ProgramBook

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

ISMTII 2023
2023
COEX, Seoul, South Korea
September 17 Sun. ~ 20 Wed., 2023
On-site Symposium

Organized by

Korea Institute of Machinery & Materials (KIMM)
International Committee on Measurements and Instrumentation (ICMI)

Co-organized by

Korea Advanced Institute of Science and Technology (KAIST)
Korea Research Institute of Standards and Science (KRISS)

Supported by

Korean Society for Precision Engineering (KSPE)

Financially Supported by

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

ISMTII 2023

Program
Book

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

ISMTII 2023
2023
COEX, Seoul, South Korea
September 17 Sun. ~ 20 Wed., 2023
On-site Symposium

Organized by

Korea Institute of Machinery & Materials (KIMM)
International Committee on Measurements and Instrumentation (ICMI)

Co-organized by

Korea Advanced Institute of Science and Technology (KAIST)
Korea Research Institute of Standards and Science (KRISS)

Supported by

Korean Society for Precision Engineering (KSPE)

Financially Supported by

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Contents
Page

2
Program Book

3

Welcome Message

4

Symposium Committee

8

Keynote Speakers

9Invited Speakers

16

Program at a Glance

18

Oral Sessions

39

Poster Sessions

46

General Information

48

Symposium Venue

49

Floor Map

51

Wecome Reception

52

Banquet53

Tour (Technical / Culture)

ISMTII 2023
Welcome Message
Welcome to ISMTII 2023

Dr. Jeong Seok Oh
Korea Institute of Machinery & Materials
Chair of ISMTII 2023

Prof. Seung-Woo Kim
Korea Advanced Institute of Science and Technology
Honorary Chair of ISMTII 2023

It is my great pleasure and honor to host the 15th
International Symposium on Measurement Technology
and Intelligent Instruments (ISMTII 2023) at COEX,
Seoul, South Korea. The Symposium is being steeredby the International Committee on Measurements andInstrumentation (ICMI), and organized by the Korea
Institute of Machinery & Materials (KIMM). It is coorganized by the Korea Advanced Institute of Science andTechnology (KAIST) and the Korea Research Institute ofStandards and Science (KRISS).
In continuation of the successful series of the previous
fourteen ISMTII symposiums held every two years,
this 15th symposium is aimed to provide a forum tobring together experts working in the field of precision
metrology and instrumentation from all around the world.
The four-day symposium from September 17 to 20, 2023
will be focused on technical exchanges of the current
state-of-the-art and future perspectives of measurement
and instrumentation technologies and also the timely
introduction of current activities of related industries andresearch institutions. I look forward to your participationand hope to see you enjoy all the oral and poster
presentations as well as the tradition of Seoul and South
Korea. Finally, I would like to express my appreciation
for the support from the Korean Society for Precision
Engineering (KSPE).
Best Regards,

Dr. Jeong Seok Oh & Prof. Seung-Woo Kim

3
Program Book

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Symposium Committee
Symposium Chair
Jeong Seok Oh

Korea Institute of Machinery and Materials, South Korea

Honorary Chair
Seung-Woo Kim

Korea Advanced Institute of Science and Technology, South Korea

International Steering Committee
Y. GaoHong Kong University of Science and Technology, Hong Kong (China)

K. C. Fan

National Taiwan University, Taiwan

W. GaoTohoku University, Japan

E. Manske

Technical University Ilmenau, Germany

X. Q. Jiang

University of Huddersfield, UK

G. F. Jin

Tsinghua University, China

C. H. Park

Korea Institute of Machinery and Materials, South Korea

J. B. Tan

Harbin Institute of Technology, China

K. Takamasu

University of Tokyo, Japan

K. Sapozhnikova

D.I.Mendeleyev Institute for Metrology, Russia

A. A. Weckenmann

University Erlangen-Nuremberg, Germany

S. Z. A. Zahwi

National Institute for Standards, Egypt

G. X. Zhang

Tianjin University, China

S. W. Kim

Korea Advanced Institute of Science and Technology, South Korea

Z. D. Jiang

Xi'an Jiaotong University, China

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ISMTII 2023

International Program Committee
O. Abouelatta

Mansoura University, Egypt

H. Bosse

Physikalisch Technische Bundesanstalt, Germany

P. CaiShanghai Jiao Tong University, China

L. C. Chen

National Taiwan University, Taiwan

I. Dudas

University of Miskolc, Hungary

N. Durakbasa

Vienna University of Technology, Austria

R. Furutani

Tokyo Denki University, Japan

H. Haitjema

KU Leuven, Belgium

H. N. Hansen

Technical University of Denmark, Denmark

W. H. Huang

University of Science and Technology of China, China

S. E. Hussein

Mansoura University, Egypt

R. Jablonski

Warsaw University of Technology, Poland

R. Leach

The University of Nottingham, UK

X. LiuUniversity of Warwick, UK

K. Sapozhnikova

D.I.Mendeleyev Institute for Metrology, Russia

R. Schmitt

RWTH Aachen University, Germany

H. Schweinzer

Technische Universitat Wien, Austria

Z. Shi

Beijing University of Technology, China

K. Yanagi

Nagaoka University of Technology, JapanM. Aketagawa

Nagaoka University of Technology, Japan

K. Sasajima

Tokyo Institute of Technology, Japan

T. Takatsuji

National Metrology Institute of Japan, Japan

T. Hatsuzawa

Tokyo Institute of Technology, Japan

A. Shimokohbe

Tokyo Institute of Technology, JapanF. J. Shiou

National Taiwan University of Science and Technology, Taiwan

Y. Takaya

Osaka University, Japan

R. Taymanov

D.I.Mendeleyev Institute for Metrology, Russia

L. J. Zeng

Tsinghua University, China

S. L. Zhang

Tsinghua University, China

J. G. Zhou

Drexel University, USA
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Symposium Committee
Local Organizing Committee
Chair

Ki-Nam Joo

Chosun University, South Korea

Members

Seunghwoi Han

Chonnam National University, South Korea

Joohyung Lee

Seoul National University of Science and Technology, South Korea

Seungman Kim

Korea Institute of Machinery and Materials, South Korea

Ji-Yong Park

Korea Institute of Industrial Technology, South Korea

Byung Jae Chun

Korea Atomic Energy Research Institute, South Korea

Junho Yoo

Nexensor, Inc., South Korea

Publication Committee
Chair

Hyug-Gyo Rhee

Korea Research Institute of Standards and Science, South Korea

Members

Young-Sik Ghim

Korea Research Institute of Standards and Science, South Korea

Jaehyun Lee

Korea Research Institute of Standards and Science, South Korea

In-Yong Park

Korea Research Institute of Standards and Science, South Korea

Ho-Jae Lee

Korea Institute of Industrial Technology, South Korea

Sangwon Hyun

Korea Basic Science Institute, South Korea

6
Program Book

ISMTII 2023

National Program Committee
Chair

Young-Jin Kim

Korea Advanced Institute of Science and Technology, South Korea

Members

Seungchul Kim

Pusan National University, South Korea

Seongheum Han

Korea Institute of Machinery and Materials, South Korea

Keunwoo Lee

LASERNGRAPN, South Korea

Heesuk Jang

Agency for Defense Development, South Korea

Hongki Yoo

Korea Advanced Institute of Science and Technology, South Korea

Sanha Kim

Korea Advanced Institute of Science and Technology, South Korea

Dong-Yoon Lee

Korea Institute of Industrial Technology, South Korea

Byung Chang Kim

Kyungnam University, South Korea

Minku KangINTEKPLUS, Inc, South Korea

Geon Hee Kim

Hanbat National University, South Korea

Yang Jin Kim

Pusan National University, South Korea

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Keynote Speakers
Han Haitjema

Sang-Yoon LEE

Professor

CEO

KU Leuven (Belgium)●
Department of Mechanical Engineering●

Title
Metrologic characteristics and uncertainty
evaluation of surface texture measurements
Keynote-1
Sep. 18 (Mon.) / 09:00~09:30
Room E5

Title
Industrial use cases of 3D optical metrology
Keynote-2
Sep. 18 (Mon.) / 09:30~10:00
Room E5

Kaoru Minoshima

Professor

Professor

Technische Universit t Ilmenau(Germany)●
Institute of Process Measurement andSensor Technology

Title
Nanopositioning and nanomeasuringmachines with a direct link to the unit oftime
Keynote-3
Sep. 18 (Mon.) / 10:00~10:30
Room E5

University of Electro-Communications(Japan)●Department of Engineering Science●

Title
Precision measurements beyond frequency
metrology using versatile control of opticalwaves with optical frequency comb
Keynote-4
Sep. 19 (Tue.) / 08:30~09:00
Room E5

Laura Sinclair

Liandong Yu

DoctorProfessor

National Institute of Standards andTechnology (USA)●Fiber Sources and Applications Group●

Title
Pushing the boundaries of ranging and timetransfer through precise control of opticalfrequency combs
Keynote-5
Sep. 19 (Tue.) / 09:00~09:30
Room E5Peter de Groot
Doctor●Chief Scientist, Zygo Corporation (USA)Title
nterferometricmetrology solutions for digitalI
optical immersive displays
Keynote-7
Sep. 19 (Tue.) / 10:00~10:30
Room E5

Program Book

INTEKPLUS (South Korea)

Eberhard Manske
●

8

●

●
●

China University of Petroleum (UPC) (China)
College of Control Science and Engineering

Title
Microfluidic sensor on the early diagnostic ofcancer diseases
Keynote-6
Sep. 19 (Tue.) / 09:30~10:00
Room E5

ISMTII 2023
Invited Speakers
Florian Pollinger

Satoru Takahashi

DoctorProfessor●

Physikalisch-Technische Bundesanstalt(Germany)●

The University of Tokyo (Japan)

Title
Multi-wavelength interferometry forgeodesy and large volume metrology

Title
Super resolution optical measurement forfunctional microstructures beyond thediffraction limit

B-1
Sep. 18 (Mon.) / 10:45~11:10
Room E2

C-4
Sep. 19 (Tue.) / 10:45~11:10
Room E3

Liang-Chia Chen

Masato Aketagawa

Professor

Professor●

National Taiwan University (Taiwan)

Title
Current advances and challenges
in optical metrology for advanced
semiconductor packaging
A-1
Sep. 18 (Mon.) / 10:45~11:10
Room E1●

Nagaoka University of Technology(Japan)Title
Picometer displacement/length measurement
using regular crystalline lattice and superresolution interferometry
B-1
Sep. 18 (Mon.) / 11:10~11:35
Room E2

Guanhao Wu

Daewook Kim

Professor

Professor●

Tsinghua University (China)

Title
Dual-comb-based distance and multidegree-of-freedom measurements
B-2
Sep. 18 (Mon.) / 13:50~14:15
Room E2●

University of Arizona (USA)

Title
Deflectometry and Interferometry
C-1
Sep. 18 (Mon.) / 11:10~11:35
Room E3

Sang-Joon Cho

Chao Zuo

Vice President

Professor●

Park Systems (South Korea)●

Nanjing University of Science andTechnology (China)

Title
Automated Nano-Metrological AFM withIntelligent Data Preparation

Title
Learning based fringe projection profilometry

E-3
Sep. 19 (Tue.) / 14:00~14:25
Room E4

C-5
Sep. 19 (Tue.) / 14:00~14:25
Room E3

9Program Book

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Invited Speakers
Kye-Sung Lee

Byung-Seon Chun

DoctorDoctor●

Korea Basic Science Institute(South Korea)

Title
Tissue culture monitoring using line-field
fluorescence microsocpy combined with
optical coherence microscopy
C-4
Sep. 19 (Tue.) / 11:10~11:35
Room E3

Title
Thermoreflectance microscopy for steadystate and transient thermal analysis ofelectronic devices in microscopic scale
C-3
Sep. 18 (Mon.) / 16:25~16:50
Room E3

ChaBum Lee

Vice President of Technology

Professor

LMI Technologies (Canada)●

Texas A&M University (USA)

Title
Simplified solutions in an increasingly
complicated market

Title
Wafer-level metrology and inspection foradvanced electronics packaging

A-4
Sep. 19 (Tue.) / 10:45~11:10
Room E1

A-3
Sep. 18 (Mon.) / 16:25~16:50
Room E1

Matteo Bosi

Youjian Song

President

Professor●

Marposs Korea (Italy)

Title
A capacitor coupling-based instrument toassess in a more reliable way the quality of
insulation in mass-produced electric statorsand motors
B-6
Sep. 19 (Tue.) / 15:40~16:05
Room E2●

Tianjin University (China)

Title
Time-of-flight measurement of microstructures based on electronically controlled
optical sampling
B-2
Sep. 18 (Mon.) / 14:15~14:40
Room E2

Byoung-Ho Lee

Taejoong Kim

DoctorDoctor●Hitachi High-tech (Japan)

Title
MI (Metrology & Inspection): essential
technology for future devices
C-3
Sep. 18 (Mon.) / 16:50~17:15
Room E3

Program Book

Nanoscope Systems, Inc. (South Korea)

Chi Ho Ng
●

10

●

●

Samsung Electronics (South Korea)

Title
Massive overlay metrology solution byrealizing imaging Mueller matrix spectroscopic
ellipsometry
C-1
Sep. 18 (Mon.) / 10:45~11:10
Room E3

ISMTII 2023

Dong-Wook Lee

Wanxin Sun

DoctorDoctor●Advanced Materials Research Center,
Technology Innovation Institute (UAE)

Title
Deep learning-based stress intensity factors
analysis of bi-material interface crack fromphotoelastic images
F-2
Sep. 19 (Tue.) / 10:45~11:10
Room E5●

Bruker Singapore Pte Ltd. (Singapore)

Title
Nano scale physical and chemical property
characterization by scanning probe
techniques
D-3
Sep. 18 (Mon.) / 16:25~16:50
Room E4

In-Ho LeeYang Lu

DoctorProfessor●

Korea Research Institute of Standards
and Science (South Korea)

Title
Designing and exploring super functional
materials and devices using evolutionary
and deep learning methods
F-4
Sep. 19 (Tue.) / 15:40~16:05
Room E5●

China University of Petroleum (UPC) (China)

Title
Ultrafast holographic microscopy based on fs
laser for wavefront inspection and biologicalapplications
B-4
Sep. 19 (Tue.) / 10:45~11:10
Room E2

Rongke Gao

Ruitao Yang

Professor

Professor●

China University of Petroleum (UPC) (China)●

Harbin Institute of Technology (China)

Title
The SERS measurements on micro-nanointerface substrate integrated microfluidic
biosensor

Title
Real-time suppression of random phase drift
for optical frequency comb ranging with highfrequency intermode beats

C-5
Sep. 19 (Tue.) / 14:25~14:50
Room E3

B-4
Sep. 19 (Tue.) / 11:10~11:35
Room E2

Kai NiAkifumi Asahara

Professor

Professor●

Tsinghua University (China)

Title
Dual-comb spectroscopy and ranging
based on mechanical sharing modelocked fiber lasers
B-3
Sep. 18 (Mon.) / 16:50~17:15
Room E2●

University of Electro-Communications(Japan)Title
Dual-comb spectroscopy extended for
spatiotemporal measurement applications
using OAM light
B-3
Sep. 18 (Mon.) / 16:25~16:50
Room E2

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Invited Speakers
Takashi Kato

Jiao Jiannan

Professor

Professor●

University of Electro-Communications(Japan)

Title
Generation of non-divergent surface thirdharmonics with a two-photon-polymerizedphase-type diffractive micro axicon

B-5
Sep. 19 (Tue.) / 14:00~14:25
Room E2

B-5
Sep. 19 (Tue.) / 14:25~14:50
Room E2

Jindong Tian

Huitaek Yun

Professor

Professor

Shenzhen University (China)

Title
Quantitative phase imaging for dynamic
processes
C-2
Sep. 18 (Mon.) / 14:15~14:40
Room E3●

Korea Advanced Institute of Science andTechnology (South Korea)

Title
Virtual reality based human-machineinterface for human-AI collaboration
F-1
Sep. 18 (Mon.) / 16:25~16:50
Room E5

Jiyeon Choi

Sangbaek Park

DoctorProfessor●

Korea Institute of Machinery & Materials(South Korea)●

Chungnam National University(South Korea)

Title
Ultrafast laser processing for advanced
packaging of glass-based devices

Title
Laser-patterned energy storage devices
integrated with wearable electronics

D-1
Sep. 18 (Mon.) / 10:45~11:10
Room E4

D-2
Sep. 18 (Mon.) / 13:50~14:15
Room E4

Hyung Cheoul Shim

Soongeun Kwon

DoctorDoctor●

Korea Institute of Machinery & Materials(South Korea)

Title
Advanced characterization of the active
materials for lithium Ion batteries using
TEM techniques to promote mechanism
understanding
D-2
Sep. 18 (Mon.) / 14:15~14:40
Room E4

Program Book

Shenzhen University (China)

Title
Optical phased array with phasecontrolled optical frequency comb

●

12

●

●

Korea Institute of Machinery & Materials(South Korea)

Title
Laser processing of graphene materials forhigh-performance energy storage devices
D-1
Sep. 18 (Mon.) / 11:10~11:35
Room E4

ISMTII 2023

In Sung Kang

Ki Joon Heo

DoctorProfessor●

KOH YOUNG TECHNOLOGY, INC.
(South Korea)

Title
Optical 3D inspection technologies
A-2
Sep. 18 (Mon.) / 13:50~14:15
Room E1●

Chonnam National University (South Korea)

Title
Real-time monitoring of airborne microbialcolony forming unit based on on-chip cell
imaging platform with continuous aerosol-tohydrosol transfer
C-6
Sep. 19 (Tue.) / 15:40~16:05
Room E3

Sungho Suh

Martin Tangari Larrategui

DoctorDoctor●Deutsches Forschungszentrum f r
K nstliche Intelligenz (Germany)

Title
Remaining useful life prediction oflithium-ion batteries using spatiotemporal transformers
A-3
Sep. 18 (Mon.) / 16:50~17:15
Room E1●

University of Arizona (USA)

Title
Advancements in non-null surface figure
measurement interferometry
C-2
Sep. 18 (Mon.) / 13:50~14:15
Room E3

Ilkoo Kim
Doctor●Gauss Labs (USA)

Title
Universal denoising method for boosting
the throughput of semiconductor image
metrology
F-3
Sep. 19 (Tue.) / 14:00~14:25
Room E5

13
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

14
Program Book

Program

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

ISMTII 2023
2023

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Program at a Glance
DAY 1 / September 17

Sun.

, 2023Time
16:00~17:00

Registration (Room 402, 4F)

17:00~19:00

Welcome Reception (Room 402, 4F)

19:00~ICMI Member Meeting (Conference Room E4)

DAY 2 / September 18
Time

Mon.

, 2023

Room E1

Room E2

Room E3

Room E4

Room E5

Session A

Session B

Session C

Session D

Session E, F

Lobby

Opening Ceremony

08:30~09:00(Room E5)

Keynote Session–1 (Keynote 1, 2&3)

09:00~10:30(Room E5)

10:30~10:45

Coffee BreakRegistration

10:45~12:10

A-1

B-1

C-1

D-1

E-1

In-Process
Measurement - I

Dimensional
Metrology - I

OpticalInterferometry - I

Laser Material
Processing - I

Precision
Metrology - I

12:10~13:50

13:50~15:15

Lunch

A-2

B-2

C-2

D-2

E-2

In-Process
Measurement - II

Frequency
Comb - I

OpticalInterferometry - II

Laser Material
Processing - II

Precision
Metrology - II

15:15~16:25

16:25~18:00

16
Program Book

(08:00~18:00)

Post Only Session & Coffee Break

Poster Only

A-3

B-3

C-3

D-3

F-1

Intelligent
Measurement - I

Frequency
Comb - II

Metrology &Inspection - I

Material
Characterization

Machine Learning &Signal Processing I

ISMTII 2023

DAY 3 / September 19
Time

Tue.

, 2023

Room E1

Room E2

Room E3

Room E4

Room E5

Session A

Session B

Session C

Session D, E

Session F

Keynote Session–2 (Keynote 4, 5, 6&7)

08:30~10:30(Room E5)

10:30~10:45

10:45~12:10

Lobby

Coffee Break

A-4

B-4

C-4

D-4

F-2

Intelligent
Measurement - II

Dimensional
Metrology - II

Microscopy &Profilometry - I

Sensors &Actuators

Machine Learning &Signal Processing II

12:10~14:00

Lunch

Registration(08:00~17:00)

14:00~15:25

A-5

B-5

C-5

E-3

F-3

Intelligent
Measurement - III

Frequency
Comb - III

Metrology &Inspection - II

Precision
Metrology - III

Machine Learning &Signal Processing III

15:25~15:40

15:40~17:15

Coffee Break

A-6

B-6

C-6

E-4

F-4

Intelligent
Measurement - IV

Uncertainty,
Traceability &Calibration

Microscopy &Profilometry - II

Precision
Metrology - IV

Machine Learning &Signal Processing IV

17:45~20:30

DAY 4 / September 20

Banquet(Cheonggyesan Yettgol Fortress Restaurant)

Wed.

, 2023Time
08:30~13:00

Technical Tour (Korea Institute of Industrial Technology)

09:00~13:00

Culture Tour (Gyeongbokgung Palace)17
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Oral Session
Session A
In-Process and Intelligent Measurement
Conference Room E1, COEX

September 18 Mon.

10:45~12:10[A-1] In-Process Measurement - IChair: Prof. Ki-Nam Joo (Chosun University), Dr. Sungho Suh (Deutsches Forschungszentrum für Künstliche Intelligenz)

Invited 	Current advances and challenges in optical metrology for advanced semiconductor packaging

10:45~11:10

Liang-Chia Chen

National Taiwan University (Taiwan)

A014	Vertical registration of in-process topography data with post-process volumetric data

11:10~11:25

Afaf Remani*, Fernando Peña, Arianna Rossi, Adam Thompson, John Dardis, Nick Jones, Nicola Senin, Richard Leach* University of Nottingham (United Kingdom)

A203	One-wire reconfigurable and damage-tolerant sensor array

11:25~11:40

Zhihe Long, Zhengbao Yang** Hong Kong University of Science and Technology (China)

A106	An indirect spatial positioning method for black volute depalletizing system based on a RGB-D
camera11:40~11:55

Shuonan Xiao*, Ping Yang, Haiyang Lin, Qiming Zhong* Xiamen University (China)

A126	Embedded algorithm for diagnosis of spindle bearings and machining problems

11:55~12:10

Chi Cong Dang*, Jooho Hwang* Korea Institute of Machinery and Materials (South Korea)

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ISMTII 2023
September 18 Mon.

13:50~15:15[A-2] In-Process Measurement - II
Chair: Dr. Seungman Kim (Korea Institute of Machinery and Materials)

Invited 	Optical 3D inspection technologies

13:50~14:15

In Sung Kang

KOH YOUNG TECHNOLOGY, INC. (South Korea)

A131	In-process observation of physical phenomena inside the workpiece processed by water jet
guided laser

14:15~14:30

Shoichi Ui*, Mayuko Osawa, Ryota Washio, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi* The University of Tokyo (Japan)

A048	Correlation analysis between molding conditions and demolding forces in injection molding

14:30~14:45

Tetsuya Ofusa*, Fuminobu Kimura, Yusuke Kajihara* The University of Tokyo (Japan)

A136	Real-time measurement for multi-layer thin-film structure with micro-ellipsometry and pixelated
polarizing camera

14:45~15:00

Dong-Geun Yang*, Young-Sik Ghim, Hyug-Gyo Rhee

* Korea Research Institute of Standards and Science (South Korea)

A191	In-process measurement of effective distance and bubble structure by high-speed imaging
technique in optical cavitation

15:00~15:15

Saikat Medya*, Swee Hock Yeo* Nanyang Technological University (Singapore)

September 18 Mon.

16:25~18:00[A-3] Intelligent Measurement - IChair: Dr. Jiyong Park (Korea Institute of Industrial Technology), Dr. In Sung Kang (KOH YOUNG TECHNOLOGY)

Invited 	Wafer-level metrology and inspection for advanced electronics packaging

16:25~16:50

ChaBum Lee

Texas A&M University (USA)

Invited 	Remaining useful life prediction of lithium-ion batteries using spatio-temporal transformers

16:50~17:15

Sungho Suh

Deutsches Forschungszentrum für Künstliche Intelligenz (Germany)

A017	Buried patterns and defects see-through imaging by high-voltage SEM

17:15~17:30

Hang Zhao*, Shiyuan Liu, Jinlong Zhu* Huazhong University of Science and Technology (China)

A150	Absolute distance measurement based on radio-frequency Interferometer using the method ofexcess fraction

17:30~17:45

Tao Liu*, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

A045	Measurement of wedge’s global angular sizes based on parallel profile extraction strategy

17:45~18:00

Zexiang Zhao*, Xinyu Zhao, Jianpu Xi, Yixiang He, Guanghua Hua* Zhongyuan University of Technology (China)

19
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

September 19 Tue.

10:45~12:10[A-4] Intelligent Measurement - II
Chair: Dr. Young-Sik Ghim (Korea Research Institute of Standards and Science)

Invited 	Simplified solutions in an increasingly complicated market

10:45~11:10

Chi Ho Ng

LMI Technologies (Canada)

A046	Stroboscopic sampling moiré microscope for investigation of MEMS’ full surface in-planevibration

11:10~11:25

Mona Yadi*, Tsutomu Uenohara, Yasuhiro Mizutani, Yoshiharu Morimoto, Yasuhiro Takaya* Osaka University (Japan)

A101	Research on the measurement method for the full-surface profile of micro curved workpiece

11:25~11:40

Zhonghao Cao*, Yuan-Liu Chen
* Zhejiang University (China)

A115	Parameters quantification of subsurface detection technology based on probe ultrasonicexcitation and discrimination of different materials

11:40~11:55

Yuyang Wang*, Yuan-Liu Chen, Mingyu Duan
* Zhejiang University (China)

A102	Investigation on the resolution improvement of an optical angle sensor based on laser autocollimation

11:55~12:10

Hyunsung Lim, Yuki Shimizu** Hokkaido University (Japan)

September 19 Tue.

14:00~15:15[A-5] Intelligent Measurement - III
Chair: Dr. Seongheum Han (Korea Institute of Machinery and Materials), Prof. Yuan-Liu Chen (Zhejiang University)

A032	Tomographic imaging Mueller-matrix ellipsometry: Principle, instrumentation and emerging
applications

14:00~14:15

Xiuguo Chen*, Chao Chen, Sheng Sheng, Shiyuan Liu* Huazhong University of Science and Technology (China)

A056	Vision-based pose measurement technology for mobile machine

14:15~14:30

Seungman Kim*. Gyungho Khim, Seongheum Han, Jeong Seok Oh, Seung-Kook Ro* Korea Institute of Machinery and Materials (South Korea)

A179	Automatic high-frequency induction brazing through an ensembled detection with heterogenous
sensor measurements

14:30~14:45

Joonhyeok Moon*, Min-Gwan KIM, Ok Hyun Kang, Heejong Lee, Ki-Yong Oh* Hanyang University (South Korea)

A096	A novel calibration method for kinematic parameter errors of industrial robot based onLevenberg-Marquard and beetle antennae search algorithm

14:45~15:00

Mengyao Fan*, Huining Zhao, Liandong Yu, Haojie Xia* Hefei University of Technology (China)

A168	Novel multi-electromagnetic-force-compensation axis-symmetric mass comparator

14:45~15:15

Kyung-Taek Yoon*, Young-Man Choi
* Ajou University (South Korea)

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ISMTII 2023
September 19 Tue.

15:40~16:55[A-6] Intelligent Measurement - IV
Chair: Prof. Young-Man Choi (Ajou University), Prof. Jinlong Zhu (Huazhong University of Science and Technology)

A154	Design and implementation of AI-based computer vision system for quality control of productand processes

15:40~15:55

Miro Hegedić, Mihael Gudlin*, Matija Golec, Petar Gregurić, Borna Skrlec* University of Zagreb (Croatia)

A025	Straightness measurement with laser beam and deep learning

15:55~16:10

Satoru Takano*, Hibiki Takeoka, Koji Horie, Yohei Yamada, Toshinori Yasuhara, Kohsei Terao, Masato Aketagawa* Nagaoka University of Technology (Japan)

A066	Sinusoidal phase modulation interferometer using high speed phase demodulation and comb
filter

16:10~16:25

Masato Higuchi*, Katsunari Katagiri, Taku Sato, Masato Aketagawa* Nagaoka University of Technology (Japan)

A166	Crack inspection in tunnel structures by fusing information from a 3D light detection andranging and pan-tilt-zoom camera system

16:25~16:40

Siheon Jeong*, Min Gwan Kim, Ki-Yong Oh* Hanyang University (South Korea)

A034	Laser feedback FMCW LiDAR for noncooperative-target ranging with a stand-off distance ofseveral hundred meters

16:40~16:55

Yifan Wang*, Yidong Tan* Tsinghua University (China)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Session B
Dimensional Metrology & Frequency Combs
Conference Room E2, COEX

September 18 Mon.

10:45~12:05[B-1] Dimensional Metrology - IChair: Prof. Young-Jin Kim (Korea Advanced Institute of Science and Technology), Prof. Kai Ni (Tsinghua University)

Invited 	Multi-wavelength interferometry for geodesy and large volume metrology

10:45~11:10

Florian Pollinger

Physikalisch-Technische Bundesanstalt (Germany)

Invited 	Picometer displacement/length measurement using regular crystalline lattice and super-

11:10~11:35

resolution interferometry
Masato Aketagawa

Nagaoka University of Technology (Japan)

A071	Synchronization of distant frequency combs via 1.3-km free-space optical frequency transfer

11:35~11:50

Dong Il Lee*, Jaewon Yang, Dong-Chel Shin, Jaehyun Lee, Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A122	Frequency modulation control using heterodyne ineterferometer for FMCW LiDAR

11:50~12:05

Jubong Lee*, Youngjun Cho, Kyihwan Park* Gwangju Institute of Science and Technology (South Korea)

22
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ISMTII 2023
September 18 Mon.

13:50~15:10[B-2] Frequency Comb - IChair: Prof. Kaoru Minoshima (University of Electro-Communications), Dr. Laura Sinclair (National Institute of Standards and Technology)

Invited 	Dual-comb-based distance and multi-degree-of-freedom measurements

13:50~14:15

Guanhao Wu

Tsinghua University (China)

Invited 	Time-of-flight measurement of micro-structures based on electronically controlled optical

14:15~14:40

sampling

Youjian Song
Tianjin University (China)

A051	Development and applications of the dual-comb absolute distance measurement

14:40~14:55

Seongheum Han*, Seungman Kim, Jeong-Seok Oh, Gyungho Khim, Seung-Kook Ro, Seung-Woo Kim* Korea Institute of Machinery and Materials (South Korea)

A081	Absolute distance measurement based on time-of-flight via high-efficiency optical crosscorrelation using a semiconductor optical amplifier

14:55~15:10

Jaeyoung Jang*, Young-Jin Kim, Seung-Woo Kim* Korea Advanced Institute of Science and Technology (South Korea)

September 18 Mon.

16:25~18:00[B-3] Frequency Comb - II
Chair: Prof. Guanhao Wu (Tsinghua University), Prof. Takashi Kato (University of Electro-Communications)

Invited 	Dual-comb spectroscopy extended for spatiotemporal measurement applications using OAM

16:25~16:50

light

Akifumi Asahara
University of Electro-Communications (Japan)

Invited 	Dual-comb spectroscopy and ranging based on mechanical sharing mode-locked fiber lasers

16:50~17:15

Kai NiTsinghua University (China)

A035	Frequency-comb based phase spectroscopy for surface plasmon polariton phase change
detection on nano structure

17:15~17:30

Dae Hee Kim*, Young Ho Park, In Jae Lee, Jun Hyung Park, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A078	Polarization-multiplexed dual-comb fiber laser with dual-phase-biased nonlinear amplifying
loop mirror

17:30~17:45

Jiayang Chen*, Yuxuan Ma, Liheng Shi, Guanhao Wu* Tsinghua University (China)

A104	Improvement of the resolution of pitch deviation measurement of a diffraction scale grating by
optical angle sensors

17:45~18:00

Tomoki Kitazume, Wei Gao, Yuki Shimizu** Hokkaido University (Japan)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

September 19 Tue.

10:45~12:05[B-4] Dimensional Metrology - II
Chair: Dr. Florian Pollinger (Physikalisch-Technische Bundesanstalt), Dr. Seongheum Han (Korea Institute of Machinery and Materials)

Invited 	Ultrafast holographic microscopy based on fs laser for wavefront inspection and biological

10:45~11:10

applications
Yang Lu

China University of Petroleum (UPC) (China)

Invited 	Real-time suppression of random phase drift for optical frequency comb ranging with high-

11:10~11:35

frequency intermode beats
Ruitao Yang

Harbin Institute of Technology (China)

A128	An absolute angle measurement based on the interference of a mode-locked femtosecond laser
in a Fabry-Pérot etalon

11:35~11:50

Dong Wook Shin*, Ryo Sato, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

A120	A capacitive absolute angular displacement sensor based on dual re-modulation scheme with
time-division multiplexing

11:50~12:05

Bingnan Zhan*, Changliang Wu, Pei Huang, Xiaokang LiuPei, Hongji Pu* Beijing Institute of Technology (China)

September 19 Tue.

14:00~15:20[B-5] Frequency Comb - III
Chair: Prof. Joohyung Lee (Seoul National University of Science and Technology),
Prof. Akifumi Asahara (University of Electro-Communications)

Invited 	Optical phased array with phase-controlled optical frequency comb

14:00~14:25

Takashi Kato

University of Electro-Communications (Japan)

Invited 	Generation of non-divergent surface third-harmonics with a two-photon-polymerized phase-

14:25~14:50

type diffractive micro axicon
Jiao Jiannan

Shenzhen University (China)

A061	Spatial beam shaping of ultraviolet via phase control of near-infrared fundamental beam inharmonic generation

14:50~15:05

Seungjai Won*, Seungman Choi, Taewon Kim, Byunggi Kim, Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A010	High-precision terahertz continuous-wave spectroscopy with frequency comb calibration

15:05~15:20

Guseon Kang*, Jaeyoon Kim, Dong-Chel Shin, Seong-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

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ISMTII 2023
September 19 Tue.

15:40~17:05[B-6] Uncertainty, Traceability & Calibration
Chair: Prof. Masato Aketagawa (Nagaoka University of Technology), Prof. Youjian Song (Tianjin University)

Invited 	A capacitor coupling-based instrument to assess in a more reliable way the quality of insulation

15:40~16:05

in mass-produced electric stators and motors
Matteo Bosi

Marposs Korea (Italy)

A001	Uncertainty estimation and validation method of surface roughness measurement on coordinate
measuring machine using photometric stereo method

16:05~16:20

Thammarat Somthong*, Qing-Ping Yang, Jariya Buajarern* National Institute of Metrology (Thailand)

A021	Virtual optical instrument for uncertainty evaluation in surface topography measurement

16:20~16:35

Helia Hooshmand*, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano* University of Nottingham (United Kingdom)

A107	Determination of the influence of environmental vibration on the evaluation of measurement
noise using a virtual instrument

16:35~16:50

Athanasios Pappas*, Helia Hooshmand, Rong Su, Richard Leach, Samanta Piano* University of Nottingham (United Kingdom)

A076	Development of a differential angle sensor for evaluation of scale pitch deviation

16:50~17:05

Jiucheng Wu*, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao* Tohoku University (Japan)

25
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Session C
Optical Interferometry, Metrology & Inspection
Conference Room E3, COEX

September 18 Mon.

10:45~12:05[C-1] Optical Interferometry - IChair: Dr. Joonho You (Nexsensor), Dr. Byoung-Ho Lee (Hitachi High-tech)

Invited 	Massive overlay metrology solution by realizing imaging Mueller matrix spectroscopic

10:45~11:10

ellipsometry
Taejoong Kim

Samsung Electronics (South Korea)

Invited 	Deflectometry and Interferometry

11:10~11:35

Daewook Kim

University of Arizona (USA)A097	The study of interferometric technologies for the advanced packaging of the semiconductor
manufacturing process

11:35~11:50

Joonho You*, Chang Soo Kim* nexensor Inc. (South Korea)

A005	Simultaneous phase-shifting circular subaperture stitching interferometry based on polarization
grating

11:50~12:05

Yao Hu, Zhen Wang*, Qun Hao* Beijing Institute of Technology (China)

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ISMTII 2023
September 18 Mon.

13:50~15:10[C-2] Optical Interferometry - II
Chair: Prof. Daewook Kim (University of Arizona), Dr. Byung-Seon Chun (Nanoscope Systems)

Invited 	Advancements in non-null surface figure measurement interferometry

13:50~14:15

Martin Tangari Larrategui
University of Arizona (USA)

Invited 	Quantitative phase imaging for dynamic processes

14:15~14:40

Jindong Tian

Shenzhen University (China)

A067	Multi-channel vibration measurement based on self-mixing vertical cavity surface-emitting
lasers

14:40~14:55

Wei Xia*, Mengna Xu, Jingyu Yu, Dongmei Guo, Ming Wang
* Nanjing Normal University (China)

A105	Stitching interferometry method for the pitch evaluation of a large-scale variable-line-spacing
diffraction grating by using a Fizeau interferometer

14:55~15:10

Chenguang Yin*, Xin Xiong, Ryo Sato, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

September 18 Mon.

16:25~17:30[C-3] Metrology & Inspection - IChair: Dr. Taejoong Kim (Samsung Electronics), Dr. Martin Tangari Larrategui (University of Arizona)

Invited 	Thermoreflectance microscopy for steady-state and transient thermal analysis of electronic

16:25~16:50

devices in microscopic scale
Byung-Seon Chun

Nanoscope Systems, Inc. (South Korea)

Invited 	MI (Metrology & Inspection): essential technology for future devices

16:50~17:15

Byoung-Ho Lee

Hitachi High-tech (Japan)

A103	In-situ evaluation of interference fringe patterns generated by non-orthogonal Lloyd’s mirror
interferometer

17:15~17:30

Nozomu Takahiro, Yuki Shimizu** Hokkaido University (Japan)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

September 19 Tue.

10:45~12:05[C-4] Microscopy & Profilometry - IChair: Dr. Prof. Yangjin Kim (Pusan National University), Prof. Rongke Gao (China University of Petroleum (UPC))

Invited

10:45~11:10

Super
	
resolution optical measurement for functional microstructures beyond the diffraction
limit
Satoru Takahashi

The University of Tokyo (Japan)

Invited

11:10~11:35

Tissue	
culture monitoring using line-field fluorescence microsocpy combined with opticalcoherence microscopy
Kye-Sung Lee

Korea Basic Science Institute (South Korea)

A018	Super-resolution and optical phase retrieval using ptychographic structured illumination
microscopy

11:35~11:50

Keichi Kuwae, Shin Usuki*, Tadatoshi Sekine, Kenjiro T. Miura* Shizuoka University (Japan)

A116	Investigation of angle measurement based on confocal probe employing second harmonic
generation

11:50~12:05

Ryo Sato*, Yuki Shimizu, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

September 19 Tue.

14:00~15:20[C-5] Metrology & Inspection - II
Chair: Prof. Satoru Takahashi (The University of Tokyo), Dr. Jaehyun Lee (Korea Research Institute of Standards and Science)

Invited

14:00~14:25

Learning	based fringe projection profilometry
Chao Zuo

Nanjing University of Science and Technology (China)

Invited14:25~14:50

The	
SERS measurements on micro-nano interface substrate integrated microfluidic biosensor
Rongke Gao

China University of Petroleum (UPC) (China)

A006	Single-shot deflectometry for dynamic measurement of specular surfaces using high carrierfrequency diagonal pattern

14:50~15:05

Manh The Nguyen*, Jaehyun Lee, Young-Sik Ghim, Hyug-Gyo Rhee
* Korea Research Institute of Standards and Science (South Korea)

A042	Measurement of global sizes of cylinder based on spiral profile extraction strategy

15:05~15:20

Xinyu Zhao*, Jianpu Xi, Zexiang Zhao, Xinchao Shi, Shuaifei Wang
* Zhongyuan University of Technology (China)

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ISMTII 2023
September 19 Tue.

15:40~17:05[C-6] Microscopy & Profilometry - II
Chair: Dr. Sangwon Hyun (Korea Basic Research Institute), Dr. Kye-Sung Lee (Korea Basic Science Institute)

Invited 	Real-time monitoring of airborne microbial colony forming unit based on on-chip cell imaging

15:40~16:05

platform with continuous aerosol-to-hydrosol transfer
Ki Joon Heo

Chonnam National University (South Korea)

A134	Parallel computation using a whale optimization algorithm for faster misalignment estimation inreflective Fourier ptychography microscopy

16:05~16:20

Van Huan Pham*, Byong Hyuk Chon, Hee Kyung Ahn* Korea Research Institute of Standards and Science (South Korea)

A175	Misalignment evaluating and compensating for freeform optical system using CMM

16:20~16:35

Jimin Han*, Hojae Ahn, Joong Kyu Ham, Geon Hee Kim, Bongkon Moon, Woojin Park, Seung-Wook Park, Dae-Hee Lee,
Soojong Pak* Kyung Hee University (South Korea)

A028	Form error measurement of CMM probe tip ball based on interpolation method

16:35~16:50

So Ito*, Daisuke Yamashita, Shiori Toyomoto, Kouki Tsuchida, Kimihisa Matsumoto, Kazuhide Kamiya* Toyama Prefectural University (Japan)

A079	New galvo-scanned chromatic confocal microscopy for accurate full-field surface profilometry

16:50~17:05

Yu-Feng Chou, Wei-Chi Hung*, Han-Ju Tsai, Fu-Sheng Yang, Liang-Chia Chen
* National Taiwan University (Taiwan)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Session D
Material Processing & Characterization, Sensors and Actuators
Conference Room E4, COEX

September 18 Mon.

10:45~12:05[D-1] Laser Material Processing - IChair: Dr. Hyungcheoul Shim (Korea Institute of Machinery and Materials),Dr. Han Ku Nam (Korea Advanced Institute of Science and Technology)

Invited 	Ultrafast laser processing for advanced packaging of glass-based devices

10:45~11:10

Jiyeon Choi

Korea Institute of Machinery & Materials (South Korea)

Invited 	Laser processing of graphene materials for high-performance energy storage devices

11:10~11:35

Soongeun Kwon

Korea Institute of Machinery & Materials (South Korea)

A112	Graphene-assisted laser lift-off for clean delamination of ultra-thin polyimide film

11:35~11:50

Sumin Kang*, Jaeseung Lim, Seung Man Kim, Ah-Young Park, Seongheum Han, Jae Hak Lee, Jub-Yeob Song* Korea Institute of Machinery and Materials (South Korea)

A016	Maskless 3D fabrication based on laser-induced chemical etching

11:50~12:05

Pan Peng*, Xinqin Liu, Shiyuan Liu, Jinlong Zhu* Huazhong University of Science and Technology (China)

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ISMTII 2023
September 18 Mon.

13:50~15:10[D-2] Laser Material Processing - II
Chair: Dr. Jiyeon Choi (Korea Institute of Machinery and Materials), Dr. Soongeun Kwon (Korea Institute of Machinery and Materials)

Invited 	Laser-patterned energy storage devices integrated with wearable electronics

13:50~14:15

Sangbaek Park

Chungnam National University (South Korea)

Invited 	Advanced characterization of the active materials for lithium ion batteries using TEM techniques

14:15~14:40

to promote mechanism understanding
Hyung Cheoul Shim

Korea Institute of Machinery & Materials (South Korea)

A008	Fabrication of optical patterns using laser-induced graphene in colorless polyimide

14:40~14:55

Younggeun Lee*, Dongwook Yang, Han Ku Nam, Young-Ryul Kim, Hyogeun Han, Seunghwan Kim, Truong-Son Dinh Le,
Hongki Yoo, Hyosang Yoon, Joohyung Lee, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A026	Laser-induced graphene formation on woods for smart green electronics applications

14:55~15:10

Han Ku Nam*, Dongwook Yang, Younggeun Lee, Truong-Son Dinh Le, Young-Ryeul Kim, Tongmei Jing, Manping Wang,
Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

September 18 Mon.

16:25~17:50[D-3] Material Characterization
Chair: Prof. Seunghwoi Han (Chonnam National University), Dr. Seungman Kim (Korea Institute of Machinery and Materials)

Invited 	Nano scale physical and chemical property characterization by scanning probe techniques

16:25~16:50

Wanxin Sun

Bruker Singapore Pte Ltd. (Singapore)

A172	Characterization of the mechanical properties of amorphous NiTi thin film for stretchable
display electrodes

16:50~17:05

Ah-Young Park*, Sumin Kang, Hakyung Jeong, Jun-Yeob Song, Seungman Kim, Seongheum Han, Jae Hak Lee* Korea Institute of Machinery and Materials (South Korea)

A065	Passive near-field detection of dielectric materials near the surface phonon-polariton
wavelength

17:05~17:20

Ryoko Sakuma*, Kuan-Ting Lin, Yusuke Kajihara* The University of Tokyo (Japan)

A178	Mechanical property evaluation of a copper thin film using the surface acoustic wave
spectrometry

17:20~17:35

Yun Young Kim*, Taehyeong Kim* Chungnam National University (South Korea)

A099	Thermal measurement on biased graphene wires by measuring the thermally excitedevanescent wave

17:35~17:50

Ryoya Sugimura*, Kuan-Ting Lin, Ryoko Sakuma, Fuminobu Kimura, Yusuke Kajihara* University of Tokyo (Japan)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

September 19 Tue.

10:45~11:45[D-4] Sensors & Actuators
Chair: Prof. Sangbaek Park (Chungnam National University), Dr. Ah-Young Park (Korea Institute of Machinery and Materials)

A047	ZnO-PTFE based antimicrobial, hydrophobicity, anti-reflective display coatings, and highsensitivity touch sensor

10:45~11:00

Swathi Ippili, Venkatraju Jella, Jeong Min Lee, Jang-Su Jung, Soon-Gil Yoon** Chungnam National University (South Korea)

A009	Femtosecond-laser-induced graphene formation on textile for e-textile applications

11:00~11:15

Dongwook Yang*, Han Ku Nam, Youonggeun Lee, Young-Ryeul Kim, Le Dinh Truong Son, Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A125	An experimental analysis of multi sensor’s performance degradation in harsh driving
environment

11:15~11:30

Junseok Heo*, Byeongjun Im, Sungjae Shin, Se-Eun Ha, Seunghwoi Han* Chonnam National University (South Korea)

A124	Laser-induced Micro-LED transfer process

11:30~11:45

Jaeseung Lim, Sumin Kang, Seongheum Han, Ah-Young Park, Jae-Hak Lee, Jun-Yeob Song, Sangseon Lee, Rakibul Islam,Seungman Kim, Seunghwoi Han*
* Chonnam National University (South Korea)

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ISMTII 2023

Session E
Precision Metrology & Optical Inspection
Conference Room E4~5, COEX

September 18 Mon.

Room E5 / 10:45~12:00[E-1] Precision Metrology - IChair: Dr. Byung Jae Chun (Korea Atomic Energy Research Institute), Dr. Keunwoo Lee (LASERNGRAPN)

A022	Principle verification of grating encoder using multi diffracted light through circular opticalsystem10:45~11:00

Soki Fujimura*, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi* University of Tokyo (Japan)

A004	Measurement of gear integrated error based on improved Zernike moment

11:00~11:15

Yiming Fang*, Zhaoyao Shi* Beijing University of Technology (China)

A090	A surface encoder with an improved Z-range and reduced crosstalk errors

11:15~11:30

Yifan Hong*, Yuki Shimizu, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

A170	Absolute optical rotary encoder with multiple focusing spots and autofocusing

11:30~11:45

Hsi-Fu Shih*, Wei-Lun Lo, Hung Huang* National Chung Hsing University (Taiwan)

A086	Spectroscopic ellipsometry for ultra-thin film with sub-10 nm thickness

11:45~12:00

Honggang Gu*, Shiyuan Liu* Huazhong University of Science and Technology (China)

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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

September 18 Mon.

Room E5 / 13:50~15:05[E-2] Precision Metrology - II
Chair: Prof. Jae-Sang Hyun (Younsei University), Heesuk Jang (Agency for Defense Development)

A196	A high-SNR fiber interferometer using phase modulation for precise displacement measurement

13:50~14:05

Chen-Yu Liao, Jia-Hong Chen, Fu-Sheng Yang*, Chin-Yu Hsieh, Hsi-Hui Lin, Liang-Chia Chen
* National Taiwan University (Taiwan)

A007	Exposure-induced optical responses in UV photoresist using spectroscopic ellipsometry

14:05~14:20

Jiamin Liu*, Lei Li, Hao Jiang, Shiyuan Liu* Huazhong University of Science and Technology (China)

A033	Improving period accuracy of planar diffraction gratings fabricated in a Lloyd’s mirror exposuresystem

14:20~14:35

Shen Sitong*, Zeng Lijiang* Tsinghua University (China)

A129	Conductive carbon nanowire produced by using femtosecond laser irradiation with acetylenegas

14:35~14:50

Rakibul Islam*, Sangseon Lee, Seungsik Shin, Jaeseung Lim, Daeseop Kim, Seongwon Choi, Seunghwoi Han* Chonnam National University (South Korea)

A156	Predicting the critical dimensions of HAR TSV structures using joint training models andelectromagnetic simulation tools

14:50~15:05

Jia-Wei Li, Chong-Han Hsu, Jiao-Kai Wang, Bo-En Tsai, Yong-Jing Su, Chao-Ching Ho** National Taipei University of Technology (Taiwan)

September 19 Tue.

Room E4 / 14:00~15:25[E-3] Precision Metrology - III
Chair: Prof. Seunghwoi Han (Chonnam National Unviersity), Dr. Wanxin Sun (Bruker Singapore Pte Ltd.)

Invited 	Automated nano-metrological AFM with intelligent data preparation

14:00~14:25

Sang-Joon Cho

Park Systems (South Korea)

A077	Dual-beam laser feedback interferometer for displacement and rotation measurement

14:25~14:40

Xin Xu*, Yu Wang, Yidong Tan* Tsinghua University (China)

A190	Development of wafer align and pre-bonding system for wafer level hybrid bonding

14:40~14:55

Hakjun Lee

Korea Institute of Industrial Technology (South Korea)

A198	Roll angular displacement measurement with Polarization Interferometry

14:55~15:10

Shu-Han Chang*, Ching-Tse Hsu, Wun-Yan Chen, Ju-Yi Lee* National Central University (Taiwan)

A144	Improvement approach for accuracy of combined vision measurement based on couplingmeasurement pose optimization

15:10~15:25

Ronghui Guo*, Haihua Cui* Nanjing University of Aeronautics and Astronautics (China)

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Program Book

ISMTII 2023
September 19 Tue.

Room E4 / 15:40~16:55[E-4] Precision Metrology - IV
Chair: Dr. Sang-Joon Cho (Park Systems), Prof. Hao Jiang (Huazhong University of Science and Technology)

A039	Roughness analysis method of lateral shearing interferometry using polarization grating

15:40~15:55

Hyo Mi Park*, Luke D. Mayer, Daewook Kim, Ki-Nam Joo* Chosun University (South Korea)

A023	A study on point cloud to CAD model alignment method based on gear optical measurement

15:55~16:10

Hao Lv*, Zhaoyao Shi* Beijing University of Technology (China)

A202	High-speed 3D surface measurement with cylindrical-shaped mechanical projector

16:10~16:25

Mincheol Choi, Gaeun Kim, Jae Sang Hyun** Yonsei University (South Korea)

A100	An angle sensor based on second harmonic generation in transmission of a collimatedfemtosecond beam

16:25~16:40

Jiahui Lin*, Kuangyi Li, Zhiyang Zhang, Ryo Sato, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

A199	Analysis of through silicon via sidewall etch parameters variation using FDTD simulation

16:40~16:55

Saurav Gautam, Shih-Wen Chen, Chao-Ching Ho** National Taipei University of Technology (Taiwan)

35
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The 15th International Symposium on
Measurement Technology and Intelligent Instruments

Session F
Machine Learning & Signal Processing
Conference Room E5, COEX

September 18 Mon.

16:25~17:50[F-1] Machine Learning & Signal Processing I
Chair: Dr. Jeong Seok Oh (Korea Institute of Machinery and Materials), Prof. Liang-Chia Chen (National Taiwan University)

Invited 	Virtual reality based human-machine interface for human-AI collaboration

16:25~16:50

Huitaek Yun

Korea Advanced Institute of Science and Technology (South Korea)

A013	Efficient method for measuring 21 geometric errors and identifying key errors for three linear
axes of machine tools

16:50~17:05

Fajia Zheng*, Qibo Feng, Yuqiong Zhao, Bin Zhang, Jiakun Li, Fei Long
* Beijing Jiaotong University (China)

A059	Single-frame phase extraction for measuring geometric properties of optical components basedon deep learning

17:05~17:20

Jurim Jeon*, Yangjin Kim, Naohiko Sugita* Pusan National University (South Korea)

A054	A unified approach for simulating the volumetric errors of three-axis machine tools of all
possible configurations

17:20~17:35

Quoc-Khanh Nguyen*, Gyungho Khim, Seung-Kook Ro, Jeong Seok Oh* Korea Institute of Machinery and Materials (South Korea)

A058	Error averaging mechanism of multi-row ball bearing spindle

17:35~17:50

Shuang-shuang Zhang*, Hong-Tao Yang

* Anhui University of Science and Technology (China)

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September 19 Tue.

10:45~12:10[F-2] Machine Learning & Signal Processing II
Chair: Prof. Huitaek Yun (Korea Advanced Institute of Science and Technology), Dr. Sangwon Hyun (Korea Basic Research Institute)

Invited 	Deep learning-based stress intensity factors analysis of bi-material interface crack from10:45~11:10

photoelastic images
Dong-Wook Lee

Technology Innovation Institute (United Arab Emirates)

A049	Precise energy distribution measurement of electron source with high performance compact
lens-type energy analyzer

11:10~11:25

Ha Rim Lee*, Junhyeok Hwang, Takashi Ogawa, Haewon Jung, Dal-Jae Yun, Jisoo Kim, Sangsun Lee, In-Yong Park
* Korea Research Institute of Standards and Science (South Korea)

A062	Instance segmentation using mask R-CNN for object extraction and background removal in acomplex photogrammetry system

11:25~11:40

Mingda Harvey Yang*, Adam Thompson, Sofia Catalucci, David T Branson III, Samanta Piano* University of Nottingham (United Kingdom)A082	Wavefront sensing and Control using an approximate point-spread function model in thesensorless adaptive optics

11:40~11:55

Jinsung Kim, Hwan Hur*

* Korea Basic Science Institute (South Korea)

A043	Measurement of nano-thickness distribution of lubricant film in tool-work interface using
fluorescence

11:55~12:10

Motoya Yoshikawa*, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, Tatsuya Sugihara* The University of Tokyo (Japan)

September 19 Tue.

14:00~15:25[F-3] Machine Learning & Signal Processing III
Chair: Prof. Yangjin Kim (Pusan National University)

Invited 	Universal denoising method for boosting the throughput of semiconductor image metrology

14:00~14:25

Ilkoo Kim

Gauss Labs (USA)A098	The application of neural network for angle measurement based on second harmonic generation

14:25~14:40

Zhiyang Zhang*, Kuangyi Li, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao* Tohoku University (Japan)

A149	Anomaly detection of underground transmission-line connectors through multiscale mask DCNN
and statistical image enhancement

14:40~14:55

Min Gwan Kim*, Siheon Jeong, Seok-Tae Kim, Ki-Yong Oh* Hanyang University (South Korea)

A155	Real-time dynamic intelligent image recognition and tracking system for rockfall disasters

14:55~15:10

Yu-Wei Lin, Chu-Fu Chiu, Bo-En Tsai, Li-Hsien Chen, Chao-Ching Ho** National Taipei University of Technology (Taiwan)

A162	Deep learning-based 3D printing metal powder classification

15:10~15:25

Jide Obeyanji*, Dong-Wook Lee, Prabakaran Balasubramanian, Heungjo An, Tae Yeon Kim, Sung Mun Lee* Technology Innovation Institute (United Arab Emirates)

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September 19 Tue.

15:40~16:50[F-4] Machine Learning & Signal Processing IV
Chair: Dr. In-Yong Park (Korea Research Institute of Standards and Science)

Invited 	Designing and exploring super functional materials and devices using evolutionary and deep

15:40~16:05

learning methods
In Ho Lee

Korea Research Institute of Standards and Science (South Korea)

A195	An AI-powered diffraction imaging approach for optical critical dimension metrology

16:05~16:20

Fu-Sheng Yang, Yen-Hung Hung*, Min-Ru Wu, Zih-Ying Fu, Chen-Yu Liao, Liang-Chia Chen
* National Taiwan University (Taiwan)

A161	Deep learning based identifying impact location on plate using wavelet transform

16:20~16:35

Jide Obeyanji*, Dong-Wook Lee, Prabakaran Balasubramanian, Heungjo An, Tae Yeon Kim, Sung Mun Lee* Technology Innovation Institute (United Arab Emirates)

A084	Super-resolution imaging of sub-diffraction-limited pattern with superlens based on deeplearning

16:35~16:50

Yizhao Guan*, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi* The University of Tokyo (Japan)

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Poster Session
September 18 Mon.

Conference Room E (Lobby) / 15:15~16:25

Intelligent Measurement and Instrumentation
A029	Creation and utilization of straightness standard due to reciprocal measurement of linear stage
Yusuke SAKAUCHI*, Ryoshu FURUTANI* Tokyo Denki University (Japan)

A064	A method for error estimation and alignment feedback of heterodyne interferometry based on
single PMF
Yibin Qian*, Jiakun Li, Fajia Zheng, Fei Long, Qibo Feng
* Beijing Jiaotong University (China)

A075	High-precision roll measurement method based on laser polarization
Fei Long*, Fajia Zheng, Yibin Qian, Jiakun Li, Qibo Feng
* Beijing Jiaotong university (China)

A080	Resonant mirror based laser direct lithography instrument
Junhee Jo*, Hyungjun Lim, Seokyoung Ji, Wonseok Chang* Korea Institute of Machinery and Materials (South Korea)

A087	Real-time 3D surface reconstruction of deflectometry using deep learning
In-Kyu Park*, Young-Sik Ghim, Hyug-Gyo Rhee

* University of Science and Technology (South Korea)

A094	Photometric stereo for anisotropic reflectance with tangent estimation
Xi Wang*, ZhenXiong Jian, MingJun Ren* Shanghai Jiao Tong University (China)

A121	Slopes-based wavefront reconstruction method in Cartesian grid geometry
Vu Hai Linh Nguyen*, Hyug-Gyo Rhee, Young-Sik Ghim
* University of Science and Technology (South Korea)

A143	Phase plate fabrication process to simulate the turbulence effects on an optical imaging system
in Korean atmospheric circumstances
Han-gyol Oh, Pilseong Kang, Jaehyun Lee, Hyug-gyo Rhee, Young-sik Ghim
* Korea Research Institute of Standards and Science (South Korea)

A152	Fatigue life improvement of rear axle gearbox in agricultural vehicles by optimizing gear macrogeometry
Jae-Hyun Kim*, Dong-Joo Moon, Dongu Im, Tae Ick Moon, Seung-Hwa Yu, Young-Jun Park
* Seoul National University (South Korea)

A169	Fast infrared small target detection based on improved weighted global contrast measurement
Yixuan Zhang, Hong Chang*, Yuxiang Feng, Ye Tang

* Beijing Aerospace Institute for Metrology and Measurement Technology (China)

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In-Process and On-Line Measurement
A140	An on-line surface quality detection method for wide cold-rolled strip based on normalizing flow
Pan Jiang, Zhenying Xu*, Liling Han, Yun Wang, Ziqian Wu* Jiangsu University (China)

A148	Management system using docker and robot middleware framework
Min Cheol Park*, Seung-Hun Kim* Korea Electronics Technology Institute (South Korea)

A163	Actual process synchronized simulation of deposited geometry in DED process
Segon Heo*, Min-Kyo Jung, Taeho Ha* Korea Institute of Machinery and Materials (South Korea)

A177	Measurement technology for quality improvement in 3D printing processes
Jiyong Park

Korea Institute of Industrial Technology (South Korea)

A187	Extrusion quality monitoring for screw-based 3D printer using computer visionSong Hyeon Ju, Sang Il Kim, Jungsoo Nam*

* Korea Institute of Industrial Technology (South Korea)

A189	Image-based monitoring approach for an in-situ analysis of the vapour plume behaviour of PBFLB/M manufactured titanium alloys
E. Uhlmann, J. Polte, M. Bösing** Fraunhofer Institute for Production Systems and Design Technology (Germany)

Machine Tool Metrology
A060	Determination of candidate temperature points for thermal error modeling of five-axis machine
tools based on finite element analysis
Lei Cao*, Gyungho Khim, Jeong Seok Oh, Seung-Kook Ro, Chang-Kyu Song* Korea Institute of Machinery and Materials (South Korea)

A127	Diagnosis of high-speed ball-bearing spindles by data mining of dynamic responses from various
rotating elements
Jiwan Kang*, Changhyuk Lim, Heeyoung Maeng, Keun Park

* Seoul National University of Science and Technology (South Korea)

Material Characterization
A019	Study on microstructure, strengthening mechanism and wear resistance of fe-based alloy
cladding layer reinforced with TiC by laser cladding
L.J. Cui*, P.X. WANG, S.R. Guo, J.H. ZHANG, Z. CHEN, W.D. ZHOU, G.M. LIU, W.L. LI, D.F. WANG, Y.M. TIAN
* Zhongyuan University of Technology (China)

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Micro/Nano-Metrology
A003

Laser self-mixing grating interferometry for multi-dimensional displacement sensing
Dongmei Guo*, Zhanwu Xie, Wei Xia, Ming Wang
* Nanjing Normal University (China)

A024	Laser induced silver ink-doping porous graphene based on natural wood for sensitive SERS
detection
Tongmei Jing*, Manping Wang, Han Ku Nam ,Truong-Son Dinh Le, Rongke Gao, Seung-Woo Kim, Young-Jin Kim,
Liandong Yu* China University of Petroleum (UPC) (China)

A027	Influence of laser fabricating parameters on the surface hydrophobicity of laser-induced
graphene on wood

Manping Wang*, Tongmei Jing, Han Ku Nam, Truong-Son Dinh Le, Yang Lu, Seung-Woo Kim, Liandong Yu, Young-Jin Kim* China University of Petroleum (UPC) (China)

A069	Current modulated self-mixing interference in VCSELs for vibration measurement and sensing:theory and applications
Ming Wang

Nanjing Normal University (China)

A070	Parametric examination of differential evolution algorithm for form error evaluation of nonaxisymmetric aspheric surface based on Taguchi method
Hsin-Tung Lin, Kuo-Ming Chang, Wang-Long Li, Yung-Tien Liu*
* National Kaohsiung University of Science and Technology (Taiwan)

A110	Deterministic nanoantenna array design for stable plasmon-enhanced harmonic generation
Tae-In Jeong*, Seungchul Kim* Pusan National University (South Korea)

A153	High-resolution repairing process of metal patterns using laser ablation for fine-patterned
advanced packaging
Hakyung Jeong*, Seung Man Kim, Jae Hak Lee, Jun-Yeob Song, Seongheum Han, Ah-Young Park, Sumin Kang,
Hayoung Youn
* Korea Institute of Machinery and Materials (South Korea)

A164	Statistical analysis to improve sub-nano scale surface roughness reliability of Si mirrors foraccelerators
Hwanjin Choi*, Wonkyun Lee, Mincheol Kim, Minwoo Jeon, Woo-Jong Yeo, Sangwon Hyun
* Korea Basic Science Institute (South Korea)

A180

A study on SiC wafer thinning process using femtosecond pulse laser

Hayoung Youn*, Seungman Kim, Sumin Kang, Jae Seung Lim, Jae-Hak Lee, Seongheum Han, Ah-Young Park,
Jun-Yeob Song* University of Science and Technology (South Korea)

A184	Work coordinate setup in ultra-precision machine tool using electron tunneling
Sangjin Maeng*, Byungmin Kim* Hongik University (South Korea)

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Optical Metrology and Inspection
A011	Measurement of the axial displacement error of a segmented mirror using a Fizeau
interferometer
Ha-Lim Jang*, Jae-Hyuck Choi, Jae-Bong Song, Hagyong Kihm
* University of Science and Technology (South Korea)

A030	Single shot radial constant shearing interferometry with axicon lenes using polarization camera
Hiroyuki Akiyama*, Ryoshu Furutani* Tokyo Denki University (Japan)

A031	A study of common path length and angle measurement interferometer
Kota Ishii*, Ryoshu Furutani* Tokyo Denki University (Japan)

A036	Optical sectioning structured illumination microscopy with improved lateral resolution
Jong-Kyu Park*, Ki-Nam Joo* Chosun University (South Korea)

A038	Multiplexed optical spectrometer with high resolution in the wide spectral range
Jin Hee Cho*, Ki-Nam Joo* Chosun University (South Korea)

A050	Development of a table-top surface inspection system based on phase-measuring deflectometry
Sangwon Hyun*, Kyesung Lee* Korea Basic Science Institute (South Korea)

A053

Characterization of polarization structured illumination microscopy
Minseo Cho*, Ki-Nam Joo* Chosun University (South Korea)

A055	Enhancement of third-order harmonic generation using upconversion nanoparticle coated on
the borosilicate glass
Taewon Kim*, Won-Woo Noh, Seungjai Won, Murad Abualrejal, Geon Dae Kim, Donghwan Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A057	Measurement and analysis of atmospheric effects for free-space optical communication
Jaehyeon Lim*, Dong Il Lee, Shinhyung Kim, Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A068	Polarized dual low-coherence scanning interferometry using a polarization camera and the dual
low coherence characteristics
Seon-Ile Seo*, Seong-Wook Jang, Ki-Nam Joo* Chosun University (South Korea)

A088	Effect of actuator position on parasitic motion reduction in tip-tilt-piston stage guided by flexuremechanism
Hyeeun Yun*, Minseok Kim, Joohyung Lee, Dahoon Ahn* Seoul National University of Science and Technology (South Korea)

A108	In vivo moiré sensing technology for quantitative evaluation of bio-materials
Geehong Kim*, Soongeun Kwon, Semin Kim, Won-Gun Koh* Korea Institute of Machinery and Materials (South Korea)

A109	Chromatic confocal sensor based on a geometric phase lens
Min Kwan Song*, Ki-Nam Joo* Chosun University (South Korea)

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A135	The development of a high-speed linear stage straightness measurement system using theindustrial camera
Chun-Jen Chen*, Yi-Hung Yang
* National Formosa University (Taiwan)

A145	Fourier transform spectrometer based on broadband infrared light source using supercontinuum
generation method
Jungyoon Kim*, Woojeong Lee, Joohyung Lee* Seoul National University of Science and Technology (South Korea)

A146	Relative MTF measurement method for push-broom hyperspectral imager
Tri Nguyen*, Huy Vu, Joohyung Lee* Seoul National University of Science and Technology (South Korea)

A147	High-resolution hyperspectral imaging payload for small-satellite based on a dual sensing
Huy Vu*, Van Tri Nguyen, Dea-soo Oh, Sang-jun Seo, Joohyung Lee* Seoul National University of Science and Technology (South Korea)

A159	Accurate measurement of micro-gap in roll-to-roll equipment using optical diffraction patterns
Hwijun Koo*, Jinsu Choi, Dongwoo Kang ,Seung-Hyun Lee, Hongki Yoo* Korea Advanced Institute of Science and Technology (South Korea)

Sensors and Actuators
A020	Study on the influence of cycloidal gear pin tooth wear on transmission error of precision
planetary cycloidal reducer
Hang Xu*, Xianxing Liu, Chenzhou Wei, Yuanchun He, Guiping Xie, Yaoting Wu* Henan University (China)

A063	Design and performance analysis of a MEMS-based LiDAR by range equation
Heesuk Jang*, Hajun Song, Hansol Jang, Hae Seog Koh, Taehyun Yoon
* Agency for Defense Development (South Korea)

A083	Development of wireless communications system to collect foot pressure data generated during
gait
Kyeong-Jun Seo*, Junhyeok Ham, Ji-Eun Cho ,Hogene Kim, Jung Hwan Kim* National Rehabilitation Center (South Korea)

A089	Fault analysis of transformer using tunable infrared gas sensors
Gun-Ho Lee, SeungHwan Yi** Korea National University of Transportation (South Korea)

A092	Wearable colorimetric sweat pH sensor-based smart textile for cystic fibrosis monitoring

Ji-Hwan Ha*, Junseong Ahn, Yongrok Jeong, Byeongmin Kang, Sohee Jeon, Soonhyong Hwang, Inkyu Park, Jun-Ho Jeong* Korea Institute of Machinery and Materials (South Korea)

A093	Development of piezo-transmittive mechanical metamaterial for self-powered strain sensor
Junseong Ahn*, Jimin Gu, Ji-Hwan Ha ,Soon Hyoung Hwang, Sohee Jeon, Inkyu Park, Jun-Ho Jeong* Korea Institute of Machinery and Materials (South Korea)

A113	Biomimetic virus-based gas sensor measured with plasmon-assisted photothermoelectric effectSehyeon Kim*, San Kim, Taein Jeong, Seungchul Kim* Pusan National University (South Korea)

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A123	Ultra-sensitive gas sensor of nanobiomaterials using convolution neural networks based on
hyperspectral analysis
Eunji Choi*, Tae-In Jeong, Seungchul Kim* Pusan National University (South Korea)

A138	Fabrication of nanohole arrays using a nano-printer for extraordinary optical transmission
Eunju Yang*, San Kim, Seungchul Kim* Pusan National University (South Korea)

A141	Ion beam figuring process for ultrafine precision optical components
Seungsik Shin*, Yeon Hwang, Seunghwoi Han* Chonnam National University (South Korea)

Signal Processing and Machine Learning
A118	Advancing optical coherence tomography image quality through interference fringe-leveraged
deep learning
Woojin Lee*, Hyeong Soo Nam, Jae Yeon Seok ,Wang-Yuhl Oh, Jin Won Kim, Hongki Yoo* Korea Advanced Institute of Science and Technology (South Korea)

A132	Measurement and interpretation of ionization properties of CxFy molecules through quadrupole
mass spectrometry
Mi-Young Song*, Dae-Chul Kim, Nidhi Shinha, Sanghyeok Park
* Korea Institute of Fusion Energy (South Korea)

A139	Unsupervised learning-based anomaly detection for high-speed non-destructive industrial
inspection using multi-digital X-ray tubes
Sunghoon Choi*, Jin-Woo Jeong, Jae-Woo Kim, Jun-Tae Kang, Sora Park, Yoon-Ho Song* Electronics and Telecommunications Research Institute (South Korea)

A151	Real-time compensation for thermal error reduction in diamond turning based on temperaturemonitoring and neural network prediction
Woo-Jong Yeo*, Hwan-Jin Choi, Minwoo Jeon, Mincheol Kim, Sangwon Hyun, I Jong Kim, Min-Gab Bog, Young-Jae Kim,
Wonkyun Lee* Korea Basic Science Institute (South Korea)

A173	Use case of image segmentation and machine learning for characterizing nanoparticles inscanning electron microscope images
Byong Chon Park*, Min Jeong Kwak, In Yong Park

* Korea Research Institute of Standards and Science (South Korea)

A194	Using genetic algorithms for geometric calibrations of X-ray computed tomography equipment
Chia-Hung Liao, Shih-Chieh Lin** National Tsing Hua University (Taiwan)

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ISMTII 2023
Frequency Comb: Fundamentals & Applications
A037	Study on length measurement method using optical frequency comb
Keito Nagata*, Nobukazu Ishii, Ryoshu Furutani* Tokyo Denki University (Japan)

A073	Development of frequency comb-based free-space optical communication system withcompensation for atmospheric effects
Shinhyung Kim*, Dong Il Lee, Jaehyeon Lim, Seung-Woo Kim, Young-Jin Kim* Korea Advanced Institute of Science and Technology (South Korea)

A117	Chip-scale flexible materials enable highly-enhanced acoustic phase modulation for direct
frequency comb spectroscopy
San Kim*, Tae-In Jeong, Sehyeon Kim, Young-Jin Kim, Seungchul Kim* Pusan National University (South Korea)

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General Information
Registration Fee
Category

Early Registration

Late & On-Site Registration

Date

July 30, 2023

Regular

USD 600 / KRW 720,000

USD 700 / KRW 840,000

Student

USD 300 / KRW 360,000

USD 400 / KRW 480,000
USD 100 / KRW 120,000

Banquet* ‘Student Registration’ DOSE NOT include ‘Banquet’Symposium Registration Includes
RegularStudent

Access to oral/poster sessions

Access to oral/poster sessions

Program Book

e-Proceedings (USB)

Coffee break

LunchesBanquetProgram Book

e-Proceedings (USB)

Coffee break

Lunches

Registration desk at the lobby of Hall E, COEX but 402 (4F) on Sep. 17 (Sun).
● Early-bird : Inform the name of participants to Registration desk and Get the Name tag and symposium KIT.
● On-Site : Available at registration desk. (Credit card only)● Receipt : Can download and Print out at http://www.ismtii2023.org after log-in. Also you can have theconfirmation of attendance attached with name tag.
● Symposium kit. (Backpack, usb memory for symposium proceeding, program book, prepaid card for lunch)●

Guidelines for Oral Presentation
Please bring your presentation file(PPT format) at your USB memory, and upload the lap-top computer at thesession room at least 10 mins before. You can get the help from assistant from staff of ISMTII 2023.
● Keynote speakers will be given 30 mins, including Q&A.
● Invited speakers will be given 25 mins, including Q&A.
● Regular oral speakers will be given 15 mins, including Q&A.
●

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Guidelines for Poster Presentation
Size of Presentation : Max A0 (841 mm × 1189 mm)
Poster presenter has to be present in front of her or his own poster stand during poster session with name tag.
● Each presenter will be provided 1(one) poster board with presenter's No.
● Posters can be installed from 10:30 am in the morning on 18 (Mon), September, 2023.
●●

ICMI Member Meeting
Date & Time

Place

September 17 (Sun.) / 19:00

Hall E, E4 Conference RoomAwardsBest Paper Awards will be presented during ‘Banquet’ for ISMTII 2023.

Lunch
Date & Time

Place

September 18 (Mon.) ~ 19 (Tue.) / 12:10~13:50

Restaurants in anyplaces

Please bring your prepaid card (KRW 50,000) provided at your registration. Please keep your remaining amountwhen you use it. You can use this prepaid card for other purpose, for example, drinking or buying some goods
up to the total amount.
● Restaurants in COEX (https://www.starfield.co.kr/coexmall/cafeDining/restaurant.do)‘You can change the language from Korean to English at the bottom of the website’●47
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The 15th International Symposium on
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Symposium Venue

Since opening in March of 1979, COEX has provided
a global exchange platform through exhibitions andinternational conferences and has become the MICE
business hub of Asia and the greatest exhibition venue
and tourist attraction with a range of infrastructures for
global business.
2

The Coex Center is comprised of four stories above ground with a total of 36,007 m of exhibition space and a2
floor area of 460,000 m . Four specialized exhibition halls can be partitioned into a total of 12 separate rooms,
and include a convention hall with space for up to 7,000 people. The Coex Center also boasts 54 meeting rooms
and office space equipped with state-of-the-art facilities and a cutting edge building management system.
Coex has evolved into a leading culture-business platform, propelled by the opening of the new Coex Mall in2014 and SM Town in 2015, and the designation of Gangnam as a ‘Special Tourist Zone’ dedicated to the MICE
industry.

GLAD
GangnamLine 2 Samsung Station

SM TOWN

Hyundai Department
Store Duty-Free
City Airport

Trade Tower

Hyundai
I-Park Tower

ASEM Tower

Oakwood Premier HotelInterContinental
Seoul COEX

Line 9 Bongeunsa Station

COEX, 513, Yeongdong-daero, Gangnam-gu, Seoul 06164 South Korea
Tel. 02 6000 0114 / Site. www.coex.co.kr

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L7 Lotte Gangnam

Seolleung Royal Tomb andJeongneung Royal Tomb
(World Heritage)ISMTII 2023
Floor Map (1F

4F

3F

4F)

ISMTII
2023

E/M

Rm. 402 : Welcome Reception●
E/M : Elevator / Moving Stair
●

3F
E/M

Conference Room E : ISMTII 2023●
M : Moving Stair●
E/M : Elevator / Moving Stair
●

1F
●
●

ISMTII
2023

M

SOUTH GATE 2

M : Moving Stair
E/M : Elevator / Moving Stair

E/M

M

EAST GATE

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The 15th International Symposium on
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Floor Map (3F, Conference Room E)

Room E4

Photo Zone

Meeting
Room

Room E3
Room E5
Room E2

Self
Coffee

VIP
Room

Room E1
Status Board Registration Desk
Photo Zone

Lobby

3F
●

Lobby

: Registration (September 18 (Mon.) - 19 (Tue.))
Poster Presentation (September 18 (Mon.))●Room E1~5 : Opening Ceremony
Keynote Session
Oral Presentation
ICMI Member Meeting

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ISMTII 2023
Welcome Reception

Room 402

4F●

Room 402: Welcome Reception
Registration (September 17 (Sun.))51
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The 15th International Symposium on
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BanquetDate & Time

Destination

September 19 (Tue) / 17:45~21:00

Cheonggyesan Yettgol Fortress Restaurant

Itinerary●

17:45 : Meet up at the bus stop near the main entrance on the 1st floor of COEX (Symposium venue)(North gate, photo below).

* The bus will depart at 17:45 sharp, so please make sure to arrive at the meeting spot before then. (Those who arrive late will
not be able to take the bus to the banquet.)

18:30 : Arrive at Cheonggyesan Yettgol Fortress Restaurant.
18:30~20:30 : Banquet● 21:00 : Return to the venue, COEX (Tentative).
●●* Please note that due to possible traffic congestion, there may be changes in the travel times.

Cheonggyesan Yettgol Fortress Restaurant is a charming dining establishment located within the historic site ofCheonggyesan Yettgol Fortress in South Korea. This restaurant offers a unique culinary experience that combines traditional
Korean cuisine with a touch of history.
The restaurant is known for its warm and inviting ambiance, with its interior reflecting the traditional architectural style of
the Joseon Dynasty. The decor features wooden accents, elegant furnishings, and cultural artifacts, creating a delightfulatmosphere that transports guests back in time.
The menu at Cheonggyesan Yettgol Fortress Restaurant showcases a variety of authentic Korean dishes, prepared withfresh and locally sourced ingredients. From classic favorites to regional specialties, the restaurant offers a diverse selection
to cater to every palate. Whether you're in the mood for hearty stews, grilled meats, or flavorful vegetarian options, themenu has something for everyone.
The combination of delectable cuisine and historic charm makes Cheonggyesan Yettgol Fortress Restaurant a popular
destination for locals and tourists alike, seeking a memorable dining experience immersed in Korean culture.

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Technical Tour
Date & Time

Destination

Maximum Participants

September 20 (Wed) / 08:30~13:00

The KITECH Research Institute ofAdvanced Manufacturing & Materials
Technology in Incheon

40

Itinerary●

08:30 : Meet up at the bus stop near the main entrance on the 1st floor of COEX (Symposium venue)(North gate / The meeting location for the departure is the same with the banquet).
* The bus will depart at 9:00 am sharp, so please make sure to arrive at the meeting spot before then. (Those who arrive late
will not be able to take the bus to the tour.)

10:20 : Arrive at KITECH.
● 10:30 : Lab Tour and Eco-Mg demonstration.
● 11:40 : Depart from KITECH.
● 13:00 : Return to the venue, COEX (Tentative).
●* Please note that due to possible traffic congestion, there may be changes in the travel times.

Korea Institute of Industrial Technology (KITECH) was founded in 1989 to support the industry sector, particularly
SMEs, as an application-oriented research institute, striving to lead in its field. KITECH focuses on three key researchareas: advanced manufacturing technology, industrial technology convergence, and sustainable manufacturing systemtechnology. With the goal of enhancing field-oriented support for SMEs, the institute operates three research institutes andseven regional divisions.
The Research Institute of Advanced Manufacturing & Materials Technology in Incheon is a prominent division within
KITECH. It plays a crucial role in developing and disseminating original root technologies, including Casting, Molding,Forging, Welding, Heat treatment, and Surface treatment. Moreover, the institute provides essential support to companies
by granting them access to the latest research findings and cutting-edge technologies.

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Culture Tour
Date & Time

Destination

Maximum Participants

September 20 (Wed) / 09:00~13:00

Gyeongbokgung Palace

40

Itinerary●

09:00 : Meet up at the bus stop near the main entrance on the 1st floor of COEX (Symposium venue)(North gate / The meeting location for the departure is the same with the banquet).
* The bus will depart at 9:30 am sharp, so please make sure to arrive at the meeting spot before then. (Those who arrive late
will not be able to take the bus to the tour.)●

10:30 : Arrive at Gyeongbokgung Palace.

10:40 : Ticketing at Gwanghwamun.
11:00 : Palace Tour with an English-speaking guide.
● 12:10 : Depart from Gyeongbokgung Palace.
● 13:00 : Return to the venue, COEX (Tentative).
●●* Please note that due to possible traffic congestion, there may be changes in the travel times.

Built in 1395, Gyeongbokgung Palace is commonly referred to as the Northern Palace because its location is furthest
north when compared to the neighboring palaces of Changdeokgung (Eastern Palace) and Gyeonghuigung (Western
Palace). Gyeongbokgung Palace is arguably the most beautiful, and remains the largest of all five palaces. The premises
were once destroyed by fire during the Imjin War (1592-1598). However, all of the palace buildings were later restored
under the leadership of Heungseondaewongun during the reign of King Gojong (1852-1919).
Remarkably, the most representative edifices of the Joseon dynasty, Gyeonghoeru Pavilion and the pond around
Hyangwonjeong Pavilion have remained relatively intact. The raised dias and stone markers of Geunjeongjeon showcase
the representative art style of their time. The National Palace Museum of Korea is located outside of Heungnyemun Gate,and the National Folk Museum is located on the eastern side of Hyangwonjeong Pavillion.

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Program Book

ISMTII 2023

55
Program Book

The 15th International Symposium on
Measurement Technology and Intelligent Instruments

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Program Book

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The 15th International Symposium on
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ISMTII 2023