Measurement and control of cleaning andCMP processes
ULTRA-CLEAN, ULTRASONIC FLOWMETER

UCUF-K Series
RoHSOUTLINEThe UCUF-K series ultrasonic flowmeter is designed for measuring
small flow rates of ultrapure water and chemical liquids. It iscomprised of the UCUF-K detector and SFC converter. All wet
parts of the detector are made of special-grade PFA molds
for the semiconductor industry and have no moving parts orsealing mechanism such as O-rings which would accumulateliquid components. The simple and smooth construction leaves
no residues and is ideal for processes such as semiconductor
manufacturing which requires ultimate cleanliness. The SFC
converter significantly reduces the effect of bubbles in liquid, whichcause problems in semiconductor and chemical processes. It has an
adjustment function to offset the effect on the kinematic viscosity ofliquids, making the converter compatible with various chemicals. The
RS485 communication function enables integrated management ofthe process. For details, see the Technical Guidance of the converter.

FEATURES❏ EMC compliance: EN61326-1:2013/EN61326-2-3:2013❏ RoHS compatible❏ Liquids with kinematic viscosity of as high as 40 mm2/s can bemeasured.
❏ Accuracy: Within ±1% of the reading at flow velocity of 1 m/sor more
❏ Wide rangeability of 100 : 1 as a typical example❏ Detector with highly clean construction❏ Corrosion resistant and easy to install

OPERATING PRINCIPLE
The measuring fluid flows into the U-shaped tube, changes direction
by 90 degrees twice, and goes out as shown in Figure 1. Two
piezoelectric transducers A and B are mounted at both ends ofthe measuring section. They emit and receive ultrasonic wavesalternately and measure the traveling times tA (A to B) and tB (B toA) through the liquid. Without flow, tA is equal to tB. With flow, t A
becomes shorter and tB longer in proportion to the flow rate. Thus,
calculating tB - tA gives the flow rate of the liquid. tA and tB dependon the size and shape of the tube and liquid viscosity. The actual flow
test data are stored in the linearizer in the converter, which enables
the UCUF-E to measure flow rates with high accuracy.

APPLICATIONS❏ Pure water and ultrapure water in the semiconductor manufacturing
process❏ Chemical feeding❏ Highly corrosive chemicals

Piezoelectrictransducer AINOUT

Piezoelectrictransducer B

Travelling time tA❏ Chemical mechanical polishing (CMP) slurries❏ Process liquids of small and medium flow rate
❏ Ideal for flow measurement and control of cleaning and CMP
processes

Travelling time tB

Figure 1 Operating principle

TG-F2016-E07
8th edition Jun 2020 K
3rd edition May 2008 K

UCUF-K Series ULTRA-CLEAN, ULTRASONIC FLOWMETER

STANDARD SPECIFICATIONSMODEL CODE

• Measuring fluid: Liquids (Without bubbles, andTable 5. Detector

homogeneously mixed)

Model code
UCUF

• Ambient temperature✽: 0 to 60°C

• Ambient humidity: 30 to 80%RH• Enclosure classification : IP65 equivalent, indoor use
Meter size

• Fluid temperature✽: 10 to 60°C

• Fluid pressure: 0 to 0.5 MPa• Fluid sound speed✽: 1000 to 2200 m/s
Connector• Fluid kinematic velocity : 0.3 to 40 mm2/s• Process connection: PFA tube end (Refer to Table 1.)• Enclosure classification : IP65
• Flow range

Shape

–◻◻
–04K
–06K
–10K
–15K
–20K

/◻

◻

(Blank)D(Blank)Z

Description
4 mm
6 mm
10 mm
15 mm
20 mm
BNC
SMB
Standard (U shaped)
Z shaped: Refer to Table 1.

Table 1. Flow range and connecting tube size
Flow range (L/min)
Min.
Max.
0 to 0.05
0 to 3.0
0 to 0.4
0 to 8.0
0 to 1.0
0 to 20.0
0 to 3.0
0 to 50.0
0 to 4.0
0 to 80.0

Model
UCUF-04K
UCUF-06K
UCUF-10K
UCUF-15K
UCUF-20K

Connecting
tube size
3/8"
3/8"
1/2"
3/4"
1"

* Coaxial connector is BNC connector.
* Consult us about other models.
• Accuracy: Refer to Table 2.

Table 2. Accuracy and flow range
Flow velocity < 1m/s
Flow rate Accuracy Flow

Flow velocity ≥ 1m/s
Flow rate
Accuracy(L/min)0 to 0.8
0 to 1.7
0 to 4.7
0 to 10.6
0 to 18.8(L/min)0.8 to 3
1.7 to 8
4.7 to 20
10.6 to 50
18.8 to 80

ModelUCUF
-04K
-06K
-10K
-15K
-20K

(L/min)± 0.008± 0.017± 0.047± 0.106± 0.188(of reading)±1％±1％±1％±1％±1％* Note: Accuracy statement is based on water calibration• Pressure loss
Pressure loss for water (kPa) = C × Q2
where C: Factor (Refer to Table 3.)
Q: Flow rate (L/min)
Table 3. Pressure loss factor
Model-04K
-06K
-10K
-15K
-20K

C
3.04
0.537
0.06250.01200.00377• Materials: Refer to Table 4.

Table 4. Materials of flow detector
Parts
Body
Wetted part
Tube
Sensor housing (Not for UCUF-04, 06)
Sensor cup (Only for UCUF-04, 06)
Cable fitting
BNC cable sheath

Material
New PFA
New PFA
PPPPPPPVC• Exclusive cable: Two 5 m coaxial cables, Length: 5 m• Model code: Refer to Table 5.

• Mass: Refer to Table 6.

(Extension cables available up to 30 m)

Note : Specifications of all items with ✽ mark are those of standardtypes.
See the PRODUCT SPECIFICATION for those other thanstandard types.
2TOKYO KEISO CO., LTD.

TG-F2016-E07

UCUF-K Series ULTRA-CLEAN, ULTRASONIC FLOWMETER■ DIMENSIONSUCUF-04K, 06K U-shape

UCUF-10K, 15K, 20K U-shape

LC

E

L
C

E

φDφdφD
φdIN

OUT

OUT

B

B

A

A

INKFK8-G
Depth 108-G
Depth10PP

UCUF-04K, 06K Z-shape

UCUF-10K, 15K, 20K Z-shape

LCL
CE

E

OUT

M

B

M

B

A

A

OUT

IN
φdφDFPIN

K

φdφD

K

8-G
Depth 108-G
Depth10P

Table 6. Dimensions and mass of detector
UCUF
-04K
-06K
-10K
-15K
-20K

Dimensions (mm)Connecting
tube size

DdC

L

A

B

E

F

G

K

M

P

Detector

3/8"
3/8"
1/2"
3/4"
1"

9.53
9.53
12.70
19.05
25.40

6.38
6.38
9.55
15.90
22.25

80±1
100±1
110±1
165±2
220±2

150±1
170±1
209±1
271±2
328±2

100
100
90100
120

40403040403232304040−−354040

M4M4M4M5M52222182626160
160150160200

80±1100±1
193±1253±2
310±2160
200
420760880

TG-F2016-E07

Mass (g)Cable(5m)
140140140140140

TOKYO KEISO CO., LTD.

Total
300
340
560
900
1020

3

UCUF-K Series ULTRA-CLEAN, ULTRASONIC FLOWMETER■ COMPATIBLE CONVERTER MODEL
SFC3000, SFC4000

CAUTIONS ON INSTALLATION❏ To ensure accurate, stable measurement, do not bend the connecting tube during installation to avoid stress from the piping.
❏ To ensure accurate, stable measurement, stabilize the liquid temperature within ±5ºC.
❏ Keep the instrument pressurized even when it is not in use to avoid the formation of bubbles.
❏ Keep the measuring tube filled with liquids. Although the instrument can be installed with horizontal, vertical, or slant tubing, it isrecommended to select a position for easy self-draining.
❏ Install a control valve downstream of the instrument, if necessary.
❏ Install the flow detector and converter away from noise sources such as power relays and solenoid valves.
❏ Lay the signal cable away from power cables of high voltage or current.
❏ For details on how to connect fittings, see the relevant documents of each manufacturer.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
4TG-F2016-E07