Organizational Structure for Environmental Preservation
In TEL we have developed an organizational structure to promote

TEL Group's Organizational Structure for Environment,
Health and Safety (EHS)

environmental and safety issues, with the president of Tokyo Electron

President and CEO

Limited as the top person responsible.

Corporate EHS Committee
This committee develops guidelines and actual proposals relating to the environment, health and safety management activities ofTEL and its group, as well as proposals, considerations and decision-

Corporate EHS Committee

making on targets and activity plans. The president of Tokyo Electron(Members: President of
eachmanufacturing companies)

Limited serves as the committee chair and provides common direction and problem solving on environmental, health and safety issues

Tokyo Electron
Officer in charge ofenvironmental affairs

Chair of Committee:
President of Tokyo
Electron Limited

for all group companies.
Environment, Health andSafety Center

Environmental Health and Safety Committee
The Tokyo Electron Group Health and Safety Committee
The decisions of the Corporate EHS Committee are implementedin detail by the Environmental Health and Safety Committee, whose
members are primarily theEnvironmental Management
Representatives from each

Members: Environmentalmanagement representatives from manufacturing
plants, representatives
from subsidiaries

TEL Group Health andSafety Committee

Worldwide Product
EHS Committee

Members: Secretariats of theregional EHS committees,
representatives fromsubsidiaries

Members: Representatives from eachBusiness Unit

Environmental management representatives from eachmanufacturing plant

Environmental management representatives from each
office facility

Environmental management committee
at each manufacturing plant

EHS committee at
each office facility

EHS Committee

manufacturing plant, and by
the Tokyo Electron Group
Health and Safety Committee, which also covers officefacilities.

A meeting of the Environmental
Health and Safety Committee

Worldwide Product EHS Committee
The Worldwide Product EHS Committee is in charge of common

Product EHS Committees of eachBusiness Unit

environmental measures relating to semiconductor production equipment and its parts manufactured and sold by TEL, as well as themanufacturing of flat panel display production equipment and its
parts. A corporate officer serves as the chair of the committee, which
considers and makes decisions on necessary policies and measures.
For environmental problems relating to individual products, theProduct EHS Committee ofSubcommitteeseach Business Unit is pro-•Chemical substancesmoting improvements in the•Waste control

Subcommittees
Environment
Safety•Energy and resource

related design and manu-conservation

facturing, marketing andHealth•Environmental impact

assessment

service.

•Product review

A meeting of the Worldwide Product EHS Committee

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

20

Environment, Health and Safety Management

Environmental Management Systems (1)At our manufacturing plants we are running environmental management systems based on ISO 14001.
At office facilities we have our own TEL Eco-Activity management systems.

Stance on Environmental Management Systems

Conceptual Map of Environmental Management Systems

We have developed environmental management systems (EMS)
based on ISO 14001 in order to move ahead steadily with our activiContinuous
improvementties to preserve the environment and reduce environmental burden.
Among our manufacturing plants, seven affiliate companies and sites
in Japan had obtained ISO 14001 certification by the end of November 1999. Today we are aiming for this certification at other plants,

Management review

including those overseas, and every year we create targets for rela-

Environmental policies •Environmental impact
and planningassessment•Legal requirements

ted activities and make ongoing improvements. In addition, we un-•Objectives anddergo third-party audits annually and update our systems according-•Environmental mana-ly. At office facilities, we have introduced and are operating a simpli-targets
gement program

Checking andcorrective action
Implementation andoperation

fied EMS that we call "TEL Eco-Activity," an independent environ-•Monitoring andmental management system within TEL and its group.

•Corrective and preventive action

Effectiveness of Environmental Management Systemsmeasurement•Structure and responsi-bilities•Training, awareness andcompetence•Communication•Internal environmental audits•EMS documentation anddocument management

External Certification (ISO 14001)

At each sites, we determine the types of actual and potential en-

Certification Date

Expiration Date

Certification No.

vironmental impacts that arise from various aspects of business ac-Sagami

December 10,1997

December 10, 2003

EMSC-1110

tivities and product manufacturing and services, then evaluate theseTohoku

February 19, 1998

February

19, 2004

EMSC-1118

SagaMarch12, 1998

March12, 2004

EMSC-1119

Kumamoto/Koshi

March26, 1998

March

26, 2004

EMSC-1120

environmental dimensions and set clear objectives and targets in or-Yamanashi

May15, 1998

May15, 2004

EMSC-1124

der to reduce the environmental impact. We prepare environmentalOzu

August27, 1999

August27, 2002

EMSC-1414

environmental impact assessments. Next, we determine the primary

Plant

management programs (EMP) that include clear responsibilities, aswell as procedures and schedules, and then supervise, monitor andrecord the key operational points.

Plants Certified under ISO 14001
and Running TEL Eco-Activities

ISO 14001-certifiedplants
TEL Eco-Activity

Introduction of TEL Eco-Activity
Environmental initiatives have generally been implemented firstat manufacturing plants, which started obtaining ISO 14001 certifica-

Tokyo Electron
Sapporo Limited

North Americation in 1997. At our Akasaka, Fuchu, Yokohama, Osaka, Sapporoand Narita office facilities we have instituted our own independent

Tokyo Electron Tohoku
LimitedTohoku Plant"TEL Eco-Activity" environmental management systems based on ISO
14001. During fiscal 2001, besides starting an environmental educa-

Tokyo Electron Arizona, Inc.
(certification pending)tion program for 2,500 employees, we also established guidelines
and carried out environmental impact assessments. In April 2002,

Tokyo Electron AT Limited
Yamanashi Plant(Fujii and Hosaka)

Tokyo Electron Kyushu Limited
Saga Plant

we began operation of TEL Eco-Activities. These activities are still
very new, and no specific issues have yet to emerge, but after a oneyear trial we plan to make improvements to boost the effectiveness ofthe systems.

Tokyo Electron Limited
Osaka Branch Office
Tokyo Electron KyushuLimited
Ozu Plant
Tokyo Electron Kyushu Limited
Kumamoto Plant
Tokyo Electron Kyushu
LimitedKoshi Plant

19

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

Tokyo Electron Limited,Fuchu Technology CenterTokyo ElectronLogistics Limited,Narita Logistics CenterTokyo Electron Limited
Akasaka, WorldHeadquarters

Tokyo Electron Device
Tokyo Electron EE Limited Limited, Yokohama
Head Office
Sagami Plant

Environment, Health and Safety Management

Environment, Health and Safety Management (2)Environmental Auditing

T O P I C S

We are regularly implementing third-party audits by external certification bodies, and we are implementing our own internal environmental audits at each plant that has an environmental managementsystem. The results are reported to the top management at eachplant, after which reviews and system improvements are established.
A system to certify auditors for the internal audits is in place at each

External Audits
Plants that have obtained ISO 14001 certification
undergo an annual audit from an external certification
body. Measures are taken immediately to correct any
deficiencies. Furthermore, other plants and committees also check to ensure that they do not have similar deficiencies.

plant. We are considering the creation of a framework for peer audits(mutual audits within TEL) starting in fiscal 2002, in order to rectify
deficiencies and promote parallel adoption of good practices

Examples of Issues Arising from 2001 External Audits
Plant
Yamanashithroughout TEL.

Plant

Internal Environmental Audits

TohokuPlants that have established an environmental management sys-Plant

tem are conducting internal environmental audits on a regular basis.
After obtaining certification, each plant has continued to maintain excellent standards in overall assessments, indicating that these systems are steadily taking root.
Internal Environmental Audits (Fiscal 2001)
Plant

TohokuSagami

Yamanashi

SagaKumamoto/KoshiOzu

Month of audit(1st audit)

Nov '01

Oct '01

Oct '01

Apr '01

Oct-Nov '01

May '01

Month of audit(2st audit)

Feb '02

Aug '01

Month of audit(3st audit)

Dec '01

Number of Certified Environmental Auditors in the TEL Group(as of April 2002)
Saga

Kumamoto/KoshiOzu

Total

462733

24153

2109

85426217

8155

35

87

50370

Plant

TohokuSagami Yamanashi

Chief auditors

176Auditors

18Total35

Saga Plant

We are complying with all relevant laws and regulations, and, in• Deficiencies in implementation of general education.
• Shortcomings in checking reviews of environmental

impact assessments.
• Environmental management program notprepared by the resource conservation committee.

Monitoring of outflow from wastewater treatment
facilities is being conducted here every two months,
based on a pollution prevention agreement with thelocal city of Esashi in Iwate Prefecture. All amounts
measured in fiscal 2001 were within the limits required under relevant laws
and regulations. In addition,
regular monitoring of exhaust from boilers is being
done in accordance with theClean Air Law, and these results have also been favorable.
Wastewater treatment facilities

Measurement Results of Wastewater
Treatment Facilities
Standard

97

98

9900

01

6 8.4
pH

6.4
7.3

6.6
7.7

6.6
7.4

6.7
7.4

6.8
7.5

BOD (note 2)

120
mg/l

2.9

0.8

0.5

1.4

0.8

SS (note 3)

150
mg/l

Concentrations

19

less than less than less than
1.0
1.0
1.0

5

Colon bacilli
2,300
less than less than less than less than less thanparticles/cm3
count30
30
30
30
30

fact, have established stringent independent standards that exceed

Hexaneextracts

3mg/l

1.6

legal requirements. During safety inspections we check on the man-Fluorinecompounds(note 4)15mg/l5.1

agement of chemical substances, water pH levels and other items,

Note 1: For hydrogen ion concentrations, this table shows annual maximum and minimum values. For other items it shows the annualmaximum.
Note 2: Biochemical oxygen demand, an indicator of pollution in rivers
and other water bodies.
Note 3: Suspended solids. Small particulate matter floating in water.
Note 4: The standard for fluorine compounds was 15 mg/l until the endof December 2001, and 8 mg/l thereafter.

and we are meeting high standards through the cumulative results ofour day-to-day efforts.
During fiscal 2001, no environment-related accidents, violations,fines or complaints occurred, and there were no related legal actions.

21for energy conservation patrols.
• Suitability of standards to select suppliers not adequately clear.

Monitoring of Wastewater Treatment-An
Example from the Tohoku Plant(note 1)

Complying with Laws and Regulations

Main issues• Inadequate rotation of the personnel responsible

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

less than less than less than less than
0.5
0.5
0.5
0.5
6.9

4.0

3.9

6.9