EHS Report
Product-related
Initiatives for
the Environment

Tokyo Electron is working hard to reduce the impact of its products on theenvironment by making them more energy efficient and curbing the use ofhazardous substances. In addition, the company is also striving to reduce
the environmental impact of logistics by promoting a modal shift andcreating innovative packaging methods.

Reducing Environmental Impact
during the Use of Products• Tokyo Electron organizations for reducing
environmental impact

Tokyo Electron has two organizations working for the reductionof environmental impacts of products: the Product Environment
Compliance Meeting and Products Environment Value Meeting. The
Product Environment Compliance Meeting ensures that our equipment

Energy-saving Measuresfor Products
We are promoting the reduction of product energy consumption byfocusing on four approaches: reducing the energy used by the productitself; reducing the energy used by peripheral devices; ensuringsystematic and efficient operation of products; and ensuring energysaving operation of customers’ factories. The energy-saving featuresof each piece of equipment are summarized below.

and their parts and components fully comply with environmental
regulations and our voluntary programs.
The Products Environment Value Meeting has developed andstarted to implement roadmaps to reduce the environmental impactof each of our products. Specifically, while ensuring the effectivenessof each roadmap, the council is working to reduce the energy
consumption of equipment, address chemical substance-related
matters, enhance efficiency in the use of processing gases and liquid
chemicals, and improve the environmental performance of existing
equipment. The progress of these initiatives is monitored as part of
the Group-wide medium- to long-term plan.

• Technology SymposiumThe Tokyo Electron Group held its 14th Technology Symposium
in January 2012 at which a variety of environmental technologies
were presented. In a poster session, Tokyo Electron divisions anddepartments engaged in a lively exchange of ideas and information inorder to share innovative technologies.

Plasma Etch System
Reduced energy consumption of
peripheral devices
A chiller that cools the inside of aplasma etch system and a pumpneeded to maintain a vacuum within
the chamber have been designed tooperate intermittently according to thestatus of the system, leading to a 25%
reduction in energy consumption(including a reduction in the volume ofcoolant and N 2 used).

Single Wafer Cleaning System
Recycling of pure water
Waste fluid flow paths are divided into thosefor recycling and those for discharge toenable collection and recycling of pure water.
Cleaning system

Cleaning system

Collection
Discharge

Recycling

Discharge

Wafer Prober
Reduced volume of dry air
Technology Symposium

The volume of dry air produced has been cut by up to 60% comparedwith traditional products by installing a dew point meter to monitor andadjust the volume of dry air used.
Dry air

Adjusting the volume
Controlling the volume
Dew point meter

16

Wafer
proberCustomer’s Factory
Energy-saving operation of the factory(planned operation and proper management)

Thermal Processing System
Reduced volume of nitrogen usedSystemEquipment
Reduced energy usage of the equipment itself

Optimized nitrogen inflow volume

HIGHLIGHT

Efficient management

The volume of nitrogen used has been
reduced by 60% compared with traditional
products by monitoring and controlling theoxygen content in the loading area, wherewafers are loaded for input into thereaction furnace.
Reactionfurnace
Loading area
Oxygenmeter

MANAGEMENT REPORTGas
supply box

Constantly monitoring the oxygen content

Reduced energy usage of peripheral devices
Pump

Cooling Chiller

Scrubber

Peripheral Devices

Recycling of ruthenium (Ru)
Ruthenium used during semiconductor
fabrication is collected, re-refined andreused without being returned to ametallic state, making it possible for
us to reduce CO 2 emissions byapproximately 30% compared with thetraditional process, where only newly
refined ruthenium is used.

Material
manufacturer

Visualization of energy usage (currently under development)

EHS REPORT

Eco Monitor

Single Wafer CVD System

Equipment Process
TrapCollection

Various types of energy used by the different types of equipment aremonitored according to the SEMI S23* guidelines, and the energy use iscompared and analyzed to support energy conservation.

Coater/DeveloperECO Data
ECO Monitoring

The volume of exhaust fromeach rotary cup module in theequipment is controlledaccording to the operationalcondition.
Cup modules* SEMI S23: Guidelines for energy conservation for semiconductor production
equipment issued by Semiconductor Equipment and Materials International(SEMI), an international industry organization for semiconductor/FPD production
equipment and material manufacturers

Cup modules

The same
exhaust flow rate
Exhaust

Silicon carbide (SiC)
Epitaxial CVD System

SOCIAL REPORT

Adjusting the exhaust volumeto optimal levels

ExhaustPhotovoltaic Panel
Production Equipment

17

EHS Report
Measures against Regulated Chemical Substances
The Tokyo Electron Group’s policy regarding regulated chemical substances:1W e will quickly supply products that are in compliance with the laws and regulationsof countries in which our customers operate.
2W e will set our own standards and continue to make efforts to reduce the use ofregulated chemical substances in our equipment.

• Voluntary measures taken to reduce the use ofregulated chemical substances in equipment

Although the Tokyo Electron Group’s products are not subject to theEU’s RoHS* 1 Directive, a widely known set of standards regulating*2 Globally Harmonized System ofClassification and Labelling ofChemicals (GHS): A system agreed
upon by the United Nations that isintended to provide unified standards
across various countries for theclassification of hazard level, labelingand the content of (M)SDS.

the use of hazardous chemicals, the Group is committed to voluntarily

Chemicalidentification
Pictogram
Signal word
Hazard statement
Prevention
measures
Accident
response
Safety storage

reducing the use of the six substances specified by the directive:

Reference/MSDS
Emergency
phone number

lead, mercury, cadmium, hexavalent chromium, polybrominatedExample of a label that complies withJapan’s GHS standards

biphenals (PBBs) and polybrominated diphenylethers (PBDEs).
In addition, we work with our suppliers to promote the use ofalternative products that meet the requirements of the directive, while

3 Europe has instituted the Registration, Evaluation, Authorisation and

we also use a dedicated database to manage the chemical substances

Restriction of Chemicals (REACH) regulation*3 , a standard that requires

contained in the components and parts used in our products.

that safety information related to exposure be provided for a productFrom the second half of fiscal 2009, we began shipping equipment

containing more than 0.1% in weight of any substance of very highcontaining 98.5% or more parts that meet the directive. The share ofconcern (SVHC), as well as the Regulation on Classification, Labellingthese pieces of equipment with fewer regulated chemical substances asand Packaging Substances and Mixtures (“CLP Regulation”)*4, whicha proportion of our major pieces of equipment exceeded 50% as of thehas a broader scope than the GHS. In compliance with these standards,

end of March 2012. They include the following:

we consistently undertake investigations to identify the presence of any• CLEAN TRACK™ LITHIUS Pro™

SVHC in our equipment and provide necessary safety information when a• CELLESTA™+SVHC amounting to more than 0.1% is present in any of our products.

• TELINDY PLUS™

4 With regard to the battery regulations*5 enacted by the EU and Taiwan,• Tactras™ RLSA™ Etch

we check whether applicable batteries are used inside our products andWe will continue to strive to further increase the proportion.

take necessary measures to maintain compliance with the requirements.

*1 RoHS: Restriction of the Use of Certain Hazardous Substances in Electrical andElectronic Equipment

We have also begun building a framework that will enable us to fully• Complying with the laws and regulations
in countries and regions where ourcustomers operate

1 We provide equipment in full compliance with China’s versionof RoHS, enacted in March 2007, to which Tokyo Electron Group’sproducts are subject. China’s RoHS, like the EU directive, regulates thecomply with these regulations from the very bottom of the supply chain.
*3 Registration, Evaluation, Authorisation and Restriction of Chemicals (REACH): A
regulation pertaining to the registration, evaluation, authorization and restriction ofchemicals. For products containing SVHC in particular, manufacturers are required toprovide information on the SVHC content of their products as well as information toensure the safe use of the products.
*4 Regulation on Classification, Labelling and Packaging Substances and Mixtures (“CLPRegulation”) (EC No. 1972/2008): An EU regulation concerning the classification,labeling, and packaging of chemicals and mixtures*5 Battery regulations: Regulations enforced in each country to facilitate the collection andrecycling of batteries, including the mandatory indication of the recycling symbol on batteries

use of lead, mercury, cadmium, hexavalent chromium, PBBs and PBDEs• Future plansand requires that necessary information be provided to customers.

1 We will further increase the shipment ratio of equipment

2 Countries around the world have begun to introduce regulations

containing reduced amounts of regulated chemical substances.

based on the Globally Harmonized System of Classification and2 We will effectively utilize the Joint Article Management Promotion-

Labelling of Chemicals (GHS)* 2 formulated by the United Nations.

consortium (JAMP) and other frameworks as well as broaden our

The Tokyo Electron Group makes available safety information oncollaboration with customers and suppliers to promote more rational andchemical substances specified by the GHS through (material) safetyaccurate measures for the management of regulated chemical substances.

data sheets, or (M)SDS, as well as labels affixed to containers

We will also continuously improve our chemical substance management

carrying chemical substances. Shown below is an example of a label

system to further strengthen our control over chemical substances.

in compliance with Japan’s GHS standards.

3 We will further tighten the management of regulated chemical
substances on a global level to achieve an even higher level ofenvironmental compliance of products.

18

Approaches to Reducing the Environmental Impact of Logistics• Tokyo Electron’s stance on theenvironmental impact of logistics

from airborne to seaborne shipping easier, we are working to reduce
production lead time to ensure there is no impact to on-time delivery.

Regulations concerning logistics have been tightened with a view to helping

CO 2 emissions from logistics and the proportion of

curb global warming. At the same time, companies are facing growing

marine transportation

demands for measures to reduce the environmental impact of their logistics.
For its part, the Tokyo Electron Group will continue striving to reduce

modal shift*1 for domestic

0adopting packaging methods
with a smaller environmental
footprint.

14050and overseas transport andShift to modes of transportation with lessenvironmental impact

32.0

37.8

70466
317.4

33330

3122966632008

20092010

2011

2012

4030
2010(FY)

0International logistics
Logistics within Japan
Proportion of marine transportation in international logistics• Green packaging
We use wooden frames and corrugated cardboard as packaging materials• Reducing the environmental impact of logistics

when shipping products. To reduce the amount of resources used for

We calculate and monitor CO2 emissions generated from sources regulated

shipments inside Japan. Furthermore, casters and special tools used forby the Act Concerning the Rational Use of Energy for logistics purposes

moving products on-site at the customers’ premises are collected and brought

within Japan, as well as CO2 emissions of international logistics between

back to Group plants for reuse as part of our efforts to save resources.

Group companies and to overseas customers. Our goal, set in 2008, has• The Ministry of the Environment’s support

been to cut CO2 emissions per ton-kilometer of international transportation

packaging, we also use reusable corrugated cardboard boxes for somevolume of CO2 emissions, and a 22% reduction on a per-ton-kilometerIn fiscal 2012, we took part in the Ministry of the Environment’s trial projectbasis. The share of marine transportation used for exports also increased

to support consignors seeking effective measures to reduce logistics-related

by more than 20 points over the baseline year to 37.8%.

CO2 emissions. The objective of this project is to calculate the actual volume

With respect to logistics within Japan, it is estimated that ourof greenhouse gas emissions generated from the supply chains of consignors

modal shift efforts in fiscal 2012 led to a reduction in CO 2 emissions

so as to help consignors plan countermeasures and identify problems inof approximately 92 tons.

the implementation of those countermeasures. By participating in thisproject, the Tokyo Electron Group could verify the calculation methods forusing seaborne shipping for all FPD production equipment as well as fordetermining the volume of CO2 emissions and the effects of the modal shift

semiconductor production equipment delivered to our customers in Korea

for international logistics and joint delivery implemented within the Group.

and parts of Europe and North America. In order to make the change

We will reflect the findings arising from this project in our future activities.

TOPICS
Reducing environmental impact by promoting the use ofrail transportation to carry goods from suppliersTokyo Electron Kyushu is actively promoting the use of rail transportation when
procuring from suppliers to reduce environmental impact. In fiscal 2012, the company
switched the mode of transportation from road to rail for freight from Osaka. To maintainhigh transportation quality, the company introduced various measures, including theemployment of special pallets that attenuate train vibrations. In February 2012, when therail transportation started, it is estimated that CO 2 emissions were reduced by 82% orapproximately 2.3 tons compared with the traditional freight transportation by trucks. Fromfiscal 2013, the company is also planning to eliminate the use of courier services and direct
delivery by suppliers so as to reduce the environmental impact of procurement logistics.
These efforts are expected to lead to not only the reduction of CO2 emissions but also
shortened transportation time, lower logistics costs, and decreased workloads.

Modal shift to rail transportation

Joint deliveryTokyo Electron Kyushu

Kumamoto

Suppliers in Osaka

Osaka

19

SOCIAL REPORT

A modal shift in exports has also been promoted, and we are now

EHS REPORT

meeting this goal, in fiscal 2012 we achieved a 54% reduction in the total

project for consignors working on thereduction of CO2 emissions from logistics

to half of fiscal 2008 levels by fiscal 2015. As a result of our efforts toward

MANAGEMENT REPORT*1 Modal shift: A shift in the mode of transportation. Specifically, switching fromconventional freight transportation by truck or aircraft to means such as marine andrail, which have a lower impact on the environment.

36.6

HIGHLIGHT

100

means as promoting a50

145
5150

its products through such

60

53.6200

the environmental impact
caused by the transport of(%)(1,000 tons)