Eco Products

Products with Reduced Environmental Impact
TEL actively applies LCA techniques and works to conserve energy
in order to efficiently reduce environmental impact.

TEL Stance on Eco Products
TEL offers its customers services and products, such as semi-Organization for Mitigating Environmental
Impacts Associated with Products

conductor production equipment, FPD production equipment andEnvironmental impacts that are common to the areas of semi-

electronic components produced in-house. TEL has prospered by in-conductor and FPD production equipment made and sold by TEL arecorporating customer suggestions into our products and by providing

subject to the mitigation efforts of a special organization set up atworld-leading technologies and products. At a time when concern

TEL. See page 20 for details.

about environmental issues is growing, we face the need to reduce
environmental impact during manufacturing and to eliminate harmful
substances from our equipment materials. Notably, customers haveCountermeasures Organization for Mitigating
Environmental Problems Associated with Products

asked us about the environmental impacts of products throughout

Director charged with responsibility

has compiled environmental impact data for products during manu-Worldwide Product EHS Committee

facture, usage and disposal. TEL plans to continue working with ourcustomers to further reduce environmental impact.

Technology, sales, service
Secretariat: Environment,
Health & Safety Center

Product Emissions and Consumption Reduction Targets
TEL determines reduction targets for gas emissions and power
consumption of its products and works to reduce their environmental

TEL is looking into further aggressive reductions in PFCs* in theevent that SEMI*, SEMATECH* or similar organizations promote fur-Environmental themes to be addressed

Example of Major Efforts in Each Business Unit (BU)
BU (Business Unit)/Plant
Etch Systems/Yamanashi

impact. Because semiconductor wafer size has increased from200mm to 300mm, we express these targets in surface area units.

Organization for each major product line
BU's Equipment
Environment, Health andSafety Committee

their lifecycles. Taking a sincere approach to customer requests, TEL

Single Wafer Deposition/Yamanashi

Efforts made•Reducing power consumption•Reducing power consumption•Reducing N2 and exhaust

FPD Systems/Yamanashi•Reducing power consumptionFPD Systems/Ozu•Reducing chemicals

Cleaning Systems/Saga•Reducing use of chemical liquids

ther measures in the future.
•Reducing use of IPA*
•Reducing use of pure water•Reducing power consumption

Long-term Targets for Reducing Environmental Impact Occurring During
the Use of Semiconductor Production Equipment (Product EHS Roadmap)
1997
1999
2002 intermediate targets
standards*1 standards*2

2005 targets

Wafer size

200mm

300mm

200mm

300mm

200mm

300mm

Energy consumption

1

1

0.8

0.8

0.65

0.5

11

0.8

0.75

0.65

0.4

1

1

0.8

0.85

0.65

0.7

HAPs* emissions

110.4

0.7

0.35

0.4

VOCs* emissions

110.4

0.7

0.35

0.4

Clean Track/Kumamoto
Koshi•Reducing use of chemical liquids

Thermal Processing Systems/Tohoku•Reducing equipment footprint•Reducing power consumption•Reducing use of wiring madewith vinyl chloride•Establishing guidelines

for scrapping equipment
Water consumption•Reducing power consumption(coolant water, etc.)
Water consumption(ultra pure water)*1 Standards are defined as the amount consumed or emitted per square area
unit in 1997 by 200mm semiconductor production equipment.
*2 Standards are defined as the amount consumed or emitted per square area
unit in 1999 by 300mm semiconductor production equipment.

PFCs: Perfluorocompounds, a CFC alternative.
SEMI: Semiconductor Equipment and Materials International, an industry association consisting of semiconductor and FPD production equipment and materials manufacturers.
SEMATECH (SEmiconductor MAnufacturing TECHnology): A consortium of American, European and some Korean and Taiwanese semiconductor device manufacturers.

9TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Fiscal 2002 Action Plan Items
The following table describes TEL's fiscal 2002 action plan forthe manufacturing of environmentally-friendly products, based on theProduct EHS Roadmap (see page at left).

Fiscal 2002 Action Plan for the Manufacturing of Environmentally - friendly Products
Item

Fiscal 2002 Action Plan Items
Reduce power consumption

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in power consumption in fiscal 2002

Global warming prevention
Reduce emissions of VOCs*

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in VOCs in fiscal 2002

Air pollution prevention
and acid rain countermeasures

Reduce emissions of HAPs*

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in HAPs in fiscal 2002

Ozone layer depletion prevention

Regulate usage of ozone layer-depleting substances

Promote elimination of HCFC-based substances

Promote recycling and reuse(dismantling into separate materials, marking materials, disposal)

For each product type, set targets and begin performing
Study the tasks and procedures associated with dismantlingand discarding, and how to incorporate these into manuals

Make equipment and components last longer

For each product type, set targets for extending equipment
and component life and begin performing these initiatives

Practice green procurement

Establish basis for application to green-procurement products

Regulate lead usage

Share information regarding lead solder substitutes
and learn lead usage status of purchased products

Implement LCA

For major products of each product type, perform LCA
with the objective of helping prevent global warming

Reduced consumption of
depleted resources

Purchasing measures

LCA performance*We have already achieved a more than 90% reduction in PFCs by improving abatement system performance and using alternative gases.

Efforts to Perform LCA
LCA, or life cycle assessment, is a procedure for quantitatively

ments made and implement these in other BUs within two years.

assessing the environmental effects of a product at every stage of its
life, including the manufacture of the product from raw materials,

Examples of LCA Efforts in Fiscal 2001

transportation of the product, its usage and disposal. An LCA of sem-

Environmental impact for each life stage of a product (materialiconductor and other production equipment sold by TEL would con-manufacturing, equipment manufacturing and assembly, transporta-

centrate in large part on the environmental impact occurring duringtion, usage by the customer and disposal) is calculated in terms of

the process of making semiconductors.
A unified set of standards is essential to compare the environmental performance of production equipment from different manu-

CO2 emissions. By changing the materials used in the equipment, total CO2 emissions change as well, so CO2 emissions are calculated
for each material.

facturers. Our group is actively involved in the SEAJ (Semiconductor

In all life stages, equipment usage creates the greatest environ-Equipment Association of Japan) effort to establish an energy-sav-

mental impacts, and the proportion accounted for by ultra pure water

ings calculating standard and, in particular, in seeking to establish aused in cleaning systems is the greatest; with this in mind, cleaning

world standard that incorporates the LCA principle.

equipment built to water-saving specifications can be the most effi-Beginning in fiscal 2001, the TEL Group has performed LCAs on

cient way to reduce environmental impact. (See page 11.)all newly developed products. These LCAs have taken place withinthe BUs and it is our intention to take the best examples of improve-

HAPs: Hazardous air pollutants
VOCs: Volatile organic compounds
IPA: Isopropyl alcoholTOKYO ELECTRONENVIRONMENTAL REPORT 2002

10