Product-related Initiatives for the Environment
In accordance with Tokyo Electron’s Environmental Commitment, the TEL Group aims to halve the total
environmental impact of customer factories through measures such as reducing energy requirements
during the usage phase of a product’s lifecycle and minimizing the use of regulated chemical substances.

Initiatives for Products with Less
Environmental Impact during Use

the business units were required to address the following

Approach to Reducing theEnvironmental Impact of Our Products

the number of parts and processes required, reducing the

The TEL Group believes it is important to promote

the environmental performance of existing equipment. In

environmentally conscious designs within our business activities,

addition, they were encouraged to cover voluntary items, suchas is clearly stated in the TEL Group “Credo and Principles on

as reducing the number of processes required for equipment

Environmental Preservation.” We give top priority to supplying

installation. Progress toward achieving the prescribed goals isenergy-saving equipment and to reducing or finding alternatives

reviewed under the Group’s medium- to long-term plan.

mandatory items: reducing equipment energy requirements,
addressing chemical substance-related matters, reducing
use of processing gases and liquid chemicals, and improving

to the regulated chemical substances contained in our products.
Environmental Roadmap

Organizations for Reducing
Environmental Impact

1. Reducing our products’ energy requirements
2. Addressing matters related to chemical substances
3. Reducing the number of parts and processes required
4. Reducing the use of processing gases and liquid chemicals
5. Improving the environmental performance of existing equipment

Two working groups, the Chemical Substances Steering Teamand the Product Working Team have been established topromote the TEL Group’s efforts to reduce the environmental
impact of its products. The Chemical Substances Steering
Team works to reduce or substitute the use of regulated

Technology Symposium

chemical substances in our equipment parts and components.

Following on from 2008, in December 2009, the TEL Group

The Product Working Team has developed and started

held its 12th Technology Symposium at the Tokyo Electron

to implement roadmaps for each business unit to reduce

Nirasaki Arts Hall. Presentations were made on environmental

its environmental impact. In preparing these roadmaps,

technologies and a poster area was also set up, enabling the

Product-related Initiatives for the Environment
The EXPEDIUS™ + Cleaning System Reduces
the Amount of Deionized Water Required

Cleaning systems use deionized water (DIW)1 during the wafer rinsing
process. Even in the stand-by mode, when wafers are not being

Reducing Emissions by Downsizing Spinners
In addition to the high controllability required forprocessed, a small amount of DIE is continuously consumed to control

miniaturizing and enhancing the performance of devices,
the CELLESTA+ single wafer cleaning system enables a

the generation of bacteria in the DIW pipes. Reducing the amount ofsmaller footprint (installation area) with 12 spinners2 by

DIW used when the system is in stand-by mode has therefore become

reducing the size of the process chambers. Wafer spin

an issue. We conducted a survey to identify the time it takes for bacteria

chambers require spatter control of process liquids andto be generated after the DIW supply has been stopped, and based on

atmosphere control, but the input and output of large

the survey results, we have adjusted the system so that DIW is supplied
only as long as is necessary to control the generation of bacteria. As aamounts of air are necessary to control these duringhigh-speed spin processing. The CELLESTA+ uses theresult, we have been able to reduce the amount of deionized water used“rotational cup concept,” in which the spin chambers rotate

by approximately 70%.

in synchronization with the wafers. This provides not only a
50% reduction in exhaust air compared with conventional
Stand-byvalveHigh flow
valvesystems but also enables downsized process chambers andenhanced productivity per unit area and C.o.O.3(%)

Approx. 50%
reduction in exhaust

100

volumes achieved
through the use of arotational cup.

50

Approx. 70% reduction

in deionized water supply achieved
during stand-by compared toconventional equipment through theuse of water conservation/intermittent operation.

1 DIW (deionized water): used in semiconductor manufacturing processes to clean
wafers and in the manufacture of pharmaceutical products. Deionized water isextremely high–purity water, theoretically close to 100% pure water, containing
virtually no impurities such as metal ions or microorganisms.

16

TOKYO ELECTRON

Environmental and Social Report 2010

0
Conventional
equipment

CELLESTA+

2 Spinner: a device that creates thin films through centrifugal force by
rapidly rotating flat and smooth base materials
3 C.o.O (cost of ownership): total expenses required for installing,
operating and managing facilities/equipment, etc.

divisions and departments to engage in a lively exchange ofconsumption of our products in close cooperation with theseideas and information.

partners. In addition, as one measure to reduce device energy

Product-related Initiatives
for the Environment

The TEL Group’s Technology Symposium

consumption, we are working to make measuring the amounts

Energy-saving Measures for Productsof energy consumed by devices that use electricity, water, dry

Our technology development efforts to reduce product energy

air, cooling water, and exhaust heat, as well as supplementary

consumption focus on the following five areas: (1) reducing

devices (e.g. vacuum pumps and cooling equipment) moreaccurate by following the SEMI S235 guidelines.

the energy used by the product itself; (2) reducing the energy
used by peripheral devices; (3) managing the product in ansaving manner (planned operation and proper management).
Energy-saving management of the clean room necessarily
involves our cooperation with customers and facility
manufacturers. We will work to further reduce the energy

Thermal Processing System that Reduces Greenhouse
Gas Emissions Using Fluorine (F2) Cleaning Technology

In semiconductor/FPD manufacturing processes, PFC6 gases such as NF3 andSF6 are widely used in etching and CVD chamber cleaning processes. These

MANAGEMENT REPORTCELLESTA™ Single Wafer
Cleaning System

4 Clean room: a room in which dust floating in the air is controlled at or
below a defined cleanliness level and in which the temperature/humidity
is maintained at a certain standard temperature. Dust can easily cause
defects in precision machinery or cause errors in operation, and so clean
environments are vital to ensure that the machinery operates correctly.
5 SEMI S23: guidelines for energy conservation for semiconductor
production equipment issued by Semiconductor Equipment andMaterials International (SEMI), an international industry organization for
semiconductor/FPD production equipment and material manufacturers

HIGHLIGHT

energy-saving manner; (4) reducing the energy used in theclean room4; and (5) managing the clean room in an energy-

gases have a global warming potential (GWP100)7 more than 10,000 times
higher than CO2 and their impact on global warming is posing serious concern.
In response to this, we have developed dry-cleaning technology that utilizes
it in our vertical LPCVD (low-pressure chemical vapor deposition) systems. In
addition, compared with conventional wet cleaning technologies, this fluorinecleaning technology not only reduces downtime but also extends chamber life

EHS REPORT

fluorine (F2) gas, which has a GWP of zero, instead of PFC gases, and we use

by eliminating quartz damage, thereby contributing to further reductions inenvironmental impact.

[Features of CELLESTA+]
1. High throughput: maximum 333 wafers/hour
3. Enables built-in chemical supply circulationunit
4. TEL original IPA drying technology enables
watermark-free drying

Cleaning gas

Global warming potential(GWP100)

Lifetime (years)

SF6
NF3
F2

23,90010,800
0

3,200
740
0

SOCIAL REPORT

2. New spinner model: 12 process spin chamber

Global Warming Potential of Cleaning Gases Used in
Semiconductor/FPD Manufacturing

5. New atomized spray (AS3) for high particle
removal efficiency (PRE) with fine patterns
and non-damaging cleaning
6. Utilizes the highly reliable CLEAN TRACK™
LITHIUS Pro™ coater/developers handlingtechnology

6 PFC (perfluorocarbon): a fluorocarbon compound containing absolutely no hydrogen or
chlorine that is one of the six gases subject to restriction under the Kyoto Protocol. Although
PFCs do not harm the ozone layer, their greenhouse effects are several thousand times thatof CO2.
7 GWP100 (Global warming potential): a measure of how much impact a greenhouse gas has
on global warming. It is a relative scale that considers a 100-year time span when the GWP
for CO2 is 1.

17

Product-related Initiatives for the Environment

Initiatives Related to Regulated
Chemical Substances in Products
Reducing the Use of Regulated
Chemical Substances in Equipment

Construction of a Management System
for Regulated Chemical Substances

Against a backdrop of growing concern over the impact that

The TEL Group operates a chemical substances management

harmful substances contained in parts and materials have on

system that can be used to register and view information on

the environment and ecosystems, many countries are working

the use of chemical substances according to individual parts.

to regulate the use of these substances in automobiles

This system allows us to check easily whether parts to be

and electrical products. The TEL Group is also introducing

used in our products contain regulated chemical substances

measures to reduce the amount of regulated chemical

or not, and control the manufacture or shipment of products

substances contained in its products. One of the best-known

containing chemical substances regulated by the EU/China

regulations on chemical substances is Europe’s RoHS
Directive1, which came into effect in July 2006. Although

RoHS and other laws.

semiconductor and FPD production equipment is currently
exempt from the directive, the Group is taking proactive

Activities to Reduce the Use of Other
Chemical Substances

measures to comply with it.

Most nations have begun to implement the Globally

We have already met all of the requirements for China’s

Harmonized System of Classification and Labelling of

RoHS, which was issued in March 2007 and applies to TEL’s

Chemicals (GHS)3 based on the recommendation of the United

products.

Nations. In order to comply with this system, the TEL GroupIn order to meet regulatory requirements in a prompt

has begun to obtain chemical substance safety informationmanner, the TEL Group established a Chemical Substances(e.g., MSDS) classified and created in accordance with theSteering Team comprising representatives from TEL’s

GHS and has not only made this information available within

headquarters and manufacturing subsidiaries. The teamthe Group, but has also begun distributing labels for chemical

shares essential information and investigates the use of

substance containers.

regulated chemical substances in our products in cooperation

In Europe, companies will be increasingly required towith our suppliers, and also introduces alternatives to replace

fulfill their responsibilities as manufacturers and follow theregulated chemical substances. In addition, the team uses
a dedicated database to manage the chemical substancesprinciple of taking precautions, under regulations such as
REACH4, the EU’s New Batteries Directives5, and the new CLP6

contained in units and the parts used in our products. In fiscal

regulations. All TEL Group departments are making concerted

2007, we voluntarily developed a timetable to phase out theefforts to comply with these regulations, from productuse of regulated substances used in our products (excluding

development, design and manufacture to procurement, quality

certain products) subject to EU RoHS standards. From theassurance, and environmental and safety performance. We

second half of fiscal 2009 successively, we began shipping

have started surveying substances of very high concern

equipment containing fewer regulated chemical substances,(SVHC) regulated under REACH and are providing information

which we define as products containing 98.5% or more parts

on parts that have been found to contain 0.1% or higherthat meet the EU RoHS standards.

percentages of these substances.

1 RoHS: Restriction of the use of certain Hazardous Substances in Electricaland Electronic Equipment

Chemical Substances to Be Reduced

We will also explore the optimal management of chemical
substances by participating in the activities of JAMP7 andother forums.

First Priority
Cadmium

Pigments, stabilizers, and resins

Hexavalent chromium Chrome plating
Lead

Solders, paints, electrical wire coating,and free-cutting metal

Mercury

Batteries and fluorescent lamps

PBBs

Resin parts

PBDEs

Resin parts

Second Priority
Substances designated as Level A substances in JIG2(The TEL Group has already implemented measures formany of these substances)
2 The JIG (Joint Industry Guide for Material Composition Declaration forElectronic Products) was prepared by Japanese, American and European
private trade associations. The guide lists the chemical substances for whichconservation measures should be implemented. It classifies the substances
into Level A and Level B; 16 substances are listed as Level A substances,including cadmium, hexavalent chromium, lead, mercury, PBBs and PBDEs,
while more than 400 substances are listed as Level B substances.

18

TOKYO ELECTRON

Environmental and Social Report 2010

3 GHS (Globally Harmonized System of Classification and Labelling ofChemicals): a globally harmonized system related to classification andlabeling of chemicals agreed by the United Nations that is intended toharmonize and integrate various countries’ classification standards forchemical harmfulness and toxicity, labeling and MSDS details.
4 REACH (Registration, Evaluation, Authorization and Restriction ofChemicals): a set of regulations pertaining to the registration, evaluation,authorization and restriction of chemicals. For products containing SVHC
(Substances of Very High Concern) in particular, manufacturers are
required to provide information on the SVHC content of their products aswell as information to ensure the safe use of the products.
5 The EU’s New Batteries Directive: regulates the collection and recyclingof batteries, requiring batteries to be labeled with a designated recycling
mark to facilitate collection and recycling.
6 New CLP (EC No 1972/2008 Regulation on Classification, Labelling andPackaging of Substances and Mixtures): EU regulations concerning theclassification, labeling, and packaging of chemicals and mixtures
7 JAMP (Joint Article Management Promotion-consortium): promotes
appropriate management of chemicals contained in products and smooth
information distribution within the supply chain.

Approach to Addressing Environmental
Impact Stemming from Logistics
The TEL Group has established a Logistics Working Team andthe relevant divisions and departments have created actionplans and are implementing them.
In April 2006, Japan’s Act Concerning the Rational Useof Energy was revised and regulations concerning logistics

compared with the base year of fiscal 2008, we will continue

were strengthened with the aim of reducing global warming.

to promote modal shifts to prevent increases in CO2 emissions

Accordingly, there is now greater demand for reducing thein the future as our sales and shipments rise. The marine

environmental impact of logistics operations. In response,transport rate for export-related logistics activities in fiscal

the TEL Group has been actively reducing the environmental

2010 was 37%. We estimate that increasing marine transport

impact caused by the transport of its products. For example,
we are promoting a modal shift8 for domestic and overseas

to 60% of our total transport needs would enable us to meettransport and adopting packaging methods with lessto marine transport and optimize our packaging methods.

Product-related Initiatives
for the Environment

Logistics-related Initiatives

our goal; we will therefore encourage our customers to switch

environmental impact. We will continue these environmental
measures in logistics in order to fulfill our environmental
8 Modal shift: a shift in the mode of transportation (e.g. switching fromconventional freight transportation by truck or aircraft to marine and railtransportation, which have a lower impact on the environment)

CO2 Emissions from Logistics Operations inJapan and Trends in Marine Transport Rates
(t)

4,712

5,000

(%)

15.7
2,956

2,500

In fiscal 2010, TEL transported 11.96 million ton-km of

0

freight in Japan (on a non-consolidated basis), resulting in

2,294

10

5.4

5

2.7
’08

CO2 emissions

’09

’10

0

(FY)

Marine transport rate

2,294 tons of CO2 emissions. Due to reductions in production
and shipment caused by decreased sales, this was a reduction

Green Packaging

The marine transport rate for domestic logistics activities in

Most of the TEL Group’s products are precision machines,

fiscal 2010 was 5.4%, down from 15.7% in fiscal 2009. This iswhich means they require special packaging to maintainthought to have resulted from decreases in total actual freight

precision and keep them in a clean condition. We use special

as well as in the quantity of shipments sent via related routes.
Modal shifts helped us to reduce CO2 emissions from ourwooden frames and steel-reinforced corrugated cardboard as

domestic logistics activities by 106 tons.

for packaging, we have begun using reusable corrugated

Our export-related logistics activities emitted

packaging materials. As a way to reduce the resources usedcardboard boxes when shipping large parts to customers

approximately 140,000 tons of CO2 in fiscal 2008, 30,000 tons
in fiscal 2009, and 29,000 tons in fiscal 2010. CO2 emissions

inside Japan. After the parts are delivered to customers, thedecreased in fiscal 2010, due in part to decreases in sales.

also collect casters used for moving products and bring them

Although CO2 emissions per unit of sales have decreasedback to our plants for reuse, thereby reducing resource usage.

EHS REPORTin ton-km of approximately 30% compared with fiscal 2009.

MANAGEMENT REPORT

Reducing the Environmental Impact
Stemming from Logistics

15

HIGHLIGHT

commitment.

reusable packaging materials are returned to us for reuse. We

At our new plant in Taiwa-cho, Miyagi Prefecture, which is currently under construction(as of August 2010), we are considering introducing a more environmentally friendly

New
plant

SOCIAL REPORT

Logistics Measures at Our New Plant

New
plant

cooperative distribution system for delivering procured material. We plan to introduce
this system to more than 100 of our suppliers for delivering materials to the new plantthat will develop and manufacture etch systems. We estimate that this system will enable us to reduce CO2 emissions from logistics
activities by more than 50% compared to having materials delivered individually to the new plant. The cooperative delivery system isalso expected to bring cost reductions and enable products to be delivered even more swiftly to our customers. After evaluating theoutcome at the Miyagi Plant, we will consider expanding the use of this system to other plants.

19