SYSTEM SOLUTION FOR SPECIFIC APPLICATIONS / WAFER LEVEL OPTICAL CHARACTERISTIC MEASUREMENTSynos

WAFER LEVEL OPTICAL CHARACTERISTIC MEASUREMENT SYSTEM FOR LIGHT RECEIVING DEVICE
Wafer level testing of optical characteristic for light receiving device in combination with manual/semi automatic prober system

Wafer level optical characteristic measurement system for light receiving device is thesystem that analyzes electrical and optical characteristics of various light receiving device suchas photodiodes and photosensors at wafer level. In addition to electrical characteristics
measurement, optical characteristics can be measured at wafer level by introducing
measurement light. By combining prober systems for semiconductor failure analysis, such as
semi-automatic/manual probers, with our high-performance optical measurement optics forprober M-Scope type I/PFW, measurement light sources, measuring instruments, etc. various
characteristics are measured under wafer level. In addition, it can be used for automatic
measurement of mass-produced devices in combination with the semi-automatic prober.
【Features】○Wafer level measurement of various electrical and optical characteristics of photo detectors
such as photodiodes and photo sensors in combination with semi-automatic/manual prober.
○Achieves automation of various measurements combining with the semi-automatic probersystem. Applicable from oﬀ-line measurement of individual elements to in-line measurement.
○high-performance optical measurement optics for prober M-Scope type I/PFW●High functional optical measurement optics designed for wafer level optical measurement.
○Prober interlocking optical measurement software Optometrics customized version for PD●Semi-automatic prober control and analysis automation, collection of measured data,
uniﬁed management of measurement types and measurement recipes, etc.
【Prober interlocking optical characteristic measurement software “Optometrics Customized Version for PD”】
This software has been developed for wafer-level optical element measurement,
which automates analysis by controlling and linking the semi-auto prober, integrates
electrical and optical characteristic data collection, and manages measurement types
and measurement recipes. A wide range of support is available, from oﬄine
measurement to in-line automatic measurement. The measurement item customizes
the software according to the measurement target, measurement content, measuring
instrument used, measurement procedure and operation.
《Typical measurement items》○electric and optical characteristic of light receiving device such as PD, optical sensor●I-V characteristic, photosensitivity, dark current, capacitance, cutoﬀ frequency,
rise time, tolerance, crosstalk, etc.
*Measurement instrument corresponding to each measurement is required.

【System conﬁguration example of wafer level optical characteristic
measurement system for light receiving device】
Image for prober setting/probe contact, etc.

Semiconductor deviceanalyzer B1500A, etc.

Adjustment stage
system for optics
Coaxial epiillumination system

Optical ﬁber port

●for micro current
Motorized revolver●for high frequencyetc.

DUT (Wafer sample)●Prober system control software〇PC for prober control

Probe positioner

DC測定用光源Light source for
DC measurement

Measurement light(optical ﬁber)

Light component analyzer(LCA), etc.

〇Stage system controller

Control
Device drive,
measurement data

〇Prober control system●fc measurement

Source measurement unit
2636, etc.

M-Scope type I/PFW*Management of wafer map, probing,prober adjustment*Measurement instrument corresponding
to each measurement is required.

Image for measurement○Optical measurement optics
for prober M-Scope type I/PFW●Polarization compensation ﬁber port
●Double imaging port
(for prober, for measurement system)●Motorized revolver〇Probe positioner, probe○Measurement instruments●DC measurement

Control &data collection

Control〇System control & management system●Prober interlocking optical characteristic
measurement software Optometrics Customizedver. for PD

Semi automatic prober system
ControlInterlocking
control〇PC for system control &management*We will propose system with various conﬁgurations and speciﬁcations depending on the measurement
sample, speciﬁcations, operating method, and budget.

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