Our Approach to Reducing CO2 Emissions
in the Semiconductor Industry
Global warming poses serious problems to the continued existence of human life on Earth. TEL will respond morestrongly to this issue and work for reductions in our CO2 emissions as our contribution to the solution of thisproblem by the semiconductor industry.

Issues in the Semiconductor Industry
The CO2 emissions by the Japanese electric and electronic
products industry accounts for about 3% of all industrial
emissions (see graph “Emissions Industries in Japan). The
structure of this industry has greatly changed in the past 10years: manufacturing has moved away from heavy electricequipment and home electric appliances, which consume
relatively low amounts of energy and involve much assemblyof components, to products requiring high-precision processes. The sector of semiconductor device production is aheavy energy consumer and has gone through a period ofexceptional growth, during which many new production
facilities have been built. The energy consumption far outstrips the preliminary estimates (based on an excerpt from a
Nippon Keidanren report on measures against global warming). It is predicted that CO2 emissions involved with production of semiconductors, liquid crystal displays and plasma
displays will increase, raising emissions for the industry as awhole.
In the wake of the Kyoto Protocol, Nippon Keidanren has
published an environmental action plan. They proposed thegoal of a 25% reduction by CY 2010 in production-caused
CO2 emissions per unit cost, relative to the CY 1990 level,
for the four groups of electric and electronic groups, which
include the semiconductor industry. One of the measuressuggested is to reduce energy consumption in large-scaleclean rooms where semiconductors are produced.
Meanwhile, semiconductor industry groups in the EU,
Japan, South Korea, the U.S. and Taiwan have announced
through the World Semiconductor Conference (WSC) thatthey will reduce emissions of the greenhouse gases PFCs*
by 10% by CY 2010.
As such domestic and international efforts get further
underway, our customers are also stepping up initiatives,
meaning that they also expect more from TEL.
* PFCs: Perfluorocarbons. Gases belonging to this category are used in semiconductor production processes, for silicon wafer etching and for cleaning the chambers of film
forming equipment.

Approaches Taken by TEL
A close look at the life cycle of our semiconductor production equipment reveals that its environmental burden, especially as measured by CO2 emissions, is high during operation (see P.18). Thus, reducing emissions during operation is
the main thrust of our efforts.
The electric power consumption of production facilities(lines) doubled as wafers were upsized from 200mm to300mm. Some tentative forecasts have even warned thatthe growth of energy demand from that sector exceeds thegrowth in power available from electrical generation facilities. The industry has tackled the problem of improving
equipment efficiency in order to reduce energy consumption, but the big gains have already been made, and no great
progress in that realm can be realistically expected in thefuture. Hereafter, it will be necessary to pursue energy savings throughout the factory from a variety of viewpoints– not only equipment, but also in methods of accomplishingtasks and by sharing technical information. New efficiency
programs must encompass devices, equipment and facilities. All the departments of TEL – development, design,manufacturing and management – will pull together as ateam to develop new environmental technology for ourequipment.

Percentage of Total World Carbon Dioxide Emissions
Due to Top 15 Nations (CY 2000)

Others
27.9%

Ukraine 1.5%

U.S.
24.4%

Australia 1.5%
China
12.1%

France 1.6%
Saudi Arabia 1.6%
Mexico 1.8%
S. Korea 1.9%

Russia 6.2%

Italy 1.9%

Japan 5.2%
Canada 1.9%
India 4.7%
Great Britain 2.5%
Germany 3.4%
Source: Oak Ridge National Laboratory
Quoted from Japan Center for Climate Change Actions (JCCCA)
http://www.jccca.org/

Emissions of Industries in Japan (FY 2003)
Automobile
manufacturing 1%

Mining 1%
Others16%

Automobile
components 1%

Steel
36%

Electric/electronics 3% Cement
5%
Paper
6%
Electricpower
Chemicals
7%
15%
Petroleum
9%

Source: Ministry of Economy, Trade and Industry

TOKYO ELECTRON Environmental and Social Report 2005

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