EH S R E P OR T

EHS Management
EHS Management

Environment, Health, and Safety (EHS) activities are always a top priority for the TEL Group.

Basic Idea behind EHS Activities
The Tokyo Electron Group views caring for people’s healthand safety and the global environment as top businesspriorities. We are therefore committed to being a company
capable of earning the trust of all involved in our business
operations. We also believe that EHS activities will lead to
long-term benefits for the entire Group. As a responsible
member of society, we strive to help develop a moreaffluent society through our EHS activities.

MANAGEMENT REPORTHIGHLIGHT

EHS Promotion System
We are building an EHS promotion system in order to foster
EHS activities throughout the entire TEL Group.
Our EHS activities are conducted with respect to threecore elements: Product EHS, related to products;
Customer-Site EHS, related to operations for productdelivery and design; and Plant and Office EHS, related toour plants and offices. The TEL Group companies, andTEL’s manufacturing subsidiaries in particular, began
developing and implementing environmental management
systems based on ISO 14001 in 1997 and obtained ISO
14001 certification.
■ TEL Group’s EHS Promotion System■ Environmental Steering Committee
Environmental Steering Committee

Global EHS Committee
Product Working Team

Plant and Office EHS(EHS activities ineach region)

Customer-Site EHS(EHS activities atcustomers’ facilities)

Product EHS(EHS activities for
the Group’s products)■ ISO 14001-Certified Plants and Offices
EHS REPORT

Environmental Steering Committee
Recognizing the increasing necessity of addressing global
warming and climate change, we established theEnvironmental Steering Committee in October 2007 tointensify and accelerate our green efforts. This highestlevel internal organization on environmental activities iscomprised of the executive officer in charge ofdevelopment as well as members from the corporate
marketing, corporate strategic planning and corporate
communications divisions.
The Environmental Steering Committee is comprised of
two working teams: the Product Working Team, which
examines the Group’s products; and the Office/Logistics
Working Team, which examines its offices and plants anddistribution practices. Under the slogan of “Technology forEco Life,” the committee is promoting various activities
designed to advance TEL’s environment-related
commitments throughout the entire TEL Group. In FY2009,
the committee formulated standards and roadmaps forachieving those commitments.

Plant/Office name

Certification dateTokyo Electron PS Ltd./Tokyo
Electron AT Ltd.

Company name

Sagami Plant

December 10,
1997

1110-1997-AE-KOB-RvA Rev.1

Tokyo Electron Tohoku Ltd.

Tohoku Plant

February 19,
1998

1118-1998-AE-KOB-RvA

Tokyo Electron Kyushu Ltd.

Kumamoto/Koshi/Ozu/Saga Plants

March 26, 1998

1120-1998-AE-KOB-RvA

Yamanashi Plant(Fujii/Hosaka area)

May 15, 1998

1124-1998-AE-KOB-RvA

Miyagi Plant

March 1, 200501245-2005-AE-KOB-RvA

Yokohama Office

July 14, 2004

EC04J0144

Tokyo Electron AT Ltd.

SOCIAL REPORTTokyo Electron Device Ltd.

Certification number

Office/Logistics
Working TeamEHS Activities Monitoring System
In order to increase the effectiveness of our EHS
management system, we continually increase the level ofauditing that verifies the system functions and results.
Auditing is performed from multiple viewpoints, within
plants and offices, within the Group, or by third parties. We
are focusing in particular on the Tokyo Electron GroupInternal Audit, a program of mutual EHS evaluations byrepresentatives of each plant or office, which wasinstituted in FY2003. In FY2007, in response to theincreasing need to manage chemical substances containedin products across the entire supply chain, and incompliance with the revised Japanese Industrial Safety and
Health Act, we added new audit items to ensure that EHS
was implemented appropriately in cooperation with oursuppliers and partner companies. (The revised law requires
the enhancement of safety instructions and messages
provided by a primary employer* to the relatedcontractors.) Under this expanded scope, we will continue
to monitor our EHS management system and check ourEHS activities in an even stricter manner.
* Primary employer: According to the revised Industrial Safety and Health Act,a “primary employer” is a primary company that arranges for the employeesof its contractors to carry out a part of the company’s work at a single locationin cooperation with the company’s own employees.

12TOKYO ELECTRON Environmental and Social Report 2009

EHS Seminars for Customers
Tokyo Electron Taiwan Ltd. (TET) held its 5th EHS seminarfor customers at the Science Park Life Hub, located inside
the Hsinchu Science Park in Taiwan. The seminar focusedon the environment, providing an overview of the TELGroup’s EHS activities and the environmental measuresthat have been implemented in various systems, as well as
offering hands-on safety training using virtual-reality
images. Feedback from seminar participants included
comments that “the seminar made it easier to understandTokyo Electron’s environmental initiatives” and “the virtualreality training was very effective.”

HIGHLIGHT
MANAGEMENT REPORTEHS Training
The TEL Group offers EHS training based on the policy ofthe “necessary training for the necessary people.” Training
courses are grouped by rank and are open both to Group
employees and to employees of partner companies whowork at the Group’s facilities.
The curriculum for newly hired employees also
includes an EHS training program as a required subject.

EHS Management

EHS Risk Management System
At manufacturing subsidiaries of TEL, environmental andsafety risks are estimated based on ISO 14001, OHSAS
18001, and OSHMS (in accordance with the guidelines ofthe Ministry of Health, Labor and Welfare of Japan). Thesesubsidiaries are implementing measures to first eliminate
the highest risks, while are also endeavoring to reducesome risks that they are not legally required to reduce.
With regard to the environment, we believe that it isessential to implement measures that help prevent globalwarming.
The TEL Group operates in strict compliance with thelaw. We closely keep track of new environmental laws andemissions regulations; and for some substances we haveenacted our own voluntary requirements. In FY2009, wewere not involved in any environmental accidents,violations, fines or complaints; nor were we subject to any
legal actions with regard to any such incidents.

EHS seminar in Taiwan■ Goals and Results for EHS Activities in FY2009
Results for FY2009

Achievementlevel

EHS internal audit

Perform EHS internal audit at plants
and offices across the supply chain

Conducted an audit at one site with an additional
supply chain-related audit item and madecorrections based on the findings

EHS Management○Achieve the TEL Roadmap* targets,formulate standards for achieving
the Technology for Eco Life
commitments, and promote thenecessary activities

Achieved progress in formulating standards forrealizing the Technology for Eco Life commitments○

Energy-savingequipment

Encouraged application to existing equipment○

300-mm products: Achieved the FY2010 targets for
two of the six products○

Product-related
initiatives for theenvironment

Plans and goals for FY2010 onward

Related pages
pp. 12−13

Clarify in detail the standards forrealizing the Technology for Eco
Life commitments; and promote
the necessary activities

pp. 16−17○

Increase the number of products incompliance; continue to examine
regulations and implement
measures for compliancep. 18

Promote modal shift in Japan andoverseas in order to achieve theTechnology for Eco Life
commitments; improve packaging
methods

p. 19

Clarify the roadmap for achieving
the Technology for Eco Life
commitments, along with thedetails to be implemented, andimplement themp. 20

Measures to reduce
the use of regulated
chemical substancesin equipment

Achieve the TEL Roadmap* targets(compliance and support inpreparation for shipment beginningin October 2008)

Began shipments in October 2008.

Measures to reduce
Logistics initiatives the burden on thefor the environment environment in thearea of logistics

Formulate standards for realizing theTechnology for Eco Lifecommitments; and promote thenecessary activities

Clarified the achievement standards and ran asimulation for goal achievement; accurately
assessed the logistics volume in Japan andpromoted modal shift; began proposing a modal
shift to customers for overseas exports○Reduce energy consumption(1% decrease in CO2 emissions per unitof sales, as based on the Act
Concerning the Rational Use of Energy)

Electricity usage declined by 7.6%, but the total
CO2 emissions increased by 2.6% and emissions
per unit of sales also deteriorated, partly due to aworsening electricity coefficient×

Formulate standards for realizing theTechnology for Eco Life
commitments; and promote thenecessary activities

Clarified the achievement standards and beganconsidering the introduction of more energy
efficient equipment○

Waste reduction

Continue zero emission efforts at
manufacturing plants

Achieved zero emissions at manufacturing plants
The recycling rate of the entire Group was as highas that of the previous fiscal year○

Continue zero emission efforts andexamine reduction in the total
amount of wastep. 22

Reduction in thenumber of accidents
involving injuries orfatalities

30% year-on-year reduction in thenumber of accidents involving
injuries or fatalities

The number of accidents involving injuries orfatalities was reduced year-on-year by 18%, fallingshort of the target

×Target a 30% reduction of accidents
involving injuries or fatalities inFY2010, compared to the FY2009
level

pp. 24−25

Conserving energy
Environmental
activities at eachplant or office

Health and safety

SOCIAL REPORT

Continue to conduct audits

EHS REPORT

Goals for FY2009

Action item

* TEL Roadmap: Environmental policies and plans for the Group’s products; ○ Achieved target; △ Achieved 80% of target; × Achieved less than 80% of target; – Item for which no goal was set

TOKYO ELECTRON Environmental and Social Report 200913