ELECTRON GUNSEGH-8103 / EGPS-8103
ELECTRON GUN / POWER SUPPLY

10 keV to 100 keVFocusable, High Energy Electron Beams, Small Spot Option to 60 μm
FOR USE IN:NEWION GUNS

GENERAL VACUUM PHYSICSRADIATION STUDIESSURFACE BOMBARDMENTSEMICONDUCTOR RESEARCHBIOLOGICAL SPECIMEN IRRADIATION
X-RAY GENERATIONPLASMA EXCITATIONFLUORESCENCE STUDIESSURFACE PHYSICS STUDIES

Firing units are user-replaceable without removing the entire gun fromthe vacuum chamber; spare firing units can be purchased new, andused firing units may be returned to the factory for rebuild. Alternatively,
the entire electron gun can be sent back to the factory for complete
cleaning, rebuild, cathode replacement, and optional in-vacuum
testing.

The adjustable optics of the gun can adapt to different divergences anddifferent working distances. The spot size can be varied from 500 μm
to 10 mm with a refractory metal disc cathode. With a small spot option
using a lanthanum hexaboride (LaB6) cathode, the gun can deliver
spots down to 60 μm. A magnetic focusing lens and magnetic centering
deflection provide beam control with low aberration. In addition, thecathode to anode spacing is internally adjustable to change perveance.

The Power Supply System for the EGH-8103 is composed of three
separate units: the EGPS-8103 Electron Gun Power Supply, a H.V.
Floating Supply Box and a separate H.V. Power Supply controlled bythe EGPS-8103. The EGPS-8103 features a modular design withminiaturized power supply clusters, optically isolated signals, and thenew FlexPanel digital interface controller. The included power supplies
are Beam Energy, magnetic Lens, and magnetic X, Y Deflection, as
well as the floating Source/ ECC, Grid, First Anode and supplies.

The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode and the column. This alignment can be done in real time while
the gun is operating with beam on.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr to 10-6 torr for the refractory metal cathodes. The
electron gun is bakeable to 200ºC with cables removed; bakeout islimited by the magnetic focus and deflection coils. The Source region
separately is bakeable to 350ºC.
Several cathode types and sizes are available: tantalum disc cathodes(Ta), single-crystal lanthanum hexaboride (LaB6, small spot, highbrightness, min. vacuum 1x10-7 torr) and thoria or yttria-coated iridium
discs (ThO2 or Y2O3 - Ir, rugged, may survive brief loss of vacuum).
The cathodes are not damaged by repeated exposure to atmosphericgases or water vapor when cold.

Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

The power supply design includes a unique optically controlled floating
electronics box that is mounted close to the gun. Among otheradvantages, this design reduces voltage loss due to cable length andreduces the possibility of arc damage due to excess stored energy inthe high voltage cable. The fiberoptics control permits the EGPS-8103
to be located at a distance from the gun for safety.
The new FlexPanel provides a digital display screen and an encoder
wheel for programming control on the front panel. Rear panel
connectors allow remote /computer control and metering of all gunpower supplies. An RS-232 or RS-422/485 serial port and an analog
input/output connector are included on standard power supply units. Allcommon computer interface bus types can be accommodated, by useof appropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEGH-8103 is available for remote computer control and metering using
National Instrument DAQ boards and SCSI connectors on theEGPS-8103. The program provides a virtual panel of controls andmeters on the user’s computer screen. A complete computer system isalso available with the software and DAQ hardware installed.
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DETECTORSThe gun uses a refractory metal or lanthanum hexaboride (LaB6)
cathode to generate a high energy, focusable, small spot electronbeam. Both beam energy and beam current are independently
adjustable over wide ranges, the energy from 10 keV to 100 keV, andcurrent from 10 nA to 1 mA. The electron beam can be pulsed by an
input signal to the control grid.

COMPONENTS

The gun design provides for differential pumping of the Source region
with a 4½ CF flange on the source chamber for attachment for a Turbopump and a 2¾ CF flange for an ionization gauge. The gun is usuallymounted on a 6 inch CF flange and has zero insertion distance, i.e.
does not extend into the vacuum chamber. Due to the high power
beam produced by the EGH-8103, X-ray shielding is essential.

INDEX / INFORMATIONThe Kimball Physics EGH-8103 Electron Gun with its matching
EGPS-8103 Power Supplies is a complete subsystem ready to attach
to the user's vacuum system and turn on. It can deliver electrons overa very broad range of energies, currents and power. The EGH-8103
has applications in space materials testing, radiation studies,
semiconductor research x-ray generation and plasma excitation.

EMITTERSFEATURES / OPTIONS:SMALL SPOTS, DOWN TO 60 μm
BEAM CURRENTS, UP TO 1 mA
MAGNETOSTATIC FOCUSINGMAGNETOSTATIC DEFLECTIONPULSE CAPABILITY
INTERNAL ALIGNMENT WHILE OPERATING
USER-REPLACEABLE FIRING UNITS
EGH-8103 Electron Gun Mounted on 6CF Flange, with optional Turbo Pump and Ion Gauge
COMPUTER SYSTEM AVAILABLEEGPS-8103 ELECTRON GUN POWER SUPPLY SPECIFICATIONS

EGH-8103 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD
BEAM FOCUSING
BEAM DIVERGENCE
SPOT SIZE

10 keV to 100 keV (Independently adjustable)
10 nA to 1 mA (Independently adjustable)
Small spot option: 10nA to 100μA
Approx. 0.4 eV cathode thermal spread, calculated
Magnetostatic
Variable. Adjustable optics to adapt to different
diverences and different working distancesStandard: 500 μm to 10 mm
Small spot option (LaB6 cathode): 60 μm to 10 mm

WORKING DISTANCE 50 mm to 1000 mm
BEAM DEFLECTION Magnetostatic: ± 0.5° at 100 keV
PULSE CAPABILITY
Optional Dual Grid Power Supply: pulse width 2 μs toDC, rise/ fall 500 ns, rep rates to 5 kHzwith optional LabVIEWTM program pulse generator
BEAM UNIFORMITY
Gaussian
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly
Entire firing unit also includes first anodeStandard: Tantalum disc
Optional: Lanthanum hexaboride (LaB6)
Thorium oxide (ThO2), or Yttrium oxide (Y2O3)CATHODE TYPES
Cathodes not harmed by repeated exposure toatmospheric gases while coldINTERNAL GUN
Adjustable Feedthrough for mechanical alignment of firing
ALIGNMENT
unit while gun is operating
MOUNTING
Standard: 6 inch CF flange
Source chamber with one 4½ CF port and three 2¾ CF
DIFFERENTIAL
ports for small pump and ionization guage
PUMPING
Optional pump: Varian Turbo-V70 LP with controller
Optional gauge: Granville-Phillips 354 Micro-Ion Module
INSERTION LENGTH Zero mm
Gun length: 955 mm sealing surface to end of cable
GUN DIMENSIONS
connector(outside vacuum)
Gun diameter: 362 mm max at flange cluster on sourcechamber (no pumps), 203 mm dia source chamber,
152 mm dia lens support tube
FEEDTHROUGHS
Multipin brazed ceramic, threaded aluminum-plated shellfor main cable and stainless steel shell for others
CABLES /All high voltage fully ground-shielded cables with mating
CONNECTORS
metal to metal connectors, to connect gun and power
supply. Standard lengths: 5 m, Optional: longer available
MAXIMUM BAKEOUTOUTPUTSENERGY SUPPLYSTABILITYBEAM STABILITY

All necessary voltages to drive the EGH-8103 ElectronGun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with optional Emission Current Control
or ±10% per hour after warm up without ECC
CONTROLS
FlexPanel controls: Energy, Source, Grid, First Anode,Lens, X and Y Deflection,
optional Emission Current Control (ECC)
METERING
FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid,
First Anode Voltage, First Anode Current, Lens Current,
X and Y Deflection Currents
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
COMPUTER/REMOTE Metering: 0 to +2 V ( -2 V to +2 V, deflection)
CONTROL & METER On/off switches: 0 or +5 V
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-232, RS-422 or RS-485
available, if specified at time of order)
Optional: SCSI metering and programming connectors
INPUT
115 VAC or 230 VAC, (specify on order) 50 to 60 Hz
single phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing,Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
Optional: National Instruments LabVIEWTM file, designed
SOFTWAREto run with computer DAQ boards NI 6034E and NI 6703
with optional computer generated pulsing signal
COMPUTER SYSTEM Optional: Industrial computer system including dataacquisition and control hardware DAQ.
DIMENSIONS
three units, total approx: 17 in. x 20.3 in. x 22 in.
(width x height x depth) excluding handles (425 mm x 515 mm x 560 mm);
19 in. rack mountable
DIMENSIONS
7 in. x17 in. x 25 in. (180 mm x 430 mm x 635 mm)
H.V. Floating Supply
placed near electron gun

200°C with cables removed(200°C for magnetic Lens and Deflection coils, 350°C for
Source chamber region)

EGH-8103 ELECTRON GUN
shown with optional turbo pump and ion gauge(Dimensions in mm)

Typical performance;data for guidance only.

Copyright © 2008 by Kimball Physics, Inc. 1/28/08

It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.