JOURNAL OF PLASMA AND FUSION RESEARCHThe Journal of the Japan Society of Plasma Science and Nuclear Fusion ResearchVol. 96, No. 10, October 2020

Special Topic Articles
Plasma Technologies in an Innovative Semiconductor Industrial System: Minimal Fab
1. Ultra-Small Semiconductor Industrial System: Minimal Fab ………………………………………… HARA Shiro ５３１
2. Plasma Etching Tool Using Micro-Plasma Source………………………………………… TANAKA Hiroyuki, KHUMPUANG Sommawan and HARA Shiro ５３８
3. Development of Minimal Si-DRIE Tool Using ICP Source……………………………………… NOZAWA Yoshiyuki, MIYAZAKI Toshiya and HAYAMI Toshihiro ５４３
4. Plasma Sputtering Deposition System for Minimal Fab Using Magnetron Plasma Sources ……… OGISO Hisato ５４７
5. Multi-Target Sputtering Tool Using a Helicon Plasma Source ………………………… TAKAHASHI Kazunori ５５２
6. CVD Equipment Using ECR Plasma in Magnetic Mirror Field for Silicon Nitride Film Formations…………………………………………………………………………………………………… GOTO Tetsuya ５５７
7. Water Vapor Plasma Ashing System Using Microwave Excited Plasma Source ……………… ISHIJIMA Tatsuo ５６２Lecture Note
How to Start Tritium Experiments
5. How to Do the Experiments? Use of Tritium in Gas, Water and Plasma…………………………………………………………… KATAYAMA Kazunari and HASHIZUME Kenichi ５６９
6. Let’s Make Experiments with Tritium under Japan-US Joint Project …………………………… OYA Yasuhisa ５
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３Project Review
Numerical Simulation Reactor Research Project at the National Institute for Fusion Science
1. Introduction ………………………………………………………………………………………… SUGAMA Hideo ５７６
2. Progress in Simulation Study of Fusion Plasmas
2.1 MHD Equilibrium and Stability …………………… ICHIGUCHI Katsuji, SUZUKI Yasuhiro, SATO Masahiko,
MIURA Hideaki, ISHIZAKI Ryuichi and FURUKAWA Masaru ５７９2.2 Kinetic Transport Simulations of Core Plasmas ………………………… TODA Shinichiro, NAKATA Motoki,
NUNAMI Masanori, MATSUOKA Seikichi, SUGAMA Hideo, SATAKE Shinsuke and KANNO Ryutaro ５８８2.3 Physics of Energetic Particles, Waves, and Heating………………… TODO Yasushi, TOIDA Mieko, YAMAGUCHI Hiroyuki, WANG Hao and SEKI Ryosuke ５９６
2.4 Peripheral Plasma Transport and Plasma-Wall Interaction …… SUZUKI Yasuhiro, KAWAMURA Gakushi,
NAKAMURA Hiroaki, ITO Atsushi M., TAKAYAMA Arimichi and FUJIWARA Susumu ６０３2.5 Development of Integrated Transport Analysis Suite ……………… YOKOYAMA Masayuki, SEKI Ryosuke,
NUGA Hideo, YAMAGUCHI Hiroyuki, SUZUKI Chihiro, SATO Masahiko, MURAKAMI Sadayoshi,
MORISHITA Yuya for TASK3D Users and Developers ６１０3. Progress in Simulation Study of Fundamental Physics and Visualization Technology
3.1 Simulation Study of Fundamental Physics………………… ISHIGURO Seiji, ITO Atsushi, USAMI Shunsuke, OHTANI Hiroaki, SAKAGAMI Hitoshi,
TOIDA Mieko, HASEGAWA Hiroki, MORITAKA Toseo, HORIUCHI Ritoku and MIURA Hideaki ６１４3.2 Visualization Technology ……… OHTANI Hiroaki, ISHIGURO Seiji, MIYAZAWA Junichi, OHNO Nobuaki，
KAGEYAMA Akira, MIURA Hideaki, MORITAKA Toseo, TAMURA Yuichi, KITAZAWA Shuta，
KATAGIRI Takahiro, OHSHIMA Satoshi, NAGAI Toru, NUNAMI Masanori, NAGURA Shigeki,
KAWAHARA Shintaro, HU Kunqi, KOYAMADA Koji, GOTO Takuya, KAMUKI Noboru,TAKAMARU Hisanori, PETROSKY Tomio and TANAKA Satoshi ６２７4. Summary and Prospect …………………………………………………………………………… SUGAMA Hideo ６３４The JSPF Award …………………………………………………………………………………………………………………… ６３６PFR Abstracts ……………………………………………………………………………………………………………………… ６
３８Information ………………………………………………………………………………………………………………………… ６３９Announcement …………………………………………………………………………………………………………………… ６
４１CoverThe quasi-axisymmetric stellarator CFQS is under construction as a joint project of the National Institute for Fusion Science, Japan and Southwest Jiaotong University, the People's Republic of China. To confirm the structural reliability of vacuum vessel and understand its mechanicalbehavior, we have performed finite element analysis when it's exposed to several loads, such as vacuum force, thermal stress and electromagnetic force. This picture is a part of analysis results and shows displacement and stress. (Sho NAKAGAWA et al., Plasma and Fusion Research,Vol. 15, 2405066 (2020) http://www.jspf.or.jp/)!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!
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