Products for Reduced Environmental Impact
At the TEL Group, we have endeavored to satisfy our customers by offering services and products
such as semiconductor and LCD production equipment and electronic components. Moreover, as
stated in our Principles of Environmental Preservation, we will continuously endeavor in unison withcustomers to reduce TEL Group products’ environmental burden. Specifically, every plant will
undertake to develop environmentally benign products, setting product-specific targets for energyand resource conservation, reduction of chemical usage, and other such matters.

■ Examples of Key Initiatives
Business Unit / Plant

Description of Initiative

Etch systems / Yamanashi plant• Reduction of power consumption

Single Wafer Deposition /Yamanashi plant• Reduction of power consumption• Reduction of N2, exhaust

LCD systems / Yamanashi plant• Reduction of power consumption

LCD systems / Ozu plant• Reduction of chemical usage

Cleaning systems / Saga plant• Reduction of chemical solution usage• Reduction of IPA usage• Reduction of pure water usage• Reduction of power consumption

Clean track /Kumamoto plant, Koshi plant• Reduction of chemical solution usage• Reduction of power consumption

Diffusion systems /Sagami plant, Tohoku plant• Reduction of equipment’s footprint• Reduction of vinyl chloride resin cable usage• Establishment of procedural guidelines for equipment disposal• Reduction of power consumption■ Measures for Reduction of Environmental Impact in Physical Distribution[Use of Air-Filled Packaging Materials]
Until recently, we used polyurethane foam and environmentally-friendly, biodegradable loose-fillpackaging material to package our parts for shipping around Japan and overseas. However, as ofthe end of 2000 Tokyo Electron Logistics Limited has been promoting the use of air-filledprotective packaging at its offices around the country.
This type of packaging cushions the contents in an airfilled bag made of translucent film. From anenvironmental perspective, this new packaging has anumber of advantages over the old packaging: thepackages can be reused any number of times simply by
refilling with air, for example, and they produce little
waste. Other advantages are that they are cleaner, offer
Air-filled packaging material
easy access to contents when opened, and require little
storage space when not in use.

■ Organization for Improvement of Products’ Environmental Problems
Common issues related to improvement of environmental problems involving the semiconductor or
LCD production equipment manufactured and sold by the TEL Group are reviewed and decided uponby the WW Product EHS Committee chaired by the director in charge of environmental issues.
For product-specific environmental problems, the concerned design/production, sales, and/or
service department conducts activities to improve the problem under the direction of theapplicable BU Product EHS Committee.
Director in charge ofenvironmental issues

Organization for key individual products
BU Product EHS Committee

WW Products
EHS Committee
Engineering, sales, service
Secretarial: Environment,
Health and Safety Center
WW:
BU:Initiatives to address environmental issues

World WideBusiness Unit■ Targets for Reduction of Product-related Emissions and Consumption
In product development, one of our aims is reduce products’ environmental impacts such as gas
emissions and power consumption. Toward this end, we have set targets for the 2002 models ofour semiconductor production equipment for 200 mm and 300 mm wafers based on the 1997 models of our equipment for 200 mm wafers, as shown in the table below.
Product EHS Roadmap
Wafer Size1997 Standard
200 mm2002 Target
200 mm2002 Target
300 mm

HAP emissions

10.40.5

VOC emissions

10.40.5

PFC emissions

10.40.5

Power consumption

10.8

1

Water consumption

10.8

1

Gas consumption

10.8

1

*Targets for 300 mm diffusion, LP-CVD equipment are set at 1.5 times the standard data.

• HAP: Hazardous Air Pollutants• VOC: Volatile Organic Compounds• PFC: Per-Fluoro Compounds

■ Fiscal Year 2001 Action Plan for Reducing Products’ Environmental Impact
The table below shows the TEL Group’s fiscal year 2001 action plan for developing
environmentally benign products based on the Product EHS Roadmap.
Issue

FY2001 Action Plan

Global warming
prevention

Reduction ofpower consumption

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce power consumption in fiscal year 2001.

Reduction of PFC
emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce PFC in fiscal year 2001.

Air pollution
prevention,
Safeguards
against acid rain

Reduction ofVOC emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce VOC in fiscal year 2001.

Reduction of
HAP emissions

Achieve the Product EHS Roadmap’s targets for 2002.
Adequately reduce HAP in fiscal year 2001.

Prevention ofozone layer
depletion

Restriction of use ofozone-depleting
substances

Promote disuse of HCFC substances

Promotion of recycling/reuse (dismantlement,labeling of materials,disposal)

Set targets for every product and commence action to achieve them.
Determine feasibility of incorporating information into work
procedures and manuals related to dismantlement and disposal.

Prolongation of life
span of equipment/partsFor every product, set targets for prolonging the life ofequipment/parts and commence action to achieve them.

Green procurement

Establish applicable foundations for “green” procurement products.

Lead-use restrictions

Share information regarding substitutes for lead solder.
Ascertain extent of lead usage in purchased products.

Introduction of LCA

Implement LCA for each primary product, to prevent globalwarming.

Reduction of
consumption of
depletable
resources

Purchased
products
Life-Cycle
Assessment (LCA)■ Preparation for Implementation of Green Procurement“Green procurement” means procuring parts based on environmental considerations in addition tothe conventional procurement criteria of quality, cost, and delivery period.

Conventional Procurement Criteria
quality+cost+ delivery period

The Green Procurement
Guideline pamphlet

Green Procurement Criteria
quality+cost+ delivery period + environmental considerations

The TEL Group’s Green Procurement Guideline was established in January 2001
and distributed to our suppliers throughout Japan. In addition, around 200
companies were invited to take part in green-procurement seminars held in
Tohoku, Sagami, Yamanashi, and Kyushu, where they were asked to cooperate in theimplementation of green-procurement policies. The first step in this process involves conducting
vendor assessments on the environmental initiatives implemented by our suppliers. The second stepinvolves an assessment of the environmental considerations for the parts procured by the TEL Group.

■ LCA Initiative
LCA (Life Cycle Assessment) is a technique for quantitatively assessing a product’s environmental
impact during the course of its life at each stage: from the raw-material stage through manufacture,transport, use, and disposal.
We can significantly reduce a product’s overall environmental impact by analyzing, assessing, andgiving priority to the rectification of any such major impact.

■ Examples of LCA Initiatives in Fiscal Year 2000
In fiscal year 2000, each business unit implemented LCA aimed at reducing global warming. One
feature common to all of these assessment results was that the environmental impact for all
products was the greatest at the use stage. Comparing the environmental impacts at the use stagefor each of these products, we found that the impact varied from product to product, with somehaving the greatest impact through the use of ultra-pure water, and some having the greatestimpact through power consumption. In the future, these assessment results will be considered in
the course of the development of new products.
*1) Example 1 of LCA Result: Cleaning System
UW300Z Overall
100%

98.5%

80

80

60

60

40

40

20
1.0%
00.3%

0.2%

0.1%

Raw
Manufacture Equipment Equipment
materialandtransport
use
production assembly

Disposal

UW300Z Use

(%)
100

CO2 Emissions

CO2 Emissions

(%)
100

55.6%

26.2%
20
4.8%
0Totalemissions

9.8%
0.6%

1.0%

1.9%

0.2%

Chemical Ultra Cooling Power Com- N2 gas Exhaust Consumsolution purefluid consump- pressedableswatertionair*2) Example 2 of LCA Result: Metal CVD System
UNITY-EP/Ti, TiN Overall
100%

96.7%

80

80

6060

4040

20
2.2%
00.9%

0.2%

Raw
Manufacture Equipment Equipment
materialandtransport
use
production assembly

0.1%

Disposal

Total

UNITY-EP/Ti, TiN Use

(%)
100

CO2 Emissions

CO2 Emissions

(%)
100

100%

58%

20011%

Powerconsumption

Exhaust15%15%

Coolingwater

N2 gasTotal

■ Examples of Product-Related Energy Conservation Initiatives
At the TEL Group, in order to reduce the overall environmental impact of our products, we areconsidering ways of reducing the environmental impact both of the existing products and of theproduct development process. Examples of initiatives introduced for existing and new products areprovided below.
1) Example of New ProductIn the development of the new UW300Z (300 mm ø) cleaning system, considerable improvements
were made over the old UW8000 (200 mm ø) model. For per wafer unit area, the amount of ultrapure water used was reduced by approximately 60%, exhaust emissions were reduced byapproximately 50%, and power consumption was reduced by approximately 40%.

UW300Z2) Example of Existing Product
The UNITY Ver.II (200 mm ø) etch system has achieved energy savings of approximately 30%
through the use of an energy-saving dry pump and through modification to the sequences andfreezer circuits in the chiller unit.

UNITY Ver.II