En vir o n m e n t a l R e p ort

Product-related Initiatives for the Environment
TEL’s efforts to reduce the environmental burden of our products use a variety of approaches, including life cycle
assessment (LCA) and lowering the power requirements of clean rooms.

Reducing the Environmental Burden of Products

Efforts in LCA

TEL has examined the life cycle environmental burden
imposed by the products we manufacture and sell. The
life cycle includes the manufacture of our products, theiroperation and disposal. We determined that operation is
the stage at which our equipment has the most severe
environmental burden. Therefore, we are giving highest
priority to reducing the burden at that stage and are pursuing several avenues for accomplishing that. In addition to
the effort to eliminate toxic substances from the raw
materials we use, we are approaching the goal of environment-friendliness from every possible angle, including
reduction of energy consumption throughout our customers’ clean rooms.

As part of our activities to reduce environmental burden,
TEL employs LCA to make an objective assessment ofthat burden imposed by our equipment. The LCA data wehave amassed for our products and ways in which wehave applied the data in design have elevated TEL to therole of a leader in LCA in our industry.

Organizations for Reducing
Environmental Burden
TEL has established an Eco Design Working Group (WG)
under the Product EHS Technical Committee to pursue
the reduction of environmental burden as measured bylower energy consumption and lower resource usage.
Each of our Business Units (BU) and divisions has compiled LCA data on the new products. The pictures they
have developed of those products are quite instructive
and will help to direct programs to improve those products
and the course of development of our next generation ofproducts. We have also instituted a task team to direct ourreduction of lead content. They have been charged withthe goal of a completely lead-free product line in 2006. We
have also notified our suppliers of specific targets forgreen procurement, in order to decrease the environmental burden of our raw materials.
Requests from customers for better performance inthe environmental, health and safety fields have grown inrecent years. It is more and more important to incorporate
the concepts of EHS in the initial stages of development
and design of each product. This is called “Design forEHS.” The globalization of our business activities is also
driving us to adapt our products to the requirements of different countries’ laws and regulations. We will continue
our proactive Design for EHS initiative in order to meetthis challenge.

Example of LCA
An LCA of one of our main products, the Telius™ plasmaetch system, showed that 98% of the total CO2 released
during the life of the equipment was generated during
equipment operation. The operation stage also accounts
for about 50% of its total gas emissions and 30% of totalenergy usage. Subsequently, it was found that replacing
the conventional etching gas with one of a lower global
warming coefficient, would reduce CO2 emissions by 70%
from the original volume. Nevertheless, the substituteetching gas is both toxic and flammable. Besides the dangers it poses during use, it must be detoxified, which
increases costs, and special precautions must be taken in
handling it.
* Plasma Etch System: This uses a plasma toetch (remove) a thin film from the surfaceof the wafer, following the pattern of thedesired circuit.

TeliusDistribution of CO2 Emissions as Found by LCA(%)

98.05%

1.19%
0.68%
Material
Assemblymanufacture* Operating life assumed to be 10 years
00.05%
Equipment
transport

0.03%
Disposal

Equipment
operation*

Details of Environmental Burden during Operation(CO2 Equivalent)(%)

Organization for Promoting Product EHS

50.3%

Product EHS Technical Committee
29.5%
Product Safety WG

Eco Design WG
Lead-free Task Team

18TOKYO ELECTRON Environmental and Social Report 2005

10.9%
0Exhaust Electricity Coolinggas

5.2%

1.8%

1.2%

N2 Consumables Dry
gasair0.8%
0.3%
HotProcess
exhaust gases

Approach to Reducing Energy Consumption
during Operation- Initiatives in the Clean Room Reducing the energy consumed during operation of ourequipment is one of the most important issues facing TEL. It
is also important for our customers and for the entire industry, with the Kyoto Protocol in force as of February 2005.
TEL sees five strategies for reducing energy consumption during equipment operation: (1) Reducing the energy
consumption of the equipment itself, (2) reducing theenergy consumption of peripheral devices, (3) using equipment in ways that conserve energy, (4) reducing the energy
consumption of the clean room, and (5) overall clean room
management (planned, appropriate operation). These strategies will be reflected in future technological development.
In addition, cooperating with customers and equipment
makers is absolutely essential in order to realize clean
rooms that operate with better energy efficiency, andtherefore TEL looks forward to cultivating close three-way
ties to roll back energy consumption during equipment use.
Approach to Reducing Energy Consumption during Operation
5. Overall clean room management (planned, appropriate operation)
4. Reducing the energy consumptionof the clean room

Speeding up the wafer transfer
The mechanism, which used to move in the horizontal andvertical directions independently, was re-designed, resulting in a 15% reduction in wafer transport time.

Faster re-pressurizing to ambient pressure
Formerly, the de-pressurized interior of the reactor wasreturned to ordinary atmospheric pressure by injection ofnitrogen over a relatively long time, in order to minimize
travel of particles (specks of dust and wastes). Recently,
however, we have installed soft back-fill injectors (nozzles
with multiple holes), which allow rapid pressurization withnitrogen without picking up particles. This has shortened
work time by 65%.
ReactorCooling 2. Reducing the energy consumption
equipmentof peripheral devices

Vacuumpump

Soft back-fill injectors

1. Reducing the energy consumptionof the equipment itself

N2 pressurization

3. Using equipment in ways that conserve energy
ExhaustExample of Energy-conserving Operation ofSemiconductor Production Equipment
Energy consumption by the semiconductor productionequipment manufactured and sold by TEL can be lessened by shortening the cycle times*1. Let us take theALPHA(␣)-8SE thermal processing system*2 for example.
We set a goal of a 20% reduction incycle time between 1997 and 2002.
The time required in 1997 was 279
minutes (for a standard 150 nm process of dichlorosilane-SiN); after many
improvements, this was lowered to165 minutes in 2002, a considerable
reduction. The actual improvements
are listed below.

Reducing the electricity consumed byreducing cycle times
In addition to the techniques mentioned above, we haveupgraded control of the heaters. The energy consumed fora single cycle has been reduced 41% from the 1997 level.
These technologies are being used in current 300mm
wafer processing systems.
Progress in Reducing Energy Consumed
during a Single Wafer Cycle
(kWh)

66.2
11%
4.1%
24.9%

Depressurization,
heating

Film formation
process

Re-pressurization,
power-down of heater

Wafer output

26.8%
48.4
8.8%
21.5%

*1 Cycle time: The time required to treat a wafer*2 Thermal processing system: A system which producesoxidized layers, nitrided layers, etc. on a wafer

Wafer transfer,insertion

15.6%
ALPHA(␣)–8SE

0

10.5%
97(␣-8S)

9.6%
6.7%
00(␣-8SE)

1.8%

41.5%
38.7
8.8%

1.8%
15.4%
6.0%
6.7%
02 – present(␣-8SE)

TOKYO ELECTRON Environmental and Social Report 2005

19En vir o n m e n t a l R e p ort

Product-related Initiatives for the Environment

Lead-free Initiativein FY 2005. They are still pursuing these activities with thegoal of initiating lead-free production in January 2006; currently, we have training courses in lead-free solder at TELand suppliers’ facilities.

The nations of the European Union (EU) are committed by
the WEEE*1 and RoHS*2 Directives to eliminate lead, mercury, cadmium and other toxic metals and materials fromconsumer electric products by June 2006. Semiconductor
production equipment is not included under the scope ofeither directive, but TEL has instituted a program to eliminate lead on its own initiative. It has formed a task teamof representatives from Group companies, BUs and Divisions to promote the introduction of lead-free solder. Theteam investigated issues at suppliers, technologicalaspects of lead-free solder, and manufacturing processes*1 WEEE:Waste Electrical and Electronic Equipment*2 RoHS:Restriction of the use of certain Hazardous Substances in electrical and electronic equipment

Lead-free Implementation PlanFY 2004

Targets
AprJulOct

FY 2005
JanAprJul

Oct

FY 2006
JanAprJul

Oct

FY 2007
JanAprJul

Formation of Lead-free Task Team, start of its activities
Policy announcements (to suppliers)
Consideration of technology and materials to be adopted
Supplier survey, cooperation and action plan
Study of measures with OEM makers
Assessment of board and module units
Assessment of combined boards and modules
Production preparation
Production

To be implemented after 2006

TOPICS
Approach to reducing environmental burdenin new products
TEL is reducing the environmental burden in each type of equipment it produces, as appropriate for the environmental characteristics of the equipment. The auto wet station, one of our main
products, uses a large volume of pure water during the processes to remove dust and contamination adhering to the wafer surface. Reducing this consumption was one of the goals during thedevelopment of the new auto wet station EXPEDIUS. A newwater-saving specification has
been set for the supply flow
during stand-by, which reduces water consumption by 15%
compared to the previous model.
Next, a valve was added to thepure water supply line to provide intermittent supply, andEXPEDIUS
this allowed a 70% reduction

20

TOKYO ELECTRON Environmental and Social Report 2005

compared to earlier models. Other new features we are working
on at present are control of exhaust air during standby (to reduce
the load on the air conditioner of the clean room), shortening of
the cleaning time with pure water, and cleaning with a lowerpower unit.
Reducing pure water usage during stand-by(%)
Approx.15% savings

Approx.70% savings

0

Earlier model

Water-conserving
specification

Intermittent supply

Green Procurement
Examining the burden of the components and raw materials making up the product is an integral part of the effort
to reduce the environmental burden of our products. TEL
obtains the materials and components for our main products, our semiconductor and FPD production equipment,from outside vendors. In order to reduce our products’environmental burden, therefore, we follow our own Green

Procurement Guideline* and purchase raw materials andcomponents preferentially from suppliers who are aggressive in reducing their products’ environmental burden. In
the future, we intend to procure materials only from suppliers who meet certain environmental standards.
* Green Procurement Guideline: A TEL document setting standards and targets forchemicals, energy conservation, packaging, resource conservation, recycling andinformation disclosure.

Green Procurement Action PlanThemeFY 2004

FY 2005

FY 2006

FY 2007

FY 2008

Survey/Improvement guidance

Survey/Improvement guidance

Survey/Improvement guidance

Survey/Improvement guidance

Survey/Improvement guidanceGreen procurement for equipment and parts
Supplier surveys and guidance
in improving environmental management
Reviewing supplier relationships

Reviewing supplier relationships

Compose lists of materials prohibitedfrom use in productsCollect data and request cooperation on materials
prohibited from use in products

List composition
Data collection/Establish master parts registration

Substitute for parts containing prohibited materials

Promote designs that do not use materials prohibited from use in products

Clarifying Materials Prohibitedor to be Reduced in Products
TEL has formulated Group-wide guidelines banning or
reducing amounts of 16 toxic chemicals in our products. In
the guidelines published by JGPSSI*1, 15 of the banned
chemicals are designated as “Rank A”*2. Six are also listed for regulation under the RoHS Directive. In FY 2005
we stepped up green procurement. Part of this effort wasa survey based on JGPSSI’s survey form which we sent
to our suppliers, addressing toxic substances in their raw
materials and components. Our policy states that we shallsurvey new materials and components as they are adopted. We will register the survey results in a central component database shared throughout the Group and constructa system which will allow component searches and show
how much of each substance of concern is contained in acomponent when it is ordered.
*1 JGPSSI (Japan Green Procurement Survey Standardization Initiative): An association
which oversees green procurement initiatives.
*2 Rank A: A group of substances which have been designated as banned, permitted inlimited amounts, or whose content must be reported, when used in products, byJapanese or other national or international law.

TOP I C SIntroducing shared logistics
Tokyo Electron Kyushu Ltd.’s coater/developer businesshas instituted a program to increase efficiency by sharing
logistics and has decreased its environmental burden as aresult. Its loading efficiency used to be rather low, because
it was using different commercial transporters for each supplier, sometimes forcing transporters to wait when there
were overlapping ship-out schedules.
Since 1999, the company has been using a new modeof logistics in which two transport companies are combined
into a team. One of the companies is designated as the representative, and all transportation duties have been contracted out. The transporters use wide trucks exclusively forshipping TEL products, which eases loading and unloading.
Currently, about 30 of our suppliers participate in this logistics system. This has enabled us to establish a just-in-timesystem, which provides supplies that we need, when weneed them, and in exactly the volume that we need.
Outline of shared logistics
Supplier A

Supplier C

Supplier E

Supplier A

Supplier C

Supplier E

Shared logistics
Supplier B

Substances Banned from Use in Products
Substances banned in products at TEL(16 substances: JGPSSI
Rank A substances + PFOS*)JGPSSI Guidelines
Rank A
Substances (15)Supplier D

Supplier B

Supplier D

RoHS (6)* PFOS: Perfluorooctane sulfonate. This is an intermediate product used as a raw
material to synthesize other substances.

Transporter A Transporter B Transporter C

Team of 2 transport companies

TELTELTOKYO ELECTRON Environmental and Social Report 2005

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