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Introducing the New Miyagi Plant

Our New Plant: A Cutting Edge “Eco Plant”

Tokyo Electron’s New Miyagi Plant
About Tokyo Electron’s New Miyagi Plant
In the summer of 2010, the Tokyo Electron Group began

atop the development building. In addition, the system’s power

construction of Tokyo Electron Miyagi Limited’s main plant ingenerating status is displayed on a monitor in the entrance hall,

Taiwa Town, Miyagi Prefecture. In June 2011, the administration

while employees can also confirm this information in real timeand development buildings began operations, and we plan toover the intranet.

launch operations at the production building in October 2011.
The new plant will consolidate the development and productionof etching equipment for semiconductors, a market which isexpected to see robust growth going forward. This integrated
structure will help shorten the development phase of highvalue-added products, while corresponding changes in ourproduction methods will improve productivity and reduce
production lead times.
The etching process is an extremely critical step in the
manufacturing of semiconductors, and as such, represents oneof our core businesses. In addition, the new plant will also

PFC Gas Abatement System with PSA Unit

manufacture our etching system Tactras RLSA Etch that uses

Our Gas Abatement System uses a pressure swing adsorption

new plasma technologies. The site of the new plant is(PSA) device to separate and recover nitrogen gas from theapproximately 300,000m2 and consists of three buildings, eachgases used in the cleaning and etching processes, as well as afocused on either production, development or administration,system that breaks down PFCs1 with an abatement device. Thiswith a total floor area of approximately 70,000m2.

marks the first time the TEL Group has installed such a system.

TMTM

1,000 kW PV Power Generation System

Consequently, we will be able to mitigate our impact on theenvironment through broadly reducing our emissions ofA large 1,000 kW PV power generation system has been installed

PFCs—a greenhouse gas, curbing the amount of nitrogen gas

on the roof of the production and development buildings, while

we use by recycling recovered nitrogen gas, and cutting ourenergy saving facilities have also been used extensively

energy consumption by minimizing the required number of PFC

throughout, making it an extremely eco-friendly plant. Thissystem, which uses a thin-film PV cell panel that was made using
TEL Group-related production equipment, features a 750 kW unit
installed on the roof of the production building and a 250 kW unit
10Thin-film PV cell panel installed at the new plant

abatement devices.
1 PFC (perfluorocarbon): A fluorocarbon compound containing absolutely no hydrogen or
chlorine that is one of the six gases subject to reductions stipulated in the Kyoto Protocol.
Although PFCs do not damage the ozone layer, they have a greenhouse effect several
thousand times that of CO2.

not only energy use from lighting, but also reduce the load on theReused in assessment device

Gas emitted fromeach device

Separated PFC gas

Reused in assessment device
Reused in assessment device
Reused in assessment device

Separated nitrogen gas

facilities’ air conditioning systembecause LED lighting lowers theamount of heat emitted from lighting
fixtures. LED lighting also has aLED lighting

longer service life thanHIGHLIGHT

PFCs and nitrogen gas
separated using the PSA device

conventional fluorescent
Evaluation equipment

fixtures, which we expect

RecoverytankMANAGEMENT REPORT

will help us reduce costs
associated with replacement

Overview of the PFC Gas Abatement System with PSA Unitlights. Furthermore, anatural light collection

Promoting the Concept of Mieruka(Visualization)system will be used toreduce the use of lighting inEnergy used in offices, production processes and assessment

offices, while the air

facilities can be checked by employees over the intranet using

conditioning system’s use of

the Eco Factory Monitor. Empowering employees to visiblynatural ventilation will help

monitor their use of energy will help us promote energy

conserve energy.

conservation activities where all employees participate.

Natural light collection system

Basic Environmental Agreement
Concluded
On May 26, 2011, Tokyo Electron Miyagi Limited concluded a

EHS REPORT

Abatement device
for PFC disposal

basic environmental agreement with Miyagi Prefecture and Taiwa
government building and attended by Miyagi Prefecture Governor
Yoshihiro Murai, Taiwa Town Mayor Hajimu Asano, and Tokyo
Electron Miyagi Limited President Hirofumi Kitayama, who eachsigned the agreement. This agreement focuses on thedevelopment and operation of an environmental management
system as well as public information disclosures. Tokyo Electron

Eco Factory Monitor

Efficient Natural Light Collection and Useof LED Lighting
The new plant employs LED lighting in the clean rooms of boththe production and development buildings. This will help us curb

SOCIAL REPORTTown. The signing ceremony was held at the Miyagi prefectural

Miyagi Limited constantly implements the PDCA cycle 2 for its
own environmental plan in order to independently undertakeproactive environmental measures.
2 PDCA cycle: Seeking continual improvements through repeating the four steps of Plan, Do,Check and Act.

Aspiring to Be the World’s
Foremost Manufacturer
I believe the mission of the new plant, through its integrated structure encompassing the development
and manufacturing of etching equipment, will be to continue to provide greater value added products in atimely fashion. By extensively eliminating wasted time, communications and costs, we will be able toshorten the development period for new products, as well as improve quality and productivity beginningin the development stage. In addition, as a means to fulfilling one of our environmental

Hirofumi Kitayama
Representative Director,
Executive Vice President,
General Manager,
Manufacturing Division (Quality)
Tokyo Electron Limited
President and Representative Director
Tokyo Electron Miyagi Limited

commitments—aiming to reduce by 50% the impact of our business and transportation activities on theenvironment by 2015, compared to 2007 levels—the new plant employs a PV power generation system
and LED lighting to help mitigate our environmental impact. And in terms of materials and logistics, wehope to receive the understanding of our suppliers throughout Japan toward the creation of a new system
where parts are consolidated at strategic points in each region, then shipped jointly whenever possible.
By achieving these challenges one at a time, we will aspire to be recognized by our customers as theworld’s foremost manufacturer of semiconductor production equipment.
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