HL-LHC ෆ㒊㣕㊧᳨ฟჾቑᙉ ඲యീụୖ㝧୍
2017/01/24

KEK/CiRfSE

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

1䠝䠰䠨䠝䠯᳨ฟჾ

2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

2

Inner tracker㻼㼕㼤㼑㼘㻌㻗㻌㻿㻯㼀㻌㻔㼟㼠㼞㼕㼜㻕㻌㻗㻌㼀㻾㼀㻌㻔㼏㼔㼍㼙㼎㼑㼞㻕㻌䋻㻌㻭㼘㼘㻌㼟㼕㼘㼕㼏㼛㼚㻌㼟㼑㼙㼕㼏㼛㼚㼐㼡㼏㼠㼛㼞㻌㼠㼞㼍㼏㼗㼑㼞㻌
䶻3⥭ CiRfSEዌዙኌኔዄአኴ

2017/01/24

3HL-LHC ␔捷歪恰䂻⸩⣷ቛቑ嵁櫛• ATLAS detector to design for–––

Instantaneous lum.: 7x1034 cm-2s-1
Integrated lum.: 6000 fb-1 (including safety factor 2 in dose rate)
Pileup: 200 events/crossing• PIXELs (HL-LHC)–Inner: r=3.7 cm ~2.2x1016–

Medium: r = 7.5 cm, ~6x1015–

Med/Out: r=15.5 cm ~2x1015–

Outer: r = 31 cm (?) ~1x1015–

Charged:Neutrons ≥ 1• STRIPs (HL-LHC)–

Replacing Strip and TRT–r = 30 cm, e.g.
• Fluence ~1x1015–

Neutrons:Charged ≥ 1

occupancy㟍⺓偩功㊶
2017/01/24

э pixel size :50x400 → 50x250 (μm) → 50x50 (or 25x100) (μm)
strip length:120 → 24 (mm)э p-bluk sensorቑ栚䤉䶻3⥭ CiRfSEዌዙኌኔዄአኴ

4

NIEL↷ᑕ⥺䛜≀㉁ෆ䛻ධᑕ䛧䛶ኻ䛖䜶䝛䝹䜼䞊䛾䛖䛱䚸ཎᏊ䛾ᙎ䛝ฟ䛧䛻䛾䜏౑䜟䜜䜛䜶䝛䝹䜼䞊(㠀䜲䜸䞁໬䜶䝛䝹䜼䞊) 䜢⾲䛧䛯䜒
䛾䜢NIEL (Non Ionizing Energy Loss) 䛸࿧䜆䚹

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

2017/01/245N඲✵ஈ໬䛥䛫䛶༑ศ䛺ಙྕ㔞䜢ᚓ䜛↷ᑕ䛻䜘䜚NЍP඲✵ஈ໬䛥䛫䛺䛔䛸㟁ᴟศ㞳䛧䛺䛔
1014㻌 /cm2䠄LHCᙜึィ⏬䠅䜢㉺䛘䜛䛸඲✵ஈ໬㟁ᅽ䛿500V䛻㐩䛧䚸䝅䝇䝔䝮䛾⪏ᅽ䜢㉺䛘䜛ᨺᑕ⥺⪏ᛶ䜢䛥䜙䛻ୖ䛢䜛䛻䛿䚸䠬ᆺ䝞䝹䜽䝉䞁䝃䞊㻌

103

5000
1000
500

102

| 600 Vtype inversion

10050
105110-1

1011014cm-2100"p-type"n-type[M.Moll: Data: R. Wunstorf, PhD thesis 1992, Uni Hamburg]

100101102)eq [ 10 cm ]1210310-1-2⾪✺䛷Ⓨ⏕䛩䜛⢏Ꮚ䛻䜘䜚䚸䠬ᆺ୙⣧≀䛜⏕ᡂ䛥䜜䜛䠪ᆺ䝞䝹䜽䠖䠬ᆺ䛻཯㌿䛧䛯ᚋ䛻඲✵ஈ໬㟁ᅽ䛜ୖ᪼㻌 ᆺ཯㌿䛧䛺䛔㻌 PN᥋ྜഃ䛾㟁ᴟ䛿㒊ศ✵ஈ໬䛷䜒ศ㞳㻌 㻌 㻌 㻌 㻌 ⪏ᅽ䜢㉺䛘䛯䜙䚸㟁ᅽ䜢ୗ䛢䛶㐠㌿䠄ಙྕ㔞䛿ῶ䜛䠅
2017/01/24| Neff | [ 1011 cm-3 ]⌧⾜䛾N䝞䝹䜽䝉䞁䝃䞊Udep [V] (d = 300Pm)䝅䝸䝁䞁༙ᑟయ᳨ฟჾ䛾ᨺᑕ⥺ᦆയ

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

6䠬ᆺ༙ᑟయ䛻䜘䜛䝅䝸䝁䞁᳨ฟჾ䛾ㄢ㢟㟁ᴟ㛫䛾ศ㞳㻌㓟໬⭷㻿㼕㻻㻞䛻ṇ㟁Ⲵ䛜⵳✚䛧䚸䠬䝞䝹䜽㒊⾲㠃䛻ᘬ䛝ᐤ䛫䜙䜜䛯㻌㟁Ꮚ䛾䛯䜑䛻䚸䝇䝖䝸䝑䝥㛫䛜㟁Ẽⓗ䛻⧅䛜䛳䛶䛧䜎䛖䚹㻌㻿㼕㻻㻞㻌㼚㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㻗㻌㼚㻗㻌㼚㻗㻌㻙㻙㻌㻙㻌㻙㻌㻙㻌㻙㻌㻙㻌㻙㻌㻌㻌㼚㻗㻌㼚㻗㻌㻌㻌㼚㻗㻌 㼚㻗㻌㼚㻗㻌㼜㻗㻌㼜㻗㻌㻼㻙㼟㼜㼞㼍㼥㻌㻼㻙㼟㼠㼛㼜㻌㻼㻙㼟㼜㼍㼞㼥㻘㻌㻼㻙㼟㼠㼛㼜㻘㻌㼓㼑㼛㼙㼑㼠㼞㼥㻘㻌㼕㼙㼜㼘㼍㼚㼠㻌㼏㼛㼚㼐㼑㼚㼟㼍㼠㼕㼛㼚㻘㻌ಹ㻌㻝㼏㼙㻌㼤㻌㻝㼏㼙㻌䛾㼎㼍㼎㼥㻌㼟㼑㼚㼟㼛㼞⏝䛔䛶䚸↷ᑕヨ㦂䜢⾜䛔ᛶ⬟䜢ẚ㍑㻌

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

2017/01/24

7栚䤉ቑ㿐ቯ

䝉䞁䝃䞊タィ䞉〇㐀䠄HPK䠅 䠇䝰䝆䝳䞊䝹◊✲ᐊ(IV, CV, CE, …) + Beam test䠄CE, …䠅ึᮇ≉ᛶホ౯

CERN(SPS), Fermi(Mtest), …

↷ᑕヨ㦂

CYRIC (70MeV-proton), 㧗ᓮ㔞Ꮚᛂ⏝◊✲ᡤ (γ)
Ljubljana (Neutron), …

↷ᑕᚋ≉ᛶホ౯

2017/01/24◊✲ᐊ(IV, CV, CE, …) + Beam test䠄CE, …䠅

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

8

Charge Collection after Irradiation
Longstrips
Shortstrips

ᇶᮏⓗ䛻ၥ㢟䛿䛺䛔900 V
90Sr E

Silicon thickness 300 μm

Inner-mostpixels

Annealed 80 min at 60 C

H.F.-W.Sadrozinski,et al.,
NIM A(2011)

Still good amount of signals
CC ~13000-18000 e at 11015 neq/cm2 at 500-900 V bias voltage
Still ~5000 e at ~11016 neq/cm2
2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

9

ATLAS planar PIXEL prototyping runs

2017/䶻3⥭ CiRfSEዌዙኌኔዄአኴ

10ኘዐኒዙኅአን捷ቑ浧榊⦶≬帆FE (~0V)

䜶䝑䝆䛾䜏䛻⤯⦕≀䠄䝟䝸䝺䞁䠅䜢⵨╔ฟ᮶䛺䛔䛛䠛< 10μSensor(HV=1kV at edge)ᖖ 䠄┿✵⎔ቃ䠅䛷䚸⵨╔ྍ⬟䚹ణ䛧䚸㒊ศⓗ䛻䚸⵨╔䛜⡆༢䛷䛺䛔䚹
䶻3⥭ CiRfSEዌዙኌኔዄአኴ

20
17/11n-on-n vs p-on-n
HVGRGRGR

2017/01/24

BR

p-on-nEdge䛾㟁ᅽ䛿䚸㧗㟁ᅽ∦㠃䝥䝻䝉䝇䛷OKэᏳ౯

n-on-nEdge䛾㟁ᅽ䛿䚸~0V୧㠃䝥䝻䝉䝇䛜ᚲせэ㧗౯⌧⾜䛾pixel䛷᥇⏝ึ䜑䛿䚸඲✵ஈ໬䛜ᚲせᆺ཯㌿ᚋ䛿䚸㒊ศ✵ஈ໬䛷OK

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

12ክኁቿኖ㱚抯ₚቊቑ㮫⒉╈䘖⇝ₚ⟞櫛ึᮇ᳨ᰝ䛾䛯䜑䝉䞁䝃䞊䛻䠤䠲䜢༳ຍ䛩䜛䛻䛿䠛Bias-rail㻌㻌
HVHVㄞ䜏ฟ䛧᫬䛿䚸FE䜢௓䛧䛶䛴䛺䛜䜛
HV䶻3⥭ CiRfSEዌዙኌኔዄአኴ

13

Pixel design improvement㻼㼛㼘㼥㻿㼕㻘㻌㻼㻙㼟㼠㼛㼜㻌㻼㼛㼘㼥㻿㼕㻘㻌㻼㻙㼟㼠㼛㼜㻌㻔㼚㼛㼚㻙㼕㼞㼞㼍㼐㻚㻕㻌㻼㼛㼘㼥㻿㼕㻘㻌㻼㻙㼟㼠㼛㼜㻌㻔㼍㼒㼠㼑㼞㻌㻝㻜㻝㻢㻌㻝㻹㼑㼂㻙㼚㼑㼝䞉㼏㼙㻙㻞㻕㻌㻡㻜㻌㼤㻌㻞㻡㻜㼡㼙㻌䛷䛿䚸ゎỴ䛧䛯䚹㻌㻡㻜㻌㼤㻌㻡㻜㼡㼙㻌 䛷䛿䛹䛖䛛䠛䠛㻌
2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

14

Pixel Layout

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

2017/01/24

15

Pixel module & Layout
Mock up at Univ. Geneva

4chip module
2chip module
FE
FEI4B (130n)
эFE65
эRD53AэRD53B :᭱⤊2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

16᪂䛧䛔ヨ䜏 (monolithic CMOS)
process rule

HVCOS
Lapis FD SOIXFAB PD SOI

350nm
200nm
150nm
180nm

FEI4 (50ux250u)
130nm
next FE (50ux50u) 65nm
CPU (Fin FET)

Bump bonding less2017/01/24

14nm
э10 or 7nm

䖂 low mass䕿 low cost ???
䕧 ᭱᪂䛾䝥䝻䝉䝇䛿౑䛘䛺䛔э⢭⣽໬+㧗ᶵ⬟䛿୧❧䛿㞴䛧䛔⢭⣽໬эFPIX (Lapis/200u)
150u layout 䛿↓䛔䕧 ኱䛝䛺䝉䞁䝃䞊(>2cmゅ)䛿㞴䛧䛔䶻3⥭ CiRfSEዌዙኌኔዄአኴ

17

MOS damage at gate

2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

18

Fully Depleted (FD) / Partially Depleted (PD) SOIPD (=bulk CMOS)
Radiation damage
No back gate effectNaturally rad-hard

FDRadiation damage
Thick BOXэ Double SOI㻌 㻌 䠇㟁ᅽ⿵ṇ
Low capacitanceэ Low power
High speed
2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

19᪂䛧䛔ヨ䜏 (LGAD)
䝀䜲䞁௜䛝䛾䝉䞁䝃䞊LGAD
Low Gain Avalanche Detectors
Linear Gain Avalanche Detectorsᐇ⏝౛䠖ᛴᓧ䛺❧䛱ୖ䛜䜚≉ᛶэ㻌 ᫬㛫ศゎ⬟䜢ୖ䛢䜛<50ps

2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

20䜎䛸䜑䈄 ᪂ᆺ䠬ᆺ䝅䝸䝁䞁䝉䞁䝃䞊䛻ᚲせ䛸䛺䜛䛾䝏䝱䞁䝛䝹㛫ศ㞳ᵓ㐀➼䛾᭱㐺໬䜢⾜䛔䚸㻴㻸䌦㻸㻴㻯ィ⏬䛻᪊䛡䜛䚸㻭㼀㻸㻭㻿ᐇ㦂䛾䝇䝖䝸䝑䝥㡿ᇦ䛷ືసྍ⬟䛺䝉䞁䝃䞊䜢᏶ᡂ䛩䜛䛣䛸䛜ฟ᮶䛯䚹㻌㻌䈄 䛥䜙䛺䜛㧗ᗘᨺᑕ⥺⪏ᛶ䛜せồ䛥䜜䜛䝅䝸䝁䞁䝢䜽䝉䝹఩⨨᳨ฟჾ䛾◊✲㛤
Ⓨ䜢⥅⥆䛧䛶䛔䜛䚹㻌㻌㻌䈄 ᪂䛯䛺㛤Ⓨ㡯┠䛸䛧䛶䚸㻸㻳㻭㻰䛾ᇶ♏◊✲䜢㛤ጞ䛧䛯䚹㻌

2017/01/24

䶻3⥭ CiRfSEዌዙኌኔዄአኴ

21