Catalog No.E13013

SERIES 542

High-accuracy Linear Gage
LGH Series
New Contact-type Length Measuring
Sensor Offers High Accuracy andResolution and a Wide Measuring Range

ResolutionSensor Systems

SERIES 542

High-accuracy Linear Gage

LGH SeriesFeatures• This series has achieved the outstanding accuracy of0.005/0.01µm (according to model), equivalent to that of alaser interferometer, and a wide measuring range of 10mm.
• A compact body design makes a significant contribution
to a downsizing of this gage itself, which is best suited forcalibration/evaluation of master gages as well as measurementof high-precision parts and as a length measuring sensor
incorporated into high-precision positioning/control units.

• A low measuring force model is available. This enables
measurement of easily-deformed workpieces or the thicknessof delicate films.
•Every LGH series gage is bundled with a dedicated counter.

LGH-1010(C)-B-EH• This series is equipped with a newly adopted
photoelectric reflection-type linear encoder,to achieve an excellent resolution of 0.01µm,
a measuring accuracy of 0.2µm and ameasuring range of 10mm at a low price.
• Responsivity has been improved by 2.8 times(250mm/s => 700mm/s) compared to theprevious model.

LGH-0510(C)-B-EH• This series is equipped with a newly
developed ultra-high precision transmissiontype linear encoder, thereby achieving theoutstanding resolution of 0.005µm (5nm).
• A measuring accuracy of 0.1µm has been
attained over the wide measuring rangeof 10mm. This series is most suited forcalibration/evaluation of master gages
where its wide measuring range is a greatadvantage.

Optional Accessories

Quality Assurance• LGH stand: 971750

SENSORPAK (Measurement data loading software)• Spindle lifting cable: 971753• SENSORPAK (Measurement data loading software): 02NGB070

LGH stand971750
This LGH stand greatly helps the gage to achieve high accuracy.
Mass: 23kg
Maximum measuring range
LGH-1010(C)-B-EH: 0~137mm
LGH-0510(C)-B-EH: 0~139mm
Measuring table: granite

02NGB070
This is a software program that allows graphic meter
indication and control chart display as well as recording/storage of measurement data.
* To connect between a PC and the exclusive counter, aUSB cable (A-B type) is required separately.

Standard Accessories:
Inspection certificate

Unit: mm250300971753 Mass: 50g
This is a spindle lifting release for LGH.

802534〜175

Gage mounting hole
ø15H7Spindle lifting cableø50100270（350）1102Option· Calibration certificate· Traceability system chart

Application

Master gage calibration/evaluation

Inspection of high-precision parts* Needle contact-point mounting example

Specifications
Resolution 0.01µm / Accuracy 0.2µm model
Resolution 0.005µm / Accuracy 0.1µm model
542-715 (Standard)
542-716 (Low measuring force)542-720 (Standard)
542-721 (Low measuring force)
Order No.
Measuring range
10mmResolution
0.01µm (0.05µm, 0.1µm, 0.5µm, 1µm can be selected from the counter) 0.005µm (0.01µm, 0.05µm, 0.1µm can be selected from the counter)
0.2µm
0.1µm
Measuring accuracy (20°C) *1
0.1µm (2σ)
0.02µm ( 2σ)Repeatability (20°C) *1
0.1µm
0.05µmRetrace error (20°C) *1
Contact point downwards
0.65N or lessApprox. 0.12N
0.65N or lessApprox. 0.1N
MeasuringContact point horizontal
0.55N or lessNot applicable
0.55N or lessNot applicableforce
Contact point upwards
0.45N or lessNot applicable
0.45N or lessNot applicable
Position detection method
Photoelectric reflection type linear encoder
Ultra-high accuracy transmission type linear encoder
Detectable operation speed
In normal measurement: 700mm/sec; for peak detection: 120mm/sec
In normal measurement: 250mm/sec
Mass of gage head
Approx. 370g
Approx. 370g
Carbide-tipped, Sø3mm (M2.5 (P=0.45)×5mm), standard contact point: 901312 Carbide sphere SR5 (M2.5 (P=0.45)×5mm), standard contact point: 120058
Contact point
Stemø15mm
Bearing
Linear ball typeOutput cable length
Approx. 2m
Operating temperature/humidity
0°C〜40°C (Reference temperature 20°C)/20〜80%RH (no condensation) 15°C〜25°C (Reference temperature 20°C)/30〜60%RH (no condensation)
Storage temperature−10°C〜60°C/20〜80%RH (no condensation)−10°C〜60°C/20〜80% (no condensation) *2
Counter Specifications
Display range±999.99999mm±99.999995mm
FunctionsZero-setting, presetting, direction changeover, tolerance, judgment (3 steps/5 steps), RS-RINK
Hold function
YesNoInterface
RS-232C, USB (only for SENSORPAK), Digimatic (Printer:DP-1VR)*3, I/O Connector• RS-232C: counting data • Digimatic output: counting data*3
External output• I/O connector: counting data (simplified BCD), tolerance judgment result, simplified analog output
External control
Zero-setting, presetting, data hold, peak measurement mode selection*4, peak clear*4
Power supply
Suppplied AC Adapter, or +12 to 24V DC, max 700mA
Current consumption
8.4W (MAX 700mA), Ensure at least 1A power supply per unit.
Mass of counter
Approx. 900g (AC Adapter excluded)Standard accessories
Wrench for contact point, rubber boot, stand, washer (for counter), AC Adapter, AC cord, DC plug, user's manual, inspection certificate*1 Applies when used with counter (excluding quantizing error).
*2 The storage temperature/humidity range after unpacking is the same as the operating temperature/humidity range.
*3 Digimatic output shall be up to 6 digits of data. For data of 7 digits or more, all digits will not be output to the display.
*4 These functions are only available on 542-715 and 542-716.

Dimensions
LGH-0510(C)-B-EHCable Assy(2m)138
68Fixation of power cord542-715 (standard)
LGH-1010-B-EH* Minimum bending radius or minimum dressed dimension85

7.5(14)542-716 (low measuring force)
10
LGH-1010C-B-EH
Rubber boot not equipped 20

Carbied-tipped, Sø3901312

19.4

148.2
137

145.9

011.2

ø15h6 -0.011
Stem diafor ﬁxation

144
18
40

542-721 (low measuring force)
10
LGH-0510C-B-EH
Rubber boot not equipped 20

Carbide sphere SR5120058

542-720 (standard)
LGH-0510-B-EH°
Approx.10(Tilt angle when stand equipped)
75.1(Rubber boot equipped)
97(Stand equipped)

40

Cable(2m)

Unit: mm

Connector for
lifting cable(stroke) 10.5

63.3
10.5
25

148.3

Connector (detachable)
Connector for
lifting cable0ø15h6 -0.011
Stem diafor ﬁxation

18

45.4

Exclusive Counter (set)

72

�

(25*)
R20* �ø4.8

85

ø10.4(37.6)

60.9(stem) 25

LGH-1010(C)-B-EH

156 (Stand equipped)3

045 1705(1)A-(CH)PR, Printed in Japan

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