Environmental
Report 2001
Contents
2
3
4
5
6
8
9
10
13
14
15
16
21
23
26
30

Message from the President
Corporate Profile
Tokyo Electron Group Credo on Environmental Preservation
Tokyo Electron Group Environmental Preservation Activity Promotion Organization
Environmental Management System
Environmental Audits
Environmental Management System Objectives and Targets
Waste Reduction and Recycling
Energy Conservation
Resource Conservation
Chemical Substance Control
Products for Reduced Environmental Impact
Environmental Accounting
Health and Safety
Societal Contribution and Environmental Education
Other Activities
This report was prepared based on the results of the Tokyo Electron Group’s environmental
preservation activities, mainly in Japan, during fiscal year 2000 (from April 1, 2000 to March 31, 2001).
We plan to issue this report annually.

Contact

Tokyo Electron Limited
Environment, Health and Safety Center
30-7 Sumiyoshi-cho 2-chome, Fuchu City, Tokyo 183-8705
Tel: +81-(0)42-333-8052 Fax: +81-(0)42-333-8477
Tokyo Electron homepage: http://www.tel.co.jp

Message from the President

Having set the “Globally Excellent Company” as the group goal,
Tokyo Electron is actively pursuing to achieve it in all facets of theirbusiness activities giving careful consideration toward theenvironment, safety and health.
Such consideration is reflected in our corporate message “People.
Technology. Commitment.” laid down last year. Specifically to say,we clearly stated in the message that “We encourage community
involvement, exercising responsibility by promoting safety andenvironmental conservation.”
This Environmental Report is our corporate pledge to preserve theglobal environment. We explain our environmental policies, specificplans for action in implementing those policies and the results of suchactions in this report. We intend to issue updated reports on anannual basis.
We sincerely hope that this report will impress upon you our deep
commitment to environmental preservation, and that it will be
informative. As always, we welcome your candid comments andsuggestion.

Tetsuro Higashi
C.E.O., President
Tokyo Electron Limited

Corporate Profile
Company name:
Address:
Phone:
Representative:
Established:
Capital:Main products:

Tokyo Electron Limited
TBS Broadcast Center, 3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481
03-5561-7000
Tetsuro Higashi, C.E.O., President
November 11, 1963
¥47,212,750,000 (as of March 31, 2001)
Semiconductor production equipment (developed in-house and imported),
LCD production equipment (developed in-house), computer networking
equipment, electronic components
Employees:
1,330 (as of April, 2001)
Group employees:
10,693 (as of April 1, 2001)
Sales (consolidated): ¥723,880,000,000 (FY3/01)(parent company):¥626,807,000,000 (FY3/01)
Parent company

S a l e s(yen in millions)

Consolidated

800,000

723,880
700,000

626,807
Europe 7.0%

600,000
500,000

Geographic Breakdown of Semiconductor/LCD
Production Equipment Sales (Consolidated Basis)432,784

400,000 423,570
300,000

455,584

423,752

Other
5.9%
Japan

Korea 8.3%

440,728364,212313,820
266,397

Japan
41.3%

Taiwan
18.1%
U.S.
19.4%

200,000

TaiwanKorea
EuropeOther

100,000
0U.S.

FY3/97(Term 34)

FY3/98(Term 35)

FY3/99(Term 36)

FY3/00(Term 37)

FY3/01(Term 38)

< Domestic Subsidiaries >< Overseas Subsidiaries >• Tokyo Electron Sapporo Limited (Hokkaido)• Tokyo Electron Tohoku Limited (Iwate)• Tokyo Electron AT Limited (Yamanashi)• Tokyo Electron FE Limited (Tokyo)• Tokyo Electron Logistics Limited (Tokyo)• Tokyo Electron Leasing Co., Limited (Tokyo)• Tokyo Electron Agency Limited (Tokyo)• Tokyo Electron EE Limited (Kanagawa)• Tokyo Electron Device Limited (Kanagawa)• Tokyo Electron Kyushu Limited (Saga)• Tokyo Electron America, Inc. (Texas)• Tokyo Electron Texas, Inc. (Texas)• Tokyo Electron Massachusetts, Inc. (Massachusetts)• Tokyo Electron Phoenix Laboratories, Inc. (Arizona)• Tokyo Electron Arizona, Inc. (Arizona)• Supercriticial Systems, Inc. (California)• Timbre Technologies, Inc. (California)• Tokyo Electron Oregon, LLC. (Oregon)• Tokyo Electron Europe Ltd. (England)• Tokyo Electron Deutschland GmbH (Germany)• Tokyo Electron Italia S.p.A. (Italia)• Tokyo Electron Switzerland Ltd. (Switzerland)• Tokyo Electron Nederland B.V. (The Netherlands)• Tokyo Electron España S.L. (Spain)• Tokyo Electron Ireland Ltd. (Ireland)• Tokyo Electron Israel Ltd. (Israel)• Tokyo Electron France S.A.R.L. (France)• Tokyo Electron Korea Ltd. (Korea)• Tokyo Electron Taiwan Ltd. (Taiwan)

Tokyo Electron homepage: http://www.tel.co.jp

Tokyo Electron Group Credo on
Environmental Preservation
Tokyo Electron Group (“TEL Group”) established the “Environmental Credo” and “Environmental
Principles” on September 25, 1998 to exhibit its commitment to global environmental preservation
activities. The respective plants of the group are to promote environmental preservation activities
based on their own environmental policies, standards, manuals and procedures developed based on theabove “Credo” and “Principles”.

Tokyo Electron Group Credo on Environmental Preservation<The TEL Group Credo on Environmental Preservation>
The Tokyo Electron Group believes that preserving the global environment andconstantly improving it is one of the most important objectives for mankind as wellas our business. Based on this credo, We are determined to expand our businessby maintaining harmony with the global environment, and thus win the trust of ourmany customers, share holders, employees and society in general.
<The TEL Group Principles on Environmental Preservation>
1. Continuous Improvement
TEL is conscious that products manufactured by the TEL Group affect theenvironment, and based on this awareness, we, with our customers andsuppliers, shall continually strive to minimize the impact of processes andoperations on the environment.
2. Knowledge
TEL continually strives to enhance its understanding of the impact that the TELGroup has on the environment and the responsibility that this entails. In
addition, TEL aims to gain a quantitative grasp of environmental factors, andthe impacts resulting from TEL Group activities and operations.
3. Performance Criteria
As well as strictly observing mandatory environmental laws, treaties andagreements, TEL strives to enhance its own environmental management system
and improve global environmental preservation programs by the proactive
establishment of its own aggressive environmental performance criteria.
4. Disclosure
TEL shares information about its environmental concept, principles and theprogress of our contribution toward environmental protection with employees
and the general public.
5. Partnership
TEL actively participates in environmental protection activities practiced by ourcustomers, suppliers and communities.
Date: September 25, 1998
Tetsuro Higashi
C.E.O., President
Tokyo Electron Limited

Tokyo Electron Group Environmental
Preservation Activity Promotion Organization
The organization that drafts and finalizes the TEL Group’s policies regarding environmental
management activities and drafts, deliberates on, and approves targets and action plans is the TELGroup Environmental Committee, chaired by the board member in charge of environmental issues.
The Environmental Committee addresses and resolves company-wide issues. The Environmental
Management Committee, headed by the Environmental Committee Chairperson and Environmental
Management Representative, promotes environmental preservation activities at each plant incooperation with top management. As of October 2001, the TEL Group Environmental Committee
and the Plant/Field Engineering(FE) Safety Committee will merge to form the Environmental Healthand Safety Committee, which will continue the job of promoting environmental preservation
activities throughout the TEL GroupTEL Group Environmental Committee Organization
As of September 1, 2001

CEO, President

Corporate Senior Staff
Meeting

Environmental Committee Chairperson(Officer in Charge of Environmental Matters)
Secretariat (Environment,
Health and Safety Center)

Manufacturing plants’
Environmental Management
Representatives (EMR)

Office facilities’
Environmental Management
Representatives (EMR)

Manufacturing plants’
Environmental
Management Committees

Office facilities’ Healthand Safety Committees

Subcommittees

Environmental
Subcommittees• Chemical Substance
Subcommittee• Waste Control
Subcommittee• Energy and Resource
Conservation Subcommittee• Environmental Impact
Assessment Subcommittee• Product Review
Subcommittee

Representatives ofservice affiliates

Environmental Management System
To continually promote environmental preservation activities, the TEL Group has developed andimplemented an environmental management system based on the ISO14001 international standard.
At present, we conduct internal audits of the environmental management system, primarily at
ISO14001-certified facilities. Third party inspections of such facilities are also conducted periodicallyby the authorized external environmental certification organization.

■ Conceptual Diagram of the Environmental Management System

Environmental
policyPlanning
Management
review

Checking andcorrective action• Monitoring and measurement• Corrective and preventive
action• Internal environmental
audits• Environmental impact
assessment• Legal requirements• Objectives and targets• Environmental
management program

Implementationand operation• Structure and responsibility• Training, awareness,and competence• Communication• EMS documentation anddocument control■ Establishment of the TEL Group Environmental Committee
In response to mounting global environmental problems, the TEL Group established the TELGroup Environmental Committee in 1996 as an offshoot of the existing Product Safety Committee.
The Committee has been sequentially proceeding to promote ISO14001 certification of the sevenmajor manufacturing and research facilities in Japan (Sagami, Tohoku, Saga, Kumamoto,
Yamanashi, Ozu, Koshi). As a result of such efforts, all seven facilities have been certified by thirdparty certification organizations during FY1997–FY1999. The Committee presently oversees theenvironment at TEL facilities and is promoting environmental preservation activities on a groupwide basis. Environmental issues pertaining to equipment and parts are managed by the Worldwide
Product EHS (Environment, Health, and Safety) Committee.

■ External Certification (ISO14001)
Seven of TEL Group plants have been ISO14001-certified as of September 30, 1999. Additionally,
Tokyo Electron AT Limited, Miyagi Plant aims to obtain ISO certification by August 2002.
Also, Tokyo Electron Phoenix Laboratories, Inc. (Arizona, USA) is working towards obtaining ISO
certification in December 2001.

Certification Date Expiration Date Certification No.

Plant
Sagami Plant

December 10, 1997

December 10, 2003

EMSC-1110

Tohoku Plant

February 19, 1998

February 19, 2004

EMSC-1118

Saga Plant

March 12, 1998

March 12, 2004

EMSC-1119

Kumamoto Plant, Koshi Plant

March 26, 1998

March 26, 2004

EMSC-1120

Yamanashi Plant

May 15, 1998

May 15, 2004

EMSC-1124

Ozu Plant

August 27, 1999

August 27, 2002

EMSC-1414

Tokyo Electron
Phoenix Laboratories, Inc.
(slated for certification
by December 2001)

Tokyo Electron Tohoku Limited
Tohoku Plant

Tokyo Electron AT Limited Miyagi Plant
Preparing for certification(slated for certification by August 2002)

Tokyo Electron
Arizona, Inc.
(slated for certificationby May 2002)

Tokyo Electron Tohoku Limited
Sagami Plant

Tokyo Electron Kyushu Limited
Saga Plant

Tokyo Electron AT Limited
Yamanashi Plant (Fujii / Hosaka)
Tokyo Electron Kyushu Limited
Koshi Plant

Tokyo Electron Kyushu Limited
Ozu Plant
Tokyo Electron Kyushu Limited
Kumamoto Plant

Environmental Audits
At TEL Group, environmental audits are one of key activities for promoting the environmental
preservation activities referred to in the “Credo.” We independently conduct internal environmental
audits of every plant where an environmental management system has been implemented. The audit
findings are reported to the top management at each plant and used for review and improvement of
the environmental management system. To ensure that internal environmental audits are conductedreliably, they are conducted only by certified internal environmental auditors. An auditor certification
system has been established at every applicable plant.

■ Internal Environmental Audit Implementation Status (FY2000)
Plant

TohokuSagami Yamanashi

Saga

Kumamoto / Koshi

Ozu

Month of Audit(First audit)

’00/8

’00/7

’00/11’00/9’00/10’00/5(Second audit)

—

—

—

’00/12—’00/8(Third audit)

—

—

—

—

—

’00/12■ Number of Certified Environmental Auditors in the TEL Group
Sagami Yamanashi(as of August 1, 2001)

Saga

Kumamoto / Koshi

Ozu

Total

41

25

32

22

141

15

85

6

58

18

196

24

126

31

90

40

337

Plant

TohokuChief auditors

12

9

Auditors

14

Total

26

■ Topics (Audits conducted at Ozu Plant)
The Ozu Plant conducts internal environmental audits to continually upgrade its environmental
management system. The plant conducted preliminary audits of all organization in May andAugust 2000, and regular audit(%)
in December 2000. As shown in
100
97.8
96.5
96.4
96.0
83.2
the graph at right, the system is80
now firmly established, with60
consistently high overall audit
42.3
scores of 97.8%, 96.4%, and40
96.5% since the plant obtained
20
certification in August 1999.
0

1st preliminary 2nd preliminary
audit (FY99)
audit (FY99), Before certification

Regular audit 1st preliminary(FY99)
audit (FY00)
After certification /2nd preliminary
audit (FY00)

Regular audit(FY00)

Trend in Overall Audit Scores (Ozu Plant)

Environmental Management System
Objectives and Targets
At each plant, we first ascertained the type of impacts (environmental impacts) various environmental
aspect of the plants operational activities, product manufacturing and services that have or may
potentially have on the environment. We then assessed such impacts (environmental impact
assessment). Through this process, we identified which environmental aspects have or may potentiallyhave a major environmental impact (identification of significant environmental impact). To reduce
the risk of these environmental impacts’ occurrence, we clearly set objectives and targets.
The following lists the major objectives and targets established at ISO14001-certified plants.
(1) Reduction of wastes and improvement of recycling rate(2) Promotion of energy and resource conservation(3) Proper control of chemical substances(4) Development of environmentally benign products
To achieve such objectives and targets, we have developed and are implementing an environmental
management system. This entails preparing an Environmental Management Program (EMP) thatspecifies responsibilities, means, and schedules, among other matters; and periodically monitoring,measuring, and keeping records of key operational variables.

■ The TEL Group Credo and Principles on Safety and Health
Environmental Objectives

Environmental Targets

Reduction of wastes andimprovement of recycling rate

• Thorough sorting of wastes• Promotion of general waste recycling• Implementation of plastic waste recycling• Improvement of recycling rate
• Reduction of volume of waste per person• Implementation of recycling of all concentrated liquid wastes

Promotion of energy andresource conservation• Reduction of paper usage• Reduction of water usage• Reduction of power usage• Development of energy management systems

Proper control of chemical
substances• Development of chemical-substance management systems• Compliance with the PRTR system• Augmentation of chemical substance monitoring equipment andoperation thereof• Conduct of emergency response drills for chemical substance safety

Development of environmentallyfriendly products• Reduction of products’ energy consumption• Identification of products’ recyclable components• Establishment of product disposal procedures• Reduction of quantities of chemical solutions used by products• Establishment of technologies to reduce the amount of gas andwater used by products• Establishment of technologies to reduce the amount of PFCs, HAPs,
and VOCs emitted by products

Waste Reduction and Recycling
Waste reduction is an important issue in terms of both preserving the global environment andalleviating the burden on incinerators and other waste disposal facilities. Our philosophy is,“Minimize waste generation, maximize recycling of wastes that are generated, and properly dispose ofwastes that cannot be recycled.” In accordance with this philosophy, every TEL Group plant reduces
the amount of waste it generates and sorts wastes to facilitate recycling.

■ Total Waste Volume
The bar graph at right shows the progression of the TEL Group’s total waste volume, on a year-toyear basis. The linear graph shows changes in the basic units, calculated by dividing waste volume
by sales of each year. For the purpose of comparing yearly results, the basic units (used to show the
relationship between sales and waste volume) are calculated by taking the result of fiscal year 1997
as 100 points (100%). In fiscal year 1999, we started keeping a tally of the amount of waste
generated by our non-manufacturing facilities, in addition to those at our manufacturing plants.
In fiscal year 2000, waste volume at
Trend in Waste Volume
manufacturing plants and research
(ton)
(%)
facilities grew in tandem with the
10,000250
Waste volume9,267.6
Basic unit
substantial rise in production volume
9,000
8,072.4200
8,000
and utilization of plant capacity. As a7,109.3
7,000
6,347.1
result, the TEL Group’s total waste
150
6,000
volume increased compared to that
5,000
in fiscal year 1999. However, the
100
4,000
basic unit improved considerably,
3,000
50
2,000
from 121.4 points in fiscal year 1999
1,000
to 72.2 points in fiscal year 2000.
0
0
FY97
FY98
FY99
FY00
This is equivalent to a drop of over
40 percent, or, 59.5% decrease of the
Waste volume
Basic unit = — (FY1997 = 100%)
1999 figure.
Sales■ Breakdown of Waste Volume
Liquid wastes (including liquids classified as specially controlled industrial wastes) account forsome 47.8% of waste volume, followed in order by paper, scrap metal/product, and plastic waste.
All liquid wastes that cannot be disposed of in-house are collected and properly disposed of byoutside contractors.
Breakdown of TEL Group’s FY2000 Waste Volume
Total waste volume 9,267.6 t
Glass, beverage containers,
packaging materials,
incinerated ash
3.0%

Other
8.3%

Paper
14.5%
Plastic
5.0%
Scrap metal/
product
12.2%

Liquid waste
30.1%
Specially controlled
liquid waste
17.7%

Scrap wood
3.8%
Cafeteria garbage
1.3%

Breakdown of FY2000 Waste Volume by Location
Miyagi
Yokohama 2.9%
4.0%
Fuchu

Koshi
3.0%

Ozu
3.2%

5.0%

Hosaka25.3%

Sagami
5.7%
Kumamoto
16.3%

Tohoku
8.5%
Fujii
11.9%

Saga
14.3%

■ Examples of Initiatives to Reduce Paper Waste
At our Osaka branch office, we have greatly reduced paper use and have reduced the volume ofoverall paper waste by installing air dryers in place of the paper towels in our bathrooms. We arealso promoting the reduction of PPC paper use in all of our plants, also as part of our effort to
reduce paper waste.

■ SortingSorting is essential for recycling to work. At every plant, we collect wastes sorted into 26–46
different classifications by their physical properties.

■ Supervision of Waste Treatment Plants and Contractors
At each of our facilities, we select and oversee contractors that handle interim treatment and final
disposal of wastes. Before contracting with a new contractor for waste disposal services, we conduct
a official certification check, including verification of its license status and on-site inspection of its
facilities.
We thus make sure that the contractor has the capability to properly and lawfully process and/or
dispose of our wastes. Even after a contractor is selected, we conduct periodic on-site inspections toascertain the status of its operations.

Waste storage facility (Koshi Plant)

Inspection of final waste-disposal site

■ Recycling
We mainly recycle paper, beverage containers, scrap wood, glass, plastic waste, and metal. Over the
past five years, the TEL Group’s aggregate recycling rate progressively increased from 15.3% to40.9%, 49.7%, 55.2%, and 59.9%, respectively.
TEL Group Recycling Rate

(%)
100
90
80
70

55.2

60
40.9

50

59.9

49.7

40
30
20

15.3

10
0

FY96

FY97

FY98

FY99

FY00

■ Examples of Recycling Programs at Offices• At the Osaka branch office, we have adopted “widespread use of recycled paper” as one of ourenvironmental targets and now use recycled paper in virtually all cases. In the future, we intend to fully
implement our policy of using non-recycled paper only when necessary.
• At the Akasaka headquarters and Fuchu Technology Center, we are now recycling even confidential
documents that were previously either shredded or incinerated. To do so, we teamed up with a recycling
contractor to implement a box-shuttling system that allows for complete confidentiality. A feature of thissystem is that it permits recycling of all types of paper, regardless of quality, resulting in a significant
contribution to environmental preservation efforts. It has been calculated that the effects of adopting thissystem (as opposed to incineration) include the reduction of 7,811 kg of carbon
dioxide emissions per year, and the conservation of 781 trees per year (with adiameter of 14 cm and a height of 8 m).
• At the Akasaka headquarters and Fuchu Technology Center, paper cups madefrom kenaf, non-wood material replacing wood fiber, have been introduced toreplace standard paper cups. Because they grow rapidly and may be harvested inonly six months absorbing large quantities of carbon dioxide during their growthPaper cups
made from kenaf
phase, it is considered to help preventing global warming.

■ Examples of Recycling Programs at Plants• At the Ozu and Koshi plants, kitchen garbage-disposal units have been
introduced to reduce overall garbage volumes. As a result, the amount ofgeneral waste generated at the plant has been reduced from 800 kg permonth to zero. In the area of waste paper, savings have been achieved bypromoting a reduction in the use of PPC paper.
• At the Miyagi plant, recycling rates of crating timber has been improved,
following negotiations with timber recycling contractors. A total of 100 tof recycled timbers were used in fiscal year 2000, an increase of 7.5 times
A garbage-disposal unit
over the previous year.
• The Kumamoto and Koshi plants have established a paper-cup recycling system. As a result of this system,
89.8 kg (March 2001 figure) of paper cups that would have been incinerated as general waste is now
recycled for use in the production of toilet paper.
• The Kumamoto and Koshi plants have established recycling systems for clean papers which had so far been
unrecyclable and thus incinerated due to their surface processing to prevent fine particles. With thecooperation of everyone involved, non-recyclable clean paper has been replaced by recyclable clean paper,thus allowing it to be recycled along with magazines and catalogs.

Toilet paper made fromrecycled paper cups

Recyclable clean paper

Energy Conservation
At the TEL Group, we promote energy conservation as a means of preventing global warming. At all
our facilities, we universally strive to reduce power consumption through such means as turning lights
off during lunch hour and regulating air conditioners’ temperature setting. At ISO14001-certified
plants, we systematically promote energy conservation toward specific objectives and targets.

■ Major Energy Conservation Measures• Reduction of power consumption by lighting andoffice equipment (at all facilities)• Regulation of air conditioning temperature setting(at all facilities)• Design and operation of capacity utilization
reduction system for demonstration equipment(Yamanashi)• Turning-off of vending machines at night (Osaka)• Partial suspension of clean room use (Saga)• Scheduled equipment shutdowns (Ozu, Yamanashi)• Turning-off of compressors at night (Yamanashi)• Power saving stickers, which call for energy
conservation, affixed to equipment used for productdevelopment and the like. (Sapporo)■ Aggregate Power Consumption
The bar graph at right shows the trend of the TEL Group’s aggregate power consumption on a
year-to-year basis. The linear graph shows changes in the basic units for each year, calculated by
dividing total power consumption by sales for each year. For purposes of comparing yearly results,
the basic units (used to show the relationship between sales and total power consumption) arecalculated by taking the results for fiscal year 1997 to represent 100 points (100%). In fiscal year
1999, we started keeping a tally of the amount of power consumed by our non-manufacturing
facilities, in addition to that by our manufacturing plants.
At our manufacturing plants and research facilities, production and assessment equipment havebeen operating continuously at full capacity throughout the fiscal year 2000. As a result, the TELGroup’s aggregate power consumption increased in fiscal year 2000 compared to the previous year.
However, the basic unit improved considerably, from 170.7 points in fiscal year 1999 to 96.8
points in fiscal year 2000. This represents a drop of over 40 percent, or, to 56.7% of the previous
year’s figure. This figure is even lower than the figure for the reference year of fiscal 1997.
We aim to further reduce our aggregate power consumption by continuing to promote energy
conservation on an ongoing basis at all our facilities.
Trend in TEL Group’s Power Consumption(kwh in millions)

200
180

Power consumption
Basic unit

160
140
120

(%)

186

200

150
121

250

121

150

100
80

100

Power Consumption by Location in FY2000
Yokohama
Sagami 1.7% Akasaka
Fuchu 3.7%
0.7% Sapporo
0.3% Osaka
Tohoku 4.3%
4.8%
0.2%
HosakaMiyagi
22.3%
6.5%
Kumamoto
8.5%

Fujii
18.2%

60
40

50

20
0

0

FY97

FY98

FY99

FY00

Saga
8.8%
Ozu
9.4%

Koshi
10.7%

Power consumption
Basic unit = — (FY1997 = 100%)Sales■ Examples of Energy Conservation Initiatives• At the Ozu Plant, we reduced power consumption by turning off lights during the lunch hour and by
allowing for an overall reduction in the number of lights used through an increase in luminosity of bulbs
used throughout the plant. We also shut off the air conditioning at regular intervals. The result was a 1.1%
(120,000 kwh per year) reduction in power consumption• At our Osaka branch office, we installed timers on beverage vending machines. The timers conserve energy
by automatically turning the machines off at night.

Resource Conservation
We are promoting reduction of paper use, mainly at ISO14001-certified plants, as a means ofconserving natural resources. At all our facilities, we use recycled paper for everything except certain
special uses. We have also reduced our water consumption through day-to-day water conservation
activities and installation of cooling-water circulation systems and dry vacuum pumps.

■ Examples of Initiatives to Reduce Paper Usage• At the Ozu plant, we switched to completely recycled paper (i.e., paper with 100% used-paper content),
effective April 1999. In fiscal year 2000, we continued our efforts to promote the conversion of internal
documents for circulation to electronic media in all departments, as well as the use of both sides of paper.
As a result, usage of both sides of paper amounted to a total of 246,000 sheets.
• At all plants, we reduced paper usage by copying on both sides of a copy paper and also making reducedsize copies. We are also proceeding with conversion to electronic media to further minimize paper usage.

■ Examples of Initiatives to Reduce Water
Consumption• At the Ozu plant, we introduced a waste water recovery
system from vacuum pumps. Previously, water used tocool the pumps was disposed of as wastewater. Under the
new system, this water is collected into a tank using acirculation system and reused as cooling water. This has
resulted in monthly water savings of 830 m3, although due
to increased production and other factors our overall
consumption of industrial water actually increased.
• At the Kumamoto plant, we converted two of our vacuum
Wastewater recovery facility
pumps to dry pumps. By switching to pumps that do not
use water, we have managed to reduce the consumption of both water and electric power. It is difficult togauge the effectiveness of this reduction initiative due to the fact that a large number of personnel moved
from the Kumamoto plant to the Koshi plant at the same time the new pumps were installed; however, it
is clear that we are using less water than the amount used before (518 kl).

■ Other Initiatives• At a number of offices, including our Osaka branch office, as the lease agreements on our company vehicles
have expired, we have gradually been replacing them with hybrid cars or cars that comply with the “greentax” system. According to the study carried out by our Osaka branch office,the fuel efficiency of these hybrid cars is twice that of standard gasolinefueled vehicles. The change thus represents a contribution to energy
savings and conservation of resources, as well as a contribution to the
reduction of air pollution and to the prevention of global warming, even if
the impact of the contribution is very small.
• At the Sagami and Yamanashi plants, we have discouraged drivers fromleaving their car engines running while stopping, to help contribute to the
A sign urging drivers
prevention of global warming.
to turn off their car
engines while stoppingChemical Substance Control■ Comprehensive Chemical Substance Control
At the TEL Group, we control the chemicals used for production and those used in our products
appropriately and thoroughly, to prevent significant impact on the environment and on human health.
To this end, we conduct risk assessments of the noxious properties of chemicals, based on anunderstanding of the actual circumstances involved. We have also developed and implemented asystem at each plant involving the review and registration of chemical substances as they are first used.

■ Compliance with the Pollutant Release and Transfer Register Law(Law Concerning Reporting, etc. of Releases to the Environment of SpecificChemical Substances and Promoting Improvements in Their Management)
The Pollutant Release and Transfer Register (PRTR) Law was enacted in 1999 as “Laws
Concerning Reporting, etc. of Releases to the Environment of Specific Chemical Substances andPromoting Improvements in Their Management.” The law went into effect in April 2000. Since
then we have been required to regulate the balance of substances subject to the PRTR. At the TELGroup, each plant conducted a survey of the chemical substances subject to the PRTR. As a resultof which it was found that 35 of such substances were being used throughout the TEL Group.
Each plant is currently looking into the usage and emission volume of such substances into theenvironment, while promoting overall improvements in the management of such substances.

■ Examples of Reductions in the Use of Chemical Substances
At the Saga plant, the use of isopropyl alcohol (IPA) has been completely terminated in the vapordrier inspection process during the manufacturing of cleaning system. The amount of IPA used in
the manufacturing process of coater/developers has also been reduced by switching to pure water.
The switch has so far resulted in 66% reduction of IPA use per product.

■ Development of an MSDS Database
We manage and employ Material Safety Data
Sheets (MSDS) using a computer system at eachplant that reviews and registers chemical
substances when they are first used. In addition,
we have also been developing an online
database that will enable group-wide access to
MSDS data. This database currently contains
information on around 500 chemical substancesused at 5 plants (Tohoku, Sagami, Saga,
Kumamoto, and Koshi). Information on theremaining plants is currently being compiled
into the database.

TEL Group MSDS database server

MSDS data
PerusalRegistration

Network
Registration

PerusalRegistration

PerusalDept. that controls
MSDS data

Dept. that controls
MSDS data

Plant

Plant

Products for Reduced Environmental Impact
At the TEL Group, we have endeavored to satisfy our customers by offering services and products
such as semiconductor and LCD production equipment and electronic components. Moreover, as
stated in our Principles of Environmental Preservation, we will continuously endeavor in unison withcustomers to reduce TEL Group products’ environmental burden. Specifically, every plant will
undertake to develop environmentally benign products, setting product-specific targets for energy
and resource conservation, reduction of chemical usage, and other such matters.

■ Examples of Key Initiatives
Business Unit / Plant

Description of Initiative

Etch systems / Yamanashi plant• Reduction of power consumption

Single Wafer Deposition /Yamanashi plant• Reduction of power consumption• Reduction of N2, exhaust

LCD systems / Yamanashi plant• Reduction of power consumption

LCD systems / Ozu plant• Reduction of chemical usage

Cleaning systems / Saga plant• Reduction of chemical solution usage• Reduction of IPA usage• Reduction of pure water usage• Reduction of power consumption

Clean track /Kumamoto plant, Koshi plant• Reduction of chemical solution usage• Reduction of power consumption

Diffusion systems /Sagami plant, Tohoku plant• Reduction of equipment’s footprint• Reduction of vinyl chloride resin cable usage• Establishment of procedural guidelines for equipment disposal• Reduction of power consumption■ Measures for Reduction of Environmental Impact in Physical Distribution[Use of Air-Filled Packaging Materials]
Until recently, we used polyurethane foam and environmentally-friendly, biodegradable loose-fillpackaging material to package our parts for shipping around Japan and overseas. However, as ofthe end of 2000 Tokyo Electron Logistics Limited has been promoting the use of air-filledprotective packaging at its offices around the country.
This type of packaging cushions the contents in an airfilled bag made of translucent film. From anenvironmental perspective, this new packaging has anumber of advantages over the old packaging: thepackages can be reused any number of times simply by
refilling with air, for example, and they produce little
waste. Other advantages are that they are cleaner, offer
Air-filled packaging material
easy access to contents when opened, and require little
storage space when not in use.

■ Organization for Improvement of Products’ Environmental Problems
Common issues related to improvement of environmental problems involving the semiconductor or
LCD production equipment manufactured and sold by the TEL Group are reviewed and decided uponby the WW Product EHS Committee chaired by the director in charge of environmental issues.
For product-specific environmental problems, the concerned design/production, sales, and/or
service department conducts activities to improve the problem under the direction of theapplicable BU Product EHS Committee.
Director in charge ofenvironmental issues

Organization for key individual products
BU Product EHS Committee

WW Products
EHS Committee
Engineering, sales, service
Secretarial: Environment,
Health and Safety Center
WW:
BU:

Initiatives to address environmental issues

World WideBusiness Unit

■ Targets for Reduction of Product-related Emissions and Consumption
In product development, one of our aims is reduce products’ environmental impacts such as gas
emissions and power consumption. Toward this end, we have set targets for the 2002 models of
our semiconductor production equipment for 200 mm and 300 mm wafers based on the 1997 models of our equipment for 200 mm wafers, as shown in the table below.
Product EHS Roadmap
Wafer Size1997 Standard
200 mm2002 Target
200 mm2002 Target
300 mm

HAP emissions

1

0.4

0.5

VOC emissions

1

0.4

0.5

PFC emissions

1

0.4

0.5

Power consumption

1

0.8

1

Water consumption

1

0.8

1

Gas consumption

1

0.8

1

*Targets for 300 mm diffusion, LP-CVD equipment are set at 1.5 times the standard data.

• HAP: Hazardous Air Pollutants• VOC: Volatile Organic Compounds• PFC: Per-Fluoro Compounds

■ Fiscal Year 2001 Action Plan for Reducing Products’ Environmental Impact
The table below shows the TEL Group’s fiscal year 2001 action plan for developing
environmentally benign products based on the Product EHS Roadmap.
Issue

FY2001 Action Plan

Global warming
prevention

Reduction of
power consumption

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce power consumption in fiscal year 2001.

Reduction of PFC
emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce PFC in fiscal year 2001.

Air pollution
prevention,
Safeguards
against acid rain

Reduction of
VOC emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce VOC in fiscal year 2001.

Reduction of
HAP emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce HAP in fiscal year 2001.

Prevention ofozone layer
depletion

Restriction of use ofozone-depleting
substances

Promote disuse of HCFC substances

Promotion of recycling/reuse (dismantlement,labeling of materials,
disposal)

Set targets for every product and commence action to achieve them.
Determine feasibility of incorporating information into work
procedures and manuals related to dismantlement and disposal.

Prolongation of life
span of equipment/parts

For every product, set targets for prolonging the life ofequipment/parts and commence action to achieve them.

Green procurement

Establish applicable foundations for “green” procurement products.

Lead-use restrictions

Share information regarding substitutes for lead solder.
Ascertain extent of lead usage in purchased products.

Introduction of LCA

Implement LCA for each primary product, to prevent global
warming.

Reduction of
consumption of
depletable
resources

Purchased
products
Life-Cycle
Assessment (LCA)■ Preparation for Implementation of Green Procurement“Green procurement” means procuring parts based on environmental considerations in addition to
the conventional procurement criteria of quality, cost, and delivery period.

Conventional Procurement Criteria
quality+cost+ delivery period

The Green Procurement
Guideline pamphlet

Green Procurement Criteria
quality+cost+ delivery period + environmental considerations

The TEL Group’s Green Procurement Guideline was established in January 2001
and distributed to our suppliers throughout Japan. In addition, around 200
companies were invited to take part in green-procurement seminars held in
Tohoku, Sagami, Yamanashi, and Kyushu, where they were asked to cooperate in theimplementation of green-procurement policies. The first step in this process involves conducting
vendor assessments on the environmental initiatives implemented by our suppliers. The second step
involves an assessment of the environmental considerations for the parts procured by the TEL Group.

■ LCA Initiative
LCA (Life Cycle Assessment) is a technique for quantitatively assessing a product’s environmental
impact during the course of its life at each stage: from the raw-material stage through manufacture,transport, use, and disposal.
We can significantly reduce a product’s overall environmental impact by analyzing, assessing, andgiving priority to the rectification of any such major impact.

■ Examples of LCA Initiatives in Fiscal Year 2000
In fiscal year 2000, each business unit implemented LCA aimed at reducing global warming. One
feature common to all of these assessment results was that the environmental impact for all
products was the greatest at the use stage. Comparing the environmental impacts at the use stage
for each of these products, we found that the impact varied from product to product, with somehaving the greatest impact through the use of ultra-pure water, and some having the greatest
impact through power consumption. In the future, these assessment results will be considered in
the course of the development of new products.
*1) Example 1 of LCA Result: Cleaning System
UW300Z Overall
100%

98.5%

80

80

60

60

40

40

20
1.0%
0

0.3%

0.2%

0.1%

Raw
Manufacture Equipment Equipment
materialandtransport
use
production assembly

Disposal

UW300Z Use

(%)
100

CO2 Emissions

CO2 Emissions

(%)
100

55.6%

26.2%
20
4.8%
0

Total
emissions

9.8%
0.6%

1.0%

1.9%

0.2%

Chemical Ultra Cooling Power Com- N2 gas Exhaust Consumsolution pure
fluid consump- pressed
ables
water
tion
air

*2) Example 2 of LCA Result: Metal CVD System
UNITY-EP/Ti, TiN Overall
100%

96.7%

80

80

60

60

40

40

20
2.2%
0

0.9%

0.2%

Raw
Manufacture Equipment Equipment
materialandtransport
use
production assembly

0.1%

Disposal

Total

UNITY-EP/Ti, TiN Use

(%)
100

CO2 Emissions

CO2 Emissions

(%)
100

100%

58%

20
0

11%

Power
consumption

Exhaust15%

15%

Coolingwater

N2 gasTotal

■ Examples of Product-Related Energy Conservation Initiatives
At the TEL Group, in order to reduce the overall environmental impact of our products, we areconsidering ways of reducing the environmental impact both of the existing products and of the
product development process. Examples of initiatives introduced for existing and new products areprovided below.
1) Example of New ProductIn the development of the new UW300Z (300 mm ø) cleaning system, considerable improvements
were made over the old UW8000 (200 mm ø) model. For per wafer unit area, the amount of ultrapure water used was reduced by approximately 60%, exhaust emissions were reduced byapproximately 50%, and power consumption was reduced by approximately 40%.

UW300Z

2) Example of Existing Product
The UNITY Ver.II (200 mm ø) etch system has achieved energy savings of approximately 30%
through the use of an energy-saving dry pump and through modification to the sequences andfreezer circuits in the chiller unit.

UNITY Ver.II

Environmental Accounting“Environmental accounting” is a tool for ascertaining the cost and effect of a company’s environmental
activities for use within the company’s routine operations. At the TEL Group, we have decided toadopt an environmental accounting system to quantitatively ascertain the costs associated with ourenvironmental conservation activities and utilize them as gauges of corporate activities.
Fiscal year 2000 marked the second year since the introduction of our environmental accounting
system. Following up on the experiences of fiscal year 1999, when the system was run on a trial basis,
we attempted to extend the scope of the tabulation of environmental accounting data. We intend tomaintain these sorts of environmental conservation activities in the future as well.

■ Fiscal Year 2000 Results
Our fiscal year 2000 environmental costs (investment amount and expense amount) are tabulated
below. The numbers apply to TEL Group domestic plants. Costs for the depreciation of capital
equipment cover purchases made since fiscal year 1999.
In fiscal year 1999, environmental costs included business area cost, management activity costs,
and social activity costs. In fiscal year 2000, an effort was made to include all costs associated withenvironmental conservation. However, it should be noted that results for upstream/downstream
costs are based mainly on branch office information, while research and development costs
represent costs associated with some equipment only.

■ Future Issues
We aim to provide even more accurate environmental conservation costs in the future. Further
consideration needs to be given to calculating upstream/downstream costs and research anddevelopment costs. Furthermore, from the standpoint of the effective utilization of management
resources, it is also necessary to quantify improvements in environmental performance and toascertain their costs and effects. We plan to formulate an approach to ascertaining results and toundertake to quantify results in monetary terms based on this approach.

■ TEL Group’s Environmental Costs
Environmental Preservation
Cost Classifications(FY2000 results in thousands of yen)

Main Activities

Itemization

1. Business area cost

Investment
amountExpenseamount408,264545,705

1.1 Pollution prevention costs

air pollution, water pollution, soil contamination, etc.

142,430

154,066

1.2 Global environmental
costs

climate change prevention, ozone layer depletion
prevention , etc

165,991

70,8881.3 Resource circulation costs

efficient use of resource, waste reduction, etc.

99,843

320,751

021,441

432

112,966

2. Upstream/downstream costs

green purchasing, green procurement, etc.

3. Management activity costs

environmental education, monitoring and measuring
environmental impacts, etc.

4. Research and development costs

product R&D, etc.

5. Social activity costs

green purchasing, green procurement, etc.

6. Environmental damage costs
7. Other costs
Total

0

2,447

6,500

44,148

repairing damage to the natural environment, andthe like.

00others00415,196

726,707*Environmental costs include the total amounts for all ascertained costs

■ Major Environmental Costs
Below are several examples of the TEL Group’s major environmental costs.
• Business area cost:(1) Pollution prevention costs: installation of abatement equipment, wastewater neutralizationequipment maintenance expenses, and the like(2) Global environmental costs: installation of equipment for removing chlorofluorocarbons, andthe like(3) Resource circulation costs: installation of kitchin garbage-disposal equipment, expenses involved in reducing and disposing waste, and the like
• Upstream/downstream costs: hybrid car lease and maintenance costs, purchase of environmentally-friendly products, and the like
• Management activity costs: environmental measurement expenses for air/water pollution, soil contamination, etc., environmental education expenses, and the like• Research and development costs: research and development aimed at reducing environmental impact of cleaning systems, and the like• Social activity costs: afforestation expenses, and the like■ Breakdown of Investment Expenditures
Breakdown of Investment Expenditures
Social activity costs
1.6%
Resource
circulation costs
24.0%Management
activity costs
0.1%
Global evironmental
conservation costs
40.0%

Pollution
prevention costs
34.3%

Global environmental conservation costs
climate change prevention, ozone layer depletion prevention, etc.

Pollution prevention costs
air pollution, water pollution, soil contamination, etc.

Resource circulation costs
efficient use of resource, waste reduction, etc.

Social activity costs
afforestation, support for local environmental activities,
environmental information disclosure, etc.

Management activity costs
environmental education, monitoring/measuring of environmental
impacts, etc.

■ Breakdown of Expenses
Breakdown of Expenses
Resource circulation costs
Upstream/downstream costs
3.0%
Sosial activity costs
6.1%
R&D costs
Global environmental
conservation costs
9.8%
Management
activity costs
15.5%

Pollution
prevention costs
21.2%

0.3%

efficient use of resource, waste reduction, etc.

Pollution prevention costs
air pollution, water pollution, soil contamination, etc.

Management activity costs
environmental education, monitoring/measuring of environmental
impacts, etc.

Resource
circulation costs
44.1%

Global environmental conservation costs
climate change prevention, ozone layer depletion prevention, etc.

Social activity costs
afforestation, support for local environmental activities,
environmental information disclosure, etc.

Upstream/downstream costs
green purchasing, green procurement, and the likeR&D costs
product R&D and the like

Health and Safety
As a company that aims to excel globally, the TEL Group is actively promoting a number of
initiatives in health, safety, and related areas.
Our continued existence as a corporation relies upon the safety and health of our employees,
customers, and everyone involved with the TEL Group’s business. As a sign of our commitment tobuilding a trustworthy company to everyone aforementioned, on November 27, 1998, the TEL Groupdrew up what was referred to as the “TEL Group Credo and Principles on Safety and Health.” Thiswas followed on June 25, 1999 with the issuance of the “Safety First” declaration.

■ The TEL Group Credo and Principles on Safety and Health
According to the “TEL Group Credo and Principles on Safety and Health,” safety and healthconsiderations must always be taken into account—for all board members and employees of the
TEL Group, and for all jobs. Considerations of profit and decisions regarding delivery dates andtimes must not take precedence over human safety and the safety of facilities and equipment(including items we sell and items we use within the company).

■ Safety FirstWe have prepared a “Safety First” declaration, based on the “TEL Group Credo and Principles on
Safety and Health.” By displaying its poster at prominent locations throughout the company, we
strive to ensure that each and every employee is aware of the importance of safety in his/her daily
activities.
We have also prepared a “Safety First” pamphlet titled as “Introducing Safety First Culture
Awareness.” This is distributed free of charge to customers and members of the public at theirrequest, as part of our efforts to promote the TEL Group’s commitment to safety.
The TEL Group has also incorporated its environmental, health, and safety principles into its
Management Philosophy. We are convinced that giving the highest priority to health, safety, andthe environment will help establish consumer trust in the TEL Group and will eventually lead togreater profitability.

“Safety First” poster“Introducing Safety First Culture
Awareness” pamphlet

■ Safety Training (“Safety 2000”)
The TEL Group has established a standardized safety training program, referred to as “Safety
2000,” for all board members and employees in the group. As shown in the table below, thissystem provides different levels of training, depending on the experience and the worksite of theemployee involved. Basic Safety Training and Advanced Safety Training had been introduced inJuly 2000. By December the same year, 98% of eligible board members and employees had
undergone the appropriate training. In April 2001, a system was devised to enable safety training
to be carried out at our overseas agencies; this will be introduced as the necessity comes along.
Safety 2000 Training Courses and Contents
Training Course

Contents

Basic Safety Training

For all TEL Group employees and contractor workers who work at TEL Group
companies. This training usually takes place upon hiring and covers the TELGroup’s safety principles, basic information on health and safety laws andother relevant laws and regulations of the country of worksite, basic
knowledge about safe work procedure, and basic health care information. A
Basic Safety Training Certificate is valid for three years. Employees must takerefresher courses, which include details of new safety rules, within three
years after completion of the Basic Safety Training.

Advanced Safety
Training

For all TEL Group employees and contractor workers companies who are
engaged in work at TEL Group plants or other worksites. Employees learn
about risk assessment and other techniques to ensure that all work is carriedout safely. Training involves hands-on work with protective gear and othersafety equipment. An Advanced Safety Training Certificate is valid for one
year. Employees must take refresher courses, which include details of newsafety rules, within one year after completion of Advanced Safety Training.

Safety Training for
Employees who Visit
and Work Overseas

Employees learn about the safety laws and regulations and work rules that
apply when engineers are sent from Japan to work for TEL Group customers
overseas.

Safety Training for
Employees Stationed toWork at Customers’ Plants

Special safety training is carried out as required when employees are sent towork at plants run by Tel Group customers.

Equipment-Specific
Safety Training

Safety training for engineers on each specific equipment (TEL Group
products).

Safety 2000 Training system
Equipment engineers

Equipment Specific Training

Employees stationed towork at customers’ sites

Company Company Company Company Company Company
A
B
C
D
E
I

Engineers who visit
and work overseas
Engineers at our factories
and customers’ sites
All employees

Japan

U.S.A.

Korea

Individual European countries
Taiwan Europe Common

Advanced Safety Training
Basic Safety Training■ Accident Reports
At the TEL Group, we do everything possible to protect the health and safety of our employees,
our customers, and everyone involved with TEL Group business activities. However, regardless of
the amount of attention we pay to safety matters, there is always a risk of an unforeseeable accident,
or of an work-related injury or accident caused by fatigue. In the event of such unfortunate
circumstances, it is vital that the accident be reported immediately to the superior or the relevant
sections or departments. The first step toward eradicating the recurrence of such accidents is thereporting.

■ The Significance and Handling of Accident Reports
Immediately reporting major or notable accidents to management (as well as to any other relevant
individuals in the business unit and area concerned) will allow for the quick appropriate response,
and will allow the prevention of similar accidents in the future.
Initial reports should be delivered by e-mail or fax within 24 hours after the accident either by the
person(s) involved or by those who witnessed the accident.

■ Prevention Measures
Whenever an accident occurs, the root cause and any contributing factors must be carefully
clarified and resolved one by one. At the TEL Group, after reviewing each hazardous work that
may lead to an accident, and the places where they were most likely to occur, we began conducting
and promoting a procedure known as the Safety Management By Walking Around (SMBWA) as
an effective means of preventing accidents. During these walking, participants strive to raiseawareness of safety matters both within and outside the company by paying careful attention toeach of dangerous practices and offering guidance on the use of protective equipment (helmets,
safety glasses, safety shoes, safety harnesses, etc.).
As a result of these activities, we aim to reduce our 2001 Accident Reduction Target to 50% of theactual figures for 2000.

SMBWA in a clean room

Societal Contribution andEnvironmental Education■ Societal Contribution
To preserve, maintain, and improve the global environment, businesses, government, and local
communities must work together to conduct activities in close communication with each other. At
the TEL Group, we actively participate in environmental preservation activities conducted bycustomers and local communities, in accordance with our Principles of Environmental Preservation.
Below is a listing of the some of the activities our plants have done to contribute to their local
communities.

■ Examples of Notable Activities

Yamanashi plant• Cooperates with and conducts Japanese Red Cross blood drives(1987: received commendation from Governor of Yamanashi Prefecture; 1991: received acertification of appreciation from the Minister of Health and Welfare)• Co-sponsors the Takedanosato Fireworks Festival• Makes annual donations to a local newspaper’s welfare and culture foundation. Donations arecollected in collection boxes provided in the plant’s premises• Contributes to the Red Feather Community Fund
• Allows plant parking lots to be used for events held by Nirasaki City
• Offers summer internships for local junior high school students• Conducts plant tours for local students• Collects and donates used postage stamps and new year’s towels• Contribution to construction costs of the Kofu Chamber of Commerce and Industry Hall
• Installed blinking intersection rivets on roads from the plant to intersections with major thoroughfares• Donates to and otherwise supports local organizations (e.g., volunteer fire department)• Conducts traffic safety activities under the auspices of the Nirasaki Police Department, including
selection of Traffic Etiquette Ladies• Contributes to costs of erecting mercury-vapor lamp posts along major prefectural highways• Contributes to ward expenses for nearby municipalities• Conducts beautification activities on and around the plant grounds• Provides instructors for Yamanashi Prefecture’s Technical Challenge School
Gives elementary and junior high school students throughout the prefecture the opportunity to experience
the wonder and to appreciate the importance of manufacturing.

• Co-sponsors and participates in the Shingenko Festival
Around 40 employees attended

Scene from the Shingenko Festival

Tohoku plant• Co-sponsors the Esashi Summer Festival• Co-sponsors the Mizusawa Fireworks Festival• Cooperates with and conducts Japanese Red Cross blood drives• Organized the Young Drivers Club made up of employees under 25 years old
The plant formed the Young Drivers Club at the request of the Esashi Police Department, with the aim ofpreventing traffic accidents among young drivers under the age of 25. Five representatives attended Esashi
City’s “Challenge 100” driving safety seminar and received commendations for remaining “accident-free.”• Stations personnel at the plant’s two entrances during morning rush hour to remind employees todrive safely in conjunction with Traffic Safety Week in spring and fall
• Encourages employees to contribute to a Year-end charity Fund Campaign and to the Red Feather
Community Fund Campaign for donation• Collects and donates used postage stamps• Offers plant internships for national college of technology students and technical high school students• Participates in clean-up campaigns in the industrial park as a member of the Esashi Industrial Park
Occupant Committee
Every May and October, plant employees participate in a clean-up campaign sponsored by the Esashi
Industrial Park Occupant Committee. The campaign involves picking up trash along the roads inside theindustrial park, as well as other beautification activities.

• Co-sponsors and participates in the Esashi Folk Music Festival
130 people participated.

Clean-up campaign

Scene from the Esashi
Folk Music Festival

Sagami plant• Contributes to the Kanagawa Community Fund
Association• Cooperates with and conducts Japanese Red Cross blood
drives• Co-sponsors and contributes to the Lake Tsukui Cherry
Blossom Festival• Contributes to Kawajiri Hachiman Shrine• Contributes to the Kanagawa Green
Trust Foundation’s Greenery Fund
• Offers internships to local junior highschool students• Received prize for efforts from theGovernment of Kanagawa Prefecture
for recycling promotional activities

Work study program
for local juniorhigh school students

Commendation for promotionof recycling activities

Ozu plant• Offers plant internships to local high school students
The plant offers internships to local commercial high school students, who spend a week in various
departments.

• Participates in Ozu town intercorporate sports festival• Helps remove snow from nearby roads during winter• Co-sponsors the Azalea Festival and Jizo Festival• Participates in 180 Day Driving Safety Contest
The contest is sponsored by the Ozu Police Department for local companies. Employees participates thecontest in teams of five. The object is for teams to go 180 days with no traffic accidents or violation.

• Participates in the annual Ozu town Environmental Beautification Campaign
Plant employees pick up trash on and around the plant grounds at certain times and days during June
(Environment Month).

Beautification activities

Certificate of appreciationfrom the Japanese
Red Cross Society• Cooperates with Japanese Red Cross Society blood drives
The plant was commended for its many years of cooperation.

Saga plant• Conducts cleaning and lawn mowing in nearby public parks• Promotes a campaign to discourage drivers from leaving their engines running while stopped as one
measure to prevent global warming• Cooperates with and conducts Japanese Red Cross Society blood drives• Donated computers to the Tosu Library• Collects and donates used postage stamps andtelephone cards• Participates in the Tosu City Trash
Reduction/Recycling Business and Eco OfficeCommendation Program
In February 1998, the Saga plant was awarded acertificate by Tosu City in recognition of the plant’s
previous efforts to address environmental issues. The
plant has been and will be inspected and recertified at
two-year intervals.

Eco Officecommendation

Eco OfficecertificatesKumamoto plant, Koshi plant• Conducts beautification activities on and around the plant grounds
During June (Environment Month) and October (Hygiene Month), plant employees clean up the plantgrounds and its environs, led by members of the Safety and Hygiene Committee and Safety Promotion
Committee.

Employees involved in beautification activities■ Environmental Education
At the TEL Group, we conduct environmental education
for all grades of employees, including newly hired ones. In
our advanced education program, we educate executives,
managers and internal auditors, cultivating specialized
knowledge. We also conduct special training in routine
operations and management for employees involved withsignificant environmental aspects. We strive to increase
their knowledge and emergency preparedness.

Environmental
Education Hierarchy

Advanced education
Special training
General education
Education for new employees■ Other Education Activities
We also publish environmental information on the TEL Intranet Web site, including updates on
the latest environmental trends and the status of our environmental initiatives. We are thus
striving to share information within the TEL Group and further educate employees.

Environmental homepage
on TEL Intranet

Other Activities■ Other Activities
At the TEL Group, we have a system for assessing and awarding for contributions to theimprovement and development of EHS (Environment, Health, and Safety) activities. Any
individual, group, or team affiliated with the TEL Group who makes a contribution to EHS
activities can be nominated for commendation. The winners were selected after carefulconsideration and presented with awards during the Business Strategy Meetings at the end of fiscal
year.

■ EHS Awards
Tokyo Electron Group: Safety Training Master Trainer TeamThe Safety Training Master Trainer Team received a commendation in recognition of their work indeveloping the various courses that make up the safety training program and for their actual efforts
in carrying out safety training.

The Master Trainer Team from Tokyo Electron Kyushu Limited

Diffusion Systems (DS): Chemical Substances Safety TeamThe Chemical Substances Safety Team received a commendation recognizing their work indeveloping and implementing a training system for the handling of chemical substances and inestablishing a test system for the early detection of potential chemical substance exposure.
Etch Systems (ES): Energy Conservation Promotion TeamThe Energy Conservation Promotion Team received a commendation being recognized for theirwork in devising techniques for saving energy when operating the dry pumps, chiller units, andgas-circulation systems used in etch systems and for their energy-saving designs.

Environment, Health and Safety Center
30-7 Sumiyoshi-cho 2-chome, Fuchu City, Tokyo 183-8705
Tel: 042-333-8052 Fax: 042-333-8477
This report is printed on recycled paper.