EHS Report
Plant and Office
Initiatives for
the Environment

From fiscal 2013, we will focus on the reduction of energy consumption, water usage, and waste
as well as the promotion of recycling, and strive to achieve set goals in each of these areas.
We are also fully committed to the strict management of chemical substances in considerationof their potential impact on the environment as well as on the health and safety of employees,
customers and others.

Measures to Help Prevent Global Warming• Efforts to reduce energy consumption

Electricity consumption

Since the goal for reducing CO 2 emissions set in 2008 is expected to be(Million kWh)achieved in fiscal 2012 (see p. 15) thanks to our vigorous environmental(Million kWh) 9.9(Million kWh)(Million 270.1
kWh)
300

investment and energy-saving activities, we have defined new goals forfiscal 2013 and onward. When these new goals were set, it was decided
that each plant and office would choose in what unit energy consumption
is measured and reported, depending on the form of its business. The
plants and offices in Japan have chosen to use kiloliter of crude oil
equivalent*1 as the unit for measurement and to report in accordancewith the Act Concerning the Rational Use of Energy. They will now
work to reduce energy consumption calculated based on that unit by atleast 1% year on year as required by the act. The Group as a whole willcontinue striving to reduce energy consumption across the board.

270.1

300

9.9
260.2

200
200
100
200

12.5
237.1

260.2
260.2
100
260.2
100
0
100
2008
0

249.6
249.6
12.5
249.6
12.5
237.1
237.1
237.1
2009

Japan

Overseas

Japan

Overseas

253.9

231.8

12.5

9.9270.1
270.1
9.9

300
200
300

249.6

248.9

23.8

16.0

231.8
231.8
16.0
231.8
16.0

253.9
253.9
23.8
253.9
23.8
23.8
230.1

16.0
215.8

215.8
215.8
215.8
2010

25.3

248.9
248.9
25.3
248.9
25.3

230.1
230.1
230.1
2011

25.3
223.6

223.6
223.6
223.6
2012 (FY)

0 2008
2009
2010
2011
2012 (FY)
2008
2009
2010
2011
2012 (FY)0Japan 2008Overseas
Breakdownof CO20092010from energy
20112012 (FY)
2 emissions

3% Japan
2 by source 1%
consumption*
Overseas
1%
2%
3%
3%
2%
2% 3 %
2%
2% 2%
2%
2%

FY2012

1%
1% 1%
1%
1%

102,032
FY2012FY2012
tons
FY2012 91%
102,032
102,032
102,032
tons
tons
tons 91%91%
91%

Electricity
Heavy oilElectricity
Electricity
Kerosene
Electricity
Heavy
oil
Heavy
City
gas oilHeavy oil
Kerosene
Kerosene
LPG
City Kerosene
gasCity oil,gasetc.
Light
LPGCity gas
LPG
LightLPG
oil, etc.
Light oil, etc.
Light oil, etc.

( t）

CO 2 emissions
from energy consumption
113,169 116,023
120,000
8,335
( t）
7,335
98,382( t）

Photovoltaic power generation at the new Miyagi Plant• Energy consumption and CO2 emissions
Power consumption in fiscal 2012 decreased by approximately 2% comparedwith fiscal 2011. Although power consumption at overseas plants and offices
increased due to the opening of new facilities, power consumption at sites inJapan decreased by 2.8% despite the addition of the Miyagi Plant. In fiscal
2012, it is also estimated that a total of 2,113 MWh of electricity was generated
by photovoltaic cells installed at the Yamanashi Plant and new Miyagi Plant,
which accounted for about 1% of the Group’s total energy consumption.
CO2 emissions generated from energy consumption increased by approximately 3% compared with fiscal 2011. However, because CO2 emissions
fluctuate considerably according to the change in electric power companies’
emission factors, the increase in CO2 emissions in fiscal 2012 is consideredprimarily attributable to the worsened power emission factors in Japan.

• The use of greenhouse gases other than CO2
In the process development of products, as well as dry etching and cleaning
processes, we use hydrofluorocarbons (HFCs), perfluorocarbons (PFCs)
and sulfur hexafluoride (SF6), which are greenhouse gases. In fiscal
2011, our use of these chemicals increased as a result of an increase inproduction and additions to the number of plants covered in our calculation.
We are currently promoting the installation of air treatment equipment, ,among other measures, to reduce greenhouse gas emissions.
20

102,032

90,665
14,908113,169 116,023
120,000 ( t）
13,537116,023
113,169 8,335
120,000 7,335
8,994
102,032
80,00098,382116,023
8,335
113,169
120,000
7,335
102,032
98,382 14,908
8,335 90,665
7,335
105,834
107,688
102,032
90,665 13,537
98,382
14,908
8,994
13,537
87,12480,00090,665
8,994
14,90884,84581,671
13,53780,0008,994
40,000107,688
80,000 105,834
105,834
107,688
87,124
84,845
87,124
105,834
107,688 81,671
84,84581,67140,00087,12440,00084,84581,6710
40,000
(FY)
2008
2009
2010
2011
2012
0

Japan

Overseas

Japan

Overseas
Overseas

0 2008
2009
2008
2009
0
2009
Japan 2008 Overseas*( t-CO 2 3 ) Japan

2010
2010
2010

2011
2011
2011

(FY)
2012
(FY)
2012
(FY)
2012

34,553

335,000
Greenhouse gases other than from energy
consumption* **( t-CO 2 3 ) 3( t-CO 2 )30,00035,000( t-CO2 3 )34,553

26,834

334,553152
334,55335,00025,000335,00026,83430,00026,83430,000152
17,74320,00028,824
26,834152
30,00015,88825,000165
18,652152
25,000770
15,00017,74325,00020,00017,743 28,824
20,000 10,610 11 15,888
165
28,824 18,652
12,231
8,486
15,88810,00017,743165
770
20,00018,652
28,82415,0004,350
15,888770
165
15,000 10,610
18,652
5,000
770
4,940
11
3,204
4,052
15,00012,231
3,053
3,926
8,486
10,61010,000
11
12,231
8,486
10,000 4,350
3,045
10,610
2,580
2,673
3,090
1,421
0
12,2314,350 118,486
10,000
5,000
4,940
2008
2009
2010
2011
2012
4,052
3,053
3,926
4,350
5,000 3,204
4,940 (FY)
3,204
4,052
3,053
3,926
3,045
2,580
5,000
2,673
3,090
1,421
4,940
HFCs3,204
PFCs 4,052
SF
Others
0
6
3,053
3,926
3,045
2,580
2,673
3,090
1,421
0 2008
(FY)
2009
2010
2011
2012
3,045
2,580
2,673
3,090
1,421
(FY)
2008
2009
2010
2011
2012
0
HFCs 2008 PFCs 2009SF 6
Others
(FY)
2010
2011
2012

HFCs
HFCs

PFCs
PFCs

SF 6
SF 6

OthersOthers*1 Kiloliter of crude oil equivalent: Volume of electricity, heavy oil, gas, and other types of energy
used × Per-unit calorific value of each energy type × Conversion rate for crude oil equivalent*2 We used adjusted emission factors for individual electric power providers for the emission
factor for electricity consumption in Japan in fiscal 2012. For the emission factor for electricity
consumption overseas, we used estimated factors calculated by the Federation of Electric Power
Companies of Japan based on values published by the International Energy Agency (IEA).
*3 t-CO2 : An unit indicating the amount of CO2 and other greenhouse gases emitted, absorbed orstored, which is converted to the weight of CO2 in tons with an equivalent greenhouse effectInitiatives to Conserve Resources
We are also encouraging the use of environmentally friendly paper• Our approach to resource conservationand introducing products that will help conserve resources, such as

The Tokyo Electron Group is working to minimize the use of limited

paper cups made from a bamboo-based material, for internal use.

natural resources by reducing the volume of paper and water used.
We also use recycled printer toner cartridges in our offices and actively• Efforts to reduce water consumption

cooperate with manufacturers in the recovery of end-of-life cartridges.

As the management of water consumption is becoming an
increasingly important issue for society, in fiscal 2012 we conducted

Our employees are encouraged to use duplex copying, to copy at aways to further reduce water consumption. Based on the results ofreduced size, and to digitize information and internal circulars. As athese studies, we have set a new goal of maintaining the same level

result of these efforts, the Group’s total use of copier paper in fiscal

of water consumption in fiscal 2012. Our water consumption in fiscal

2012 decreased by approximately 14%, or more than five million

2012 increased by approximately 9% year on year, partly due to thesheets of copier paper, compared with fiscal 2011. This is a reduction

increased volume of water used for process evaluations.

studies on how water is used and recycled at our company to identify

to less than half of fiscal 2008 figures, and the amount of paper used

Moving forward, we will continue monitoring our water consumption
MANAGEMENT REPORT

as a percentage of sales has also decreased.

to ensure that it will not exceed the fiscal 2012 level on a per-unit basis.

Copier paper consumption (Japan)

Water consumption(Thousand sheets)(Thousand m 3)

100,000

1,200

84,419

1,180
48

1,139

2

65

1

599

800

1,192

1,090

967
49

13,483

70

64
1

315

199

575
504

50,00030,0098,647
21,362

2008

Plants2009

Offices

39,102
25,721

16,30011,508
14,213
2010

22,802
2011

33,366
14,064

531

498

413

19,302
2012

531

506

296

301

400

(FY)

0

2008

2009

Industrial water2010

Tap water

2011

Groundwater

2012

(FY)

Overseas use

EHS REPORT

70,9360

HIGHLIGHT• Efforts to reduce the use of paper

TOPICS
SOCIAL REPORT

Efforts to reduce water consumption at Tokyo Electron Taiwan
Tokyo Electron Taiwan has adopted systems for collecting and recycling wastewater andrainwater at its Head Office building to ensure the effective utilization of water resources.
The wastewater recycling system collects around 2,000 m3 surplus water annually generated
from pure water production and reuses it in toilets and other places as well as to supplement
water for cooling towers and scrubbers. The system plays an important role in the reductionof wastewater discharged into sewers. The rainwater collection system collects rainwater on
the rooftop of the building and stores it in an underground tank with a capacity 10 m3. The
total annual volume of rainwater stored in the tank is estimated to be more than 2,000 m3.
The rainwater is used for watering plants on the premises of the Head Office and in an
adjacent park.

Supplement water forcooling towers and scrubbers

Rooftop
ToiletRooftop
5F

Toilet4F

Toilet3F

Utilize for watering plants
and park irrigation

Rainwater
storage tankToilet2F

Toilet1F
B1F
B2F

ToiletCollect surplus waterfrom pure waterproduction

21

EHS Report
Initiatives for Reducing Waste• Our approach to waste reduction and recycling
The Tokyo Electron Group conducts various activities to minimize
waste, recycle whatever waste is generated to the greatest extent

Recycling rate and generation of incinerated andlandfill waste (Japan)（t）（t）

possible, and dispose of non-recyclable waste in a proper and500

responsible manner.

500
400

To be more specific, we separate recyclable waste from
non-recyclables, use new manufacturing processes that do not
involve waste generation, hire only waste disposal companies
inspected and authorized by our company, periodically check final
waste disposal practices, and also focus on educational activities
related to the sorting of waste and other topics. Some business

400
300

97.0
97.0
366
366

97.3
97.3

97.3
97.3

288
288

276
276

300
200

97.4
97.4

100
(%)

Target: Maintain recycling
rate of 97%
or moreTarget: Maintainrecyclingrate of 97% 331
or more

100

331

245
245

200
100

80

100
0

80
0

0

sites have begun using electronic manifests* 1 to ensure proper
management of waste.
*1 Electronic manifest: A system in which the flow of industrial waste is managed via
a communication network linking information processing centers, the companies
generating the waste, waste collection and transportation companies, and waste
disposal companies. It replaces the conventional paper-based control manifest.

(%)

98.1
98.1

2008

2009

2008 and landfill
2009
Incineration
Incineration and landfill

20112012 (FY)2010 rate 2011
Recycling
Recycling rate

2010

2012 (FY)0

Breakdown of waste (Japan)
10%
5%
10%
5%
5%
5%
7%

• Volume of waste generated and recycling rates

7%
10%

Although the volume of incinerated and landfill waste increased over10%

FY2012

12,885FY2012
tons
12,885tons

the fiscal 2011 level, the recycling rate* 2 in fiscal 2012 was 97.4%,

63%
63%

Liquid waste
Liquidwaste waste
Metal/product
Paper
Metal/product
waste
Paper
Plastics
Plastics
Wood waste/packaging materials
Wood
Otherswaste/packaging materials
Othersachieving the target set in fiscal 2011 to maintain a recycling rateof 97% or more. As for liquid waste, including chemicals used in
our product development and evaluation processes, nearly 100% iscurrently recycled.

Recycling rate for industrial waste generated at Tokyo
Electron Group plants in Japan*2 Recycling rate: Recycled amount ÷ Amount of waste generated × 100• Zero waste

Plant

Recycling rate

Tohoku Plant

99.2%

Taiwa Plant

100%

The Tokyo Electron Group defines plants where less than 2% of

Yamanashi Plant (Hosaka)

100%

waste generated is incinerated or put into landfill as “zero waste

Yamanashi Plant (Fujii)

100%

plants.” In fiscal 2012, we achieved zero waste at all but one

Koshi Plant

100%

of our plants in Japan as a result of our efforts to reduce waste

Ozu Plant

100%

and recycle.

TOPICS
Waste recycling promotion by an overseas Group
company
Tokyo Electron U.S. Holdings, Inc. is actively promoting the recycling of waste. Its
activities include a campaign against the use of Styrofoam cups, which cannot bereused and do not biodegrade, as well as the recycling of mobile phones and otherelectronic waste. A total of more than 500 mobile phones had been recycled as of
fiscal 2012.

Campaign poster discouraging the use of Styrofoam products

22

Management of Chemical Substances• Our approach to the management of• Safe storage of PCBs

chemical substances

Based on the Act on Special Measures concerning Promotion of Proper
Treatment of PCB Wastes and the Waste Management and Public Cleansing
Act, the Tokyo Electron Group reports annually on the storage, managementand disposal of waste containing polychlorinated biphenyls (PCBs) to
the governor of each of the prefectures in which our plants are located.
We ensure that all PCBs, including traces of PCBs that were detected intransformers and condensers marked for disposal following the demolition of
one of our closed plants, are managed properly in accordance with the acts.
Volume of PRTR Class I Designated Chemical
Substances handled (Japan)• Compliance with the PRTR* law

Waste

7,343 kg/year

Transferred to sewage

2 kg/year

On-site landfill

0 kg/year

Removed

2,402 kg/year

Recycled

45 kg/year

13,709 169 14,361

12,450

1,617

2,108

10,000

9,693

1,359

1,607
1,459
1,200

6,285

5,021

5,427

3,977

2008

2009

2010

3,962

5,000

0

5,071

847
1,225

4,541

236
8,469

8,203

2011

2012 (FY)

Hydrogen fluoride and its water-soluble salts
Ethylene glycol
XyleneMethylnaphthalene

Others* PRTR (Pollutant Release and Transfer Register): A system under which the use ofchemical substances that may be hazardous to human health and the ecosystem, theirrelease into the environment, and their transfer (contained in waste) off the original
business premises are identified, tabulated, and disclosed

Volume ofsubstances handled

14,361 kg/year

Released into the air

23 kg/year

Released into water

0 kg/year

SOCIAL REPORT

Volume ofsubstances consumed

15,0004,546 kg/year

Input and output (FY2012)

Input
Electricity

248.9 million kWh

–2.0%

Gas

1.514 million m3+32.6%

Fuel

1,538 kl

–15.8%

Water

1.192 million m3+9.4%

Chemical substances(Class I Designated Chemical
Substances under the PRTR system)

Paper (copier paper)

14.3 tons

132 tons

OutputChange fromprevious year

+4.4%
–14.8%

Tokyo
ElectronGroup

Change fromprevious year

Total product shipment

15,236 tons

–37.4%

CO2 emissions

102,032 tons

+3.7%

12,885 tons

+4.1%

12,554 tons

+3.5%

331 tons+35.1%

from energy consumption

Waste
Recycled amountAmount ofincinerated/landfill waste

EHS REPORT

Material balance of PRTR-regulated substances(kg)

20,000MANAGEMENT REPORTIn accordance with the Act on Confirmation, etc. of Release Amountsof Specific Chemical Substances in the Environment and Promotion of
Improvements to the Management Thereof (“PRTR law”), we ensure thatchemical substances regulated under the act are managed rigorously,
and that the amounts of regulated substances used, discharged andtransferred are consistently monitored. Hydrogen fluoride, one of theregulated substances, is used in large quantities by the Group, particularly
during the cleaning of test wafers. Methylnaphthalene, a substance foundin heavy oil, is also used in boilers and other facilities at some of ourbusiness locations. We make sure to properly dispose of these hazardous
substances after use either through specialist waste disposal contractors
or using our in-house processing equipment. We will continue to properly
manage risk relating to these chemical substances.

HIGHLIGHT

The Tokyo Electron Group uses chemical substances mainly in thedevelopment and manufacturing phases of products. In the development
phase, whenever we introduce a new chemical substance or alter the
method of using a chemical substance, we make sure to check forenvironmental, health and safety risks and take the necessary measures
before the new substance or method is adopted. With regard to hazardousand harmful chemicals used in the manufacturing process, we arepromoting their replacement with safer substances.

23