Augent ® OPG550
Optical Plasma Gauge
The INFICON Augent™ Optical Plasma Gauge OPG550
is an intelligent solution for vacuum monitoring.
Augent™ OPG550 combines two sensor technologies
into one compact device for gas type monitoring from1 × 10-7 to 5 mbar and to measure total pressure fromatmosphere to 1 × 10-7 mbar at the same time. Augent™
OPG550 is protected by an integrated Pirani sensor toswitch off plasma above 20 mbar.
In the measurement range between 1 × 10-7 and 5 mbar
the gauge allows the detection of gas composition.

ADVANTAGES• High speed chamber leak tests• Increase of productivity and yield• Long life time, no filament burns, air inrush protection• Withstand process chemistry• Smart algorithm for easy integration• Compact design and small footprint• Reliable and fast start up
APPLICATIONS• Chamber leak check, faster RoR (rate of rise) test
• Leak check to find internal leaks from gas supply lines• Real time end point control• Gas type and gas concentration control

1

Augent® OPG550

Augent ® OPG550
ORDERING INFORMATION

3OF 0 – 0 1 1 – 0 1 0 P
Digital interfaceTubeØ 1/2"
Ø 1"

10AG01Flange
1367EQ

1)
2)

1)

DN 16 ISO-KF
DN 16 CF-R 1)
2)
DN 25 ISO-KF
2)
DN 40 ISO-KF
8 VCR female 1)
2)
DN 40 CF-F

With option 1/2" tube only
With option 1" tube only

Replacement sensor

OPG5501/2" tube

DN 16 ISO-KF
DN 16 CF-R
8VCR, female

351-594351-595351-596

Replacement sensor

OPG550
1" tubeDN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F

351-597351-598351-599

Accessories
Power Supply, OPG550, RS232 / Analog OutCleaning kit
Ionisation chamber TI
Diagnostic cable RS232C; 9p-Dsub - phone jack 2.5mm (2m)
MxG40x/50x,OPG550 Spare ignition aid (set of 10 pcs)
Centering ring DN 16 ISO-KF, Inox / FPM
Centering ring DN 25 ISO-KF, SS / FPM

2

Augent® OPG550

351-051
351-052
351-055
303-333351-995
211-066
211-068

RS232
PROFINET
EtherCAT

Augent ® OPG550
Accessories
Clamping ring DN 20 – 16 ISO-KF
Clamping ring DN 20 – 25 ISO-KF
Copper seal DN 16 CF (set of 10 pcs)

3

Augent® OPG550

211-001
211-002
213-451

Augent ® OPG550
SPECIFICATIONS
Total pressure measurement
Measurement system
Measurement range (N2)OPG550Cold cathode according inverted magnetron principle and thermal
conductivity according pirani principle
1 × 10-7 ... 1000 mbar
0.75 × 10-7 ... 750 Torr

Accuracy total pressure reading (N2)
1 × 10-7 ... 100 mbar

30% of reading

100 … 1000 mbar
Repeatability total pressure reading (N2)

50% of reading

1 × 10-7 ... 100 mbar

5 % of reading

Gas analysis
Measurement system
Measurement range (N2)OPG550
Optical emission spectroscopy with integrated DC discharge
plasma, spectrometer and intelligent electronics
1 × 10-7 ... 5 mbar
7.6 × 10-8 ... 3.8 Torr

Detection limit 25 liter chamber
O2 leaks in pressure rise method≥0.3 mTorr / min

O2 leaks during pump down from atmosphere with
N2 backfill
Sampling frequency
Typical exposure time
Spectral range≥1 mTorr / minGeneral<10 Hz5 … 1000 ms
313 … 870 nm

OPG550Pressure
Limited to inert gases <50°C
Temperature≤10 bar (absolute)

Operation (ambient)+5 ... +50 °C

Storage-20 ... +70 °C

Bakeout at flange with electronic unit

≤80 °C

Bakeout at flange w/o electronic unit
Relative humidity for 30 days a year
Supply voltage≤120 °C≤95% (non-condensing)

4At gauge+14.5 ... +30 V (dc)

Ripple≤1 V (p-p)

Power consumption≤5 W

Fuse to be connected≤1 AT

Augent® OPG550

Augent ® OPG550
GeneralOPG550

Output signal
AnalogDigitalElectrical connection
High voltage (in the measuring chamber)

0 ... +10 V (dc)RS232CD-Sub, 9-pin, male

Ignition voltage≤4.5 kV

Operating voltage
Materials expose to vacuum≤3.3 kV

GeneralAnodeIonization chamber
Ignition aidVacuum flange
1/2" tube (spiral baffle)

AI2O3, stainless steel 1.4435
Molybdenum
Titanium, stainless steel 1.4016
Stainless steel 1.4310
DN16 ISO-KF
DN16 CF-R
8VCR, female

1" tube (standard baffle)

DN25 ISO-KF
DN40 ISO-KF

Internal volume
WeightDimensions

DN40 CF-F≤46 m3 (2.81 inch3)≤700 gFootprint

68 × 68 mm

HeightProtection type
Standards
Serviceability≤154 mm
IP40
CE
Sensor cell is field replaceable, cleanable optical window

5

Augent® OPG550

Augent ® OPG550
SPECIFICATIONS INTERFACES
EtherCAT®
ProtocolCommunication standards
Process DataEtherCAT connector
Cable
Cable length
Data rate

EtherCAT®
Semiconductor Device Profile
ETG.5003 Part 1 Common Device Profile
ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"
Fixed PDO mapping and configurable PDO mapping
RJ45, 8-pin (socket), IN and OUT
Shielded Ethernet CAT5e or higher≤100 m (330 ft.)
100000 Kbps

PROFINET™
Communication protocol
Physical Layer
Digital functions
readsetProfinet connector
Cable
Cable length
Data rate

6Augent® OPG550

protocol specialized for PROFINET
100BASE-Tx (IEEE 802.3)
pressure, status, ID
set points, filter, zero adjust, reset, DC offset
2 × RJ45, 8-pin (socket), IN and OUT
Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality orhigher)≤100 m (330 ft.)
100000 Kbps

Augent ® OPG550
DIMENSIONS

1/2" tube (spiral baffle)
mm (inch)

7

Augent® OPG550

Augent ® OPG550
1" tube (standard baffle)
mm (inch)

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
The trademarks mentioned in this document are held by the companies that produce them.
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