Surface Materials Tester
SMT-5000

Hardness, Elastic Modulus, Scratch Resistance,
Coating Adhesion, Friction Coefficient , Wear,
Film Thickness, Roughness, 3D Topography

Rtec-Instruments

New evolutions in surface materials testing
As surfaces become more complex in different applications and products, investigating their mechanicalproperties requires a new generation of instruments.

Complete Solution For
Surface Characterization

The SMT-5000 instrument answers the needs of both researchers and quality control engineers. The wide
testing range allows the SMT instruments to test coatings, bulk materials, and fundamental components
across several industries and applications.

All in one easy-to-use platform

The Source of Our Leadership
The SMT instruments are the first answer to the increasingly complex testing requirements for surfaces
across many industries– from liquid to ultra-hard solid materials. Rtec-Instruments’ SMT combines
multiple investigative techniques to measure surfaces on one platform. For example, with one run,coating adhesion, hardness, thickness, surface roughness, and 3D image data come together for aconclusive comprehensive analysis. In addition, each instrument’s modularity provides access to diverse
testing techniques and load ranges on the same platform.

Precision Manufacturing

All critical parts of Rtec-Instruments products are manufactured in our in-housemachine shop using high-precision CNC machines. This complete control over
manufacturing guarantees that all critical mechanical components are designed
and manufactured to the highest accuracy and reliability following our highinternal quality standards.

Constant Innovations

InstrumentedIndentation• Hardness• Elastic modulus• Storage/loss modulus• Creep• Stress-strain curves• Fracture toughnessTribology

Spectral Reflectance• Friction coefficient• Wear rate• Lifetime studies• Tribological behavior• Non-destructive andfast coating thickness• Optical constants

Our highly experienced scientists and application engineers constantly innovatewith new products and applications to successfully answer the ever-evolving
testing needs. In addition, we regularly partner with industries and universities
using our global chain of direct offices.

Robust and Reliable

With design and manufacturing in-house, Rtec-Instruments provides unequaled
robust platforms with a high measuring accuracy. Born from industry requirements,
Rtec-Instruments also provides “turn-key” testing solutions for many industryspecific international standards.

Page 2Scratch Testing

3D Profilometry• Coating adhesion• Scratch resistance• Mar resistance• Scratch hardness• Surface topography• Failure analysis• Morphology• Defect analysis
Page 3

SMT-5000
Combination Scratch, Indentation, andIn-line 3D Profilometry

Indentation, scratch heads

Automatic XY stage

Rtec-Instruments Key Features
High accuracy sensor

Large Load Range

Our patented capacitive technology provides
unequaled accuracy, stability, and resolution forforce measurements on single or multiple axes.

In addition to multiple techniques, the SMT
measurement modules are offered in manydifferent force ranges, yielding a single instrument
capable of covering from mN to 200 N.*(Patent US 10,775,247 B1)

Combination of Indentationand Scratch Module (IST)The IST module provides both indentation andscratch testing in one single module.

In-line 3D Profilometry
The 3D profilometer provides Confocal, WhiteLight Interferometry, Bright & Dark fields, andVersatile Focus imaging in one module.

3D profilometer

Both normal and lateral forces are measured in
the head for more accurate force sensing.

All techniques are available in-line with testing
modules to provide an unequaled imaging
capability. (Patent US 10,024,776 B2)Film thickness probe

True Modularity

Non-destructive Film Thickness

The SMT-5000 platform can receive multiple interchangeable measurement modules, covering
Instrumented Indentation, Scratch, Tribology, 3D
Profilometry, and Coating Thickness.

Based on spectroscopic reflectance, the film
thickness measurement (FT-100) module
provides a super fast and direct non-contact filmmeasurement.

Automatic Z stage

Module changes take less than 2 min.

Page 4*For forces above 200 N, please inquire about our MFT5000 instrument

Page 5

InstrumentedIndentation (IIT)

Scratch Testing

Coating adhesion and scratch resistance

Hardness and Elastic Modulus

A scratch is created by dragging a tip of known
geometry to the surface of a sample of interest.
As the tip moves along the surface, the normalload applied to the tip is kept constant orincreased linearly.

Our Instrumented Indenter Testers are highprecision instruments measuring the mechanicalproperties of thin films, coatings, or any bulkmaterials.
Hardness, elastic modulus, creep, and fatigue
can be determined on almost any material,from soft to hard and fragile to brittle. Using thelatest actuation (piezo) and sensing technologies(capacitive sensors), the SMT quantifies theproperties of surfaces from nano to micro ranges.
Instrumented Indentation Testing (IIT) involves
pressing an indenter of known geometry into asurface while controlling and measuring the force
and displacement.

Key Features of Indentation Testers•Exchangeable modules to cover multiple
load ranges from mN to 200 N•

Unmatched performance with patented
capacitive sensor technology•Berkovich, Vickers, Spherical, Cube
Corner, Knoop, ... indenter tip•

Handling large and heavy loads andsamples (50 cm; 10 kg)•Motorized stage 150 mm x 200 mm for
automatic mapping•

Automated 3D microscopy inspection

Page 6

The resulting load-displacement curves areused to calculate hardness and elastic modulus,
among other things.
Although traditional hardness measures remain
available (Knoop, Rockwell, Vickers); the IIT
technique adds the ability to measure the elasticmodulus of the material tested.

In the case of coatings, the linear increase of thenormal force increases the severity of contact,providing the ability to observe critical failures of
the coating, the interface, and possible coating
removal from the substrate.

•The combination of data and 3D imaging provides
a complete picture of the effects of forces on thedeformation and failures of the surfaces.

The scratch resistance:
permanent
deformation
surface for a given load?

•The scratch adhesion: what normal force isrequired to break the bond between substrateand coating?

Two types of scratch results
evaluated on the SMT instruments:

canbeFollowing the scratch, images of the entire
scratch are taken to provide the user withcomplete information on wear track, scratch
width and depth, crack propagation, failuremode, roughness, volume lost, and more.

what isleft
inthetheKey Features of Scratch Testers•

Interchangeable
scratchheadtoaccommodate multiple testing ranges fromnano to macro•

A combination oftesterand3D

high-accuracy scratch
opticalprofilometer(US 10,024,776 B2)•The best sensitivity friction force thanks tocombined tangential force sensors in thehead and not beneath the sample•

Tests with temperature, humidity, and/ortribo-corrosion cell•

Measurement on flat or curved surfaces

Page 7

Tribology

Film Thickness

Wear and coefficient of friction

Ultra-fast coating thickness determination

Wear and coefficient of friction studies canefficiently be conducted on the SMT instruments
to measure the life and durability of surfaces.

The film thickness measurement module uses
spectral reflectance to obtain the thickness ofcoated surfaces.

By combining the high-resolution profilometerwith the tribometer setup (a sliding contact underknown normal force), the wear of the surface canbe easily measured as a function of time andforces.

Spectral reflectance relies on the interaction of
the coating surface with light to calculate thethickness. The comparison of incident light toreflected light from the different interfaces below
the sample’s surface allows the measurementof optical constants, thickness, and surface
roughness.

The real-time downforce and speed control allow
the creation of a material’s fingerprint across awide range of test parameters such as wear rate,static friction, and dynamic friction.
Since SMT sensors measure both normal andtangential forces, the evolution of the coefficientof friction can be easily monitored withdifferent loading, speed, and contact geometry
configurations.
The combination with our patented in-line 3D
profilometry provides a unique and automatedcomprehensive characterization of surfacechanges vs. time.

Interpretation of the reflection data is fairly
intuitive and easy to understand, especially in thecase of relatively thick films.
Thickness information is primarily contained in thefrequency of reflectance spectrum oscillations,Features of the Tribometers

Key features of film thickness•

Nano to macro tribology with fastexchangeable load cells•

Extensive materials library (500+)••

Tribo-corrosion capability•

Linear and rotating sample
displacement

Real-time, one-click measurement andanalysis of thickness, n&k, androughness measurement•

Testing conditions with heating, cooling,liquid or humidity

Ease of use, no expert knowledge
required•Powerful analysis package scalingcorrection, multi-sample measurement, anddynamic measurement.

•History of analysis: recall/display
measurement results and statistics••Automatic program of test-stop on
friction, penetration, ECR, ...

•Patented in-line profilometer with
automatic stitching technology(US 10,024,776 B2)Page 8

while optical constants (more precisely – opticalcontrast, i.e., the difference between opticalconstants at the interface) information iscontained in the amplitude of the oscillations.
Our full package includes easy-to-use software torecord all measurements and produce statistics.

12

Air
Thickness

Coating
Substrate

Analyze Failures Like Never Before

3D Universal Profilometer
Rtec-Instruments holds the patent for in-lineprofilometry (US 10,024,776 B2). This capability
allows the sample’s surface to be imaged
automatically using 3D profilometry at any point
during the test.

ImagingDifferent imaging techniques are available for theusers:

ModeSpinning Disc Confocal

Rapid Pace
3D Scanning

Optimized to look at steep slopes, transparent,translucent surfaces. Provides fast, highest XY
resolution 3D imaging and topography

White Light Interferometry
Interferometer

Bright Field

Sub nm automated
3D images of surfaces
2 paths with 2 cameras

Optimized to look at smooth, flat surfaces.
Provides fast, highest Z resolution 3D imaging
and topography of the surface.

Bright and Dark Fields

Dark Field
All Cracks
Easily visible

ConfocalComprehensive Scratch ,Indentation & Wear Analysis

Imaging provides two different ways to look at
the surface with additional illumination. Dark field
identifies small cracks by showing them brightlyon a dark background.

Variable Focus Imaging••••••

In Variable Focus Imaging, a series of photographs
are taken on different focal planes and analyzed
to create an entirely in-focus final image.

StitchingSurface roughness
Film thickness
Wear track
Volume wear
Step height
Add-on - Confocal Raman

This mode offers the automatic imaging of large
surfaces at high magnifications.

Bright Field
Page 10

Dark Field

3D Topography
Page 11

3D Microscope With Multiple Applications
The Most Powerful Package of Analysis On The Market

Automated Inspectionof Surfaces

Berkovich indentation

Scratch adhesive delamination

Wafer topography

Z calibration sample

Wafer bumps

Micro fluid chipInk on paper

Tribology wear

Hardness, Adhesion, Roughness, and More
Inspection of coatings and surfaces has become increasingly important
in industrial automation. Our SMT-5000 with automatic XYZ stages andintegrated metrology allows for easy, rapid measurement of a large area.
With a wide load range, SMT-5000 can be used to inspect samples or products
across several applications (hard coatings, semicon, biomaterials, polymers).

Page 13

Testing Modules

Controlled Environment

Description

IST

Liquid Chamber

Humidity Chamber

Liquid containers are available to test underliquid for both indentation and scratch
modules.

A humid environment can have tremendous
effects on the properties of surfaces andcoatings.

The baths ensure constant wetting of thecontact during the test.

A special humidity enclosure is available
to study the effect of humidity on thetribological and mechanical properties ofsurfaces and coatings.

Some recirculation and heating options canalso be added to the fluid.

Indentation Scratch Tester

The
setup
simultaneously
measurescurrent, voltage, downforce, friction force,
temperature, and acoustic emissions during
the test.

Page 14

Hot and Cold
Temperature
A heating/cooling module provides sample
temperature control during the surface
testing to study the effect of temperature on
surface properties.
The temperature control is fully automatedand synchronized with the software.

capabilities.

Both normal and tangential
forces are measured on theindenter tip.

Instrumented Indentation
TesterThe corrosion cell option makes studies
of surfaces under corrosion environmentspossible.
Arobustthree-electrodemeasurement system has a corrosion
cell typically made from peek material or
potentiostat. This allows quantification of
the synergistic effect of corrosive media on
surface mechanical properties.

This module provides bothindentation and scratch

It is available in different load
ranges and measures normaland tangential forces, along withvertical displacement.

IIT

Corrosion

Measurement heads

This module provides
indentation capability.
It is available in different load
ranges and measurements
normal and tangential forces,
along with vertical displacement.
This module can be used orinstrumented indentation andtraditional hardness tests.

UST

Universal Scratch Tester

This module provides scratchcapability.
It is available in different load
ranges (from mN to 200 N) andmeasurements normal andtangential forces, along thescratch path.
Normal and tangential forces
are measured on the scratch tip,offering a higher measurement
sensitivity and accuracy.

Page 15

SoftwareStandardized Testing

The SMT instruments come standard with control and data analysis software.
This software allows the user to continue to run the instrument while analyzing data from previous tests.
The SMT-5000 comes with several test-specific standards for data traceability andquick platform checkup. The instruments also come with standard test recipes toensure normalized testing.

MFT SoftwareThis software controls the instrument and is used to set up the test parameters.
The tests can be as simple as loading a test recipe and clicking start or as advanced as programming each
instrument’s motion while recording different data.

Instrumented Indentation

Fused Silica, BK7, tungsten and hardness blocks

Scratch

DLC coating - BCR 692

3D profilometerStandard step heights and roughness standards (100 nm and 1micron)

Wear

E52100 standard test sample

Film thickness

10 nm coated sample

Insight Software
The insight software allows for the complete data analysis of indentation, scratch, tribology, and other tests.
The software allows for combined analysis of 3D profilometer images and data acquired during the tests.

The SMT instruments comply with many different testing standards.
The table below presents a non-exhaustive list of possible standards:

Indentation

ASTM E2546, ASTM
B933, ASTM D785,
ASTM E140

ISO 14577, ISO 6508,
ISO 6507, ISO 4516

DIN 50359, DIN 55676
JIS B7734

ScratchASTM C1624, ASTM
G171, ASTM D7027,
ASTM D7187

ISO 20502, ISO 19252,
ISO 1518

DIN EN 1071-3

Tribology

ASTM G99, ASTM G132,
ASTM G133, ASTM
F732

ISO 20808, ISO 7148,
ISO 18535

DIN EN , EN 1071-13,
DIN 50324, DIN 51834

ASTM D4172

ISO 25178

3D profilometry

Page 16

Page 17

Applications & Industries

Specifications
ScratchHard Coating•••••

TiN, WC, DLC, WC
Cutting tools, drill
PVD, CVD coatings
Forming tool
Thermal, plasma spray

Bio-Materials•••••

Implants, stents
Bone tissue
Tablets, pill
Drug delivery
Artificial joints

Materials•••••

Ceramics
Polymers
MetalsRubberComposite

SMT Platform

UST

140200Maximum load [N]140200

XY axis [mm]150 x 200

Load resolution [µN]0.01

6100

XY speed [mm/s]

up to 50

Friction force [N]140200Z [mm]

Friction resolution [µN]

0.01

6100

Position Resolution

Maximum displacement [µm]

1000

1000

1000

Displacement resolution [nm]

0.01

0.03

1.5

*

•••
•
•

Eye glass, lensAR coatings
MirrorTouch screen
Display panels, LEDAutomobile
•
•
•
•
•

Page 18Paint, varnish
PolymerEngine, piston
Thermal spray
Window

Decorative Coatings
•
••
•
•

Jewelry
Watches
Evaporated metalCases
Anti-corrosion coatingSemiconductor•••••

Thin films
Low-K films
Passivation layers
MEMS, NEMS
Hard disks

Miscellaneous•••••Consumer goods
IoT devicesConnectors
2D materials
Flexible electronics

Aerospace•••••Composite material
Polymeric coating
Paint
Thermal spray coatings
Heat resistance coatings

1000.25 µm*Larger XY Ranges Available

More displacement and force ranges available

Coating thickness

Instrumented Indentation

Optical

SMT-5000

IIT

140

Maximum load [N]140Light source

Halogen

Load resolution [µN]0.01

6Wavelength [nm]400 - 1100

Maximum displacement [µm]10001000

Thickness range [µm]0.01 to 75Displacement resolution [nm]

0.01

0.03

Precision [nm]<0.01

Accuracy [nm]1*More displacement and force ranges available

FT-100Instrumented Indentation and Scratch
IST

140

Maximum load [N]140

Load resolution [µN]

0.01

6

Friction force [N]140

Friction resolution [µN]

0.01

6

Maximum displacement [µm]

1000

1000

Displacement resolution [nm]0.010.03*

3D Universal ProfilometerSee our Universal Profilometer catalog forspecifications

More displacement and force ranges available

Page 19

Rtec-Instruments IncUSA
1810 Oakland Road, Ste B
San Jose, CA, 95131, USA +1 408 708 9226
info@rtec-instruments.com
Rtec-Instruments Office
Agent / distributor

Rtec-Instruments, CNChina
2nd Floor, Building 3, 69 Olympic St
Jianye District, Nanjing, China, 210019
 +86 25 83210072, +86 18013892749
info@rtec-instruments.cn
Rtec-Instruments, JPJapan
Tokatsu Techno Plaza, Rm 409
5-4-6 Kashiwanoha, Kashiwa-shi, Chiba, Japan, 227-0882
 +81 50 5896 9916
info.jp@rtec-instruments.com

www.rtec-instruments.com

SMT-5000-2023-A-02A-EN

2023 Rtec-Instruments Product Catalogue.
All rights reserved.
All specifications are typical and subject to change without notice.

Rtec-Instruments SAEurope
Rue Galilée 6,
1400 Yverdon-les-Bains, Switzerland
 +41 24 552 02 60
info.eu@rtec-instruments.com