Eco Factory

Chemical Management
To prevent environmental pollution, we strictly control the chemical substances we use. We independently identify
chemicals that we ban from use in our products and work to eliminate them and find alternatives, and also work to
determine which substances are present in the products we purchase from suppliers.

Stance on Chemical Management

Concritize of the Chemicals Contained in Products

Chemical substances such as plastics, coatings, lubricants, gases

TEL works to address international and domestic laws, regula-and chemicals are an essential part of TEL production activities. Theytions and trends relating to the management of chemical substances

have many valuable properties, but the other side of the coin is thatand is striving to eliminate the general use of hazardous substances.

some of them also have hazardous properties. If they are not properly

We have investigated the chemical substances contained in themanaged, the potential exists for accidents or pollution of thecomponents and materials that make up our products, and based onenvironment.

our findings, have listed the substances for which we have prohibited

TEL starts by eliminating the use of hazardous substances to thein our products. These findings are also reflected in our green pro-greatest extent possible. We independently determine the chemicals

curement. Carrying out these activities rigorously will enable us to of-

to be banned from green purchasing and product design, and thenfer products that do not use substances that could damage or harmwork to find safe substitutes and to reduce the amounts used. In ad-

human health or the environment.

dition, we conduct voluntary controls of hazardous substances thatare stricter than government regulations, in an effort to minimize
chemical risk.

Prohibited Substances in Construction Materials of TEL Products
Substance group nameComplying with the PRTR* Law

Asbestos

Hydrogen fluoride and its water-soluble salts

Cadmium and its compounds

Beryllium and its compounds

Hexavalent chromium compounds

PCBs (polychlorinated biphenyls)

began full-scale PRTR reporting during FY 2003, after a preparatory

Cyanide compounds

Ozone-depleting substances

phase involving the creation of guidelines for the management ofMercury and its compounds

Halogenated fire retardants

chemical substances, the provision of MSDS information, and the de-Organic tin compounds

Specified brominated fire retardants (PBB, PBDE, etc.)

Selenium and its compounds

Polychlorinated naphthalene (chlorine number 3 and higher)

Dioxins

Organochlorine compounds

Arsenic and its compounds

PFOS* and its homologues

Japan’s PRTR Law was promulgated in March 2000, and wevelopment of methodologies for calculating the amounts of releases
and for making official reports to the government.
Under the PRTR Law, reporting is mandatory for chemicals that are*Perfluorooctane sulfonate: An intermediate substance from which target chemicals are synthesized.

handled in amounts of five tons or more per year at each facility. TEL
has been conducting stricter controls than those legally required, by continuing to control and monitor any substances stipulated by the law that
we use in amounts of 0.1 tons or more per year. The FY 2003 totals for
substances targeted by the PRTR Law are shown in the table below. We
handled no substances in amounts exceeding five tons (in either of thefirst two years) that would require reporting.
*PRTR (Pollutant Release and Transfer Registers): A framework for controlling chemical substances that may be hazardous to ecosystems and human health. It involves determining, compiling, and reporting on theamounts of chemicals used, released into the environment, and contained in waste transferred off-site.

Class 1 Substances Controlled under the PRTR Law (Units: tons)
Official number
11643
172
207
260283311

19Chemical nameAmount handled
Water soluble zinc compounds
0.05
2-amino ethanol
0.43Ethylene glycol
4.00
N,N-dimethylformamide
0.45
Water soluble copper salts (except complex salts)
0.12
Pyrocatechol
0.03
Hydrogen fluoride and its water-soluble salts
3.69
Manganese and its compounds
0.90
Total
9.69

TOKYO ELECTRON Environmental Sustainability Report 2003

Management of Liquid Chemicals by LabelingIn the evaluation cleanrooms at the Kumamoto and Koshi
plants, we are managing the use of liquid chemicals by affixing
labels with identification data onto the containers of chemicals
used in product evaluation and testing.
The information on labels is entered into a database, enabling us to easily track inventories and status of use.
In accordance with handling methods specified by MSDS
standards, the chemicals are stored separately at either cool orroom temperatures asappropriate.

Label attached to chemical containerEfforts to Reduce Non-CO2 Greenhouse Gas Emissions

PCB Storage

The Kyoto Protocol was adopted at the Third Session of the Con-

Japan’s Law Concerning Special Measures against PCB Waste en-

ference of the Parties to the UN Framework Convention on Climate

tered into force in July 2001. In accordance with this law, we are rigorously

Change (COP3), held in Kyoto in December 1997. It set specific nu-controlling waste that contains PCBs and submitting reports each year tomerical targets for the reduction of greenhouse gas emissions fromthe local prefectural governors about the status of storage and disposal ofdeveloped countries, and methods for achieving these. Japan ratified

PCB waste. The status of storage at TEL is shown below.

the Protocol in June 2002. TEL is working hard to reduce greenhouse gas emissions. Besides carbon dioxide emissions from energyuse, TEL is using PFCs and SF6 (greenhouse gases) in cleaning andStorage of Equipment Containing PCBs (Sites in Japan)
Transformers

2 setsCapacitors

4 setsdry etching processes, among others. The total of these emissions is
10,000 tons per year (CO2 equivalent). TEL will continue working tocontrol and reduce the emissions per unit of business activity as wellas to reduce total emissions.

Independent Controls at Each Site: Yamanashi Region

Greenhouse Gas Emissions from Sites in Japan(Units: t-CO2)

HFCsPFCs

SF6

OtherTotal

1,468

1,856

6,740

18

10,082

Material Safety Data Sheets*
We are sharing MSDS safety information on all chemicals newly
introduced at any plant by using a database hosted on our intranet.
Because information searches can be conducted from all plants, anyuser can determine the toxicity and hazard level for each individual
chemical, and make a decision on whether or not to use it.
In addition, MSDS documentation is placed at all locations in
TEL where chemicals are used, and steps are taken to prepare for
emergencies such as leaks and explosions.

In the Yamanashi region (Fujii and Hosaka plants), highly
hazardous gases such as chlorine and special high pressure gases like monosilane are used in the process development. Strictcontrols are in place to prevent even that the slightest leak, butin the unlikely event that a problem occurs, a centrally-monitored system can detect even minute leaks and automatically interrupt the supply of the gas.
In addition, these plants have created their own lists of substances
for which purchasing is prohibited. The list includes nine organochlorine
solvents and seven heavy metals, for a total of 16 items. If for some reason it is absolutely necessary to use one of these substances, the plantrules require a two-step review before approval. The plants have established voluntary wastewater standards that arestricter than those of thelocal prefecture, and areworking to keep transfersof hazardous substances
into the environment to theabsolute minimum.
Central monitoring room

*Material Safety Data Sheets (MSDS): Documents with information that isused to accurately determine the toxicity and proper handling of chemicalsubstances.

Manager’s Comment
In the Yamanashi region we are using about 1,000 types ofchemical substances and products, and in terms of both numberand amounts, this is more than any other company in TEL. We
take extra precautions for safety and the environment with asystem that requires review and approval before introducing or
using a new substance. Using our own numbering system, wehave created an easy to use system that relies on a registry ofchemical substances and products to prevent mistaken use. Forvery common chemicals like sulfuric acid and hydrochloric acid,we have a pool system that eliminates waste from purchasing
and use.

Screenshot of an intranet search

Shimpei Jinnouchi
Environmental Occupational Health & Safety Center,
Tokyo Electron AT Limited

TOKYO ELECTRON Environmental Sustainability Report 200320