EHS Management
The TEL Group regards environment, health, and safety activities (EHS activities) as its topbusiness priorities.

Fundamental Idea behind EHS Activities
and Our EHS Promotion System

The TEL Group’s EHS Promotion System

The TEL Group regards people’s health and safety and the

Global EHS
Committee

global environment as two of our most significant businesspriorities. We are committed to earning the trust of all of those
involved in our business operations and to carrying out ourPlant andOffice EHS

Customer-Site EHS

Product EHS

EHS activities ineach region

EHS activities atcustomers’ facilities

EHS activities
concerning
the Group’s products

business activities accordingly, basing our actions on ourbelief that EHS activities will lead to long-term benefits forthe entire group. As a responsible corporate citizen, we arecommitted to realizing a healthier and more affluent society
through implementation of our EHS activities.
We have established an EHS promotion system in orderto foster EHS activities throughout the entire TEL Group. Our

ISO 14001 Certified Plants and Offices

EHS activities cover three areas: Product EHS; Customer-Site

Company namePlant/Office name

Certification date

EHS, which concerns product delivery and design operations;Tokyo Electron Tohoku Ltd.

Tohoku Plant

February 19, 1998

and Plant and Office EHS. These activities are overseen by ourTokyo Electron Kyushu Ltd.

Koshi/Ozu Plants

March 26, 1998

Yamanashi Plant(Fujii/Hosaka area)

May 15, 1998

Global EHS Committee.
TEL’s Group companies, and TEL’s manufacturing

Tokyo Electron AT Ltd.

Miyagi Plant

March 1, 2005

Tokyo Electron Technology
Development Institute, Inc.

Sendai Office

June 24, 2010

Tokyo Electron Device Ltd.

Yokohama Office

July 14, 2004

subsidiaries in particular, began developing and implementing
environmental management systems based on ISO 14001 in
1997 and are in the process of obtaining ISO 14001 certification.

EHS Training
The TEL Group offers EHS-based training courses for bothgroup employees and employees of partner companies who

EHS Monitoring System

work at the Group’s facilities. The training course for newIn order to increase the effectiveness of our EHS management

employees also includes a mandatory EHS program.

system, we continually increase the level of auditing that

In fiscal 2010, our triennial basic safety training tookchecks system functions and results. Auditing is performedplace. This program dealt with various themes, includingfrom multiple viewpoints: within plants and offices, within themessages from top management about the Group’sGroup, and by third parties.

environment and safety policies, and was attended by allemployees.

TEL’s manufacturing subsidiaries endeavor to comply withlaws and regulations, carefully checking environmental laws,
emissions standards, and other pertinent regulations while
also establishing their own standards for some substances.
In fiscal 2010, there were no environment-relatedaccidents, legal violations, fines, or complaints within the TELGroup.

Basic safety update training via the Internet

14TOKYO ELECTRON

Environmental and Social Report 2010

Audits are performed by third parties.

EHS Management

Tokyo Electron’s Environmental Commitment
In May 2008, the TEL Group spelled out its environmental commitment under the environmental
action slogan “Technology for Eco Life.”lW e aim to develop equipment that enables a 50% reduction—compared to the 2007 levels—of the total
environmental impact of new customer factories scheduled for completion in 2015 or later.
lW e aim to reduce the impact of our business and transportation activities on the environment by 50%, by
2015, compared to the 2007 levels.
lW e will strive to achieve these commitments in partnership with our stakeholders.

Progress in TEL’s Environmental
Commitment

emissions per 100 million yen in sales) for fiscal 2008 throughIn fiscal 2010, we set specific targets and examined methods

2015, or a 50% reduction on the basic unit for fiscal 2008.

of achieving these targets. We set the target year as fiscal

Basic units for fiscal 2008 through 2010 remained virtually the2010. We have set a target of 14.45 t/100 million yen by fiscal

2015 (period ending March 2015) in line with the TEL Group’ssame, because CO2 emissions reduced in parallel with changes

medium- to long-term business goals.

in sales volumes. In fiscal 2010, environmental investment
was carried out to reduce CO2 emissions from the entire TELGroup’s business activities by approximately 3,000 tons (seeIn fiscal 2010, to enhance the energy-saving capacity of ourvolumes (see page 19).

page 20). CO2 emissions from logistics activities decreased
from the base year due in part to decreases in shipping

HIGHLIGHT(1) Develop equipment that enables a 50%
reduction in the total environmental impact ofcustomer factories
production equipment, we took appropriate measures basedon roadmaps for each of our products. Reduction in resource(1,000 tons)of pure water in cleaning systems; volume of exhaust from

28.9

coater/developers; and pump electricity in single wafer
300

deposition. As a result, we were able to achieve a reduction of
30% or higher in CO2 emissions per wafer unit during use for

30.3(t/100 million yen)

30261

200

approximately 30% of our products.

30.3

154

14.45
126

10100(2) Reduce the environmental impact of ourbusiness and transportation activities by 50%0The graph on the right shows trends in CO2 emissions for the’08’09

CO2 emissions

Basic unit

’15 (FY)

0TargetGoals and Results for Fiscal 2010 EHS Activities and Goals for Fiscal 2011 EHS Activities
Action item

Relatedpages

Audits in FY2010 were shelved
due to economic trends, etc.

Continue to conduct audits

p.14

Achieve the TEL
Environmental Roadmap
targets (compliance andsupport in preparation forshipments beginning inOctober 2008)

Began shipment of equipment
containing reduced amountsof chemicals in October 2008

Increase the numberof products in compliance;
continue to examine
chemical-related regulations
and implement measuresfor compliance

p.18

Continue zero emission
efforts at manufacturing
plantsAchieved zero emissions atmanufacturing plants.
The recycling rate for the entire
Group remained as high as theprevious fiscal year

Continue zero emission
efforts and examine
reducing the total amountof waste

p.22

Achieve a 30% year-onyear reduction in thenumber of accidents
involving injuries orfatalitiesThe number of accidents
involving injuries or fatalities
was reduced year-on-year by
18%, falling short of the target

Target a 30% reduction inaccidents involving injuries
or fatalities in FY2011
compared to the FY2009
level

p.24

Results for FY2010

Perform EHS internal
audit at plants and offices
across the supply chain

Product-related reduce the use ofregulated chemical
initiatives forthe environment substances inPlant and office
Waste reduction
initiatives forthe environment

EHSmanagement

EHS internal
audit
Measures toequipment

Health andsafety related
initiativesReduction in thenumber ofaccidents/disasters
involving injuries orfatalities

Achieved target

Achievement
level

Achieved 80% of target

SOCIAL REPORT

Plans and goals forFY2011 onward

Goals for FY2010

EHS REPORTTEL Group’s business/logistics activities and basic units (CO2’1020

MANAGEMENT REPORT

Trends and Targets for CO2 Emissions Caused
by Business/Logistics Activities

use was achieved for respective equipment categories: use

Achieved less than 80% of target

15