Fine System Components

For Semiconductor, LED, FPD
Manufacturing Processes
Ultra High Purity

For Manufacturing Improvements

CC-1394A 1

Evolution

Evolution

Evolution of Fine System components
CKD has long worked to achieve high precision, quality stability, and high purity of semiconductor
manufacturing processes through "technology that has accumulated since the 1980s", "a preference
toward integrated production of core parts", and "thoroughly managed manufacturing processes".

ManualFMD

ProducRe
gulatorsystemProportional controlElectr
ic vacuumvalve

Vacuumcon prestro surl sy estemvalve
Airoperated

N2 controller
AVB Part7

Needle valve
MFGD
Check valve
MCGP

IAG
Daccessorycom
ponents

FMGBPGMAMS

IAGD5
Initial (VEC)AVB Part5
IAGD4

IAGD3

AVB Part3

IAGD2

AGD-V
AGD Part2

AVB Part2

IAGD1

PYM/PMM

1985
1

N2
controlComponent

Int
egrat
ed

High speed

AGD-R

Valve for liquid supply
AMD_H

EVB

AGD21R-A

AMB

1943

Renewal type(VEC-R)

Clean panel
FSP

Polyvinyl chloride valve
AMD_L

IAVB

IAGD7

AMDPart3R

AMD Part11990

LGD

AGD-HD

Dri
pp
rev
ent
ionvalve

ith imh er w
toget
ts ev
olve

2000

tedvalve

AGD-HDFPMP

AMD Part2TPB

Motorized
MNV

gaunitssup
plysystemtor proces

2010

Gas
flow
rate
diag
nos
tic

MMD003RN

PGM-2HHig
hig h temhpe
Air durabilityrature/
opevalv
era

Flow
rate
adju
stin
g valve

Valve

PMP002

ses

2020

Re
gu
lat
orRe
finem
prov
of ent aem e
cir ndnts icun sem
it w layer
irin ing
icongduc

For the future, we intend to continue providing customers with "ease of use" functionality.

Solenoid valve for chemical liquid
EMB

ChemicalJapan Aircraft Electric Co., Ltd. Established

AGD

Gas

Solenoid valve for high vacuum
HVB

AVB

CKD Fine System Components
Special SiteVacuum2

Total Supplier

Total Supplier

As a total supplier of the semiconductor manufacturing process
We provide total solutions for chemical liquid, gas, vacuum and air pressure controls, fromthe semiconductor device production facility to the production process. We provide our customers
with "ease of selection".

Gas

ChemicalFluid System

Etching
Chemical

Total FA Worldwide Supplier

EtcherGas
VacuumResist Stripping
ChemicalVacuumUsher

Gas
VacuumCleaning
ChemicalGas

Planarization
Wet cleaning
equipment

ChemicalCMP

Gas
VacuumVacuumDeposition
ChemicalGas
VacuumResist coating
ChemicalCoater

CVD
ALD
PVD
Diffusion furnace
Oxidizing furnace
Nitriding furnace
Spatter

Ion Plantation
ChemicalGas
VacuumAnnealing
Chemical

Gas

Gas

VacuumVacuumExposure
ChemicalDeveloping
Chemical3

Ion implantationequipment

Annealer

Chemical Supply

Stepper

ChemicalGas

Gas

VacuumVacuumGas SupplyDeveloperChemicalGas

Gas

VacuumVacuum4

Product Lineup

Product LineupGas

A Dry Fine system that contributes to ultra precise control of gases including inert gases.

Fine System component products
ChemicalValve

Regulator

Air operated valve

Air operated valve/manual valve

Regulator

AGD

LGD

PGM

» A new variation of valve forprocess gases.

» A regulator for processgases with a metal
diaphragm.
» Contributes to thestabilization of gas
pressures and flow rates.

(high temperature/high durability)

Chemical Process

A wet fine system that offers super clean control for chemical liquid, pure water, and slurries.

Valve
Air operated valve

Air operated valve (metal-free)

Air operated valve (for high pressure)

AMD**3R

AMD*1M

AMD*1H» Standard type of air-operatedvalves for chemical solutions.
» High grade model for a wide
range of pressure, temperature,and fluid conditions.
» It is possible to unify all the models
that have been subdivided in usage.

» Thoroughly eliminates metal partsand supports highly corrosive andpermeable strong acid (hydrochloricand hydrofluoric acid) lines.
» Plant sub fab facilities provide
safe chemical liquid supply.

» A valve that supports highpressure, high back pressure
and / for passing large flow ratechemical liquids.
» Achieves safe chemical liquid supply
from the plant sub fab facility.

» A valve for process gases
compatible with high durability
required for improving refinement.
» A line up with 3 types, suited to thecustomer's various needs.

Air operated valve

Manual valve

Manual valve

AGD

OGD

MGD

» A mainstay valve forprocess gases.
» Compatible with many
variations, including discrete
unit, integrated, 3-way valve,
double 3-way valve, etc.

» A 90° rotation snap
action manual valve.

» Manually operatedvalve.
» 270° rotation handle
opening and closing
type.

SystemSystem function products

Air operated valve (manifold)

Manual valve for chemical liquids

Manual valve (metal-free)Integrated gas supply system

Clean panel

Flow rate diagnostic unit

Vacuum generator

GAMD**3R

MMD*03RN

MMD*0M

IAGD5FICS

TPBVG» Space saving with AMD**3R
manifold with reduced piping
components.
» It can be used for branching
and mixing of chemical liquids
by customizing the shape andaccess.

» Standard manual valve for chemicalliquids.
» High pressure / high temperature support
enables process sophistication.
» Prevents malfunctions and misoperation,
reducing leakage risk.

» A pressure gas supply systemthat saves space and has
improved maintainability.
» Compatible with everything fromdesign to manufacturing to suitthe customer's required flow.
1.125", double seal supported.

Manual valve for chemical liquids (manifold)» CKD guarantees that
this unit is designed,manufactured,and inspected
to be suited forthe customer'srequirements andflow.

» High precision gas flowrate / Quick monitoring.
» Quick measurement of 2 to60 secs/line enables early
detection of abnormalities.
» Contributes to stabilizationof the equipment operatingprocess.

» An energy saving
vacuum exhaust
device. A vacuum
generator for exhaustof process gases.
» Nozzle diameter:ø0.5.

Manual valve (for high pressure)» Thoroughly eliminates metal partsand supports highly corrosive andpermeable strong acid (hydrochloricand hydrofluoric acid) lines.
» Achieves safe chemical liquid supply
from the plant downstairs facility.
» Prevents malfunctions andmisoperation, thereby reducing risk.

MMD*0H

GMMD**3RN» A valve that supports high pressureand high back pressure for chemicalliquids with large flow rates.
» Achieves safe chemical liquid supply
from the plant downstairs facility.
» Prevents malfunctions andmisoperation, thereby reducing risk.

» Space saving with MMD**3RN
manifold and reduced pipingcomponents.
» Reliable operation is possible
while ensuring safety, such as
in a sampling line for chemicalliquids.

VacuumPilot operated regulator

Valve
Air operated valve

Manually operated regulator

PMP

PYM/PMM» Space saving type PMP002
Series added.
» Remote control is also possible
by combining with an electro
pneumatic regulator.

» A manually operated regulator
for pressure control of purewater, etc.

System components
Manual valve

Pressure control system

Proportional control system

AVB

MVB

IAVB

VEC-R

» Achieves long service lifeand high durability witha special structure thatemploys CKD's proprietary
molded bellows.
» A high vacuum valve that is
highly reliable and easy touse.

» A manual valve forhandle rotary highvacuum.
» Aluminum body,stainless steelbody.

» Has pressure control
that enables a variety
of processes withthe same reliability
as conventional highvacuum valves.

» APC system for highprecision high vacuum
proportional control.
» More compact andlightweight.

Fluid System Auxiliary Components

Flow rate adjusting valve
Manual flow rate adjusting valve

Vacuum Process

A high vacuum control component that enables high precision exhaust and pressure control for chambers, etc.

Regulator

Electric flow rate adjusting valve

Manual fine flow rate adjusting valve

FMDMNV

LYX» Manual flow rate adjusting valve(needle valve).
» The wetted parts use fluoro resin
to enable use even with highly
corrosive fluids (hydrochloricacid, / hydrofluoric acid).
» Enables precise flow rate adjustment.

» Motorized flow rate adjusting
valve (needle valve).
» The set flow rate can bechanged by remote operation.
» Downsizing and more compact.

» Manual flow rate adjusting
valve (needle valve) capable ofadjusting ultra-low flow rates.

Drip prevention valve

Integrated air operated valve/suck valve

Fine level switchAMSAMDSKML» Uniform resist coating is realizedby suppressing disturbances
or dripping of chemical liquiddischarge.
» Compatible with optimized
custom-made designs for fluid
viscosity.

» Uniform resist coating is realized bysuppressing disturbances or dripping ofchemical liquid discharge.
» Compatible with optimized custom-madedesigns for fluid viscosity.
» An integrated air operated valve that's been
downsized and reduces steps in piping.

» Detects the surface level of various fluids
such as pure water, acids, alkalines, andsolvents with high accuracy and outputs
it as an electrical signal.
» The pneumatic system is resistant
to chemical liquid atmospheres andenvironments containing foreign matter.

Other

5Gas Process

Contributes to semiconductor manufacturing with high-precision control systems for supply air and cooling water.

Flow rate sensor
Flow rate sensor for water

Integrated unit for water control

Flow rate sensor for gas RAPIFLOW®

WFK2

WXU

FSM3

» Received the 2018 Good DesignAward.
» 0.4 to 250 L/min covered
Karman Vortex Flow Sensor.
» Used for flow rate andtemperature management ofcooling water.

» Integrated flow sensor andvalve in cooling water circulation
circuit.
» Space saving with significant
reduction in piping work-hours
and 80% reduced footprint.

» A flow rate sensor that supports five types ofgases with one unit, including air, nitrogen,argon, carbon dioxide, and mixed gas.
» Lineup includes clean specification, stainlesssteel body specification, and specification
with flow rate adjustment for semiconductor
related purging applications.

Valve

Regulator

Pilot operated 3, 4-port solenoid valve

Direct acting 3-port solenoid valve

Electro-pneumatic regulator

MN3E/MN4E

3QRA/B

EVS2» Realizes the industry's smallest
valve block width (7 mm), and acompact height (39.5 mm).
» High performance 3, 4-port
block manifold.
» For driving air operated valves.

» Achieves high-speed switching for large
flow rate, contributing to increased
equipment speeds and optimization.
Industry top-class durability (100 millioncycles) and lightweight (19 g).
» Ideal for high-speed drive of hightemperature, high-durability gas valves.

» Electro-pneumatic regulator
with 30mm width, compact, lightweight, and high performance.
» Pilot regulator for chemicalliquids (PMP Series) canbe remotely controlled.

6Production & Technology Network
For Fine System Components

Kasugai Plant

Kasugai, Aichi, Japan
Chemical

Hokuriku Plant(Planned for completion in 2024)

Komatsu City, Ishikawa Prefecture

Gas
VacuumOther plants in Japan:
Komaki Plant, Yokkaichi Plant, Inuyama Plant

Tohoku Plant

Kurokawa, Miyagi, Japan
Chemical

Korea Plant

Gas

Siheung-si, Gyeonggi-do, Korea

VacuumChemicalGas
VacuumChina Plant

Wuxi, Jiangsu, China

United States
Technical Center

ChemicalGas

Santa Clara, CA

VacuumTaiwan Technical Center
Hsinchu

USA Austin
ManufacturingAustin, TX

2022.11