E HS Report

Plant and Office Initiatives for the Environment—Preventing Global Warming
The Tokyo Electron Group is reducing its energy use to contribute to the prevention of global warming.

■ Reducing Energy Consumption

Electricity Consumption

The Group is committed to reducing its energy use in compliance(100,000 kWh)Japan

with the provisions of the Energy Saving Law. Its sites are actively
148 160 150

reducing their energy consumption by setting specific energy-saving

ciency. Also, they completely shut down the machines during
long holidays.
At TEL’s Yamanashi Plant (Hosaka),
we have installed a hybrid power genera0

system is used to light two lampposts

97 98 99 00 01 02 03 04 05 06

1,631097 98 99 00 01 02 03 04 05 06

Gas Consumption(1,000 m3)

1,146

1,665

967 958

(kl)

LPG

Gas

1,062
996
990 990942
908

Hybrid power generation
systemapproximately 2.5 kWh per day).

1,881 1,828 1,838

Kerosene Consumption

within the premises of the plant, resulting
in lower electricity consumption (by

1,916
1,652

2,396
2,345
2,181
2,191
2,151
1,858
1,501
1,212
1,206
1,089

appropriate temperature control), while improving their work effi-

solar power. Electricity generated by this126

2,430

192

101

targets for lighting, OA machines, and air conditioners (throughtion system that uses both wind andHeavy Oil Consumption

Overseas (kl)■ Energy Consumption

838

In FY 2006, as in FY 2005, our total energy use increased due to an364

738
658
545

403 389

increase in production quantities. However, we were able toreduce per-unit energy use and achieved the target of reducing
the energy use per unit sales by 1% compared with the previous fis-0cal year. We will continue to improve on our energy-saving measures.

97 98 99 00 01 02 03 04 05 06

62 60 66 70 50 59
0 74 72 55 59 66 66 63 58 56 110
97 98 99 00 01 02 03 04 05 06(Plants in Japan and overseas)

At the Yamanashi Plant, the amount of LPG used for decontaminating the process gas increased and energy use almost doubled
from FY 2005.

■ Reducing the Use of Greenhouse Gases other than
CO2

In FY 2006, we have included data on emissions from places inWe use perfluorocarbons (PFCs) and sulfur hexafluoride (SF6),

Japan where our field engineers were stationed in the calculation ofwhich are greenhouse gases, in dry etching, washing, and otherCO2 emissions from our sites, referring to the guidelines for the cal-processes during process development and process evaluation.
In FY 2006, we used 12,643 metric tons of greenhouse gases

culation of greenhouse gas emissions from business entities pub-(as CO2 equivalent), which is substantially larger than the amountlished by Japan’s Ministry of the Environment.

used in fiscal 2005 (7,422 metric tons). This was because theTotal Energy Consumption (in CO2 Equivalent1)
CO2 emissions (in Japan)
CO2 emissions (overseas)(%)
Figures based on energy use per unit of sales in FY 19982
Energy use per unit of sales in comparison with the previous fiscal year3 401
208.0
193.1
197.0
168.2
147.5
150.9
134.7
135.5

<t-CO2>

95.8

104.4

150.8

Greenhouse Gas Consumption(t-CO2)

10,082

87.7

91.9

9800

3,106

Other
56
Other
19

4,681

6,740
6,682

94,00984,761
01

Other

SF6

7,422

92.8

65,81752,456
99

Other
18
9,162

89.3

50,48845,92297

PFCs

12,64378.40HFCs

105.6
87.1

100.0

types and volume of gas used for product evaluation increased.

02

95,487
95,48603

04

100,941
104,110
05

06

6,297

1. Calculated based on the guidelines for the calculation of greenhouse gas emissions from business entities publishedby Japan’s Ministry of the Environment
2. Energy use per unit sales in FY 1998 =100%
3. Percentage of per-unit energy consumption in the current fiscal year to per-unit energy consumption in the previous
fiscal year
(Plants in Japan and overseas)

26 TOKYO ELECTRON Environmental and Social Report 2006

3,23601,8560

1,468
03

1,284
1,14004

78405

322

1,62006(Plants in Japan)

E HS Report

Plant and Office Initiatives for the Environment—Waste Reduction andRecycling
The Tokyo Electron Group is working to minimize the generation of waste and improve its waste recycling rate to reduce its
environmental impact.

■ Our Approach to Waste Reduction and Recycling■ Breakdown of Waste

The Tokyo Electron Group is making concerted efforts to reduce theLiquid waste from chemicals used in the product development

generation of waste based on the policy of minimizing waste gen-and evaluation processes accounts for the largest percentage oferation, recycling generated waste as much as possible, and properly

waste generated by the Group. At present, most liquid waste is recy-disposing of unrecyclable waste. In recent years, due to the lack ofcled. Also, some plants have installed equipment to treat liquid

waste landfill sites, landfill costs have surged. This pushes us to makewaste inside their premises.

cost savings to reduce the generation of waste.

We plan to introduce thisSpecifically, we sort waste for recovery, change our manufacturing processes to generate no waste, use more recycling compa-equipment to a greater number of plants in the future.

Breakdown of Waste (%)
Drink containers 1General waste(collected bythe administration) 2
Wood scrap andpackaging materials 3

nies, check the qualifications of companies that we commission toPlastics 6

dispose of waste, and regularly review the final disposal situation.

Paper 6

Also, at our plants, we show how to sort waste in an easy-tounderstandmannerusing

Kitchen garbage 1
Other 3

Metallic/product waste11

illustrative

Liquid waster67posters. For example, Tokyo Electron U.S.
Holdings Inc. in the United States recycled
32 metric tons of paper by encouraging
employees to make effective use of waste■ Zero Emissions

paper through educational posters.

We define plants where less than 2% of waste generated by theplant is incinerated or landfilled as “zero emission plants” andencourage all plants to achieve zero emissions. In fiscal 2006, all theAn educational poster

manufacturing plants excluding the Tohoku Plant achieved zeroemissions consecutively from the previous fiscal year. In thefuture, we will also achieve zero emissions at our office facilities.

■ Waste Generation and Recycling Rate
In FY 1999, the Tokyo Electron Group set a target of increasing
the entire Group’s average recycling rate to 95% by FY 2006. As aresult of making efforts to attain this target, we achieved a recycling
rate of 96.1% in FY 2005 and 96.4% in FY 2006. In the future, weTOPICSReducing Waste at the Tohoku Plant
TEL’s Tohoku Plant reduced the total generation of wastefrom more than 900 metric tons (including recyclablewill focus on reducing our overall generation of waste, including recy-waste) in FY 1997 to approximately 400 metric tons in FY

clable waste.

2006, an approximately 56% reduction. Unfortunately, however, the plant could not maintain its zero emissions in FY

Recycling Rate and Generation of Waste

2006 from the previous fiscal year, because its recycling

Generation of waste (incinerated and landfilled)
Recycling rate
96.1
93.1

(t)

(%)
96.4

Target recycling rate for FY 2006: 95%

rate dropped due to debris generated from repairs tofloors. Nevertheless, the plant is determined to maintain ahigh recycling rate and examine measures to reduce its
total waste generation.

Waste Generation and Recycling Rate at the Tohoku Plant

77.4(t)69.7

Recycled amount
Recycling rate

55.2
59.9

49.7

59.8

40.9

96.5

Industrial waste

97.0

General waste

98.0

96.6

423.8

385.9

8.5
05

13.7
06

(%)

766.3
517.2
15.3
4,238
0
97

521.0

6.2
4,772
98

3,189
99

3,17900

3,657
01

3,938
02

3,26803

84704

431
469
00506
(Plants in Japan)

0136.5
97

19.0
03

15.9
040

TOKYO ELECTRON Environmental and Social Report 2006

27E HS Report

Plant and Office Initiatives for the Environment—Resource Conservation
The Tokyo Electron Group is reducing its use of paper and water to conserve resources.

■ Approach to Resource Conservation■ Efforts to Reduce the Use of Water

We are minimizing our use of resources based on the concept ofAt our manufacturing plants, various measures are being taken togreen procurement, which means to give preference to environment-

reduce the use of water. For example, the plants have installed aconscious products in purchasing. Specifically, we are reducing

water recirculating system to reuse cooling water. They have also

the use and purchase of copy paper and stationery, and when we

installed automatic faucets in restrooms and other facilities. Thesepurchase them we choose environment-conscious products. At

touch-free automatic faucets prevent wastage of water by auto-

our offices, we have replaced printer toner cartridges with car-matically shutting off the supply when the hands are removed

tridges made from recycled materials and cooperate with thefrom the sensor range.

manufacturers in the recovery of end-of-life cartridges. At someoffices, using the intranet, we have established a system underwhich

stationery

Water Consumption(1,000 m3)

Industrial water

noTap water

longer being used by acertain department can817

be reused by another

770

812
89

527

445

391

290

325

332

98

9900

693

department.

Recycling box on the intranet

Underground water

1,039
88
62

972

1,004
67

146

119

436

388

474

390

430

415

01

02

1,014
107
64

Overseas use

1,004
70

1,095
115
92

106

486

437

357

391

506

521

■ Efforts to Reduce the Use of Paper
The entire Group is committed to reducing the use of paper. In FY
2006, as a result of encouraging duplex copying, copying at097

reduced size, and digitization of information and documents circulated
among employees, we reduced the use of copy paper by approximately 9% over the FY 2005 level as a whole (approximately 8.3 million sheets saved during the year). Also, we encouraged the use of382

17203040506(Plants in Japan and overseas)

TOPICS

recycled paper with the exception of some special-purpose

Reduction in Water Use at the Koshi Plant inKumamoto

papers, and introduced paper cups made from kenaf, which is an

At TEL’s Koshi Plant, underground water accounts for mostalternative to wood pulp. We will continue to reduce the use of copy
paper in our business operations by minimizing the number of dif-

the water used by the plant, which is implementing rigorous measures to prevent the depletion and pollution of undergroundwater. The workers at the plant have taken the initiative inferent types of records and slips, thereby further reducing thereusing cooling water and vacuum pump sealing water and in

total paper use.

introducing vacuum pumps that do not use water. Also, theplant conducts activities to minimize the use of non-industrialwater. Recognized for its water conservation efforts, the plant
received the Higo Water Conservation Prize from the Higo
Water Conservation Fund in FY 2005.

Copy Paper Consumption(1,000 sheets)

Manufacturing plants

Office facilities

131,500
19,350107,367
18,30095,785
18,617

87,63418,184

94,217
17,41785,852
16,038112,150
89,067001

0277,16869,45003

04

76,80005

69,81406(Plants in Japan)

28 TOKYO ELECTRON Environmental and Social Report 2006

Vacuum pump that uses
recirculated water

Vacuum pump that does not usewater

E HS Report

Plant and Office Initiatives for the Environment—
Management of Chemical Substances
The Tokyo Electron Group is committed to the proper management of chemical substances and to reducing their emissions.

■ Our Approach to the Management of Chemical
Substances

Handling of PRTR Law Class 1 Designated Chemical
Substances(kg)

The Tokyo Electron Group uses chemical substances mainly indeveloping and manufacturing products. In developing products, we

How Chemical Substances are Handled
Released

Amount1Transferred

2,275

sometimes adopt new chemical substances that were not used

Consumed24before, or use chemical substances in a way that is different from theRemoved

3,070

Recycled

2,818

traditional usage. In these cases, we look closely at the development

Total

8,188

facilities and methods, assess the environmental and operationalrisks associated with the use of the substances, and implement necessary measures before actually using the substances. As for thechemical substances that we use in our manufacturing processes,

Material Balance of Chemical Substances Regulated
under the PRTR Law
Released into the air: 1 kg/year

Released into water: 0 kg/year

we are replacing dangerous and harmful substances with safer ones.

TELHandled
8,188 kg/year■ Compliance with the PRTR* Law

Products24 kg/year

According to the provisions of the Law Concerning Reporting, etc. ofRecycled: 2,818 kg/year

Releases to the Environment of Specific Chemical Substances andPromoting Improvements in Their Management (PRTR Law), we
rigorously control the specific chemical substances regulated under theWaste: 2,271 kg/year

On-site landfill:
0 kg/year

Removed: 3,070 kg/year

Transferred to sewage: 4 kg/year

law and identify the use and emissions of these substances on a continuous basis. We use large amounts of hydrogen fluoride, which is one■ PCB Storageof the substances regulated under the PRTR Law, mainly for cleaning

Based on the Law Concerning Special Measures Against PCB Waste,test wafers. The hydrogen fluoride waste is disposed of by an

we report on the storage and disposal of waste containing polychlori-external company specializing in disposal or we dispose of it in thenated biphenyl (PCB) to the governor of the prefecture every year.

approved manner within our premises. We also use a considerable

The Tokyo Electron Group presently stores two waste transformers andamount of ethylene glycol as a refrigerant for cooling water andfour waste capacitors that contain PCB in a strict and secure manner.

recycle almost all of its waste. We will continue to properly manage theTOPICS

risk associated with the use of chemical substances.
*PRTR stands for Pollutant Release and Transfer Register. Under the PRTR system,
the use of chemical substances that may be hazardous to human health and theecosystem, their release to the environment, and transfer (contained inwaste) to the outside of the business premises entities are identified, tabulated,and announced.

Amount of PRTR Law Class 1 Designated Chemical
Substances Handled
Numberinthe Law

Name of Class 1 DesignatedChemical Substance(kg)

FY 2002 FY 2003 FY 2004 FY 2005 FY 2006

1Water-soluble zinc compounds
05007003
Acrylic acid
000200162-Aminoethanol
520
4300475043
Ethylene glycol
1,500 4,000 9,144 6,353 2,80044Ethylene glycol monoethyl ether
120000045
Ethylene glycol monomethyl ether
0000363Xylene
1800000
Diphenylmethane-4,4’-disocyanate
000142478172 N,N-dimethylformamide
290450309
1310190
12001100207 Water-soluble copper salts (except complex salts)
227 Toluene
620
0050260 Pyrocatechol
030039283 Hydrogen fluoride and its water-soluble salts 2,470 3,690 4,558 3,553 4,811
304 Boron and its compounds
00001311 Manganese and its compounds
0900
450
610
540
Total
5,890 9,670 14,461 11,344 8,188* Weights are shown in metric tons for FY 2002 and 2003.
(Plants in Japan)

Management of Special Gas
In our product development and evaluation processes, we use liquid
chemicals and special gas to simulate the actual semiconductor manufacturing process. Because some of these special chemicals are hazardous to both the environment and human health, we strictly control
their use, including the careful management of devices that use thesechemicals. At the Kansai Technology Center located in Amagasaki City in
Hyogo Prefecture, we check the devices that use special chemical substances daily or regularly so that we can detect any problems without fail.
We have established a system to deal with any possible problems. For
example, in the event of a gas leak, the gas detection system triggers an
alarm and stops the supply of gas. Also, we notify workers of any problemsby the use of sirens, automatic
broadcasts, and message
boards that are put up within
the clean room, at theentrance, and in the officeroom of each plant to show
important information in realtime.
Message board

TOKYO ELECTRON Environmental and Social Report 200629