JOURNAL OF PLASMA AND FUSION RESEARCHThe Journal of the Japan Society of Plasma Science and Nuclear Fusion ResearchVol. 96, No. 3, March 2020

CommentaryCharacteristics of Nanoseconds Pulsed Discharge Plasma Having Intense Reduced Electric Field andIts Control Techniques …………………………… NAMIHIRA Takao, RYU Terumasa and WANG Douyan
Special Topic Articles
Unsung Technologies in Plasma Processing which Supports Manufacturing Quality of Semiconductor Devices
1. Introduction ……………………………………………………………………………………… UESUGI Fumihiko
2. Instantaneous Generation of Many Flaked Particles in Mass-Production Plasma Etching Equipment…………………………………………………………………… KASASHIMA Yuji and UESUGI Fumihiko
3. Development of Detection Method for Micro-Arc Discharge in Plasma Processby using Acoustic Emission Sensor ………… KASASHIMA Yuji, TABARU Tatsuo and UESUGI Fumihiko
4. Micro-Arc Discharge Detection Method in Plasma Process by Monitoring Load Impedance……………… KUNIIE Shinji, SATO Shusaku, KIMURA Naoya, WAKAMOTO Satoru, KASASHIMA Yuji,
MOTOMURA Taisei, TABARU Tatsuo and UESUGI Fumihiko
5. Development of High Corrosion Resistance Ceramics for Chamber Parts in Mass-Production
Plasma Etching Equipment ……………………………………… KASASHIMA Yuji and UESUGI Fumihiko
6. Conclusion ……………………………………………………………………………………… UESUGI Fumihiko
Project Review
Japan-US Joint Research Project PHENIX-Accomplishments of 6 Years Project and the Next Program1. Overview of PHENIX Project ……… UEDA Yoshio, HATANO Yuji, YOKOMINE Takehiko, HINOKI Tatsuya,HASEGAWA Akira, OYA Yasuhisa and MUROGA Takeo
2. Task 1: Investigation of Overall Heat Flow Response in Plasma-Facing Component………………………… YOKOMINE Takehiko, UEDA Yoshio, TOKUNAGA Kazutoshi, YUKI Kazuhisa,
AKIYOSHI Masafumi and IBANO Kenzo
3. Task 2: Thermal and Mechanical Properties of Neutron Irradiated Tungsten……………………………………………… HINOKI Tatsuya, HASEGAWA Akira, MIYAZAWA Takeshi,
AKIYOSHI Masafumi and KONDO Sosuke
4. Task 3: Tritium Behavior and Its Neutron Irradiation Effect……………… OYA Yasuhisa, HATANO Yuji , NOBUTA Yuji, YAMAUCHI Yuji, KOBAYASHI Makoto,OHYA Makoto, KATAYAMA Kazunari, OTSUKA Teppei and UEDA Yoshio
5. FRONTIER Project (2019-2024) ……………………… HATANO Yuji ,YOKOMINE Takehiko, HINOKI Tatsuya,
HASHIMOTO Naoyuki, OYA Yasuhisa, OTSUKA Teppei, KONDO Masatoshi,
MIYAZAWA Junichi and NAGASAKA Takuya
R&D Activities
Collaboration Works of JSPS Bilateral Joint Research Projects (Japan (NIFS) - China (ASIPP))……………………………………………………………………… NOJIRI Kunpei and ASHIKAWA Naoko
Mourning ……………………………………………………………………………………………………………………………
Information …………………………………………………………………………………………………………………………
Announcement ……………………………………………………………………………………………………………………

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Cover
TEM images of cross-section of He-W co-deposition layer formed at (a) 473 K and (b) 573 K. (c) TEM images and EDS analysis of 573 K. With
increasing the sample temperature from 473 K to 573 K, the size of the He bubbles increased from several nm to several tens of nm, and blisters were generated at 573 K, as shown in (c). The density of W in the co-deposition layer formed at 573 K is about 62% of that of the W layer
below. The results indicate that the co-deposition layer is very porous and comprised of fine He bubble and cavities. (Kosuke ASAI et al., Plasmaand Fusion Research, Vol. 15, 1201004 (2020) http://www.jspf.or.jp/)!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!
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