Cover Message
The blue sky, the green forest, crystalline water and fresh air: Our
lives and those of all living things would be impossible without them. Whilesociety grew materially wealthy during the 20th century, humans were often neglectful of the natural world. Reconciling our lifestyles to the parameters of the natural world is imperative for those of us living in the 21st
century.
Should it not be our common goal to use advanced technology toprotect the earth and its ecosystems in the 21st century? The front coverillustrates this wish through a design whose elements include a dolphin
and an electronic circuit.
Tokyo Electron (TEL) is working to promote information technology
through the advancement of semiconductors and to ensure that high quality knowledge and information are shared throughout the world. On thisbasis, we will continue to contribute to the building of an energy-saving
and nature-rich society through the appropriate use of knowledge and information.

Environment, Health and Safety Center
30-7 Sumiyoshi-cho 2-chome,
Fuchu City, Tokyo 183-8705
Tel: +81-42-333-8052 Fax: +81-42-333-8477
http://www.tel.co.jp
Published October 2002

Printed on 100% recycled paper

This report uses OK Matte Coat Green 100 (85%brightness), 100% post-consumer recycled paper that has received Japan's Eco Mark seal. It
is printed with soy-based inks that are highlybiodegradable and readily de-inkable-featuresthat facilitate the recycling of printed materials.

Environmental Report 2002

Contents

Corporate Profile
1

Company name:Tokyo Electron Limited (TEL)

Striving to be a Truly Globally Excellent Company

3

Address:

TBS Broadcast Center, 3-6 Akasaka

TEL and Society

5

Environmental Targets and Results

7

Topics at Major Sites

8

Corporate Profile, Editorial Policy, Range of Coverage

Eco Products

5-chome, Minato-ku, Tokyo 107-8481
Phone: +81-3-5561-7000
Representative:

Tetsuro Higashi, CEO, President

Established:

November 11, 1963

Capital:¥47,213,750,000 (as of April 1, 2002)

Main products:

Semiconductor production equipment

Products with Reduced Environmental Impacts

9(developed in-house), flat panel displays

TEL's Eco Products

11(FPD) production equipment (developed in-Green Procurement and Logistics

12

house), semiconductor production
equipment (imported), computer network
related products, electronic components

Eco Factory
Waste Reduction and Recycling

13

Energy Conservation

15

Resource Conservation

16

Chemical Management

17

Environmental Management System (EMS)

19

Environmental Education

22

Environmental Accounting

23

Health and Safety

25

Societal Contribution

27

Environmental Communication

29

Site Report: Yamanashi Plant

30

May. 1994
Mar. 1996
Apr. 1996
Dec. 1997
Feb. 1998
Mar. 1998
Mar. 1998
May. 1998
Sept.1998
Nov. 1998
June.1999
Aug. 1999
Dec. 1999
Jan. 2000
Apr. 2000
Apr. 2000
Sept.2000
Dec. 2000
Apr. 2001

1

Standardization & Environmental, Safety Center (Environmental, Health & Safety Center)
Product Safety Subcommittee (TEL Group Worldwide
Product EHS Committee) launched
Environmental Subcommittee (TEL Group EHS Committee)
launched
Sagami Plant earns ISO14001 certification
Tohoku Plant earns ISO14001 certification
Saga Plant earns ISO14001 certification
Kumamoto and Koshi Plants earn ISO14001 certification
Yamanashi Plant earns ISO14001 certification
The TEL Group Credo on Environmental Preservation established
The TEL Group Credo and Principles on Safety & Healthcredo established"Safety First" declaration establishedOzu Plant earns ISO14001 certification
The item "Health, Safety and the Environment" added to
the Management Philosophy
Study begins on implementing environmental accounting
Unified safety training system "Safety 2000" implemented
Study begins on implementing LCA (life-cycle assessment)
Study begins on implementing green procurement
Environmental Report 2000 issued
Study begins on implementing environmental training for
office not yet ISO14001-certified

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

1,530 (as of April 1, 2002)

Group employees:

10,269 (as of April 1, 2002)

Sales (consolidated): ¥417,825,000,000 (FY ended March 2002)

Editorial Policy

Environment, Health and
Safety Management

TEL Environmental and
Safety Activity Record

Employees:

This is TEL's third Environmental Report. Our first priority has
been to make this report easy to read and comprehensive, to give
you a better understanding of TEL's environmental, health andsafety initiatives, as well as the achievements of its societal contribution efforts during fiscal 2001. The TEL Group's business operations are wide-ranging; therefore, it is our hope that this reportwill gain the widest possible readership and help further to open
channels of communication with all those concerned with TEL. We
welcome your opinions and impressions of this Environmental
Report so that we may continue to develop our Editorial Policy.
The Ministry of the Environment's Environmental Reporting
Guidelines (Fiscal Year 2000 Version) and the guidelines of the
Global Reporting Initiative, which sets international guidelines forcorporate reporting, helped to guide the creation of this report.

Range of Coverage
Organizations covered: This report covers initiatives of the entire TEL.
<Major Japanese Bases>
Tokyo Electron Limited, Tokyo Electron Tohoku Limited, Tokyo Electron AT Limited,Tokyo Electron Kyushu Limited, Tokyo Electron EE Limited, Tokyo Electron Sapporo
Limited, Tokyo Electron FE Limited, Tokyo Electron Device Limited, Tokyo Electron
Leasing Co., Limited, Tokyo Electron Logistics Limited, Tokyo Electron Agency Limited.
<Major American Bases>
Tokyo Electron America, Inc., Tokyo Electron Texas, LLC, Tokyo Electron
Massachusetts, LLC, Tokyo Electron Arizona, Inc., Supercritical Systems, Inc., Timbre
Technologies, Inc.
<Major European Bases>
Tokyo Electron Europe Ltd., Tokyo Electron Italia S.p.A., Tokyo Electron DeutschlandGmbH, Tokyo Electron Switzerland Ltd., Tokyo Electron Nederland B.V., Tokyo Electron
Espa_a S.L., Tokyo Electron Ireland Ltd., Tokyo Electron Israel Ltd., Tokyo Electron
France S.A.R.L.
<Major Asian Bases>
Tokyo Electron Korea Ltd., Tokyo Electron Taiwan Ltd.,Tokyo Electron (Shanghai) Ltd.

Period covered: This report contains data for the period April 1, 2001 - March 31, 2002.
Areas covered: This reports addresses the TEL environmental management, as well associal and economic aspects of corporate societal contributions andother activities.

In brief...

TEL's primary business is manufacturing equipment used to make semiconductors.
Japan's semiconductor production technolo-

displays (FPDs) involves many processes which

gy is said to be crucial to the entire world, but

require assembly with specialized machinery dur-

TEL got its start offering the most advanced sem-ing each process.TEL provides most major types

iconductor production equipment from the U.S.

of equipment used in the manufacturing process.

to semiconductor manufacturers in Japan. Later,

At present, TEL is the second largest manufactur-

Japanese manufacturers started looking forer of semiconductor and FPD production equip-

equipment built to their own specifications, soment worldwide, measured on the basis of sales.

TEL's role grew to include equipment modifica-

TEL started with the import, sales and service

tion. In the process, TEL began to manufactureof U.S.-made products, and since the 1990s, has

equipment for itself. Presently, we have grownexported Japanese-made equipment to semicon-

into a company that develops and manufactures

ductor and FPD manufacturers in countries

nearly all products we carry. Thus, TEL's history

around the world, including the Americas, Europe

is the story of the evolution of a trading company

and Asia. Currently, overseas sales account for

into a manufacturer.

about 70% of total sales.

Manufacturing semiconductors and flat panel

Net Sales by Division(Consolidated)

Net Sales (Consolidated)

Computer Network: ¥17 billion
Others: ¥1.4 billion(100 million yen)
7,238

Electronic
Components:¥73.7 billion

4,555

4,407

4,178

3,138
Semiconductor and FPD Production
Equipment: ¥325.7 billion

0

Ordinary Income (Consolidated)(100 million yen)

1998.3

1999.3

2000.3

2001.3

2002.3

Number of Employees (Group)
1,192
10,720
8,910

8,836

9,117

1998.4

1999.4

2000.4

10,269

573
338

62
0

1998.3

1999.3

2002.3
2000.3

2001.3
195

02001.4

2002.4FPD (flat panel display): A thin flat display. FPDs include liquid crystal and plasma displays.
Semiconductor and FPD production processes: Semiconductor production processes can be broadly divided into front end
processes, in which circuits are formed on a silicon monocrystal panel (i.e., a wafer), and back end processes, in which packages areassembled. Semiconductors and FPDs are both produced using 200-300 process steps.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

2

President's Statement

Striving to be a Truly Globally Excellent Company
TEL has a mission to contribute to the development of a sustainable society,making environmental and safety measures top management priorities.

Focused on a Sustainable Society
through "Only One" Value Enhancement
TEL conducts business as a supplier of

we must not be remiss in carrying out theenvironmental and safety measures that canhelp us minimize such risks.

semiconductor and FPD production equip-

TEL seeks to be an industry-leading

ment, among other products, to support thecompany in areas of the global environment

global development of the semiconductor

and human health and safety. Therefore, we

and liquid crystal industries. Since ourrecognize that world-class obligations havefounding in 1963, we have pioneered tech-

been placed upon us, and that it is our pol-nical innovation in the semiconductor indus-

icy to advance environmental and safety

try, and at present, many of our products

measures as a top challenge of manage-command the top share of their respectivement.

markets globally. Technical innovation of information and communication systems continues to advance, and as it does, TEL

CEO, President

Tokyo Electron Limited

A Stronger Environmental
Protection System in TEL

maintains its mission to live up to our cus-

TEL and its group actively worked to re-tomers' trust and expectations and contri-

duce the environmental impacts of our busi-

butes to the development of a sustainable

ness activities through a program ofsociety.

ISO14001 certification of production bases
and the implementation of Environmental

Our Commitment

1.
TEL is adding value and contributing to the creation of asustainable society.

2.
Bearing the utmost respect forhumanity, TEL makes humanhealth and safety its top priority, while also taking into account the protection of the
global environment.

3.
TEL seeks to fulfill its global
obligations as a leading company by also making industryleading efforts on behalf of theenvironment.

A World Leader in Environmental
and Safety Measures

Moreover, TEL endeavors to develop

truly Globally Excellent Company, one that

products exceeding even our customer's

inspires people, both employee and themost demanding requirements. We do thisgeneral public, to think, "Only TEL couldin part by establishing concrete goals for re-have done that!" Our "Respect for Humani-

ducing environmental impact, designingty" concept, which has guided the company

equipment to save energy and footprint, andsince it was founded, embodies this desire.

curbing the use of chemical fluids. Our Pro-

Furthermore, in our "People. Technology.

cess Technology Center, established inCommitment." Corporate Message, respect

1998, is enhancing our environmental pro-for humanity is in part defined as making

tection technology while it is performing thehuman health and safety the highest priority

R&D needed to realize next-generation sem-and giving consideration to the protection of

iconductor technology.

the global environment.
The development of advanced technology and IT has offered unprecedented possibilities to humanity, but misuse of thesedevelopments can also cause incalculable
damage to the global environment. In addition, one aspect of the rapidly expanding
natural environment. TEL understands thatTOKYO ELECTRONENVIRONMENTAL REPORT 2002

in fiscal 2001.

At the same time, TEL seeks to be a

global competition is deterioration of the3

Management Systems (EMSs) in our offices

A Greater Contribution to Society
It is simply no longer possible to view

Tokyo Electron Group Credo on Environmental Preservation

sustainable corporate development as sepa-<The TEL Group Credo on Environmental Preservation>

rate from the environment. In recent years,

The Tokyo Electron Group believes that preserving the global environment and constantly improving it is one of the most important objectives for mankind, as well as our business. Based on this credo, we aredetermined to expand our business by maintaining harmony with the global environment, and thus win the trust of our many customers, shareholders, employees and society in geeneral.

environmental awareness has grown in society, and interest has risen among our employees. TEL is encouraging an environmentaly-centered attitude throughout the company by raising employee awarenessthrough environmental and societal contri-<The TEL Group Principles on Environmental Preservation>

butions closely bound to local community.

1. Continuous Improvement
TEL is conscious that products manufactured by the TEL Group affect the environment,
and based on this awareness, we, with our customers and suppliers, shall continually
strive to minimize the impact of processes and operations on the environment.

Efforts on behalf of the environment
necessarily require cooperation within industry. As our Principles on Environmental
Preservation state, "We, with our customers
and suppliers, shall continuously strive tominimize the impacts of processes and operations on the environment." TEL is confident that, as a leading company, we will
improveenvironmental measures.A particularly important issue facing us now is the recycling of products currently discarded aswaste.
This report lists the accomplishmentsof TEL environmental protection initiatives infiscal 2001 and offers a preview of directions for future initiatives. We hope that you
will learn more about the TEL's efforts andwill not hesitate to offer your advice. In turn,
we will continue to offer environmental information and strive to be a company that

2. Knowledge
TEL continually strives to enhance its understanding of the impact that the TEL Grouphas on the environment and the responsibility that this entails. In addition, TEL aims togain a quantitative grasp of environmental factors, and the impacts resulting from TELGroup activities and operations.
3. Performance Criteria
As well as strictly observing mandatory environmental laws, treaties and agreements,
TEL strives to enhance its own environmental management system and improve global
environmental preservation programs by the proactive establishment of its own aggressive environmental performance criteria.
4. Disclosure
TEL shares information about its environmental concept, principles and the progress of
our contribution toward environmental protection with employees and the general public.
5. Partnership
TEL actively participates in environmental protection activities practiced by our customers, suppliers and communities.
Date: September 25, 1998

Tetsuro Higashi
CEO, President Tokyo Electron Limited

responds sincerely to public opinion and iscapable of contributing to a sustainable society.
October 2002

My Eco-lifestyle"Being able to spend time out in nature isvery special to me. When I'm outdoors in thenatural environment, I feel energized and mysense of humanity seems to be revitalized. My
usual stress melts away and my outlook onlife broadens. At my cabin, tasks like splitting
firewood are very refreshing.
"When I think of these things, however, I
feel sharply aware of the responsibility ouradult generation has for past damage to thenatural world. I want our children to have agood future. Therefore I believe that we adults
have to act now."TOKYO ELECTRONENVIRONMENTAL REPORT 2002

4

Tokyo Electron and Society

Tokyo Electron and Society
TEL is working to establish a foundation that will facilitate information sharing on trends
in the global environment and society.

Tokyo Electron and Society

Plasma etchsystems

Cleaning systems

Oxidation/diffusion
LPCVD systems

Coaters/
developers

Metal CVD systems
Wafer probers
Environmental
training

Recycling
Energy savings
Resource savings

Manufacturers of semiconductors and
FPDs (flat panel displays)

Societal
contriabution

Energy-saving
designSafety measures

Tokyo Electron and Society
TEL supplies semiconductor production equipment to semicon-

cutting down on unnecessary commuting. With PCs and the Internet

ductor manufacturers, helping them to achieve a higher degree of

reaching more people and reducing communication cost, it is becoming

circuit integration and production of high-performance semiconduc-possible for people around the world to share advanced information.

tors, thereby contributing to the worldwide advancement of information and communication technologies.

Hereafter, protection of the global environment will require that
all of us share accurate information about trends in the environment

So how does the advancement of information and communica-

and society. No element in creating the foundation for this is moretion technologies affect the environment? To give one example, theimportant than information and communication technologies. It isadvancement of semiconductors has greatly reduced the amount of

TEL's desire to make a major contribution toward preparing thiselectricity consumed by previously energy-hungry machine tools andfoundation for environmental protection.

consumer electronics. In addition, the effective use of information

Nevertheless, TEL's plants do have considerable environmental

and communication technologies has made it easier for trucks, toimpact during the process of creating products. Therefore, we havecarry full loads on both their departing and returning trips, thus re-taken it upon ourselves to reduce the impact through a thorough pro-ducing waste. The further enhancement of communication services

gram of resource saving, energy saving, recycling and assurance ofcould also make working at home a more common practice, thus

employee and customer safety.

Cleaning systems: machines that clean dust and particles off wafers. These use pure water, acid, etc.
Oxidation/diffusion LPCVD systems: machines that bind oxygen (O2) or nitrogen (N2) on the surface of wafers and create oxide films,
nitride films, etc., at high temperatures.
Metal CVD systems: machines that form metal wiring on wafers. CVD is a process of making deposits on the surface of wafers by causing chemical reactions with vapor and gas.

5

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

TEL contributes to reducing society's environmental impact through advancing information systemization.

Machinery
Mobile telephones
Device manufacturers

People separated by distancecan talk instantly,eliminating
the need to travel.

Television
Energy-saving technology
advances and information
is instantly and accuratelytransmitted.

High productivity, greaterlabor savings

Semiconductors
and FPDs

Car navigation systems

PCs

These units help drivers avoid traffic
jams and get to their destinations
without getting lost, thus minimizing
energy consumption.

People around the world
can share information.

TEL's Flow of Materials
Electricity

215,210MWh

CO290,745 tonnes

Gas

124km

3

NOx

10 tonnes

Fuel2,871kl

SOx

1.7 tonnes

Water

937km

3

Wastewater

INPUT

929km

3

OUTPUTTEL(Major bases in Japan)

Chemicals

5.89 tonnes

Total waste emissions

12,974 tonnes

Paper (copy paper)

429 tonnes

Amount recycled

9,036 tonnes

Amount incinerated or landfilled

3,938 tonnes

Coater/developer: A machine that applies an even coat of photosensitive material (photoresist) on wafers, dries them, and then develops the exposed wafers.
Plasma etching system: A machine that uses plasma to etch away (or chemically corrode) only certain portions of the surface of wafers.
Wafer prober: A machine that inspects each circuit formed on finished wafers.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

6

Environmental Targets and Results

Environmental Targets and Results
Each workplace of TEL sets voluntary environmental protection targets
based on the TEL Group Credo and Principles on Environmental Preservationand makes efforts to achieve these targets.

On September 25, 1998, TEL established a Credo andPrinciples to define its position on environmental protection.

Results from fiscal 2001 and targets for fiscal 2002 arelisted below.

The Group workplaces establish their own environmental
policies, regulations, and procedure sheets based on thisCredo and Principles on Environmental Preservation.
Environmental Targets and Results
Results from Fiscal 2001

Targets for Fiscal 2002

Developed systems to reduce power consumption

Continue to study and perform

Developed systems to reduce consumption ofchemical fluids and pure waterContinue to study and perform

Inspected and analyzed degree of environmental impact
through life cycle assessment (LCA)

Use LCA data as feedback for system development

Gave green procurement policy explanatory session andevaluated suppliers

Provide instruction and training to improve level ofsuppliers with low scores

Worked to reduce power consumption

Set targets for each workplace and work to reduce consumption

Worked to reduce paper consumption

Set targets for each workplace and work to reduce usage

Worked to reduce water consumption

Set targets for each workplace and work to reduce usage

Worked to reduce total waste volume

Set targets for each workplace and work to reduce waste volume

Worked to improve waste recycling rate

Set targets for each workplace and work to improve recycling rates

Further enhanced chemical management system

Continue to study and perform

Published Environmental Report 2001
Worked to disclose environmental information

Publish environmental report once per year and disclose information
Expand content of environmental report

Provided environmental training to office employees
Prepared to implement environmental management
systems in office facilities

Implement ISO14001-compliant environmental
management system and TEL Eco-Activities at office facilities

Calculated and monitored environmental
protection costs through environmental accounting
Tested calculating and monitoring of environmental protection
effects (i.e., economic effects) through environmental accounting

Officially begin tracking effects
Expand environmental accounting contents and improve precision

Updated and continued to perform safety training

Continue to update and perform

Eco Products

Eco Factories

EHS(Environment, Health and Safety)
Management

President's Comments

Tetsuro Higashi
CEO, President

7TOKYO ELECTRONENVIRONMENTAL REPORT 2002

The semiconductor production equipment that we
provide to our customers has a substantial environmental
impact. For example, the amount of power consumed
when the customer uses equipments to make semiconductors. TEL performs life cycle assessments (LCAs) oneach type of equipment we sell, with a particular focus ontargets for reducing environmental impact during the useof the machinery. The analysis results are then fed backinto new development and design. In addition, TEL seek

to strengthen cooperative ties with its customers throughthe exchange of information.
TEL has also set up an internal management system
to address both environmental and safety concerns. One
issue we are addressing in fiscal 2002 is how to promotea good balance of recycling, resource conservation, energy conservation and chemical management group-wideusing the internal management system.

TEL-Manufacturing Subsidiaries: Topics in 2001 and Targets for 2002
Tokyo Electron Tohoku Limited

LCA Results impacting Product Design in 2002
Tokyo Electron Tohoku Limited manufactures systems that perform the thermal processing
functions of semiconductor production processes. Until now, development work took place separately at the Sagami and Tohoku Plants, but in April 2002 we consolidated all stages from systemdevelopment to production in the Tohoku Plant.

Kengo Kuroiwa

In fiscal 2001 Tokyo Electron Tohoku put its energy into increasing its rate of recycling of

President
and Representative Director

waste. The result was a recycling rate in excess of 90%, as compared to about 40% in fiscal

Eco Life : To create a recycling-oriented society, it is important that each of us become proactive and participate both in thecorporation and as private citizens. For example, I talk to my son
about the environment and what we can do about it at home, likechoosing fuel-efficient autos and always turning off the electricity
when not in use.

dealing with is reducing the environmental impact of our systems. We have not only reduced

Tokyo Electron AT Limited

2000. Moreover, we plan to achieve zero emissions within three years. Another challenge we are
power consumption, but also decreased the amount of materials used, such as nitrogen gas andwiring, which has reduced CO2 emissions. In fiscal 2002 our plan is to put to use the LCA resultsfrom fiscal 2001, actively incorporating them into all stages of the development and design pro-

Close Ties and Exchanges of Technical Information with Our Customers
Lead to Development of Systems with Reduced Environmental Impact
The Yamanashi area is home to an equipment production plant (Tokyo Electron AT Limited) and a semiconductor process Technology Development Center (Tokyo Electron Limited). The Technology Development Center collaborates with our customer's engineers to develop semiconductor production equipment that is not only high-quality but

Mamoru Hara

also reduces environmental impact, by saving energy. Environmental awareness at TEL has been very forward-looking,President
and Representative Director

starting six years ago when TEL determined that it would earn ISO14001 certification as a group. In Yamanashi, an

Eco Life : The introduction of ISO practices has not only affected me at work; off the job my consciousness has changed aswell. I've long felt that one should use things as long as possible,
so at home I save resources and energy. I feel it's now evenmore important to act for the benefit of "the whole" and not justtreat the symptoms, such as global warming.

and disseminated with the goal of enriching both safety and environmental efforts. Moreover, a new section has been

Tokyo Electron Kyushu Limited

EHS (Environment, Health and Safety) Management System was established in fiscal 2001 and has been carried out
created specifically to deal with health issues and has enriched activities in that regard. In 2002, we will push forwardwith reducing energy consumption in the workplace overall, for example, by reviewing the base units for calculating
this consumption.

(For details, see the special site report for the Yamanashi Plant on page 30.)

Achieving Zero Emissions,
Our Environmental Efforts are Gaining Momentum
Tokyo Electron Kyushu Limited mainly produces equipment that handles resist and developing and cleaning fluids. Recent years have brought a shift, from a time when we built toorder, to a time when TEL needs to assert its autonomy. During the last few years, our em-

Megumi Yamashiro
President
and Representative Director
Eco Life : From our location near Mt. Aso whererivers flow so abundantly, we are especially careful
not to pollute the water, in order to protect this resource. At home my family separates the trash andrecovers waste items. As much as possible, we refrain from using the car and instead go by bicycle.

ployees have steadily become more aware of the environment. I believe achieving zero
emissions will further encourage this consciousness. We also face more stringent water regulations than businesses in other prefectures, so we practice closed-loop recycling of coolant water.
The Koshi Plant achieved a 99.6% industrial-waste recycling rate in fiscal 2001, and in
2002 it expects to achieve zero emissions by recycling vinyl chloride, which is still an issue.
In 2002, other plants will follow Koshi in raising their own recycling rates.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

8

Eco Products

Products with Reduced Environmental Impact
TEL actively applies LCA techniques and works to conserve energy
in order to efficiently reduce environmental impact.

TEL Stance on Eco Products
TEL offers its customers services and products, such as semi-

Organization for Mitigating Environmental
Impacts Associated with Products

conductor production equipment, FPD production equipment andEnvironmental impacts that are common to the areas of semi-

electronic components produced in-house. TEL has prospered by in-conductor and FPD production equipment made and sold by TEL arecorporating customer suggestions into our products and by providing

subject to the mitigation efforts of a special organization set up atworld-leading technologies and products. At a time when concern

TEL. See page 20 for details.

about environmental issues is growing, we face the need to reduce
environmental impact during manufacturing and to eliminate harmful
substances from our equipment materials. Notably, customers haveCountermeasures Organization for Mitigating
Environmental Problems Associated with Products

asked us about the environmental impacts of products throughout

Director charged with responsibility

has compiled environmental impact data for products during manu-

Worldwide Product EHS Committee

facture, usage and disposal. TEL plans to continue working with ourcustomers to further reduce environmental impact.

Technology, sales, service
Secretariat: Environment,
Health & Safety Center

Product Emissions and Consumption Reduction Targets
TEL determines reduction targets for gas emissions and power
consumption of its products and works to reduce their environmental

TEL is looking into further aggressive reductions in PFCs* in theevent that SEMI*, SEMATECH* or similar organizations promote fur-Environmental themes to be addressed

Example of Major Efforts in Each Business Unit (BU)
BU (Business Unit)/Plant
Etch Systems/Yamanashi

impact. Because semiconductor wafer size has increased from200mm to 300mm, we express these targets in surface area units.

Organization for each major product line
BU's Equipment
Environment, Health and
Safety Committee

their lifecycles. Taking a sincere approach to customer requests, TEL

Single Wafer Deposition/Yamanashi

Efforts made•Reducing power consumption•Reducing power consumption•Reducing N2 and exhaust

FPD Systems/Yamanashi•Reducing power consumption

FPD Systems/Ozu•Reducing chemicals

Cleaning Systems/Saga•Reducing use of chemical liquids

ther measures in the future.
•Reducing use of IPA*
•Reducing use of pure water•Reducing power consumption

Long-term Targets for Reducing Environmental Impact Occurring During
the Use of Semiconductor Production Equipment (Product EHS Roadmap)
1997
1999
2002 intermediate targets
standards*1 standards*2

2005 targets

Wafer size

200mm

300mm

200mm

300mm

200mm

300mm

Energy consumption

1

1

0.8

0.8

0.65

0.5

1

1

0.8

0.75

0.65

0.4

1

1

0.8

0.85

0.65

0.7

HAPs* emissions

1

1

0.4

0.7

0.35

0.4

VOCs* emissions

1

1

0.4

0.7

0.35

0.4

Clean Track/Kumamoto
Koshi•Reducing use of chemical liquids

Thermal Processing Systems/Tohoku•Reducing equipment footprint•Reducing power consumption•Reducing use of wiring madewith vinyl chloride•Establishing guidelines

for scrapping equipment
Water consumption•Reducing power consumption(coolant water, etc.)
Water consumption(ultra pure water)*1 Standards are defined as the amount consumed or emitted per square area
unit in 1997 by 200mm semiconductor production equipment.
*2 Standards are defined as the amount consumed or emitted per square area
unit in 1999 by 300mm semiconductor production equipment.

PFCs: Perfluorocompounds, a CFC alternative.
SEMI: Semiconductor Equipment and Materials International, an industry association consisting of semiconductor and FPD production equipment and materials manufacturers.
SEMATECH (SEmiconductor MAnufacturing TECHnology): A consortium of American, European and some Korean and Taiwanese semiconductor device manufacturers.

9

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Fiscal 2002 Action Plan Items
The following table describes TEL's fiscal 2002 action plan forthe manufacturing of environmentally-friendly products, based on the
Product EHS Roadmap (see page at left).

Fiscal 2002 Action Plan for the Manufacturing of Environmentally - friendly Products
Item

Fiscal 2002 Action Plan Items
Reduce power consumption

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in power consumption in fiscal 2002

Global warming prevention
Reduce emissions of VOCs*

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in VOCs in fiscal 2002

Air pollution prevention
and acid rain countermeasures

Reduce emissions of HAPs*

Achieve Product EHS Roadmap fiscal 2002 targets
Achieve sufficient reductions in HAPs in fiscal 2002

Ozone layer depletion prevention

Regulate usage of ozone layer-depleting substances

Promote elimination of HCFC-based substances

Promote recycling and reuse(dismantling into separate materials, marking materials, disposal)

For each product type, set targets and begin performing
Study the tasks and procedures associated with dismantlingand discarding, and how to incorporate these into manuals

Make equipment and components last longer

For each product type, set targets for extending equipment
and component life and begin performing these initiatives

Practice green procurement

Establish basis for application to green-procurement products

Regulate lead usage

Share information regarding lead solder substitutes
and learn lead usage status of purchased products

Implement LCA

For major products of each product type, perform LCA
with the objective of helping prevent global warming

Reduced consumption of
depleted resources

Purchasing measures

LCA performance*We have already achieved a more than 90% reduction in PFCs by improving abatement system performance and using alternative gases.

Efforts to Perform LCA
LCA, or life cycle assessment, is a procedure for quantitatively

ments made and implement these in other BUs within two years.

assessing the environmental effects of a product at every stage of its
life, including the manufacture of the product from raw materials,

Examples of LCA Efforts in Fiscal 2001

transportation of the product, its usage and disposal. An LCA of sem-

Environmental impact for each life stage of a product (material

iconductor and other production equipment sold by TEL would con-manufacturing, equipment manufacturing and assembly, transporta-

centrate in large part on the environmental impact occurring duringtion, usage by the customer and disposal) is calculated in terms of

the process of making semiconductors.
A unified set of standards is essential to compare the environmental performance of production equipment from different manu-

CO2 emissions. By changing the materials used in the equipment, total CO2 emissions change as well, so CO2 emissions are calculated
for each material.

facturers. Our group is actively involved in the SEAJ (Semiconductor

In all life stages, equipment usage creates the greatest environ-

Equipment Association of Japan) effort to establish an energy-sav-

mental impacts, and the proportion accounted for by ultra pure water

ings calculating standard and, in particular, in seeking to establish aused in cleaning systems is the greatest; with this in mind, cleaning

world standard that incorporates the LCA principle.

equipment built to water-saving specifications can be the most effi-

Beginning in fiscal 2001, the TEL Group has performed LCAs on

cient way to reduce environmental impact. (See page 11.)all newly developed products. These LCAs have taken place within
the BUs and it is our intention to take the best examples of improve-

HAPs: Hazardous air pollutants
VOCs: Volatile organic compounds
IPA: Isopropyl alcoholTOKYO ELECTRONENVIRONMENTAL REPORT 2002

10

Eco Products

TEL's Eco Products
Using LCA techniques, TEL is efficiently reducing the environmental impact of its equipment.
Building equipment to energy-saving specifications also controls running costs.

Energy Used at Each Life Stage (CO2 Equivalent)*

Example of Product Energy Saving Measures(%)

UW8000 (old model)

UW200Z (new model)

TEL studies the environmental effects of all its products based

100.00on LCA principles. The following account is an example of saving energy in the development of a cleaning system.

98.56
51.55
50.78

1.10
0.46
New product (UW200Z)

Old product (UW8000)

0Efficiently reducing the environmental impact of equipment usage requires analysis of equipment characteristics. LCA-based evaluation of cleaning systems indicates that a great deal of energy is

0.25 0.22

Materials
manufacture

Manufacture/assembly

0.06 0.06
0.03 0.03
Equipment Equipment usage Disposaltransportation

Total
emissions*Where total emissions from UW8000
are taken as the standard.

Energy Used during Equipment Usage (CO2 Equivalent)*(%)

UW8000 (old model)

UW200Z (new model)

used for ultra pure water, power and ventilation of the system during

100.0

use. TEL has studied specifications for reducing these quantities atthe equipment development stage. When the new UW200Z is compared to the older product, UW8000, by converting environmental

51.5

51.1

impacts into CO2 emissions, we find that the total environmental im20.5

pact is cut in half and that, in fact, environmental impact was re-

18.0

duced at every stage of the product's life. Guiding the development

17.3
15.1

of this new system was a policy to cut by half the amount of ultra
7.4

pure water characteristically used by cleaning systems. This led to an

4.5 3.9 4.4

effective reduction in environmental impact.
Moreover, regarding the choice of materials used in the system,
TEL opted to use SUS stainless steel, which takes little energy to produce, in place of aluminum, which requires a great deal. As a result,the energy now used is only 42% of that previously consumed.

0

2.7

Ultra
Power Ventilation Compressed Chemical
pure waterairliquid

3.7
1.5

0.5 0.5 0.2 0.2

N2 gasCoolant Consumables Emissions
water
during usage*Where total emissions from UW8000 are taken as the standard.

T O P I C S

Example of Oxidation/Diffusion System
Environmental Impact Reduction
TEL is also using LCA techniques to mitigate environmental impact in areas other than cleaning systems. Oxidation/diffusion sys-

Proportion of CO2 Emissions Accounted forby Each Material During usage
Old (UW8000)
New (UW200Z)

tems, which are used to produce semiconductors, consume considerable energy during thermal processing at hot temperatures. In ad-

Iron:9.4%
Stainless steel:9.0%
Other:
17.2%

Iron:
16.3%

Electronic components:
10.3%

Electronic
components:
24.5%

Aluminum:
23.6%

Quartz:27.0%

Teflon:3.3%

11

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Other:
12.6%

built that enables coolant water to absorb heat from the heater,
rather than allowing the heat to radiate into the surrounding room.
Because semiconductor production takes place in clean rooms

Aluminum:
11.2%

that must be kept immaculate and at a constant temperature, displacing extra heat into the room's interior leads to energy waste

Quartz:30.3%
PVC:
2.4%

dition, the equipment must be cooled. For this reason, equipment is

Copper:0.3%

PVC:
1.1%

Fluorinated resin:1.5%

when air conditioning is used. TEL is undertaking energy-saving
measures suited to this production environment.

Eco Products

Green Procurement and Logistics
TEL works with its suppliers to set up internal organizations that promote
the use of low-impact materials and logistics systems.

TEL's Stance on Green Procurement

Logistics Efforts

Producing semiconductor production equipment, the TEL's main

Most of our main product line, semiconductor production equip-business, requires that nearly all materials and components be pur-ment, is built to unique specifications, which mean that, depending

chased from suppliers. For this reason, in all areas of business activi-

on the customer, each unit is differently shaped and therefore pack-ty, TEL must work to protect the environment not only within the con-aging has to be taken this into account. In addition, units are shippedfines of its group itself, but through our suppliers. In the future, TEL

at irregular intervals, making it difficult to take environmental impact-

has plans to start procuring materials solely from those suppliers

reducing measures, such as joint shipments with other firms or

meeting environmental standards. Green procurement is also being

warehouse consolidation, practices commonly used for householdpromoted for various computer systems and high-end network sys-electronics and other products. Determining how to rationalize thetems handled by our Computer Network BU.

logistics of product shipments from TEL to customers is a major
challenge for us. TEL, however, is cooperating with its suppliers toEfforts in Fiscal 2001
Having set fiscal 2001 as our year to begin preparations forminimize the environmental impacts of shipping product components
and materials from suppliers to TEL.

green procurement, TEL carried out the following measures:
Efforts on Shipments from Suppliers(1)TEL drew up and carried out a survey of environmental

TEL works with suppliers to recover and reuse cushioning mate-initiatives to help track suppliers' efforts, and received

rial and AirCap®. We also no longer use AirCap for moving objects

responses from suppliers.

and are instead employing reus-(2)TEL ranked suppliers in one of four categories basedable protective covers.

on survey responses.

Efforts in Fiscal 2002

A reusable protective cover used forshipping purposes

Building on fiscal 2001 efforts, in fiscal 2002 TEL created a program to help those suppliers that had not met standards to accelerate their efforts.

Efforts on Shipments to Customers
In the past, TEL shipped equipment parts by packaging them in-Specific measures:(1)TEL established an internal program to train individuals who can, in turn, train suppliers.
(2)TEL established a system to encourage suppliers to

dividually in corrugated cardboard boxes with cushioning material.
We have now switched to using mirrormat (a soft polyethylene sheetwith high expansion factor; it provides excellent cushioning, heat insulation, water repellence, moisture barrier and cleanliness) and re-set their own environmental targets each year andusable corrugated plastic cartons. This packaging reduces thework to meet those targets.

amount of cushioning needed.

TEL's Green Procurement Guideline sets standards
and targets for chemicals, energy savings, packaging,
resource saving and recycling, and information disclosure.

Packaging with mirrormat anda corrugated plastic carton

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

12

Eco Factory

Waste Reduction and Recycling
TEL is working to reduce waste generated by its business and to lessen environmental impacts.

Stance on Reduction and Recycling of Wastes

Breakdown of Waste Volume

TEL's stance on waste reduction and recycling is: "Produce noWaste liquids account for about 70% of all TEL's wastes. This iswaste. Recycle any waste that is produced. Properly dispose of any

due to the fact that we use a variety of chemical liquids during thewaste that cannot be recycled."development and evaluation of the products we manufacture. Other

Based on this stance, TEL is working to reduce the waste generated by our business. Every year, the shortage of final disposal sites

wastes for TEL as a whole total just over 1,000 tons, a notably small
amount of waste for a business of this size.

becomes more critical and landfill costs are on the rise. In addition,
reducing waste is crucial in minimizing environmental impacts, aswell as in cutting production costs.

Breakdown of TEL's Waste for Fiscal 2001
Glass:0.1%

Each TEL plant is making continuous efforts aiming for zero
emissions. These plants are sorting and recovering wastes and ac-

Others:10.6%

Waste liquid:2.1%
Kitchen trash:2.5%

tively seeking out recycling outlets as part of the effort to promote re-Metal/product scrap:2.8%
Paper:3.5%

cycling. It is incumbent on manufacturers not simply to make good

Plastic:7.2%

Total
3,938 tonnes

products, but also to make every manufacturing process environmentally friendly. TEL promotes proper disposal as outlined in the

Packaging:7.4%
Specially controlledindustrial waste liquid*:
63.8%

Wastes Disposal and Public Cleaning Law, for example by carefully
selecting the contractors it engages to process its wastes.

*Specially controlled industrial waste liquid: Liquid waste deemed to pose a riskof harm to human health or living environment and designated by the government as subject to special control.

Total Waste
The following diagram shows the amount of TEL waste undergo-

Breakdown of Wastes by Region for Fiscal 2001

ing final disposal and the rate of recycling. The recycling rate has ris-

Saga:2.0%

en year by year, and efforts to use resources effectively have resulted

Koshi:2.2%
Fujii:4.3%

in the rate rising above that of fiscal 2000. The total amount of waste
produced rose slightly, with liquid wastes accounting for most of the

Yokohama:5.0%
Sagami:6.5%

increase.
Since fiscal 1999, TEL has included wastes from our office facilities with those from manufacturing plants in the waste total. The

Ozu:1.6%
Miyagi:1.1%
Kumamoto:0.7%

Fuchu:6.7%

Total
3,938 tonnes

Tohoku:7.0%
Hosaka:62.9%

amount of waste produced rises and falls according to productionlevels and factory operating status, but TEL is committed to working
toward consistent reduction of waste levels.
T O P I C S

TEL's Waste Output
Amount of waste (i.e., waste sent to final disposal)(t)(100%)

Recycling rate

59.9%

69.7%

55.2%

Example of Efforts to Reduce Waste
Saga Plant
Each TEL site has established a special subcommittee for waste re-49.7%

duction and carries out its efforts through this body. Notably, the Saga Plant
40.9%

has reduced the amount of waste undergoing final disposal by more than
90% since fiscal 1996. This factory's system has made it possible to takeconcrete measures, such as thorough waste sorting and the recycling and

15.3%
4,238
0

13

96

salvage sale of previously discarded metals and plastics. The Saga Plant
4,772
97

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

3,189
98

3,179
99

3,657
00

particularly focused on recycling solid wastes in fiscal 2001.

3,938
01

0

Recycling

Control of Waste Processing Yards and Contractors

Promoting efficient recycling requires thorough separation when

Each TEL site certifies and controls the intermediate processors

waste is initially discarded. TEL site separate waste into between 24

and final disposal contractors for waste. When a new contractor is toand 29 categories, according to waste characteristics. The types ofbe used to process waste, each site performs a study to certify thematerials sorted are primarily paper, drink containers, scrap wood,

contractor, checking their licenses and making onsite checks. This is

glass, plastics and metals. Through sustained efforts, our recycling

done to determine whether the contractor is capable of proper pro-rate has risen year by year. In fiscal 2001 this rate reached 69.7%,

cessing or disposal, as outlined in the Wastes Disposal and Public

up about 10% from the previous year. This achievement was madeCleaning Law. Once the contractor is certified, it undergoes regularpossible by changes in the method of disposal of waste liquid at vari-onsite checks to continue monitoring its waste processing status.

ous locations and by thorough separation of wastes, among other efforts. TEL plans to continue to work at each workplace to make recycling even more effective.

T O P I C S

Recycling Example 1
Waste Liquid Recycling: Tohoku Plant

Recycling Example 2
Expanded Polystyrene Recycling: Yamanashi Plant

At the Tohoku Plant, where waste liquid once made up about 70%

Expanded polystyrene (EPS), the foam used as cushioning whenof all wastes, employees are controlling the amount of liquids used andshipping components, is light, but bulky, and is therefore a challenge tothoroughly separating the liquids. A process in which liquids are separa-

ship whether it is discarded or recycled. The Yamanashi Plant addressed

ted and recovered according to high or low density is making it possible

this issue by installing an EPS compacter and recycling the material effi-

to recycle these wastes, and a contractor is engaged to process theciently. The EPS is compacted

wastes. Low-density waste liquid is treated and the remaining sludge is

into ingots and transferred to aused as cement material. Recycling of high-density waste liquid began incontractor, who then recycles the

fiscal 2001. The sludge remaining after processing is recycled as raw

material into hangers, cassettematerial for stainless steel, or as a melting agent. These efforts have pu-

tapes and other products.

shed the recycling rate at the Tohoku Plant to higher than 90%.

TEL recycled about two

Recycling of Waste Liquid, Once 70% of All Waste

tonnes of EPS in fiscal 2001.

EPS compacter

Waste liquid

Recycling Example 3
Office Initiatives
Office recycling initiatives, pioneered at our World Headquarters in
Low density

High density

Akasaka and at the Fuchu Technology Center in fiscal 2000, were implemented at other site in fiscal 2001. For example, documents that wereTransferred and treatedReleaseTreatment

Treatment

once shredded and burned for confidentiality reasons are now recycled.
ReleaseThe documents go into a transportation box and are recycled in a systemthat prevents the viewing of their contents. This effort resulted in the recycling of 770kg of confidential documents at our Osaka Branch Office in

SludgeSludgefiscal 2001.
For paper cups, we have switched from timber pulp to non-timber

Cementmaterial

Stainless steel
raw material

kenaf, and our paper-cup recycling program has spread to other site.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

14

Eco Factory

Energy Conservation
TEL promotes energy conservation at all sites as a way to help prevent global warming
In addition, TEL's ISO14001-certified sites set energy-saving goals and targets
and work systematically to achieve these..

TEL's Power
Consumption

Stance on Energy Conservation
Nearly all of TEL's manufacturing plants are Type 1 DesignatedEnergy Management Factories as per the Law concerning the Ratio-

TEL's Heavy Oil
Consumption
215(1,000,000 kWh)

2,430

(kl)

186

1,916

nal Use of Energy. As the law dictates, these factories engage in creating and complying with management standards based on judgment
108

standards; appoint Energy Management manager; and, handle man-

1,881

1,652

150
120 121
967

958

96

97

agement organization. Certified workplaces set targets for each geographical area and perform energy conservation activities. Clean
room facilities used for production and development consume a great0deal of electrical power; therefore, the TEL's various manufacturing

96

subsidiaries work to make their clean rooms more energy-efficient,

TEL's Kerosene
Consumption

as well as more efficient overall, thus reducing energy consumption.

97

98

(kl)

99

00

0

98

99

00

01

TEL's Gas
Consumption

996

By making our development and assessment tools more energy-effi-

01

990

(1000m3)

908

LPG

135 132

cient, we reduce the amount of energy used for these functions in

120

City gas
129
115

124

each site

Total Energy Usage
364

The slower economy caused a downturn in orders in fiscal
2001, so our manufacturing plants and the production and assessment facilities at our R&D facilities were less busy. On the other
hand, new buildings were added at the Fujii area of Yamanashi andKoshi Plants, and the Hosaka area of Yamanashi Plant started testing

0

96

62

59

65

70

49

58

73

72

55

59

65

65

96

97

98

99

00

01

403 389

97

98

99

00

01

0

Major Efforts Made

24-hours a day. Developments like these caused power consumption

All sites conserve energy with their lighting and office equipment

to rise considerably. Converted to CO2 emissions, energy consump-and control the temperature settings of air conditioning equipment.

tion rose 12% compared to the previous year. Energy consumption

The Kumamoto Plant implemented energy-efficient temperature con-per sales was nearly double that of fiscal 1997, which is the TEL's

trols when it remodeled the third floor of its No. 2 Building. This re-baseline year. TEL will make further conservation efforts as it seeks

sulted in power consumption for the entire floor falling by

to cut total energy consumption.

4,835kW/month and costs dropping by 26,595 yen per month. The
Yamanashi Plant conducts planned stoppa-

Total Energy Consumption at
TEL (CO2 Equivalent*1)(tonnes)ges of its equipment during the summer and2

Per sales unit *196.0%

Energy consumption(%)

Arizona,Inc. has implemented an energy control system and worked with its utility compa-

150.9%
134.8%
95.8%

New Year's holidays, and Tokyo Electron

ny to cut energy consumption by 18% from100.0%

fiscal 2000 levels.

Checking office temperature and humidity on
an energy patrol at the
Yamanashi Plant

100.9%

45,9220

96

50,4889752,45698

65,81799

80,88200

Energy Consumption by Geographical Area in Fiscal 2001

90,745010Sagami:3.2%

Yokohama:1.3%
Fuchu:2.8%

Akasaka:0.5%

Hosaka:21.4%

Miyagi:3.7%*1: Refer to the Ministry of the Environment's Environmental Activity Evaluation
Program regarding CO2 conversion.
*2: Consumption per sales unit = energy consumption divided by sales (where thefiscal 1997 value is 100%)

Sapporo:0.2%
Osaka:0.2%

Tohoku:3.5%

Kumamoto:6.5%
Saga:7.9%

Total energy consumption
215,000,000 kWh
Fujii:19.7%

Ozu:9.5%
Koshi:19.6%

15

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Eco Factory

Resource saving
As one step for resource saving, TEL is reducing paper consumption.
TEL is taking other measures as well, for effective use of resources,
such as saving water, not letting automobiles idle, and actively purchasing recycled products.

Stance on Resource Conservation

Efforts to Reduce Water Usage

TEL is working to reduce to an absolute minimum the amount of

TEL's manufacturing plants are reducing water usage by imple-

resources used and is procuring environmentally-friendly resources.

menting coolant water recirculating systems and reusing industrial

TEL works to reduce the amount of water, copy paper and sta-water used in all stages of operations, such as production, develop-

tionery that it buys and uses, actively purchases green products, andment, assessment and shipping. Addi-

works with office supply manufacturers to collect discarded products,

tionally, all workplaces are installing au-thereby promoting good resource conservation.

tomatic faucets in lavatories and elsewhere to save water by avoiding cases
where workers forget to turn off tap wa-

Efforts to Reduce Paper Usage
TEL sites especially those that are ISO14001-certified, are en-

Automatic water tap

ter or otherwise use water inefficiently.

deavoring to reduce the amount of paper used. All sites promote using both sides of copy paper and save by shrinking copy sizes.
In addition, sites try as often as possible to share information

TEL's Water Usage(1000m3)

Industrial water

without using paper. Efforts are being made to switch to electronic817

Tap waterelectronic formats. As a result, paper consumption in fiscal 2001 fell
from the previous year's level.

947

937

146

119

412

388

770

812
89

527

446

391

325

331

390

430

291
97

98

99

00

01

693

information; for example, our circulating documents are shared in

Groundwater521

Our plan for the future is to continue revising how we do thingsand consolidate our records and forms to the minimum necessary.
Furthermore, all sites are using recycled paper for all documents with

172
0

96

the exception of certain applications.
TEL has also undertaken to help protect forest resources by in-

Other Efforts

troducing paper cups made of kenaf, a non-timber fiber source, in

When leases on company cars expire, a number of sites, includ-

place of traditional wood-fiber paper cups. Finally, TEL has called on

ing the Osaka Branch Office, are switching over to hybrid cars andits employees to limit paper cup usage to one per person each day.

autos that benefit from the green tax system. According to a study by
the Osaka Branch Office, hybrid cars consume just half the fuel ofconventional gasoline-powered cars. Moreover, the group encour-

TEL's Copy Paper Usage by Geographical Area
2000Totalages drivers to refrain from leaving cars idling.

2001Total

Iwate:7%
Saga:7%
Miyagi:1%
Koshi:8%
Fuchu:5%
Yokohama:2%

Iwate:6%
Saga:6%
Miyagi:1%
Fuchu:5%
Yokohama:4%

Besides these efforts, the group is also contributing to the effective use of resources by actively purchasing recycled products andrecovering and returning printer toner cartridges to the manufacturer.

Koshi:15%
Kikuyo:
12%
Ozu:
9%

Total
Fujii:
131,500,000 sheets
22%

Osaka:2%
Sagami:4%
Akasaka:6%

Hosaka:15%

Kikuyo:2%

Total
Fujii:
Ozu: 107,367,000 sheets 23%
12%

Osaka:2%

Hosaka:15%

Sagami:3%
Akasaka:6%

A hybrid car used by TEL

A sticker on a leased car encouraging
the driver to avoid idlingTOKYO ELECTRONENVIRONMENTAL REPORT 2002

16

Eco Factory

Chemical Management
In order to prevent environmental pollution, we strictly control the chemical substances we use.
We are working to find alternative substances and methods for reducing the use of hazardous chemicals.
At the same time, we are also making efforts to determine which chemical substances arepresent in the products we purchase.

Stance on Chemical Management

TEL statistics for PRTR target substances in fiscal 2001 are

Depending on the handling methods and types, the chemicals

shown in the table below. Of substances that are subject to reportingused in business activities could pose risks of environmental pollu-

under the PRTR law, we handled no more than five tonnes per yeartion.

at any one factory.
In order to prevent pollution from chemical substances, TEL car-ries out strict controls that take the environment and safety into account at every stage, from the initial decision to introduce a chemi-

Data on Substances Controlled under the PRTR Law
Official number

Name of Class 1 chemical(Units: tonnes)
Amount handled16

2-amino ethanol

0.52

43

Ethylene glycol

1.50

Before introducing a new chemical, each plant obtains MSDS*

44

Ethylene glycol monomethyl ether

0.12

information and evaluates the risk of hazard and then makes a deci-

63

Xylene0.18

172

N,N-dimethylformamide

0.29

207

Copper salts (water-soluble, except complex salts)

0.19

measures to ensure that no chemical leaks occur, and make an ef-

227

Toluene0.62

fort to find alternatives for and reduce the use of hazardous chemi-

283

Hydrogen fluoride and its water-soluble salts

2.47

cal, to its eventual disposal.

sion about whether or not to handle the chemical. We also takecals in products.

Clarifying the Chemicals Contained in Products

MSDS Database Management

In response to a number of international and domestic laws,

We are sharing MSDS safety information on all chemicals newly

regulations and related trends, TEL is working to clarify which chemi-

introduced at any plant by using a database hosted on TEL's intranet.

cals should be prohibited from use in products, such as asbestos,Because information searches can be conducted from all plants, any

mercury and cadmium, and which chemicals should be reduced,

user can determine the toxicity and hazard level for each individualsuch as lead and PVCs. Our goal is to properly manage the chemicalchemical, and make a decision on whether or not to use it.

substances contained in products.
We are also applying our chemical management experience togreen procurement, and improving efforts to select and determine
the amount of chemicals that should be controlled, and that are contained in the products we purchase.

Responses to the PRTR Law*
Japan's PRTR Law requires that companies report emissions
and transfers to products and wastes of Class 1 substances (354chemical groups in total) for those handled in amounts of 5 tonnes ormore during the first two years of the law's enforcement, beginningin 2001. TEL, however, is controlling and determining quantities of
0.1 tonne or more- smaller amounts than those required to be repor-

Screenshot of an intranet search

ted to the government. In other words, our restrictions are more
stringent than those required by law.

MSDS (Material Safety Data Sheet): Material information used to determine accurately the toxicity and proper handling of chemical substances.
PRTR (Pollutant Release and Transfer Register): A framework for overseeing chemical substances that may be hazardous to ecosystems
and human health, which is employed to identify and compile data, and report on the amount of chemicals used, the amount released
into the environment, and the amount contained in wastes transferred off-site.

17

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Management of PCBs

To illustrate the Saga Plant initiative, the graphs below compare

The Law Concerning Special Measure against PCB waste wasthe consumption of ammonia and hydrogen peroxide in fiscal 2000

enacted on June 15, 2001, and went into effect on July 15 of theand 2001.For both chemicals, the amounts used declined from fiscal

same year.

2000. We will continue to strive to minimize the amounts of chemi-This law requires Japan's national and prefectural governments

cals used and their environmental burdens.

to develop plans for handling PCBs in order to dispose of PCB waste,
and to undertake efforts to secure the proper infrastructure to dispose of PCBs, including the construction of treatment facilities. The
law also makes it mandatory for private entities that are storing PCB
waste to dispose of it within 15 years of the date the law went into
effect, and to report to the prefectural government every fiscal year

Consumption of Ammonia(kg)

Cumulative

ActualCumulative annual target(max.)

on the PCBs being stored and the status of disposal.
TEL is carrying out stringent control of PCBs in storage, and as

945

soon as a suitable treatment

945

810

method is available, will dispose

693
657

of these wastes.
540

The following table shows432

the status of storage and control

396
Monthly target(max.)

270of equipment containing PCBs.

198

PCB storage building

Storage and Control of Equipment Containing
PCBs (in Japan)-Tokyo Electron Group
Item

Number in storage

Transformers

2

Condenser

1

126
54

126
72

72

108

72

117

0

Apr May Jun Jul Aug Sep
2001* Monthly maximum target is 105 kg.

117

135

Jan
2002

Feb

36

36
Oct

Nov

Dec

0
Mar

Consumption of Hydrogen Peroxide(kg)

ActualCumulative
Cumulative annual target(max.)

Activities by Each Plant

2,200

The types and amounts of chemicals used are different for each

2,200

2,040
1,800

plant. Because of this, each plant is conducting its own controls
1,700

based on its actual use of chemical substances, including determin-

1,540
1,300

ing which substances to reduce and what the reduction targets

1,200

should be.

940

A subcommittee at the Saga Plant has created an organizational660

system for the proper management of chemical substances. Thissystem, which enables the plant to maintain the proper levels ofchemical stocks and supplies, was established during fiscal 1998
and continues today.

Monthly target(max.)

440
140
0

300

220

280

260

240
100

Apr May Jun Jul Aug Sep
2001* Monthly maximum target is 230 kg.

Oct

160
Nov

240
100
Dec

Jan
2002

160
Feb

0
Mar

PRTR Law: Law Concerning Reporting, etc., of Release of Specific Chemical Substances to the Environment and Promotion of the
Improvement of their Management

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

18

Environment, Health and Safety Management

Environmental Management Systems (1)At our manufacturing plants we are running environmental management systems based on ISO 14001.
At office facilities we have our own TEL Eco-Activity management systems.

Stance on Environmental Management Systems

Conceptual Map of Environmental Management Systems

We have developed environmental management systems (EMS)
based on ISO 14001 in order to move ahead steadily with our activiContinuous
improvementties to preserve the environment and reduce environmental burden.
Among our manufacturing plants, seven affiliate companies and sites
in Japan had obtained ISO 14001 certification by the end of November 1999. Today we are aiming for this certification at other plants,

Management review

including those overseas, and every year we create targets for rela-

Environmental policies •Environmental impact
and planningassessment•Legal requirements

ted activities and make ongoing improvements. In addition, we un-•Objectives anddergo third-party audits annually and update our systems according-•Environmental mana-

ly. At office facilities, we have introduced and are operating a simpli-

targets
gement program

Checking andcorrective action
Implementation andoperation

fied EMS that we call "TEL Eco-Activity," an independent environ-•Monitoring andmental management system within TEL and its group.

•Corrective and preventive action

Effectiveness of Environmental Management Systems

measurement•Structure and responsi-

bilities•Training, awareness andcompetence•Communication•Internal environmental audits•EMS documentation anddocument management

External Certification (ISO 14001)

At each sites, we determine the types of actual and potential en-

Certification Date

Expiration Date

Certification No.

vironmental impacts that arise from various aspects of business ac-

Sagami

December 10,1997

December 10, 2003

EMSC-1110

tivities and product manufacturing and services, then evaluate these

TohokuFebruary 19, 1998

February

19, 2004

EMSC-1118

Saga

March

12, 1998

March

12, 2004

EMSC-1119

Kumamoto/Koshi

March26, 1998

March

26, 2004

EMSC-1120

environmental dimensions and set clear objectives and targets in or-

YamanashiMay15, 1998

May

15, 2004

EMSC-1124

der to reduce the environmental impact. We prepare environmental

Ozu

August27, 1999

August27, 2002

EMSC-1414

environmental impact assessments. Next, we determine the primary

Plant

management programs (EMP) that include clear responsibilities, aswell as procedures and schedules, and then supervise, monitor andrecord the key operational points.

Plants Certified under ISO 14001
and Running TEL Eco-Activities

ISO 14001-certified
plantsTEL Eco-Activity

Introduction of TEL Eco-Activity
Environmental initiatives have generally been implemented firstat manufacturing plants, which started obtaining ISO 14001 certifica-

Tokyo Electron
Sapporo Limited

North Americation in 1997. At our Akasaka, Fuchu, Yokohama, Osaka, Sapporo
and Narita office facilities we have instituted our own independent

Tokyo Electron Tohoku
LimitedTohoku Plant"TEL Eco-Activity" environmental management systems based on ISO
14001. During fiscal 2001, besides starting an environmental educa-

Tokyo Electron Arizona, Inc.
(certification pending)tion program for 2,500 employees, we also established guidelines
and carried out environmental impact assessments. In April 2002,

Tokyo Electron AT Limited
Yamanashi Plant(Fujii and Hosaka)

Tokyo Electron Kyushu Limited
Saga Plant

we began operation of TEL Eco-Activities. These activities are still
very new, and no specific issues have yet to emerge, but after a oneyear trial we plan to make improvements to boost the effectiveness ofthe systems.

Tokyo Electron Limited
Osaka Branch Office
Tokyo Electron Kyushu
LimitedOzu Plant
Tokyo Electron Kyushu Limited
Kumamoto Plant
Tokyo Electron Kyushu
LimitedKoshi Plant

19

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Tokyo Electron Limited,
Fuchu Technology CenterTokyo Electron
Logistics Limited,
Narita Logistics CenterTokyo Electron Limited
Akasaka, World
Headquarters

Tokyo Electron Device
Tokyo Electron EE Limited Limited, Yokohama
Head Office
Sagami Plant

Organizational Structure for Environmental Preservation
In TEL we have developed an organizational structure to promote

TEL Group's Organizational Structure for Environment,
Health and Safety (EHS)

environmental and safety issues, with the president of Tokyo Electron

President and CEO

Limited as the top person responsible.

Corporate EHS Committee
This committee develops guidelines and actual proposals relating to the environment, health and safety management activities of
TEL and its group, as well as proposals, considerations and decision-

Corporate EHS Committee

making on targets and activity plans. The president of Tokyo Electron(Members: President of
eachmanufacturing companies)

Limited serves as the committee chair and provides common direction and problem solving on environmental, health and safety issues

Tokyo Electron
Officer in charge ofenvironmental affairs

Chair of Committee:
President of Tokyo
Electron Limited

for all group companies.
Environment, Health and
Safety Center

Environmental Health and Safety Committee
The Tokyo Electron Group Health and Safety Committee
The decisions of the Corporate EHS Committee are implemented
in detail by the Environmental Health and Safety Committee, whose
members are primarily theEnvironmental Management
Representatives from each

Members: Environmental
management representatives from manufacturing
plants, representatives
from subsidiaries

TEL Group Health and
Safety Committee

Worldwide Product
EHS Committee

Members: Secretariats of theregional EHS committees,
representatives fromsubsidiaries

Members: Representatives from eachBusiness Unit

Environmental management representatives from eachmanufacturing plant

Environmental management representatives from each
office facility

Environmental management committee
at each manufacturing plant

EHS committee at
each office facility

EHS Committee

manufacturing plant, and by
the Tokyo Electron Group
Health and Safety Committee, which also covers officefacilities.

A meeting of the Environmental
Health and Safety Committee

Worldwide Product EHS Committee
The Worldwide Product EHS Committee is in charge of common

Product EHS Committees of eachBusiness Unit

environmental measures relating to semiconductor production equipment and its parts manufactured and sold by TEL, as well as the
manufacturing of flat panel display production equipment and its
parts. A corporate officer serves as the chair of the committee, which
considers and makes decisions on necessary policies and measures.
For environmental problems relating to individual products, theProduct EHS Committee ofSubcommittees

each Business Unit is pro-•Chemical substancesmoting improvements in the•Waste control

Subcommittees
Environment
Safety•Energy and resource

related design and manu-

conservation

facturing, marketing and

Health•Environmental impact

assessment

service.

•Product review

A meeting of the Worldwide Product EHS Committee

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

20

Environment, Health and Safety Management

Environment, Health and Safety Management (2)Environmental Auditing

T O P I C S

We are regularly implementing third-party audits by external certification bodies, and we are implementing our own internal environmental audits at each plant that has an environmental management
system. The results are reported to the top management at eachplant, after which reviews and system improvements are established.
A system to certify auditors for the internal audits is in place at each

External Audits
Plants that have obtained ISO 14001 certification
undergo an annual audit from an external certification
body. Measures are taken immediately to correct any
deficiencies. Furthermore, other plants and committees also check to ensure that they do not have similar deficiencies.

plant. We are considering the creation of a framework for peer audits(mutual audits within TEL) starting in fiscal 2002, in order to rectify
deficiencies and promote parallel adoption of good practices

Examples of Issues Arising from 2001 External Audits
Plant
Yamanashithroughout TEL.

Plant

Internal Environmental Audits

TohokuPlants that have established an environmental management sys-

Plant

tem are conducting internal environmental audits on a regular basis.
After obtaining certification, each plant has continued to maintain excellent standards in overall assessments, indicating that these systems are steadily taking root.
Internal Environmental Audits (Fiscal 2001)
Plant

TohokuSagami

Yamanashi

Saga

Kumamoto/KoshiOzu

Month of audit(1st audit)

Nov '01

Oct '01

Oct '01

Apr '01

Oct-Nov '01

May '01

Month of audit(2st audit)

Feb '02

Aug '01

Month of audit(3st audit)

Dec '01

Number of Certified Environmental Auditors in the TEL Group(as of April 2002)
Saga

Kumamoto/Koshi

Ozu

Total

46

27

33

24

153

2

109

8

54

26

217

8

155

35

87

50

370

Plant

TohokuSagami Yamanashi

Chief auditors

17

6

Auditors

18

Total

35

Saga Plant

We are complying with all relevant laws and regulations, and, in• Deficiencies in implementation of general education.
• Shortcomings in checking reviews of environmental

impact assessments.
• Environmental management program notprepared by the resource conservation committee.

Monitoring of outflow from wastewater treatment
facilities is being conducted here every two months,
based on a pollution prevention agreement with thelocal city of Esashi in Iwate Prefecture. All amounts
measured in fiscal 2001 were within the limits required under relevant laws
and regulations. In addition,
regular monitoring of exhaust from boilers is being
done in accordance with the
Clean Air Law, and these results have also been favorable.
Wastewater treatment facilities

Measurement Results of Wastewater
Treatment Facilities
Standard

97

98

99

00

01

6 8.4
pH

6.4
7.3

6.6
7.7

6.6
7.4

6.7
7.4

6.8
7.5

BOD (note 2)

120
mg/l

2.9

0.8

0.5

1.4

0.8

SS (note 3)

150
mg/l

Concentrations

19

less than less than less than
1.0
1.0
1.0

5

Colon bacilli
2,300
less than less than less than less than less thanparticles/cm3
count
30
30
30
30
30

fact, have established stringent independent standards that exceed

Hexaneextracts

3
mg/l

1.6

legal requirements. During safety inspections we check on the man-

Fluorinecompounds(note 4)

15
mg/l

5.1

agement of chemical substances, water pH levels and other items,

Note 1: For hydrogen ion concentrations, this table shows annual maximum and minimum values. For other items it shows the annual
maximum.
Note 2: Biochemical oxygen demand, an indicator of pollution in rivers
and other water bodies.
Note 3: Suspended solids. Small particulate matter floating in water.
Note 4: The standard for fluorine compounds was 15 mg/l until the endof December 2001, and 8 mg/l thereafter.

and we are meeting high standards through the cumulative results ofour day-to-day efforts.
During fiscal 2001, no environment-related accidents, violations,fines or complaints occurred, and there were no related legal actions.

21

for energy conservation patrols.
• Suitability of standards to select suppliers not adequately clear.

Monitoring of Wastewater Treatment-An
Example from the Tohoku Plant(note 1)

Complying with Laws and Regulations

Main issues• Inadequate rotation of the personnel responsible

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

less than less than less than less than
0.5
0.5
0.5
0.5
6.9

4.0

3.9

6.9

Environment, Health and Safety Management

Environmental Education
Representatives from office facilities in each region of Japan are working together to issue
an environmental education textbook.
At each manufacturing plant, we are conducting special programs for personnel
whose work involves important environmental aspect.

Stance on Environmental Education

Environmental Education at Manufacturing Plants

At TEL, we believe that if all personnel share a similar knowl-

At manufacturing plants, we consider various scenarios in orderedge about the environment, and if we can raise that environmental

to prevent accidents that might pose major environmental threats,awareness, each person can promote more effective activities in his

and we implement programs through environmental education andor her own work in order to reduce environmental impacts. We in-training to ensure that accidents do not occur. When new employees

clude environmental education as a key topic in our training program

or workers join the company, we provide education so that they canfor new employees, and we also have special programs for directors,

help achieve the local environmental objectives and targets. We also

management personnel, and internal auditors.

make it mandatory for certain workers (those whose work involves
important environmental dimensions) to have education, training andEnvironmental Education at Office Facilities

legally recognized certification for each registered facility or process.

During fiscal 2001 we started a common environmental educa-

In addition, when building new facilities or undergoing renovations,tion program targeting all personnel at six office facilities, including

and when starting to use newsales, administrative employees, field engineers, part-time cafeteria

chemical substances, we holdemployees, and temporary cleaning employees. The trainers weremeetings to explain MSDS in-

mostly personnel from the regional EHS committees. Teaching mate-formation and the use of pro-rials consisted of original texts developed by a working group madetective equipment. We also

up of representatives from each region. During fiscal 2001, about

conduct routine emergency-re-

2,500 employees participated in the program.

sponse trainings.

Training in the use of silane gas(a flammable gas used in
the manufacture of semiconductors)

T O P I C S

Number of Certified Environmental Education
Trainers and Training Frequency at Office Facilities
Location

Number of trainers

Frequency

Fuchu

47

24

Akasaka

24

21

Osaka

6

13

Yokohama

4

5

Sapporo3

9

Narita

1

5

Total

85

77

Green Purchasing
We are promoting green purchasing with our
Green Procurement Guidelines, which were createdin January 2001 and distributed to suppliers. We define "green products" as products with designs thattake into account the issues of resource conservationand natural resource protection, environment, healthand safety, and energy conservation. Supplies andoffice materials for TEL are purchased through Tokyo
Electron Logistics Ltd., making it possible to determine accurately the total amount of supplies and materials purchased. In fiscal 2001, 22% of all our purchases were green products. All copy paper, business cards, company brochures and catalogs are
made of recycled paper, and this environmental report, too, is made using 100% recycled paper.

Green Purchasing by TEL
Green products:
21.88 million yen (22%)
Certificate for completion of theenvironmental education trainer's program
Environmental education lecture

General products:
79.52 million yen (78%)

A group discussion(Osaka Branch office)TOKYO ELECTRONENVIRONMENTAL REPORT 2002

22

Environment, Health and Safety Management

Environmental Accounting
We are accurately determining the costs and benefits of environmental activities
and using this knowledge to better manage the company.

Stance on Environmental Accounting

Environmental Preservation Costs

Environmental accounting is a management tool that helps todetermine the costs and benefits of a company's environmental ac-

The costs of environmental preservation (investments and expenses) for fiscal 2001 can be seen in the table below.

tivities. At TEL we have introduced an environmental accounting sys-

Data was collected for TEL facilities in Japan. Depreciation on

tem to determine quantitatively the costs of the environmental as-

investments in facilities is calculated as an expense beginning withpects of our business, and we are using this information to guidethe investments made in fiscal 1999.

corporate activities.

In the environmental accounting for fiscal 2000, theFiscal 2001 is the third year since the introduction of the envir-"upstream/downstream costs" primarily covered office facilities, andonmental accounting system, and we have made greater efforts this

only a portion of products were covered under research and develop-

year to improve the accuracy of information about investments andment costs. As a result, a complete assessment was not possible

environmental activity expenses, as compared to fiscal 1999 (a trial

during that year. For fiscal 2001 however, we attempted to includeyear) and fiscal 2000 (when we worked to expand the range of data

all facilities in Japan in the calculations, as well as all environmental

collected). Our aim for future years is to make our environmental ac-

costs and cost categories. As a result of this more comprehensive

tivities sustainable.

approach, the research and development costs calculated for fiscal

Our environmental accounting complies with the Environmental

2001 grew considerably, to 1.985 billion yen.

Accounting Guidelines (2002 Edition) and Environmental Accounting
Guidebook from Japan's Ministry of the Environment.

TEL's Environmental Preservation Costs in Fiscal 2001
Locations covered: All TEL facilities in Japan (Sapporo, Tohoku, Miyagi, Akasaka, Fuchu, Yokohama, Sagami, Yamanashi [Hosaka, Fujii], Osaka, Saga, Kumamoto, Koshi, Ozu)
Period covered: April 1, 2001 to March 31, 2002
Units: Million yen
Classifications of Environmental Costs

Details of main initiatives(facilities, supplies, leases, depreciation, maintenance, etc.)

1. Business area cost
Itemization

Expense amount

91.4

774.1

1.1 Pollution prevention costs

Air pollution, water pollution, soil contamination, etc.

19.0

126.1

1.2 Global environmental costs

Climate change prevention, ozone layer depletion prevention, etc.

44.2

67.6

1.3 Resource circulation costs

Efficient use of resources, waste reduction, etc.

28.1

580.3

2. Upstream/downstream costs

Green purchasing, green procurement, etc.

0.0

72.6

3. Management activity costs

Environmental education, monitoring and measuring
environmental impacts, etc.

0.0

411.0

4. Research and development costs

Product R&D, etc.

0.0

1,985.0

5. Social activity costs

Planting trees and vegetation, supporting local environmental
activities, information provision, etc.

0.0

42.9

6. Environmental damage costs

Repairing damage to the natural environment, etc.

0.0

0.0

7. Other activities

other

0.0

0.0

91.4

3,285.8

Total

23

Investment amountTOKYO ELECTRONENVIRONMENTAL REPORT 2002

Major activities

Effects of Environmental Preservation Activities

Below are several examples of the TEL's major activities.

The results of calculations of economic effects relating to environmental preservation activities are shown in the table below.
We consider fiscal 2001 to be a trial for efforts to determine theBusiness area costs
Installation of abatement equipment, wastewater neutralizationequipment maintenance expenses, upgrades to prevent oil spills,
etc.
Installation of inverters for lighting, installation of timers to control
Global environmental costs lighting and air conditioning, installation of equipment for removing
chlorofluorocarbons, etc.
Maintenance of organic waste disposal equipment, expenses inResource circulation costs volved in reducing and disposing of waste, recycling of liquid
wastes, etc.

Itemization

Pollution prevention costs

effects and benefits of environment preservation activities. The economic effects of these activities were calculated for four of the TELGroup plants in Japan: Tohoku, Miyagi, Yamanashi (Hosaka and Fujii)
and Saga.
Concerning categories of environmental accounting, this report

Upstream/downstream costs

covers only the economic effects of environment preservation activi-

Hybrid car lease and maintenance costs, use of kenaf paper cups, costs of converting to recycled paper, purchase of environmentally-friendly products, etc.

ties. For the environmental effects based on physical quantities,
please refer to the explanation of the Eco-Factory (pages 13 to 18 ofManagement activity costs
Environmental monitoring expenses for air/water pollution, soil contamination, etc., costs for
preparing environmental education materials, personnel costs for environmental education, etc.

this report).

Research and development costs
Research and development for reducing environmental impacts, etc.

Social activity costs
Planting of trees and vegetation, etc.

TEL's Economic Effects ofEnvironmental Preservation Activities
Locations covered: Four locations of TEL in Japan(Tohoku, Miyagi, Yamanashi [Hosaka, Fujii] and Saga)
Units: Million yen
Period Covered: April 1, 2001 to March 31, 2002
Category

Description

AmountCost reduction

Reduction of power consumed(power savings
from stopping boiler operation during summer
and scheduled stoppages)

70.2

Reduction of water consumed

3.2

Reduction of paper consumed

13.3

Reduction of chemicals used in recovery ofpure water, reduction in the use of heavy oil,reduction in the use of liquid nitrogen

17.5

Reduction in the amount of disposed waste

5.4

Cost reductions from other effects

1.5

Breakdown of Investment Expenditures

Pollution
prevention costs:
20.8%

Resource
circulation costs:
30.8%

Global environmental
conservation costs:
48.4%

Cost reduction
Total cost reduction

Breakdown of Expenses
Upstream/downstream costs 2.2%
Pollution prevention costs 3.8%

Sales of recycled (salvaged) materials
Total effect

111.3
0.5
111.8

Global environmental conservation costs 2.1%
Social activity costs 1.3%

Reduction of power consumed

Management activity
costs 12.5%

For the effective utilization of management resources, it is also
Resource circulation
costs 17.7%

R&D Costs
60.4%

important to quantify improvements in environmental performanceand to determine their costs and effects. In the future, we aim to improve the accuracy of our calculations of the economic effects of environmental preservation initiatives.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

24

Environment, Health and Safety Management

Health and Safety
Health and safety form the very foundation of work practices,
and are driving forces for the betterment of society.
We treat health and safety as top priorities in our corporate activities.

Stance on Health and Safety

Initiatives to Improve Safety

Aware that the health and safety of everyone connected to TEL

In order to improve safety and prevent accidents, we are actively(including employees and customers) should always come first, inand continuously carrying out various initiatives, including studies,

November 1998 we established the TEL Group Safety & Health Cre-

analysis and preventative measures. Our approach to improve safety

do. In addition, to further fulfill our social responsibilities as a corpor-

involves the cooperation of external third-party organizations to con-ation that aims to be a globally excellent company, and aware thatduct studies and analysis of both human and equipment-related fac-safety, health and the environment are vital issues, in December

tors, and then taking measures to prevent accidents.

1999 we added a section entitled "Safety, Health and the Environ-

Human Factors

ment" to our Management Philosophy

In cooperation with the Nippon Human Factor Institute,headed by Dr. Isao Kuroda, we are carrying out studies andanalysis in order to prevent the recurrence of accidents
caused by human factors. We are focusing on the backgrounds and common factors ofaccidents and zeroing-in on
software-related problems, such as deficiencies in proceduralmanuals, hardware-related problems, including the failure towear protective equipment, and problems related to the passage of time. In addition, we are looking at the effects of potential problems related to human relations, such as employees interactions with supervisors and colleagues, with a focus on people involved in incidents.
The TEL Group is not simply implementing measuresthat arise from isolated cases, but is developing preventative
safety measures centered on the major potential common
factors, with a focus on people.

The TEL Group Safety & Health Credo
Corporate directors and employees have the responsibility to act
with consideration for health and safety in mind at all times when
performing their work. Specifically, this means that profits and deadlines should never be prioritized in such a way as to compromise thesafety of human life, or the level of safety of facilities and equipment(sold to customers, or used within the company).

Summary of Safety and Healthfrom Our Management Philosophy
Directors and employees must give top priority to health andsafety and be well aware that health and safety at work are prerequisites for the betterment of society. In addition, they have the duty toEquipment-related Factors

ascertain problem areas relating to health and safety in the course ofThrough cooperation with Sato R&D, headed by engineer Kunihito Sato, we are conducting studies and analysis
of risk assessment in order to prevent accidents that arise
from mechanical factors. Through this work, we have identified common risk factors, making it possible to eliminate themost serious risks. In order to eliminate the sources of thelargest predictable risks, we are applying safety measures toequipment-side operations.
To reduce equipment-related risks, we consider implementing measures in the following order: (1) improving fundamental
conditions for safety; (2) maintaining and protecting safety; and,(3) providing information about proper equipment use.
Using the ISO 13849 international equipment safety
standards of risk evaluation, all accidents that have occurredin TEL would be classified in risk category "1," which is thelowest risk level.

business activities, and actively and continuously make further efforts
to improve safety and advance health issues.

T O P I C S

Activities at the Yamanashi Plant
The awareness that "It is you who protects yourown health" is extremely important in terms of maintaining health. However, equally important are institutional efforts for maintaining health in the workplace,where we spend more than one third of each day.
The Yamanashi Plant is developing concrete policies in order to advance further activities that maintain and improve both mental and physical health. At
present, we are creating the platform for those activities.

Risk Assessment Procedures at TEL
StartEstablish
methods foruseof equipment

Identify
sourcesof risk

Reduce risk

25

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Estimate andevaluate levelsof risk

Assess

DisplayremainingriskStance on Safety Education

T O P I C S

We are conducting safety education based on the principle of"providing necessary education to people who need it". All personnel

TEL Receives Intel's SCQI Award

who work inside and outside the company, including those at compa-

Tokyo Electron Limited was awarded Intel's Supplier Continuous Quality Improvement (SCQI) Award in fiscal 2001, for the second consecutive year. This is thehighest award of distinction given to suppliers that strive
for excellence in providing products and services.
One of the many factors considered for theaward was safety, including continuous safety leadership, achievement of zero accidents in fiscal 2000
and 2001, guidance given to other suppliers, andsafety inspections by top management.

nies that TEL collaborates with, acquire basic knowledge when theyjoin the company about safety policies and MSDS information, healthmaintenance, blood contamination, etc.
Employees who work in factories of TEL and its customers receive not only basic training, but also acquire basic knowledge about
working in high places and enclosed spaces, the handling of chemical substances, and the prevention of electrical risks. These represent an approach to risk assessment* that is one step beyond simply
predicting risks. In addition, refresher courses are conducted tomaintain high levels of awareness and knowledge.
Details of TEL Safety Education
Education
Program Name

Participants

OutlineBasic Safety
Training

All employees

Employees acquire basic knowledge about TEL's safety principles, safety laws, work safety procedures, andbasic health maintenance information. A refresher
course is required within three years, to provide up-todate information about new safety rules.

Advanced
SafetyTraining

Workers at
TEL Groupand customer
plantsTraining includes risk assessment methods and safe
habits for each type of work. Practical training is doneusing actual safety gear for workers and safety equipment. The training is valid for one year; a refresher
course is required within one year to provide up-todate information about new safety rules.

Safety Training
TEL engineers
for Employees
sent outside Japan
who Visit andWork Outside Japan

Employees learn about the safety laws and regulations
and work rules that apply when engineers are sent fromJapan to work at TEL customer plants outside Japan.

Safety Training
for Employees
Stationed atSpecific
Customers'
PlantsEmployees
working
at customers'
plantsSpecial safety training is carried out, as necessary, before employees are sent to work at plants run by TELGroup customers.

EquipmentSpecific
Safety Training

Engineers foreach type ofequipment

Safety training for engineers on each specific type ofequipment (TEL products)

Occupational Health Management for VDT* WorkWe are complying with the Guidelines for Occupational HealthManagement relating to VDT Work, released by Japan's Ministry of
Health, Labour and Welfare in April 2002. We plan to establish systems guided by each region's health and safety committee in order tocorrectly determine the health conditions of employees and conduct

SCQI Award ceremony

Emergency First-Aid Training
All employees in TEL receive emergency first-aid
training organized by each region's health and safetycommittee.
In addition, personnel who work in the clean
rooms are required to take advanced safety trainingclasses, and get special education for accidents
caused by electricity. The use of electricity involves
the risk of electric shock. The severity of injury fromelectric shock is generally much greater than fromother occupational hazards, and in some cases it isfatal. It is critical to administer artificial respiration andcardiac massage promptly in order to prevent various
functional impairments ofthe person affected. Depending on the situation at
the actual scene of an incident, quick responses fromcolleagues who arepresent
can greatly increase thechances of saving a victim's Scene from emergency
first-aid training
life.

proper health management at the earliest possible stages. At Tokyo
Electron Sapporo Ltd., even before the guidelines were introduced,
all employees were undergoing proper annual VDT health checkups.
Risk assessment: Identifying dangerous conditions and unsafe activities that could lead to accidents; following risk assessment, measures are then taken to prevent accidents.
VDT (Visual or Video Display Terminals): Equipment consisting of output devices, such as flat panel displays that show information, combined with input devices, including
keyboards.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

26

Environment, Health and Safety Management

Societal Contributions
Based on our principle of respect for humanity, we strive to preserve the environmentand contribute to society, in cooperation with governments and local communities.

Stance on Societal Contributions

T O P I C S

At the core of TEL's business is the respect of humanity that has
been part of the corporate philosophy since the company was estab-

Tokyo Electron America's Societal Contributions

lished. The Tokyo Electron Group Credo and Principles on Environmental Preservation state, "TEL actively participates in environmental
protection activities practiced by our customers, suppliers and communities." Each company and facility in TEL undertakes a variety ofactivities to preserve the environment and contribute to society, whilebuilding relationships of trust with governments and local communities. In the future, we would like to advance further in this along withcustomers and society direction along with customers and society.
As we expand our activities as a part of our corporate mission.

Sponsorship for the Mount Fuji Restoration Campaign

Support for Nature Protection
As a part of its support for environmental protection activities, Tokyo Electron America, Inc. (TEA) became a sponsor of a permanent research and educational display at the Lady Bird Johnson Wildflower
Center. For the past twenty years, the Center has
been introducing people to the beauty and richness ofthe natural world and conveying the message of theneed to preserve wild plants and ecosystems.
In addition, employees of TEA participated in
Wildflower Walk 2002, organized by the Center. Donations collected are used for environmental education
and restoration of natural landscapes.

TEL took up the challenge of helping to preserve the environment of Mount Fuji by becoming a sponsor of the "Live with Mount
Fuji for a Week" event organized by the Mainichi Shimbun newspaper. This event was held as a part of the "Mount Fuji Restoration
Campaign," which aims to restore the natural conditions of thismountain, a symbol of Japan's spirit and culture. A variety of eventswere held, including concerts and lectures, and the profits were used
to purchase and install bio-toilets that use cedar chips in an effort toEnergy Green Choice Champion

help preserve the environment and beauty of Mount Fuji.

TEA, Inc. registered for the Energy Green Choiceprogram of Austin Energy, a local power utility in
Texas. As a "Green Choice Champion," TEA has become a pioneer in purchasing clean and renewable energy.
In the autumn of 2001, TEA made an agreement topurchase 100% of the electricity it uses from renewable energy sources. This was a first for any high techcompany in Austin. Each year over the next 10 years,
the company will purchase about 6.5 million kWh ofelectricity generated from wind power, solar power,
and methane gas generated from landfills. This isequivalent to the electrical consumption of about 550
households.

Assistance for Rescue Operations
TEL donated approximately $250,000 in emergency relief funds
to the American Red Cross for victims of the terrorist attacks that occurred in New York on September 11, 2001. In addition, employees
and families of our American subsidiaries donated a total of $26,570
to the American Red Cross and the United Way September 11th
Fund, and Tokyo Electron America, Inc. made a matching donation.
In total, TEL donated more than $300,000 for relief efforts. Few
companies headquartered outside the United States made donations
on this scale, and the American Red Cross sent a letter of appreciation to TEL headquarters.
Through such donations, wehope that the hardships facedby the victims can be reduced, even if only in a small
way.

Certified as an Energy Green
Choice Champion
Letter of Appreciation from the American Red Cross

27

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Societal Contributions of Our Major Plants in JapanT O P I C S

At each plant, a variety of activities are being conducted through close

Participating in Paper Recycling
System Design–the Tohoku Plant

ties with the local community.
Tokyo Electron Limited, Fuchu Technology Center••In the southern region of Iwate Prefecture, local
governments (regional business promotion bureaus)
are playing a pirotal role in tackling the issue of paper
recycling. They have created a committee to study resource-recycling systems with the participation of paper manufacturers, waste treatment businesses, andother local corporations. Tokyo Electron Tohoku Limited,Tohoku Plant participated in the paper recycling system
sub-committee and cooperated tohelp develop a paper recycling system.
During fiscal 2001, the company carried out a trial paper recycling initiative for three months during a test of the system, and helped
to identify problem areas. This project started full-scale operations inPamphlet promoting
fiscal 2002.

Blood-donation drive in cooperation with the Japanese Red Cross Society
Donations of used postage stamps to the Fuchu Volunteer Center (to raise
funds for facilities at a home for the aged)•

Cooperation with and donations for the Fuchu
City Welfare Society•

Support for the Accident Prevention Campaign
organized by Asahi Photo News•

Participation in outdoor activities for the
National Traffic Safety Campaign•

Support for the First Joint Concert of Fuchu
Citizens and the Tokyo Fire Department Band,

Sponsorship for the Fire
Department's Joint
Concertorganized by the Fuchu Fire Station
Tokyo Electron AT Limited, Yamanashi Plant (two facilities)•

Participation in model project to prevent illegal dumping•

Neighborhood beautification in the Fujii and Hosaka areas•

Environment and Safety Award from the Labour Standards Inspection Office•

Summer work-study programs for local students

recycling of office paper

Tokyo Electron Kyushu Limited, Kumamoto and Koshi Plants•

Garbage clean-ups and beautification in areas around the plants during
Environment Month in June each year•

Factory tours for local students•

Support and cooperation for local events and celebrations•

Blood-donation drive in cooperation with the Japanese Red Cross Society

Blood-donation drive in cooperation•

Cooperation in local eventswith the Japanese Red Cross Society

•

•

•

Cooperation and donations to Earth

Donations and collections

Week Kumamoto, which organizes No(public welfare organizations, Akaihane

Car Day and symposiums to protect the
global environment

Community Chest charity campaigns,
welfare societies, fire brigades, andClean-up activities
Environment and Safety Award fromthe Labour Standards Inspection Officesports associations)•

Cooperation with Akaihane Community

Chest charity campaigns
Tokyo Electron Kyushu Limited, Saga Plant

Tokyo Electron Tohoku Limited, Tohoku Plant
Participation in the Iwate Prefecture South Region Resource Recycling•

Clean-ups and weed removal in public parks near the plant

System Project, aiming for zero emissions at the regional level•

Promotion of campaign to stop unnecessary idling of vehicle engines

Participation in the Green Campaign of the Esashi Industrial Park Occupant•

Blood-donation drive in cooperation with the Japanese Red Cross Society

Committee•

Donations of used postage stamps and telephone cards

•

•

•

Awareness campaign to stop unnecessary idling of vehicle engines•

Factory study and tour programs for technical college and high school students•

Blood-donation drive in cooperation with the Japanese Red Cross Society•

The Saga Plant has been actively working to promote recycling and reduce theamount of garbage produced, and since1998 has been recognized as an Eco
Office by Tosu City. The plant undergoes regular inspections and aims tomaintain this certification.

Other activities include donations to the Esashi City Welfare Society andimplementation of traffic safety activities
Eco-Office Letterof Commendation

Eco Office
Certificate

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

28

Environment, Health and Safety Management

Environmental Communication
We believe that efforts to spread the word about our Credo and Principles on Environmental Preservationand the status of our environmental initiatives will add further impetus to environmental activities.

Stance on Environmental Communication,
Publishing of Environmental Reports

Product and Environment Seminar for International SEMATECHInternational SEMATECH is an industry association of device

TEL is actively working to promote health and safety and mini-

manufacturers that have business activities in the United States,

mize the environmental impacts arising from its business activities. In

Europe, Korea and Taiwan. It conducts many activities in the area oforder to further boost the effectiveness of future activities, it is es-

environment, health and safety, and has considerable influence on

sential that everyone involved in the companies' activities dissemin-manufacturers. TEL has introduced the life-cycle assessment (LCA)

ate and share information to the greatest extent possible and work

approach in its operations, analyzed the environmental dimensions of

toward better communication. At TEL, we have been striving to pro-products, and is linking this knowledge to environmental strategies.

vide information by publishing environmental reports since the year

We presented a well-received seminar on products and environ-

2000.

mental strategies in August 2001 for International SEMATECH,
and plan to offer the association a seminar on the LCA approach in
2003.

EHS Seminars in Taiwan
In November 2001, we offered the 2001 TEL Seminar on Environment, Health and Safety in Hsin-Chu for our Taiwanese customers,
Environmental Report 2000

Environmental Report 2001

in particular for the personnel in charge of EHS issues. TEL makes
health and safety a top priority, not only for our own employees, but

Information by Internet

also for our customers.

Anyone can access our environmental reports via TEL website. We
also plan to release up-to-date information via the Internet about environmental accounting.

In-House Community News Magazine andPublication of the EHS Times
In order to promote higher awareness and more action on EHS
issues, we carried a series of articles, entitled "Welcome to EHS," in

http://www.tel.co.jp/index_e.html

SEMI Akira Inoue EHS Award

our in-house community news magazine. In the articles, staff of the
TEL Environment, Health and Safety Center covered key topics, such

Every year in December, Semiconductor Equipment and Materi-as environmental preservation activities and environmental reporting,als International (SEMI), a global industry association, awards The

safety education, and the importance of reporting accidents. In addi-

Akira Inoue Award for outstanding achievement in environmental,

tion, the Center prints the EHS Times every two months. Besides in-health and safety in the semiconductor industry. It goes to the person

troducing the discussions of the EHS Committee in understandable

or team in the semiconductor industry that has made the greatest

terms, the publication also runs a column carrying exchanges ofcontribution worldwide to the advancement of environment, healthopinion on EHS topics.

and safety during the year. This award was created to commemorate
the late president of TEL, Akira Inoue, who worked actively to promote environmental, health- and safety-related activities throughout
the industry. The first award was presented in 2000 to Pasquale Pistorio, the President and Chief Executive Officer of STMicroelectronics,
a joint Italian-French semiconductor manufacturer. He worked tirelessly for years to convince corporate management to improve EHS
principles and practices around the world. In 2001, Craig R. Barrett,President and Chief Executive Officer of Intel Corporation, received
the award.

29

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Environmental series
in the in-house community
news magazine
AEOLUSEHS Times

Site Report: Yamanashi Regional Office
Here we will introduce examples of initiatives at one particular plant. This time wereport on the activities of the Yamanashi Plant, comprised of the Fujii area, whichprimarily manufactures products, and the Hosaka area, which primarily conducts
research and development for semiconductor processes.

Hosaka area
Fujii area

Environmental Initiatives
The Yamanashi Plant has two dimensions, the production and as-of the semiconductor manufacturers. However, because research and de-sembly of products, and the research and development of semiconductor

velopment require copious amounts of electricity and water, the environ-processes. The Process Technology Center at the Hosaka area, which ismental impact is large compared to our other business sites.

representative of such facilities in the group, conducts research and de-

Taking the opportunity presented during ISO 14001 certification invelopment related to next-generation semiconductor processes, and sup-May 1998, the Yamanashi Plant started to tackle environmental activities

ports the making of products that help reduce the environmental impact

with the participation of all employees.

Environmental Management Activities in 2001
Power Consumption

EHS Management System

Chemical Substances

During fiscal 2001, we launched full-In fiscal 2001, we succeeded in re-

We are managing chemicals accord-scale operation of the EHS Management

ducing our electrical consumption to lessing TEL's Chemical Management Regula-

System, which combines the environmen-

than 90 percent of our target for the peri-

tions. When new chemicals are to be intro-

tal dimension with worker health and safe-

od. This was due to systematic efforts toduced, an audit is conducted in advancety. We are improving operation of the sys-

shut down facilities during long vacations,using TEL's Chemical Substance Auditing

tem by correcting deficiencies identified

and a reduction in production due to the

Guidelines. In fiscal 2001, we carried out

during audits, such as training-related

global downturn in the information technol-

voluntary operation of the PRTR system,

problems that arose when new staff wereogy industry. The net power consumption

and organized a hearing to study the topic

hired due to increased production.

increased, however, compared to fiscalof reducing our releases of pollutants.

2000, due to a new building operation at
Waste

the Fuji area, and the shift to 24-hour-a-

We are trying to separate and recycle

day operation for Clean Room #6 at thewastes thoroughly, but because of daily

Hosaka area. It is, therefore, important for

24-hour operations of the Hosaka facility

us to continue efforts for energy conserva-

clean room in fiscal 2001, the amounts oftion in the future.

discharged substances such as hydrofluoric acid, waste acid and waste alkali havePower Consumption Trends(MWh)

Hosaka area
Fujii area

increased.
61,501

36,411087,786

74,06065,67238,35041,53025,09027,32232,53098

99

00

Fiscal 2001
power
consumption
target:45,74099,585MWh

Use of PRTR Target Substances (fiscal 2001)
Substance
Ethylene
GlycolAmount used

Comments

1,246 kgNo releases to air,water or soil

Copper salts(water-soluble,
except complex salts)

191 kgNo releases to air,water or soil

Hydrogen fluoride andits water-soluble salts

1,335 kg

Mostly disposed
as waste

Manganese andrelated compounds

UnderreviewMore than 100 kg

Note: At the Yamanashi plant, chemical substances for which
the amount used is 100 kg or less are not subject tocontrols and reporting under the PRTR Law.

42,04601

Future Issues
In the future, we intend to use the fis-

tem that takes its guidance from the Minis-tion of electricity, gas and water to levels

cal 2001 quantitative data on waste emis-

try of Economy, Trade and Industry. In ad-

below those of fiscal 2001, we will also

sions and energy consumption to expand

dition, a future safety goal will be to im-

strive to cut the amounts of greenhouse

our efforts to reduce net amounts. Since

prove the control of chemical substances

gases and ozone depleting substances re-this plant has been designated as an ener-

and the management of environment-rela-leased, and work to make products thatgy management factory, we will work to

ted facilities.

can help to reduce the environmental im-

develop a new energy management sys-

As we continue to reduce consump-pacts of our customers.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

30