The Tokyo Electron Group has set goals for EHS activities and is promoting those activities
throughout the Group.

Goals and Results for EHS Activities in FY 2008
Action item

EHSmanagement

Results

EHS internal audit

Perform EHS internal
audit at plants and offices
across the supply chain

Conducted an audit at one site adding a supply
chain-related audit item and made corrections
based on the findings.

○

Energy-saving
equipment

Achieve the TEL
Roadmap1 indicators

Encouraged application to existing equipment○Product
initiatives forthe environment Measures to reduce
the use of regulatedchemical substancesin equipment

Reduce energy
consumption(1% decrease in CO2emissions per unit ofsales, as based on the Act
Concerning the Rational
Use of Energy)△

Achieved the goal of decreasing CO 2 emissions
per unit of sales by 1% from the fiscal 2007
level

○

Obtained accurate data on domestic logistics
and promoted modal shift○○

Continue to conduct audits

P.17

Develop standards and operate
related activities to achievecommitments under theTechnology for Eco Life slogan

P.20-23

Preparation and response withregard to the initial shipment in
the second half of fiscal 2009

P.24

Develop standards androadmaps, and operate related
activities to achieve theaforementioned commitments
Develop standards and operate
related activities to achieve theaforementioned commitments;
study on transportation systemfor exporting products

P.28

P.25

Waste reduction

Continue zero emission
efforts at manufacturing
plantsAchieved zero emissions at all manufacturing
plants
The recycling rate of the entire Group was ashigh as that of the previous fiscal year○

Continue zero emission efforts
and examine reduction in thetotal amount of waste

P.30

Reduction in thenumber of injury
accidentsReduce the number of
injury accidents by 30%
from the FY 2007 level

Achieved the target by reducing the number of
injury accidents by 40% or more from the fiscal
2007 level○Target a 25% reduction of
injury accidents in fiscal 2009
from the fiscal 2008 level

P.32

1 TEL Roadmap: Environmental policies and plans for the Group’s products ○ Achieved target △ Achieved 80% of target × Achieved less than 80% of target ー Item for which no goal was set

Environmental Accounting
Scope: Major plants and offices in Japan (in Sapporo, Tohoku, Miyagi, Akasaka, Fuchu, Yokohama, Sagami, Hosaka, Fujii, Amagasaki, Osaka, Saga, Kumamoto, Koshi, and Ozu)
Period covered: April 1, 2007 to March 31, 2008
We conduct environmental accounting according to Environmental Accounting Guidelines 2002 and Environmental Accounting Guidebook II issued by the Japanese Ministry of theEnvironment.

Environmental Protection Costs in FY 2008

(Thousands of yen)

Item

Main initiatives

Capital investment

1. Business area cost

Expense476,881

657,730
346,867

Prevention of air pollution, water pollution, soil pollution, etc.

385,561

1.2 Global environmental costs

Prevention of global warming, protection of the ozone layer, etc.

91,32077,233

1.3 Resource circulation costs

Efficient use of resources, reduction of waste, etc.

0233,630

0641,673

2. Upstream/downstream costs

Green purchasing, green procurement, etc.

3. Management activity costs

Environmental education, monitoring and measurement of environmental impact, etc.

4. Research and development costs

22,705219,168

Product R&D, etc.

01,741,927

5. Social activity costs

Tree planting and vegetation, supporting of local environmental activities, information disclosure, etc.

038,107

6. Environmental damage costs

Repairing of damage to the natural environment, etc.

007. Other costs

Other00499,586

3,298,605

Total

Economic Benefits of Environmental Protection Activities in FY 2008
Classification of environmental costs

Costreduction(Thousands of yen)
Details

AmountReduced electricity usage (e.g. benefit from suspending new facility-construction plan)-16,484• Water-related benefits

Reduced water usage (e.g. circulating of cooling water)-7,777• Paper-related benefits

Reduced paper usage (e.g. encouragement of duplex copying and use of electronic media)-1,032-2,560• Resource-related benefits

Reduced use of heavy oil and gas• Other benefits

Reduced use of liquid nitrogen and copying toners-9,730• Waste-related benefits

Reduced waste volume91,636• Benefits related to release into waters and soil

Reduced release into the sewage system

Total

SOCIAL Report• Benefits related to electricity and other energy

EHS Report

1.1 Pollution prevention costs

MANAGEMENT Report

Health andsafety

Saving energy

Achieve the TEL Roadmapindicators

300-mm products: Achieved the fiscal 2008
targets for two products out of six, andworking to achieve 2010 targets
Made progress in conducting survey on
six substances designated under the RoHS
Directive and replacing with alternatives that
do not contain such substances

Page in report

Highlights

Environmental
activities at
each plant orofficeAchievement
Plans and goals for FY 2009 onward
level

Goals for FY 2008

E H S Ac t ivi t y G o a l s a n d R e sul t s /E nvir o n m e n t a l Ac c o u n t in g

EHS Activity Goals and Results /Environmental Accounting-10453,949

TOKYO ELECTRON Environmental and Social Report 200819