E H S R E P O RT

EHS Activity Goals and Results
The Tokyo Electron Group has set goals for EHS activities and is promoting those activities
throughout the Group.

Goals and Results for EHS Activities in FY 2007
Action item

EHS management

EHS internal Audit

Achievement Plans and goals for FY 2008 onward Page in reportlevelGoals for FY 2007

Results

Perform EHS internal audit atplants and offices across thesupply chain

Conducted an audit at one site adding a
supply chain-related audit item and madecorrections based on the findings.

Continue to conduct audits

P. 17Encouraged application to existing
equipment

EHS REPORT18
EHS Activity Goals and Results

Achieve the FY 2008 and FY 2011goals

P. 20-21

Determined the schedule for totally
discontinuing the use of six substances
designated under the RoHS Directive

Achieve the TEL Roadmap indicators

P. 22

Saving energy

Reduce energy consumption(1% decrease in CO2 emissions per unit of sales, asbased on the Act Concerning
the Rational Use of Energy)

Achieved the goal by decreasing CO2emissions per unit of sales by approx.
17% from the FY 2006 level
Identified the transportation amount as ashipper

Continue to reduce energy consumption, more accurately identify theenergy used for transportation, andexamine and promote modal shift

P. 26

Waste reduction

Continue zero emission
efforts at manufacturing
plantsAchieved zero emissions at all
manufacturing plants except one
The recycling rate of the entire Group was
as high as that of the previous fiscal year.

Continue zero emission efforts andexamine reduction in the total amountof waste

P. 28

—

Continue to obtain data

P. 29

✕

Continue to pursue the goal concerning injury accidents for FY 2007 andreduce the number of ergonomicallycaused accidents by 25% fromFY 2007

P. 30

Energy-saving equipment

Achieve the TEL Roadmap
indicators

Measures to reduce theuse of regulated chemical
substances in equipment

Clarify the targeted chemical
substances and the policies

Product initiatives
for the environment

Environmental
activities at eachplant or office

Reduction in the number ofinjury accidents

300 mm products: Achieved the FY 2008
targets for two products out of six earlier
than planned—

Identified the use and emissions (into theair, water, etc.) of chemical substancesregulated under the PRTR system

Reduce the number of accidents requiring four or moredays off work to zero andreduce other injury accidents
by 30% from the level of theprevious fiscal year

The number and rate of accidents requiring
four or more days off decreased from theFY 2006 levels but the total number of
injury accidents increased by approx. 20%.

Proper management ofchemical substances

Health and safety** TEL Roadmap: Environmental policies and plans for the Group’s products

Achieved target✕ Achieved less than 80% of target

Achieved 80% of target— Item for which no goal was set“We cannot achieve reform simply by making daily improvements—We will implement energy saving measures setting even higher, innovative targets.”

Haruo Iwatsu
Executive Vice President and General Manager,
Development & Manufacturing

We are now developing our range of next-generation semiconductor
production equipment and in FY 2008, we will have a nearly full lineupof next-generation equipment. I have been encouraging employees todevelop innovative equipment by setting high targets apart from ourdaily improvement targets under the slogan of “reform manufacturingwith visionary next-generation equipment.”
We have been committed to reducing the energy consumed byour equipment, and for our next-generation equipment, we must dramatically increase their environmental performance. We are thus
endeavoring to make semiconductor production equipment that saves
even more energy, but I believe it is also important to improve theyield of semiconductors manufactured using the equipment. Although
it seems that there is no relationship between yield and environmental
performance, an increase in the yield will lead to the elimination ofwasteful operations in the semiconductor manufacturing process,resulting in improvements in the overall efficiency of the process.

TOKYO ELECTRON Environmental and Social Report 2007

Our customers are now attributing more importance to environmentconscious products that save energy and resources than before, and it is
now regarded as a matter of course for our departments to look at environmental efficiency as early as at the product development stage. We
have established a corporate culture in which employees naturally takeenvironmental matters into considerations without being told to set environmental targets.
Also at our manufacturing sites, we make efforts to protect the environment. For example, we are now planning to build a new plant in
Taiwa-cho, Miyagi Prefecture and are examining a design for a plant that
harmonizes with nature, because we want to keep the local natural environment intact as far as possible.
In FY 2007, the Tokyo Electron Group was able to achieve substantial growth and achieved the greatest ever business results far exceeding
the past peak records. Under these circumstances, however, employees
tend to work overtime to meet deadlines. However, I think that employees cannot work creatively if they routinely have to work longer hours. I
therefore encourage employees to try to make it a habit to finish theirwork as early as possible so that they do not have to work overtime.