Compact Vibration Testing System
Modal Excitation & Analysis, Calibration, Reliability Test, etc.

Compact High-Performance
Vibration Generator
EMIC Corps' Compact Vibration Generator is used for calibration of Vibrometers, measuring
mechanical impedance and used as an excitation source for modal analysis and reliability testsof small and light specimens.
In particular, EMIC Corp's 512-D and 513-D Model Vibration Generators feature the world's
ﬁrst ceramic armature which allows the system to operate at higher frequencies of 30 kHz and
24 kHz respectively.

Structure Analysis & Transfer
Function Measurement

Calibration of Vibrometer
The systems acceleration, velocity and displacement

The ability to generate vibrations up to 24 kHz or 30 kHz.
Can precisely perform modal analysis and transfer
function measurement over the wide frequency range ofvarious structures' dynamic behaviour.

can be controlled at any desired frequency. Therefore,
the vibration generator can be used for calibration ofvariousvibrationmeasurement

instruments

andtransducers.

Mechanical Impedance Measurement

Many applications

The Compact Vibration Generator can be used as

Compact Vibration Generators are most suitable for reliability

an excitation source to measure the mechanicaltests of small and light parts such as electronic parts or circuit

impedance of a structure. To cover a wide range ofboards. Moreover, there are many applications such as tests ofstructures we oﬀer a High Force Model (Max. 500

various sensors (Car Acceleration sensors, Gyro sensors, etc.)N) and High Frequency Model (Max. 30 kHz)and functional tests of precision mechanical systems.
Combined Reliability Tests can also be accomplished together

Ｓｕｐｅｒ High Frequency Excitation Source

The

be

We also oﬀer the EM-772 that can generate a extremely highinspect

frequency vibration up to 60 kHz to measure the frequency

products by performing a Vibration test. Products

characteristics such as spurious characteristics of the crystal

such as car audio equipment and GPS navigation

oscillator mounted on suspension-head unit in hard disk drives,

systems

mobile-phone and smart phone.

Compact

integrated

1

by incorporating an environmental chamber.

Inspection Equipment in Production Line
into

Vibration
production

Generator
lines

to

can

9514 SeriesCompact Vibration Generator
The 9514 series Vibration Generator provides the
ﬂexibility to comply with various applications by
combiningthesystemwithvariousoptional

equipment.
While its main components are standardized, thesystem is highly customizable and suited for yourcompany needs.
The ﬂexibility of the system oﬀers allows it tocomply with examination of rattle noise tests andother testing applications such as heavy load,
through hole, heat-proof, etc.
Standard 9514

Pneumatic Payload Support
Enhancement of Payload Capability
Adjustment of Center Operating Position

Modal Analysis

System Configuration

Vertical Table
Collet-and-Chuck
for Modal Analysis

Piezo-electric
Accelerometer

Accelerometerwith Electronics

Application
Vibrometer

Data Recorder

Charge Ampliﬁer

Slip Table
Isolation StudPower Ampliﬁer
BlowerSignal Generator
Vibration Controller
DCS-98000MJ Series(Please contact us forthe details.)

Environmental
Chamber(limited to only allWeather type)High-speed Video Camera

Sound-proof
Box for Rattle
Noise Test

Counter Mass

Isolation Mat

Heat-proof (All-weather) Feature
Can be used in environmental chamber.

EMIC Model(Option)

Other Model(Option)The 9514 series has a wide variety of applications which
can be customized to the customers test requirements.
Allowing EMIC Corp to oﬀer various test systems.
Horizontal Slip Table +Reinforcement against Oﬀset Load
The ﬁgure shows the add-on features,
horizontal slip table with linear bearing
and reinforcement against oﬀset loadin vertical vibration mode. The tablesize can be changed according to thecustomer's needs.
Rattle Noise (Very Low Abnormal
Noise) Measuring Evaluation
Test System
Used for measuring and evaluating very
low abnormal noise (rattle noise) fromaudio equipment such as CD, DVDplayer, etc. mainly used for car audio
systems. The system consists of avibration controller and sound-proof box
to deaden ambient noise as well ascompact vibration generator andassociated power ampliﬁer.

2511、512 Series（Shown without Trunnion Stand Option）

Modal Analysis

Standard

High Force : 64 N

High Frequency : 30 kHz

High Frequency : 30 kHz
High Force : 64 N

Model

511-A

512 -A

512 -A/A

512-D

512-D/A

Rated Force

15N

49N

64N

49N

64N

Frequency Range

2 Hz to 5 kHz

2 Hz to 20 kHz

2 Hz to 20 kHz

2 Hz to 30 kHz

2 Hz to 30 kHz

Max. Acceleration

230.7m/s2

376.9m/s2

492.3m/s2

272.2m/s2

355.5m/s2

Max. Velocity

1.26m/s

1.14m/s

1.31m/s

1.00m/s

1.14m/sMax. Displacement

5.0mmp-p

7.0mmp-p

7.0mmp-p

7.0mmp-p

7.0mmp-p

Axial ResonanceMore than 3.9 kHz

More than 16 kHz

More than 16 kHz

More than 32 kHz

More than 32 kHz

Armature Mass

0.065kg

0.13kg0.13kg0.18kg0.18kgArmature Material

Aluminum

Magnesium

Magnesium

Ceramics

Ceramics

5N/mm

Category

Armature DiameterM6 Screw (length=20mm)

12N/mm
ф 40mm

12N/mm
ф 40mm

12N/mm
ф 40mm

12N/mm
ф 40mmMaximum Payload

―

2.0kg

2.0kg

2.0kg

2.0kg

Stray Field

―

―

―

―

―

Field Power

Permanent Magnet

Permanent Magnet

Permanent Magnet

Permanent Magnet

Permanent Magnet

Ambient Temp.

－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)

Cooling method

NaturalDimensions

120W×190H×100Dmm

Naturalф150ｍｍ×178mm（※1）

Forced Air
ф150ｍｍ×178mm（※1）

Naturalф150ｍｍ×178mm（※1）

Forced Air
ф150ｍｍ×178mm（※1）

Stiﬀness

Mass

4.2kg

9.5kg

9.5kg

9.5kg

9.5kg

Matched Ampliﬁer

371-A

371-A

372-A

371-A

372-A
Standard Accessory

BlowerAccessory
Option――Standard Accessory―

Trunnion Stand

―

―

―

―

―

Trunnion Stand(Weight=2.4 kg)

Trunnion Stand(Weight=2.4 kg)

Trunnion Stand(Weight=2.4 kg)

Trunnion Stand(Weight=2.4 kg)

Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.

513 Series（Shown with Trunnion Stand Option）

Category

Standard

High Force : 147 N & 196 N

High Frequency : 24 kHz

High Frequency : 24 kHz
High Force : 147 N

513-B/A

513-D

513-D/A

Model

513-B

Rated Force

98N

Frequency Range

3 Hz to 13 kHz

Max. Acceleration

264.8m/s2

397.2m/s2

Max. Velocity

1.17m/s

1.43m/sMax. Displacement

10mmp-p

Axial ResonanceArmature Mass

196N

98N

147N

3～ 24kHz3～ 24kHz529.7m/s2

175m/s2

262.5m/s2

1.67m/s

0.92m/s

1.14m/s

10mmp-p

10mmp-p

10mmp-pMore than 12 kHz

More than 12 kHz

More than 23 kHz

More than 23 kHz

0.37kg0.37kg0.56kg0.56kgArmature Material

Magnesium

Magnesium

Ceramics

Ceramics

Stiﬀness
Armature Diameter

14.0N/mm
ф79mm

14.0N/mm
ф79mm

14.0N/mm
ф79mm

14.0N/mm
ф79mm

Maximum Payload

3.0kg

3.0kg

3.0kg

3.0kg

―

―

―

―

Permanent Magnet

Permanent Magnet

Permanent Magnet

Permanent Magnet－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)－10 ℃ to ＋40 ℃(Without dew drop)

Naturalф 215W× 230H（※1）

Forced Air
ф215W× 230H（※1）

Naturalф215W× 230H（※1）

Forced Air
ф215W× 230H（※1）

Stray Field
Field Power
Ambient Temp.
Cooling method
Dimensions
Mass
Matched Ampliﬁer

26kg

Blower371-A

Accessory
Option147N
3～13kHz

26kg
372-A

374-A

26kg
374-A

―

Standard Accessory―

Standard Accessory

Interconnecting Cable x 1
Grip x 2

Interconnecting Cable x 1
Grip x 2

Interconnecting Cable x 1
Grip x 2

Interconnecting Cable x 1
Grip x 2

Trunnion Stand(Weight=4.0 kg)

Trunnion Stand(Weight=4.0 kg)

Trunnion Stand(Weight=4.0 kg)

Trunnion Stand(Weight=4.0 kg)

Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.

3

26kg
372-A

9514 Series

Category

Standard

High Force : 500 N

Integrated Pneumatic Support
Large Displacement : 30mmp-p

Integrated Pneumatic Support
Large Displacement : 30 mmp-p High Force : 500 N

Model

9514-AB/AS

9514-AN/SD

9514-AB/SD

9514-AN/AS

Rated Force

300N

500N

300N

500N

Frequency Range

5 Hz to 5 kHz

5 Hz to 5 kHz

5 Hz to 3 kHz

5～ 3kHzMax. Acceleration

250m/s2

416.7m/s2

230.8m/s2

384.6m/s

Max. Velocity

1.2m/s

1.2m/s

1.2m/s

1.2m/s2

Max. Displacement（※2）
15mmp-p

25mmp-p

30mmp-p

30mmp-p

Axial ResonanceMore than 4350 Hz

More than 4350 Hz

More than 3600 Hz

More than 3600 Hz

Armature Mass

1.2kg

1.2kg

1.3kg

1.3kg

Armature Material

Aluminum

Aluminum

Aluminum

Aluminum

Suspension &Guide

Half Loop Flexure

Half Loop Flexure

Pneumatic Payload Support

Pneumatic Payload Support

Sleeve Shaft

Sleeve Shaft

Roller Bearing ＋ Sleeve Shaft

Roller Bearing ＋ Sleeve Shaft

Stiﬀness

25.0N/mm
（※2）
ф75mm

25.0N/mm
ф75mm

―
ф75mm

―
ф75mm

Armature Diameter
Maximum Payload

12kg

12kg

12kg

12kg

Thrust Axis

VerticalVerticalVerticalVertical

Stray Field

Less than 3 mT（※3）

Less than 3 mT（※3）

Less than 3 mT（※3）

3mT以下（※3）

Field Power

Permanent Magnet

Permanent Magnet

Permanent Magnet

Permanent Magnet

Ambient Temp. －10 ℃ to ＋40 ℃(Without dew drop) －10 ℃ to ＋40 ℃(Without dew drop) －10 ℃ to ＋40 ℃(Without dew drop) －10 ℃ to ＋40 ℃(Without dew drop)
Cooling method

NaturalForced Air (Blower)

NaturalForced Air (Blower)

Dimensions

283W× 270H× 205Dmm

283W× 270H× 205Dmm

283W× 276H× 205Dmm

283W× 276H× 205Dmm

Mass

25kg

26kg

27kg

27kg

Matched Ampliﬁer

373-A

375-D

373-A/Z12

375-D

Blower―Standard Accessory

Accessory――

Option―●Air Pump●

Standard Accessory

Midpoint Adjuster Block●

Air Pump●

Midpoint Adjuster Block■ Accelerometer ■ Counter Mass（※4） ■ Accelerometer ■ Counter Mass（※4） ■ Accelerometer ■ Counter Mass（※4） ■ Accelerometer ■ Counter Mass（※4）■ Isolation (Rubber) Pad■ Isolation (Rubber) Pad■ Isolation (Rubber) Pad■ Isolation (Rubber) Pad

Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.

9514 Series, Modal & All-weather Application

Category
Model

Modal Excitation

High Frequency

All-weather Typeused in Workspace of Environmental Chamber

9514 -AN/MD9514- AB/WF

Rated Force

300N

500N

300N

9514- AB/AW
500N

Frequency Range

5 Hz to 2.5 kHz

5 Hz to 10 kHz

5 Hz to 3.0 kHz

5 Hz to 3.0 kHz

Max. Acceleration

300m/s2

277.7m/s2

250.0m/s2

Max. Velocity

1.2m/s

1.2m/s416.7m/s2
1.2m/sMax. Displacement

15mmp-p（※2）
20mmp-p

10mmp-p

10mmp-p

Axial ResonanceMore than 3600 Hz

More than 6500 Hz

More than 4300 Hz

More than 4300 Hz

Armature Mass

1.0kg

1.8kg

1.2kg

Armature Material

Aluminum

Aluminum

Aluminum

Suspension &Guide

Half Loop Flexure

Half Loop Flexure

Half Loop Flexure

Sleeve Shaft

Sleeve Shaft

Sleeve Shaft

Stiﬀness

25.0N/mm

28.0N/mm

30.0N/mmArmature Diameter

ф50mm

ф75mm

ф83mm

Maximum Payload

8.0kg

12kg

10kg

Thrust Axis

Vertical（Any direction by using ﬂexure）

VerticalVertical

Stray Field

Less than 3 mT（※3）

Less than 3 mT（※3）

Less than 3 mT（※3）

Field Power

Permanent Magnet

Permanent Magnet

Permanent Magnet－10 ℃ to ＋40 ℃(Without dew drop)－40 ℃ to ＋125 ℃(Humidity : Less than 98% RH)

Ambient Temp. －10 ℃ to ＋40 ℃(Without dew drop)

Half Loop Flexure
Sleeve Shaft

Cooling method

NaturalForced Air (Blower)

Forced Air (Blower)

Dimensions（※5）

283W× 270H× 205Dmm

283W× 270H× 205Dmm

382.5W× 205H× 333.5Dmm

Mass
Matched Ampliﬁer
Blower26kg

26kg

373-A/Z13

375-A/Z22

373-FW375 -D――

Standard Accessory

Standard Accessory

Accessory

Collet-and-chuck Set (φ1.0, φ1.5, φ2.0, φ2.35, φ3.0)

OptionAccelerometer ■Counter Mass (※4)
■Isolation (Rubber) Pad■Model : 9514-AN/MD/Z12 Reinforced
Stiﬀness : 50 N/mm (limited to max. 10 mmp-p)■Model : 9514-AN/MD/Z13 Low level acceleration
with low distortion (limited to max. 10 mmp-p)
■

31kg

―
Accelerometer■Isolation (Rubber) Pad■

Built-in Accelerometer Model : 731-B, T-wrench (M5)Interconnection compatibility withchamber whose wall thickness isother than 70 to 100 mm■Muﬄer for Air Cooling Blower■■Interconnection compatibility withchamber whose wall thickness isother than 70 to 100 mm■Muﬄer for Air Cooling Blower

Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.
(※1) Except for grip. (※2) 25 mmp-p displacement is available by changing axial stiﬀness to 15 N.mm. (※3) At 50 mm above table center. (※4) When attempting to drive the vibration generator
at its maximum exciting force, vibration generator should be secured to counter mass, rigid base or ﬂoor. (※5) Without any projection.

4

Matched Power AmplifierModel371- A

373- A

372 - A373- A/Ｚ13

373- A/Ｚ12

375 - D375 - A374- A

373-ＦＷ

Apparent Power

110VA

220VA

330VA

360VA

440VA

720VA

840VA

Output Voltage

20.0Vrms

27.5Vrms

20.0Vrms

30.0Vrms

40.0Vrms

30.0Vrms

35.0Vrms

11.0Arms

24.0Arms

24.0Arms

Output Current

5.5Arms

8.0Arms

Frequency Range

2Hz to 30kHz

2Hz to 30kHz

16.5Arms

12.0Arms

2Hz to10kHz

2Hz to10kHz

ＤＣ to10kHz（★1）
ＤＣ to 4kHz（★2）

1Hz to 5kHz

2Hz to 20kHz 2Hz to 5.0kHz DCHz to 5.0kHz

Input Impedance

10kΩ

10kΩ

10kΩ

10kΩ

10kΩ

Input Voltage

1.0Vrms

1.0Vrms

1.0Vrms

1.0Vrms

1.0Vrms

1.5Vrms

Matching Impedance

3.64Ω

3.44Ω

1.21Ω

3.64Ω

1.25Ω

1.46Ω

Load Impedance

1.82Ω

1.72Ω

0.67Ω

1.82Ω

0.63Ω

0.73Ω

80dB

80dB

80dB

80dB

70dB

S/N
Distortion
Meter

10kΩ

50kΩ

80dB

Less than 0.5％ Less than 0.5％

70dB

Less than 0.5％ Less than 0.5％ Less than 1.0％

Less than 0.5％

7.5Arms

10.0Arms

20Arms

20Arms

25.0Arms

Input Connector

BNC

BNC

BNC

BNC

BNC

BNC

Input to Blower-

Max.200VA-

Max.200VA

Max.300VA

Max.400VA

Max.200VA

Protector●Overcurrent●Transistor temperature●Overcurrent●Transistor temperature●Overcurrent●Transistor temperature●Overcurrent●Transistor temperature●Leakage Protector●Overcurrent●Transistor temperature●Leakage Protector●Overcurrent●Overvoltage●Transistor temperature●Overdisplacement●Interlock

Power supply

AC100V 50/60Hz AC100V 50/60Hz

Max. Power Consumption
Dimensions
Mass

300VA

●Overcurrent●Transistor temperature●Overcurrent●Transistor temperature●Overload

1.8kVA

480W ×249H ×400Dmm 480W×249H×602Dmm 480W×200H×450Dmm

480W ×249H ×400Dmm
37.0kg18.5kg

2.4kVA

1.5ｋVA

1.1ｋVA

480W ×149H ×350Dmm 480W ×149H ×350Dmm
12.5kgAC100V 50/60Hz AC200V 50/60Hz AC200V 50/60Hz

AC100V 50/60Hz

800VA

Operating Environment●Overcurrent●Overvoltage●Transistor temperature

25.0Arms

52.0kg37.0kg35.0kgTemperature Range: 0℃ to 40℃、Humidity Range: 20％RH to 85％RH without dewdrop

Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.（★1）Under voltage mode （★2）Under current mode

Matched Power Amplifier w/ Oscillator Option
Models371- A/G、372 - A/G、373 - A/G、374 - A/G

Frequency Range

1 Hz to 100 kHz (2 ranges: 1 Hz to 1 kHz and 100 Hz to 100 kHz)Frequency Adjust

Fine : Min. 2 Hz for 1 Hz to 1 kHz, Min. 200 Hz for 100 Hz to 100 kHz
Coarse : Variable of more than 5 Hz for 1 Hz to 1 kHz, Variable of more than 50 Hz for 100 Hz to 100 kHz

Frequency AccuracyLess than 2% (+2 reticles)

Frequency Stability

0.5 Hz/℃ typical at 1 kHz for range from 1 Hz to 1 kHz

Output Waveform

sinusoidal wave

Frequency Response ±1.0 dB within same range, reference levels for ranges are ones at 500 Hz and 5 kHz respectively.
Harmonic Distortion

Miscellaneous (Option Feature)● Manual Operation of Blower● DC 12 V Input Power with Pressure Alarm Switch● Constant Current Mode
● Remote Start/Stop with Remote Control Box● Remote Start/Stop with Timer and Remote Control Box● Duct Silencer● Stop Function of Fan● Oscillator, Vibration Meter, Timer, Remote Control Switch

Less than 0.3% from 5 Hz to 1 kHz
Less than 0.5% from 100 Hz to 50 kHz
Less than 0.7% from 50 kHz to 100 kHz

Frequency Display

6 digits

Display Resolution

1.0Hz

Frequency Accuracy±1.0HzGate Time

1.0s(ﬁxed)

Pneumatic Payload Support enabling full displacement 9514 Series
Payload Mass vs Full Displacement
Since the Armature of the compact vibration generator is suspended by
the ﬂexures, the central position lowers as the payload mass increases,
reducing the maximum displacement for the system. Without proper
caution the tests can exceed the maximum rated speciﬁcation of thesystem. The 9514 Series Vibration Generators include additional
options such as pneumatic payload support to compensate wheneﬀected by heavy specimens.
Without Pneumatic Support
Specimen

Using Pneumatic Support
Specimen

Support Flexure

Support Flexure

Center position
lowersCenter position
can be maintained

Super High Frequency Vibration Generator
Model : EM-983
The EM-983 is primarily designed for measuring the extremely
high frequency characteristics of a suspension-head unit in
hard disk drives and can meet the needs with low cross-talk.
● Upper limit of operating frequency : 100 kHz● Armature structure : ceramics● Applications :・Measurement of frequency characteristics of suspension head unit in hard disk drives
・Measurement of spurious characteristics of crystal oscillator for mobile phone
・Measurement of frequency characteristics of acceleration sensor

Pneumatic Support
Compressed Air

5

Raised Type for
Horizontal Application

Equipped with
Degaussing CoilFP Series Compact
Vibration Testing System
The FP series compact vibration testing system uses
high-eﬃciency permanent magnets to generate magnetic ﬁeld,
and can operate with low noise and excellent power saving.
Since the power of the ﬁeld coil is not required, there is little
heat generation, and the maximum vibration force under low
noise conditions where the cooling blower does not operate is
0.6 kN. When a cooling blower is used, a maximum vibration
force of 2.0 kN is generated.
Taking advantage of this characteristic, the FP series can beused not only for general vibration tests but
also for applications that require a low noise
environment such as precision equipment,
sensors, and rattle noise tests.
● Excitation source for rattle noise test
● Functional test of precision mechanical equipment● Stress screening in production● Experiments in the place such as laboratory
where any sound should be avoided

Specifications
Model
Category
Rated
Force

FP-01K/30

FP-02K/25

FP-02K/30

AC100V Input Power ModelHigh ForceHigh Force w/ Pneumatic Support

Sine

1.2 kN0-p

2.0 kN0-p

2.0 kN0-p

Random

480 Nrms

1.4 kNrms

1.4 kNrms

Shock

1.5 kN0-p

3.0 kN0-p

3.0 kN0-p

Frequency range

to 2500 Hz

to 3000 Hz

to 2500 Hz

Max. acceleration

500 m/s2

800 m/s2

444 m/s2

Max. velocity

1.6 m/s

1.5 m/s

1.5 m/sMax. displacement

30 mmp-p

25 mmp-p

30 mmp-p

Max. payload

150 kg

40 kg

100 kgInput power

1.4 kVA

6.2 kVA

6.2 kVA

Armature Mass

2.4 kg

2.5 kg

4.5 kgAllowable oﬀset load

3 N・m

5 N・m

4 N・m

－

38 N/mm－

Air-cooled

Air-cooled

Air-cooled

Permanent Magnet

Permanent Magnet

Permanent Magnet

Less than 5 mT

Less than 5 mT

Less than 5 mT

Vibration Generator

P01-AB/AS

Σ9515-AB/SD

Σ9515-AB/AS

Model Power Ampliﬁer

375-D/P012

369A-0101-Σ15

369A-0101-Σ15

Console Rack－

CRD-1500-Σ15

CRD-1500-Σ15

Armature Size

φ120 mm

φ120 mm

φ120 mm

Vib. Generator

384W×391.5H×360D mm

442W×360H×340D mm

442W×360H×340D mm

Stiﬀness
Cooling method
Field Power
Stray Field (★1)

SizePower Ampliﬁer

480W×189H×450D mm

554W×1462H×920D mm

554W×1462H×920D mm

Blower

365.5W×700H×434D mm

474.5W×1040H×495D mm

474.5W×1040H×495D mm

Vib. Generator

75 kg

160 kg

165 kgPower Ampliﬁer

35 kg

290 kg

290 kgBlower

16 kg

31 kg

31 kg

Ambient Temp.

-10 to +40℃ (Without dew drop)-10 to +40℃ (Without dew drop)-10 to +40℃ (Without dew drop)

Power supply

AC 100V 50/60 Hz 1φ
or AC 100V 50/60 Hz 3φ

AC 200/220V 50/60 Hz 3φ

AC 200/220V 50/60 Hz 3φ

Massapprox.

Shop Air

Option (★2)－－

Accelerometer

Accelerometer

0.5MPaAccelerometer

1L/minPneumatic Spring・Isolation (Rubber) Pad

Pneumatic Spring・Isolation (Rubber) Pad

Pneumatic Spring・Isolation (Rubber) Pad

Counter MassCounter MassCounter Mass

Simpliﬁed Slip Table System

Simpliﬁed Slip Table System

Simpliﬁed Slip Table System

Abnormal Sound Analysis Feature (Additional Code :/Z01, Max. Displacement : 15 mmp-p）(★3)
Note : Photo is for illustrative purposes only. Speciﬁcations subject to change without prior notice.
(★1)Stray ﬁeld value is at 50 mm above table center.(★2)When attempting to drive the vibration generator at its rated f orce, vibration generator should be secured to reaction mass, r igid
base or ﬂoor. (★3)This optional feature is available only when ordered in advance.

6Compact Vibration Generator Outline Drawing
512 Series(19.5)

511-A

277
φ150
φ40

4- Ｍ4,Depth:6（Helisert）

(190)

63.5

M6

12

107

216

φ30

120

Ｍ6,
Depth:8.5（Insert）

100

513 Series

9514-AN/SD

9514-AB/SD

Armature table
φ75

370
φ215

※Trunnion Stand(Option)

150

175

φ190

9514-AB/WF(15)

13-M5,
Depth:10

φ79

°

45
°

45

M6,
Depth:12（Insert）
220

9514-AB/AS
(15)

224.5

270

13-M5,
Depth:10

205
129

147

9-M5,
Depth:10

Armature table
φ83

5
φ3
φ60

227.5

276

45

°

φ190

9514-AB/AW°

Armature table
φ75

234
283

※Trunnion Stand(Option)

φ60

45

9514-AN/AS

4- Ｍ4,
Depth:12（Insert）

φ80.5

250

147

289.5

φ62

5
φ3
φ60

φ318.5234
283(302.6)

382.5

P01-AB/AS

Σ9515 Series
φ340

Air Inlet

°
45

45

φ50

126.5

230
393.5

13-M6,
Depth:12（Helisert）

φ100

0
φ5 φ100360

13-M5,
Depth:10

φ270

°

φ120

φ120

442

340

https://www.emic-net.co.jp/en/
Head oﬃce :Nagoya oﬃce :Osaka oﬃce :Mishima factory :Service Center :THAI EMIC CO., LTD. :EMIC North America
Corporation :A-PLACE Gotanda Bldg., 3F, 2-27-3 Nishi-Gotanda,
Shinagawa-ku, Tokyo 141-0031
Tel: +81-3-3494-1221
FAX: +81-3-3494-1288
Tomei Grand Bldg., 6F, 30 Isha 2-chome Mitoh-ku,
Nagoya, Aichi-prefecture 465-0093
Tel: +81-52-753-6308
FAX: +81-52-753-6328
Hanahara 5 Bldg., 6 Fl., 8-17 Nishinakajima 7-chome
Yodogawa-ku, Osaka, 532-0011
Tel: +81-6-6886-0451
FAX: +81-6-6886-0454
11 Heiseidai Mishima, Shizuoka 411-0042
Tel: +81-55-988-8411
FAX: +81-55-988-2223
11 Heiseidai Mishima, Shizuoka 411-0042
Tel: +81-55-988-8411
FAX: +81-55-987-1477
15/1 Soi Punnawithi 28, Sukhumvit 101 Road,
Bangchak,Prakanong, Bangkok,10260,THAILAND
Tel: +66(0)2331-2746 / +66(0)2331-2747
Fax: +66(0)2331-2745
216 Bradenton Ave., Suite L, Dublin, OH. 43017, USA
Tel: +1-614-889-8802

Contact:※ Speciﬁcations are subject to change without notice for improvement.

Published: Feb. 2021
CL-159-02-E(PreCL-142-10-J)