Plant and Office Initiatives for the Environment

EH S R E P OR T

Plant and Office Initiatives for the Environment
The Tokyo Electron Group is proactively undertaking various initiatives at each of its business sites to reduce
environmental impact, including measures to help prevent global warming, conserve resources, reduce waste, andstrictly manage substances. Some of the activities at manufacturing sites (plants) and offices are discussed below.

Measures to Help Prevent Global Warming
Reducing Energy Consumption
The TEL Group is working to reduce energy consumption in■ Electricity Consumption ■ Heavy Oil and Kerosene
Consumption(Million kWh)accordance with the provisions of the Law concerning the(kl)

12.6 19.2

Rational Use of Energy. Each business site has establishedspecific targets for air conditioning temperature settings
and for cutting power consumption for lighting and office239.6

equipment; and they are taking active measures to reduce

16.5 9.9

12.5

942

260.2
247.2
237.1

energy consumption. Tokyo Electron U.S. Holdings, Inc.
0

’05

’06

Japan

FY2009, the company has purchased approximately 57

’07

’08

1,169
1,014
1,160

1,838
1,665
1,604
1,444
1,159

234.5

has been purchasing green electricity since 2001. As of

1,146’09 (FY)

0

’05

’06

Heavy OilOverseas’07’08’09 (FY)

Kerosenemillion kWh of power, resulting in an approximate 3,500-

HIGHLIGHT

ton reduction of CO 2. Manufacturing sites in Japan are also

■ Gas Consumption(Thousand m 3)

taking measures to reduce energy consumption for372

cleanrooms, which account for a substantial portion of
total energy usage. One example is the effort to conserve
energy at the Tohoku Plant, which has reduced cleanroom
energy consumption by approximately 40%, while738

maintaining the same degree of cleanliness. We haveadopted a policy of further accelerating such measures to

0

MANAGEMENT REPORT

fulfill our environmental activity commitments.

EHS REPORT

116

154

838

946

994

943

56

110 113 131 137

’05

’06

’07

’08

’09 (FY)

LPG (Japan)
Processed natural gas (Japan)(Business sites in Japan and overseas)
Processed natural gas (overseas)

Energy Consumption and CO2 Emissions
For our energy consumption in FY2009, electricity usage
declined by 7.6% and heavy oil usage dropped by 19.7%,

Reducing the Use of Greenhouse Gases Other

thanks to energy conservation measures conducted in all

than CO2

regions and a decrease in production activities. CO 2

In developing our manufacturing processes and evaluating

emissions from energy consumption, however, increased

equipment (e.g., dry etching and cleaning processes) weby 2.6% because of a change in the electric poweruse hydrofluorocarbons (HFCs), perfluorocarbons (PFCs)

coefficient. Unfortunately, CO 2 emissions per unit of sales*and sulfur hexafluoride (SF6 ), which are greenhouse gases.

did not achieve the target of a 1% year-on-year reduction

In FY2009, we used 9,987 tons of greenhouse gases (CO 2

because of the decrease in net sales. We remain committed

equivalent), which is a slight decline from the 10,610 tons

to reinforcing our energy-saving measures.

used in FY2008.

* Energy consumption per unit of sales=Energy consumption ÷ Sales■ CO2 Emissions from Energy Consumption(t-CO2)■ Greenhouse Gas Consumption
(%)

192.1

30

(t-CO2)

7,335 8,335

7,405 6,449
105,834 182.9
104,246
102,977
107,742

SOCIAL REPORT

104,110

95,486
95,48784,761

89.3

0

100.1

94,00965,81718
96.1

92.1 87.0 90.8

78.4

22.5 20.7 18.0 16.4 16.4

13.0 12.5

’00

’02

’07

’03

’04

’05

6,740

79.3

14.9 11.7’01

13,863

’06

’08

22.8
’09 (FY)

0(Business sites in Japan and overseas)
CO 2 emissions (overseas)
CO 2 emissions (Japan)
Energy use per unit of sales compared to previous FY
Energy use per unit of sales

20

TOKYO ELECTRON Environmental and Social Report 2009

0

3,106

11

56
19
6,682

4,350

4,681

6,297

770
3,586

3,506

3,204

3,051

1,856 1,284
1,468 1,140

3,236
784
322 1,620

3,607

3,045

2,580

’03

’04

’05

’07

’08

’09 (FY)

HFCs

PFCs

SF6

’06
Others(Business sites in Japan)

Moving forward, we will continue to reduce the amount

Our Approach to Resource Conservation
The TEL Group is working to minimize our use of limitedof copier paper used and also minimize paper-based

resources. Specifically, we are reducing the use andrecords and accounting forms to further reduce our totalpurchase of copier paper and stationery and implementing

paper consumption.

green procurement practices, giving preference toenvironmentally-conscious products.
We have replaced printer toner cartridges with ones

Plant and Office Initiatives for the Environment

Initiatives to Conserve Resources

made from recycled materials and cooperated with the
manufacturers in the recovery of end-of-life cartridges. At

A poster encouraging employees
to use their own cups

some offices, we have established an intranet-based
system, under which extra stationery can be used by other■ Copier Paper Consumption

across the organization. In addition, a proactive effort is(Thousand sheets)

made to donate excess office supplies, shelves, and the like

18,617

to local governments and non-profit organizations.

18,184HIGHLIGHT

departments, thereby promoting the reuse of resources

16,135

17,417
16,03813,483

Continuing our donations from 2008, in March 2009 theGroup donated 10 used laptops to Aizu Technical High77,168School and to Kitakata Technical High School, which are

69,45076,800 69,814 77,992 70,936
8,647

member schools of the Aizu Craftsmanship Training Projectin Japan.

21,362’03
Plants

’04

’05

’06

’07

Office facilities’08’09 (FY)(Business sites in Japan)

Efforts to Reduce Water Consumption

Ceremony for donation of laptops

consumption. Our employees are encouraged to practiceduplex copying, to copy at a reduced size, and to digitize
information and internal circulars. As a result, the Group’s
total use of copier paper in FY2009 dropped dramatically■ Water Consumption(Thousand m3)

year-on-year by over 60%, equivalent to about 50 million
88
62

sheets. It is thought that one of the major factors behind

107
64

474

needed, corresponding to the decline in shipments.

70
106

115
92

111
22
599

486

437

506

415

357

391

382

’03

’04

’05

’06

48 2
65 1
599

575

531

498

We are encouraging the use of environmentally-friendly
paper and conducting activities that lead to resource
conservation by introducing products such as paper cups
working to raise employee awareness so that they use
fewer paper cups and bring their own cups to work.

0

Industrial water

Tap water

Groundwater

Overseas use

429

SOCIAL REPORT

the decrease is the reduction in the amount of documents

made from a bamboo-derived material. We are also

EHS REPORT

Efforts to Reduce the Use of Paper
We are making a group-wide effort to reduce paperAt our manufacturing plants, various measures areunderway to reduce water consumption. For example, theplants have installed a water re-circulating system to reusecooling water. They have also installed automatic faucets in
restrooms and other facilities. These touch-free automaticfaucets prevent water waste by automatically shutting off
the supply when the user’s hands are removed from thesensor range. In FY2009, water consumption fell byapproximately 3% because of lower production.

MANAGEMENT REPORT

0

’07
’08
’09 (FY)(Business sites in Japan and overseas)

TOKYO ELECTRON Environmental and Social Report 200921

Plant and Office Initiatives for the Environment

EH S R E P OR T
Plant and Office Initiatives for the Environment

Initiatives for Reducing Waste
Our Approach to Waste Reduction and Recycling
The TEL Group strives to reduce and recycle waste. We

from the chemicals used in the product-development andwork according to our firm policy of minimizing waste firstcurrently being recycled.

evaluation processes, but 99% of that liquid waste is

and foremost, recycling whatever waste is generated to thegreatest extent possible, and disposing of non-recyclable■ Recycling Rate and Generation of Waste

waste in a proper manner.

(Tons)

3,938
3,657

In recent years, landfill costs have surged due to a

96.4 97.3 97.0 97.3 (%)

3,268

3,179

shortage of sites, which means that waste reduction also

93.1 96.1

77.4

leads to cost reduction. We separate recyclable waste from

69.7

non-recyclables, use new manufacturing processes which

55.2

59.9

do not involve waste generation, manage the qualificationsof contract waste disposal companies, periodically review

847

HIGHLIGHT

final waste disposal practices, and also focus on
educational activities related to the sorting of waste and431 469 414 366 288
0

0
’00

other topics. For instance, the department that handles
single-wafer deposition systems at our Yamanashi Plant

’01

’02

’03

’04

’05

’06

’07

Incineration and landfills (Business sites in Japan)
Recycling rate

’08

’09 (FY)
Volume of waste

Target: Increase the recycling rate to 95% by FY 2006

adopted the slogan of “Let’s become sorting experts” andworked to make employees aware of the costs of■ Breakdown of Waste

processing waste by preparing a table with sorting

1%

MANAGEMENT REPORT

standards and the costs of processing waste (e.g., generalwaste, mixed paper, classified documents, and plastic

4%
6%bottles) as well as the sale prices of eleven types of

6%

valuable materials (e.g., high-quality paper and cardboard),

9%

FY20099%65%

while also preparing materials using animations to explain

Liquid waste
Metallic/product waste
Plastics
Paper
Wood scrap and Packaging materials
Drink containers
Othersorting techniques. Some business sites have begun using
electronic manifests to ensure proper management ofwaste materials.
Zero Emissions
We define plants where less than 2% of waste generated isincinerated or put into landfills as “zero emission plants”
クリーンオフィス2008

EHS REPORT

紙類の分別
お金がもらえる

お金がかかるand encourage all plants to achieve zero emissions. In
FY2009, all of our manufacturing plants strived to attainthis goal; and they achieved zero emissions.

処理
費用• 非機密の普通（再新聞紙のみ生）紙・再生可能
CR紙（ダンボールとは、• カタログ
波型の中心を2枚の• コピー用紙の包装
厚紙で挟んだもの。
1枚だけのものは紙
ボール紙-＞「紙く （広告・チラシは、• カレンダー「紙類・雑誌・カタロず」へ）• フラットファイルのグ等」へ）
表紙• ワックスコート紙• 感熱紙
ダンボールのみ

Educational materials
on sorting waste•ポストイット•JRのチケット•はがき•封筒• お菓子の紙箱• ボール紙• 再生不可CR紙・
OHP機密文書（シュレッダーすること）• ティッシュ• セロテープの芯• のし袋の飾り• ティーパックの個別包装紙• 紙コップ• 普通紙/再生可能
CR紙の機密文書

機密文書

シュレッダーすれば紙くずへ廃棄可でお得！

もらえるよ！

■ Recycling Rate of Waste for the Group’ Plants
in Japan

SOCIAL REPORT

Plants99.2%

Volume of Waste Generated, Recycling Rates,

Miyagi (Matsushima) Plant

98.4%

and Classification of Waste

Sagami Plant

99.4%

In FY1999, the TEL Group set the target of increasing its

Yamanashi Plant (Hosaka area)

100%

average recycling rate to 95% by FY2006. In FY2009, as a

Yamanashi Plant (Fujii area)

100%

result of recycling measures, the recycling rate was 97.3%;

Kansai Technology Center100%

and compared to the previous year incinerated and landfill

Saga Plant

99.9%

Koshi Plant

100%

Ozu Plant100%

waste fell by 21% and total waste (including recycled
waste) declined by 13%. The largest percentage of waste
generated by the Group comes from liquid waste resulting

22

Recycling rate

Tohoku Plant

TOKYO ELECTRON Environmental and Social Report 2009

Note: Rate of recycling of industrial waste (including industrial waste subject
to special control)Plant and Office Initiatives for the Environment

Management of Chemical Substances
Our Approach to the Management of Chemical Substances
The TEL Group uses chemical substances mainly indeveloping and manufacturing products. When developing
products, we sometimes adopt new chemical substancesthat have not been used before, or use chemical
substances in a way that is different from their traditional
usage. In such cases, we look closely at the development
facilities and methods, assess the environmental andoperational risks associated with the use of thesubstances, and implement necessary measures before
using the substances. We are also replacing dangerous andharmful chemicals used in the manufacturing process withsafer substances.

*PRTR: Pollutant Release and Transfer Register. Under the PRTR system, the useof chemical substances that may be hazardous to human health and theecosystem, their release into the environment, and transfer (contained in waste)
outside of the business premises are identified, tabulated, and disclosed.

■ Material Balance of Chemical Substances
HIGHLIGHT

Compliance with the PRTR* Act
In accordance with the provisions of the Act on Confirmation,etc. of Release Amounts of Specific Chemical Substances inthe Environment and Promotion of Improvements to theManagement Thereof (PRTR Act), we rigorously control the
specific chemical substances regulated under the PRTR Act
and continually identify the use and emissions of those

substances. Among the substances regulated under the PRTR
Act, we use a large amount of hydrogen fluoride, mainly forcleaning test wafers. The hydrogen fluoride waste is either
disposed of by an external company or we dispose of it in an
approved manner within our premises. Ethylene glycol, which
is primarily utilized as a refrigerant for cooling water, isanother heavily used regulated substance. Moving forward,
we will continue to appropriately monitor risks, whileadvancing our response to the PRTR Act. We will continue toproperly manage all risks associated with the use of chemical
substances.

Regulated under the PRTR Act
Released into the air: 0 kg/year Release into water: 2 kg/year

TEL

Handled
9,693 kg/year

Products
163 kg/year■ Handling of Substances Regulated as Class I
Designated Chemical Substances under the PRTR Act(kg)

Waste:
6,122 kg/year

1,221

759

On-site landfill:
0 kg/year

Removed:1,800 kg/year

Transferred to sewage: 15 kg/year

1,439
9,144
6,353

577
2,800

4,558

3,553

4,811

’04

’05

’06

9,844

2,108
1,359
3,962

1,607
1,459
1,200

4,118

5,021

5,427

’07

’08

’09 (FY)(Plants in Japan)

0
Hydrogen fluoride and its water soluble salts
XyleneOther

In Focus

EHS REPORT

Ethylene glycol

PCB Storage
Based on the Law Concerning Special Measures against
PCB Waste, we report on the storage and disposal of waste
containing polychlorinated biphenyl (PCB) to theprefectural governor on an annual basis. The TEL Group
presently stores two waste transformers and four waste
capacitors that contain PCB in a strict and secure manner.

MANAGEMENT REPORT

Recycled: 1,591 kg/year

4,578

Risk Communication with Local Communities

TOKYO ELECTRON Environmental and Social Report 2009

SOCIAL REPORTAll of our business sites that use chemicals conduct rigorous management toprevent leaks and other mishaps. We believe that it is extremely important togain the understanding of residents of communities located near those businesssites, with regard to our activities, in order to give them peace of mind.
The Tohoku Plant held a community meeting to report on environmental
issues on October 31, 2008, attended by a total of 40 people, including residents
living in the vicinity of the plant (such as representatives of neighborhood associations) and representatives of local
businesses and administrative agencies. The meeting was intended to share information concerning environmental initiatives
and build partnerships for developing mutual understanding, as part of a joint effort to help preserve the environment. Afteran explanation that provided them with an overview of company, the participants toured plant facilities (including the liquid
waste processing building) and observed the manufacturing lines. Later, the participants had the opportunity to makecomments and express their opinions. One participant said: “I feel better knowing that the smoke coming from the cooling
tower is actually steam”; while another commented: “I am grateful that Tokyo Electron Tohoku established a site at MizusawaEsashi and is contributing to the economic development of the community.”23