Solutions that create value for customers

Responsivenessto customers

Building systems for creating value for customers
Tokyo Electron (TEL) is building an organization to implement more effective global operations aimed at providing
cutting-edge technology products and the best technology services as required by customers.
In 2018, TEL strengthened its customer responsiveness through the establishment of the Account Sales Division, whichleads to new technology development based on needs for next-generation cutting-edge technology such as memory,
logic, and foundry, and the Global Sales Division, which appropriately provides for new needs in fields such as electricalappliances, automobiles, medical treatment, and healthcare, which are continuously expanding with the arrival of theage of IoT and AI. Each sales division further strengthens its close collaborative relationships with each business unit andmoreover with each overseas subsidiary whereby it provides solutions to customers with high-quality support and asense of speed.
Furthermore, TEL is currently working to build globally unified systems and operations in order to further enhance
the quality of sales and service activities. The Global Service Committee, a regular gathering of the service leaders ofeach department and each overseas subsidiary, shares information and undertakes in-house coordination, leading to
improvement of TEL’s ability to make proposals to meet customer needs and resolve problems, including improving thetechnical skills and interpersonal skills of the more than 3,000 field engineers worldwide, the localization of start-ups,
improving work efficiency using the work-time management system and the concept of the Total Support Center.

In the era of IoT, when a variety of objects can connect to the Internet, semiconductor and FPD applications are expanding, anddemand for technological innovation is growing. In such circumstances, Tokyo Electron (TEL) works to accurately grasp thedemands of customers and to reflect this during consideration of product planning, and uses its strength as a production equipment
company with a diverse product range to propose comprehensive solutions contributing to value creation for customers. TEL is also
promoting the reuse and recycling of equipment main units and parts, and also provides high added-value maintenance services,to support the stable operation of equipment of various generations that handle a diversity of applications. TEL strives to further
enhance customer satisfaction, which is a key management theme it has tackled since the company’s founding, aiming to be thebest and sole strategic partner for customers.

Process integration
TEL leverages its broad lineup of semiconductor production processes such as thin film deposition, coating/development,
cleaning, and etching to be the first to devise and develop new integration technologies that aim for reciprocal
optimization of multiple processes to propose to customers.
In response to the new growth in technological requirements for semiconductor production processes, TEL isadvancing joint development with customers from an early stage, based at its Process Integration Center (PIC),
established in 2017. One important issue that PIC is addressing is combination optimization of new deposition
and related processing technology required for next-generation memory, AI, devices for 5G, and devices for future
quantum computing. Development activities at PIC lead to the provision of the latest technology to customers and thestrengthening of partnerships, for seamless work in research, development, integration, production, and services.

Medium-term goals (2)Become the best and sole strategic partner
EXPEDIUSTM -i

Priority themes, Main activities:

TactrasTM VigusTM

SDGs initiatives■Contribute to customer innovation generation and value
creation through the proposal of comprehensive solutions
CELLESTA -i

CertasTM

Etching

Cleaning

TM

Solutions thatcreate value
for customers

Improvementof customer
satisfaction■Ensure a sustainable form of production and consumption
throughout product life cycles by responding todiversifying needs, considering safety and theenvironment, and so on■Solutions that create value for customers
System construction for customer value creation, processintegration, initiatives for comprehensive proposals, field
solution business■Ensuring safety for customers
Provision of information, training■Improvement of customer satisfaction
Customer satisfaction survey

21

TOKYO ELECTRON SUSTAINABILITY REPORT 2019

CLEANTRACKTM
LITHIUSProTM Z

Coating/development

EXIMTM

Film deposition
Trias +TM

TELINDY PLUS TM

Industry, innovationand infrastructure

Responsible
consumption andproduction

NT333 TMTOKYO ELECTRON SUSTAINABILITY REPORT 201922

Responsiveness to customers

Initiatives for integrated proposals
Knowledge management

Total Support Center

TEL promotes company-wide knowledge management1 to deliver high-quality service to its customers.
In the area of field service, the company creates a database of customers’ equipment records (support and incident
history) which can be accessed by global field engineers, thus providing an environment that enables TEL to quickly
respond to calls from customers. Furthermore, from April 2019, TEL released a system (in Japanese, English, and Chinese)that allows engineers from around the world to search in their own natural language for information they require, fromthe vast amount of accumulated technical documentation. These systems have made it easier to retrieve knowledge
on issues, whereby the causes of phenomena that arise can be predicted with greater accuracy. This has enabled thecompany to respond to customers more quickly and more efficiently.

1
Knowledge
management:
Management approachto promote internal
company sharing of
tacit knowledge held byindividuals, in order toencourage innovationand to improve overall
productivity

Field solutions businessKnowledge Management Tool
2:
BI: Business Intelligence

Multi Database
Trouble Information

Machine Karte(Power BI2)

WisdomKnowledge SearchComprehensive search ofdevice history“Serial Number” axis

Service CRM

Comprehensive search ofdevice history“Trouble” axis

Parts Order History

Oversea Report
Serial Number
SearchSymptom
SearchScheduled to be
introduced

BKM

TEL has built a system to provide global support for its customers based on its Total Support Center (TSC), situated in Japan,
the United States, and China. At each TSC, dedicated representatives use accumulated data on information about customers’
equipment and similar incidents, collaborating with field engineers and plants in an effort to promptly and appropriately
respond to inquiries and troubles that arise.

Semiconductors are seeing advances in miniaturization and integration, focused on demand for MPU1 and DRAM,2 while
demand is also increasing for general-purpose semiconductors in a wide range of fields, such as medical treatment,
finance, transportation, and manufacturing. Extending the life cycle of products is another challenge, evidenced bydemand for the long-term stable operation of semiconductors for automobiles and industry.
TEL leverages its strength in having delivered more than 69,000 units of equipment the most in the industry, providing
used equipment and enabling the provision of remanufactured equipment restored by disassembling used TEL products
into modules, modifying those parts that are still usable, and adding new parts where they are lacking.
Also, the company is working to meet the needs of customers, establishing products that accommodate renewal
models centered on 200 mm wafers, providing more added value than used and remanufactured equipment, forcustomers who produce IoT-related products using previous-generation equipment. Renewal models replace old units
and parts with new ones, maintaining compatibility with existing processes and offering performance approaching thatof the latest equipment in terms of transfer speed, and other aspects. In addition to strengthening its renewal model
supply system, TEL is also working on the accumulation and transfer of technology and knowledge related to previousgeneration equipment. The company will contribute to customers’ businesses while responding appropriately tochanging semiconductor needs.

1
MPU (Micro ProcessingUnit): Microprocessors
or semiconductor chipsthat mainly provide thecomputing power forcomputers
2
DRAM (Dynamic Random
Access Memory): A typeof semiconductor storage
element for computers, etc.

Flowofofremanufactured
remanufacturedequipment
equipment
Flow
Procurement

Disassembly

Production

Best Known Method
Trouble shooting manual

Work optimization

Modified parts

TEL is striving to improve work efficiency and to enhance service quality by implementing precise work-time management
covering about 3,000 field engineers active worldwide. A global timesheet is used for unified management of the types oftasks that engineers undertake, including work involved in starting up equipment and repair work, and the time is taken forthem. By analyzing the work data thus accumulated through the global timesheets, the company is intent on improving
Multi Database
the efficiency of work, the adjustment of personnel, and approaching issues, leading to the provision of value to customers.

Equipment

Respond to new customer needs
New parts

Trouble Information

Our products

RTISS,QVICS

Human
resourceKarte
training
MachineWisdomKnowlege
SearchTEL is engaged
inskillsengineersenhancementof its training structure
to provide
customers（Power BI）management of fieldTSR（Servise andReport）, CAT（Call log）

Customers

Customers

with a high level of service. TEL built a group-wide skills management system in accordance with standards established by
装置履歴一括検索
SEMATECH(a U.S. consortium for the joint development ofCRM
semiconductors) and provides service
with the most suitable
装置履歴一括検索
Case,Work Orderhuman「装置番号resource （S/N）
placementforcustomers,
based
on
an
objective
understandingoftheskillsofeachengineer. 軸
TEL is」軸「トラブル」
working on a global basis to review and improve its training curricula and content, with the aim of providing optimal training
Parts Order History
programs that match the skills of each field engineer.
投入予定
NCDR
Oversea Report

TEA：YKMS, TEK：Hyperbiz, TES：WDS

Serial Number
Search23

TOKYO ELECTRON SUSTAINABILITY REPORT 2019

Symptom
SearchBKMBest Knnown Method
Trouble shooting Manual

TOKYO ELECTRON SUSTAINABILITY REPORT 201924

Responsiveness to customers

Ensuring safety for customers

Improvement of customer satisfaction
Customer satisfaction survey

Information provisionTokyo Electron (TEL) is committed to providing relevant safety information to customers to enable the safe handling of products.
All products purchased by customers come with a standard TEL Safety and Environmental Guidelines manual. This manual
describes the potential risks associated with the use of our products together with the methods for averting those risks, divided
into such categories as chemical, electrical, mechanical, and ergonomic. It also describes safety measures applied to products
and recommended methods for product disposal. The manual has been translated into 11 languages* to ensure that customers
around the world can accurately understand the information and use the company’s products safely.
Furthermore, the company provides the TEL Safety and Environmental Guidelines together with a manual specificto each equipment, thereby adapting to the specifications of each equipment. In cases where new warnings relating tosafety are issued after shipment, TEL advises respective customers individually. TEL is thus providing safety information
for its various customers.
In addition, TEL pays close attention to safety when delivering its products that involve the use of hazardous chemicals
or high voltage electricity. Particularly when delivering its products to a customer’s new production line, the company
checks its facilities, equipment, and workplace safety standards beforehand according to its internal rules to ensure a safe
environment.

*
11 languages: Japanese,
English, German, French,
Italian, Dutch, Russian,Portuguese, Korean,
Traditional Chinese, andSimplified ChineseTokyo Electron (TEL) conducts a customer satisfaction survey (TEL CS Survey) every year, with the goal of making
continual improvements based on customer feedback. The survey started in 2003, aimed at just a limited numberof divisions. It was expanded to include all semiconductor production equipment divisions in 2014, and later the FPD
production equipment division and overseas subsidiaries in 2016, and currently it is implemented company-wide as the
Customer Satisfaction Survey Program (CSSP).
Under the CSSP, we conduct customers a survey of specific questions that can lead to practical improvements once ayear. Results from the survey are analyzed by product, account (customer), and function (software, development, etc.),
and given as feedback to customers. In an effort for improvement, the results are also shared with relevant divisions, suchas sales, production, and support. Improvements are also made continuously to all aspects of the actual survey method,from the questions asked, to the analytical methods, and overall operation of the survey activities.
In the CS Survey for fiscal year 2019, responses were received from approximately 1,300 individual customers, which is
67.8% of all customers. TEL received evaluations three points* or higher on 84.4% of all questions asked.
TEL will continue to aim for three points or higher on 100% of the questions asked, and the entire company will work inunity to drive improvements initiated from the customer perspective.

*
On a four-point scale,three points or higher
represents “VerySatisfied or Satisfied”■ Improvement example
Results of the customer satisfaction survey brought to light certain issues that would not have ordinarily been
identified, and the persons-in-charge and managers who are in direct contact with customers took the lead in making
improvements, with the cooperation of the relevant divisions.
Continuing from last fiscal year, as a result of efforts to implement more accurate and quick responses to the demands
and issues of customers, including enhancing support for software operating across multiple pieces of equipment, TEL
improved the evaluation scores received from customers for all questions.
Percentage of responses thatindicated customer satisfaction

TEL Safety and Environmental Guidelines

84.4%

Training
TEL provides its customers with training on equipment operation and maintenance procedures to ensure they are able tohandle TEL products correctly and safely. Centered around its manufacturing sites, TEL has established training centers
all over the world, with approximately 50 dedicated instructors conducting practical training courses using actual TEL
equipment. So that the training the company provides is always of the highest quality, it uses its own certification system
for instructors to ensure that training is delivered by personnel recognized as having the necessary skills. In addition topractical training, TEL also implements web-based education and on-site training at customer sites.
In addition, in order to speed up its response to requests from customers, TEL is promoting the development of surveys
using online systems. Through its surveys, TEL collects and analyzes customer feedback on the content of its programs
and its equipment, and strives to make improvements based on the survey results, in an effort to develop an enrichedtraining environment.

CS Survey activity
preparation

Plan

Do

ActionCheck

Conduct surveyof customers

Feedback to customers

Analyze survey results

Implement improvement
activities in each division

Report and investigate
improvement plan

Confirm progress ofimprovement activities

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