EH S R E P OR T

The TEL Group has assessed the impact of its products on the environment throughout their entire lifecycle—
from procurement of major components, manufacturing and logistics to product use. Based on this assessment,
we established a goal for the year 2015 and are promoting measures to reduce environmental impact.

Technologyfor Eco LifeMANAGEMENT REPORTHIGHLIGHT

50% Reduction in Environmental
Impact by 2015

50% Reduction in Environmental Impact by 2015

In May 2008, the TEL Group spelled out its environmental
commitments, under the environmental action slogan:“Technology for Eco Life.”
As part of these commitments, a goal was established todevelop products that will enable customers to reduce theoverall environmental impact at their factories by 50% andthe decision was also made for the TEL Group to seek toreduce the environmental impact associated with its
business and logistics activities by 50% by 2015. This page
provides an overview of the environmental impact withineach phase of the product lifecycle in FY2008, which is thebaseline of comparison for the 2015 goal, as well as
introducing activities related to reducing that impact, andinformation on TEL’s environmental commitments.

Material Procurement

Plants and Offices■ TEL procures from suppliers the materials and parts
necessary for its semiconductor and FPD production
equipment. In order to supply products that satisfy
customers, TEL is working with its suppliers to ensurethat procurement of materials is environmentallyconsiderate by comprehensively evaluating functions,performance, quality, price, and delivery lead-time.

■ Products are manufactured and assembled inside
clean rooms that are kept free of dust. TEL isworking to reduce environmental impact at its
plants and offices through measures that include
reducing the energy and resource requirementsof its clean rooms by improving operational
management of air-conditioners and introducing
energy-saving devices, conserving resources, andreducing the volume of waste generated.

■ Environmental impact in each product lifecycle phase in FY2008
CO2

Share of CO2 emissions in eachlifecycle phase (%)

SOCIAL REPORTEHS REPORTApprox. 200,000 tons of CO2

CO 2 emissions estimated by TEL

5%

Environmental impact
during material manufacturing

Energy use in plants and offices■ Steps that TEL Group is taking to achieve its environmental commitments
Lifecycle phase

Activity description

Steps being taken to achieve commitments

Material procurement

Working with suppliers to reduce regulated chemical
substances contained in suppliers’ products andreduce energy requirements for those products

Request cooperation from suppliers to achieve those reductions fortheir business activities and productsPlants and offices

Reducing CO2 emissions from plants and offices
through energy conservation measures

Logistics

Promoting a modal shift in Japan and overseas, andimproving packaging materials

Product use

14115,000 tons of CO28%

Promoting reductions in the overall environmental
impact at customers’ factories by reducing theenvironmental impact of TEL’s productsTOKYO ELECTRON Environmental and Social Report 2009

Aim to reduce the total CO2 emissions per unit of sales from theGroup’s plants, offices, and logistics operations by 50% comparedto the 2007 level by 2015 (monitor goals and improvements forboth total emissions and emissions per unit of sales)
Develop equipment that will enable customers to reduce the overall
environmental impact at their new plants to be built in 2015 by 50%
compared to the 2007 level; establish comprehensive standards
on environmental impact (including energy usage by production
equipment, impact on facilities, chemical substances used insemiconductor production processes, and generated waste atcustomers’ factories)

50% Reduction in Environmental
Impact by 2015

Tokyo Electron supports a strong global community and strives to achievea society in harmony with the environment.
We are committed to creating an environmentally-benign society together
with our customers by providing advanced technologies and services.

Tokyo Electron’s Commitment● We aim to develop equipment that enables a 50%
reduction—compared to the 2007 levels—of the total
environmental impact of new customer factories scheduled
for completion in 2015 or later.

● We aim to reduce the impact of our business andtransportation activities on the environment by 50%, by
2015, compared to the 2007 levels.
● We will strive to achieve these commitments in partnershipwith our stakeholders.

Product use■ Manufactured products are kept clean andprotected against vibration and shock whentransported to customer sites via truck, ship, oraircraft. TEL is aiming to reduce the impact on
the environment of its logistics operations byswitching to transportation means that have alower environmental impact.

■ Following installation and inspection, equipment begins to
be used to produce semiconductor devices and FPDs. TEL
is focusing on measures that will reduce the environmental
impact of each piece of its equipment during its use.
In addition, after equipment is sold, TEL takes steps toextend its service life through repair and maintenance,
and implements modifications that contribute to energy
conservation.

HIGHLIGHT

Logistics

MANAGEMENT REPORT81%
Approx. two million tons of CO2

145,000 tons of CO26%
Environmental impact from one-year use of the Group’s products(calculations assume the use of 300-mm systems)

TEL Group’s Input/Output

Input

OutputChangefrom
FY2009FY2008
Electricity 249.66 million kWh (-7.6%)

Changefrom
FY2008
Total product shipment 14,977 tons (-45.2%)

Gas

1,196 km3 (-19.1%)

Fuel2,319 kl (-11.2%)

Water

1,139 km3 (-3.6%)

Chemical substances 9.7 tons (-21.8%)

FY2009

Tokyo ElectronGroup(Japan and overseas sites)

CO2

116,077 t-CO2 (+2.6%)

NOx

11.1 tons (-8.3%)

Wastewater

1,127 km3 (-3.7%)

Waste

10,774 tons (-12.5%)

SOCIAL REPORTThe figures on the right show the energy and resource
input/output at the Tokyo Electron Group’s manufacturing
plants and offices in FY2009. We accurately assess andanalyze the Group’s environmental impact and are striving
to reduce it through improvements in efficiency.
In FY2009, a substantial reduction in the volume ofshipments led to reductions in environmental impact fornearly all items. Our 2015 goal focuses on reducing CO2
emissions, but we will continue to reduce other types ofenvironmental impact as well.

EHS REPORT

Logistics operationsin Japan and overseas(regulated under the PRTR Law as Type I chemical substances)

Recycled amount 10,486 tons (-12.2%)
Paper (copy paper) 120 tons (-64.4%)
Amount of waste simply incinerated anddisposed of in landfills
288 tons (-21.3%)

TOKYO ELECTRON Environmental and Social Report 200915