Environmental Sustainability Report 2003

TEL and Environmental Impact
At TEL, we analyze the environmental impact of our products, and use that informationin ongoing efforts to reduce the impact.

Life Cycle Assessment Results for Each TELFORMULA Thermal Processing System

Procurement

Manufacturing and AssemblyParts number in the tens of thousands. Eachcomplete unit weighs up to one or two tons.

The system is manufactured in a cleanroom* like theone where the equipment will actually be used.
Impact are mainly related to energy consumed aselectricity for inspection, and gases used in testingprocesses.

Iron and Steel SheetTEL
CO2 emissions (t- CO2)

Controller

Transformer

50.7t-CO2
3.7t-CO2*Cleanroom: A room designed to be completely
free of dust and contaminants.

Environmental Impact of Our Products
TEL products are characterized by relatively low environmental

The material flows of TEL are illustrated in the figure on theimpact during manufacturing, compared to the extremely large

right. The figures shown are the combined totals for production andamounts of resources and energy consumed after being delivered toadministrative facilities. Here are a few of the most noteworthy features:

our customers, who then use the equipment to manufacture semi-• The equipment assessment process is more of an environmental

conductor devices. Because of this, we are working to find ways toburden than the equipment manufacturing and assembly processes.

reduce the environmental impact incurred during actual use of the• Compared to the above, the amounts of energy used and waste

equipment. In addition, because a variety of gases and chemicals areemitted (including liquid waste) during manufacturing and as-employed when the equipment is used, we pay the utmost attention

sembly processes are relatively small.

to the issue of safety.

The big part of environmental burden during equipment assess-

Meanwhile, many of the Earth’s resources are used for procur-

ment occurs because electricity and a variety of gases and chemicals

ing the raw materials needed for manufacturing, assembly and deliv-

are used to assess equipment, using processes similar to those em-

ery of equipment. We are making an effort to reduce the environ-ployed during actual semiconductor production.

mental burdens throughout the life cycles of these materials as well.

7Input and Output of TEL

TOKYO ELECTRON Environmental Sustainability Report 2003

1878.1 t-CO2 (over ten years)

DeliveryUse

To maintain cleanliness, special packaging materials are used for transporting the equipment.
For ground transportation, special vehicles areused that minimize vibration. For shipping overseas, aircrafts or ships are used.

The semiconductor production equipment isinstalled in cleanrooms, and most of it is operated 24 hours a day for mass production
and to ensure stable operation. A variety offorms of energy and resources—electricity,chemicals, gases, pure water and so on—areused in the semiconductor production process.

The equipment is used for 10 to 20 years.

1.5t-CO2

Material Flows of TEL

Electricity

CO2

95,570 tons

NOx

10.5 tons

SOx

1.7 tons

Wastewater(to rivers, sewerage systems)

965 km226,830 MWh

3Natural gas

608 kmFuel

2,621 kl

TEL
(in Japan and someoverseas operations)Water

974 km33

Total waste emissions 14,467 tons
Chemicals

9.69 tons(subject to PRTR reporting)

Paper (copy paper)

383 tons

Amount recycled

11,199 tons

Amount incinerated
or put in a landfill

3,268 tons

TOKYO ELECTRON Environmental Sustainability Report 2003

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