Front Load Single Sensor
INFICON Front Load Single crystal sensors offer proven reliability and durability and have the best
thermal stability of any sensor head on the market. The front load design allows for easy insertion of
the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanicallyrather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can beordered individually or in a sensor / feedthrough combination that can be either welded or assembled
with compression fittings.
Sensor ConfigurationsTwo sensor configurations are offered: The standard version and the right angle (compact) version. The
standard version is designed for installation from the side or bottom of the chamber having the coolingtubes parallel to the crystal face. The right angle version is designed for installation through the top of
the vacuum system having the water cooling tubes perpendicular to the crystal face. Optionally, sensors
can be ordered with a pneumatically driven crystal shutter to protect the crystal during source warm up,
when not used during deposition of an alternate material, or to extend crystal life when used with
RateWatcher™. The shutter is designed to flip down allowing easy crystal replacement. The exposed
crystal electrode is fully grounded to effectively eliminate problems due to RF interference.
Feedthroughs
INFICON offers two types of feedthroughs, either a 1 inch bolt feedthrough or a 2¾ inch (CF40) ConFlat®
flange feedthrough. KF40 feedthroughs are available on request.
Feedthrough Connection
Front Load Single Sensors can be ordered in combination with a feedthrough. The sensor / feedthroughconnection can be either welded or made with compression fittings. Compression fittings allow for easy
adjustability without the need for brazing or welding. The feedthrough can be moved along the length ofthe tubes allowing the length inside the vacuum systems to be adjusted over a range of 20.3–71.1 cm(8–28 in.) for “E” length sensors. Once the desired length is determined, the compression fittings allow
for a finger tight tube seal. Alternately, a welded connection may be chosen.

AD VA N TAGE S■

Front load crystal holder■Easy installation	Available with:– CF40 feedthrough– 2.54 cm (1 in.) bolt
feedthrough■■A djustable length if orderedwith compression fittings■■

S ensor / feedthrough combinations available welded tocustomer specified lengths.
N o brazing required ifordered with compression
fittings or welded tofeedthroughO RD E R I N G I N F ORMAT ION
Front Load Single Sensor (with in-vacuum cables)
SL –Type of sensor (Includes in-vacuum cable, crystal snatcher
and user manual. Crystals sold separately)
Standard sensor ...............................................................................
(water lines parallel)
Right angle sensor ............................................................................
(water lines perpendicular)

A
B

Shutter assembly (see note 3)
None .................................................................................................
Standard shutter ...............................................................................

0
1

Length of sensor (see note 2)
Standard length.................................................................................
includes 78.1 cm (30.75 in.) in-vacuum cable

E

Feedthrough (see note 1)
None .................................................................................................
1 in. bolt ...........................................................................................
CF40 ................................................................................................

034Feedthrough connection (see notes 3 and 4)
Sensor not connected to feedthrough ................................................
Sensor welded to feedthrough ..........................................................
Feedthrough equipped with Ultra-Torr compression fittings ...............
(allows for adjustable sensor length).
Welded sensor length(use only when feedthrough connection is 7)(see notes 2 and 5)Not required when feedthrough connection option is 0 or 8.
Weld length in centimeters, 20–70 cm (8–27.5 in.). .........................
Weld length in centimeters, 71–99 cm (28–39 in.). ..........................
*** Other lengths may be available: contact factory.
Other lengths will be considered a special order
and will be subject to additional cost and lead time

078–

NOTE 1:
Feedthrough configuration varies
depending on options selected (Front
Load or Cool Drawer, with or without
shutter, type of feedthrough, etc.).
Example: SL-A0E37 uses feedthroughPN 002-042 while SL-A1E37 uses
feedthrough PN 750-030-G1.
NOTE 2:
Sensor lengths are measured
from center of the crystal to thevacuum side (sealing surface) of thefeedthrough. Once a welded sensor
order is confirmed, it cannot becancelled.
NOTE 3:
Front Load Sensors ordered withshutters and 1 in. bolt style
feedthrough can only be welded(compression fittings not available).
NOTE 4:
Front Load Sensors ordered with a
CF40 feedthrough and a shutter cannot
be welded due to dimensional limits ofthe CF40.
NOTE 5:
Front Load sensors welded to lengths
between 28–34 in. will include a36 in. in-vacuum cable. Sensors
welded to lengths between 34–39 in.
will include a 48 in. in-vacuum cable.

20–70
71–99

The following combinations are not available: (see notes 3 and 4):
SL-A1E38, SL-B1E38, SL-A1E47, and SL-B1E47
Examples of non-valid part numbers include all options with no feedthroughconnection or compression fittings and a welded sensor length; for example,
SL-A0E48-20, SL-B1E40-20, etc.

SensorIn-vacuum cable

Substrate

Source Shutter

FeedthroughController or Monitor
Short 6 in. BNC cable
Oscillator or XIU

2Front Load Single Sensor

Oscillator (XIU) to instrument
interconnect cableS P E C I F I C AT ION S
SL-A _ E _ _ series standard single sensor
Maximum bakeout temp with no water

130°C

Maximum operating isothermal environment
temperature with minimum water flow

400°C

SL-A size (maximum envelope without shutter)

27 mm x 61.47 mm x 17.53 mm (1.063 x 2.42 x 0.69 in.)Water tube

3.175 mm (1/8 in.) O.D. seamless stainless steel

Crystal exchange

Front loading; self-contained package for ease of exchange

Mounting

Two #4-40 tapped holes on the back of the sensor body

Installation Requirements
FeedthroughTwo pass water 4.8 mm (3/16 in.) O.D. tubing with Microdot® coax connector

Water flow rate

Minimum water flow 150–200 cc/min, 30°C max (do not allow to freeze)

Water quality	Coolant should not contain chlorides as stress corrosion cracking may occur.
Extremely dirty water may result in loss of cooling capacity.
Materials
Body and holder

304 type stainless steel

Springs, electrical contacts

Au plated Be-CuWater tubes	S-304, 3.175 mm (0.125 in.) O.D. x 0.381 mm (0.015 in.) wall thickness seamlessstainless steel tubing
Connector (Microdot)
Insulators
WireBrazeCrystal

3

Front Load Single Sensor

Stainless steel, Teflon® and glass insulated>99% Al2O3
Teflon insulated copper
Vacuum process high temperature Ni-Cr alloy
13.97 mm (0.550 in.) diameterS P E C I F I C AT ION S
SL-B _ E _ _ series right angle single sensor specifications
Maximum bakeout temp with no water

130°C

Maximum operating isothermal environment
temperature with minimum water flow

400°C

SL-B _ E _ _ size
(maximum envelope without shutter)

28.19 x 26.92 x 26.92 mm(1.11 x 1.06 x 1.06 in.)Water tube

3.175 mm (1/8 in.) O.D. seamless stainless steel

Crystal exchange

Front loading; self-contained package for ease of exchange

Mounting

Two #4-40 tapped holes on the back of the sensor body

Installation requirements
FeedthroughTwo pass water 4.8 mm (3/16 in.) O.D. tubing with Microdot® coax connector

Other	XIU or oscillator to match specific controller, solenoid valve assembly 750-420-G1 forshuttered sensors
Water flow rate

Minimum water flow 150–200 cc/min, 30°C max

Water quality	Coolant should not contain chlorides as stress corrosion cracking may occur.
Extremely dirty water may result in loss of cooling capacity.
Materials
Body and holder

304 type stainless steel

Springs, electrical contacts

Au plated Be-Cu

Water tubes	S-304, 3.175 mm (0.125 in.) O.D. x 0.381 mm (0.015 in.) wall thickness
seamless stainless steel tubing
Connector (Microdot)

Stainless steel, Teflon® and glass insulated

Insulators>99% Al2O3WireTeflon insulated copper

Braze

Vacuum process high temperature Ni-Cr alloy

Crystal0.550 in. (13.97 mm) diameter

S P E C I F I C AT ION S
Feedthrough specifications
NOTE: Sensor / feedthrough combination specifications are determined by lowest component specification
1 in. bolt and Ultra-Torr (compression fitting) terminations:
Materials

304 stainless steel, Teflon®, ceramic, beryllium nickel, VITON®

Temperature

Operational environment to 300°C with water cooling or 165°C without

Mounting

1.015 in. ±0.010 in. diameter aperture

CF 40 welded terminations:
Materials

304 stainless steel, Teflon, ceramic, beryllium nickel

Temperature

Operational environment to 450°C with water cooling or 165°C without

Mounting

Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.

4Front Load Single Sensor

S PA R E PA RT S LIST
P/N

Description

P/N

Description

007-007

Retainer spring (for crystal holder)

750-172-G1

Crystal holder (includes retainer spring)

007-023

Ceramic retainer

750-174-P2

Female coax

007-044In-vacuum cable, 78.1cm (30.75 in.)

750-175-P1

Insulator (underneath leaf spring)

080-018

Set screw (for female coax)

750-188-P3

Leaf spring

082-044

Teflon screw (for leaf spring)750-210-G1

750-115-P4

Coupling (for bellows assembly)

Shutter module (bellows assembly,Shaft assembly, and shutter assembly)

750-169-P2

Bellows assembly (coupling not included)750-215-G1

Shaft assembly (part of shutter module)

750-171-P1

Finger spring contact

750-216-G1

Shutter assembly (part of shutter module)

321-039-G13

In-vacuum cable, 154.2 cm (60 in.)

D I M E N S I ON S
SL-A _ E _ _ series standard single sensor (sensor only)
NOTE: Measurements in cm [in.]SHUTTER ADAPTER REF.

ACTUATOR REF.

782.3 [30.80]

782.1 [30.79]
33.8 [1.33]
WATER
27 [1.06]

23.4 [0.92]
WATER
26.4 [1.04]

17.5 [0.69]#4-40, FOUR PLCS
5.1 [0.20]

10.2 [0.40]
3.3 [0.13]
18.8 [0.74]

5

Front Load Single Sensor

D I M E N S I ON S
SL-B _ E _ _ Series Right Angle Single Sensor (sensor only)
790.0 [31.1]

CABLE 781.0 [30.75] LONGSHUTTER ADAPTER
REF.

57.0 [2.24]
46.5 [1.83]

WATER

41.1 [1.62]
8.6 [0.34]

WATER
AIR
ASSY. COMPACT CRYSTAL SENSOR
D750-209-G1

ASSY. SHUTTER MODULE
B750-210-G1

ASSY. DUAL/STD CRYSTAL HOLDER
B750-172-G1

16.0[0.63]

SHUTTER REF.
(SHOWN ROTATEDFOR CLARITY)

10.1 [0.40]

49.0 [1.93]
52.5 [2.08]#4-40, FOUR PLCS
18.8 [0.74]
8.9 [0.35]
3.3 [0.13]
8.9 [0.35]

5.1 [0.20]

776.5 [30.57]

26.4 [1.04]

24.9 [0.98]
17.5 [0.69]

14.7 [0.58]
11.7 [0.46]

WATER
27.0 [1.06]

17.8 [0.70]

23.4 [0.92]

WATER
10.2 [0.40]

1.5 [0.06]

14.7 [0.58] REF

Feedthrough used for SL-A0E47, SL-A0E40, SL-B0E47, and SL-B0E40 sensor / feedthrough combinations (feedthrough PN 002-043)
NOTE: Measurements in cm [in.]

CL

32.8
[1.29]

6.73 [0.265] DIA. (SIX)

69.9[2.75]

CL

4.77[0.188]10.2 [0.40]

5.1 [0.20]

7.6 [0.30]
15.2[0.60]

6

Front Load Single Sensor

127 [5.0]
12.7 [0.5]228.60 [9.0]D I M E N S I ON S
Feedthrough used for SL-A1E40 and SL-B1E40 sensor / feedthrough combinations (feedthrough PN 750-685-G1)
NOTE: Measurements in cm [in.]Ø 6.73 [0.26]
SIX HOLES EQ SP
ON A 58.7 [2.31] DIA BC

Mating air fitting (10-32) for 750-420-G1 solenoid valve[0.90][0.45]
32.67 [1.29]

8.89 [0.35]
8.88[0.35]

12.69[0.50]

57.15 [2.25]

Ø 69.34 [2.73]
CONFLAT FLANGE

12.70 [0.50]

127.0 [5.0]228.60 [9.00]

Feedthrough used for SL-A0E48 and SL-B0E48 sensor / feedthrough combinations (feedthrough PN 206-878-G2)
NOTE: Measurements in cm [in.]Ø 6.73 [0.26]
SIX HOLES EQ SP
ON A 58.7 [2.31] DIA BC

15.26 [0.60]
251.83 [9.91]

7.62 [0.30]

5.07 [0.20]

10.16 [0.40]
32.78[1.29]

Ø 69.34 [2.73]
CONFLAT FLANGE

7Front Load Single Sensor

127.0 [5.0]12.70 [0.50]

D I M E N S I ON S
Feedthrough used for SL-A1E48 and SL-B1E48 sensor / feedthrough combinations (feedthrough PN 750-685-G2)
NOTE: Measurements in cm [in.]Ø 6.73 [0.26]
SIX HOLES EQ SP
ON A 58.7 [2.31] DIA BC

Mating air fitting (10-32) for 750-420-G1 solenoid valve

15.26 [0.60]

7.62 [0.30]

8.86 [0.35]
32.64 [1.29]
8.76 [0.35]

12.57 [0.50]

57.15 [2.25]

Ø 69.34 [2.73]
CONFLAT FLANGE

12.70 [0.50]

127.0 [5.0]251.83 [9.91]

Feedthrough used for SL-A0E37, SL-B0E37, SL-A0E30 and SL-B0E30 sensor / feedthrough combinations (feedthrough PN 002-042)
NOTE: Measurements in cm [in.]FEMALE JACK COAX
IPN 051-981

A

10.16 [0.40]

A
5.08 [0.20]

9.5 [0.30]
VITON O-RING#2-1225.08 [0.20]

50.8 [2.0]#1-14-UNS THD

3.96 [0.156]

WASHER

VIEW
ASSY. BNC CONN.
C206-779-G1

8Front Load Single Sensor“A - A”

D I M E N S I ON S
Feedthrough used for SL-A0E38 and SL-B0E38 sensor / feedthrough combinations (feedthrough PN 750-624-G1)
NOTE: Measurements in cm [in.]162.93 [6.41]
10.16 [0.40]

9.04 [0.36]

76.20 [3.0]61.85 [2.44]
12.70 [0.50]

5.08 [0.20]

43.99[1.73]

3.25 [0.13]50.80 [2.0]38.10 [1.50]

251.83 [9.91] REF

Feedthrough used for SL-A1E37, SL-B1E37, SL-A1E30 and SL-B1E30 sensor / feedthrough combinations (feedthrough PN 750-030-G1)
NOTE: Measurements in cm [in.]19.0 [0.75]

127.0 [5.0]12.70 [0.50]

FEMALE JACK COAX
IPN 051-981

A

6.35 [0.25]
7.11 [0.28]

A

9.7 [0.38]

4.78 [0.188]

VITON O-RING#2-12250.8 [2.0]323.8 [12.75]#1-14-UNS THD
3.18 [0.125]

WASHER

VIEW
ASSY. BNC CONN.
C206-779-G1
127.0 [5.0]19.0 [0.75]

9Front Load Single Sensor“A - A”

D I M E N S I ON S
Sensor Length Specification for SL-A_ E _ _-XX sensor / feedthrough combinations
NOTE: Measurements in cm [in.]0.466 REF

20–99
[8–39]

Sensor Length Specification for SL-B_ E _ _-XX sensor / feedthrough combinations
NOTE: Measurements in cm [in.]002-043
206-878-G2
750-685-G1
750-685-G2

002-042750-030-G1

www.inf icon.com

SENSOR or SENSOR W SHUTTER:
SL-BOE00 SL-B1EOO
SL-B0G00 SL-B1G00

20–99[8–39]

reachus@in f ico n .co m

Due to our continuing program of product improvements, specifications are subject to change without notice.
RateWatcher is a trademark of INFICON. All other trademarks are the property of their respective owners.
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