprovides a self conditioned environment to maintaina constant air temperature in the work zone of themachine tool and work piece
Repeatability
The variation in results when performing the same task
repeatedly
Accuracy
The clustering of data about a known target. It is
the difference between a physical quantity’s averagemeasurements and that of a known standard, accepted‘truth,’ vs. ‘benchmark.’ Envision a target with manyarrows circling the bullseye, however, none of them arenear each otherwww.makino.com

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