Environmental
Report 2003
Environmental Sustainability Report 2003

Corporate Profile
Company name:Tokyo Electron Limited (TEL)

Address:

TBS Broadcast Center, 3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481
Phone: +81-3-5561-7000

Representative:

Kiyoshi Sato, President & CEO

Established:

November 11, 1963

Capital:¥47,223,000,000 (as of March 31, 2003)

Main products:

Production equipment for semiconductors and flat panel displays (FPDs), computer networkrelated products, electronic components

Employees:

1,351 (as of March 31, 2003)

Group employees:

10,053 (as of March 31, 2003)

Sales (consolidated):¥460,580,000,000 (fiscal year ending March 2003)

Net Sales (Consolidated)

Ordinary Profit (Consolidated)(100 million yen)(100 million yen)

1,192

7,239

4,606
4,407

4,178

3,138

338

62
0
0

1999.3

2000.3

2001.3

Net Sales by Division(Consolidated)2002.3

2002.3

1999.3

2000.3(100 million yen)Computer network:172
Other:13

2

2003.3

195

Sales by Region(Semiconductor Production Equipment)(100 million yen)

2003.3

2001.3TEL Group Employees(persons)

Southeast Asia:206

China:2018,567Electronic
components:774

10,236

10,171

10,053

2001.3

2002.3

2003.3

8,946

Japan:974
Taiwan:670

Semiconductor and FPD
production equipment:3,647

United States
:743

Korea
:573

0

1999.3

2000.3

Europe:280

Capital Expenditure(100 million yen)

R&D
(100 million yen)

494

529

538
501

371

309
268
190
169
124

0

1

1999

2000

2001

TOKYO ELECTRON Environmental Sustainability Report 2003

2002

2003

(FY)

0

1999

2000

2001

2002

2003

(FY)

Environmental Sustainability Report 2003

CONTENTS
Corporate Profile

1

Contents, Editorial Policy, Scope

2

Toward a Sustainable Society

3

Editorial Policy
This is the fourth Environmental Report of Tokyo Electron (TEL).
Our first priority has been to make this report comprehensive andBusiness of Tokyo Electron

5

TEL and Environmental Impact

7

initiatives relating to the environment, health and safety, as well as

Environmental Targets and Results

9

the achievements of our activities to contribute to society during FY

Environmental Activities of TEL Group Companies

10

2003. Because TEL has wide-ranging business operations, we hopeeasy to read, in order to help readers gain an understanding of ourthat this report will be widely read and that it will help further en-

Eco Products

hance our communication with all of those with whom we do busi-

Reducing the Environmental Impact of Products

11ness. We welcome your opinions and comments on this report soGreen Procurement

14that we may reflect them in our future editorial policies.
The Ministry of the Environment’s Environmental Reporting

Eco Factory

Guidelines (FY 2000 version) and the guidelines of the Global Re-

Waste Reduction and Recycling

15

Energy Conservation17

for corporate reporting, helped to guide the creation of this report.

Resource Conservation

18

In this report, the unit tons refers to metric tons (1,000kg).

Chemical Management

19

porting Initiative, an organization that sets international guidelines

EHS Management
EHS Management System

21

Environmental Accounting

24

Scope

Health and Safety

25

Organizations covered: This report covers the activities of the entire

EHS Education

27

Tokyo Electron Group (as of August 2003).

Communication with Stakeholders

28

Societal Contribution

29

Comments from Stakeholders

31

Site Report: Kumamoto and Koshi Plants

32

Japan
Tokyo Electron Ltd., Tokyo Electron Tohoku Ltd.,Tokyo Electron AT Ltd., Tokyo Electron Kyushu Ltd.,Tokyo Electron EE Ltd.,Tokyo Electron Software Technologies Ltd.,Tokyo Electron FE Ltd., Tokyo Electron Device Ltd.,Tokyo Electron Leasing Co., Ltd., Tokyo Electron Logistics Ltd.,Tokyo Electron Agency Ltd.

Environment and Safety Milestones
May 1994 Standardization, Environment and Safety Center (Environment, Health & Safety Center) establishedMar. 1996 Product Safety Subcommittee (TEL Product EHS TechnicalCommittee) launched
Apr. 1996 Environmental Subcommittee (TEL EHS Committee) launched
Dec. 1997 Sagami plant acquires ISO14001 certification
Feb. 1998 Tohoku plant acquires ISO14001 certification
Mar. 1998 Saga plant acquires ISO14001 certification
Mar. 1998 Kumamoto and Koshi plants acquire ISO14001 certification
May 1998 Yamanashi plant acquires ISO14001 certification
Sep. 1998 TEL Group Credo and Principles on Environmental Preservation establishedNov. 1998 TEL Group Credo and Principles on Safety & Health established
June 1999 Safety First policy establishedAug. 1999 Ozu plant acquires ISO14001 certification
Dec. 1999 “Health, Safety and the Environment” added to the Management Philosophy
Apr. 2000 Environmental accounting introduced
Apr. 2000 Unified safety training system “Safety 2000” implemented
Dec. 2000 First TEL Environmental Report publishedApr. 2001 Product life cycle assessments begin
Oct. 2001 Green procurement launched
Oct. 2001 Environmental education introduced in facilities not yet certified under ISO14001
Apr. 2002 Original “TEL Eco-Activity” (environmental management system based on ISO14001) begins

2

TOKYO ELECTRON Environmental Sustainability Report 2003

North America
Tokyo Electron America, Inc., Tokyo Electron Massachusetts, LLC,
Tokyo Electron Arizona, LLC, Supercritical Systems, Inc.,
Timbre Technologies, Inc.
EuropeTokyo Electron Europe Ltd., Tokyo Electron Italia S.p.A.,
Tokyo Electron Deutschland GmbH, Tokyo Electron Nederland B.V.,
Tokyo Electron Ireland Ltd., Tokyo Electron Israel Ltd.,Tokyo Electron France S.A.R.L.
Asia
Tokyo Electron Korea Ltd., Tokyo Electron Taiwan Ltd.,Tokyo Electron (Shanghai) Logistic Center Ltd.

Period covered: This report contains data for the period April 1,
2002 to March 31, 2003 (FY 2003).
Areas covered: This report addresses TEL environmental management, as well as social and economic aspects ofcorporate societal contributions and other activities.
We will publish the Environmental Report of TEL annually.

President’s Statement

Toward a Sustainable Society
We are committed to doing business in a way that moves us toward a sustainable society. In this context,
we give a high priority to the environment, health and safety.

conductor manufacturing. A common feature of this equipment is that large amountsof electricity and chemicals are required in
the process of making semiconductors and
FPDs. We believe that one mission of TEL is
to create equipment that can fabricate semiconductors and FPDs while placing a smaller
burden on the environment.

Respect for People is
Our Basic Philosophy
Since TEL was founded, we have had“Respect for People” as our basic belief,
and our corporate message has been

Kiyoshi Sato
President & CEOTokyo Electron Limited

Our Commitment

Our Policy: Stay on
the Leading Edge in
Semiconductor Technology
has continually led technological innovation

time to give the utmost priority to health andin the semiconductor industry. We will con-safety and consider the protection of thetinue developing new technologies andglobal environment.

products, in order to contribute to the develpanel display (FPD) industries. One of the

TEL will create value and contribute to the realization ofsustainable society.

technologies is the effort to reduce the bur-most important factors in opening up newden on the environment.
We believe that semiconductors and
FPDs are a part of the infrastructure of soci-As a leading company in thebusiness of semiconductor
production equipment, we
will be a frontrunner in initiatives for the protection of the
global environment.

ety that enriches the lives of people around3.

refrigerators and many other products—they

the world, lets people live better lives, andenables us to enjoy intelligent living. At thesame time, because semiconductors and
FPDs are integrated in all electronic devices—from computers and cell phones tohave the potential to help make a large reduction in the energy consumption of devices and equipment, and in a broader sense,of society overall.
TEL develops and manufactures a vastvariety of equipment that is used in semi-

3

TOKYO ELECTRON Environmental Sustainability Report 2003

customers products of the highest quality
and superior technology, and at the same1.

Based on our philosophy of respect for people, we will give theissues of health and safety thehighest priority.

words represent our commitment to provide

Since TEL was founded in 1963, TEL

opment of the global semiconductor and flat2.

“People. Technology. Commitment.” TheseAs with environmental protection, TEL

benefits for society if each company were toin an effort to gain the understanding of ouris constantly thinking about the health andcontribute to the reduction of environmental

many stakeholders.

safety of all its stakeholders—customers,

impact in its own specialty field.

local communities, suppliers, employees—andtakes these into account in day-to-day
activities.

We warmly welcome your comments
and opinions.

In this report we introduce the environmental protection activities mentioned above,

In addition, we strive to create a work-and describe TEL’s future directions. We willplace environment where people can work

continue to actively share this information,

toward their goals and make the most of
their own ideas. We believe that it is only
when people are given respect that a company, or even a society, can develop and grow.

Tokyo Electron Group Credo on Environmental Preservation

As a Corporate Citizen,
We Contribute to Society< The TEL Group Credo on Environmental Preservation >We believe that it is by earning the trustof the local community that a company
makes its own development sustainable. TEL
has operations around the world. We believe

The Tokyo Electron Group believes that preserving the global environmentand constantly improving it is one of the most important objectives for mankind,
as well as our business. Based on this credo, we are determined to expand ourbusiness by maintaining harmony with the global environment, and thus win thetrust of our many customers, shareholders, employees and society in geeneral.

that, as a company we should not only con-< The TEL Group Principles on Environmental Preservation >sider the local environment, but also contri-

1. Continuous Improvement
TEL is conscious that products manufactured by the TEL Group affect the environment, and based on this awareness, we, with our customers and suppliers, shall continually strive to minimize the impact of processes and operations on the environment.

bute to the local community on both environmental and safety fields through a wide
range of initiatives that reflect our social responsibility. We are promoting activities
based on these beliefs, and we work toraise the awareness of all employees in order to give these attitudes life inside thecompany.
Meanwhile, we are promoting cooperation not only in the local community. But
also in our fields of business, in terms of
more fundamental environmental efforts involving the entire industry. At the center ofthese efforts is the review of semiconductor
and FPD production equipment from theperspective of Life Cycle Assessment(LCA).
Activities to effectively promote a reductionof the environmental impact of all processes—from development to disposal—are
also important. We are playing a leading

2. Knowledge
TEL continually strives to enhance its understanding of the impact that the
TEL Group has on the environment and the responsibility that this entails. In
addition, TEL aims to gain a quantitative grasp of environmental factors, andthe impacts resulting from TEL Group activities and operations.
3. Performance Criteria
As well as strictly observing mandatory environmental laws, treaties andagreements, TEL strives to enhance its own environmental management system and improve global environmental preservation programs by the proactive establishment of its own aggressive environmental performance criteria.
4. Disclosure
TEL shares information about its environmental concept, principles and theprogress of our contribution toward environmental protection with employees
and the general public.
5. Partnership
TEL actively participates in environmental protection activities practiced byour customers, suppliers and communities.
September 25, 1998
Tokyo Electron Limited

role in these activities, aware of the hugeTOKYO ELECTRON Environmental Sustainability Report 2003

4

Environmental Sustainability Report 2003

Business of Tokyo Electron
TEL makes equipment that makes semiconductors.

Making Semiconductors...
TEL is in the business of developing and manufacturing equip-

TEL Products

ment that conducts a variety of processes to create semiconductors
on a thin slice of silicon called a silicon wafer. This page provides agraphic explanation for our readers by comparing the processes to

TEL manufactures equipment that “cooks” silicon wafers(i.e., manufactures semiconductors).

the steps of baking a pizza.

Liquid chemicals
Semiconductor gases

Plasma Etch
SystemCoater/Developer
Thermal Processing System
Pure water
Silicon wafer
A variety of equipment shown on the rightis used to create semiconductor circuitson the thin disk of silicon called a wafer.

SalamiGreen peppers

Oven
Pizza crust
Cheese5

TOKYO ELECTRON Environmental Sustainability Report 2003

To use an analogy, the equipment makes the equivalent
in the process as an oven that cooks the pizza.

What Kinds of Products Contain Semiconductors?
Sometimes called the “staple food of industry,” semiconductors
are built into all electronic devices in today’s information-based society, from cell phones to computers and televisions to machine tools.
They can be found everywhere in our lives. In the next few years, wewill likely see the emergence of a “ubiquitous environment” withbroadband communications linking electronic devices and networks—enabling anyone to be connected, anywhere, at any time.
Clearly, semiconductors are a key product that will support the evolu-

Silicon wafer built incircuit patterns

tion toward that day.
TEL is constantly working to develop and manufacture equipment that can make innovative new semiconductors.

After semiconductor circuits
have been built in a siliconwafer...

the wafer is cut, wired, andpackaged...

Semiconductor
and the semiconductor iscomplete.

Pizza

TEL is also involved in this...
Besides making semiconductor production equipment, TEL is also engaged in the development and manufacture of equipment that produces flat panel displays (FPDs). Electronic components (by Tokyo Electron Device Ltd.) and internet technology equipment (by the Computer Network Business Unit) are also importantpillars of the business activities of TEL.

TOKYO ELECTRON Environmental Sustainability Report 2003

6

Environmental Sustainability Report 2003

TEL and Environmental Impact
At TEL, we analyze the environmental impact of our products, and use that informationin ongoing efforts to reduce the impact.

Life Cycle Assessment Results for Each TELFORMULA Thermal Processing System

Procurement

Manufacturing and AssemblyParts number in the tens of thousands. Eachcomplete unit weighs up to one or two tons.

The system is manufactured in a cleanroom* like theone where the equipment will actually be used.
Impact are mainly related to energy consumed aselectricity for inspection, and gases used in testingprocesses.

Iron and Steel SheetTEL
CO2 emissions (t- CO2)

Controller

Transformer

50.7t-CO2
3.7t-CO2*Cleanroom: A room designed to be completely
free of dust and contaminants.

Environmental Impact of Our Products
TEL products are characterized by relatively low environmental

The material flows of TEL are illustrated in the figure on theimpact during manufacturing, compared to the extremely large

right. The figures shown are the combined totals for production andamounts of resources and energy consumed after being delivered toadministrative facilities. Here are a few of the most noteworthy features:

our customers, who then use the equipment to manufacture semi-• The equipment assessment process is more of an environmental

conductor devices. Because of this, we are working to find ways toburden than the equipment manufacturing and assembly processes.

reduce the environmental impact incurred during actual use of the• Compared to the above, the amounts of energy used and waste

equipment. In addition, because a variety of gases and chemicals are

emitted (including liquid waste) during manufacturing and as-

employed when the equipment is used, we pay the utmost attention

sembly processes are relatively small.

to the issue of safety.

The big part of environmental burden during equipment assess-

Meanwhile, many of the Earth’s resources are used for procur-

ment occurs because electricity and a variety of gases and chemicals

ing the raw materials needed for manufacturing, assembly and deliv-

are used to assess equipment, using processes similar to those em-

ery of equipment. We are making an effort to reduce the environ-ployed during actual semiconductor production.

mental burdens throughout the life cycles of these materials as well.

7

Input and Output of TEL

TOKYO ELECTRON Environmental Sustainability Report 2003

1878.1 t-CO2 (over ten years)

DeliveryUse

To maintain cleanliness, special packaging materials are used for transporting the equipment.
For ground transportation, special vehicles areused that minimize vibration. For shipping overseas, aircrafts or ships are used.

The semiconductor production equipment isinstalled in cleanrooms, and most of it is operated 24 hours a day for mass production
and to ensure stable operation. A variety offorms of energy and resources—electricity,chemicals, gases, pure water and so on—areused in the semiconductor production process.

The equipment is used for 10 to 20 years.

1.5t-CO2

Material Flows of TEL

Electricity

CO2

95,570 tons

NOx

10.5 tons

SOx

1.7 tons

Wastewater(to rivers, sewerage systems)

965 km226,830 MWh

3Natural gas

608 kmFuel

2,621 kl

TEL
(in Japan and someoverseas operations)Water

974 km3

3

Total waste emissions 14,467 tons
Chemicals

9.69 tons(subject to PRTR reporting)

Paper (copy paper)

383 tons

Amount recycled

11,199 tons

Amount incinerated
or put in a landfill

3,268 tons

TOKYO ELECTRON Environmental Sustainability Report 2003

8

Environmental Sustainability Report 2003

Environmental Targets and Results
We set environmental targets and work to achieve them—based on TEL Credo
and Principles on Environmental Preservation.

On September 25, 1998, TEL established the Credo and Principles to define its approach to environmental protection.

The plans and results for FY 2003 are shown in the table below,
along with plans and targets for FY 2004 and beyond.

TEL promotes its environmental protection activities on the
Credo and Principles.
Environmental Targets and Results
FY 2003 Plan

EHS
Management System

Plans and Targets for FY 2004 and Beyond

See

Implemented LCA for all products

Apply LCA to all new products

P12

Promote the introduction of lead-free solder

Eco Design Working Group studied leadfree solder and set target dates for introduction

Start task teams with representatives of eachbusiness unit, and go fully lead-free by the endof 2005

P13

Promote green procurement

Helped low-ranking suppliers (based on
the results of assessments) make improvements

Re-assess suppliers, review business relationships

P14

Study potential to achieve zero emissions. Set targets

Defined the concept of zero emissions in
the context of TEL businesses. Set targets and deadlines

Achieve zero emissions at all production facilities FY 2006. Increase whole TEL recycling rate
to over 90%

P16

Reduce energy consumption (by 1% CO2 emissions
per unit of sales, based on the Law Concerning the
Rational Use of Energy)

As a result of energy conservation efforts at each location, reduced energy
conservation by 8% per unit of sales

Promote further energy conservation. Achieve
1997 standard levels of energy use per unit of
sales

P17

Determine amounts of chemicals used that are subject to PRTR reporting

Succeeded in determining amounts

Continue monitoring amounts of existing andnew chemicals. Reduce amounts used

P19

Expand EHS activities in overseas factories

Determined conditions overseas

Take next steps based on information obtained—

Develop global EHS organizational structure

Created Global EHS Committee. Established four working groups and reviewed
entire organization

Expand activities in each organization. Communicate smoothly with overseas operations

P21

Implement TEL Eco-Activity (basic environmental
management system) at office facilities

Launched activities at each location

Promote activities further. Work toward
ISO14001 certification at Tokyo Electron Device

P22

Introduce occupational health and safety management systems at production facilities

Introduced at many locations. Implemented risk assessments and risk reduction plans

Promote introduction at facilities not yet covered. Promote risk assessments and risk reduction plans

P22

Develop EHS assessment system

Trained assessors and conducted EHS
assessments at two facilities

Promote assessments at facilities in Japan, andconsider applying at production facilities overseas as well

P23

Promotion of activities at overseas offices

Started to assess activities in each region and started to prepare educational
materials

Implemented environmental education, considered introduction of environmental management
system, including TEL Eco-Activity, etc—

Achieved target

Promoting Environmentally-friendly
Product Design—Industry-WideTEL is following two tracks to reduce the burden on
the environment. One focus on the impact that occurs
when our customers use our products and the other on theimpact from our own production processes.
In design and development, we make an effort to consider whether it is possible to use gases with low greenhouse gas coefficients and reduce the amounts of purewater and electricity consumed when customers use TEL
semiconductor production equipment. We do not stop
there, of course. We also work through other initiatives
such as holding seminars to raise the overall industry’s
awareness about environmental impact.

9

Evaluation

Introduce life cycle assessment (LCA)

Eco Products

Eco Factories

Results

TOKYO ELECTRON Environmental Sustainability Report 2003

Achieved 80% of target

Meanwhile, in terms of production activities of TEL,
we are aggressively promoting efforts to raise our recycling rates at factories nationwide in Japan. We are implementing efforts to achieve “zero emissions” this fiscal
year in the Kyushu region, in the Tohoku region in FY
2005, and in the Yamanashi region by FY 2006. We also
believe that by shortening manufacturing lead times forsemiconductor production equipment and eliminating
waste on the assembly line, we can not only reduce production costs, but also considerably reduce environmental
impact. TEL has traditionally had a culture that emphasizes safety in production activities, but at the same time,
we are actively working to consider the environment.

Achieved less than 80% of target

Masaki Kaneko
Director, Environment,
Health & Safety Center,
Tokyo Electron Limited

Environmental Sustainability Report 2003

Environmental Activities of TEL Group Companies
Here we introduce the business activities of two TEL Group companies
as well as their environmental targets and achievements.

Toshiaki Sunagawa

Takashi Nakamura

President and Representative Director

President and Representative Director

Tokyo Electron Device Limited

Tokyo Electron Logistics Limited

A New Operational Structure with ISO14001
Certification and the Best Aspects of EMS

New Initiatives to Reduce the Environmental
Impact of Facilities Management and Logistics

The main business of Tokyo Electron Device Ltd. is stocking andselling semiconductor products, software, electronic components.
Because of that, we do not impose a large direct burden on the environment in the way that factories do, but in recent years, we have received many requests to reduce the environmental burdens of the
products we handle, and as a result we are strengthening our efforts
in this area.
This is because more and more products are aimed particularly
at the “digital consumer,” and the environmental awareness of ourcustomers has increased. Thus, for products such as the semiconductors that our company handles, more attention is being given to
the energy efficiency of products, whether or not they contain hazardous substances, and whether or not they are environmentallyfriendly.
We have taken these external factors to heart, and during thepast year there has been a change in environmental awareness inside
the company. Consideration of the environment is of course a part ofoffice work, but we are starting initiatives to increase the environmental quality of products that we handle. In line with this, we aredeveloping an environmental management system and planning toobtain ISO14001 certification for it by October 2004.
Our position differs somewhat from a component maker, but weare actively working to consider the environment in a variety of ways
within the scope that is possible as a trading company.

Tokyo Electron Logistics Ltd. handles not only the logistics for
TEL in Japan and overseas, but also a wide range of tasks, such as
equipment installation and facilities management.
As a part of TEL’s initiatives on decreasing environmental burden, in the facilities management arena we installed equipment tohandle concentrated hydrofluoric acid liquid waste in-house, eliminating the need to send it out for disposal as industrial waste. As examples of other initiatives to reduce electrical and water consumption
at the factory, we are replacing heat pump air conditioning systems
that consumed a large amount of electricity with more efficient “freecooling” systems that utilize outdoor temperatures.
In terms of logistics functions, we reduce the amount of cushioning materials needed in product packing. Because we handle a variety
of products, the boxes and containers we use are large, and it is easier
to control items that are of the same size. However, if we use many sizes, the handling costs rise, but if we use packing boxes of the right sizes to match the product dimensions, the amount of cushioning material needed would be reduced. We must find the correct mix between
cost and environmentally conscious activities.
In addition, by using consolidated shipping and delivery, color
coding and so on, we are boosting work efficiency and reducing theburden on the environment. We are also giving some thought to the
future of packing for shipping overseas and testing a new logistics
concept. This involves avoiding the use of wooden crates for shipping
overseas, and loading the equipment on a truck and the truck on aferry so the equipment can be delivered without reloading. We will be
putting more effort into this new type of approach in the future.

TOKYO ELECTRON Environmental Sustainability Report 2003

10

Eco Products

Reducing the Environmental Impact of Products (Part 1)
We are introducing Life Cycle Assessment for all new products we develop,
and designing products to minimize environmental impact.

TEL Stance on Eco Products

Organization in TEL

TEL has worked to incorporate suggestions from customers in

TEL is defining its actions and priorities in terms of reducing theits products, and has promoted reduction of environmental burden

environmental burden of its equipment, and is working to improve

during semiconductor production and elimination of hazardous sub-environmental performance.

stances from the materials used to make equipment. We respect theRegarding Eco Products, the Eco Design Working Group hascustomer’s needs to know about environmental impact of products

been established under the Product EHS Technical Committee (seethroughout the life cycle, and work as quickly as possible to collectpage 21) and is now functioning. This working group started fromdata relating to these impacts—from the manufacturing stage

creating an “EHS road map” for equipment, and is working to apply it

through to disposal. As a result, TEL has become an industry leader

to achieve energy and resource conservation. In addition, in eachin terms of accumulating product LCA data for use when designingbusiness unit, we are gathering LCA data on new equipment being

products.

developed and learning about the environmental impact, and are reflecting those findings in equipment improvements and next-genera-

Eco Product Concept

tion models.
Due to the need to consider the environmental impact of the raw

Life
Cycle
Assessment(LCA)
Lead-freeEco
Products

materials we procure for equipment production, we established a
Green Procurement Working Group, which has clarified TEL procureResource
conservation

ment standards. This working group is investigating the environmental efforts of suppliers and contractors, and where necessary, supporting them by offering environmental education. We have also established a Lead-Free Task Team and aim to implement lead-freeGreenprocurement

Energyconservation

policies starting with products produced in 2006.

Major Efforts in Each Business Unit—A Sampling of Targets and Results
Business Unit

Results

Targets for FY 2004 and beyond

Etch Systems

Reduce power consumption

Reduced power consumption of chillers by 40%

Reduce equipment power consumption by 3%

Test Systems

Reduce power consumption

300 mm equipment: 10% below 1999 levels

300 mm equipment: 50% below 1999 levels

Single Wafer Deposition

Reduce power consumption

300 mm equipment: 40% below 1999 levels

300 mm equipment: 50% below 1999 levels

FPD Systems

Reduce chemicals used

Developed equipment to
reduce liquid chemical consumption

Continue efforts

Reduce amount ofliquid chemicals used

UW equipment: 64.4% reduction

Continue efforts

Reduce amount ofpure water used

UW equipment: 28.2% reduction

Continue efforts

Reduce use of liquid
chemicals (resist)

300 mm equipment: 35% below 1999 levels

Consider ways to reduce amounts ofother liquid chemicals used

Reduce power consumption

300 mm equipment: 5% below 1999 levels

300 mm equipment: 20% below 1999 levels

Conduct productassessments (preliminary)

After trials, start full operation

Continue operation, reduce environmental impact

Reduce equipment footprint

300 mm equipment: compared to existing ␣-301 model,
reduced by about 10% in ␣-303i

Implement when developing new models

Cleaning Systems

Clean Track

Thermal Processing
Systems

11

FY 2003 Target

TOKYO ELECTRON Environmental Sustainability Report 2003

with an existing model, the ␣-303i.

Life Cycle Assessment (LCA)TEL has launched efforts to conduct LCA as a way to objectively

As shown in the graph, we learned that for the existing model,

evaluate the environmental impact of equipment, using common cri-the consumable supplies accounted for the vast majority of the envir-

teria that we can share with our customers.

onmental burden incurred during operation of the equipment. Of this,To begin with, we started by establishing common methodolo-

the consumption associated with the quartz chamber and non-pro-gies for whole TEL and getting a general grasp of the environmental

duction wafers, known as “dummy wafers,” was considerable. In

impact of equipment, and then implementing an LCA for the major

comparison, the TELFORMULA has a completely revised quartz

models in each business unit. We compared new and old models us-chamber structure and cleaning methodology introduced in-situ dry

ing LCA methods and confirmed that the overall environmental im-

cleaning that uses the latest technology to replace wet cleaning. As apact lower in new models. Now we are applying complete LCAs on

result, we were not only able to reduce the quanity of dummy wafers,

all newly-developed equipment, and making continuous improve-

but this also effected a large improvement in the life of the quartz

ments of environmental performance by feeding the findings of as-chamber. At the same time we improved equipment specs like thesessments back into new product development.

utilization rate and process performance, we were able to significantly reduce the environmental impact.

Product Life Cycle Assessment
Input

Life cycle

OutputResource use
Emissions to air

EnergyNaturalresources
Renewable
resources

Production of
raw materials

Emissions to water
Solid waste

Manufacturing ofproducts andcomponents

Recyclable
materials

Logistics,
transportation

Other emissions
to the environment

Use
Recycling
Main areas of TEL
business activities

Recycling
DisposalReuse, recycling

LCA Case Study (Thermal Processing System)
As the silicon wafer size used in semiconductor production continues to grow, the production equipment itself also grows larger.
Also, as the market demands semiconductors with increasingly

␣-303i (existing model)

TELFORMULA (new model)

Comparison of Energy Consumption (CO2 Equivalent) during
Operation Using Same RUN* Coefficient(t-CO2)2,500

␣-303i (existing model)
TELFORMULA (new model)
1,994.1

2,000

higher performance, the processes for production are also becoming
more complex, and various additional features are also demanded ofthe production equipment. In this context, if equipment is not designed with the environment in mind, there will be a general tendency for increasingly severe environmental impact. LCAs implemented to date have shown us that more than 90% of the environmental
burden during the entire life cycle of our equipment occurs during
operation of the equipment.

1,500
1,217.4
1,000
541.4

500 463.1

0259.5 215.6
96.9 43.5 72.2
Electricity

N2

Coolant
water

36.5 8.7 33.4 1.6
2.3
Exhaust Consumables Dry air Process
gases

44.1 40.6

Total*RUN: Refers to the series of steps in one cycle of process implementation ofequipment, including heating, wafer input, processing, and wafer removal.

Below we introduce an example of LCA implementation by comparing the new model TELFORMULA (Thermal Processing System)TOKYO ELECTRON Environmental Sustainability Report 2003

12

Eco Products

Reducing the Environmental Impact of Products (Part 2)
We are designing semiconductor production equipment to conserve resources and reduce hazardous
substances, and have ongoing efforts to minimize the environmental burden that arises during use.

Approach Lead-Free
Lead can cause nervous system disorders if it accumulates inthese directives, in order to be proactive in preventing pollution, TEL

the body. Under the normal conditions of equipment use, there is no

is promoting its own voluntary and systematic efforts to go lead-free.

concern about injury arising from lead. However, the potential exists

TEL has begun to consider the introduction of lead-free solder

for impact on human health through the pollution of ecosystems if

for products manufactured by TEL Group companies. We are also in-acid rain falls on disposed equipment and waste and then seeps into

vestigating the status of solder use by our suppliers and urging themthe environment. The European Union’s WEEE Directive*1 and RoHS

to cooperate in this initiative.

Directive*2 ban the use of hazardous substances such as mercury,*1WEEE : Waste Electrical and Electronic Equipment*2RoHS : Restriction of the use of Hazardous Substance in electrical andelectronic equipment

cadmium and lead in electrical equipment, starting in June 2006. Although semiconductor production equipment does not fall under
Lead-Free Implementation PlanFY 2004

Action Plan
Apr.

July

Oct.

FY 2005
Jan.

Apr.

July

Oct.

FY 2006
Jan.

Apr.

July

Oct.

Establish Lead-Free Task Team, start work
In-house awareness-raising
Supplier survey, technical cooperation, action plan
Consider technologies and materials used
Evaluate, summarize the potential for lead-free
Prepare for mass production
Trial production and evaluation of boards and assemblies(practical training about soldering)
Mass production

Starting January 2006

Developing Coating Methods
for reducing Photoresist
The developing process during semiconductor production uses an organic photosensitive chemical, known as photoresist, for coating the wafer surface. This photoresist accounts for a relatively large portion of the equipment runningcosts. For that reason, and also from the perspective of saving
resources, it would be valuable to reduce the amounts used.
TEL has developed a prewet coating method that reduces the amount of photoresist used to less than one-fourth ofwhat is conventionally used, by applying a solvent immediately before applying the photoresist, improving the bondwith the wafer. This method is being used in the major coater/developer line, the CLEAN TRACK ACT series. Today, ourcustomers around the world are using this process.
The rising performance of semiconductors requires larger
dies. In order to economically produce equal number of dies perwafer, wafer sizes increases. Because of this, TEL will continue
with its efforts to find ways to reduce the amount of photoresist
used and save resources in other ways.

13

TOKYO ELECTRON Environmental Sustainability Report 2003

Coater/Developer(CLEAN TRACK ACT 12)

Prewet Coating Method

Reducing the Use of CAR Photoresist*1
1.0
0.8
0.6
0.4
0.2
0

1.00
(Value of 1 represents conventional coating methods)
0.37
0.13
Conventional coating methods

RRC coating*2

Super RRC coating*1Chemically amplified photoresist for fine processing that has been popular in recent years.
*2Acronym for “Reduce Resist Consumption.”Jan.

Eco Products

Green Procurement
We work with our suppliers to encourage the use of materials with low environmental impact,
and to minimize the resources used and the waste emitted during product distribution.

Stance on Green Procurement
The semiconductor and FPD production equipment at the core of
TEL business is made from raw materials and components procured

Results of Survey of Suppliers’ Environmental Activities(%)
100

FY2002

FY200380

from other companies.

60

If we are to reduce environmental impact across all business ac-

40

tivities of TEL, the components and raw materials must be made in20

ways that take the environment into account. In this respect, we are0

D rankA to C rank

making an effort to conduct purchasing based on our Green Procure-Ranking (“A” signifies a very good environmental score. Our goal is toment Guideline*, buying from those suppliers who are actively mak-reduce the number of D-ranked suppliers to zero.)ing an effort to reduce environmental impact.
In the future, we intend to start procuring materials only fromsuppliers who meet certain environmental standards.
*Green Procurement Guideline: Standards andtargets for chemicals and energy conservation, packaging, resource conservation, recycling, and information disclosure.

Green Procurement Guideline

Efforts in FY 2003
In FY 2002, we distributed a questionnaire to suppliers and re-

Message from a Procurement Manager
Kumamoto, on Japan’s
island of Kyushu, has some of
the best groundwater of all
cities in the world. Improving
the level of environmental
management of the companies we deal with translates
into helping to protect the local environment, and the peoSatoru Inoue
ple who depend on the region
Quality Assurance Department,
for all of their needs in life.
Koshi Plant, Tokyo Electron Kyushu Limited
With this in mind, I will continue to make consideration of the impact on the local environment a priority in purchasing.

ceived responses about their environmental activities.
We used four categories to rank our suppliers on environmental
consideration and prepared two programs to help those whose efforts
were inadequate. One program involves environmental educationfrom TEL, and the other requires suppliers to maintain dialogue with
us while making environmental improvements, based on written improvement plans that they themselves prepare. As a result of implementing these programs, the number of environmentally advanced
suppliers (A to C rank) has increased while the percentage of suppliers with inadequate environmental consideration (D rank) has dropped to one-third the level of the previous year, as shown in the graph.
In addition, TEL spontaueously identified those chemical substances—over and above those already regulated by the government—that have serious environmental impact. We have been working
to find substitutes and to reduce the amounts of these chemicals used.

These containers help us use
fewer packing materials.
In the past, we packaged each plastic box that we shipped,
but today we pack the whole container and deliver it right to thecustomer’s cleanroom. Since it stands tall and has wheels attached, the container does not waste space, and it has the meritof allowing us to ship many products at the same time.
With this new shipping method, we have been able to reduce the amount of packing materials used, and also to reduce
the amount of work involved in packing and unpacking. In addition, because the wallsof the container are
made of clear acrylic,
handlers can verify thecontents, and this servesto prevent product damage and losses.

We have also started asking suppliers to cooperate in these efforts.
We will continue to work with our suppliers to reduce environ-Containers used for shipping

mental impact.

TOKYO ELECTRON Environmental Sustainability Report 2003

14

Eco Factory

Waste Reduction and Recycling
TEL is working to achieve zero emissions from its plants,
as a part of efforts to reduce environmental impact.

Stance on Waste Reduction and Recycling

Breakdown“Produce no waste. Recycle any waste that is produced. Prop-

Liquid waste accounts for about 70% of the total waste fromerly dispose of any waste that cannot be recycled.”—based on these

TEL, because the various chemicals used during product develop-

principles, TEL is working to minimize the waste generated by ourment and evaluation end up as waste. Non-liquid waste in FY 2003

business. With a worsening shortage of final disposal sites in Japanamounted to about 850 tons, which could be considered a small

and landfill costs on the rise, efforts to reduce waste not only help toamount of waste for a business of this size.

minimize environmental impact, but also lead to lower production
costs. We have a target of achieving zero waste emissions from all
TEL manufacturing plants in FY 2006. We are conducting a variety ofWaste Breakdown in FY 2003
Other:8%

Packing:2%
Wood:2%

efforts to reduce the environmental impact, including sorting and re-Metal:3%

covering waste, identifying recycling businesses that we can work

Paper:3%
Kitchen:3%

with, approving and monitoring waste management contractors,

Plastic:5%

Total 3,268t

checking regularly on the status of final disposal sites, and shifting toprocesses that do not generate waste.

Liquid:74%

Total Waste Output
The graph below shows the recycling rate of the entire TEL andthe amount of waste that went to final disposal. It reveals the resultsof our efforts to raise the recycling rate year-by-year and to use re-

Tohoku Plant’s Efforts to Reduce Waste

sources effectively. By the in-house handling of liquid waste, which

Each TEL site has established and equipped a special subcommittee for waste reduction and is actively working on various measures. The graph below summarizes the waste volume and recycling
rates of the Tohoku plant. In FY 1997 a process evaluation facility
began operations, and the amount of waste liquids increased fromthe cleaning of wafers and quartz. Because of that, the plant started operating a process to handle waste liquid in FY 1999, and theamount of waste liquid declined. Later, as a result of more thoroughefforts to separate waste and to find businesses that recycle andhandle liquid waste, the plant was able to raise the recycling rate to96.4% in FY 2003, and reduce the amount of waste by more than
95% from the peak monthly average of 1.58 tons in FY 1997. An issue to be addressed in the future is the processing of plastics andother materials not yet being recycled.

we generate in large quantities, we have also been able to reduce
the environmental burden associated with the transportation ofwaste.
Since FY 2000, the total volume of waste has been calculated
as the total of waste from both office facilities and manufacturing
plants. Although the amount of waste generated varies with production levels and the status of factory operations, we are committed tocontinue working to reduce waste further.

Total Waste Output and Recycling Rate
Amount of waste (for incineration and landfill)(tons)(tons/month)
80

90% recycling (FY 2006 target)

77.4%
69.7%

Specially-controlled waste

Industrial waste (plastic, etc.)

Industrial waste (liquid)

General waste
Recycling rate
96.4%

70

55.2%

50

49.7%

34.7%

30

0

4,772

3,189

3,179

3,657

3,938

3,268

97

98

99

00

01

02

03

10
0
(FY)

TOKYO ELECTRON Environmental Sustainability Report 2003

40

15.6%
24.2%

20
21.6%

6.2%

0
95

15

58.9%
46.4%

20
4,238

60

50.4%

40
15.3%

(%)
100

80

60

59.9%
40.9%

Tohoku Plant: Waste Output and Recycling Rate(%)

Recycling rate

96

97

98

99

00

01

02

0.0
03 (FY)Recycling

Zero Emissions by 2006

To recycle efficiently it is important to separate waste carefully

In TEL, we call plants that have reduced waste emissions, pro-when it is initially discarded. Our facilities separate waste into be-

moted recycling, and achieved certain targets “zero emissions factor-

tween 24 and 29 categories, depending on its characteristics. The

ies.” We have defined “zero emissions” to mean that waste emis-

major categories are paper, drink containers, scrap wood, glass,sions have been reduced to the greatest extent possi-

plastics, and metals. Through sustained efforts, the recycling rate ofble—specifically, to the extent that disposal by simple incineration

TEL overall has risen year by year, and in FY 2003 reached 77.4%.

and landfill amounts to less than 2% of total waste. We have set a

Our target for FY 2006 is to surpass 90%. Tokyo Electron America

goal of having all production sites in Japan achieve zero emissions by

has been able to recycle about 30 tons of waste in a year, because

the end of FY 2006, and are working to realize that goal.

of aggressive efforts to recycle materials such as paper, plastic,
glass, and batteries that arise from business activities.

Installation of Liquid Waste Treatment Equipmentin the Yamanashi Region
The smartest approach is to start first with the type of waste that
we emit in the largest quantities. But depending on the type of waste,
this may require some investment in new facilities.
Before FY 2003, most of the waste from Yamanashi region (Fujii
and Hosaka plants) consisted of liquid waste from wafer and quartz
cleaning. These have been treating low-concentration acids in-house,but because the existing facilities could not treat concentrated hydrofluoric acid, this treatment was subcontracted to an outside business.
After careful calculation of investment and subcontracting costs theplant installed equipment to treat hydrofluoric acid, and in-house
treatment began in May 2003.
According to our plans, the Yamanashi region will be able to reduce its amount of waste by over 60%. The investment is expected to
pay for itself in about two years, and it will also be possible to significantly reduce the environmental impact associated with the transporting of the waste that was previously being transferred off-site.

Improving Liquid Waste Treatment Capacity
in the Yamanashi Region
Before installation
Acidic waste
Process
evaluationbuilding

Liquid waste
treatment building
Liquid waste
treatment system

Tank
Hydrofluoric
acid waste

Discharge

Contractor

After installation
Liquid waste
treatment building

Acidic waste
Process
evaluationbuilding

Hydrofluoricacid
Hydrofluoric treatment systemacid waste

Liquid waste
treatment system

Discharge

Breakdown of Yamanashi Region Waste in FY 2003
Other:10%
Plastic:3%
Cardboard:3%
Sludge:5%
Metal:6%

Newly installed hydrofluoric
acid treatment system

Total 5,994t

Hydrofluoric
acid:66%

Alkali waste:7%

Exterior view of the liquid
waste treatment buildingThis liquid waste can
now be treated in-house.

TOKYO ELECTRON Environmental Sustainability Report 2003

16

Eco Factory

Energy Conservation
TEL promotes energy conservation at all sites as a way to help prevent global warming.
We set energy reduction targets for each site and work systematically to reach them.

Electrical Consumption

Stance on Energy Conservation(million kWh)Heavy Fuel Oil Consumption

224 227

Most manufacturing plants in Japan are Type 1 Designated En-

(kl)

2,430

196

ergy Management Factories under Japan’s Law Concerning the Rational Use of Energy. As the law dictates, these factories have estab-

1,916

lished and observed control standards based on certain criteria, ap-

108

1,881

1,652

150

1,631

120 121967 958

pointed an energy manager, and set up institutional controls on energy consumption. Each of our facilities is now implementing energy
conservation activities, having set power-saving targets for lighting0

and office equipment, and controlling air conditioning temperatures.

97

98

99

00

01

02

03(FY)

0

97

98

99

00

01

02

03 (FY)In addition, facilities that are involved in product development andmanufacturing are now doing systematic shutdowns during longer
Kerosene Consumption

holidays and working to increase the efficiency of each type of work
procedure.

Natural Gas Consumption
3

(kl)

996

990 990(1,000 m )LPG

City gas
608

908

Energy Usage
Due to the ongoing economic slowdown, during FY 2003, pro364

duction and sales volumes increased only slightly compared to the403 389

135 132

120 129 115 124

62

60

65

73

72

55

97

98

99

49

58 545

59

66

66

63

00

01

02

03 (FY)70

previous year. Because of that, the CO2 emissions associated withenergy consumption increased only slightly. The sudden increase in
the amount of natural gas usage was due to the use of new chiller

0

97

98

99

00

01

02

03 (FY)

0(All sites in Japan and a portion of sites overseas)

equipment at the Kansai Technology Center. With energy consumption per unit of sales down to 92% from the previous year, we surpass the target of 1% reduction, but this measure exceeds the FY
1998 base year by a wide 87%. We will continue to work for energy
conservation in the future.

Share of Power Use at Manufacturing Plants
Total Energy Use (CO2 Equivalent)*1(t)

Per unit of sales*2
Year-on-year*3

Energy use(%)

202.9%
186.9%
150.8%
134.7%
104.4%

105.6%

0Lighting,
office equipment27%

100.0%

Air conditioning systems(cleanrooms)
56%

92.1%

89.3%

78.4 %

46,00650,57452,531

65,88384,831

94,076

97

98

99

00

01

02

95,570003 (FY)*1 For CO2 equivalent, see the Ministry of the Environment’s “Environmental Activity Evaluation Program.”*2 Energy consumption divided by sales (FY 1998=100%).
*3 Current year divided by previous fiscal year.
(All sites in Japan and a portion of sites overseas)

17

Product
evaluation
15%

192.1%

150.8%
96.0%

Product
manufacturing
2%TOKYO ELECTRON Environmental Sustainability Report 2003

Calculations and actual measurements reveal the power usage at the Tohoku plant to be as shown in the graph. The greatest amount of power is needed for air conditioning of cleanrooms, etc, followed by lighting and office equipment, and product testing/evaluation. Surprisingly, only 2% of total power consumption is used in the actual manufacture of products.

Eco Factory

Resource Conservation
We are reducing paper consumption as part of our strategy to conserve resources.
TEL is also taking other measures for effective use of resources, such as water conservation, avoiding
vehicle engine idling, and purchasing recycled products.

Stance on Resource Conservation

Efforts to Reduce Water Usage

To continue our efforts in reducing the amount of resources we

Our manufacturing plants are installing cooling water circulationuse, we are also conducting green purchasing. To promote resource

systems, and recycling industrial water and reducing water usage inconservation, we work to reduce the amount of water, copy paper

all stages of operations—in production, development, testing, ship-and stationery that we use or purchase, are proactive in our purchas-ping, and so on. We are installing automatic plumbing company-wide

ing of green products, and work with office suppliers to have themin lavatories, as a way to avoid the excessive use of water.

collect the items we no longer need.
TEL is also making a concerted effort to introduce low-emissions

Water Usage(1,000 m3 )Industrial water

Tap water

vehicles. For example, by converting to low-emissions vehicles and817

low fuel-consumption vehicles, 80% of the company fleet at Tokyo
vironmental impact.

974
62

957

146

119

408

497

436

770

812
89

527

445

391

325

332

390

430

415

290
98

99

00

01

02

03 (FY)

693

Electron Device headquarters now consists of vehicles that have en-

Groundwater
972

521

Efforts to Reduce Paper Usage
All companies in TEL are working to reduce of paper consumption. For example, all employees are encouraged to use both sides of

172
0

97

paper and to reduce the paper size when making copies. In addition,(All sites in Japan and a portion of sites overseas)

efforts are being made to share information without using paper, forexample, by using electronic means for intra-office memos and notices. As a result of these and other efforts, the entire TEL used about
12 million fewer sheets of copy paper in FY 2003 than in the previous year, a reduction of about 11%.
We will continue to use recycled paper in every sites (with the
exception of a few special applications), and to review office procedures thereby to minimize the use of paper records and forms.
We are also trying to help protect forests by using paper cups
made of kenaf in place of conventional paper made from wood fiber,
and are encouraging employees to limit the use of paper cups.

Installation of Water-Saving Systems(Air-Cooled Vacuum Pump)
To reduce water usage, the Saga plant has converted from awater-cooled vacuum pump used in manufacturing to an aircooled type. This is because calculations and a study by the Resource Conservation Committee showed that the conventional
pump was consuming a large amount of municipal water. By
converting, the plant
was able to reduce water usage by about
18,000m3 per year,
which was also quite
good in terms of costbenefit analysis.
Newly-installed Air-cooled Vacuum Pump

Saga Plant: Municipal Water Usage

Copy Paper Usage(1,000 sheets)

Manufacturing plants

Office facilities

19,350

Municipal water usage

131,500
107,367
18,30095,785
18,617112,150

89,067

77,168

(m3)
3,500
3,000
2,500

Building 1 production equipment (including
vacuum pump), and lavatories, etc.
Other in Building 1, plus Buildings 2 and 3, other

3,088

Succeeded in reducing total water
use at the site by about 40%.

900

2,000

1,872

1,500

13

26

2,188

1,859

1,846

Before installation

After installation(First month)

After installation(Second month)

1,000

1,872

500
0
0

01

02

03

(FY)

(Sites in Japan)

TOKYO ELECTRON Environmental Sustainability Report 2003

18

Eco Factory

Chemical Management
To prevent environmental pollution, we strictly control the chemical substances we use. We independently identify
chemicals that we ban from use in our products and work to eliminate them and find alternatives, and also work to
determine which substances are present in the products we purchase from suppliers.

Stance on Chemical Management

Concritize of the Chemicals Contained in Products

Chemical substances such as plastics, coatings, lubricants, gases

TEL works to address international and domestic laws, regula-and chemicals are an essential part of TEL production activities. They

tions and trends relating to the management of chemical substances

have many valuable properties, but the other side of the coin is thatand is striving to eliminate the general use of hazardous substances.

some of them also have hazardous properties. If they are not properly

We have investigated the chemical substances contained in the

managed, the potential exists for accidents or pollution of thecomponents and materials that make up our products, and based on

environment.

our findings, have listed the substances for which we have prohibited

TEL starts by eliminating the use of hazardous substances to thein our products. These findings are also reflected in our green pro-greatest extent possible. We independently determine the chemicals

curement. Carrying out these activities rigorously will enable us to of-

to be banned from green purchasing and product design, and thenfer products that do not use substances that could damage or harmwork to find safe substitutes and to reduce the amounts used. In ad-

human health or the environment.

dition, we conduct voluntary controls of hazardous substances thatare stricter than government regulations, in an effort to minimize
chemical risk.

Prohibited Substances in Construction Materials of TEL Products
Substance group nameComplying with the PRTR* Law

Asbestos

Hydrogen fluoride and its water-soluble salts

Cadmium and its compounds

Beryllium and its compounds

Hexavalent chromium compounds

PCBs (polychlorinated biphenyls)

began full-scale PRTR reporting during FY 2003, after a preparatory

Cyanide compounds

Ozone-depleting substances

phase involving the creation of guidelines for the management of

Mercury and its compounds

Halogenated fire retardants

chemical substances, the provision of MSDS information, and the de-Organic tin compounds

Specified brominated fire retardants (PBB, PBDE, etc.)

Selenium and its compounds

Polychlorinated naphthalene (chlorine number 3 and higher)

Dioxins

Organochlorine compounds

Arsenic and its compounds

PFOS* and its homologues

Japan’s PRTR Law was promulgated in March 2000, and wevelopment of methodologies for calculating the amounts of releases
and for making official reports to the government.
Under the PRTR Law, reporting is mandatory for chemicals that are*Perfluorooctane sulfonate: An intermediate substance from which target chemicals are synthesized.

handled in amounts of five tons or more per year at each facility. TEL
has been conducting stricter controls than those legally required, by continuing to control and monitor any substances stipulated by the law that
we use in amounts of 0.1 tons or more per year. The FY 2003 totals for
substances targeted by the PRTR Law are shown in the table below. We
handled no substances in amounts exceeding five tons (in either of thefirst two years) that would require reporting.
*PRTR (Pollutant Release and Transfer Registers): A framework for controlling chemical substances that may be hazardous to ecosystems and human health. It involves determining, compiling, and reporting on theamounts of chemicals used, released into the environment, and contained in waste transferred off-site.

Class 1 Substances Controlled under the PRTR Law (Units: tons)
Official number
1
16
43
172
207
260
283
311

19

Chemical nameAmount handled
Water soluble zinc compounds
0.05
2-amino ethanol
0.43Ethylene glycol
4.00
N,N-dimethylformamide
0.45
Water soluble copper salts (except complex salts)
0.12
Pyrocatechol
0.03
Hydrogen fluoride and its water-soluble salts
3.69
Manganese and its compounds
0.90
Total
9.69

TOKYO ELECTRON Environmental Sustainability Report 2003

Management of Liquid Chemicals by LabelingIn the evaluation cleanrooms at the Kumamoto and Koshi
plants, we are managing the use of liquid chemicals by affixing
labels with identification data onto the containers of chemicals
used in product evaluation and testing.
The information on labels is entered into a database, enabling us to easily track inventories and status of use.
In accordance with handling methods specified by MSDS
standards, the chemicals are stored separately at either cool orroom temperatures asappropriate.

Label attached to chemical containerEfforts to Reduce Non-CO2 Greenhouse Gas Emissions

PCB Storage

The Kyoto Protocol was adopted at the Third Session of the Con-

Japan’s Law Concerning Special Measures against PCB Waste en-

ference of the Parties to the UN Framework Convention on Climate

tered into force in July 2001. In accordance with this law, we are rigorously

Change (COP3), held in Kyoto in December 1997. It set specific nu-

controlling waste that contains PCBs and submitting reports each year tomerical targets for the reduction of greenhouse gas emissions fromthe local prefectural governors about the status of storage and disposal ofdeveloped countries, and methods for achieving these. Japan ratified

PCB waste. The status of storage at TEL is shown below.

the Protocol in June 2002. TEL is working hard to reduce greenhouse gas emissions. Besides carbon dioxide emissions from energyuse, TEL is using PFCs and SF6 (greenhouse gases) in cleaning andStorage of Equipment Containing PCBs (Sites in Japan)
Transformers

2 setsCapacitors

4 setsdry etching processes, among others. The total of these emissions is
10,000 tons per year (CO2 equivalent). TEL will continue working tocontrol and reduce the emissions per unit of business activity as wellas to reduce total emissions.

Independent Controls at Each Site: Yamanashi Region

Greenhouse Gas Emissions from Sites in Japan(Units: t-CO2)

HFCs

PFCs

SF6

Other

Total

1,468

1,856

6,740

18

10,082

Material Safety Data Sheets*
We are sharing MSDS safety information on all chemicals newly
introduced at any plant by using a database hosted on our intranet.
Because information searches can be conducted from all plants, anyuser can determine the toxicity and hazard level for each individual
chemical, and make a decision on whether or not to use it.
In addition, MSDS documentation is placed at all locations in
TEL where chemicals are used, and steps are taken to prepare for
emergencies such as leaks and explosions.

In the Yamanashi region (Fujii and Hosaka plants), highly
hazardous gases such as chlorine and special high pressure gases like monosilane are used in the process development. Strict
controls are in place to prevent even that the slightest leak, but
in the unlikely event that a problem occurs, a centrally-monitored system can detect even minute leaks and automatically interrupt the supply of the gas.
In addition, these plants have created their own lists of substances
for which purchasing is prohibited. The list includes nine organochlorine
solvents and seven heavy metals, for a total of 16 items. If for some reason it is absolutely necessary to use one of these substances, the plantrules require a two-step review before approval. The plants have established voluntary wastewater standards that arestricter than those of thelocal prefecture, and areworking to keep transfersof hazardous substances
into the environment to theabsolute minimum.
Central monitoring room

*Material Safety Data Sheets (MSDS): Documents with information that isused to accurately determine the toxicity and proper handling of chemical
substances.

Manager’s Comment
In the Yamanashi region we are using about 1,000 types ofchemical substances and products, and in terms of both number
and amounts, this is more than any other company in TEL. We
take extra precautions for safety and the environment with asystem that requires review and approval before introducing or
using a new substance. Using our own numbering system, we
have created an easy to use system that relies on a registry ofchemical substances and products to prevent mistaken use. Forvery common chemicals like sulfuric acid and hydrochloric acid,we have a pool system that eliminates waste from purchasing
and use.

Screenshot of an intranet search

Shimpei Jinnouchi
Environmental Occupational Health & Safety Center,
Tokyo Electron AT Limited

TOKYO ELECTRON Environmental Sustainability Report 2003

20

Environment, Health and Safety Management

EHS Management System (Part 1)
TEL is promoting environment, health and safety (EHS) activities globally.

Organizational Structure for EHS

Customer-site EHS

At TEL, to keep up with globalization of our EHS activities, weThrough the Customer-site EHS Committee, consisting of repre-

have formed a Global EHS Committee comprised of the president andsentatives of business units that conduct work at customer sites plus

corporate directors of Tokyo Electron, and EHS directors. As therepresentatives of each country, we are promoting EHS for work con-heads of this committee, they decide on the policies and directions ofducted at the customer’s location. The committee ensures that our

TEL EHS-related activities. EHS activities are structured in terms ofwork is in compliance with legal requirements and local working

three pillars: “Factory and Office EHS,” “Customer-site EHS” andmethods, and communicates with and supports local organizations“Product EHS.”

concerning EHS matters.

Factory and office EHS

Product EHS

We are promoting local EHS activities in each region throughWe are promoting EHS in our products, with the Product EHS

TEL Safety and Health Committee, consisting of representatives of of-

Executive Committee at the top of the structure, consisting of thefice facilities, and TEL EHS Committee, consisting of representatives

exective officers in charge of development, marketing, and sales plusof the manufacturing plants. At the manufacturing plants, we carry

the EHS directors of each business unit. Subcommittees include theout EHS activities through the EHS Management System, and at theSales/Marketing Product EHS Committee and the Product EHS Tech-

office facilities we are creating an environmental management sys-nical Committee. It is important that the EHS concepts clearly state

tem through what we call TEL Eco-Activity (see page 22).

those factors which the customer requires and that these be incorporated at the initial development phase and design phase of products.
Also, with the globalization of TEL, we must comply with the laws ofeach country in which we do business. For this purpose, we are actively promoting what we call “DF EHS” (Design for EHS).

TEL EHS System
Global EHS Committee

TEL Safety
and HealthCommittee

TEL EHS
Committee

Customer-site
EHS
Committees

Product EHS
Executive Committee

Sales/Marketing/
Product
EHS Committee

21

Product EHS
Technical
Committee

Factory and Office EHS

Customer-site EHS

Product EHS(EHS activities in each region)(EHS activities at customers’ locations)(EHS activities for equipment used in production in TEL)TOKYO ELECTRON Environmental Sustainability Report 2003

Stance on EHS Management

TEL Eco-Activity

Each manufacturing site has created an environmental manage-

Within TEL, we have created our own TEL Eco-Activity environ-ment system and has been certified based on ISO14001. In addition,

mental management system based on ISO14001. We have been

we have began to create an occupa-

promoting TEL Eco-Activity in office facilities since last year. Our Fu-

tional safety and health management

chu Technology Center established targets of reducing electricity us-

system based on OHSAS18001 andage by 5% compared to the previous year, improving recycling, andguidelines of Japan’s Ministry ofcleaning along the roads our employees use for commuting. Regard-

Health, Labour and Welfare. Our officeing energy conservation, we implemented changes in temperaturefacilities have introduced simplified in-settings of air conditioners and turning lights off policy during lunch

dependent environmental management

breaks. In the future we will continue

systems we call “TEL Eco-Activity.”

with energy and resource conservation
activities, and encourage everyone to
ISO14001 Certificate

work to meet the targets. In addition,
we have gone further with TEL Eco-Ac-

Implementing the EHS Management System

tivity at the Tokyo Electron Device

At each facility, using environmental impact assessments, we

headquarters and plan to obtainascertain and prioritize the environmental impact of the environmen-

ISO14001 certification by October 2004.

tal dimensions associated with our services and the development andTEL Eco-Activity
Management Program

manufacturing of products. In addition, by performing assessments
we ascertain the risks relating to safety and health aspects of operations, and assign priorities accordingly. For the environmental as-

Status of ISO14001 Certification and TEL Eco-Activities

pects and risks that have been identified, in order to reduce the risks,
ISO14001-certified
facilities• • • Facilities conducting
TEL Eco-Activity• • • Facilities planning toobtain ISO14001 certification•••

we develop a program (Plan), systematically conduct improvement
activities (Do), confirm the progress (Check) and then review everything (Act), with what is known as a PDCA cycle.

North America

Structure of EHS Management System
Tokyo Electron America, Inc.
(preparing for certification)

EHS Basic
Principles

Act

Tokyo Electron
SoftwareTechnologies Ltd.
Tokyo Electron TohokuLtd., Tohoku plant

EHS Guidelines

Plan
Identification of environmental
dimensions and threats; risk
assessment, environmental
assessment• Legal and other requirements• Objectives and targets• EHS Management Program

Tokyo Electron AT Ltd.,
Miyagi plant(certification expected Dec. 2004)•

Management
review

Planning

Continuous
improvement

andImplementation

corrective action

andoperation

Tokyo Electron Ltd.,
Osaka Branch OfficeDo
System preparation and responsibilities
Training, awareness and capacity-building
Communicate key information• Implement education• Documentation and document control• Emergency preparedness and response

Check

•

Monitoring and measurement
Prevention and correction of non-compliance• Record-keeping• EHS Management System audit••

Tokyo Electron AT Ltd.,
Fujii and Hosaka plants

Tokyo Electron Ltd.,
Fuchu Technology Center

Checking•

Tokyo Electron Kyushu Ltd.,
Saga plant•Tokyo Electron Kyushu
Ltd., Ozu plantTokyo Electron Kyushu Ltd.,
Kumamoto plantTokyo Electron EE Ltd.,
Sagami plantTokyo Electron Kyushu Ltd.,
Koshi plantTokyo Electron
Logistics Ltd.,
Narita Logistics CenterTokyo Electron Ltd.,World Headquarters
Tokyo Electron Device Ltd.,
Headquarters(certification expected Oct. 2004)

TOKYO ELECTRON Environmental Sustainability Report 2003

22

Environment, Health and Safety Management

EHS Management System (Part 2)
We are conducting comprehensive checks of the EHS Management System.

Stance and Organization for Checking EHS Activities

Legal and Regulatory Compliance

In order to strengthen the EHS Management System at TEL, we

At TEL, our approach to legal and regulatory compliance is toare enhancing the auditing aspects of the system that are responsi-

consider environmental legislation and ordinances and emissions

ble for the “checking” functions of the PDCA cycle. Through auditing

standards, and to set our own voluntary standards at even more

and other means we check up on systems and performance fromstringent levels. Through the cumulative effects of our day-to-day ac-multiple dimensions—which could be broadly described as internal,

tivities, such as checks on the management of chemical substancesGroup and third-party checks.

and pH levels in water, we are clearing our own tough standards. As
one example of how we do this, at the Hosaka plant, before final discharge of wastewater we confirm the pH level and other parameters

System for Checking EHS Activities

of some of the effluent in an in-house storage tank.
Third-party
ISO14001 audits

Thanks to these efforts, nolawsuits arose during FY 2003 inconnection with accidents, violations, penalties or complaints, andTELInternal
EHS audit

no economic sanctions or incentives
TEL internal
assessment

were used by the government.
Wastewater storage tankbefore final discharge

Measuring Soil and Rainwater Peretration

TEL Internal Assessment
TEL has been actively implementing internal EHS audits, conducted by each facility, and ISO14001 environmental management
system audits by third-party organizations. But we felt that these auditing methods alone were not enough, so in FY 2003 we started“TEL internal assessment” conducted by EHS representatives fromeach facility, as peer assessments on EHS items.
By having the facilities in TEL conduct peer assessments, we are
striving to determine the status of TEL facilities overall, and this willlead to uniformity and improvement of EHS activities. During FY
2003, we conducted assessments on management-level initiatives,
legal compliance, and responsibilities/structures, based on TEL regulations for work safety. In FY
2004, we will select new

Since obtaining ISO14001
certification at the Sagami plant in
FY 1998, we have been conducting
measurements of soil and of arainwater that has penetrated thesoil. We are measuring rainwaterfrom an observation hole and arainwater penetration chamber,targeting organochlorine compounds that TEL has used in thepast, in addition to ten chemical
Soil testing
substances.
We are conducting measurements every year, and as a result, are verifying our state of compliance with environmental
quality standards, prefectural ordinances and so on for soil andwater quality.

Soil Testing Results

themes and details and work to
make further improvements.

A site inspection underway

Test items

TEL standards

Test results

Lead and its compounds
Phenols
Copper and its compounds
Zinc and its compounds
Iron and its compounds
Manganese and its compounds
Chromium and its compounds
Fluorine compounds

0.01 mg/l
0.5 mg/l
1 mg/l1 mg/l3 mg/l1 mg/l2 mg/l0.8 mg/lLess than 0.005 mg/l
Less than 0.003 mg/l
Less than 0.05 mg/l
0.11 mg/l
Less than 0.05 mg/l
Less than 0.02 mg/l
Less than 0.05 mg/l
Less than 0.1 mg/l

In FY 2003, 18 items were tested, including the eight shown here.

23

TOKYO ELECTRON Environmental Sustainability Report 2003

Environment, Health and Safety Management

Environmental Accounting
We are more accurately determining the costs andbenefits of environmental activities and using this knowledge in management.

Stance on Environmental Accounting

Environmental Preservation Costs

Environmental accounting is a management tool that helps todetermine the costs and benefits of a company’s environmental ac-

The costs of environmental preservation (investments and expenses) for FY 2003 can be seen in the tables and figures below.

tivities. At TEL, we have introduced an environmental accounting sys-

The data covers TEL facilities in Japan. Depreciation on invest-

tem to determine quantitatively the costs of the environmental as-

ments in facilities is calculated as an expense beginning with the in-pects of our business, and we are using this information to guidevestments made in FY 2000.

corporate activities.
FY 2003 is the fourth year since the introduction of the environmental accounting system, and we have made greater efforts thisyear to improve the accuracy of information about both the investments and expenses for environmental activities. Our aim is to makeour environmental activities sustainable.

Breakdown of Investments
Management
activity
1.3%

Globalenvironmental
protection
0.4%
Upstream/
downstream
0.2%

Pollution
prevention
4.2%

Our environmental accounting complies with the Environmental

Global environmental
protection 1.4%

Resource circulation
9.5%

Pollution
prevention
0.9%

Management activity
9.9%
Upstream/downstream
14.3%

Resource circulation
93.9%

Accounting Guidelines (2002 Edition) and Environmental Accounting

Breakdown of Expenses
Social activity 3.4%

R&D
60.5%

Guidebook from Japan’s Ministry of the Environment.
Environmental Protection Costs in FY 2003
Locations covered: All TEL facilities in Japan (Sapporo, Tohoku, Miyagi, Akasaka, Fuchu, Yokohama, Sagami, Hosaka, Fujii, KTC, Osaka, Saga, Kumamoto, Koshi, Ozu)
Period covered: April 1, 2002 to March 31, 2003
Units: 1,000 yen
Classifications of Environmental Costs
1. Business area cost
1.1 Pollution prevention costs
Itemization
1.2 Global environmental costs
1.3 Resource circulation costs
2.Upstream/downstream costs
3.Management activity costs
4.Research and development costs
5.Social activity costs
6.Environmental damage costs
7.Other activities
Total

Details of main initiatives(facilities, supplies, leases, depreciation, maintenance, etc.)

Investment amount

Expense amount

Prevention of air pollution, water pollution, soil contamination, etc.
Climate change prevention, ozone layer protection, etc.
Efficient use of resources, waste reduction, etc.
Green purchasing, green procurement, etc.
Environmental education, monitoring and measuring environmental impacts, etc.
Product R&D, etc.
Planting trees and vegetation, supporting local environmental activities, information provision, etc.
Repairing damage to the natural environment, etc.
other336,302
320,631
1,481
14,190
637
4,530
0
0
0
0
341,469

753,216
179,697
73,187500,332
752,999522,737
3,179,925
46,012005,254,889

Benefits of Environmental Activities
The results of calculations of the economic benefits of environ-

Concerning categories of environmental accounting, this reportcovers only the economic effects of environmental protection activities.

mental preservation activities are shown in the table below.

Economic Benefits of Environmental Protection Activities in FY 2003
Locations covered: TEL facilities in Japan (Sapporo, Tohoku, Miyagi, Akasaka, Fuchu, Sagami, Hosaka, Fujii, Osaka, Saga, Kumamoto, Koshi, Ozu)
Period covered: April 1, 2002 to March 31, 2003
Classifications of environmental costs

Cost reduction

Profits

Benefits relating to electricity and other energy
Water-related benefits
Paper-related benefits
Resource-related benefits
Waste-related benefits
Other benefits
Cost reduction subtotal
Waste-related benefits
Other benefits
Profit subtotal
Grand total

Details

Units: 1,000 yen
AmountReduced electricity usage
Reduced water usage
Reduced paper usage
Reduced resource usage
Reduced waste volume

Profits from recycling (salvageable materials)
Public relations effect (equivalent TV/newspaper advertising cost)

71,66014,631
57,621
26,423
15,7900186,125
1,268
1,500
2,768
188,893

TOKYO ELECTRON Environmental Sustainability Report 2003

24

Environment, Health and Safety Management

Health and Safety
Health and safety form the very foundation of work practices and are driving forces for the betterment of society.
We treat health and safety as top priorities in our corporate activities.

For the Safety of Everyone

Accident Prevention: Handling of Accident Reports

At TEL, we are aware that health and safety are important is-

Any accident involving TEL employees is reported to our head-sues, and have given them an important place in our statement ofquarters. When the accident report is received, the seriousness ofManagement Philosophy. We believe that ensuring the safety andthe incident is judged based on a set of criteria (human injury,

health of employees and customers—and every single person who

fire/explosion, gas/chemical leak, serious damage for customer andhas any connection with business—is a part of fulfilling our social re-so on). Accidents that have an element of urgency are reported to top

sponsibility as a company, and will lead to good business.

management and simultaneously in an accident bulletin to GroupSpecifically, this means that profits and deadlines should nevercompanies.

be prioritized in such a way as to compromise human safety or the

In addition, we are operating an “EHS Bulletin” on the TEL intra-

safety of facilities and equipment. To raise the safety awareness ofnet. Using this system, if an accident arises it is possible to imme-

employees, TEL has created “Safety First” posters and posts them indiately issue a detailed company-wide bulletin in an effort to prevent

places where they can easily be seen.

similar occurrences. Besides such accident bulletins, we aim to im-

In addition, in order to convey our thinking on this topic to cus-prove safety measures by posting information through alerts, EHS

tomers and a wide range of other stakeholders, we have printed a

notices, and other forms. Information is also transmitted to Group“Introducing Safety First Culture Awareness.”members overseas.
The following graph of accidents per 200,000 work hours reveals a lower figure for the entire TEL than the average figure for theoverall U.S. semiconductor industry.
Accidents per 200,000 Work Hours(Year 2001 average for U.S. semiconductor industry: 1.2)

1.2
1.0

0.93

0.8
0.6
0.4
“Safety First” poster

The “Introducing Safety
First Culture Awareness”

A map has been created of the area of Yamanashi region aroundTokyo Electron AT’s Fujii and Hosaka plants, showing locations of accidents involving TEL employees. This map helps to raise awarenessabout traffic safety.
This map shows at a glance where the accidents are most concentrated, allowing employees to learn what types of accidents, andwhere they are occurring on the roads that they regularly travel.
At the Tokyo Electron AT Miyagi plant, after producing a map
similar to the one of the Yamanashi region, the local police office provided them with some new traffic accident data. TEL employees util-

0.38

02

03

0
01

Promoting Safe Driving
by Providing Accident Information

0.36

0.2

ized this additional information to creat a more comprehensive accident hotspot map, and donated it to the police office. Besides activities such as these, the company health and safety committees ineach region are treating traffic safety as a vital safety issue for employees, through activities
such as seatbelt checks,
monitoring stop sign obedience, checking driving
conditions on snowy
roads, and cooperatingwith police in traffic safety
education.
Hazard map at the Fujii area

25

TOKYO ELECTRON Environmental Sustainability Report 2003

(FY)

Accident Prevention: Recognizing Human Nature

Counseling

TEL is promoting accident prevention based on an understand-

TEL has a nurse’s office in each of its regions, which provides

ing of human nature, with a focus on the human factor in the causes

health counseling and guidance after health checkups, and can pro-of accidents.

vide first aid for illness and injury. In addition, we routinely offer

At TEL manufacturing plants, we are implementing Site-based

counseling with industrial physicians and experts such as industrial

EHS training. This training is based on actual examples of accidents,

counselor and head of the Japan Industrial Counseling Center, Dr.

and use the M-SHEL Method* to help identify the accident cause, to

Yoko Nohara, a clinical psychotherapist.

learn about human nature and the mechanisms that trigger human

These services give employees the opportunity to discuss mat-error, and to use the new understanding gained to help prevent theters with experts regarding their mental health or other concerns. We

recurrence of similar accidents.

have created a climate where employees can easily drop in at the

To minimize the damage or injury in the event of an accident, we

health clinic for any concerns about mental or physical health.

aggressively promote wearing of personal protective equipment (safety
helmet, safety glass, safety shoes) in the cleanrooms. In addition, TELManager’s “Two-Week Rule” in Yamanashi Region

has developed original equipment such as a metalic barricade to prevent

Does your employee’s condition
seem different from his/her usual condition?

personnel or materials from falling.
*M-SHEL Method: An accidentanalysis method that involves theactual person who was involvedin an accident, which investigates the conditions surroundingthat person from various perspectives, including software,
hardware, environment and liveware, as well as management,
which overarches them all. It
also helps identify possible prevention measures.

Ask if employee has any concerns
You think there
is a problem

You think there
is no problem

Encourage employee to discusswith attendant in health clinic
Employeeagrees andgoes forcounseling

Employee first consults
clinic attendantCounselor
Metallic barricade

Industrial physician

Health and Safety Activities in Korea
Tokyo Electron Korea uses
eye-catching posters withsafety messages to promote anaccident-free workplace.

Poster:“No accident!
Are you doing a daily safety check?”

Manager observes for two weeks

Employee senses
no problem anddoes not seek
counseling

No improvement
after two weeks

Basically, manager
seeks consent of
person, then speaks
to attendantNo problem
evident after
two weeks

Take no action,
but continue
to observe*Convince the employee and send to clinic.
Or have clinic contact the person.

Health and Safety Activities in Taiwan
Tokyo Electron Taiwan is bringing safety education directly to customers,
about the features of TEL products and risks that come with the larger equipment. The education includes the TEL stance on safety, and explanations
about what to watch out for interms of safety when using our
products, with examples of actual
potencial accidents. Through these
efforts and by actively providing information, we are helping to ensure customer safety and fulfilling
our social responsibility.
Safety education is a joint
effort with customers

TOKYO ELECTRON Environmental Sustainability Report 2003

26

Environment, Health and Safety Management

EHS Education
It is TEL’s duty to work for the protection of the environment, health and safety.
We implement a variety of educational and awareness-raising programs on the principle ofproviding the necessary education to the people who need it.

Stance on EHS Education and AwarenessImplementing Safety Education

At TEL, we have a principle regarding the environment, healthIn order to promote Safety First at TEL, we are conducting safety

and safety—to provide the necessary education to the people who

education specific to the nature of the job, for personnel who work inneed it. We conduct the necessary education and training at different

the office, in the cleanrooms, and at customer sites. The validity of

personnel levels—for our own employees and employees from part-

this training is given an expiration date, so personnel are required toner companies who work in-house at TEL companies. When they en-

take a refresher within a certain time period.

ter the company, the environment, health and safety are among therequired topics of their training.

In addition, we hold emergency lifesaving lessons (CPR,
first aid) so that they can acquire

EHS Education

the skills they would need in theevent of a disaster.

Expert training(Special training for internal environmental auditing, and for important environmental aspects)

Equipment-specific training

Environmental training basedon ISO14001 (for manufacturing plants)

Safety training for employees
going overseas

Environmental education for TEL
Eco-Activity (office facilities)

Environment

Training for employees who go
to customers’ plants

Advanced safety training(see Topics)
Basic safety training

Health and Safety

Other education and training: emergency lifesaving classes (CPR, first aid skills),
legal education (supervisor training, special operations, etc.).

Implementing Environmental Education
At office facilities of TEL, we provide standard environmental
education for all employees, including sales and administrative staff,
field engineers, and part-time and temporary employees.
At manufacturing plants, as a part of an education based on
ISO14001 we provide all employees with education about the environmental objectives and targets of the office. And in TEL, by providing examples and education outside the company, we contribute toenvironmental activities in the local community. The Tohoku plant offered case examples of its efforts (through waste management andenergy conservation) to reduce environmental impact to the Iwate

Emergency lifesaving class

Advanced Safety Training
The safety training at TEL is divided into two types: basic
safety training for employees, and advanced safety training for
those employees who will work at factories (TEL’s or customers’). This advanced safety training is for new employees andmid-career hires, and includes group training with actual practice in putting on safety wear and using safety equipment. They
are also required to take a refresher class before the one-year
validity of the course expires. The refresher course consists ofWeb-based training on the company intranet, so even field engineers who work at customer sites and others who would havedifficulty taking the time to attend classes can easily fit the refresher into their own personalized schedule. With the Webbased training, they learn about working in high and enclosed
spaces, the handling of chemical substances, and preventing
electrical risks, as well as actual accidents that have occurred.
This safety education is supplemented based on considerations
made concerning the unique features of each country, including
each country’s laws, for field engineers of companies overseas.
We are further using our experience creating the teaching materials to help develop a unified safety curriculum for equipment
manufacturers, now under review by the Semiconductor Equipment Association of Japan (SEAJ).

Prefecture Environmental Protection Association, which ismade up of local corporations.

Web-based advanced safety training
Explaining the Tohoku plant’s
environmental efforts to local businesses

27

TOKYO ELECTRON Environmental Sustainability Report 2003

Environment, Health and Safety Management

Communication with Stakeholders
We believe that promoting communication with all our various
stakeholders will lead to growth of the TEL.

Stance on Environmental Communication

EHS Seminars in Taiwan

TEL is working to reduce the environmental impact arising fromIn 2002 we repeated the TEL EHS Seminar in Hsinchu for ourbusiness activities, and is actively working on health and safety is-

Taiwanese customers after the first offering the previous year. Manysues. To promote these activities as effectively as possible, it is es-

customers participated, and personnel from various TEL businesssential that everyone involved in the companies’ activities dissemin-units made presentations on the TEL stances on the environment,

ate and share the appropriate information to the greatest extent pos-health and safety, on the results of LCA of our products, energy con-sible and work toward better communication. TEL has been publish-

servation examples, the uses of our products, and points to consider

ing environmental reports since the year 2000, and these reports as

when using them. At the end of the seminar there was an active

well as other information about TEL’s approaches to the environ-question-and-answer period about the safety of tools and TEL’s

ment, health and safety are available on our Web site.

initiatives.

URL

http://www.tel.com

In the future we plan to continue holding this seminar, and toprovide information such as theenvironmental and safety aspectsof our products.

EHS seminar in Taiwan
Environmental Report 2000 Environmental Report 2001 Environmental Report 2002

Publishing the EHS Times and Using the Intranet

Activities in the Industry

TEL publishes the EHS Times as an in-house magazine on EHS.

TEL is a member of the Semiconductor Equipment Association

In it, we introduce in understandable terms a variety of informationof Japan (SEAJ) and is actively communicating with the industry

relating to EHS, such as the discussions of each committee, and ini-

about environmental activities. Specifically, we participate in the en-tiatives in each Group company and region. Such EHS-related news-

vironmental committee of SEAJ, and have cooperated in the creation

letters are being made by each company and in each region, andof Ecodesign Guidelines and Green Procurement Guidelines. In Eco-play an important role in spreading awareness about EHS issues.

design Guidelines we helped formulate guidelines relating to LCA

Also each company and region is actively using the intranet to post

methods for semiconductor manufacturing equipment as well as en-

and exchange information. In particular, the departments in charge ofergy conservation, hazardous substances, and reduce/reuse/recycle

EHS in overseas offices are working to share information by introduc-

initiatives for this equipment. In the Green Procurement Guidelines,

ing the particular laws of each country and examples of local cus-

we summarized methods to tackle environmental issues in cooper-

toms.

ation with suppliers. In formulating these guidelines, we were able touse the foundations built by our own experiences in LCA and green
purchasing in TEL over the past
few years.

The intranet

EHS Times

Presentation at the Forum on
Semiconductor Manufacturing Technology

TOKYO ELECTRON Environmental Sustainability Report 2003

28

Environmental Sustainability Report 2003

Societal Contribution
Our principle of respect for people is the basis for our initiatives tocontribute to communities in Japan and overseas.

Tokyo Electron Fuchu Technology Center

Stance on Societal Contributions
TEL has encapsulated its corporate message to treat people welland provide value that makes them happy, in the words “People.
Technology. Commitment.”

The Tokyo Electron Fuchu Technology Center cooperates with the
Asahi Photo News Co.’s special project, atraffic accident prevention campaign. This
year as a part of a campaign to prevent

TEL is expanding a global business to provide value-added prod-

accidents involving children, we donateducts and services to its customers and to everyone around us, and to

an Asahi Photo News bulletin board thatobtain the highest value. At the core of this drive is the respect for

carried traffic safety slogans, and inclu-

people that has been part of our corporate philosophy since the com-ded our company name, to the nearby Fu-pany was first established. “Believe in the creativity and limitless po-

chu Sumiyoshi primary school.
Donated Asahi Photo News,
Message board

tential of employees and all people, respect different cultures and adiversity of values.” “Give top priority to human health, and consider
also the protection of the environment.” “Embrace with enthusiasm.”
These are all a part of our approach to life and work.
Also, as part of our corporate principles, TEL strives to spreadawareness about corporate social responsibility, the environment,
health and safety. The offices and plants of TEL work to build relationships of trust with the local governments and communities, andTokyo Electron Kyushu, Saga Plant
At an award ceremony held at
the Meiji Shrine to commemorate
the 125th anniversary of the JapanRed Cross Society and the 50th anniversary of the Red Cross Law,
Saga plant received recognition forhaving made a significant contri-

carry out a variety of activities to contribute to society and environ-bution by cooperating in blood do-mental protection as a whole.

nor drives.

Letter of recognition fromthe Japan Red Cross Society

As we expand such activities as an important part of our corporate mission, we would like to move forward together with our customers and society as a whole.

Tokyo Electron Kyushu, Koshi Plant – Youth Forum –The International Environmental Citizen’s Conference Kumamoto 2002
was held October 26-30, 2002, as a citizens’ environmental conference by
non-governmental organizations and other citizen groups. The Koshi plant

Activities in Japan

participated in the Youth Forum during this event. This forum was targetedTokyo Electron Tohoku, Tohoku Plant
As a part of our activities to contribute to the community, we havebeen participating since 1990 in the annual Esashi Jinku Festival in Iwate
Prefecture. The festival originated in a traditional fire-prevention festival inwhich only the village fire brigades performed, but in 1977 it became aparticipatory-style festival that anyone could join. The festival includes avariety of events such as a large parade with 3,000 participants, local foodstalls, and performance of local arts. Our employees, particularly the newer
ones, always participate in the festival. Every year the employees practiceafter work to perform in the festival, and their involvement is strengthening

at students, and provided an opportunity for the environmental managersof corporations and NGO activists to exchange opinions. At the venue, participating companies and organizations set up tables, and students could
approach the company or organization of their choice and ask questions.
Many students approached the 27 participating companies and organizations to talk to their representatives. At the Tokyo Electron Kyushu, tablediscussions centered on the fact that help is needed from a variety of fields
in order to solve these environmental problems. It was a valuable time fordirect exchanges of opinion between students and the company.

our connections with the local community.

Esashi Jinku Festival

29

TOKYO ELECTRON Environmental Sustainability Report 2003

Scenes from the Youth ForumeTexas Recycles Day

Activities Overseas

This year, the statewide environmental campaign known as “Texas

Tokyo Electron America
TEL is actively contributing to the community not only in Japan, butalso at our locations overseas, especially in the United States.

Recycles Day” celebrated its tenth year. The slogan this year was “ReUse.” Compared to conventional recycling, repeated use of the same materials is considered a better alternative for solid waste management.
Tokyo Electron America, in conjunction with Keep Austin Beautiful

qSupporting the 2002 Diabetes Walk

(KAB), promoted the 10th anniversary by holding an information fair nearOn October 27, 2002, 10 employees from Tokyo Electron America

the cafeteria of the Austin headquarters that provided tips on recycling on

Santa Clara and Timbre, participated in the Juvenile Diabetes Research

Friday, November 15, 2002. A recycling trivia con-Foundation Walk held at the Shoreline Park in Mountain View, California.

test also helped staff deepen their knowledge

Austin office also participated, with 25 walkers who raised $7500. They

about recycling and environmental protection.

received the Silver award as one of the top 3 corporate walk teams in the

Other companies in Austin held similar infor-

city. Tokyo Electron America

mation fairs to promote the 10th anniversary ofalso donated funds for thisTexas Recycles Day.

event. Across the U.S, the 2002
walk collected over $70 million

Recycle Day poster

to support research for finding acure for diabetes.
Juvenile Diabetes Research Foundation Walkw“Adopt-a-Street” Clean-up

Japanese Language and Culture Program

Tokyo Electron America (headquartered in Austin, Texas) participatesin the Keep Austin Beautiful program. Part of this program is an “Adopt-aStreet” clean-up campaign. Once every three months, TEL cleans Grove
Boulevard in front of TEA headquarters. TEA has been participating in the
program since it was first launched, and is a key sponsor.
Keep Austin Beautiful honored TEL with an award for their Adopt-AStreet program at their annual luncheon in February 2003. In addition, TEA
also received a National Citation of Merit in Keep Texas Beautiful’s Environmental Competition for their participation in this program. Adopt-A-Street,a subsidiary program of Clean
Streets, allows local groups toadopt streets near their establishment or residences. TEL
served as the key sponsor forthis Keep Austin Beautiful initiative and hosted the program’s
kickoff on Friday, April 12, 2002.

Receiving the Community
Award For Litter Abatement

The Austin Japanese School was set up to provide an opportunity for children of Japanese employees at the Tokyo Electron America’s headquarters in Austin to learn in concentrated
classes with a curriculum similar to what is taught in schools inJapan. The classes are held on Saturdays, when local schools
are closed. Initially, this school targeted the children of employees, and started with lessons held in the company’s in-housetraining center. Eventually, people working at other local Japanese companies showed an interest in the school. In September
2000, it was moved to the Asian American Cultural Center inAustin, after which classes were opened to families from othercompanies, and the school became available to the public. In
April 2002, it received formal approval from Japan’s Ministry of
Education, Culture, Sports, Science and Technology and Ministryof Foreign Affairs, and continues operating today. As of July
2003, about 90 students were registered.
As an aside, the school offers students and their families theopportunity to enjoy Japanese language and culture throughsports days and other cultural events.
There are about
200 of these government-recognized Japanese schools around theworld, supported especially by local Japanese
associations, companies
and volunteers.
Sports day
at the Austin Japanese School

TOKYO ELECTRON Environmental Sustainability Report 2003

30

Comments from Stakeholders
We have received many comments on our environmental reports and business activities, and we do our best toincorporate them into future reports and activities.

Sony Corporation

SEMI*1(Semiconductor Equipment and Materials International)

1. Comments on the Tokyo Electron Environmental Reports
We believe that these are comprehensive environmental reports, based on guidelines presented by the Ministry of the Environment, and providing TEL’s basic policies, efforts to reduce theenvironmental impact of both product and production, and important information on environmental management. We would like to
see the following points clarified in the future.
qTEL shows how the energy and material flows relating to production, but we would also like to see more about the environmental
burden (energy use, distribution, packing, disposal) associatedwith use of the products, as well as the overall burden, and the
proportions of the burden between product and production.
wUnder Eco Factory, the initiatives to reduce environmental burden are commendable, but the description is limited to stating
what was done in general terms. We would like to see moredetail about actual achievements in terms of numerical targets.
eIn terms of waste reduction, we would like to see more detailabout activities such as explanations of TEL’s situation, comments on whether or not the amount is high, and information
on regarding what efforts are being made to reduce amountsparticularly for the Hosaka plant, which has the highest amountof waste disposal.
rThe energy consumption per unit of sales is stated to be twice
the amount it was in FY 1998, but we would like to see futuretarget amounts are.

2. TEL’s Impression of EHS activities
We applaud the creation of the SEMI Akira Inoue EHS Awardand the support for EHS activities in the global semiconductor industry. We are also strongly impressed by the company’s leadership in the industry, through active implementation of efforts suchas the SEMATECH product and environment seminars.

3.Sony’s Impression of TEL
We value the presence of TEL in pioneering the developmentof leading-edge technologies for semiconductor production equipment and applying those results in equipment, as we have seen
with the company’s research on microwave plasma.

Congratulations to Tokyo Electron Ltd. on Their Fourth Environmental Report
Not all the benefits and costs of operating a company appear in
its traditional financial statements. Amongst the missing information are the environmental, health and safety effects of the operations of the company, and of the use of its products and services.
Responsible, caring companies are starting to provide this information voluntarily to the public, employees, customers, investors and other outside stakeholders.
TEL is amongst the leading companies in the semiconductor
equipment and materials industry who are pioneering annual environmental, health and safety public reports. TEL is making theirreports available freely in Japanese and English. The world-classquality of its reports is reflected by TEL’s ranking for environmental performance amongst the top 3% of all Japanese manufacturing companies in 2002 in the respected annual survey conductedby Nihon Keizai Shimbun Inc. or "Nikkei," Japan’s equivalent of
the Wall Street Journal.
By preparing these reports, TEL demonstrates their commitment as a founding member of the Global Care initiative to seek excellence in measuring performance related to Global Care principles
and in environmental, health and safety management practices.
As a coordinator of the Global Care initiative*2 I am pleased tocongratulate TEL’s considerable efforts in preparing this informative Fourth Environmental Report.
*1SEMI is a non-profit industrial association of the world’s major manufacturers of equipment and materials for the production of semiconductors
and FPDs.
*2This consists of five basic principles that were drawn up by SEMI corporate members as an initiative of the entire industry to provide the framework to strengthen public commitments for management, leadershipand innovation.

4. Hopes and Expectations
TEL has revealed its road map for reducing the inevitable environmental impact that occurs during the use of new semiconductor production equipment and is making progress in its targets. We
would also like to see attention going into upgrades that can bedone on existing equipment to reduce this environmental impact.

Junichi Aoyama and Yoshiaki Fujii
Environmental Affairs,
Microsystems Network Company,
Sony Corporation

31

TOKYO ELECTRON Environmental Sustainability Report 2003

Mr. Rick Row
Senior EHS Engineer,
EHS Division,
SEMISite Report: Kumamoto and Koshi Plants
Each year in the Environmental Report, we report on the EHS
initiatives of particular plants. Last year we introduced the
Yamanashi plant. This year we turn our focus on the Kumamoto and Koshi plants.
Kumamoto is famous for its nature, history and culture, with abundant forests and groundwater, the Suizenji park, and the homes of famous Meiji Era writers. The Koshi plant is TEL new production center,with grounds covering about 155,000 square meters in the Kumamoto
Semicon Technopark, which include a concentration of semiconductorrelated companies. The Kumamoto plant has a 16-year history as the focal point of TEL operations in Kyushu.

Koshi plant

Kumamoto plant

The Koshi plant serves as the production center, and the Kumamoto plantas the performance evaluation, sales and service center for the TEL Coater/Developer equipment, which holds the top market share in its market sector.

EHS Activities in FY 2003
Overview of EHS Activities
at the Kumamoto and Koshi Plants
The Kumamoto and Koshi plants acquired
ISO14001 certification in March 1998, andhave been working to reduce environmental
impact with a focus on energy and resource
conservation as they work toward becoming
zero-emissions factories.
• Koshi plant: Since FY 2002, this plant has
been required to reduce its electrical consumption, because the consumption was
rising and the plant was designated a Class
1 Energy Management Factory.
• Kumamoto plant: Because it conducts equipment evaluations, this plant has a high output
of waste liquid chemicals from semiconductor
processes, and it has been working toward
zero—emissions of industrial waste.
Working Toward Zero Emissions of Industrial Waste
At the end of FY 2002, the last recycling
challenge to boost the recycling rate above
99.58% was the disposal of vinyl chlorides. At
the time, this waste was still being landfilled,
but recycling began in FY 2003. Because ofthis change, the management expects to achieve a recycling rate of 100% at the Kumamoto and Koshi plants during FY 2004.

Occupational Health and Safety
Activities Based on Risk Assessment
Under the EHS Management System (seepages 21-22), about 600 work-related risks*were identified in development, production
and other processes, and a risk assessment
was conducted on them. Based on the resultsof analyses, a variety of measures were implemented, targeting the work that generated
those risks. For example, during the processof assembling the coater/developer equipment at the Koshi plant, workers were required to climb to the upper section of the

(%)
93.6%

Material Flows at the Kumamoto/Koshi Plants (FY 2003)
INPUT

Natural gas
Fuel

99.6%

98.8%

Future Issues
After obtaining ISO14001 certification, theplants began thorough efforts to reduce environmental impact, and were proud to achievecorresponding results in FY 2003. Hereafter
the plants’ focus will be to reduce the environmental impact of TEL products during usage. In addition, in terms of worker health andsafety, the plants will redouble their efforts
and aim for a zero-accident record.

OUTPUTCO2

58,240 MWh

45 km

3

0 kl

90

Water

139 km3

80

Chemicals
70

0.001 tons

22,485 tons

Wastewater3(to river, underground) 137 km

99.9%

99.9%

100

*risk: Here “risk” refers both to the potential for adangerous event to occur and its result.

Raised work station and balancer

Electricity

Recyling Rate of Industrial Waste
at the Kumamoto/Koshi Plants

equipment and load a filter unit, a task thatinvolved some risks. To address it, the plant
introduced a raised work station and balancer(see photo).

Kumamoto/KoshiplantsTotal waste disposal 2,056 tons

(PRTR Law controlled substances)

Recycled material 1,986 tons

Paper (copy paper) 27 tons

Incineration, landfill 70 tons

64.3%
60

98

99

00

01

02

03 (FY)TOKYO ELECTRON Environmental Sustainability Report 2003

32

Environment, Health & Safety Center
2-30-7 Sumiyoshi-cho, Fuchu City, Tokyo,183-8705, Japan
TEL: +81-42-333-8052
FAX: +81-42-333-8477
http: www.tel.com
Published: October 2003

30%
Minimum

SA-coc-1210

At least 30% of the fibre used in the
manufacturing process of this product comesfrom well-managed forest independently
certified according to the rules of the Forest
Stewardship Council.

FSC TRADEMARK© 1996 Forest Stewardship Council A.C.

To facilitate recycling, this report was printed using
biodegradable soy ink, which can easily be de-inked.
Design and production: Cre-en