EGH-8100 / EGPS-8100
ELECTRON GUN / POWER SUPPLY
1 keV to 100 keVHigh Energy, High Current, Flood Electron Beam
FOR USE IN:GENERAL VACUUM PHYSICSRADIATION STUDIESSURFACE BOMBARDMENTSEMICONDUCTOR RESEARCHBIOLOGICAL SPECIMEN IRRADIATIONX-RAY GENERATIONPLASMA EXCITATIONFLUORESCENCE STUDIESSURFACE PHYSICS STUDIESFEATURES / OPTIONS:BEAM CURRENTS, UP TO 1 mA (20mA pulsed)
PULSE CAPABILITY
INTERNAL ALIGNMENT WHILE OPERATING
USER-REPLACEABLE FIRING UNITSCOMPUTER CONTROL AVAILABLEEGH-8100 Electron Gun
The Kimball Physics EGH-8100 Electron Gun with its matching
EGPS-8100 Power Supply is a complete subsystem ready to attach tothe user's vacuum system and turn on. It can deliver electrons over a
very broad range of energies, currents and power. The EGH-8100 has
applications in space materials testing, radiation studies,
semiconductor research x-ray generation and plasma excitation.
The gun uses a refractory metal or lanthanum hexaboride (LaB6)
cathode to generate a high energy, high current electron beam. Bothbeam energy and beam current are independently adjustable overwide ranges, the energy from 1 keV to 100 keV, and current from 10 nA
to 1 mA. (20 mA pulsed). The electron beam can be pulsed by an input
signal to the control grid.
The gun features an adjustable cathode feedthrough assembly thatallows the mechanical alignment of the firing unit with respect to theanode. This alignment can be done in real time while the gun isoperating with beam on.
UHV technology is used throughout. The gun can be run in vacuums
from 10-11 torr to 10-6 torr for the refractory metal cathodes. Theelectron gun is bakeable to 350ºC with cables removed.
Several cathode types and sizes are available: tantalum disc cathodes(Ta), single-crystal lanthanum hexaboride (LaB6, high brightness,min. vacuum 1x10-7 torr) and Yttria coated iridium discs (Y2O3 - Ir,rugged, may survive brief loss of vacuum). The cathodes are notdamaged by repeated exposure to atmospheric gases or water vapor
when cold.

The Power Supply System for the EGH-8100 is composed of two
separate units: the EGPS-8100 Electron Gun Power Supply and aseparate H.V. Power Supply controlled by the EGPS-8100. The
EGPS-8100 features a modular design with miniaturized power supply
clusters, optically isolated signals, and the new FlexPanel digitalinterface controller. The included power supplies are Beam Energy,
as well as the floating Source/ ECC, Grid, and First Anode supplies.
The FlexPanel provides a digital display screen and a keypad forprogramming control on the front panel. Rear panel connectors allow
remote /computer control and metering of all gun power supplies. An
RS-232 or RS-422/485 serial port and an analog input/output
connector are included on standard power supply units. All common
computer interface bus types can be accommodated, by use of
appropriate digital to analog converters.
An optional LabVIEWTM computer program designed for theEGH-8100 is available for remote computer control and metering.
Software is available in two types: Using National Instrument DAQ
boards and SCSI connectors on the EGPS-8100, or via a simple serial
connector interface. The program provides a virtual panel of controls
and real-time metering on the user’s computer screen.

The gun design provides for differential pumping of the Source region
with a 4½ CF flange on the source chamber for attachment for a Turbopump and three 2¾ CF flanges for an ionization gauge or otherequipment. The gun is usually mounted on a 6 inch CF flange and has
zero insertion length, i.e. does not extend into the vacuum chamber.
Due to the high power beam produced by the EGH-8100, X-ray
shielding is essential.
Firing units are user-replaceable without removing the entire gun fromthe vacuum chamber; spare firing units can be purchased new, andused firing units may be returned to the factory for rebuild. Alternatively,
the entire electron gun can be sent back to the factory for complete
cleaning, rebuild, cathode replacement, and optional in-vacuum
testing. Various stand-alone designs of Faraday cups areavailable.
Toll Free: 1 888 KIM-PHYS (1 888 546-7497) e-mail: info@kimphys.com
Tel. 1 603 878-1616 Fax: 1 603 878-3700

EGPS-8100 Power Supply
50

EGH-8100 ELECTRON GUN SPECIFICATIONSBEAM ENERGYBEAM CURRENTENERGY SPREAD

1 keV to 100 keV (Independently adjustable)
Standard: 10 nA to 100 μA (Independently adjustable)
Optional: 10 nA to 1 mA (20mA pulsed)
Approx. cathode thermal spread, calculated
LaB6 - 0.4eV
Ta - 0.5eV
Y2O3 - 0.4eV

BEAM FOCUSING
BEAM DIVERGENCE

MagnetostaticVariable. Adjustable optics to adapt to different
divergences and different working distances

SPOT SIZE

Standard: 3 mm to 100 mm.

WORKING DISTANCE 50 mm to 1000 mm
BEAM DEFLECTION None
Optional Dual Grid Power Supply: pulse width 2 μs to
PULSE CAPABILITY
DC, rise/ fall 500 ns, rep rates to 5 kHzwith optional LabVIEWTM program pulse generator oruser’s TTL pulser
BEAM UNIFORMITYGaussian
FIRING UNIT
Customer-replaceable Firing Unit Cartridge includes
precision-aligned cathode, and Wehnelt (G-1) assembly

CATHODE TYPESINTERNAL GUN
ALIGNMENTMOUNTING
DIFFERENTIAL
PUMPING
INSERTION LENGTHGUN DIMENSIONS(outside vacuum)
FEEDTHROUGHSCABLES /CONNECTORSMAXIMUM BAKEOUT

Standard: Tantalum disc (Ta).
Optional: Lanthanum hexaboride (LaB6)
Yttrium oxide (Y2O3)
Cathodes not harmed by repeated exposure toatmospheric gases while cold
Adjustable Feedthrough for mechanical alignment offiring unit while gun is operatingStandard: 6 inch CF flange
Source chamber with one 4½ CF port and three 2¾ CF
ports for small pump and ionization gauge
Optional pump: Varian Turbo-V70 LP with controller
Optional gauge: Granville-Phillips 354 Micro-Ion Module
Zero mm
Gun length: 403 mm sealing surface to end of cableconnector
285 mm max across flange cluster on source chamber(no pumps), 203 mm dia source chamber

EGPS-8100 ELECTRON GUN POWER SUPPLY SPECIFICATIONSOUTPUT
ENERGY SUPPLYSTABILITYBEAM STABILITY

All necessary voltages to drive the EGH-8100 Electron
Gun (in combination with H.V. Power Supply)<0.01% per hour with 0.05% rms ripple at full output±0.1% per hour with optional Emission Current Control
or ±10% per hour after warm up without ECC

CONTROLS

FlexPanel controls: Energy, Source, Grid, First Anode,Emission Current Control (ECC).

METERING

FlexPanel digital meters: Energy, Source Voltage,
Source Current, Emission Current, Grid,
First Anode Voltage.

COMPUTER/REMOTE Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
CONTROL & METER Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output andRS-232 serial port (RS-232, RS-422 or RS-485
available, if specified at time of order)
Optional: SCSI metering and programming connectors
INPUT
115 VAC or 230 VAC, (specify on order) 50 to 60 Hz
single phase, 250 VA
ENVIRONMENT
Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH
non condensing
Classified as a pollution degree 2, installation category(overvoltage category) II environment unit
SOFTWARE

Standard configuration designed for RS-232
connections.
Optional: National Instruments LabVIEWTM file, designed
to run with computer DAQ boards NI PCI-6713 /PCIe-63416. SCSI interface
DIMENSIONS
Two units, total approx: 17 in. x 20.3 in. x 22 in.
(width x height x depth) excluding handles (425 mm x 515 mm x 560 mm);
19 in. rack mountable

Multi-pin brazed ceramic, threaded aluminum-plated shellfor main cable and stainless steel shell for others
All high voltage fully ground-shielded cables with mating
metal to metal connectors, to connect gun and power
supply. Standard lengths: 3 m. Optional: 5m
350°C for Source chamber with cables removed

Copyright© 2014 by Kimball Physics, Inc. 07/18/14 It is not necessarily possible to achieve all maximum specifications
simultaneously. Specifications Subject to Change Without Notice.