Environmental Initiatives in Products and Logistics
Reducing Environmental
Impact of Product Use
Our approach to environmental initiatives
In its Environment Policy, the TEL Group clearly expresses its
belief that promoting environmentally friendly product design isa crucial part of its corporate activity. The Group is particularly
working on reducing the energy consumption of its products asa priority challenge.

Energy-saving measures
The TEL Group is making energy-saving efforts to achieve thegoal of 50% reduction in energy consumption from the fiscal
2008 level by fiscal 2015 with regard to major models of eachbusiness unit. In fiscal 2013, we achieved the interim target of
reducing energy consumption by 30% regarding major modelsof each business unit.
We are promoting the reduction of product energy
consumption through four approaches: (1) reducing the energy
used by the product itself; (2) reducing the energy used byperipheral devices; (3) ensuring systematic and efficient
operation of products; and (4) ensuring energy-saving operationof customers’ factories. As the importance of (3) and (4) is likely
to increase in the future, we are planning to focus more on themonitoring and control of energy use.

Energy monitoring
To facilitate the effort to reduce the energy consumption of
our equipment when in use, we are developing a monitoring
system for the centralized management of energy consumption.
Known as the “Eco Monitor,” the system visualizes the amountof electricity and other utilities supplied to the equipment
during operation. It is expected that the data will be used forcomparison and analysis purposes and will lead to the reductionof waste in energy consumption and the improvement ofoperational efficiency.

Electricity
Cooling waterPure water

Dry air
NitrogenExhaustEco Monitor

Customer’s factory
Energy-saving operation of the factory(planned operation and proper management)

System
Efﬁcient management

Equipment
Reduced energy usage of the equipment itself

Reduced energy usage of peripheral devices
Pump

Water chiller

Peripheral devices

Glossary24

ScrubberMonitors electricity, exhaust, water (cooling water and pure water),dry air and nitrogen as comprehensive energy during the actual
operation of the equipment in accordance with SEMI S23*.

S23: Guidelines for energy conservation for semiconductor production equipment issued by Semiconductor Equipment and Materials International (SEMI),* SEMIan international industry organization for semiconductor/FPD production equipment and material manufacturers

Equipment that achieved a 30% reduction in energy consumption (from FY2008 level; per wafer)
Electricity

Plasma Etch System
TactrasTM VigusTM

Electricity

Key initiative:
Saving energy consumption ofchiller, pump and heater

Single Wafer Plasma Treatment System
Triase+TM SPAi
Key initiative:
Eliminating temperature control
unit by using plant-sourced
cooling water directly

Energy reduction: 31%

Energy reduction: 50%

Electricity

Purewater

NitrogenElectricity

Single Wafer CVD System
Triase+TM EX-IITM TiN

Key initiative:
Improving productivity with
two-wafer processing

Key initiative:
Miniaturization and energy-saving
operation of heater and pump

Energy reduction: 50%

Energy reduction: 50%

Auto Wet Station
EXPEDIUSTM-i

Dry air

Single Wafer Cleaning System
CELLESTATM-i

Key initiative:
Reducing pure water
consumption in standby mode

Key initiative:
Reducing dry air consumption by
improving the drying system

Energy reduction: 36%

Energy reduction: 50%

Wafer Prober
Precio nanoTM

NitrogenScrubber System
NS300+Key initiative:
Reducing the amount of dry
air supply with dew point
monitoring

Key initiative:
Reducing the amount of exhaustby changing N 2 purging to dry air
and improving duct

Energy reduction: 50%

Energy reduction: 50%

Thermal Processing System
TELINDY PLUSTM
Key initiative:
Ensuring the use of proper amountof nitrogen
Energy reduction: 30%

ExhaustENVIRONMENT

Dry air

Gas Chemical Etch System
Certas WINGTM

Coater/Developers
CLEAN TRACK TM LITHIUS ProTM V-i
Key initiative:
Reducing the amount of exhaustof rotating cup modules andsaving energy in temperature/humidity control
Energy reduction: 50%

25

Measures against Regulated
Chemical Substances
Our approach to regulated chemical substances
Reducing regulated chemical substances contained in products
is essential when manufacturing environmentally friendlyproducts. At the TEL Group, we set our own standards andcontinue to make efforts to reduce the use of regulated
chemical substances in our equipment and quickly supply
products that are in compliance with the laws and regulations ofcountries in which our customers operate.

Reducing the use of regulated
chemical substances in equipment
Although TEL Group products are exempt from the EU’s RoHS*1
Directive, the TEL Group is committed to voluntarily reducing
the use of the six RoHS substances*2. We designate equipmentthat contains 98.5% or more parts that meet the EU’s RoHS
Directive as “equipment with fewer regulated chemicalsubstances,” and major models of each of our business units
meet this standard. We will make continued efforts to increase
the number of compliant models.
Additionally, to effectively become compliant with the EU’s
RoHS Directive, REACH*3, Chinese RoHS and other regulations,
we adopted JAMP AIS*4 and JAMP management guidelines
for information on chemicals contained in our products. Prior
to the adoption of these regulations, in fiscal 2013 we held
briefing sessions for our suppliers. We will introduce theJAMP-IT system, which is an IT system promoted by JAMP
for distributing information on chemical substances containedin products, and efficiently conduct surveys by requesting
cooperation from our suppliers.

Complying with the laws and regulations in countries
and regions where our customers operate
We provide equipment in full compliance with China’s
version of RoHS, which requires that necessary
information be provided to customers.
In response to the EU’s REACH regulation, we provide
information on the content of any substance of very highconcern (SVHC) and safety information when a SVHC
amounting to more than 0.1% is present in any of our products.
In response to each country’s regulations based on
the GHS*5 formulated by the United Nations, the TELGroup makes available safety information on chemical
substances through (material) safety data sheets, or(M) SDS, as well as labels affixed to containers carrying
chemical substances.
With regard to battery regulations*6 enacted by the EUand Taiwan, we check whether applicable batteries areused inside our products and take necessary measures.

Future plans
We will further increase the percentage of equipment
containing reduced amounts of regulated chemical substances.
We will effectively use JAMP and other frameworks
and will broaden our collaboration with customers
and suppliers to promote more rational and accurate
measures for the management of regulated chemicalsubstances. We will also continuously improve ourchemical substance management system, which we havebuilt internally based on JAMP management guidelines
for information on chemicals contained in products, tofurther strengthen our control over chemical substances.
We will further tighten the management of regulated
chemical substances at a global level to achieve an evenhigher level of environmental compliance for our products.

Equipment with fewer regulated chemical substances as of FY2013
Thermal Processing System
Single Wafer CVD System
Wafer Prober
Etch System
Coater/Developers

Surface Preparation System
Wafer Bonding/Debonding System

Glossary

TELINDY PLUS™
Trias™
Precio™
Telius™SP
Tactras™
CLEAN TRACK™ LITHIUS Pro™
CLEAN TRACK™ LITHIUS™
CELLESTA™+EXPEDIUS™
NS300
Synapse™ Series

Introductory presentation on management
guidelines for information on chemicals
contained in products

Presentation material

Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment*12 RoHS:
Six RoHS substances: Lead, mercury, cadmium, hexavalent chromium, polybrominated biphenals (PBBs) and polybrominated diphenylethers (PBDEs)*3 REACH: Registration, Evaluation, Authorisation and Restriction of Chemicals. A regulation pertaining to the registration, evaluation, authorization and restriction* of chemicals. For products containing SVHC amounting to more than 0.1 wt% in particular, manufacturers are required to provide information on the SVHC
content of their products as well as information to ensure the safe use of the products.
AIS: Article information sheet (AIS) promoted by the Joint Article Management Promotion-consortium (JAMP). This sheet is used to deliver basic*4 JAMP
information on regulated chemical substances.
GHS: Globally Harmonized System of Classification and Labelling of Chemicals. A system agreed upon by the United Nations that is intended to provide unified*5 standards
across various countries for the classification of hazard level, labeling and the content of (M) SDS
regulations: Regulations enforced in each country to facilitate the collection and recycling of batteries, including the mandatory indication of the*6 Battery
recycling symbol on batteries

26

Reducing the Environmental
Impact of Logistics
Our approach to reducing theenvironmental impact of logistics
Regulations concerning logistics have been tightened witha view to helping curb global climate change. At the sametime, companies are facing growing demands for measures
to reduce environmental impact of their logistics. For its part,the TEL Group will continue striving to reduce environmentalimpact caused by the transport of its products through suchmeans as promoting modal shift* 7 for domestic and overseas
transport and adopting packaging methods with a smaller
environmental footprint.

2012 level but improved by about 8 points from fiscal 2008.
To further facilitate a modal shift by switching to marine andother transportation methods that have a lower impact on theenvironment, we are working to reduce production lead time.
We use wooden frames and corrugated cardboard as
packaging materials when shipping products. To reduce theamount of resources used for packaging, we also use reusable
corrugated cardboard boxes as packaging materials for someshipments inside Japan. Furthermore, casters and special tools
used for moving products on-site at the customers’ premises
are collected and brought back to Group plants for reuse as partof our efforts to save resources.
CO 2 emissions from logistics and the proportion of marine transportation(Thousand tons)

(%)

200

Reducing the environmental impactof logistics
We calculate and monitor the CO 2 emissions of domestic
and international logistics for our products. In fiscal 2013,
we reduced CO 2 emissions by about 9% from fiscal 2012,to about 60,000 tons. The share of marine transportation
used for exports was 25.9%, which declined from the fiscal

15060

53.6

145

50

536.6

37.840

32.0
10050

140

25.930360

2066

6358102011

2012

70
17.402008

43331330
2009

229
2010

66

22013 (FY)

0International logistics
Logistics within Japan
Proportion of marine transportation in international logistics

TOPICS
Revision of Guideline for Green Procurement

ENVIRONMENTOn January 15, 2001, the TEL Group issued the Guideline for Green Procurement to operate its
business based on its Environment Policy, and has since promoted green procurement that takes intoaccount efforts to reduce the environmental impact of its suppliers’ business activities.
In light of the more stringent environmental laws and regulations being enacted around the globe
over the decade since the issuance of the Guideline for Green Procurement, the TEL Group revised theguideline in November 2012. The revised guideline consists of the following:
1. Improving the environmental management system
Improving the sustainable corporate environmental management system to conserve the global
environment by referring to the ISO14001 environmental management system
2. Monitoring, reducing, and disclosing the environmental impact of business activities
3. Considering the environmental impact of productst1 SPWJEJOHMBCFMTSFRVJSFEGPSEFMJWFSZPGHBTBOEDIFNJDBMQSPEVDUT BTXFMMBTTBGFUZJOGPSNBUJPO
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Guideline for Green Procurement

shift: A shift in the mode of transportation. Specifically, switching from conventional freight transportation by truck or aircraft to means such as marine*7 Modaland rail, which have a lower impact on the environment
27