Precision Motion Control
2022 Catalog Addendum

Linear Stages

Rotation Stages

Actuators

Hexapods

Controllers

Air Bearing Stages

Cover - Motion Catalog Addendum 2022.indd 3

1/12/22 3:39 PM

Precision Motion Control

MOTORIZEDLINEAR STAGES

Mid-Travel Steel Linear Stages

1•• 100kg central and 10 kg axial load capacity•• Ball screw drive for high dynamics and long
lifetime•• Plug and Play - ESP compatible

MOTORIZEDLINEAR ACTUATORSHEXAPODS

MTN-BLHS’s are reliable, all-steel construction stages with excellent stiffness, load capacity and thermal stability.
They are ideal for applications that require moving heavy loads at high-speeds with very fine repeatability. Available
in 100, 200 and 300 mm travel versions, the MTN-BLHS stages can bear up to 100 kg centered load, when
mounted horizontally. The linear guides guarantee smooth and accurate motion trajectory, while the non migratingball cage design prevents from drift. The MTN-BLHS is much faster than MTN-CC and MTN-PP series andprovides same 10 kg axial load capacity in both directions due to ball screw drive mechanism (note, that this is theholding force at power off).

MOTORIZEDROTATION STAGES•• Non-migrating ball cage design for reliable
performance

MOTORIZEDVERTICAL STAGES•• All steel construction for high stiffness andthermal stability

CONTROLLERS
AND DRIVERS
MOTORIZEDOPTICAL MOUNTSBEAMMANAGEMENTSPECIAL
COLLECTIONS

www.newport.com

Precision Motion Control

MOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES

MOTORIZEDVERTICAL STAGES

MOTORIZEDLINEAR STAGES

2

Specifications
Travel Range (mm)

100

200

MIM (µm)
Uni-directional Repeatability (µm), Typical±0.2 (±0.3)(Guaranteed) (1)Bi-directional Repeatability (µm) Typical±0.3 (±0.5)

HEXAPODS(Guaranteed) (1)Accuracy (µm), Typical (Guaranteed) (1)±2.0 (±4.0)

Maximum Speed (mm/s)

250

Pitch, Typical (Guaranteed) (1) (2) (µrad) (3)±10 (±20)±20 (±40)±30 (±60)

Yaw (µrad) , Typical (Guaranteed)±10 (±17)±17 (±35)±30 (±53)(3)

CONTROLLERS
AND DRIVERS

300

0.3

(1) (2)

1) For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology& Standards” at www.newport.com.
2) Over 100 mm travel.
3) To obtain arcsec units, divide mrad value by 4.8.

BEAM
MANAGEMENTMOTORIZEDOPTICAL MOUNTS

Load Characteristics and Stiffness
Cz, Normal centered load capacity on bearings

1000 N+Cx, Axial load capacity

200 N-Cx, Inverse axial load capacity

200 N

Holding force at power off

100N

kx, Compliance in roll

4 µrad/Nmky, Compliance in pitch

6 µrad/Nm

D

Z
X

kαy

x

Cz

kα

+ Cx

– Cx

kz, Compliance in yaw

5 µrad/Nm

Q, Off-center load

Q <Cz ÷ (1 + D/100)

SPECIAL
COLLECTIONS

where: D = Cantilever distance in mm

www.newport.com

Q

YPrecision Motion Control

MOTORIZEDLINEAR STAGES

1.57
(40)

6.40
(162.5)

MOTORIZEDVERTICAL STAGES

6.30
(160)

9 HOLES M6 THD
DEPTH: .39 (10), .98 (25) SPACING
4 HOLES M6 THD, ON SQR 2.48 (63)
C’BORED FOR CAPTIVE SCREWS

4 HOLES M4 THD
DEPTH: .31 (8), ON SQR 1.34 (34)

2.28
(58)

3

2.33
(59.2)SUB-D25M CONNECTOR

L2

2 HOLES ø.41 (10.5)
ACCESS FOR MOUNTINGTO BODY ON SQR 2.48 (63)

MODEL SHOWN: MTN200BLHS

MOTORIZEDROTATION STAGES

2 HOLES ø.41 (10.5)
ACCESS FOR MOUNTINGTO BODY ON SQR 1.98 (50.4)

2.05
(52)

DIMENSIONS IN INCHES (AND MILLIMETERS)BOTH SIDES:
HOLE M5 THD, DEPTH: .39 (10)FOR GROUNDING

MOTORIZEDLINEAR ACTUATORSBOTH SIDES:
4 HOLES M6 THD, DEPTH: .31 (8)FOR ACCESSORIES AND HANDLINGSQR 3.54
(90)

.79
(20)

.31 (8)
2.36
(60)

B

B

L1

7.07 (179.5)

HEXAPODS

2.66(67.5)A

HOLES ø.41 (10.5)
ACCESS FOR CAPTIVE SCREWSTO CARRIAGE ON SQR 2.48 (63)

4 HOLES ø.30 (7.5) FOR MOUNTINGON SQR 1.97 (50) AND SQR 2.00 (50.8)
4 HOLES M6 THD
DEPTH: .39 (10), ON SQR 5.04 (128)

4 HOLES ø.30 (7.5)
FOR MOUNTING ON SQR 2.48 (63)

CONTROLLERS
AND DRIVERS

1.97
(50)

2.00
(50.8)MOTORIZEDOPTICAL MOUNTS

4 HOLESFOR M6 SCREWS

4 HOLESFOR 1/4-20 SCREWS

C
D

A
B
C
D
L1
L2
A
B
C
D
L1
2.95 (75).20 (56)––
11.81 (300) 5.94 (151)
2.95 (75)2.20 (56)––11.81 (300)
MTN100BLHS
MTN200BLHS
3.54 (90) 4.69 (119) 3.94 (100) 6.00 (152.4) 15.75 (400) 7.91 (201)3.94(100)19.696.00
15.75 (400)
MTN200BLHS
MTN300BLHS
3.54 (90) 3.54
6.14(90)(156) 4.69
9.84 (119)(250) 8.00
(203.2)(500)(152.4)
9.88 (251)

MTN300BLHS

3.54 (90)6.14 (156)8.00 (203.2)

9.84 (250)

19.69 (500)L2
5.94 (151)
7.91 (201)BEAM
MANAGEMENT

MODEL
Model
MTN100BLHS

9.88 (251)SPECIAL
COLLECTIONS

www.newport.com

Precision Motion Control

Recommended Controllers/Drivers

MODEL

DESCRIPTION

XPS-Dx

1- to 8-axis universal high-performance motion controller/driver

XPS-RLDx

1 to 4 axis universal motion controller

XPS-DRV11BL

Digital driver card for MTN brushless motor

Ordering Information
MODEL

DESCRIPTIONMTN100BLHS

100 mm Travel Steel Linear Stage, Brushless Motor

MTN200BLHS

200 mm Travel Steel Linear Stage, Brushless Motor

MTN300BLHS

300 mm Travel Steel Linear Stage, Brushless Motor

Accessories

Use EQ160 right-angle bracket forvertical mounting configurations.

MODEL

DESCRIPTION

EQ160

Right-Angle Bracket

MTN-BP

Base Plate

MTN-TPTop Plate with Imperial Hole Pattern

M-CAP-M61

Captive Screws for MTN XY Mounting

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERS

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES

MOTORIZEDVERTICAL STAGES

MOTORIZEDLINEAR STAGES

4

www.newport.com

Precision Motion Control

5

MOTORIZEDLINEAR STAGESMLT Low Profile Cross Roller
Bearing Linear Stage

MOTORIZEDVERTICAL STAGES•• Compact, low profile, high repeatability
design•• Stiff, FEM-optimized aluminum bodyto prevent thermal bending effects•• Precision crossed roller bearing slides
for accurate linear motion

MOTORIZEDROTATION STAGES•• Easy to build multi-axis configuration•• Plug and Play - ESP compatible

MOTORIZEDLINEAR ACTUATORS

Specifications
MIM, linear(4) (5)

MLT50

MLT100

25

50

100

MLT200 MLT250
200

250

(µm)

Accuracy, guaranteed (1) (2) (±μm)

255025, 25, 25

50,50,50

0.6

0.3

0.6

0.5

0.5

0.5

1

2

0.6

1.25

2.5

3

0.3

0.75

0.75

0.75

0.5

0.5

0.5

0.5

(N)

3

Drag force (N)0.5

Load capacity stage horizontal (N)

50

70

70

70

70

Straightness, guaranteed (1) (2) (±μm)

1

2

3

5

5

5
1

2

1

2

3

5

10

1

2

1

2

50

75

75

125

150

50

75

50

75

Pitch, guaranteed (1) (2) (±μm) (3)

50

75

75

150

200

50

75

50

75

Flatness, guaranteed

MTBF (h) 24% load, 30% duty cycle

20,000www.newport.com

SPECIAL
COLLECTIONS

1) For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com
2) Middle 80% of travel3) To obtain arcsec units, divide µrad value by 4.84) Requires operation in a controlled environment to achieve specification
5) With XPS-DRV11, maximum value is driver dependent. Contact Newport for additional information
6) All the specs are per axis

BEAM
MANAGEMENT) (±μm)Yaw, guaranteed (1) (2) (4) (±μm) (3)(1) (2

MOTORIZEDOPTICAL MOUNTS

Max. force (cont.)

MLT50-XYZL (6)0.3(no load) (m/s)

Maximum acceleration (5) (no load) (G)(5)

MLT25-XYZL/R (6)0.15

guaranteed (1) (2) (±μm)

Maximum speed

MLT50-Z(6)0.005

Bi-directional repeatability,(5)

MLT25-Z(6)CONTROLLERS
AND DRIVERS

Travel Range (mm)MLT25

HEXAPODSThe MLT stage family is a compact, low profile, high precision linear stage series that connects ultra-precisionperformance with compactness. Each MLT stage is constructed with high strength and stable aluminumalloy, creating a FEA-optimized base for high rigidity and thermal performance. High load recirculating ballbearings, high force linear motors, and high precision linear encoders extends the stage’s lifespan andsubstantially increases performance. With all these components and the stage’s low profile, easy integration,high repeatability, straightness, and flatness makes it ideal for industrial production, research, testing, andcalibrating.

MOTORIZED
LINEAR STAGES

6

Precision Motion Control

Dimensions

MOTORIZEDVERTICAL STAGES

MLT

1.61
41

MOTORIZEDROTATION STAGES

1.97= 50 =

4 counterbored holes for M4 screws
Thickness under screw head: 6.2 [0.24]

A

4 pads 8x12 [0.31x0.47]

0.47
12

MOTORIZEDLINEAR ACTUATORS

=L1=

0.59
= 15 =

4 threaded holes M4 - 6H 8 maxi
Same on the opposite side=B=
4 threaded holes M4 depth 4 [0.15] max
on 50x75 [1.96x2.95]
for MLT XY stack

A

1.26
32

4 threaded holes M4 depth 4 [0.15] max
on 100x75 [3.93x2.95](only on MLT100, MLT200 and MLT250 stages)

Threadedhole M5 forgrounding

4 threaded holes M3 depth 5.5 [0.21] max
on 25x50 [0.98x1.96]

2.48
= 63
=

A
75 [2.95]
75 [2.95]
75 [2.95]
150 [5.9]200 [7.87]

0.236
6
B
85 [3.35]
110 [4.33]
160 [6.29]
260 [10.2]
310 [12.2]

SPECIAL
COLLECTIONSBEAMMANAGEMENTDÉTAIL A

°

2.48
= 63
=

4 threaded holes M4 depth 4 [0.15] max
on square 55 [2.16]
for mounting directly MLTZ bracket

Model
MLT25
MLT50
MLT100
MLT200
MLT250

Pigtail cable 2.8 meters long

12.3

MOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERS

3.76
95.5

1.339
= 34 =

1.61
41

HEXAPODS

4 threaded holes M4 depth 5.5 [0.21] max
on 75x50 [2.95x1.96]

www.newport.com

4 threaded holes M4 depth 4 [0.15] max
L1
105 [4.13]
130 [5.12]
180 [7.08]
280 [11]330 [12.99]

MOTORIZED
LINEAR STAGES

Dimensions

MOTORIZEDVERTICAL STAGES

MOTORIZEDROTATION STAGESHEXAPODSCONTROLLERS
AND DRIVERS

MOTORIZEDOPTICAL MOUNTS

Number of countermass to be adjusted
according to the carried payload

A

B

BEAM
MANAGEMENTSPECIAL
COLLECTIONS

www.newport.com

MOTORIZEDLINEAR ACTUATORS

could damage the stage

7
Precision Motion Control

MLT-XYZ

couterboredSPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERS

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES

MOTORIZEDVERTICAL STAGES

MOTORIZEDLINEAR STAGES

8
Precision Motion Control

MLT-Z

could damage the stage

Number of countermass to be adjusted
according to the carried payload

couterboredA

www.newport.com

BPrecision Motion Control

9

MOTORIZEDLINEAR STAGES

Load Characteristics and Stiffness
MOTORIZEDVERTICAL STAGES
MOTORIZEDROTATION STAGESMODEL

DESCRIPTIONMODEL

DESCRIPTION

XPS-Dx

1- to 8-axis universal high-performance motion

MLT-XYPLATE*

Magnetic barrier plate for XY

controller/driver

MLT-BP

Base plate, MLT

1- to 4-axis universal high-performance motion

TR-M4M6

Inserts, set of 4

controller/driver

MLT-CMS**

Cable chain kit, MLT25, MLT50

Universal digital driver card for stepper, DC and direct

MLT-CML**

Cable chain kit, MLT100, 200, 250

XPS-RLDx
XPS-DRV11

motorsHEXAPODS

Accessories

MOTORIZEDLINEAR ACTUATORS

Recommended Controllers/Drivers* Required for XY configuration to prevent upper to lower stage disturbance** Magnetic barrier plate and 2 locating pins are included

Ordering Information
DESCRIPTION

MLT25

Low profile linear stage, 25mm

MLT50

Low profile linear stage, 50mm

MLT100

Low profile linear stage, 100mm

MLT200

Low profile linear stage, 200mm

MLT250

Low profile linear stage, 250mm

MLT25-Z

Motorized linear stage, 25 mm, vertical

MLT50-Z

Motorized linear stage, 50 mm , vertical

MLT25-XYZL

Motorized XYZ linear stage, 25 mm, left handed

MLT25-XYZR

Motorized XYZ linear stage, 25 mm, right handed

MLT50-XYZL

Motorized XYZ linear s tage, 50 mm, left handed

CONTROLLERS
AND DRIVERS

MODEL

MOTORIZEDOPTICAL MOUNTSBEAMMANAGEMENTSPECIAL
COLLECTIONS

www.newport.com

Precision Motion Control

MOTORIZEDLINEAR STAGES

10Super Agilis Series

MOTORIZEDVERTICAL STAGESCONEX-SAG-LSxx Linear Stages
Integrated with CONEX-SAG Controller•• Fast: >10 mm/s•• Compact (only 24 mm height for XY stack)•• Easy to stack and setup

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES•• Stainless steel parts•• Easy to use GUI

The Conex-SAG-LSxx are open loop piezo motor linear stages integrated with a CONEX-SAG piezo motor
controller and driver. The stainless-steel stages are fast, and the controllers come with a simple and intuitive
CONEX GUI, accessible with USB. Both the controller and stage are compact and easily integrated into any
applications that is tight on space and need sub-micron precise motion.

Specifications
Travel Range (mm)

16

32

48

Maximum Speed (mm/s)

>10

>10

>10

Stainless SteelStainless SteelStainless Steel

20

30

30

CONTROLLERS
AND DRIVERS

Material
Centered Load Capacity (N)Axial/Vertical Load Capacity (N)

2

2

2

Holding Force (N)

3

3

3

Minimum Incremental Motion (nm)

100

100

100

150

Cable Length (m)

1.5

1.5

1.5

Limit Switches

Not Available

Not Available

Not Available

Operating Temperature (°C)

10 to 35

10 to 35

10 to 35

Weight, Without Cable (g)

65

93

127

To reach specification, stage must be fixed on a plane surface with flatness of 2 µm or use SAG-BP1 plate

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTS

Pitch/Yaw

www.newport.com

Precision Motion Control

11

MOTORIZEDLINEAR STAGES
MOTORIZEDVERTICAL STAGES

Dimensions
2 HOLES M3 THD
.91
(23)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESSSAG-LS32 Stage

2 HOLES M2.5 THD,
DEPTH: .20 (5)

1.18
(30)

1.97
(50)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5) EACH SIDE:
AT .12 (3) OF THE BOTTOM SIDE 2 HOLES M3 THD
1.18
PUSH THE CARRIAGE FOR ACCESS(30)

2 HOLES M2.5 THD,
DEPTH: .20 (5)3.67(93.2)MOTORIZEDLINEAR ACTUATORS.47 .98(12) (25).47 .98(12) (25)
2.09
(53)

1.57
(40)
.79
(20)

.79
(20)

2.09 MAX.
(53 MAX.)1.42 STROKE AT .31(36 STROKE AT 8)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESSPOWER
CONNECTORS

2 HOLES M2.5 THD,
DEPTH: .20 (5)

.79
(20)

CONTROLLERS
AND DRIVERS

2 HOLES M2.5 THD,
DEPTH: .20 (5).26(6.7) .47
(12)

CABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

HEXAPODS

3.35 MAX.
(85 MAX.)
2.05 STROKE AT .63(52 STROKE AT 16).26(6.7) .47
(12)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

MOTORIZEDROTATION STAGESSAG-LS16 Stage

.79
(20)

1.57
(40)

MOTORIZEDOPTICAL MOUNTS

1.18
(30)

MODEL SHOWN: CONEX-S

DIMENSIONS IN INCHES (AND MILL
0
0

.5
10

20

SCALE 3÷4BEAM
MANAGEMENTSPECIAL
COLLECTIONS

www.newport.com

1.0

MOTORIZED
LINEAR STAGES

12

Precision Motion Control

Dimensions

MOTORIZEDVERTICAL STAGES

2 HOLES M3 THD
.91
(23)

SAG-LS48 StageCONEX-SAG Controller
1.97
(50)
2.36
(60)
1.18
(30)

4 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESSEACH SIDE:
2 HOLES M3 THD

4 HOLES M2.5 THD,
DEPTH: .20 (5)3.67(93.2).53(13.5)

2 HOLES M3 THD

MOTORIZEDROTATION STAGES

.91
(23)

.47 .98(12) (25)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESS

.79
(20)
1.97
(50)

2 HOLES M2.5 THD,
DEPTH: .20 (5)

1.18
(30)

MOTORIZEDLINEAR ACTUATORS

4.61 MAX.
(117 MAX.)
2.68 STROKE AT .94(68 STROKE AT 24)
.79

1.57
(40)

.26
(6.7) .47
(12)

2.09 MAX.
(53 MAX.)1.42 STROKE AT .31(36 STROKE AT 8).26(6.7) .47
(12)

HEXAPODSEACH SIDE:
2 HOLES M3 THD

2.09
(53)

3.67
(93.2).47 .98(12) (25)(20)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

1.97
(50)

1.57
(40)

2.09
(53)

CABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

POWER
CONNECTORSCABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

POWER
CONNECTORSMINI-USB
CONNECTORMINI-USB
CONNECTOR

2 HOLES M2.5 THD,
DEPTH: .20 (5)2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

2 HOLES M2.5 THD,
DEPTH: .20 (5)

.79
(20)
.79
(20)

MODEL SHOWN: CONEX-SAG-LS48

1.18
(30)

DIMENSIONS IN INCHES (AND MILLIMETERS)
0.5MODEL SHOWN: CONEX-SAG-LS16
DIMENSIONS IN INCHES (AND MILLIMETERS)
0
0

.5
10

Ordering Information
MODEL

DESCRIPTIONCONEX-SAG-LS16

16 mm Travel Stage & CONEX-SAG Controller

CONEX-SAG-LS32

32 mm Travel Stage & CONEX-SAG Controller

CONEX-SAG-LS48

48 mm Travel Stage & CONEX-SAG Controller

ACCESSORIESCONEX-BP

Base Plate, Mounts Multiple CONEX Controllers

SAG-BP1

Slotted Based Plate, Conex-SAG series

SAG-AB90-16

90 Degree Angle Braket, Conex-SAG Series

Conex-PS

Power Supply, 24 V- DC, Conex Motion Controller

Make a footnote to “SAG-BP1 “- Use CHC M2,5x6 scres to mount Conex-SAG-LSxx to SAG-BP1

www.newport.com

0

1.0
20

SCALE 3÷4

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERS

1.57
(40)

30

IN.
(MM)

10

1.0
20

SCALE 3÷4

IN.
30

(MM)

Precision Motion Control

CONEX-SAG-LSxxP Linear Stages
Integrated with CONEX-SAG Controller•• Compact (only 24 mm height for XY stack)

MOTORIZEDVERTICAL STAGES•• Fast: >10 mm/s

MOTORIZEDLINEAR STAGESSuper Agilis Series

13•• Easy to stack and setup•• Integrated encoder for closed loop operation•• Easy to use GUI

HEXAPODS

Specifications
Travel Range (mm)16

32

Maximum Speed (mm/s)

Stainless Steel
30
2

Holding Force (N)3Minimum Incremental Motion (nm)25

Pitch/Yaw ( µrad)150

Bi-directional repeatability(nm)CONTROLLERS
AND DRIVERS

20

Axial/Vertical Load Capacity (N)

120 ( at full stoke) /25 (in scanning mode for ~100nm steps)
1.5

Limit Switches

Not Available

Operating Temperature (°C)

10 to 35
65

93

127

MOTORIZEDOPTICAL MOUNTS

Cable Length (m)Weight, Without Cable (g)

48

>10

Material
Centered Load Capacity (N)MOTORIZEDLINEAR ACTUATORSThe Conex-SAG-LSxxP series are close loop piezo motor linear stages integrated with a CONEX-SAG piezo
motor controller and driver. The stainless-steel stages are fast, and the controllers come with a simple and intuitive
CONEX GUI, accessible with USB. Both the controller and stage are compact and easily integrated into any
applications that is tight on space and need sub-micron precise motion.

MOTORIZEDROTATION STAGES•• Stainless steel parts

To reach specification, stage must be fixed on a plane surface with flatness of 2 µm or use SAG-BP1 plate

BEAM
MANAGEMENTSPECIAL
COLLECTIONS

www.newport.com

MOTORIZED
LINEAR STAGES

14

Precision Motion Control

Dimensions
2 HOLES M3 THD

SAG-LS16P Stage
2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESS

MOTORIZEDROTATION STAGES

MOTORIZEDVERTICAL STAGES

.91
(23)

1.97
(50)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5) EACH SIDE:
AT .12 (3) OF THE BOTTOM SIDE 2 HOLES M3 THD
1.18
PUSH THE CARRIAGE FOR ACCESS(30)

2 HOLES M2.5 THD,
DEPTH: .20 (5).47 .98(12) (25)

.79
(20)

2.09
(53)

.79
(20)

2.09 MAX.
(53 MAX.)1.42 STROKE AT .31(36 STROKE AT 8)

3.35 MAX.
(85 MAX.)
2.05 STROKE AT .63(52 STROKE AT 16).26(6.7) .47
(12)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

3.67(93.2).47 .98(12) (25)
1.57
(40)

MOTORIZEDLINEAR ACTUATORSHEXAPODS

2 HOLES M2.5 THD,
DEPTH: .20 (5)

1.18
(30)

2 HOLES M2.5 THD,
DEPTH: .20 (5).26(6.7) .47
(12)

CABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESSPOWER
CONNECTORS

2 HOLES M2.5 THD,
DEPTH: .20 (5)

.79
(20)

.79
(20)

1.18
(30)

1.57
(40)

MODEL SHOWN: CONEX-S

DIMENSIONS IN INCHES (AND MIL
0
0

.5
10

1.0
20

SCALE 3÷4

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERSSAG-LS32P Stage

www.newport.com

Precision Motion Control

15

MOTORIZEDLINEAR STAGES

Dimensions

2 HOLES M3 THD.91
CONEX-SAG-P Controller(23)

MOTORIZEDVERTICAL STAGESSAG-LS48P Stage

1.97
(50)
4 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESS

2.36
(60)
1.18
(30)

EACH SIDE:
2 HOLES M3 THD

4 HOLES M2.5 THD,
DEPTH: .20 (5)3.67(93.2).47 .98(12) (25)

4 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE BOTTOM SIDEPUSH THE CARRIAGE FOR ACCESS

2.36
(60)
1.18
(30)

4 HOLES M2.5 THD,
DEPTH: .20 (5)

1.97
(50)

1.57
(40)

EACH SIDE:
2 HOLES M3 THD

2.09
(53)

3.67
(93.2)MOTORIZEDLINEAR ACTUATORS

.79
(20)
1.97
(50)

MOTORIZEDROTATION STAGES.53(13.5)

2 HOLES M3 THD
.91
(23)

.47 .98(12) (25)

4.61 MAX.
(117 MAX.)
2.68 STROKE AT .94(68 STROKE AT.79
24)
(20)
1.97
(50)

4.61 MAX.
(117 MAX.)
2.68 STROKE AT .94(68 STROKE AT 24)

2 HOLES M2.5 THD,
DEPTH: .20 (5)2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

2 HOLES M2.5 THD,
DEPTH: .20 (5).26(6.7) .47
(12).26(6.7) .47
(12)

2.09
(53)

CABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

POWER
CONNECTORSCABLE ø.09 (2.36)
LENGTH 4.9 FT (1.5 M)

POWER
CONNECTORSMINI-USB
CONNECTORMINI-USB
CONNECTOR

HEXAPODS

2 HOLES ø.11 (2.9), C’BORED ø.20 (5)AT .12 (3) OF THE TOP SIDEPUSH THE CARRIAGE FOR ACCESS

1.57
(40)

.79
(20)
.79
(20)

CONTROLLERS
AND DRIVERS

1.57
(40)

MODEL SHOWN: CONEX-SAG-LS48PDIMENSIONS IN INCHES (AND MILLIMETERS)

1.57
(40)

0

.5

MODEL SHOWN: CONEX-SAG-LS48PDIMENSIONS IN INCHES (AND MILLIMETERS)
0
0

.5
10

0

1.0
20

30

IN.
(MM)

10

1.0
20

SCALE 3÷4

IN.

30

(MM)

SCALE 3÷4MODEL

DESCRIPTIONCONEX-SAG-LS16P

16 mm Travel Stage & CONEX-SAG Controller

CONEX-SAG-LS32P

32 mm Travel Stage & CONEX-SAG Controller

CONEX-SAG-LS48P

48 mm Travel Stage & CONEX-SAG Controller

MOTORIZEDOPTICAL MOUNTS

Ordering Information

Accessories
Base Plate, Mounts Multiple CONEX Controllers

SAG-BP1

Slotted Based Plate, Conex-SAG series

SAG-AB90-16

90 Degree Angle Braket, Conex-SAG Series

Conex-BP

Base plate, multiple Conex controllers

Coex-PS

Power Supply, 24 VDC, Conex Motion Controller

1

BEAM
MANAGEMENTCONEX-BP

1) Use CHC M2,5x6 screws to mount Conex-SAG-LSxxP to SAG-BP1

SPECIAL
COLLECTIONS

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Precision Motion Control

MOTORIZEDLINEAR STAGES

16

GTS70V Series

MOTORIZEDVERTICAL STAGES

Compact, Long Travel Vertical StageCONTROLLERS
AND DRIVERS

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES• 70 mm of precision vertical travel in a compact unit
• Unobstructed access to the payload from any direction• High sensitivity, excellent repeatability and highaccuracy motion from an integrated linear or rotary
encoder

The GTS70V is a compact, long travel, and motorized vertical stage with outstanding trajectory accuracy,
excellent repeatability, high sensitivity, and precision capability ideal for applications requiring high precision andlong travel vertical motion of 70 mm. Some features that make this stage the best compared to other verticalstage are a vertical guide system composed of matched pairs of anti-creep crossed roller bearings, ripple-freemotion, and a folded DC motor with a precision ground and low-friction lead screw. The stage is easily integrated
into any applications and has a manual knob when coarse and quick adjustments are needed.
GTS70VCC

GTS70V

Rotary Encoder

Linear Encoder

70

70

Travel Range (mm)(1)
Minimum Incremental Motion (µm)

0.25

0.1

Bi-directional Repeatability (µm)

±0.5

±0.2

Accuracy (µm)

±1.75

±1

Maximum Speed (mm/s)

5(2)

10

Centered Load Capacity (N)7040Straightness, Flatness(µm)±5±5Pitch/Roll (µrad) (3)±80

MOTORIZEDOPTICAL MOUNTSMTBF (h)±80

20,000 hours at 25% load and with a 30% duty cycle

1) GTS30V: -5 to+25mm
GTS70V: 0 to +70mm, when driven by ESP302 and XPS and -5 to +65 mm, when driven by SMC100CC
GTS70VCC: 0 to +70mm2) 10 mm/s, if used with 40 N payload3) To obtain arcsec units, divide µrad value by 4.8

Z

SPECIAL
COLLECTIONSBEAMMANAGEMENT

Load Characteristics and Stiffness
Cz, Centered load capacity

Cz

GTS70V

GTS70VCC

40 N

70 N

Kax, Compliance in roll

8 µrad/Nm

Kay, Compliance in pitch

33 µrad/NmD

Kaz, Compliance in yaw

50 µrad/Nm

Q, Off-center load (N)Q <Cz ÷ (1 + D/30)

kαx

Q

y
kα

X

kαz

.51
(13)

.75
)
(19

Y

Where D = Cantilever distance (mm) and DMAX. = 100 mm

www.newport.com

Cz,

Normal centered load capacity

Kαx,

Compliance in roll

40 N
40 µrad/Nm

Precision Motion Control

17

MOTORIZEDLINEAR STAGES

Dimensions
3.94
(100)
2.95
(75)

8 HOLES M6 THD
DEPTH: .31 (8)8 HOLES M4 THD
DEPTH: .31 (8)MOTORIZEDVERTICAL STAGESSQR 3.97(100.8) 2.95
(75)

2.95 3.94(75) (100)5°

MOTORIZEDROTATION STAGES

6 HOLES M4 THD
ON ø3.62 (92)
DEPTH: .31 (8)

1 HOLE ø.24 (6)DEPTH: .24 (6)SUB-D25M
CONNECTOR

MOTORIZEDLINEAR ACTUATORSDIMENSIONS IN INCHES (AND MILLIMETERS)SQR 5.35
(136)

3.58
(91)

(160 +65-5 )HEXAPODS

6.30 +2.56-.20

4 HOLES ø.31 (7.8)
C’BORED ø.47 (12).39 (10)SQR 3.97(100.8)SQR 5.35(136)

DESCRIPTION

XPS-Dx

1- to 8-axis universal high-performance motion controller/driver

XPS-DRV11

Universal digital driver card for stepper, DC and direct motors

XPS-RLDx

1- to 4-axis universal high-performance motion controller/driver

ESP302-Nx

1- to 3-axis motion controller/driver

SMC100CC

Single-axis DC motor controller/driver

Ordering Information
MODEL

DESCRIPTION

GTS70VCC

High Precision Vertical Stage, Rotary Encoder, 70 mm Travel

GTS70VHigh Precision Vertical Stage, Linear Encoder, 70 mm Travel

BEAM
MANAGEMENTMODEL

MOTORIZEDOPTICAL MOUNTS

Recommended Controllers/Drivers

CONTROLLERS
AND DRIVERS

.67
(17)

SPECIAL
COLLECTIONS

www.newport.com

Precision Motion Control

MOTORIZEDLINEAR STAGES

18

RGA 150 Series

MOTORIZEDVERTICAL STAGESLow Profile Rotation Stage

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES• Fast rotation, low profile, large aperture• All steel construction for high stiffness andthermal stability• Non-migrating ball cage design• Plug and Play - ESP compatibility

The RGA150 low-profile and large aperture rotary stage addresses the need for quick angle adjustments ofwafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150 can
also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing,automation or any general positioning application that requires fast positioning.
Also available in high accuracy version (RGA150MAP).

Specifications
RGA150Travel range (deg)360 continuous

CONTROLLERS
AND DRIVERS

Minimum Incremental Motion typical(1)(3)(mdeg)±0.035Bi-directional repeatability, typical (1)(3) (mdeg)±0.0975

Accuracy, typical (guaranteed)(1)(3)(mdeg)

Mapped accuracy, guaranteed (1)(3)(4) (mdeg)
Maximum speed(3)(deg/s-rpm)

MOTORIZEDOPTICAL MOUNTS

Static Bearing Drag Torque±4 (±8)±1
1800

Inertia (no load) (kg.m2)

0.0062(5)(N.m)

Dynamic Bearing Drag Torque (5) (N.m/deg/s)

0.4
0.001

(µrad)±12 (±26)

Ecentricity, typical (guaranteed) (1) (µm)±0.5 (±1)

MTBF (1800 deg/s, 25% load capacity, 30% duty cycle) (h)20,000Wobble, typical (guaranteed)(1) (2)

1) For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial at www.newport.com
2) To obtain arcsec units, divide µrad value by 4.8
3) With XPS-DRV11 Drive, maximum value is driver dependant. Contact Newport for additional information
4) Require ordering RGA150MAP
5) Total Drag Torque = 0.4 + Speed/1000

SPECIAL
COLLECTIONSBEAMMANAGEMENT

0.01

Uni-directional repeatability, typical (1)(3) (mdeg)

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Precision Motion Control

19

MOTORIZEDLINEAR STAGES

Dimensions

MOTORIZEDVERTICAL STAGES
MOTORIZEDROTATION STAGES
MOTORIZEDLINEAR ACTUATORSHEXAPODS

Load Characteristics and Stiffness

Characteristics
and Stiffness
LoadLoad
Characteristics
and Stiffness

Description

XPS-Dx

1- to 8-axis universal high-performance motion controller/driver

XPS-DRV11

Universal digital driver card for stepper,
DC and direct motors

Ordering Information
Description

RGA150

Low profile fast rotation stage

RGA150MAP

Low profile fast rotation stage, mapped

www.newport.com

SPECIAL
COLLECTIONS

Model

BEAM
MANAGEMENTModel

MOTORIZEDOPTICAL MOUNTS

Recommended Controllers/Drivers

CONTROLLERS
AND DRIVERS

RGA150
RGA150Cz, Normal
centeredload capacity 50 (N) 50 (N)Cz, Normal
centeredload capacityk, Transversal
compliance
5 (µrad/Nm)k, Transversal
compliance
5 (µrad/Nm)
Max, transverse
dynamic
moment 11 (Nm)
11 (Nm)Max, transverse
dynamic
momentMz, Maximum@ 0 deg/s 2.25 (Nm)
2.25 (Nm)Mz, Maximum
torquetorque@ 0 deg/s
Q, Off-center
QCz(1+D/55)
Q, Off-centerload load
QCz(1+D/55)
WhereWhere
D=Cantilever
distance
D=Cantilever
distancein mmin mm

Precision Motion Control

MOTORIZEDLINEAR STAGES

20

831X Series

Picomotor Actuators

MOTORIZEDVERTICAL STAGES•• Built-in rotary encoder for closed-loop operation•• Forward/reverse limit switches (8310CE)•• <30 nm minimum incremental motion•• 22 N axial load capacity

8310CE
8311•• Easy-to-use flexible motion controller/drive•• Easy integration with standard sized 0.375-inch shank

The 8311 is a compact closed-loop picomotor actuator that has exceptional accuracy, easy-to-use controls, andable to easily integrate into any applications. They are ideal for applications that need closed-loop control andabsolute position calibration with their built-in rotary encoder and manual knob. The 8311 has high accuracy andposition calibration in closed-loop operations because it will adjust the motor to the precise requested encoder
count and then stop motion when it moves to a specified location, achieving zero count encoder error
8310CEThe 8310CE is a closed loop picomotor actuator that has exceptional accuracy, easy-to-use controls, and able toeasily integrate into any applications. They are ideal for applications that need closed-loop control and absolute
position calibration with their built-in rotary encoder and limit switches. The 8310CE has high accuracy andposition calibration in closed-loop operations because it will adjust the motor to the precise requested encoder
count and then stop motion when it moves to a specified location, achieving zero count encoder error.
With 8743-CL you can control two 8310CE, two 8311 or one of each making it possible to build a system
incorporating multiple closed-loop Picomotor actuators at the same time on the same control network.
The closed-loop Picomotor actuator can be integrated into most of our optomechanical mounts and is compatible
with our translation stages. Please call us for more information on customized orders.

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSCONTROLLERS
AND DRIVERS

HEXAPODSMOTORIZEDLINEAR ACTUATORSMOTORIZEDROTATION STAGES•• Set-and-forget long-term stability

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Precision Motion Control

MOTORIZEDLINEAR STAGESSpecifications
8310CE8311±1 μm Over Full Travel

N/A(from either direction)
Uni-Directional Repeatability±0.5 μm Over Full Travel (from same direction)

Speed (@ 2 kHz pulse rate)

1.2 mm/min (20 μm/s typical)

Closed loop Settling Time<100 ms with 8743-CL Controller

Closed loop Steady-State Error

0 counts with 8743-CL Controller
52.9 nm per encoder count (1)49.6 nm per encoder count (2)Yes/Yes

No/No

Limit Switches: Forware/Reverse
Connector Type: One Each

15-Pin High-Density D-sub and 4-Pin RJ-22

Survival Temperature Range (non-operating)-30 to +85 °C

Mounting

0.375” (9.5 mm) ShankLinear Travel0.50” (12.7 mm)<30 nmAngular Resolution<0.6 mrad

Maximum Load

5 lbs (22 N)

Torque2.5 oz-in (0.018 N·m)

Operating Temperature

10–40 °C

Lifetime

1 Billion Steps (3)Cable Length

6 Feet, Both Cables

CONTROLLERS
AND DRIVERS

Dimensions

HEXAPODS

The encoder resolution is 1500 cycles per revolution, and with quadrature encoding this results in 6000 counts per revolution. With the 80-pitch (80 turns per inch) screw sets usedin the Model 8310CE, this results in an encoder resolution of 52.9 nm per encoder countThe encoder resolution is 6400 counts per revolution. With the 80-pitch (80 turns per inch) screw sets used in the Model 8311, this results in an encoder resolution of 49.6 nm per
encoder count.
Lifetime is tested by cycling actuator out 1 mm of travel range and back pushing a 5 lb load.

MOTORIZEDLINEAR ACTUATORS

Minimum Incremental Motion

3)

MOTORIZEDROTATION STAGES

Encoder Resolution

2)

MOTORIZEDVERTICAL STAGES

Bi-Directional Repeatability

1)

21

8310CE - Closed-loop Picomotor

3.36[85,3]MOTORIZEDOPTICAL MOUNTS

6 FOOT POWER CABLE WITH
RJ-22. 4-PIN CONNECTORNOT SHOWN FOR CLARITY
3/8-40 UNS-2A+,00
9,50 - ,05.25 [6,4] MIN.33 [8,3] MAX

1.49 [37,7]
1.15 [29,2]

8310CE - Closed-loop Picomotor
0.5 in. Travel

www.newport.com

Ø .55 [14,0]
RETAINING NUT

1.64 [41,5]
6 FOOT CABLE WITH
DB15HD MALE CONNECTORSPECIAL
COLLECTIONS.67[17,0].50[12,7]BEAM
MANAGEMENT+.000.374 - .002

0.78 (19,8) MIN
1.03 [26,2] NOM
1.28 (32,6) MAX

Precision Motion Control

8311 - Closed-loop Picomotor

MOTORIZEDVERTICAL STAGES

MOTORIZEDLINEAR STAGES

22

3.58 90.9
2.02 51.3.374 9.50.64 16.4

DB15HD
CONNECTOR
MOTORIZEDROTATION STAGES.95 24.2

1.27 32.2

RETAINING NUT
3/8-40 UNS-2A THD.
PICOMOTOR CABLE
LENGTH 6 FT.

MOTORIZEDLINEAR ACTUATORSENCODER CABLE
LENGTH 6 FT.

RJ-22 4-PIN
CONNECTOR.80 20.3 MIN.
1.30 [33] MAX.

.24 6

.23 5.8 TYP.

HEXAPODS.63 16.33 8.3.188 5.24 6.1

CONTROLLERS
AND DRIVERS

8311 - Compact Closed-loop Picomotor
0.5 in. Travel

Recommended Controllers/Drivers
8743-CL

2-axis closed-loop intelligent motion controller/driver8745-PS

Power Supply, 8742 and 8743-CL Controller/Driver, 12V

Ordering Information
MODEL

DESCRIPTION

8310CE

Closed-loop Picomotor actuator

8311

Compact Closed-loop Picomotor actuator

SPECIAL
COLLECTIONSBEAMMANAGEMENTMOTORIZEDOPTICAL MOUNTSMODELDESCRIPTION
Unless otherwise noted, dimensions
are in inches with metric dimensions in mm in brackets

www.newport.com© 2020 MKS Instruments Inc., All rights reserved

Precision Motion Control

23

MOTORIZEDLINEAR STAGESESP302-GPIB-ADPT

ESP302 Controller Adapter•• IEEE-488 (GPIB) to Serial converter•• Diagnostics LEDs to know the status•• CE and UKCA certified

MOTORIZEDVERTICAL STAGES•• 2 operations modes: Data and Command•• The ESP302-GPIB-ADPT permits to control the
ESP302-xN from a GPIB controller.

5.65(143.5)

ESP302-GPIB-ADPT

Size

Recommended Controllers
5.6” L x 3.4” W x 1.0” H (13.97cm L x

1 lbs. (0.45 kg.)

Operating Temperature-10° C to +55° C

Storage Temperature-20° C to +70° C

Humidity

0-90% RH without condensation

ESP302-2N

Motion Controller & Driver, 1-Axis,
Ethernet, RS232
Motion Controller & Driver, 2-Axis,
Ethernet, RS232
Motion Controller & Driver, 3-Axis,
Ethernet, RS232

100-240 Vac @ 0.05 Ampere with

20240 female with metric studs
RS-232 Interface: Cinch DE-9P withlock studs
4,096 bytes

Baud rate

19200

Order Information
MODEL

DESCRIPTION

ESP302-GPIB-ADPTGPIB to Serial Adaptor for ESP302

ESP302-CAB-1.2

www.newport.com

Serial Cable Adapter, Serial Port toRS232, 1.2 m

SPECIAL
COLLECTIONS

Input buffer size

BEAM
MANAGEMENT

power adapter
IEEE 488 Interface: Amphenol 57-

Connectors

ESP302-3N

Description

MOTORIZEDOPTICAL MOUNTSESP302-1N

Weight, including adapter

Power

MODEL

8.38 cm W x 2.54 cm H)

CONTROLLERS
AND DRIVERS

Specifications

HEXAPODS

3.58(90.9)

1.12(28.5)MOTORIZEDLINEAR ACTUATORS

6.19(157.3)

Dimensions

MOTORIZEDROTATION STAGESThe ESP302-GPIB-ADPT GPIB to Serial adapter is an add-on to be used with ESP302 controller that permits
communication from customer’s GPIB controller to the ESP302 serial interface.
An ESP302-CAB-1.2 cable (sold separately) is needed to connect the ESP302-GPIB-ADPT to the serial port of
ESP302 controller.
The product is not supplied with a GPIB Cable.

24

Precision Motion Control

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www.newport.com