Highlights

TEL’s Business
TEL’s major product is semiconductor production equipment. Each product differs in specifications, as it is based on therequirements of each of our customers. We do our utmost to consider the environment and safety when manufacturing
our products, in order to meet the technical and performance demands expected of us.

Semiconductor Production Equipment
Manufacturing Flow
On these pages, we have provided an example of the stages of ourSpecifications for each unit differ because
each piece of equipment is customdesigned based on the destination country or the layout of the system. During thedesign process, we lavish attention onenvironmental and safety concerns inregards to manufacturing, operation andTokyo Electron Kyushu Limited maintenance lifecycles. Lately, shifting
to lead-free designs looms as a big
Design Division
challenge.

operations — including specification meetings, design, manufacturing, shipping, start-up and inspection, as well as semiconductor manufacturing —for TEL’s major product: CLEAN TRACK™ LITHIUS™. We also featurecomments from on-site regarding the environment and safety. We arecommitted to placing a premium on the environment, safety and health inall stages of our work.

2.
Design1.
Specifications
Meetings

Tokyo Electron Limited
Sales DivisionDuring our meetings with customers, we spend agreat deal of time in setting delivery dates, priceand the detailed specifications of products inmeetings with customers. Our sales division
understands that legal systems and regulations,as well as customers differ by region, and is so
we are making ongoing efforts to acquire theappropriate legal and regulatory knowledge inregards to the environment and safety.

Our main task is unit assembly andinspections. In the past, we used atype of alcohol for shipping inspections, but we have switched to purewater, thus conserving resources.

3.
Manufacturing
Tokyo Electron Kyushu Limited
Manufacturing Division

TOKYO ELECTRON

8

Environmental Sustainability
Report 2004

Start-up work takes one to twomonths until the final inspection.
This is an on-site operation at ourcustomer’s site. We pay great
attention to organization and takecare to avoid accidents, such as
solution leakage.

The basic concept behind the CLEAN TRACKLITHIUS, which went into mass production inJanuary 2004, is reducing photoresist consumption and safe operation. Furthermore, thetechnology used in this equipment has madenew levels of microfabrication possible. We
believe that this will contribute to the furtheradvancement of society.

Hikaru Ito
VP & General Manager
Clean Track BU
Tokyo Electron Limited

Tokyo Electron Kyushu Limited
Engineering ServicesDivision

5.
Start-up andInspection

6.
Semiconductors
Manufacturing

For maintenance reasons, or in
the event of equipment problems,
we provide customer support by
setting up support stations near
our customers all over the world.
We also recycle parts received
during maintenance work.
Tokyo Electron FE Limited
Field Support Division

4.
ShippingandDelivery

TOKYO ELECTRONTokyo Electron BP Limited
Logistics Division

9

Environmental Sustainability
Report 2004

We use a special packaging in order to maintain a high level of cleanliness. We are considering safety to the utmost degree possible inregard to the increased risks in loading,transportation and installation of our equipment
as they continue to get larger. We are alsoendeavoring to conserve resources and recycle
by avoiding excessive packaging, without
affecting product quality, and taking packaging
materials with us after delivering a product .