Environmental Report

Environmental Activities of TEL Companies
We would like to introduce you to the environmental and safety approaches, activities and policies of two of our companies.

Tokyo Electron Kyushu Limited

Tokyo Electron AT Limited

Haruo Iwatsu

Hiroki Takebuchi

President andRepresentative Director

President andRepresentative Director

Reducing the Loss and Environmental Burden by
Improving Performance

We Promote EHS Activities
Under Our “Quality-ism” Ideology.

The main business of Tokyo Electron Kyushu Ltd. is research anddevelopment, design, manufacturing, and start-up of semiconductor/FPD
production equipment based out of Kumamoto. The biggest environmental challenge that we are facing right now is the prevention ofwaste production. We are reducing the number of defective units byimproving quality and reducing the amount of energy used at thefactory by improving the efficiency. If we can improve yields byenhancing the performance of our product, the environmental andcost benefits will be immense. It is our belief that we should, ofcourse, make efforts to conserve energy, but at the same time, weshould do our best to boost performance throughout manufacturing
activities.
In order to realize heightened performance for our customers, wehave been evaluating our semiconductor production equipment at fivesites. In the future, we plan to review this situation, integrate all themanufacturers’ evaluations of products at five sites, and reduce the useof electricity and chemical solutions from an aggregate point of view.
We would also like to review the relationship between the cleanlinessof the clean room and equipment performance from a technical pointof view, and attempt to reduce the environmental burden as much as
possible while maintaining product performance.

Tokyo Electron AT Ltd. made its start in April 2004 by integrating
functions that were separated between the Yamanashi and Tohoku
areas with the dual aims of boosting morale and efficiency. At thesame time, we are also participating in a company-wide campaignthat is promoting the theme of “Quality-ism.”
The word “quality” carries with it a strong connotation of “safety.”
Based on the belief that no company can exist in society without establishingsecurity or safety, we are running safety-oriented corporate activities by allocating human resources to evaluating safety from the development phase.
We also focusing on paring the amount of exhaust gas and electricity used from the design phase and make efforts to reduce thefactory’s amount of final waste, starting from the procurement phase.
In recent years, semiconductor production manufacturers havecome to require semiconductor equipment makers, like TEL and othercompanies, to perform thorough tests before shipping products sothat they can save time by avoiding their own test-runs themselves
and jump immediately into mass-producing products. As a result, theenvironmental burden of activities at our company is increasing, andit has to be said that it is more difficult for us to trim energy consumption.
On the other hand, conversely, this is reducing waste and energy
consumption for our customers.
Today energy conservation has become a major mission for homeelectronics makers. We continue to take great pride in the fact thatthe devices made from the semiconductors manufactured with ourequipment will be used to produce environmentally-friendly products.

My Eco-life

My Eco-life“Kumamoto has delicious waterand air. My house is surroundedby trees in the middle of nature
where we grow chemical-freevegetables and tea.”“On my days off, I like to take walks
in the nature and practice Qigong
exercise breathing techniques formy health.”

TOKYO ELECTRON

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Environmental Sustainability
Report 2004