EHS Report

Product-related Initiatives for
the Environment
Reducing the Impact of Our Productson the Environment

TEL is working hard to reduce the impact of its
products on the environment by making themmore energy efficient and curbing the use ofhazardous substances.
In addition, TEL is also striving to reduce theenvironmental impact of logistics by promoting
modal shifts and creating innovative packaging
methods.

Our Approach

Energy-saving Measures for Products

The TEL Group believes it is important to promote

Our technology development efforts to reduce product energy

environmentally conscious product designs within its businessconsumption focus on the following five areas:

activities, as is clearly stated in the environmental commitment.

(1) Reducing the energy used by the product itself

We give top priority to supplying energy-saving equipment and(2) Reducing the energy along with supplementary devices

to reducing or finding alternatives to the regulated chemical(3) Managing the product in an energy-saving manner

substances contained in our products.

(4) Reducing the energy used in the clean room 1

TEL Organizations for Reducing
Environmental Impact(5) Managing the clean room in an energy-saving manner(planned operation and proper management).
Energy-saving management of the clean room involves ourTwo working groups, the Chemical Substances Steering Team

cooperation with customers and facility manufacturers. We will

and the Product Working Team, have been established towork to further reduce the energy consumption of our products inpromote the TEL Group’s efforts to reduce the environmental

close cooperation with these partners. In addition, as one measure

impact of its products. The Chemical Substances Steering Teamto reduce device energy consumption, we are working to moreworks to reduce or substitute the use of regulated chemical

accurately measure the amounts of energy consumed by devices

substances in our equipment parts and components. The

that use electricity, water, dry air, cooling water, and exhaust heat,

Product Working Team has developed and started to implement

as well as supplementary devices (e.g. vacuum pumps and coolingroadmaps to reduce the environmental impact of each of ourequipment), by following the SEMI S23 2 guidelines.

products. In preparing these roadmaps, TEL business units were

1 Clean room: A room in which dust floating in the air is controlled at or below a definedcleanliness level and in which the temperature/humidity is maintained at a specific level.
Dust can easily cause defects in precision machinery or cause errors in operation, and soclean environments are vital to ensuring that the machinery operates correctly.
2 SEMI S23: Guidelines for energy conservation for semiconductor production equipment
issued by Semiconductor Equipment and Materials International (SEMI), an international
industry organization for semiconductor/FPD production equipment and material
manufacturers.

required to address the following mandatory items: reducing
equipment energy requirements, addressing chemical
substance-related matters, reducing the number of parts andprocessing steps required, reducing the use of processing gases
and liquid chemicals, and improving the environmental
performance of existing equipment. The progress of these
initiatives is monitored as part of the Group-wide mid- toTechnology Symposium

long-term plan.

Following on from fiscal 2010, in February 2011, the TEL Group
held its 13th Technology Symposium. Presentations were madeQ Environmental Roadmap
1. Reducing our products’ energy requirements

on environmental technologies and a poster area was also set
up, enabling TEL divisions and departments to engage in a lively
exchange of ideas and information.

2. Addressing matters related to chemical substances
3. Reducing the number of parts and processing
steps required
4. Reducing the use of processing gases and liquid
chemicals
5. Improving the environmental performance of existing
equipment

The 13th TEL Group Technology
Symposium

16

Product-related Initiatives for the Environment

streamlines maintenance. In

The Thermal Processing System Business Unit (TPS BU) has

chamber simultaneously, whichdeveloped a process for forming silicon dioxide films for double

increases throughput 5 two-foldpatterning 3 at room temperature. In conventional processes, aover the previous CertasTM

temperature of several hundred degrees is required in order tomodel and reduces CO 2

break down gases and promote a vapor phase reaction, but thisemissions per unit of wafer

newly developed process takes place at room temperaturearea by approximately 50%.

through techniques such as selecting the source gas and5 Throughput: Processing capacity per unitof time.

generating radicals 4 of oxidized species using plasma. This
process has yielded the following results.

HIGHLIGHT

addition, Certas WING canprocess two wafers in the

Certas WING

Q CO2 Emissions per Unit of Wafer Area

1. Reduced Number of Process Steps:
This process makes it possible to form film atop a highly

(%)
100

50%
Reduction

heat-susceptible resist and achieve miniaturization using

MANAGEMENT REPORT

Developed Silicon Dioxide Film Formation
Process at Room Temperature – TELINDY
PLUSTMother utilities.

0

Certas

2. Reduced Environmental Impact from Film Formation:

Certas WING

Because heat is not required when forming the film, thisReducing Etching Equipment Energy
Consumption
Packaged Solution — UNITYTM IIe

process reduces theenvironmental impact fromenergy usage, heat emissions
and cooling water by 48% in

The Field Solutions Business Unit (FS BU) is working to reduce

CO 2 equivalent.

to customers.

Because no heater is required

We have worked together with the component manufacturer

to apply heat to the wafer, thisto develop and propose a solution that combines a software

process is able to reduce theprogram and a low energy consumption dry pump. The software

number of parts by 30% andprogram shuts down the dry pump used in the etching system 6

surface area by 39%.

when not in use, or facilitates intermittent operations when in use.

3 Double Patterning: One type of miniaturization
TELINDY PLUS
process.
4 Generating radicals: Describes one type ofatom configuration where a single electron orbits around the atomic nucleus in the outershell, where normally electrons orbit in a pair.

energy consumption fromtheir existing equipment by
up to 67%, while thethe device is in use, including(CO2 Emissions per Wafer Area Unit)

48%
Reduction

Conventional Process

By employing this packaged solution, our customers can reduce

environmental impact when

Q Environmental Impact from Film Formation

0

SOCIAL REPORT

the environmental impact of existing devices already delivered

3. Reduced Size of Equipment:

(%)
100

EHS REPORT

double patterning, which curbs the use of energy and

New Process

Certas WINGTM – Reducing
Environmental Impacts through Dry
Cleaning and High Throughput

power, can also be cut by
88% in CO 2 equivalent.
6 Etching System: Refers to the etchingmachine and peripheral equipment,such as the chiller for the coolant in the
etching device and the pump needed tomaintain a vacuum within the chamber.

Q Power Usage Comparison Before and After Use of
the Energy-Saving Package
(%)
100

67%
Reduction

Certas WING is a gas chemical etching device that is able to etchand clean the surface of wafers without the use of a liquidcleaning agent. The completely dry process unit, compared toliquid cleaning units, does not require chemical solutions,eliminates costly waste liquid processing equipment andUNITY IIe0

Before Use ofEnergy-Saving Package

After Use ofEnergy-Saving Package

17

EHS Report

Measures against Regulated Chemical Substances
T o k y oE l e c t r o n

G r o u p

P o l i c y

1. We will quickly supply products that are in compliance with the laws and regulations of countries inwhich our customers operate.
2. We will set our own standards and continue to make efforts to reduce the use of regulated chemical
substances in our equipment.

Taking Initiative to Reduce the Use ofRegulated Chemical Substances inEquipment

information be provided in case of exposure regarding a productcontaining more than 0.1% in chemical substances of significant

The EU’s RoHS,1 which took effect in July 2006, is widely known as avery high concern (SVHC), as well as CLP 4 standards, which has a

set of standards regulating the use of hazardous chemicals. The TEL

broader scope than GHS. In compliance with these standards, weGroup is committed to meeting RoHS standards regarding the use ofinvestigate the presence of those chemical substances designatedlead, mercury, cadmium, hexavalent chromium, poly-brominatedbi-phenals (PBB) and poly-brominated diphenylethers (PBDE), as well
as voluntarily reducing these six substances in equipment not subject tothese standards. In addition, we work with our suppliers to promote theuse of alternative products that meet stringent reduction standards forregulated chemical substances, while we also use a dedicated databaseto manage the chemical substances contained in components and theparts used in our products. From the second half of fiscal 2009, we

as SVHC and provide the safety information when necessary.
3 REACH (Registration, Evaluation, Authorization and Restriction of Chemicals): A set of
regulations pertaining to the registration, evaluation, authorization and restriction ofchemicals. For products containing SVHC (Substances of Very High Concern) in
particular, manufacturers are required to provide information on the SVHC content of
their products as well as information to ensure the safe use of the products.
4 CLP (EC No 1972/2008 Regulation on Classification, Labeling and Packaging of
Substances and Mixtures): EU regulations concerning the classification, labeling, andpackaging of chemicals and mixtures.

4. As for the Battery Directive5 enacted by the EU and Taiwan, we

began shipping equipment containing fewer regulated chemical

confirm whether applicable batteries are used inside each unit andsubstances, which we define as products containing 98.5% or moretake the necessary measures to be in compliance with theseparts that meet the EU RoHS standards.

regulations. We are also examining how to build a framework that

1 RoHS: Restriction of the use of certain Hazardous Substances in Electrical and Electronic
Equipment.

Complying with the Chemical Substance
Laws and Regulations in Countries andRegions Where Our Customers Operate
1. We provide equipment in full compliance with China’s version of
RoHS enacted in March 2007, which covers our products as well.
China’s RoHS, like the EU’s RoHS, regulates the use of lead,
mercury, cadmium, hexavalent chromium, PBB and PBDE andrequires that necessary information be provided to customers.
2. Countries around the world have begun to implement GHS2

will enable us to fully comply with these regulations from the verybottom of the supply chain.
5 Battery Directive: A set of regulations on the registration, evaluation, approval andrestrictions of chemical substances in batteries that requires information be provided on
the nature of chemical substances used and safe handling instructions whenever a SVHC
is included in a product.

Future Plans
1. We will modify and enhance our existing internal chemical
substance management system.
2. We will further increase the shipment ratio of equipment
containing reduced amounts of regulated chemical substances.
3. We will effectively utilize the framework of the Joint Article

based on the recommendation of the United Nations. The TELManagement Promotion-consortium (JAMP) and broadenGroup provides its customers with safety information on

our collaboration with customers and suppliers to promote

chemical substances covered by the GHS using material safety

more rational and accurate measures against regulated

data sheets (MSDS) and other means, and affixes labels tocontainers of chemical substances to display the necessary

chemical substances.
4. We will work to establish and strengthen systems insafety information. The example below shows a label incompliance with applicable laws and regulations not only at ourcompliance with China’s GHS standards.

plants in Japan but overseas as well, and we will also begin to

2 GHS (Globally Harmonized
System of Classification andLabeling of Chemicals):
A system agreed upon by theUnited Nations that is intended
to harmonize and integratevarious countries’ classification
standards for chemical
harmfulness and toxicity,labeling and MSDS details.

SignalWord
Prevention
Measures

Chemical
Identification
Symbol and
Pictogram
HazardStatement

Accident
Response
SafetyStorage

Reference
MSDS

Disposal
Emergency Phone
NumberLabel in Compliance with China’s GHS Standards

18

3. Europe has instituted REACH standards,3 which require safety

supply equipment containing fewer regulated chemical
substances from our overseas plants. In addition, we will
strengthen initiatives through stepping up collaboration with
the TEL Group’s locally incorporated subsidiaries overseas andby enhancing internal systems.

Product-related Initiatives for the Environment

we were able to reduce CO2 emissions in our logistic operations inJapan by approximately 130 tons in fiscal 2011.

relevant divisions and departments have created and are

We used seaborne shipping in 32% of our exports toimplementing action plans.

overseas markets in fiscal 2011. We have calculated that once we

In April 2006, Japan’s Act Concerning the Rational Use ofEnergy was revised and regulations concerning logistics wereare able to lift this ratio to 50%, and further promote local
procurement, we will be able to achieve our environmental target

strengthened with the aim of reducing global warming.

for this segment. Progress in our modal shift has meant that we

Accordingly, there is now greater demand for reducing theuse seaborne shipping for all FPD production equipment andenvironmental impact of logistics operations. In response, the TEL

semiconductor production equipment to our customers in SouthGroup has been actively reducing the environmental impact

Korea and parts of Europe and North America. We have also

caused by the transport of its products. For example, we arestarted to shift over to seaborne shipping for some of our

promoting a modal shift6 for domestic and overseas transport

customers in China and Taiwan. In order to make the change

and adopting packaging methods with less environmental impact.

from airborne to seaborne shipping easier, we are working to

We will continue these active measures in logistics in order toreduce production lead time to ensure there is no impact on thefulfill our environmental commitment.

final delivery even if we use seaborne shipping.

Reducing the Environmental Impact
Stemming from Logistics

Most of the TEL Group’s products are precision machinery, which

For shipments within the Group and product shipments tomeans they require special packaging to maintain precision andcustomers, we calculate and monitor the regulated scope of CO2

maintain a clean condition. We use special wooden frames andemissions under the Act Concerning the Rational Use of Energy

corrugated cardboard as packaging materials. As a way to reduce
the resources used for packaging, we have begun using reusable

environmental commitment, we are aiming to halve CO2

corrugated cardboard boxes when shipping large parts toemissions per ton-kilometer resulting from overseas shipments,

customers inside Japan.

In fiscal 2011, our CO2 emissions rose significantly in both

The FPD Business Unit (FPD BU) uses compartmentalized
trucks for shipments within Japan to help reduce the use ofJapan and overseas. This can be attributed to the rise inpackaging materials, compared to conventional methods, andproduction and shipment volume buoyed by an increase in sales.

increase load efficiency. As a result, we were able to reduce our

However, thanks to our efforts to actively promote a modal shift,

fleet of trucks by more than 30%.

Q CO2 Emissions from Logistics Operations and Trends
in Marine Transport Rates

150

145
5

100

140

50
0

(%)

53.6

200

17.4
2008
Overseas
Shipment Volume

Q Increasing Load Efficiency with Compartmentalized Trucks
Before

60

36.6
33
3
30

31
2
29

2009

2010

Japan
Shipment Volume

50

After
Compartmentalized Truck

40

32.0

30

70
4
66
2011

SOCIAL REPORT

compared to fiscal 2008 levels, by fiscal 2015 (see page 15).

EHS REPORTGreen Packaging

for logistics in Japan and for overseas logistics. As part of our(1,000 tons)

MANAGEMENT REPORTTEL’s Environmental Approach to Logistics
The TEL Group has established a Logistics Working Team andHIGHLIGHT

Approaches to Reducing the Environmental Impact of Logistics

20

Compartmentalized Truck

10
(FY)

0

Ratio of Seaborne Shipments to
Total Overseas Shipment Volume

TOPICS
Promoting a Modal Shift in Japan
Because TEL Group products are precision machinery that require special shipping
methods, in the past we used to ship these individually using trucks. However, after
examining alternative shipping methods together with marine shipping companies andother transport providers, we began to ship products with less of an environmental

Modal shift

impact using seaborne freight, beginning in May 2007. Currently, we are using five
shipping routes, and we estimate that we have been able to reduce our cumulative CO2
emissions by 650 tons. Moving forward, we stand firmly committed to proactively
working to further reduce our CO2 emissions during the transport of our products.
6 Modal shift: A shift in the mode of transportation (e.g. switching from conventional freight transportation by truck or aircraft to marine and rail transportation, which have a lower impact on
the environment.

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