E nvir o n m e n t a l I n i t i a t ive s o f O u r S u p p li e r s

E H S R e p o rt

Environmental Initiatives of Our Suppliers
The Tokyo Electron Group collaborates with its suppliers to reduce the environmental impact ofits products.
The following describes initiatives taken by two of our suppliers to reduce their environmental impact.

Environmental Initiatives of Our Suppliers—Fujikin Incorporated
Fujikin Incorporated

more compact design. Compared with theFujikin Incorporated and its affiliates are leading manufacturers

existing 1.5” IGS, this new model achieves aof valves and flow control systems. Since its foundation in 1930,

reduction of about 30% in installation space

Fujikin has offered products that are used in a wide range ofand weight. When combined with Fujikin’s

applications, such as aerospace equipment, ocean development,

FCS-P (Flow Control System-P) it enables anchemical processes and nuclear power plants. Fujikin was grantedeven smaller equipment footprint.

Fujikin’s FCS-P

the Manufacturers’ Award for four straight years in recognition of its
technological excellence. The Tokyo Electron Group sources valves,(2) Going Green in Business Activities

connectors and flow control systems from Fujikin.

Fujikin is working to reduce its electricity use and waste generation.

Highlights

Fujikin provides outstanding service

It has installed energy-efficient FFU (fine filter unit) motors in its

through its technical support units locatedclean rooms, with the new motors requiring 20% less electricity

at our manufacturing sites as well asthan those previously used. Fujikin also achieves higher energy

customer service centers worldwide.

and process efficiencies by streamlining the layout of work spaces.
In addition, redundant packaging has been eliminated to reduce

Precision valves forsemiconductor manufacturing*

resource consumption.

MANAGEMENT Report* In semiconductor/FPD production equipment,
valves are used to control trace gases precisely
and their contamination with even minuteparticles can lead to extensive problems. Fujikin
inspects every valve to detect any leakage orparticle contamination in order to maintain thehigh quality of its products.

(3) Sturgeon Farming
Fujikin started raising sturgeon in 1989 as part of its efforts to launcha biotechnology business. In 1992, Fujikin became the first private
Super clean room

Environmental Management System

sector company to artificially cultivate this endangered fish. Sturgeon
farming has become a successful commercial business, and Fujikin
now sells caviar on the market. Fujikin’s sturgeon farming facility

Fujikin operates with an environmental philosophy of, “preserve ouruses 800 tons of water daily,

beautiful planet, be kind to people, cherish our products, be strict

which is continuously recycled

about our work, be passionate about ourselves, and enjoy our lives.”

using a water circulation system.

It also promotes group-wide environmental activities through its
Environmental Security, and Safety Committees, at its headquarters,

EHS Report

offices and plants. Fujikin’s Tsukuba Research Plant has been ISO
14001 certified since September 2002. Fujikin also implements
programs to encourage its employees to pass the Certification
Test for Environmental Specialists (Eco Test), become certified
as high pressure gas managers, and obtain other environmental
qualifications.

Fujikin technology can be foundwherever something is flowing

Environmental ActivitiesYoshihiro Tsuchiya

Fujikin is engaged in a variety of environmental activities, including:

SOCIAL Report(1) Development of the 1.125” IGS (Integrated Gas System)
The IGS has become the most commonly used system for gas flow

Chairman of the Environmental Security,
and Safety Practice Committee
Tsukuba Research Plant
Fujikin Incorporated

units for semiconductor/FPD production

The manufacturing process is the most energy-intensive stage in theequipment. While standard IGS-based

life of our products. We therefore give high priority to improving thegas flow units are lighter and smaller

efficiency of our clean rooms. To meet customer expectations, we strive

than previous models using gas panels,
Comparison between 1.5” IGS
and 1.125” IGS

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Sturgeon at Fujijkin’s
aquaculture facility

Fujikin’s newly developed 1.125” IGS
has attained an even lighter weight andTOKYO ELECTRON Environmental and Social Report 2008

to offer products manufactured in an environmentally friendly manner, ataffordable prices and with a short delivery period.

Environmental Initiatives of Our Suppliers—Newtech Corporation
Environmental Activities

Newtech Corporation (Newtech) has maintained a working

Newtech takes various steps for the preservation of the environment.

relationship with the Tokyo Electron Group since their foundation

For instance, the company began using different washing equipmentin 1976. TEL sources assembly (Assy*) components (harnesses,to address concerns over the use of CFCs, which have an adverse

boards, units, etc.) for our etch systems, single wafer deposition

effect on the ozone layer. Newtech also strives to reduce use ofsystems, test systems, and FPD plasma etch/ash systems

resources. For example, recycling cable caps and packaging plastic

manufactured in our Yamanashi Plant from Newtech, which is based

bags in cooperation with companies in charge of the next processin Kai City, Yamanashi Prefecture. The company procures parts,of the supply chain. This improvement was based on an idea

manufactures and inspects

from an employee offered through an internal program set up tosuch Assy components forsolicit employees’ insights and ideas for improvement. Electricity

our Group.

consumption is checked hourly and the temperature setting of air
conditioners is adjusted accordingly. Other major activities include*A ssy: Abbreviation of assembly. Assycomponents refer to both individualparts and multi-component parts.

neighborhood cleanups and fundraising campaigns for disaster relief.

Manufacturing process at Newtech

Quality Improvement Activities
Newtech’s quality control goal is toprevent any nonconforming products fromTo ensure its products are RoHS compliant, Newtech began

being made available externally. In fiscal

reviewing about 3,500 components (which are grouped by Assyyear 2008, the company achieved thistype for this purpose) in the second half of 2006 using a check list

goal with regard to etch systems supplied

prepared by the Japan Green Procurement Survey Standardization

to our Group, attributed by higher usage of jigs* in assembly andInitiative (JGPSSI). If supplier data was not available, Newtech usedinspection processes, as well as rigorous inspection and assessment ofTokyo Electron Group’s analytical equipment to confirm the status.

components by following a quality control process chart. The company

In order to achieve lead-free products, Newtech sought support

also encourages its staff to take national-level technical skill tests. As afor the assessment of 1000-cycle reliability tests from external

result, most factory workers at Newtech hold public qualifications, suchparties, such as an industrial technology center operated by the local

as electronic circuit connection engineer certification and vocational

prefectural government. The company also confirmed patent status

training provider status.

Inspecting cables

Newtech also works to ensure all employees have regular physical

Additionally, Newtech installed additional facilities and appointed full-exams, as they believe that their employees’ well-being is an importanttime staff responsible for RoHS compliance.

element of quality production. The high quality of Newtech products

As a result, the RoHS-related

Temperature cycling test
(N-base R3-7)

June 2008. Applicable products

underpinned by these efforts was recognized with an award from theTokyo Electron Group.

EHS Reportwith regard to this technology to manufacture lead-free components.

MANAGEMENT ReportCompliance with the RoHS Directive

survey was nearly complete as ofHighlights

Newtech Corporation

E nvir o n m e n t a l I n i t i a t ive s o f O u r S u p p li e r s

Recyclable cable caps

*A jig is a device used to instruct and guide the locations of tools during
manufacturing operations

are labeled with yellow stickers
and stored in a separate location.

Yoshihiro Hiraga
President & CEONewtech Corporation

Temperature cycling test

The Tokyo Electron Group has been a client for more than 30 years. We
will continue our efforts to meet the Group’s environmental, quality, cost,delivery time and other requirements. While we have traditionally supplied
TEL’s Yamanashi Plant, we are currently gearing up to provide ourproducts for the company’s new Miyagi Plant as well.

TOKYO ELECTRON Environmental and Social Report 2008

SOCIAL ReportGreat agility and flexibility
is our strength

Dedicated storage cabinet for
RoHS-compliant components

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