E H S R E P O RT

Plant and Office Initiatives for the Environment
The Tokyo Electron Group’s plants and offices are implementing measures to save resources andprevent global warming, and these are introduced in this section.

Preventing Global Warming
Reducing Energy Consumption

Electricity Consumption

EHS REPORTOur Group is committed to reducing energy use in compliancewith the provisions of the Energy Saving Act. Its sites are actively
reducing their energy consumption by setting specific energysaving targets for lighting, OA machines, and air conditioners
through appropriate temperature control.
For example, Tohoku Plant introduced inverters for the air
supply and exhaust fans used for air conditioning. Plant employees had manually adjusted the fans, but after installing inverters,
it became possible to operate
the electric motors more efficiently, resulting in an annual
reduction in the power consumption of approximately
200,000 kWh and a reduction
in CO2 emissions of approxi▲ Installation of inverters
mately 100 tons.

26(100,000 kWh)

Overseas
Japan

Heavy Oil Consumption(kl)

148 160 150

126

2,430

192 165
1,916
1,652

101
2,472
2,396
2,191 2,345
2,151 2,181
1,858
1,501
1,212
1,206
1,089

1,881 1,828 1,838
1,665
1,631
1,604

967 958

0

0’97 ’98 ’99 ’00 ’01 ’02 ’03 ’04 ’05 ’06 ’07(FY)’97 ’98 ’99 ’00 ’01 ’02 ’03 ’04 ’05 ’06 ’07(FY)

Kerosene Consumption

Plant and Office Initiatives for the Environment(kl)

Gas Consumption(1,000 m3)

1,146
1,062
1,014
996
990 990942
908

Gas (overseas)Gas (in Japan)
LPG (in Japan)

154

946

Energy Consumption

364

In FY 2007, as in FY 2006, our total energy use increased due toan increase in production quantities. However, we were able toreduce per-unit energy use and achieved the target of reducing
the energy use per unit sales by 1% compared with the previous
fiscal year. We will continue to improve on our energy-saving
measures.
In FY 2007, in calculating CO2 emissions, we converted
power consumption into CO2 emissions using the emission coefficients specified by each electric power company and started to
identify the use of gas by our overseas sites.

545

150.9

401

Reducing the Use of Greenhouse Gases
other than CO2
We use perfluorocarbons (PFCs) and sulfur hexfluoride (SF6),
which are greenhouse gases, in dry etching, cleaning and otherprocesses during process development and process evaluation.
In FY 2007, we used 21,006 metric tons of greenhousegases (as CO2 equivalent), which is substantially larger than theamount used in FY 2006 (12,643 metric tons). This was partiallybecause the volume of SF6 used for product development andevaluation greatly increased. We will examine replacing thesegreenhouse gases with alternatives.

1,277

135.5

89.3

50,48845,922

92.8
78.4

65,81752,45694,00984,761

87.1

87.7

95,487
95,486

91.9

82.7

13,863

100,941
104,110

18

19

0

’97

’98

’99

’00

’01

’02

’03

’04

’05

’06

TOKYO ELECTRON Environmental and Social Report 2007

6,740

’07 (FY)

1. Calculated based on the guidelines for the calculation of greenhouse gas emissions frombusiness entities published by Japan’s Ministry of the Environment
2. Energy use per unit sales in FY 1998 = 100%
3. Percentage of per-unit energy consumption in the current fiscal year to per-unit energy
consumption in the previous fiscal year
(Plants in Japan and overseas)

3,106

56

104,763

0

30

Other
SF6
PFCs
HFCs

95.8
100.0

Greenhouse Gas Consumption(t-CO2 )112.1

104.4 150.8’97 ’98 ’99 ’00 ’01 ’02 ’03 ’04 ’05 ’06 ’07(FY)(Plants in Japan and overseas)

147.5

137.4 105.6 197.0

738

62 60 66 70 50 59’97 ’98 ’99 ’00 ’01 ’02 ’03 ’04 ’05 ’06 ’07(FY)(%)
CO2 emissions (in Japan)
CO2 emissions (overseas)
Figures based on energy use per unit of
208.0
2
sales in FY 1998
193.1
Energy use per unit of sales in comparison
with the previous fiscal year3
168.2

658

0 74 72 55 59 66 66 63 58 56 110 113

0Total Energy Consumption (in CO2 Equivalent1)(t-CO2 )838

403 389

0

4,681
6,682

3,506
6,297 784

1,856
1,468

1,284
1,140

’03

’04

322

’05

3,236
1,620

’06

3,607

’07 (FY)(Plants in Japan)

Resource Conservation
Our Approach to Resource Conservation

Water Consumption

Copy Paper Consumption(1,000 sheets)
Office facilities
Manufacturing plants

19,35018,30018,184

17,417

16,038(1,000 m3)
Overseas use
Underground water
Tap waterIndustrial water

16,135

77,16869,45076,80069,814

0
’02

’03

’04

’05

’06

’07 (FY)

527

445

391

290

325

332

’98

’99

’00

111

22

146

436

388

390

430

415

357

391

382

429

’01

’02

’03

’04

’05

’06

’07 (FY)

70
106

474

486

437

506

599

521

77,992

0
’01

115
92

107
64

89

112,150
89,067

88
62

67
119

172

’97

(Plants in Japan)(Plants in Japan and overseas)

T O P I C S
At the Yamanashi plant, materials discarded as defective property
and waste materials are gathered prior to waste processing so that
employees can see the actual materials. The objective is to foster anawareness among personnel about the causes of waste materials
and teach them measures to help reduce them. More than 100
employees attended the initial exhibit, which encouraged employees
to ask the question, “Why?” Seeing the actual materials first-handsubstantially raised awareness and encouraged employees to

Scene fromwaste material exhibit▲

Waste Materials Exhibit

address the causesof the problem.
These types ofactivities will be
continued in the
future with theintention of achieving a balance between environmental preservation
and business operations.

TOKYO ELECTRON Environmental and Social Report 2007

Plant and Office Initiatives for the Environment

At our manufacturing plants, various measures are being taken
to reduce the use of water. For example, the plants haveinstalled a water recirculating system to reuse cooling water.
They have also installed automatic faucets in restrooms andother facilities. These touch-free automatic faucets prevent
wastage of water by automatically shutting off the supply when
the hands are removed from the sensor range.

The entire Group is committed to reducing the use of paper. We
have been encouraging duplex copying, copying at reduced size,and digitization of information and documents circulated among
employees, but in FY 2007, the total use of copy paper by theGroup increased by approximately 10% over the FY 2006

18,61727

Efforts to Reduce the Use of Water

Efforts to Reduce the Use of Paper

EHS REPORT

amount, that is, by approximately 8.3 million sheets. This is partially because of an increase in production quantities and business processing. Also, we have been encouraging the use ofrecycled paper with the exception of some special-purpose
papers, and introduced paper cups made from kenaf, which isan alternative to wood pulp.
We will continue to reduce the use of copy paper in ourbusiness operations by minimizing the number of different
types of records and slips, thereby further reducing the total
paper use.

We are minimizing our use of resources based on the conceptof green procurement, which means to give preference toenvironment-conscious products in purchasing. Specifically, we
are reducing the use and purchase of copy paper and stationery,
and when we purchase them we choose environment-conscious
products. At our offices, we have replaced printer toner cartridges with cartridges made from recycled materials and cooperate with the manufacturers in the recovery of end-of-life cartridges. At some offices, using the intranet, we have establisheda system under which stationery no longer being used by a certain department can be reused by another department.

Plant and Office Initiatives for the Environment

Waste Reduction and Recycling
Our Approach to Waste Reduction andRecycling
EHS REPORT

28

a result of making efforts to attain this target, we achieved arecycling rate of 96.4% in FY 2006 and 97.3% in FY 2007. In
the future, we will focus on reducing our overall generation ofwaste, including recyclable waste.

Plant and Office Initiatives for the Environment

The Tokyo Electron Group is making concerted efforts to reduce
the generation of waste based on the policy of minimizing waste
reduction, recycling generated waste as much as possible, andproperly disposing of unrecyclable waste. In recent years, due
to the lack of waste landfill sites, landfill costs have surged. Thispushes us to reduce the generation of waste to make cost savings.
Specifically, we sort waste for recovery, change our manufacturing processes to generate no waste, use more recycling
companies, check the qualifications of companies that we commission to dispose of waste, and regularly review the final
disposal situation.

Breakdown of Waste
Liquid waste from chemicals used in the product development
and evaluation processes
Breakdown of Waste (%)
accounts for the largest perDrink containers 1
Other 5centage of waste generated
Wood scrap
and packaging
by the Group. At present,materials 3
Plastics 6
most liquid waste is recyPaper 6
cled. Also, some plants have
Metallic/productinstalled equipment to treat
Liquidwaste 8waste 71
liquid waste inside theirpremises. (See the TOPICS below.)

Waste Generation and Recycling Rate
In FY 1999, the Tokyo Electron Group set a target of increasing
the entire Group’s average recycling rate to 95% by FY 2006. As

Zero Emissions
We define plants where less than 2% of waste generated by theplant is incinerated or landfilled as “zero emission plants” andencourage all plants to achieve zero emissions. In FY 2007, all
the manufacturing plants excluding the Tohoku Plant achieved
zero emissions consecutively from the previous fiscal year.
Tohoku Plant was unfortunately not able to achieve zero
emissions because its recycling rate dropped due to debris
generated from repairs to floors. In the future, we will alsoachieve zero emissions at our office facilities.

Recycling Rate and Generation of Waste
Target: Increasing the recycling rate to 95%
by FY 2006

(t)

4,772
3,657
3,189 3,179

49.7

55.2

3,938 77.4
69.7

96.1

96.4

97.3

(%)

93.1
Generation of waste(incinerated and landfilled)
Recycling rate

3,268

59.9

40.9
847
431

469

414

’05

’06

’07 (FY)

0

0

’98

’99

’00

’01

’02

’03

’04

(Plants in Japan)

T O P I C S
New Liquid Waste Treatment Facility
Constructed at the Koshi Plant
As shown in the “Breakdown of Waste” section, liquid waste accounts
for a large percentage of the waste generated by the Tokyo ElectronGroup. In order to reduce the amount of liquid waste to be disposedof, we have been introducing liquid waste treatment facilities at ourplants.
At the Koshi Plant, acid and alkali liquid waste generated from theproduct evaluation process used to first stored in tanks inside theplant and then carried outside the plant by a transportation company
using tankers. After being transported outside, the liquid waste wasthen disposed of by an external company. In November 2006, however,a new liquid waste treatment facility was constructed within the premisesof the Plant and started operation after a trial. Thanks to this facility,

TOKYO ELECTRON Environmental and Social Report 2007

Waste Generated at the Koshi Plant(t)
Other waste
Liquid waste

44

308

50
113

0
Average for Jan. 2007
the first half of
FY 2007

4
57

63

Feb. 2007

Mar. 20078▲ Liquid waste treatment facility

the amount of liquid waste carried outside the plant was reduced
from approximately 300 metric tons per month to 10 metric tons permonth, which resulted in a more than 70% reduction in the total
waste generated from the plant. In addition, the environmental
impact caused by the transportation of liquid waste from the plant to
the outside could be decreased by approximately 70 t-CO2 a year.

Management of Chemical Substances
Our Approach to the Management of Chemical
Substances

Handling of Substances Regulated as Class I DesignatedChemical Substances under the PRTR Act
OtherHydrogen fluoride and its water soluble salts
759
Ethylene glycol

4,558
1,980

0

3,690

1,920
2,470
1,500

4,118
1,439

577

3,553
9,144

4,000

’02

5,799

’03

9,844

4,811
6,353
2,800

’04

’05

EHS REPORTThe Tokyo Electron Group uses chemical substances mainly in developing and manufacturing products. In developing products, wesometimes adopt new chemical substances that were not used
before, or use chemical substances in a way that is different from thetraditional usage. In these cases, we look closely at the development
facilities and methods, assess the environmental and operationalrisks associated with the use of the substances, and implement necessary measures before actually using the substances. As for thechemical substances that we use in our manufacturing processes,
we are replacing dangerous and harmful substances with safer ones.

(kg)’07 (FY)’06* Measures in metric tons for use in FY 2002 and FY 2003

(Plants in Japan)

29

Material Balance of Chemical Substances Regulated under the PRTR Act

According to the provisions of the Act on Confirmation, etc. of
Release Amounts of Specific Chemical Substances in theEnvironment and Promotion of Improvements to the Management
Thereof (PRTR Act), we rigorously control the specific chemical substances regulated under the act and identify the use and emissions ofthese substances on a continuous basis. We use large amounts ofhydrogen fluoride, which is one of the substances regulated under
the PRTR Act, mainly for cleaning test wafers. The hydrogen fluoride
waste is disposed of by an external company specializing in disposal
or we dispose of it in the approved manner within our premises.
Yamanashi Plant uses ethylene glycol as a refrigerant for coolingwater and the amount used increased substantially in FY 2007 due tothe increased production of FPD manufacturing equipment. However,
we recycle almost all the amount we use. We will continue to properly
manage the risk associated with the use of chemical substances.
* PRTR stands for Pollutant Release and Transfer Register. Under the PRTR system,
the use of chemical substances that may be hazardous to human health and theecosystem, their release into the environment, and transfer (contained in waste) tothe outside of the business premises are identified, tabulated, and announced.

Released into the air: 0 kg/year

Release into water: 0 kg/year

TEL

Handled
19,761 kg/year

Products
113 kg/year

Recycled: 9,887 kg/year
Waste: 7,308 kg/year

On-site landfill:
0 kg/year

Removed:2,450 kg/year

Transferred to sewage: 3 kg/year

PCB Storage
Based on the Law Concerning Special Measures against PCB Waste,
we report on the storage and disposal of waste containing polychlorinated biphenyl (PCB) to the governor of the prefecture every year.
The Tokyo Electron Group presently stores two waste transformers
and four waste capacitors that contain PCB in a strict and securemanner.

T O P I C S▲

Evacuation Drills for Employees
Working in Clean Rooms

Evacuating the clean room

The Tokyo Electron Group uses special gasses and liquid chemicals
to test its products during their development and evaluation
processes by simulating the actual semiconductor manufacturing
process. We evaluate our products using special chemical substances in a clean room, which is a special working environment,
and employees working there need to evacuate promptly from theroom in the event of a large earthquake or a fire.
At the Yamanashi Plant (Hosaka), drills to evacuate the clean
room are conducted in preparation for contingencies. In a drill
conducted in November 2006 in preparation for an earthquake,

employees wearing
clean suits evacuatedfrom the clean room
to the outdoors after
the alarm was given.
The number of employees who evacuated was checked by the department and notified to
Headquarters. Through these practical evacuation drills, we share theexperience of risks and identify problems to be prepared for an emergency
at all times.

TOKYO ELECTRON Environmental and Social Report 2007

Plant and Office Initiatives for the Environment

Compliance with the PRTR* Act