E H S R E P O RT

Product-Related Initiatives for the Environment
Over its life cycle, semiconductor production equipment has the largest impact on theenvironment when it is in use. Accordingly, we are implementing measures to reduce the energy consumed by the equipment while in use in addition to measures to reduce the use of regulated chemical
substances in the equipment.

Reducing the Total Environmental Impact of Products
Our Approach to Reducing the Environmental
Impact of Our Products
EHS REPORT

20We believe it is extremely important to promote environmentconscious designs, as we have clearly stated in the revised
Tokyo Electron Group Credo and Principles on EnvironmentalPreservation. We give priority to the provision of energy-saving
equipment and to reducing or finding substitutes for the regulated
chemical substances contained in our products.

Organization for Reducing Environmental
ImpactProduct-Related Initiatives for the Environment

We have three units established under the Product EHS
Technical Committee. The Product Safety Working Group is
responsible for conducting activities to improve product safety.
The Chemical Substance Measures Team is responsible for
reducing and finding substitutes for regulated chemical substances contained in equipment parts and components. The
Energy-Saving Task Force, which was founded in October 2005,

is responsible for implementing measures to improve theenergy efficiency of our products.
Recently, there are increasing expectations from various
quarters for us to improve and continue our environmental,
health, and safety (EHS) measures. Accordingly, it is becoming
more and more important for us to design and develop productsthat incorporate EHS. In accordance with the globalization of
our business, we also need to pay more attention to the legal
regulations of each of the countries in which we do business.
We will continue to promote “Design for EHS.”
Organizational Structure to Promote EHS Measures for Products
Product EHS
Technical Committee

Product Safety WG

Chemical Substance
Measures Team

Energy-Saving
Task ForceT O P I C S
Modification to Existing Equipment to Reduce Energy Consumption
As was pointed out at the roundtable meeting with stakeholders held
for our Environmental and Social Report 2006, the Tokyo ElectronGroup thinks it important to reduce the energy consumed byequipment purchased by our customers in the past and still in use.
Although we are now developing, manufacturing, and delivering new
products with more consideration given to conserving energy andresources, some of the products that we sold and delivered to customers in the past were not designed with the same consideration for
the environment that is acceptable today.
To rectify this, the Tokyo Electron Group markets products
which can be used to make improvements to existing equipment. For
example, we provide various products designed to improve the environmental functions of the thermal processing system ALPHA(α)-8SE, including the following two products:

pumps. Use of these products may result in an overall reduction inenergy use by around 70%.

Effect of Energy-Saving
Modifications
Energy-saving pumps
Vacuum pipe heaters

Energy use
reduced byaround 70%

1. Improving the heat insulating properties of the pipe heater

2. Energy-saving pumps
Power consumption is reduced by approximately 70% by replacing conventional pumps with highly-efficient energy-saving

TOKYO ELECTRON Environmental and Social Report 2007

Beforeimprovement

After
improvement
ALPHA (α)-8SE▲

It is necessary to keep the inside temperature of some pipes usedin the thermal processing system as high as 100 to 200 degrees
centigrade to prevent substances adhering to the inside surface.
The electricity consumed by the pipe heaters used to control theinside temperature is reduced by 40 to 50% by installing highperformance heat insulators around the heaters.

In addition, we provide products that help reduce the amount ofheat discharged into the clean room by the water cooling mechanism,products that reduce the amount of nitrogen used, and products that
improve the overall process quality and productivity.

▲

CLEAN TRACK™ LITHIUS™

Preventing Global Warming
Energy-Saving Measures for Products

Measures to Save Energy(5) Managing the clean room in an energy-saving manner (planned operation and proper management)(4) Reducing energy used by the clean room

Coolingequipment(2) Reducing energy used by peripheral devices

Vacuumpump(1) Reducing energy used by the product itself(3) Managing the product in an energy-saving manner

Energy-Saving Examples
Referring to SEMI S23, we calculated the total energy consumption, including the use of electricity, nitrogen, waste air, andpure water. These were then converted to give the overall power
consumption, allowing us to calculate the energy consumed inproducing a wafer per unit area. We set reduction targets for eachproduct based on this energy consumption. The following
describes two energy-saving efforts we made to achieve our targets.
Initiative for the Coater/Developer CLEAN TRACK™ LITHIUS™
For the coater/developer, we set a numerical target for reducing
energy use per unit area of wafer compared to our Group’s
baseline year (FY 2000). In FY 2007, we implemented the following: we reduced the standby power consumption using an11Targets

0.8

0.8

Results0.8

0.7
0.61

0.56

0’00 (Baseline year)

’03

’05

’07

’08

auto standby function, reduced the nitrogen gas purge volume;
made appropriate adjustments to the exhaust flow, and optimized the use of cooling water. As a result, we achieved ournumerical target (set at 0.8) with a value of 0.56. In FY 2008, wewill continue our efforts to reduce the overall energy consumption, including further optimization in the use of cooling water.
Based on this initiative, we will also reduce the energy consumed by our new product CLEAN TRACK™ LITHIUS Pro™.
Initiative for the Test System Precio™
The test system (wafer prober) is used to carry out electricaltests on chips while they are on the wafer by contacting thesemiconductors electrodes with probe needles. The system isequipped with heating and cooling functions to enable durability
tests in an environment similar to the actual environment inwhich the semiconductors will be used. Dry air is used for heating and cooling and according to our calculation, the energy
used to produce the dry air accounts for a large percentage ofthe overall energy used by the wafer prober. We focused on theenergy used to produce the dry air and reduced its volume by
up to 60% by the following method. We installed a dew point
meter to monitor and adjust the volume of dry air used to regulate the temperature according to predefined specifications.

Reducing the Amount of Dry Air Used by the Wafer Prober (Image)Dry air

Speedcontroller

Volume sensor

Controlling the volume
Monitoring the volume
Dew point
Automaticmetervolume controller
Constant monitoring of thedew point with a dew point meterTOKYO ELECTRON Environmental and Social Report 200721Product-Related Initiatives for the Environment* SEMI S23: Guide for Conservation of Energy, Utilities, and Materials Used bySemiconductor Manufacturing Equipment issued by SEMI

Energy Consumed Per Unit Area of Wafer (Comparison with FY 2000)

EHS REPORTTo reduce the energy that our products consume when they areused by our customers, we are examining measures to achieve
the following five targets and will develop the necessary
technologies: (1) reducing energy used by the product itself;(2) reducing energy used by peripheral devices; (3) managing
the product in an energy-saving manner; (4) reducing energy
used by the clean room; and (5) managing the clean room in anenergy-saving manner (planned operation and proper management).
For energy-saving management of the clean room, we needto cooperate with customers and facility manufacturers. This
close cooperation will allow us to make further efforts to reduce
the energy consumed by our products while they are in use. In
addition, we will identify how much energy our products andtheir supplementary devices (e.g. vacuum pumps and coolingequipment) consume in reference to the SEMI S23 standard*,
including the consumption of electricity as well as the consumption of water, dry air, cooling water, and exhaust heat, which will
be converted into electricity using appropriate energy coefficients.

Product-Related Initiatives for the Environment

Management of Chemical Substances
Our Commitment to Reducing the Use ofRegulated Chemical Substances in Products
EHS REPORT

22
Product-Related Initiatives for the Environment

Against the backdrop of growing concerns over the impact that
harmful substances contained in parts and materials have on theenvironment and ecosystem, an increasing number of countries
are regulating the use of these substances in automobiles andelectrical products in recent years. The Tokyo Electron Group ismaking appropriate responses to these movements. For example,
with regard to the RoHS Directive1 that took effect in July 2006, wehave made a written statement demonstrating that the semiconductor production equipment manufactured by our Group falls
outside the scope of the Directive because they are large-scalestationary industrial tools, to which the Directive does not apply.
We have already met all the requirements for China’s RoHS2,
which came into force in March 2007.
In order to meet the regulatory requirements of relevant countries even before they are actually implemented, we established a
Chemical Substance Measures Team, which comprises representatives from our manufacturing department. The team sharesinformation and investigates the use of regulated chemical substances in our products and advises us when to replace products
containing these substances with alternatives in cooperation with
our suppliers. In FY 2007, we fixed the schedule to discontinue theuse of six substances in our products that are regulated by theRoHS Directive. We are scheduled to start shipping products that
do not contain any of these six substances in October 2008.
1. RoHS: Restriction of the use of certain Hazardous Substances in Electrical andElectronic Equipment
2. China’s RoHS: Officially called “Management Methods for the Prevention andControl of Pollution from Electronics Information Products”

Chemical Substances to be ReducedFirst Priority
Cadmium

Pigments, stabilizers, and resins

Hexavalent chromium

Chrome plating

1. Product Labeling
Products containing chemical substances regulated under China’s RoHS
must carry a label showing the period
during which the product can be used in
an environmentally safe manner. TheTokyo Electron Group usually sets thisperiod at 25 years.
2. Disclosure of Information on the Use of ChemicalSubstances
Information on the use of products containing regulated chemical substances should be disclosed in the product’s instruction
manual and similar documents in the Chinese language. TheTokyo Electron Group complies with this rule.

System to Reduce the Use of Regulated
Chemical Substances
The Tokyo Electron Group’s Chemical Substance Measures Teamis responsible for reducing the use of regulated chemical substances. The team comprises representatives from TEL’s headquarters and its manufacturing subsidiaries. We share relevant
information through this team and are asking our suppliers tocooperate with us in replacing parts and materials that containregulated chemical substances with alternatives that do notcontain them.
We have established a chemical substances management system based on the principle of not using, purchasing, or sellingparts containing regulated chemical substances. This system isused to register and refer to information on the use of chemical
substances in various parts. This system allows us to check
whether parts to be used in our products contain regulated chemical substances or not and prevents the manufacture or shipmentof products containing these substances. We have adopted theJGPSSI format for the system, which is a standardized industry
format under the Japan Green Procurement Survey
Standardization Initiative (JGPSSI).

LeadSolders, paints, electrical wire coating, and free-cutting metal

Mercury

Batteries and fluorescent lamps

PBBs

Resin parts

Future Regulations on Chemical Substances

PBDEs

Resin parts

In Europe, the REACH1 regulation, which mandates safety evaluations of almost all chemical substances sold in the market andregistration of the relevant information, will be enforced and theuse of PFOS2 will also be regulated. Under these circumstances,companies will be increasingly required to fulfill their responsibilities as a manufacturer and follow the precautionary principle. To
comply with these regulations, all the departments of the Tokyo
Electron Group, from those engaged in product development anddesign, manufacturing, materials procurement, quality assurance,and environment and safety will make concerted efforts.

Second Priority
Substances designated as Level A substances in JIG*
(We have already implemented measures for many of these substances.)* Joint Industry Guide for Material Composition Declaration for Electronic Products (JIG)
was prepared by Japanese, American, and European private trade associations andthis Guide lists the chemical substances for which measures should be implemented.
The Guide classifies the substances into Level A and Level B: 16 substances are listed
as Level A substances, including cadmium, hexavalent chromium, lead, mercury,PBBs, and PBDEs, and more than 400 substances are listed as Level B substances.

Response to China’s RoHS
China’s RoHS, which was enforced in China on February 28, 2007,
is intended to regulate the use of chemical substances in electronic information products sold in the Chinese market. The Tokyo
Electron Group has already made the necessary responses to thisregulation, which requires compliance with the following two rules.
TOKYO ELECTRON Environmental and Social Report 2007

1. REACH: Registration, Evaluation, Authorization and Restriction of Chemicals
2. Perfluorooctanesulfonic acid (PFOS) is used as a water repellent and waterproof
coating and in producing flame-resistant greases and oils.