論文 / 著書情報
Article / Book Information
題目(和文)

真空紫外光による合成樹脂の表面改質とその応用に関する研究

Title(English)
著者(和文)

橋本 優生

Author(English)

Yuki Hashimoto

出典(和文)

学位:博士(工学),学位授与機関:東京工業大学,
報告番号:甲第10790号,
授与年月日:2018年3月26日,
学位の種別:課程博士,
審査員:山本 貴富喜,吉野 雅彦,野﨑 智洋,赤坂 大樹,田中 智久

Citation(English)

Degree:Doctor (Engineering),Conferring organization: Tokyo Institute of Technology,
Report number:甲第10790号,
Conferred date:2018/3/26,
Degree Type:Course doctor,Examiner:,,,,

学位種別(和文)

博士論文

Category(English)

Doctoral Thesis

種別(和文)

論文要旨

Type(English)

Summary

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（博士課程）Doctoral Program論 文 要 旨ＴＨＥＳＩＳ ＳＵＭＭＡＲＹ

専攻：
Department of

機械制御システム

学生氏名：Student’s Name

橋本 優生

専攻

申請学位（専攻分野）：

博士

Academic Degree Requested

Doctor of

指導教員（主）：Academic Supervisor(main)

指導教員（副）：Academic Supervisor (sub)（工学）山本 貴富喜吉野 雅彦

要旨（英文 800 語程度）
Thesis Summary （approx.800 English Words ）This paper is composed of a series of research results on surface modification of synthetic resin using vacuum ultraviolet(VUV) light.
Chapter 1 is an introduction including general information on VUV light, plastics and silicones which are targets tosurface modification by VUV light. In addition, this chapter also covers applications of these materials and theirtechnological issues including plastic microfluidic devices, optical elements in VUV region and anti-reflection coating andpossibilities of applying surface modification by VUV to these technological problems are also discussed.
Chapter 2 describes a novel bonding method for various kinds of polymers such as polycarbonate, cyclic olefin polymer,
polydimethylsiloxane (PDMS) and poly(methyl methacrylate), and glass at atmospheric condition just by irradiating VUVlight, which wavelength is less than 160 nm. The surface hydrophilicity, aging performance of hydrophilicity, bonding
strength, chemical and physical changes are evaluated by several surface analyzing techniques. In addition, availability ofthis method to fabricate a microfluidic device is demonstrated. As a result, some combinations of plastics, silicone, and glass
are successfully bonded. The surface analysis revealed that OH and CN group plays an important role for bonding, which is
not primarily affected by surface roughness. In addition, microfluidic device by this method is successfully demonstrated andno leakage is confirmed to be occurred. From these result, the bonding method presented here will be applied to fabricate
various plastic made microfluidic devices.
Chapter 3 describes a fabrication method of silica like layer by irradiating VUV light which wavelength is 172 nm tosilicone rubber as an use of a low-cost optical material in VUV region. As a result of TOF-SIMS analysis of the bulk sample
which VUV is irradiated in atmospheric and vacuum condition, the vitrification is deeply occurred in atmospheric condition
due to reaction with reactive oxygen species generated by VUV irradiation. In the case of thin film sample on reflective layer,
the vitrification is more improved than the bulk case due to the interaction between the incident and the reflective wave,
which refractive index come close to silicon dioxide’s. Finally, based on these results, optical coating of the vitrified silicone
rubber layer on a sapphire substrate is tried. As a result, at most 9.6 % transmittance of the substrate was increased in VUVregion. From these results, the vitrified silicone rubber can be used for an optical material in VUV region.
Chapter 4 describes a new low-cost fabrication method using direct bonding method between silicone and glass by VUVirradiation for inversed moth-eye structure which has been paid attention as anti-reflection structure. Simultaneously with thestudy of this manufacturing method, we develop UV-curable silicone rubber (UV-PDMS) which is expected to suppressing
heat shrinkage during curing of thermosetting silicone rubber. As a result, UV-PDMS exhibits extremely low thermalshrinkage compared with thermoset type by 2 orders of magnitude was obtained, which indicates UV-PDMS is suitable forfabricating fine submicron scale structure like this research. In addition, bonding condition between UV-PDMS and glass by
VUV irradiation is confirmed. Finally, based on these results, fabricating inversed moth-eye structure made of UV-PDMS on
glass substrate is demonstrated. As a result of optical measurement, the transmittance of the glass is improved by about 3% at
visible light region it gets good agreement with the designed value. From these results, the proposing method can be used for
fabricating anti-reflection structure.
Chapter 5 is the conclusion which summarizes the results obtained in this paper.

備考：論文要旨は、和文 2000 字と英文 300 語を 1 部ずつ提出するか、もしくは英文 800 語を 1 部提出してください。
Note : Thesis Summary should be submitted in either a copy of 2000 Japanese Characters and 300 Words (Engｌish) or 1copy of 800
Words (English).
注意：論文要旨は、東工大リサーチリポジトリ（T2R2）にてインターネット公表されますので、公表可能な範囲の内容で作成してください。
Attention: Thesis Summary will be published on Tokyo Tech Research Repository Website (T2R2).