Introduction to Precision Measuring Instrument Solutions

PRECISION IS OUR PROFESSION

Catalog No. E11018(3)Introduction to Precision Measuring Instrument Solutions— Semiconductor Industry Measurements —Measurement Solutions for Semiconductor Manufacturing Processes
Measurement solutions for a wide range of fields in the semiconductor manufacturingindustry, which is growing rapidly following a shift to production of electric vehicles,
expansion of services in line with the implementation of 5G, etc.
Industries Using Semiconductors

Automobile (Intelligent manufacturing industry)

Smartphones (Intelligent communications industry)

Server, Cloud data center

Semiconductor

Digital home appliances (Digital camera, TV, Washing machine)

High-speed railway (Intelligent manufacturing industry)2

Measurement Solutions for Upstream Semiconductor Manufacturing Processes
A / N MARK (SEMI standards): Width, Position,
Dot diameter and depth

Parts for CVD equipment: Ceramic heater, Silicone ring
Flatness, Cross-sectional form analysis, Surface roughness

Vision Measuring System QUICK VISION Pro,
Non-contact 3D Measuring System Hyper QVWLICoordinate Measuring Machine, Surface Roughness
Measuring Instrument, Contour Measuring
Instrument, Non-contact Laser Probe-equipped CNC
Vision Measuring System QVH4 Pro

Parts for CVD equipment: Shower head Nozzle holeinside diameter, Roundness, True position, Surface
texture analysis (3D Roughness)

Vision Measuring System QUICK VISION
Pro with STREAM function, Non-contact 3D
Measuring System Hyper QVWLIUpstream
Process

Wafer manufacture

Pattern formation
to Element formation

Flattening
CMP (Chemical Mechanical Polishing)

Photomask
Diamond blade
Ingot

Wafer

Photosensitizer

Repetition

Transistor

Wafer

Polishing plate

Wafer
Wafer

External diameter of ingot

Lithography equipment

Wafer thickness

Laser Scan Micrometer

High-accuracy Linear Scale

High-accuracy Linear Surface Roughness
Gage LGH,Measuring
High-accuracy /Instrument
resolution Measuring
MachineLitematic VL-50

Back-surface roughness

Parts for CMP equipment: Polishing pad
Groove width, Groove depth, Groove pitch,
Surface roughness

Vision Measuring System QUICK VISION Pro,
Surface Roughness Measuring Instrument

3Parts for etching equipment: Electrostatic chuck, Silicone ring Flatness, Cross
section, Surface roughness

Coordinate Measuring Machine, Surface Roughness Measuring
Instrument, Contour Measuring Instrument, Non-contact Laser
Probe-equipped CNC Vision Measuring System QVH4 Pro

Probe card, IC test socket

Vision Measuring System QUICK VISION Pro with STREAM function,
Measuring Microscope

Pin height measurement

Wiring formation
Oxide film

Wafer

Hole measurement

Wafer inspection
To Downstream
Process

Metal film

Transistor

Parts for etching equipment: Shower head Nozzle hole inside diameter,Roundness, True position, Surface texture analysis (3D Roughness)

Vision Measuring System QUICK VISION Pro with STREAM
function, Non-contact 3D Measuring System Hyper QVWLIWafer prober, Probe needle

Microscope Unit,
Measuring Microscope, Profile Projector

4Measurement Solutions for Downstream Semiconductor Manufacturing Processes
Cross-sectional
observation
Measuring
Microscope

Chip thickness
LGH

Lead frame
Width, Pitch, Height, Twisting action, etc.
Vision Measuring System,
Measuring Microscope

Lead width, Pitch, Height variation

Lead width, Pitch, Gap

Vision Measuring System,
Measuring Microscope

Laser Scan Micrometer

Downstream
ProcessDicing

Die bonding toWire bonding

Encapsulationand Separation

Marking toLead forming

Encapsulation and Separation
Lead frame0000

Bonding wire

Height of burr on the backsurface after dicing
Non-contact 3D Measuring
System Hyper QVWLI,Measuring Microscope

Wire loop height
Vision Measuring System QUICK VISION Pro,
Non-contact 3D Measuring System Hyper QVWLI,
Measuring Microscope

Max. height5

Solder ball height, Diameter, Pitch, Coplanarity ofpackaged circuit board
Non-contact Laser Probe-equipped CNC Vision
Measuring System QVH4 Pro,
Non-contact 3D Measuring System Hyper QVWLI,
Measuring Microscope067 2209(3)Ae-(CH) NE-(JP3), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contractbasis.

Find additional product literatureand our product catalogue
https://www.mitutoyo.co.jp/global.html
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