EV GROUP®

NILPhotonics®
Competence Center

www.EVGroup.com

EVG NILPhotonics® Competence Center at a Glance
Our NILPhotonics Competence Center is a flexible cooperation
model that leverages EVG’s equipment and process knowhow gained through many years of experience to support thediversified needs of the photonics market.
It is EVG’s goal to develop customer and industry partnerships,
conjointly overcome challenges, and shorten the time to market
for innovative photonic devices and applications.
EVG has a particular focus on making the benefits of NILaccessible to the photonics community as it has proven to be
an enabling solution for a number of novel photonic devices.
EVG has a global partner network to draw from to support its
customers’ process integration and optimization efforts acrossthe NIL infrastructure, including template, resist materials
and supporting metrology. Multidisciplinary teams provide an
in-depth understanding of material interactions and surface
chemistry as well as process and equipment requirements for
scaling from first feasibility to volume production.
As a result, EVG is able to provide consultation and support during
process development and ramp-up to pilot manufacturing.

Master Templates■ S&R mastering■ SU-8 mastering■ Wide network ofstamp suppliers

Metrology
Infrastructure■ Scanning Electron
Microscope (SEM)■ Atomic ForceMicroscope (AFM)■ Interferometry■ Alignment■ Material
qualification

Competence

ProcessDevelopment■ UV-NIL(SmartNIL®)■ Hot embossing■ Micro-contact
printing■ Lens molding■ Stacking

NILPhotonics®
Materials Know-How■ Optimization of softstamp and imprint resininteraction■ Backplane preparation■ Established supplier
network for efficientdevelopment■ Productivity andlow Cost ofOwnership (CoO)

Center■■■■Prototyping/Pilot LinePilot line production
services
SAP, EES & ERP controlled
Seamless transition from
R&D to production
Process transfer tocostumer sites forvolume manufacturing

Sample Processing■ Feasibility testing■ Manufacturability
demonstrations■ Qualification runs
■ Small production
run imprint
services■ Scale-up to pilotline production

Cleanroom at EVG headquarters

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EV Group

EV Group Global Locations Application Laboratories

EVG’s equipment solutions and manufacturing processexpertise are critical to supporting many applications within
the semiconductor industry, with proven success in a varietyof key markets, including:Headquarters
EV Group
E. Thallner GmbHDI Erich Thallner Strasse 14782 St. Florian am Inn+43 7712 5311 0
ProcessTechnologySD@EVGroup.com

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Advanced Packaging, 3D Interconnect■Nanotechnology

MEMS (MicroElectroMechanical Systems)
SOI (Silicon-On-Insulator)
Compound Semiconductor andSilicon-based Power Devices

Recent developments in nanoimprint lithography (NIL)
and wafer bonding offer new capabilities to manufacture
innovative photonic structures with the highest functionality,
smallest form factors and lowest possible costs.
EVG is strongly committed to the emerging photonics
industry, and has recently announced new company
initiatives and technologies to facilitate bridging the gap
between photonics R&D and volume manufacturing.

Japan
EV Group Japan KK
Yokohama Business Park East Tower 1F
134, Godo-cho, Hodogaya-ku,
Yokohama-shi, Kanagawa, 240-0005+81 45 348 0665
Technology@EVGroup.jp
North America
EV Group Inc.
7700 South River Parkway
Tempe, AZ 85284+1 480 305 2400
ProcessUS@EVGroup.com

EV Group (EVG) offers:

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Wafer Bonders
Aligners
Coaters / Developers
Temporary Bonders / Debonders (Laminators)

ContactCleaners
Companies and other parties interested in partnering with
the NILPhotonics Competence Center can contact EV Groupby phone at +43 7712 5311 0 or e-mail.

Inspection Systems

Get in touch:
NILPhotonics@EVGroup.com

Printed on paper from sustainable sources. Data, design and specifications may not simultaneouslyapply; or depend on individual equipment configuration, process conditions and materials and mayvary accordingly. EVG reserves the right to change data, design and specifications without priornotice. All trademarks, logos, website addresses or equipment names are registered trademarks
and/or the property of EV Group or their respective owners.

EVG®7200 Automated UV-NIL
System up to 200 mm

EVG® HERCULES® NIL Automated SmartNIL®
UV Nanoimprint Lithography System up to 200 mm

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Printed on paper from sustainable sources© EV Group (EVG). All rights reserved. V22/01

www.EVGroup.com